JP2019110268A - Dividing device - Google Patents

Abstract

Provided is a dividing device capable of suppressing a component of a generated gas generated from an expanded sheet when heated from attaching to a surface of a workpiece. A frame fixing portion for fixing an annular frame of a workpiece unit, and an annular area of the expanded sheet are pressed in a direction orthogonal to the workpiece to expand the expanded sheet. A sheet extending unit for breaking the workpiece 1, a heating unit 60 for heating and contracting the expanded annular region 101 of the expanded sheet 7, and a supply supplied to the surface of the workpiece 1 during heating of the expanded sheet 7. A gas supply unit 70 that covers the surface of the workpiece 1 with the gas 150 and shields the workpiece 1 from the generated gas 160 generated from the expanded sheet 7, and generates the generated gas 160 and the supplied gas 150 on the outer periphery of the workpiece 1. And a suction and exhaust unit 80 for sucking and discharging. [Selection diagram] FIG.

Description

  The present invention relates to a dividing device for dividing a workpiece into individual chips.

  In general, an expanded sheet (dicing tape) is formed by irradiating a laser beam to a workpiece (wafer) having a device formed on the surface, forming a modified layer inside along a planned dividing line, and sticking the workpiece. A processing method is known in which the modified layer is divided into individual chips at break points by expanding. Since this type of processing method expands the expanded sheet on the outer periphery of the wafer, the expanded sheet becomes loose after expansion, and the distance between expanded chips gradually narrows, or the expanded sheet is shaken during transport and causes chipping due to chip rubbing. It becomes. Therefore, a processing technique and a dividing device (see, for example, Patent Document 1) for heating and shrinking the expanded sheet that has been expanded and slacked have been developed.

Patent No. 579 1 866

  However, in the conventional method, when the expanded sheet is heated, a gas is generated from the expanded sheet, and the component of the generated gas may be attached to the surface of the workpiece (each chip).

  The present invention has been made in view of the above, and it is an object of the present invention to provide a dividing device capable of suppressing adhesion of a component of generated gas generated from an expanded sheet to the surface of a workpiece when heated. Do.

  In order to solve the problems described above and to achieve the object, the present invention provides a plate-like workpiece having a split starting point formed along a planned dividing line, and an expanded sheet to which the workpiece is attached. A split device for expanding the expanded sheet of a workpiece unit comprising an annular frame to which the outer periphery of the expanded sheet is stuck, and breaking the workpiece, the annular frame of the workpiece unit The expanded sheet is expanded by pressing the frame fixing portion for fixing the ring, the outer periphery of the processed object, and the annular region of the expanded sheet on the inner periphery of the annular frame in a direction orthogonal to the processed object A sheet expansion unit for breaking the workpiece from a starting point, a heating unit having a heating unit for heating and shrinking the annular area of the expanded sheet, and the expand During the heating of the heater, a gas is supplied to the surface of the workpiece, the supply gas covers the surface of the workpiece, and the gas is supplied to shield the workpiece from generated gas generated from the expanded sheet. And a suction and exhaust unit for suctioning and exhausting the generated gas and the supplied gas around the periphery of the workpiece.

  According to this configuration, the gas is supplied to the surface of the workpiece during heating of the expanded sheet, the surface of the workpiece is covered with the supplied gas, and the workpiece is shielded from generated gas generated from the expanded sheet. Since the gas supply unit and the suction and exhaust unit for sucking and discharging the generated gas and the supplied gas around the periphery of the workpiece, the component of the generated gas generated from the expanded sheet when heated is the surface of the workpiece Can be suppressed from adhering to

  In this configuration, the suction port of the suction and exhaust unit may be disposed facing the annular region and adjacent to the heating unit. According to this configuration, since the generated gas generated by the heating of the heating unit is quickly sucked through the air inlet adjacent to the heating unit, it is effective that the component of the generated gas adheres to the surface of the workpiece. Can be suppressed.

  According to the present invention, during heating of the expanded sheet, a gas is supplied to the surface of the workpiece to cover the surface of the workpiece with the supplied gas and shield the workpiece from generated gas generated from the expanded sheet. Since the gas supply unit and the suction and exhaust unit for sucking and discharging the generated gas and the supplied gas around the periphery of the workpiece, the component of the generated gas generated from the expanded sheet when heated is the surface of the workpiece Can be suppressed from adhering to

FIG. 1 is a perspective view showing an example of a workpiece to be processed by the dividing device according to the present embodiment. FIG. 2 is a perspective view showing an example of a workpiece unit provided with the workpiece shown in FIG. FIG. 3 is a perspective view showing a configuration example of the dividing device according to the present embodiment. FIG. 4 is a schematic cross-sectional view showing a configuration example of the dividing device. FIG. 5 is a perspective view showing an arrangement configuration example of the heating unit of the heating unit and the exhaust unit of the suction and exhaust unit. FIG. 6 is a schematic cross-sectional view of the dividing device showing a state in which the expanded sheet is expanded by raising the sheet expansion unit. FIG. 7 is a schematic cross-sectional view of the dividing device showing a state in which the sheet expansion unit is lowered after expanding the expanded sheet. FIG. 8 is a schematic cross-sectional view of the dividing device showing a state in which the annular area of the expanded sheet is heated and contracted.

  A mode (embodiment) for carrying out the present invention will be described in detail with reference to the drawings. The present invention is not limited by the contents described in the following embodiments. Further, the components described below include those which can be easily conceived by those skilled in the art and those which are substantially the same. Furthermore, the configurations described below can be combined as appropriate. In addition, various omissions, substitutions, or modifications of the configuration can be made without departing from the scope of the present invention.

  The dividing device according to the present embodiment will be described based on the drawings. FIG. 1 is a perspective view showing an example of a workpiece to be processed by the dividing device according to the present embodiment. FIG. 2 is a perspective view showing an example of a workpiece unit provided with the workpiece shown in FIG. FIG. 3 is a perspective view showing a configuration example of the dividing device according to the present embodiment. FIG. 4 is a schematic cross-sectional view showing a configuration example of the dividing device. FIG. 5 is a perspective view showing an arrangement configuration example of the heating unit of the heating unit and the exhaust unit of the suction and exhaust unit.

  In the present embodiment, the workpiece 1 shown in FIG. 1 is divided into individual chips. The workpiece 1 is a disk-shaped semiconductor wafer or an optical device wafer using silicon, sapphire, gallium arsenide, SiC (silicon carbide) or the like as the substrate 2. As shown in FIG. 1, in the workpiece 1, the devices 4 are formed in the respective regions of the surface 5 divided by the plurality of planned dividing lines 3 intersecting with each other. In the workpiece 1, the expand sheet 7 is attached to the back surface 6 on the back side of the front surface 5, the annular frame 8 is attached to the outer periphery of the expand sheet 7, and the substrate 2 has permeability from the back surface 6 side. A laser beam of a wavelength is irradiated along the dividing line 3 to form a modified layer 100 (indicated by a dotted line in FIG. 2) which is a dividing starting point along the dividing line 3 inside the substrate 2. The modified layer 100 means a region in which density, refractive index, mechanical strength, and other physical characteristics are different from those in the surrounding region, and a melt processing region, a crack region, and a dielectric breakdown region. , Refractive index change regions, and regions in which these regions are mixed can be exemplified. Further, in the present embodiment, the modified layer 100 is formed as the division starting point, but instead of the modified layer 100, a laser processing groove, a cutting groove or the like may be formed.

  As shown in FIG. 2, the workpiece 1 on which the modified layer 100 is formed along the planned dividing line 3, the expanded sheet 7 attached to the back surface 6 of the workpiece 1, and the outer periphery of the expanded sheet 7. The annular frame 8 to which is attached constitutes the workpiece unit 9. That is, the workpiece unit 9 includes the workpiece 1, the expanded sheet 7, and the annular frame 8. The expanded sheet 7 is made of a resin having stretchability, and has heat shrinkability that shrinks when heated.

  The dividing device 10 according to the present embodiment is a device for dividing the workpiece 1 on which the reforming layer 100 is formed into individual device chips (chips) along the planned dividing line 3. As illustrated in FIG. 3, the dividing device 10 includes a chamber 20, a holding table 30, a frame fixing unit 40, a sheet expansion unit 50, a heating unit 60, a gas supply unit 70, and a suction and exhaust unit 80. And a control unit 96.

  The chamber 20 is formed in the shape of a box whose top is open. The chamber 20 accommodates the holding table 30, the frame mounting plate 41 of the frame fixing unit 40, and the sheet expansion unit 50.

  The holding table 30 has a holding surface 31 for sucking and holding the workpiece 1 of the workpiece unit 9 through the expanded sheet 7. The holding table 30 is in the shape of a disk, and is a disk-shaped adsorption formed of a disk-shaped frame 32 made of metal such as stainless steel and a porous material such as porous ceramic and surrounded by the frame 32. And 33. The upper surfaces of the frame body 32 and the suction portion 33 are disposed on the same plane, and constitute a holding surface 31 for sucking and holding the workpiece 1. The adsorption portion 33 has substantially the same diameter as the workpiece 1. In the present embodiment, the workpiece unit 9 is transported to the holding table 30 in a state of being adsorbed by the transport unit 95.

  As shown in FIG. 4, the back surface 6 side of the workpiece 1 is placed on the holding surface 31 of the holding table 30 via the expanded sheet 7 of the workpiece unit 9. In the holding table 30, the suction unit 33 is connected to the vacuum suction source 34, and the suction unit 33 is suctioned by the vacuum suction source 34, so that the back surface 6 side of the workpiece 1 is held by suction on the holding surface 31. It is possible.

  The frame fixing portion 40 fixes the annular frame 8 of the workpiece unit 9. The frame fixing portion 40 includes a frame mounting plate 41 and a frame pressing plate 42. As shown in FIG. 3, the frame mounting plate 41 is formed in a plate shape in which an opening 411 having a circular planar shape is provided, and an upper surface 412 is formed flat in parallel with the horizontal direction. The inner diameter of the opening 411 of the frame mounting plate 41 is formed slightly larger than the inner diameter of the annular frame 8. The frame mounting plate 41 has the holding table 30 disposed in the opening 411, and the opening 411 is disposed coaxially with the holding table 30. Further, piston rods 431 of the air cylinder 43 are attached to the four corners of the frame mounting plate 41, and the piston rods 431 are disposed so as to be movable up and down by expansion and contraction. The frame mounting plate 41 is provided horizontally movable at four corners of the upper surface 412, and adjusts the position of the annular frame 8 by moving in the horizontal direction to adjust the position of the annular frame 8 so that the workpiece 1 is held by the suction portion of the holding table 30. A centering guide 44 is provided for positioning at a position coaxial with 33.

  The frame pressing plate 42 is formed in a plate having substantially the same size as the frame mounting plate 41, and a circular opening 421 having the same size as the opening 411 is provided at the center. The frame pressing plate 42 is attached to the tip of the piston rod 451 of the air cylinder 45, and the piston rod 451 expands and contracts, thereby a position above the frame mounting plate 41 and a position retracted from above the frame mounting plate 41. It is movable across the The frame pressing plate 42 is provided with elongated holes 422 at the four corners where the centering guides 44 can enter.

  The frame fixing portion 40 is positioned at a position where the frame pressing plate 42 is retracted from above the frame mounting plate 41, and the centering guides 44 are separated from each other by the transport unit 95 on the upper surface 412 of the frame mounting plate 41. The annular frame 8 of the transported workpiece unit 9 is placed. The frame fixing unit 40 brings the centering guides 44 close to each other, and positions the workpiece 1 of the workpiece unit 9. The frame fixing portion 40 positions the frame pressing plate 42 above the frame mounting plate 41, extends the piston rod 431 of the air cylinder 43, and raises the frame mounting plate 41. Thereby, as shown in FIG. 4, the annular frame 8 of the workpiece unit 9 is sandwiched and fixed between the frame mounting plate 41 and the frame pressing plate 42.

  The sheet expansion unit 50 moves the holding table 30 and the frame fixing portion 40 relative to each other along an axis along the vertical direction to expand the expanded sheet 7. The seat expansion unit 50 includes a push-up member 51 and a lift unit 52.

  The push-up member 51 is formed in a cylindrical shape, the outer diameter is smaller than the inner diameter of the annular frame 8 mounted on the upper surface 412 of the frame mounting plate 41, and the inner diameter is adhered to the expanded sheet 7. And, it is formed larger than the outer diameter of the holding table 30. The push-up member 51 has the holding table 30 disposed inside and is arranged coaxially with the holding table 30. At the upper end of the push-up member 51, a roller member 511 (shown in FIG. 4 etc.) disposed on the same plane as the holding surface 31 of the holding table 30 is rotatably attached.

  As shown in FIG. 4, the lifting unit 52 includes a push-up member lifting mechanism 52A that lifts and lowers the push-up member 51, and a holding table lifting mechanism 52B that lifts and lowers the holding table 30. The push-up member lifting mechanism 52A includes two cylinder cases 520 and a piston rod 521 inserted into the cylinder case 520. The push-up member 51 is fixed to the upper end portion of the piston rod 521. The height position of the push-up member 51 is adjusted by the two push-up member lifting mechanisms 52A. Further, the holding table lifting mechanism 52B includes two cylinder cases 525 and a piston rod 526 inserted into the cylinder case 525. The holding table 30 is fixed to the upper end portion of the piston rod 526. The height position of the holding table 30 is adjusted by the two holding table lifting mechanisms 52B. In the present embodiment, the height position of the push-up member 51 can be adjusted integrally or independently with the holding table 30 by adjusting the push-up member elevating mechanism 52A and the holding table elevating mechanism 52B.

  The sheet expansion unit 50 is moved up and down unit 52 (push-up member lifting mechanism 52A from a state where roller member 511 attached to the upper end of push-up member 51 and holding surface 31 are positioned on the same plane as upper surface 412 of frame mounting plate 41. The expansion sheet 7 is expanded in the surface direction by the holding table lifting mechanism 52B) integrally raising the push-up member 51 and the holding table 30.

  The heating unit 60 heats the annular region 101 (shown in FIGS. 2 and 4) between the inner edge of the expanded sheet 7 which is the inner periphery of the annular frame 8 and the outer edge which is the outer periphery of the workpiece 1. And shrink. The heating unit 60 includes a disk-shaped unit body 61 and a plurality of heating units 62 attached to the unit body 61.

  The unit body 61 is disposed above the holding table 30 and coaxial with the holding table 30. The unit body 61 has a support shaft 611 extending in the vertical direction at the central portion, and a plurality of openings 612 formed at equal intervals in the circumferential direction at the outer edge of the unit body 61. Further, the unit main body 61 is provided so as to be able to move up and down by a moving unit (not shown), and is provided so as to be rotatable about an axis parallel to the vertical direction.

  The heating unit 62 is disposed in an opening 612 formed at the outer edge of the unit body 61. The heating unit 62 is disposed at a position vertically facing the annular region 101 of the expanded sheet 7 of the workpiece unit 9 held by the holding table 30 and the frame fixing unit 40. Although four heating parts 62 (openings 612) are provided in the present embodiment, the present invention is not limited to four. The heating unit 62 is an infrared ceramic heater of a type that heats the annular region 101 of the expanded sheet 7 by irradiating infrared light downward, for example, an infrared ceramic heater that is heated when a voltage is applied and emits infrared light. In addition, the heating unit 62 can move independently in the radial direction and the vertical direction of the unit body 61 in the opening 612.

  The gas supply unit 70 supplies a gas (for example, air; supply gas) to the surface 5 of the workpiece 1 while the heating unit 62 heats the annular region 101 of the expanded sheet 7, and the workpiece 1 is processed with this gas. It covers the surface 5 of the Here, when the heating unit 62 heats the annular area 101 of the expanded sheet 7, gas (generated gas) may be generated from the expanded sheet 7 due to evaporation or the like. When the generated gas stays on the workpiece 1, the component of the generated gas may adhere to the surface (device) of the workpiece 1. Therefore, the gas supply unit 70 covers the surface 5 of the workpiece 1 with the supplied gas, thereby shielding the workpiece 1 from the generated gas generated when the expanded sheet 7 is heated. The gas supply unit 70 is formed at the center of the unit main body 61 of the heating unit 60 and is formed inside the support shaft 611 in communication with the injection port 71 for injecting gas toward the workpiece 1 and the injection port 71. The supply passage 72, the valve 73 connected to the supply passage 72, and the gas supply source 74 are provided. When heating the annular area 101 of the expanded sheet 7, the valve 73 is opened, and the gas supplied from the gas supply source 74 is injected from the injection port 71. As a result, a gas flow (air layer) is formed above the workpiece 1 and the surface 5 of the workpiece 1 is covered.

  The suction and exhaust unit 80 sucks and discharges the gas supplied by the gas supply unit 70 and the generated gas generated when the expanded sheet 7 is heated on the outer peripheral side of the workpiece 1. The suction and exhaust unit 80 includes an exhaust block (exhaust unit) 81, an exhaust passage 82 connected to the exhaust block 81, and a suction source 83 connected to the exhaust passage 82. In the present embodiment, as shown in FIG. 5, the two exhaust blocks 81 are disposed with the heating portion 62 interposed therebetween, and an intake port 811 is formed on the lower surface of each exhaust block 81. Since these air inlets 811 are disposed to face the annular area 101 of the expanded sheet 7 and adjacent to the heating unit 62, the generated gas generated by the heating of the heating unit 62 is an air inlet 811 adjacent to the heating unit 62. It can be quickly sucked and exhausted through the Further, the exhaust block 81 is connected to the heating unit 62, and moves in the opening 612 along with the heating unit 62 in the radial direction and the vertical direction of the unit main body 61, respectively.

  Further, in the present embodiment, the dividing device 10 is provided with the auxiliary suction and exhaust unit 90 separately from the suction and exhaust unit 80. The auxiliary suction and exhaust unit 90 is provided at a position away from the workpiece 1 on the outer peripheral side than the suction and exhaust unit 80, and sucks and discharges generated gas that can not be suctioned by the suction and exhaust unit 80. The auxiliary suction and exhaust unit 90 is formed, for example, in a cylindrical shape, and has a plurality of exhaust cylinders 91 arranged at equal intervals in the circumferential direction outside the frame mounting plate 41, and an exhaust passage connected to the exhaust cylinders 91. And a suction source 93 connected to the exhaust passage 92. An exhaust port 91 has an intake port 911 formed toward the frame mounting plate 41. In the present embodiment, two exhaust cylinders 91 are provided outside the chamber 20 and two exhaust cylinders 91 are provided inside the chamber 20. However, the shape and the number of the exhaust cylinders 91 are not limited to those described above. By providing the auxiliary suction and exhaust unit 90, for example, even when the above-described generated gas enters the chamber 20, the generated gas is sucked and exhausted through the exhaust cylinder 91, so that the inside of the chamber 20 can be And it can suppress that the component of the generated gas adheres to each site | part outside the chamber 20. FIG.

  The control unit 96 controls the above-described components of the dividing device 10, that is, the sheet expansion unit 50, the heating unit 60, the gas supply unit 70, the suction and exhaust unit 80, the auxiliary suction and exhaust unit 90, etc. The dividing device 10 is caused to carry out the processing operation for 1. The control unit 96 is a computer. The control unit 96 is connected to a display unit (not shown) configured by a liquid crystal display device or the like for displaying the state of processing operation, an image, etc. and an input unit (not shown) used when the operator registers processing content information etc. There is. The input unit is configured by at least one of a touch panel provided in the display unit and an external input device such as a keyboard.

  Next, the operation of the dividing device 10 according to the present embodiment will be described. First, as shown in FIG. 4, the workpiece 1 of the workpiece unit 9 is placed on the holding surface 31 of the holding table 30 via the expanded sheet 7, and the annular frame 8 is fixed by the frame fixing portion 40. The control unit 96 positions the frame pressing plate 42 of the frame fixing portion 40 at the retracted position, shrinks the piston rod 431 of the air cylinder 43, and positions the upper surface 412 of the frame mounting plate 41 below the holding surface 31. The workpiece unit 9 on which the modified layer 100 is formed along the planned dividing line 3 is transported to the upper side of the holding table 30 in the transport unit 95 (see FIG. 3). Then, the back surface 6 of the workpiece 1 is placed on the holding surface 31 via the expanded sheet 7.

  The control unit 96 extends the piston rod 451 of the air cylinder 45 to position the frame pressing plate 42 above the frame mounting plate 41, extends the piston rod 431 of the air cylinder 43, and elevates the frame mounting plate 41. Let Thus, the annular frame 8 of the workpiece unit 9 is sandwiched between the frame mounting plate 41 and the frame pressing plate 42.

  Next, the control unit 96 brings the centering guides 44 of the frame fixing unit 40 close to each other to position the workpiece 1 of the workpiece unit 9, and places the annular frame 8 of the workpiece unit 9 on the frame mounting plate It is fixed between 41 and the frame holding plate 42. In this case, when the annular frame 8 of the workpiece unit 9 is fixed between the frame mounting plate 41 and the frame pressing plate 42, the frame mounting plate 41 and the holding table 30 have the upper surface 412 and the upper end of the push-up member 51. The roller member 511 of the push-up member 51 abuts on the annular area 101 of the expanded sheet 7 at a close position where the roller member 511 and the holding surface 31 attached thereto are located on the same plane.

  FIG. 6 is a schematic cross-sectional view of the dividing device showing a state in which the expanded sheet is expanded by raising the sheet expansion unit. FIG. 7 is a schematic cross-sectional view of the dividing device showing a state in which the sheet expansion unit is lowered after expanding the expanded sheet. After fixing the annular frame 8 of the workpiece unit 9 between the frame mounting plate 41 and the frame pressing plate 42, the axial direction orthogonal to the surface of the workpiece 1 with the holding table 30 and the frame fixing portion 40 , And expand the annular area 101 of the expanded sheet 7 between the outer edge which is the outer periphery of the workpiece 1 and the inner edge which is the inner periphery of the annular frame 8. That is, the control unit 96 extends the respective piston rods 521 and 526 of the lifting and lowering unit 52 (push-up member lifting and lowering mechanism 52A and holding table lifting and lowering mechanism 52B) of the sheet expansion unit 50 to increase the height of the push-up member 51 and holding table 30 Raise the position. Then, since the roller member 511 provided at the upper end of the push-up member 51 is in contact with the annular region 101 of the expanded sheet 7, the expanded sheet 7 is expanded in the surface direction. As the expanded sheet 7 expands, a tensile force acts radially on the expanded sheet 7.

  As described above, when a tensile force acts radially on the expanded sheet 7 attached to the back surface 6 of the workpiece 1, the workpiece 1 is formed with the modified layer 100 formed along the planned dividing line 3 (FIG. As shown in FIG. 6, the chip 110 is divided into a plurality of chips 110, and the space between the chips 110 is expanded, and spaces 111 are formed between the chips 110, respectively. Further, when the expanded sheet 7 is expanded, the annular area 101 of the expanded sheet 7 has a cross section of the annular area 101 straight from the lower surface of the annular frame 8 toward the upper surface of the roller member 511.

  Next, the control unit 96 drives the vacuum suction source 34 to suction the suction portion 33 with the vacuum suction source 34, and the back surface 6 side of the workpiece 1 is held on the holding surface 31 via the expand sheet 7. Suction hold to maintain the spacing 111 between the tips 110. Then, in a state where the vacuum suction source 34 is driven, the control unit 96 shortens the respective piston rods 521 and 526 of the lifting and lowering unit 52 (push-up member lifting and lowering mechanism 52A and holding table lifting and lowering mechanism 52B) of the sheet expansion unit 50. As shown in FIG. 7, the push-up member 51 and the holding table 30 are lowered to the same height position as the frame mounting plate 41. In this state, as shown in FIG. 7, the roller member 511 provided at the upper end of the push-up member 51 is separated from the annular area 101 of the expanded sheet 7, so the annular area 101 of the expanded expanded sheet 7 slackens upward. .

  FIG. 8 is a schematic cross-sectional view of the dividing device showing a state in which the annular area of the expanded sheet is heated and contracted. Next, the annular area 101 of the expanded sheet 7 slackened by expansion is heated and contracted. As shown in FIG. 8, the control unit 96 applies a voltage to the heating unit 62 of the heating unit 60, heats it to a predetermined temperature, and causes the heating unit 62 to emit infrared light. Then, the heating unit 60 is lowered by using a moving unit (not shown) to bring the heating unit 62 closer to the annular region 101 and rotate the heating unit 60 about the axial center. In the present embodiment, since the injection port 71 of the gas supply unit 70 and the exhaust block 81 of the suction and exhaust unit 80 are provided in the unit main body 61 of the heating unit 60, these injection ports 71 and exhaust block 81 are also together with the heating unit 60. Go down. In addition, the control unit 96 opens the valve 73 of the gas supply unit 70 and injects the supply gas 150 from the injection port 71 toward the tip 110 (the object 1), and the suction source 83 of the suction and exhaust unit 80. Make it work.

  Thereby, the annular area 101 of the expanded sheet 7 can be heated by infrared rays radiated from the heating part 62 facing the annular area 101 of the expanded sheet 7, and the slack of the annular area 101 can be contracted. In addition, the supply gas 150 is injected from the injection port 71 toward the chip 110 (workpiece 1), and the suction source 83 of the suction and exhaust unit 80 is operated. A flow (air layer) of the supplied gas 150 toward the annular frame 8 side is formed. Therefore, even if the generated gas 160 is generated from the expanded sheet 7 by heating, the generated gas 160 is exhausted together with the supply gas 150 through the intake port 811 (FIG. 5) formed in the exhaust block 81 of the suction and exhaust unit 80. Therefore, the component of the generated gas 160 can be prevented from adhering to the chip 110 (the workpiece 1).

  Further, by operating the suction source 93 of the auxiliary suction and exhaust unit 90, the control unit 96 can suction and exhaust the generated gas 160 which can not be sucked by the suction and exhaust unit 80 through the exhaust cylinder 91. Therefore, for example, even if the generated gas 160 that could not be sucked by the suction and exhaust unit 80 enters the chamber 20, the generated gas 160 is sucked and exhausted through the exhaust cylinder 91, so that the chamber 20 It is possible to suppress the adhesion of the component of the generated gas 160 to each portion inside and outside the chamber 20.

  When the annular area 101 of the expanded sheet 7 is sufficiently contracted, the valve 73 is closed, the heating and suction sources 83 and 93 of the heating unit 62 are stopped, and the heating unit 60 is raised to form the ring of the frame fixing unit 40 Unlock the frame 8. Then, the work piece unit 9 maintains the interval 111 between the chips 110 even when the suction of the suction portion 33 of the holding table 30 is released by the annular region 101 of the expanded expanded sheet 7 being contracted. Ru.

  As described above, in the dividing device 10 according to the present embodiment, the plate-like workpiece 1 on which the modified layer 100 serving as the division starting point is formed along the planned dividing line 3 and the workpiece 1 are attached The expanded sheet 7 of the workpiece unit 9 comprising the expanded sheet 7 attached and the annular frame 8 to which the outer periphery of the expanded sheet 7 is stuck is expanded to break the workpiece 1. The frame fixing portion 40 for fixing the annular frame 8 of the object unit 9 and the annular area 101 of the expanded sheet 7 on the outer periphery of the workpiece 1 and the inner periphery of the annular frame 8 are pressed in the direction orthogonal to the workpiece 1 A sheet expanding unit 50 which expands the expanded sheet 7 and breaks the workpiece 1 from the reforming layer 100, and a heating unit which heats and shrinks the annular region 101 of the expanded expanded sheet 7 During the heating of the heating unit 60 having the No. 2 and the expanded sheet 7, a gas is supplied to the surface of the workpiece 1 to cover the surface of the workpiece 1 with the supplied gas 150, and the generated gas generated from the expanded sheet 7 Since the gas supply unit 70 for shielding the workpiece 1 from 160 and the suction / exhaust unit 80 for sucking and discharging the generated gas 160 and the supplied gas 150 at the outer periphery of the workpiece 1, expand when heated It can be suppressed that the component of the generated gas 160 generated from the sheet 7 adheres to the surface of the workpiece 1.

  Further, since the intake port 811 of the suction and exhaust unit 80 is disposed facing the annular region 101 and adjacent to the heating unit 62, the generated gas 160 generated by the heating of the heating unit 62 is adjacent to the heating unit 62. Since the gas is quickly sucked through the suction port 811, the component of the generated gas 160 can be effectively suppressed from adhering to the surface of the workpiece 1.

  As mentioned above, although one Embodiment of this invention was described, the said embodiment is shown as an example and limiting the scope of invention is not intended.

1 Workpiece 3 Divided Plan Line 5 Surface 7 Expanded Sheet 8 Annular Frame 9 Workpiece Unit 10 Splitting Device 20 Chamber 30 Holding Table 40 Frame Fixing Part 50 Sheet Expansion Unit 60 Heating Unit 62 Heating Part 70 Gas Supply Unit 71 Injection Port 80 suction and exhaust unit 81 exhaust block 811 air inlet 90 auxiliary suction and exhaust unit 91 exhaust cylinder 96 control unit 100 reforming layer (division starting point)
101 annular area 110 chip 111 interval 150 supply gas 160 generation gas

Claims (2)

A workpiece comprising a plate-like workpiece having a split starting point formed along a planned dividing line, an expanded sheet to which the workpiece is stuck, and an annular frame to which the outer periphery of the expanded sheet is stuck A dividing device for expanding the expanded sheet of the object unit and breaking the workpiece;
A frame fixing portion for fixing the annular frame of the workpiece unit;
The annular area of the expanded sheet on the outer periphery of the workpiece and the inner periphery of the annular frame is pressed in a direction perpendicular to the workpiece to expand the expanded sheet, and the workpiece is broken from the division start point The seat expansion unit
A heating unit having a heating unit that heats and shrinks the annular area of the expanded sheet;
During heating of the expanded sheet, a gas is supplied to the surface of the workpiece to cover the surface of the workpiece with the supplied gas, and the gas shields the workpiece from generated gas generated from the expanded sheet. A supply unit,
A suction and exhaust unit for suctioning and exhausting the generated gas and the supplied gas around the periphery of the workpiece;
A dividing device comprising   The dividing device according to claim 1, wherein an intake port of the suction and exhaust unit is disposed to face the annular region and adjacent to the heating unit.

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