JP2019161123A - Transport device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a transport device capable of saving wiring with a simple configuration. A transport device 1 is a transport device 1 including work moving mechanisms 6 and 8 for transporting a work in a space in a vacuum state, and a sensor 201 provided in the work moving mechanisms 6 and 8 and the same. A power line 106 for supplying power to the sensor 201 and communication units 100 and 105 for communicating the detected value from the sensor 201 via the power line 106 are provided. [Selection diagram] Fig. 1

Description

  The present invention relates to a transport apparatus.

  2. Description of the Related Art A semiconductor manufacturing apparatus using a multi-joint transport device that transports a transported body mounted on a last arm by rotating a plurality of arms via a joint and rotating each arm is known (for example, Patent Document 1). In the semiconductor manufacturing apparatus of Patent Document 1, an articulated transfer apparatus equipped with an arm delivers a semiconductor substrate (wafer) between a load lock apparatus in a vacuum environment and an alignment apparatus in an atmospheric pressure environment. . That is, this arm is rotatable under vacuum.

  In rotating this arm, the articulated conveyance device of Patent Document 1 converts an electrical signal for driving and controlling a motor installed in the joint of the arm into an optical signal, and the optical signal is connected to the motor. By transmitting to the converter, drive control of the motor is performed. In the articulated conveyance device of Patent Document 1, when performing optical communication with a motor, a fiber cable (optical fiber) is disposed in an arm as a medium for optical communication to reduce wiring.

JP 2007-38360 A

  However, a transmission loss due to bending or twisting occurs in the fiber cable, and thus there is a problem that the fiber cable cannot be disposed at a location where bending or the like occurs.

  The present invention has been made in view of such circumstances, and an object of the present invention is to provide a transport apparatus that can reduce wiring with a simple configuration.

  A transfer device according to an aspect of the present disclosure is a transfer device including a workpiece moving mechanism for transferring a workpiece in a vacuum space, and supplies a power to the sensor provided in the workpiece moving mechanism. And a communication unit that communicates a detection value from the sensor via the power line.

  In this aspect, the detection value from the sensor is communicated through the power line by the communication unit via the power line, so that the wiring of the communication line for connecting the sensor can be reduced.

  In the transfer device according to an aspect of the present disclosure, the communication unit is provided in a first communication unit provided in a space in an atmospheric pressure state, and in a vacuum space, and acquires a detection value from the sensor. The power line communication is performed between the first communication unit and the second communication unit.

  In this aspect, by performing power line communication between the first communication unit and the second communication unit, it is possible to reduce wiring between the first communication unit and the second communication unit.

  In the transfer device according to one aspect of the present disclosure, the power line for power line communication performed between the first communication unit and the second communication unit is configured such that an atmospheric pressure space and a vacuum state are connected via a field through connector. It is arranged between the spaces.

  In this aspect, since the power line is arranged between the space in the atmospheric pressure state and the space in the vacuum state via the field through connector, the first communication unit and the first communication unit are securely maintained while maintaining the vacuum state. Two communication units can be connected by a power line.

A transport apparatus according to an aspect of the present disclosure includes a housing that houses the second communication unit and the sensor,
The housing is filled with a resin member.

  In this aspect, it is possible to suppress leakage of outgas to the vacuum environment by housing the second communication unit and the sensor in the same casing and filling the casing with a resin member.

  A transfer device according to an aspect of the present disclosure includes a member positioned in a space in an atmospheric pressure state, the second communication unit is thermally connected to the work movement mechanism, and the work movement mechanism includes It is thermally connected to the member.

  In this aspect, the heat generated by the second communication unit is radiated to the atmospheric pressure space through the thermally connected work moving mechanism and the member located in the atmospheric pressure space. An increase in the temperature of the communication unit can be suppressed.

  In the transfer device according to an aspect of the present disclosure, the workpiece moving mechanism is provided with a recess that meshes with a housing that houses the second communication unit.

  In this aspect, the housing accommodating the second communication unit is engaged with the recess provided in the workpiece moving mechanism, so that the heat transfer area between the housing and the workpiece moving mechanism is increased, and the first 2 Heat generated from the communication unit can be dissipated through the workpiece moving mechanism.

  In the transport device according to one aspect of the present disclosure, a plurality of the sensors are provided, and a plurality of the second communication units are provided corresponding to the plurality of sensors, and at least two or more of the sensors are provided. The second communication unit shares a power line for power line communication with the first communication unit.

  In this aspect, since at least two or more second communication units share a power line for power line communication with the first communication unit, wiring can be reduced.

  The conveyance apparatus which concerns on 1 aspect of this indication is provided with the abnormality detection part which performs abnormality detection based on the communication result with the said 2nd communication part and the said sensor or the 1st communication part.

  In this aspect, the communication quality in the communication of the first communication unit from the sensor can be ensured by including the abnormality detection unit that performs abnormality detection.

  It is possible to provide a transfer device that can reduce wiring with a simple configuration.

FIG. 3 is a schematic diagram illustrating a configuration example of a transport device according to the first embodiment. It is explanatory drawing regarding the connection of a communication part and a sensor. It is explanatory drawing regarding the connection form (SPI, I2C) of a sensor and a 2nd communication part. It is explanatory drawing regarding the connection form (topology) of a 2nd communication part and a 1st communication part. It is a schematic diagram which shows the 2nd communication part accommodated in the housing | casing of a sensor unit and one structure (heat dissipation of a PLC slave). It is a schematic diagram which shows the 2nd communication part accommodated in the housing | casing of the sensor unit which concerns on Embodiment 2, and one structure (heat dissipation of a PLC slave and a sensor from the center). It is a schematic diagram which shows the 2nd communication part accommodated in the housing | casing of the sensor unit which concerns on Embodiment 3, and one structure (The heat dissipation of a PLC slave and a sensor from the lower part). It is a schematic diagram which shows one structure (a recessed part in an arm) of the 2nd communication part accommodated in the housing | casing of the sensor unit which concerns on Embodiment 4, and a sensor. FIG. 10 is a block diagram illustrating a configuration example of a controller and a communication unit of a transport device according to a fifth embodiment. 10 is a flowchart illustrating processing of a control unit of a first communication unit according to Embodiment 5.

(Embodiment 1)
Hereinafter, embodiments will be described with reference to the drawings. FIG. 1 is a schematic diagram illustrating a configuration example of a transport device 1 according to the first embodiment. The transport device 1 includes a base 2, an elevating mechanism 3, a rotating mechanism 4, two sets of left and right support arms 8, a hand holding arm 6, a hand holding unit 51, and a hand 5. The two sets of left and right support arms 8 and hand holding arm 6 are members included in the horizontal movement mechanism. Further, the left and right two sets of support arms 8 and hand holding arm 6 are also members included in the workpiece moving mechanism.

The transport device 1 rotates the rotation mechanism 4 and operates the support arm 8 and the hand holding arm 6 to move the hand 5 on which a work (not shown) such as a semiconductor substrate is placed, thereby transporting the work. To do.
The workpiece may be not only a semiconductor substrate (wafer) but also a workpiece such as a liquid crystal substrate. The workpiece may not be intended for processing such as etching. In addition, the work is not only placed on the hand 5, but may be held on the hand 5 by various methods such as gripping and suctioning. However, when cleanliness is required in a vacuum environment, a method that does not reduce the cleanliness in the vacuum environment as much as possible is desired.

In the base 2, the upper part of the base housing 25 is fixed to a connection flange 501 of a transfer chamber 500 described later, and the elevating mechanism 3 is accommodated therein. The transfer chamber 500 is placed on a flat floor supported by the legs 502, and the base 2 is provided with the lower portion of the base casing 25 floating above the floor surface.
The elevating mechanism 3 is connected to a pole screw mechanism 24 supported by a linear guide 23 so as to be movable up and down, and moves up and down in the Z-axis direction (vertical direction in the example of FIG. 1) as the pole screw mechanism 24 moves up and down.
The pole screw mechanism 24 is moved up and down by the rotation of the Z-axis motor 21 provided in the base 2 being transmitted via the belt / pulley mechanism 22.
The upper part of the lifting mechanism 3 protrudes from an opening provided in the connection flange 501 and is connected to the rotating mechanism 4. Therefore, the rotation mechanism 4 can be moved up and down in the Z-axis direction by rotating the Z-axis motor 21.

In addition, a θ-axis motor 31 and a first speed reducer 32 are provided inside the elevating mechanism 3, and when the θ-axis motor 31 is driven, the rotating mechanism 4 has an axial direction substantially in the Z-axis direction. Rotated to be parallel.
Since the first vacuum seal 33 is provided between the rotating mechanism 4 and the elevating mechanism 3, a vacuum environment in a transfer chamber 500 described later can be maintained, and the interior of the elevating mechanism 3 is set to an atmospheric pressure environment. Can be maintained.
Further, since the vacuum seal is provided by the bellows 34, the outside of the bellows 34 can be maintained in an atmospheric pressure environment.

  On the upper part of the rotation mechanism 4, left and right support arms 8 are provided. A second vacuum seal 43 is provided between the rotation mechanism 4 and the support arm 8 to maintain a vacuum state in a transfer chamber 500 to be described later and to maintain the interior of the rotation mechanism 4 in an atmospheric pressure environment. It is like that. An X-axis motor 41, a belt / pulley mechanism 411, and a second speed reducer 42 for moving the hand 5 in the X-axis direction (the depth direction in FIG. 1) are provided inside the rotation mechanism 4. Each of the arms 8 is rotated by transmitting the rotation of the X-axis motor 41 via the belt / pulley mechanism 411 and the second reduction gear 42.

The support arm 8 and the hand holding arm 6 are connected via an elbow 7. The hand holding arm 6 and the hand holding part 51 are connected via a wrist part 52. In addition, a transmission mechanism that transmits the rotation of the support arm 8 to the hand holding arm 6 is built in the support arm 8, the hand holding arm 6, and the elbow 7. The hand holding arm 6, the hand holding unit 51, and the wrist 52 have a built-in transmission mechanism that transmits the rotation of the hand holding arm 6 to the hand holding unit 51. Since these transmission mechanisms can use known techniques, illustrations are omitted as well as illustration.
In the example shown in FIG. 1, the support arm 8 rotates about the base end shaft (not shown) on the base end side (root side) of the support arm 8 by the rotation of the X-axis motor 41. When the support arm 8 is rotated, the hand holding arm 6 is rotated about a base end shaft (not shown) on the base end side (root side) of the hand holding arm 6 by a transmission mechanism on the front end side of the support arm 8. When the hand holding arm 6 is rotated, the hand holding unit 51 is rotated around a proximal axis (not shown) on the proximal side (root side) of the hand holding unit 51 by a transmission mechanism on the distal side of the hand holding arm 6. To do. At this time, if the transmission mechanism is configured so that the ratio of the rotation angle of the support arm 8, the rotation angle of the hand holding arm 6, and the rotation angle of the hand holding unit 51 is 1: 2: 1, it is held by the hand holding unit 51. The hand 5 that has been moved moves on a straight line. That is, power can be transmitted to a member from the support arm 8 to the hand holding unit 51 by one motor, and the hand 5 can be moved linearly. Furthermore, the hand 5 can be moved at a desired position by combining the rotation of the rotation mechanism 4 and the raising and lowering. Of course, the present invention is not limited to such a configuration, and for example, a configuration in which a motor corresponding to each of the support arm 8, the hand holding arm 6, and the hand holding unit 51 can be provided. Since the transport apparatus having such a configuration is also a known technique, a description thereof will be omitted.

  The transfer apparatus 1 is placed in a transfer chamber 500 in a processing system performed in a vacuum environment (vacuum space), and transfers a workpiece to and from the process chamber. In the transport device 1, the support arm 8 to the hand 5 are located in a vacuum environment, that is, in a vacuum space. The internal space of the rotating mechanism 4 and these members of the elevating mechanism 3 and the base 2 are located in an atmospheric pressure environment, that is, a space in an atmospheric pressure state. Therefore, these members of the second reduction gear 42 and the X-axis motor 41 provided inside the rotation mechanism 4 are also located in the atmospheric pressure environment (the space in the atmospheric pressure state).

  The transport apparatus 1 includes a sensor unit 200, a first communication unit 100 that constitutes a communication unit (see FIG. 2), a field through connector 44, and a controller 300.

  A plurality of sensor units 200 are provided on the support arm 8 and the hand holding arm 6 (hereinafter, the hand holding arm 6 and the like). It is provided in the vicinity of the base end and the front end. That is, the sensor unit 200 is located in a vacuum space. The sensor unit 200 includes a second communication unit 105 for communicating with the first communication unit 100, and a sensor 201 connected to the second communication unit 105 via a wiring 202 such as a serial cable (see FIG. 2). The power from the first communication unit 100 is supplied to the sensor 201 via the second communication unit 105.

  The plurality of second communication units 105 provided in the left and right hand holding arms 6 and the like and the first communication unit 100 are connected by a power line 106 for supplying power. The first communication unit 100 and the second communication unit 105 communicate with each other by superimposing a communication signal on the power line 106, that is, the first communication unit 100 and the second communication unit 105 perform power line communication. A communication unit is configured. Such power line communication is, for example, high-speed PLC (Power Line Communication) using 2 to 30 MHz. In this case, the first communication unit 100 corresponds to a PLC master, and the second communication unit 105 corresponds to a PLC slave.

  The 1st communication part 100 is provided in the inside of the rotation mechanism 4 as an example, ie, is located in the space of an atmospheric pressure state. The second communication unit 105 included in the sensor unit 200 is provided on the hand holding arm 6 or the like in a vacuum ring environment as described above. Therefore, in order to connect the first communication unit 100 and the second communication unit 105, the power line 106 from the first communication unit 100 is connected to the second communication unit 105 via the field through connector 44 provided in the rotation mechanism 4. It is connected to the. The field through connector 44 is a connector for supplying power to equipment in the vacuum, and is a vacuum insulating member attached to the wall surface of the rotating mechanism 4.

  The sensor 201 is, for example, an acceleration sensor that detects acceleration, angular velocity, or the like of the support arm 8 and the hand holding arm 6, or a temperature sensor that detects the temperature of the hand holding arm 6 or the like.

  As will be described in detail later, the controller 300 is a computer (see FIG. 9) that includes a control unit 301, a storage unit 302, an input / output I / F 303, and a communication I / F 304, and performs overall control of the transport apparatus 1. The controller 300 is connected to the first communication unit 100 via a communication line 400 such as Ethernet (registered trademark), for example, and each of the sensors 201 transmitted from the second communication unit 105 via the first communication unit 100. The detected value is acquired, and the conveying device 1 is controlled based on the acquired detected value. Note that a part of the communication line 400 passes through the cable bear (registered trademark) 35 inside the base casing 25.

  FIG. 2 is an explanatory diagram regarding the connection between the communication unit (the first communication unit 100 and the second communication unit 105) and the sensor 201. FIG. 3 is an explanatory diagram regarding a connection form (SPI, I2C) between the sensor 201 and the second communication unit 105. FIG. 4 is an explanatory diagram relating to a connection form (topology) between the first communication unit 100 and the second communication unit 105.

  As shown in FIG. 2, each part of the transfer apparatus 1 includes a field-through connector 44, an atmospheric pressure space (atmospheric pressure environment) and a vacuum partitioned by the first vacuum seal 33 and the second vacuum seal 43 as described above. It is located in the state space (vacuum environment). The first communication unit 100 is located in an atmospheric pressure environment, and the second communication unit 105 is located in a vacuum environment. The first communication unit 100 and the second communication unit 105 are connected by a double-line power line 106 via the field through connector 44. That is, the communication unit configured by the first communication unit 100 and the second communication unit 105 is located across the atmospheric pressure environment and the vacuum environment via the field through connector 44.

  Each of the plurality of second communication units 105 located in the vacuum environment is connected in series by a power line 106, and the power output from the first communication unit 100 is a plurality of units connected in series via the power line 106. To the second communication unit 105. That is, the power line 106 is shared by a plurality of second communication units. Electric power is supplied from the second communication unit 105 to the sensor 201 via the wiring 202.

  The first communication unit 100 (PLC master) and the second communication unit 105 (PLC slave) can configure a plurality of network topologies (connection forms) as shown in FIG. 4 by using, for example, a high-speed PLC. The T-branch type shown in FIG. 4A is a form in which the power line 106 from the first communication unit 100 is branched and connected to each of the second communication units 105. In this form, it is easy to separate the second communication unit 105, and even if one second communication unit 105 breaks down, the other second communication unit 105 can continue to be used, and the reliability of the entire communication is improved. Can be high. In the multi-drop type shown in FIG. 4B, the power line 106 from the first communication unit 100 is drawn into one of the second communication units 105, and the other second communication units 105 thereafter are crossed over the power line 106. It is a form to connect as a line. In this embodiment, the wiring 202 of the power line 106 can be simplified. In the star wiring 202 type shown in FIG. 4C, the power line 106 from the first communication unit 100 is radially branched from a single branch point and connected to the second communication unit 105 by each branched power line 106. It is. In this embodiment, since the branching points can be concentrated in one place, the reliability can be made higher than that of the multi-drop type shown in FIG. 4B. The tree wiring 202 type shown in FIG. 4D is a form in which the power line 106 branched from the power line 106 from the first communication unit 100 is further branched to be hierarchized and connected to the second communication unit 105. In this embodiment, by making the complicated wiring 202 possible, the degree of freedom of the wiring 202 of the power line 106 in the hand holding arm 6 or the like can be improved. By using such a connection form, the power line 106 from the first communication unit 100 to the first branch point is shared by the plurality of second communication units 105.

  Each of the second communication units 105 is connected to each of the corresponding sensors 201, and the second communication unit 105 and the sensors 201 constitute a sensor unit 200. For example, as shown in FIG. 3, the second communication unit 105 and the sensor 201 may be connected by an SPI (Serial Peripheral Interface) mode or an I2C (Inter-Integrated Circuit) mode. By using the SPI mode, the second communication unit 105 and the sensor 201 can be configured by three or four connection lines, excluding the ground line (GND), and communication of several MBps can be performed. By using the I2C mode, it is possible to configure a party line with a plurality of sensors 201 for one second communication unit 105 with two wires 202, and communication at a maximum of 1 Mbps can be achieved. The wiring 202 connecting the second communication unit 105 and the sensor 201 is not limited to a serial cable or a harness, but is a conductive pattern or land formed on the substrate on which the second communication unit 105 and the sensor 201 are provided. There may be.

  The controller 300 is provided outside the base casing 25 of the transport apparatus 1 and is connected to the first communication unit 100 and the communication line 400 so as to communicate with each other.

  The detection value detected and output by the sensor 201 is output to the second communication unit 105 via the wiring 202. The second communication unit 105 acquires the detection value from the sensor 201 and performs power line communication by using, for example, a high-speed PLC, so that the data related to the detection value is transmitted to the first communication unit 100 via the power line 106. Send to.

  The first communication unit 100 acquires data related to the detection values of the corresponding sensors 201 transmitted from the second communication units 105 and outputs the data to the controller 300 via the communication line 400.

  By communicating the detection value from the sensor 201 using power line communication, the wiring 202 provided in each sensor 201 can be shortened, and wiring saving in a vacuum environment can be achieved.

  By using only the power line 106 as the wiring 202 from the first communication unit 100 to the second communication unit 105 included in the sensor unit 200, the number of the wirings 202 in the vacuum environment can be reduced and the width in the connection direction can be increased. . This makes it possible to expand the functions of the hand 5 such as attaching and detaching the hand 5 using a bad contact, a fork plug, and the like, and connecting to another device having a fork socket without using a mating connector.

  Communication by power line communication between the first communication unit 100 and the second communication unit 105 is performed via a power line 106 of double lines (power supply and ground two lines). Therefore, the number of pins of the field through connector 44 to which the power line 106 is connected can be set to a number corresponding to the power line 106 (for example, 2 pins). That is, it is not necessary to provide a field through connector 44 or a plurality of field through connectors 44 having a large number of pins corresponding to the number of wirings 202 of each sensor 201, and a single small and inexpensive field through connector 44 is used. Can do.

  As shown in FIG. 4, the first communication unit 100 and the sensor unit 200 housing the second communication unit 105 can connect two wires in series, so that the relay connectors can be unified.

  FIG. 5 is a schematic diagram showing one configuration (heat dissipation of the PLC slave) of the second communication unit 105 and the sensor 201 housed in the casing 208 of the sensor unit 200. The second communication unit 105 and the sensor 201 are housed in a housing 208 and constitute a sensor unit 200.

  The housing 208 of the sensor unit 200 is made of a metal having a high thermal conductivity such as aluminum. The casing 208 is provided with a hole through which the bolt 209 is inserted, and is fastened to the screw hole provided in the hand holding arm 6 by the bolt 209. In addition, the site | part to which the housing | casing 208 of the sensor unit 200 is fastened is not limited to the hand holding arm 6, The support arm 8 or the other site | part located in a vacuum environment may be sufficient. The housing 208 of the sensor unit 200 houses the second communication unit 105 and the sensor 201 as described above, and further includes the second communication unit substrate 205 on which the second communication unit 105 is mounted on one surface, and the sensor 201 on one surface. The sensor substrate 204 to be mounted on is housed. In FIG. 5, the wiring 202 is not shown. Although not shown, the housing 208 is provided with a connector for connecting the power line 106.

  The second communication unit substrate 205 and the sensor substrate 204 are arranged with their other surfaces facing each other, and the second communication unit substrate 205 and the sensor substrate 204 are electrically connected to form the multilayer circuit 203. is doing. Therefore, the second communication unit 105 and the sensor 201 are electrically connected by the multilayer circuit 203.

  On the bottom surface of the housing 208, the second communication unit 105 is placed with the bottom in contact therewith. A heat transfer member 207 for promoting heat transfer from the heat generated by the second communication unit 105 to the case 208 is interposed between the bottom surface of the case 208 and the bottom of the second communication unit 105. Yes.

  The casing 208 is filled with an insulating resin member 206. That is, the sensor 201, the second communication unit 105, and the substrate are sealed by the resin member 206, and directly into the vacuum environment. It is in a state not touching.

As shown in FIG. 1, the hand holding arm 6 is thermally connected to a member located in an atmospheric pressure environment via a support arm 8, an elbow 7, and the like. Therefore, the temperature increase of the sensor unit 200 can be suppressed by transferring heat generated from the sensor unit 200 by the second communication unit 105 or the like to a member located in the atmospheric pressure environment and dissipating heat from the member to the atmosphere.
That is, since heat is generated in a vacuum environment, the temperature is likely to increase. The temperature rise can be suppressed by transferring the heat to a member located in the atmospheric pressure environment. Further, although the heat capacity is small only with the housing 208 of the sensor unit 200, there is an effect that the heat capacity is increased by transferring heat to other members, and the temperature rise is suppressed.

  The casing 208 is made of a metal having good thermal conductivity, and is thermally connected to the second communication unit 105 that generates a relatively large amount of heat via a heat transfer member 207. Therefore, heat generated from the second communication unit 105 can be efficiently transferred to the housing 208.

  By filling the inside of the housing 208 with the resin member 206 and sealing the sensor 201, the second communication unit 105, and the substrate from the vacuum environment, leakage of outgas to the vacuum environment can be suppressed.

  By configuring the sensor unit 200 in which the sensor 201 and the second communication unit 105 are housed in the same casing 208, the sensor unit 200 is reduced in size and placed in a part located in a vacuum environment such as the hand holding arm 6 The degree of freedom can be improved.

  By configuring the sensor substrate 204 and the second communication unit substrate 205 for mounting the sensor 201 and the second communication unit 105 as the multilayer circuit 203, the influence on the footprint of the sensor unit 200 can be suppressed.

(Embodiment 2)
FIG. 6 is a schematic diagram illustrating one configuration of the second communication unit 105 and the sensor 201 (heat dissipation of the PLC slave and the sensor 201 from the center) housed in the casing 208 of the sensor unit 200 according to the second embodiment. The sensor unit 200 of the second embodiment is different from that of the first embodiment with respect to the arrangement of the sensor 201 and the second communication unit 105 in the housing 208.

  A plate member 210 that partitions the side on which the sensor 201 is provided and the side on which the second communication unit 105 is provided is provided inside the sensor unit 200 casing 208 of the second embodiment. The plate member 210 is made of metal such as aluminum having a good thermal conductivity like the case 208 and is thermally connected to the case 208. The sensor 201 and the second communication unit 105 are arranged up and down with a plate member 210 interposed therebetween. A heat transfer member 207 is interposed between the sensor 201 and the second communication unit 105 and the plate member 210. The sensor substrate 204 on which the sensor 201 is mounted on one surface is provided with the other surface facing the bottom plate of the housing 208. The second communication unit substrate 205 on which the second communication unit 105 is mounted on one surface is provided with the other surface facing the top plate of the housing 208.

  By providing the second communication unit 105 and the sensor 201 with the plate member 210 interposed, heat generated from the second communication unit 105 and the sensor 201 is efficiently transferred to the housing 208 via the plate member 210. be able to.

  As in the first embodiment, the heat generated from the second communication unit 105 and the like transferred to the housing 208 is located in the atmospheric pressure environment via the elbow 7 and the like that are thermally connected to the hand holding arm 6. The heat is dissipated to the atmosphere from the second reduction gear 42 and the like, and the temperature rise of the sensor unit 200 can be suppressed.

(Embodiment 3)
FIG. 7 is a schematic diagram illustrating one configuration of the second communication unit 105 and the sensor 201 (heat radiation of the PLC slave and the sensor 201 from the bottom) housed in the housing 208 of the sensor unit 200 according to the third embodiment. The sensor unit 200 of the third embodiment is different from that of the first embodiment with respect to the arrangement of the sensor 201 and the second communication unit 105 in the housing 208.

  The sensor substrate 204 and the second communication unit substrate 205 of the sensor unit 200 of Embodiment 3 are integrally configured as a multilayer circuit 203, and the second communication unit 105 and the sensor 201 are arranged on the lower surface side of the multilayer circuit 203. It is mounted side by side. The second communication unit 105 and the sensor 201 are provided with a heat transfer member 207 interposed between each bottom and the bottom surface of the housing 208.

  The second communication unit 105 and the sensor 201 are juxtaposed, and the heat transfer member 207 is interposed between each bottom part and the bottom surface of the housing 208, so that the second communication unit 105, the sensor 201, and the housing 208 are connected. By thermally connecting, heat generated from the second communication unit 105 and the sensor 201 is efficiently transferred to the housing 208, and is radiated through the hand holding arm 6 or the like to suppress the temperature rise of the sensor unit 200. Can do.

(Embodiment 4)
FIG. 8 is a schematic diagram illustrating one configuration (the recess 61 in the arm) of the second communication unit 105 and the sensor 201 housed in the casing 208 of the sensor unit 200 according to the fourth embodiment. The sensor unit 200 according to the fourth embodiment is different from that according to the third embodiment with respect to fastening with the hand holding arm 6. The arrangement of the sensors 201 and the like in the housing 208 of the sensor unit 200 of the fourth embodiment is the same as that of the third embodiment.

  The hand holding arm 6 of the fourth embodiment is provided with a recess 61 for mating the housing 208 of the sensor unit 200. The housing 208 of the fourth embodiment is engaged with the hand holding arm 6 with a heat transfer member 207 interposed between the outer peripheral surface thereof and the inner peripheral surface of the recess 61 provided in the hand holding arm 6. Is provided.

  The hole of the housing 208 for inserting the bolt 209 is a position corresponding to the outer surface of the hand holding arm 6 where the recess 61 is not formed when the housing 208 is engaged with the recess 61 of the hand holding arm 6. Is provided. The casing 208 has a bolt 209 inserted into the hole, and the bolt 209 is screwed into a screw hole provided on the outer surface of the hand holding arm 6 where the recess 61 is not formed. It is concluded.

  The housing 208 of the sensor unit 200 is engaged with a recess 61 provided in the hand holding arm 6, and the outer peripheral surface including the bottom surface and the side surface of the housing 208 and the inner peripheral surface of the recess 61 are heat transfer. The member 207 is interposed and thermally connected. Accordingly, the heat transfer area between the housing 208 and the hand holding arm 6 can be increased, and heat generated from the sensor unit 200 by the second communication unit 105 and the like can be efficiently transferred to the hand holding arm 6 to thereby increase the hand transfer. Heat can be radiated through the holding arm 6 and the like, and the temperature rise of the sensor unit 200 can be suppressed.

  In this embodiment, although the recessed part 61 was provided in the hand holding arm 6, it is not limited to this. The recessed part 61 may be provided in the elbow part 7, the support arm 8, or another part located in a vacuum environment.

(Embodiment 5)
FIG. 9 is a block diagram illustrating a configuration example of the controller 300 and the communication unit of the transport apparatus 1 according to the fifth embodiment. FIG. 10 is a flowchart illustrating processing of the control unit 102 of the first communication unit 100 according to the fifth embodiment. The transport apparatus 1 according to the fifth embodiment is different from the first embodiment in that a failure determination of the sensor unit 200 is performed.

  As shown in FIGS. 2 and 9, the second communication unit 105 included in the sensor unit 200 performs power line communication with the first communication unit 100, and performs overall control of the first communication unit 100 and the transport device 1. For example, the controller 300 is connected so as to be communicable through a communication line 400 such as Ethernet. That is, the controller 300 acquires the detection value from the corresponding sensor 201 acquired by each of the second communication units 105 via the first communication unit 100, and based on the acquired detection value, the hand holding arm 6 and the like. It is configured to perform control related to turning or the position of the hand 5.

The controller 300 includes a control unit 301 using a central processing unit (CPU) or a micro processing unit (MPU), a storage unit 302 using a read only memory (ROM) or a random access memory (RAM), and display or operation input to a display. The microcomputer includes an input / output I / F 303 (interface) that performs reception and the like, a communication I / F 304 for communicating with the first communication unit 100, and a power supply unit 305.
The power supply unit 305 supplies power (power) to devices in the controller 300 and supplies power necessary for power line communication. The power supply unit 305 also supplies power necessary for the motor and the like of the transport device, but description thereof is omitted in this specification.

  The storage unit 302 stores programs and data to be referred to during processing in advance. The program stored in the storage unit 302 may be a program stored from a recording medium that can be read by the control unit 301. Alternatively, the program may be downloaded from an external computer (not shown) connected to a communication network (not shown) and stored in the storage unit 302. The control unit 301 of the controller 300 performs various control processes and arithmetic processes by reading and executing programs and data stored in advance in the storage unit 302.

  The first communication unit 100 communicates with a control unit 102 such as a CPU (Central Processing Unit) or MPU (Micro Processing Unit), a storage unit 103 such as a ROM (Read Only Memory) or RAM (Random Access Memory), and the controller 300. The communication I / F 104 is provided. The first communication unit 100 further includes a power line communication unit 101 for performing power line communication with the second communication unit 105, and is configured by, for example, a PLC master in a high-speed PLC. The second communication unit 105 includes a power line communication unit 1051 and a storage unit 1052 for performing power line communication with the first communication unit 100. The second communication unit 105 is connected to the first communication unit 100 through the power line 106, receives power output from the first communication unit 100, and communicates with the first communication unit 100 through power line communication. The second communication unit 105 is configured by a PLC slave in a high-speed PLC, for example. The 2nd communication part 105 is connected with the sensor 201, and transmits the detected value from the sensor 201 to a 1st communication part by power line communication. The second communication unit 105 and the sensor 201 constitute a sensor unit 200. When the sensor unit 200 is arranged in a vacuum environment, the field through connector 44 shown in FIG. 1 is used, but is omitted in FIG.

  The first communication unit 100 detects an abnormality of the sensor unit 200 based on the communication result with the second communication unit 105. That is, the first communication unit 100 functions as an abnormality detection unit that detects an abnormality of the sensor unit 200 based on the communication result with the second communication unit 105 or the communication content between the second communication unit 105 and the sensor 201. . The control unit 102 of the first communication unit 100 starts a process shown below by executing a program stored in the storage unit 103.

  The control unit 102 determines whether there is a transmission from the second communication unit 105 (S10). The control unit 102 displays information regarding whether there is a transmission from the second communication unit 105 to the first communication unit 100, that is, whether communication between the first communication unit 100 and the second communication unit 105 is established. get. The control unit 102 determines whether transmission from the second communication unit 105 to the first communication unit 100 is performed based on the acquired information.

  When there is no transmission from the 2nd communication part 105 (S10: NO), the control part 102 determines with the 2nd communication part 105 having failed (S101), and complete | finishes a process.

  When there is a transmission from the second communication unit 105 (S10: YES), the control unit 102 determines whether or not the detected value from the sensor 201 is included in the transmission content from the second communication unit 105 (S11). The first communication unit 100 refers to the acquired transmission content from the second communication unit 105 and determines whether or not the detection value from the sensor 201 is included in the transmission content.

  When the detected value is not included (S11: NO), the control unit 102 determines that the sensor 201 is out of order (S111). In the acquired transmission content from the second communication unit 105, the control unit 102, for example, based on a variable in which the detection value from the sensor 201 is stored or a signal transmitted from the second communication unit 105, the presence or absence of the detection value. Confirm. When the transmission value from the second communication unit 105 does not include the detection value from the sensor 201, the control unit 102 determines that the sensor 201 has failed and ends the process.

  When the detected value is included (S11: YES), the control unit 102 determines whether the difference between the detected value from the sensor 201 and the initial value is equal to or less than a predetermined value (S12). The control unit 102 refers to the detection value from the sensor 201 in the acquired transmission content from the second communication unit 105 and stores it in the storage unit 103 of the first communication unit. The storage unit 103 stores an initial value of the output from the sensor 201 in advance. This initial value is, for example, a detection value from the sensor 201 at the time of shipment or installation of the transport device 1 (own device). Further, the storage unit 103 stores a predetermined value indicating a range in which the deviation from the initial value is allowed or assumed, that is, a range in which a detection value from the sensor 201 can be normal. The control unit 102 derives a difference between the acquired detection value from the sensor 201 and the initial value, and determines whether the difference is equal to or less than a predetermined value. Note that the control unit 102 may communicate with the controller 300 and refer to an initial value and a predetermined value stored in the storage unit 302 of the controller 300.

  When it is not less than the predetermined value (S12: NO), the control unit 102 determines that the sensor 201 is abnormally detected (S121). The case where the value is not less than or equal to the predetermined value means that the detection value from the sensor 201 is outside the range assumed based on the initial value, and a numerical error has occurred in the sensor 201. Therefore, the control unit 102 determines that the detection of the sensor 201 is abnormal (numerical error of the sensor 201), and ends the process.

  When it is below the predetermined value (S12: NO), the control unit 102 determines that the sensor unit 200 is normal (S13). When the difference between the detected value of the sensor 201 and the initial value is equal to or less than a predetermined value, the control unit 102 determines that the sensor unit 200, that is, the sensor 201 and the second communication unit 105 are operating normally.

  The control unit 102 communicates with the controller 300 about the result of failure determination (abnormality detection or normality determination) regarding the sensor unit 200 performed in the present embodiment, and, for example, on the display display via the input / output I / F 303 of the controller 300. It may be displayed.

  Based on the communication result between the first communication unit 100 and the second communication unit 105, in order to perform failure determination such as abnormality detection of the sensor unit 200, the sensor unit 200 located in the vacuum environment, that is, the second communication unit 105 and the sensor 201. An abnormality or failure can be easily detected.

  In the present embodiment, the control unit 102 of the first communication unit 100 detects abnormality of the sensor unit 200 including the sensor 201 and the second communication unit 105 based on the information transmitted from the second communication unit 105. However, it is not limited to this. Even if the control unit 301 of the controller 300 communicates with the first communication unit 100 and detects an abnormality of the sensor unit 200 based on the transmission content from the second communication unit 105 acquired via the first communication unit 100. Good. Alternatively, the control unit 301 of the controller 300 and the control unit 102 of the first communication unit 100 may detect abnormality of the sensor unit 200 in cooperation.

In the above-described embodiment, an example in which a plurality of sensor units 200 are provided on each of the left and right sets of support arms 8 and the like has been described. However, the present invention is not limited to this. For example, it is good also as a structure provided with the one sensor unit 200 in 2 sets of left and right support arms 8 grade | etc., Respectively. Alternatively, the left or right support arm 8 or the like may be provided with a plurality of sensor units 200, and the other support arm 8 or the like may be provided with one sensor unit 200.
In the above embodiment, the example in which the sensor unit 200 is disposed only in a vacuum environment has been described, but the present invention is not limited to this. For example, the sensor unit 200 may be disposed in a vacuum environment and an atmospheric pressure environment. That is, the first communication unit 100 and the sensor unit 200 disposed in a vacuum environment are connected by the power line 106 via the field through connector 44, and the sensor unit 200 disposed in the atmospheric pressure state space with the first communication unit 100. Can also be connected by the power line 106.

In addition, the horizontal holding mechanism is not a transport device provided with a mechanism for rotating the arm as described above, but is held by the hand holding unit 51 and the hand holding unit 51 by including another horizontal moving mechanism (for example, a slide mechanism). The transport device 1 may be a structure that moves the hand 5 in the horizontal direction.
In this case, for example, the sensor unit 200 is arranged inside the hand holding unit 51 or inside the horizontal movement mechanism.
Further, instead of the lifting mechanism disposed inside the base housing 25 as in the lifting mechanism 3 described above, a vertically moving mechanism (for example, vertically moving) disposed at a position in a vacuum environment such as the transfer chamber 500. By providing the link arm mechanism), the conveyance device 1 may be configured to move the hand holding unit 51 and the hand 5 held by the hand holding unit 51 in the vertical direction.
When such a vertical movement mechanism is provided, the sensor unit 200 is disposed, for example, inside the hand holding unit 51 or inside the vertical movement mechanism.
Furthermore, by providing a mechanism (for example, an articulated arm mechanism) that combines a horizontal movement mechanism and a vertical movement mechanism, the hand holding unit 51 and the hand 5 held by the hand holding unit 51 are moved in the horizontal direction and the vertical direction. The transfer device 1 having a structure may be used.
In this case, for example, the sensor unit 200 is arranged inside the hand holding unit 51 or inside a mechanism that combines a horizontal movement mechanism and a vertical movement mechanism.
The horizontal movement mechanism and the vertical movement mechanism described above do not mean that all of them are in a vacuum environment. For example, a motor for driving the horizontal movement mechanism or the vertical movement mechanism is in an atmospheric pressure environment. There may be. That is, even if it is disposed at a position in the vacuum environment such as the transfer chamber 500, an atmospheric pressure environment is formed inside the horizontal movement mechanism and / or the vertical movement mechanism by vacuum sealing, and the motor is placed in the atmospheric pressure environment. Etc. may be arranged. The hand holding unit 51 and the hand 5 held by the hand holding unit 51 may be in a vacuum environment, and the motor and the like are a horizontal movement mechanism and / or a vertical movement mechanism arranged inside the base housing 25. May be.
In any case, it is only necessary that the transport apparatus 1 has a structure including a work moving mechanism that can hold a work by the hand 5 and transport the work to a desired position in a vacuum environment.
In the above description, the power and the detection signal of the sensor are bridged between the atmospheric pressure environment and the vacuum environment via the field through connector 44. However, the present invention is not limited to this. For example, a wireless power feeding mechanism may be used to bridge the power and the detection signal of the sensor between the atmospheric pressure environment and the vacuum environment.

  It should be thought that embodiment disclosed this time is an illustration and restrictive at no points. The scope of the present invention is defined by the terms of the claims, rather than the meanings described above, and is intended to include any modifications within the scope and meaning equivalent to the terms of the claims.

DESCRIPTION OF SYMBOLS 1 Conveyance device 2 Base 21 Z-axis motor 22 Belt / pulley mechanism 23 Linear guide 24 Pole screw mechanism 25 Base housing 3 Lifting mechanism 31 θ-axis motor 32 First reduction gear 33 First vacuum seal 34 Bellows 35 Cable bear 4 Rotation mechanism 41 X-axis motor 411 Belt / pulley mechanism 42 2nd speed reducer 43 2nd vacuum seal 44 Field through connector 5 Hand 51 Hand holding part 52 Wrist part 6 Hand holding arm (work movement mechanism)
61 recess 7 elbow 8 support arm (work movement mechanism)
100 1st communication part (communication part)
101 power line communication unit 102 control unit 103 storage unit 104 communication I / F
105 Second communication unit (communication unit)
1051 Power line communication unit 1052 Storage unit 106 Power line 200 Sensor unit 201 Sensor 202 Wiring 203 Multi-layer circuit 204 Sensor substrate 205 Second communication unit substrate 206 Resin member 207 Heat transfer member 208 Housing 209 Bolt 210 Plate member 300 Controller 301 Control unit 302 Storage unit 303 Input / output I / F
304 Communication I / F
305 Power supply unit 400 Communication line 500 Transfer chamber 501 Connection flange 502 Leg

Claims (8)

A transport device including a work moving mechanism for transporting a work in a vacuum space,
A sensor provided in the workpiece moving mechanism;
A power line for supplying power to the sensor;
A communication device comprising: a communication unit that communicates a detection value from the sensor with a power line via the power line. The communication unit includes a first communication unit provided in a space in an atmospheric pressure state,
A second communication unit that is provided in the vacuum space and acquires a detection value from the sensor;
The conveyance device according to claim 1, wherein the power line communication is performed between the first communication unit and the second communication unit. The power line for power line communication performed between the first communication unit and the second communication unit is arranged between the space in the atmospheric pressure state and the space in the vacuum state via the field through connector. The conveying apparatus according to claim 2. A housing for housing the second communication unit and the sensor;
The transport device according to claim 2, wherein the casing is filled with a resin member. Comprising a member located in a space in an atmospheric pressure state,
The second communication unit is thermally connected to the workpiece moving mechanism,
The conveying apparatus according to any one of claims 2 to 4, wherein the workpiece moving mechanism is thermally connected to the member. The conveyance device according to claim 5, wherein the workpiece moving mechanism is provided with a recess that meshes with a housing that houses the second communication unit. A plurality of the sensors are provided,
A plurality of the second communication units are provided corresponding to the plurality of sensors,
The conveying device according to any one of claims 2 to 6, wherein at least two or more second communication units share a power line for power line communication with the first communication unit. The abnormality detection part which performs abnormality detection based on the communication result with the said 2nd communication part and the said sensor or the 1st communication part is provided. The any one of Claims 2-7 characterized by the above-mentioned. Transport device.

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