JP2019035698A - Probe structure and method for manufacturing probe structure - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a probe structure and a method for manufacturing the probe structure in which the possibility of deformation of the probe structure can be easily reduced. SOLUTION: An electrode 3 having a first surface 31 and a second surface 32, a first carbon nanotube structure 4 erected on the first surface 31 of the electrode 3, and a second surface 32 of the electrode 3. A probe structure including the second carbon nanotube structure 5 erected on the probe structure, and a method for manufacturing the probe structure. [Selection diagram] Fig. 1

Description

  The present invention relates to a probe structure used for a substrate inspection jig or the like and a method for manufacturing the same.

  Conventionally, in a carbon nanotube (CNT) expected to be used as an electronic device material, an optical material, a conductive material, or a biological material, a bulk aggregate is formed by aggregating a large number of carbon nanotubes. Are known. In addition, the size of the bulk aggregate is increased to a large scale, and a catalyst is arranged on the growth substrate so as to improve the properties such as purity, specific surface area, conductivity, density, hardness, and the like. A method of chemical vapor deposition (CVD) of carbon nanotubes is known (for example, see Patent Document 1).

JP 2007-181899 A

  By the way, after the carbon nanotube bulk structure disclosed in Patent Document 1 is manufactured as an aggregate of a plurality of carbon nanotubes grown to a predetermined length in the presence of a catalyst arranged on a growth substrate, The base end portion is configured to be used as an electronic device material, a conductive material, or the like in a state where the base end portion is physically, chemically, or mechanically separated from the growth substrate.

  In order to detect an electrical signal such as a substrate inspection jig by connecting the base end portion of the carbon nanotube bulk / structure to an electrode portion for transmitting a signal to a control unit or the like of an inspection apparatus. It can be considered to be used as a probe structure. However, in this case, when the total length of the carbon nanotube bulk / structure is increased, the carbon nanotube bulk / structure is likely to be distorted or deformed. For this reason, there is a disadvantage that the position of the tip portion of the probe structure is displaced with respect to the target position to be contacted.

  An object of the present invention is to provide a probe structure that can easily reduce the risk of deformation of the probe structure and a method for manufacturing the probe structure.

  A probe structure according to the present invention includes an electrode having a first surface and a second surface, a first carbon nanotube structure erected on the first surface of the electrode, and an erection on the second surface of the electrode. The second carbon nanotube structure is provided.

  According to this configuration, since the first carbon nanotube structure and the second carbon nanotube structure can be grown from both ends of the electrode to form a probe structure, the carbon nanotube structure can be peeled from the growth substrate. And a probe structure having a predetermined length can be formed. In addition, since the electrode is disposed between the first carbon nanotube structure and the second carbon nanotube structure, the length substantially combining the first carbon nanotube structure and the second carbon nanotube structure. The substantially central portion of the carbon nanotube structure is held by the electrode. As a result, the first carbon nanotube structure is compared with the continuous carbon nanotube structure that is substantially equal to the combined length of the first carbon nanotube structure and the second carbon nanotube structure, as described in the background art. In addition, the probe structure in which the second carbon nanotube structure is grown from both ends of the electrode is less likely to be deformed.

  Further, it is preferable that a holding plate for holding the electrode is further provided, and the first carbon nanotube structure and the second carbon nanotube structure are each erected so as to extend in a plate thickness direction of the holding plate.

  According to this configuration, it is possible to stably support the probe structure in which the first carbon nanotube structure and the second carbon nanotube structure are connected via the electrode, and the handling is facilitated. can do.

  A plurality of the electrodes may be arranged on the holding plate in a state of being insulated from each other.

  According to this configuration, the probe structure can be more suitably used as an inspection jig or the like of a substrate inspection apparatus having a large number of probes.

  Further, an intermediate portion of the first carbon nanotube structure and the second carbon nanotube structure is converged at a higher density than a rising portion of the first carbon nanotube structure and the second carbon nanotube structure rising from the electrode. It is preferable.

  According to this configuration, in the first carbon nanotube structure and the second carbon nanotube structure formed of an aggregate of a plurality of carbon nanotubes, the number of contact points between the carbon nanotubes increases, and the current path increases. By increasing the current path, it becomes easy to reduce the electrical resistance of the first carbon nanotube structure and the second carbon nanotube structure.

  The first carbon nanotube structure and the second carbon nanotube structure are surrounded by a shape-retaining layer made of a material having insulation and elasticity, and the first carbon nanotube structure and the second carbon nanotube structure It is preferable to have a configuration in which the front end portion is exposed from the surface of the shape retaining layer.

  According to this configuration, it is possible to effectively prevent deformation and damage while maintaining the conductivity of the first carbon nanotube structure and the second carbon nanotube structure. Further, when the holding plate for holding the electrode is provided, the holding plate functions as a core material that suppresses distortion of the shape-retaining layer due to mechanical contraction stress, thermal stress, or the like. For this reason, it can suppress effectively that position shift arises in the tip part of the 1st carbon nanotube structure and the 2nd carbon nanotube structure, and there is an advantage that the mechanical position accuracy of a probe tip can be improved more.

  The probe structure manufacturing method according to the present invention includes an electrode forming step of forming an electrode having a first surface and a second surface, and a catalyst in which a catalyst is disposed on each of the first surface and the second surface of the electrode. A first carbon nanotube structure is formed on the first surface of the electrode by chemical vapor deposition of a plurality of carbon nanotubes in the presence of the catalyst on the first surface of the electrode; And a carbon nanotube structure generation step of generating a second carbon nanotube structure by chemical vapor deposition of a plurality of carbon nanotubes in the presence of the catalyst.

  According to this configuration, according to this configuration, the first carbon nanotube structure and the second carbon nanotube structure can be grown from both ends of the electrode to form a probe structure. A probe structure having a predetermined length can be formed without peeling off the structure. In addition, since the electrode is disposed between the first carbon nanotube structure and the second carbon nanotube structure, the length substantially combining the first carbon nanotube structure and the second carbon nanotube structure. The substantially central portion of the carbon nanotube structure is held by the electrode. As a result, the first carbon nanotube structure and the continuous carbon nanotube structure having the combined length of the first carbon nanotube structure and the second carbon nanotube structure, as described in the background art, The probe structure in which the second carbon nanotube structure is grown from both ends of the electrode is less likely to be deformed.

  Further, in the electrode forming step, after forming a through hole to be a holding hole of the electrode in the holding plate, the through hole is filled with a conductive material, and the first surface and the second surface of the electrode are formed. It is preferable to form the electrode in an exposed state.

  According to this configuration, a probe structure that is easy to handle can be manufactured by stably supporting the probe structure.

  Further, in the electrode forming step, after the plurality of through holes are formed in the holding plate, each of the holding holes is filled with a conductive material, and the plurality of electrodes are insulated from each other. You may make it form.

  According to this configuration, it is possible to easily manufacture a probe structure that can be more suitably used as an inspection jig or the like of a substrate inspection apparatus including a large number of probes.

  Further, the first carbon nanotube structure and the second carbon nanotube structure are exposed to a liquid, and then dried, so that the first carbon nanotube structure and the second carbon nanotube structure rising from the electrode are more than the rising portions. It is preferable to further include a converging step for converging the intermediate portions of the first carbon nanotube structure and the second carbon nanotube structure with high density.

  According to this configuration, the electrical resistance of the first carbon nanotube structure and the second carbon nanotube structure can be easily reduced.

  In addition, after filling with a filling material having fluidity so as to surround the first carbon nanotube structure and the second carbon nanotube structure, the shape retention layer is cured by hardening the filling material. It is preferable to further include a shape-retaining layer forming step of forming

  According to this configuration, a probe structure having excellent strength and durability can be manufactured while maintaining the conductivity of the first carbon nanotube structure and the second carbon nanotube structure. Further, when the holding plate is used, the holding plate positioned between the first carbon nanotube structure and the second carbon nanotube structure is not deformed due to mechanical shrinkage stress or thermal stress of the shape holding layer. It can function as a core material to be suppressed. For this reason, it can suppress effectively that position shift of the tip part of the 1st carbon nanotube structure and the 2nd carbon nanotube structure occurs, and there is an advantage that the mechanical position accuracy of a probe tip can be improved effectively.

  Further, in the shape retention layer forming step, a filling material having fluidity is filled between a plurality of carbon nanotubes constituting the first carbon nanotube structure and the second carbon nanotube structure and cured. May be.

  According to this configuration, the strength and durability of the probe structure can be improved more effectively.

  Moreover, it is preferable to further include a removing step of removing the tip portions of the first carbon nanotube structure and the second carbon nanotube structure.

  According to this configuration, since the tip of each carbon nanotube has a dome shape, when contacting the planar conductive surface, only the top side of the dome comes into contact, whereas the tip is By cutting, a bamboo ring is formed into a ring shape, so that the contact area is expanded and the contact resistance is assumed to be reduced accordingly. Furthermore, when the tip part of each carbon nanotube constituting the first carbon nanotube structure and the second carbon nanotube structure is separated, or when the tip part of the carbon nanotube structure is a crater shape, etc. Since the tip of the first carbon nanotube structure and the second carbon nanotube structure can be flattened by cutting away the tip, the contact area with the planar conductive surface is increased, and the first carbon nanotube structure The conductivity can be effectively improved by reducing the contact resistance between the body and the second carbon nanotube structure.

  Moreover, it is preferable to further include a step of removing the surface of the shape retaining layer.

  According to this structure, when the filling material which comprises a shape retention layer has adhered to the front-end | tip part of a 1st carbon nanotube structure and a 2nd carbon nanotube structure, it becomes possible to remove this.

  According to the probe structure having such a configuration, it is easy to reduce the possibility that the probe structure is deformed. Moreover, according to the manufacturing method having such a configuration, it is possible to easily manufacture a probe structure that can easily reduce the risk of deformation.

It is sectional drawing which shows embodiment of the probe structure which concerns on this invention. It is process drawing which shows the manufacturing method of the probe structure which concerns on this invention. It is explanatory drawing which shows the manufacturing process of the probe structure which concerns on this invention. It is a perspective view which shows the formation process of a carbon nanotube structure. It is a perspective view which shows the formation process of a carbon nanotube structure. It is explanatory drawing which shows the example which used the probe structure which concerns on this invention as an inspection jig | tool of a board | substrate inspection apparatus.

  Embodiments according to the present invention will be described below with reference to the drawings. In addition, the structure which attached | subjected the same code | symbol in each figure shows that it is the same structure, The description is abbreviate | omitted.

  FIG. 1 is a cross-sectional view showing an embodiment of a probe structure according to the present invention, FIG. 2 is a process diagram showing a method for manufacturing the probe structure 1, and FIG. 3 is an explanatory diagram showing a process for manufacturing the probe structure 1. 4 and 5 show a first carbon nanotube structure 4 (hereinafter referred to as a first CNT structure 4) and a second carbon nanotube structure 5 (hereinafter referred to as a second CNT structure 5) constituting the probe structure 1. FIG. 6 is an explanatory view showing an example in which the probe structure 1 is used as an inspection jig of a substrate inspection apparatus.

  The probe structure 1 includes a holding plate 2 having a first surface (surface located on the upper side in FIG. 1) 21 and a second surface (surface located on the lower side in FIG. 1) 22, and is held by the holding plate 2. The plurality of electrodes 3, the first CNT structure 4 erected on the first surface 31 of each electrode 3, and the second CNT erected on the second surface 32 of each electrode 3, respectively. The structure 5 is provided.

The holding plate 2 is made of an insulated crystalline silicon substrate or the like in which a plurality of through holes 23 that serve as holding holes for the electrodes 3 are formed. The peripheral surfaces of the first surface 21, the second surface 22, and the through hole 23 of the holding plate 2 are covered with an insulating film 24 made of silicon dioxide (SiO ₂ ).

The electrode 3 is made of a conductive material such as gold, silver, copper, or an aluminum alloy installed so as to be embedded in the through hole 23, and the first surface 31 and the second surface 32 of the electrode 3 are 0.01 mm to It is formed in an island shape having a width dimension of about 0.2 mm and a thickness of about 0.1 μm to 9 μm.
The plurality of electrodes 3 held by the holding plate 2 are disposed in a state of being insulated from each other by the insulating film 24.

  In the present embodiment, the first surface 31 and the second surface 32 provided at both end portions in the axial direction are larger in diameter than the main body portion of the electrode 3 disposed in the through hole 23 of the holding plate 2. Is formed. According to this configuration, the first CNT structure 4 and the second CNT structure 5 are disposed in the through hole 23 while sufficiently securing the areas of the first surface 31 and the second surface 32 that are the installation surfaces of the first CNT structure 4 and the second CNT structure 5. Therefore, it is possible to save the material cost by reducing the capacity of the electrode main body. In addition, it is also possible to form the main-body part of the electrode 3, the 1st surface 31, and the 2nd surface 32 in the same diameter.

  The first surface 31 and the second surface 32 of the electrode 3 are arranged by depositing, for example, a catalyst 33 made of iron, nickel, or cobalt for forming the first CNT structure 4 and the second CNT structure 5. It is installed. The thickness of the catalyst 33 is preferably 1 nm or more and 100 nm or less, and more preferably 1 nm or more and 5 nm or less.

  In addition, it is good also considering the whole holding | maintenance board 2 as an insulation structure by forming the holding | maintenance board 2 with the ceramic material which has insulation, or glass material. In this case, without providing the insulating film 24, the plurality of electrodes 3 can be held on the holding plate 2 while being insulated from each other.

  The first CNT structure 4 and the second CNT structure 5 are formed by combining a plurality of single-walled or multi-walled carbon nanotubes 10 in the presence of the catalyst 33 using a conventionally known CVD apparatus (not shown). It consists of an aggregate of carbon nanotubes 10 formed by chemical vapor deposition.

  The carbon nanotube 10 has an outer diameter of 1 nm to 20 nm and a standing length of 200 μm to 2 mm. A preferable range of the outer diameter of the carbon nanotube 10 is 10 nm to 15 nm. A more preferable range of the standing length of the carbon nanotube 10 is 200 μm to 500 μm.

  In the first CNT structure 4 and the second CNT structure 5, compared to the rising portions from the first surface 31 and the second surface 32 of the electrode 3, the intermediate portion and the tip side portion thereof are converged with high density. . That is, the outer diameters of the first CNT structure 4 and the second CNT structure 5 are formed so that the intermediate portion and the tip side portion thereof are thinner than the rising portion from the electrode 3.

The density at the rising portion of the first CNT structure 4 and the second CNT structure 5 is 10 ¹⁰ / cm ² to 10 ¹¹ / cm ² , and the first CNT structure 4 and the second CNT structure 5 It is preferable that the intermediate part and the tip side part have a density of about 5 to 20 times the density of the rising part. The intermediate portion (substantially the center in the length direction) may be higher in density than the rising portions of the first CNT structure 4 and the second CNT structure 5, and the density magnification in the above range is not necessarily required.

  Further, on the first surface 21 and the second surface 22 of the holding plate 2, a shape retaining layer 6 made of silicone rubber or the like having insulating properties and elasticity is provided on the first CNT structure 4 and the second CNT structure. 5 is provided so as to surround 5. Moreover, the front-end | tip part of the 1st CNT structure 4 and the 2nd CNT structure 5 is installed in the state exposed from the surface of the shape-retaining layer 6.

  As shown in FIG. 2, the manufacturing method of the probe structure 1 includes an electrode forming step K1 for forming the electrode 3, and a catalyst arrangement in which a catalyst 33 is disposed on the first surface 31 and the second surface 32 of the electrode 3, respectively. The first CNT structure 4 is generated by chemical vapor deposition of the plurality of carbon nanotubes 10 in the presence of the catalyst 33 on the first surface 31 of the electrode 3 and the first surface 31 of the electrode 3. CNT structure generation step K3 for generating a second CNT structure 5 by chemical vapor deposition of a plurality of carbon nanotubes 10 in the presence of the catalyst 33 on the 32, and the first CNT structure 4 and the second CNT A convergence step K4 for converging at least an intermediate portion of the structure 5 with high density, a shape retention layer forming step K5 for forming the shape retention layer 6 having insulation and elasticity, the first CNT structure 4 and the second CNT structure 4 The tip of the CNT structure 5 and the surface of the shape-retaining layer 6 And a removal step K6 of removing equal dividing.

  The removal step K6 may be a step of removing only the tip portions of the first CNT structure 4 and the second CNT structure 5, or may be a step of removing only the surface of the shape retaining layer 6. .

  In the electrode forming step K1, as shown in FIG. 3A, the first surface 21, the second surface 22, and the peripheral surface of the through hole 23 are formed in the through hole 23 of the holding plate 2 covered with the insulating film 24. The electrode 3 is formed at a position corresponding to the through hole 23 by filling with silver, copper, or aluminum metal material.

  Thereafter, in the catalyst disposing step K2, on the first surface 31 and the second surface 32 of each electrode 3, an iron chloride thin film, an iron thin film prepared by sputtering, an iron-molybdenum thin film, an alumina-iron thin film, alumina-cobalt. A catalyst 33 made of a thin film, an alumina-iron-molybdenum thin film, or the like is disposed by sputtering deposition or the like.

  Next, in a CNT structure generation step K3, a hydrocarbon containing carbon, especially lower hydrocarbons such as methane, ethane, propane, ethylene, propylene, acetylene, etc. are injected by using a CVD apparatus (not shown) to 500 Heat to a temperature above ℃. As a result, as shown in FIG. 3B and FIG. 4, in the presence of the catalyst 33, a plurality of single-walled or multi-walled carbon nanotubes 10 are collectively grown by chemical vapor deposition. The first CNT structure 4 and the second CNT structure 5 are formed on the first surface 31 and the second surface 32 of the electrode 3, respectively.

When chemical vapor deposition of the carbon nanotubes 10 is performed, it is preferable to use an atmospheric gas that does not react with the carbon nanotubes 10 such as helium, argon, hydrogen, nitrogen, neon, krypton, carbon dioxide, and chlorine. Further, the atmospheric pressure of the reaction is preferably 10 ² Pa or more and 10 ⁷ Pa or less, more preferably 10 ⁴ Pa or more and 3 × 10 ⁵ Pa or less, and further preferably 5 × 10 ⁴ Pa or more and 9 × It is particularly preferable that the pressure be 10 ⁴ Pa or less.

  Next, in the convergence step K4, between the plurality of carbon nanotubes 10, for example, water, alcohols (isopropanol, ethanol, methanol), acetones (acetone), hexane, toluene, cyclohexane, DMF (dimethylformamide), etc. After the droplet E is exposed to the liquid by dropping, it is naturally dried at room temperature, dried under vacuum, or heated by a hot plate or the like.

  As a result, the zipper effect is expressed by the surface tension generated by dropping the droplet E and the van der Waals force generated between the carbon nanotubes 10, and the carbon nanotubes 10 are attracted and converged. At this time, since the base end portions of the first CNT structure 4 and the second CNT structure 5 are respectively fixed to the first surface 31 and the second surface 32 of the electrode 3, FIG. 3 (c) and FIG. As shown, the middle of the first CNT structure 4 and the second CNT structure 5 is higher than the rising portions of the first CNT structure 4 and the second CNT structure 5 rising from the first surface 31 and the second surface 32, respectively. The portion and the upper portion thereof are remarkably converged and densified.

  In addition, since the front-end | tip part of the 1st CNT structure 4 and the 2nd CNT structure 5 is made into the free end, it is easy to expand. Therefore, the first CNT structure 4 and the second CNT structure 5 are converged as a whole, and the first CNT structure 4 and the second CNT structure 5 are more than the rising portions of the first CNT structure 4 and the second CNT structure 5. It suffices that at least the middle part of the second CNT structure 5 is thin, and the first CNT structure 4 and the tip part of the second CNT structure 5 may be thickened by partially expanding.

  Thereafter, in the shape retention layer forming step K5, as shown in FIG. 3 (d), a fluid-filling material, for example, a silicone-based material is used so as to surround the first CNT structure 4 and the second CNT structure 5. After filling the elastomer, the filling material is cured to form the shape retaining layer 6 having insulation and elasticity.

  As the filling material having fluidity, various materials including a rubber material, a flexible plastic material, and a curable liquid rubber can be used. As the liquid rubber, various liquid rubbers such as RTV (Room Temperature Vulcanizing) silicone rubber, heat curable silicone rubber, ultraviolet curable silicone rubber and the like can be used. For example, RTV silicone rubber “KE” manufactured by Shin-Etsu Chemical Co., Ltd. -1285 "or the like can be used.

  When forming the shape retaining layer 6, a filling material may be filled between the plurality of carbon nanotubes 10. Thereby, for example, it is possible to prevent the first CNT structure 4 used as a probe or the like from falling down, and support the adjacent CNT structures 4 and the adjacent CNT structures 5 so as not to contact each other. It becomes possible. Further, a filling material may be filled between a plurality of carbon nanotubes 10 constituting the first CNT structure 4 and the second CNT structure 5 and cured. In this case, the strength or durability of the first CNT structure 4 and the second CNT structure 5 can be improved.

  Next, in the removing step K6, as shown in FIG. 3 (e), the tip of the first CNT structure 4 and the second CNT structure 5 and the surface of the shape-retaining layer 6 are lasered using a laser processing machine. Cut off by means such as machining or machining using a cutter blade. Alternatively, an etching method in which the shape retaining layer 6 in the vicinity of the tip portions of the first CNT structure 4 and the second CNT structure 5 is selectively removed but the carbon nanotubes are not removed can be used. Thereby, when the said filling material which comprises the shape-retaining layer 6 has adhered to the front-end | tip part of the 1st CNT structure 4 and the 2nd CNT structure 5, this can be removed reliably.

  In addition, when the tip portions of the carbon nanotubes 10 constituting the first CNT structure 4 and the second CNT structure 5 are separated or spread, the tip portions are excised to obtain the first CNT structure. The tips of the structure 4 and the second CNT structure 5 can be made flat, or a high-density portion can be exposed at the tip. In this way, the probe structure 1 shown in FIG. 1 is manufactured.

  As shown in FIG. 6, the probe structure 1 having the above-described configuration includes, for example, a glass epoxy substrate, a flexible substrate, a ceramic multilayer wiring substrate, an electrode plate for a liquid crystal display or a plasma display, a transparent conductive plate for a touch panel, and the like. It can be used as an inspection jig or the like for a substrate 8 to be inspected comprising a package substrate for a semiconductor package, a film carrier, or the like.

  Specifically, an electrode plate 9 that transmits a signal to an unillustrated inspection device including an ammeter, a voltmeter, a current source, etc. in a state where the probe structure 1 is held by a jig holding member (not shown), The probe structure 1 is connected to the surface opposite to the substrate 8. In the electrode plate 9, an electric wire 90 having a flat electrode portion 91 at the tip is installed so as to penetrate the electrode plate 9. When this electrode plate 9 is connected to the probe structure 1, the electrode portion 91 of the electric wire 90 and the tip surface of the second CNT structure 5 are electrically connected. Accordingly, the first CNT structure 4 can be used as a probe electrically connected to the inspection apparatus via the electric wire 90, the second CNT structure 5, and the electrode 3.

  Then, the first CNT structure 4 is brought into contact with the first inspection point 81 in a state in which the tip portion of the first CNT structure 4 is brought into contact with the inspection points 81 and 82 such as wiring patterns and solder bumps provided on the substrate 8. A preset inspection current is passed between one CNT structure 4 and the first CNT structure 4 in contact with the other inspection point 82 to detect the voltage between them, and the value is preset. Whether the substrate 8 is good or bad is determined by comparing it with a reference value.

  When the probe structure 1 is constituted by the first CNT structure 4 and the second CNT structure 5 grown from both ends of the electrode 3 as described above, the CNT structure is not peeled off from the growth substrate. The probe structure 1 having a predetermined length can be formed. And since the electrode 3 is arrange | positioned between the 1st CNT structure 4 and the 2nd CNT structure 5, the length which match | combined the 1st CNT structure 4 and the 2nd CNT structure 5 substantially. The substantially central portion of the carbon nanotube structure is held by the electrode. As a result, the first CNT structure as compared with the continuous carbon nanotube structure substantially equal to the combined length of the first CNT structure 4 and the second CNT structure 5 as described in the background art. The probe structure in which the 4 and second CNT structures 5 are grown from both ends of the electrode 3 is less likely to be deformed.

  As a result, when using the probe structure 1 as a probe in which one tip of the first CNT structure 4 and the second CNT structure 5 is brought into contact with the probing target and the other tip is connected to the apparatus side, It becomes easy to suppress the occurrence of displacement in the tip portion.

  That is, an electrode 3 and a holding plate 2 made of a conductive material such as gold, silver, copper, or an aluminum alloy installed so as to be embedded in the through-hole 23 of the holding plate 2 are provided with a probe structure. 1 can function as a core material that suppresses distortion caused by mechanical contraction stress, thermal stress, and the like. For this reason, it can suppress effectively that position shift of the tip part of the 1st CNT structure 4 and the 2nd CNT structure 5 arises, and there is an advantage that the mechanical position accuracy of a probe tip can be improved effectively.

  In addition, the tip of the carbon nanotube substrate contacted to the inspection point is in contact with the inspection point when the peeled part peeled off from the substrate on which the carbon nanotube is grown is in contact with the inspection point. There is a possibility that the contact resistance in the case of making it smaller becomes smaller. Therefore, as described above, the electrode 3 having the first surface 31 and the second surface 32, the first CNT structure 4 erected on the first surface 31 and the second surface 32 of the electrode 3, and According to the probe structure 1 provided with the second CNT structure 5, after the carbon nanotube aggregate is peeled off from the substrate as in the prior art, the base end portion is connected to an electrode portion for signal transmission or the like. There is an advantage that the contact resistance generated in the case does not occur and the probe structure 1 according to the present invention can be suitably used as an inspection jig or the like of the substrate inspection apparatus.

  Although the holding plate 2 for holding the electrode 3 can be omitted, as shown in the above-described embodiment, the electrode 3 is held by the holding plate 2, and the first CNT structure 4 and the second CNT According to the structure in which the structures 5 are erected so as to extend in the thickness direction of the holding plate 2, the probe in which the first CNT structure 4 and the second CNT structure 5 are connected via the electrode 3. The structure 1 can be stably supported, and handling thereof can be facilitated.

  Further, when the plurality of electrodes 3 are disposed on the holding plate 2 in a state of being insulated from each other, the probe structure 1 according to the present invention is used as an inspection jig or the like of a substrate inspection apparatus having a large number of probes. It can be used more suitably.

  A configuration in which the intermediate portion of the first CNT structure 4 and the second CNT structure 5 is converged at a higher density than the rising portions of the first CNT structure 4 and the second CNT structure 5 rising from the electrode 3 as described above. According to the above, in the first CNT structure 4 and the second CNT structure 5 formed of an aggregate of a plurality of carbon nanotubes 10, the contact portion between the carbon nanotubes 10 can be increased to increase the current path. it can. Thereby, it becomes easy to reduce the electrical resistance of the first CNT structure 4 and the second CNT structure 5.

  Note that when the strength and conductivity of the first CNT structure 4 and the second CNT structure 5 are sufficiently obtained, the convergence step K4 is omitted, and the first CNT structure 4 and the second CNT structure 5 are erected substantially straight in the thickness direction of the holding plate 2. Alternatively, the first CNT structure 4 and the second CNT structure 5 may be constituted by a plurality of carbon nanotubes 10.

  Furthermore, the shape retaining layer 6 made of a material having insulating properties and elasticity is formed on the retaining plate 2, and the first CNT structure 4 and the second CNT structure 5 are surrounded by the shape retaining layer 6, When the tip portion is installed in a state of being exposed from the surface of the shape-retaining layer 6, the deformation and damage are effective while maintaining the conductivity of the first CNT structure 4 and the second CNT structure 5. Can be prevented.

  In addition, the first CNT structure 4 and the second CNT structure 5 are surrounded by the shape retaining layer 6 while the electrode 3 is held by the retaining plate 2, so that the retaining plate 2 is mechanically attached to each shape retaining layer 6. It functions as a core material that suppresses distortions caused by shrinkage stress and thermal stress. As a result, since the positional deviation of the tip portions of the first CNT structure 4 and the second CNT structure 5 is reduced, there is an advantage that the mechanical position accuracy at the tip portion of the probe structure 1 can be effectively improved. . In addition, when the shape retention property of the 1st CNT structure 4 and the 2nd CNT structure 5 is maintained and the deformation | transformation and damage can fully be prevented, it is good also as a structure which abbreviate | omitted the shape retention layer 6. FIG.

  2 and 3, an electrode forming step K1 for forming the electrode 3 having the first surface 21 and the second surface 22, and a catalyst arrangement for disposing the catalyst 33 on each electrode 3, respectively. Step K2 and chemical vapor deposition of a plurality of carbon nanotubes 10 in the presence of the catalyst 33 on the first surface 31 of the electrode 3 to produce the first CNT structure 4, and the second surface 32 of the electrode 3 The probe structure 1 according to the present invention is provided with a CNT structure generation step K3 for generating a second CNT structure 5 by chemical vapor deposition of a plurality of carbon nanotubes 10 in the presence of the catalyst 33. According to the manufacturing method, there is an advantage that the probe structure 1 that has excellent conductivity and can be suitably used as an inspection jig or the like of a substrate inspection apparatus can be easily manufactured.

  Further, the first CNT structure 4 and the second CNT structure 5 generated in the CNT structure generation step K3 are exposed to a liquid and then dried, thereby drying the first CNT structure 4 and the second CNT structure 4 rising from the electrode 3. When the convergence step K4 for converging the intermediate part of the first CNT structure 4 and the second CNT structure 5 at a higher density than the rising part of the two CNT structures 5 is provided, the first CNT structure 4 and By improving the conductivity of the second CNT structure 5 more effectively, there is an advantage that the probe structure 1 that can be suitably used as an inspection jig or the like of a substrate inspection apparatus can be easily manufactured.

  Further, after filling the holding plate 2 with a filling material having fluidity so as to surround the first CNT structure 4 and the second CNT structure 5, the filling material is cured to provide insulation and elasticity. According to the manufacturing method of the probe structure 1 provided with the shape retention layer forming step K5 for forming the shape retention layer 6 having, while maintaining the conductivity of the first CNT structure 4 and the second CNT structure 5, it is excellent. There is an advantage that the probe structure 1 having high strength and durability can be manufactured.

  In addition, by causing the holding plate 2 to function as a core material that suppresses distortion due to mechanical shrinkage stress, thermal stress, or the like of each shape-holding layer 6, the distal ends of the first CNT structure 4 and the second CNT structure 5 Therefore, there is an advantage that the mechanical position accuracy at the tip of the probe structure 1 can be effectively improved.

  The filler material is filled between the plurality of carbon nanotubes 10 constituting the first CNT structure 4 and the second CNT structure 5 by using a filler material having extremely high fluidity in the shape retention layer forming step K5. When it is made to harden | cure, the intensity | strength and durability of the probe structure 1 can be improved more effectively.

  Moreover, according to the manufacturing method of the probe structure 1 further provided with the removal process K6 which removes at least one part of the surface of the shape retention layer 6 in the front-end | tip part of the 1st CNT structure 4 and the 2nd CNT structure 5. When the filling material constituting the shape-retaining layer 6 is attached to the tip of the first CNT structure 4 and the tip of the second CNT structure 5, this can be reliably removed. Moreover, according to the manufacturing method of the probe structure 1 provided with the removal process which removes the front-end | tip part of the 1st CNT structure 4 and the 2nd CNT structure 5, the front-end | tip part of each carbon nanotube 10 is scattered. In some cases, or when the tip of the carbon nanotube structure has a crater shape, the tip of the first CNT structure 4 and the second CNT structure 5 can be made flat by cutting the tip. Therefore, there is an advantage that the contact area with the conductive surface is expanded, and the conductivity can be further effectively improved by reducing the contact resistance of the first CNT structure 4 and the second CNT structure 5.

DESCRIPTION OF SYMBOLS 1 Probe structure 2 Holding plate 3 Electrode 4 1st carbon nanotube structure 5 2nd carbon nanotube structure 6 Shape retention layer 21 1st surface of a retention plate 22 2nd surface of a retention plate 23 Through-hole 24 Insulating layer 31 Electrode of electrode First surface 32 Second surface of electrode 33 Catalyst 41 Carbon nanotube

Claims (13)

An electrode having a first surface and a second surface;
A first carbon nanotube structure erected on the first surface of the electrode;
A probe structure comprising a second carbon nanotube structure erected on the second surface of the electrode. A holding plate for holding the electrode;
The probe structure according to claim 1, wherein the first carbon nanotube structure and the second carbon nanotube structure are erected so as to extend in a thickness direction of the holding plate.   The probe structure according to claim 2, wherein the holding plate is provided with a plurality of the electrodes insulated from each other.   An intermediate portion of the first carbon nanotube structure and the second carbon nanotube structure is higher than a rising portion of the first carbon nanotube structure and the second carbon nanotube structure rising from the first surface and the second surface of the electrode. The probe structure according to claim 1, wherein the probe structure is converged to a density.   The first carbon nanotube structure and the second carbon nanotube structure are surrounded by a shape-retaining layer made of a material having insulation and elasticity, and tips of the first carbon nanotube structure and the second carbon nanotube structure The probe structure according to any one of claims 1 to 4, wherein a portion is exposed from the surface of the shape retaining layer. An electrode forming step of forming an electrode having a first surface and a second surface;
A catalyst disposing step of disposing a catalyst on each of the first surface and the second surface of the electrode;
A first carbon nanotube structure is formed on the first surface of the electrode by chemical vapor deposition of a plurality of carbon nanotubes in the presence of the catalyst, and the presence of the catalyst on the second surface of the electrode. A method of manufacturing a probe structure comprising: a carbon nanotube structure generation step of generating a second carbon nanotube structure by chemical vapor deposition of a plurality of carbon nanotubes below.   In the electrode forming step, after forming a through hole to be a holding hole of the electrode in the holding plate, the through hole is filled with a conductive material to expose the first surface and the second surface of the electrode. The method for manufacturing a probe structure according to claim 6, wherein the electrode is formed in a state where the electrode is formed.   In the electrode forming step, after forming the plurality of through holes in the holding plate, the holding holes are filled with a conductive material, and the plurality of electrodes are formed in an insulated state. The method for manufacturing a probe structure according to claim 7.   The first carbon nanotube structure and the second carbon nanotube structure generated in the carbon nanotube structure generation step are exposed to a liquid and then dried, thereby drying the first carbon nanotube structure and the first carbon nanotube structure 9. The method according to claim 6, further comprising a converging step for converging the intermediate portion of the first carbon nanotube structure and the second carbon nanotube structure at a higher density than the rising portion of the second carbon nanotube structure. A method for producing the probe structure according to the item.   A filling material having fluidity is filled so as to surround the first carbon nanotube structure and the second carbon nanotube structure, and then the filling material is cured to form a shape-retaining layer having insulation and elasticity. The method for manufacturing a probe structure according to any one of claims 6 to 9, further comprising a shape-retaining layer forming step.   The said shape retention layer formation process WHEREIN: The filling material which has the said fluidity | liquidity is filled between several carbon nanotubes which comprise said 1st carbon nanotube structure and 2nd carbon nanotube structure, and is hardened. Of manufacturing the probe structure.   The method for manufacturing a probe structure according to any one of claims 6 to 11, further comprising a removing step of removing the tip portions of the first carbon nanotube structure and the second carbon nanotube structure.   The method for manufacturing a probe structure according to claim 10 or 11, further comprising a step of removing a surface of the shape retaining layer.

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