JP2019021661A - Medicinal solution change auxiliary device - Google Patents

Abstract

The present invention relates to a chemical liquid exchange assist device, and an object thereof is to obtain a chemical liquid exchange assist device capable of suppressing mixing of bubbles into the chemical liquid. A chemical solution exchange auxiliary device according to the present invention includes a pipe holding unit that holds a pipe for supplying a chemical solution to a semiconductor manufacturing apparatus, and a lowering of the pipe holding unit toward a chemical solution container that stores the chemical solution. One end of the pipe is inserted into the chemical solution, and the pipe holding unit is lifted to move the one end of the pipe above the chemical solution container, and one end of the pipe is inserted into the chemical solution And a speed controller that limits a speed at which the elevator lowers the pipe holding part. [Selection] Figure 3

Description

  The present invention relates to a chemical liquid exchange assist device.

  Patent Document 1 discloses a structure of a piping unit that connects a storage unit that stores a functional liquid and a functional liquid droplet discharge unit. According to this structure, air bubbles can be excluded from the piping unit.

JP 2010-29861 A

  Polyimide may be used as a protective film for semiconductor products. When a high-viscosity chemical such as polyimide is applied to a semiconductor product, bubbles mixed in the liquid may remain as voids in the protective film formed by the application of the chemical. In particular, in a high-voltage power device, this void may cause a failure. For this reason, the reliability of a semiconductor product may fall.

  In general, bubbles are easily mixed into a chemical solution when the chemical solution is exchanged. In a semiconductor manufacturing apparatus, a chemical solution is often exchanged manually by a series of operations. The semiconductor manufacturing apparatus is, for example, a polyimide coating apparatus. Generally, in the chemical solution exchange step, first, an operator pulls out a chemical solution supply pipe from an empty chemical solution container. Next, the operator exchanges an empty chemical solution container and a new chemical solution container. Next, an operator inserts piping into a new chemical | medical solution container. In the chemical exchange process, when the pipe is inserted into the chemical container, the atmosphere may be involved in the chemical due to the vibration of the pipe or the insertion speed. At this time, the air entrained in the chemical solution generally becomes bubbles of several to several tens of μm.

  Here, when the piping insertion step is performed by an operator, it is difficult to stably perform the piping at a low vibration and at a low speed. Moreover, in the structure shown by patent document 1, it is necessary to provide the structure which excludes a bubble on the piping side. For this reason, the structure which excludes a bubble newly will be provided in the semiconductor manufacturing apparatus side, and manufacturing cost may become high.

  The present invention has been made to solve the above-described problems, and an object of the present invention is to obtain a chemical liquid replacement assisting device that can suppress the mixing of bubbles into the chemical liquid.

  The chemical liquid exchange auxiliary device according to the present invention includes a pipe holding part for holding a pipe for supplying a chemical liquid to the semiconductor manufacturing apparatus, and one end of the pipe by lowering the pipe holding part toward the chemical liquid container for storing the chemical liquid. Is inserted into the chemical solution, and the pipe holding part is raised, thereby moving the one end of the pipe above the chemical solution container, and the elevator with one end of the pipe inserted into the chemical solution. A speed controller for limiting a speed at which the pipe holding unit is lowered.

  In the chemical liquid exchange assist device according to the present invention, the piping is inserted into the chemical liquid container by the elevator. Further, the speed at which the pipe descends in the chemical solution is limited by the speed controller. Therefore, mixing of bubbles into the chemical solution can be suppressed.

1 is a schematic configuration diagram of a chemical liquid replacement assisting device according to Embodiment 1. FIG. It is a figure which shows the structure of a chemical | medical solution container. It is a figure which shows the state by which the chemical | medical solution container was mounted in the chemical | medical solution exchange assistance apparatus which concerns on Embodiment 1. FIG. It is a figure which shows the state by which piping was inserted in the chemical | medical solution container. It is a figure explaining the structure of the chemical | medical solution exchange assistance apparatus which concerns on Embodiment 2. FIG. It is a figure explaining the structure of the chemical | medical solution exchange assistance apparatus which concerns on Embodiment 3. FIG. FIG. 10 is a perspective view of a chemical liquid replacement assisting device according to a third embodiment. It is a figure explaining the structure of the chemical | medical solution exchange assistance apparatus which concerns on Embodiment 4. FIG. It is a figure explaining the temporarily stopped state of the elevator which concerns on Embodiment 4. FIG.

  A chemical liquid exchange assist device according to an embodiment of the present invention will be described with reference to the drawings. The same or corresponding components are denoted by the same reference numerals, and repeated description may be omitted.

Embodiment 1 FIG.
FIG. 1 is a schematic configuration diagram of a chemical liquid replacement assisting device 100 according to the first embodiment. The chemical solution replacement assisting device 100 includes a pedestal portion 12. The upper surface of the pedestal portion 12 is a portion on which the chemical solution container is mounted horizontally. A positioning guide 14 is provided on the upper portion of the pedestal portion 12. The positioning guide 14 adjusts the position of the chemical solution container mounted on the pedestal portion 12.

  The chemical exchange auxiliary device 100 includes an elevator 10. The elevator 10 is provided on the pedestal 12. The elevator 10 includes an elevator unit 13. The elevating unit 13 is provided with a pipe holding unit 16. The pipe holding unit 16 holds a pipe for supplying a chemical solution to the semiconductor manufacturing apparatus. The pipe holding unit 16 includes two fixing plates. The pipe is held by the pipe holding part 16 by sandwiching the pipe between the two fixing plates. The pipe holding unit 16 is provided with an adjusting unit 18. The adjusting unit 18 adjusts the interval between the two fixing plates. Accordingly, various shapes of pipes can be held by the pipe holding unit 16.

  The elevator 10 includes a shaft portion 15. The movable range of the elevating part 13 is determined by the shaft part 15. The shaft portion 15 extends in a direction perpendicular to the upper surface of the pedestal portion 12. The elevator 10 lowers and raises the lifting unit 13 and the pipe holding unit 16 provided in the lifting unit 13 along the shaft portion 15. The elevator 10 lowers the pipe holding part 16 in a direction perpendicular to the upper surface of the pedestal part 12 as indicated by an arrow 24. Further, the elevator 10 raises the pipe holding part 16 in a direction perpendicular to the upper surface of the pedestal part 12.

  The elevator 10 includes an elevation change switch 20. Depending on the state of the up / down changeover switch 20, the pipe holding part 16 is lowered or raised. The elevator 10 is provided with a speed controller 22. The speed controller 22 controls the speed at which the elevator 10 moves the pipe holding unit 16 up and down.

  FIG. 2 is a view showing the structure of the chemical solution container 40. A chemical bottle 42 is accommodated in the chemical container 40. A chemical solution 44 is stored in the chemical solution bottle 42. An opening for inserting the pipe 30 is provided on the upper surface of the chemical solution container 40 and the upper surface of the chemical solution bottle 42. The chemical solution container 40 is particularly employed in a method of feeding the chemical solution 44 into the pipe 30 by applying pressure to the liquid surface of the chemical solution 44 as one method of supplying the chemical solution to the semiconductor manufacturing apparatus. Therefore, in the chemical solution supply apparatus adopting a different method, the chemical solution bottle 42 may be directly mounted on the pedestal portion 12 without using the chemical solution container 40. In the present embodiment, the chemical liquid 44 is, for example, a chemical liquid having a high viscosity. The chemical liquid 44 is, for example, polyimide. The structure of the chemical solution container 40 is not limited to this, and the chemical solution 44 may be stored in the chemical solution container 40.

  The pipe 30 is provided with a fixing portion 32 extending perpendicularly to the pipe 30. The fixing part 32 is a part sandwiched between the pipe holding parts 16.

  FIG. 3 is a diagram illustrating a state in which the chemical liquid container 40 is mounted on the chemical liquid replacement assisting apparatus 100 according to the first embodiment. The chemical solution container 40 is mounted on the upper surface of the pedestal portion 12. Further, the side surface of the chemical solution container 40 is held by the positioning guide 14. Thereby, the position in the upper surface of the base part 12 of the chemical | medical solution container 40 is fixed. Further, when the pipe 30 is correctly held by the pipe holding unit 16, the positioning guide 14 causes the upper surface opening position of the chemical liquid bottle 42 stored in the chemical liquid container 40 to be disposed immediately below the pipe 30.

  The pipe 30 is held by the pipe holding part 16 by the fixing part 32 being sandwiched between the pipe holding parts 16. The method by which the pipe holding unit 16 holds the pipe 30 is not limited to this. For example, the pipe holding unit 16 may not include the fixing unit 32, and the pipe holding unit 16 may hold the pipe 30 directly. Moreover, the structure of the piping holding part 16 is not limited to this, What is necessary is just to be able to hold | maintain the piping 30. FIG.

  The pipe 30 is connected to a semiconductor manufacturing apparatus (not shown). In the present embodiment, the semiconductor manufacturing apparatus is, for example, a coating apparatus that applies a protective film to a semiconductor device. One end of the pipe 30 is inserted into the chemical container 40 and the other end is connected to the semiconductor manufacturing apparatus. Thereby, the chemical solution 44 is supplied to the semiconductor manufacturing apparatus through the pipe 30.

  When the elevation switch 20 is switched to the lower side, the elevator 10 lowers the pipe holding unit 16. And the elevator 10 can insert the end of the piping 30 into the chemical | medical solution 44 in the chemical | medical solution bottle 42 by lowering the piping holding | maintenance part 16 toward the chemical | medical solution container 40 which accommodates the chemical | medical solution 44. FIG. Moreover, if the raising / lowering changeover switch 20 is switched to the raising side, the elevator 10 raises the pipe holding part 16. The elevator 10 can move one end of the pipe 30 above the chemical container 40 by raising the pipe holding part 16. In accordance with the switching operation of the up / down changeover switch 20, the up / down unit 13 provided with the pipe holding unit 16 starts to rise or descend. At this time, regardless of whether the elevating part 13 is raised or lowered, the elevating part 13 automatically stops at a predetermined position at the upper end or lower end of the shaft part 15 or at the upper or lower part of the shaft part 15. Yes.

  Next, a method for exchanging the chemical liquid 44 using the chemical liquid exchange auxiliary device 100 according to the present embodiment will be described. When the chemical container 40 becomes empty, the operator switches the elevation switch 20 to the ascending side. As a result, the pipe holding part 16 is raised, and one end of the pipe 30 inserted in the chemical liquid bottle 42 in the chemical liquid container 40 moves above the chemical liquid container 40. Next, the operator replaces the empty chemical solution container 40 with a new chemical solution container 40 in which the chemical solution 44 is stored. Thereby, the new chemical | medical solution container 40 is mounted in the base part 12. FIG. FIG. 3 shows a state in which one end of the pipe 30 is arranged above the chemical solution container 40 and replaced with a new chemical solution container 40.

  Next, the operator switches the elevation switch 20 to the lower side. Thereby, the pipe holding part 16 is lowered, and one end of the pipe 30 is inserted into the chemical solution 44. FIG. 4 is a view showing a state where the pipe 30 is inserted into the chemical solution container 40. Even when one end of the pipe 30 reaches the liquid level of the chemical solution 44, the elevator 10 further lowers the pipe holding unit 16. As a result, one end of the pipe 30 descends in the chemical solution 44.

  The speed controller 22 limits the speed at which the elevator 10 lowers the pipe holding unit 16 when one end of the pipe 30 is inserted into the liquid surface of the chemical liquid 44 and in a state where the pipe 30 is inserted into the chemical liquid 44. In the present embodiment, when one end of the pipe 30 is inserted into the liquid surface of the chemical liquid 44 and in a state where the pipe 30 is inserted into the chemical liquid 44, the speed at which the elevator 10 lowers the pipe holding portion 16 is 10 mm / s or less. . One end of the pipe 30 descends in the chemical solution 44 at a speed of 10 mm / s or less.

  The elevator 10 lowers the pipe holding unit 16 until one end of the pipe 30 reaches the bottom of the chemical bottle 42. The elevator 10 may lower the pipe holding part 16 until one end of the pipe 30 reaches the vicinity of the bottom of the chemical bottle 42. From the above, the replacement of the chemical liquid 44 is completed.

  In general, when the pipe descending speed when the pipe is inserted into the chemical solution is high, the atmosphere is easily involved in the chemical solution. In the present embodiment, the descending speed of the pipe holding unit 16 is controlled to a low speed by the speed controller 22. This time, it was confirmed that in the case of a high-viscosity chemical such as polyimide, the entrainment of air can be suppressed when the insertion speed of the pipe into the chemical is 10 mm / s or less. In the present embodiment, the descending speed of the pipe holding unit 16 is controlled to 10 mm / s or less. Therefore, in the present embodiment, air entrainment into the chemical liquid 44 can be suppressed, and mixing of bubbles into the chemical liquid 44 can be suppressed.

  Thereby, when the chemical | medical solution 44 is apply | coated to a semiconductor device, it can suppress that a void generate | occur | produces in the protective film etc. which are formed from the chemical | medical solution 44. For this reason, the reliability can be improved particularly in a semiconductor device such as a high breakdown voltage power device.

  In this embodiment, it is not necessary to add a special structure to the semiconductor manufacturing apparatus. Further, by moving the chemical replacement assistant device 100 according to the present embodiment to the vicinity of the semiconductor manufacturing apparatus that supplies the chemical liquid 44, the chemical replacement auxiliary device 100 can be easily applied to the semiconductor manufacturing apparatus. Therefore, the chemical solution replacement auxiliary device 100 can be commonly used for a plurality of semiconductor manufacturing apparatuses. For this reason, the manufacturing cost of the semiconductor device can be reduced.

  In the present embodiment, the insertion speed of the pipe 30 into the chemical liquid 44 and the vibration generated in the chemical liquid 44 when the pipe 30 is inserted into the chemical liquid 44 do not depend on the skill of the operator. For this reason, the chemical | medical solution 44 can be replaced | exchanged stably by low vibration and low speed.

  In the present embodiment, the operator raises and lowers the pipe holding unit 16 by switching the elevation switch 20. As a modified example, the chemical liquid replacement assisting apparatus 100 may automatically lower the pipe holding unit 16 when detecting that the chemical liquid container 40 has been replaced. Moreover, the chemical solution replacement assisting device 100 may automatically raise the pipe holding unit 16 when detecting that the chemical solution container 40 is empty.

  Moreover, in this Embodiment, the speed controller 22 controls the raising / lowering speed of the piping holding part 16 uniformly. On the other hand, the ascending / descending speed of the pipe holding part 16 is 10 mm / s when the pipe holding part 16 descends when one end of the pipe 30 is inserted into the liquid surface of the chemical liquid 44 and in the state of being inserted into the chemical liquid 44. If it is below, it does not necessarily have to be constant. For example, when considering improvement in work efficiency, the speed at which the pipe holding unit 16 is raised may be faster than the speed at which it is lowered.

  These modifications can be applied as appropriate to the chemical solution replacement assisting apparatus according to the following embodiments. In addition, since there are many common points with Embodiment 1 about the chemical | medical solution exchange auxiliary | assistance apparatus which concerns on the following embodiment, it demonstrates centering around difference with Embodiment 1. FIG.

Embodiment 2. FIG.
FIG. 5 is a diagram for explaining the structure of the chemical liquid replacement assisting apparatus 200 according to the second embodiment. In the present embodiment, the structure of the elevator 210 is different from that of the first embodiment. The elevator 210 includes an air cylinder 215. The air cylinder 215 includes a piston rod 213 that moves in conjunction with a piston (not shown). The pipe holding part 16 is fixed to the tip of the piston rod 213.

  The elevator 210 includes a dry air supply port 223. A dry air supply tube 221 is connected to the dry air supply port 223. The dry air supply tube 221 supplies dry air to the air cylinder 215 via the up / down changeover switch 220. The elevator 210 also has a dry air exhaust port 225. The dry air exhausted from the air cylinder 215 is exhausted from the dry air exhaust port 225 via the up / down changeover switch 220.

  The up / down switching switch 220 switches between supply of dry air to the air cylinder 215 and exhaust of dry air from the air cylinder 215. When dry air is supplied to the air cylinder 215, the piston rod 213 rises. Thereby, the piping holding part 16 raises. When the dry air is exhausted from the air cylinder 215, the piston rod 213 is lowered. Thereby, the piping holding part 16 descends.

  The speed controller 222 according to this embodiment includes a dry air gauge 226. The dry air gauge 226 is a regulator that adjusts the pressure of dry air in the air cylinder 215. The speed controller 222 controls the ascending / descending speed of the pipe holding unit 16 by the dry air gauge 226 adjusting the pressure of the air cylinder 215.

  In a mechanical lifting operation such as a motor, vibration may occur. The air cylinder 215 can reduce vibration during the lifting operation compared to a motor or the like. Therefore, in the present embodiment, generation of bubbles in the chemical liquid 44 can be further suppressed. Moreover, the positional accuracy at the time of insertion to the chemical | medical solution 44 of the piping 30 can be improved by reducing the vibration at the time of raising / lowering operation.

Embodiment 3 FIG.
FIG. 6 is a diagram for explaining the structure of the chemical liquid replacement assisting apparatus 300 according to the third embodiment. The chemical liquid replacement assisting device 300 includes a tray 350. The saucer 350 is attached to the elevator 10 by an attachment 352. The tray 350 is provided between one end of the pipe 30 and the chemical container 40 in a state where one end of the pipe 30 is disposed above the chemical container 40.

  If the pipe 30 is removed from the chemical liquid container 40 when the chemical liquid 44 is replaced, the chemical liquid 44 may remain in the pipe 30. The tray 350 receives the chemical solution 44 that falls from the pipe 30. In the present embodiment, in a state where one end of the pipe 30 is disposed above the tray 350, the process waits until the chemical liquid 44 remaining in the pipe 30 is exhausted.

  FIG. 7 is a perspective view of a chemical liquid replacement assisting device 300 according to Embodiment 3. In FIG. 7, a part of the chemical solution replacement assisting device 300 is omitted for convenience. The attachment 352 rotates in the direction indicated by the arrow 354 with the attachment portion with the elevator 10 as a fulcrum. Thereby, the tray 350 is moved in a direction away from the pipe 30. And the saucer 350 after this movement is arrange | positioned outside the area | region where the piping 30 passes, when the piping holding part 16 descend | falls. Thereby, it can prevent that the raising / lowering of the piping 30 is prevented by the saucer 350.

  In addition, as FIG. 7 shows, the fixing | fixed part 32 of the piping 30 may be disk shape. As a result, the pipe 30 can be easily held by the pipe holding part 16 regardless of the angle of the pipe 30 with respect to the pipe holding part 16.

  The drop of the chemical solution 44 from the pipe 30 may lead to contamination around the apparatus. Further, in general, it is not recommended to wipe the pipe 30 in order to prevent foreign matters from adhering to the pipe 30 and foreign substances from entering the chemical liquid container 40. On the other hand, in the present embodiment, by receiving the chemical liquid 44 falling from the pipe 30 with the receiving tray 350, contamination around the apparatus due to the dropping of the chemical liquid 44 can be prevented. Moreover, after the chemical solution container 40 is replaced, the chemical solution 44 falls from the pipe 30 to the new chemical solution container 40, so that bubbles can be prevented from being generated in the chemical solution 44 in the new chemical solution container 40.

  In the present embodiment, the tray 350 is arranged outside the region through which the pipe 30 passes when the pipe holding portion 16 descends by rotating the attachment 352. The structure of the receiving tray 350 and the attachment 352 may be other than this as long as it does not hinder the raising and lowering of the piping 30. For example, the tray 350 may be removable.

Embodiment 4 FIG.
FIG. 8 is a diagram illustrating the structure of the chemical liquid replacement assisting apparatus 400 according to the fourth embodiment. The chemical liquid replacement assisting device 400 includes an elevator 410. The elevator 410 includes a position sensor 460. The position sensor 460 detects the position of the pipe holding unit 16. The position sensor 460 is provided at the same height as the pipe holding portion 16 in a state where one end of the pipe 30 is located between the liquid surface of the chemical liquid 44 and the upper end of the chemical liquid container 40. The position sensor 460 detects that the pipe holding unit 16 has reached the height of the position sensor 460.

  The chemical liquid replacement assisting device 400 includes a speed controller 422. The speed controller 422 includes a control unit that controls the ascending / descending speed of the pipe holding unit 16 in accordance with a detection signal generated by the position sensor 460. Accordingly, when the position sensor 460 detects that the pipe holding unit 16 has reached the height of the position sensor 460, the speed controller 422 temporarily moves the pipe holding unit 16 to the speed controller 22 of the first embodiment. A function for stopping is further provided.

  The elevator 410 further includes a temporary stop release switch 428. When the temporary stop release switch 428 is, for example, a push button type, the elevator 410 releases the temporary stop when the button is pressed. Thereby, the elevator 410 raises the pipe holding unit 16 until one end of the pipe 30 moves above the chemical container 40.

  Next, a method for exchanging the chemical liquid 44 using the chemical liquid exchange assist device 400 will be described. FIG. 8 shows a state where the chemical container 40 is empty. When the chemical container 40 becomes empty, the operator switches the elevation switch 20 to the ascending side. Thereby, the piping holding part 16 raises from the state shown by FIG. When the pipe holding unit 16 reaches the height of the position sensor 460, the position sensor 460 transmits a detection signal to the speed controller 422. In response to the detection signal, the speed controller 422 stops the pipe holding unit 16.

  FIG. 9 is a diagram illustrating a temporarily stopped state of the elevator 410 according to the fourth embodiment. The speed controller 422 temporarily stops the pipe holding unit 16 when raising the pipe holding unit 16 from a state where one end of the pipe 30 is inserted into the chemical solution container 40. At this time, as shown in FIG. 9, one end of the pipe 30 is provided between the liquid surface of the chemical liquid 44 and the upper end of the chemical liquid container 40. Here, when the chemical solution container 40 is empty, the liquid level of the chemical solution 44 is equal to the bottom of the chemical solution bottle 42.

  In the present embodiment, one end of the pipe 30 stops at a temporary stop position 462 between the upper end of the chemical solution bottle 42 and the upper end of the chemical solution container 40. The temporary stop position 462 is not limited to this, and may be a position where one end of the pipe 30 is extracted from the chemical liquid 44 and provided inside the chemical liquid container 40.

  In the temporarily stopped state, the chemical liquid 44 remaining in the pipe 30 falls into the empty chemical liquid container 40. The pause state is maintained until the chemical liquid 44 remaining in the pipe 30 is exhausted. After the chemical liquid 44 remaining in the pipe 30 is depleted, the operator turns on the temporary stop release switch 428. As a result, one end of the pipe 30 moves above the chemical solution container 40. Next, the operator exchanges the empty chemical solution container 40 and the chemical solution container 40 in which the chemical solution 44 is stored. The subsequent steps are the same as those in the first embodiment.

  In the present embodiment, the same effect as in the third embodiment can be obtained without providing the tray 350. For this reason, compared with Embodiment 3, the structure of the chemical | medical solution exchange assistance apparatus 400 can be simplified. Further, a tray 350 may be further provided in the chemical liquid exchange assist device 400. In this case, the amount of the chemical liquid 44 that falls on the tray 350 can be reduced. Therefore, the waste liquid work from the tray 350 when the replacement of the chemical liquid 44 is completed can be made efficient.

  As a modification of the present embodiment, the speed controller 422 may change the ascending / descending speed of the pipe holding section 16 when the position sensor 460 detects that the pipe holding section 16 has reached the height of the position sensor 460. good. The speed controller 422 slows the ascending / descending speed of the pipe holding unit 16 when the pipe holding unit 16 is below the position sensor 460, compared to the case where the pipe holding unit 16 is above the position sensor 460. .

  In this case, the temporary stop position 462 is provided, for example, between the liquid surface of the chemical liquid 44 in the chemical liquid container 40 after replacement and the upper end of the chemical liquid container 40. That is, the position sensor 460 is provided at the height of the pipe holding unit 16 when one end of the pipe 30 is provided between the liquid level of the chemical liquid 44 and the upper end of the chemical liquid container 40. At this time, the speed at which the elevator 410 moves the pipe holding unit 16 is faster in a state where one end of the pipe 30 is above the temporary stop position 462 than in a state where one end of the pipe 30 is inserted into the chemical solution 44. Become. Further, the speed at which the elevator 410 moves the pipe holding unit 16 is such that the one end of the pipe 30 is above the temporary stop position 462 than the speed at which one end of the pipe 30 is inserted into the chemical solution 44. Will be faster.

  In this modification, the elevator 410 lowers the pipe holding unit 16 after the chemical container 40 is replaced. As a result, one end of the pipe 30 is inserted into the chemical solution container 40. At this time, the descending speed of the pipe holding part 16 is faster than 10 mm / s, for example. When the pipe holding unit 16 descends and reaches the height of the position sensor 460, the position sensor 460 transmits a detection signal to the speed controller 422. The speed controller 422 reduces the descending speed of the pipe holding unit 16 according to the detection signal. At this time, the speed controller 422 sets the descending speed of the pipe holding unit 16 to 10 mm / s or less. Thereby, one end of the pipe 30 is inserted into the liquid surface of the chemical liquid 44 at a low speed of 10 mm / s or less. One end of the pipe 30 descends in the chemical solution 44 at a low speed and reaches the bottom of the chemical solution bottle 42.

  In this modification, when the pipe 30 is in a position that does not affect the generation of bubbles, the ascending / descending speed of the pipe holding unit 16 is fast. That is, in the present modification, the moving speed of one end of the pipe 30 is increased when one end of the pipe 30 is above the liquid surface of the chemical liquid 44 than when one end of the pipe 30 is inserted into the chemical liquid 44. it can. Thereby, the efficiency of replacement | exchange of the chemical | medical solution 44 can be improved, suppressing generation | occurrence | production of the bubble to the chemical | medical solution 44. FIG.

  The technical features described in each embodiment may be used in appropriate combination.

100, 200, 300, 400 Chemical liquid exchange assist device 10, 210, 410 Elevator, 215 Air cylinder, 16 Piping holding part, 22, 222, 422 Speed controller, 30 Piping, 40 Chemical liquid container, 44 Chemical liquid, 350 Saucer

Claims (7)

A pipe holding section for holding a pipe for supplying a chemical to the semiconductor manufacturing apparatus;
One end of the pipe is inserted into the chemical liquid by lowering the pipe holding part toward the chemical liquid container that stores the chemical liquid, and one end of the pipe is moved above the chemical liquid container by raising the pipe holding part. An elevator to be moved to,
With one end of the pipe inserted into the chemical solution, a speed controller that limits the speed at which the elevator lowers the pipe holding unit;
A chemical liquid exchange assist device comprising:   The speed at which the elevator lowers the pipe holder when the one end of the pipe is inserted into the liquid surface of the chemical liquid and in the state of being inserted into the chemical liquid is 10 mm / s or less. Item 2. A chemical liquid exchange assist device according to Item 1.   The chemical liquid exchange assist device according to claim 1, wherein the elevator includes an air cylinder.   In a state where one end of the pipe is disposed above the chemical liquid container, the pipe further includes a tray that is provided between the one end of the pipe and the chemical liquid container and receives the chemical liquid falling from the pipe. The chemical | medical solution exchange assistance apparatus of any one of Claims 1-3.   5. The chemical replacement auxiliary device according to claim 4, wherein when the pipe holding unit is lowered, the tray is disposed outside a region through which the pipe passes.   When the speed controller raises the pipe holding part from a state where one end of the pipe is inserted into the chemical liquid container, one end of the pipe is provided between the liquid level of the chemical liquid and the upper end of the chemical liquid container. 6. The chemical replacement auxiliary device according to claim 1, wherein the pipe holding unit is temporarily stopped in a state where   The speed at which the elevator moves the pipe holding part is faster in a state where one end of the pipe is above the liquid level of the chemical liquid than in a state where one end of the pipe is inserted into the chemical liquid. The chemical solution exchange auxiliary device according to any one of claims 1 to 6, wherein

Images