JP2019015845A - Method for manufacturing color filter and manufacturing apparatus - Google Patents

Abstract

To provide a method for manufacturing a color filter and a manufacturing apparatus, by which failures in a lighting inspection of final products caused by a coating state of a coating liquid that forms a colored portion or a color conversion portion of a color filter are reduced to improve a yield.SOLUTION: The method for manufacturing a color filter includes: a colored portion formation step of applying a first coating liquid to a through hole to form a colored portion; a color conversion portion formation step of applying a second coating liquid to the through hole where the colored portion is provided so as to form a color conversion portion; an inspection step of irradiating the colored portion and the color conversion portion on the color conversion portion side with light in a second wavelength band to perform an inspection; and a repair step of applying the second coating liquid to the through hole that is determined as a failure in the inspection step so as to form a color conversion portion again. The inspection step is carried out while a substrate is held by the same device as a device where the substrate is held in at least the color conversion formation step or the repair step.SELECTED DRAWING: Figure 4

Description

  The present invention relates to a color filter manufacturing method and a manufacturing apparatus.

  There has been proposed a color filter that selectively transmits white light emitted from a backlight device of a display device into red, green, and blue light in a colored portion (see, for example, Patent Document 1). The manufacturing process of this type of color filter includes a step of applying a coating solution for forming colored portions. For example, a coating method using a die coater or an ink jet is used as the coating method of the coating liquid. However, if there is a defect in the coating state, the color at the time of lighting inspection in a final product such as a display device incorporating a color filter is used. It becomes a defective product due to defects such as unevenness. As a method for reducing defective products in the final product and improving the yield, for example, in Patent Document 2, a coating liquid for forming a colored portion is applied by an ink jet method, and before the droplet-shaped ink is dried, The intensity of the reflected light that scans while irradiating the ink in the partition area with light that has an irradiation area that fits the partition area, and reflects in a direction that forms a predetermined angle with respect to the substrate surface from the liquid surface of the droplet-like ink A method for inspecting and correcting the presence or absence of ink adhesion or color defect by detecting the thickness is disclosed.

JP 2009-236982 A JP 2006-171453 A

  On the other hand, a display device has been proposed in which the amount of light transmitted through the colored portion is increased by using an LED or the like as a light source, thereby reducing the ratio of the colored portion in the color filter and suppressing the decrease in luminance of the display image. Yes. For such a display device, a display device having a color filter in which a color conversion unit that converts light incident from a light source into light of a color different from the color of the light source according to the color of the coloring unit is stacked on the coloring unit is proposed. Has been. In order to laminate the color conversion portion as described above on the coloring portion, a method of applying a color conversion portion forming coating solution on the coloring portion is used. Similarly to the colored portion, if this color conversion portion has a defect in the application state, it becomes a defective product in a lighting inspection in a final product such as a display device incorporating a color filter. On the other hand, it is possible to discriminate when the inspection for detecting the intensity of the reflected light that irradiates and reflects the droplet-like ink as disclosed in Patent Document 2 is performed immediately after the color conversion portion forming step. The defect of ink application or color mixing and the defect such as color spots in the color-converted light determined by the final product lighting inspection are not completely the same. The problem may remain until the lighting test.

  In view of the problems as described above, the present invention reduces the defects in the lighting inspection of the final product due to the application state of the coating liquid that forms the color part and the color conversion part of the color filter, and improves the yield. An object is to provide a manufacturing method and a manufacturing apparatus.

  In order to solve the above problems, a color filter manufacturing method according to the present invention includes a light-transmitting substrate, a partition wall having a plurality of through-holes stacked on the substrate and penetrating in a thickness direction, and the above-described substrate on the substrate. Provided inside a plurality of through-holes equal to or less than the total number of the through-holes provided in the partition wall, and provided with a colored portion that selectively transmits light in the first wavelength band, and the colored portion on the substrate A color conversion unit that is provided inside the formed through-hole and converts light in the second wavelength band into light in the first wavelength band. In the method for manufacturing a color filter, the first coating is applied to the through-hole. A colored portion forming step of applying a liquid and forming the colored portion; a color converting portion forming step of forming a color converting portion by applying a second coating liquid to the through hole provided with the colored portion; Light in the second wavelength band in the coloring portion and the color conversion portion An inspection step for inspecting from the color conversion portion side, and a repair step for applying the second coating liquid to the through-hole determined to be defective in the inspection step and re-forming the color conversion portion. The inspection step is performed at least while the substrate is held by the same device as the device that holds the substrate in the color conversion unit forming step or the repair step.

  By applying light having the same wavelength band as that of the final product from the same direction as that of the final product before the final inspection, it is possible to perform inspection for detecting light having the same color conversion as that of the final product, so that defects in the final product can be reduced. In addition, since the inspection and application or repair are performed while the substrate is held by the same apparatus, the yield of the final product is improved as compared with finding and repairing the application defect in the final inspection.

  The inspection process may be started during the execution of the color conversion unit forming step while being held by an apparatus that holds the substrate in the color conversion unit forming step.

  By carrying out like this, since it can test | inspect from the location which application | coating finished, application | coating and test | inspection can be implemented in parallel. As a result, the production time can be shortened.

  The repair process may be started during execution of the inspection process while being held by an apparatus that holds the substrate in the inspection process.

  By carrying out like this, since it can repair from the location where inspection was completed, application and inspection can be carried out in parallel. As a result, the production time can be shortened.

  In order to solve the above problems, a color filter manufacturing method according to the present invention includes a light-transmitting substrate, a partition wall having a plurality of through-holes stacked on the substrate and penetrating in a thickness direction, and the above-described substrate on the substrate. A dye that is provided inside a plurality of through holes equal to or less than the total number of the through holes provided in the partition wall and selectively transmits light in the first wavelength band; and light in the second wavelength band is the first A color filter that includes a color conversion substance that converts light into a wavelength band, and a coating liquid containing the colorant and the color conversion substance is applied to the through-hole, and the conversion part is applied. Applying the coating liquid to the through-hole determined to be defective in the inspection step, an inspection step for inspecting the conversion portion by applying light of the second wavelength band to the conversion portion, A repairing step for re-forming the conversion part. The inspection process, at least, and performs leave the substrate in the same device as the device the substrate in the converter unit forming step or the repair process is gripped is gripped.

  By applying light having the same wavelength band as that of the final product before the final inspection, it is possible to perform inspection for detecting the same color-converted light as that of the final product, so that defects in the final product can be reduced. In addition, since application and inspection or repair are performed while the substrate is held by the same apparatus, the yield of the final product is improved as compared with finding and repairing application defects in the final inspection.

  The inspection step may be started during the execution of the conversion unit formation step while being held by an apparatus that holds the substrate in the conversion unit formation step.

  By carrying out like this, since it can test | inspect from the location which application | coating finished, application | coating and test | inspection can be implemented in parallel. As a result, the production time can be shortened.

  The repair process may be started during execution of the inspection process while being held by an apparatus that holds the substrate in the inspection process.

  By carrying out like this, since it can repair from the location where inspection was completed, application and inspection can be carried out in parallel. As a result, the production time can be shortened.

  In order to solve the above problems, a color filter manufacturing apparatus according to the present invention includes a light-transmitting substrate, a partition wall having a plurality of through holes stacked on the substrate and penetrating in the thickness direction, and on the substrate. A colored portion that is provided inside a plurality of through holes equal to or less than the total number of the through holes provided in the partition wall, and selectively transmits light in the first wavelength band, and the colored portion on the substrate And a color conversion unit that converts light in the second wavelength band into light in the first wavelength band, and is provided inside the through hole provided with the color filter, wherein the coloring unit is provided A coating unit that applies a coating liquid containing a substance that converts light in the second wavelength band to light in the first wavelength band in the through-hole formed, and the second colorant and the color conversion unit. The light in the wavelength band is applied from the color conversion unit side and the light An inspection unit that measures the intensity of light output from the color part and inspects color unevenness, and a repair that re-forms the color conversion part by applying the coating liquid to the through-hole that is determined to be defective by the inspection by the inspection part And a gripping part that grips the substrate at the time of inspection by the inspection part, and the gripping part at least from the application of the coating liquid to the through-hole by the application part through the penetration by the inspection part The substrate is continuously held until the inspection of the hole, or from the inspection of the through hole by the inspection unit to the application of the coating liquid to the through hole by the repair unit.

  By using this device, it is possible to perform inspection to detect the same color-converted light as the final product by applying light in the same wavelength band as that of the final product before final inspection, so that defects in the final product can be reduced. . In addition, since application and inspection or repair are performed while the substrate is held by the same apparatus, the yield of the final product is improved as compared with finding and repairing application defects in the final inspection. In addition, since inspection can be performed from a location where the application has been completed or repair can be performed from a location where the inspection has been completed, production time can be shortened.

  In order to solve the above problems, a color filter manufacturing apparatus according to the present invention includes a light-transmitting substrate, a partition wall having a plurality of through holes stacked on the substrate and penetrating in the thickness direction, and on the substrate. A dye that selectively transmits light in the first wavelength band and light in the second wavelength band is provided inside the plurality of through holes that are equal to or less than the total number of the through holes provided in the partition wall A color filter manufacturing apparatus including a color conversion material mixed with light of a wavelength band, and the through hole provided in the partition includes the dye and the color conversion material. A coating unit that applies a coating liquid; an inspection unit that applies light of the second wavelength band to the conversion unit to measure the intensity of light output from the conversion unit and inspects color unevenness; and an inspection by the inspection unit The coating liquid is inserted into the through hole that is determined to be defective in A repair part that applies and re-forms the conversion part; and a grip part that grips the substrate during inspection by the inspection part, and the grip part is at least provided to the through-hole by the application part. Continue to hold the substrate from application of the coating liquid to inspection of the through hole by the inspection unit, or from inspection of the through hole by the inspection unit to application of the coating liquid to the through hole by the repair unit. It is characterized by.

  By using this device, it is possible to perform inspection to detect the same color-converted light as the final product by applying light in the same wavelength band as that of the final product before final inspection, so that defects in the final product can be reduced. . In addition, since application and inspection or repair are performed while the substrate is held by the same apparatus, the yield of the final product is improved as compared with finding and repairing application defects in the final inspection. In addition, since inspection can be performed from a location where the application has been completed or repair can be performed from a location where the inspection has been completed, production time can be shortened.

  According to the present invention, the color conversion unit that converts the light incident from the light source into light of a color different from the color of the light source in accordance with the color of the coloring unit depends on the color filter or the color of the conversion unit stacked on the coloring unit. Lighting of the final product resulting from the color section, color conversion section, or application state of the conversion section for a color filter having a conversion section containing a substance that converts light incident from the light source into light of a color different from that of the light source Defects in inspection can be reduced and yield can be improved.

It is the schematic of an example of the color filter applied to Example 1 of this invention. It is the figure which showed the flow of the manufacturing method of the color filter of Example 1 of this invention. It is the top view which showed the outline of the manufacturing apparatus of the color filter of Example 1 of this invention. It is the elevation which showed the outline of the manufacturing apparatus of the color filter of Example 1 of this invention. It is the schematic of an example of the color filter applied to Example 2 of this invention. It is the figure which showed the flow of the manufacturing method of the color filter of Example 2 of this invention. It is the elevation which showed the outline of the test | inspection part of the manufacturing apparatus of the color filter of the modification of Example 2 of this invention.

  Hereinafter, a manufacturing method and a manufacturing apparatus of a color filter of the present invention will be described with reference to the drawings.

  First, an example of a color filter to which the color filter manufacturing method and manufacturing apparatus of Example 1 of the present invention are applied will be described with reference to FIG.

  1 includes a translucent substrate 11, a red coloring portion 131R, a green coloring portion 131G, and a blue coloring portion 131B, a black matrix portion 12, a red conversion portion 132R, and a green conversion portion 132G. A transmission unit 134. The substrate 11 is made of transparent glass or transparent resin. The substrate 11 may be a flexible substrate having translucency.

  The black matrix portion 12 is formed of a light-shielding resin, is laminated on the first main surface 11a of the substrate 11, and has a plurality of through holes 121R, 121G, and 121B that penetrate in the thickness direction (Z-axis direction). It is a partition part which has. Here, in the through holes 121R, 121G, and 121B, one end on the substrate 11 side in the Z-axis direction is closed by the substrate 11. The thickness of the black matrix portion 12 is, for example, about 10 μm, and the holes of the through holes 121R, 121G, 121B are, for example, circular holes with a diameter of about 50 μm in plan view.

  The red coloring portion 131 </ b> R is provided inside the through hole 121 </ b> R of the black matrix portion 12 on the substrate 11. The red coloring portion 131R is formed of a resin containing a red pigment that selectively transmits light in the red wavelength band.

  The green coloring portion 131G is provided inside the through hole 121R of the black matrix portion 12 on the substrate 11. The green coloring portion 131G is formed of a resin containing a green pigment that selectively transmits light in the green wavelength band.

  The blue coloring portion 131 </ b> B is provided inside the through hole 121 </ b> B of the black matrix portion 12 on the substrate 11. The blue coloring portion 131B is formed of a resin containing a blue pigment that selectively transmits light in the blue wavelength band.

  The red conversion portion 132R is provided inside the red through-hole 121R in a form of being stacked on the red coloring portion 131R provided inside the through-hole 121R of the black matrix portion 12 on the substrate 11, and emits light in a blue wavelength band. Is formed from a translucent resin containing red quantum dots that convert light into red wavelength band light. The red conversion unit 132R converts light in a blue wavelength band incident from a light source (not shown) located on the opposite side of the red through-hole 121R to the side in contact with the substrate 11 into light in the red wavelength band, Radiates to 131R.

  The green conversion part 132G is provided inside the through-hole 121G in a form of being laminated on the green coloring part 131G provided inside the green through-hole 121G of the black matrix part 12 on the substrate 11, and emits light in a blue wavelength band. Is formed from a light-transmitting resin including green quantum dots that convert light into green wavelength band light. The green conversion unit 132G converts light in a blue wavelength band incident from a light source (not shown) located on the opposite side of the green through-hole 121G to the side in contact with the substrate 11 into a green wavelength band, and converts the light into a green coloring unit 131G. Radiate.

  The transmissive part 134 is provided on the inner side of the blue through hole 121B in a form of being laminated on the blue colored part 131B provided on the inner side of the blue through hole 121B of the black matrix part 12 on the substrate 11, and has a light transmitting property. Formed from.

  In this description, light in the red wavelength band in the red through hole 121R and light in the green wavelength band in the green through hole 121G are respectively referred to as light in the first wavelength band. In the red through-hole 121R, the light in the blue wavelength band, which is the light in the second wavelength band, is converted into light in the red wavelength band, which is the light in the first wavelength band, by the red conversion unit 132R. The colored portion 131R is selectively transmitted. In the green through-hole 121G, the green wavelength conversion unit 132G converts light in the blue wavelength band, which is light in the second wavelength band, into light in the green wavelength band, which is light in the first wavelength band. The colored portion 131G is selectively transmitted.

  Next, the manufacturing method of the color filter 10 of Example 1 of this invention is demonstrated using FIG. In this color filter 10 manufacturing method, a black matrix portion forming step (S101), a red colored portion forming step (S102), a green colored portion forming step (S103), a blue colored portion forming step (S104), and a transmitting portion forming step ( S105), red color conversion part formation process (S106), green color conversion part formation process (S107), inspection process (S108), repair process (S109), and heating process (S110) are performed in order.

  First, in the black matrix forming step (S101), a black photosensitive resin composition that is cured by being irradiated with ultraviolet rays is applied to the substrate 11 so that the film thickness after drying and baking becomes about 10 μm. Next, the black photosensitive resin layer is formed by removing the organic solvent contained in the black photosensitive resin composition applied to the substrate 11 by heat drying, drying under reduced pressure, or the like. Subsequently, in a state where a photomask is arranged on the black photosensitive resin layer, the exposure apparatus is used to irradiate ultraviolet rays, and then development is performed using, for example, an alkaline developer to form the black matrix portion 12.

  Next, in the red colored portion forming step (S102), a first coating liquid made of a thermosetting resin composition containing a red pigment is applied and heated inside the red through-hole 121R using an inkjet coating method. The red colored portion 131R is formed on the first main surface 11a side of the substrate 11.

  Subsequently, in the green colored portion forming step (S103), the first coating liquid made of a thermosetting resin composition containing a green pigment is applied and heated inside the green through hole 121G using an inkjet coating method. The green colored portion 131G is formed on the first main surface 11a side of the substrate 11.

  Similarly, in the blue colored portion forming step (S104), a first coating liquid made of a thermosetting resin composition containing a blue pigment is applied and heated inside the blue through-hole 121B using an inkjet coating method. The blue colored portion 131B is formed on the first main surface 11a side of the substrate 11.

  Here, the order of the red colored portion forming step (S102), the green colored portion forming step (S103), and the blue colored portion forming step (S104) may be changed.

  Next, in the transmission part forming step (S105), a coating liquid made of a thermosetting resin composition is applied to the inside of the blue through hole 121B provided with the blue coloring part 131B by using an ink jet coating method, and the transmission part 134 is applied. Form.

  Next, in the red color conversion part forming step (S106), the second coating liquid made of a thermosetting resin composition containing red quantum dots is applied to the second through-hole 121R provided with the red coloring part 131R by using an inkjet coating method. The red color conversion part 132R is formed on the inside.

  Next, in the green color conversion part formation process (S107), the green through-hole 121G in which the green coloring part 131G was provided in the 2nd coating liquid which consists of a thermosetting resin composition containing a green quantum dot using the inkjet coating method. The green color conversion part 132G is formed by applying on the inside.

  Here, the order of the transmissive portion forming step (S105), the red color converting portion forming step (S106), and the green color converting portion forming step (S107) may be switched.

  Subsequently, in the inspection step (S108), for example, using a light source that emits light in the same blue wavelength band as a light source used in a display device or the like in which the color filter 10 is incorporated, such as a blue LED, the red conversion unit 132R, From the side where the coating liquid for forming the green color conversion unit 132G and the transmission unit 134 is applied, light in the blue wavelength band is irradiated to a predetermined range of the color filter 10, and is thereby emitted to the second main surface 11b of the substrate 11. The intensity of light for each wavelength band of the light to be measured is measured using, for example, a CCD camera or the like, and color unevenness due to the application state of the coating liquid to the through holes 121R, 121G, and 121B is inspected.

  Subsequently, in the repair process (S109), the red color conversion portion forming process (for the through holes 121R, 121G, and 121B determined to be defective in the inspection process (S108) is performed on the through holes using the inkjet coating method ( S106), the red color conversion part 132R and the green color conversion part 132G are formed and repaired in the same manner as in the green color conversion part forming step (S107). Alternatively, for the through holes 121R and 121G determined to be defective in the inspection step (S108), for example, the red color conversion part 132R and the green color conversion part 132G are removed using a suction nozzle, laser irradiation, etc., and then the ink jet coating method is used. In the same manner as the transmission part forming step (S105), the red color conversion part formation process (S106), and the green color conversion part formation process (S107), the transmission part 134, the red color conversion part 132R, A green conversion part 132G is formed and repaired.

  Subsequently, in the heating step (S110), the thermosetting resin composition applied to the red conversion part 132R, the green conversion part 132G, and the transmission part 134 is heated with the color filter 10 using, for example, a heating oven, The thermosetting resin composition applied to the red conversion part 132R, the green conversion part 132G, and the transmission part 134 is cured.

  As described above, by irradiating and inspecting light having the same wavelength band as that of the final product in which the color filter 10 is incorporated, it is possible to perform inspection that detects the same color-converted light as the final product before the final inspection. Therefore, defects in the final product can be reduced. In addition, since application and inspection or repair are performed while the substrate is held by the same apparatus, the yield of the final product is improved as compared with finding and repairing application defects in the final inspection.

  In this embodiment, the transmissive portion forming step (S105), the red color converting portion forming step (S106) and the green color converting portion forming step (S107), the inspection step (S108), and the repairing step (S109) which are color converting portion forming steps. In each step, the substrate 11 is held while being held by the same holding device. For this reason, the through-hole 121R in which the red conversion part 132R is formed and the green conversion part 132G are formed during the execution of the red conversion part formation process (S106) and the green conversion part formation process (S107) which are color conversion part formation processes. The inspection process (S108) can be started for the through-hole 121G. Alternatively, the repair process (S109) can be started during the execution of the inspection process (S108). In this way, production time can be shortened.

  Next, manufacture of the color filter used for the red color conversion part formation process (S106), the green color conversion part formation process (S107), the inspection process (S108), and the repair process (S109) of the manufacturing method of the color filter of Example 1 of the present invention. The apparatus will be described with reference to FIGS. FIG. 3 is a plan view, and FIG. 4 is an elevational view taken along arrow a in FIG.

  The color filter manufacturing apparatus 1 shown in FIGS. 3 and 4 handles a rectangular substrate 11 in a frame 2. Here, the frame 2 is made of a material that is difficult to bend, such as metal or plastic, for example, and sandwiches the edges of the first main surface 11a and the second main surface 11b of the substrate 11 across the outer periphery of the substrate 11, and the first main surface. Except for the region sandwiching the edge of 11a and second main surface 11b, there is an opening that exposes black matrix portion 12 provided on first main surface 11a and second main surface 11b or second main surface 11b. It has a frame-like shape. Further, the cross section of the frame 2 in the thickness direction (Z-axis direction) of the substrate 11 has a concave shape, and sandwiches the substrate 11 with the recesses of the recesses of the frame 2 facing each other on the two opposite sides of the frame 2. It is out. The frame 2 has a divided structure for placing the substrate 11 in the frame 2. By placing the substrate 11 in the frame 2, the color due to the damage when the substrate 11 is fixed to the color filter manufacturing apparatus 1 or the deflection of the substrate 11. The adverse effect on the processing in the filter manufacturing apparatus is eliminated.

  The color filter manufacturing apparatus 1 according to the first embodiment includes a gripping device 3 that grips the substrate 11 placed in the frame 2, a red conversion portion 132R in the red through hole 121R of the substrate 11, and a green conversion portion 132G in the green through hole 121G. , The application part 4 for applying the coating liquid to form the transmission part 134 in the blue through hole 121B, the red through hole 121R in which the red conversion part 132R is formed, the green through hole 121R in which the green conversion part 132G is formed, And the inspection unit 5 that inspects the blue through-hole 121B in which the transmission part 134 is formed.

  The holding device 3 includes a holding unit 31 that holds the substrate 11 by holding the frame 2, and a holding unit moving mechanism 32 that moves the holding unit 31 in the transport direction (X-axis direction) of the substrate 11. Here, the grip portion 31 and the grip portion moving mechanism 32 are provided on the first main surface 11 a and the second main surface 11 b or the second main surface 11 b of the substrate 11 of the frame 2 in the thickness direction (Z-axis direction) of the substrate 11. The black matrix portion 12 is provided so as not to interfere with the opening region exposing the black matrix portion 12. The grip portion 31 may be, for example, one that fixes the frame 2 with bolts or the like in the Z-axis direction, or another structure that sandwiches the frame 2 with two plates in the Z-axis direction. Good. The gripper moving mechanism 32 is a linear motion system such as a linear motion guide + ball screw + servo motor + control device, and can move the gripper 31 to an arbitrary position in the X-axis direction.

  The coating unit 4 is a coating containing a thermosetting resin composition that forms a green conversion part 132G in a red through hole 121R of the substrate 11 with a coating liquid containing a thermosetting resin composition that forms the red conversion part 132R. The coating head 41 and the substrate for applying the liquid to the green through hole 121G of the substrate 11 and the coating liquid containing the thermosetting resin composition for forming the transmission part 134 to the blue through hole 121B of the substrate 11 by the inkjet coating method, respectively. A coating head moving mechanism 42 that moves the coating head 41 of the eleventh to an arbitrary position in the direction (Y-axis direction) orthogonal to the transport direction (X-axis direction) of the substrate 11 and the thickness direction (Z-axis direction) of the substrate 11; Have The application head moving mechanism 42 is, for example, a linear motion system similar to the above-described gripper moving mechanism 32, and stands in the Z-axis direction from both outer sides of the region in which the substrate 11 placed in the frame 2 is moved by the gripping device 3. The two legs are provided on a member that connects in the Y-axis direction at an upper portion that is sufficiently away from the surface on which the substrate 11 that is placed in the frame 2 moves, and is directed downward to the coating head moving mechanism 42 in the Z-axis direction. The attached coating head 41 can be moved to an arbitrary position in the Y-axis direction. The application head 41 can apply the application liquid to the through holes 121R, 121G, and 121B by dropping the application liquid downward in the Z-axis direction by an inkjet method at an arbitrary position in the Y-axis direction.

  Here, the application unit 4 applies a coating solution for forming the red conversion unit 132R, the green conversion unit 132G, and the transmission unit 134 again in the through holes 121R, 121G, and 121B determined to be defective by the inspection unit 5. It also serves as a function.

  The inspection unit 5 includes a light source 51 that illuminates the surface on the first main surface 11a side of the substrate 11 of the color filter 10 from above in the Z-axis direction, and a color in which light emitted from the light source 51 is provided in the through holes 121R, 121G, and 121B. A light receiving unit that measures the light intensity for each wavelength band of the light emitted from the second main surface 11b of the substrate 11 through the conversion units 132R and 132G, the transmission unit 134, and the coloring units 131R, 131G, and 131B. 52. Here, the light source 51 is a light source that emits light in the same blue wavelength band as that used in a display device (not shown) in which a color filter 10 such as a blue LED is incorporated, and the thickness direction of the substrate 11 (Z-axis). Substrate) in a direction (Y-axis direction) orthogonal to the transport direction (X-axis direction) of substrate 11 and the thickness direction (Z-axis direction) of substrate 11. 11 is arranged so that light in a blue wavelength band can be irradiated evenly. The light receiving unit 52 is a sensor that can measure the intensity of light for each wavelength band reaching an arbitrary range, such as a CCD camera, and faces the light source 51 with the substrate 11 interposed therebetween.

  The substrate 11 placed in the frame 2 by the gripping device 3 is moved to an arbitrary position in the transport direction (X-axis direction) of the substrate 11, and the coating head 41 is moved to an arbitrary position in the Y-axis direction by the coating unit 4. Thus, the coating head can be moved to the through holes 121R, 121G, and 121B at arbitrary positions on the substrate 11 to apply the coating liquid. In this way, the coating liquid is similarly applied to the through holes 121R, 121G, and 121B that are determined to be defective by the inspection unit 5, and the red conversion unit 132R, the green conversion unit 132G, and the transmission are applied. The portion 134 can be reformed.

  Since the application unit 4 and the inspection unit 5 can be operated separately, the inspection unit 5 can perform inspection even during application of the coating liquid by the application unit 4. Moreover, since the coating liquid can be applied by the application unit 4 even during the inspection by the inspection unit 5, repair during the inspection can also be performed.

  An example of a color filter to which the color filter manufacturing method and manufacturing apparatus of Example 2 of the present invention are applied will be described with reference to FIG. In FIG. 5, the same parts as those of the color filter of the first embodiment are denoted by the same reference numerals.

  The color filter 20 of FIG. 5 includes conversion units 133R and 133G instead of the coloring units 131R and 131G and the color conversion units 132R and 132G of the color filter 10 of the first embodiment described with reference to FIG. Further, a blue transmission part 135 is provided instead of the coloring part 131 </ b> B and the transmission part 134.

  The red color conversion portion 133 </ b> R is provided inside the through hole 121 </ b> R of the black matrix portion 12 on the substrate 11. In the red conversion unit 133R, a red pigment that selectively transmits light in the red wavelength band and a red quantum dot that converts light in the blue wavelength band into light in the red wavelength band are dispersed in the resin. It is formed in a state. The red conversion unit 133R is a blue wavelength band incident from a light source (not shown) on the surface opposite to the substrate 11 side of the black matrix unit 12 when incorporated in a display device (not shown) in which the color filter 20 is incorporated. Is converted into light in the red wavelength band, light in a wavelength band other than red is selectively transmitted by the red pigment, and light in the red wavelength band is emitted to the first main surface 11b of the substrate 11. .

  In the present description, light in the red wavelength band is referred to as light in the first wavelength band in the red through hole 121R. In the red through-hole 121R, the red wavelength converter 133R converts the light in the blue wavelength band, which is the light in the second wavelength band, into light in the red wavelength band, which is the light in the first wavelength band, and selectively transmits the light. To do.

  The green color conversion unit 133G is provided inside the through hole 121G of the black matrix unit 12 on the substrate 11. In the green conversion unit 133G, a green pigment that selectively transmits light in the green wavelength band and green quantum dots that convert light in the blue wavelength band into light in the green wavelength band are dispersed in the resin. It is formed in a state. The green conversion unit 133G is a blue wavelength band incident from a light source (not shown) on the surface opposite to the substrate 11 side of the black matrix unit 12 when incorporated in a display device (not shown) in which the color filter 20 is incorporated. Is converted into light in the green wavelength band, light in a wavelength band other than green is selectively transmitted by the green pigment, and light in the green wavelength band is emitted to the first major surface 11b of the substrate 11. .

  In this description, in the green through hole 121G, light in the green wavelength band is referred to as light in the first wavelength band. In the green through hole 121G, the green wavelength converter 133G converts the light in the blue wavelength band, which is the light in the second wavelength band, into light in the green wavelength band, which is the light in the first wavelength band, and selectively transmits the light. To do.

  The blue transmission part 135 is provided inside the through hole 121 </ b> B of the black matrix part 12 on the substrate 11. The blue transmitting portion 135 is formed in a state where a blue pigment that selectively transmits light in the blue wavelength band is dispersed in the resin. The blue transmission part 135 is a blue wavelength band incident from a light source (not shown) on the surface opposite to the substrate 11 side of the black matrix part 12 when incorporated in a display device (not shown) in which the color filter 20 is incorporated. Is selectively transmitted and emitted to the first major surface 11 b of the substrate 11.

  Next, the manufacturing method of the color filter 20 of Example 2 of this invention is demonstrated using FIG. In FIG. 6, the same steps as those of the color filter of the first embodiment are denoted by the same reference numerals. In this color filter 20 manufacturing method, a black matrix portion forming step (S101), a blue transmitting portion forming step (S202), a red color conversion portion forming step (S203), a green color conversion portion forming step (S204), and an inspection step (S108). The repair process (S109) and the heating process (S110) are sequentially performed. Here, the black matrix portion forming step (S101), the inspection step (S108), the repairing step (S109), and the heating step (S110) are the same as the manufacturing method described in FIG.

  In the blue transmissive portion forming step (S202), the blue transmissive portion 135 is made blue by applying a coating solution made of a thermosetting resin composition containing a blue pigment to the inside of the blue through hole 121B using an inkjet coating method. It is formed inside the through hole 121R.

  In the red color conversion portion forming step (S203), by using an ink jet coating method inside the red through hole 121R, a coating liquid made of a thermosetting resin composition including a red pigment and a red quantum dot is applied. The red conversion portion 133R is formed inside the red through hole 121R.

  In the green color conversion part forming step (S204), by using an inkjet coating method inside the green through-hole 121G, a coating liquid composed of a thermosetting resin composition containing a green pigment and green quantum dots is applied. The green conversion part 133G is formed inside the green through hole 121R.

  Here, the order of the blue transmitting portion forming step (S202), the red color converting portion forming step (S203), and the green color converting portion forming step (S204) may be changed.

  Similar to the color filter manufacturing method of the first embodiment, the same color conversion as that of the final product is performed before the final inspection by irradiating and inspecting light having the same wavelength band as that of the final product in which the color filter 20 is incorporated. Inspecting the detected light can reduce defects in the final product. In addition, since application and inspection or repair are performed while the substrate is held by the same apparatus, the yield of the final product is improved as compared with finding and repairing application defects in the final inspection.

  Here, in the present embodiment, as in the color filter manufacturing method of the first embodiment, the blue transmissive portion forming step (S202), the converting portion forming step (S203, S204), the inspection step (S108), and the repair step (S109). In each of the steps, the substrate 11 is held while being held by the same holding device. For this reason, during the execution of the blue transmissive portion forming step (S202) and the converting portion forming steps (S203, S204), the through holes 121R, 121G, in which the red converting portion 133R, the green converting portion 133G, and the blue transmissive portion 135 are formed. The inspection process (S108) can be started for 121B. Alternatively, the repair process (S109) can be started during the execution of the inspection process (S108). In this way, production time can be shortened.

  Manufacture of color filters used in the blue transmissive portion forming step (S202), the converting portion forming steps (S203, S204), the inspection step (S108), and the repairing step (S109) of the method for manufacturing the color filter 20 of Example 2 of the present invention. The apparatus is the same as the color filter manufacturing apparatus described in the first embodiment.

  As a modification of the color filter manufacturing apparatus according to the second embodiment, an example of an inspection unit used in the inspection process (S106) will be described with reference to FIG. In FIG. 7, portions having the same structure as those of the color filter manufacturing apparatus 1 described in the first embodiment are denoted by the same reference numerals.

  In the inspection unit 5 of the modified example of the color filter manufacturing apparatus of Example 2, the light source 51 and the light receiving unit 52 both apply the coating liquid to the through holes 121R, 121G, and 121B of the black matrix unit 12 with respect to the substrate 11. The blue wavelength band light that is provided on the side Z-axis direction and is incident on the through holes 121R, 121G, and 121B from the light source 51 is converted into red wavelength band light by the red conversion unit 133R, and the green conversion unit 133G Is converted into light in the green wavelength band, transmitted through the blue transmission part 135 as it is, and the intensity of the light in each wavelength band of light emitted from the opposite side of the substrate 11 side of the through holes 121R, 121G, 121B. Measurement is performed by the light receiving unit 52. By having such a structure, the substrate 11 is not placed in the frame 2 but placed on a table (not shown), a blue transmission part forming process (S202), a conversion part forming process (S203, S204), and an inspection process. (S108) and a repair process (S109) can be performed.

  As mentioned above, although the Example and modification of this invention were demonstrated, this invention is not limited to these.

  For example, the light in the second wavelength band may not be light in the blue wavelength band. For example, the light in the second wavelength band may be light in the green wavelength band, and the color conversion unit may convert the light in the green wavelength band into light in the red or blue wavelength band.

  For example, the color filter applied to the manufacturing method of the present invention may use a color conversion unit including red quantum dots and green quantum dots instead of the red conversion unit 132R and the green conversion unit 132G of the first embodiment. Moreover, you may use the color conversion part containing the quantum dot of both a red quantum dot and a green quantum dot instead of the permeation | transmission part 134 also to a blue through-hole. Further, only the blue colored portion 131B may be provided without providing the transmitting portion 134.

  For example, in the color filter applied to the manufacturing method of the present invention, the red color conversion unit 133R and the green color conversion unit 133G of Example 2 may include both red and green quantum dot quantum dots. Moreover, the blue transmission part may also contain the quantum dot of both a red quantum dot and a green quantum dot.

  Further, instead of quantum dots, for example, a substance that converts other incident light such as a phosphor into light having a wavelength band different from the wavelength band of incident light may be used.

  In the colored portion forming step (S102, S103, S104), for example, the colored portion may be formed by a method other than the inkjet coating method such as a photolithography method.

  Further, in the repairing step (S109), the color conversion unit (132R, 132G), the transmission unit 134, the conversion unit (133R, 133G), or the blue transmission unit 135 may be removed for repair.

  Further, the repair process (S109) may be performed after the heating process (S110).

  In Example 1, the red colored portion forming step (S102), the green colored portion forming step (S103), and the blue colored portion forming step (S104) may be performed with the substrate held by the same holding device.

  Moreover, you may implement a repair process (S109) with another manufacturing apparatus.

  In the color filter manufacturing apparatus of Examples 1 and 2, the coating head moving mechanism may be movable in the X-axis direction and the Y-axis direction. The gripper moving mechanism 32 may also be able to move in the Y-axis direction. A plurality of light sources 51 or light receiving units 52 of the inspection unit 5 may be provided.

DESCRIPTION OF SYMBOLS 1 Color filter manufacturing apparatus 2 Frame 3 Gripping apparatus 4 Application | coating part 5 Inspection | inspection part 10 Color filter 11 Substrate 12 Black matrix part 20 Color filter 31 Gripping part 32 Gripping part moving mechanism 41 Coating head 42 Coating head moving mechanism 51 Light source 52 Light receiving part 11a First main surface 11b Second main surface 121B Blue through hole 121G Green through hole 121R Red through hole 131B Blue colored portion 131G Green colored portion 131R Red colored portion 132R Red conversion portion 132G Green conversion portion 133G Green conversion portion 133R Red conversion portion 134 Transmission part 135 Blue transmission part

Claims (8)

A translucent substrate;
A partition wall having a plurality of through holes stacked in the substrate and penetrating in the thickness direction,
A colored portion that is provided inside a plurality of through holes equal to or less than the total number of the through holes provided in the partition wall on the substrate, and selectively transmits light in the first wavelength band;
A color conversion unit that is provided inside the through-hole in which the coloring unit is provided on the substrate and converts light in the second wavelength band to light in the first wavelength band;
In the manufacturing method of the color filter,
A colored part forming step of applying a first coating liquid to the through hole and forming the colored part;
A color conversion part forming step of applying a second coating liquid to the through hole provided with the coloring part and forming the color conversion part;
An inspection process for inspecting the colored portion and the color conversion portion by applying light in a second wavelength band from the color conversion portion side;
Applying the second coating liquid to the through-hole determined to be defective in the inspection step, and re-forming the color conversion unit,
The inspection step is performed at least while the substrate is held in the same device as the device in which the substrate is held in the color conversion unit formation step or the repair step.
A method for producing a color filter. 2. The color filter according to claim 1, wherein the inspection process is started during the execution of the color conversion unit forming step while being held by an apparatus that holds the substrate in the color conversion unit forming step. Manufacturing method. 3. The method of manufacturing a color filter according to claim 1, wherein the repair process is started during execution of the inspection process while being held by a device that holds the substrate in the inspection process. 4. A translucent substrate;
A partition wall having a plurality of through holes stacked in the substrate and penetrating in the thickness direction,
A dye which is provided inside a plurality of through-holes equal to or less than the total number of the through-holes provided in the partition wall on the substrate, and which selectively transmits light in the first wavelength band; and a second wavelength band A conversion unit in which a color conversion material that converts light into light of the first wavelength band is mixed,
In the manufacturing method of the color filter,
A conversion part forming step of applying a coating liquid containing the colorant and the color conversion substance to the through hole, and forming the conversion part;
An inspection step of inspecting the converter by applying light of the second wavelength band;
Applying the coating liquid to the through-hole determined to be defective in the inspection step, and re-forming the conversion part, and
The inspection step is performed at least while the substrate is held in the same device as the device in which the substrate is held in the conversion unit forming step or the repair step,
A method for producing a color filter. The color filter manufacturing method according to claim 4, wherein the inspection step is started during the execution of the conversion unit forming step while being held by an apparatus that holds the substrate in the conversion unit forming step. Method. 6. The method for manufacturing a color filter according to claim 4, wherein the repair process is started during the execution of the inspection process while being held by an apparatus that holds the substrate in the inspection process. A translucent substrate;
A partition wall having a plurality of through holes stacked in the substrate and penetrating in the thickness direction,
Provided inside a plurality of through holes equal to or less than the total number of the through holes provided in the partition wall on the substrate,
A colored portion that selectively transmits light in the first wavelength band;
A color conversion unit that is provided inside the through-hole in which the coloring unit is provided on the substrate and converts light in the second wavelength band to light in the first wavelength band;
In color filter manufacturing equipment,
A coating unit that applies a coating solution containing a substance that converts light of the second wavelength band into light of the first wavelength band in the through-hole provided with the coloring unit;
An inspection unit that applies light from the second wavelength band to the coloring unit and the color conversion unit from the color conversion unit side to measure the intensity of light output from the coloring unit and inspect color unevenness; and
A repair unit that re-forms the color conversion unit by applying the coating liquid to the through-hole determined to be defective in the inspection by the inspection unit;
A gripping part for gripping the substrate during inspection by the inspection part,
The gripping unit is at least from the application of the coating liquid to the through hole by the application unit to the inspection of the through hole by the inspection unit, or from the inspection of the through hole by the inspection unit to the penetration by the repair unit The color filter manufacturing apparatus, wherein the substrate is continuously held until the coating liquid is applied to the holes. A translucent substrate;
A partition wall having a plurality of through holes stacked in the substrate and penetrating in the thickness direction,
A dye which is provided inside a plurality of through-holes equal to or less than the total number of the through-holes provided in the partition wall on the substrate, and which selectively transmits light in the first wavelength band; and a second wavelength band A conversion unit in which a color conversion material that converts light into light of the first wavelength band is mixed,
In color filter manufacturing equipment,
An application part for applying an application liquid containing the colorant and the color conversion substance to the through-hole provided in the partition;
An inspection unit that applies light of the second wavelength band to the conversion unit and measures the intensity of light output from the conversion unit to inspect color unevenness;
A repair unit that re-forms the conversion unit by applying the coating liquid to the through-hole that is determined to be defective in the inspection by the inspection unit;
A gripping part for gripping the substrate during inspection by the inspection part,
The gripping unit is at least from the application of the coating liquid to the through hole by the application unit to the inspection of the through hole by the inspection unit, or from the inspection of the through hole by the inspection unit to the penetration by the repair unit The color filter manufacturing apparatus, wherein the substrate is continuously held until the coating liquid is applied to the holes.

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