JP2019070355A - Pump device and atomization device - Google Patents

Abstract

To enable a valve body to reliably follow movement of a plunger pump without using an elastic member for a check valve.SOLUTION: A needle drive part moves a needle in an axial direction between a closed position where the needle abuts on a valve seat and an open position where the needle does not abut on the valve seat. A control part controls the needle to drive based on the rotation number of a plunger driving motor for moving a plunger in the axial direction to substantially match cycles of reciprocating-motion of the plunger with reciprocating-motion of the needle.SELECTED DRAWING: Figure 3

Description

  The present invention relates to a pump device and a miniaturization device.

  In Patent Document 1, a water-based fluid and an oil-based fluid are supplied to the suction port of a pressure pump via a check valve, the high pressure fluid discharged from the pressure pump is converted into a plurality of high-speed flows, and a collision passage There is disclosed an atomizing device which performs atomization by injecting the particles into the inside.

Patent No. 3149375

  In the refinement device as shown in Patent Document 1, a ball valve is used as a check valve, and the ball valve has a spring for pressing a spherical valve body against a valve seat. However, in the case of using the atomization device described in Patent Document 1, when the throughput of the fluid is increased, the movement of the ball does not follow the flow of the mixed liquid, which may cause problems such as backflow. Moreover, when processing the fluid containing fibrous material using the atomization apparatus described in Patent Document 1, the fibrous material is entwined in the spring, and the movement of the spring is inhibited, so that the valve body is a fluid There is a risk that problems such as backflow may occur without following the flow.

  The present invention has been made in view of such circumstances, and provides a pump device and a microminiaturization device which can reliably follow the movement of a valve body to the movement of a pump without using an elastic member for a check valve. The purpose is

  In order to solve the above problems, a pump device according to the present invention is, for example, a plunger pump having a plunger movably provided in an axial direction, and a needle valve provided on the upstream side of the plunger pump, A needle valve having a needle, and a valve body in which a flow passage into which the tip of the needle is inserted is formed; a closed position in which the needle abuts on a valve seat formed in the flow passage; A needle drive unit for moving the needle in the axial direction between an open position where the needle does not contact the valve seat, a plunger drive motor for moving the plunger in the axial direction, and the number of rotations of the plunger drive motor A control unit for controlling the needle drive unit based on the control unit so as to make the cycles of the reciprocating movement of the plunger and the reciprocating movement of the needle substantially coincide with each other. The features.

  According to the pump device of the present invention, the needle drive moves the needle in the axial direction between the closed position where the needle abuts the valve seat and the open position where the needle does not abut the valve seat. The control unit controls the needle drive based on the number of rotations of the plunger drive motor for moving the plunger in the axial direction, and makes the cycles of the reciprocating movement of the plunger and the reciprocating movement of the needle substantially coincide. Thereby, the movement of the valve body (needle) can be reliably made to follow the movement of the plunger pump without using an elastic member for the check valve.

  Here, the needle drive unit includes a rotary electric motor and a feed screw mechanism having a screw shaft and a nut, and the control unit is configured to rotate the plunger drive motor and the rotation speed of the rotary electric motor. The rotational speed of the rotary electric motor may be controlled to be proportional. As a result, even when the rotation speed of the drive motor is fast and the flow rate of the plunger pump is high, the movement of the needle can be made to reliably follow the movement of the plunger.

  Here, the tip of the needle may be formed of a cobalt-based alloy containing chromium and tungsten. This makes it possible to make the needle excellent in wear resistance.

  In order to solve the above problems, the miniaturization apparatus according to the present invention has, for example, a sample tank in which a mixed solution of a sample and a liquid is stored, and a plunger provided so as to be movable in the axial direction, A needle valve having a plunger pump for pressurizing the liquid mixture, a needle provided on the upstream side of the plunger pump, and a valve body in which a flow passage into which the tip of the needle is inserted is formed. A needle drive unit for moving the needle axially between a closed position in which the needle contacts a valve seat formed in the flow path, and an open position in which the needle is not in contact with the valve seat; A plunger drive motor for moving the plunger in the axial direction, and the needle drive unit are controlled based on the number of rotations of the plunger drive motor to reciprocate the plunger and the need. A control unit for substantially matching the cycle with the reciprocation of the liquid, and the downstream side of the plunger pump, the two inflow channels through which the mixed liquid flows in, and the downstream of the two inflow channels And an atomizing unit having one combined flow path. Thereby, the movement of the valve body (needle) can be reliably made to follow the movement of the plunger pump without using an elastic member for the check valve.

  Here, the needle drive unit includes a rotary electric motor and a feed screw mechanism having a screw shaft and a nut, and the control unit is configured to rotate the plunger drive motor and the rotation speed of the rotary electric motor. The rotational speed of the rotary electric motor may be controlled to be proportional. As a result, even when the rotation speed of the drive motor is fast and the flow rate of the plunger pump is high, the movement of the needle can be made to reliably follow the movement of the plunger.

  Here, the needle valve may be further provided downstream of the plunger pump and upstream of the atomization unit. This prevents the mixed liquid discharged from the plunger pump from flowing back to the plunger pump.

  According to the present invention, it is possible to make the movement of the valve follow the movement of the pump reliably without using an elastic member for the check valve.

It is a figure which shows schematic structure of the refinement | miniaturization apparatus 10 in which the pump apparatus 2 which is one Embodiment of this invention was provided. FIG. 6 is a view showing a schematic configuration of a drive unit that drives the plunger pump 4; FIG. 2 is a view showing a schematic configuration of a pump device 2; It is sectional drawing which shows the needle 11 and valve main body 12 of non-return valve 1A, 1B in outline. It is the A section enlarged view of FIG. 4, and shows the state which check valve 1A, 1B is open. It is the A section enlarged view of FIG. 4, and shows the state which the non-return valves 1A and 1B have closed. FIG. 2 is a block diagram showing an example of an electrical configuration of a pump device 2; 5 is a graph showing the relationship between the number of revolutions of the drive motor 41 and the flow rate of the plunger pump 4;

  Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. The pump device and the miniaturization device of the present invention are used under high pressure (for example, about 300 MPa). In the following description, although the pump device of the present invention is applied to an atomizing device in which a sample such as powder is made to collide under high pressure to make the sample finer, the pump device of the present invention is The present invention can be applied to devices other than the above.

  FIG. 1 is a view showing a schematic configuration of a miniaturization apparatus 10 according to an embodiment of the present invention. The thick arrows in FIG. 1 indicate the flow of the mixed solution. The atomizing device 10 mainly includes a check valve 1, a sample tank 3, a plunger pump 4, an atomizing unit 5, and a heat exchanger 6. The check valve 1 and the plunger pump 4 constitute a pump device 2.

  The check valve 1 is provided on the downstream side of the sample tank 3 and on the upstream side of the plunger pump 4, and on the downstream side of the plunger pump 4 and on the upstream side of the atomization unit 5. And 1B. The check valves 1A, 1B are needle valves and have the same configuration. The check valves 1A and 1B will be described in detail later.

  The sample tank 3 stores a mixed liquid (fluid to be atomized) in which the sample and the liquid are mixed. The plunger pump 4 has a plunger 45 provided movably in the axial direction. When the plunger 45 moves in the left direction in FIG. 3, the mixed solution is supplied into the plunger pump 4. Further, when the plunger 45 moves in the right direction in FIG. 3, the mixed liquid is discharged from the plunger pump 4.

  The mixed liquid stored in the sample tank 3 passes through the check valve 1A and is supplied to the plunger pump 4. At this time, the check valve 1A is in the open state, and the check valve 1B is in the closed state. The check valve 1 B prevents backflow of the mixture so that the mixture does not return from the atomizing unit 5 to the plunger pump 4.

  The mixed liquid is pressurized by the plunger pump 4 and supplied to the atomizing unit 5 through the check valve 1B. At this time, the check valve 1A is in the closed state, and the check valve 1B is in the open state. The check valve 1A prevents the backflow of the mixture so that the mixture does not return from the plunger pump 4 to the sample tank 3.

  The atomization unit 5 mainly includes two inflow channels 5a and 5b into which the mixed liquid pressurized by the plunger pump 4 flows, and a combined channel 5c provided on the downstream side of the two inflow channels 5a and 5b. And. In the atomization unit 5, the mixed liquid which has divided into two inflow channels 5a and 5b collides, and the sample is miniaturized. After that, the sample collides and flows in the combined channel 5c, whereby the sample is atomized again. The mixed liquid that has passed through the combined flow path 5c is discharged to the heat exchanger 6 through the discharge flow paths 5d and 5e.

  By passing through the atomization unit 5, the mixture liquid becomes high temperature, and the temperature of the mixture liquid which has become high temperature is lowered by the heat exchanger 6 and returned to the sample tank 3. The mixed solution returned to the sample tank 3 passes through the plunger pump 4, the atomization unit 5 and the heat exchanger 6 again and is returned to the sample tank 3. By repeating this process, the sample is miniaturized so that the particle size of the sample becomes nano level.

  FIG. 2 is a view showing a schematic configuration of a drive unit for driving the plunger pump 4. The plunger 45 (not shown in FIG. 2) of the plunger pump 4 is driven by the drive motor 41. A pulley 42 is provided on an output shaft 41 a of the drive motor 41, and the rotation of the pulley 42 is transmitted to the pulley 43 via a belt 44. The rotation of the pulley 43 is transmitted to the plunger 45 via a connecting member (not shown) such as a link, and the plunger 45 reciprocates as the pulley 43 rotates.

  Thus, when the drive motor 41 rotates, the plunger 45 moves in the axial direction. When the rotation speed of the drive motor 41 is increased, the rotation speed of the pulley 43, that is, the moving speed of the plunger 45 and the cycle of the reciprocation become faster, and the flow rate of the plunger pump 4 increases.

  FIG. 3 is a view showing a schematic configuration of the pump device 2. The thick arrows in FIG. 3 indicate the flow of the mixed solution.

  The check valves 1A and 1B each include a needle 11, a valve body 12, a servomotor 13, a timing belt 14, a rotating shaft 15, and a ball screw 16. In addition, since the check valve 1A and the check valve 1B have the same configuration, a partial configuration of the check valve 1B is omitted in FIG.

  A flow path of the mixed liquid is formed inside the valve body 12. The tip of the needle 11 is inserted into the flow path. The needle 11 reciprocates in the axial direction (left and right direction in FIG. 3, see white arrow) by the rotation of the servomotor 13. The servomotor 13 is a type of electric motor, and is a rotary electric motor capable of accurately controlling the rotation angle.

  When the output shaft 13 a of the servomotor 13 rotates, the rotation is transmitted to the rotating shaft 15 by the timing belt 14. A ball screw 16 is provided on the rotating shaft 15. The ball screw 16 is a feed screw mechanism including a screw shaft 16 a and a nut (not shown). When the rotation shaft 15 rotates, the screw shaft 16a rotates, and the screw shaft 16a moves in parallel in the left-right direction of FIG. The needle 11 is provided on the screw shaft 16a, and the needle 11 moves in parallel along with the parallel movement of the screw shaft 16a. Thus, the servomotor 13 is in the closed position (see FIG. 6) where the tip 11a of the needle 11 abuts against the valve seat 12g and the open position (see FIG. 6) where the tip 11a of the needle 11 does not abut against the valve seat 12g 5) move the needle 11).

  In this embodiment, the servomotor 13 which is a rotary electric motor is used as a drive source for moving the needle 11. However, the drive source for moving the needle 11 is not limited to the servomotor 13, and various types of electric motors may be used. A motor can be used.

  FIG. 4 is a cross-sectional view schematically showing the needle 11 and the valve body 12 of the check valve 1A, 1B. The valve body 12 is a substantially rectangular member made of metal (for example, stainless steel). Recesses 12a, 12b and 12c which become flow paths are formed in the valve body 12 inside. The recess 12 a and the recess 12 b are substantially parallel, and the recesses 12 a and 12 b and the recess 12 c are approximately orthogonal to each other.

  The recess 12 a opens in the lower surface of the valve body 12 in FIG. 4, and the recess 12 b opens in the upper surface of the valve body 12 in FIG. 4. The recesses 12a and 12b are formed such that the central axis ax1 of the recess 12a and the central axis ax2 of the recess 12b do not overlap.

  The tip of the recess 12 a and the tip of the recess 12 b are connected by the recess 12 c. The recess 12 c opens in the left side surface of the valve body 12 in FIG. 4. The recess 12c includes a substantially cylindrical tubular hole 12d in which the side surface of the needle 11 slides, and a substantially cylindrical tubular hole 12e formed at the end of the tubular hole 12d (the back side of the recess 12c). Have. The recess 12b is open on the side surface of the cylindrical hole 12d, and the tubular hole 12e is open on the side surface of the recess 12a. Thereby, the recessed parts 12a, 12b, and 12c become one flow path.

  The diameter of the cylindrical hole 12e is smaller than the diameter of the cylindrical hole 12d. The cylindrical hole 12e is opened in the bottom surface 12f of the cylindrical hole 12d, and the edge formed by the bottom surface 12f and the cylindrical hole 12e is the valve seat 12g. That is, the valve seat 12g is formed in the flow path.

  5 and 6 are enlarged views of a portion A in FIG. 4, FIG. 5 shows a state (open state) in which the check valves 1A and 1B are open, and FIG. 6 shows a closed check valve 1A1A and 1B. Indicates the state (closed state). The thick arrows in FIG. 5 indicate the flow of the mixed solution.

  In the open state shown in FIG. 5, the tip 11a is not in contact with the valve seat 12g. Therefore, the liquid mixture flowing from the recess 12 a flows into the recess 12 b through the recess 12 c (here, the cylindrical holes 12 d and 12 e) and flows from the recess 12 b toward the plunger pump 4. Thus, when the check valve 1A is in the open state, the mixture passes through the check valve 1A.

  On the other hand, in the closed state shown in FIG. 6, the tip end portion 11a is in contact with the valve seat 12g. Therefore, the mixed solution flowing in from the recess 12a is blocked by the tip 11a at the tip of the cylindrical hole 12e and can not flow into the recess 12b.

  Since the tip of the tip 11a has a substantially arc shape, the tip 11a is not broken even if the tip 11a collides with the valve seat 12g when the needle 11 moves from the open position to the closed position. Since the tip end portion 11a has a substantially conical shape and the valve seat 12g has an edge shape, when a fibrous material is used as a sample, the edge portion which is the contact surface between the tip end portion 11a and the valve seat 12g It can cut fiber.

  Further, the tip portion 11a is formed of an alloy excellent in wear resistance, in this case, a cobalt-based alloy containing chromium and tungsten. The cobalt-based alloy in the present embodiment is Stellite (registered trademark), which is a Co-Cr-W alloy based on cobalt (Co), chromium (Cr) and tungsten (W).

  FIG. 7 is a block diagram showing an example of the electrical configuration of the pump device 2 of the present invention. The pump device 2 mainly includes a control unit 70 and a storage unit 75. The control unit 70 is a program control device such as a CPU, and operates according to a program stored in the storage unit 75. The storage unit 75 is a memory device or the like, and holds a program executed by the control unit 70. The storage unit 75 also operates as a work memory of the control unit 70.

  Here, the operation of the control unit 70 will be described. The control unit 70 of the present embodiment is configured to include a drive motor control unit 71 that controls the drive motor 41 and a servo motor control unit 72 that controls the servo motor 13.

  The drive motor control unit 71 outputs a signal to an inverter of the drive motor 41 to control the number of rotations of the drive motor 41. The inverter is connected to a power supply, and the drive motor control unit 71 controls the frequency supplied from the inverter to the drive motor 41. Since the inverter and its control are already known, the description will be omitted.

  FIG. 8 is a graph showing the relationship between the number of rotations of the drive motor 41 and the flow rate of the plunger pump 4. When the power supply frequency supplied to the drive motor 41 is increased, the number of rotations of the drive motor 41 is increased. Since the movement amount (stroke) of the needle 11 is fixed, when the rotational speed of the drive motor 41 is increased, the reciprocating movement of the needle 11 is accelerated, and the flow rate of the plunger pump 4 is increased.

  It returns to the explanation of FIG. The drive motor 41 has a programmable logic controller (PLC), and the PLC acquires the power supply frequency supplied to the drive motor 41 from the inverter. Further, a sensor (not shown) acquires the position of the pulley 43 in the rotational direction, that is, the position and movement direction of the plunger 45. The control unit 70 acquires the monitored power supply frequency and the position and movement direction of the plunger 45.

  The drive motor control unit 71 controls the frequency supplied to the drive motor 41 while monitoring the power supply frequency and the position of the plunger 45.

  The servo motor control unit 72 controls the servo motor 13 based on the power supply frequency monitored by the PLC, that is, the number of rotations of the drive motor 41. In the present embodiment, the servomotor control unit 72 controls the number of rotations of the servomotor 13 such that the number of rotations of the drive motor 41 and the number of rotations of the servomotor 13 are proportional.

  Further, the servomotor control unit 72 changes the rotation direction of the servomotor 13 based on the movement direction of the plunger 45. For example, when the servomotor 13 rotates in the forward direction, the needle 11 moves from the open position toward the closed position, and when the servomotor 13 rotates in the reverse direction, the needle 11 moves from the closed position toward the open position Do. Thus, the needle 11 reciprocates by rotating the servomotor 13 forward and reverse.

  Next, the operation of the pump device 2 and the miniaturization device 10 configured as described above will be described with reference to FIG. The drive motor control unit 71 controls the number of rotations of the drive motor 41, that is, the moving speed of the plunger 45 and the cycle of the reciprocation of the plunger 45 such that the flow rate of the plunger pump 4 becomes a desired value.

  When the plunger 45 moves in the right direction in FIG. 3, the servomotor control unit 72 rotates the servomotor 13 of the check valve 1A such that the check valve 1A is opened from the closed state. Thereby, the mixed solution stored in the sample tank 3 is supplied to the plunger pump 4 through the check valve 1A, and the mixed solution is sucked into the plunger pump 4.

  At the same time, the servomotor control unit 72 rotates the servomotor 13 of the check valve 1B so that the check valve 1B changes from the open state to the closed state. This prevents the backflow of the mixed liquid to the plunger pump 4.

  Further, when the plunger 45 moves in the left direction in FIG. 3, the servomotor control unit 72 rotates the servomotor 13 so that the check valve 1A changes from the open state to the closed state. Thereby, the mixed liquid discharged from the plunger pump 4 is prevented from flowing back to the sample tank 3.

  At the same time, the servomotor control unit 72 rotates the servomotor 13 of the check valve 1B so that the check valve 1B changes from the closed state to the open state. Thereby, the mixed liquid flows out from the plunger pump 4 to the downstream side (here, the atomization unit 5).

  Thus, the servomotor control unit 72 rotates the servomotor 13 forward and reverse so that the cycles of the reciprocation of the plunger 45 and the reciprocation of the needle 11 substantially coincide with each other. Since the cycle of the reciprocation of the plunger 45 is proportional to the number of rotations of the drive motor 41, the servo motor control unit 72 controls the number of rotations of the servomotor 13 and the switching period of forward rotation and reverse rotation based on the number of rotations Control.

  According to the present embodiment, needle valves are used as the check valves 1A and 1B, and the needle 11 is made to reciprocate by the servomotor 13, whereby the check valves can be reliably made without using elastic members as check valves. It can be opened and closed. Moreover, since an elastic member is not used for a non-return valve, also when using a fibrous material as a sample, a fiber does not get tangled in an elastic member, and a non-return valve can be opened and closed reliably.

  Further, according to the present embodiment, the servomotor 13 is rotated forward and backward so that the cycle of the reciprocation of the plunger 45 and the reciprocation of the needle 11 substantially match based on the number of rotations of the drive motor 41. Therefore, the movement of the needle 11 can reliably follow the movement of the plunger 45, that is, the plunger pump 4.

  In particular, according to the present embodiment, even when the rotation speed of the drive motor 41 is fast (the flow rate of the plunger pump 4 is large), the movement of the needle 11 can be reliably followed by the movement of the plunger pump 4. For example, in the case of using a ball valve using an elastic member, the valve is opened and closed by moving the ball by the flow of the mixed liquid, but the number of rotations of the drive motor 41 becomes faster. If the speed of the ball is too fast, the movement of the ball will not follow the flow of the mixture, and the mixture may flow back. On the other hand, the backflow of the mixture can be prevented by reciprocating the needle 11 using the servomotor 13 to open and close the check valves 1A and 1B without using the flow of the mixture.

  Further, according to the present embodiment, since the number of rotations of the servomotor 13 is controlled so that the number of rotations of the drive motor 41 and the number of rotations of the servomotor 13 are proportional, the movement of the needle 11 along with the increase of the flow rate The speed can be increased. That is, even when the flow rate increases, the movement of the needle 11 can reliably follow the movement of the plunger 45.

  Further, in the present embodiment, since the needle 11 is reciprocated by the servomotor 13, no elastic member is required.

  In the present embodiment, the servomotor 13 which is a rotary electric motor is used as a drive source for moving the needle 11. However, the drive source for moving the needle 11 is not limited to the rotary electric motor. For example, the needle 11 may be moved using a linear motor. Further, for example, the needle 11 may be moved by using compressed air as a drive source and changing the flow direction of air by a solenoid valve. However, since the number of rotations and the direction of rotation can be finely controlled by using an encoder, it is preferable to use the servomotor 13.

  Although the pump device 2 has the check valves 1A and 1B in the present embodiment, the check valve 1B is not essential, and the check valve 1A and the plunger pump 4 may be used as the pump device of the present invention. However, in order to prevent the liquid mixture discharged from the plunger pump 4 from flowing back to the plunger pump 4, it is desirable to provide a check valve 1B.

  The embodiment of the present invention has been described in detail with reference to the drawings, but the specific configuration is not limited to this embodiment, and design changes and the like within the scope of the present invention are also included. .

  Further, in the present invention, “abbreviation” is a concept including not only the case of strictly identical but also an error and a deformation that do not lose the sameness. For example, substantially parallel and approximately orthogonal are not limited to strictly parallel and orthogonal cases. Further, for example, when expressing simply as parallel, orthogonal, etc., not only strictly parallel, orthogonal, etc., but also substantially parallel, substantially orthogonal, etc. shall be included.

1, 1A, 1B: Check valve 2: Pump device 3: Sample tank 4: Plunger pump 5: Atomization unit 5a, 5b: Inflow passage 5c: Combined passage 5d, 5e: Discharge passage 6: Heat exchanger 10 : Micronization device 11: Needle 11a: Tip portion 12: Valve body 12a, 12b, 12c: Recess 12d, 12e: Cylindrical hole 12f: Bottom surface 12g: Valve seat 13: Servo motor 13a: Output shaft 14: Timing belt 15: Rotary shaft 16: Ball screw 16a: Screw shaft 41: Drive motor 41a: Output shaft 42, 43: Pulley 44: Belt 45: Plunger 70: Control unit 71: Drive motor control unit 72: Servo motor control unit 75: Storage unit

Claims (6)

A plunger pump having a plunger movably provided in an axial direction;
A needle valve provided on the upstream side of the plunger pump, the needle valve having a needle and a valve main body in which a flow passage into which the tip of the needle is inserted is formed;
A needle drive unit for moving the needle axially between a closed position in which the needle contacts a valve seat formed in the flow path, and an open position in which the needle is not in contact with the valve seat;
A plunger drive motor for moving the plunger axially;
A control unit that controls the needle drive unit based on the number of rotations of the plunger drive motor to substantially match the cycle of the reciprocating movement of the plunger and the reciprocating movement of the needle;
The pump apparatus characterized by having. The needle drive unit has a rotary electric motor and a feed screw mechanism having a screw shaft and a nut,
The pump apparatus according to claim 1, wherein the control unit controls the number of rotations of the rotary electric motor such that the number of rotations of the plunger drive motor is proportional to the number of rotations of the rotary electric motor. The pump device according to claim 1, wherein a tip portion of the needle is formed of a cobalt-based alloy containing chromium and tungsten. A sample tank in which a mixture of a sample and a liquid is stored;
A plunger pump having a plunger movably provided in the axial direction and pressurizing the mixed liquid;
A needle valve provided on the upstream side of the plunger pump and having a needle and a valve main body in which a flow passage into which the tip of the needle is inserted is formed;
A needle drive unit for moving the needle axially between a closed position in which the needle contacts a valve seat formed in the flow path, and an open position in which the needle is not in contact with the valve seat;
A plunger drive motor for moving the plunger axially;
A control unit that controls the needle drive unit based on the number of rotations of the plunger drive motor to substantially match the cycle of the reciprocating movement of the plunger and the reciprocating movement of the needle;
An atomization unit provided on the downstream side of the plunger pump and having two inflow passages into which the mixed solution flows in, and one combined passage provided on the downstream side of the two inflow passages;
A miniaturization apparatus characterized by comprising: The needle drive unit has a rotary electric motor and a feed screw mechanism having a screw shaft and a nut,
5. The apparatus according to claim 4, wherein the control unit controls the number of rotations of the rotary electric motor such that the number of rotations of the plunger drive motor is proportional to the number of rotations of the rotary electric motor. . The said needle valve is further provided in the downstream of the said plunger pump and the upstream of the said atomization unit. The refinement | miniaturization apparatus of Claim 4 or 5 characterized by the above-mentioned.

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