JP2018186680A - Method for controlling vibration actuator, method for detecting abnormality of vibration actuator, control apparatus for vibration actuator, robot, electronic component conveying apparatus, printer, projector, and vibration device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a vibration actuator control method, a vibration actuator abnormality detection method, a vibration actuator control device, a robot, an electronic component transfer device, a printer, a projector and a vibration device, which can detect an abnormality with a simple configuration and with high accuracy. offer. A method for controlling a vibration actuator is a vibration actuator having a vibrating body that vibrates by applying a drive signal whose voltage changes periodically and outputs a detection signal whose voltage changes periodically due to the vibration. In the control method of the above, the vibration state of the vibrating body is made different depending on whether the phase difference between the drive signal and the detection signal is within the first reference range and outside the first reference range. [Selection diagram] Fig. 1

Description

  The present invention relates to a vibration actuator control method, a vibration actuator abnormality detection method, a vibration actuator control device, a robot, an electronic component transport device, a printer, a projector, and a vibration device.

  In the ultrasonic motor described in Patent Document 1, an alternating voltage (detection signal) output from the detection electrode of the piezoelectric body is converted into a monitor voltage, and the abnormality of the ultrasonic motor is compared by comparing the monitor voltage with a predetermined voltage. Detected.

JP-A-1-190269

  However, when an abnormality is detected using a monitor voltage (corresponding to the amplitude of the piezoelectric body) as in the ultrasonic motor of Patent Document 1, a circuit for detecting the amplitude of the piezoelectric body is separately required. Patent Document 1 also describes a method of detecting an abnormality of an ultrasonic motor based on the frequency of an alternating voltage (detection signal) output from a detection electrode of a piezoelectric body. However, since the frequency of the alternating voltage (detection signal) output from the detection electrode does not change even if the piezoelectric body breaks down, accurate detection is difficult.

  An object of the present invention is to provide a vibration actuator control method, a vibration actuator abnormality detection method, a vibration actuator control device, a robot, an electronic component conveying device, a printer, a projector, It is to provide a vibrating device.

  The above object is achieved by the present invention described below.

The vibration actuator control method of the present invention is a vibration actuator having a vibrating body that vibrates by applying a drive signal whose voltage changes periodically and outputs a detection signal whose voltage changes periodically due to the vibration. A control method,
The vibration state of the vibrating body is different depending on whether the phase difference between the drive signal and the detection signal is within a first reference range or outside the first reference range.
Thereby, it is possible to detect an abnormality of the vibrating body with a simple configuration and with high accuracy, and to control the driving of the vibrating body based on the abnormality.

In the vibration actuator control method of the present invention, the vibrating body is determined to be normal when the phase difference is within the first reference range, and abnormal when the phase difference is outside the first reference range. It is preferable to be judged.
Thereby, the abnormality of a vibrating body can be detected more accurately and easily.

In the vibration actuator control method of the present invention, it is preferable that when the phase difference of the vibrating body is within the first reference range, the frequency of the drive signal is changed so that the phase difference approaches a predetermined value.
Thereby, a vibrating body can be vibrated more efficiently.

In the vibration actuator control method of the present invention, when the phase difference is outside the first reference range, the phase difference is within a second reference range different from the first reference range, and the second reference It is preferable to vary the vibration state of the vibrating body when it is out of range.
Thereby, the abnormality degree of a vibrating body can be detected and control suitable for it can be performed. Therefore, more efficient and safe control is possible.

In the vibration actuator control method of the present invention, the vibrating body includes a contact portion that contacts the driven portion,
When the phase difference is within the first reference range, the vibrating body is vibrated so that the abutting portion is rotationally vibrated,
When the phase difference is within the second reference range, the vibrating body is vibrated so that the contact portion vibrates in the contact direction with the driven portion,
When the phase difference is outside the second reference range, it is preferable to stop the vibration of the vibrating body.
As a result, the vibration actuator can be driven more efficiently and safely.

In the vibration actuator control method according to the present invention, the vibration actuator includes a plurality of the vibrators.
When a predetermined number or more of the plurality of vibrating bodies are out of the first reference range, it is preferable to stop driving the plurality of vibrating bodies.
Thereby, destruction of a vibrating body can be prevented beforehand and the safety | security of a vibration actuator can be improved.

The vibration actuator abnormality detection method of the present invention is a vibration actuator having a vibrating body that vibrates by applying a drive signal whose voltage changes periodically and outputs a detection signal whose voltage changes periodically due to the vibration. An abnormality detection method for
An abnormality of the vibrating body is detected based on a phase difference between the drive signal and the detection signal.
Thereby, it is possible to detect the abnormality of the vibrating body with a simple configuration and with high accuracy.

The vibration actuator control device of the present invention is a vibration actuator having a vibrating body that vibrates by applying a drive signal whose voltage changes periodically, and that outputs a detection signal whose voltage changes periodically due to the vibration. A control device,
A detection unit for detecting a phase difference between the drive signal and the detection signal;
And a drive control unit that varies the vibration state of the vibrating body depending on whether the phase difference is within the first reference range or outside the first reference range.
Thereby, it is possible to detect an abnormality of the vibrating body with a simple configuration and with high accuracy, and to control the driving of the vibrating body based on the abnormality.

The robot according to the present invention includes the control device for the vibration actuator according to the present invention.
As a result, the effect of the vibration actuator control device of the present invention can be enjoyed, and the robot becomes highly reliable.

An electronic component conveying apparatus according to the present invention includes the vibration actuator control apparatus according to the present invention.
Thereby, the effect of the vibration actuator control device of the present invention can be enjoyed, and a highly reliable electronic component transport device can be obtained.

The printer of the present invention includes the control device for the vibration actuator of the present invention.
Thereby, the effect of the vibration actuator control device of the present invention can be enjoyed, and a highly reliable printer can be obtained.

The projector according to the present invention includes the control device for the vibration actuator according to the present invention.
Thereby, the effect of the control device for the vibration actuator of the present invention can be enjoyed, and the projector becomes highly reliable.

The vibrating device of the present invention vibrates by applying a drive signal whose voltage periodically changes, and a vibrating body that outputs a detection signal whose voltage periodically changes due to the vibration;
A vibration device having a processor,
The processor detects a phase difference between the drive signal and the detection signal, and changes a vibration state of the vibrating body between the case where the phase difference is within the first reference range and the case where the phase difference is outside the first reference range. It is characterized by making it.
Thereby, it is possible to detect an abnormality of the vibrating body with a simple configuration and with high accuracy, and to control the driving of the vibrating body based on the abnormality.

It is a perspective view which shows the drive device provided with the control apparatus which concerns on 1st Embodiment of this invention. It is a perspective view which shows the modification of the drive device shown in FIG. It is a side view which shows the piezoelectric vibration module which the drive device shown in FIG. 1 has. It is the sectional view on the AA line in FIG. FIG. 5 is a sectional view taken along line BB in FIG. 3. It is CC sectional view taken on the line in FIG. It is a figure which shows the vibration state of the vibrating body shown in FIG. It is a figure which shows the waveform of the 1st drive signal applied to a vibrating body. It is a figure which shows the vibration state of the vibrating body shown in FIG. It is a figure which shows the waveform of the 2nd drive signal applied to a vibrating body. It is a graph which shows the relationship between the frequency of a 1st drive signal, and drive speed. It is a graph which shows the relationship between the frequency of a 1st drive signal, and a phase difference. It is a figure which shows the vibration state of a vibrating body. It is a figure which shows the relationship between the drive signal applied to a vibrating body, and the detection signal output from a vibrating body. It is a perspective view which shows the robot which concerns on 2nd Embodiment of this invention. It is a perspective view which shows the electronic component conveying apparatus which concerns on 3rd Embodiment of this invention. It is a perspective view which shows the electronic component holding part which the electronic component conveying apparatus shown in FIG. 16 has. It is the schematic which shows the whole structure of the printer which concerns on 4th Embodiment of this invention. It is the schematic which shows the whole structure of the projector which concerns on 5th Embodiment of this invention.

  Hereinafter, the vibration actuator control method, vibration actuator abnormality detection method, vibration actuator control device, robot, electronic component transport device, printer, projector, and vibration device of the present invention will be described in detail based on the preferred embodiments shown in the accompanying drawings. Explained.

<First Embodiment>
First, a vibration actuator control method, vibration actuator abnormality detection method, vibration actuator control apparatus, and vibration device according to a first embodiment of the present invention will be described.

  FIG. 1 is a perspective view showing a drive device including a control device according to the first embodiment of the present invention. FIG. 2 is a perspective view showing a modification of the drive device shown in FIG. FIG. 3 is a side view showing a piezoelectric vibration module included in the drive device shown in FIG. 4 is a cross-sectional view taken along line AA in FIG. 5 is a cross-sectional view taken along line BB in FIG. FIG. 6 is a cross-sectional view taken along the line CC in FIG. FIG. 7 is a diagram illustrating a vibration state of the vibrating body illustrated in FIG. 3. FIG. 8 is a diagram illustrating a waveform of the first drive signal applied to the vibrating body. FIG. 9 is a diagram illustrating a vibration state of the vibrating body illustrated in FIG. 3. FIG. 10 is a diagram illustrating a waveform of the second drive signal applied to the vibrating body. FIG. 11 is a graph showing the relationship between the frequency of the first drive signal and the drive speed. FIG. 12 is a graph showing the relationship between the frequency of the first drive signal and the phase difference. FIG. 13 is a diagram illustrating a vibration state of the vibrating body. FIG. 14 is a diagram illustrating a relationship between a drive signal applied to the vibrating body and a detection signal output from the vibrating body. In the following, for convenience of explanation, the upper side in FIGS. 4 to 6 is also referred to as “upper” and the lower side is also referred to as “lower”.

  A drive device 1 (vibration device) shown in FIG. 1 is used as a rotation motor (ultrasonic motor), and a rotor 2 (driven portion) that can rotate around a rotation axis O and vibration that rotates (drives) the rotor 2. The actuator 30 and the control device 9 (processor) that controls the driving of the vibration actuator 30 are provided. The vibration actuator 30 includes a plurality of vibrating bodies 3, a stage 4 that supports each vibrating body 3, and a biasing unit 5 that biases each vibrating body 3 toward the rotor 2 via the stage 4. Have.

  The rotor 2 has a disk shape and is rotatably supported around the rotation axis O. However, the configuration of the rotor 2 is not particularly limited. A plurality of vibrating bodies 3 are arranged in contact with the upper surface 21 of the rotor 2. In the present embodiment, three vibrating bodies 3 are arranged, but the number of vibrating bodies 3 is not particularly limited, and may be one or two, There may be four or more.

  However, the drive device 1 is not particularly limited, and may be configured as shown in FIG. 2, for example. In this case, the drive device 1 has a slider 7 (driven portion) that is used as a linear motion motor and moves linearly by driving the vibration actuator 30.

  Next, the vibrating body 3 will be described. Since each of the three vibrating bodies 3 has the same configuration, only one vibrating body 3 will be described below, and the other vibrating bodies 3 will be described. Description is omitted.

  As illustrated in FIG. 3, the vibrating body 3 includes a vibrating portion 31 that can vibrate, a support portion 32 that supports the vibrating portion 31, a pair of connection portions 33 that connect the vibrating portion 31 and the supporting portion 32, and a vibrating portion. And a transmission portion 34 provided at 31. The vibration part 31 has a substantially rectangular plate shape, and a transmission part 34 is provided at the tip thereof. In addition, the support portion 32 has a U shape surrounding the base end side of the vibration portion 31.

  In the vibrating body 3 having such a configuration, the front end portion of the transmission portion 34 abuts on the upper surface 21 of the rotor 2 and is fixed to the stage 4 at the support portion 32. Further, the stage 4 is urged toward the rotor 2 side (lower side in FIG. 3) by an urging portion 5 such as a spring member (plate spring, spring spring) or the like, so that the transmission portion 34 is sufficient. The upper surface 21 of the rotor 2 is in contact with the frictional force. Therefore, slip is suppressed and the vibration of the vibration part 31 can be efficiently transmitted to the rotor 2 via the transmission part 34.

  Further, as shown in FIG. 1, the vibrating body 3 includes a first substrate 35 and a second substrate 36 disposed to face each other in the thickness direction. For example, a silicon substrate (semiconductor substrate) can be used for each of the first substrate 35 and the second substrate 36. The vibration unit 31 includes a piezoelectric element 37 provided between the first substrate 35 and the second substrate 36, and the support unit 32 is provided between the first substrate 35 and the second substrate 36. A spacer 38 is provided. The spacer 38 functions as a spacer for aligning the thickness of the support portion 32 with the thickness of the vibration portion 31.

  As shown in FIG. 3, the piezoelectric element 37 includes five driving piezoelectric elements 37A, 37B, 37C, 37D, and 37E, and one detecting piezoelectric element 37F. The piezoelectric elements 37 </ b> A and 37 </ b> B are located on one side (the right side in FIG. 3) in the width direction of the vibration unit 31 and are arranged side by side in the longitudinal direction of the vibration unit 31. The piezoelectric elements 37 </ b> D and 37 </ b> E are located on the other side in the width direction of the vibrating portion 31 (left side in FIG. 3) and are arranged side by side in the longitudinal direction of the vibrating portion 31. The piezoelectric element 37 </ b> C is located at the center in the width direction of the vibration part 31 and is disposed along the longitudinal direction of the vibration part 31. The piezoelectric element 37 </ b> F is located on the distal end side of the piezoelectric element 37 </ b> A and is provided at a corner of the vibration part 31. The configuration of the piezoelectric element 37 is not particularly limited as long as the transmission unit 34 can be vibrated by a rotational motion described later. For example, the piezoelectric element 37C may be omitted. The arrangement of the piezoelectric element 37F is not particularly limited as long as a detection signal corresponding to the vibration (deformation) of the vibration unit 31 can be acquired.

  As shown in FIGS. 4 to 6, the piezoelectric element 37 includes a piezoelectric body 372, a first electrode 371 provided on the upper surface of the piezoelectric body 372, and a second electrode 373 provided on the lower surface of the piezoelectric body 372. And have.

  The first electrode 371 is a common electrode provided in common to the piezoelectric elements 37A, 37B, 37C, 37D, 37E, and 37F. On the other hand, the second electrode 373 is an individual electrode provided for each of the piezoelectric elements 37A, 37B, 37C, 37D, 37E, and 37F. The piezoelectric body 372 is integrally provided in common with the piezoelectric elements 37A, 37B, 37C, 37D, 37E, and 37F. However, the piezoelectric body 372 may be provided individually for each of the piezoelectric elements 37A, 37B, 37C, 37D, 37E, and 37F.

  The piezoelectric body 372 expands and contracts in the longitudinal direction of the vibrating portion 31 when an electric field in a direction along the thickness direction of the vibrating portion 31 is applied. On the other hand, the piezoelectric body 372 generates an electric field in the direction along the thickness direction of the vibrating portion 31 as the vibrating portion 31 expands and contracts (deforms) in the longitudinal direction. Examples of the constituent material of the piezoelectric body 372 include lead zirconate titanate (PZT), barium titanate, lead titanate, potassium niobate, lithium niobate, lithium tantalate, sodium tungstate, zinc oxide, Piezoelectric ceramics such as barium strontium titanate (BST), strontium bismuth tantalate (SBT), lead metaniobate and lead scandium niobate can be used. The piezoelectric body 372 made of piezoelectric ceramics may be formed from, for example, a bulk material, or may be formed using a sol-gel method or a sputtering method. As a constituent material of the piezoelectric body 372, polyvinylidene fluoride, quartz, or the like may be used in addition to the piezoelectric ceramic described above.

  As shown in FIG. 7, the vibrating body 3 configured as described above can cause the transmission unit 34 to rotationally vibrate (elliptical vibration). In order to perform such vibration, for example, a first drive signal Sd1 whose voltage periodically changes may be applied to the piezoelectric element 37 as shown in FIG. Specifically, the voltage V1 in FIG. 8 may be applied to the piezoelectric elements 37A and 37E, the voltage V2 may be applied to the piezoelectric element 37C, and the voltage V3 may be applied to the piezoelectric elements 37B and 37D. The voltages V1, V2, and V3 are the same except that the phases are different. Thereby, the vibration part 31 performs the lateral vibration which is bent in the width direction secondarily while performing the longitudinal vibration which expands and contracts in the longitudinal direction. Such a longitudinal vibration and a lateral vibration are combined, the vibration part 31 bends and vibrates in an S shape, and accordingly, the transmission part 34 generates a rotational vibration (elliptical vibration) that is a combined vibration of the longitudinal vibration and the lateral vibration. Do. However, the voltage pattern applied to the piezoelectric element 37 is not particularly limited as long as the transmission unit 34 can be rotated and vibrated.

  Further, as shown in FIG. 9, the vibrating body 3 can cause the transmission unit 34 to vibrate longitudinally along the contact direction with the rotor 2. In order to perform such vibration, for example, as shown in FIG. 10, a second drive signal Sd <b> 2 whose voltage periodically changes may be applied to the piezoelectric element 37. Specifically, the voltage V4 in FIG. 10 may be applied to each piezoelectric element 37A, 37B, 37C, 37D, 37E. Thereby, the vibration part 31 performs the longitudinal vibration which expands and contracts in the longitudinal direction, and the transmission part 34 performs the longitudinal vibration accordingly. However, the voltage pattern applied to the piezoelectric element 37 is not particularly limited as long as the transmission unit 34 can be vibrated longitudinally. Hereinafter, the first drive signal Sd1 and the second drive signal Sd2 are collectively referred to as a drive signal Sd.

  On the other hand, when the vibrating body 3 vibrates as described above, the piezoelectric element 37F is bent, and the electric charge generated from the piezoelectric body 372 due to this bending is detected from the piezoelectric element 37F (between the first electrode 371 and the second electrode 373F). It is output as Ss (an alternating voltage whose voltage changes periodically). Therefore, the vibration of the vibrating body 3 can be detected with high accuracy by using this detection signal. Note that the frequency of the detection signal Ss is substantially equal to the frequency of the drive signal Sd.

  Here, the first drive signal Sd1 will be described. FIG. 11 is a graph showing the relationship between the frequency f of the first drive signal Sd1 and the drive speed of the vibration actuator 30 (drive speed of the rotor 2). As shown in the figure, the drive speed can be increased by bringing the frequency f of the first drive signal Sd closer to the resonance frequency f0 of the vibrating body 3, and the drive speed can be decreased by moving away from the resonance frequency f0. Can do. Further, with the resonance frequency f0 as a peak, the driving speed is gradually decreased on the higher frequency side than the resonance frequency f0, and conversely, the driving speed is rapidly decreased on the lower frequency side than the resonance frequency f0. Therefore, the frequency of the first drive signal Sd1 is set higher than the resonance frequency f0. Thereby, compared with the case where the frequency of 1st drive signal Sd1 is lower than resonance frequency f0, the variation | change_quantity of the drive speed with respect to the frequency change of 1st drive signal Sd1 becomes small, and it can control a drive speed accurately. it can. However, the first drive signal Sd1 may be lower than the resonance frequency f0.

  Next, the phase difference θ between the first drive signal Sd1 and the detection signal Ss will be described. FIG. 12 is a graph showing the relationship between the frequency f of the first drive signal Sd1 and the phase difference θ. As shown in the figure, the phase difference θ monotonously increases as the frequency f of the first drive signal Sd1 decreases.

  Although the vibrating body 3 has been described above, the configuration of the vibrating body 3 is not particularly limited. For example, the support part 32 and the connection part 33 may be omitted. Further, either the first substrate 35 or the second substrate 36 may be omitted.

  Next, a control method (abnormality detection method) of the vibration actuator 30 using the detection signal output from each vibrating body 3 will be described. However, the control method (abnormality detection method) is not limited to the method described below.

  The control device 9 can control the driving of each vibrator 3 independently. Further, as shown in FIG. 1, the control device 9 independently detects the phase difference θ between the first drive signal Sd1 and the detection signal Ss, and independently drives the vibrating bodies 3 based on the phase difference θ. A drive control unit 92 and a notification unit 93.

  As shown in FIG. 13, when the drive control unit 92 applies the first drive signal Sd1 to each vibrating body 3, the transmission unit 34 of each vibrating body 3 is rotationally oscillated (elliptical vibration), whereby the rotor 2 is rotated. To do. Further, at this time, as shown in FIG. 14, a detection signal Ss corresponding to rotational vibration (elliptical vibration) is output from each vibrating body 3. And the detection part 91 detects phase difference (theta) of 1st drive signal Sd1 and detection signal Ss of each vibrating body 3 based on detection signal Ss. As described above, since the first drive signal Sd1 includes three voltages V1, V2, and V3 having different phases, the detection unit 91 detects one of the voltages V1, V2, and V3. What is necessary is just to detect phase difference (theta) with signal Ss.

  The vibrating body 3 has a characteristic that the phase difference θ changes when normal driving is possible when damage such as deterioration, disconnection, cracking, and chipping occurs and normal driving becomes difficult. Therefore, the control device 9 detects the phase difference θ and determines whether each vibrating body 3 is normal or abnormal based on the detected phase difference θ.

  As shown in FIG. 12, a first reference range θb1 of the phase difference θ is set in the drive control unit 92. The drive control unit 92 compares the phase difference θ of each vibrating body 3 detected by the detection unit 91 with the first reference range θb1. Then, the drive control unit 92 determines that the vibration body 3 whose phase difference θ is within the first reference range θb1 is “normal” with almost no damage, and the phase difference θ is outside the first reference range θb1. It is determined that the vibration body 3 is “abnormal” with damage.

  The determination result by the drive control unit 92 is notified to the user or the like by the notification unit 93. The alerting | reporting part 93 has a display screen, a light, a speaker, etc., for example. The notification unit 93 preferably supplies information so that the number and location of the vibrators 3 determined to be “abnormal” are known. Thereby, the maintainability of the vibration actuator 30 is improved.

  The drive control unit 92 continues driving the vibrating body 3 (hereinafter, also referred to as “vibrating body 3A”) having a phase difference θ within the first reference range θb1. Further, the drive control unit 92 changes the frequency f of the first drive signal Sd1 so that the phase difference θ approaches the target value θp for the vibrating body 3A. By performing such control, the rotor 2 can be rotated more efficiently and at high speed.

  Further, the drive control unit 92 may control the vibrating body 3A as follows. Specifically, the drive control unit 92 changes the frequency of the first drive signal Sd1 so that the amplitude of the detection signal Ss becomes the maximum for the vibrating body 3A. That is, for the vibrating body 3A, the frequency f of the first drive signal Sd1 is finely changed over time so as to track the maximum value of the amplitude of the detection signal Ss. Since the amplitude of the detection signal Ss is proportional to the amplitude of the transmission unit 34, the amplitude of the transmission unit 34 is increased by increasing the amplitude of the detection signal Ss. Therefore, the rotor 2 can be rotated more efficiently and at high speed.

  Further, a second reference range θb2 of the phase difference θ is set in the drive control unit 92. The second reference range θb2 is set at a position shifted from the first reference range θb1. Specifically, the second reference range θb2 is set to a side where the frequency f is higher than the first reference range θb1 and a side where the frequency f is lower than the first reference range θb1. In other words, the second reference range θb2 is set wider than the first reference range θb1, and the entire first reference range θ1 is located between the lower limit value and the upper limit value of the second reference range θb2. Yes. However, as long as the second reference range θb2 is different from the first reference range, the setting method is not particularly limited. For example, the second reference range θb2 is a region having a higher frequency f than the first reference range θb1 and the first reference range θb2. One of the regions on the side where the frequency f is lower than the reference range θb1 may be omitted.

  The drive control unit 92 further compares the phase difference θ with the second reference range θb2 for the vibrating body 3 whose phase difference θ is outside the first reference range θb1 (hereinafter also referred to as “vibrating body 3B”). Then, the drive control unit 92 determines that the vibration body 3B having the phase difference θ within the second reference range θb2 is “mild abnormality” having slight damage, and the phase difference θ is the second reference range. The vibrating body 3B outside the range θb2 is determined to be “severe abnormality” having severe damage. The determination result by the drive control unit 92 is notified to the user or the like by the notification unit 93.

  Although the vibrating body 3B having the phase difference θ within the second reference θb2 (hereinafter also referred to as “vibrating body 3B ′”) is damaged, the damage is light, and there is a case where there is no problem even if it is continuously vibrated. In particular, for example, when the wire resistance value increases due to disconnection, and normal driving is difficult due to this, the strength of the first drive signal Sd1 applied to the vibrating body 3B ′ is normal. If the driving control is increased, there is a possibility that the vibrating body 3B ′ vibrates with the same behavior as in the normal case.

  Accordingly, the drive control unit 92 applies a first drive signal Sd1 'having a higher strength (amplitude) than the first drive signal Sd1 applied during normal drive control to the vibrating body 3B'. Note that the strength (amplitude) of the first drive signal Sd1 'is preferably gradually increased. Thereby, the burden on the vibrating body 3B 'can be reduced. When the phase difference θ of the vibrating body 3B ′ to which the first driving signal Sd1 ′ is applied falls within the first reference range θb1, the drive control unit 92 performs the first driving as it is on the vibrating body 3B ′. While applying the signal Sd1 ′, the frequency f of the first drive signal Sd1 ′ is changed so that the phase difference θ is directed toward the target value θp. As a result, the vibrating body 3B 'having light damage can be vibrated without changing from the normal vibrating body 3A, so that the rotor 2 can be rotated more efficiently.

  On the other hand, depending on the vibrating body 3B ', the phase difference θ may not be within the first reference range θb1 even when the first drive signal Sd1' is applied. In such a case, if the drive with the first drive signal Sd1 is continued as it is, the damage to the vibrating body 3B 'increases, which may cause destruction. Therefore, the drive control unit 92 stops driving with the first drive signal Sd1 ', applies the second drive signal Sd2 to the vibrating body 3B', and causes the transmission unit 34 to vibrate longitudinally. In this way, by causing the transmission unit 34 of the vibrating body 3B ′ that has been determined to be unable to be driven normally to vibrate vertically, it is possible to suppress the vibrating body 3B ′ from obstructing the rotation of the rotor 2.

  Here, the reason why the vibrating body 3B ′ is longitudinally vibrated will be described. As described above, the vibrating body 3 is urged toward the rotor 2, and the transmission portion 34 has a sufficient frictional force to cause the rotor 2 to vibrate. Is in contact with the upper surface 21. Therefore, if there is a vibrating body 3 that is not driven, the vibrating body 3 becomes a resistance (brake), and the rotor 2 can be rotated even if another rotor 3 is driven to rotate the rotor 2. There is a problem that it cannot be performed or the speed decreases even if it rotates.

  Therefore, it is necessary to reduce the frictional force with the rotor 2 and allow the rotor 2 to rotate with respect to the vibrating body 3B ′ that is not driven by the first drive signal Sd1 ′. This is achieved by the longitudinal vibration of the transmission unit 34. It is. Since this vibration is a reciprocating vibration in a direction approaching and separating from the rotor 2, the frictional force with the rotor 2 is reduced when vibrating in the separating direction (if the transmission unit 34 is separated from the rotor 2, friction is generated). The force is 0). Therefore, on average, the frictional force between the transmission portion 34 and the rotor 2 becomes smaller than that in the stopped state, and thus the movement of the rotor 2 can be allowed.

  In addition, the drive control unit 92 may stop driving all the vibrating bodies 3 when the number of vibrating bodies 3 whose phase difference θ is outside the first reference range θb1 is a predetermined number or more. In such a case, since the ratio of the vibrator 3B determined as “abnormal” is high and the risk of failure of the vibration actuator 30 is high, it is difficult to continuously drive the vibration actuator 30 stably. Therefore, by stopping the driving of all the vibrating bodies 3, it is possible to prevent the vibrating bodies 3 from being destroyed in advance and ensure the safety of the vibration actuator 30. The predetermined number is not particularly limited, and may be, for example, 1/3 or more, 1/2 or more of the entire vibrating body 3.

  The control of the vibrating body 3B ′ has been described above, but this control is not particularly limited. For example, the step of applying the first drive signal Sd1 'may be omitted, and the second drive signal Sd2 may be applied from the beginning. That is, all the vibrators 3B 'may be longitudinally vibrated. Thereby, control of vibrating body 3B 'becomes easier. Further, for example, when the urging force (pressing force) by the urging unit 5 is independently variable for each vibrating body 3, the drive control unit 92 presses the vibrating body 3B ′ to the rotor 2. May be weakened, or the vibrating body 3B ′ may be separated from the rotor 2. Thereby, the frictional force between the vibrating body 3 </ b> B ′ and the rotor 2 is reduced, and it can be effectively suppressed that the vibrating body 3 </ b> B ′ becomes a brake when rotating the rotor 2.

  On the other hand, the vibrating body 3B whose phase difference θ is outside the second reference range θb2 (hereinafter also referred to as “vibrating body 3B”) has severe damage and may be destroyed if driven as it is. May damage other parts. Therefore, if there is at least one vibrating body 3B ″, the drive control unit 92 stops driving all the vibrating bodies 3. As a result, the vibration body 3B ″ is destroyed and other parts are damaged accordingly. Can be suppressed. In addition, a sudden failure or the like during the driving is reduced, and the vibration actuator 30 can be driven safely and stably.

  The control in the case where there is the vibrating body 3B ″ has been described above, but this control is not particularly limited. For example, the urging force (pressing force) by the urging unit 5 is variable independently for each vibrating body 3. If so, the drive control unit 92 stops driving the vibrating body 3B ″ and separates the vibrating body 3B ″ from the rotor 2. Thereby, the stress applied to the vibrating body 3B ″ is reduced, and the vibration is reduced. The destruction of the body 3B ″ can be effectively suppressed, and the rotation of the rotor 2 is not inhibited by the vibrating body 3B ″.

  The control method by the drive control unit 92 has been described above. As described above, the drive control unit 92 detects an abnormality of each vibrating body 3 based on the phase difference θ. Since the phase difference θ is a parameter necessary for driving the vibrating body 3 efficiently, the detection unit 91 and the drive control unit 92 are necessary regardless of whether or not the abnormality of the vibrating body 3 is detected. Therefore, by detecting the abnormality of the vibration body 3 based on the phase difference θ, the vibration body 3 is added without adding (or suppressing) a new configuration (circuit) for detecting the abnormality of the vibration body 3. Abnormalities can be detected.

  Further, the drive control unit 92 may control the drive of the vibration actuator 30 as follows. For example, an average phase difference θa obtained by averaging the phase differences θ of the three vibrating bodies 3 is detected, the average phase difference θa is compared with the first reference range θb1, and the average phase difference θa is outside the first reference range θb1. If so, all the vibrators 3 may be determined to be abnormal, and driving of all the vibrators 3 may be stopped. According to such a method, since the state of all the vibrating bodies 3 can be detected at once, the state of the vibrating body 3 can be detected more easily.

  Further, the drive control unit 92 may control the drive of the vibration actuator 30 as follows. For example, the phase differences θ of the three vibrating bodies 3 are summed, and if the total value is outside a predetermined range, all the vibrating bodies 3 may be determined to be abnormal, and driving of all the vibrating bodies 3 may be stopped. According to such a method, since the state of all the vibrating bodies 3 can be detected at once, the state of the vibrating body 3 can be detected more easily.

  Further, the drive control unit 92 may control the drive of the vibration actuator 30 as follows. For example, the phase difference θ of a certain vibrating body 3 may be set as the reference phase difference, and the vibrating body 3 in which the difference between the reference phase difference and the phase difference θ is greater than or equal to a predetermined value may be determined as abnormal. The phase difference θ set as the reference phase difference is not particularly limited, but it is preferable to use a phase difference θ that is located in the vicinity of the median value of the phase differences θ of the plurality of vibrators 3. The reference phase difference may be an average value of the phase differences θ of the plurality of vibrating bodies 3. According to such a method, the reference phase difference suitable for each device can be set, so that the abnormality of the vibrating body 3 can be detected with high accuracy.

  The control device 9 for the vibration actuator 30 and the control method for the vibration actuator 30 have been described above. As described above, such a control device 9 vibrates by applying the drive signal Sd whose voltage changes periodically, and outputs a detection signal Ss whose voltage changes periodically due to the vibration. 3 is a control device of the vibration actuator 30 having 3. The control device 9 detects the phase difference θ between the drive signal Sd and the detection signal Ss, and includes a case where the phase difference θ is within the first reference range θb1 and a case where the phase difference θ is outside the first reference range θb1. And a drive control unit 92 that varies the vibration state of the vibrating body 3. The phase difference θ is a parameter necessary for driving the vibrating body 3 efficiently. Therefore, the detection unit 91 and the drive control unit 92 determine whether or not to change the vibration state of the vibrating body 3 when the phase difference θ is within the first reference range θb1 and when the phase difference θ is outside the first reference range θb1. Nevertheless it is necessary. Therefore, according to the control device 9, the phase difference θ is within the first reference range θb1 and outside the first reference range θb1 without adding (or suppressing) a new configuration (circuit). The vibration state of the vibrating body 3 can be made different. In particular, the vibrating body 3 has a characteristic that when the normal driving is difficult due to damage such as disconnection, cracking, and chipping, the phase difference θ changes with respect to the case where normal driving is possible with almost no damage. Therefore, the control device 9 can easily detect whether the vibrating body 3 is in a normal state without damage or in an abnormal state with damage based on the phase difference θ.

  As described above, the abnormality detection method for the vibration actuator 30 vibrates by applying the drive signal Sd whose voltage changes periodically, and the detection signal Ss whose voltage changes periodically due to the vibration is output. This is a method for detecting an abnormality of the vibration actuator 30 having the vibrating body 3. Then, the abnormality of the vibrating body 3 is detected based on the phase difference θ between the drive signal Sd and the detection signal Ss. The phase difference θ is a parameter necessary for driving the vibrating body 3 efficiently. Therefore, the phase difference θ is necessary regardless of whether or not an abnormality of the vibrating body 3 is detected. Therefore, according to such an abnormality detection method, the abnormality of the vibrating body 3 can be detected without adding a new configuration (circuit) (or while suppressing it to a small amount). In particular, the vibrating body 3 has a characteristic that when the normal driving is difficult due to damage such as disconnection, cracking, and chipping, the phase difference θ changes with respect to the case where normal driving is possible with almost no damage. Therefore, based on the phase difference θ, the abnormality of the vibrating body 3 can be detected with higher accuracy.

  Further, as described above, the control method of the vibration actuator 30 vibrates by applying the drive signal Sd whose voltage changes periodically, and the detection signal Ss whose voltage changes periodically due to the vibration is output. This is a control method of the vibration actuator 30 having the vibrating body 3. The vibration actuator 30 is controlled by the vibration state of the vibrating body 3 when the phase difference θ between the drive signal Sd and the detection signal Ss is within the first reference range θb1 and outside the first reference range θb1. Are different. The phase difference θ is a parameter necessary for driving the vibrating body 3 efficiently. Therefore, the phase difference θ is necessary regardless of whether or not the vibration state of the vibrating body 3 is different between the case where the phase difference θ is within the first reference range θb1 and the case where the phase difference θ is outside the first reference range θb1. . Therefore, according to this control method, the case where the phase difference θ is within the first reference range θb1 and outside the first reference range θb1 without adding a new configuration (circuit) (or while suppressing it). The vibration state of the vibrating body 3 can be made different. In particular, the vibrating body 3 has a characteristic that when the normal driving is difficult due to damage such as disconnection, cracking, and chipping, the phase difference θ changes with respect to the case where normal driving is possible with almost no damage. Therefore, the control device 9 can easily detect whether the vibrating body 3 is in a normal state without damage or in an abnormal state with damage based on the phase difference θ.

  Further, as described above, the drive device 1 as a vibration device vibrates by applying the drive signal Sd whose voltage changes periodically, and the detection signal Ss whose voltage changes periodically due to the vibration is output. And a control device 9 as a processor. Then, the control device 9 detects the phase difference θ between the drive signal Sd and the detection signal Ss, and the vibrating body 3 depending on whether the phase difference θ is within the first reference range θb1 or outside the first reference range θb1. Different vibration states. The phase difference θ is a parameter necessary for driving the vibrating body 3 efficiently. Therefore, the phase difference θ is necessary regardless of whether or not the vibration state of the vibrating body 3 is different between the case where the phase difference θ is within the first reference range θb1 and the case where the phase difference θ is outside the first reference range θb1. . Therefore, according to the driving device 1, the case where the phase difference θ is within the first reference range θb1 and the case where it is outside the first reference range θb1 without adding a new configuration (circuit) (or while suppressing it). The vibration state of the vibrating body 3 can be made different. In particular, the vibrating body 3 has a characteristic that when the normal driving is difficult due to damage such as disconnection, cracking, and chipping, the phase difference θ changes with respect to the case where normal driving is possible with almost no damage. Therefore, the control device 9 can easily detect whether the vibrating body 3 is in a normal state without damage or in an abnormal state with damage based on the phase difference θ.

  As described above, in the control method of the vibration actuator 30, the vibrating body 3 is determined to be normal when the phase difference θ is within the first reference range θb1, and the phase difference θ is outside the first reference range θb1. In some cases, it is judged abnormal. Thereby, the abnormality of the vibrating body 3 can be detected more accurately and easily. Moreover, since the vibration state of the vibrating body 3 can be made different between when the vibrating body 3 is normal and when it is abnormal, more efficient and safe control is possible.

  Further, as described above, in the control method of the vibration actuator 30, when the phase difference θ of the vibrating body 3 is within the first reference range θb1, the drive signal Sd (first drive) is set so that the phase difference θ approaches a predetermined value. The frequency of the signal Sd1) is changed. Thereby, the vibrating body 3 can be vibrated more efficiently.

  As described above, in the control method of the vibration actuator 30, when the phase difference θ is outside the first reference range θb1, the phase difference θ is within the second reference range θb2 different from the first reference range θb1. The vibration state of the vibrating body 3 differs between the case and the case outside the second reference range θb2. Thereby, the abnormality degree of the vibrating body 3 can be detected, and control suitable for it can be performed. Therefore, more efficient and safe control is possible.

  Further, as described above, in the control method of the vibration actuator 30, the vibrating body 3 includes the transmission portion 34 (contact portion) that makes contact with the rotor 2 (driven portion), and the phase difference θ is in the first reference range. When it is within θb1, the vibrating body 3 is vibrated so that the transmission unit 34 is oscillated, and when the phase difference θ is within the second reference range θb2, the transmission unit 34 is longitudinally vibrated (applied to the rotor 2). When the vibrating body 3 is vibrated so as to vibrate in the tangential direction and the phase difference θ is outside the second reference range θb2, the vibration of the vibrating body 3 is stopped. Thereby, the vibration actuator 30 can be driven more efficiently and safely.

  Further, as described above, in the control method of the vibration actuator 30, when the plurality of vibrating bodies 3 are included and a predetermined number or more of the vibrating bodies 3 are outside the first reference range θb1. The driving of the plurality of vibrating bodies 3 is stopped. Thereby, destruction of the vibrating body 3 can be prevented in advance, and the safety of the vibration actuator 30 can be improved.

Second Embodiment
Next, a robot according to a second embodiment of the present invention will be described.
FIG. 15 is a perspective view showing a robot according to the second embodiment of the present invention.

  The robot 1000 shown in FIG. 15 can perform operations such as feeding, removing, transporting, and assembling precision instruments and parts constituting the precision equipment. The robot 1000 is a six-axis robot, and includes a base 1010 fixed to a floor or a ceiling, an arm 1020 rotatably connected to the base 1010, an arm 1030 rotatably connected to the arm 1020, and an arm 1030. An arm 1040 that is pivotally connected to the arm 1040, an arm 1050 that is pivotally coupled to the arm 1040, an arm 1060 that is pivotally coupled to the arm 1050, and a arm 1060 that is pivotally coupled to the arm 1060. An arm 1070 and a robot control unit 1080 that controls driving of the arms 1020, 1030, 1040, 1050, 1060, 1070 are provided. Further, the arm 1070 is provided with a hand connection unit, and an end effector 1090 corresponding to an operation to be executed by the robot 1000 is attached to the hand connection unit. Further, the drive device 1 is mounted on all or a part of each joint portion, and the arms 1020, 1030, 1040, 1050, 1060, 1070 are rotated by the drive of the drive device 1. The driving of each driving device 1 is controlled by the robot control unit 1080. The driving device 1 may be mounted on the end effector 1090 and used to drive the end effector 1090.

  Such a robot 1000 includes a control device 9 for the vibration actuator 30 incorporated in the drive device 1. Therefore, the effect of the control apparatus 9 mentioned above can be enjoyed and high reliability can be exhibited.

<Third Embodiment>
Next, an electronic component transport apparatus according to a third embodiment of the present invention will be described.

  FIG. 16 is a perspective view showing an electronic component carrying apparatus according to the third embodiment of the present invention. FIG. 17 is a perspective view illustrating an electronic component holding unit included in the electronic component transport apparatus illustrated in FIG. 16. In the following, for convenience of explanation, three axes that are orthogonal to each other are referred to as an X axis, a Y axis, and a Z axis.

  An electronic component transport apparatus 2000 shown in FIG. 16 is applied to an electronic component inspection apparatus, and includes a base 2100 and a support base 2200 disposed on the side of the base 2100. Further, on the base 2100, the upstream stage 2110 on which the electronic component Q to be inspected is placed and transported in the Y-axis direction, and the inspected electronic component Q is placed and transported in the Y-axis direction. A downstream stage 2120 and an inspection table 2130 that is located between the upstream stage 2110 and the downstream stage 2120 and inspects the electrical characteristics of the electronic component Q are provided. Examples of the electronic component Q include semiconductors, semiconductor wafers, display devices such as CLD and OLED, crystal devices, various sensors, inkjet heads, various MEMS devices, and the like.

  The support table 2200 is provided with a Y stage 2210 that can move in the Y-axis direction with respect to the support table 2200, and the Y stage 2210 can move in the X-axis direction with respect to the Y stage 2210. A stage 2220 is provided. The X stage 2220 is provided with an electronic component holder 2230 that can move in the Z-axis direction with respect to the X stage 2220.

  As shown in FIG. 17, the electronic component holding unit 2230 has a fine adjustment plate 2231 that can move in the X-axis direction and the Y-axis direction, and a rotation that can turn around the Z-axis with respect to the fine adjustment plate 2231. And a holding portion 2233 that is provided in the rotating portion 2232 and holds the electronic component Q. The electronic component holder 2230 includes a driving device 1 (1x) for moving the fine adjustment plate 2231 in the X-axis direction and a driving device 1 (1y) for moving the fine adjustment plate 2231 in the Y-axis direction. And a driving device 1 (1θ) for rotating the rotating unit 2232 around the Z-axis. 2 can be used as the driving devices 1x and 1y, and the configuration shown in FIG. 1 can be used as the driving device 1θ.

  Such an electronic component transport device 2000 includes a control device 9 for the vibration actuator 30 built in the drive device 1. Therefore, the effect of the control apparatus 9 mentioned above can be enjoyed and high reliability can be exhibited.

<Fourth embodiment>
Next, a printer according to a fourth embodiment of the invention will be described.
FIG. 18 is a schematic diagram illustrating the overall configuration of a printer according to the fourth embodiment of the present invention.

  A printer 3000 illustrated in FIG. 18 includes an apparatus main body 3010, and a printing mechanism 3020, a paper feed mechanism 3030, and a control unit 3040 provided inside the apparatus main body 3010. Further, the apparatus main body 3010 is provided with a tray 3011 on which the recording paper P is set, a paper discharge port 3012 for discharging the recording paper P, and an operation panel 3013 such as a liquid crystal display.

  The printing mechanism 3020 includes a head unit 3021, a carriage motor 3022, and a reciprocating mechanism 3023 that reciprocates the head unit 3021 by the driving force of the carriage motor 3022. The head unit 3021 includes a head 3021a that is an ink jet recording head, an ink cartridge 3021b that supplies ink to the head 3021a, and a carriage 3021c on which the head 3021a and the ink cartridge 3021b are mounted.

  The reciprocating mechanism 3023 includes a carriage guide shaft 3023a that supports the carriage 3021c so as to be able to reciprocate, and a timing belt 3023b that moves the carriage 3021c on the carriage guide shaft 3023a by the driving force of the carriage motor 3022. Yes.

  The paper feeding mechanism 3030 includes a driven roller 3031 and a driving roller 3032 that are in pressure contact with each other, and the driving device 1 that is a paper feeding motor that drives the driving roller 3032.

  The control unit 3040 controls the printing mechanism 3020, the paper feeding mechanism 3030, and the like based on print data input from a host computer such as a personal computer.

  In such a printer 3000, the paper feed mechanism 3030 intermittently feeds the recording paper P one by one to the vicinity of the lower portion of the head unit 3021. At this time, the head unit 3021 reciprocates in a direction substantially orthogonal to the feeding direction of the recording paper P, and printing on the recording paper P is performed.

  Such a printer 3000 includes a control device 9 for the vibration actuator 30 built in the driving device 1. Therefore, the effect of the control apparatus 9 mentioned above can be enjoyed and high reliability can be exhibited. In the present embodiment, the drive device 1 drives the drive roller 3032 for feeding paper. However, for example, the carriage 3021c may be driven.

<Fifth Embodiment>
Next, a projector according to a fifth embodiment of the invention will be described.

  FIG. 19 is a schematic diagram showing an overall configuration of a projector according to the fifth embodiment of the invention.

  A projector 4000 shown in FIG. 19 is an LCD projector, and includes a light source 4010, mirrors 4021, 4022, and 4023, dichroic mirrors 4031 and 4032, liquid crystal display elements 4040R, 4040G, and 4040B, a dichroic prism 4050, and a projection. A lens system 4060 and the driving device 1 are provided.

  Examples of the light source 4010 include a halogen lamp, a mercury lamp, and a light emitting diode (LED). As the light source 4010, a light source that emits white light is used. The light emitted from the light source 4010 is first separated into red light (R) and other light by the dichroic mirror 4031. The red light is reflected by the mirror 4021 and then enters the liquid crystal display element 4040R, and the other light is further separated into green light (G) and blue light (B) by the dichroic mirror 4032. Then, the green light enters the liquid crystal display element 4040G, and the blue light is reflected by the mirrors 4022 and 4023 and then enters the liquid crystal display element 4040B.

  The liquid crystal display elements 4040R, 4040G, and 4040B are each used as a spatial light modulator. These liquid crystal display elements 4040R, 4040G, and 4040B are transmissive spatial light modulators corresponding to the primary colors of R, G, and B, respectively, and include, for example, pixels arranged in a matrix of 1080 rows and 1920 columns. ing. In each pixel, the amount of transmitted light with respect to incident light is adjusted, and in each liquid crystal display element 4040R, 4040G, 4040B, the light amount distribution of all pixels is cooperatively controlled. Lights spatially modulated by such liquid crystal display elements 4040R, 4040G, and 4040B are combined by a dichroic prism 4050, and full-color video light LL is emitted from the dichroic prism 4050. Then, the emitted video light LL is enlarged by the projection lens system 4060 and projected onto a screen or the like, for example. The driving device 1 can change the focal length by moving at least one lens included in the projection lens system 4060 in the optical axis direction.

  Such a projector 4000 includes a control device 9 for the vibration actuator 30 built in the drive device 1. Therefore, the effect of the control apparatus 9 mentioned above can be enjoyed and high reliability can be exhibited.

  The vibration actuator control method, vibration actuator abnormality detection method, vibration actuator control device, robot, electronic component transport device, printer, projector, and vibration device of the present invention have been described based on the illustrated embodiments. The present invention is not limited to this, and the configuration of each part can be replaced with any configuration having the same function. In addition, any other component may be added to the present invention. Moreover, you may combine each embodiment suitably.

  In the above-described embodiment, the configuration in which the control device for the vibration actuator is applied to the robot, the electronic component transport device, the printer, the projector, and the vibration device has been described. However, the control device may be applied to various other electronic devices. Can do.

  DESCRIPTION OF SYMBOLS 1, 1x, 1y, 1 (theta) ... Drive device, 2 ... Rotor, 21 ... Upper surface, 3 ... Vibrating body, 30 ... Vibration actuator, 31 ... Vibrating part, 32 ... Supporting part, 33 ... Connection part, 34 ... Transmission part, 35 ... 1st board | substrate, 36 ... 2nd board | substrate, 37, 37A, 37B, 37C, 37D, 37E, 37F ... Piezoelectric element, 371 ... 1st electrode, 372 ... Piezoelectric body, 373, 373F ... 2nd electrode, 38 ... Between Seat, 4 ... Stage, 5 ... Biasing unit, 7 ... Slider, 9 ... Control device, 91 ... Detection unit, 92 ... Drive control unit, 93 ... Notification unit, 1000 ... Robot, 1010 ... Base, 1020, 1030, 1040 DESCRIPTION OF SYMBOLS 1050, 1060, 1070 ... Arm, 1080 ... Robot control part, 1090 ... End effector, 2000 ... Electronic component conveyance apparatus, 2100 ... Base, 2110 ... Upstream stage, 2120 Downstream stage, 2130 ... inspection table, 2200 ... support table, 2210 ... Y stage, 2220 ... X stage, 2230 ... electronic component holding part, 2231 ... fine adjustment plate, 2232 ... rotating part, 2233 ... holding part, 3000 ... Printer, 3010... Main body, 3011... Tray, 3012... Paper discharge port, 3013... Operation panel, 3020... Printing mechanism, 3021 ... Head unit, 3021 a. 3023 ... Reciprocating mechanism, 3023a ... Carriage guide shaft, 3023b ... Timing belt, 3030 ... Feeding mechanism, 3031 ... Driven roller, 3032 ... Drive roller, 3040 ... Control unit, 4000 ... Projector, 4010 ... Light source, 4021, 4022 , 4023 ... mirror, 4031, 4032 ... dichroic mirror, 4040B, 4040G, 4040R ... liquid crystal display element, 4050 ... dichroic prism, 4060 ... projection lens system, LL ... video light, O ... rotating shaft, P ... recording paper, Q ... Electronic components, Sd1 ... first drive signal, Sd2 ... second drive signal, Ss ... detection signal, V1, V2, V3, V4 ... voltage, .theta .... phase difference, .theta.a ... average phase difference, .theta.b1 ... first reference range, θb2 ... second reference range

Claims (13)

A method for controlling a vibration actuator having a vibrating body that vibrates by applying a drive signal whose voltage periodically changes, and that outputs a detection signal whose voltage periodically changes due to the vibration,
Control of a vibration actuator, wherein a vibration state of the vibrating body is made different between a case where a phase difference between the drive signal and the detection signal is within a first reference range and a case where the phase difference is outside the first reference range. Method.   2. The vibration according to claim 1, wherein the vibrating body is determined to be normal when the phase difference is within the first reference range, and is determined to be abnormal when the phase difference is outside the first reference range. Actuator control method.   3. The method of controlling a vibration actuator according to claim 1, wherein when the phase difference of the vibrating body is within the first reference range, the frequency of the drive signal is changed so that the phase difference approaches a predetermined value.   In the case where the phase difference is outside the first reference range, the vibrating body when the phase difference is within a second reference range different from the first reference range and when the phase difference is outside the second reference range The vibration actuator control method according to claim 1, wherein the vibration states of the vibration actuators are made different. The vibrating body includes a contact portion that contacts the driven portion,
When the phase difference is within the first reference range, the vibrating body is vibrated so that the abutting portion is rotationally vibrated,
When the phase difference is within the second reference range, the vibrating body is vibrated so that the contact portion vibrates in the contact direction with the driven portion,
The method for controlling a vibration actuator according to claim 4, wherein when the phase difference is outside the second reference range, the vibration of the vibrating body is stopped. A plurality of the vibrators;
The method for controlling a vibration actuator according to claim 5, wherein driving of the plurality of vibrating bodies is stopped when a predetermined number or more of the vibrating bodies are out of the first reference range among the plurality of vibrating bodies. An abnormality detection method for a vibration actuator having a vibrating body that vibrates by applying a drive signal whose voltage periodically changes and outputs a detection signal whose voltage periodically changes due to the vibration,
An abnormality detection method for a vibration actuator, wherein abnormality of the vibration body is detected based on a phase difference between the drive signal and the detection signal. A control device for a vibration actuator having a vibrating body that vibrates by applying a drive signal whose voltage changes periodically and outputs a detection signal whose voltage changes periodically due to the vibration,
A detection unit for detecting a phase difference between the drive signal and the detection signal;
And a drive control unit that varies the vibration state of the vibrating body depending on whether the phase difference is within the first reference range or outside the first reference range. .   A robot comprising the vibration actuator control device according to claim 8.   An electronic component conveying apparatus comprising the vibration actuator control apparatus according to claim 8.   A printer comprising the vibration actuator control device according to claim 8.   A projector comprising the vibration actuator control device according to claim 8. A vibrating body that vibrates by applying a drive signal whose voltage periodically changes, and a detection signal whose voltage periodically changes due to the vibration;
A vibration device having a processor,
The processor detects a phase difference between the drive signal and the detection signal, and changes a vibration state of the vibrating body between the case where the phase difference is within the first reference range and the case where the phase difference is outside the first reference range. A vibrating device characterized by

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