JP2018158428A - Wire saw and cutting processing method - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a simple wire-swinging mechanism with small mechanical load in a wire saw, and not applying load to a robot although mounted to the robot.SOLUTION: A wire saw 1 comprises: two guide pulleys 32a and 32b for guiding and supporting a wire 7 at both sides of a workpiece W; a cutting area of the workpiece W formed between the guide pulleys 32a and 32b; and motors 11a and 11b causing the wire 7 to travel in one direction or to reciprocate. In the wire saw 1, at least one of the guide pulleys 32a and 32b is arranged to be freely movable in parallel to a cutting direction of the workpiece W. In the wire saw 1, when cutting the workpiece W, at least one of the guide pulleys 32a and 32b moves relatively to the other guide pulley 32a or 32b, thereby swinging the wire 7 of the cutting area.SELECTED DRAWING: Figure 1

Description

  The present invention relates to a wire saw and a cutting method for cutting a workpiece such as silicon, sapphire, and silicon carbide with a traveling wire.

  2. Description of the Related Art Conventionally, a workpiece such as silicon, sapphire, or silicon carbide is cut with a wire saw. The wire saw is cut by moving a fixed abrasive wire in which diamond abrasive grains are fixed on the surface of the wire by electrodeposition or resin bond in one direction or reciprocating, and pressing the wire against a workpiece. ing. In place of the fixed abrasive wire, a piano wire is used as the wire, and the piano wire is pressed against the workpiece while being slurried with diamond or silicon carbide kneaded in the machining fluid. Abrasive wire saws are also known.

  Recently, as a material for aircraft, cutting of structural materials such as graphite and aluminum formed in a honeycomb structure has been performed. In order to cut the structural material, a wire saw is used in which two robots are used and wires are bridged between the tips of the arms of both robots in response to requests for cutting into various shapes. The wire saw moves the two robots in synchronism, and freely moves the wire, thereby cutting the structural material following various shapes. (For example, patent document 1).

  Also, in a wire saw, if the contact load between the wire and the workpiece becomes too large, the load on the wire increases and the wire breaks, so it is necessary to reduce the load on the wire, for example, by reducing the cutting speed. . Therefore, by swinging the wire during cutting and making the contact between the wire and the workpiece a point contact, the cutting load of the wire is reduced and the discharge of cutting waste is promoted, resulting in improved cutting accuracy. (For example, patent document 2).

JP 2014-136300 A JP 2012-223837 A

  By the way, the wire saw as in Patent Document 1 can freely move the robot and cut various materials into various shapes. However, two robots must be used and a large installation space is required. There was a problem that caused limitations. In addition, unless the two robots are accurately synchronized, there is a problem that a load is generated on the wire and the wire is disconnected, or the workpiece cannot be cut accurately because the cutting load is not stable. Further, there is a problem that the control becomes complicated in order to synchronize the two robots with high accuracy. In addition, since the control of the two robots is complicated, it is necessary to swing the wire and increase the cutting efficiency while synchronizing the two robots, which makes it difficult to control. It was.

  In addition, when a wire saw as in Patent Document 1 is used to swing a wire in order to reduce a cutting load, it is necessary to synchronize two robots and move the robot tips back and forth with respect to each other. There is a problem that the control is complicated and a large load is generated on the robot itself. Therefore, when the wire is swung at a high speed, it is necessary to control the robot arm to move in the cutting direction while moving the tip of the robot arm back and forth at a high speed, which increases the load on the robot.

  Further, in the wire saw as in Patent Document 2, a swinging disk in which a plurality of groove rollers around which a wire is wound is integrally supported is supported by a cross roller bearing, an R guide, or the like. The rocking disk is swung by rotating together with the groove roller. Therefore, a large swing mechanism is required, and it is necessary to use large bearings and R guides.

  Accordingly, an object of the present invention is to provide a simple and small swing mechanism for a wire saw, and even if a wire saw is supported by a robot, a workpiece can be processed without increasing the number of robots and without applying a load to the robot. The object is to provide a wire saw capable of cutting with high accuracy.

The invention of claim 1
A wire saw that cuts the workpiece by pressing the workpiece against a wire traveling in one direction or reciprocating,
Two guide pulleys for guiding and supporting the wire on both sides of the workpiece;
A cutting area of the workpiece formed between the guide pulleys;
A wire drive source for making the wire travel in one direction or reciprocating,
At least one of the guide pulleys is provided movably in parallel with the cutting direction of the workpiece,
A wire saw that adopts a configuration in which at least one of the guide pulleys is moved relative to the other guide pulley when the workpiece is cut, so that the wire in the cutting area is swung. is there.

The invention of claim 2
The wire saw is
A wire saw unit that integrally accommodates both the guide pulleys and the wire drive source;
The wire saw adopting the configuration according to claim 1, wherein the wire saw unit is supported by a movable robot arm.

The invention of claim 3
A cutting method that cuts the workpiece by pressing the workpiece against a wire traveling in one direction or reciprocating,
Two guide pulleys for guiding and supporting the wire on both sides of the workpiece are arranged,
Forming a cut area of the workpiece formed between the guide pulleys;
At least one of the guide pulleys is provided so as to be movable in parallel with the cutting direction of the workpiece,
The cutting method employs a configuration in which at least one of the guide pulleys is moved relative to the other guide pulley to swing the wire in the cutting region.

  According to the invention of claim 1 or claim 3, since at least one of the two guide pulleys is moved relative to the other guide pulley to swing the wire in the cutting area, Even without using a large bearing or the like, the wire in the cutting area can be swung with a simple mechanism. In addition, the swing mechanism can be simplified and a wire saw unit can be mounted on the robot.

  According to the invention of claim 2, since the wire saw unit having the swing mechanism mounted in the unit is mounted on the robot, the robot does not rotate or swing the arm of the robot. Since the wire in the cutting area can be swung, no load is applied to the robot. In addition, the load on the robot is reduced, the durability of the robot can be maintained, and the control of the robot and wire saw can be simplified. Further, since the robot can be swung without being moved, the wire can be swung even in a narrow space, and the degree of freedom in installing the wire saw is increased.

  Moreover, since at least one or both of the guide pulleys are configured to move, it is possible to provide a versatile wire saw that can swing the wire in the cutting area in various forms according to cutting conditions.

These are the whole perspective views of the state which mounted the wire saw concerning the 1st Embodiment of this invention in the robot. These are top views of the wire saw which concerns on the 1st Embodiment of this invention. These are the AA direction cross-section arrow directional views of FIG. These are the BB direction cross-sectional arrow views of FIG. These are CC direction cross-sectional arrow views of FIG. These are the partially notched front views of the wire saw which concerns on the 2nd Embodiment of this invention. These are the whole schematic front views of the wire saw which concerns on the 3rd Embodiment of this invention. (A)-(c) is explanatory drawing of the rocking | fluctuation operation | movement in the wire saw of this invention. These are explanatory drawings of the cutting state by rocking | fluctuation operation | movement of the wire saw of this invention.

  The wire saw according to the first embodiment of the present invention will be described below with reference to FIGS.

  FIG. 1 is an overall perspective view of a wire saw according to a first embodiment of the present invention. As shown in FIG. 1, the wire saw 1 includes a wire saw unit 8 formed in a U-shape, a swing unit 4 standing on the wire saw unit 8 and included in the wire saw unit 8, and the wire saw unit 8. The robot 2 is configured to support and move the wire saw body 8 freely, and a processing table 38 that holds a workpiece W to be processed.

  The wire saw unit 8 has a support arm 6 provided at a rear end thereof connected via a tool changer 5 provided at an arm tip of the robot 2 and is detachable from the robot 2 via the tool changer 5. It is supported by. In the tool changer 5, various tools can be exchanged by an appropriate ball plunger or magnetic force. In the present invention, for example, a plurality of sets of wire saw units 8 having different wire diameters are prepared, and appropriate wire saws according to the material of the workpiece W can be obtained by appropriately replacing the wire saw units 8 having different wire diameters. Unit 8 can be used.

  The robot 2 has a base 3 fixed to the floor surface. In addition, a plurality of arms are movably supported by joints, and the tip ends of the arms can freely move. The wire saw unit 8 supported by the robot 2 is freely moved by the movement of the robot 2, and a predetermined operation is performed by a control unit (not shown).

  In the wire saw unit 8, two motors 11a and 11b are erected on the rear end side, and a supply reel 20a and a recovery reel 20b are connected below the motors 11a and 11b, respectively. Further, swing units 4 are erected on the left and right of the front end side of the wire saw unit 8 respectively.

  In the supply reel 20a, for example, a fixed abrasive wire 7 in which diamond abrasive grains are fixed to a steel wire such as a piano wire by electrodeposition or resin is wound in multiple layers. The wire 7 fed out from the supply reel 20a is guided to guide pulleys 32a and 32b forming a cutting area of the workpiece W via the tension roller 33 and the pulley 36.

  As shown in FIGS. 2, 4, and 5, the wire saw unit 8 has an outer frame formed of a base plate 10 and a support frame 35 that surrounds the lower side of the base plate 10. Side plates 12 and 12 are erected on the side of the base plate 10, and side plates 9 and 9 are erected on the inner side with a space therebetween. Further, a back plate 13 is erected on the rear side of the base plate 10, and a front plate 14 is erected in front of the back plate 13 with a space therebetween.

  Inside the side plate 12, a rail 17 is laid between the front plate 14 and the back plate 13. The rails 17 are provided on the side plates 12 and 12 at both ends symmetrically, and the swing unit 4 is also provided symmetrically on the left and right sides. Therefore, one supply reel 20a side will be described, and the recovery reel 20b. The description on the side is omitted.

  A support frame 18 is provided along the rail 17, and the motor 11 a is erected on the support frame 18. The motor 11 a has a motor shaft extending downward via a coupling 27 and is supported by a spindle 19. The supply reel 20a is connected to the spindle 19 through the opening 10a of the base plate 10, and the supply reel 20a is rotated by driving the motor 11a.

  A slider 16 is provided on the back surface (rail 17 side) of the support frame 18. The slider 16 is fitted to the rail 17 and can be moved up and down integrally with the support frame 18. A support frame 22 is erected at the center of the rear end side of the base plate 10, and an elevating motor 21 is erected on the support frame 22. A ball screw 28 is pivotally supported along the support frame 22, and an upper end of the ball screw 28 is connected to the lifting motor 21.

  A nut member 25 is screwed onto the ball screw 28, and a moving frame 23 is fixed to the nut member 25. Connection plates 24, 24 are provided on both sides of the moving frame 23, and the connection plates 24, 24 are connected to the support frames 18, 18 on both sides, respectively. Therefore, by driving the elevating motor 21, both the support frames 18, 18 are moved up and down, and the motors 11a, 11b, the supply reel 20a, and the recovery reel 20b are moved up and down accordingly. As the supply reel 20a and the recovery reel 20b are moved up and down, the wire 7 wound around the supply reel 20a and the recovery reel 20b is supplied or wound while being traversed by the supply reel 20a and the recovery reel 20b. It is like that.

  The wire 7 fed out while being traversed from the supply reel 20 a is given a predetermined tension by the tension roller 33, guided to the guide pulleys 32 a and 32 b via the pulley 36, and then via the other pulley 36. Thus, it is wound up while being traversed by the recovery reel 20b. The wire 7 travels in one direction or reciprocates, and the supply side and the collection side are switched during reciprocal travel. At this time, the wire 7 is supplied by providing a difference between forward and reverse rotation. The wire 7 between the guide pulley 32a and the guide pulley 32b forms a cutting area, and the workpiece W is cut by pressing the wire 7 in the cutting area against the workpiece W. It has become.

  The tension rollers 33 and 33 press the wire 7 and apply an appropriate tension. The tension rollers 33 and 33 may be fixed at predetermined positions, or an appropriate driving member may be provided to press the wire 7 with a predetermined force.

  The pulleys 36 and 36 are appropriately provided with a load cell or the like, and measure the tension applied to the wire 7. Further, the supply reel 20a and the recovery reel 20b are controlled by the measured tension, and the tension of the wire 7 is controlled by controlling the feeding and winding amount of the wire 7.

  Since the swing unit 4 is provided with the same mechanism on the supply side and the collection side, the supply side will be described and the description on the collection side will be omitted. The swing unit 4 includes a support frame 40 erected on the base plate 10, a support plate 43 provided so as to be movable up and down in parallel with the support frame 40, and a guide pivotally supported by the support plate 43. The pulley 32a is configured.

  The support frame 40 is erected in front of the base plate 10, and a rail 41 is laid on the front surface of the support frame 40 in the vertical direction. A ball screw 45 is erected in parallel with the rail 41. A nut member 46 is fixed to a side surface of the support plate 43, and the nut member 46 is screwed into the ball screw 45. A slider 42 is provided on the back surface of the support plate 43, and the slider 42 is fitted to the rail 41 and is movable along the rail 41. The guide pulley 32 a is pivotally supported on the front surface of the support plate 43.

  The ball screw 45 is connected to a motor 47 provided on the lower surface of the base plate 10, and the guide pulley 32 a moves up and down along the rail 41 by driving the motor 47 forward and backward. It has become. Since the collection side has the same configuration, the description is omitted, but the guide pulley 32b is moved up and down.

  The above is the invention according to the first embodiment of the present invention. Next, the operation of the wire saw of the present invention will be described below with reference to FIGS.

  FIG. 8A shows a state in which the wire 7 in the cutting area is oscillated by fixing the supply-side guide pulley 32a and raising and lowering the collection-side guide pulley 32b. When the wire 7 is swung in this state, the rocking unit 4 may be provided only on one side of the collection side.

  FIG. 8B shows a state in which the wire 7 in the cutting area is swung by fixing the recovery-side guide pulley 32b and raising and lowering the supply-side guide pulley 32a. Similarly to the supply side, the swing unit 4 may be provided only on one side of the supply side.

  FIG. 8C shows a state in which the wire 7 in the cutting area is swung by relatively raising and lowering the supply-side guide pulley 32a and the collection-side guide pulley 32b. As shown in FIGS. 8A to 8C, the guide pulley 32a and / or the guide pulley 32b is moved to swing the wire 7 in the cutting area. Even when the wire saw unit 8 is mounted on the robot 2, the wire saw unit 8 can swing by itself without applying a load to the robot 2. Further, since the wire 7 in the cutting area can be swung without rocking the robot 2, the wire 7 can be swung in a narrow space, and it can flexibly cope with cutting into various shapes.

  Further, as shown in FIGS. 8A and 8B, if only one guide pulley 32 is moved and swung, the contact direction of the wire 7 in the cutting area can be flexibly changed. Since it becomes possible to cut, it can respond flexibly to cutting into various shapes.

  FIG. 9 shows a state in which the wire 7 in the traveling cutting area is pressed against the workpiece W, and the workpiece W is cut while the wire 7 in the cutting area is rocked. A portion that represents the uncut portion Wa and that is not hatched of the workpiece Wb represents the already cut portion Wb.

  By pressing the wire 7 in the cutting area that travels to the workpiece W as shown in the figure, the workpiece W is cut while the wire 7 in the cutting area is bent under a certain load, but the load is reduced. If it is excessively applied, the wire 7 may be disconnected. Therefore, by swinging the wire 7 in the cutting area, the cutting load of the wire 7 is reduced and the cutting waste is discharged smoothly, so that the cutting ability can be prevented from being lowered and the cutting speed can be improved. Cutting accuracy is also improved. The angle to be swung, the speed to be swung, and the amount of bending of the wire 7 in the cutting area can be arbitrarily set according to the workpiece W to be cut and conditions.

  Next, a second embodiment of the present invention will be described with reference to FIG. The same members as those in the first embodiment are denoted by the same reference numerals.

  FIG. 6 is basically the same configuration as that of the first embodiment, but the configuration of the oscillating unit 4 is changed so that the movement locus of the guide pulleys 32a and 32b moves in an arc shape instead of a linear shape. It is a thing. Hereinafter, the configuration of the swing unit 4 according to the second embodiment will be described. In addition, the same code | symbol as the 1st Embodiment is used for the common member. Further, since the supply side and the collection side are formed symmetrically, the supply side will be described, and the description on the collection side will be omitted.

  The swing unit 4 is erected on a support frame 50 erected on the base plate 10, an arc-shaped rail 51 provided along the vertical direction of the support frame 50, and the vertical direction of the support frame 50. And a guide pulley 32a for guiding the wire 7 to the cutting area.

  A nut member 55 is screwed onto the ball screw 54. The nut member 55 has a shaft 56 erected on the surface thereof so that the shaft 56 engages with an elongated hole 53 a provided in the link 53. A guide pulley 32 a is pivotally supported at one end of the link 53. An R guide 52 is provided on the back surface of the link 53 on the guide pulley 32 a side, and the R guide 52 is slidably fitted to the rail 51. The radius of the rail 51 is a part of the circumference with the center point of the wire 7 in the cutting area at the center of both guide pulleys 32a and 32b.

  The ball screw 54 is connected to a motor 47 provided below the base plate 10. By driving the motor 47, the nut member 55 is driven via a pulley and a belt, and the guide pulley 32a. Moves up and down while moving in an arc.

  The guide pulleys 32a and 32b may be moved up and down only on one side as in the case of the first embodiment, or the guide pulleys 32a and 32b on both sides move up and down relatively to swing the wire 7 in the cutting area. You may make it move. As described above, the guide pulleys 32a and 32b are configured to swing the wire 7 in the cutting area while moving in an arc, so that an excessive load is not applied to the wire 7. The above is the configuration of the wire saw according to the second embodiment of the present invention.

  Next, a third embodiment of the present invention will be described with reference to FIG. Note that the same reference numerals are used for members similar to those in the other embodiments.

  FIG. 7 shows a wire saw according to the third embodiment of the present invention. In this embodiment, the wire saw unit 8 is not mounted at the tip of the robot 2 but is configured as a stationary wire saw 1. is there. The wire saw 60 includes a base plate 61 erected on a machine base (not shown), a supply reel 62 and a recovery reel 63 pivotally supported on the base plate 61, and a wire between the supply reel 62 and the recovery reel 63. The two pulleys 64 and 64 for guiding the wire 7, the two tension pulleys 65 and 65 for applying a predetermined tension to the wire 7 on the supply side and the recovery side, and the wire in the cutting region by suspending the wire 7 from both sides 7 and guide pulleys 32a and 32b, and a lifting table 67 provided below the wire 7 in the cutting area and pressing the workpiece W against the wire 7 in the cutting area.

  The supply reel 62 has a single wire 7 wound thereon in multiple layers, and the supply reel 62 is fed out while being traversed by moving the supply reel 62 in the front-rear direction by an appropriate drive mechanism (not shown). It is like that. The collection reel 63 is also arranged symmetrically with the supply reel 62 so that the wire 7 is wound while being traversed. The wire 7 is a fixed abrasive wire in which abrasive grains such as diamond abrasive grains are fixed to the core wire by electrodeposition or resin, as in the first embodiment or the second embodiment. Instead of the fixed abrasive wire, a wire 7 in which abrasive grains are not fixed may be used, and a free abrasive grain method may be used in which a slurry in which abrasive grains are mixed with a processing liquid is supplied to the vicinity of the wire 7 in the cutting area.

  The supply reel 62 and the recovery reel 63 are configured to be reversed and driven as appropriate, and the wire 7 in the cutting area travels in one direction or reciprocates. When the wire 7 reciprocates, the wire 7 is wound from the supply side to the collection side by a predetermined amount by providing a difference in the forward and reverse feeding and winding amounts of the wire 7. It is supposed to be. In the above description, the supply side and the recovery side may be reversed.

  The tension pulley 65 is capable of moving in a circular arc in the direction of the arrow shown by a drive mechanism (not shown), and applies a predetermined tension to the wire 7.

  The wire 7 in the cutting area is a single wire saw formed by one wire in this embodiment, but the guide pulleys 32a and 32b are not one groove but about five grooves, and a small number of wire rows It can also be. In the present invention, if the number of the wires 7 in the wire row is excessively increased, a load due to the tension of the wire 7 is greatly applied when the guide pulleys 32a and 32b are moved, and it is difficult to drive the guide pulleys 32a and 32b. Therefore, the number of wires 7 in the cutting area is preferably up to about 5. If there is no problem of tension load, five or more wire rows may be formed.

  The guide pulleys 32a and 32b are moved in one or both directions by an appropriate lifting mechanism (not shown) (for example, the mechanism of the first embodiment or the second embodiment of the present invention), so that the wire in the cutting region 7 is swung.

  The attaching table 68 is provided below the wire 7 in the cutting area, and presses the workpiece W held on the lifting table 67 against the wire 7 in the cutting area by an appropriate lifting mechanism. Yes. Although not shown, a load applied to the wire 7 in the cutting area is detected by an appropriate load detection means, and the lifting / lowering amount of the lifting table 67 is controlled by a control unit (not shown).

  The workpiece W is bonded and held to a dummy member 69 such as carbon or ceramics, and the workpiece W is completely cut by cutting up to the dummy member 69. The dummy member 69 is bonded to an attaching table 68 so that the attaching table 68 is held by the lifting table 67.

  The above is the configuration of the third embodiment of the wire saw of the present invention. Next, the operation of the wire saw 60 according to the third embodiment of the present invention will be described below.

  When the wire saw 60 is driven, the wire 7 is fed out from the supply reel 62, and after a predetermined tension is applied by the tension pulley 65, the wire 7 forms a cutting area between the guide pulleys 32a and 32b, and is recovered. A predetermined tension is applied by the tension pulley 65 on the side, and is wound around the collection reel 63. In the present embodiment, the wire 7 reciprocates at a predetermined cycle, and the workpiece W is pressed against the wire 7 in the cutting area. At this time, the machining liquid is applied to the wire 7 in the cutting area from a machining liquid nozzle (not shown).

  Further, as the guide pulleys 32a and 32b are moved up and down in different directions, the cutting area wire 7 swings, the cutting load on the wire 7 is reduced, and the cutting waste of the workpiece W is discharged smoothly. To be done. As shown in FIGS. 8A and 8B, only one of the guide pulleys 32a and 32b may be moved to swing the cutting area wire 7.

  While the wire 7 in the cutting area is swung as described above, the lifting table 67 is raised to raise the workpiece W, and the workpiece W is pressed against the wire 7 in the cutting area, thereby The workpiece W is cut. The swing of the wire 7 in the cutting area is performed so that an appropriate load is applied to the processed portion of the workpiece W. Since the wire 7 in the cutting region swings in a state where an appropriate load is applied in this manner, an appropriate load is applied to the processed portion of the workpiece W while being applied to the processed portion of the workpiece W. Load is reduced and cutting can be performed with high accuracy. Moreover, since the contact amount of the said process part and the wire 7 reduces, giving a moderate load to the process part of the said workpiece W, and the contact part of the wire 7, a cutting speed can be improved. Further, the wire 7 is not overloaded and the wire 7 is not broken. Further, since the wire 7 swings, the wire 7 and the cut surface of the workpiece W are abraded, the cut surface of the workpiece W is appropriately polished, and the cut surface of the workpiece W is flattened. Turn into.

  The above is the wire saw according to the third embodiment of the present invention, but the configuration can be changed as appropriate within the scope of the invention. For example, in the embodiment of the present invention, the workpiece W is pressed against the wire 7 from below. However, the workpiece W may be pressed against the wire 7 while being processed from above. The rocking speed and the rocking angle of the wire 7 can be changed according to the material of the workpiece W as appropriate.

  Also in the first embodiment and the second embodiment, the swing speed and swing angle of the wire 7 can be appropriately changed according to the material of the workpiece W as in the third embodiment.

W Workpiece Wa Uncut portion Wb Cut portion 1 Wire saw 2 Robot 3 Base 4 Swing unit 5 Tool changer 6 Support arm 7 Wire 8 Wire saw unit 9 Side plate 10 Base plate 10a Opening portion 11a Motor 11b Motor 12 Side plate 13 Back Plate 14 Front plate 16 Slider 17 Rail 18 Support frame 19 Spindle 20a Supply reel 20b Recovery reel 21 Lifting motor 22 Support frame 23 Moving frame 24 Connecting plate 25 Nut member 27 Coupling 28 Ball screw 32a Guide pulley 32b Guide pulley 33 Tension roller 35 Support Frame 36 Pulley 37 Support plate 38 Processing table 39 Cover 40 Support frame 41 Rail 42 Slider 43 Support plate 44 Rotating shaft 45 Ball screw 46 Nut member 47 Motor 50 Support frame 51 Rail 52 R guide 53 Support Cam 53a elongated hole 54 a ball screw 55 nut 56 the shaft 60 wire saw 61 attached base plate 62 a supply reel 63 recovery reel 64 pulley 65 tension pulley 67 the lifting table 68 with table 69 dummy member

Claims (3)

A wire saw that cuts the workpiece by pressing the workpiece against a wire traveling in one direction or reciprocating,
Two guide pulleys for guiding and supporting the wire on both sides of the workpiece;
A cutting area of the workpiece formed between the guide pulleys;
A wire drive source for moving the wire in one direction or reciprocating,
At least one of the guide pulleys is provided movably in parallel with the cutting direction of the workpiece,
A wire saw that swings the wire in the cutting area by moving at least one of the guide pulleys relative to the other guide pulley when the workpiece is cut. The wire saw is
It is integrally formed in the unit and at least the wire in the cutting area is exposed so that the workpiece can be processed,
The wire saw according to claim 1, wherein the unit is supported by a movable robot arm. A cutting method that cuts the workpiece by pressing the workpiece against a wire traveling in one direction or reciprocating,
Two guide pulleys for guiding and supporting the wire on both sides of the workpiece are arranged,
Forming a cut area of the workpiece formed between the guide pulleys;
At least one of the guide pulleys is provided so as to be movable in parallel with the cutting direction of the workpiece,
A cutting method in which at least one of the guide pulleys is moved relative to the other guide pulley to swing the wire in the cutting region.

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