JP2018158395A - Processing equipment - Google Patents

Abstract

PROBLEM TO BE SOLVED: To acquire a clear image to be captured even if the surface to be imaged has a height difference. A processing apparatus 1 includes a lighting means 10 for illuminating a work piece, an image pickup means 20 for imaging a work piece, and a control means 30 for controlling at least the lighting means 10 and the image pickup means 20. Reference numeral 10 denotes a plurality of illuminations arranged in a ring shape leaving a circular space 12 in the center, and the plurality of illuminations have a first tilt angle with respect to the optical axis 24 of the objective lens 23. Control means including a plurality of first illuminations 16 having an axis 160 and a plurality of second illuminations 17 having a second optical axis 170 having a second tilt angle with respect to the optical axis 24 of the objective lens 23. 30 has a first control unit 31 that controls turning on or off of the first illumination 16 and a second control unit 32 that controls turning on or off of the second illumination 17, so that the surface to be imaged of the workpiece is 30. Even if there is a height difference, the image-imaging surface can be imaged by the imaging means 20 with no shadow, and a clear image can be acquired. [Selection diagram] Fig. 4

Description

  The present invention relates to a processing apparatus that performs a predetermined processing on a workpiece, and more particularly, to a processing apparatus that includes an illumination unit and an imaging unit that captures an image of the workpiece illuminated by the illumination unit.

  A processing apparatus such as a cutting apparatus includes: a holding table that holds a workpiece; a cutting means that rotatably mounts a cutting blade that cuts the workpiece held on the holding table; an illuminating means; And at least imaging means for imaging an imaging surface of the processed workpiece. Before the workpiece is cut by the processing apparatus, an area to be processed (scheduled division line) of the workpiece is detected by the imaging means, and then the cutting is performed along the scheduled division line by the cutting blade. Further, the cutting state may be deteriorated due to chipping of the cutting blade, etc., so that the workpiece is moved below the imaging means during cutting or after completion of cutting, and the groove formed by the cutting blade is imaged, and the imaging is performed. The state of the groove is confirmed based on the image (see, for example, Patent Document 1 below).

JP 10-149705 A

  However, if there is a difference in height on the surface to be imaged of the workpiece, the contrast around the difference in height will not be clear even if the captured image is acquired by imaging with the imaging means while illuminating the imaging surface with the illumination means. There is a problem that what is desired to be detected cannot be detected. For example, even if irregularities on the pattern surface of the workpiece cannot be accurately detected, pattern misdetection, etc., or ablation grooves formed by laser processing are imaged, debris adhering to the ablation grooves and their surroundings Therefore, there is a problem that the groove width cannot be detected accurately.

  An object of the present invention is to provide a processing apparatus capable of acquiring a clear captured image even if the object to be imaged has a height difference.

  The present invention is a processing apparatus, a holding table that holds a workpiece, an illumination unit that is disposed above the holding table and illuminates the workpiece on the holding table, and is illuminated by the illumination unit Imaging means for imaging the workpiece on the holding table, and control means for controlling at least the illumination means and the imaging means, the illumination means being ring-shaped leaving a circular space in the center The objective lens of the imaging means is disposed in the circular space, and the plurality of illuminations have a first tilt angle with respect to the optical axis of the objective lens. A plurality of first illuminations having one optical axis and a plurality of second illuminations having a second optical axis having a second tilt angle with respect to the optical axis of the objective lens, and the control means Are a first control unit that controls turning on or off of the first illumination, and a point of the second illumination. Or has a second control unit for controlling the off, the.

  The illumination means includes a first ring portion in which a plurality of the first illuminations are disposed leaving the circular space in the center, and a second in which a plurality of the second illuminations are disposed on an outer peripheral side of the first ring portion. And a ring portion.

  It is desirable that the plurality of first illuminations are a plurality of LEDs having different emission wavelengths, and the plurality of second illuminations are a plurality of LEDs having different emission wavelengths.

  A processing apparatus according to the present invention includes a holding table that holds a workpiece, an illumination unit that is disposed above the holding table and that illuminates the workpiece on the holding table, and a holding table that is illuminated by the illumination unit. An imaging means for imaging the workpiece and a control means for controlling at least the illumination means and the imaging means, and the illumination means has a plurality of illuminations arranged in a ring shape leaving a circular space in the center. The objective lens of the imaging means is disposed in the circular space, and the plurality of illuminations include a plurality of first illuminations having a first optical axis having a first inclination angle with respect to the optical axis of the objective lens; A plurality of second illuminations having a second optical axis having a second tilt angle with respect to the optical axis of the objective lens, and the control means includes a first control unit that controls turning on or off of the first illumination; And a second control unit that controls turning on or off of the second illumination. For this reason, even if there is a difference in height on the imaged surface of the workpiece, the imaged means captures the imaged surface with no shadow by individually turning on or off the first illumination or the first illumination. And a clear captured image can be acquired.

  The illumination means includes a first ring portion in which a plurality of the first illuminations are disposed leaving the circular space in the center, and a second in which a plurality of the second illuminations are disposed on an outer peripheral side of the first ring portion. Since it has a ring part, the control means can select and light the optimal first illumination or second illumination according to the state of the imaged surface of the workpiece, so that a clear captured image can be obtained. can do.

  Since the plurality of first illuminations are a plurality of LEDs having different emission wavelengths, and the plurality of second illuminations are a plurality of LEDs having different emission wavelengths, the directivity of the illumination light is increased. By selecting and lighting the optimal first illumination or second illumination by the control means, the imaging surface of the workpiece to be detected can be intensively illuminated, and a clearer captured image can be obtained. it can.

It is a perspective view which shows the structure of an example of a processing apparatus. It is sectional drawing which shows the structure of an imaging means and an illumination means. It is a partial expanded sectional view which shows the structure of an illumination means. It is a top view which shows the example of arrangement | positioning of several illumination. It is a modification of an illumination means and is a top view which shows the example of arrangement | positioning of several illumination.

  A processing apparatus 1 illustrated in FIG. 1 is an example of a processing apparatus that performs a cutting process on a workpiece W. The processing apparatus 1 has an apparatus base 2, and a cassette 3 that accommodates a plurality of workpieces W is disposed at the front of the apparatus base 2. On the upper surface 2 a of the apparatus base 2, a work-in / out means 4 that unloads the workpiece W before processing from the cassette 3 and loads the processed workpiece W into the cassette 3 and the workpiece W are temporarily placed. A temporary storage area 5 and a holding table 7 for holding the workpiece W. In the vicinity of the cassette 3, a first transport unit 6 a that transports the workpiece W between the temporary placement region 5 and the holding table 7 is provided. Although not shown, a cutting feed means for moving the holding table 7 in the cutting feed direction (X-axis direction) is connected to the lower side of the holding table 7, and the holding table 7 is driven by driving the cutting feed means. Can be reciprocated in the X-axis direction.

  A cutting means 8 for cutting the workpiece W held on the holding table 7 is provided at the rear portion in the X-axis direction of the apparatus base 2. The cutting means 8 has a cutting blade 8a rotatably attached to the tip of a spindle having an axis in the Y-axis direction. The cutting means 8 is driven by a motor (not shown) to rotate the spindle, and can cut by cutting into the workpiece W while rotating the cutting blade 8a. In the center of the apparatus base 2, there is provided a second conveying means 6 b that conveys the workpiece W after cutting from the holding table 7 to a cleaning region 9 where cleaning is performed.

  The processing apparatus 1 is disposed above the movement path of the holding table 7 and illuminates the workpiece W on the holding table 7 as shown in FIG. 2 and the holding table 7 illuminated by the lighting means 10. An imaging means 20 for imaging the workpiece W, a control means 30 for controlling at least the illumination means 10 and the imaging means 20, and a monitor 40 on which an image taken by the imaging means 20 is displayed. .

  As shown in FIG. 2, the imaging unit 20 includes a camera 21 that images the surface (imaged surface) of the workpiece W, a microscope 22 connected to the camera 21, and an objective attached to the tip of the microscope 22. And a lens 23. The camera 21 includes a CCD image sensor or a CMOS image sensor, for example. In the imaging unit 20, for example, in addition to the captured image in which the region to be processed of the workpiece W before processing is imaged by imaging the imaging surface of the workpiece W with the camera 21, processing is in progress or processing is completed. It is possible to capture a captured image in which the processing state of the subsequent workpiece W is projected.

  The illuminating means 10 has a main body 11, and the main body 11 is connected to the lower part of the microscope 22. The main body 11 is formed with a ring-shaped ring portion 13 that surrounds the periphery of the circular space 12, leaving a circular space 12 in the center. A plurality of lights are arranged in a ring shape inside the ring portion 13. In the circular space 12, an objective lens 23 of the imaging means 20 is disposed. A power cable 18 that supplies power to a plurality of lights is connected to the side of the main body 11.

  As shown in FIG. 3, the ring portion 13 includes an outer wall 130, an inner wall 131 connected to the outer wall 130, and a mounting wall 132 for mounting illumination between the outer wall 130 and the inner wall 131. ing. The inner wall 131 is inclined inward on the lower end side, the circular space 12 is substantially reduced in diameter, and the light source chamber 14 is formed by the outer wall 130 and the inclined portion of the inner wall 131. Has been. A mounting wall 132 is formed on the inclined portion of the inner wall 131 so as to be inclined outwardly symmetrical to the inclination direction of the inner wall 131. A plurality of lights are mounted on the mounting wall 132, and all the lights are accommodated in the light source chamber 14. The lower part of the light source chamber 14 is covered with a synthetic resin plate 15 made of, for example, acrylic resin that is transparent or translucent.

  The plurality of illuminations are a plurality of first illuminations 16 having a first optical axis 160 having a first inclination angle with respect to the vertical optical axis 24 of the objective lens 23, and the optical axis 24 of the objective lens 23. A plurality of second illuminations 17 having a second optical axis 170 having a second inclination angle, and the first illumination 16 and the second illumination 17 function as oblique illumination. The first tilt angle and the second tilt angle are arbitrarily set according to the distance (working distance) from the workpiece W irradiated with the illumination light, and in this embodiment, for example, 30 ° to 75 °. The range is between. In this case, the attachment wall 132 is previously inclined and formed on the inner wall 131 so that the first inclination angle and the second inclination angle become desired angles.

  The plurality of first illuminations 16 are constituted by a plurality of LEDs having different emission wavelengths, and the plurality of second illuminations 17 are also constituted by a plurality of LEDs having mutually different emission wavelengths. The illumination means 10 shown in FIG. 4 shows an arrangement example of the first illumination 16 and the second illumination 17. The plurality of first illuminations 16 and the plurality of first illuminations 16 are formed so as to form a ring shape as a whole along the ring portion 13. Two illuminations 17 are arranged alternately. The plurality of first illuminations 16 and the plurality of second illuminations 17 may be arranged by appropriately combining LEDs having different emission colors such as blue LEDs, yellow LEDs, and red LEDs. In the present embodiment, the number of the first illumination 16 and the second illumination 17 is 12, respectively. However, the number is not particularly limited, and the number of LEDs may be appropriately increased or decreased. 16 and the brightness of the second illumination 17 may be adjusted.

  The control means 30 shown in FIG. 1 includes a first control unit 31 that controls turning on or off of the first illumination 16 and a second control unit 32 that controls turning on or off of the second illumination 17. Although not illustrated in the example of FIG. 3, the first illumination 16 and the second illumination 17 are inclined at different angles toward the axial direction of the opening of the circular space 12. By selecting and lighting the first illumination 16 or the second illumination 17, it is possible to illuminate a part of the visual field of the objective lens 23 to be illuminated with illumination light. That is, in the control means 30, the first control unit 31 and the second control unit 32 are selectively switched to select and light the optimal first illumination 16 or second illumination 17 to illuminate a desired field of view. be able to. Further, the first control unit 31 and the second control unit 32 can simultaneously turn on the first illumination 16 and the second illumination 17 to illuminate the entire field of view of the objective lens 23.

  Next, an operation example of the processing apparatus 1 will be described. A workpiece W shown in FIG. 1 has a circular plate-like substrate, and a circuit pattern such as an IC is formed on the surface (image-capturing surface) by dividing it into lines to be divided. When the workpiece W is cut, the workpiece W is formed integrally with the annular frame F via the tape T, and a plurality of the workpieces W are accommodated in the cassette 3. The carry-in / out means 4 pulls out the workpiece W integrated with the frame F from the cassette 3 and temporarily places it in the temporary placement area 5.

  Next, the workpiece W temporarily placed in the temporary placement region 5 is transported to the holding table 7 by the first transport means 6a. When the workpiece W is held by the holding table 7, the holding table 7 is moved in the cutting feed direction (X-axis direction) by the cutting feed means, and sequentially moved below the imaging means 20 and the cutting means 8. When the imaging unit 20 images the imaging surface of the workpiece W held on the holding table 7, the control unit 30 controls the illumination unit 10 shown in FIG. The illumination 16 or the second illumination 17 is selected and turned on, and the illumination light is incident on the visual field of the objective lens 23 obliquely from above.

  Here, if the contrast between the circuit pattern and the planned division line is not clear due to the height difference due to the unevenness on the pattern surface of the workpiece W, for example, the illumination light of the first illumination 16 causes the first control unit 31 to The illumination 16 is turned off, and the second illumination unit 17 is turned on by the second control unit 32 to illuminate the surface to be imaged of the workpiece W so that the unevenness is not shaded. The imaging surface of the workpiece W is imaged by the imaging means 20 in a state where the unevenness contrast is clear. The captured image thus captured is displayed on the monitor 40 shown in FIG. And alignment which detects a division | segmentation planned line is performed by performing image processing, such as pattern matching.

  Next, the workpiece W is cut by the cutting means 8. Specifically, while moving the holding table 7 below the cutting means 8, the cutting blade 8a is rotated at a predetermined rotational speed, and the cutting means 8 is lowered in the Z-axis direction. The rotating cutting blade 8a is cut into the workpiece W, and a cutting groove is formed along the planned division line while the cutting means 8 and the holding table 7 are relatively moved in the cutting feed direction.

  For example, after cutting all the division lines of the workpiece W, the holding table 7 is moved below the imaging means 20 in order to confirm the state of the cutting grooves formed in the workpiece W, and FIG. The workpiece W is positioned immediately below the imaging means 20 shown in FIG. Subsequently, the control unit 30 controls the illumination unit 10 to select and turn on the first illumination 16 or the second illumination 17 shown in FIG. 3, and the illumination light is obliquely upward with respect to the field of view of the objective lens 23. Make it incident.

  Since the surface to be imaged of the workpiece W has a height difference depending on the cutting groove, for example, when the contrast between the cutting groove and the surrounding area is not clear by the light of the second illumination 17, the second control unit 32 performs the first operation. The two illuminations 17 are turned off, and the first illumination unit 16 is turned on by the first control unit 31 to illuminate the surface to be imaged of the workpiece W so that the periphery of the cutting groove has no shadow. In a state where the contrast between the cutting groove and the surroundings is clear, the imaging surface of the workpiece W is imaged by the imaging means 20. The captured image thus captured is displayed on the monitor 40 shown in FIG. 1 with clear contrast between the cutting groove and its surroundings. If the operator determines that the cutting groove has a desired shape based on this captured image, cutting is continued on the next workpiece W. On the other hand, if the operator determines that the cutting groove does not have the desired shape, it is assumed that there is some defect (such as chipping or clogging) in the cutting blade 8a, and the operation of the processing apparatus 1 is stopped to make a new cutting blade. Replace it.

As described above, the processing apparatus 1 according to the present invention includes the holding table 7 that holds the workpiece W and the illumination unit 10 that is disposed above the holding table 7 and illuminates the workpiece W on the holding table 7. And an imaging means 20 for imaging the workpiece W on the holding table 7 illuminated by the illumination means 10, and a control means 30 for controlling at least the illumination means 10 and the imaging means 20, the illumination means 10 There is a plurality of illuminations arranged in a ring shape leaving a circular space 12 in the center, and the objective lens 23 of the imaging means 20 is disposed in the circular space 12, and the plurality of illuminations are optical axes of the objective lens 23. A plurality of first illuminations 16 having a first optical axis 160 having a first tilt angle with respect to 24 and a second optical axis 170 having a second tilt angle with respect to the optical axis 24 of the objective lens 23. A plurality of second lights 17 having The means 30 includes a first control unit 31 that controls the turning on and off of the first illumination 16 and a second control unit 32 that controls the turning on and off of the second illumination 17. Even if there is a difference in height on the imaging surface, the imaging device 20 can take an image with the imaging surface 20 in a shadow-free state by individually turning on or off the optimal first illumination 16 or second illumination 17, A clear captured image can be acquired.
In addition, since the plurality of first illuminations 16 and the second illuminations 17 are each composed of a plurality of LEDs having different emission wavelengths, the directivity of the illumination light is enhanced, and the control unit 30 is optimal for the first illumination. By selecting the 16 or the second illumination 17 and turning it on, it is possible to illuminate the imaging surface of the workpiece W to be detected in a concentrated manner, and it is possible to acquire a clearer captured image.

  The illumination means 10A shown in FIG. 5 is a modification of the illumination means 10, and a first ring portion 13a in which a plurality of first illuminations 16 are disposed, leaving a circular space 12 in the center of the main body portion 11A, A second ring part 13b in which a plurality of second illuminations 17 are arranged on the outer peripheral side of the first ring part 13a, and a third ring part 13c in which a plurality of third illuminations 19 are arranged on the outer peripheral side of the second ring part 13b. And have. The plurality of first illuminations 16 to third illuminations 19 are composed of a plurality of LEDs having different emission angles and different emission wavelengths, as in the illumination unit 10. The plurality of first illuminations 16 to third illumination 19 may be arranged by appropriately combining LEDs having different emission colors such as blue LEDs, yellow LEDs, and red LEDs. In the illumination means 10A, the case of having a triple ring portion has been exemplified, but any structure having at least a double ring portion may be used. According to the illuminating means 10A configured as described above, the control means selects the optimum first illumination 16, second illumination 17 or third illumination 19 in accordance with the state of the surface to be imaged of the workpiece W. Since it can be turned on, a clear captured image can be acquired by the imaging means 20.

  Although the processing apparatus 1 shown in this embodiment was demonstrated as a cutting device, it is not limited to this structure. For example, the present invention can also be applied to a laser processing apparatus that forms an ablation groove on the workpiece W by laser processing and images the ablation groove to check the state of the ablation groove. Therefore, by imaging the ablation groove with the imaging means 20, for example, the contrast between the ablation groove and the debris adhering to the periphery becomes clear, so the problem that the groove width cannot be detected accurately can be solved.

1: Processing device 2: Device base 2a: Upper surface 3: Cassette 4: Loading / unloading means 5: Temporary placement area 6a: First conveying means 6b: Second conveying means 7: Holding table 8: Cutting means 8a: Cutting blade 9: Cleaning area 10, 10A: Illuminating means 11, 11A: Main body part 12: Circular space 13: Ring part 13a: First ring part 13b: Second ring part 13c: Third ring part 130: Outer wall 131: Inner wall 132: Mounting wall 14: Light source chamber 15: Synthetic resin plate 16: First illumination 17: Second illumination 18: Power cable 19: Third illumination 20: Imaging means 21: Camera 22: Microscope 23: Objective lens 24: Optical axis 30: Control means 31: First control unit 32: Second control unit 40: Monitor

Claims (3)

A processing device,
A holding table for holding the workpiece;
An illuminating means disposed above the holding table for illuminating a workpiece on the holding table;
Imaging means for imaging a workpiece on the holding table illuminated by the illumination means;
Control means for controlling at least the illumination means and the imaging means,
The lighting means has a plurality of lights arranged in a ring shape leaving a circular space in the center,
An objective lens of the imaging means is disposed in the circular space,
The plurality of illuminations includes a plurality of first illuminations having a first optical axis having a first tilt angle with respect to the optical axis of the objective lens;
A plurality of second illuminations having a second optical axis having a second tilt angle with respect to the optical axis of the objective lens,
The control means includes a first control unit that controls turning on or off of the first illumination;
And a second control unit that controls turning on or off of the second illumination. The illumination means includes a first ring portion in which a plurality of the first illuminations are arranged leaving the circular space in the center;
The processing apparatus according to claim 1, further comprising: a second ring portion on which a plurality of the second lights are arranged on an outer peripheral side of the first ring portion.   The processing apparatus according to claim 1, wherein the plurality of first illuminations are a plurality of LEDs having different emission wavelengths, and the plurality of the second illuminations are a plurality of LEDs having different emission wavelengths. .

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