JP2018151551A - Optical module - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an optical module capable of reliably mounting an optical element regardless of the characteristics of a mounting region. An optical module 1 includes a base B and a movable mirror 5. The movable mirror 5 is provided so as to sandwich the mirror portion 51 having the mirror surface 51a, the elastic portion 52 provided around the mirror portion 51 so as to form the annular region CA, and the mirror portion 51 in the first direction. It has a pair of support portions 56 in which an elastic force is applied according to the elastic deformation of the elastic portion 52 and the distance between the elastic portions 52 is variable. The base B has a main surface Bs and a mounting area 31 provided with an opening 31b communicating with the main surface Bs. The support portion 56 is inserted into the opening 31b in a state where the elastic force of the elastic portion 52 is applied. The movable mirror 5 is supported in the mounting region 31 by the reaction force of the elastic force applied to the support portion 56 from the inner surface of the opening 31b in a state where the mirror surface 51a intersects the main surface Bs. [Selection diagram] Fig. 4

Description

  The present invention relates to an optical module.

  An optical module in which an interference optical system is formed on an SOI (Silicon On Insulator) substrate by MEMS (Micro Electro Mechanical Systems) technology is known (see, for example, Patent Document 1). Such an optical module is attracting attention because it can provide an FTIR (Fourier transform infrared spectroscopic analyzer) in which a highly accurate optical arrangement is realized.

  Patent Document 2 describes a manufacturing process of an optical system. In this process, first, a template substrate and an optical bench are prepared. An alignment slot is formed on the template substrate by etching. Bond pads are arranged on the main surface of the optical bench. Subsequently, the template substrate is attached to the main surface of the optical bench so that the alignment slot is disposed on the bond pad. Subsequently, the optical element is inserted into the alignment slot while being positioned using the side wall of the alignment slot, and is positioned on the bond pad. Then, the optical element is bonded to the optical bench by reflowing the bond pad.

Special table 2012-524295 gazette US Patent Application Publication No. 2002/0186477

  The optical module as described above has the following problem in that, for example, the size of the movable mirror depends on the achievement level of deep drilling on the SOI substrate. That is, since the degree of achievement of deep processing for the SOI substrate is about 500 μm at the maximum, there is a limit to increase the sensitivity in FTIR by increasing the size of the movable mirror. Therefore, a technique for mounting a movable mirror formed separately on a device layer (for example, a layer in which a drive region is formed in an SOI substrate) can be considered.

  On the other hand, when the process described in Patent Document 2 is used in manufacturing the MEMS device described in Patent Document 1, an optical element such as a movable mirror is bonded to the mounting area connected to the actuator and movable. It will be mounted by bonding by reflow. In this case, the bonding of the bond pad may adversely affect the driving of the mounting area. For this reason, the process described in Patent Document 1 may not be applicable depending on the characteristics of the mounting region of the optical element.

  An object of the present invention is to provide an optical module capable of reliably mounting an optical element regardless of the characteristics of the mounting region.

  An optical module according to the present invention is an optical module including an optical element and a base on which the optical element is mounted, and the optical element includes an optical part having an optical surface and a periphery of the optical part so as to form an annular region. And a pair of elastic portions provided in the first direction along the optical surface so that the elastic force is applied according to the elastic deformation of the elastic portions and the distance between them is variable. The base has a main surface and a mounting region provided with an opening communicating with the main surface, and the support is open in a state where the elastic force of the elastic portion is applied. The optical element is supported by the mounting region by the reaction force of the elastic force applied from the inner surface of the opening to the support portion in a state where the optical surface intersects the main surface.

  In this optical module, the optical element includes an elastic portion and a pair of support portions whose distances can be changed according to elastic deformation of the elastic portion. On the other hand, an opening communicating with the main surface is formed in the mounting region of the base on which the optical element is mounted. Therefore, as an example, the support portion is inserted into the opening in a state in which the elastic portion is elastically deformed so that the distance between the support portions is reduced, and a part of the elastic deformation of the elastic portion is released, so that the support portion is opened in the opening. The distance between each other increases, and the support portion can be brought into contact with the inner surface of the opening. Thereby, an optical element is supported by the reaction force provided to a support part from the inner surface of opening. As described above, in this optical module, the optical element is mounted on the base using the elastic force. Therefore, the optical element can be reliably mounted without considering the adverse effect of the adhesive, that is, regardless of the characteristics of the mounting area.

  In this optical element, the elastic portion is provided so as to form an annular region. For this reason, for example, the strength of the elastic portion is improved as compared with a case where the elastic portion is in a cantilever state (in this case, a closed region such as an annular shape is not formed by the elastic portion). Therefore, for example, damage to the elastic portion can be suppressed during manufacturing or handling of the optical element. That is, another aspect of the present invention relates to an optical element, and an object thereof is to provide an optical element that can suppress breakage of an elastic portion.

  In the optical module according to the present invention, the base includes a support layer and a device layer provided on the support layer and including a main surface and a mounting region, and the opening is a device layer in a direction intersecting the main surface. The support portion may include a locking portion that is bent so as to be in contact with a pair of edges of the opening in a direction intersecting the main surface. In this case, the locking portion is locked to the mounting region at a position where the locking portion contacts the pair of edges of the opening. Therefore, the optical element can be reliably mounted on the base, and the optical element can be positioned in the direction intersecting the main surface of the base.

  In the optical module according to the present invention, the inner surface of the opening has a pair of inclined surfaces that are inclined so that the distance from each other increases from one end to the other end when viewed from the direction intersecting the main surface, and one inclined surface And a reference surface extending along a reference line connecting the other end of the other inclined surface and the other end of the other inclined surface. In this case, when the support portion is inserted into the opening and a part of the elastic deformation of the elastic portion is released, the support portion can be slid on the inclined surface by the elastic force and abut against the reference surface. For this reason, the optical element can be positioned in the direction along the main surface.

  In the optical module according to the present invention, the optical element may have a first connecting part that connects the optical part and the elastic part to each other. Thus, the optical part may be connected to the elastic part.

  In the optical module according to the present invention, the elastic part may be formed in an annular shape so as to surround the optical part when viewed from the second direction intersecting the optical surface. In this case, since the end portion does not occur in the elastic portion, the strength of the elastic portion can be reliably improved.

  In the optical module according to the present invention, the support portion includes the second coupling portion connected to the elastic portion and the optical surface from the second coupling portion along the third direction along the optical surface and intersecting the first direction. And a leg that extends beyond and is inserted into the opening. In this case, the optical element can be mounted on the base in a state where the entire optical surface protrudes from the main surface.

  The optical module according to the present invention further includes a fixed mirror mounted on the support layer, the device layer, or the intermediate layer, and a beam splitter mounted on the support layer, the device layer, or the intermediate layer, and an optical element. Is a movable mirror including an optical surface that is a mirror surface, the device layer has a drive region connected to the mounting region, and the movable mirror, the fixed mirror, and the beam splitter are arranged to constitute an interference optical system May be. In this case, an FTIR with improved sensitivity can be obtained. Here, the mounting area where the movable mirror is mounted has a characteristic of being connected to the driving area and driven. Therefore, the above configuration is more effective because it is easily affected by the adverse effects of the adhesive.

  In the optical module according to the present invention, the base has an intermediate layer provided between the support layer and the device layer, the support layer is the first silicon layer of the SOI substrate, and the device layer is the SOI substrate. The second silicon layer and the intermediate layer may be an insulating layer of the SOI substrate. In this case, a configuration for reliably mounting the movable mirror on the device layer can be suitably realized by the SOI substrate.

  An optical module according to the present invention includes a light incident part arranged to allow measurement light to be incident on the interference optical system from the outside, a light emission part arranged to emit measurement light to the outside from the interference optical system, May be provided. In this case, an FTIR including a light incident part and a light emission part can be obtained.

  ADVANTAGE OF THE INVENTION According to this invention, the optical module which can mount an optical element reliably regardless of the characteristic of a mounting area | region can be provided.

It is a top view of the optical module of one Embodiment. It is sectional drawing along the II-II line | wire shown by FIG. It is sectional drawing along the III-III line | wire shown by FIG. (A) is a perspective view of the peripheral structure of the movable mirror shown in FIG. 1, and (b) is a cross-sectional view along the IVb-IVb line shown in (a) of FIG. It is sectional drawing along the VV line | wire shown by FIG. It is sectional drawing along the VI-VI line shown by FIG. It is sectional drawing of the modification of the surrounding structure of a movable mirror. It is sectional drawing of the modification of the surrounding structure of a movable mirror. It is sectional drawing of the modification of the surrounding structure of a movable mirror. It is sectional drawing of the modification of the surrounding structure of a movable mirror. It is sectional drawing of the modification of the surrounding structure of a movable mirror. It is sectional drawing of the modification of the surrounding structure of a movable mirror. It is sectional drawing of the modification of the surrounding structure of a movable mirror. It is a partial schematic plan view of the optical module which concerns on a modification. It is sectional drawing along the XV-XV line | wire shown by FIG. It is sectional drawing along the XVI-XVI line shown by FIG. It is a front view which shows the modification of a movable mirror. It is a front view which shows the modification of a movable mirror. It is a front view which shows the modification of a movable mirror. It is a front view which shows the modification of a movable mirror. It is a front view which shows the modification of a movable mirror. It is a front view which shows the modification of a movable mirror. It is a front view which shows the modification of a movable mirror. It is a top view which shows the modification of opening. It is a top view which shows the modification of opening. It is a top view which shows the modification of opening. It is sectional drawing which shows the modification of a movable mirror. It is a top view which shows the modification of opening.

Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. In addition, in each figure, the same code | symbol is attached | subjected to the same or an equivalent part, and the overlapping part is abbreviate | omitted.
[Configuration of optical module]

  As shown in FIG. 1, the optical module 1 includes a base B. The base B has a main surface Bs. The base B includes a support layer 2, a device layer 3 provided on the support layer 2, and an intermediate layer 4 provided between the support layer 2 and the device layer 3. Here, the main surface Bs is the surface of the device layer 3 opposite to the support layer 2. The support layer 2, the device layer 3, and the intermediate layer 4 are configured by an SOI substrate. Specifically, the support layer 2 is a first silicon layer of an SOI substrate. The device layer 3 is a second silicon layer of the SOI substrate. The intermediate layer 4 is an insulating layer of the SOI substrate. The support layer 2, the device layer 3, and the intermediate layer 4 have, for example, a rectangular shape with a side of about 10 mm when viewed from the Z-axis direction (a direction parallel to the Z-axis) that is the stacking direction thereof. The thickness of each of the support layer 2 and the device layer 3 is, for example, about several hundred μm. The thickness of the intermediate layer 4 is, for example, about several μm. In FIG. 1, the device layer 3 and the intermediate layer 4 are shown with one corner of the device layer 3 and one corner of the intermediate layer 4 cut out.

  The device layer 3 has a mounting area 31 and a drive area 32 connected to the mounting area 31. The drive region 32 includes a pair of actuator regions 33 and a pair of elastic support regions 34. The mounting region 31 and the drive region 32 (that is, the mounting region 31 and the pair of actuator regions 33 and the pair of elastic support regions 34) are integrally formed on a part of the device layer 3 by MEMS technology (patterning and etching). Yes.

  The pair of actuator regions 33 are disposed on both sides of the mounting region 31 in the X-axis direction (direction parallel to the X-axis orthogonal to the Z-axis). That is, the mounting area 31 is sandwiched between the pair of actuator areas 33 in the X-axis direction. Each actuator region 33 is fixed to the support layer 2 via the intermediate layer 4. A first comb tooth portion 33 a is provided on the side surface of each actuator region 33 on the mounting region 31 side. Each first comb-tooth portion 33 a is in a state of floating with respect to the support layer 2 by removing the intermediate layer 4 immediately below the first comb-tooth portion 33 a. Each actuator region 33 is provided with a first electrode 35.

  The pair of elastic support regions 34 are disposed on both sides of the mounting region 31 in the Y-axis direction (the direction parallel to the Y-axis orthogonal to the Z-axis and the X-axis). That is, the mounting region 31 is sandwiched between the pair of elastic support regions 34 in the Y-axis direction. Both end portions 34 a of each elastic support region 34 are fixed to the support layer 2 through the intermediate layer 4. Each elastic support region 34 has an elastic deformation portion 34b (a portion between both end portions 34a) having a structure in which a plurality of leaf springs are connected. The elastic deformation portion 34b of each elastic support region 34 is in a state of floating with respect to the support layer 2 by removing the intermediate layer 4 immediately below the elastic deformation portion 34b. In each elastic support region 34, a second electrode 36 is provided at each of both end portions 34 a.

  The mounting region 31 is connected to the elastic deformation portion 34 b of each elastic support region 34. The mounting region 31 is in a state of floating with respect to the support layer 2 by removing the intermediate layer 4 immediately below the mounting region 31. That is, the mounting area 31 is supported by the pair of elastic support areas 34. A second comb tooth portion 31 a is provided on the side surface of each mounting region 31 on the side of each actuator region 33. Each second comb tooth portion 31 a is in a state of floating with respect to the support layer 2 by removing the intermediate layer 4 immediately below the second comb tooth portion 31 a. In the first comb tooth portion 33a and the second comb tooth portion 31a facing each other, the comb teeth of the first comb tooth portion 33a are located between the comb teeth of the second comb tooth portion 31a.

  The pair of elastic support regions 34 sandwich the mounting region 31 from both sides with respect to the direction A parallel to the X axis so that when the mounting region 31 moves along the direction A, the mounting region 31 returns to the initial position. An elastic force is applied to the mounting region 31. Therefore, when a voltage is applied between the first electrode 35 and the second electrode 36 and an electrostatic attractive force acts between the first comb tooth portion 33a and the second comb tooth portion 31a facing each other, the electrostatic attractive force is applied. The mounting region 31 is moved along the direction A to a position where the elastic force by the pair of elastic support regions 34 is balanced. Thus, the drive region 32 functions as an electrostatic actuator.

  The optical module 1 further includes a movable mirror 5, a fixed mirror 6, a beam splitter 7, a light incident part 8, and a light emitting part 9. The movable mirror 5, the fixed mirror 6, and the beam splitter 7 are arranged on the device layer 3 so as to constitute an interference optical system 10 that is a Michelson interference optical system.

  The movable mirror 5 is mounted on the mounting region 31 of the device layer 3 on one side of the beam splitter 7 in the X-axis direction. The mirror surface 51 a of the mirror portion 51 included in the movable mirror 5 is located on the opposite side of the support layer 2 with respect to the device layer 3. The mirror surface 51a is, for example, a surface perpendicular to the X-axis direction (that is, a surface perpendicular to the direction A) and faces the beam splitter 7 side.

  The fixed mirror 6 is mounted on the mounting region 37 of the device layer 3 on one side of the beam splitter 7 in the Y-axis direction. The mirror surface 61 a of the mirror portion 61 included in the fixed mirror 6 is located on the opposite side of the support layer 2 with respect to the device layer 3. The mirror surface 61a is, for example, a surface perpendicular to the Y-axis direction and faces the beam splitter 7 side.

  The light incident part 8 is mounted on the device layer 3 on the other side of the beam splitter 7 in the Y-axis direction. The light incident part 8 is constituted by, for example, an optical fiber and a collimating lens. The light incident part 8 is arranged so that measurement light is incident on the interference optical system 10 from the outside.

  The light emitting portion 9 is mounted on the device layer 3 on the other side of the beam splitter 7 in the X-axis direction. The light emission part 9 is comprised by the optical fiber, the collimating lens, etc., for example. The light emitting unit 9 is arranged to emit measurement light (interference light) from the interference optical system 10 to the outside.

  The beam splitter 7 is a cube-type beam splitter having an optical function surface 7a. The optical function surface 7 a is located on the opposite side of the support layer 2 with respect to the device layer 3. The beam splitter 7 is positioned by bringing one corner on the bottom side of the beam splitter 7 into contact with one corner of the rectangular opening 3 a formed in the device layer 3. The beam splitter 7 is mounted on the support layer 2 by being fixed to the support layer 2 by bonding or the like in a positioned state.

In the optical module 1 configured as described above, when the measurement light L0 is incident on the interference optical system 10 from the outside via the light incident portion 8, a part of the measurement light L0 is caused by the optical function surface 7a of the beam splitter 7. The reflected light travels toward the movable mirror 5, and the remaining portion of the measurement light L 0 passes through the optical function surface 7 a of the beam splitter 7 and travels toward the fixed mirror 6. A part of the measurement light L0 is reflected by the mirror surface 51a of the movable mirror 5, travels on the same optical path toward the beam splitter 7, and passes through the optical functional surface 7a of the beam splitter 7. The remaining portion of the measurement light L0 is reflected by the mirror surface 61a of the fixed mirror 6, travels toward the beam splitter 7 on the same optical path, and is reflected by the optical function surface 7a of the beam splitter 7. A part of the measurement light L0 transmitted through the optical functional surface 7a of the beam splitter 7 and the remaining part of the measurement light L0 reflected by the optical functional surface 7a of the beam splitter 7 become the measurement light L1 that is interference light, and the measurement light L1 is emitted to the outside from the interference optical system 10 via the light emitting unit 9. According to the optical module 1, since the movable mirror 5 can be reciprocated at high speed along the direction A, a small and highly accurate FTIR can be provided.
[Movable mirror and surrounding structure]

  As shown in FIGS. 2, 3, and 4, the movable mirror (optical element) 5 includes a mirror part (optical part) 51 having a mirror surface (optical surface) 51a, an annular elastic part 52, and a mirror. A connecting portion (first connecting portion) 53 that connects the portion 51 and the elastic portion 52 to each other; a pair of supporting portions 56; and a pair of connecting portions that connect the supporting portion 56 and the elastic portion 52 to each other (second connecting portions). 57). The mirror part 51 is formed in a disk shape. The mirror surface 51 a is a circular plate surface of the mirror unit 51. The movable mirror 5 is mounted on the base B in a state where the mirror surface 51a intersects (for example, orthogonally) with the main surface Bs.

  The elastic part 52 is formed in an annular shape so as to surround the mirror part 51 while being separated from the mirror part 51 when viewed from the direction intersecting the mirror surface 51a (second direction, X-axis direction). That is, the elastic part 52 is provided around the mirror part 51 and forms an annular region CA. The connecting portion 53 connects the mirror portion 51 and the elastic portion 52 to each other at the center of the mirror portion 51 in the direction intersecting the main surface Bs (third direction, Z-axis direction). Here, a single connecting portion 53 is provided.

  The elastic portion 52 is formed in an annular plate shape by a semicircular plate spring 52a and a semicircular plate spring 52b continuous to the plate spring 52a. The leaf spring 52a is a portion disposed on the main surface Bs side (the leg portion 54 side described later) with respect to the center line CL passing through the center of the mirror portion 51 in the Z-axis direction. The center line CL is an imaginary straight line extending along a direction (first direction, Y-axis direction) along the mirror surface 51a and the main surface Bs. The leaf spring 52b is a portion arranged on the opposite side of the main surface Bs from the center line CL (on the opposite side to the leg portion 54 described later). The spring constant of the leaf spring 52a and the spring constant of the leaf spring 52b are equal to each other. That is, the elastic part 52 has a symmetrical shape with respect to the center line CL, and the spring constant of the elastic part 52 is equal to each other on both sides of the center line CL.

  The support part 56 is a rod having a rectangular cross section, and is provided so as to sandwich the mirror part 51 and the elastic part 52 in the Y-axis direction. The support part 56 is connected to the elastic part 52 by a connection part 57 at a position corresponding to the connection part 53 along the Y-axis direction. Therefore, for example, at a position corresponding to the connecting portion 57, by applying a force to the support portion 56 so as to sandwich the support portion 56 from both sides in the Y-axis direction, the elastic portion 52 is elastically deformed so as to be compressed in the Y-axis direction. be able to. That is, the distance between the support portions 56 along the Y-axis direction is variable according to the elastic deformation of the elastic portion 52. Further, the elastic force of the elastic portion 52 can be applied to the support portion 56. Here, the pair of connecting portions 57 and the connecting portions 53 are arranged in a line on the center line CL.

  The support part 56 includes a leg part 54. As a whole, the leg portion 54 extends from the coupling portion 57 to the one side (here, the main surface Bs side) of the mirror surface 51a beyond the mirror surface 51a along the Z-axis direction. The leg portion 54 includes a locking portion 55. The locking portion 55 is a portion on the distal end side of the leg portion 54. The locking portion 55 is bent in a V shape as a whole. The locking part 55 includes an inclined surface 55a and an inclined surface 55b. The inclined surface 55a and the inclined surface 55b are surfaces on the opposite sides of the surfaces facing each other in the pair of locking portions 55 (outer surfaces).

  The inclined surfaces 55a are inclined between the pair of locking portions 55 so as to approach each other in the direction away from the connecting portion 57 (Z-axis negative direction). The inclined surfaces 55b are inclined so as to be separated from each other in the negative Z-axis direction. When viewed from the X-axis direction, the absolute value of the inclination angle α of the inclined surface 55a with respect to the Z-axis is less than 90 °. Similarly, the absolute value of the inclination angle β of the inclined surface 55b is less than 90 °. Here, as an example, the absolute value of the inclination angle α and the absolute value of the inclination angle β are equal to each other.

  Here, an opening 31 b is formed in the mounting region 31. Here, the opening 31 b extends in the Z-axis direction and penetrates the device layer 3. Therefore, the opening 31b communicates (leads) to the main surface Bs and the surface of the device layer 3 opposite to the main surface Bs. The opening 31b has a columnar shape that is trapezoidal when viewed from the Z-axis direction (see FIG. 4). Details of the opening 31b will be described later.

  The support portion 56 is inserted into the opening 31b in a state where the elastic force of the elastic portion 52 is applied. In other words, the support portion 56 (that is, the movable mirror 5) penetrates the mounting region 31 through the opening 31b. More specifically, a part of the locking portion 55 of the support portion 56 is located in the opening 31b. In that state, the locking portion 55 is in contact with a pair of edges (the edge on the main surface Bs side and the edge on the opposite side of the main surface Bs) of the opening 31b in the Z-axis direction.

  Here, the inclined surface 55a is in contact with the edge of the opening 31b on the main surface Bs side, and the inclined surface 55b is in contact with the edge of the opening 31b on the opposite side of the main surface Bs. Accordingly, the locking portion 55 is locked to the mounting area 31 so as to sandwich the mounting area 31 in the Z-axis direction. As a result, the movable mirror 5 is prevented from coming off the base B in the Z-axis direction.

  Here, an opening 41 is formed in the intermediate layer 4. The openings 41 are open on both sides of the intermediate layer 4 in the Z-axis direction. An opening 21 is formed in the support layer 2. The openings 21 are open on both sides of the support layer 2 in the Z-axis direction. In the optical module 1, a continuous space S <b> 1 is configured by the region in the opening 41 of the intermediate layer 4 and the region in the opening 21 of the support layer 2. That is, the space S <b> 1 includes a region in the opening 41 of the intermediate layer 4 and a region in the opening 21 of the support layer 2.

  The space S <b> 1 is formed between the support layer 2 and the device layer 3, and corresponds to at least the mounting region 31 and the drive region 32. Specifically, the region in the opening 41 of the intermediate layer 4 and the region in the opening 21 of the support layer 2 include a range in which the mounting region 31 moves when viewed from the Z-axis direction. A region in the opening 41 of the intermediate layer 4 is a portion to be separated from the support layer 2 in the mounting region 31 and the drive region 32 (that is, a portion to be floated with respect to the support layer 2, for example, A gap for separating the entire mounting region 31, the elastic deformation portion 34 b of each elastic support region 34, the first comb tooth portion 33 a and the second comb tooth portion 31 a) from the support layer 2 is formed.

  A part of each locking portion 55 of the movable mirror 5 is located in the space S1. Specifically, a part of each locking portion 55 is located in a region in the opening 21 of the support layer 2 via a region in the opening 41 of the intermediate layer 4. A part of each locking portion 55 protrudes from the surface of the device layer 3 on the intermediate layer 4 side into the space S1, for example, about 100 μm. As described above, the region in the opening 41 of the intermediate layer 4 and the region in the opening 21 of the support layer 2 include a range in which the mounting region 31 moves when viewed from the Z-axis direction. Is reciprocated along the direction A, a part of each locking portion 55 of the movable mirror 5 located in the space S1 does not come into contact with the intermediate layer 4 and the support layer 2.

  Here, as shown in FIG. 4, the inner surface of the opening 31b includes a pair of inclined surfaces SL and a reference surface SR. Inclined surface SL includes one end SLa and the other end SLb. The one end SLa and the other end SLb are both ends of the inclined surface SL when viewed from the Z-axis direction. The pair of inclined surfaces SL are inclined (for example, with respect to the X axis) so that the distance from each other increases from one end SLa toward the other end SLb. The reference surface SR extends along a reference line BL that connects the other end SLb of one inclined surface SL and the other end SLb of the other inclined surface SL, as viewed from the Z-axis direction. Here, the reference surface SR simply connects the other ends SLb to each other. As described above, the shape of the opening 31b when viewed from the Z-axis direction is a trapezoid. Accordingly, here, the inclined surface SL corresponds to a trapezoidal leg, and the reference surface SR corresponds to the lower base of the trapezoid.

  Here, the opening 31b is a single space. The minimum value of the dimension of the opening 31b in the Y-axis direction (that is, the interval between the ends SLa of the inclined surface SL) is a pair of locking when the elastic portion 52 is elastically deformed so as to be compressed along the Y-axis direction. It is a value which can arrange | position the part 55 in the opening 31b collectively. On the other hand, the maximum value of the dimension of the opening 31b in the Y-axis direction (that is, the distance between the other ends SLb of the inclined surface SL) is the elasticity of the elastic part 52 when the pair of locking parts 55 are disposed in the opening 31b. Only a part of the deformation can be released (that is, the elastic portion 52 does not reach a natural length).

  Therefore, when the pair of locking portions 55 are arranged in the opening 31b, the locking portion 55 presses the inner surface of the opening 31b by the elastic force of the elastic portion 52, and the reaction force from the inner surface of the opening 31b is generated by the locking portion 55 ( It will be given to the support part 56). Accordingly, the movable mirror 5 is supported by the mounting region 31 by the reaction force of the elastic force applied to the support portion 56 from the inner surface of the opening 31b in a state where the mirror surface 51a intersects (for example, orthogonally) the main surface Bs. .

  In particular, the locking portion 55 is in contact with the inclined surface SL of the opening 31b. For this reason, the locking part 55 slides on the inclined surface SL toward the reference surface SR by the component in the X-axis direction of the reaction force from the inclined surface SL, and hits the reference surface SR while contacting the inclined surface SL. Hit. Thereby, the latching | locking part 55 is inscribed in the corner | angular part prescribed | regulated by the inclined surface SL and the reference plane SR, and is positioned in both the X-axis direction and the Y-axis direction (self-aligned by elastic force). Here, since the cross-sectional shape of the locking portion 55 is a quadrangle, the inclined surface SL contacts the locking portion 55 at a point when viewed from the Z-axis direction, and the reference surface SR is fixed to the locking portion 55. Touch with a line. That is, here, the inner surface of the opening 31b contacts the pair of locking portions 55 at two points and two lines when viewed from the Z-axis direction.

  On the other hand, as shown in FIG. 2, when viewed from the X-axis direction, a reaction force of elastic force is applied to the locking portion 55 from the inner surface of the opening 31b even at the edge of the opening 31b. When the movable mirror 5 is mounted, a reaction force may be applied to one of the inclined surface 55a and the inclined surface 55b of the locking portion 55. In this case, one of the inclined surface 55a and the inclined surface 55b slides on the edge by the component of the reaction force along the inclined surface 55a or the inclined surface 55b, and both the inclined surface 55a and the inclined surface 55b are edged. It moves along the Z-axis direction so as to reach a position in contact with the part (that is, a position sandwiching the mounting region 31 along the Z-axis direction). Thereby, the latching | locking part 55 is latched in the said position, and the movable mirror 5 is positioned about a Z-axis direction (self-alignment by an elastic force). That is, in the movable mirror 5, self-alignment is performed three-dimensionally using the elastic force of the elastic portion 52.

The movable mirror 5 as described above is integrally formed by, for example, MEMS technology (patterning and etching). Therefore, the thickness of the movable mirror 5 (dimension in the direction intersecting the mirror surface 51a) is constant in each part, and is, for example, about 320 μm. The diameter of the mirror surface 51a is, for example, about 1 mm. Furthermore, the space | interval of the surface (inner surface) by the side of the mirror part 51 of the elastic part 52 and the surface (outer surface) by the side of the elastic part 52 of the mirror part 51 is about 200 micrometers, for example. The thickness of the elastic part 52 (thickness of the leaf spring) is, for example, about 10 μm to 20 μm.
[Fixed mirror and its peripheral structure]

  The fixed mirror 6 and its peripheral structure are the same as the movable mirror 5 and its peripheral structure except that the mounting area does not move. That is, as shown in FIGS. 5 and 6, the fixed mirror (optical element) 6 includes a mirror part (optical part) 61 having a mirror surface (optical surface) 61 a, an annular elastic part 62, and a mirror part 61. And the elastic portion 62 are connected to each other (a first connecting portion) 63, a pair of supporting portions 66, and a pair of connecting portions 66 and the elastic portion 62 are connected to each other (second connecting portion) 67. And have. The mirror part 61 is formed in a disk shape. The mirror surface 61 a is a circular plate surface of the mirror unit 61. The fixed mirror 6 is mounted on the base B in a state in which the mirror surface 61a intersects (for example, orthogonal to) the main surface Bs of the base B.

  The elastic part 62 is formed in an annular shape so as to surround the mirror part 61 while being separated from the mirror part 61 when viewed from the direction intersecting the mirror surface 61a (second direction, Y-axis direction). Therefore, the elastic part 62 is provided around the mirror part 61 and forms an annular region CA. The connecting portion 63 connects the mirror portion 61 and the elastic portion 62 to each other at the center of the mirror portion 61 in the direction intersecting the main surface Bs (third direction, Z-axis direction). Here, a single connecting portion 63 is provided.

  The elastic part 62 is formed in an annular plate shape by a semicircular plate spring 62a and a semicircular plate spring 62b continuous to the plate spring 62a. The leaf spring 62a is a portion disposed on the main surface Bs side (the leg portion 64 side described later) from the center line CL passing through the center of the mirror portion 61 in the Z-axis direction. The center line CL is an imaginary straight line extending along a direction (first direction, X-axis direction) along the mirror surface 61a and the main surface Bs. The leaf spring 62b is a portion disposed on the opposite side of the main surface Bs from the center line CL (on the opposite side to the leg portion 64 described later). The spring constant of the leaf spring 62a and the spring constant of the leaf spring 62b are equal to each other. That is, the elastic part 62 has a symmetrical shape with respect to the center line CL, and the spring constant of the elastic part 62 is equal to each other on both sides of the center line CL.

  The support portion 66 is a rod having a rectangular cross section, and is provided so as to sandwich the mirror portion 61 and the elastic portion 62 in the X-axis direction. The support part 66 is connected to the elastic part 62 by a connection part 67 at a position corresponding to the connection part 63 along the Y-axis direction. Therefore, for example, at a position corresponding to the connecting portion 67, by applying a force to the support portion 66 so as to sandwich the support portion 66 from both sides in the X-axis direction, the elastic portion 62 is elastically deformed so as to be compressed in the X-axis direction. be able to. That is, the distance between the support portions 66 along the X-axis direction is variable according to the elastic deformation of the elastic portion 62. Further, the elastic force of the elastic part 62 can be applied to the support part 66. Here, the pair of connecting portions 67 and the connecting portion 63 are arranged in a line on the center line CL.

  The support part 66 includes a leg part 64. As a whole, the leg portion 64 extends from the connecting portion 67 to the one side (here, the main surface Bs side) of the mirror surface 61a beyond the mirror surface 61a along the Z-axis direction. The leg portion 64 includes a locking portion 65. The locking portion 65 is a portion on the distal end side of the leg portion 64. The locking portion 65 is bent as a whole. The locking part 65 includes an inclined surface 65a and an inclined surface 65b. The inclined surface 65a and the inclined surface 65b are surfaces opposite to the surfaces facing each other in the pair of locking portions 65 (outer surfaces).

  The inclined surfaces 65 a are inclined so as to approach each other in the direction away from the connecting portion 67 (Z-axis negative direction) between the pair of locking portions 65. The inclined surfaces 65b are inclined so as to be separated from each other in the negative Z-axis direction. When viewed from the Y-axis direction, the inclination angles of the inclined surfaces 65a and 65b with respect to the Z-axis are the same as those of the inclined surfaces 55a and 55b in the movable mirror 5.

  Here, an opening 37 a is formed in the mounting region 37. Here, the opening 37a penetrates the device layer 3 in the Z-axis direction. Therefore, the opening 37a communicates (becomes) with the main surface Bs and the surface of the device layer 3 opposite to the main surface Bs. Similarly to the opening 31b in the mounting region 31, the opening 37a has a columnar shape that is trapezoidal when viewed from the Z-axis direction.

  The support portion 66 is inserted into the opening 37a in a state where the elastic force of the elastic portion 62 is applied. In other words, the support portion 66 (that is, the fixed mirror 6) penetrates the mounting region 37 through the opening 37a. More specifically, a part of the locking portion 65 of the support portion 66 is located in the opening 37a. In this state, the locking portion 65 is in contact with a pair of edges (the edge on the main surface Bs side and the edge on the opposite side of the main surface Bs) of the opening 37a in the Z-axis direction. Here, the inclined surface 65a is in contact with the edge of the opening 37a on the main surface Bs side, and the inclined surface 65b is in contact with the edge of the opening 37a on the opposite side of the main surface Bs. Accordingly, the locking portion 65 is locked to the mounting area 37 so as to sandwich the mounting area 37 in the Z-axis direction. As a result, the fixed mirror 6 is prevented from coming off the base B in the Z-axis direction.

  Here, an opening 42 is formed in the intermediate layer 4. The opening 42 includes the opening 37a of the mounting region 37 when viewed from the Z-axis direction, and opens on both sides of the intermediate layer 4 in the Z-axis direction. An opening 22 is formed in the support layer 2. The opening 22 includes the opening 37a of the mounting region 37 when viewed from the Z-axis direction, and opens on both sides of the support layer 2 in the Z-axis direction. In the optical module 1, a continuous space S <b> 2 is configured by the region in the opening 42 of the intermediate layer 4 and the region in the opening 22 of the support layer 2. That is, the space S <b> 2 includes a region in the opening 42 of the intermediate layer 4 and a region in the opening 22 of the support layer 2.

  A part of each locking portion 65 of the fixed mirror 6 is located in the space S2. Specifically, a part of each locking portion 65 is located in a region in the opening 22 of the support layer 2 via a region in the opening 42 of the intermediate layer 4. A part of each locking portion 65 protrudes from the surface of the device layer 3 on the intermediate layer 4 side into the space S2, for example, about 100 μm.

  Here, the inner surface of the opening 37 a is configured similarly to the inner surface of the opening 31 b in the mounting region 31. Accordingly, when the pair of locking portions 65 are arranged in the opening 37a, the locking portion 65 presses the inner surface of the opening 37a by the elastic force of the elastic portion 62, and the reaction force from the inner surface of the opening 37a is increased by the locking portion 65 ( It will be applied to the support 66). Accordingly, the fixed mirror 6 is supported by the base B by the reaction force of the elastic force applied to the support portion 66 from the inner surface of the opening 37a in a state where the mirror surface 61a intersects (for example, orthogonally) the main surface Bs. In particular, the fixed mirror 6 also performs three-dimensional self-alignment using the inner surface of the opening 37a and the elastic force, as in the case of the movable mirror 5.

The fixed mirror 6 as described above is also integrally formed by, for example, MEMS technology (patterning and etching) similarly to the movable mirror 5. The dimensions of each part of the fixed mirror 6 are the same as the above-described dimensions of each part of the movable mirror 5, for example.
[Action and effect]

  In the optical module 1, the movable mirror 5 includes an elastic part 52 and a pair of support parts 56 whose distances can be changed according to the elastic deformation of the elastic part 52. On the other hand, an opening 31b communicating with the main surface Bs is formed in the mounting region 31 of the base B where the movable mirror 5 is mounted. Therefore, as an example, by inserting the support portion 56 into the opening 31b in a state where the elastic portion 52 is elastically deformed so that the distance between the support portions 56 is reduced, and releasing a part of the elastic deformation of the elastic portion 52, The distance between the support portions 56 in the opening 31b increases, and the support portion 56 can be brought into contact with the inner surface of the opening 31b.

  Thereby, the movable mirror 5 is supported by the reaction force applied to the support part 56 from the inner surface of the opening 31b. As described above, in the optical module 1, the movable mirror 5 is mounted on the base B by using elastic force. Therefore, the optical element can be reliably mounted without considering the adverse effect of the adhesive or the like, that is, regardless of the characteristics of the mounting region 31. Here, the operation and effect are described by taking the movable mirror 5 as an example, but the same operation and effect are also achieved with respect to the fixed mirror 6.

  Moreover, in the movable mirror 5, the elastic part 52 is provided so that the cyclic | annular area | region CA may be formed. For this reason, for example, the strength of the elastic portion 52 is improved as compared with a case where the elastic portion 52 is in a cantilever state (in this case, a closed region such as an annular shape is not formed by the elastic portion 52). Therefore, for example, it is possible to suppress the breakage of the elastic portion 52 when the movable mirror 5 is manufactured or handled.

  In the optical module 1, the base B includes a support layer 2 and a device layer 3 provided on the support layer 2 and including the main surface Bs and the mounting region 31. Further, the opening 31b penetrates the device layer 3 in a direction intersecting the main surface Bs (Z-axis direction). And the support part 56 contains the latching | locking part 55 bent so that it might contact | abut to a pair of edge part of the opening 31b in a Z-axis direction. For this reason, the latching | locking part 55 is latched by the mounting area | region 31 in the position contact | abutted to a pair of edge part of the opening 31b. Therefore, the movable mirror 5 can be reliably mounted on the base B, and the movable mirror 5 can be positioned in the direction intersecting the main surface Bs of the base B.

  Further, in the optical module 1, the inner surface of the opening 31b has a pair of inclined surfaces SL inclined so that the distance from one end SLa to the other end SLb increases as viewed from the Z-axis direction, and one inclined surface. And a reference surface SR extending along a reference line BL connecting the other end SLb of SL and the other end SLb of the other inclined surface SL. For this reason, when the support part 56 is inserted into the opening 31b and a part of the elastic deformation of the elastic part 52 is released, the support part 56 is slid on the inclined surface SL by the elastic force and abuts against the reference surface SR. Can do. For this reason, the movable mirror 5 can be positioned in the direction along the main surface Bs.

  In the optical module 1, the elastic portion 52 is formed in an annular shape so as to surround the mirror portion 51 when viewed from the X-axis direction, thereby forming an annular region CA. For this reason, since an edge part does not arise in the elastic part 52, the intensity | strength of the elastic part 52 can be improved reliably.

  Moreover, in the optical module 1, the support part 56 is extended from the connection part 57 along the Z-axis direction beyond the mirror surface 51a along the Z-axis direction, and is inserted into the opening 31b. Leg portion 54. For this reason, the movable mirror 5 can be mounted on the base B in a state where the entire mirror surface 51a is projected on the main surface Bs of the base B.

  Furthermore, in the movable mirror 5, the elastic part 52 has a symmetrical shape with respect to the center line CL of the mirror surface 51a, and the spring constant of the elastic part 52 is equal to each other on both sides of the center line CL. For this reason, for example, when the elastic portion 52 is elastically deformed along the Y-axis direction, the posture of the movable mirror 5 is unlikely to become unstable (for example, torsion is unlikely to occur). In addition, when a part of the elastic deformation of the elastic portion 52 is released, the reaction force is prevented from being input non-uniformly to the pair of support portions 56 from the inner surface of the opening 31b.

  Here, in the optical module 1, the movable mirror 5 penetrates the mounting region 31 of the device layer 3, and a part of each locking portion 55 of the movable mirror 5 is formed between the support layer 2 and the device layer 3. Is located in the space S1. Thereby, for example, since the size of each locking portion 55 is not limited, the movable mirror 5 can be stably and firmly fixed to the mounting region 31 of the device layer 3. Therefore, according to the optical module 1, the movable mirror 5 can be reliably mounted on the device layer 3.

  In the optical module 1, a part of each locking portion 55 of the movable mirror 5 is located in a region in the opening 21 of the support layer 2 through a region in the opening 41 of the intermediate layer 4. Thereby, the structure for reliable mounting of the movable mirror 5 with respect to the device layer 3 can be suitably realized.

  In the optical module 1, the support layer 2 is the first silicon layer of the SOI substrate, the device layer 3 is the second silicon layer of the SOI substrate, and the intermediate layer 4 is the insulating layer of the SOI substrate. Thereby, the structure for the reliable mounting of the movable mirror 5 with respect to the device layer 3 can be suitably realized by the SOI substrate.

  In the optical module 1, the mirror surface 51 a of the movable mirror 5 is located on the opposite side of the support layer 2 with respect to the device layer 3. Thereby, the structure of the optical module 1 can be simplified.

  In the optical module 1, the movable mirror 5, the fixed mirror 6, and the beam splitter 7 are arranged so as to constitute the interference optical system 10. Thereby, FTIR with improved sensitivity can be obtained.

In the optical module 1, the light incident part 8 is arranged so that the measurement light is incident on the interference optical system 10 from the outside, and the light emitting part 9 emits the measurement light from the interference optical system 10 to the outside. Are arranged as follows. Thereby, FTIR provided with the light-incidence part 8 and the light-projection part 9 can be obtained.
[Modification]

  Although one embodiment of the present invention has been described above, the present invention is not limited to the above embodiment. For example, the materials and shapes of each component are not limited to the materials and shapes described above, and various materials and shapes can be employed.

  Further, the space S1 is formed between the support layer 2 and the device layer 3, and as long as it corresponds to at least the mounting region 31 and the drive region 32, as shown in FIG. 7 and FIG. Aspects can be employed.

  In the configuration shown in FIG. 7, instead of the opening 21, the support layer 2 is formed with a recess 23 that opens to the device layer 3 side, and the region within the opening 41 of the intermediate layer 4 and the recess 23 of the support layer 2 are formed. A space S1 is configured by the regions. In this case, the region in the recess 23 of the support layer 2 includes a range in which the mounting region 31 moves when viewed from the Z-axis direction. A part of each locking portion 55 of the movable mirror 5 is located in a region in the recess 23 via a region in the opening 41 of the intermediate layer 4. Also with this configuration, a configuration for reliably mounting the movable mirror 5 on the device layer 3 can be suitably realized.

  In the configuration shown in FIG. 8A, the region in the opening 21 of the support layer 2 includes a range in which each locking portion 55 of the movable mirror 5 moves when viewed from the Z-axis direction. In the configuration shown in FIG. 8B, the region in the recess 23 of the support layer 2 includes a range in which each locking portion 55 of the movable mirror 5 moves when viewed from the Z-axis direction. In these cases, the region in the opening 41 of the intermediate layer 4 includes a range in which the mounting region 31 moves when viewed from the Z-axis direction, and is separated from the support layer 2 in the mounting region 31 and the drive region 32. A gap for separating the power portion from the support layer 2 is formed. In any configuration, when the mounting region 31 reciprocates along the direction A, a part of each locking portion 55 of the movable mirror 5 located in the space S1 comes into contact with the intermediate layer 4 and the support layer 2. There is no.

  The support layer 2 and the device layer 3 may be bonded to each other without the intermediate layer 4 interposed therebetween. In this case, the support layer 2 is formed of, for example, silicon, borosilicate glass, quartz glass, or ceramic, and the device layer 3 is formed of, for example, silicon. The support layer 2 and the device layer 3 are bonded to each other by, for example, room temperature bonding by surface activation, low temperature plasma bonding, direct bonding for performing high temperature processing, insulating resin bonding, metal bonding, or glass frit bonding. Also in this case, the space S1 is formed between the support layer 2 and the device layer 3, and if it corresponds to at least the mounting region 31 and the drive region 32, FIG. 9, FIG. 10, FIG. As shown in FIG. 12, various aspects can be employed. In any configuration, a configuration for surely mounting the movable mirror 5 on the device layer 3 can be suitably realized.

  In the configuration shown in FIG. 9A, the space S <b> 1 is configured by the region in the opening 21 of the support layer 2. In this case, the region in the opening 21 of the support layer 2 includes a range in which the mounting region 31 moves when viewed from the Z-axis direction, and should be separated from the support layer 2 in the mounting region 31 and the drive region 32. A gap for separating the portion from the support layer 2 is formed. A part of each locking portion 55 of the movable mirror 5 is located in a region in the opening 21 of the support layer 2.

  In the configuration shown in FIG. 9B, the space S <b> 1 is configured by the region in the recess 23 of the support layer 2. In this case, the region in the recess 23 of the support layer 2 includes a range in which the mounting region 31 moves when viewed from the Z-axis direction, and should be separated from the support layer 2 in the mounting region 31 and the drive region 32. A gap for separating the portion from the support layer 2 is formed. A part of each locking portion 55 of the movable mirror 5 is located in a region in the recess 23 of the support layer 2.

  In the configuration shown in FIG. 10A, a recess (first recess) 38 that opens to the support layer 2 side is formed in the device layer 3, and a region in the recess 38 of the device layer 3 and the support layer 2 are formed. A space S <b> 1 is configured by the region in the opening 21. In this case, the region in the recess 38 of the device layer 3 and the region in the opening 21 of the support layer 2 include a range in which the mounting region 31 moves when viewed from the Z-axis direction. A region in the recess 38 of the device layer 3 forms a gap for separating a portion of the mounting region 31 and the drive region 32 that should be separated from the support layer 2 from the support layer 2. A part of each locking portion 55 of the movable mirror 5 is located in a region in the opening 21 of the support layer 2 via a region in the recess 38 of the device layer 3.

  In the configuration shown in FIG. 10B, the recess 38 is formed in the device layer 3, and the space is defined by the region in the recess 38 of the device layer 3 and the region in the recess (second recess) 23 of the support layer 2. S1 is configured. In this case, the region in the recess 38 of the device layer 3 and the region in the recess 23 of the support layer 2 include a range in which the mounting region 31 moves when viewed from the Z-axis direction. A region in the recess 38 of the device layer 3 forms a gap for separating a portion of the mounting region 31 and the drive region 32 that should be separated from the support layer 2 from the support layer 2. A part of each locking portion 55 of the movable mirror 5 is located in a region in the concave portion 23 of the support layer 2 via a region in the concave portion 38 of the device layer 3.

  In the configuration shown in FIG. 11A, the recess 38 is formed in the device layer 3, and the space S <b> 1 is configured by the region in the recess 38 of the device layer 3 and the region in the opening 21 of the support layer 2. Yes. In this case, the region in the recess 38 of the device layer 3 includes a range in which the mounting region 31 moves when viewed from the Z-axis direction, and should be separated from the support layer 2 in the mounting region 31 and the drive region 32. A gap for separating the portion from the support layer 2 is formed. The region in the opening 21 of the support layer 2 includes a range in which each locking portion 55 of the movable mirror 5 moves when viewed from the Z-axis direction. A part of each locking portion 55 of the movable mirror 5 is located in a region in the opening 21 of the support layer 2 via a region in the recess 38 of the device layer 3.

  In the configuration shown in FIG. 11B, the recess 38 is formed in the device layer 3, and the space is defined by the region in the recess 38 of the device layer 3 and the region in the recess (second recess) 23 of the support layer 2. S1 is configured. In this case, the region in the recess 38 of the device layer 3 includes a range in which the mounting region 31 moves when viewed from the Z-axis direction, and should be separated from the support layer 2 in the mounting region 31 and the drive region 32. A gap for separating the portion from the support layer 2 is formed. The region in the recess 23 of the support layer 2 includes a range in which each locking portion 55 of the movable mirror 5 moves when viewed from the Z-axis direction. A part of each locking portion 55 of the movable mirror 5 is located in a region in the concave portion 23 of the support layer 2 via a region in the concave portion 38 of the device layer 3.

  In the configuration shown in FIG. 12, the recess 38 is formed in the device layer 3, and the space S <b> 1 is configured by the region in the recess 38 of the device layer 3. In this case, the region in the recess 38 of the device layer 3 includes a range in which the mounting region 31 moves when viewed from the Z-axis direction, and should be separated from the support layer 2 in the mounting region 31 and the drive region 32. A gap for separating the portion from the support layer 2 is formed. A part of each locking portion 55 of the movable mirror 5 is located in a region in the recess 38 of the device layer 3.

  Further, as shown in FIGS. 13A and 13B, a part of each leg 54 and a part of each locking part 55 of the movable mirror 5 are located in the space S1, and the movable mirror 5 The mirror surface 51 a may be located on the side opposite to the device layer 3 with respect to the support layer 2. In this case, the mirror surface 61 a of the fixed mirror 6 and the optical functional surface 7 a of the beam splitter 7 are also located on the opposite side of the support layer 2 from the device layer 3. In the configuration shown in FIG. 13B, the spacer 39 that protrudes on the side opposite to the support layer 2 is integrally provided on the device layer 3. The spacer 39 protrudes from a portion of each locking portion 55 of the movable mirror 5 that protrudes from the device layer 3 to the side opposite to the support layer 2, and protects the portion. Here, the opening 31b communicates with the main surface Bs through a space defined by the spacer 39. Alternatively, here, the opening 31b communicates with another main surface that is a surface opposite to the main surface Bs via the space S1.

  Here, in the said embodiment, the case where the mirror surface 51a of the movable mirror 5 protrudes on the surface on the opposite side to the main surface Bs in the main surface Bs or the base B was demonstrated. However, the mode of the movable mirror 5 is not limited to this case. For example, a part of the mirror surface 51 a of the movable mirror 5 may be disposed inside the base B. This example will be described below.

  As shown in FIGS. 14, 15, and 16, here, the movable mirror 5 </ b> A is movable in that it has a support portion 56 </ b> A instead of the support portion 56 compared to the movable mirror 5 shown in FIG. 2. It is different from the mirror 5. The relationship between the support portion 56A and the elastic portion 52 is the same as that of the support portion 56. On the other hand, the support portion 56A is different from the support portion 56 in that the support portion 56A is not included.

  That is, here, the entire support portion 56 </ b> A is the locking portion 55. Thus, the support portion 56A has a symmetrical shape with respect to the center line CL of the mirror surface 51a in the Z-axis direction, and does not have a portion that extends relatively long on one side of the center line CL. For this reason, here, the support portion 56A supports the movable mirror 5A in a state where the entire movable mirror 5A passes through the mounting region 31 through the opening 31b. The mirror surface 51 a intersects the mounting area 31.

  Here, a part (central portion) of the locking portion 55 (support portion 56A) overlaps the mirror portion 51 along the Y-axis direction. The movable mirror 5 </ b> A is locked to the device layer 3 at the locking portion 55 and supported by the mounting region 31. Therefore, compared with the case where the movable mirror 5 is supported by the support part 56 (leg part 54) extending relatively long on one side of the center line CL, the deviation between the support point and the center of gravity is small, and stable mounting is achieved. It is feasible.

  Specifically, as an example, the support portion 56A supports the movable mirror 5A so that the center line CL of the mirror surface 51a in the Z-axis direction coincides with the center of the device layer 3 in the thickness direction. Therefore, a part (here, more than half) of the mirror surface 51a is located closer to the support layer 2 than the main surface Bs. On the other hand, here, the opening 31b is extended and opened so as to reach the end of the mounting region 31 on the side facing the mirror surface 51a. Therefore, even in this case, by controlling the optical path of the measurement light L0 toward the mirror surface 51a, the measurement light L0 can be prevented from interfering with the mounting region 31, and the entire mirror surface 51a can be used effectively. .

  As described above, in the movable mirror 5A, the support portion 56A (here, the entire movable mirror 5A) is formed symmetrically with respect to the center line CL of the mirror surface 51a in the Z-axis direction. The movable mirror 5A is supported by the support portion 56A at a position corresponding to the center line CL. Therefore, the support point and the center of gravity are substantially matched in the Z-axis direction, and more stable mounting can be realized.

  In the above embodiment, the fixed mirror 6 is mounted on the device layer 3, but the fixed mirror 6 may be mounted on the support layer 2 or the intermediate layer 4. In the above embodiment, the beam splitter 7 is mounted on the support layer 2, but the beam splitter 7 may be mounted on the device layer 3 or the intermediate layer 4. The beam splitter 7 is not limited to a cube type beam splitter, and may be a plate type beam splitter.

  Further, the optical module 1 may include a light emitting element that generates measurement light incident on the light incident portion 8 in addition to the light incident portion 8. Alternatively, the optical module 1 may include a light emitting element that generates measurement light incident on the interference optical system 10 instead of the light incident portion 8. The optical module 1 may include a light receiving element that detects measurement light (interference light) emitted from the light emitting unit 9 in addition to the light emitting unit 9. Alternatively, the optical module 1 may include a light receiving element that detects measurement light (interference light) emitted from the interference optical system 10 instead of the light emitting unit 9.

  In addition, the first through electrode electrically connected to each actuator region 33 and the second through electrode electrically connected to each of both end portions 34a of each elastic support region 34 are the support layer 2 and the intermediate layer 4. (Only the support layer 2 when the intermediate layer 4 does not exist) may be provided, and a voltage may be applied between the first through electrode and the second through electrode. The actuator that moves the mounting region 31 is not limited to an electrostatic actuator, and may be a piezoelectric actuator, an electromagnetic actuator, or the like. Moreover, the optical module 1 is not limited to what comprises FTIR, and may comprise another optical system.

  The description of the modified example will be continued. In the following, a modification is described using the movable mirrors 5 and 5A and the opening 31b, but the same modification can be made for the fixed mirror 6 and the opening 37a. As shown in FIG. 17, the movable mirror 5 may include a plurality of connecting portions (first connecting portions) 53 that connect the mirror portion 51 and the elastic portion 52 to each other.

  In the example shown in FIG. 17A, the movable mirror 5 has a pair of connecting portions 53. Here, the pair of connecting portions 53 are arranged at positions different from the pair of connecting portions 57. The pair of connecting portions 53 are distributed and arranged on both sides of the center line CL. In particular, here, the pair of connecting portions 53 are arranged at symmetrical positions with respect to the center line CL. Therefore, here, the elastic portion 52 and the entire movable mirror 5 are configured symmetrically with respect to a straight line connecting the pair of connecting portions 53.

  In the example shown in FIG. 17B, the movable mirror 5 has three connecting portions 53. The three connecting portions 53 are arranged at positions different from the pair of connecting portions 57. Here, one connecting portion 53 and two connecting portions 53 of the three connecting portions 53 are distributed and arranged on both sides of the center line CL. Similarly, in the example shown in FIG. 17C, the movable mirror 5 has four connecting portions 53. The four connecting portions are arranged at positions different from the pair of connecting portions 57. Here, the four connecting portions 53 are distributed and arranged on both sides of the center line CL.

  On the other hand, as shown in FIG. 18A, the movable mirror 5 can have a plurality of elastic portions 52. Here, the movable mirror 5 has a pair of elastic portions 52. The pair of elastic portions 52 are each formed in an annular plate shape and are arranged concentrically with each other. In other words, here, one elastic part 52 is provided so as to surround the mirror part 51, and another elastic part 52 is provided so as to surround the one elastic part 52 and the mirror part 51. Each of the elastic portions 52 forms an annular region CA.

  On the other hand, the elastic portion 52 is not limited to an annular plate shape, and may be an elliptical ring plate shape as shown in FIG. That is, the elastic portion 52 may be elliptical when viewed from the direction intersecting the mirror surface 51a (X-axis direction). Here, the pair of connecting portions 53 is disposed at a position corresponding to the major axis of the ellipse of the elastic portion 52. Further, the pair of connecting portions 57 are disposed at positions corresponding to the minor axis of the ellipse of the elastic portion 52.

  The description of the modified example of the elastic part 52 is continued. In the example illustrated in FIG. 19A, the movable mirror 5 includes a pair of rectangular plate-like elastic portions 52 and a pair of plate-like connection portions 58 that connect the elastic portions 52 to each other. The elastic parts 52 are arranged on both sides of the mirror part 51 so as to sandwich the mirror part 51 in the Y-axis direction. The elastic part 52 extends along the Z-axis direction substantially parallel to the support part 56. The connecting portions 58 are provided at both ends of the elastic portion 52 in the longitudinal direction, and connect the elastic portions 52 to each other. As a result, a rectangular annular region CA is formed by the elastic portion 52 and the connecting portion 58 here. Here, a single connecting portion 53 connects the elastic portion 52 and the mirror portion 51 to each other via the connecting portion 58.

  Also in the example shown in FIG. 19B, the movable mirror 5 has a pair of elastic portions 52. Here, the elastic parts 52 are arranged on both sides of the mirror part 51 so as to sandwich the mirror part 51 in the Z-axis direction. Each elastic part 52 is formed in a corrugated plate shape. That is, when viewed from the X-axis direction, the elastic portion 52 has a wave shape (here, a rectangular wave shape). Each of the elastic portions 52 is connected to the support portion 56 at both ends thereof. Thereby, here, a substantially rectangular annular region CA is formed by the elastic portion 52 and the support portion 56. Further, here, the connecting portion 53 connects the support portion 56 and the mirror portion 51 to each other. Thus, the mirror part 51 may be connected to the support part 56.

  Also in the example shown in FIG. 19C, the movable mirror 5 has a pair of elastic portions 52. Here, the elastic portions 52 are arranged on both sides of the mirror portion 51 so as to sandwich the mirror portion 51 in the Z-axis direction. The elastic portions 52 are each formed in a V-shaped plate shape. That is, when viewed from the X-axis direction, the elastic portion 52 is V-shaped. Each of the elastic portions 52 is connected to the support portion 56 at both ends thereof. Thereby, here, a substantially rectangular annular region CA is formed by the elastic portion 52 and the support portion 56. In this case as well, the connecting portion 53 connects the support portion 56 and the mirror portion 51 to each other.

  In the example shown in FIG. 20A, the elastic portion 52 includes a pair of semicircular portions arranged in opposite directions as viewed from the X-axis direction, and a pair of linear portions connecting the semicircular portions. And may be formed in an annular shape. Alternatively, as shown in FIG. 20B, the elastic portion 52 includes a pair of semicircular portions arranged in the same direction as viewed from the X-axis direction, and a pair of linear portions connecting the semicircular portions. And may be formed in an annular shape.

  As shown in FIG. 21, the elastic portion 52 may be formed in a shape in which a part of the ring is notched as viewed from the X-axis direction. In the example shown in FIG. 21A, the elastic portion 52 has a shape in which a pair of notches 52c are provided on both sides of the center line CL with respect to the ring. That is, here, the elastic portion 52 is composed of a pair of arcuate portions 52d that are separated from each other in the cutout portion 52c. The connecting portion 53 connects the elastic portion 52 and the mirror portion 51 to each other at each end of the arc-shaped portion 52d. Thereby, here, one circular region CA is formed by one arcuate portion 52d, a pair of connecting portions 53 connected to the one arcuate portion 52d, and the mirror portion 51.

  In the example shown in FIGS. 21B and 21C, the elastic portion 52 is configured as a single arc-shaped portion 52d by a single notch portion 52c. The connecting portion 53 connects the elastic portion 52 and the mirror portion 51 to each other at the end of the elastic portion 52. Thereby, here, the annular region CA is formed by the elastic portion 52, the pair of connecting portions 53, and the mirror portion 51. In addition, the connection part 53 has connected the support part 56 and the mirror part 51 via the notch part 52c here. That is, the mirror part 51 may be directly connected to the support part 56.

  In the example shown in FIG. 22A, the shape of the locking portion 55 is changed as compared with the embodiment shown in FIG. Here, the locking portion 55 extends from the leg portion 54 in the opposite direction to the connecting portion 57 (Z-axis negative direction) and terminates. That is, the locking portion 55 includes an end portion 55c. Moreover, the latching | locking part 55 contains the protrusion part 55d which protruded in the other latching | locking part 55 side from the position of the connection part 57 side rather than the edge part 55c. The protrusion 55d includes an inclined surface 55b. The end portion 55c and the inclined surface 55b face each other along the Z-axis direction.

  The end 55c contacts the peripheral edge of the opening 31b on the main surface Bs. On the other hand, the inclined surface 55b is in contact with the edge of the opening 31b opposite to the main surface Bs. Accordingly, the locking portion 55 is locked to the mounting area 31 so as to sandwich the mounting area 31 in the Z-axis direction. That is, also here, the support portion 56 includes a locking portion 55 that is bent so as to abut against a pair of edges of the opening 31b in a direction intersecting the main surface Bs. As a result, the movable mirror 5 is prevented from coming off the base B in the Z-axis direction.

  In the example shown in FIG. 22B, the locking portion 55 has an inclined surface 55a, and is bent and terminated so as to be folded back toward the connecting portion 57 at the tip side of the inclined surface 55a. That is, the locking portion 55 includes an end portion 55c. The end portion 55c and the inclined surface 55a face each other along the Z-axis direction.

  The end portion 55c contacts the peripheral edge portion of the opening 31b on the surface opposite to the main surface Bs. On the other hand, the inclined surface 55a is in contact with the edge of the opening 31b on the main surface Bs side. Accordingly, the locking portion 55 is locked to the mounting area 31 so as to sandwich the mounting area 31 in the Z-axis direction. That is, also here, the support portion 56 includes a locking portion 55 that is bent so as to abut against a pair of edges of the opening 31b in a direction intersecting the main surface Bs. As a result, the movable mirror 5 is prevented from coming off the base B in the Z-axis direction.

  Subsequently, a modification of the movable mirror 5A shown in FIG. 15 will be described. The movable mirror 5A shown in FIG. 23A further includes a pair of handle portions 59. In addition, here, the elastic portion 52 includes a semicircular plate spring 52a and a plate spring 52b. The leaf springs 52a and 52b are disposed in opposite directions and are connected to each other by a support portion 56A (locking portion 55). Thereby, here, a substantially elliptical annular region CA is formed by the elastic portion 52 and the support portion 56A.

  The handle part 59 is disposed inside the annular area CA. The handle portion 59 has a U shape, and both ends thereof are connected to the support portion 56A. The pair of support portions 56A and the pair of handle portions 59 are arranged in a line on the center line CL. The connecting portion 53 is connected to one handle portion 59. Therefore, the connecting portion 53 connects the support portion 56 </ b> A and the mirror portion 51 to each other via the handle portion 59. In the movable mirror 5A, for example, by applying a force to the handle portion 59 so that the handle portions 59 approach each other while holding the pair of handle portions 59, the elastic portion 52 is compressed along the Y-axis direction. Can be elastically deformed.

  As shown in FIG. 23B, the handle portion 59 may be provided on the elastic portion 52. Here, the handle part 59 protrudes outside the annular area CA. The pair of handle portions 59 are distributed and arranged on both sides of the center line CL. In particular, here, the pair of handle portions 59 are disposed at positions symmetrical with respect to the center line CL. In the movable mirror 5A, for example, the elastic portion 52 is compressed along the Y-axis direction by applying a force to the handle portions 59 so as to keep the handle portions 59 away from each other while the pair of handle portions 59 are gripped. Can be elastically deformed.

  As shown in FIG. 23 (c), when the pair of support portions 56A and the pair of handle portions 59 are arranged in a line along the center line CL, they protrude so as to protrude outside the annular region CA. The handle portion 59 may be connected to the support portion 56A.

  Subsequently, a modification of the opening 31b shown in FIG. 4 will be described. As shown in FIG. 24A, the shape of the opening 31b when viewed from the Z-axis direction may be a triangle. In this case, the inner surface of the opening 31b includes a pair of inclined surfaces SL and a reference surface SR. Here, the one ends SLa of the inclined surfaces SL are connected to each other. Also in this case, the movable mirror 5 can be positioned in both the X-axis direction and the Y-axis direction by inscribed the locking portion 55 at the corner defined by the inclined surface SL and the reference surface SR.

  In the example shown in FIG. 24B, the shape of the opening 31b when viewed from the Z-axis direction is a hexagon. In this case, the inner surface of the opening 31b includes a pair of inclined surfaces SL and a pair of inclined surfaces SK inclined to the opposite side of the inclined surface SL. The pair of inclined surfaces SK are inclined so that the mutual distance increases from one end Ska toward the other end SKb. Here, the other end SLb of the inclined surface SL and the other end SKb of the inclined surface SK are connected to each other to form one corner. Also in this case, the movable mirror 5 can be positioned in both the X-axis direction and the Y-axis direction by the engagement portion 55 being inscribed at the corner defined by the inclined surface SL and the inclined surface SK. Here, when viewed from the Z-axis direction, one locking portion 55 contacts the inner surface of the opening 31b at two points.

  As shown in (c) of FIG. 24, the inclined surface SL may be a curved surface. In this case, the pair of inclined surfaces SL are inclined and curved so that the distance increases from one end SLa to the other end SLb. Here, when viewed from the Z-axis direction, the inclined surface SL is curved such that the inclination of the tangent to the inclined surface SL with respect to the X-axis gradually increases from one end SLa to the other end SLb. The inclined surface SL is curved so as to be convex toward the inside of the opening 31b. Even in this case, the movable mirror 5 can be positioned in both the X-axis direction and the Y-axis direction by inscribed the engaging portion 55 at the corner defined by the inclined surface SL and the reference surface SR. is there.

  In the example shown in FIG. 25A, both the inclined surface SL and the inclined surface SK are curved surfaces that are convex toward the inside of the opening 31b. The other end SLb of the inclined surface SL and the other end SKb of the inclined surface SK are connected to each other via a connection surface extending along the X-axis direction. Also in this case, the movable mirror 5 can be positioned in both the X-axis direction and the Y-axis direction by the engagement portion 55 being inscribed at the corner defined by the inclined surface SL and the inclined surface SK.

  In the example shown in FIG. 25B, it is divided into two parts 31p when viewed from the Z-axis direction. Each of the two portions 31p has an inclined surface SL and a reference surface SR. That is, here, the reference plane SR is also divided into two parts. However, as viewed from the Z-axis direction, the reference surface SR as a whole is connected to the other end SLb of the inclined surface SL of the one portion 31p and the other end SLb of the inclined surface SL of the other portion 31p. It extends along. In this case, one locking portion 55 is inserted into one portion 31p of the opening 31b. The engaging portion 55 is inscribed in the corner defined by the inclined surface SL and the reference surface SR, whereby the movable mirror 5 can be positioned in both the X-axis direction and the Y-axis direction.

  Also in the example shown in (c) of FIG. 25, it is divided into two portions 31p when viewed from the Z-axis direction. Each of the two portions 31p has an inclined surface SL and an inclined surface SK. Also in this case, the movable mirror 5 can be positioned in both the X-axis direction and the Y-axis direction by the engagement portion 55 being inscribed at the corner defined by the inclined surface SL and the inclined surface SK.

  In the example shown in FIG. 26A, the shape of the opening 31b when viewed from the Z-axis direction is a rhombus. Here, the inner surface of the opening 31b may be constituted by the inclined surface SL and the inclined surface SK. That is, here, in addition to the inclined surface SL and the inclined surface SK being connected to each other, the one ends SLa of the inclined surfaces SL are connected to each other, and the one ends Ska of the inclined surfaces SK are connected to each other. . Also in this case, the movable mirror 5 can be positioned in both the X-axis direction and the Y-axis direction by the engagement portion 55 being inscribed at the corner defined by the inclined surface SL and the inclined surface SK.

  Furthermore, in the example shown in FIG. 26B, the other end SLb of the inclined surface SL and the other end SKb of the inclined surface SK are connected to each other via a connection surface extending along the X-axis direction. Further, the one ends SLa of the inclined surfaces SL are connected to each other, and the one ends Ska of the inclined surfaces SK are connected to each other. Also in this case, the movable mirror 5 can be positioned in both the X-axis direction and the Y-axis direction by the engagement portion 55 being inscribed at the corner defined by the inclined surface SL and the inclined surface SK.

  Here, in the above, by elastically deforming the elastic portion 52 along the direction in which the support portion 56 opposes, the interval between the support portions 56 is reduced, and then the locking portion 55 is moved to the opening 31b. The case of inserting was illustrated. However, it is possible to adopt a modification in which the locking portion 55 is inserted into the opening 31b after the interval between the support portions 56 is enlarged.

  That is, the movable mirror 5 and the opening 31b can be modified as shown in FIGS. In the example of FIG. 27, the support part 56 includes a leg part 54 and a locking part 55, but the bending direction of the locking part 55 is different from the example of FIG. The locking portion 55 is bent so as to be convex on the opposite side in the opposing direction between the pair of support portions 56. And the latching | locking part 55 contains the inclined surface 55a and the inclined surface 55b as a surface (inner surface) mutually opposed between the corresponding support parts 56. FIG.

  The inclined surfaces 55a are inclined so as to be separated from each other in a direction away from the connecting portion 57 (Z-axis negative direction). The inclined surfaces 55b are inclined so as to approach each other in the negative Z-axis direction. The absolute value of the tilt angle with respect to each Z axis is the same as in the above example. Here, a handle portion 59 is provided for each of the support portions 56. The handle part 59 is disposed so as to sandwich the mirror part 51 and the elastic part 52 in the Y-axis direction. The handle part 59 and the connecting part 57 are arranged in a line on the center line CL.

  In the example of FIG. 27A, the handle portion 59 is formed in a U shape, and a hole portion 59 s is formed between the handle portion 59 and the support portion 56. Therefore, for example, by inserting an arm into the hole portion 59s, a force can be applied to the handle portion 59 so as to increase the interval between the support portions 56. In the example of FIG. 27B, the handle portion 59 is formed in a linear shape. Therefore, by gripping the handle portion 59, a force can be applied to the handle portion 59 so as to increase the interval between the support portions 56. In these cases, the elastic part 52 is elastically deformed so as to be extended in the Y-axis direction.

  Correspondingly, the opening 31b can be deformed as shown in FIG. In the example of FIG. 28A, the opening 31b is divided into two triangular portions 31p. In the movable mirror 5 shown in FIG. 27, when a part of the elastic deformation of the elastic portion 52 is released in a state where the locking portion 55 is inserted into the opening 31b, the locking portions 55 are displaced so as to approach each other. In order to perform self-alignment using this displacement, in each portion 31p of the opening 31b, an inclined surface SL is formed as a surface on the center side of the mounting region 31 in the Y-axis direction.

  Inclined surface SL includes one end SLa and the other end SLb. The one end SLa and the other end SLb are both ends of the inclined surface SL when viewed from the Z-axis direction. The pair of inclined surfaces SL are inclined (for example, with respect to the X axis) such that the distance from one end SLa toward the other end SLb decreases. The reference surface SR of each portion 31p extends along a reference line BL that connects the other end SLb of one inclined surface SL and the other end SLb of the other inclined surface SL, as viewed from the Z-axis direction. Yes.

  Therefore, when the pair of locking portions 55 are disposed in the opening 31b, the locking portions 55 slide on the inclined surface SL toward the reference surface SR by the X-axis direction component of the reaction force from the inclined surface SL. The abutting against the reference surface SR while contacting the inclined surface SL. Thereby, the latching | locking part 55 is inscribed in the corner | angular part prescribed | regulated by the inclined surface SL and the reference plane SR, and is positioned in both the X-axis direction and the Y-axis direction (self-aligned by elastic force).

  In the example of FIG. 28B, the opening 31b is divided into two rhombus portions 31p. In each portion 31p of the opening 31b, an inclined surface SL and an inclined surface SK are formed as a pair of surfaces on the center side of the mounting region 31 in the Y-axis direction. When attention is paid to one portion 31p, the inclined surface SL and the inclined surface SL are inclined to the opposite side. The inclined surfaces SK are inclined so that the distance from one end Ska toward the other end SKb decreases. Here, the other end SLb of the inclined surface SL and the other end SKb of the inclined surface SK are connected to each other to form one corner. Also in this case, the engaging portion 55 is inscribed in the corner portion defined by the inclined surface SL and the inclined surface SK, thereby positioning in both the X-axis direction and the Y-axis direction (self-alignment is performed by elastic force). )

  Although various modifications of the movable mirrors 5 and 5A and the opening 31b have been described above, modifications of the movable mirrors 5 and 5A and the opening 31b are not limited to those described above. For example, the movable mirrors 5, 5 </ b> A and the opening 31 b can be another modified example configured by exchanging arbitrary portions of the above-described modified examples. The same applies to the fixed mirror 6 and the opening 37a.

  Furthermore, in the said embodiment, the movable mirror and the fixed mirror were illustrated as an optical element mounted in the base B. In this example, the optical surface is a mirror surface. However, the optical element to be mounted is not limited to a mirror, and may be an arbitrary element such as a grating or an optical filter.

  Moreover, the shape of the mirror parts 51 and 61 and the mirror surfaces 51a and 61a is not limited to a circle, and may be a rectangle or other shapes.

  DESCRIPTION OF SYMBOLS 1 ... Optical module, 2 ... Support layer, 3 ... Device layer, 4 ... Intermediate layer, 5, 5A ... Movable mirror (optical element), 6 ... Fixed mirror (optical element), 7 ... Beam splitter, 8 ... Light incident part , 9 ... Light emitting part, 10 ... Interference optical system, 31, 37 ... Mounting area, 31b, 37a ... Opening, 32 ... Drive area, 51, 61 ... Mirror part (optical part), 51a, 61a ... Mirror surface (optical) Surface), 52, 62 ... elastic portion, 53, 63 ... connecting portion (first connecting portion), 54, 64 ... leg portion, 55, 65 ... locking portion, 55a, 55b, 65a, 65b ... inclined surface, 56 , 66 ... support part, 57, 67 ... connection part (second connection part), SL ... inclined surface, SLa ... one end, SLb ... other end, SR ... reference plane, BL ... reference line, CA ... annular region.

Claims (9)

An optical module comprising an optical element and a base on which the optical element is mounted,
The optical element includes an optical part having an optical surface, an elastic part provided around the optical part so as to form an annular region, and the optical part sandwiched in a first direction along the optical surface. A pair of support portions provided with elastic force according to the elastic deformation of the elastic portion and having a mutual distance variable.
The base has a main surface and a mounting region provided with an opening communicating with the main surface;
The support portion is inserted into the opening in a state where the elastic force of the elastic portion is applied,
The optical element is supported by the mounting region by a reaction force of the elastic force applied from the inner surface of the opening to the support portion in a state where the optical surface intersects the main surface.
Optical module. The base includes a support layer, and a device layer provided on the support layer and including the main surface and the mounting region,
The opening passes through the device layer in a direction intersecting the main surface,
The support portion includes a locking portion that is bent so as to contact a pair of edges of the opening in a direction intersecting the main surface.
The optical module according to claim 1. The inner surface of the opening has a pair of inclined surfaces inclined so that the distance from one end to the other end increases as viewed from the direction intersecting the main surface, and the other end and the other of the one inclined surface A reference surface extending along a reference line connecting the other end of the inclined surface,
The optical module according to claim 1 or 2. The optical element includes a first connecting part that connects the optical part and the elastic part to each other.
The optical module as described in any one of Claims 1-3. The elastic part is formed in an annular shape so as to surround the optical part when viewed from the second direction intersecting the optical surface, thereby forming the annular region.
The optical module as described in any one of Claims 1-4. The support part extends beyond the optical surface from the second connection part along a third direction that extends along the optical surface and intersects the first direction, and a second connection part connected to the elastic part. And a leg inserted into the opening,
The optical module as described in any one of Claims 1-5. A fixed mirror mounted on the support layer, the device layer, or an intermediate layer;
A beam splitter mounted on the support layer, the device layer, or the intermediate layer, and
The optical element is a movable mirror including the optical surface which is a mirror surface;
The device layer has a drive region connected to the mounting region,
The movable mirror, the fixed mirror, and the beam splitter are arranged to constitute an interference optical system,
The optical module according to claim 2. The base has the intermediate layer provided between the support layer and the device layer,
The support layer is a first silicon layer of an SOI substrate;
The device layer is a second silicon layer of the SOI substrate;
The intermediate layer is an insulating layer of the SOI substrate.
The optical module according to claim 7. A light incident portion arranged to allow measurement light to be incident on the interference optical system from the outside;
A light emitting portion arranged to emit the measurement light to the outside from the interference optical system;
Comprising
The optical module according to claim 7 or 8.

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