JP2018148177A - Cutting blade and mount flange - Google Patents

Abstract

PROBLEM TO BE SOLVED: To save the cleaning liquid for cleaning and improve the efficiency of cutting. A cutting blade that is fixed to the tip of a spindle of a cutting device and cuts a workpiece in a state where a cutting fluid is supplied, the circular base having a hub portion formed on one surface side, and the circular base. A cutting blade comprising: a cutting blade formed on an outer peripheral portion of the base opposite to the one surface thereof; and a cutting fluid return portion formed in the circumferential direction on the circular base. Alternatively, it is a mount flange that fixes the cutting blade that cuts the workpiece with the cutting fluid supplied to the tip of the spindle of the cutting device, and clamps and fixes the cutting blade together with the flange portion of the mount flange body. A mount flange comprising a fixing nut, and a cutting fluid return portion formed in the flange portion in the circumferential direction on the back side of the support surface. [Selection diagram] Fig. 3

Description

  The present invention relates to a cutting blade that cuts a workpiece while being supplied with a cutting fluid, and a mounting flange that fixes the cutting blade to the tip of a spindle.

  2. Description of the Related Art A cutting apparatus that precisely cuts a workpiece such as a semiconductor wafer, a package substrate, a ceramic substrate, or a glass substrate with an annular cutting blade is known. In the cutting apparatus, the cutting blade is rotatably supported by the spindle. Then, the cutting blade is rotated by rotating the spindle, and the rotating cutting blade is cut into the workpiece to cut the workpiece.

  On the surface of the workpiece, for example, devices such as ICs and LSIs are formed in each of a plurality of regions partitioned by division lines set in a lattice shape. When the workpiece is cut along the planned division line and the workpiece is divided, a plurality of chips having devices (hereinafter referred to as device chips) are formed.

  In a cutting apparatus used for processing a workpiece, a cutting fluid is supplied to the cutting blade when the cutting blade is cut into the workpiece. The cutting blade cuts the workpiece while being supplied with the cutting fluid.

  In cutting of a workpiece, contamination such as cutting waste is generated, and if this adheres to the workpiece, various defects are caused. For example, adhesion to a bonding pad of a workpiece may cause a bonding failure. In the case where the workpiece is an image sensor such as a CMOS sensor or a CCD sensor, device contamination occurs when contamination adheres to the sensor.

  When the workpiece is dried after the cutting process, contamination adhered to the workpiece is fixed during the cutting process, and it is difficult to remove the contamination even after cleaning. Therefore, a cutting apparatus for supplying a cleaning liquid to a workpiece being cut has been proposed.

JP 2006-231474 A JP-A-6-97278

  However, in these cutting apparatuses, in addition to the cutting fluid supplied for cutting the workpiece, it is necessary to supply a cleaning fluid for cleaning the workpiece. Therefore, a new problem arises that the amount of liquid supplied to the workpiece increases and the processing cost increases.

  The present invention has been made in view of such a problem, and an object of the present invention is to provide a cutting blade and a mount flange that suppress the amount of water used and prevent contamination from sticking.

  According to one aspect of the present invention, there is provided a cutting blade that is fixed to the tip of a spindle of a cutting device and that cuts a workpiece while being supplied with a cutting fluid. A circular base having a hub portion formed on the side, and a cutting blade formed on an outer peripheral portion of the circular base opposite to the one surface. The circular base has a circumferential direction. Thus, a cutting blade is provided in which a cutting fluid return portion is formed.

  According to another aspect of the present invention, there is provided a mount flange for fixing a cutting blade for cutting a workpiece in a state where cutting fluid is supplied to a tip of a spindle of a cutting device, the fitting of the cutting blade A mount flange body having a boss portion inserted through the hole and having a male screw formed at a tip thereof, and a flange portion projecting radially from the boss portion and having a support surface for supporting the cutting blade; and the boss portion And a fixing nut that clamps and fixes the cutting blade together with the flange portion, and the flange portion has a circumferential direction on the back side of the support surface. There is provided a mount flange characterized in that a cutting fluid return portion is formed.

  In another aspect of the present invention, the cutting blade is disk-shaped, and the mount flange further includes a front flange having a support surface for supporting the cutting blade together with the mount flange body, The fixing nut fixes the front flange to sandwich the cutting blade together with the flange portion through the front flange, and the cutting flange returns to the front flange in the circumferential direction on the back side of the support surface. May be formed.

  While cutting with the cutting blade is being performed, cutting fluid is supplied to the cutting blade, but most of the supplied cutting fluid is transferred from the cutting blade of the cutting blade to the outside via the base and the mount flange. Scatter.

  Therefore, a cutting fluid turning portion is formed in the cutting blade and the mount flange according to one aspect of the present invention in order to use the cutting fluid to be scattered to the outside for cleaning the workpiece. The cutting fluid turning portion is formed in a path until the cutting fluid supplied to the cutting blade is transmitted to the outside, and suppresses the transmission of the cutting fluid that has reached the cutting fluid turning portion to the outside.

  The cutting fluid that reaches the cutting fluid turning-back portion loses momentum and falls onto the workpiece. Since the cutting fluid falling on the workpiece is washed away from the contamination on the workpiece, the cleaning fluid supplied to the workpiece for cleaning can be saved. Since the workpiece can be cleaned using the cutting fluid scattered outside in the conventional configuration, the cutting efficiency is very good.

  Therefore, according to the present invention, there are provided a cutting blade and a mount flange that suppress the amount of water to be used and prevent contamination from sticking.

It is a perspective view which shows a cutting device typically. It is a disassembled perspective view which shows a cutting unit typically. FIG. 3A is a side view schematically showing a cutting blade and a mount flange, and FIG. 3B is a top view schematically showing an enlarged state of the flow of the cutting fluid. It is a disassembled perspective view which shows a cutting unit typically. FIG. 5A is a side view schematically showing the cutting blade and the mount flange, and FIG. 5B is a top view schematically showing an enlarged state of the flow of the cutting fluid. It is a side view which shows a cutting process typically. FIG. 7A is a side view schematically showing the cutting blade and the mount flange, and FIG. 7B is a top view schematically showing an enlarged state of the flow of the cutting fluid. It is a side view which shows a blade cover typically.

  First, a cutting apparatus using the cutting blade and the mount flange according to the present embodiment will be described with reference to FIG. FIG. 1 is a perspective view schematically showing an example of a cutting device. As shown in FIG. 1, the cutting device 2 includes a base 4 that supports each component. A holding table (holding means) 6 is provided on the upper surface of the base 4, and a cutting unit (cutting means) 8 is provided above the holding table 6.

  Below the holding table 6, an X-axis moving mechanism (moving means) 10 is provided. The X-axis moving mechanism 10 includes a pair of X-axis guide rails 12 provided on the upper surface of the base 4 and parallel to the X-axis direction. An X-axis moving table 14 is slidably disposed on the X-axis guide rail 12.

  A nut portion (not shown) is provided on the back surface side (lower surface side) of the X-axis moving table 14, and an X-axis ball screw 16 parallel to the X-axis guide rail 12 is screwed to the nut portion. An X-axis pulse motor 18 is connected to one end of the X-axis ball screw 16. When the X-axis ball screw 16 is rotated by the X-axis pulse motor 18, the X-axis moving table 14 moves in the X-axis direction along the X-axis guide rail 12.

  A support base 20 is provided on the surface side (upper surface side) of the X-axis moving table 14. A holding table 6 is arranged in the center of the support base 20. Around the holding table 6 are provided four clamps 22 for holding and fixing an annular frame (not shown) for holding the workpiece from four directions.

  The holding table 6 is connected to a rotation mechanism (not shown) provided below the support base 20 and is rotatable around a rotation axis parallel to the Z axis. A porous member is disposed on the surface of the holding table 6, and the porous member is connected to a suction source (not shown) through a suction path (not shown) formed in the holding table 6. The upper surface of the holding table is a holding surface 6a. When a negative pressure is applied from the suction source to the workpiece placed on the holding surface 6a, the workpiece is sucked and held on the holding table 6. .

  The workpiece is, for example, a semiconductor wafer such as silicon or sapphire, or a substrate such as glass or quartz. On the surface of the workpiece, for example, devices such as ICs and LSIs are formed in each of a plurality of regions partitioned by division lines set in a lattice shape. When the workpiece is cut along the division line, and the workpiece is divided, a device chip is formed.

  Adjacent to the X-axis movement mechanism 10, a Y-axis movement mechanism (index feed means) 24 for moving the cutting unit 8 in the index feed direction (Y-axis direction) is provided. The Y-axis moving mechanism 24 includes a pair of Y-axis guide rails 26 provided on the upper surface of the base 4 and parallel to the Y-axis direction.

  A Y-axis moving table 28 is slidably installed on the Y-axis guide rail 26. The Y-axis moving table 28 includes a base portion 28a that is in contact with the Y-axis guide rail 26, and a wall portion 28b that is erected with respect to the base portion 28a. A nut portion (not shown) is provided on the back side (lower surface side) of the base portion 28a of the Y-axis moving table 28, and a Y-axis ball screw 30 parallel to the Y-axis guide rail 26 is screwed to the nut portion. Combined.

  A Y-axis pulse motor 32 is connected to one end of the Y-axis ball screw 30. When the Y-axis ball motor 30 is rotated by the Y-axis pulse motor 32, the Y-axis movement table 28 moves in the Y-axis direction along the Y-axis guide rail 26.

  A Z-axis moving mechanism 34 that moves the blade unit 8 in the vertical direction (Z-axis direction) is provided on the wall 28 b of the Y-axis moving table 28. The Z-axis moving mechanism 34 includes a pair of Z-axis guide rails 36 provided on the side surface of the wall portion 28b and parallel to the Z-axis direction.

  A Z-axis moving table 38 is slidably installed on the Z-axis guide rail 36. A nut portion (not shown) is provided on the back surface side (wall portion 28b side) of the Z-axis moving table 38, and a Z-axis ball screw (not shown) parallel to the Z-axis guide rail 36 is screwed to the nut portion. Combined.

  A Z-axis pulse motor 40 is connected to one end of the Z-axis ball screw. When the Z-axis ball screw is rotated by the Z-axis pulse motor 40, the Z-axis moving table 38 moves in the Z-axis direction along the Z-axis guide rail 36. The Z-axis moving table 38 supports a cutting unit 8 that cuts a workpiece.

  The cutting unit 8 includes a spindle that is rotatably supported and a cutting blade 42 that is rotated by the spindle. The cutting blade 42 is formed by mixing abrasive grains such as diamond with a bonding material (binder) such as metal or resin. When the rotating cutting blade 42 is cut into the workpiece held on the holding table 6, the workpiece can be cut.

  The cutting unit 8 further includes a blade cover 44 that covers the cutting blade 42. The blade cover 44 will be described in detail with reference to FIG. FIG. 6 shows a side view of the cutting unit 8.

  The blade cover 44 includes a cutting fluid supply nozzle 44a in which an ejection port adjacent to both side surfaces of the cutting blade 42 and facing the cutting blade 42 is formed, and a cutting fluid ejection port 44b adjacent in the outer circumferential direction of the cutting blade 42. Prepare. Each of the cutting fluid supply nozzle 44a and the cutting fluid outlet 44b is connected to a cutting fluid supply source (not shown) through cutting fluid feed pipes 44c and 44d. When cutting the workpiece, the cutting fluid is supplied to the cutting blade 42 from the ejection port of the cutting fluid supply nozzle 44a and the cutting fluid ejection port 44b. The cutting fluid is pure water, for example.

  Furthermore, a spray nozzle (not shown) facing the workpiece is provided on the lower surface of the blade cover 44. When cutting the workpiece, a cleaning liquid is ejected from the spray nozzle onto the workpiece.

  As shown in FIG. 1, the cutting unit 8 has an imaging device 46 in front of the cutting blade 42 in the cutting progress direction (machining feed direction) in which cutting progresses. The imaging device 46 can image the surface of the workpiece, and is used when the cutting blade 42 adjusts the position of the cutting blade 42 so as to cut the planned cutting line of the workpiece.

  Next, the cutting unit will be described in detail. FIG. 2 is an exploded perspective view schematically showing an example of the cutting unit 8a. A hub type cutting blade 42a is attached to the cutting unit 8a shown in FIG. The cutting blade 42 a includes a circular base 48 a and a cutting blade 50. The circular base 48a has a fitting hole 48c at the center and a hub portion on one side. The cutting blade 50 is formed in the outer peripheral part on the surface side opposite to the one surface of the circular base 48a.

  The cutting unit 8 a includes a spindle housing 52. The spindle housing 52 accommodates a spindle 54 supported by an air bearing so as to be rotatable around the Y axis. A screw hole is formed at the tip of the spindle 54, and the screw is cut in a direction to be tightened by rotating in the rotation direction of the spindle 54 at the time of cutting. A mount flange 56 a is attached to the tip of the spindle 54.

  The mount flange 56a includes a mount flange main body 58a and a fixing nut 60 that sandwiches and fixes the cutting blade 42a between the mount flange main body 58a. The mount flange main body 58a includes a boss portion 62a that is inserted into the fitting hole 48c of the cutting blade 42a, and a flange portion 64a that protrudes in the radial direction from the boss portion 62a and has a support surface that supports the cutting blade 42a. Prepare. A male screw is formed at the tip of the boss 62a. The fixing nut 60 is formed with an internal thread that is screwed with the external thread of the boss portion 62a.

  The boss portion 62a and the flange portion 64a are arranged so that their central axes overlap each other. That is, an axis that connects the centers of the two bottom surfaces of the cylindrical boss portion 62a and an axis that connects the centers of the two circular surfaces of the disk-shaped flange portion 64a form a single straight line. Overlap.

  A spindle mounting hole 70a is formed inside the mount flange 56a. The spindle mounting hole 70a has a shape corresponding to the tip of the spindle 54 so that the center axis and the rotation center of the spindle 54 coincide with each other when the spindle 54 is mounted in the spindle mounting hole 70a. Formed. The spindle mounting hole 70a has an opening on the boss portion 62a side, and the bolt 72 can be screwed into the screw hole at the tip of the spindle 54 inserted into the spindle mounting hole 70a.

  A cutting blade 42a mounted on the spindle 54 using the mount flange 56a is shown in FIG. FIG. 3A is a side view schematically showing the cutting blade 42a and the mount flange 56a. In the mount flange 56a according to this embodiment, a cutting fluid return portion 66a is formed in the flange portion 64a in the circumferential direction on the back side of the support surface that supports the cutting blade 42a. Further, a cutting fluid return portion 66b is formed in the circumferential direction in the circular base 48a of the cutting blade 42a according to the present embodiment.

  The function of the cutting fluid turning-back portions 66a and 66b will be described with reference to FIG. FIG. 3B is a top view schematically showing an enlarged view of the flow of the cutting fluid supplied to the cutting blade 42 a from the cutting fluid ejection port 44 b of the blade cover 44.

  As shown in FIG. 3B, a part of the supplied cutting fluid 68 is supplied to the cutting blade 50 of the cutting blade 42a, and then reaches the flange portion 64a of the mount flange 56a through the cutting blade 42a. Here, a cutting fluid turning portion 66a is formed in the flange portion 64a. Therefore, since the cutting fluid 68 is turned back by the cutting fluid turning-back portion 66a, the cutting fluid 68 is hardly transmitted to the outside more than that, and loses momentum and falls.

  Further, as shown in FIG. 3B, a part of the supplied cutting fluid 68 is supplied to the cutting blade 50 of the cutting blade 42a and then reaches the circular base 48a of the cutting blade 42a. Here, the cutting base 66b is formed on the circular base 48a. Therefore, since the cutting fluid 68 is turned back by the cutting fluid turning-back portion 66a, the cutting fluid 68 is hardly transmitted to the outside more than that, and loses momentum and falls.

  The cutting fluid 68 that has fallen after losing momentum reaches the workpiece held on the holding table 6. Then, the cutting fluid 68 cleans the workpiece and rinses away the contamination. Therefore, the cleaning liquid supplied to the workpiece for cleaning can be saved. Since the workpiece can be cleaned using the cutting fluid that has been scattered, the cutting efficiency is very good.

  For example, when the cutting fluid turning portion is not formed on the mount flange and the cutting fluid turning portion is not formed on the circular base of the cutting blade, the cutting fluid is scattered outside the cutting unit without losing momentum. A conventional cutting blade and mount flange will be described with reference to FIG. FIG. 7A is a side view schematically showing the cutting blade and the mount flange, and FIG. 7B is a top view schematically showing an enlarged state of the flow of the cutting fluid.

  The cutting fluid turning-back portion is not formed on the conventional cutting blade 42b and the conventional mount flange 56b shown in FIG. Therefore, as shown in FIG. 7B, after a part of the cutting fluid 68 supplied to the cutting blade 42b from the cutting fluid outlet 44b is supplied to the cutting blade 50 of the cutting blade 42b, the cutting blade 42b, the mount It travels outside through the flange 56b and the spindle 54. Further, another part of the cutting fluid 68 is scattered outside through the cutting blade 42b, the circular base 48b, and the fixing nut 60.

  The cutting fluid scattered outside does not wash the workpiece and does not wash away contamination. Therefore, when the conventional cutting blade 42b and the conventional mount flange 56b are used, a large amount of cleaning liquid has to be supplied to the workpiece in order to wash away the contamination generated by the cutting process. On the other hand, the cutting blade according to the present embodiment and the mount flange according to the present embodiment have a cutting fluid turning portion, and the workpiece can be cleaned using the cutting fluid that has been scattered in the past. The cutting efficiency is very good.

  Another configuration example of the cutting blade and the mount flange according to the present embodiment will be described with reference to FIGS. 4 and 5. In addition, description is abbreviate | omitted about the structure similar to the cutting unit 8a. A disc-shaped cutting blade 42c having a fitting hole formed in the center is attached to the cutting unit 8c shown in FIGS. The cutting blade 42c is, for example, a washer type or kimberley type cutting blade. The outer periphery of the cutting blade 42c is a cutting blade.

  In the cutting unit 8 c, a mount flange 56 c is attached to the tip of the spindle 54. The mount flange 56c includes a mount flange main body 58c, a front flange 74 having a support surface for supporting the cutting blade 42c between the mount flange main body 58c, and a fixing nut 60 for fixing the front flange 74. The fixing nut 60 supports the cutting blade 42 c together with the flange portion 64 c of the mount flange main body 58 c through the front flange 74 by fixing the front flange 74.

  A cutting blade 42c attached to the spindle 54 using the mount flange 56c is shown in FIG. FIG. 5A is a side view schematically showing the cutting blade 42c and the mount flange 56c. In the mount flange 56c according to the present embodiment, a cutting fluid return portion 66c is formed in the front flange 74 in the circumferential direction on the back side of the support surface that supports the cutting blade 42c.

  The function of the cutting fluid turning-back portion 66c will be described with reference to FIG. FIG. 5B is a top view schematically showing an enlarged view of the flow of the cutting fluid 68 supplied to the cutting blade 42 c from the cutting fluid ejection port 44 b of the blade cover 44.

  As shown in FIG. 5B, a part of the supplied cutting fluid 68 reaches the front flange 74 of the mount flange 56c after being supplied to the cutting blade 42c. Here, the front flange 74 is formed with a cutting fluid turning portion 66c. Therefore, since the cutting fluid 68 is turned back by the cutting fluid turning-back portion 66c, the cutting fluid 68 is less likely to be transmitted to the outside, and loses momentum and falls onto the work piece to clean the work piece and remove contamination. Therefore, the cleaning liquid supplied to the workpiece can be saved.

  In the cutting blade and the mount flange according to this embodiment, the formed cutting fluid turning portions 66a, 66b, 66c are, for example, annular grooves having a depth of 2 mm and a width of 2 mm. However, the cutting fluid turning portions 66a, 66b, and 66c are not limited to this.

  Next, cutting of a workpiece using a cutting unit equipped with a cutting blade or a mount flange according to the present embodiment will be described. The cutting process is performed by the cutting device 2. The cutting method will be described with reference to FIG. FIG. 6 is a partial cross-sectional view for schematically explaining the cutting method.

  The workpiece 1 is, for example, a disk-shaped semiconductor wafer attached to a tape 5 stretched on the frame 3. First, the workpiece 1 is placed on the holding surface 6 a of the holding table 6 via the tape 5, and the frame 5 is fixed by the clamp 22. Next, the suction source inside the holding table 6 is operated, the workpiece 1 is sucked through the suction path inside the holding table 6, and the workpiece 1 is fixed on the holding table 6.

  Next, the X-axis moving mechanism (moving means) 10 and the Y-axis moving mechanism (indexing feeding means) 24 are arranged so that the cutting blade 42 is positioned outside and above one end of the planned cutting line of the workpiece 1. Operate to position the cutting unit 8 at a predetermined position. Then, the cutting blade 42 starts to rotate, and the cutting fluid is supplied to the cutting blade 42. The cutting fluid is supplied to the cutting blade 42 from the cutting fluid supply nozzle 44a and the cutting fluid outlet 44b.

  Thereafter, the cutting unit 8 is lowered to position the cutting blade 42 at a predetermined height position. Then, the X-axis moving mechanism of the cutting device 2 is operated to process and feed the workpiece 1. Then, when the rotating cutting blade 42 comes into contact with the workpiece 1, cutting is started.

  At this time, the cutting fluid supplied from the cutting fluid outlet 44b to the cutting blade 42 travels through the cutting blade 42 and the mount flange, but reaches the cutting fluid turning portion formed on the circular base of the cutting blade and the mount flange. The cutting fluid is cut back and loses momentum. Then, the cutting fluid falls toward the workpiece 1 to wash away contamination such as cutting waste generated by the cutting of the workpiece 1. Therefore, the cleaning liquid for cleaning the workpiece 1 can be saved, and the efficiency of cutting can be increased.

  Then, when the cutting work by the cutting blade 42 proceeds and the workpiece 1 is divided along all the planned division lines, for example, individual device chips are formed.

  In the cutting apparatus using the cutting blade and the mount flange according to the present embodiment, a protruding portion may be provided adjacent to the cutting fluid supply port 44 b of the blade cover 44. The projecting portion is disposed in front of the cutting blade 42 in the rotational direction from the point where the cutting fluid ejected from the cutting fluid ejection port 44 b reaches the cutting blade 42. That is, the projecting portion is adjacent to the cutting fluid ejection port 44b in the direction opposite to the rotation direction of the cutting blade 42.

  While cutting with the cutting blade 42 is being performed, cutting fluid is supplied to the cutting blade 42 from the cutting fluid outlet 44b. Then, it is expected that the cutting fluid is appropriately supplied to the processing point where the cutting blade 42 contacts the workpiece.

  However, part of the cutting fluid supplied to the cutting blade 42 is rotated around the outer periphery of the cutting blade 42 as the cutting blade 42 rotates. If there is a follower fluid that rotates around the cutting blade 42 on the outer periphery of the cutting blade 42, the cutting fluid newly supplied from the cutting fluid ejection port 44b is blocked by the follower fluid, so that the cutting fluid is expected. Is not supplied to the processing point.

  Therefore, the blade cover 44 is provided with a protruding portion in front of the cutting blade 42 in the rotational direction of the cutting fluid ejected from the cutting fluid ejection port 44b before the portion where the cutting fluid reaches the cutting blade 42. A blade cover 44 having such a protrusion is shown in FIG. FIG. 8 is a side view schematically showing the blade cover 44 having the protrusion 76. For example, as shown in FIG. 8, the protrusion 76 is provided adjacent to the cutting fluid supply port 44 b of the blade cover 44.

  Then, a part of the accompanying liquid of the cutting blade 42 collides with the protrusion 76 and is separated from the cutting blade 42. That is, the protrusion 76 prevents further part of the cutting fluid accompanying the cutting blade 42 from being further accompanied.

  If the amount of the accompanying fluid of the cutting blade 42 can be reduced, the cutting fluid newly supplied from the cutting fluid outlet 44b is less likely to be disturbed. Therefore, the cutting fluid is appropriately supplied to the processing point, and it is not necessary to supply the cutting fluid excessively. Therefore, the liquid used in the cutting device 2 can be further saved.

  Next, experiments for confirming the effects of the cutting blade and the mount flange according to one embodiment of the present invention will be described. In this example, the workpiece was cut by a cutting device provided with the cutting blade and the mount flange, and the number of deposits was measured by observing the workpiece after cutting.

  An outline of the experiment will be described. The cutting apparatus used in this experiment is “DFD6362” manufactured by DISCO Corporation, and the cutting blade attached to the cutting apparatus is “ZH05-SD2000-N1-110GF (HEGF1010)” manufactured by DISCO Corporation. A cutting fluid turning portion was formed on the mounting flange used for mounting the cutting blade and the circular base of the cutting blade.

  The workpiece used in this experiment is an Si wafer with a diameter of 0.73 mm and an 8-inch diameter. In this experiment, a tape “D-650” manufactured by Lintec Corporation was attached to the surface side of the workpiece, and the workpiece was placed on the holding table of the cutting apparatus so that the back side of the workpiece was exposed. The workpiece was placed with the front side facing. The workpiece was sucked and held on the holding table via the tape. Note that a resin film was formed on the back side of the workpiece in order to facilitate measurement of the deposit on the workpiece.

  The cutting conditions were: the spindle rotation speed was 40000 rpm, the workpiece feed rate was 30 mm / s, and the distance (blade height) between the lowest point of the cutting blade and the upper surface of the holding table was 0.07 mm. It was. The indexing feed amount (index size) of the cutting blade was 5 mm in the first direction and 5 mm in the second direction orthogonal to the first direction.

  The amount of cutting water supplied from the nozzle provided in the cutting fluid supply nozzle 44a (see FIGS. 1, 6, 8, etc.) is 1.5 L / min, and the cutting supplied from the cutting fluid jet 44b (see FIGS. 6, 8, etc.) The amount of water was 1.0 L / min. Further, a cleaning liquid is ejected to the workpiece from a spray nozzle (not shown) provided on the lower surface of the blade cover. The amount of this cleaning liquid was 1.0 L / min.

  Under such conditions, the workpiece was cut into a 5 mm × 5 mm grid. The number of deposits was measured on arbitrary nine chips, with each area defined by the cutting grooves formed by the cutting process as one chip. The microscope “MF-UA1020THD” manufactured by Mitutoyo Corporation and the particle count measurement software “FV-PIXELLENCE ENG / 3310 / STD” were used for the measurement of deposits.

  In each chip, the number of deposits having a size of 1 μm or more in a field of view at a magnification of 200 times under microscopic observation was measured at five locations in the four corners and the center. And the average value of the number of the deposit | attachments measured by the measurement of a total of 45 times was computed. This experiment is referred to as “Example 1”.

  Further, as shown in FIG. 8, the workpiece is similarly cut by the cutting apparatus equipped with the blade cover 44 provided with the projecting portion 76 adjacent to the cutting fluid supply port 44b. The number of adhered deposits was counted. This experiment is referred to as “Example 2”. In the experiment “Example 2” as well, a mount flange formed with a cutting fluid turning portion and a circular base of the cutting blade were used.

  Further, by using a cutting device equipped with a blade cover 44 provided with a protruding portion 76 adjacent to the cutting fluid supply port 44b, the amount of cutting fluid and cleaning fluid to be supplied is reduced to about 70% as described above to cut the workpiece. The number of deposits was measured after processing. This experiment is referred to as “Example 3”. In the experiment “Example 3” as well, a mount flange formed with a cutting fluid turning portion and a circular base of the cutting blade were used.

  For comparison, the same applies to workpieces that have been cut in the same manner without forming the cutting fluid turning part on the circular base of the mount flange and the cutting blade, and without providing a protruding part on the blade cover. The number of deposits was counted. This experiment is referred to as a “comparative example”.

  The measurement result of the deposit will be described. In the comparative example, the average number of deposits was 418, in Example 1, the average number of deposits was 295, in Example 2, the average number of deposits was 64, and in Example 3, the average number of deposits was 26.

  Comparing the result of Comparative Example 1 and the result of Example 1, the workpiece is formed by forming a cutting fluid turning portion on the mounting flange used for mounting the cutting blade and the circular base of the cutting blade. It can be seen that the deposits can be greatly reduced. It is understood that the formation of the cutting fluid turning portion increases the contribution of the cutting fluid to the cleaning of the workpiece.

  Comparing the result of Example 1 and the result of Example 2, it can be seen that by providing the protrusion 76 (see FIG. 8) on the blade cover 44, the amount of deposits on the workpiece can be significantly reduced. The projection 76 prevents the accompanying liquid from rotating along the outer periphery of the cutting blade, so that the cutting liquid can be appropriately supplied to the workpiece, and the cutting waste or the like is removed before the cutting waste adheres to the workpiece. It is suggested that it can be eliminated.

  Comparing the result of Comparative Example 1 with the result of Example 3, the cutting fluid turning-back portion is provided on the mounting flange and the circular base of the cutting blade, and the protrusion 76 (see FIG. 8) is provided on the blade cover 44. If it is provided, it can be seen that deposits do not increase even if the amount of cutting fluid supplied is saved.

  As a result of the above experiment, when the cutting fluid is dropped on the workpiece according to one embodiment of the present invention, the workpiece is cleaned by the cutting fluid, so that it is possible to save liquid such as cleaning fluid supplied to the workpiece. confirmed.

  In addition, this invention is not limited to description of said embodiment, A various change can be implemented. For example, in the above embodiment, the cutting fluid turning portion is formed on the circular base of the cutting blade or the mount flange, but it may be formed along the outer periphery of the fixing nut 60 or the spindle 54. Moreover, you may form in only one of the circular base of a cutting blade, and a mount flange.

  In addition, the structure, method, and the like according to the above-described embodiment can be appropriately modified and implemented without departing from the scope of the object of the present invention.

DESCRIPTION OF SYMBOLS 1 Workpiece 3 Frame 5 Tape 2 Cutting device 4 Base 6 Holding table (holding means)
6a Holding surface 8, 8a Cutting unit (cutting means)
10 X-axis moving mechanism (moving means)
12 X-axis guide rail 14 X-axis moving table 16 X-axis ball screw 18 X-axis pulse motor 20 Support base 22 Clamp 24 Y-axis moving mechanism (index feed means)
26 Y-axis guide rail 28 Y-axis moving table 28a Base 28b Wall 30 Y-axis ball screw 32 Y-axis pulse motor 34 Z-axis moving mechanism 36 Z-axis guide rail 38 Z-axis moving table 40 Z-axis pulse motor 42, 42a, 42b, 42c Cutting blade 44 Blade cover 44a Cutting fluid supply nozzle 44b Cutting fluid supply port 46 Imaging device 48a, 48b Circular base 48c Fitting hole 50 Cutting blade 52 Spindle housing 54 Spindle 56a, 56b, 56c Mount flange 58a, 58b, 58c Mount Flange body 60 Fixing nut 62a, 62c Boss portion 64a, 64b, 64c Flange portion 66a, 66b, 66c Cutting fluid turning portion 68 Cutting fluid 70a, 70c Spindle mounting hole 72 Bolt 74 Front flange 76 Protruding portion

Claims (3)

A cutting blade that is fixed to the tip of a spindle of a cutting device and that cuts a workpiece while being supplied with a cutting fluid
A circular base in which a fitting hole is formed in the center and a hub portion is formed on one side;
A cutting edge formed on the outer peripheral portion of the surface opposite to the one surface of the circular base,
A cutting blade in which a cutting fluid return portion is formed on the circular base in the circumferential direction. A mounting flange for fixing a cutting blade for cutting a workpiece in a state where cutting fluid is supplied to a tip of a spindle of a cutting device,
A boss part inserted into the fitting hole of the cutting blade and having a male screw formed at the tip;
A flange portion protruding in a radial direction from the boss portion and having a support surface for supporting the cutting blade;
A mounting flange body having:
A female nut that is threadedly engaged with the male screw of the boss portion is formed on the inner periphery, and includes a fixing nut that sandwiches and fixes the cutting blade together with the flange portion,
The mounting flange, wherein a cutting fluid returning portion is formed in the flange portion in the circumferential direction on the back side of the support surface. The cutting blade is disc-shaped,
The mount flange further comprises a front flange having a support surface for supporting the cutting blade together with the mount flange body,
The fixing nut clamps the cutting blade together with the flange portion through the front flange by fixing the front flange,
The mounting flange according to claim 2, wherein a cutting fluid returning portion is formed in the front flange in a circumferential direction on the back side of the support surface.