JP2018012283A - Carrying device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a carrying device that can keep strength of separated end surfaces of a substrate high, and suppress a surface of the substrate from being damaged during carrying.SOLUTION: A carrying device 1 turns a separating table 31b which is adsorbing an end part 40a of a substrate 40 at a placement position and separates the end part 40a from the substrate 40, and then returns the separating table 31b to the placement position, and further, moves up a carrying body 21b from a falling position to a rising position to make the end part 40a supported on an upper surface (a supporting surface) of the carrying body 22b, and then moves the carrying body 22b and a hoisting mechanism 23b in a horizontal direction so that the separated end part 40a is carried to a downstream.SELECTED DRAWING: Figure 9

Description

  The present invention relates to a transfer apparatus that divides and transfers a substrate.

  Dividing a brittle material substrate such as a glass substrate is performed by a scribe process for forming a scribe line on the substrate surface and a break process for dividing the substrate along the formed scribe line. In the scribing step, the cutting edge of the scribing wheel is moved along a predetermined line while being pressed against the substrate surface. A scribe device equipped with a scribe head is used to form the scribe line.

  The following Patent Document 1 describes an apparatus that divides a substrate along a scribe line. In this apparatus, the end of the substrate is divided along the scribe line by pressing the upper surface of the end of the substrate with the break bar while the substrate is sandwiched from above and below by the clamp bar.

  Patent Document 2 below describes an apparatus for dividing and transporting a substrate. In this apparatus, the substrate is transported to a scribe position and a break position by a large number of transport rollers arranged horizontally. At the scribe position, a scribe line is formed on the substrate by a cutting line processing means (cutter), and at the break position, the substrate is cut along the scribe line by a horizontal folding machine. The divided pieces of the substrate are rolled by a conveyance roller and conveyed downstream.

JP 2014-18962 A JP 2012-96936 A

  According to the method of Patent Literature 1, when the substrate is folded, the opposing separation end faces may come into contact with each other and the separation end face may be damaged. Thereby, there exists a problem of leading to the fall of end surface intensity | strength.

  According to the method of Patent Document 2, since the substrate is transported on the transport roller while being placed on the transport roller, an impact or vibration is easily applied from the transport roller to the substrate during transport. As a result, the surface of the substrate may be damaged.

  In view of such a problem, an object of the present invention is to provide a transport apparatus capable of keeping the strength of a divided substrate end face high and suppressing the substrate surface from being damaged during transport.

  The main aspect of this invention is related with the conveying apparatus which conveys the fragment | piece of the said board | substrate divided | segmented along the scribe line formed in the board | substrate downstream. The transport device according to this aspect is configured such that an end portion of the substrate outside the scribe line is placed, and a separation table that sucks the placed end portion and a lower surface of the divided end portion are supported. A transport body having a support surface that can be moved, and the support surface of the transport body is moved between a raised position above the surface of the dividing table at the placement position and a lowered position below the surface. An elevating mechanism for moving the moving body and the elevating mechanism in a horizontal direction.

  According to the transport apparatus according to this aspect, the divided end is lifted from below and transported downstream, so that the end does not come into sliding contact with a transport member such as a roller during transport. Therefore, it can suppress that the surface of the board | substrate edge part parted at the time of conveyance is damaged. As described above, according to this aspect, it is possible to keep the divided substrate end surfaces with high strength and to prevent the substrate surface from being damaged during transportation.

  The transport apparatus according to this aspect includes a support table disposed on the downstream side of the dividing table, and after the transport body and the lifting mechanism are moved in the horizontal direction by the moving mechanism, the transport body is moved to the lifting mechanism. The lower end portion is lowered to the lowering position, and the divided end portion is transferred to the support table. If it carries out like this, the divided | segmented edge part can be smoothly delivered to a downstream support table.

  In this case, the transport device has a second transport body having a support surface capable of supporting the transferred lower surface of the end portion, and the support surface of the second transport body more than the surface of the support table. A second elevating mechanism that moves between an upper ascending position and a lowering position that is lower than the surface of the support table; and a configuration that moves the second transport body and the second elevating mechanism horizontally. Can be provided. Here, the second transport body is moved up and down and the second transport body and the second lifting mechanism are moved in the horizontal direction to transport the end portion delivered to the support table downstream. Can be configured to. If it carries out like this, since the parted edge part will be lifted from the downward direction in the downstream support table, and will be conveyed downstream, it can suppress that the surface of an edge part is damaged at the time of conveyance.

  In this case, the moving mechanism may be configured to be capable of moving integrally with the transport body and the lifting mechanism, and the second transport body and the second lifting mechanism. In this way, it is possible to simplify the configuration and simplify the control.

  In this case, the transport body and the second transport body may be configured to move up and down in synchronization with each other. If it carries out like this, each divided | segmented edge part can be conveyed to a downstream on the support table of a downstream side simultaneously with a conveyance table to a support table. Therefore, each end can be smoothly transported without creating an empty space for reception.

  The transport apparatus according to this aspect includes another support table disposed on the upstream side of the dividing table, on which the substrate is placed, a third transport body having a support surface capable of supporting the lower surface of the substrate, A third lifting mechanism for moving the support surface of the third transport body between a raised position above the surface of the other support table and a lowered position below the surface of the other support table; And a configuration for moving the third transport body and the third lifting mechanism in the horizontal direction. Here, the end portion of the substrate placed on the other support table by moving the third transport body and the third lifting mechanism in the horizontal direction while moving the third transport body up and down Can be configured to be placed on the cutting table. In this way, since the substrate before being divided is lifted from the lower side and conveyed downstream on the upstream support table, it is possible to suppress the surface of the substrate before being divided from being damaged during conveyance. Can do.

  In this case, the moving mechanism may be configured to be able to move integrally with the transport body and the lifting mechanism, and the third transport body and the third lifting mechanism. In this way, it is possible to simplify the configuration and simplify the control.

  In this case, the transport body and the third transport body may be configured to move up and down in synchronization with each other. In this way, each of the divided ends can be conveyed downstream from the cutting table, and at the same time, the end of the substrate can be placed on the cutting table on the upstream support table. Therefore, the edge part of a board | substrate can be smoothly mounted on a cutting table, without making the empty space for reception in a cutting table specially.

  As described above, according to the present invention, it is possible to provide a transport apparatus that can maintain the strength of the divided substrate end face and suppress the substrate surface from being damaged during transport.

  The effects and significance of the present invention will become more apparent from the following description of embodiments. However, the embodiment described below is merely an example when the present invention is implemented, and the present invention is not limited to what is described in the following embodiment.

FIGS. 1A and 1B are a side view and a plan view, respectively, schematically showing the configuration of the transport mechanism of the transport device according to the embodiment. FIGS. 2A and 2B are a side view and a plan view, respectively, schematically showing a configuration in which a support table and a dividing table are arranged in the configurations of FIGS. 1A and 1B according to the embodiment, respectively. . FIG. 3A is a diagram schematically illustrating a configuration in which the transport apparatus according to the embodiment is viewed in the substrate transport direction. FIG. 3B is a side view schematically illustrating a configuration of a shift mechanism for shifting the dividing table of the transport device according to the embodiment in the horizontal direction. FIG. 4 is a block diagram illustrating a configuration of the transport device according to the embodiment. FIGS. 5A and 5B are a side view and a plan view, respectively, for explaining the operation of the transport device according to the embodiment. 6A and 6B are side views for explaining the operation of the transport device according to the embodiment, respectively. 7A and 7B are side views for explaining the operation of the transport device according to the embodiment. FIGS. 8A and 8B are side views for explaining the operation of the transport device according to the embodiment. FIGS. 9A and 9B are side views for explaining the operation of the transport apparatus according to the embodiment. 10A and 10B are side views for explaining the operation of the transport device according to the embodiment. FIGS. 11A and 11B are schematic diagrams for explaining the flow of substrate cutting according to the embodiment, respectively. FIGS. 11C and 11D are schematic views showing a method for setting the rotation axis according to the modified example.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings. In each figure, XYZ axes orthogonal to each other are added for convenience. The XY plane is parallel to the horizontal plane, and the positive Z-axis direction is a vertically upward direction.

FIGS. 1A and 1B are a side view and a plan view, respectively, schematically showing the configuration of the transport mechanism of the transport apparatus 1.
As shown in FIGS. 1A and 1B, the transport mechanism includes a support plate 21, transport bodies 22 a to 22 c, elevating mechanisms 23 a to 23 c, a slider 24, and a motor 25. The slider 24 and the motor 25 constitute a moving mechanism that moves the transport bodies 22a to 23c and the elevating mechanisms 23a to 23c in the X-axis direction.

  The support plate 21 is a plate-shaped member having a rectangular outline. The support plate 21 is installed on the base 10 so as to be movable in the X-axis direction by a slider 24. A gear 25a is mounted on the drive shaft of the motor 25 so that the longitudinal direction is parallel to the X-axis direction. A gear that meshes with the gear 25 a is installed on the lower surface of the support plate 21. When the motor 25 is driven, the support plate 21 is moved in the X-axis direction by being guided by the slider 24. Further, the support plate 21 is formed with two long holes 21a and 21b that are elongated in the X-axis direction. These long holes 21 a and 21 b are through holes for installing support tables 31 a and 31 c (see FIGS. 2A and 2B) in the base 10.

  On the upper surface of the support plate 21, two lifting mechanisms 23 a are arranged on the Y axis positive side of the long hole 21 a so as to be aligned with the X axis. Two elevating mechanisms 23a are also arranged along the X axis on the Y axis negative side of the long hole 21a. These raising / lowering mechanisms 23a are comprised by the electric jack, for example. The four elevating mechanisms 23a have the same configuration.

  One transport body 22a is installed on the upper surface of the drive shaft of the lifting mechanism 23a so as to straddle the two lifting mechanisms 23a on the Y axis positive side. In addition, one transport body 22a is installed on the upper surface of the drive shaft of the lifting mechanism 23a so as to straddle the two lifting mechanisms 23a on the Y axis negative side. The two conveyance bodies 22a have the same shape and size. When the elevating mechanism 23a is in the most contracted state, the upper surfaces (support surfaces) of the two transport bodies 22a are positioned at the same height.

  Further, on the upper surface of the support plate 21, two lifting mechanisms 23 c are arranged on the Y axis positive side of the long hole 21 b so as to be aligned with the X axis. Two elevating mechanisms 23c are also arranged along the X axis on the Y axis negative side of the long hole 21b. These raising / lowering mechanisms 23c are comprised by the electric jack, for example. The four lifting mechanisms 23c have the same configuration as each other, and the lifting mechanism 23a has the same configuration.

  One carrier 22c is installed on the upper surface of the drive shaft of the lifting mechanism 23c so as to straddle the two lifting mechanisms 23c on the Y axis positive side. In addition, one transport body 22c is installed on the upper surface of the drive shaft of the lifting mechanism 23c so as to straddle the two lifting mechanisms 23c on the Y axis negative side. The two conveyance bodies 22c have the same shape and size. When the lifting mechanism 23c is in the most contracted state, the upper surfaces (support surfaces) of the two transport bodies 22c are positioned at the same height.

  Two lifting mechanisms 23b are arranged between the two lifting mechanisms 23a on the X axis positive side and the two lifting mechanisms 23c on the X axis negative side. These raising / lowering mechanisms 23b are comprised by the electric jack, for example. The two lifting mechanisms 23b have the same configuration. Conveyors 22b are installed on the upper surfaces of the drive shafts of the two lifting mechanisms 23a, respectively. The two conveyance bodies 22b have the same shape and size. When the lifting mechanism 23b is in the most contracted state, the upper surfaces (support surfaces) of the two transport bodies 22b are positioned at the same height.

  The heights of the upper surfaces (support surfaces) of the transport bodies 22a to 22c when the elevating mechanisms 23a to 23c are most extended are the same, and the transport bodies 22a to 22c are the same when the elevating mechanisms 23a to 23c are contracted most. The heights of the upper surfaces (support surfaces) of 22c are the same.

  FIGS. 2A and 2B are a side view and a plan view, respectively, schematically showing a configuration in which support tables 31a and 31c and a dividing table 31b are arranged in the configurations of FIGS. 1A and 1B, respectively. . For convenience, illustration of the guide frame 11 in FIG. 2B is omitted in FIG.

  Three support tables 31a are installed on the upper surface of the base 10 so as to sandwich one carrier 22a in the Y-axis direction. The support table 31a at the center in the Y-axis direction is installed on the upper surface of the base 10 with the leg portion 32a passing through a long hole 21a (see FIG. 1B) formed in the support plate 21. The leg portion 32a of the support table 31a on the Y axis positive side and the leg portion 32a of the support table 31a on the Y axis negative side are installed on the upper surface of the base 10 through the Y axis positive side and the Y axis negative side of the support plate 21, respectively. Is done.

  The heights of the upper surfaces of the three support tables 31a are the same. The transport body 22a is lowered by the elevating mechanism 23a from the lowered position where the height of the upper surface (support surface) is lower than the upper surface of the three support tables 31a and the height of the upper surface (support surface) from the upper surface of the three support tables 31a. Also move up and down between high elevated positions. For example, the position of the transport body 22a when the elevating mechanism 23a is extended to the maximum is the raised position, and the position of the transport body 22a when the lift mechanism 23a is most contracted is the lowered position.

  Similarly, three support tables 31c are installed on the upper surface of the base 10 so as to sandwich one transport body 22c in the Y-axis direction. The support table 31c at the center in the Y-axis direction is installed on the upper surface of the base 10 with the leg portion 32c passing through a long hole 21b (see FIG. 1B) formed in the support plate 21. The leg portion 32c of the support table 31c on the Y-axis positive side and the leg portion 32c of the support table 31c on the Y-axis negative side are installed on the upper surface of the base 10 through the Y-axis positive side and the Y-axis negative side of the support plate 21, respectively. Is done.

  The heights of the upper surfaces of the three support tables 31c are the same as each other, and are the same as the heights of the upper surfaces of the support tables 31a. Due to the lifting mechanism 23c, the transport body 22c has a lowered position where the height of the upper surface (support surface) is lower than the upper surface of the three support tables 31c, and the height of the upper surface (support surface) from the upper surface of the three support tables 31c. Also move up and down between high elevated positions. For example, the position of the transport body 22c when the lifting mechanism 23c is extended to the maximum is the raised position, and the position of the transport body 22c when the lifting mechanism 23c is most contracted is the lowered position.

  A separation table 31b is disposed between the support table 31a and the support table 31c adjacent in the X-axis direction. The three dividing tables 31b arranged in the Y-axis direction are supported by one rotating shaft 32b parallel to the Y-axis direction so as to be rotatable in parallel with the XZ plane. When viewed from the positive direction of the Y axis, the three cutting tables 31b can be rotated clockwise about the rotation shaft 32b from a mounting position where the upper surface is flush with the upper surface of the support table 31a. The central axis of the rotation shaft 32b is positioned at a position just below the boundary between the cutting table 31b and the support table 31a when the cutting table 31b is at the mounting position.

  A drive shaft of the motor 14 (see FIGS. 3A and 3B) is attached to one end of the rotation shaft 32b. Further, both ends of the rotation shaft 32 b are fitted into guide holes 11 a formed in the guide frame 11 and parallel to the X-axis direction. The guide frame 11 is installed on the upper surface of the base 10. Thus, when the rotation shaft 32b is fitted into the guide hole 11a, the rotation shaft 32b is supported by the guide frame 11 so as to be movable in the X-axis direction. Accordingly, the three cutting tables 31b can move in the X-axis direction with respect to the guide frame 11 via the rotation shaft 32b.

  Innumerable holes for adsorbing the substrate are formed on the upper surfaces of the three support tables 31a, the three support tables 31c, and the three dividing tables 31b. The three support tables 31a, the three support tables 31c, and the three dividing tables 31b are respectively formed with flow paths that connect to these holes, and these flow paths are connected to an air pressure source (not shown). By setting the flow path to a negative pressure by the air pressure source, the substrates installed on the upper surfaces of the support table 31a, the three support tables 31c, and the three dividing tables 31b are adsorbed.

  FIG. 3A is a diagram schematically illustrating the configuration of the transport device 1 viewed in the substrate transport direction. FIG. 3B is a side view schematically showing a configuration of a shift mechanism for shifting the dividing table 31b of the transport apparatus 1 in the horizontal direction.

  Both ends of the rotating shaft 32b are fitted into the guide holes 11a of the guide frame 11, and are further supported rotatably on the frame member 12. Further, the end on the Y axis positive side of the rotation shaft 32 b is attached to the drive shaft of the motor 13 attached to the frame member 12. When the motor 13 is driven, the rotation shaft 32b rotates and the cutting table 31b rotates.

  A bearing 12a having a screw hole is installed on the upper surface of the frame member 12, and a drive shaft 15 of a motor 14 is screwed into the bearing 12a. The motor 14 is mounted on a support frame 16 installed on the base 10. When the motor 14 is driven, the frame member 12 is shifted in the X-axis direction, and the rotation shaft 32b is shifted accordingly. Thereby, the cutting table 31b is shifted in the X-axis direction.

  In the present embodiment, the three cutting tables 31b, the rotation shaft 32b, the guide frame 11 (guide hole 11a), the frame member 12, the motors 13 and 14, the drive shaft 15, and the support frame 16 are provided. Thus, a cutting device for cutting the substrate along the scribe line is configured.

FIG. 4 is a block diagram illustrating a configuration of the transport device 1.
The transport apparatus 1 includes a control unit 101, a mechanism unit 102, a suction unit 103, a sensor unit 104, and an input / output unit 105. The control unit 101 includes an arithmetic processing circuit such as a CPU (Central Processing Unit) and a memory such as a ROM (Read Only Memory) and a RAM (Random Access Memory), and controls each unit according to a program stored in the memory. The mechanism unit 102 includes the mechanism shown in FIGS. 1 (a) to 3 (b). The suction part 103 includes a pipe, a flow path, and the like that apply the above-described air pressure source and the pressure of the air pressure source to holes formed in the upper surfaces of the support tables 31a and 31c and the dividing table 31b. The sensor unit 104 includes various sensors for detecting the position of the substrate on the conveyance path, the positions of the conveyance bodies 22a to 22c, the rotation position of the cutting table 31b, and the like. The input / output unit 105 includes a monitor, a keyboard, a touch panel, and the like, and is used for designating and inputting a substrate size and a dividing position, and displaying a progress status of the dividing.

Next, the operation of the transport device 1 will be described with reference to FIGS.
FIGS. 5A and 5B are a side view and a plan view, respectively, for explaining the operation of the transport apparatus 1. For convenience, FIGS. 5A and 5B schematically show only the configuration necessary for dividing and transporting the substrate 40.

  A substrate 40 is placed on the upper surface of the support table 31a. The substrate 40 is a fragile substrate such as a liquid crystal panel. A plurality of scribe lines 41 are formed on the upper surface (the surface on the positive side of the Z-axis) of the substrate 40 at regular intervals in the X-axis direction in parallel with the Y-axis direction by an upstream scribe device. The substrate 40 is placed on the upper surface of the support table 31a as shown in FIGS. 5A and 5B, for example, by a transfer device that sucks the upper surface of the substrate 40 and transfers the substrate 40. In this state, the rotation shaft 32 b is parallel to the scribe line 41. In the state of FIGS. 5A and 5B, the conveying bodies 22a and 22c are positioned at the lowered position, and the dividing table 31b is positioned at a mounting position where the upper surface is flush with the upper surface of the support table 31a. ing.

  When the transport operation is started, the controller 101 drives the lifting mechanisms 23a to 23c to raise the transport bodies 22a to 22c to the ascending position in synchronization with each other as shown in FIG. Thereby, the board | substrate 40 is lifted by the conveyance body 22a, and the lower surface of the board | substrate 40 leaves | separates from the upper surface of the support table 31a. Next, the control unit 101 drives the motor 25 to move the support plate 21 to the position shown in FIG. Thereby, the transport body 22a moves in the X-axis positive direction, and the substrate 40 is transported in the X-axis positive direction. In this state, the most X-axis positive scribe line 41 formed on the substrate 40 is positioned substantially directly above the boundary position between the support table 31a and the dividing table 31b.

  Thereafter, the control unit 101 drives the elevating mechanisms 23a to 23c to lower the transport bodies 22a to 22c to the lowered position in synchronization with each other as shown in FIG. Thereby, the lower surface of the substrate 40 comes into contact with the upper surface of the support table 31a, and the substrate 40 is placed on the upper surface of the support table 31a. At the same time, the end on the X axis positive side of the substrate 40 is placed on the upper surface of the cutting table 31b. Further, the control unit 101 drives the motor 25 to return the support plate 21 to the position shown in FIG.

  In this state, the control unit 101 controls the suction unit 103 in FIG. 4 to attract the substrate 40 to the support table 31a and the dividing table 31b. And the control part 101 drives the motor 13 shown to Fig.3 (a), (b), and rotates the dividing table 31b clockwise as shown to Fig.8 (a).

  As described above, in the present embodiment, the central axis of the rotation shaft 32b is positioned at a position directly below the boundary between the cutting table 31b and the support table 31a when the cutting table 31b is in the mounting position. Therefore, when the cutting table 31b rotates clockwise about the rotation shaft 32b, the end 40a of the substrate 40 is bent at the position of the scribe line 41 closest to the X axis, and the substrate 40 is inclined downward. Pulled away from the main body. Thereby, as shown to Fig.8 (a), the edge part 40a of the board | substrate 40 is parted from the board | substrate 40 main body.

  Thereafter, the control unit 101 drives the motor 14 of FIG. 3B to shift the rotation shaft 32b in the positive direction of the X axis as shown in FIG. 8B. Then, the control unit 101 drives the motor 13 in FIGS. 3A and 3B to rotate the dividing table 31b counterclockwise around the rotating shaft 32b as shown in FIG. 9A. The dividing table 31b is returned to the placement position. In this case, since the rotation shaft 32b is shifted to the X-axis positive side, the gap between the X-axis positive end surface (separation end surface) of the substrate 40 and the X-axis negative end surface (separation end surface) of the end portion 40a. In addition, a gap corresponding to the shift amount is generated. For this reason, even if the dividing table 31b is returned to the mounting position as shown in FIG. 9A, the separation end surface on the substrate 40 side and the separation end surface on the end portion 40a side do not contact each other.

  Thereafter, the control unit 101 drives the elevating mechanisms 23a to 23c to raise the transport bodies 22a to 22c to the ascending position in synchronization with each other as shown in FIG. 9B. Thereby, the board | substrate 40 is lifted by the conveyance body 22a, and the lower surface of the board | substrate 40 leaves | separates from the upper surface of the support table 31a. Moreover, the edge part 40a is lifted by the conveyance body 22b, and the lower surface of the edge part 40a leaves | separates from the upper surface of the cutting table 31b.

  Next, the control unit 101 drives the motor 25 to move the support plate 21 to the position shown in FIG. Thereby, the transport body 22a moves in the X-axis positive direction, and the substrate 40 is transported in the X-axis positive direction. At the same time, the control unit 101 drives the motor 14 shown in FIGS. 3A and 3B to shift the cutting table 31b in the negative X-axis direction. In this state, the next scribe line 41 formed on the substrate 40 is positioned substantially immediately above the boundary position between the support table 31a and the dividing table 31b.

  Thereafter, the control unit 101 drives the elevating mechanisms 23a to 23c to lower the transport bodies 22a to 22c to the lowered position in synchronization with each other as shown in FIG. Thereby, the lower surface of the substrate 40 comes into contact with the upper surface of the support table 31a, and the substrate 40 is placed on the upper surface of the support table 31a. At the same time, the end on the X axis positive side of the substrate 40 is placed on the upper surface of the cutting table 31b. Further, the divided end portion 40a is placed on the upper surface of the support table 31c, and the end portion 40a is transferred to the support table 31c.

  After the end 40a is thus transferred to the support table 31c, the control unit 101 drives the motor 25 to return the support plate 21 to the position shown in FIG. Then, the control part 101 performs control of Fig.8 (a)-FIG.10 (b) similarly to the above. Thereby, the next end 40a is separated from the substrate 40 and transferred to the support table 31c. The end portion 40a delivered to the support table 31c is transported by performing the operations of FIGS. 9B to 10A in the following control of FIGS. 8A to 10B. The end portion 40a conveyed downstream by the body 22c (X-axis positive side) and then divided is placed on the X-axis negative end region of the support table 31c. Thereafter, the control of FIG. 7B to FIG. 10B is repeated, so that the end 40a is divided, the end 40a is transferred to the support table 31c, and the end 40a is conveyed on the support table 31c. Done.

<Effect of embodiment>
According to this embodiment, the following effects are produced.
Since the end portion 40a is separated from the substrate 40 so that the end portion 40a is away from the main body of the substrate 40 in the rotation direction, it is avoided that the opposing separation end faces come into contact with each other at the time of division. For this reason, the separation end face is prevented from being scratched by contact, and the end face strength can be kept high. Further, since the divided end portion 40a is lifted from below by the transport body 22b and transported downstream, the end portion 40a does not slidably contact a transport member such as a roller during transport. Therefore, it can suppress that the surface of the edge part 40a divided at the time of conveyance is damaged. As described above, according to the present embodiment, it is possible to keep the strength of the end surface of the end portion 40a separated from the substrate 40 high, and to suppress the surface of the end portion 40a from being damaged during transportation.

  Further, the control unit 101 moves the transport body 22b and the lifting mechanism 23b in the horizontal direction, then lowers the transport body 22b from the raised position to the lowered position, and delivers the divided end portion 40a to the support table 31c. It is configured as follows. With this configuration, the divided end portion 40a can be smoothly transferred to the support table 31c on the downstream side.

  Further, the end 40a delivered to the support table 31c is transported downstream by moving the transport body 22c and moving the transport body 22c and the lifting mechanism 23c in the horizontal direction. For this reason, since the divided end portion 40a is lifted from below and conveyed downstream in the downstream support table 31c, the surface of the end portion 40a is prevented from being damaged during conveyance. Can do.

  The downstream transport body 22c and the lifting mechanism 23c are installed on the support plate 21 together with the transport body 22b and the lifting mechanism 23b at the intermediate position in the transport direction, and are integrated in the X-axis direction by the moving mechanism including the slider 24 and the motor 25. Therefore, the configuration can be simplified and the control can be simplified as compared with the configuration in which these are individually driven independently.

  In addition, since the transport body 22b and the transport body 22c are controlled to move up and down in synchronization with each other, each of the divided end portions 40a is transported from the partitioning table 31b to the support table 31c, and at the same time, on the downstream side. It can be conveyed downstream on the support table 31c. Therefore, each end part 40a can be smoothly conveyed, without making the empty space for reception specially.

  Further, the substrate 40 placed on the support table 31a is moved up and down, and the substrate 40 placed on the other support table 31a is moved by moving the transport body 22a and the lifting mechanism 23a in the horizontal direction. The outer end from the scribe line 41 is placed on the cutting table 31b. With this configuration, the substrate 40 before being divided is lifted from below by the upstream support table 31a and conveyed downstream, so that the surface of the substrate 40 before dividing is damaged during conveyance. Can be suppressed.

  The upstream transport body 22a and the lifting mechanism 23a are installed on the support plate 21 together with the other transport bodies 22b and 22c and the lifting mechanisms 23b and 23c, and are integrated in the X-axis direction by the moving mechanism including the slider 24 and the motor 25. Therefore, the configuration can be simplified and the control can be simplified as compared with the configuration in which these are individually driven independently.

  In addition, since the transport body 22a and the transport body 22b are controlled to move up and down in synchronization with each other, each of the divided end portions 40a is transported from the partitioning table 31b to the support table 31c, and at the same time, the upstream side On the support table 31a, the end of the substrate 40 outside the scribe line 41 can be placed on the cutting table 31b. Therefore, the edge part of the board | substrate 40 can be smoothly mounted in the cutting table 31b, without making the empty space for reception in the cutting table 31b specially.

  Further, as described with reference to FIGS. 8A and 8B, the control unit 101 rotates the dividing table 31 b in a state where the end of the substrate 40 is sucked at the mounting position to move from the substrate 40. After the end portion 40a is divided, the rotation shaft 32b is shifted to the downstream side, and in this state, control is performed so that the dividing table 31b is returned to the placement position. For this reason, even if the dividing table 31b is returned to the mounting position after dividing the end portion 40a, a gap is secured between the separation end surface on the substrate 40 side and the separation end surface on the end portion 40a side. Therefore, these separated end faces do not contact each other, and the separated end faces are not damaged by the contact. Therefore, end face strength can be kept higher.

  In the present embodiment, the surface on which the end portion 40a of the dividing table 31b is placed is set to a negative pressure so that the end portion 40a is adsorbed to the dividing table 31b. The end 40a can be made to smoothly reach the angle of inclination of the folding while adhering the portion 40a to the cutting table 31b.

  That is, as shown in FIG. 11A, at the stage where the cutting table 31b starts to rotate from the mounting position, the end 40a of the substrate 40 is attracted by the negative pressure as the cutting table 31b rotates. It gradually leans downward. At this time, the end portion 40a is gradually inclined while sliding on the upper surface of the dividing table 31b against the frictional force due to the adsorption. Further, the end portion 40a receives a force in a direction away from the substrate 40 main body due to a frictional force due to adsorption. Thus, when the end 40a reaches an angle at which the end 40a is folded along the scribe line 41, the end 40a is broken and separated from the substrate 40 main body. As a result, the state shown in FIG.

  Thus, in this embodiment, since the edge part 40a is made to adsorb | suck to the dividing table 31b with a negative pressure in the state in which the edge part 40a can slide on the upper surface of the dividing table 31b, rotation of the dividing table 31b is carried out. Accordingly, the end portion 40a can be smoothly reached to the inclined angle of folding. As described above, since the end 40a slides on the upper surface of the cutting table 31b as the cutting table 31b rotates, the upper surface of the cutting table 31b remains on the surface of the end 40a even if the end 40a slides. It is preferable to be made of a material that is difficult to damage.

<Example of change>
Although the embodiment of the present invention has been described above, the present invention is not limited to the above embodiment, and various modifications can be made to the embodiment of the present invention other than the above.
For example, in the above embodiment, as shown in FIGS. 5A and 5B, the position just below the boundary between the dividing table 31b and the support table 31a when the dividing table 31b is at the placement position, that is, the dividing The central axis of the rotation shaft 32b is positioned on a plane that includes the target scribe line 41 and is perpendicular to the substrate 40, but the position of the rotation shaft 32b is not limited to this. If the cutting table 31b is rotated from the mounting position, the end 40a is bent downward at the position of the scribe line 41 while being pulled away from the substrate 40 main body diagonally downward. The rotation shaft 32b may be disposed at another position.

  For example, as shown in FIG. 11 (c), the scribe line is below the boundary between the separation table 31b and the support table 31a and upstream from the boundary (X-axis negative side), that is, the scribe to be divided. The rotation shaft 32b may be disposed at a position shifted in an inner direction (X-axis negative direction) from the end 40a toward the center of the substrate 41 with respect to a plane including the line 41 and perpendicular to the substrate 40.

As shown in FIG. 11D, the rotation shaft 32b is disposed below the boundary between the dividing table 31b and the support table 31a and on the downstream side in the transport direction (X axis positive side) from this boundary. It is also possible to do. However, in this case, when the rotation of the cutting table 31b is started, the end on the X-axis negative side of the upper surface of the cutting table 31b is displaced upward (in the direction of the arrow in FIG. 11D), so that the end 40a moves upward. Then, as the rotation of the dividing table 31b proceeds, the end portion 40a is inclined downward. For this reason, the rotation stroke of the dividing table 31b until the end 40a reaches the folding angle becomes large.

  On the other hand, if the rotation shaft 32b is arranged at the position shown in FIG. 11C, the entire area of the upper surface of the dividing table 31b is displaced downward from the start of the rotation of the dividing table 31b. The end 40a can reach the angle of folding. Therefore, as shown in FIG. 11C, the rotation shaft 32b has an inner direction (X-axis negative) from the end 40a toward the center of the substrate 41 with respect to a plane that includes the scribe line 41 to be divided and is perpendicular to the substrate 40. It is preferable to arrange at a position shifted in the direction), or at a position on a plane perpendicular to the substrate 40 including the scribe line 41 to be divided, as in the above embodiment.

  Moreover, in the said embodiment, although the raising / lowering mechanism 23a-23c was separately arrange | positioned with respect to the conveyance bodies 22a-22c, a common raising / lowering mechanism may be arrange | positioned with respect to a pair of conveyance body 22a, and arbitrary combinations A common lifting mechanism may be arranged in the transport body. A common lifting mechanism may be disposed for all of the transport bodies 22a to 22c.

  Moreover, in the said embodiment, although all the raising / lowering mechanisms 23a-23c were installed in the one support plate 21, upstream, intermediate | middle, and downstream raising / lowering mechanisms are installed separately in the support plate 21, respectively, It may be configured to be moved. Alternatively, the upstream and intermediate lifting mechanisms may be installed on a common support plate and moved together, and the downstream lifting mechanism may be installed on a separate support plate and moved independently. In addition, the structure which moves the raising / lowering mechanism of arbitrary combinations integrally may be sufficient.

  In the above embodiment, the downstream support table 31c is configured to adsorb the end 40a of the substrate 40, similarly to the upstream support table 31a and the dividing table 31b. May not necessarily have a configuration for adsorbing the end portion 40 a of the substrate 40. The adsorption method may be other methods such as a method of applying a negative pressure to a large number of holes, or a method of applying a negative pressure to one or several holes.

  In the above embodiment, for example, as shown in FIGS. 5A and 5B, the X-axis positive end of the support table 31c and the X-axis negative end of the dividing table 31b are substantially in contact with each other. However, there may be a gap between the X-axis positive end of the support table 31c and the X-axis negative end of the dividing table 31b. That is, it is only necessary to apply a stress for folding to the scribe line 41 by the rotation of the cutting table 31b.

  Moreover, in the said embodiment, as shown, for example to FIG. 5 (a), (b), the outline of the support tables 31a and 31c and the parting table 31b in planar view was a square shape, However, it is not restricted to this. The contours of the support tables 31a and 31c and the cutting table 31b in plan view may be other shapes such as a rounded square corner. Similarly, the shapes of the transport bodies 22a to 22c in plan view may be shapes other than those shown in the above embodiment. Further, the number of the support tables 31a and 31c and the dividing table 31b and the number of the conveying bodies 22a to 22c may be other than those shown in the above embodiment.

  Moreover, in the said embodiment, as shown to Fig.3 (a), (b), the shift mechanism for moving the rotating shaft 32b to a X-axis direction is comprised by the mechanism in which the frame member 12 is moved with the motor 14. FIG. However, the structure of the shift mechanism is not limited to this. For example, both ends of the rotation shaft 32b may be moved in the X-axis direction individually and in synchronization with each other by other power sources such as a plunger and an air cylinder.

  Further, the end 40a does not necessarily have to be transported in the positive X-axis direction on the downstream support table 31c, and the separated end 40a is received by the downstream receiving unit from the partition table 31b by the transport body 22b. It may be configured to pass.

  In the above embodiment, the scribe line 41 is formed only on the upper surface (Z-axis negative surface) of the substrate 40. However, the scribe line 41 is formed on both the upper and lower surfaces at the same position in the X-axis direction. May be. In this case, the scribe line described in the claims can be understood as a scribe line formed on the surface opposite to the surface placed on the cutting table 31b.

  The layouts of the support tables 31a and 31c, the dividing table 31b, the transport bodies 22a to 22c, and the elevating mechanisms 23a to 23c shown in the above embodiment are schematic diagrams for explaining the configuration and operation of the transport apparatus 1 to the last. Should be understood. According to the technical idea of the present invention, the configuration and layout of each part of the transport apparatus 1 are appropriately determined so that the end 40a can be appropriately divided along the scribe line 41 and the substrate 40 and the end 40a can be properly transported. Designed, configuration and layout can be adjusted.

  In addition, the embodiment of the present invention can be variously modified as appropriate within the scope of the technical idea shown in the claims.

1 Conveying device 13 Motor (rotating mechanism)
21 Support plate (movement mechanism)
22a-22c Conveyance body 23a-23c Lifting mechanism 24 Slider (moving mechanism)
25 Motor (movement mechanism)
31a, 31c Support table 31b Dividing table 32a Rotating shaft (rotating mechanism)
101 Control unit

Claims (8)

A transport device for transporting a piece of the substrate divided along a scribe line formed on the substrate,
An end portion of the substrate outside the scribe line is placed, and a cutting table that sucks the placed end portion;
A transport body having a support surface capable of supporting the lower surface of the divided end portion;
An elevating mechanism for moving the support surface of the transport body between a raised position above the surface of the dividing table at the placement position and a lowered position below the surface;
A moving mechanism for moving the carrier and the lifting mechanism in a horizontal direction;
A conveying apparatus comprising: In the conveyance apparatus of Claim 1,
A support table disposed on the downstream side of the cutting table;
After the transporting body and the lifting mechanism are moved in the horizontal direction by the moving mechanism, the transporting body is lowered from the raised position to the lowered position by the lifting mechanism, and the divided end portion is moved to the support table. To hand,
A conveying apparatus characterized by that. In the conveyance apparatus of Claim 2,
A second carrier having a support surface capable of supporting the lower surface of the transferred end portion;
A second lifting mechanism for moving the support surface of the second transport body between a raised position above the surface of the support table and a lowered position below the surface of the support table;
A structure for moving the second transport body and the second elevating mechanism in a horizontal direction,
Raising and lowering the second carrier and moving the second carrier and the second elevating mechanism in the horizontal direction to convey the end passed to the support table downstream;
A conveying apparatus characterized by that. In the conveyance apparatus of Claim 3,
The moving mechanism is configured to be movable integrally with the transport body and the lifting mechanism, and the second transport body and the second lifting mechanism.
A conveying apparatus characterized by that. In the conveyance apparatus of Claim 4,
Raising and lowering the carrier and the second carrier in synchronization with each other;
A conveying apparatus characterized by that. In the conveyance apparatus as described in any one of Claims 1 thru | or 5,
Another support table disposed upstream of the dividing table and on which the substrate is placed;
A third carrier having a support surface capable of supporting the lower surface of the substrate;
Third elevating mechanism for moving the support surface of the third transport body between a raised position above the surface of the other support table and a lowered position below the surface of the other support table. When,
A structure for moving the third transport body and the third lifting mechanism in a horizontal direction,
The third carrier is moved up and down and the third carrier and the third lifting mechanism are moved in the horizontal direction to divide the end portion of the substrate placed on the other support table. Place it on the table,
A conveying apparatus characterized by that. In the conveyance apparatus of Claim 6,
The moving mechanism is configured to be movable integrally with the transport body and the lifting mechanism, and the third transport body and the third lifting mechanism.
A conveying apparatus characterized by that. In the conveyance apparatus of Claim 7,
Raising and lowering the carrier and the third carrier in synchronization with each other;
A conveying apparatus characterized by that.