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Publication number
JP2018005117A5
JP2018005117A5 JP2016135253A JP2016135253A JP2018005117A5 JP 2018005117 A5 JP2018005117 A5 JP 2018005117A5 JP 2016135253 A JP2016135253 A JP 2016135253A JP 2016135253 A JP2016135253 A JP 2016135253A JP 2018005117 A5 JP2018005117 A5 JP 2018005117A5
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JP
Japan
Prior art keywords
optical element
holding device
support member
curved surface
substrate
Prior art date
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Application number
JP2016135253A
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Japanese (ja)
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JP2018005117A (en
JP6808381B2 (en
Filing date
Publication date
Application filed filed Critical
Priority to JP2016135253A priority Critical patent/JP6808381B2/en
Priority claimed from JP2016135253A external-priority patent/JP6808381B2/en
Priority to KR1020197002334A priority patent/KR102193387B1/en
Priority to CN201780041316.7A priority patent/CN109416515B/en
Priority to PCT/JP2017/022347 priority patent/WO2018008366A1/en
Publication of JP2018005117A publication Critical patent/JP2018005117A/en
Publication of JP2018005117A5 publication Critical patent/JP2018005117A5/ja
Application granted granted Critical
Publication of JP6808381B2 publication Critical patent/JP6808381B2/en
Expired - Fee Related legal-status Critical Current
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Description

上記課題を解決するために、本発明は、曲面を有する光学素子を保持する保持装置であって、光学素子を支持する支持部材を有し、光学素子の光軸の方向と重力の方向とを含む平面内において、支持部材は、光軸の方向に対して傾けて光学素子を支持していることを特徴とする。 In order to solve the above-described problems, the present invention is a holding device that holds an optical element having a curved surface, and includes a support member that supports the optical element, and the optical axis direction and the gravity direction of the optical element are set. The support member is inclined with respect to the direction of the optical axis and supports the optical element within the plane including the optical element .

Claims (12)

曲面を有する光学素子を保持する保持装置であって、
前記光学素子を支持する支持部材を有し、
前記光学素子の光軸の方向と重力の方向とを含む平面内において、前記支持部材は、前記光軸の方向に対して傾けて前記光学素子を支持していることを特徴とする保持装置。 A holding device for holding an optical element having a curved surface,
A support member for supporting the optical element;
In the plane including the direction of the direction of gravity of the optical axis of the optical element, wherein the support member, the holding device, characterized in that by tilting with respect to the direction of the front Kihikarijiku supports the optical element . 前記曲面は、反射面を含み、前記支持部材は、前記曲面とは反対側の前記光学素子の裏面を介して前記光学素子を支持することを特徴とする請求項１に記載の保持装置。   The holding device according to claim 1, wherein the curved surface includes a reflective surface, and the support member supports the optical element via a back surface of the optical element opposite to the curved surface. 前記支持部材が前記光学素子を支持する前記裏面の部分は、前記曲面のうち有効領域外の部分の反対側の部分であることを特徴とする請求項２に記載の保持装置。 The part before Symbol backside that support member to support the optical element holding device according to claim 2, characterized in that the opposite side portions of the outside of the effective region of the portion of the curved surface. 前記支持部材は、前記光学素子に固定されていることを特徴とする請求項１乃至３のうちいずれか１項に記載の保持装置。   The holding device according to claim 1, wherein the support member is fixed to the optical element. 前記支持部材は、前記光学素子に形成された孔に固定されていることを特徴とする請求項４に記載の保持装置。   The holding device according to claim 4, wherein the support member is fixed to a hole formed in the optical element. 前記曲面は、凹面であり、前記支持部材は、前記光軸の方向に対して上向きに傾けて前記光学素子を支持していることを特徴とする請求項１乃至５のうちいずれか１項に記載の保持装置。 The curved surface is concave, the support member may be any one of claims 1 to 5, characterized in that supporting said optical element is inclined upward with respect to the direction of the front Kihikarijiku A holding device according to claim 1. 前記曲面は、凸面であり、前記支持部材は、前記光軸の方向に対して下向きに傾けて前記光学素子を支持していることを特徴とする請求項１乃至５のうちいずれか１項に記載の保持装置。 The curved surface is a convex surface, the support member may be any one of claims 1 to 5, characterized in that it supports the optical element to be inclined downward with respect to the direction of the front Kihikarijiku A holding device according to claim 1. 前記光軸の方向は、水平方向に沿った方向であることを特徴とする請求項１乃至７のうちいずれか１項に記載の保持装置。 Direction of the optical axis, the holding device according to any one of claims 1 to 7, characterized in that a direction along the horizontal direction. 前記光学素子の複数箇所にそれぞれ力を加えて前記曲面を変形させる複数のアクチュエータと、
前記複数のアクチュエータを制御する制御部と、
を有することを特徴とする請求項１乃至８のうちいずれか１項に記載の保持装置。 A plurality of actuators for applying a force to each of a plurality of locations of the optical element to deform the curved surface;
A control unit for controlling the plurality of actuators;
The holding device according to any one of claims 1 to 8, wherein the holding device is provided. 原版のパターンを基板に投影する投影光学系であって、
曲面を有する光学素子と、
前記光学素子を保持する請求項１乃至９のうちいずれか１項に記載の保持装置と、
を含むことを特徴とする投影光学系。 A projection optical system that projects an original pattern onto a substrate,
An optical element having a curved surface;
The holding device according to any one of claims 1 to 9, which holds the optical element;
A projection optical system comprising: 基板を露光する露光装置であって、
請求項１０に記載の投影光学系を含み、
前記投影光学系を介して前記基板を露光する、
ことを特徴とする露光装置。 An exposure apparatus for exposing a substrate,
Including the projection optical system according to claim 10,
Exposing the substrate through the projection optical system;
An exposure apparatus characterized by that. 請求項１１に記載の露光装置を用いて基板を露光する工程と、
前記工程で露光された前記基板を現像する工程と、
を有することを特徴とする物品の製造方法。 Exposing the substrate using the exposure apparatus according to claim 11;
Developing the substrate exposed in the step;
A method for producing an article comprising:
JP2016135253A 2016-07-07 2016-07-07 Holding device, projection optical system, exposure device, and article manufacturing method Expired - Fee Related JP6808381B2 (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2016135253A JP6808381B2 (en) 2016-07-07 2016-07-07 Holding device, projection optical system, exposure device, and article manufacturing method
KR1020197002334A KR102193387B1 (en) 2016-07-07 2017-06-16 Holding device, projection optical system, exposure device, and article manufacturing method
CN201780041316.7A CN109416515B (en) 2016-07-07 2017-06-16 Holding device, projection optical system, exposure device, and article manufacturing method
PCT/JP2017/022347 WO2018008366A1 (en) 2016-07-07 2017-06-16 Holding device, projection optical system, exposure device, and method for manufacturing article

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2016135253A JP6808381B2 (en) 2016-07-07 2016-07-07 Holding device, projection optical system, exposure device, and article manufacturing method

Publications (3)

Publication Number Publication Date
JP2018005117A JP2018005117A (en) 2018-01-11
JP2018005117A5 true JP2018005117A5 (en) 2019-08-08
JP6808381B2 JP6808381B2 (en) 2021-01-06

Family

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Family Applications (1)

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JP2016135253A Expired - Fee Related JP6808381B2 (en) 2016-07-07 2016-07-07 Holding device, projection optical system, exposure device, and article manufacturing method

Country Status (4)

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JP (1) JP6808381B2 (en)
KR (1) KR102193387B1 (en)
CN (1) CN109416515B (en)
WO (1) WO2018008366A1 (en)

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TWI730666B (en) * 2020-03-12 2021-06-11 財團法人國家實驗研究院 The optical system having a secondary mirror focusing mechanism

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