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JP2016138761A - Three-dimensional measurement method by optical cutting method and three-dimensional measuring instrument - Google Patents

Three-dimensional measurement method by optical cutting method and three-dimensional measuring instrument Download PDF

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JP2016138761A
JP2016138761A JP2015012324A JP2015012324A JP2016138761A JP 2016138761 A JP2016138761 A JP 2016138761A JP 2015012324 A JP2015012324 A JP 2015012324A JP 2015012324 A JP2015012324 A JP 2015012324A JP 2016138761 A JP2016138761 A JP 2016138761A
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line
light source
distance
line light
camera
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Inventor
井桁 健一郎
Kenichiro Iketa
健一郎 井桁
貞美 板垣
Sadami Itagaki
貞美 板垣
準 堤
Jun Tsutsumi
準 堤
龍耶 林
Tatsuya Hayashi
龍耶 林
渡部 洋士
Yoji Watabe
洋士 渡部
二神 誉夫
Yoshio Futagami
誉夫 二神
彰吾 中尾
Shogo Nakao
彰吾 中尾
優一 浦川
Yuichi Urakawa
優一 浦川
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KASCO CORP
Mamiya OP Nequos Co Ltd
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KASCO CORP
Mamiya OP Nequos Co Ltd
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Abstract

PROBLEM TO BE SOLVED: To provide a three-dimensional measurement method by an optical cutting method, capable of accurately obtaining three-dimensional measurement data with an inexpensive configuration.SOLUTION: On a reference surface 3 on which a measuring object 2 is mounted, angles RA, CA to a measuring point TP of a line light source 12 and a camera 13 are calculated from RA=90-tan(SL/HL), CA=90-tan(CL/HL) using distances SL, CL from the line light source 12 and the camera 13 to an irradiation position of line light 12b and a distance HL from the reference surface 3 to the line light source 12 and the camera 13. Since a mechanism for accurately detecting the angle of the line light source and a mechanism for accurately controlling the angle of the line light source are not required, a three-dimensional measuring instrument capable of accurately obtaining three-dimensional data can be achieved with an inexpensive configuration.SELECTED DRAWING: Figure 1

Description

本発明は、ライン光源を回転させて、当該ライン光源からのライン光(スリット光)で、基準面に載せた測定対象物の表面を走査し、当該表面を走査するライン光の撮影画像に基づき、当該表面の三次元形状を測定する光切断法による三次元測定方法および三次元測定器に関する。   The present invention rotates a line light source, scans the surface of a measurement object placed on a reference surface with line light (slit light) from the line light source, and based on a photographed image of line light that scans the surface. Further, the present invention relates to a three-dimensional measuring method and a three-dimensional measuring device by a light cutting method for measuring the three-dimensional shape of the surface.

測定対象物の表面の三次元形状を測定するための方法として、光切断法による三次元測定方法が知られている。光切断法では、LED、レーザーなどの点光源からレンズ光学系等によってライン光を形成し、ライン光に直交する方向に、ライン光を測定対象物に対して相対移動させて測定対象物の表面をライン光で走査する。ライン光による表面走査光像をカメラによって撮影し、撮影画像から測定対象物の表面の三次元データを取得している。ライン光の走査方式としては、測定対象物あるいはライン光源を平行移動させる方式と、特許文献1に記載されているように、ライン光源を回転させる方式とが知られている。   As a method for measuring the three-dimensional shape of the surface of the measurement object, a three-dimensional measurement method using a light cutting method is known. In the light cutting method, line light is formed by a lens optical system or the like from a point light source such as an LED or a laser, and the line light is moved relative to the measurement object in a direction perpendicular to the line light to thereby measure the surface of the measurement object. Is scanned with line light. The surface scanning light image by line light is image | photographed with the camera, and the three-dimensional data of the surface of a measuring object are acquired from the picked-up image. As a scanning method of line light, a method of translating a measurement object or a line light source and a method of rotating a line light source as described in Patent Document 1 are known.

一般的なライン光源を回転させて測定対象物の表面を走査する方式の三次元測定器では、測定ポイントに対するライン光源の角度および測定ポイントに対するカメラの角度と、各部の間の距離とを用いて、三角測量の原理を利用して測定対象物の高さを求めている。   In a three-dimensional measuring instrument that scans the surface of a measurement object by rotating a general line light source, the angle of the line light source with respect to the measurement point, the angle of the camera with respect to the measurement point, and the distance between each part are used. The height of the measurement object is obtained using the principle of triangulation.

図3を参照して説明すると、ライン光走査方向であるx方向におけるライン光源101とカメラ102との距離をWL、測定対象物103の表面上の測定ポイントTPに対するライン光源101の角度をRA、測定ポイントTPに対するカメラ102の角度をCAとする。   Referring to FIG. 3, the distance between the line light source 101 and the camera 102 in the x direction that is the line light scanning direction is WL, the angle of the line light source 101 with respect to the measurement point TP on the surface of the measurement object 103 is RA, The angle of the camera 102 with respect to the measurement point TP is CA.

ライン光源101およびカメラ102が位置する上面104から測定ポイントTPまでの距離TLは、距離WL、角度RA、CAを用いて、次の式(1)により算出される。
TL=WL/{1/tan(RA)+1/tan(CA)} (1)
A distance TL from the upper surface 104 where the line light source 101 and the camera 102 are located to the measurement point TP is calculated by the following equation (1) using the distance WL, the angles RA, and CA.
TL = WL / {1 / tan (RA) + 1 / tan (CA)} (1)

測定対象物103を載せる基準面105と上面104との間の距離HLは既知の値であるので、求めようとしている測定ポイントTPの基準面105からの高さZは、次の式(2)により算出される。
Z=HL−TL
=HL−WL/{1/tan(RA)+1/tan(CA)} (2)
Since the distance HL between the reference surface 105 on which the measurement object 103 is placed and the upper surface 104 is a known value, the height Z of the measurement point TP to be obtained from the reference surface 105 is expressed by the following equation (2). Is calculated by
Z = HL-TL
= HL-WL / {1 / tan (RA) + 1 / tan (CA)} (2)

特開2010−19812号公報JP 2010-19812 A

ここで、ライン光源を回転させて測定対象物の表面をライン光で走査する方式の三次元測定器においては、測定ポイントの高さの算出基準となる角度RAに誤差が生じると、精度良く三次元データを取得できない。したがって、ライン光源の角度RAを精度良く検出でき、かつ、回転させるライン光源の角度を精度良く制御できることが必要である。   Here, in a three-dimensional measuring instrument that scans the surface of the measurement object with line light by rotating the line light source, if an error occurs in the angle RA that is a calculation reference for the height of the measurement point, the tertiary is accurately obtained. The original data cannot be obtained. Accordingly, it is necessary that the angle RA of the line light source can be detected with high accuracy and the angle of the line light source to be rotated can be controlled with high accuracy.

ライン光源の角度RAを精度良く検出するためには、当該角度RAの検出基準となるライン光源の原点位置を精度良く検出する必要がある。そのために、高精度な検出機構、例
えば、高分解能のアブソリュートエンコーダが必要になる。また、ライン光源をカメラと正確に同期をとって回転させる必要があり、同期を取らない場合には、ライン光源の回転駆動に当って超高精度な速度制御が必要になる。
In order to detect the angle RA of the line light source with high accuracy, it is necessary to detect with high accuracy the origin position of the line light source serving as a detection reference for the angle RA. For this purpose, a highly accurate detection mechanism, for example, a high resolution absolute encoder is required. In addition, it is necessary to rotate the line light source accurately in synchronization with the camera. When the line light source is not synchronized, it is necessary to control the speed of the line light source with ultrahigh accuracy when rotating the line light source.

例えば、図3の例において、距離HL=300mm、距離WL=100mm、ライン光源の角度RA=80°、カメラの角度CA=80°の場合において、角度RAに0.1°という非常に小さい誤差があったとすると(すなわち、実際の角度RA=80.1°であったとすると)、上記の式(1)より、
TL=300−100/{(1/tan(80)+1/tan(80)}
=16.436mm
と算出される。
For example, in the example of FIG. 3, when the distance HL = 300 mm, the distance WL = 100 mm, the line light source angle RA = 80 °, and the camera angle CA = 80 °, the angle RA is a very small error of 0.1 °. (That is, when the actual angle RA = 80.1 °), from the above equation (1),
TL = 300-100 / {(1 / tan (80) + 1 / tan (80)}
= 16.436 mm
Is calculated.

しかしながら、実際の値は、次のようになる。
TL=300−100/{(1/tan(80.1)+1/tan(80)}
=14.982mm
このため、測定結果には、1.452mm(=16.436−14.982)と大きな誤差が生じる。このように、僅かな角度誤差に起因して測定された三次元データに大きな誤差が生じるので、角度検出、角度制御を精度良く行う必要がある。
However, the actual values are as follows:
TL = 300-100 / {(1 / tan (80.1) + 1 / tan (80)}
= 14.982 mm
For this reason, the measurement result has a large error of 1.452 mm (= 16.436-14.982). As described above, since a large error occurs in the three-dimensional data measured due to a slight angle error, it is necessary to accurately perform angle detection and angle control.

さらには、基準面を照射するライン光が、走査方向に直交するy方向に平行でないと、平行とのずれで、角度RAに誤差が生じてしまう。この場合の誤差は、計算により補正することが可能であるが、そのためには、平行からの角度ずれを検出し、あるいは、初期値として用意しておく必要がある。   Furthermore, if the line light that irradiates the reference surface is not parallel to the y direction orthogonal to the scanning direction, an error occurs in the angle RA due to a deviation from the parallel. The error in this case can be corrected by calculation. For this purpose, it is necessary to detect an angular deviation from parallel or prepare it as an initial value.

これに加えて、測定対象物の高さZを算出するために、上面104から測定ポイントTPまでの間の長い距離TLを計算しているので、この点からも測定精度が低下しやすいという問題点がある。   In addition to this, since the long distance TL from the upper surface 104 to the measurement point TP is calculated in order to calculate the height Z of the measurement object, the measurement accuracy tends to be lowered from this point as well. There is a point.

本発明の課題は、このような点に鑑みて、測定対象物を載せた基準面上における各部の間の距離に基づきライン光源の測定ポイントに対する角度を算出し、算出した角度に基づき測定対象物の高さを算出することで、角度の検出誤差等に影響されずに精度良く測定を行うことができる光切断法による三次元測定方法および三次元測定器を提供することにある。   In view of such a point, an object of the present invention is to calculate an angle of a line light source with respect to a measurement point based on a distance between each part on a reference plane on which the measurement object is placed, and to measure the measurement object based on the calculated angle. It is an object to provide a three-dimensional measuring method and a three-dimensional measuring instrument based on an optical cutting method that can measure with high accuracy without being affected by an angle detection error or the like.

上記の課題を解決するために、本発明は、
ライン光源を回転させて、基準面に載せた測定対象物の表面をライン光で走査し、前記表面を照射する前記ライン光の光切断線をカメラで撮影し、撮影画像に基づき前記表面の三次元形状を算出する光切断法による三次元測定方法において、
前記基準面上における前記ライン光の走査方向をx方向、前記基準面上における前記x方向に直交する方向をy方向、前記基準面の法線方向をz方向とし、
前記基準面から前記ライン光源および前記カメラの撮像中心までのz方向の距離をHL、前記ライン光源から前記カメラの撮像中心までのx方向の距離をWL、前記基準面上における前記ライン光源から前記光切断線までのx方向の距離をSL、前記基準面上における前記カメラから前記光切断線までのx方向の距離をCL、前記基準面に対する前記ライン光源の角度をRA、前記基準面に対する前記カメラの角度をCAとすると、
前記角度RAおよびCAを、それぞれ、次式で示すように、距離HL、SLおよびCLを用いて算出し、
RA=90−tan−1(SL/HL)
CA=90−tan−1(CL/HL)
前記ライン光の前記測定対象物の表面上の位置を測定ポイントとすると、前記基準面上の前記光切断線から、前記カメラの撮像中心および前記測定ポイントを通る線分が前記基準面に交わる交点までのx方向の距離をBLとすると、当該距離BLを次式により算出し、
BL=SL+CL−WL
前記測定ポイントにおける前記基準面からのz方向の高さZを、
Z=BL/{1/tan(RA)+1/tan(CA)}
により算出することを特徴とする。
In order to solve the above problems, the present invention provides:
The line light source is rotated, the surface of the measurement object placed on the reference surface is scanned with line light, the light cutting line of the line light that irradiates the surface is photographed with a camera, and the surface is tertiary based on the photographed image. In the three-dimensional measurement method by the light cutting method to calculate the original shape,
The scanning direction of the line light on the reference plane is the x direction, the direction orthogonal to the x direction on the reference plane is the y direction, and the normal direction of the reference plane is the z direction,
The distance in the z direction from the reference plane to the line light source and the imaging center of the camera is HL, the distance in the x direction from the line light source to the imaging center of the camera is WL, and the distance from the line light source on the reference plane to the line The distance in the x direction to the light cutting line is SL, the distance in the x direction from the camera to the light cutting line on the reference plane is CL, the angle of the line light source with respect to the reference plane is RA, and the distance to the reference plane is If the camera angle is CA,
The angles RA and CA are calculated using distances HL, SL, and CL, respectively, as shown by the following equations:
RA = 90-tan −1 (SL / HL)
CA = 90-tan −1 (CL / HL)
Assuming that the position of the line light on the surface of the measurement object is a measurement point, an intersection where a line segment passing through the imaging center of the camera and the measurement point intersects the reference plane from the light cutting line on the reference plane If the distance in the x direction up to is BL, the distance BL is calculated by the following equation:
BL = SL + CL-WL
A height Z in the z direction from the reference plane at the measurement point,
Z = BL / {1 / tan (RA) + 1 / tan (CA)}
It is characterized by calculating by.

本発明の三次元測定法では、測定ポイントに対するライン光源の角度RAおよび測定ポイントに対するカメラの角度CAを、各部の間の距離SL、CL、HLを用いて算出し、算出した角度RA、CAを用いて測定ポイントの高さZを算出している。よって、角度RAの検出誤差、角度RAの制御誤差に影響されずに三次元測定データを取得できる。   In the three-dimensional measurement method of the present invention, the line light source angle RA with respect to the measurement point and the camera angle CA with respect to the measurement point are calculated using the distances SL, CL, and HL between the respective parts, and the calculated angles RA and CA are calculated. It is used to calculate the height Z of the measurement point. Therefore, the three-dimensional measurement data can be acquired without being affected by the detection error of the angle RA and the control error of the angle RA.

したがって、角度RAの検出基準となるライン光源の原点角度を精度良く検出する必要がなく、フォトインタラプタ等の安価な原点検出機構を用いることができる。また、ライン光源をカメラと同期を取って精度良く回転駆動させる必要がないので、USBカメラを用いてライン光源と非同期に動画を取得するだけでよい。さらに、ライン光源による基準面上の光切断線がy方向に対して傾斜していても、角度RAに誤差が生じないので、ライン光の平行度を検出する機構が不要である。   Therefore, it is not necessary to accurately detect the origin angle of the line light source that becomes the detection reference of the angle RA, and an inexpensive origin detection mechanism such as a photo interrupter can be used. Further, since it is not necessary to synchronize the line light source with the camera and rotate it with high accuracy, it is only necessary to acquire a moving image asynchronously with the line light source using a USB camera. Further, even if the light cutting line on the reference surface by the line light source is inclined with respect to the y direction, no error is generated in the angle RA, so that a mechanism for detecting the parallelism of the line light is unnecessary.

さらには、測定ポイントの高さZを算出するために、測定ポイントから上面までの長い距離(HL−Z)を算出する必要がなく、直接に高さZを算出しているので、誤差の少ない測定を実現できる。   Furthermore, in order to calculate the height Z of the measurement point, it is not necessary to calculate a long distance (HL-Z) from the measurement point to the upper surface, and since the height Z is directly calculated, there are few errors. Measurement can be realized.

このように、本発明によれば、安価な構成で、精度良く三次元測定データを取得できる三次元測定方法が得られる。   Thus, according to the present invention, it is possible to obtain a three-dimensional measurement method capable of acquiring three-dimensional measurement data with high accuracy with an inexpensive configuration.

本発明の三次元測定方法において、基準面上の光切断線がy方向に対して傾斜している場合には、y方向の各位置において、距離SL(x方向における前記ライン光源の回転中心から前記光切断線までの間の距離)が相違する。この場合には、距離SLとして、次のように算出した値を用いればよい。   In the three-dimensional measurement method of the present invention, when the light cutting line on the reference plane is inclined with respect to the y direction, the distance SL (from the rotation center of the line light source in the x direction) at each position in the y direction. The distance to the light cutting line is different. In this case, a value calculated as follows may be used as the distance SL.

すなわち、前記基準面上において、前記測定対象物に対してy方向の両側に、x方向に平行に延びる第1基準ラインおよび第2基準ラインを定め、前記第1、第2基準ラインのy方向の間隔をALとし、前記第1基準ラインと前記基準面上の前記光切断線との交点から前記ライン光源までのx方向の距離をS1L、前記第2基準ラインと前記光切断線との交点から前記ライン光源までのx方向の距離をS2Lとし、前記第1基準ラインから前記測定ポイントまでのy方向の距離をPLとすると、前記距離SLとして、
SL=(S2L−S1L)/AL × PL
により算出した値を用いればよい。
That is, on the reference plane, a first reference line and a second reference line extending in parallel to the x direction are defined on both sides of the measurement object on the y direction, and the first and second reference lines in the y direction. The distance in the x direction from the intersection of the first reference line and the light cutting line on the reference plane to the line light source is S1L, and the intersection of the second reference line and the light cutting line When the distance in the x direction from the line light source to the line light source is S2L, and the distance in the y direction from the first reference line to the measurement point is PL, the distance SL is
SL = (S2L-S1L) / AL x PL
The value calculated by the above may be used.

次に、本発明は上記方法を用いた三次元測定器であって、
測定対象物を載せる基準面と、
ライン光源を回転させて、前記基準面に載せた測定対象物の表面を前記ライン光源から射出されるライン光で走査する走査光学系と、
前記表面を照射する前記ライン光の光切断線を撮影するカメラを備えた撮像光学系と、
前記カメラの撮影画像に基づき前記表面の三次元形状を算出する信号処理部と、
を有しており、
前記信号処理部は、上記の方法により、前記表面の各測定ポイントの高さを算出するこ
とを特徴としている。
Next, the present invention is a three-dimensional measuring instrument using the above method,
A reference surface on which the measurement object is placed;
A scanning optical system that rotates the line light source and scans the surface of the measurement object placed on the reference surface with the line light emitted from the line light source;
An imaging optical system including a camera for photographing a light cutting line of the line light that irradiates the surface;
A signal processing unit that calculates a three-dimensional shape of the surface based on a captured image of the camera;
Have
The signal processing unit calculates the height of each measurement point on the surface by the above method.

(a)は本発明を適用した三次元測定器の構成を示す構成図であり、(b)はその基準面に測定対象物を載せた状態を示す説明図である。(A) is a block diagram which shows the structure of the three-dimensional measuring device to which this invention is applied, (b) is explanatory drawing which shows the state which mounted the measuring object on the reference plane. ライン光の基準面上の光切断線が傾いている場合の状態を示す説明図である。It is explanatory drawing which shows a state in case the optical cutting line on the reference plane of line light inclines. 従来の光切断法による三次元測定方法を示す説明図である。It is explanatory drawing which shows the three-dimensional measuring method by the conventional light cutting method.

以下に、図面を参照して、本発明を適用した光切断法による三次元測定器の実施の形態を説明する。図1(a)は本実施の形態に係る三次元測定器の概略構成を示す説明図であり、図1(b)は基準面に測定対象物を置いた状態を示す説明図である。   Hereinafter, an embodiment of a three-dimensional measuring device by a light cutting method to which the present invention is applied will be described with reference to the drawings. FIG. 1A is an explanatory diagram illustrating a schematic configuration of the three-dimensional measuring device according to the present embodiment, and FIG. 1B is an explanatory diagram illustrating a state in which a measurement object is placed on a reference surface.

(全体構成)
三次元測定器1は、測定対象物2、例えば人間の手を載せる基準面3と、ライン光で測定対象物2を走査する走査光学系4と、ライン光による測定対象物の走査画像を撮影する撮像光学系5と、各部を制御し、撮影画像に基づき測定対象物の三次元データを算出する制御装置6を備えている。
(overall structure)
The three-dimensional measuring instrument 1 takes a measurement object 2, for example, a reference surface 3 on which a human hand is placed, a scanning optical system 4 that scans the measurement object 2 with line light, and a scanning image of the measurement object with line light. And an imaging optical system 5 that controls each unit and calculates three-dimensional data of the measurement object based on the captured image.

基準面3は例えば長方形の平坦面であり、図に示すように、その長さ方向をx方向、その幅方向をy方向、基準面3の法線方向をz方向と呼ぶものとする。基準面3の上方には、基準面3から所定の距離(z方向の距離)HLの位置に、基準面3に平行な平坦な上面11が配置され、当該上面11には、走査光学系4のライン光源12および撮像光学系5のカメラ13が取り付けられている。   The reference surface 3 is, for example, a rectangular flat surface. As shown in the drawing, the length direction is referred to as the x direction, the width direction is referred to as the y direction, and the normal direction of the reference surface 3 is referred to as the z direction. Above the reference surface 3, a flat upper surface 11 parallel to the reference surface 3 is disposed at a predetermined distance (distance in the z direction) HL from the reference surface 3, and the scanning optical system 4 is disposed on the upper surface 11. The line light source 12 and the camera 13 of the imaging optical system 5 are attached.

ライン光源12は、例えば、LED、レーザー等の点光源と、点光源からの射出光をy方向に広がるライン光に変換して射出するレンズ光学系等から構成される。ライン光源12は、回転機構14によって、上面11上に位置する回転中心12a回りに回転可能である。ライン光源12が回転すると、そこから射出されて基準面3を照射するライン光12bの照射ラインである光切断線12cが、基準面3上を、その長さ方向であるx方向に走査する。   The line light source 12 includes, for example, a point light source such as an LED and a laser, and a lens optical system that converts the emitted light from the point light source into line light that spreads in the y direction and emits it. The line light source 12 can be rotated around the rotation center 12 a located on the upper surface 11 by the rotation mechanism 14. When the line light source 12 rotates, an optical cutting line 12c that is an irradiation line of the line light 12b that is emitted from the line light source 12 and irradiates the reference surface 3 scans the reference surface 3 in the x direction that is the length direction thereof.

カメラ13の撮像中心13aの中心は、上面11において、ライン光源12の回転中心12aからx方向に距離WLだけ離れた位置に配置されている。カメラ13として各種のものを用いることができる。カメラ13は、基準面3上におけるライン光12bの光切断線12cの走査範囲を包含する領域を撮影可能である。   The center of the imaging center 13a of the camera 13 is disposed on the upper surface 11 at a position separated from the rotation center 12a of the line light source 12 by a distance WL in the x direction. Various cameras 13 can be used. The camera 13 can photograph a region on the reference plane 3 that includes the scanning range of the light cutting line 12c of the line light 12b.

各部の駆動制御を司る制御装置6は、ライン光源12、回転機構14およびカメラ13の駆動制御部15、16、17と、カメラ13から得られる撮影画像を処理して測定対象物2の三次元測定データを算出する信号処理部18等を備えている。   The control device 6 that controls the drive of each unit processes the captured images obtained from the line light source 12, the rotation mechanism 14, the drive control units 15, 16, and 17 of the camera 13 and the camera 13, and the three-dimensional of the measurement object 2. A signal processing unit 18 for calculating measurement data is provided.

測定に当っては、図1に示すように、測定対象物2を基準面3上の所定の位置に載せる。基準面3上には、その幅方向であるy方向の両端縁に一定幅の基準面帯3b、3cが形成され、双方の基準面帯3b、3cの間の領域3aが測定対象物2の載置面である。また、双方の基準面帯3b、3cには、それぞれ、y方向に平行に延びる第1基準ライン9a、第2基準ライン9bが、カメラ13の該当する画素を利用した仮想のラインとして描かれている。なお、図1(b)および後述の図2には、双方の基準面帯3b、3cに、それぞれ仮想のラインである第1基準ライン9a、第2基準ライン9bを太い実線で示してある。   In the measurement, as shown in FIG. 1, the measurement object 2 is placed at a predetermined position on the reference surface 3. On the reference surface 3, reference surface bands 3 b and 3 c having a constant width are formed at both edges in the y direction which is the width direction, and a region 3 a between both reference surface bands 3 b and 3 c is formed on the measurement object 2. It is a mounting surface. Further, the first reference line 9a and the second reference line 9b extending in parallel to the y direction are drawn as virtual lines using corresponding pixels of the camera 13, respectively, on both reference plane bands 3b and 3c. Yes. In FIG. 1B and FIG. 2 to be described later, the first reference line 9a and the second reference line 9b, which are virtual lines, are indicated by thick solid lines in both reference plane bands 3b and 3c, respectively.

基準面3の領域3aに測定対象物2を載せた状態で、ライン光源12をオンしてライン光12bを測定対象物2の表面に照射する。ライン光源12を回転機構14によって回転させることにより、ライン光12bで、測定対象物2の表面をx方向に走査する。ライン光12bの光切断線12cの走査画像がカメラ13によって取得される。カメラ13で取得された画像は、制御装置6の信号処理部18において次のように処理されて、測定対象物2の表面上の各測定ポイントTPの高さZが算出される。   With the measurement object 2 placed on the region 3 a of the reference surface 3, the line light source 12 is turned on to irradiate the surface of the measurement object 2 with the line light 12 b. By rotating the line light source 12 by the rotation mechanism 14, the surface of the measurement object 2 is scanned in the x direction with the line light 12b. A scanning image of the light cutting line 12 c of the line light 12 b is acquired by the camera 13. The image acquired by the camera 13 is processed in the signal processing unit 18 of the control device 6 as follows, and the height Z of each measurement point TP on the surface of the measurement object 2 is calculated.

(処理手順)
まず、基準面3上において、x方向におけるライン光源12の回転中心12aに対応する位置から基準面3上の光切断線12cの位置までの距離をSLとする。また、ライン光12bが照射する測定対象物2の表面上の測定ポイントをTPとすると、基準面3上において、x方向におけるカメラ13の撮像中心13aから、当該撮像中心13aおよび測定ポイントTPを通る線分13bが基準面3に交わる交点までの距離をCLとする。これらの距離SL、CLは、基準面3上において、光切断線12cと左右の第1、第2基準ライン9a、9bとの交点に基づき算出できる。
(Processing procedure)
First, let SL be the distance from the position corresponding to the rotation center 12a of the line light source 12 in the x direction on the reference plane 3 to the position of the light cutting line 12c on the reference plane 3. Further, assuming that the measurement point on the surface of the measurement object 2 irradiated with the line light 12b is TP, on the reference plane 3, the imaging center 13a of the camera 13 in the x direction passes through the imaging center 13a and the measurement point TP. Let CL be the distance to the intersection where the line segment 13b intersects the reference plane 3. These distances SL and CL can be calculated on the reference plane 3 based on the intersections of the light section line 12c and the left and right first and second reference lines 9a and 9b.

また、ライン光源12の回転角、すなわち、ライン光12bが照射する測定対象物2の表面上の測定ポイントTPに対するライン光源12の角度をRAとし、測定ポイントTPに対するカメラ13の角度(撮像中心13aと測定ポイントTPを結ぶ線分13bの上面11に対する角度)をCAとする。   The rotation angle of the line light source 12, that is, the angle of the line light source 12 with respect to the measurement point TP on the surface of the measurement object 2 irradiated by the line light 12b is RA, and the angle of the camera 13 with respect to the measurement point TP (imaging center 13a). And the angle of the line 13b connecting the measurement point TP to the upper surface 11) is CA.

図1(a)に拡大して示すように、基準面3と上面11が平行であるので、角度RAは基準面3とライン光12bのなす角度に等しく、角度CAは、基準面3と線分13bのなす角度に等しい。   As shown in an enlarged view in FIG. 1A, since the reference surface 3 and the upper surface 11 are parallel, the angle RA is equal to the angle formed by the reference surface 3 and the line light 12b, and the angle CA is a line with the reference surface 3. It is equal to the angle formed by the minute 13b.

したがって、角度RAおよび角度CAは、それぞれ、次の式(3)、(4)で示すように、距離HL、SLおよびCLを用いて算出される。
RA=90−tan−1(SL/HL) (3)
CA=90−tan−1(CL/HL) (4)
Therefore, the angle RA and the angle CA are calculated using the distances HL, SL, and CL, as shown by the following equations (3) and (4), respectively.
RA = 90-tan −1 (SL / HL) (3)
CA = 90-tan −1 (CL / HL) (4)

基準面3において、ライン光の光切断線12cの位置から、カメラ13の撮像中心13aと測定ポイントTPを結ぶ線分13bが交差する交点までのx方向の距離をBLとすると、当該距離BLを次の式(5)により算出される。
BL=SL+CL−WL (5)
If the distance in the x direction from the position of the optical cutting line 12c of the line light to the intersection where the line segment 13b connecting the imaging center 13a of the camera 13 and the measurement point TP intersects on the reference plane 3, let BL be the distance BL. It is calculated by the following equation (5).
BL = SL + CL-WL (5)

よって、測定ポイントTPの高さZ、すなわち、基準面3から測定ポイントTPまでのz方向の距離は次の式(6)により算出される。
Z=BL/{1/tan(RA)+1/tan(CA)} (6)
Therefore, the height Z of the measurement point TP, that is, the distance in the z direction from the reference plane 3 to the measurement point TP is calculated by the following equation (6).
Z = BL / {1 / tan (RA) + 1 / tan (CA)} (6)

図2は、ライン光12bの光切断線12cが基準面幅方向であるy方向に対して傾斜している場合の説明図である。図示の場合には、距離SLは、基準面幅方向の一方の第1基準ライン9aの側では、距離S1Lと相対的に長くなり、反対側の第2基準ライン9bの側では距離S2Lと相対的に短くなる。   FIG. 2 is an explanatory diagram when the light cutting line 12c of the line light 12b is inclined with respect to the y direction which is the reference plane width direction. In the illustrated case, the distance SL is relatively longer on the side of the first reference line 9a in the reference surface width direction than the distance S1L, and is relatively on the opposite side of the second reference line 9b. Become shorter.

この場合には、第1、第2基準ライン9a、9bの間のy方向の距離をALとし、第1基準ライン9aから測定ポイントTPまでのy方向の距離をPLとすると、距離SLとして、次の式(7)により算出される値を用いればよい。
SL=(S2L−S1L)/AL × PL (7)
In this case, if the distance in the y direction between the first and second reference lines 9a and 9b is AL and the distance in the y direction from the first reference line 9a to the measurement point TP is PL, the distance SL is A value calculated by the following equation (7) may be used.
SL = (S2L−S1L) / AL × PL (7)

以上説明したように、本例の三次元測定器1では、距離SL、CL、HLを用いて角度
RAを算出しているので、角度RAの誤差に影響されずに精度良く測定対象物の三次元測定データを取得できる。また、角度RAを精度良く検出するための検出機構が不要である。さらに、ライン光源3をカメラ13の撮影動作に同期させて精度良く回転させる(ライン光を走査させる)必要もない。これに加えて、上面から測定ポイントTPまでの長い距離を算出することなく、基準面から測定ポイントTPまでの高さを算出しているので、精度良く高さを算出できる。
As described above, in the three-dimensional measuring instrument 1 of this example, the angle RA is calculated using the distances SL, CL, and HL. Therefore, the tertiary of the measurement object is accurately obtained without being affected by the error of the angle RA. The original measurement data can be acquired. In addition, a detection mechanism for accurately detecting the angle RA is not necessary. Further, it is not necessary to rotate the line light source 3 with high accuracy in synchronization with the photographing operation of the camera 13 (scan the line light). In addition, since the height from the reference surface to the measurement point TP is calculated without calculating a long distance from the upper surface to the measurement point TP, the height can be calculated with high accuracy.

1 三次元測定器
2 測定対象物
3 基準面
3a,3b 基準面帯
4 走査光学系
5 撮像光学系
6 駆動装置
9a 第1基準ライン
9b 第2基準ライン
11 上面
12 ライン光源
12a 回転中心
12b ライン光
12c 光切断線
13 カメラ
13a 撮像中心
14 回転機構
15,16,17 駆動制御部
18 信号処理部
DESCRIPTION OF SYMBOLS 1 Three-dimensional measuring device 2 Measuring object 3 Reference surface 3a, 3b Reference surface belt | band | zone 4 Scanning optical system 5 Imaging optical system 6 Drive device 9a 1st reference line 9b 2nd reference line 11 Upper surface 12 Line light source 12a Rotation center 12b Line light 12c Optical cutting line 13 Camera 13a Imaging center 14 Rotating mechanism 15, 16, 17 Drive control unit 18 Signal processing unit

Claims (3)

ライン光源を回転させて、基準面に載せた測定対象物の表面をライン光で走査し、前記表面を照射する前記ライン光の光切断線をカメラで撮影し、撮影画像に基づき前記表面の三次元形状を算出する光切断法による三次元測定方法において、
前記基準面上における前記ライン光の走査方向をx方向、前記基準面上における前記x方向に直交する方向をy方向、前記基準面の法線方向をz方向とし、
前記基準面から前記ライン光源および前記カメラの撮像中心までのz方向の距離をHL、前記ライン光源から前記カメラの撮像中心までのx方向の距離をWL、前記基準面上における前記ライン光源から前記光切断線までのx方向の距離をSL、前記基準面上における前記カメラから前記光切断線までのx方向の距離をCL、前記基準面に対する前記ライン光源の角度をRA、前記基準面に対する前記カメラの角度をCAとすると、
前記角度RAおよびCAを、それぞれ、次式で示すように、距離HL、SLおよびCLを用いて算出し、
RA=90−tan−1(SL/HL)
CA=90−tan−1(CL/HL)
前記ライン光の前記測定対象物の表面上の位置を測定ポイントとすると、前記基準面上の前記光切断線から、前記カメラの撮像中心および前記測定ポイントを通る線分が前記基準面に交わる交点までのx方向の距離をBLとすると、当該距離BLを次式により算出し、
BL=SL+CL−WL
前記測定ポイントにおける前記基準面からのz方向の高さZを、
Z=BL/{1/tan(RA)+1/tan(CA)}
により算出することを特徴とする光切断法による三次元測定方法。
The line light source is rotated, the surface of the measurement object placed on the reference surface is scanned with line light, the light cutting line of the line light that irradiates the surface is photographed with a camera, and the surface is tertiary based on the photographed image. In the three-dimensional measurement method by the light cutting method to calculate the original shape,
The scanning direction of the line light on the reference plane is the x direction, the direction orthogonal to the x direction on the reference plane is the y direction, and the normal direction of the reference plane is the z direction,
The distance in the z direction from the reference plane to the line light source and the imaging center of the camera is HL, the distance in the x direction from the line light source to the imaging center of the camera is WL, and the distance from the line light source on the reference plane to the line The distance in the x direction to the light cutting line is SL, the distance in the x direction from the camera to the light cutting line on the reference plane is CL, the angle of the line light source with respect to the reference plane is RA, and the distance to the reference plane is If the camera angle is CA,
The angles RA and CA are calculated using distances HL, SL, and CL, respectively, as shown by the following equations:
RA = 90-tan −1 (SL / HL)
CA = 90-tan −1 (CL / HL)
Assuming that the position of the line light on the surface of the measurement object is a measurement point, an intersection where a line segment passing through the imaging center of the camera and the measurement point intersects the reference plane from the light cutting line on the reference plane If the distance in the x direction up to is BL, the distance BL is calculated by the following equation:
BL = SL + CL-WL
A height Z in the z direction from the reference plane at the measurement point,
Z = BL / {1 / tan (RA) + 1 / tan (CA)}
A three-dimensional measurement method by a light section method, characterized by:
前記基準面上において、前記測定対象物に対してy方向の両側に、x方向に平行に延びる第1基準ラインおよび第2基準ラインを定め、前記第1、第2基準ラインのy方向の間隔をALとし、前記第1基準ラインと前記基準面上の前記光切断線との交点から前記ライン光源までのx方向の距離をS1L、前記第2基準ラインと前記光切断線との交点から前記ライン光源までのx方向の距離をS2Lとし、前記第1基準ラインから前記測定ポイントまでのy方向の距離をPLとすると、前記距離SLとして、
SL=(S2L−S1L)/AL × PL
により算出した値を用いる請求項1に記載の光切断法による三次元測定方法。
A first reference line and a second reference line extending in parallel with the x direction are defined on both sides of the measurement object on the reference plane in the y direction, and an interval between the first and second reference lines in the y direction. Is AL, and the distance in the x direction from the intersection of the first reference line and the light cutting line on the reference surface to the line light source is S1L, and from the intersection of the second reference line and the light cutting line, When the distance in the x direction to the line light source is S2L and the distance in the y direction from the first reference line to the measurement point is PL, the distance SL is
SL = (S2L-S1L) / AL x PL
The three-dimensional measuring method by the optical cutting method according to claim 1, wherein the value calculated by the above is used.
測定対象物を載せる基準面と、
ライン光源を回転させて、前記基準面に載せた測定対象物の表面を前記ライン光源から射出されるライン光で走査する走査光学系と、
前記表面を照射する前記ライン光の光切断線を撮影するカメラを備えた撮像光学系と、
前記カメラの撮影画像に基づき前記表面の三次元形状を算出する信号処理部と、
を有しており、
前記信号処理部は、請求項1または2に記載の方法により、前記表面の各測定ポイントの高さを算出することを特徴とする三次元測定器。
A reference surface on which the measurement object is placed;
A scanning optical system that rotates the line light source and scans the surface of the measurement object placed on the reference surface with the line light emitted from the line light source;
An imaging optical system including a camera for photographing a light cutting line of the line light that irradiates the surface;
A signal processing unit that calculates a three-dimensional shape of the surface based on a captured image of the camera;
Have
The said signal processing part calculates the height of each measurement point of the said surface by the method of Claim 1 or 2, The three-dimensional measuring device characterized by the above-mentioned.
JP2015012324A 2015-01-26 2015-01-26 Three-dimensional measurement method by optical cutting method and three-dimensional measuring instrument Pending JP2016138761A (en)

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