JP2016036860A - Multi-wire electro-discharge machining device - Google Patents

Abstract

A multi-wire electric discharge machining apparatus capable of suppressing wire vibration is provided.
Wire anti-vibration means (70A) is provided, in which elastic members (71a, 72a) arranged facing each other across the wire (R) are set so that the upper and lower surfaces in the radial direction of the wire (R) are slightly in contact with each other. The vibration means 70A is disposed on both sides of the ingot I, is moved forward and backward along the wire R in accordance with the shape of the ingot I by the moving means, and is positioned in the vicinity of the ingot I. The elastic members 71a and 72a are made of felt, urethane rubber or the like.
[Selection] Figure 2

Description

  The present invention relates to a multi-wire electric discharge machining apparatus.

  Conventionally, a wire saw using abrasive grains is known as a cutting means for cutting a wafer from a cylindrical ingot. However, in such a wire saw, it is necessary to simultaneously supply a processing liquid (slurry) in which processing abrasive grains are mixed, and handling thereof is not easy. In addition, since the wire is in direct contact with the workpiece, particularly in the case of SiC having high hardness, there is a possibility that the wire may be disconnected during processing, and when the disconnection occurs, there is a disadvantage that it takes a long time to recover.

  Therefore, a multi-wire electric discharge machining apparatus has been devised. Since the wire and the ingot are not in contact with each other by electric discharge machining, the load applied to the ingot is very low, and it is excellent in that scratches such as scratches due to the slurry do not occur.

JP 2000-94221 A

  However, since the wire travels at a very high speed of 0.5 m / sec to 1 m / sec, some vibration is generated while being wound around the guide roller. Since the vibration becomes the width of the cut groove of the ingot to be processed as it is, a wasteful increase in the groove width is generated. When the groove width is widened, the number of wafers (products) that can be used decreases.

  Therefore, the present invention has been made in view of the above, and an object of the present invention is to provide a multi-wire electric discharge machining apparatus capable of suppressing vibration of a wire.

  In order to solve the above-described problems and achieve the object, a multi-wire electric discharge machining apparatus according to the present invention is a multi-wire electric discharge machining apparatus that performs electric discharge machining of an ingot with a wire, and a plurality of wires arranged at intervals. A guide roller, a wire that is wound a plurality of times in the axial direction of the guide roller and travels in parallel between the guide rollers, a base portion that fixes an ingot, and a fixed to the base portion Driving means for relatively processing and feeding the wire and the base portion so that the ingot cuts into the wire, and a high-frequency pulse for supplying high-frequency pulse power to the ingot fixed to the wire and the base portion A wire vibration isolator comprising a power supply unit and a pair of elastic members facing each other across the wires in parallel, and the distance between the elastic members is set so that the upper and lower radial directions of the wires are slightly in contact with each other And a moving means for moving the wire vibration isolating means forward and backward along the wire corresponding to the shape of the ingot and positioning the wire in the vicinity of the ingot. It is arranged before and after the traveling direction.

  Further, in the multi-wire electric discharge machining apparatus, the wire vibration isolating means includes nozzle means for ejecting a machining liquid along the wire on the side facing the ingot, and the nozzle means together with the wire vibration isolating means It is preferable to move by a moving means.

  In the multi-wire electric discharge machining apparatus of the present invention, the wire vibration preventing means for preventing the vibration of the wire is provided on both sides of the ingot, and the wire vibration preventing means is moved forward and backward in accordance with the shape of the ingot, whereby the vibration of the wire is maximized. There is an effect that can be suppressed.

FIG. 1 is a front view illustrating a configuration example of a multi-wire electric discharge machining apparatus according to the first embodiment. FIG. 2 is a cross-sectional view showing a configuration example (No. 1) of the wire vibration isolating means and the nozzle means according to the first embodiment. FIG. 3 is a cross-sectional view illustrating a configuration example (No. 2) of the wire vibration isolating unit and the nozzle unit according to the first embodiment. FIG. 4 is a cross-sectional view illustrating a configuration example of the wire vibration isolating unit and the nozzle unit according to the second embodiment.

  DESCRIPTION OF EMBODIMENTS Embodiments (embodiments) for carrying out the present invention will be described in detail with reference to the drawings. The present invention is not limited by the contents described in the following embodiments. The constituent elements described below include those that can be easily assumed by those skilled in the art and those that are substantially the same. Furthermore, the structures described below can be combined as appropriate. Various omissions, substitutions, or changes in the configuration can be made without departing from the scope of the present invention.

Embodiment 1
A multi-wire electric discharge machining apparatus according to Embodiment 1 will be described. FIG. 1 is a front view showing a configuration example of a multi-wire electric discharge machining apparatus. FIG. 2 is a cross-sectional view showing a configuration example (No. 1) of the wire vibration isolating means and the nozzle means. FIG. 3 is a cross-sectional view showing a configuration example (No. 2) of the wire vibration isolating means and the nozzle means.

  As shown in FIG. 1, the multi-wire electric discharge machine 1 is an electric discharge machine for an ingot I using a wire R, and a plurality of feed bobbins 20 that feed out the wire R and a plurality of spaced bobbins 20 are provided and fed out by the feed bobbin 20. Cylindrical guide rollers 21 to 24 for guiding the wire R, and a winding bobbin 25 for winding the wire R. The four guide rollers 21 to 24 are each disposed at a corner of the rectangle so as to form a rectangular shape.

  The guide rollers 21 to 24 are arranged so that a line segment formed by the guide roller 21 and the guide roller 22 and a line segment formed by the guide roller 24 and the guide roller 23 are parallel to each other. The guide rollers 21 to 24 are wound around the wire R fed out from the feeding bobbin 20 a plurality of times and sent out to the winding bobbin 25.

  The feeding bobbin 20, the guide rollers 21 to 24, and the take-up bobbin 25 are rotationally driven by a motor (not shown). Note that not all the guide rollers 21 to 24 need to be driven by a motor, and for example, the guide rollers 22 and 24 may be driven rollers.

  A wire R that is a metal wire such as brass used for electric discharge machining is wound around the feeding bobbin 20. The feeding bobbin 20 is rotationally driven by a motor (not shown) and feeds the wire R to the guide roller 21. The guide roller 21 winds the wire R fed from the feeding bobbin 20 and feeds it to the guide roller 22. The guide roller 22 winds the wire R fed from the guide roller 21 and feeds it to the guide roller 23. The guide roller 23 winds the wire R sent from the guide roller 22 and sends it to the guide roller 24. The guide roller 24 winds the wire R fed from the guide roller 23 and feeds it to the guide roller 21. As a result, the wire R is wound around the guide rollers 21 to 24 once.

  The wire R is wound a plurality of times at predetermined intervals in the longitudinal direction of the guide rollers 21 to 24. In this example, it is wound six times. The wire R is finally drawn out from the guide roller 22 to the take-up bobbin 25 and taken up. As described above, the wire R is wound a plurality of times at intervals in the axial direction of the guide rollers 21 to 24, and travels in the directions of arrows P1 to P4 in parallel between the guide rollers 21 to 24. The wire R constitutes a cutting wire portion 30 formed between a pair of adjacent guide rollers 23 and the guide roller 24, and the cutting wire portion 30 is configured such that the wire R travels in the direction of the arrow P3. ing.

  The cutting wire portion 30 is a portion for cutting the ingot I. The cutting wire portion 30 is stretched with a certain tension by the guide roller 23 and the guide roller 24, and is disposed in the longitudinal direction of the guide rollers 23, 24 at a predetermined interval. It consists of six wires R. For example, the interval between the wires R constituting the cutting wire portion 30 is about 0.5 mm to several mm. The ingot I is cut at the intervals of the wires R. The ingot I is a conductive material and is formed of SiC (silicon carbide), single crystal diamond, silicon, GaN (gallium nitride), or the like. In this example, the shape of the ingot I is a cylinder.

  At a position facing the cutting wire portion 30, an ingot setting means 40 for setting the ingot I, a driving means 44 for driving the ingot I in the machining feed direction (the direction of the arrow Q1), and the travel of the wire R of the cutting wire portion 30 Driving means (not shown) for driving the ingot I in a direction perpendicular to the direction is provided. The ingot setting means 40 is disposed on the upper surface side of the cutting wire portion 30 and includes a base portion 41 and an attachment portion 42. The base part 41 fixes the ingot I via the attachment part 42. The attachment portion 42 is fixed to the base portion 41 and has an attachment surface 43 that supports the ingot I. An end surface of the ingot I is bonded and fixed to the attachment surface 43 with a conductive adhesive (not shown).

  The drive means 44 relatively feeds the wire R and the base portion 41 so that the ingot I fixed to the base portion 41 cuts into the wire R. For example, the drive means 44 has a ball screw (not shown) extending in parallel to the vertical direction and a drive source composed of a pulse motor or the like, and a base portion 41 fixed to a nut of the ball screw. Are driven in the machining feed direction (arrow Q1 direction). Then, the ingot I is sliced by the wire R of the cutting wire portion 30 to form a wafer.

  The multi-wire electric discharge machining is performed in a machining fluid F such as water or oil that is a dielectric, and the cutting wire portion 30 is immersed in a machining tank 50 filled with the machining fluid F. In the processing tank 50, the wire R of the cutting wire portion 30 immersed in the stored processing liquid F processes the ingot I.

  In the processing tank 50, a cage 51 for accommodating a wafer is disposed. The flange 51 is disposed directly below the ingot I, is formed larger than the length of the ingot I in the longitudinal direction and the short direction, and has a certain depth. The wafer separated from the ingot I fixed to the mounting part 42 of the base part 41 is sunk and accommodated in a trough 51 disposed in the processing tank 50.

  The multi-wire electric discharge machining apparatus 1 includes a power supply unit 60 that supplies power to the cutting wire unit 30. The power supply means 60 includes a high frequency pulse power supply unit 61 and an electrode 62. The high frequency pulse power supply unit 61 supplies high frequency pulse power to the wire R and the ingot I fixed to the base portion 41. For example, the high frequency pulse power supply unit 61 is connected to the electrode 62 and supplies high frequency pulse power to the wire R via the electrode 62. In this example, the electrode 62 is connected to a wire R stretched between the guide roller 21 and the guide roller 24, and further connected to a wire R stretched between the guide roller 22 and the guide roller 23. ing. The high frequency pulse power supply unit 61 is connected to the base portion 41 and supplies high frequency pulse power to the ingot I via the base portion 41.

  When high-frequency pulse power is supplied from the high-frequency pulse power supply unit 61 and a voltage is applied between the electrodes of the wire R and the ingot I, the wire R of the cutting wire portion 30 discharges to the ingot I arranged on the front surface. Do. For example, when the distance between the ingot I and the wire R, which are in an insulating state in the liquid, approaches about several tens of μm, the insulation between the two is destroyed and a discharge is generated. By this discharge, the ingot I is heated and melted, and the temperature of the liquid is rapidly increased, whereby the liquid is vaporized, and the melted portion is scattered by volume expansion. In this way, by supplying high-frequency pulse power and applying a voltage between the electrodes, the ingot I is melted and scattered by the wire R, and the ingot I is cut off intermittently. At this time, although processing waste is generated in the gap between the ingot I and the wire R, the processing waste is removed by nozzle means 80A described later.

  During the electric discharge machining process, the wire R travels at a very high speed of 0.5 m / sec to 1 m / sec. For this reason, some vibration is generated in the wire R while being wound around the guide rollers 21 to 24. In order to suppress this vibration, wire vibration isolating means 70A is provided. The wire vibration isolating means 70 </ b> A is composed of a pair of members, and is disposed in front of and behind in the traveling direction of the wire R across the ingot I.

  The wire vibration isolating means 70 </ b> A is moved along the wire R so as to correspond to the shape of the ingot I, and is provided with moving means 90 positioned in the vicinity of the ingot I. The moving means 90 is a drive composed of a bracket 91 that supports the wire vibration isolating means 70A, a ball screw (not shown) that extends parallel to the traveling direction of the wire R (the direction of the arrow Q2), a pulse motor, and the like. The bracket 91 is fixed to the nut of the ball screw. The moving means 90 moves the bracket 91 fixed to the nut of the ball screw in the arrow Q2 direction.

  The shape of the bracket 91 is a rectangular parallelepiped, and is attached to the apparatus main body so that the longitudinal direction faces the vertical direction. Wire vibration isolating means 70A is attached to the lower end side of the bracket 91, and the upper end side of the bracket 91 is fixed to a nut of a ball screw. In the apparatus main body, a long hole 92 is opened in a range in which the bracket 91 moves.

  The pair of wire vibration isolating means 70A is arranged in the traveling direction of the wire R (in the direction of the arrow Q2) so as to take the shortest distance from the cylindrical ingot I in order to suppress the vibration of the wire R of the wire cutting part 30. Move forward and backward. For example, the interval L1 of the wire vibration isolating means 70A is determined according to the processing length of the ingot I cut by the wire R. For example, in the machining feed direction (the direction of arrow Q1), on the inlet side of the ingot I to be cut, the processing length of the ingot I to be cut is shorter than the vicinity of the center, so the interval L1 of the wire vibration isolating means 70A is shortened. On the other hand, in the vicinity of the center of the ingot I to be cut, the processing length of the ingot I to be cut is longer than that at the inlet side, so that the interval L1 between the wire vibration isolating means 70A becomes longer.

  The distance L1 between the wire vibration isolating means 70A is obtained by the three square theorem using the moving distance in the machining feed direction (the direction of the arrow Q1) and the length of the radius of the ingot I. For example, when the wire R reaches the center of the ingot I, the processing length is the length of the diameter, and the interval L1 of the wire vibration isolating means 70A is a length obtained by adding a predetermined length to the length of the diameter. The predetermined length is a length for preventing the wire vibration isolating means 70A from contacting the ingot I. In this way, the pair of wire vibration isolating means 70A moves along the shape of the outer peripheral surface of the ingot I while having a certain distance from the outer peripheral surface of the ingot I moved in the machining feed direction.

  As shown in FIG. 2, the wire vibration isolating means 70A includes a pair of elastic members 71a and 72a facing each other across the parallel wires R, and a rectangular parallelepiped housing 73a that houses the elastic members 71a and 72a. The housing 73a has a housing portion 74a that houses the elastic members 71a and 72a, and a hollow portion 82a that constitutes nozzle means 80A described later. The housing 73a is composed of, for example, a pair of frames 75a and 76a that are divided in half in the longitudinal direction. The elastic member 71a is accommodated in the accommodating part 74a of the frame 75a, and the elastic member 72a is accommodated in the accommodating part 74a of the frame 76a.

  The elastic members 71a and 72a are made of felt, urethane rubber, or the like and have a rectangular parallelepiped shape. The elastic members 71a and 72a are formed such that the length in the longitudinal direction is longer than the length in the parallel direction of the wires R arranged in parallel. Thereby, as shown in FIG. 3, the elastic members 71a and 72a can come into contact with all the wires R in parallel (six wires in the figure). Contact surfaces 710a and 720a where the elastic members 71a and 72a contact the wire R are formed flat.

  The elastic members 71a and 72a are formed slightly smaller than the inner surface of the housing portion 74a of the housing 73a, and the elastic members 71a and 72a are fitted into the housing portion 74a. The side surface of the elastic member 71a is fixed to the housing portion 74a of the frame body 75a with an adhesive or the like, and the side surface of the elastic member 72a is similarly fixed to the housing portion 74a of the frame body 76a with an adhesive or the like.

  For example, when attaching the elastic members 71a and 72a to the housing 73a, an adhesive is applied to the side surface of the elastic member 71a, and is fitted and fixed to the housing portion 74a of the frame 75a. Similarly, an adhesive is applied to the side surface of the elastic member 72a, and is fitted and fixed to the housing portion 74a of the frame 76a. Next, the frame body 75a and the frame body 76a are combined and fixed with an adhesive or the like so that the elastic member 71a and the elastic member 72a face each other.

  At this time, as shown in FIG. 3, the distance L2 between the elastic member 71a and the elastic member 72a of the wire vibration isolating means 70A is set so that the upper and lower sides in the radial direction of the wire R are slightly in contact with each other. For example, when the diameter of the wire R is 100 μm, the elastic members 71 a and 72 a are arranged on the wire R side in the range of about 0 to 10 μm above and below the diameter D of the wire R connecting the contact points between the wire R and the elastic members 71 a and 72 a. . In this example, the interval L2 is 80 to 100 μm.

  In a state where the frame body 75a and the frame body 76a are combined, an opening 77a through which the wire R passes through the housing 73a is provided. The opening 77a is provided in front of and behind the accommodating portion 74a in the traveling direction of the wire R. The opening 77a may be a hole through which each wire R is inserted, or may be a rectangular opening that opens in the parallel direction of the wires R.

  On the side of the wire vibration isolating means 70A facing the ingot I, nozzle means 80A for ejecting the processing liquid F along the wire R is disposed. That is, as viewed from the ingot I, the nozzle means 80A is first arranged, and then the wire vibration isolating means 70A is arranged. The nozzle means 80A disposed on both sides of the ingot I ejects the machining liquid F linearly toward the machining groove of the ingot I. In the ingot I, the machining fluid F is ejected from both sides.

  The nozzle means 80A and the wire vibration isolating means 70A are integrally formed with the housing 73a. The nozzle unit 80A is moved by the moving unit 90 together with the wire vibration isolating unit 70A.

  The nozzle means 80A includes an ejection port 81a that ejects the machining liquid F toward the ingot I, a hollow portion 82a provided with the ejection port 81a, a supply pipe 83a that supplies the machining liquid F to the hollow portion 82a, and a supply pipe. A pipe attachment portion 84a for attaching 83a to the hollow portion 82a.

  The ejection port 81a is formed in a rectangular shape, and is formed so that the wire R passes through the ejection port 81a. The length in the longitudinal direction of the spout 81a is set slightly longer than the length in the parallel direction of the wires R that are juxtaposed, and the length in the short direction of the spout 81a is set to such a length that the wire R does not contact. Has been. Thereby, the processing liquid F comes to be ejected linearly along the wire R from the ejection port 81a. One end of the supply pipe 83a is connected to the hollow part 82a via the pipe attachment part 84a, and the other end is connected to a machining liquid supply part (not shown).

  The machining fluid F is supplied from the machining fluid supply unit at a predetermined hydraulic pressure, and the machining fluid F supplied from the machining fluid supply unit is filled into the hollow portion 82a via the supply pipe 83a and is then wired from the ejection port 81a. It is ejected along R to ingot I. The machining fluid F ejected toward the machining groove of the ingot I flows away and removes machining waste that exists in the gap between the ingot I and the wire R, and prevents a reduction in the accuracy of electrical discharge machining due to the machining waste.

  As described above, according to the multi-wire electric discharge machining apparatus 1 according to the first embodiment, the wire vibration isolating means 70A in which the distance between the elastic members 71a and 72a is set so that the upper and lower sides in the radial direction of the wire R slightly contact each other. The wire anti-vibration means 70A is moved forward and backward along the wire R by the moving means 90 so as to correspond to the shape of the ingot I, and is positioned in the vicinity of the ingot I.

  Thereby, since the vibration of the wire R can be attenuated by the elastic members 71a and 72a, the vibration of the wire R can be suppressed to the limit. According to the experiment, when the diameter of the wire R is 100 μm, the amplitude due to the vibration of the wire R is about 100 μm when the wire vibration isolating means 70A is not provided, but when the wire vibration isolating means 70A is provided, the wire R The amplitude due to the vibration of R could be suppressed to about 10 μm or less. Therefore, since the expansion of the processing groove due to the vibration of the wire R can be suppressed, it is possible to suppress a decrease in the number of wafers that can be used as a wafer. Further, since the ingot I can be cut at the pitch interval of the wire R, it is particularly effective when a thin wafer is formed from the ingot I.

  Further, since the elastic members 71a and 72a of the wire vibration isolating means 70A are set so as to slightly contact the wire R, the wire is pressed against the vibration isolating member as in the prior art so as to suppress the vibration isolation. Compared with the means, wear of the elastic members 71a and 72a can be suppressed. Thereby, the replacement frequency of the elastic members 71a and 72a can be reduced, and the cost can be suppressed. Further, since the elastic members 71a and 72a have elasticity, even if vibration occurs in the wire R, the pressure of the wire R is dispersed without concentrating on a part, so that wear is suppressed.

  Further, since the nozzle means 80A is formed in the vicinity of the wire vibration isolating means 70A and can be moved integrally, the distance between the wire vibration isolating means 70A and the ingot I is supplied to the ingot I from as close as possible. In addition, since it is not separated more than necessary, the vibration-proofing effect can be sufficiently exhibited. Further, since the wire vibration isolating means 70A and the nozzle means 80A are moved by the same moving means 90, the configuration of the apparatus can be simplified.

[Embodiment 2]
Next, the wire vibration isolating means and the nozzle means according to the second embodiment will be described. FIG. 4 is a cross-sectional view illustrating a configuration example of the wire vibration isolating unit and the nozzle unit according to the second embodiment. Compared to the wire vibration isolating means 70A described above, the wire vibration isolating means 70B according to the second embodiment is disposed at a position close to the ingot I as shown in FIG. That is, in the first embodiment, the nozzle means 80A is disposed first when viewed from the ingot I, and then the wire vibration isolating means 70A is disposed, but in the second embodiment, the first is viewed from the ingot I. The wire anti-vibration means 70B is disposed next to the nozzle means 80B.

  The wire anti-vibration means 70B includes a pair of elastic members 71b and 72b facing each other across the parallel wires R, and a rectangular parallelepiped housing 73b that accommodates the elastic members 71b and 72b. The housing 73b has a housing portion 74b that houses the elastic members 71b and 72b, and a hollow portion 82b that constitutes the nozzle means 80B. The interval between the elastic member 71b and the elastic member 72b of the wire vibration isolating means 70B is set so that the upper and lower sides of the wire R in the radial direction slightly contact each other.

  The housing 73b is provided with an opening 77b through which the wire R passes through the housing 73b. The opening 77b is provided before and after the hollow portion 82b in the traveling direction of the wire R.

  On the side of the wire vibration isolating means 70B that does not face the ingot I, nozzle means 80B that ejects the machining fluid F along the wire R is disposed. The nozzle means 80B disposed on both sides of the ingot I ejects the machining fluid F toward the ingot I through the wire vibration isolating means 70B.

  The nozzle means 80B and the wire vibration isolating means 70B are integrally formed with the housing 73b. The nozzle unit 80B is moved by the moving unit 90 together with the wire vibration isolating unit 70B.

  The nozzle means 80B includes an ejection port 81b that ejects the machining liquid F toward the ingot I, a hollow portion 82b that communicates with the ejection port 81b, a supply pipe 83b that supplies the machining liquid F to the hollow portion 82b, and a supply pipe. And a pipe attachment portion 84b for attaching 83b to the hollow portion 82b. The ejection port 81b is formed in a rectangular shape, and is formed so that the wire R passes through the ejection port 81b.

  The machining fluid F is supplied at a predetermined hydraulic pressure from a machining fluid supply unit (not shown), and the machining fluid F supplied from the machining fluid supply unit is filled into the hollow portion 82b via the supply pipe 83b, and the opening 77b. And it passes through the clearance gap between elastic members 71b and 72b, and it ejects toward the process groove | channel of the ingot I from the jet outlet 81b. In addition, since the nozzle means 80B ejects the processing liquid F toward the ingot I through the elastic members 71b and 72b, the processing liquid F is supplied into the hollow portion 82b at a higher hydraulic pressure than the nozzle means 80A. preferable.

  As described above, according to the multi-wire electric discharge machining apparatus 1 according to the second embodiment, the effects of the first embodiment are provided, and the wire vibration isolating means 70B is disposed at a position close to the ingot I. The effect of suppressing the vibration of the wire R in the cutting wire portion 30 is enhanced. Further, since the wire vibration isolating means 70B is disposed at a position close to the ingot I, the size of the elastic members 71b and 72b of the wire vibration isolating means 70B can be reduced, and the wire vibration isolating means 70B can be downsized. Can do.

  The wire vibration isolating means 70A (70B) and the nozzle means 80A (80B) are arranged in the same casing 73a (73b), but they may be separated.

  Moreover, the shape of the jet nozzles 81a and 81b is not limited to a rectangle. The ejection ports 81a and 81b only need to be able to eject the machining liquid F toward the machining groove of the ingot I. For example, an elliptical opening or a plurality of holes may be provided.

  Further, although the position of the wire R is fixed and the ingot I is moved in the machining feed direction to perform electric discharge machining, the present invention is not limited to this. For example, the position of the ingot I may be fixed and the wire R may be moved in the machining feed direction for electric discharge machining, or both the ingot I and the wire R may be moved in the machining feed direction for electric discharge machining. Alternatively, the ingot I may be raised from below the wire R and subjected to electric discharge machining.

  Moreover, although the contact surfaces 710a and 720a where the elastic members 71a and 72a contact the wire R are shown as being flat, a recess along the shape of the arc portion of the wire R is formed on the contact surfaces 710a and 720a. It may be provided that the upper and lower sides of the wire R in the radial direction slightly contact the recess. Thereby, the vibration to the parallel direction of the wire R can be effectively suppressed by a recessed part.

70A, 70B Wire vibration isolating means 71a, 71b Elastic members 72a, 72b Elastic members 73a, 73b Housings 74a, 74b Housing parts 77a, 77b Opening parts 80A, 80B Nozzle means 81a, 81b Spouts 82a, 82b Hollow parts 83a, 83b Supply piping 84a, 84b Piping attachment F Processing fluid

Claims (2)

A multi-wire electric discharge machining apparatus that performs electric discharge machining of an ingot with a wire,
A plurality of guide rollers arranged at intervals;
A wire that is wound a plurality of times at intervals in the axial direction of the guide roller and travels in parallel between the guide rollers;
A base for fixing the ingot;
Drive means for relatively processing and feeding the wire and the base portion so that an ingot fixed to the base portion cuts into the wire;
A high-frequency pulse power supply unit that supplies high-frequency pulse power to the wire and the ingot fixed to the base portion;
Wire anti-vibration means comprising a pair of elastic members facing each other across the wires in parallel, the spacing of the elastic members being set so that the upper and lower radial directions of the wires are slightly in contact with each other;
The wire vibration isolating means corresponding to the shape of the ingot, moving forward and backward along the wire, and positioned in the vicinity of the ingot, and
The multi-wire electric discharge machining apparatus, wherein the wire vibration isolating means is disposed in front of and behind in the traveling direction of the wire across an ingot. On the side of the wire anti-vibration means facing the ingot, nozzle means for ejecting the machining liquid along the wire
2. The multi-wire electric discharge machining apparatus according to claim 1, wherein the nozzle means is moved by the moving means together with the wire vibration isolating means.

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