JP2016085171A - Array object illumination device, array object inspection device and array object inspection light guide plate - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an array object inspection lighting device capable of more uniformly illuminating individual objects in an array object and to enable dark field illumination, an array object inspection device using the same, and an array object inspection light guide plate used thereto. offer. An array object inspection lighting device LMa is a device that illuminates an array object SPA having a plurality of predetermined objects in an array, and is emitted from a light source unit that emits predetermined light and a light source unit. Light is incident and includes a light guide plate 2a that guides the incident light, and the light guide plate 2a intersects a virtual surface along the surface spreading direction of the light guide plate 2a, is incident, and is guided. An injection unit 21a having an injection surface for emitting the light from the light guide plate 2a to the outside is provided, and the injection unit 21a is set in the light guide plate 2a with a size surrounding a predetermined object. It is formed above each contour line. [Selection diagram] Fig. 1

Description

  The present invention relates to an array object inspection illumination device used in an array object inspection apparatus for inspecting an array object having a plurality of predetermined objects in an array, the array object inspection device, and the array object inspection illumination device (array) The present invention relates to a light guide plate for array object inspection used in an object inspection apparatus.

  In general, in order to find an abnormality of an inspection object such as a defect or a foreign substance in the inspection object to be inspected, an appearance inspection for observing and inspecting the inspection object may be performed. In this case, the inspection object is often illuminated with an illumination device. As one of such illumination devices, for example, there is an inspection illumination device disclosed in Patent Document 1.

  The inspection illumination device disclosed in Patent Document 1 is selectively disposed on a housing having an opening on a bottom surface, a polygonal light guide plate including a circular shape disposed on the housing, and an end surface portion of the light guide plate. A light source for introducing light into the light guide plate, and the light guide plate is arranged in a pattern such that a plurality of recesses intersect each other on the upper surface portion of the housing on the non-opening side, In addition, the inner surface portion of the light guide plate in the recess is configured to exhibit a half mirror effect. According to Patent Document 1, in the illumination device for inspection having such a configuration, light incident on the light guide plate is reflected toward the lower surface of the light guide plate by the plurality of recesses while being repeatedly reflected in the light guide plate. It is emitted vertically downward and illuminates an object to be inspected disposed below the inspection illumination device.

JP 2010-1112735 A

  By the way, generally, when inspecting an inspection object, in order to inspect a large number of inspection objects at a time, a plurality of inspection objects may be arranged in an array. Alternatively, the inspected object itself may have a plurality of elements in an array. In order to inspect the appearance of an array object including a plurality of predetermined objects in an array form, when the array object is illuminated by an illumination device such as the illumination device for inspection disclosed in Patent Document 1, the array object Since the predetermined objects adjacent to each other influence (interfere) with each other, it is difficult to sufficiently illuminate the individual objects. For example, when illuminating an optical element array such as a lens array (array lens) having a plurality of lenses in an array or a prism array (array prism) having a plurality of prisms in an array, the uneven shape of each lens or prism, etc. Due to the influence of the adjacent lens or prism, the darkness of each lens or prism is generated due to the influence of the adjacent lens or prism, or the individual lens or prism is relatively bright due to reflection by the adjacent lens or prism. A part may arise. For this reason, illumination unevenness occurs in each of the above objects, and it is difficult to uniformly illuminate. Alternatively, in order to inspect the entire individual object, it is necessary to move the array object so that each part is illuminated with an appropriate illuminance.

  Further, in general, dark field illumination is preferable to bright field illumination for finding foreign substances attached to the surface. However, since the illumination device for inspection disclosed in Patent Document 1 emits light vertically downward from the light guide plate, only bright field illumination can be realized.

  The present invention has been made in view of the above-described circumstances, and an object of the present invention is to provide an illumination device for inspecting an array object that can illuminate individual objects in an array object more uniformly and enables dark field illumination. It is to provide an array object inspection light guide plate used for the array object inspection apparatus used and the array object inspection illumination device (array object inspection apparatus).

  As a result of various studies, the present inventor has found that the above object is achieved by the present invention described below. That is, the illumination device for inspection of an array object according to one aspect of the present invention is an illumination device for inspection of an array object that illuminates an array object including a plurality of predetermined objects in an array, and a light source unit that emits predetermined light And a light guide plate that receives light emitted from the light source unit and guides the incident light, and the light guide plate intersects a virtual plane along the surface spreading direction of the light guide plate, The light guide plate includes an emission portion having an emission surface that emits the incident and guided light from the light guide plate to the outside, and the emission portion is set to the light guide plate in a size that surrounds the predetermined object It is formed above each contour line in a plurality of different partitioned areas. The size surrounding the predetermined object is preferably such that the predetermined object is included in the partitioned area or is the same size in a plan view in which the light guide plate is overlapped with the array object and viewed from the stacking direction.

  Such an illumination device for inspecting an array object includes an emission part formed above each of the contour lines in a plurality of different partitioned areas set on the light guide plate in a size surrounding a predetermined object in the array object. Thus, light can be illuminated from the surroundings of the individual objects in the array object. For this reason, the illumination device for array object inspection can illuminate the individual objects in the array object more uniformly. And since this emission part has the emission surface which cross | intersects the virtual surface along the surface expansion direction of a light-guide plate, it can inject | emit light in the diagonal direction with respect to the said virtual surface. For this reason, the illumination device for array object inspection can illuminate the individual objects in the array object from an oblique direction, and hence dark field illumination is possible.

  Further, in another aspect, in the above-described array object inspection illumination device, each contour shape in the plurality of partitioned regions is any one of a circular shape, an elliptical shape, an oval shape, and a polygonal shape, The injection section is formed continuously or discretely above each contour line in the plurality of partitioned regions. The discretely formed emission portions are preferably formed in a plurality of cross shapes, or preferably in a dot shape (dot shape, column shape, cone shape).

  According to this, when each contour shape in the plurality of partitioned regions is circular, the illumination for array object inspection suitable for illumination of the array object in which the contour shape of each of the objects in the array object is circular. Equipment can be provided. In addition, when each contour shape in a plurality of partitioned regions is elliptical, an illumination device for inspecting an array object suitable for illuminating the array object in which the contour shape of each object in the array object is elliptical is provided. it can. In addition, when each contour shape in the plurality of partition regions is an oval shape, the illumination device for array object inspection suitable for illuminating the array object in which the contour shape of each object in the array object is an oval shape Can provide. Moreover, when each contour shape in a some division area is a polygon shape, the illumination device for an array object inspection suitable for illumination of the said array object whose contour shape of the said individual object in an array object is a polygon shape Can provide. And when the injection | emission part is formed continuously, the said illuminating device for a test | inspection of an array object can irradiate light from the whole circumference | surroundings with respect to each said object in an array object, Therefore It can illuminate more brightly . Moreover, when the injection part is discretely formed, it is easy to process and form the injection part.

  According to another aspect, in the above-described array object inspection illumination device, the emission section is formed on a main surface of the light guide plate facing the array object.

  When the emission part is formed on a surface further facing the main surface facing the array object in the light guide plate (the back surface of the light guide plate when the main surface is the surface of the light guide plate), the array is arranged via the light guide plate. The object will be illuminated and scattered by the light guide plate. On the other hand, since the illumination device for inspecting an array object includes an emission part formed on a main surface of the light guide plate facing the array object, the emission direction at the time of emission from the emission part (the oblique direction) is maintained. Since the array object can be directly illuminated, dark field illumination can be effectively realized.

  According to another aspect, in the above-described illumination device for inspecting an array object, the light source unit includes: a light emitting unit that emits and emits the predetermined light; and the predetermined light emitted from the light emitting unit. And a light control unit that controls at least one of the light amount and the color.

  Since such an illumination device for inspecting an array object includes a light control unit that controls at least one of the light amount and color of predetermined light, the above-mentioned array object inspection illumination device has a suitable light amount that allows easy understanding of the contrast. It can be adjusted to the color, and is suitable according to the object of appearance inspection such as foreign matter (dust) or scratches attached to the surface, or coating on each surface of each of the above-mentioned objects (for example, antireflection coating, etc.) It is possible to adjust a suitable light amount and color according to an inspection object such as an arrayed object.

  According to another aspect, in the above-described array object inspection illumination device, the light guide plate includes a pair of first and second main surfaces facing each other, and the incident light is transmitted to the first and second main surfaces. It further includes an opening portion that guides light between the second main surfaces and is provided in the partition region and penetrates between the first and second main surfaces. The opening may be provided in each of the plurality of partition regions, or may be provided in a part of the plurality of partition regions.

  Such an illumination device for inspecting an array object includes an opening provided in the partition region, so that the predetermined object in the array object can be observed directly through the opening. Therefore, the illumination device for inspecting the array object is not affected by adhesion of foreign matter (dust) on the light guide plate, surface accuracy (distortion) of the first and second main surfaces, and the like. Make things observable.

  According to another aspect, in the above-described lighting device for inspecting an array object, the light source unit includes a light emitting diode that emits and emits the predetermined light.

  Since such an illumination device for inspecting an array object includes a light source unit including a light emitting diode (LED), heat generation can be reduced and light emission can be stabilized more quickly than a light source unit including a mercury lamp or a halogen lamp.

  Further, in another aspect, the above-described array object inspection illumination device further includes a moving mechanism that relatively moves the array object and the light guide plate along an orthogonal direction orthogonal to the virtual plane. Features.

  Since such an illumination device for inspecting an array object includes a moving mechanism that moves the light guide plate along an orthogonal direction orthogonal to the virtual plane, by appropriately adjusting the distance between the light guide plate and the array object, Dark field illumination and bright field illumination can be executed alternatively. That is, when the light guide plate and the array object are brought close to each other so that the distance between the light guide plate and the array object is equal to or less than the first switching distance, as described above, the diagonal direction with respect to the individual objects in the array object The light is illuminated and dark field illumination is possible. On the other hand, when the light guide plate and the array object are separated so that the distance between the light guide plate and the array object is longer than the first switching distance, light is emitted from substantially above the individual objects in the array object. Illuminated, enabling bright field illumination.

  In another aspect, in the above-described illumination device for inspecting an array object, the light source unit is disposed in a spherical shell body formed in a shape of a part of a spherical shell, and inside the spherical shell body, And a light emitting unit that emits and emits the predetermined light. Preferably, on the inner side surface of the spherical shell body, a diffuse reflection layer that diffusely reflects incident light, for example, containing barium sulfate as a main material is formed.

  As such an array object inspection illumination device, a commercially available so-called dome illumination device can be used for the light source section.

  According to another aspect, the illumination device for inspecting an array object further includes a moving mechanism that relatively moves the light source unit and the light guide plate along an orthogonal direction orthogonal to the virtual plane. And

  Such an illumination device for inspecting an array object includes a moving mechanism that moves one of the light source unit and the light guide plate along an orthogonal direction orthogonal to the virtual plane, and therefore, between the light source unit and the light guide plate. Dark field illumination and bright field illumination can be alternatively performed by appropriately adjusting the distance or the distance between the light guide plate and the array object. That is, when the light source unit and the light guide plate are brought close to each other so that the distance between the light source unit and the light guide plate is equal to or less than the second switching distance, the light emitted from the light source unit is incident from the side surface of the light guide plate. Thus, as described above, light is illuminated from an oblique direction with respect to the individual objects in the array object, thereby enabling dark field illumination. On the other hand, when the light source unit and the light guide plate are separated so that the distance between the light source unit and the light guide plate is longer than the second switching distance, the individual objects in the array object are passed through the light guide plate. Light is illuminated from substantially above, enabling bright field illumination. The switching of the distance between the light guide plate and the array object is the same as described above.

  An array object inspection apparatus according to another aspect of the present invention includes an array object inspection illumination unit that illuminates an array object to be inspected having a plurality of predetermined objects in an array, and an optical image of the array object An imaging unit that images the array object, and a detection processing unit that detects an abnormality of the array object based on the image of the array object captured by the imaging unit. It is a lighting device for inspection of an array object.

  Since such an array object inspection apparatus uses any one of the above-described array object inspection illumination apparatuses, individual objects in the array object can be illuminated more uniformly, and dark field illumination is possible.

  And in another one aspect | mode of this invention, it is the light guide plate for an array thing test | inspection used for the lighting apparatus for any of these array object inspections, or the above-mentioned array object test | inspection apparatus. Preferably, the light guide plate for inspecting an array object according to another aspect of the present invention is a lighting apparatus for inspecting an array object that illuminates an array object having a plurality of predetermined objects in an array, or inspects the array object. A light guide plate for array object inspection used in an array object inspection apparatus, which intersects a virtual plane along the surface spreading direction of the light guide plate and emits light that is incident and guided from the light guide plate to the outside The injection portion having an emission surface that is formed is formed above each of the contour lines in a plurality of different partitioned regions set in the light guide plate in a size that surrounds the predetermined object.

  Such a light guide plate for inspecting an array object can illuminate the individual objects in the array object more uniformly and enables dark field illumination.

  The illumination device for inspecting an array object according to the present invention can illuminate individual objects in the array object more uniformly and enables dark field illumination. According to the present invention, it is possible to provide an array object inspection apparatus using the same, and an array object inspection light guide plate used for the array object inspection illumination device (array object inspection apparatus).

It is a figure which shows the structure of the array object inspection apparatus in 1st Embodiment. It is a perspective view which mainly shows the structure of the light-guide plate of a 1st aspect in the array object inspection apparatus of 1st Embodiment. It is a flowchart which shows operation | movement of the array object inspection apparatus in 1st Embodiment. It is a perspective view which mainly shows the structure of the light-guide plate of a 2nd aspect in the array object inspection apparatus of 1st Embodiment. It is a perspective view which mainly shows the structure of the light-guide plate of the 3rd aspect in the array object inspection apparatus of 1st Embodiment. It is a perspective view which mainly shows the structure of the light-guide plate of the 4th aspect in the array object inspection apparatus of 1st Embodiment. It is a perspective view which mainly shows the structure of the light-guide plate of the 5th aspect in the array object inspection apparatus of 1st Embodiment. It is a perspective view which mainly shows the structure of the light-guide plate of the 6th aspect in the array object inspection apparatus of 1st Embodiment. It is a perspective view which mainly shows the structure of the light-guide plate of the 7th aspect in the array object inspection apparatus of 1st Embodiment. It is sectional drawing which mainly shows the structure of the light-guide plate of the 7th aspect in the array object inspection apparatus of 1st Embodiment. It is a perspective view which mainly shows the structure of the light-guide plate of the 8th aspect in the array object inspection apparatus of 1st Embodiment. It is a perspective view which shows a partial structure of the array object inspection apparatus in 2nd Embodiment.

  Hereinafter, an embodiment according to the present invention will be described with reference to the drawings. In addition, the structure which attached | subjected the same code | symbol in each figure shows that it is the same structure, The description is abbreviate | omitted suitably. In this specification, when referring generically, it shows with the reference symbol which abbreviate | omitted the suffix, and when referring to an individual structure, it shows with the reference symbol which attached the suffix.

  The array object inspection apparatus according to the present embodiment uses an array object inspection illumination device that illuminates an array object provided with a plurality of predetermined objects in a one-dimensional or two-dimensional array, and inspects whether there is an abnormality in the array object. Device. The predetermined object may be various objects, for example, may be a relatively small-sized inspected object of the same kind or different kind, and may be, for example, an element (part) having the same kind or different kind of function. good. Examples of the same type of test object include specimens such as blood and body fluids, chemical substances, drugs, and the like. In addition, examples of the same type of element include an optical element and an electronic component. Examples of the optical element that emits light having a predetermined effect on incident light include a mirror, a prism, an optical filter, a lens, and a diffraction grating. Examples of the different elements include optical elements having different functions such as a prism and a lens.

  The illumination device for inspecting an array object includes a light source unit that emits predetermined light, and a light guide plate that receives the light emitted from the light source unit and guides the incident light. Light plate). The light guide plate includes an emission portion having an emission surface that intersects a virtual plane along the surface spreading direction of the light guide plate and emits the incident and guided light from the light guide plate to the outside. The said injection | emission part is each formed in each upper direction of each outline in several different division areas set to the said light-guide plate with the magnitude | size surrounding the said predetermined | prescribed thing. The size surrounding the predetermined object is preferably such that the predetermined object is included in the partitioned area or is the same size in a plan view in which the light guide plate is overlapped with the array object and viewed from the stacking direction.

  Hereinafter, an array object inspection apparatus using such an illumination apparatus for inspecting an array object will be described more specifically by way of an example of the first and second embodiments, and each of the first and second embodiments will be described. Each light guide plate of the first to eighth aspects of an example used for an array object inspection device (array object inspection illumination device) will be described more specifically.

(First embodiment)
First, the configuration of the array object inspection apparatus CMa in the first embodiment will be described. FIG. 1 is a diagram showing a configuration of an array object inspection apparatus according to the first embodiment. FIG. 1A shows the case of dark field illumination, and FIG. 1B shows the case of bright field illumination. FIG. 2 is a perspective view mainly showing the configuration of the light guide plate of the first aspect in the array object inspection apparatus of the first embodiment.

  1 and 2, the array object inspection apparatus CMa in the first embodiment includes a light source unit 1a, a light guide plate 2a, a moving unit 3, an imaging unit 4, and a control processing unit 5. In the example illustrated in FIG. 2, an input unit 6, an output unit 7, and an interface unit (IF unit) 8 are further provided. The light guide plate 2a corresponds to an example of an array object inspection light guide plate, and the light source unit 1a and the light guide plate 2a correspond to an example of an array object inspection illumination device LMa. In the example shown in FIGS. Further, the illumination device LMa for array object inspection further includes a control unit 51 described later in the moving unit 3 and the control processing unit 5.

  The light source unit 1 a is an apparatus that is connected to the control processing unit 5 and emits predetermined light under the control of the control processing unit 5. The light source unit 1a makes the emitted predetermined light incident from a predetermined location on the light guide plate 2a. For example, the light source unit 1a enters the predetermined light from all or part of the side surface of the light guide plate 2a. More specifically, since the light guide plate 2a has a rectangular shape (including a square shape) in plan view as described later, the light source unit 1a transmits the predetermined light to all four side surfaces (ring illumination). However, in this embodiment, the light is incident from two side surfaces adjacent to each other among the four side surfaces. For this reason, the light source part 1a is provided with the two 1st and 2nd light source parts 1a-1 and 1a-2 as shown in FIG.

  In the present embodiment, the light source unit 1a (1a-1, 1a-2) includes a light emitting unit 11a that emits and emits the predetermined light, a light amount in the predetermined light emitted from the light emitting unit 11a, and A light control unit that controls at least one of the colors. More specifically, the light control unit is a control unit 51 described later functionally configured in the control processing unit 5. The first light source unit 1a-1 is mounted on the first circuit board 12a-1 wider than the thickness of the light guide plate 2a so as to be separated from each other by a predetermined distance. Units 11a-1 and 11a-2 are provided, and the first and second light emitting units 11a-1 and 11a-2 are connected to the control processing unit 5. Similarly, the second light source unit 1a-2 is mounted on the second circuit board 12a-2 wider than the thickness of the light guide plate 2a so as to be separated from each other by a predetermined distance. The light emitting units 11 a-3 and 11 a-4 are provided, and the third and fourth light emitting units 11 a-3 and 11 a-4 are connected to the control processing unit 5. Each of the first to fourth light emitting units 11a-1 to 11a-4 may be, for example, a mercury lamp, a halogen lamp, or a xenon lamp. In the present embodiment, the light emitting diode (LED) and its peripheral circuit ( Drive circuit). Each of the first to fourth light emitting units 11a-1 to 11a-4 emits only one type of LED (for example, a G-LED that emits green light, For example, a W-LED that emits white light may be configured and only the amount of light may be controlled. However, in the present embodiment, a plurality of types are used so that the emission color can be controlled in the range of visible light. LEDs, for example, an R-LED that emits red light, a G-LED that emits green light, a B-LED that emits blue light, and a W-LED that emits white light Composed. And these 1st thru | or 4th light emission parts 11a-1 to 11a-4 are connected to the control process part 5, and light-emit with the light quantity and the color according to control of the control part 51. FIG. The first to fourth light emitting units 11a-1 to 11a-4 may emit light of other wavelengths, for example, infrared light, instead of visible light or in addition to visible light. good. In this case, each of the fourth light emitting units 11a-1 to 11a-4 includes an IR-LED that emits infrared light.

  The light guide plate 2a is a device that receives light emitted from the light source unit 1a and guides the incident light. More specifically, the light guide plate 2a has a pair of first and second main surfaces SFa-1 and SFa-2 (a front surface SFa-1 and a back surface SFa-2) facing each other at a predetermined interval. A plate-like body having a rectangular shape (including a square shape) in plan view and formed of a material capable of transmitting the predetermined light, for example, inorganic glass or a resin material. The light guide plate 2a is not limited to a rectangular shape in plan view, and may have other shapes, for example, a polygonal shape such as a triangle or a hexagon, a circular shape, or the like. Examples of the resin material include organic glass such as acrylic resin and polycarbonate. As shown in FIG. 2, the first light source unit 1 a-1 includes the first and second light emitting units 11 a-on one side surface of the light guide plate 2 a that is a rectangular plate-like body in plan view. 1, 11a-2 is arranged so that the predetermined light can be made incident thereon. On the adjacent side surface adjacent to the one side surface, the second light source unit 1a-2 has the third and fourth light emission. The predetermined light emitted from the portions 11a-3 and 11a-4 is arranged to be incident. In addition, in order to make each light emitted by the first and second light emitting units 11a-1 and 11a-2 efficiently enter the light guide plate 2a, the first and second light emitting units 11a-1 and 11a on the one side surface are used. As shown in FIG. 1, the respective recesses into which the first and second light emitting units 11 a-1 and 11 a-2 are fitted may be formed at the positions corresponding to -2 respectively. Similarly, in order to make each light emitted from the third and fourth light emitting units 11a-3 and 11a-4 efficiently enter the light guide plate 2a, the third and fourth light emitting units 11a-3 on the adjacent side surfaces, Respective recesses into which the third and fourth light emitting units 11a-3 and 11a-4 are fitted may be formed at positions corresponding to the respective 11a-4. In addition, in order to use each light incident on the light guide plate 2a more efficiently, a first reflective layer that reflects the predetermined light may be formed on the first other side surface facing the one side surface, Similarly, a second reflective layer that reflects the predetermined light may be formed on the second other side surface facing the adjacent side surface. Furthermore, a third reflective layer that reflects the predetermined light may be formed on each of the first and second circuit boards 12a-1 and 12a-2 at a place where a circuit portion or the like can be formed. The predetermined light beams emitted from the first and second light source units 1a-1 and 1a-2 and incident on the light guide plate 2a from the one side surface and the adjacent side surface respectively are the first and second main surfaces SFa-. 1, reflection between SFa-2, preferably total reflection is repeated, and the light is guided in the direction of surface expansion of the light guide plate 2a.

  The light guide plate 2a intersects with a virtual plane along the surface spreading direction of the light guide plate 2a, and has an exit surface for emitting the predetermined light that is incident and guided from the light guide plate 2a to the outside. An injection unit 21a is provided. In the present embodiment, the virtual surface is a surface parallel to the first main surface (second main surface) since the first and second main surfaces are parallel to each other. The emission portion 21a is positioned above each contour line in a plurality of different partitioned areas ARa set on the light guide plate 2a so as to surround the predetermined object in the array object SPa as an object to be inspected. Each is formed.

  More specifically, as an example, as shown in FIG. 2, an array object in which a plurality of elements ELa having a circular outline shape in a plan view are arranged in a two-dimensional array with a predetermined first interval therebetween. In the case of the array object inspection apparatus CMa in which SPa is a suitable inspection object, the light guide plate 2a as the first aspect is configured as follows.

  The plurality of partition areas ARa correspond to the contour shape of the element ELa and are circular in the light guide plate 2a in a plan view having a size larger than the contour shape of the element ELa, and in the arrangement mode of the plurality of elements ELa. Correspondingly, they are set in a two-dimensional array at predetermined second intervals so as to be separated from each other. In correspondence with each of the plurality of partition areas ARa, a plurality of injection portions 21a are formed continuously or discretely above each contour line in the plurality of partition areas ARa. In the example shown in FIG. 2, each of the plurality of emitting portions 21a has circular grooves or strips in plan view on the first main surface SFa-1 facing (facing) the array object SPa in the light guide plate 2a. It is continuously formed with ridges (annular grooves or annular projections). Each groove or each protrusion in each of the plurality of injection portions 21a has at least one side surface intersecting a virtual surface along the surface spreading direction of the light guide plate 2a, in this example, the first main surface SFa-1. The one side surface is an emission surface. For example, each of these grooves or protrusions is formed of a recess or protrusion having two tapered side surfaces that intersect each other so as to have a V-shaped cross section, and each of the two tapered side surfaces is respectively It becomes the exit surface. In addition, for example, each of these grooves or protrusions is formed by a concave or convex portion that is curved so as to have a C-shaped cross section, and this curved curved surface becomes the exit surface. Also, for example, each of these grooves or protrusions has two parallel side surfaces that are perpendicular to the virtual plane and spaced apart from each other so as to have a U-shaped cross section, and the ridgeline at the bottom or top is, for example, an R chamfer or C The chamfered portion is formed by a chamfered recess or protrusion, and the R surface (curved surface) or the C surface (plane) of the chamfered portion is an emission surface. The plurality of injection portions 21a are formed by a processing method such as machining, laser processing, printing processing, and chemical processing. The exit surface is preferably formed to be a rough surface having random fine irregularities, and emits light guided in the light guide plate 2a by scattering.

  In the example shown in FIG. 2, the array object SPa is arranged in a two-dimensional array with two rows and two columns at predetermined first intervals so that the four convex lenses ELa-11 to ELa-22 are separated from each other. It is a lens array. Correspondingly, on the first main surface SFa-1 of the light guide plate 2a, there are four rows arranged in a two-dimensional array with two rows and two columns at predetermined second intervals so as to be separated from each other. Circular partition areas ARa-11 to ARa-22 are set so as to surround the contour of the convex lens ELa. Four injection grooves 21a-11 to 21a-22 are formed by four grooves continuously V-shaped along each circular (annular) contour line in each of the partition regions ARa-11 to ARa-22. It is formed as.

  The moving unit 3 is connected to the control processing unit 5 and moves relative to the array object SPa and the light guide plate 2a along an orthogonal direction (Z direction) orthogonal to the virtual plane according to the control of the control processing unit 5. Mechanism. The moving unit 3 may be, for example, a moving mechanism that moves the array object SPa in the Z direction to relatively move the array object SPa in the Z direction. For example, each of the array object SPa and the light guide plate 2a is moved. Although it may be a moving mechanism that relatively moves them along the Z direction by moving in the Z direction, in this embodiment, the light guide plate 2a is moved along the Z direction by moving the light guide plate 2a in the Z direction. It is a moving mechanism that moves them relatively. More specifically, the moving unit 3 has a chuck mechanism or the like, for example, a holding arm that engages with the light guide plate 2a to hold the light guide plate 2a, and a rail that guides the holding arm in the Z direction, for example, a rail or the like. And a drive unit having, for example, a motor and a damping mechanism for driving the holding arm in the Z direction according to the guide of the guide member. In this embodiment, the moving unit 3 is configured to be able to move the light guide plate 2a not only in the Z direction but also in the surface spreading direction (each direction in the X direction and the Y direction) of the light guide plate 2a. For example, an XYZ stage It is configured with. As a result, it is difficult to observe directly under the injection portion 21a, but it is possible by moving in the XY plane. As shown in FIG. 1, the X direction and the Y direction orthogonal to each other are set so that the normal line of the plane (XY plane) formed by the straight line along the X direction and the straight line along the Y direction is along the Z direction. The

  The imaging unit 4 is an apparatus that is connected to the control processing unit 5 and generates an image data of the array object SPa by capturing an optical image of the array object SPa according to the control of the control processing unit 5. The imaging unit 4 is arranged so that its optical axis is along the Z direction. The imaging unit 4 outputs the image data of the array object SPa to the control processing unit 5. The imaging unit 4 is disposed, for example, with an imaging optical system that forms an optical image of the array object SPa on a predetermined imaging surface, and a light receiving surface that coincides with the imaging surface, and the array object SPa An image sensor that converts an optical image into an electrical signal is provided.

  The input unit 6 is connected to the control processing unit 5 and inputs, for example, various commands such as a command for instructing measurement of the array object SPa, and an identifier (for example, an identification number of the inspection object) in the array object SPa, for example. Is a device for inputting various data necessary for the measurement to the array object inspection apparatus CMa, for example, a plurality of input switches assigned with predetermined functions, a keyboard, a mouse, and the like. The output unit 7 is connected to the control processing unit 5, and under the control of the control processing unit 5, commands and data input from the input unit 6, and measurement results of the array object SPa measured by the array object inspection device CMa ( For example, a device that outputs an image of the array object SPa, the presence or absence of an abnormality, and the location of the recognized abnormality), for example, a display device such as a CRT display, an LCD and an organic EL display, or a printing device such as a printer.

  A touch panel may be configured from the input unit 6 and the output unit 7. In the case of configuring this touch panel, the input unit 6 is a position input device that detects and inputs an operation position such as a resistive film method or a capacitance method, and the output unit 7 is a display device. In this touch panel, a position input device is provided on the display surface of the display device, one or more input content candidates that can be input to the display device are displayed, and the user touches the display position where the input content to be input is displayed. Then, the position is detected by the position input device, and the display content displayed at the detected position is input to the array object inspection device CMa as the operation input content of the user. In such a touch panel, since the user can easily understand the input operation intuitively, an array inspection apparatus CMa that is easy for the user to handle is provided.

  The IF unit 8 is a circuit that is connected to the control processing unit 5 and inputs / outputs data to / from an external device according to the control of the control processing unit 5. For example, an interface circuit of RS-232C that is a serial communication system , An interface circuit using the Bluetooth (registered trademark) standard, an interface circuit performing infrared communication such as an IrDA (Infrared Data Association) standard, and an interface circuit using the USB (Universal Serial Bus) standard.

  The control processing unit 5 is a circuit for controlling each part of the array object inspection device CMa according to the function of each part. The control processing unit 5 includes, for example, a microcomputer that includes a CPU (Central Processing Unit), a memory, and peripheral circuits thereof. In the control processing unit 5, a control unit 51 and a detection processing unit 52 are functionally configured by executing a program.

  The control part 51 is for controlling each part of the array object inspection apparatus CMa according to the function of each part. The control unit 51 also functions as a light control unit that controls at least one of the light amount and the color of the predetermined light emitted from the light emitting unit 11a. In the present embodiment, the first to fourth light emitting units 11a. The light amount and the emission color are controlled by controlling -1 to 11a-4. Then, the control unit 51 controls the light guide plate 2a and the array object by controlling the moving unit 3 to selectively execute the dark field illumination and the bright field illumination by switching between the dark field illumination and the bright field illumination. It also functions as an illumination switching control unit that controls the distance h from SPa. More specifically, when receiving an instruction for dark field illumination from the input unit 6, the control unit 51 performs the dark field illumination, as shown in FIG. 1A, and the light guide plate 2 a and the array object SPa. The light guide plate 2a is moved via the moving unit 3 so that the distance h between the two is set to a predetermined distance h1 set in advance that is equal to or less than the first switching distance h0. When the control unit 51 receives an instruction for bright field illumination from the input unit 6, as shown in FIG. 1B, the distance h between the light guide plate 2a and the array object SPa is set to execute bright field illumination. The light guide plate 2a is moved via the moving unit 3 so as to be set to a predetermined distance h2 that is set in advance longer than the first switching distance h0. The first switching distance h0 is a distance at which the dark field illumination and the bright field illumination are switched with each other by the light guide plate 2a configured as described above, and the size of each object ELa with respect to the size of the partition region ARa ( Based on the ratio of the size of the partition area ARa to the size of the individual object ELa), the surface state such as the shape and roughness of the injection surface in the injection portion 21a, the curvature of the surface shape of the individual object ELa, and the like. It is prescribed. Note that the control unit 51 sets the light guide plate 2a at the predetermined distance h1 or the distance h2, and then the luminance value in the image of the array object SPa obtained by the imaging unit 4 (for example, the average luminance value of the entire image or the image in advance). Light guide plate 2a so as to achieve more appropriate dark field illumination (distance that becomes the darkest) or more appropriate bright field illumination (distance that becomes the brightest) based on the set average brightness value in a predetermined region). May be finely adjusted via the moving unit 3.

  The detection processing unit 52 detects an abnormality of the array object SPa based on the image of the array object SPa imaged by the imaging unit 4. An abnormality in the array object SPa is a property that is not seen in the array object SPa in a normal state. For example, defects such as scratches and irregularities on the surface and inside, and the presence of foreign matters such as dust on the surface and inside, etc. is there. More specifically, the detection processing unit 52 performs, for example, a color extraction process for extracting a predetermined color on the image of the array object SPa imaged by the imaging unit 4, and equalizes the luminance when there is a gradation to generate a gradation Image processing such as gradation correction processing for correcting to a non-existing state and contour enhancement processing for emphasizing the contour is executed, and a pixel value (luminance value) is set to 2 at a predetermined threshold th in order to detect a predetermined image region. A binarization process is performed, and the presence / absence of the array object SPa is determined based on the presence / absence of the predetermined image area, and the abnormality of the array object SPa is detected.

  Next, the operation of the array object inspection apparatus CMa in the first embodiment will be described. FIG. 3 is a flowchart showing the operation of the array object inspection apparatus according to the first embodiment.

  First, when a power switch (not shown) is turned on by a user (operator), the control processing unit 5 performs initialization of each necessary unit, and by executing the program, the control processing unit 5 includes the control unit 51 and The detection processing unit 52 is functionally configured. The user sets the array object SPa of the object to be inspected in the array object inspection apparatus CMa so that the array object SPa faces the light guide plate 2a. In FIG. 3, dark field illumination or bright field illumination is set by the user (S1). For example, when a dark field illumination instruction is received from the input unit 6 by the user, the control unit 51 controls the moving unit 3 to move the light guide plate 2a in the Z direction, as shown in FIG. The distance h between the light guide plate 2a and the array object SPa is set to the predetermined distance h1. Further, for example, when an instruction for bright field illumination is received from the input unit 6 by the user, the control unit 51 controls the moving unit 3 to move the light guide plate 2a in the Z direction, as shown in FIG. In addition, the distance h between the light guide plate 2a and the array object SPa is set to the predetermined distance h2.

  When the distance h between the light guide plate 2a and the array object SPa is set, the control unit 51 controls the first and second light source units 1a-1, 1a-1, and the first to fourth light emitting units 11a-1. ˜11a-4 is caused to emit light, and the array object SPa is illuminated (S2). That is, the light emitted from the first to fourth light emitting units 11a-1 to 11a-4 is incident on the light guide plate 2a from the one side surface and the adjacent side surface, respectively, and the first and second main surfaces SFa-1, Reflection is repeated between SFa-2, and the light is guided in the surface spreading direction of the light guide plate 2a. Thus, when the light propagating through the light guide plate 2a reaches the emitting portion 21a, the light is scattered on the exit surface, and is emitted from the light guide plate 2a to the outside in an oblique direction with respect to the virtual surface. The light emitted from the light guide plate 2a by the emitting portion 21a illuminates the individual objects ELa in the array object SPa from the periphery of the object ELa. Accordingly, the individual objects ELa in the array object SPa are illuminated more uniformly. When dark field illumination is set, as shown in FIG. 1A, light emitted obliquely from the light guide plate 2a is incident on the individual objects ELa in the array object SPa from an oblique direction. To do. Accordingly, the individual objects ELa in the array object SPa are illuminated with dark field illumination. On the other hand, when the bright field illumination is set, as shown in FIG. 1B, the light emitted obliquely from the light guide plate 2a is incident on the individual objects ELa in the array object SPa from substantially above. To do. Therefore, the individual objects ELa in the array object SPa are illuminated with bright field illumination.

  During the illumination of the array object SPa, the control unit 51 controls the imaging unit 4, images the array object SPa by the imaging unit 4, and acquires an image of the array object SPa (S3).

  When the image of the array object SPa is acquired, the detection processing unit 52 detects an abnormality of the array object SPa based on the image of the array object SPa imaged by the imaging unit 4 (S4).

  And the control part 51 outputs the image of the array object SPa acquired by the imaging part 4, and the detection result of the detection process part 52 to the output part 7 (S5), and complete | finishes a process. Note that the control unit 51 may output the image of the array object SPa and the detection result of the detection processing unit 52 to an external device (not shown) via the IF unit 8 as necessary.

  As described above, the array object inspection device CMa (including the array object inspection illumination device LMa and the light guide plate 2a as the array object inspection light guide plate, hereinafter the same) in this embodiment is the predetermined object in the array object SPa. Since each of the objects ELa in the array object SPa is provided with the emission portions 21a formed above the respective contour lines in the plurality of different partitioned areas ARa set to the light guide plate 2a with a size surrounding the object ELa. On the other hand, light can be illuminated from around the object ELa. For this reason, the array object inspection apparatus CMa can illuminate the individual objects ELa in the array object SPa more uniformly, and can perform appearance inspection with higher accuracy in a lump. And since this emission part 21a has the emission surface which cross | intersects the virtual surface along the surface expansion direction of the light-guide plate 2a, it can inject | emit light in the diagonal direction with respect to the said virtual surface. For this reason, the array object inspection apparatus CMa can illuminate the individual objects ELa in the array object SPa from an oblique direction, and hence dark field illumination is possible.

  In the array object inspection device CMa according to the present embodiment, each contour shape in the plurality of partitioned areas ARa is circular, and therefore the illumination of the array object SPa in which the contour shape of each of the object ELa in the array object SPa is circular. Suitable for

  In addition, if the emission part 21a is formed on the second main surface SFa-2 surface further facing the first main surface SFa-1 facing the array object SPa in the light guide plate 2a, the light guide plate 2a is interposed. The array object SPa is illuminated and scattered by the light guide plate 2a. However, since the array object inspection device CMa in the present embodiment includes the emission part 21a formed on the first main surface SFa-1 facing the array object SPa in the light guide plate 2a, the time when the light is emitted from the emission part 21a. Since the array object SPa can be directly illuminated while maintaining the emission direction (the oblique direction), dark field illumination can be effectively realized.

  The array object inspection apparatus CMa in the present embodiment includes a control unit 51 that functions as a light control unit that controls the light amount and color of predetermined light, so that, for example, in accordance with a user input instruction via the input unit 6, the contrast is known. It can be easily adjusted to a suitable light quantity and color, and is suitable according to the object of visual inspection such as foreign matter (dust) or scratches attached to the surface, or, for example, a coating on each surface of the individual object ELa (for example, A suitable light quantity and color can be adjusted in accordance with an inspection object such as an array object SPa to which an antireflection coating or the like is applied.

  Since the array object inspection apparatus CMa in this embodiment includes the light source unit 1a including a light emitting diode (LED), heat generation can be reduced and light emission can be stabilized more quickly than a light source unit including a mercury lamp or a halogen lamp. .

  Since the array object inspection apparatus CMa in the present embodiment includes the moving unit 3 that moves the light guide plate 2a along the orthogonal direction (Z direction) orthogonal to the virtual plane, the distance between the light guide plate 2a and the array object SPa. The dark field illumination and the bright field illumination can be alternatively executed by appropriately adjusting. For this reason, the array object inspection apparatus CMa in this embodiment can detect various types of abnormalities by appropriately switching between dark field illumination and bright field illumination.

  In addition, although the array object inspection apparatus CMa in the first embodiment described above includes the light guide plate 2a having the circular emission portion 21a corresponding to the circular partition region ARa, the present invention is not limited thereto. The light guide plate 2 may have an elliptical shape, an elliptical shape, a polygonal shape, or the like corresponding to the partitioned area AR such as an elliptical shape, an elliptical shape, or a polygonal shape. More specifically, the array object inspection device CMa in the first embodiment may be configured to include any one of the following light guide plates 2b to 2h of the second to eighth aspects. In addition, the array object inspection apparatus CMb in the second embodiment to be described later is also configured to include any one of the light guide plates 2a to 2h of the first to eighth aspects.

  FIG. 4 is a perspective view mainly showing the configuration of the light guide plate of the second aspect in the array object inspection apparatus of the first embodiment. FIG. 5 is a perspective view mainly showing the configuration of the light guide plate of the third aspect in the array object inspection apparatus of the first embodiment. FIG. 6 is a perspective view mainly showing the configuration of the light guide plate of the fourth aspect in the array object inspection apparatus of the first embodiment. FIG. 7 is a perspective view mainly showing the configuration of the light guide plate of the fifth aspect in the array object inspection apparatus of the first embodiment. FIG. 8 is a perspective view mainly showing the configuration of the light guide plate of the sixth aspect in the array object inspection apparatus of the first embodiment. FIG. 9 is a perspective view mainly showing the configuration of the light guide plate of the seventh aspect in the array object inspection apparatus of the first embodiment. FIG. 10 is a cross-sectional view mainly showing the configuration of the light guide plate of the seventh aspect in the array object inspection apparatus of the first embodiment. FIG. 11 is a perspective view mainly showing the configuration of the light guide plate of the eighth aspect in the array object inspection apparatus of the first embodiment. In FIG. 6 to FIG. 8, the boundary lines of the divided areas ARd to ARf are indicated by phantom lines.

  As shown in FIG. 4, the light guide plate 2b of the second aspect has predetermined center positions so that a plurality of elements ELb having a rectangular shape (including a square shape) in a plan view are adjacent to each other. Are used in the array object inspection apparatus CMa that uses the array object SPb arranged in a two-dimensional array at a third interval as a suitable inspection object. The light guide plate 2b of the second aspect is configured as follows.

  The plurality of partition regions ARb correspond to the contour shape of the element ELb, have a rectangular shape in a plan view having a size larger than the contour shape of the element ELb, and are arranged in the arrangement mode of the plurality of elements ELb. Correspondingly, the center positions are set in a two-dimensional array at predetermined fourth intervals so as to be adjacent to each other. In correspondence with each of the plurality of partition areas ARb, a plurality of injection portions 21b are continuously formed above each contour line in the plurality of partition areas ARb. In the example shown in FIG. 4, the plurality of emission portions 21b are each continuously formed as rectangular grooves in a plan view on the first main surface SFb-1 facing the array object SPb in the light guide plate 2b. Is done. Each groove in each of the plurality of injection portions 21b is formed of a recess having two tapered side surfaces that intersect each other so as to have a V-shaped cross section, and each of the two tapered side surfaces is an injection surface. It becomes. Similarly, in the third to eighth aspects described later, the emission surface is preferably formed to be a rough surface having random fine irregularities, and the light guided in the light guide plate 2b is emitted by scattering. To do.

  In the example shown in FIG. 4, the array object SPb has two quadrangular pyramid prisms ELb-11 to ELb-22 that are adjacent to each other, and each center position is 2 in 2 rows and 2 columns at a predetermined third interval. It is a prism array arranged in a dimensional array. Correspondingly, on the first main surface SFb-1 of the light guide plate 2b, the respective center positions are arranged in a two-dimensional array with two rows and two columns at predetermined fourth intervals so as to be adjacent to each other. In addition, four square-shaped divided areas ARb-11 to ARb-22 are set to have a size surrounding the outline of the quadrangular pyramid prism ELb. Injected portions 21b having four grid-like (tab-shaped) grooves in a plan view having a V-shaped cross-section continuously along each square-shaped outline in each of the partition regions ARb-11 to ARb-22. -11 to 21b-22. The grooves 21b-11 to 21b-22 adjacent to each other share the groove shape.

  In such a light guide plate 2b of the second aspect, since each contour shape in the plurality of partitioned areas ARb is rectangular, each of the array objects SPb in the array object SPb has a rectangular contour shape. Suitable for lighting. Moreover, since the emission part 21b is formed continuously, it is possible to illuminate light from the entire periphery of the individual objects ELb in the array object, and therefore, it is possible to illuminate brighter.

  As shown in FIG. 5, the light guide plate 2c of the third aspect is a two-dimensional array with a predetermined fifth interval so as to separate a plurality of elements ELc having an elliptical outline shape in plan view. The array object inspection device CMa uses the array object SPc arranged in a shape as a suitable inspection object. The light guide plate 2c of the third aspect is configured as follows.

  The plurality of partition regions ARc correspond to the contour shape of the element ELc and are arranged in the light guide plate 2c in an oval shape in plan view having a size larger than the contour shape of the element ELc. Corresponding to the two, a two-dimensional array is set at a predetermined sixth interval so as to be separated from each other. In correspondence with each of the plurality of partition areas ARc, a plurality of injection portions 21c are continuously formed above each contour line in the plurality of partition areas ARa. In the example shown in FIG. 5, each of the plurality of emitting portions 21c is continuously formed as an oval groove on the first main surface SFc-1 facing the array object SPc in the light guide plate 2c in plan view. It is formed. Each groove in each of the plurality of injection portions 21c is formed by a concave portion having two tapered side surfaces that intersect each other so as to have a V-shaped cross section, and each of the two tapered side surfaces is an injection surface. It becomes.

  In the example shown in FIG. 5, the array object SPc is arranged in a two-dimensional array with two rows and two columns at predetermined fifth intervals so as to separate the four capsule drugs ELc-11 to ELc-22 from each other. Package. Correspondingly, on the first main surface SFc-1 of the light guide plate 2c, there are four rows arranged in a two-dimensional array with two rows and two columns at a predetermined sixth interval so as to be separated from each other. The oval partition areas ARc-11 to ARc-22 are set to have a size surrounding the outline of the capsule medicine ELc. Four grooves having a V-shaped cross section are continuously formed as four injection portions 21c-11 to 21c-22 along each of the oval outlines in the partition regions ARc-11 to ARc-22. Has been.

  In such a light guide plate 2c of the third aspect, since each contour shape in the plurality of partitioned areas ARb is an oval shape, the array object in which the contour shape of each of the objects ELc in the array object SPc is an oval shape. Suitable for SPc illumination. Moreover, since the emission part 21c is formed continuously, it is possible to illuminate light from the entire periphery of the individual objects ELc in the array object, and thus to illuminate brighter.

  As shown in FIG. 6, the light guide plate 2d of the fourth aspect is used in an array object inspection apparatus CMa that uses the above-described array object SPa as a suitable inspection object. The light guide plate 2d of the fourth aspect is configured as follows.

  The plurality of partition regions ARd have a rectangular shape in plan view with a size surrounding the element ELa, and the center positions are adjacent to each other so as to be adjacent to the light guide plate 2d in accordance with the arrangement mode of the plurality of elements ELa. A two-dimensional array is set with a predetermined eighth interval. In correspondence with each of the plurality of partition areas ARd, a plurality of ejection portions 21d are discretely formed above each contour line in the plurality of partition areas ARb. In the example shown in FIG. 6, each of the plurality of emitting portions 21d has a cross shape (X shape, cross shape) in plan view on the first main surface SFd-1 facing the array object SPa in the light guide plate 2d. It is formed discretely with a groove. Each groove in each of the plurality of injection portions 21d is formed of a recess having two tapered side surfaces that intersect each other so as to have a V-shaped cross section, and each of the two tapered side surfaces is an injection surface. It becomes.

  In the example shown in FIG. 6, the center positions of the first main surface SFd-1 of the light guide plate 2d corresponding to the array object SPa of the lens array are adjacent to each other at predetermined eighth intervals. Four square-shaped partition areas ARd-11 to ARd-22 arranged in a two-dimensional array with two rows and two columns are set to have a size surrounding the lens ELa. In each of the divided areas ARd-11 to ARd-22, there are four cross-shaped (cross-shaped) grooves in each vertex (four corners) of each square-shaped contour line in a plan view having a V-shaped cross section. -11 to 21d-22. The cross-shaped groove shape is common between the adjacent ejection portions 21d-11 to 21d-22.

  In such a light guide plate 2d of the fourth aspect, since the emitting portions 21d are discretely formed, it is easy to process and form the emitting portions 21d.

  As shown in FIG. 7, the light guide plate 2e of the fifth aspect is used in an array object inspection apparatus CMa that uses the above-described array object SPa as a suitable inspection object. The light guide plate 2e of the fifth aspect is configured as follows.

  The plurality of partition areas ARe are rectangular in plan view with a size surrounding the element ELa, and the center positions are adjacent to each other so as to be adjacent to the light guide plate 2e corresponding to the arrangement mode of the plurality of elements ELa. A two-dimensional array is set with a predetermined 10th interval. In correspondence with each of the plurality of partition areas ARe, a plurality of ejection portions 21e are discretely formed above each contour line in the plurality of partition areas ARe. In the example shown in FIG. 7, each of the plurality of emitting portions 21e has a dot shape (a point shape, a column shape, a cone shape) in a plan view on the first main surface SFe-1 facing the array object SPa in the light guide plate 2e. Shape), more specifically, conical recesses having tapered side surfaces intersecting with the imaginary surface, and the tapered side surfaces serve as emission surfaces.

  In the example shown in FIG. 7, the center positions of the first main surface SFe-1 of the light guide plate 2e corresponding to the array object SPa of the lens array are spaced apart from each other by a predetermined tenth interval. Four square-shaped divided areas ARe-11 to ARe-22 arranged in a two-dimensional array with two rows and two columns are set to have a size surrounding the lens ELa. Conical recesses having a V-shaped cross section are formed as four injection portions 21e-11 to 21e-22 at each vertex (four corners) of each square-shaped contour line in each of the partition regions ARe-11 to ARe-22. ing. The conical recesses are common to the adjacent injection portions 21e-11 to 21e-22.

  In such a light guide plate 2e of the fifth aspect, since the emitting portions 21e are discretely formed, it is easy to process and form the emitting portions 21e.

  As shown in FIG. 8, the light guide plate 2f of the sixth aspect is used in an array object inspection apparatus CMa that uses the above-described array object SPa as a suitable inspection object. The light guide plate 2f of the sixth aspect is configured as follows.

  The plurality of partition regions ARf are rectangular in a plan view with a size surrounding the element ELa, and the center positions are adjacent to each other so as to be adjacent to the light guide plate 2f in accordance with the arrangement mode of the plurality of elements ELa. A two-dimensional array is set at a predetermined twelfth interval. In correspondence with each of the plurality of partition areas ARf, a plurality of ejection portions 21f are discretely formed above each contour line in the plurality of partition areas ARf. In the example shown in FIG. 8, each of the plurality of emitting portions 21f has a dot shape in plan view on the first main surface SFf-1 facing the array object SPa in the light guide plate 2f. It is formed so as to stand up discretely with a cylindrical projection having a tip chamfered so as to intersect the surface, and the R surface (curved surface) becomes the exit surface.

  In the example shown in FIG. 8, the center positions of the first main surface SFf-1 of the light guide plate 2f corresponding to the array object SPa of the lens array are adjacent to each other at a predetermined twelfth interval. Four square-shaped partition areas ARf-11 to ARf-22 arranged in a two-dimensional array with two rows and two columns are set so as to surround the lens ELa. In each of the divided areas ARf-11 to ARf-22, four projecting portions 21f-11 to 21f-22 are provided with four projecting portions 21f-11 to 21f-22 each having a rounded chamfered tip at each apex (four corners) of each square-shaped contour line. It is formed as. The cylindrical projections are common to the injection portions 21f-11 to 21f-22 adjacent to each other.

  In such a light guide plate 2f of the sixth aspect, since the emission portions 21f are discretely formed, it is easy to process and form the emission portions 21f. In addition, since the emission part 21f is a protrusion, the emission part 21f can be brought closer to the array object SPa in the Z-axis direction, so that it is possible to illuminate from a larger angle.

  In the above description, the tip of the emitting portion 21f is the R surface, but it may be a C surface of 1 to 4 surfaces having an emitting surface directed to the corresponding array object SP.

  As shown in FIGS. 9 and 10, the light guide plate 2g according to the seventh aspect is used in an array object inspection apparatus CMa that uses the above-described array object SPa as a suitable inspection object. The light guide plate 2g of the seventh aspect is configured as follows.

  The plurality of partition regions ARg correspond to the contour shape of the element ELa and are circular in the light guide plate 2g in a plan view having a size larger than the contour shape of the element ELa, and the arrangement form of the plurality of elements ELa Correspondingly, they are set in a two-dimensional array at a predetermined 14th interval so as to be separated from each other. In correspondence with each of the plurality of partition regions ARg, a plurality of injection portions 21g are continuously formed above each contour line in the plurality of partition regions ARg. In the example shown in FIGS. 9 and 10, each of the plurality of partition areas ARg has a first size and a first size within the partition area ARg, for example, with the same size (in this example, the same diameter) as the circular partition area ARg. A cylindrical opening 22g penetrating the two main surfaces SFg-1 and SFg-2 is provided, and the end on the first main surface SFg-1 side continuously intersects the virtual surface in the circumferential direction. Chamfered. As a result, in each of the plurality of partitioned areas ARg, there are formed injection portions 21g each having a C-chamfered C-plane as an emission surface.

  In the example shown in FIG. 9 and FIG. 10, the first main surface SFg-1 of the light guide plate 2g corresponding to the array object SPa of the lens array is spaced apart from each other by a predetermined 14th interval. Four circular divided areas ARg-11 to ARg-22 arranged in a two-dimensional array in two rows and columns are set to have a size surrounding the contour of the convex lens ELa. Four cylindrical openings 22g-11 to 22g-22 having the same size as the circular shape in each of the partition areas ARg-11 to ARg-22 are provided, and the end of the first main surface SFg-1 side thereof. Are continuously chamfered along the circumferential direction to form four injection portions 21g-11 to 21g-22.

  The opening 22g may be provided in a part of the plurality of partition areas ARg. Further, the emission surface of the injection part 21g may be R chamfering instead of C chamfering.

  In such a light guide plate 2g of the seventh aspect, since each contour shape in the plurality of partitioned areas ARg is circular, the contour shape of each of the objects ELa in the array object SPa is circular. Suitable for lighting. Moreover, since the emission part 21g is formed continuously, it is possible to illuminate light from the entire periphery of the individual objects ELa in the array object SPa, and therefore, it is possible to illuminate brighter. The light guide plate 2g according to the seventh aspect includes the opening 22g provided in the partition area ARg, so that the predetermined object ELa in the array object SPa can be observed directly through the opening 22g. To do. Therefore, the predetermined value in the array object SPa is not affected by adhesion of foreign matters (dust) on the light guide plate 2g, surface accuracy (distortion) of the first and second main surfaces SFg-1, SFg-2, and the like. The object ELa can be observed.

  As shown in FIG. 11, the light guide plate 2h according to the eighth aspect has a plurality of first elements ELh having a circular contour shape in plan view and a contour shape having a rectangular shape (including a square shape) in plan view. Is used in an array object inspection apparatus CMa having a suitable object to be inspected as an array object SPh in which a plurality of second elements ELh are arranged in a two-dimensional array at predetermined 15th intervals so as to be separated from each other. . That is, the array object SPh is obtained by arranging a plurality of elements ELh having different outline shapes in a two-dimensional array. The light guide plate 2h according to the eighth aspect is configured as follows.

  The plurality of partition areas ARh correspond to the contour shape of the first element ELh having a circular shape and are circularly formed on the light guide plate 2h in a plan view having a larger size than the contour shape of the first element ELh. Corresponding to the arrangement mode of the first elements ELh, the first region set in a two-dimensional array at a predetermined 16th interval so as to be separated from each other, and the rectangular second element ELh Corresponding to the contour shape, the light guide plate 2h has a rectangular shape in plan view larger than the contour shape of the second element ELh, and is separated from the light guide plate 2h according to the arrangement mode of the plurality of second elements ELh. As described above, the second region is configured to be set in a two-dimensional array with the sixteenth interval therebetween. In correspondence with each of the plurality of partition areas ARh, a plurality of injection portions 21h are continuously formed above each contour line in the plurality of partition areas ARh. In the example shown in FIG. 11, each of the plurality of emitting portions 21h has a circular shape in plan view in the circular partition region ARh on the first main surface SFh-1 facing the array object SPh in the light guide plate 2h. It is continuously formed with grooves, and in the rectangular partition region ARh, it is continuously formed with rectangular grooves in plan view. Each groove in each of the plurality of injection portions 21h is formed of a recess having two tapered side surfaces that intersect each other so as to have a V-shaped cross section, and each of the two tapered side surfaces is an injection surface. It becomes.

  In the example shown in FIG. 11, the array object SPh is positioned in each of the first row and the first column and the first row and the second column in a two-row and two-column array having a predetermined 15th interval so as to be separated from each other. Two convex lenses ELh-11 and ELh-12, and two quadrangular pyramid prisms ELh-21 and ELh-22 positioned at respective positions of 2 rows and 1 column and 2 rows and 2 columns in the array. It is an optical element array. Correspondingly, on the first main surface SFh-1 of the light guide plate 2h, one row and one column in a two-row and two-column array of two rows and two columns spaced apart from each other by a predetermined sixteenth interval. And two circular partition areas ARh-11 and ARh-12 at each position of 1 row and 2 columns are set to a size surrounding the contour of the convex lens ELh, and 2 rows and 1 column and 2 rows and 2 columns in the array are arranged. Two rectangular-shaped divided areas ARh-21 and ARh-22 are set to have a size surrounding the outline of the quadrangular pyramid prism ELh. In each of the partitioned areas ARh-11 to ARh-22, four injection portions 21h-11 to 21h-22 each having an annular groove continuously in a plan view having a V-shaped cross section along each contour line of each shape. It is formed as.

  In such a light guide plate 2h of the eighth aspect, since the contour shapes in the plurality of partitioned areas ARh are a plurality of different shapes, the contour shapes of the individual objects ELh in the array object SPh are a plurality of different shapes. It is suitable for illumination of a certain array object SPh. Moreover, since the emission part 21h is formed continuously, it is possible to illuminate light from the entire periphery of the individual objects ELh in the array object, and therefore, it is possible to illuminate brighter.

  Next, another embodiment will be described.

(Second Embodiment)
The array object inspection device CMa (illumination device LMa for array object inspection) in the first embodiment includes the light source unit 1a disposed on the side surface of the light guide plate 2 (2a to 2h), but the array object in the second embodiment. The inspection device CMb (array object inspection illumination device LMb) includes a so-called dome-shaped light source unit 1b.

  FIG. 12 is a perspective view showing a partial configuration of the array object inspection apparatus according to the second embodiment. FIG. 12A shows the case of dark field illumination, and FIG. 12B shows the case of bright field illumination. In FIG. 12, only the light guide plate 2a and the light source unit 1b in the array object inspection device CMb and the array object inspection illumination device LMb of the second embodiment are illustrated, and illustration of other configurations is omitted.

  The array object inspection device CMb according to the second embodiment includes a light source unit 1b, a light guide plate 2a, a moving unit 9, an imaging unit 4, and a control processing unit 5, and as in the first embodiment, An input unit 6, an output unit 7, and an IF unit 8 are provided. The light guide plate 2a, the imaging unit 4, the control processing unit 5, the input unit 6, the output unit 7 and the IF unit 8 in the array object inspection device CMb of the second embodiment are respectively the array object inspection device CMa of the first embodiment. Are the same as the light guide plate 2a, the imaging unit 4, the control processing unit 5, the input unit 6, the output unit 7 and the IF unit 8 in FIG.

  The light guide plate 2a corresponds to an example of an array object inspection light guide plate, and the light source unit 1b and the light guide plate 2a correspond to an example of an array object inspection illumination device LMb according to the second embodiment. Similarly, the moving unit 3 and the control unit 51 are provided. In the example shown in FIG. 12, the light guide plate 2a of the first aspect is used corresponding to the array object SPa, but the array object inspection apparatus CMb (array object inspection illumination device LMb) in the second embodiment is used. Similarly to the array object inspection device CMa (array object inspection illumination device LMa) in the first embodiment, the light guide plates 2b to 2h of the second to eighth aspects can be provided.

  As shown in FIG. 12, the light source unit 1 b includes a spherical shell main body 12 b formed in a part of the spherical shell, and a light emission that is disposed inside the spherical shell main body 12 b and emits and emits the predetermined light. Part 11b. The spherical shape of the spherical shell is obtained, for example, by rotating a perfect sphere that is the shape of a trajectory obtained by rotating a perfect circle, an elliptic sphere that is the shape of a trajectory obtained by rotating an ellipse, and a parabola. The parabola is the shape of the trajectory to be generated. A through-opening is formed at the top of the spherical shell body 12b so that an optical image of the array object SPa through the light guide plate 2a is incident on the imaging unit 4. On the inner side surface of the spherical shell main body 12b, it is preferable that a diffuse reflection layer that diffuses and reflects incident light, for example, containing barium sulfate as a main material is formed. And the light emission part 11b is provided with several LED which consists of multiple types similarly to the light emission part 11a of 1st Embodiment, These LED are the circumferential direction etc. on the inner surface of the bottom part opened in the spherical shell main body 12b. They are arranged at intervals. The light emitting unit 11 b is connected to the control processing unit 5 and emits light with a light amount and a color according to the control of the control processing unit 5.

  The moving unit 9 (not shown) is connected to the control processing unit 5, and relatively moves the light source unit 1 b and the light guide plate 2 a along the orthogonal direction (Z direction) orthogonal to the virtual plane according to the control of the control processing unit 5. It is a moving mechanism that moves. For example, the moving unit 9 may be a moving mechanism that moves the light guide plate 2a in the Z direction to relatively move the light guide plate 2a in the Z direction. Although it may be a moving mechanism that relatively moves them along the Z direction by moving in the Z direction, in the present embodiment, the light source unit 1b is moved along the Z direction by moving in the Z direction. It is a moving mechanism that moves them relatively. More specifically, the moving unit 9 includes a support arm that is fixed to the light source unit 1b and supports the light source unit 1b, a guide member such as a rail that guides (guides) the support arm in the Z direction, and the support unit. A driving unit having, for example, a motor and a damping mechanism for driving the arm in the Z direction according to the guidance of the guide member;

  In such an array object inspection apparatus CMb, the light source unit 1b and the light guide unit 1b are guided so that the distance between the light source unit 1b and the light guide plate 2a is set to a predetermined distance H1 that is not more than the second switching distance H0. When the light plate 2a is brought close to the light plate, the light emitted from the light source unit 1b is incident from the side surface of the light guide plate 2a. As described above, the light is emitted obliquely with respect to the individual objects ELa in the array object SPa. The light is illuminated and dark field illumination is possible. On the other hand, when the light source unit 1b and the light guide plate 2a are separated such that the distance between the light source unit 1b and the light guide plate 2a is set to a predetermined distance H2 that is longer than the second switching distance H0. The individual objects ELa in the array object SPa are illuminated with light from substantially above via the light guide plate 2a, thereby enabling bright field illumination. The second switching distance H0 is a distance at which the dark field illumination and the bright field illumination are switched to each other by the light guide plate 2a configured as described above. Similar to the first switching distance h0, the size of the partition area ARa. The size of each of the objects ELa with respect to (the ratio of the size of the partition area ARa to the size of each of the objects ELa), the surface state such as the shape and roughness of the injection surface in the injection portion 21a, and the individual objects It is defined based on the curvature of the surface shape in ELa.

  Such an array object inspection apparatus CMb (including the array object inspection illumination device LMb and the light guide plate 2a as the array object inspection light guide plate, hereinafter the same) in the second embodiment is the same as the array object inspection in the first embodiment. The same effects as the device CMa are obtained. The array object inspection device CMb in the second embodiment can use a commercially available so-called dome illumination device for the light source unit 1b.

  Since the array object inspection apparatus CMb in the second embodiment includes the moving unit 9 that moves the light source unit 1b along the orthogonal direction (Z direction) orthogonal to the virtual plane, it is between the light source unit 1b and the light guide plate 2a. Dark field illumination and bright field illumination can be alternatively executed by adjusting the distance appropriately.

  In the second embodiment described above, the dark field illumination and the bright field illumination are alternatively realized by switching the distance between the light source unit 1b and the light guide plate 2a. By fixing the distance between the light plate 2a and switching the distance between the light guide plate 2a and the array object SPa as in the first embodiment, dark field illumination and bright field illumination are alternatively selected. It may be realized. The switching of the distance between the light guide plate 2a and the array object SPa is the same as described above.

  In the first and second embodiments described above, the array objects SPa to SPc and SPh are configured to include the predetermined objects ELa to ELc and ELh having a convex shape. The object EL may be a concave shape, a concave-convex shape, a shape in which a curved surface is formed inside the plane, or the like.

  In the first and second embodiments described above, preferably, the light source unit 1 reduces the amount of protrusion of the light source substrate and the light guide plate holding unit from the lower surface of the light guide plate toward the light guide plate exit surface side. Is configured so that the light source substrate does not get in the way even when the is placed close to the array object SP.

  In order to express the present invention, the present invention has been properly and fully described through the embodiments with reference to the drawings. However, those skilled in the art can easily change and / or improve the above-described embodiments. It should be recognized that this is possible. Therefore, unless the modifications or improvements implemented by those skilled in the art are at a level that departs from the scope of the claims recited in the claims, the modifications or improvements are not covered by the claims. To be construed as inclusive.

CMa, CMb Array object inspection device LMa, LMb Array object inspection illumination device SPa-SPc, SPh Array object 1a, 1b Light source unit 2a-2h Light guide plate 3, 9 Moving unit 4 Imaging unit 5 Control processing unit 51 Control unit 52 Detection Processing part

Claims (11)

An illumination device for inspecting an array object that illuminates an array object comprising a plurality of predetermined objects in an array,
A light source that emits predetermined light; and
A light guide plate that receives light emitted from the light source unit and guides the incident light; and
The light guide plate includes an emission portion having an emission surface that intersects a virtual plane along the surface spreading direction of the light guide plate and emits the incident and guided light from the light guide plate to the outside.
The illumination unit for testing an array object, wherein the emission part is formed above each contour line in a plurality of different partitioned areas set on the light guide plate with a size surrounding the predetermined object. . Each contour shape in the plurality of partitioned regions is one of a circular shape, an elliptical shape, an oval shape, a polygonal shape,
The illumination device for array object inspection according to claim 1, wherein the emission unit is formed continuously or discretely above each contour line in the plurality of partition regions. The illumination device for array object inspection according to claim 1, wherein the emission unit is formed on a main surface of the light guide plate facing the array object. The light source unit includes a light emitting unit that emits and emits the predetermined light, and a light control unit that controls at least one of a light amount and a color in the predetermined light emitted from the light emitting unit. The illumination device for array object inspection according to any one of claims 1 to 3, wherein: The light guide plate includes a pair of first and second main surfaces facing each other, guides the incident light between the first and second main surfaces, and is provided in the partition region. The illumination device for array object inspection according to any one of claims 1 to 4, further comprising an opening penetrating between the first main surface and the second main surface. The illumination device for array object inspection according to any one of claims 1 to 5, wherein the light source unit includes a light emitting diode that emits and emits the predetermined light. The array according to any one of claims 1 to 6, further comprising a moving mechanism that relatively moves the array object and the light guide plate along an orthogonal direction orthogonal to the virtual plane. Lighting device for inspection of objects. The light source unit includes a spherical shell main body formed in a shape of a part of a spherical shell, and a light emitting unit that is disposed inside the spherical shell main body and emits and emits the predetermined light. The illumination device for inspecting an array object according to any one of claims 1 to 6. The illumination device for array object inspection according to claim 8, further comprising a moving mechanism that relatively moves the light source unit and the light guide plate along an orthogonal direction orthogonal to the virtual plane. An illumination unit for inspecting an array object that illuminates an array of inspected objects provided with a plurality of predetermined objects in an array; and
An imaging unit for imaging an optical image of the array object;
A detection processing unit that detects an abnormality of the array object based on an image of the array object imaged by the imaging unit;
The array object inspection illumination device according to any one of claims 1 to 9, wherein the array object inspection illumination unit is the array object inspection illumination device. An array object inspection light guide plate used in the array object inspection illumination apparatus according to claim 1 or the array object inspection apparatus according to claim 10.