JP2015058692A - Scribing wheel pin, holder unit and scribing device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a scribing wheel pin, a holder unit and a scribe device using the pin, in the scribing wheel pin, rotation failure hardly occurs even when the scribing wheel which is subjected to binder removal treatment and on whose tip, a diamond coating film by a CVD method is formed is used as it is without processing to a through hole part for penetrating a pin.SOLUTION: A scribing wheel pin 50 has a diamond-like carbon (DLC) coating film 52 on a surface of a base material 51 formed of hard metal, and the DLC coating film 52 has thickness of 0.8-1.5 μm, a category of the DLC is ta-C and hardness of the DLC is 5000Hv or more.

Description

  The present invention relates to a scribing wheel pin, a holder unit, and a scribing device used for forming a scribe line on the surface of a brittle material substrate having high hardness.

  Many conventional scribing wheels are made of a base material made of cemented carbide or polycrystalline sintered diamond (PCD, see Patent Document 1). The PCD scribing wheel is produced by using a mixture of diamond particles and a binder made of an iron group metal such as cobalt and sintering it under high temperature and pressure.

  The scribing wheel made of PCD has the advantage that it has a longer life than that made of cemented carbide, but because it is difficult to process, there is a problem that the manufacturing time is long and only a small diameter can be manufactured. is there. As a scribing wheel that solves the problem of this PCD scribing wheel, there is known a scribing wheel in which a diamond film is formed on the surface of a cemented carbide member by a chemical vapor deposition (CVD) method (Patent Document). 2).

International Publication WO2003 / 51784 Japanese Patent Laid-Open No. 10-072224 Microfilm of Japanese Utility Model Application No. 59-034687 (Japanese Utility Model Application Publication No. 60-147635) JP 2008-297171 A JP 2009-006470 A

  A scribing wheel with a diamond coating formed on the cutting edge by CVD has a longer life than a scribing wheel made of PCD or cemented carbide, and is a brittle material such as a ceramic substrate, sapphire substrate, or silicon substrate that is harder than a glass substrate. A scribing line can be formed also on the substrate.

  Conventionally, as a ceramic substrate, a low-temperature co-fired ceramic (LTCC) substrate fired at about 850 to 900 ° C. has been often used. However, in recent years, in applications such as ceramic heaters, optical communication packages, ECU (Electronic Control Unit) packages represented by car electronics, etc., taking into account miniaturization, environmental resistance, heat dissipation, cost, etc. High temperature co-fired ceramic (HTCC) substrates are also being used. An HTCC substrate is harder than a glass substrate or LTCC substrate, and a scribing wheel in which a diamond film is formed on the blade edge by a CVD method is useful.

On the other hand, when a diamond film is formed on the surface of the cemented carbide by a CVD method, a binder such as cobalt contained in the cemented carbide decreases the adhesion and growth of the diamond film by the CVD method. Usually, a debinding material treatment (debinding material treatment) is performed on the surface of the cemented carbide. This debinding material treatment is performed by immersing a cemented carbide scribing wheel in a strong acid solution such as nitric acid (HNO ₃ ). At this time, if the through-hole portion through which the pin of the cemented carbide scribing wheel is passed is sealed so as not to come in contact with the strong acid solution, the number of man-hours increases. Therefore, it is usually immersed in the strong acid solution in an exposed state. Therefore, both the side surface of the cemented carbide scribing wheel and the inner peripheral portion of the through hole through which the pin passes are in a state where the debinding material is treated.

  When a brittle material substrate is scribed using a scribing wheel that has been subjected to such debinding material processing and a diamond film is formed on the cutting edge by CVD, cobalt is removed from the inner wall surface of the through hole through which the pin passes. In addition, tungsten carbide particles and the like in the cemented carbide easily fall off. For this reason, wear powder is generated in the through-hole through which the pin passes, and this may adhere to the pin, resulting in high rotational resistance, resulting in poor rotation, and the surface from which cobalt has fallen off due to the debinding treatment is rough. Or mechanical strength may be reduced.

  In order to overcome such a problem, it is conceivable to remove the region treated with the debinding material by polishing the inner wall surface of the through hole through which the pin passes. However, there is a possibility of damaging the edge line of the cutting edge when attaching / detaching a scribing wheel having a diamond film formed by CVD on the cutting edge, and the degree of progress of the debonding material processing is individual scribing. Since it is not constant for each wheel, there is a problem that processing white is unclear, so it is difficult to adopt it immediately.

  Further, when a PCD pin is used for a scribing wheel whose base material is a cemented carbide alloy, since the PCD has a higher hardness than the cemented carbide alloy, there is a problem that the inner diameter of the scribing wheel is further scraped by the pin. On the other hand, if a cemented carbide pin is used for a cemented carbide scribing wheel, it cannot be used because seizure occurs due to frictional heat.

  The inventors have made various studies in order to solve the problem of the scribing wheel that has been subjected to the debinding material treatment as described above and has a diamond coating formed on the blade edge portion by the CVD method. As a result, by making the material of the pin for the scribing wheel a predetermined material, the debinding material treatment is performed, and the through hole portion through which the pin of the scribing wheel in which the diamond coating is formed on the blade edge portion is passed Thus, even if it is used as it is without any processing, it has been found that a rotation failure is unlikely to occur, and the present invention has been completed.

  In Patent Document 3, an example in which a reinforcing layer having fine particles of a high hardness material such as diamond is formed on the surface of a pin made of cemented carbide is shown. Nothing is disclosed.

  That is, in the present invention, the debinding material treatment is performed, and the scribing wheel on which the diamond coating is formed by the CVD method on the blade tip portion may be used as it is without performing any processing on the through hole portion through which the pin passes. An object of the present invention is to provide a pin for a scribing wheel in which rotation failure is unlikely to occur, a holder unit using the pin, and a scribing device.

The scribing wheel pin of the present invention is
A scribing wheel pin having a DLC film formed on its surface,
The DLC coating is
The thickness is 0.8-1.5 μm,
The DLC classification is ta-C,
The hardness is 5000 Hv or more.

In general, DLC is classified into the following three types, as shown in Table 1 below, according to the ratio of the sp ² component forming the graphite structure to the sp ³ component forming the diamond structure and the hydrogen content. (See Patent Documents 3 and 4 above).

DLC increases in sp ³ bond ratio and decreases in hydrogen content, so that the properties of diamond become stronger and hardness increases, and as the sp ³ bond ratio decreases and hydrogen content increases, the properties of graphite increase. Strengthens and decreases hardness. The classification of DLC can be confirmed by measuring the Raman shift of the DLC film. The pin for a scribing wheel of the present invention is coated with a DLC film whose surface is classified as ta-C, has a high surface hardness, and has a small coefficient of friction. Therefore, even when used in combination with various scribing wheels, Is long, and it becomes difficult for rotation failure to occur for a long time.

  In the scribing wheel pin of the present invention, the base material of the pin is preferably a cemented carbide [a1].

  Cemented carbide is widely used as a base material for scribing wheel pins, but the surface of these base materials is hard and has a low friction coefficient so that the above effect is better. It comes to be played.

  Further, the holder unit of the present invention includes a scribing wheel in which a through hole is formed, a pin that is inserted into the through hole of the scribing wheel, and rotatably holds the scribing wheel, and the scribing wheel is disposed. A holder having a pair of support portions that form grooves, and provided with pin holes for placing the pins on the pair of support portions, and wherein the scribing wheel is disposed on the pin holes. A holder unit that is rotatably held, wherein the pin has a DLC film formed on a surface thereof, the DLC film has a thickness of 0.8 to 1.5 μm, and the DLC classification is ta- C, and the hardness is 5000 Hv or more.

  According to the holder unit of the present invention, since the hardness of the surface of the pin used is high and the coefficient of friction is also small, the life is long, the rotation failure of the scribing wheel is difficult to occur for a long time, and the scribing efficiency is good. Unit is obtained.

  In the holder unit of the present invention, the base material of the pin is preferably a cemented carbide.

  PCD and cemented carbide are widely used as base materials for scribing wheel pins, but the surface of these base materials is hard and has a low friction coefficient so that the above effects are more effective. It will be played well.

  Further, in the holder unit of the present invention, the scribing wheel is made of cemented carbide and has been treated with a debinding material, and the region treated with the debinding material on the inner wall surface of the through hole is removed. It may be.

  With such a configuration, the region treated with the debonding material does not remain on the inner wall surface of the through hole through which the pin of the scribing wheel passes, so the life is longer and rotation failure occurs for a longer time. It becomes difficult to obtain a holder unit with good scribing efficiency.

  Further, in the holder unit of the present invention, the scribing wheel is made of cemented carbide and has been treated with a debinding material, and a region treated with the debinding material remains on the inner wall surface of the through hole. It may be.

  If the debonding material-treated portion remains on the inner wall surface of the through hole through which the pin of the scribing wheel passes, diamond fine particles and tungsten carbide particles in the cemented carbide easily fall off from this portion, and rotation failure tends to occur. According to the holder unit of the present invention, even in such a case, it is possible to obtain a holder unit that has a long life, hardly causes a rotation failure for a long time, and has good scribing efficiency.

  Further, in the holder unit of the present invention, when the scribing wheel is made of a cemented carbide and is treated with a debinding material, a diamond coating by a CVD method may be formed on the surface of the cutting edge portion. preferable.

  When the surface of the cemented carbide is treated with the debinding material, it becomes easy to form a diamond film by the CVD method, so that the effect of the holder unit of the present invention is more excellent.

  Furthermore, the scribing apparatus of the present invention includes any one of the above holder units.

  According to the scribing apparatus of the present invention, since the life of the pins in the holder unit is long and the rotation failure of the scribing wheel does not easily occur, a scribing apparatus with good scribing efficiency can be obtained.

It is the schematic of the scribing apparatus used in each experiment example. It is a front view of the holder joint in the scribing apparatus used in each experimental example. It is a perspective view of the holder unit used in each experimental example. FIG. 4 is a partially enlarged view of the holder unit of FIG. 3. FIG. 5A is a front view of a base material of a scribing wheel used in each experimental example, FIG. 5B is a side view of the same, and FIG. 5B is a front view of a state where a diamond coating is formed on the blade edge by the CVD method. FIG. 5D is also a side view. It is a perspective view of the pin used in each experimental example. It is the graph which showed transition of the running distance and frictional force at the time of scribing using the pin and scribing wheel which are used in each experiment example.

  Hereinafter, scribing devices, holder joints, scribing wheels, pins, and the like used in each experimental example of the present invention will be described in detail with reference to the drawings. However, each experimental example shown below shows an example for embodying the technical idea of the present invention, and is not intended to specify the present invention in these experimental examples. The invention is equally applicable to other embodiments within the scope of the claims.

[Scribe device]
An outline of a scribing apparatus 10 commonly used in each experimental example is shown in FIG. The scribing apparatus 10 includes a moving table 11. The moving table 11 is screwed with a ball screw 13 and can be moved in the y-axis direction along the pair of guide rails 12a and 12b when the ball screw 13 is rotated by driving the motor 14. .

  A motor 15 is installed on the upper surface of the movable table 11. This motor 15 is for rotating the table 16 located in the upper part on an xy plane and positioning it at a predetermined angle. The brittle material substrate 17 is placed on the table 16 and held by a vacuum suction means (not shown). The brittle material substrate 17 to be scribed is a ceramic substrate made of LTCC or HTCC, a silicon substrate, a sapphire substrate or the like, and is harder than an amorphous glass substrate generally used for a liquid crystal panel substrate or the like. It is a brittle material substrate.

  The scribing apparatus 10 includes two CCD cameras 18 that image the alignment marks formed on the surface of the brittle material substrate 17 above the brittle material substrate 17. And in the scribe device 10, the bridge 19 is constructed by the support | pillars 20a and 20b along the x-axis direction so that the movable stand 11 and the table 16 of the upper part may be straddled.

  A guide 22 is attached to the bridge 19, and a scribe head 21 is movably installed along the guide 22 along the x-axis direction. A holder unit 30 is attached to the scribe head 21 via a holder joint 23.

[Holder joint]
FIG. 2 shows a front view of a holder joint commonly used in each experimental example. The holder joint 23 has a substantially cylindrical shape, and includes a rotating shaft portion 23a and a joint portion 23b. In a state where the holder joint 23 is attached to the scribe head 21, two bearings 24a and 24b for rotatably holding the holder joint 23 are provided on the rotary shaft portion 23a via a cylindrical spacer 24c. It is attached. 2 shows a front view of the holder joint 23 and also shows a sectional view of the bearings 24a and 24b and the spacer 24c attached to the rotary shaft portion 23a.

  The cylindrical joint portion 23b is provided with an internal space 26 having a circular opening 25 on the lower end side. A magnet 27 is embedded in the upper portion of the internal space 26. A holder unit 30 that is detachable by a magnet 27 is inserted into the internal space 26 and attached.

[Holder unit]
FIG. 3 is a perspective view of a holder unit commonly used in each experimental example, and FIG. 4 is a partially enlarged view of the holder unit viewed from the direction A in FIG. The holder unit 30 is a unit in which a holder 30a, a scribing wheel 40, and a pin 50 (see FIG. 4) are integrated. The holder 30a has a substantially cylindrical shape and is made of a magnetic metal. And the attaching part 31 for positioning is provided in the upper part of the holder 30a. The attachment portion 31 is formed by cutting out the upper portion of the holder 30a, and includes an inclined portion 31a and a flat portion 31b.

  The attachment portion 31 side of the holder 30 a is inserted into the internal space 26 through the opening 25 of the holder joint 23. At that time, the upper end side of the holder a30 is attracted by the magnet 27, and the inclined portion 31a of the mounting portion 31 comes into contact with the parallel pin 28 passing through the internal space 26, whereby the holder unit 30 is positioned and fixed with respect to the holder joint 23. . Further, when removing the holder unit 30 from the holder joint 23, it can be easily removed by pulling the holder 30a downward.

  A holding groove 32 formed by cutting out the holder 30a is provided in the lower portion of the holder 30a. And support parts 33a and 33b are located in the lower part of holder 30a notched in order to provide holding groove 32 on both sides of holding groove 32. A scribing wheel 40 is rotatably disposed in the holding groove 32. The support portions 33a and 33b are respectively formed with support holes 34a (see FIG. 4) and 34b for supporting the pins 50 for holding the scribing wheel 40 freely during rotation.

[Scribing wheel]
Then, as shown in FIG. 4, the pin 50 is passed through the through hole 42 of the scribing wheel 40, and the scribing wheel 40 is rotated with respect to the holder 30a by installing both ends of the pin 50 in the support holes 34a and 34b. It can be attached freely. The support hole 34a has a stepped portion inside, and the hole diameter of the opening on the holding groove 32 side is larger than the hole diameter of the opening on the other side.

  The scribing wheel 40 has a base material 41 made of a cemented carbide. In this base material 41, a through hole 42 for allowing the pin 50 to pass therethrough is formed at substantially the center of the base material 41, and a blade formed by scraping both ends of the circumferential portion of the base material 41. A portion 43 is formed. The blade portion 43 has a ridge 44 formed by inclined surfaces on both sides formed by cutting both ends of the circumferential portion of the disk-shaped base material 41. The through hole 42 is formed by drilling the center of the base material 41 in a circular shape. And the diamond coating 45 by CVD method is formed in the surface of the blade part 43 of the scribing wheel 40 as needed. A method for forming the diamond film 45 by this CVD method will be described later.

  Next, the dimension of the scribing wheel 40 will be described. The outer diameter of the scribing wheel 40 is 1.0 to 10.0 mm, preferably 1.0 to 5.0 mm. When the outer diameter of the scribing wheel 40 is smaller than 1.0 mm, the handleability of the scribing wheel 40 is lowered. On the other hand, when the outer diameter of the scribing wheel 40 is larger than 10.0 mm, the vertical crack at the time of scribing may not be formed deeply with respect to the brittle material substrate 17.

  The thickness of the scribing wheel 40 is 0.4 to 1.2 mm, preferably 0.4 to 1.1 mm. When the thickness of the scribing wheel 40 is smaller than 0.4 mm, workability and handleability may deteriorate. On the other hand, when the thickness of the scribing wheel 40 is greater than 1.2 mm, the material for the scribing wheel 40 and the cost for manufacturing increase. Note that the width of the holding groove 32 of the holder 30a (the distance between the support portion 33a and the support portion 33b) is slightly larger than the thickness of the scribing wheel 40. For example, the thickness of the scribing wheel 40 is 0. In the case of .65 mm, the width of the holding groove 32 is approximately 0.67 mm.

  Moreover, the edge angle of the blade part 43 is usually an obtuse angle, and is in the range of 90 to 160 °, preferably 90 to 140 °. Note that the specific angle of the blade edge angle is appropriately set based on the material, thickness, and the like of the brittle material substrate 17 to be cut. In each experimental example, the scribing wheel 40 having an outer diameter of 2.0 mm, a width of 0.65 mm, a through hole diameter of 0.8 mm, and a blade edge angle of 100 ° is used.

  Here, the manufacturing method of the scribing wheel used in common with each experiment example is demonstrated using FIG. 5A is a front view of the base material of the scribing wheel, FIG. 5B is a side view of the same, FIG. 5B is a front view of a state in which a diamond film is formed on the blade edge by the CVD method, and FIG. It is a side view.

  The base material 41 of the scribing wheel 40 used in each experimental example is manufactured using a disc made of cemented carbide. Cemented carbide is mainly made of hard particles such as tungsten carbide, and a binder phase consisting of the remaining additive and binder. The tungsten carbide particles having an average particle size of 0.2 to 2.0 μm or less are used. And the content of tungsten carbide in the cemented carbide is the remainder of the binder and additives.

  As the additive, for example, titanium carbide (TiC), tantalum carbide (TaC), or the like is added depending on the application. As the binder, an iron group element is usually preferably used. Examples of the iron group element include cobalt, nickel, iron and the like, but cobalt is mainly used. Further, the content of the binder in the cemented carbide is preferably in the range of 3 to 15% by mass.

  First, a cemented carbide is manufactured by mixing the above-mentioned hard particles, additives, and binder, and sintering these mixtures at a high temperature. A disc-shaped cemented carbide disk having a desired diameter is cut out from the cemented carbide thus produced. At this time, a through hole 42 is also formed at the center of the disk. Next, the peripheral edge of the disk is ground so that the thickness of the blade along the rotation axis gradually decreases from the through hole 42 side toward the blade edge. Thereby, the base material 41 made of a cemented carbide in which a blade portion 43a having a V-shape in front view is formed on the peripheral edge of the disc is manufactured (see FIGS. 5A and 5B).

  Next, a diamond film is formed by a CVD method on the blade portion 43a of the substrate 41 made of cemented carbide. If a binding material such as cobalt is contained on the surface of the blade portion 43a, the diamond film is formed by the CVD method. Since the growth is hindered and the roughening treatment step for enhancing the adhesion of the diamond film to the blade portion 43a by the CVD method, at least the blade portion 43a of the base material 41 is subjected to a debinding material treatment.

  This debinding material treatment is performed, for example, by applying the cemented carbide base material 41 produced as described above to an acidic solution such as a mixed solution of hydrofluoric acid and nitric acid at 25 ° C. to 160 ° C. It is carried out by immersing for 15 to 15 hours, and then washing and drying. At this time, it is not particularly necessary to prevent the acidic solution from coming into contact with the inner surface side of the through hole 42 of the base material 41, and may be performed on the entire surface of the base material 41. As the immersion time becomes longer, the concentration change of the binder proceeds toward the inner side. However, the progress of the concentration change only has to occur from about 5 to 10 μm from the surface side, for example.

  Further, in the above debonding material step, the bonding material is largely dissolved and removed on the surface side of the base 41 made of cemented carbide, and a part of the additive is also dissolved and removed. Note that the removal of the binder does not mean that the binder is completely removed, that is, the binder is completely removed. This is because cemented carbide has a pumice-like network formed by hard particles, and the binder is usually present in the gap. This pumice-like network has a portion in which the binder is completely surrounded by hard particles, and it is difficult to remove the binder surrounded by the hard particles. Moreover, since it is considered that the strength of the cemented carbide decreases as the concentration of the binding material decreases, it is desirable to adjust the removal of the binding material in consideration of the strength of the cemented carbide.

  By observing the surface of the base 41 made of cemented carbide after removing the binder with a scanning electron microscope, it can be confirmed whether or not the binder has been removed. On the surface of the base material 41 before the binder removal, hard particles are bonded to form a pumice-like network, and the gap fills the gap. On the other hand, in the above-described debinding material process, since the bonding material present in the gaps between the hard particles is removed, in the pumice-like network on the surface of the base material 41 after the bonding material removal, between the hard particles It is confirmed that voids are conspicuous.

  Moreover, although the debinding material process is performed on the entire base material 41, it may be performed on at least the blade portion 43 a of the base material 41. In this case, the debinding material process may be performed after masking portions other than the blade portion 43a for performing the bonding material removal using an appropriate material.

  As described above, when the debinding material process is performed on the entire base material 41, a masking process or the like is unnecessary, and thus the debinding material process can be efficiently performed. By performing the debinding material process on the entire base material 41, at least the bonding material on the surface of the blade portion 43a is removed.

[a2]
In addition, as said scribing wheel 40, although the case where the thing made from a cemented carbide was used as the base material 41 was demonstrated, the case where the thing made from PCD is used as the base material 41 is the same.

  Thus, the diamond film 45 is formed by the CVD method on at least the surface of the blade portion 43a of the base material 41 that has undergone the debinding material process. In addition, since the formation method of the diamond film by CVD method is known, the detailed description is abbreviate | omitted. Moreover, the thickness of the diamond film by CVD method should just be about 10-30 micrometers. If the diamond coating is too thin, it will be difficult to further polish the cutting edge after the diamond coating is formed, and if the diamond coating is too thick, the internal stress will increase and the coating will easily peel off. Become. Thus, the scribing wheel 40 used in common in each experimental example in which the diamond coating 45 is formed on the surface of the blade portion 43a of the base material 41 by the CVD method is obtained.

[Experimental Examples 1-4]

  Next, a specific configuration of the pin 50 common to each experimental example will be described. The pin 50 is a cylindrical member, and one end has a pointed shape as shown in FIGS. 4 and 6. And the scribing wheel 40 is hold | maintained by inserting the pin 50 into the support hole 34b from the peak-shaped side, penetrating the through-hole 42, and a peak-shaped part contacting the step part of the support hole 34a.

  As the pin 50, a cemented carbide, a metal such as carbon steel or stainless steel, or a PCD one having a DLC film 52 formed on the surface of a columnar substrate 51 having a pointed end is used. However, in each experimental example, the columnar substrate 51 is made of cemented carbide. This cemented carbide columnar substrate 51 was subjected to the debinding material process in the same manner as described above, and then various DLC films 52 were formed by the CVD method. Under the present circumstances, the pin in Experimental Examples 1-4 was produced by changing CVD conditions variously. Various physical properties of the DLC film 52 in Experimental Examples 1 to 4 are as shown in Table 2. In addition, hardness shows Vickers hardness.

[Scribe test]
The holder unit having the configuration shown in FIG. 3 is assembled using the pins of each of Experimental Examples 1 to 4 and the scribing wheel manufactured as described above, and the holder joint having the configuration shown in FIG. A scribe test was performed using the HTCC substrate. The scribing device used is a scribing device (model name: MS500) manufactured by Samsung Diamond Industrial Co., Ltd.

The scribing conditions are as follows.
HTCC substrate: Alumina substrate (Kyocera Corporation (material code: A476T))
HTCC substrate thickness: 0.635mm
Cutting depth: 0.15 mm
Scribe load: 0.08 MPa
Scribe speed: 100 mm / sec
Cutting method: Inner-inner cutting (90 mm)
(Cutting by scribing from the inside of one side of the board to the inside of the other side)

  Under the scribe conditions described above, a scribe line having a distance of 100 m was formed using each pin of Experimental Examples 1 to 4 and the scribing wheel produced as described above. As a result, it was confirmed that the scribe line can be formed normally even when any of the pins of Experimental Examples 1 to 4 is used. This is probably because the friction coefficient of the DLC film was smaller than that of the cemented carbide, so that no difference occurred in the scribe test results. Therefore, the frictional resistance of the scribing wheel was examined as shown below. [a3]

[Measurement of frictional resistance]
Using each pin, scribing wheel, and holder unit of Experimental Examples 1 to 4 as described above, the friction resistance was measured under the following conditions.
Friction resistance measuring device: Friction wear tester (Resca Co., Ltd. (RHESCA-FPR2100))
Applied load: 500g
Speed: about 10mm / sec
Measuring method: Linear one-way motion

  That is, the frictional resistance was measured using a friction and wear tester until the scribing distance reached 1000 m before scribing and every 100 m scribing distance under the above scribing conditions. The results are summarized in FIG. In the measurement of the frictional resistance, in the case of Experimental Examples 1 and 2, the frictional resistance value increased, so the measurement was stopped halfway.

  Moreover, after stopping measurement in Experimental Examples 1 and 2, and after finishing scribing of 1000 m in Experimental Examples 3 and 4, the holder unit was disassembled and the surface state of each pin was enlarged and visually observed. The tendency of change in the frictional resistance value and the results of visual observation are summarized in Table 3 below.

  From the results shown in FIG. 7 and Table 3, the following can be understood. That is, when the pin of Experimental Example 1 was used, the frictional resistance increased from the beginning of scribing, and the frictional resistance exceeded 600 mN when scribing 300 m, so the measurement was stopped here. In addition, when the pin of Experimental Example 2 was used, the frictional resistance increased after 200 m of scribe, and after 500 m of scribe, the friction force exceeded 600 mN, so the measurement was stopped here. It was confirmed that the DLC film was all worn on the surfaces of the pins of Experimental Examples 1 and 2 where measurement was stopped in the middle of these.

  On the other hand, when the pins of Experimental Examples 3 and 4 were used, neither increase in frictional resistance was observed even when scribing at 1000 m, and the frictional resistance maintained substantially the initial value. As a result of observing the surface state of the pin of Experimental Example 3 in which the 1000 m scribing was performed, it was confirmed that the DLC film on the surface was worn, but the DLC film remained substantially over the entire surface of the pin. confirmed. Similarly, the observation result of the surface state of the pin of Experimental Example 4 confirmed that the DLC film on the surface of the pin was worn, but remained substantially over the entire surface of the pin.

  The DLC films formed on the surfaces of the pins of Experimental Examples 1 to 3 have the same coefficient of friction and film thickness, but differ in hardness. Therefore, if the hardness of the DLC film is at least 5000 Hv or more, a long-life wheel unit can be obtained without grinding and removing the region treated with the debonding material on the inner wall surface of the through hole of the scribing wheel. It shows that. In addition, in order to make the hardness of a DLC film become 5000 Hv or more, when the description of the said Table 1 and Table 2 is considered, it turns out that what is classified into ta-C is required for DLC. Further, the hardness of the DLC film is preferably as hard as possible, but the upper limit is the hardness of diamond itself from the measuring method of Vickers hardness.

[Additional scribe test]
In addition, about the pin of Experimental example 3 and 4, except having changed the scribe load in said scribe test from 0.08MPa to 0.12MPa, each pin after performing 100 m of scribe on the same scribe conditions as the above. The surface condition was observed. As a result, in the case of the pin of Experimental Example 3, it was confirmed that the pin was worn, but it was confirmed that the DLC film remained on substantially the entire surface of the pin. However, in the case of the pin of Experimental Example 4, the wear was large, and only a part of the DLC film remained.

  From the results when the pins of Experimental Examples 3 and 4 are used, the thickness of the DLC film formed on the surface of the pin is an important factor if the hardness is 5000 Hv or more, and the thickness should be at least 0.7 μm. It can be seen that it is preferably 0.8 μm or more. The upper limit of the thickness of the DLC film is preferably 1.5 μm or less because if it is too thick, it takes time to form the DLC film and the thickness distribution varies.

  Moreover, in the said Experimental Examples 1-4, after removing the binder on the surface of the blade part 43a of the base material 41 as the scribing wheel 40, the diamond film 45 by the CVD method was coated on the surface of the blade part 43a. Although shown (refer FIG. 5), even if it does not form the diamond film by CVD method, a favorable scribe characteristic is shown depending on a use. For example, when the base material 41 is used as it is as a scribing wheel after removing the binding material on the surface of the blade portion 43a of the base material 41, the brittle material substrate in a high temperature state (for example, the temperature of the glass substrate is 200 ° C. to 400 ° C.). If the scribing is performed, wear of the blade portion 43a can be suppressed. Normally, when scribing is performed under high temperature conditions, hard particles and a binding material made of an iron-based metal containing cobalt as a main component are dissolved in the blade portion 43a, and the blade portion 43a is deteriorated. However, by removing the binding material on the surface of the blade portion 43a, wear of the blade portion 43a can be suppressed during scribing under high temperature conditions.

  In the debinding material step, a method of immersing in a mixed solution of hydrofluoric acid and nitric acid is adopted. However, this is merely an example, and the bonding material may be removed by other methods. Absent.

  In addition, since the scribing wheel 40 and the pin 50 are consumables, periodic replacement is necessary. In the scribing apparatus used in each experimental example, the holder unit 30 is attached to the scribing head 21 via the holder joint 23. Therefore, since the holder unit 30 can be easily attached and detached, the scribing wheel 40 and the holder 30a can be integrated into the holder unit 30 without removing the scribing wheel 40 from the holder 30a when exchanging consumables. It is possible to handle and replace the holder 30a itself. Therefore, the exchanging operation of the scribing wheel 40 can be performed very easily. The present invention can also be applied to a scribing device in which the holder is directly fixed to the scribing head without using the holder joint 23 and the pin and the scribing wheel are exchanged with respect to the holder. is there.

  In addition, the scribing wheel used in each experimental example has a blade portion formed on the circumferential portion of the disk-shaped substrate, and this blade portion is formed by cutting both ends of the circumferential portion of the substrate, It has slopes on both sides of this ridgeline. [a4] Further, the scribing wheel may be formed with blade portions in which the angles of the inclined surfaces on both sides of the ridge line are different from each other.

DESCRIPTION OF SYMBOLS 10 ... Scribing device 11 ... Moving stand 12a ... Guide rail 13 ... Ball screw 14, 15 ... Motor 16 ... Table 17 ... Brittle material substrate 18 ... Camera 19 ... Bridge 20a ... Post 21 ... Scribe head 22 ... Guide 23 ... Holder joint 23a ... Rotating shaft portion 23b ... Joint portion 24a ... Bearing 24c ... Spacer 25 ... Opening 26 ... Internal space 27 ... Magnet 28 ... Parallel pin 30 ... Holder unit 30a ... Holder 31 ... Mounting portion 31a ... Inclined portion 31b ... Flat portion 32 ... Holding groove 33a ... support part 33b ... support part 34a, 34b ... support hole 40 ... scribing wheel 41 ... base material 42 ... through hole 43 ... blade part 43a ... (base material) blade part 44 ... ridge line 45 ... PCD coating 50 ... pin 51 ... Cylindrical substrate 52 ... DLC coating

Claims (8)

A pin for a scribing wheel having a diamond-like carbon coating formed on its surface,
The diamond-like carbon coating is
The thickness is 0.8-1.5 μm,
The diamond-like carbon classification is ta-C,
The hardness is 5000 Hv or more,
Scribing wheel pin   The pin for a scribing wheel according to claim 1, wherein a base material of the pin is a cemented carbide. A scribing wheel in which a through hole is formed;
A pin inserted through the through hole of the scribing wheel and rotatably holding the scribing wheel;
A holder having a pair of support portions forming a holding groove in which the scribing wheel is disposed, and a pin hole in which the pin is disposed in the pair of support portions;
With
A holder unit in which the scribing wheel is rotatably held by a pin disposed in the pin hole;
The pin is
A diamond-like carbon film is formed on the surface,
The diamond-like carbon coating is
The thickness is 0.8-1.5 μm,
The diamond-like carbon classification is ta-C,
The hardness is 5000 Hv or more,
Holder unit.   The holder unit according to claim 3, wherein a base material of the pin is a cemented carbide.   5. The scribing wheel is made of cemented carbide and is treated with a debinding material, and a region treated with a debinding material on the inner wall surface of the through hole is removed. Holder unit.   The scribing wheel is made of a cemented carbide and is treated with a debinding material, and a region treated with the debinding material remains on the inner wall surface of the through hole. The holder unit described.   The holder unit according to claim 5 or 6, wherein the scribing holder has a diamond film formed by chemical vapor deposition on a surface of a blade edge portion.   A scribing device comprising the holder unit according to claim 3.

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