JP2015051514A - Scribe device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To improve flatness of a table in a scribe device for scribing a brittle material substrate held on the table.SOLUTION: A table 13 is fixed on a motor 11 via a flange 12. The flange 12 is a disk-like member for constituting a plane out of an upper surface, and annular projections 26 and 28 are provided in its outer peripheral part. When an upper surface of the table 13 is not flat, a part of the annular projection 26 or 28 is polished. The table 13 is fixed to the upper surface of the flange 12 by screw-fastening. Thus, the table 13 can be flattened by correcting the flatness of the upper surface of the table 13, and scribe accuracy can be improved.

Description

  The present invention relates to a scribing apparatus for forming a scribing line on a brittle material substrate, and more particularly to a structure of a scribing apparatus that improves the flatness of a table.

  Conventionally, in a flat panel display such as a liquid crystal display panel or a liquid crystal projector substrate, a brittle material substrate is bonded together in a manufacturing process, and then divided into a single panel having a predetermined size. The brittle material substrate is divided into a scribe process and a break process, and a scribe device is used in the scribe process.

  FIG. 1 is a schematic perspective view showing an example of a scribing device disclosed in Patent Documents 1 and 2, and FIG. 2 is a side view thereof. In the scribing apparatus 100, a moving base 101 is held so as to be movable in the y-axis direction along a pair of guide rails 102a and 102b. The ball screw 103 is screwed with the moving table 101. The ball screw 103 is rotated by driving the motor 104, and moves the moving base 101 in the y-axis direction along the guide rails 102a and 102b. A motor 105 is provided on the upper surface of the movable table 101. The motor 105 rotates the table 106 on the xy plane and positions it at a predetermined angle. The brittle material substrate 107 is placed on the table 106 and held by a vacuum suction means (not shown). Two CCD cameras 108 that image the alignment marks of the brittle material substrate 107 are provided on the scriber.

  In the scribe device 100, a bridge 110 is installed by struts 111 a and 111 b along the x-axis direction so as to straddle the moving table 101 and the upper table 106. The bridge 110 is provided with a beam 112 in the lateral direction, and the beam 112 is provided with a drive unit 113. The drive unit 113 moves the slide base 114 along the x-axis direction, and includes a motor 115 and a feed screw 116 connected to the motor 115 and rotatably held at the center of the side surface of the beam 112. As shown in FIG. 2, a scribe head 117 is attached to the slide base 114. A chip holder 118 is attached to the lower end of the scribe head 117. The chip holder 118 holds a disc-shaped scribing wheel 119 at the lower portion in a rotatable manner. Inside the scribing head 117, an elevating part that allows the chip holder 118 to move up and down, for example, an air cylinder that is pneumatically controlled, a linear motor that is electrically controlled, and the like are provided. The scribing wheel 119 rolls while being pressed against the brittle material substrate with an appropriate load to form a scribe line.

  As shown in FIG. 2, a table 106 is provided on the motor 105, and the table 106 is rotated by the motor 105. A brittle material substrate 107 is held on the table 106, and the scribe direction is changed by the rotation of the table.

International Publication WO2009 / 157440 JP 2001-328833 A

  However, in such a conventional scribing apparatus, if the flatness of the table is low, the flatness of a brittle material substrate, for example, a glass plate mounted thereon is also affected. In particular, when the glass plate is thin, the flexibility is high, so that it is greatly affected by the flatness of the table. There is a problem that the flatness of the outer peripheral portion of the table may be low, and if the flatness of the table is low, good scribing may not be possible.

  The present invention has been made in view of the problems of such a conventional scribing device, and it is a technical problem to improve the flatness of a brittle material substrate even when the flatness of the table is low. To do.

  In order to solve this problem, a scribing apparatus according to the present invention includes a table on which a brittle material substrate is installed, a flange provided below the table, and a beam laid in parallel to the surface of the table. A scribing device comprising a slide base provided slidably and a scribing head held by the slide base and holding a scribing wheel at one end, wherein the flange is a disc whose upper surface forms a plane. And has at least two protrusions on the outer periphery thereof.

  Here, the scribing device may include a motor that rotates the brittle material substrate, and the flange may be attached between the motor and a table.

  The at least two protrusions of the flange may each be an annular protrusion that continues in the circumferential direction of the flange.

  According to the present invention having such a feature, the table is arranged on the flange, and at least two protrusions are provided on the flange. Then, if necessary, the flatness of the upper surface of the table can be improved by polishing a partial region of the convex portion, and the brittle material substrate on the table can be accurately scribed.

FIG. 1 is a schematic perspective view of a conventional scribing apparatus. FIG. 2 is a side view of a conventional scribing apparatus. FIG. 3 is a side view of the scribing apparatus according to the embodiment of the present invention. FIG. 4 is a perspective view of a flange used in this embodiment. FIG. 5 is a partial cross-sectional view of the flange. FIG. 6 shows the curvature and correction of the table on the flange.

  Next, a scribing apparatus according to an embodiment of the present invention will be described. FIG. 3 is a side view of the scribing apparatus. In the scribing apparatus of the present embodiment, the same parts as those of the conventional example described above are denoted by the same reference numerals, and detailed description thereof is omitted. In the scribing apparatus 10 according to the present embodiment, similarly to the conventional scribing apparatus 100 shown in FIG. 1, a moving base 101 is held along a pair of guide rails 102a and 102b so as to be movable in the y-axis direction. The ball screw 103 is screwed with the moving table 101. The ball screw 103 is rotated by driving the motor 104, and moves the moving base 101 in the y-axis direction along the guide rails 102a and 102b.

  Next, in this embodiment, a motor 11 is provided on the upper surface of the moving table 101, and a flange 12 is provided on the motor 11. A rectangular table 13 is fixed to the top of the flange 12. The flange 12 is mounted between the motor 11 and the table 13 and fixed by screwing. The flange 12 is a circular member, and rotates along the central axis by the rotation of the motor 11. The table 13 is composed of two stages, a sub-table 13a and a main table 13b.

  The motor 11 rotates the table 13 on the xy plane and positions it at a predetermined angle. The brittle material substrate 14 is placed on the table 13 and held by a vacuum suction means (not shown).

  4 is a perspective view of the flange 12, and FIG. 5 is a partial sectional view thereof. As shown in these drawings, the flange 12 is a disk-shaped member, and a through hole 21 is provided at the center, and has a concentric circular portion 22 having a certain width from the center toward the outside thereof. In the concentric circular portion 22, screw grooves 23 for connecting to the motor 11 and screw grooves 24 for connecting to the table 13 are alternately provided with a predetermined angle interval. A wide annular groove 25 is formed outside the concentric circular portion 22. An annular protrusion 26 is formed on the outer periphery of the groove 25. An annular groove 27 is formed outside the annular protrusion 26, and an annular protrusion 28 is further formed outside thereof. The annular groove 27 is formed with a thread groove 29 for connecting the table 13 at a constant angular interval. The upper surface of the central concentric circle portion 22 and the upper surfaces of the inner annular protrusion 26 and the outer annular protrusion 28 form the same surface. The annular grooves 25 and 27 are for forming two annular protrusions 26 and 28.

  By providing the flange 12 between the motor 11 and the table 13 in this way, when the flatness of the table 13 is poor, a part of the annular protrusion 26 or 28 of the flange 12 is slightly polished to slightly polish the table 13. The upper surface can be flattened. For example, as shown in FIG. 6A, it is assumed that the right side of the table 13 disposed at the top of the flange 12 is slightly lowered, and the flatness of the table 13 is low. In this case, as shown in FIG. 6B, a partial region 26a of the annular protrusion 26 on the inner periphery is polished. Then, by fixing the flange 12 and the table 13 with screws, a part of the upper surface of the table 13 can be slightly bent, and as a result, the upper surface can be corrected to be flat.

  Conversely, if the end of the table 13 is slightly raised, a part of the outer annular projection 28 that supports the raised portion is polished, and then the table 13 is screwed to the flange 12. As a result, a part of the upper surface of the table 13 can be curved, and as a result, the upper surface can be corrected to be flat.

  In this embodiment, the protrusion is an annular protrusion, but it may be a protrusion having a shape in which a large number of protrusions are intermittent at regular intervals. In this case as well, the upper surface of the table can be flattened by polishing the protruding portion.

  In this embodiment, the flange is circular, and two annular protrusions are formed as convex portions around the outer periphery thereof. However, at least two protrusions may be used, and the protrusions may be three or more.

  In this embodiment, in order to rotate the brittle material substrate, a table is arranged above the motor via a flange. However, if it is not necessary to rotate the table, the table is held on a fixed flange. May be.

  The present invention is suitable for a scribing apparatus that precisely scribes a brittle material substrate because the flatness of the table can be adjusted via a flange when the flatness of the table is low in the scribing apparatus.

DESCRIPTION OF SYMBOLS 10 Scribe device 11 Motor 12 Flange 13 Table 14 Brittle material board 21 Through-hole 22 Concentric circle part 23, 24, 29 Screw groove 25, 27 Annular groove part 26, 28 Annular protrusion

Claims (3)

A table on which a brittle material substrate is installed;
A flange provided below the table;
A slide base slidably provided along a beam laid in parallel to the surface of the table;
A scribing device that is held by the slide base and has a scribing head that holds a scribing wheel at one end,
The flange is a disk-shaped member whose upper surface forms a flat surface, and a scribing device having at least two protrusions on the outer periphery thereof. The scribing device includes a motor that rotates the brittle material substrate,
The scribing apparatus according to claim 1, wherein the flange is attached between the motor and the table.   The scribing device according to claim 1 or 2, wherein at least two protrusions of the flange are annular protrusions continuous in a circumferential direction of the flange.