JP2015046034A - Touch panel sensor, touch panel sensor manufacturing method, and display device with touch position detection function - Google Patents

Abstract

A touch panel sensor having high sensitivity and excellent visibility is provided. A first detection pattern and a second detection pattern of a touch panel sensor are each composed of a first conductor and a second conductor arranged in a mesh pattern. In addition, the second detection pattern is formed with an intersection formed by the plurality of second conductors intersecting each other. The touch panel sensor further includes an overlap pattern including an overlap portion arranged so as to at least partially overlap with an intersection of the second conductors of the second detection pattern when viewed from the normal direction of the base material. . Moreover, the low reflection process is performed to the surface of the 1st conducting wire, and the surface of an overlap part. [Selection] Figure 4

Description

  The present invention relates to a touch panel sensor and a method for manufacturing a touch panel sensor. The present invention also relates to a display device with a touch position detection function obtained by combining a touch panel sensor and a display device.

  Today, touch panel devices are widely used as input means. The touch panel device includes a touch panel sensor, a control circuit that detects a contact position on the touch panel sensor, wiring, and an FPC (flexible printed circuit board). In many cases, the touch panel device is used together with the display device as an input means for various devices including a display device such as a liquid crystal display or an organic EL display (for example, a ticket vending machine, an ATM device, a mobile phone, a game machine). It has been. In such a device, the touch panel sensor is disposed on the display surface of the display device, thereby enabling extremely direct input to the display device. The area | region which faces the display area of a display apparatus among touch panel sensors is transparent, and this area | region of a touch panel sensor comprises the active area which can detect a contact position (approach position).

  As a touch panel sensor, a projection capacitive coupling type touch panel sensor is known. In the capacitive coupling type touch panel sensor, when an external conductor (typically, a finger) whose position is to be detected contacts (approaches) the touch panel sensor via a dielectric, a strange capacitance is newly generated. The position of the external conductor on the touch panel sensor is detected on the basis of the change in capacitance caused by this strange capacitance. Such a projected capacitively coupled touch panel sensor includes, for example, a base material made of PET or the like, a plurality of first detection patterns provided on the viewer-side surface of the base material, and a surface of the base material on the display device side. And a plurality of second detection patterns provided in. The first detection pattern and the second detection pattern are made of a transparent conductive material having translucency and conductivity, for example.

  Further, in order to reduce the electric resistance value of the first detection pattern and the second detection pattern, a metal such as silver or copper having higher conductivity than the transparent conductive material is used as a material constituting the first detection pattern and the second detection pattern. It has been proposed to use a material (see, for example, Patent Document 1). When the first detection pattern and the second detection pattern are made of a metal material, the first detection pattern and the second detection pattern are formed with openings for transmitting the image light from the display device at an appropriate ratio. ing. For example, the first detection pattern and the second detection pattern are made of a metal material and are constituted by conductive wires arranged in a mesh shape.

JP 2012-185607 A

  When the first detection pattern and the second detection pattern are configured by conductive wires made of a metal material, the first detection pattern and the second detection pattern are visually recognized by an observer (user) due to the metallic luster of the metal material. It is possible to end up. In particular, when copper is used as the material of the conductive wire, as the reflected light from the first detection pattern and the second detection pattern, reddish light peculiar to copper reaches the observer, The visibility of the video will be reduced.

  In order to prevent such a decrease in visibility due to the metallic luster, Patent Document 1 proposes to apply a blackening treatment to the surface of the conductor to suppress reflection due to the metallic luster. However, it is difficult to perform low reflection treatment on the surface of the conductive wire that is in contact with the base material. That is, it is not easy to reduce the metallic luster on the surface of the second detection pattern that is in contact with the base material.

  Further, the touch panel sensor is disposed on the display surface of the display device as described above, and accordingly, the touch panel sensor is required to have a high light transmittance. In order to realize high light transmittance in the touch panel sensor, it is preferable that the surface of the base material made of PET or the like has high flatness. However, the fact that the surface of the substrate is flat means that the surface in contact with the substrate among the surfaces of the conductors constituting the second detection pattern provided on the substrate also has high flatness. . In this case, even if the surface of the conducting wire is subjected to a low reflection treatment such as a blackening treatment, the conducting wire is likely to be visually recognized due to its high flatness.

  An object of this invention is to provide the touchscreen sensor which can solve such a subject effectively, the manufacturing method of a touchscreen sensor, and the display apparatus with a touch position detection function.

  The present invention is a touch panel sensor, and includes a base material including a first surface facing the viewer side and a second surface facing the display device side, and a plurality of first surfaces provided on the first surface of the base material. A detection pattern and a plurality of second detection patterns provided on the second surface of the substrate, each first detection pattern having a mesh shape of a plurality of first conductive wires having light shielding properties and conductivity. Each second detection pattern is configured by arranging a plurality of second conductive wires having light shielding properties and conductivity in a mesh shape, and the second detection pattern includes: An intersection formed by a plurality of the second conductors intersecting each other is formed, and the touch panel sensor is disposed on the first surface of the substrate so as not to be connected to the first conductors of the first detection pattern. Over provided The overlap pattern is composed of a plurality of overlap portions having light shielding properties and conductivity, and the overlap portion is the second when viewed from the normal direction of the base material. The touch panel sensor is disposed so as to at least partially overlap the intersecting portion of the detection pattern, and the surface of the first conductive wire and the surface of the overlap portion are subjected to low reflection processing.

  In the touch panel sensor according to the present invention, preferably, the luminous reflectance in the XYZ color system of the surface of the first conductor and the surface of the overlap portion is in the range of 5 to 25%.

In the touch panel sensor according to the present invention, each of the first conductive wire and the overlap portion may have a first metal layer containing copper. In this case, the reflection hue b ^* in the L ^* a ^* b ^* chromaticity system of the surface of the first conductor and the surface of the overlap portion is preferably in the range of −0.5 to 2.

  In the touch panel sensor according to the present invention, the surface of the first conductive wire and the surface of the overlap portion may be subjected to mat processing.

  In the touch panel sensor according to the present invention, the overlap portion may be disposed inside a region where the intersecting portion of the second detection pattern extends when viewed from the normal direction of the base material. .

  This invention is a manufacturing method of the said touchscreen sensor, Comprising: The said base material, the 1st metal layer which is provided on the said 1st surface of the said base material, and has light-shielding property and electroconductivity, and the said base material Providing a laminate comprising a second metal layer provided on the second surface and having a light shielding property and conductivity; providing a first photosensitive layer on the first metal layer; and A step of providing a second photosensitive layer on the second metal layer; irradiating the first photosensitive layer with exposure light in a predetermined pattern via the first exposure mask; and the second exposure mask via the second exposure mask. An exposure step of irradiating the photosensitive layer with exposure light in a predetermined pattern; a development step of developing the first photosensitive layer and the second photosensitive layer; and etching the first metal layer using the first photosensitive layer as a mask. The first conducting wire of the first detection pattern and the -Patterning the first metal layer with a pattern corresponding to the overlap portion of the burst pattern, and etching the second metal layer using the second photosensitive layer as a mask, whereby the second conductor of the second detection pattern An etching step of patterning the second metal layer with a pattern corresponding to the above, and a low reflection treatment step of applying a low reflection treatment to the surface of the first metal layer, wherein the exposure step is performed on the first exposure mask with respect to the first exposure mask. It is a manufacturing method of a touch panel sensor including the process of adjusting the relative position of the 2nd exposure mask.

  In the touch panel sensor manufacturing method according to the present invention, the low reflection treatment step may include a mat treatment step of performing a mat treatment on the surface of the first metal layer using a mat treatment liquid containing an organic acid.

  The present invention includes a display device and a touch panel sensor disposed on a display surface of the display device, and the touch panel sensor includes a first surface facing the observer side and a second surface facing the display device side. A substrate, a plurality of first detection patterns provided on the first surface of the substrate, and a plurality of second detection patterns provided on the second surface of the substrate. The first detection pattern is configured by arranging a plurality of first conductive wires having light shielding properties and conductivity in a mesh shape, and each second detection pattern has a plurality of second conductive wires having light shielding properties and conductivity. Are arranged in a mesh pattern, and the second detection pattern is formed with an intersection formed by a plurality of the second conductors intersecting each other, and the touch panel sensor includes the first touch panel sensor. Detection pattern It further comprises an overlap pattern provided on the first surface of the base material so as not to be connected to the first conducting wire, and the overlap pattern is composed of a plurality of overlap portions having light shielding properties and conductivity. The overlap portion is disposed so as to at least partially overlap the intersecting portion of the second detection pattern when viewed from the normal direction of the substrate, and the surface of the first conductor and the The surface of the wrap portion is a display device with a touch position detection function that is subjected to low reflection processing.

  According to the present invention, the touch panel sensor is not connected to the first conductor of the first detection pattern in addition to the first detection pattern and the second detection pattern provided on the first surface and the second surface of the base material, respectively. An overlap pattern provided on the first surface of the substrate is further provided. This overlap pattern is composed of a plurality of overlap portions having light shielding properties and conductivity. The overlap portion is disposed so as to at least partially overlap with the intersecting portion where the second conducting wires of the second detection pattern intersect with each other when viewed from the normal direction of the substrate. For this reason, the intersection where the second conductors intersect each other, which is the portion most easily visually recognized by the observer in the second detection pattern, can be at least partially masked from the observer by the overlap portion. Thereby, it is possible to suppress the second detection pattern from being recognized by the observer. Moreover, the low reflection process is performed to the surface of the 1st conducting wire, and the surface of an overlap part. For this reason, it can suppress that an observer recognizes a 1st detection pattern and an overlap pattern. Therefore, according to the present invention, by reducing the electric resistance value of each detection pattern, it is possible to ensure high detection accuracy of the touch position and sufficiently ensure the visibility of the image.

FIG. 1 is a development view showing a display device with a touch position detection function in an embodiment of the present invention. FIG. 2 is a plan view showing a touch panel sensor in the display device with a touch position detection function of FIG. 1. FIG. 3A is an enlarged plan view showing a first detection pattern in a portion surrounded by an alternate long and short dash line denoted by reference numeral III in FIG. 2. FIG. 3B is an enlarged plan view showing a second detection pattern in a portion surrounded by an alternate long and short dash line denoted by reference numeral III in FIG. 2. 3C is a plan view showing the first detection pattern shown in FIG. 3A and the second detection pattern shown in FIG. 3B in an overlapping manner. FIG. 4 is a plan view showing an overlap pattern arranged so as to overlap with an intersection of the second conductors of the second detection pattern. FIG. 5 is an enlarged plan view showing FIG. 4. 6 is a cross-sectional view showing a case where the touch panel sensor is cut along the line VI in FIG. 4. FIG. 7 is an enlarged cross-sectional view of FIG. 8A to 8E are views for explaining a method for manufacturing a touch panel sensor. FIG. 9 is a plan view showing a first modification of the touch panel sensor. FIG. 10 is an enlarged plan view showing a first detection pattern in a portion surrounded by an alternate long and short dash line with a symbol X in FIG. 9. FIG. 11 is a plan view showing an overlap pattern arranged so as to overlap an intersection of the second conductors of the second detection pattern in the touch panel sensor according to the modification shown in FIG. 9. FIG. 12 is a plan view showing a second modification of the touch panel sensor. FIGS. 13A and 13B are views showing an example of a method for manufacturing a laminated body used for manufacturing the touch panel sensor according to the modification shown in FIG.

  Hereinafter, an example of an embodiment of the present invention will be described with reference to FIGS. 1 to 8A to 8E. In the drawings attached to the present specification, for the sake of illustration and ease of understanding, the scale, the vertical / horizontal dimension ratio, and the like are appropriately changed and exaggerated from those of the actual ones.

Touch Panel Device and Display Device with Touch Position Detection Function First, a display device 10 with a touch position detection function including a touch panel sensor 30 will be described with reference to FIG. As shown in FIG. 1, the display device with a touch position detection function 10 is configured by combining a touch panel sensor 30 and a display device 15 such as a liquid crystal display or an organic EL display. The illustrated display device 15 is configured as a flat panel display. The display device 15 includes a display panel 16 having a display surface 16 a and a display control unit (not shown) connected to the display panel 16. The display panel 16 includes an active area A1 that can display an image, and an inactive area (also referred to as a frame area) A2 that is disposed outside the active area A1 so as to surround the active area A1. . The display control unit processes information regarding the video to be displayed, and drives the display panel 16 based on the video information. The display panel 16 displays a predetermined image on the display surface 16a based on a control signal from the display control unit. That is, the display device 15 plays a role as an output device that outputs information such as characters and drawings as video.

  As shown in FIG. 1, the touch panel sensor 30 is bonded to the display surface 16 a of the display device 15 via, for example, an adhesive layer (not shown).

Touch Panel Sensor Next, the touch panel sensor 30 will be described with reference to FIG. FIG. 2 is a plan view showing the touch panel sensor 30 when viewed from the observer side.

  Here, an example in which the touch panel sensor 30 is configured as a projection capacitive touch panel sensor will be described. The “capacitive coupling” method is also referred to as “capacitance” method or “capacitance coupling” method in the technical field of touch panels. It is treated as a term synonymous with the “capacitive coupling” method. A typical capacitive coupling type touch panel sensor has a light-transmitting conductive pattern, and an external conductor (typically a human finger) approaches the touch panel sensor to externally. A capacitor (capacitance) is formed between this conductor and the conductive pattern of the touch panel sensor. Based on the change in the electrical state accompanying the formation of the capacitor, the position coordinates of the position where the external conductor is approaching on the touch panel sensor are specified. It should be noted that the technical concept described later, which is employed in the touch panel sensor 30 according to the present embodiment, can be applied to either the self-capacitance method or the mutual capacitance method.

  As shown in FIG. 2, the touch panel sensor 30 includes a first surface 32 a facing the viewer side and a second surface 32 b facing the display device side, and has a translucent base material 32 and a first base material 32. A plurality of first detection patterns 41 provided on the surface 32a and extending in the first direction D1 and provided on the second surface 32b of the base material 32 and intersecting the first direction D1, for example, orthogonal to the first direction D1 And a plurality of second detection patterns 46 extending in the second direction D2. As shown in FIG. 2, the first detection pattern 41 and the second detection pattern 46 each extend in a band shape. The plurality of first detection patterns 41 are arranged in the second direction D2 at a constant arrangement pitch, and the plurality of second detection patterns 46 are also arranged in the first direction D1 at a constant arrangement pitch. Usually, the arrangement pitch of the first detection patterns 41 in the second direction D2 and the arrangement pitch of the second detection patterns 46 in the first direction D1 are the same. The arrangement pitch of the first detection pattern 41 and the second detection pattern 46 is determined according to the resolution required for the detection of the touch position, and is, for example, several mm. In FIG. 2, the components provided on the first surface 32a side of the base material 32 are represented by solid lines, and the components provided on the second surface 32b side of the base material 32 are represented by dotted lines. Yes.

  As shown in FIG. 1, the base material 32 of the touch panel sensor 30 includes a rectangular active area Aa1 corresponding to a region where a touch position can be detected, and a rectangular frame-shaped inactive area Aa2 located around the active area Aa1. And. The active area Aa1 and the inactive area Aa2 are respectively partitioned corresponding to the active area A1 and the inactive area A2 of the display panel 16.

  The first detection pattern 41 and the second detection pattern 46 described above are arranged in the active area Aa1. In addition, on the first surface 32 a of the base material 32 in the inactive area Aa 2, the plurality of first frame wirings 44 a electrically connected to the first detection patterns 41 and the vicinity of the outer edge of the base material 32 are arranged. A plurality of first terminal portions 44b that are electrically connected to the first frame wirings 44a are provided. In addition, on the second surface 32b of the base material 32 in the inactive area Aa2, a plurality of second frame wirings 49a electrically connected to the second detection patterns 46 and the vicinity of the outer edge of the base material 32 are arranged. And a plurality of second terminal portions 49b electrically connected to the respective second frame wirings 49a.

  Hereinafter, each component of the touch panel sensor 30 will be described.

(Base material)
The base material 32 functions as a dielectric in the touch panel sensor 30. As a material constituting the base material 32, for example, a material having sufficient translucency such as polyethylene terephthalate (PET), cycloolefin polymer (COP) or glass is used. When the base material 32 contains PET, for example, the thickness of PET is in the range of 100 to 200 μm, for example. In addition, as long as the 1st detection pattern 41, the 2nd detection pattern 46, frame wiring 44a, 49a, and terminal part 44b, 49b can be hold | maintained appropriately, the specific structure of the base material 32 is not specifically limited. . For example, the base material 32 may further include a hard coat layer provided on the surface such as a PET layer. That is, in the present embodiment, the base material 32 does not mean any specific structure or material, but a base of a pattern such as the first detection pattern 41 or the second detection pattern 46 that constitutes the touch panel sensor 30. It just means something.

  Preferably, the first surface 32a and the second surface 32b of the base material have high flatness so that the image light from the display device 15 is transmitted with high transmittance. For example, the arithmetic surface average roughness (Ra) of the first surface 32a and the second surface 32b of the substrate 32 is in the range of 0.004 to 0.010 μm.

(First detection pattern)
Next, the first detection pattern 41 will be described with reference to FIGS. 3A to 3C. 3A is a plan view showing a case where the first detection pattern 41 in a portion surrounded by a one-dot chain line denoted by reference numeral III in FIG. 2 is viewed from the observer side, and FIG. 3B is a reference numeral in FIG. It is a top view which shows the case where the 2nd detection pattern 46 in the part enclosed with the dashed-dotted line to which III was attached | subjected was seen from the observer side, ie, the case where the 2nd detection pattern 46 was seen through the base material 32. . FIG. 3C is a plan view showing the first detection pattern 41 shown in FIG. 3A and the second detection pattern 46 shown in FIG. 3B in an overlapping manner. In FIG. 3C, the first detection pattern 41 is indicated by a solid line, and the second detection pattern 46 is indicated by a dotted line.

  In the present embodiment, the first detection pattern 41 is a first conductive wire 51 having light shielding properties and conductivity, and is arranged in a mesh shape so that an opening 51 a is formed between the first conductive wires 51. The first conducting wire 51 is used. Similarly, the second detection pattern 46 is a second conductive wire 56 having light shielding properties and conductivity, and the second conductive wire is arranged in a mesh shape so that an opening 56 a is formed between the second conductive wires 56. 56. Each of the first conducting wire 51 and the second conducting wire 56 includes a first metal layer 61 and a second metal layer 66 made of a metal material, as will be described later.

  The ratio of the area occupied by the opening 51a (hereinafter referred to as the aperture ratio) in the entire area of the first detection pattern 41 is sufficiently high, so that the image light from the display device 15 can be touched with an appropriate transmittance. As long as it can pass through the active area Aa1 of the sensor 30, the size and shape of the first conducting wire 51 are not particularly limited. For example, in the example shown in FIGS. 3A and 3C, the first detection pattern 41 is configured by arranging the first conductive wires 51 formed in a diamond shape along the first direction D1. In this case, the first conducting wire 51 is configured such that the inner angle that is an acute angle among the inner angles of the rhombus is aligned along the first direction D1. The range of the aperture ratio is appropriately set according to the characteristics of the image light emitted from the display device.

  The line width of the first conducting wire 51 is set according to the required aperture ratio and the like. For example, the width of the first conducting wire 51 is set within a range of 1 to 10 μm, more preferably within a range of 2 to 7 μm. Yes. Thereby, the influence which the 1st conducting wire 51 has with respect to the image | video which an observer visually recognizes can be made low to a negligible level. Although the thickness of the 1st conducting wire 51 is suitably set according to the electrical resistance value calculated | required with respect to the 1st detection pattern 41, it exists in the range of 0.1-0.5 micrometer, for example.

(Second detection pattern)
As in the case of the first conductor 51, the second conductor 56 also has the second conductor 56 as long as the ratio of the area occupied by the opening 56 a in the entire area of the second detection pattern 46 can be sufficiently secured. The size and shape of 56 are not particularly limited. For example, in the example shown in FIGS. 3B and 3C, the second detection pattern 46 is configured by arranging the second conductive wires 56 formed in a diamond shape along the second direction D2. In this case, the 2nd conducting wire 56 is comprised so that the internal angle which becomes an obtuse angle among the internal angles of a rhombus may line up along the 2nd direction D2.

  In FIG. 3C, a crossing portion generated by a plurality of, for example, two first conductors 51 intersecting each other is represented by reference numeral 51b, and a plurality of, for example, two second conductors 56 intersect each other. The crossing part which arises by this is represented by the code | symbol 56b. As shown in FIG. 3C, the first conducting wire 51 and the second conducting wire 56 are arranged so that the intersecting portion 51 b and the intersecting portion 56 b do not overlap each other when viewed from the normal direction of the base material 32.

  By the way, the metal material which comprises the 1st conducting wire 51 and the 2nd conducting wire 56 shows metal luster as mentioned above, while having high electroconductivity. For this reason, when an untreated metal material is used as the first conducting wire 51 and the second conducting wire 56, the visibility of the image light from the display device 15 is hindered by the metallic luster of the first conducting wire 51 and the second conducting wire 56. It will be. Here, about the 1st conducting wire 51, it is possible to make the 1st conducting wire 51 difficult to be visually recognized by an observer by performing low reflection processing, such as a blackening process, on the surface of the 1st conducting wire 51. On the other hand, regarding the second conductor 56, the surface in contact with the second surface 32 b of the base material 32 among the surfaces of the second conductor 56 is a surface facing the observer side. Therefore, it is difficult to suppress the second conductor 56 from being visually recognized by the observer by the blackening process of the second conductor 56 itself.

  In consideration of such problems, the present inventor does not create a pattern (overlap pattern) that at least partially covers the second conductor 56 from the observer, not by blackening the second conductor 56. It is proposed that the second conductor 56 is prevented from being visually recognized by an observer by being provided on the first surface 32a of the base material 32. Hereinafter, an example in which the touch panel sensor 30 further includes an overlap pattern will be described with reference to FIGS. 4 and 5. FIG. 4 is a plan view showing the overlap pattern 42 disposed so as to overlap with the second conducting wire 56 of the second detection pattern 46, and FIG. 5 is an enlarged plan view showing FIG. 4 and 5, the component provided on the first surface 32 a side of the base material 32, that is, the overlap portion 52 is represented by a solid line and provided on the second surface 32 b side of the base material 32. The component, that is, the second conducting wire 56 is represented by a dotted line.

  As shown in FIG. 4, the touch panel sensor 30 according to the present embodiment further includes an overlap pattern 42 provided on the first surface 32 a of the base material 32 so as not to be connected to the first conductive wire 51 of the first detection pattern 41. I have. As shown in FIG. 4, the overlap pattern 42 includes a plurality of overlap portions 52 having light shielding properties and conductivity. As shown in FIGS. 4 and 5, the overlap portion 52 is disposed so as to at least partially overlap the second detection pattern 46 when viewed from the normal direction of the base material 32. For this reason, the second conducting wire 56 of the second detection pattern 46 can be at least partially covered from the observer by the overlap portion 52.

  Here, as will be described in detail later, external light incident on the touch panel sensor 30 from the observer side is formed on the surface of the first conductive wire 51 of the first detection pattern 41 and the surface of the overlap portion 52 of the overlap pattern 42. Is subjected to a low reflection process to prevent the light from being reflected and returning to the viewer side. For this reason, it can suppress that the 1st detection pattern 41 and the overlap pattern 42 are recognized by the observer.

  As a result of the inventor's extensive research, the crossing portions 56b generated by the plurality of second conductive wires 56 intersecting each other among the second conductive wires 56 of the second detection pattern 46 are easily recognized by the observer. I found it. The reason is that, at the intersecting portion 56b, since the plurality of second conducting wires 56 intersect, the width of the second conducting wire 56 becomes thicker than the portion where one second conducting wire 56 extends linearly. As a result, it is conceivable that the second conductive wire 56 is easily visually recognized. In addition, the patterning accuracy of the second conductors 56 is generally limited, and for this reason, it is difficult to cross the plurality of second conductors 56 so as to form an acute angle. Usually, as shown in FIG. A curved portion 56c is generated at a portion where the crossing occurs. This is also considered to be one of the reasons that the width of the second conducting wire 56 at the intersecting portion 56b increases, thereby making it easier to visually recognize the intersecting portion 56b. For example, when the width W1 of one second conducting wire 56 extending linearly is 3 μm, the width W1 ′ of the second conducting wire 56 at the intersecting portion 56b may be about 10 μm.

  In view of such a background, the inventor of the present invention at least partially overlaps the intersecting portion 56b of the second detection pattern 46 when the overlap portion 52 is viewed from the normal direction of the base material 32. Suggest to arrange. Thus, the portion of the second conducting wire 56 that is most easily viewed by the observer can be obscured, so that the second conducting wire 56 can be visually recognized with the overlap portion 52 having a small area. . For this reason, it can reduce that image light will be shielded by the overlap part 52. FIG. Therefore, it is possible to sufficiently suppress the second conductive wire 56 from being visually recognized by the observer while sufficiently maintaining the light transmittance in the touch panel sensor 30.

  In consideration of the patterning accuracy when forming the overlap portion 52, it is generally difficult to accurately overlap the overlap portion 52 on the portion of the second conducting wire 56 that extends linearly. For example, consider a case where a metal layer is etched using a resist layer obtained by exposing a dry film resist in a predetermined pattern as a mask, thereby forming an overlap portion 52 of the overlap pattern 42. The thickness of the dry film resist is generally several μm. In this case, when an error due to the thickness of the dry film resist and an error due to the exposure light irradiation accuracy are taken into consideration, the manufacturing tolerance of the position of the obtained resist layer is about several μm. Therefore, when the overlap portion 52 is to be overlapped with the second conductor 56 having a width of about several μm, the overlap portion 52 almost overlaps the linear portion of the second conductor 56 due to the manufacturing tolerance of the resist layer. It can happen that it is not possible. On the other hand, as described above, the width of the intersecting portion 56b is larger than the width of the second conducting wire 56 extending linearly, for example, about 10 μm. For this reason, even if the manufacturing tolerance of the resist layer is taken into consideration, most of the overlap portion 52 can be overlapped with the intersecting portion 56b. Thus, it can be said that obscuring the intersecting portion 56b with the overlap portion 52 is effective not only in terms of the effect on the visibility of the second conductive wire 56 but also in terms of manufacturing tolerances.

  Further, according to the exposure method described later according to the present embodiment, the exposure light irradiated on the second surface 32b side of the substrate 32 relative to the exposure light irradiated on the first surface 32a side of the substrate 32 is relative. Sufficient positional accuracy can be ensured. Therefore, the relative positional accuracy between the photosensitive layer formed on the first surface 32a side of the substrate 32 and the photosensitive layer formed on the second surface 32b side of the substrate 32 can be sufficiently increased. For example, it can be within a range of ± 2 μm. For this reason, the overlap part 52 can be more accurately overlapped with the intersecting part 56 b of the second conducting wire 56.

  Preferably, the arrangement of the overlap portion 52 is set so that the overlap portion 52 is located inside a region where the intersecting portion 56b of the second conducting wire 56 extends when viewed from the normal direction of the base material 32. For example, the overlap portion 52 is designed so that the width W2 of the overlap portion 52 is in the range of 50 to 80% of the width of the second conducting wire 56, more specifically about 70%. As a result, even if the position of the overlap portion 52 with respect to the intersecting portion 56b is slightly shifted due to manufacturing tolerances, the overlap portion 52 is positioned inside the region where the intersecting portion 56b of the second conductor 56 extends. be able to. That is, the overlap portion 52 can be completely overlapped with the intersecting portion 56b. Thereby, the effect that the overlap part 52 prevents the visual recognition of the 2nd conducting wire 56 can be acquired to the maximum.

  As shown in FIG. 5, the width of the second conducting wire 56 around the intersecting portion 56b varies greatly depending on the position. In this case, as shown in FIG. 5, the distances S <b> 1 and S <b> 2 from the side edge of the second conductor 56 to the side edge of the overlap portion 52 are substantially constant, that is, the shape of the overlap portion 52 is the second conductor 56. The overlap portion 52 may be designed so as to be substantially similar to the shape of the intersection portion 56b. It should be noted that making the shape of the overlap portion 52 substantially similar to the shape of the intersecting portion 56b of the second conductor 56 reduces the man-hour when inputting the pattern of the photosensitive layer to the drawing means of the exposure machine. It can also have an effect.

(Layer configuration of the first conductor and the second conductor)
Next, referring to FIG. 6 and FIG. 7, the first conductor 51 that constitutes the first detection pattern 41, the second conductor 56 that constitutes the second detection pattern 46, and the overlap portion 52 that constitutes the overlap pattern 42. The layer structure will be described. 6 is a cross-sectional view showing the case where the touch panel sensor 30 is cut along the line VI of FIG. 4, and FIG. 7 is an enlarged cross-sectional view of FIG.

[First conductor and overlapped part]
As shown in FIG. 7, the first conductive wire 51 includes a first metal layer 61 and a first antireflection layer 62 formed on the surface of the first metal layer 61 on the viewer side. Similarly, the overlap portion 52 includes a first metal layer 61 and a first antireflection layer 62 formed on the surface of the first metal layer 61 on the viewer side. As shown in FIG. 7, the first antireflection layer 62 may be formed not only on the surface of the first metal layer 61 but also on the side surface of the first metal layer 61.

  The first metal layer 61 is a layer for mainly realizing conductivity in the first conductive wire 51. The first metal layer 61 contains copper and has a thickness in the range of 0.3 to 2.0 μm. By providing the first metal layer 61 having such a configuration on the first conducting wire 51, high conductivity in the first conducting wire 51 can be ensured. When the 1st metal layer 61 contains copper, the weight ratio of the copper in the 1st metal layer 61 may be set to such an extent that the reddish color peculiar to copper appears in the 1st metal layer 61. . For example, the weight ratio of copper in the first metal layer 61 is 99.99% by weight or more.

  By the way, while metal materials, such as copper, have high electroconductivity, they show metallic luster as mentioned above. For this reason, when the first metal layer 61 is used in the first conductive wire 51 and the overlap portion 52 without being processed, the visibility of the image light from the display device 15 is hindered by the metallic luster of the first metal layer 61. It will be. In particular, since copper exhibits a reddish color peculiar to copper, it is more conspicuous than other metal materials such as silver, and thus the visibility of image light from the display device 15 is further hindered. . The first antireflection layer 62 is a layer formed by applying a low reflection treatment to the surface and side surfaces of the first metal layer 61 in order to reduce the metallic luster unique to copper.

The specific content of the low reflection treatment is not particularly limited. For example, when blackening treatment is employed, copper or silver that forms the first metal layer 61 using a hydrochloric acid solution in which tellurium is dissolved is used. The surface and side of the can be blackened.
Further, by providing a low reflection material on the surface of the first metal layer 61, the low reflection treatment on the surface of the first metal layer 62 may be performed. As a method of providing the low reflection material, a known method such as coating, vapor deposition, or sputtering can be appropriately used.
Further, the reflection on the first conductive wire 51 and the overlap portion 52 may be prevented by roughening the surface and side surfaces of the first metal layer 61 to obtain the first antireflection layer 62 including irregularities. That is, the matte treatment may be performed on the surfaces of the first conductive wire 51 and the overlap portion 52. In this case, when external light from the observer side reaches the surface and side surfaces of the first conductive wire 51 and the overlap portion 52, the external light is scattered in various directions by the uneven shape of the first antireflection layer 62. For this reason, the metallic luster in the 1st conducting wire 51 and the overlap part 52 can be suppressed, and, thereby, it can suppress that the 1st conducting wire 51 and the overlap part 52 are visually recognized by the observer. . As a method of forming the first antireflection layer 62 by roughening the surface and side surfaces of the first metal layer 61, for example, a crystal grain boundary of the metal material constituting the first metal layer 61 is etched using a liquid containing formic acid. The method of doing can be adopted. The degree of the uneven shape in the first antireflection layer 62 is appropriately set according to the required degree of scattering. For example, the arithmetic surface average roughness (Ra) of the surface and side surface of the first metal layer 61 before mat processing is in the range of 0.008 to 0.017 μm, and the first metal layer 61 is subjected to mat processing. The mat processing that the arithmetic surface average roughness (Ra) of the surface and side surface of the first antireflection layer 62 formed by the step falls within the range of 0.072 to 0.162 μm can be performed.

  Preferably, the luminous reflectance of the surface of the first conductor 51 and the surface of the overlap portion 52 in the XYZ color system is approximately the same as the luminous reflectance of the first surface 32a of the substrate 32. Low reflection processing is performed on the surface of the one conducting wire 51 and the overlap portion 52. For example, the luminous reflectance in the XYZ color system of the reflected light obtained when the standard light source C is incident on the surface of the first conducting wire 51 or the surface of the overlap portion 52 within an incident angle range of 0 to 70 degrees. The first conducting wire 51 and the overlap portion 52 are configured so that the (Y value) is in the range of 5 to 25%. As an apparatus for measuring luminous reflectance (Y value), for example, a reflection / transmittance meter HR-100 manufactured by Murakami Color Research Laboratory Co., Ltd. may be used. As described above, the first conductive wire 51 and the overlap portion 52 are small in width, for example, about several μm. Considering this point, the numerical value of the luminous reflectance (Y value) described above is a laminate having the same layer configuration as the first conductor 51 and the overlap portion 52, that is, the base material 32, the first metal layer 61, and The value obtained by preparing the laminated body which has the 1st antireflection layer 62, and measuring the luminous reflectance (Y value) of this laminated body may be sufficient.

More preferably, the reflection hue b ^* in the L ^* a ^* b ^* chromaticity system on the surface of the first conductor 51 and the surface of the overlap portion 52 is in the range of −0.5 to 2. A conducting wire 51 and an overlap portion 52 are formed. That is, the first conductive wire 51 and the overlap portion 52 are configured so that the redness attributed to the copper of the first metal layer 61 included in the first conductive wire 51 and the overlap portion 52 is not visually recognized by the observer. As an apparatus for measuring the reflected hue b ^* , for example, a colorimetric color difference meter ZE-2000 manufactured by Nippon Denshoku Industries Co., Ltd. may be used.

[Second conductor]
As shown in FIG. 7, the second conductive wire 56 includes a second metal layer 66. The second conductive wire 56 may further include a second antireflection layer 67 formed on the surface of the second metal layer 66 on the display device side. Since the second metal layer 66 and the second antireflection layer 67 are the same as the first metal layer 61 and the first antireflection layer 62 described above, detailed description thereof is omitted.

(Frame wiring and terminal part)
The first frame wiring 44a and the first terminal portion 44b connected to the first detection pattern 41, and the second frame wiring 49a and the second terminal portion 49b connected to the second detection pattern 46 are first detected. This is provided to extract signals from the pattern 41 and the second detection pattern 46 to the outside of the touch panel sensor 30. As long as signals can be appropriately transmitted, the specific configurations of the first frame wiring 44a and the first terminal portion 44b, the second frame wiring 49a and the second terminal portion 49b are not particularly limited. For example, the first frame wiring 44 a and the first terminal portion 44 b may be formed at the same time as the first conducting wire 51 with the same layer configuration as the first conducting wire 51. Similarly, the second frame wiring 49 a and the second terminal portion 49 b may be formed at the same time as the second conducting wire 56 with the same layer configuration as the second conducting wire 56.

Method for Manufacturing Touch Panel Sensor Next, a method for manufacturing the touch panel sensor 30 having the above configuration will be described with reference to FIGS.

  First, as shown in FIG. 8A, a laminate 60 (also referred to as a blank) as a base material for producing the touch panel sensor 30 is prepared. The laminated body 60 is provided on the base 32, the first surface 32a of the base 32, the first metal layer 61 having light shielding properties and conductivity, and the second surface 32b of the base 32, And a second metal layer 66 having light shielding properties and conductivity. The method of providing the metal layers 61 and 66 on the respective surfaces 32a and 32b of the substrate 32 is not particularly limited, and a known method such as a sputtering method can be appropriately used.

  Next, as shown in FIG. 8B, the first photosensitive layer 71 is provided on the first metal layer 61, and the second photosensitive layer 76 is provided on the second metal layer 66. The first photosensitive layer 71 and the second photosensitive layer 76 have photosensitivity to light in a specific wavelength range, for example, ultraviolet rays. The type of the photosensitive layers 71 and 76 is not particularly limited. For example, a photodissolvable photosensitive layer may be used, or a photocurable photosensitive layer may be used. Here, an example in which a photocurable photosensitive layer is used will be described.

  As a method of providing the first photosensitive layer 71 and the second photosensitive layer 76 on the first metal layer 61 and the second metal layer 66, it is preferable that a dry film resist is formed on the first metal layer 61 and the second metal layer 66. The method of affixing on each is employ | adopted. In this case, unlike the case where a coating solution containing a photosensitive material is applied onto the laminated body 60, a heating step for bringing the photosensitive layers 71 and 76 into close contact with the laminated body 60 becomes unnecessary. For this reason, it becomes possible to comprise the base material 32 using materials with poor heat resistance, such as PET.

(Exposure process)
Thereafter, as shown in FIG. 8B, a first exposure mask 72 having openings 72a formed in a predetermined pattern is placed in the vicinity of the first photosensitive layer 71, and openings 77a are formed in a predetermined pattern. The formed second exposure mask 77 is placed in the vicinity of the second photosensitive layer 76. The opening 72 a of the first exposure mask 72 is formed in a pattern corresponding to the pattern of the first conducting wire 51 and the overlap portion 52. Further, the opening 77 a of the second exposure mask 77 is formed in a pattern corresponding to the pattern of the second conducting wire 56. Next, the relative position of the second exposure mask 77 with respect to the first exposure mask 72 is adjusted. For example, the position of the other exposure mask is adjusted with reference to the alignment mark formed on one of the first exposure mask 72 and the second exposure mask 77. Thereby, the second exposure mask 77 can be arranged with high positional accuracy with respect to the first exposure mask 72. Thereafter, the first photosensitive layer 71 is irradiated with exposure light in a predetermined pattern through the first exposure mask 72, and the second photosensitive layer 76 is irradiated with exposure light in a predetermined pattern through the second exposure mask 77. Perform the process. In addition, irradiation of the exposure light with respect to the 1st photosensitive layer 71 and irradiation of the exposure light with respect to the 2nd photosensitive layer 76 may be implemented simultaneously, and may be implemented at a different timing.

(Development process)
Next, the first photosensitive layer 71 and the second photosensitive layer 76 are developed. As a result, as shown in FIG. 8C, patterned first photosensitive layer 71 and second photosensitive layer 76 can be obtained.

(Etching process)
Thereafter, as shown in FIG. 8D, the first metal layer 61 is etched using the first photosensitive layer 71 as a mask. Thus, the first metal layer 61 can be patterned with a pattern corresponding to the first conductive wire 51 of the detection pattern 41 and the overlap portion 52 of the overlap pattern 42. Further, the second metal layer 66 is etched using the second photosensitive layer 76 as a mask. Accordingly, the second metal layer 66 can be patterned with a pattern corresponding to the second conductor 56 of the second detection pattern 46. Next, as shown in FIG. 8E, the photosensitive layers 71 and 76 are removed.

(Low reflection treatment process)
Thereafter, a low reflection treatment process is performed in which a low reflection treatment is performed on the surface and side surfaces of the first metal layer 61. For example, first, a fine uneven shape is formed on the surface and side surfaces of the first metal layer 61 using a chemical solution containing hydrogen peroxide and formic acid at 25 ° C. That is, the matte treatment is performed on the surface and side surfaces of the first metal layer 61. Thereafter, spray treatment using hydrochloric acid at 25 ° C. is performed on the first metal layer 61 in order to remove residue from the first metal layer 61. Further, a cleaning process using water may be performed on the first metal layer 61.

  Thereafter, a blackening process is performed on the surface and side surfaces of the first metal layer 61 using a chemical solution containing a metal having an ionization tendency equal to or greater than that of the metal material constituting the first metal layer 61. As the chemical solution for blackening treatment, for example, when the first metal layer 61 is made of copper, a chemical solution containing copper, zinc, and nickel can be used. As a result, the surface and side surfaces of the first metal layer 61 are blackened, whereby the first antireflection layer 62 is formed on the surface and side surfaces of the first metal layer 61.

  In this manner, the first detection pattern 41 composed of the first conductor 51 subjected to the low reflection process, the overlap pattern 42 composed of the overlap portion 52 subjected to the low reflection process, and the second conductor 56 composed of the second conductor 56. The touch panel sensor 30 including the two detection patterns 46 can be obtained. A process similar to the low reflection process performed on the first metal layer 61 may be performed on the second metal layer 66 constituting the second detection pattern 46.

  Next, with reference to FIG. 7, the effect of the touch panel sensor 30 obtained in this way is demonstrated.

  Here, as indicated by reference numerals L1 and L2 in FIG. 7, a description will be given of the case where external light incident on the touch panel sensor 30 along the normal direction of the base material 32 is directed to the first conductor 51 and the second conductor 56, respectively. To do. In this case, the external light L1 incident on the first conducting wire 51 is reflected by the first antireflection layer 62 of the first conducting wire 51 to become reflected light L1 '. Here, as described above, the first conductive wire 51 is configured such that the luminous reflectance (Y value) falls within the range of 5 to 25%. For this reason, it can suppress that the intensity | strength of reflected light L1 'becomes high, and can suppress that the 1st detection pattern 41 which consists of the 1st conducting wire 51 is visually recognized by the observer by this.

In addition, an overlap portion 52 of the overlap pattern 42 is provided on the path of the external light L2 toward the second conductor 56 as shown in FIG. For this reason, most of the outside light L <b> 2 directed to the second conducting wire 56 enters the overlap portion 52. Therefore, it can suppress that the 2nd detection pattern 46 which consists of the 2nd conducting wire 56 is visually recognized by the observer.
On the other hand, the external light L2 incident on the overlap portion 52 is reflected by the first antireflection layer 62 of the overlap portion 52 to become reflected light L2 ′. Here, as described above, the overlap portion 52 is configured such that the luminous reflectance (Y value) falls within the range of 5 to 25%. For this reason, it can suppress that the intensity | strength of reflected light L2 'becomes high, and, thereby, it can suppress that the overlap pattern 42 which consists of the overlap part 52 is visually recognized by the observer.

  Thus, according to the present embodiment, the touch panel sensor 30 is based on the first detection pattern 41 and the second detection pattern 46 provided on the first surface 32a and the second surface 32b of the base material 32, respectively. When viewed from the normal direction of the material, there is provided an overlap pattern 42 composed of an overlap portion 52 arranged so as to at least partially overlap with the intersecting portion 56b of the second conducting wire 56 of the second detection pattern 46. For this reason, at least partially, the overlap portion 52 covers the crossing portion 56b where the second conducting wires 56 intersect each other, which is the portion most easily seen by the viewer in the second detection pattern 46, from the viewer. Can do. Thereby, it is possible to suppress the second detection pattern 46 from being recognized by the observer. Further, the surface of the first conducting wire 51 and the surface of the overlap portion 52 are subjected to low reflection processing. For this reason, it can suppress that the 1st detection pattern 41 and the overlap pattern 42 are recognized by the observer. Therefore, according to the present embodiment, by reducing the electric resistance value of each of the detection patterns 41 and 46, it is possible to ensure high detection accuracy of the touch position and sufficiently ensure the visibility of the image.

  Further, according to the present embodiment, as described above, the first exposure mask 72 for obtaining the first photosensitive layer 71 and the second photosensitive layer 76 for patterning the first metal layer 61 and the second metal layer 66. And the process of adjusting the relative position of the 2nd exposure mask 77 is implemented. For this reason, the relative positional accuracy of the exposure light with which the second photosensitive layer 76 is irradiated with respect to the exposure light with which the first photosensitive layer 71 is irradiated can be sufficiently ensured. Therefore, even when a dry film resist having a thickness of several μm is used as the photosensitive layer, the relative positional accuracy between the first photosensitive layer 71 and the second photosensitive layer 76 can be sufficiently increased. For example, it can be within a range of ± 2 μm. For this reason, the overlap part 52 can be more accurately overlapped with the intersecting part 56 b of the second conducting wire 56. In addition, since a heating step for bringing the photosensitive layer into close contact with the laminate 60 is unnecessary, the base material 32 of the laminate 60 can be configured using a material having poor heat resistance such as PET.

  Note that various modifications can be made to the above-described embodiment. Hereinafter, some modifications will be described with reference to the drawings. In the following description and the drawings used in the following description, the same reference numerals as those used for the corresponding parts in the above embodiment are used for the parts that can be configured in the same manner as in the above embodiment. A duplicate description is omitted. In addition, when it is clear that the operational effects obtained in the above-described embodiment can be obtained in the modified example, the description thereof may be omitted.

(First modification)
First, as a first modification, the touch panel sensor 30 is provided between two adjacent first detection patterns 41 and is electrically connected to both the first detection pattern 41 and the first frame wiring 44a. An example in which the dummy pattern 43 is further provided will be described. FIG. 9 is a plan view showing the touch panel sensor 30 in the present modification. FIG. 10 is an enlarged plan view showing the first detection pattern 41 in the portion surrounded by the alternate long and short dash line with the symbol X in FIG.

  Similar to the first detection pattern 41, the dummy pattern 43 includes a third conductive wire 53 having light shielding properties and conductivity. Although not shown, the third conductor 53 includes a first metal layer and a first antireflection layer made of a metal material having a light shielding property and conductivity, like the first conductor 51 of the first detection pattern 41. It is out. By disposing such a dummy pattern 43 between the first detection patterns 41, the transmittance of the touch panel sensor 30 on the viewer side of the base material 32 can be made substantially uniform over the entire area of the active area Aa1. Thereby, it is possible to prevent the luminance of the display device with a touch position detection function 10 from varying.

  Preferably, the 3rd conducting wire 53 which comprises the dummy pattern 43 is formed in the same pattern as the 1st conducting wire 51 which comprises the 1st detection pattern 41, as shown in FIG. Thereby, it can suppress that the 1st detection pattern 41 is visually recognized visually. FIG. 10 shows an example in which the dummy pattern 43 is periodically disconnected in both the first direction D1 and the second direction D2. However, as long as the dummy pattern 43 is not electrically connected to the first detection pattern 41 and the first frame wiring 44a, the method of disconnecting the dummy pattern 43 is not particularly limited.

  FIG. 11 is a plan view showing the overlap pattern 42 arranged so as to overlap the intersecting portion 56b of the second conducting wire 56 of the second detection pattern 46 in the touch panel sensor 30 according to this modification shown in FIG. Also in this modification, by providing the overlap pattern 42, it is possible to suppress the second detection pattern 46 including the second conducting wire 56 from being visually recognized by the observer.

(Second modification)
As a second modification, an example will be described in which the base material 32 of the touch panel sensor 30 is configured by bonding two base materials 321 and 322 using an adhesive layer 323 or the like as shown in FIG. The 1st base material 321 comprises the 1st surface 32a of the base material 32, and contains the member which has translucency, such as PET. The 2nd base material 322 comprises the 2nd surface 32b of the base material 32, and contains the member which has translucency, such as PET similarly to the 1st base material 321. The thickness of a member such as PET contained in the first base material 321 and the second base material 322 is preferably 100 μm or less, for example, 25 μm. Moreover, the thickness of the adhesive layer 323 used for bonding the first base material 321 and the second base material 322 is, for example, 25 μm. More preferably, the thickness of the whole base material 32 comprised from the 1st base material 321, the 2nd base material 322, and the contact bonding layer 323 is 100 micrometers or less.

  Next, with reference to FIGS. 13A and 13B, an example of a method for producing the laminate 60 including the base material 32 according to this modification will be described. First, the first base 321 and the second base 322 are prepared, and then a metal layer is provided on each of the first base 321 and the second base 322 by sputtering or the like. Accordingly, the first laminate 601 including the first base 321 and the metal layer (first metal layer 61) provided on the first base 321, and the second base 322 and the second base 322 are provided. A second stacked body 602 including the provided metal layer (second metal layer 66) can be obtained. Next, as shown to Fig.13 (a), the 1st laminated body 601 and the 2nd laminated body 602 are bonded together so that a mutual metal layer may face the other side. Accordingly, as shown in FIG. 13B, the base material 32 including the first base material 321 and the second base material 322, and the first metal layer 61 provided on the first surface 32a of the base material 32, A laminate 60 including the second metal layer 66 provided on the second surface 32b of the substrate 32 can be obtained.

  Since the method for manufacturing the touch panel sensor 30 using the laminate 60 is the same as that in the above-described embodiment, detailed description thereof is omitted.

  In this modification, the metal layer may be provided only on one surface of the first base material 321 and one surface of the second base material 322. Therefore, as compared with the case where the metal layers are provided on both surfaces of one base material, the trouble of turning the base material upside down becomes unnecessary, and therefore the metal layer deposition process can be simplified. Further, in the metal layer deposition step, the chance of the metal layer coming into contact with the transport roller is reduced, so that the surface of the metal layer can be prevented from being damaged.

(Other variations)
In the above-described embodiment, the example in which the overlap portion 52 of the overlap pattern 42 is provided so as to overlap with the intersecting portion 56b of the second conductor 56 of the second detection pattern 46 has been described. However, the present invention is not limited to this, and the overlap portion 52 may be provided so as to overlap not only the intersecting portion 56b of the second conducting wire 56 but also the portion of the second conducting wire 56 that extends linearly. Further, in addition to the overlap portion 52 of the overlap pattern 42 or instead of the overlap portion 52, the first conductor 51 of the first detection pattern 41 and the third conductor 53 of the dummy pattern 43 described above are second detected. The pattern 46 may be provided so as to at least partially overlap the second conductive wire 56 of the pattern 46.

  In the above-described embodiment, the example in which the first metal layer 61 is a layer containing copper is shown. That is, the example in which the first metal layer 61 is made of copper or a copper-based alloy and a reddish color peculiar to copper appears in the first metal layer 61 is shown. However, as long as the desired conductivity of the first conductive wire 51 can be ensured, the metal element serving as the base of the first metal layer 61 is not limited to copper, and various metal elements can be employed. For example, the first metal layer 61 may be a layer mainly composed of silver.

DESCRIPTION OF SYMBOLS 10 Display apparatus with a touch position detection function 15 Display apparatus 30 Touch panel sensor 32 Base material 41 1st detection pattern 42 Overlap pattern 43 Dummy pattern 46 2nd detection pattern 51 1st conducting wire 52 Overlapping part 53 3rd conducting wire 56 2nd conducting wire 56b Intersection 60 Stack 61 First metal layer 62 First antireflection layer 66 Second metal layer 67 Second antireflection layer 71 First photosensitive layer 72 First exposure mask 76 Second photosensitive layer 77 Second exposure mask

Claims (8)

A touch panel sensor,
A base material including a first surface facing the viewer side and a second surface facing the display device side;
A plurality of first detection patterns provided on the first surface of the substrate;
A plurality of second detection patterns provided on the second surface of the base material,
Each first detection pattern is configured by arranging a plurality of first conductive wires having light shielding properties and conductivity in a mesh shape,
Each second detection pattern is configured by arranging a plurality of second conductive wires having light shielding properties and conductivity in a mesh shape,
The second detection pattern has an intersection formed by a plurality of the second conductors intersecting each other,
The touch panel sensor further includes an overlap pattern provided on the first surface of the base material so as not to be connected to the first conductor of the first detection pattern,
The overlap pattern is composed of a plurality of overlap portions having light shielding properties and conductivity,
The overlap portion is disposed so as to at least partially overlap with the intersecting portion of the second detection pattern when viewed from the normal direction of the substrate.
A touch panel sensor, wherein a surface of the first conductive wire and a surface of the overlap portion are subjected to low reflection treatment.   The touch panel sensor according to claim 1, wherein the luminous reflectance in the XYZ color system of the surface of the first conductive wire and the surface of the overlap portion is in the range of 5 to 25%. Each of the first conductive wire and the overlap portion has a first metal layer containing copper,
The reflection hue b ^* in the L ^* a ^* b ^* chromaticity system of the surface of the first conductive wire and the surface of the overlap portion is in the range of −0.5 to 2. 4. Touch panel sensor.   The touch panel sensor according to any one of claims 1 to 3, wherein the surface of the first conductive wire and the surface of the overlap portion are subjected to mat processing.   5. The overlap portion according to claim 1, wherein the overlap portion is disposed so as to be located inside a region where the intersecting portion of the second detection pattern extends when viewed from a normal direction of the base material. The touch panel sensor according to one item. It is a manufacturing method of the touch panel sensor according to claim 1,
Provided on the first surface of the base material, the first metal layer having a light shielding property and conductivity, and provided on the second surface of the base material, having a light shielding property and conductivity. A step of preparing a laminate including a second metal layer having,
Providing a first photosensitive layer on the first metal layer and providing a second photosensitive layer on the second metal layer;
An exposure step of irradiating the first photosensitive layer with exposure light in a predetermined pattern through a first exposure mask and irradiating the second photosensitive layer with exposure light in a predetermined pattern through a second exposure mask;
A developing step for developing the first photosensitive layer and the second photosensitive layer;
Etching the first metal layer using the first photosensitive layer as a mask patterns the first metal layer with a pattern corresponding to the first conductor of the first detection pattern and the overlap portion of the overlap pattern. And etching the second metal layer using the second photosensitive layer as a mask to pattern the second metal layer with a pattern corresponding to the second conductor of the second detection pattern;
A low reflection treatment step of applying a low reflection treatment to the surface of the first metal layer,
The said exposure process is a manufacturing method of a touch panel sensor including the process of adjusting the relative position of the said 2nd exposure mask with respect to a said 1st exposure mask.   The touch panel sensor manufacturing method according to claim 6, wherein the low reflection treatment step includes a mat treatment step of performing a mat treatment on the surface of the first metal layer using a mat treatment solution containing an organic acid. A display device;
A touch panel sensor disposed on a display surface of the display device,
The touch panel sensor
A base material including a first surface facing the viewer side and a second surface facing the display device side;
A plurality of first detection patterns provided on the first surface of the substrate;
A plurality of second detection patterns provided on the second surface of the base material,
Each first detection pattern is configured by arranging a plurality of first conductive wires having light shielding properties and conductivity in a mesh shape,
Each second detection pattern is configured by arranging a plurality of second conductive wires having light shielding properties and conductivity in a mesh shape,
The second detection pattern has an intersection formed by a plurality of the second conductors intersecting each other,
The touch panel sensor further includes an overlap pattern provided on the first surface of the base material so as not to be connected to the first conductor of the first detection pattern,
The overlap pattern is composed of a plurality of overlap portions having light shielding properties and conductivity,
The overlap portion is disposed so as to at least partially overlap with the intersecting portion of the second detection pattern when viewed from the normal direction of the substrate.
A display device with a touch position detection function, wherein the surface of the first conductive wire and the surface of the overlap portion are subjected to low reflection processing.

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