JP2014074908A - Semiconductor device and method of driving semiconductor device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a semiconductor device comprising a translucent holding capacitor comprising a translucent semiconductor film, a conductive film, and an insulating film, and provide a driving method for operating the holding capacitor stably.SOLUTION: A display device includes: a pixel including an enhancement type transistor; a pixel electrode to be supplied with a predetermined potential from a signal line through the transistor; and a holding capacitor in which the pixel electrode functions as one electrode and is electrically connected to a capacitance line; and a translucent semiconductor film functioning as the other electrode is included. In the display device, such a potential that a potential difference between the pixel electrode and the capacitance line becomes higher than a threshold voltage of the holding capacitor, is supplied to the capacitance line.

Description

  The invention disclosed in this specification and the like relates to a semiconductor device and a driving method of the semiconductor device.

  In recent years, flat panel displays such as a liquid crystal display have been widely used. In a display device such as a liquid crystal display, in a pixel arranged in a row direction and a column direction, a transistor as a switching element, a liquid crystal element electrically connected to the transistor, and a parallel connection with the liquid crystal element Storage capacity is provided.

  As a semiconductor material constituting a semiconductor film included in the transistor, a silicon semiconductor such as amorphous (amorphous) silicon or poly (polycrystalline) silicon is widely used.

  A metal oxide exhibiting semiconductor characteristics (hereinafter referred to as an oxide semiconductor) is a semiconductor material that can be used for a semiconductor film included in a transistor. For example, a technique for manufacturing a transistor using zinc oxide or an In—Ga—Zn-based oxide semiconductor is disclosed (see Patent Documents 1 and 2).

  In a display device, a storage capacitor is provided with a dielectric film between a pair of electrodes, and at least one of the pair of electrodes has a light shielding property such as a gate electrode, a source electrode, or a drain electrode included in a transistor. It is often formed of a conductive film.

  As the capacitance value of the storage capacitor is increased, the period during which the alignment of the liquid crystal molecules of the liquid crystal element can be kept constant can be lengthened in a situation where an electric field is applied, and the power consumption of the display device can be reduced.

  For example, in order to increase the charge capacity of the storage capacitor, there is a means of increasing the area occupied by the storage capacitor, specifically, increasing the area where a pair of electrodes overlap. However, in the display device, when the area of the conductive film having a light-shielding property is increased in order to increase the area where the pair of electrodes overlap, the aperture ratio of the pixel is reduced and the display quality of the image is deteriorated.

  Therefore, a technique is disclosed that enables a charge capacity to be increased without reducing an aperture ratio by providing a display device with a light-transmitting storage capacitor formed using a light-transmitting material. (See Patent Document 3).

JP 2007-123861 A JP 2007-96055 A US Pat. No. 8,102,476

  In the storage capacitor of the display device disclosed in Patent Document 3, a light-transmitting semiconductor film is used for one electrode, and a light-transmitting conductive film (specifically, a pixel electrode) is used for the other electrode. In addition, an insulating film having translucency is used for the dielectric film. In addition, one electrode included in the storage capacitor is included in the display device, and a channel layer (specifically, an oxidation layer) provided on a gate insulating layer of a thin film transistor (TFT) that is a switching element. A semiconductor). The oxide semiconductor used as the one electrode is an oxide semiconductor with increased electron density that can be used for a depletion type TFT. The other electrode uses a pixel electrode. In Patent Document 3, the storage capacitor is operated with the range of the potential difference (voltage) between the common potential applied to the capacitor line connected to one electrode and the pixel potential applied to the pixel electrode being around 0V.

  In the case where one electrode of the storage capacitor is an oxide semiconductor with an increased electron density as in Patent Document 3, in consideration of a method for manufacturing a display device, a TFT functioning as a switching element is included in the display device. It can be a type TFT. In the case where a depletion type transistor is used as a switching element, the threshold voltage of the transistor is a voltage lower than 0V.

  In general, in a display device, a video data potential supplied to a display element uses a potential within a potential amplitude centered on a common potential, and the common potential is often set to 0V.

  As described above, a display device having a storage capacitor formed by using a depletion-type TFT as a switching element and using an oxide semiconductor included in the TFT is required for driving the display device as in Patent Document 3. Since a wide voltage range is widened, a display device with increased power consumption is obtained. In addition, it is necessary to always apply a voltage to the TFT in order to cause the TFT to function as a switching element, which causes an increase in power consumption of the display device.

  Thus, one embodiment of the present invention is a semiconductor device including a light-transmitting storage capacitor including a light-transmitting semiconductor film, a light-transmitting conductive film, and a light-transmitting insulating film. Another object is to provide a semiconductor device with reduced power consumption.

  In addition, the storage capacitor described in Patent Document 3 is in a state where a positive bias is always applied to the light-transmitting conductive film which is the other electrode during the operation. Therefore, the threshold voltage of the storage capacitor varies in the positive direction with time. Therefore, when the voltage range for operating the storage capacitor is around 0 V, the storage capacitor may not operate due to a change with time of the threshold voltage.

  Therefore, it is significant to widen the operating range of a storage capacitor using an oxide semiconductor for one electrode.

  Thus, one embodiment of the present invention is a semiconductor device including a light-transmitting storage capacitor including a light-transmitting semiconductor film, a light-transmitting conductive film, and a light-transmitting insulating film. Another object is to provide a driving method for stably operating the storage capacitor.

  Another object of one embodiment of the present invention is to provide a semiconductor device capable of stably operating a storage capacitor having a light-transmitting property.

  In view of the above problems, an embodiment of the present invention is an enhancement-type transistor, a storage capacitor electrically connected to the transistor, a capacitor line electrically connected to the storage capacitor, the transistor, the storage capacitor, and the The storage capacitor is electrically connected to the capacitor line and has a light-transmitting semiconductor film functioning as one electrode and the other electrode serving as a display element. A light-transmitting conductive film, a dielectric film provided between one electrode and the other electrode, a threshold voltage of 0 V or more, and a storage capacitor having a light-transmitting property The semiconductor device is characterized in that the potential difference between the conductive film and the capacitor line operates with a potential difference that makes the light-transmitting semiconductor film conductive.

  Another embodiment of the present invention is an enhancement-type transistor, a storage capacitor electrically connected to the transistor, a capacitor line electrically connected to the storage capacitor, and the transistor and the storage capacitor. The storage capacitor is electrically connected to the capacitor line and has a light-transmitting semiconductor film that functions as one electrode, and the light-transmitting element that functions as the other electrode and is included in the display element. And a dielectric film provided between the one electrode and the other electrode, the threshold voltage is 0 V or more, and the storage capacitor is a light-transmitting conductive film. The semiconductor device is characterized in that it operates with a potential difference larger than the threshold voltage of the storage capacitor between the film and the capacitor line.

  The storage capacitor can be formed by using the formation process of the transistor. The light-transmitting semiconductor film functioning as one electrode of the storage capacitor can be formed using a process for forming a semiconductor film included in the transistor. In other words, the light-transmitting semiconductor film functioning as one electrode of the storage capacitor is formed over the same surface as the light-transmitting semiconductor film of the transistor. An oxide semiconductor film can be used as the light-transmitting semiconductor film of the transistor, and a transistor including an oxide semiconductor film formed by appropriate treatment is an enhancement type transistor. Since the off-state current of the transistor is extremely low, power consumption of the semiconductor device can be reduced.

  Note that in the following, a semiconductor film included in the transistor and a light-transmitting semiconductor film included in the storage capacitor are described as oxide semiconductor films.

  In the above, the oxide semiconductor film included in the storage capacitor and the oxide semiconductor film included in the transistor have equivalent carrier densities. The oxide semiconductor film included in the storage capacitor is an oxide semiconductor film that is not subjected to treatment for adding an impurity that increases conductivity in order to intentionally increase carrier density.

  As in the semiconductor device of one embodiment of the present invention, the transistor functioning as a switching element is an enhancement type transistor including an oxide semiconductor film, and the oxidation transistor constituting the enhancement type transistor is formed on one electrode of the storage capacitor. By using an oxide semiconductor film formed at the same time as a semiconductor film, the voltage range for driving the semiconductor device can be narrowed compared to a semiconductor device using a depletion type transistor, and the consumption of the semiconductor device can be reduced. Electric power can be reduced.

  As the dielectric film of the storage capacitor, an insulating film provided over the oxide semiconductor film included in the transistor can be used, and a light-transmitting conductive film that functions as the other electrode of the storage capacitor is displayed. A pixel electrode which is included in the element and is electrically connected to the transistor can be used.

  In this manner, since the storage capacitor has a light-transmitting property, the pixel can be formed large (in a large area) in a region other than a portion where a transistor is formed. Therefore, according to one embodiment of the present invention, a semiconductor device with an increased charge capacity and an increased aperture ratio can be obtained. Further, by improving the aperture ratio, a semiconductor device with excellent display quality can be obtained.

  Note that one embodiment of the present invention includes not only the above semiconductor device but also a method for driving the semiconductor device.

  One embodiment of the present invention is an enhancement-type transistor, a pixel electrode to which a predetermined potential is supplied from a signal line through the transistor, the pixel electrode functions as one electrode, and is electrically connected to the capacitor line. A storage device having a storage capacitor having a light-transmitting semiconductor film functioning as the other electrode, and a driving method of a display device including a pixel having a threshold voltage applied to a scanning line having a gate electrode of the transistor By supplying the above potential, the transistor is turned on, a predetermined potential is supplied from the signal line to the pixel electrode, and the potential difference between the light-transmitting semiconductor film and the capacitor line is a threshold value of the storage capacitor. A driving method of a semiconductor device, wherein a potential higher than a value voltage is supplied and a storage capacitor holds a potential difference between a potential of a pixel electrode and a potential of a capacitor line for a certain period.

  Another embodiment of the present invention is an enhancement-type transistor, a pixel electrode to which a predetermined potential is supplied from a signal line through the transistor, the pixel electrode functions as one electrode, and is electrically connected to the capacitor line And a storage capacitor having a light-transmitting semiconductor film functioning as the other electrode, and a driving method of a display device including a pixel having a transistor threshold on a scan line including a gate electrode of the transistor A potential higher than the value voltage is supplied to make the transistor conductive, a predetermined potential is supplied from the signal line to the pixel electrode, and the threshold voltage of the storage capacitor is higher than the predetermined potential supplied to the pixel electrode to the capacitor line This is a method for driving a semiconductor device, in which a potential lower than a minute is supplied and a storage capacitor holds a potential difference between a potential of a pixel electrode and a potential of a capacitor line for a certain period.

  With the above driving method, the operation range of a storage capacitor of a semiconductor device including a semiconductor capacitor having a light-transmitting property, a conductive film having a light-transmitting property, and a storage capacitor having a light-transmitting insulating film can be expanded. The capacity can be stably operated.

  Note that in this specification, the threshold voltage of a storage capacitor refers to a transparent capacitor when a so-called MOS capacitor is formed by a light-transmitting semiconductor film, a pixel electrode, and an insulating film provided therebetween. This is a voltage at which an accumulation layer is formed in a light-sensitive semiconductor film and the charge capacity starts to increase.

  In a semiconductor device including a storage capacitor including a light-transmitting semiconductor film, a light-transmitting conductive film, and a light-transmitting insulating film, a method for stably operating the storage capacitor can be provided. Further, according to one embodiment of the present invention, a semiconductor device which has a storage capacitor with a high aperture ratio, a large charge capacity, and low power consumption can be provided.

FIG. 6 illustrates a semiconductor device and a circuit diagram of a pixel. 4A and 4B illustrate an Id-Vg curve of a transistor included in a semiconductor device, a CV curve of a storage capacitor, a potential of a pixel electrode, and a capacitor line. 8A and 8B illustrate an operation method of a storage capacitor included in a semiconductor device. FIG. 6 is a top view illustrating a pixel of a semiconductor device. FIG. 14 is a cross-sectional view illustrating a pixel of a semiconductor device. 9 is a cross-sectional view illustrating a method for manufacturing a pixel of a semiconductor device. 9 is a cross-sectional view illustrating a method for manufacturing a pixel of a semiconductor device. FIG. 6 is a top view illustrating a pixel of a semiconductor device. FIG. 14 is a cross-sectional view illustrating a pixel of a semiconductor device. FIG. 14 is a cross-sectional view illustrating a pixel of a semiconductor device. FIG. 6 is a top view illustrating a pixel of a semiconductor device. FIG. 14 is a cross-sectional view illustrating a pixel of a semiconductor device. FIG. 6 is a top view illustrating a pixel of a semiconductor device. FIG. 14 is a cross-sectional view illustrating a pixel of a semiconductor device. FIG. 6 is a top view illustrating a pixel of a semiconductor device. FIG. 6 is a top view illustrating a pixel of a semiconductor device. FIG. 14 is a cross-sectional view illustrating a transistor that can be used in a pixel of a semiconductor device. FIG. 6 is a top view illustrating a semiconductor device. FIG. 6 is a cross-sectional view illustrating a semiconductor device. FIG. 6 is a cross-sectional view illustrating a semiconductor device. 4A and 4B are a top view and a cross-sectional view illustrating part of a scan line driver circuit of a semiconductor device. 8A and 8B are a top view and a cross-sectional view illustrating a common connection portion of a semiconductor device. FIG. 16 illustrates an electronic device using a semiconductor device. FIG. 16 illustrates an electronic device using a semiconductor device.

  Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. However, the present invention is not limited to the following description, and it is easily understood by those skilled in the art that the modes and details can be variously changed. In addition, the present invention is not construed as being limited to the description of the embodiments below.

  In the structure of the present invention described below, the same portions or portions having similar functions are denoted by the same reference numerals in different drawings, and description thereof is not repeated. In addition, when referring to a portion having a similar function, the hatch pattern may be the same, and there may be no particular reference.

  In each drawing described in this specification, the size, the film thickness, or the region of each component is exaggerated for clarity in some cases. Therefore, it is not necessarily limited to the scale.

  In this specification and the like, the ordinal numbers attached as the first, second, etc. are used for convenience and do not indicate the order of steps or the order of lamination. In addition, a specific name is not shown as a matter for specifying the invention in this specification and the like.

  In addition, the functions of “source” and “drain” in the present invention may be interchanged when the direction of current changes during circuit operation. Therefore, in this specification, the terms “source” and “drain” can be used interchangeably.

  Further, the voltage refers to a potential difference between two points, and the potential refers to electrostatic energy (electric potential energy) possessed by a unit charge in an electrostatic field at a certain point. However, generally, a potential difference between a potential at a certain point and a reference potential (for example, ground potential) is simply referred to as a potential or a voltage, and the potential and the voltage are often used as synonyms. Therefore, in this specification, unless otherwise specified, the potential may be read as a voltage, or the voltage may be read as a potential.

  In this specification, in the case where an etching process is performed after a photolithography process, the mask formed by the photolithography process is removed.

(Embodiment 1)
In this embodiment, a semiconductor device that is one embodiment of the present invention and a method for driving the semiconductor device will be described with reference to drawings. Note that in this embodiment, a semiconductor device which is one embodiment of the present invention is described as a liquid crystal display device.

<Configuration of semiconductor device>
FIG. 1A illustrates a configuration example of a semiconductor device. In the semiconductor device illustrated in FIG. 1A, the pixel portion 100, the scan line driver circuit 104, and the signal line driver circuit 106 are arranged in parallel or substantially in parallel, and the potential is applied by the scan line driver circuit 104. There are m scanning lines 107 to be controlled, and n signal lines 109 each of which is arranged in parallel or substantially in parallel and whose potential is controlled by the signal line driver circuit 106. Further, the pixel portion 100 includes a plurality of pixels 101 arranged in a matrix. In addition, along the scanning line 107, the capacitor line 115 is disposed in parallel or substantially in parallel. Note that the capacitor lines 115 may be arranged in parallel or substantially in parallel along the signal lines 109.

  Each scanning line 107 is electrically connected to n pixels 101 arranged in any row among the pixels 101 arranged in m rows and n columns in the pixel unit 100. Each signal line 109 is electrically connected to m pixels 101 arranged in any column among the pixels 101 arranged in m rows and n columns. m and n are both integers of 1 or more. In addition, each capacitor line 115 is electrically connected to n pixels 101 arranged in any row among the pixels 101 arranged in m rows and n columns. When the capacitor lines 115 are arranged in parallel or substantially in parallel along the signal line 109, the capacitor lines 115 are arranged in any column among the pixels 101 arranged in m rows and n columns. The m pixels 101 are electrically connected.

  FIG. 1B is an example of a circuit diagram of the pixel 101 included in the semiconductor device illustrated in FIG. A pixel 101 illustrated in FIG. 1B is electrically connected to the transistor 103 which is electrically connected to the scan line 107 and the signal line 109, the capacitor line 115 in which one electrode supplies a certain potential, and the other. Is connected to the drain electrode of the transistor 103 and the pixel electrode 121 is electrically connected to the drain electrode of the transistor 103 and the other electrode of the storage capacitor 105 and faces the pixel electrode 121. And a liquid crystal element 108 electrically connected to a wiring for supplying a counter potential.

  The transistor 103 is an enhancement type transistor. Therefore, when the threshold voltage is 0 V or higher, that is, when the gate voltage (Vg) is 0 V or higher, an on-current (drain current: Id) flows, and the transistor 103 is turned on (see FIG. 2A). . In other words, since no on-state current flows when no gate voltage is applied, power consumption of the semiconductor device can be reduced as compared with the case where a depletion type transistor is used as the transistor 103. Note that in this specification, the gate voltage refers to a potential difference between a gate electrode and a source electrode.

  In addition, when an oxide semiconductor film processed under appropriate conditions is used for a channel formation region of the transistor, the off-state current of the transistor can be extremely reduced. Since the oxide semiconductor film 111 processed under appropriate conditions is used for the channel formation region of the transistor 103, the transistor 103 is a transistor with extremely low off-state current. Thus, the semiconductor device which is one embodiment of the present invention is a semiconductor device with reduced power consumption.

  A transistor including an oxide semiconductor with increased carrier density is a depletion type transistor. On the other hand, the transistor 103 is an enhancement type transistor, and the oxide semiconductor film 111 included in the transistor 103 is subjected to treatment for adding an impurity that increases conductivity in order to intentionally increase carrier density. There is no oxide semiconductor film.

  The storage capacitor 105 is provided with a dielectric film between a pair of electrodes and has a light-transmitting property. One electrode of the storage capacitor 105 is an oxide semiconductor film 119, the dielectric film is a light-transmitting insulating film provided over the oxide semiconductor film 111 included in the transistor 103, and the other electrode is , The pixel electrode 121. Therefore, the storage capacitor 105 can be formed using the formation process of the transistor 103. By controlling the potential applied to the pixel electrode 121 and bringing the oxide semiconductor film 119 into a conductive state, the oxide semiconductor film 119 functions as one electrode. Therefore, it can be said that the storage capacitor 105 has a MOS (Metal Oxide Semiconductor) capacitor structure.

  In addition, since the oxide semiconductor film 119 of the storage capacitor 105 is formed using the formation process of the oxide semiconductor film 111 included in the transistor 103 which is an enhancement type transistor, the storage capacitor 105 includes the transistor 103 and Similarly, when the potential difference between the pixel electrode 121 and the capacitor line 115 becomes 0 V or more, charging starts. In other words, the threshold voltage of the storage capacitor 105 is 0 V or higher.

  FIG. 2B shows a CV curve of the storage capacitor 105. In FIG. 2B, the horizontal axis represents the potential difference (VP−VC) between the pixel electrode 121 of the storage capacitor 105 and the capacitor line 115, and the vertical axis represents the capacitance (C) with respect to the potential difference. Note that when the frequency of the voltage at the time of CV measurement (Capacitance-Voltage-Measurement) is smaller than the frame frequency of the semiconductor device, a CV curve as shown in FIG. 2B is obtained.

  Note that in this specification, the potential difference between the pixel electrode 121 and the capacitor line 115 is a value obtained by subtracting the potential (VC) of the capacitor line 115 from the potential (VP) of the pixel electrode 121 (see FIG. 2C). . Note that FIG. 2C illustrates the transistor 103 and the storage capacitor 105 for clarity.

  In addition, since the oxide semiconductor film 119 of the storage capacitor 105 can be formed using the formation process of the oxide semiconductor film 111 included in the transistor 103, the conductivity is increased in order to intentionally increase the carrier density. The oxide semiconductor film is not subjected to treatment for adding an impurity or the like. The carrier density of the oxide semiconductor film 119 is equal to the carrier density of the oxide semiconductor film 111.

  From the above, since the oxide semiconductor film 119 of the storage capacitor 105 and the oxide semiconductor film 111 included in the transistor 103 have the same structure, the threshold voltage (Vth) of the storage capacitor 105 is the threshold voltage of the transistor 103. It is equivalent to (Vth_Tr) (see FIGS. 2A and 2B).

  The liquid crystal element 108 is an element that controls transmission or non-transmission of light by an optical modulation action of liquid crystal sandwiched between a substrate on which the transistor 103 and the pixel electrode 121 are formed and a substrate on which a counter electrode is formed. . Note that the optical modulation action of the liquid crystal is controlled by an electric field applied to the liquid crystal (including a vertical electric field or an oblique electric field). Note that in the case where a counter electrode (also referred to as a common electrode) is formed over the substrate over which the pixel electrode is formed, the electric field applied to the liquid crystal is a horizontal electric field.

  The scan line driver circuit 104 and the signal line driver circuit 106 are roughly divided into a logic circuit portion and a switch portion or a buffer portion. Although detailed structures of the scan line driver circuit 104 and the signal line driver circuit 106 are omitted, the scan line driver circuit 104 and the signal line driver circuit 106 include transistors.

  Note that a transistor included in one or both of the scan line driver circuit 104 and the signal line driver circuit 106 can be formed using the formation process of the transistor 103. That is, one or both of the scan line driver circuit 104 and the signal line driver circuit 106 can be provided over the substrate over which the transistor 103 and the pixel electrode 121 are provided. In this manner, when one or both of the scan line driver circuit 104 and the signal line driver circuit 106 are formed over the substrate, the number of components of the semiconductor device can be reduced and manufacturing cost can be reduced.

  In addition, a transistor included in one or both of the scan line driver circuit 104 and the signal line driver circuit 106 is an enhancement type instead of a depletion type in order to operate the scan line driver circuit 104 and the signal line drive circuit 106 accurately. A transistor is preferable. For this reason, it is significant that the transistor 103 is an enhancement type transistor.

  As described above, since the storage capacitor 105 has a light-transmitting property, the storage capacitor 105 can be formed large (in a large area) in a region other than a portion where the transistor 103 of the pixel 101 is formed. Therefore, the semiconductor device illustrated in FIG. 1 is a semiconductor device in which the charge capacity is increased while increasing the aperture ratio. In addition, the semiconductor device has excellent display quality. For example, in the semiconductor device which is one embodiment of the present invention, when the pixel density is 300 ppi (pixel per inch) or more (for example, about 300 ppi to 330 ppi), the pixel aperture ratio is 50% or more, and further the pixel aperture ratio is The aperture ratio of the pixels can be set to 55% or more, and further to 60% or more. Another embodiment of the present invention is a semiconductor device in which the pixel aperture ratio is higher than that of a conventional semiconductor device.

  Here, a method for driving a semiconductor device which is one embodiment of the present invention is described. Since the semiconductor device which is one embodiment of the present invention includes the storage capacitor 105 having a MOS capacitor structure, an oxide that functions as one electrode of the storage capacitor 105 in order to operate the storage capacitor 105 stably. The potential applied to the semiconductor film 119 (in other words, the capacitor line 115) is set as follows.

  The CV curve of the storage capacitor 105 is a CV curve having a threshold voltage of 0 V or more as shown in FIG. In order to operate the storage capacitor 105 stably during the period in which the storage capacitor 105 is operated, the storage capacitor 105 is sufficiently charged. For example, in the period, the potential difference (VP−VC) between the potential of the pixel electrode 121 of the storage capacitor 105 and the potential of the capacitor line 115 is V1 or more and V2 or less in FIG. A potential VC is applied (see FIGS. 2B and 2C).

  Further, during the period in which the storage capacitor 105 is operated, the potential of the pixel electrode 121 has amplitudes in the plus direction and the minus direction in accordance with a signal input to the signal line 109. Specifically, it fluctuates in the positive and negative directions with the center potential of the video signal as a reference. Therefore, in order to set the potential difference (VP−VC) to be greater than or equal to V1 and less than or equal to V2 in this period, the potential (VC) of the capacitor line 115 (oxide semiconductor film 119) is changed from a low potential of the pixel electrode 121 to a storage capacitor. What is necessary is just to set it as the electric potential lowered by the threshold voltage of 105 or more (see FIG. 3). In FIG. 3, the lowest potential among the potentials supplied to the scanning line 107 is GVss, and the highest potential is GVdd.

  In other words, in order to operate the storage capacitor 105, the potential difference between the pixel electrode 121 and the capacitor line 115 (oxide semiconductor film 119) is a threshold value of the storage capacitor 105 during the period in which the storage capacitor 105 is operated. It only needs to be higher than the voltage.

  In addition, since the threshold voltage of the storage capacitor 105 is equal to the threshold voltage of the transistor 103, the potential of the capacitor line 115 (the oxide semiconductor film 119) is set lower than the threshold voltage of the transistor 103. Just keep it. Thus, the oxide semiconductor film 119 can be kept in a conductive state during the period in which the storage capacitor 105 is operated, and the storage capacitor 105 can be operated stably.

  As described above, in a semiconductor device including a storage capacitor including a light-transmitting semiconductor film, a light-transmitting conductive film, and a light-transmitting insulating film by using the driving method of one embodiment of the present invention. The storage capacitor can be operated stably over time.

  Further, the transistor 103 is an enhancement type transistor, and the storage capacitor 105 is formed by using a process for forming the transistor 103 which is an enhancement type transistor. Therefore, the voltage range necessary for driving the storage capacitor in the semiconductor device which is one embodiment of the present invention is formed using a depletion-type transistor and a depletion-type transistor forming process. The voltage range is narrower than that required for driving a storage capacitor formed using an oxide semiconductor film with increased carrier density. Therefore, with one embodiment of the present invention, power consumption of the semiconductor device can be reduced.

<Top structure and cross-sectional structure of semiconductor device>
Next, a specific structure of the semiconductor device will be described. Here, the pixel 101 will be described as an example. A top view of the pixel 101 is shown in FIG. Note that in FIG. 4, some components of the semiconductor device (e.g., the liquid crystal element 108) are omitted for clarity.

  In FIG. 4, the scanning line 107 is provided so as to extend in a direction substantially orthogonal to the signal line 109 (left and right direction in the figure). The signal line 109 is provided so as to extend in a direction substantially perpendicular to the scanning line 107 (vertical direction in the figure). The capacitor line 115 is provided so as to extend in a direction parallel to the scanning line 107. Note that the scan line 107 and the capacitor line 115 are electrically connected to the scan line driver circuit 104 (see FIG. 1A), and the signal line 109 is connected to the signal line driver circuit 106 (FIG. 1A). Is electrically connected.

  The transistor 103 is provided in a region where the scanning line 107 and the signal line 109 intersect. The transistor 103 includes at least an oxide semiconductor film 111 having a channel formation region, a gate electrode, a gate insulating film (not shown in FIG. 4), a source electrode, and a drain electrode.

  In addition, the scan line 107 includes a region functioning as a gate electrode of the transistor 103, and the signal line 109 includes a region functioning as a source electrode of the transistor 103. The conductive film 113 includes a region functioning as the drain electrode of the transistor 103 and is electrically connected to the pixel electrode 121 through the opening 117. In FIG. 4, the pixel electrode 121 is shown with hatching omitted.

  The region functioning as the gate electrode is a region overlapping with at least the oxide semiconductor film 111 in the scan line 107. The region functioning as the source electrode is a region overlapping with at least the oxide semiconductor film 111 in the signal line 109. The region functioning as the drain electrode is a region overlapping with at least the oxide semiconductor film 111 in the conductive film 113. Note that in the following description, the gate line of the transistor 103 may be referred to as the scanning line 107, and the source line of the transistor 103 may be referred to as the signal line 109 in some cases. The conductive film 113 is also referred to when referring to the drain electrode of the transistor 103.

  Further, the scanning line 107 has an end portion located outside the end portion of the semiconductor film in the top surface shape. For this reason, the scanning line 107 functions as a light shielding film that blocks light from a light source such as a backlight. As a result, the oxide semiconductor film 111 included in the transistor is not irradiated with light, so that variation in electrical characteristics of the transistor can be suppressed.

  The storage capacitor 105 is provided in a region surrounded by the scanning line 107 and the signal line 109. The storage capacitor 105 includes an oxide semiconductor film 119, a light-transmitting pixel electrode 121, and a light-transmitting insulating film (not illustrated in FIG. 4) formed over the transistor 103 as a dielectric film. It consists of and. Since the oxide semiconductor film 119, the pixel electrode 121 having a light-transmitting property, and the dielectric film each have a light-transmitting property, the storage capacitor 105 has a light-transmitting property. In addition, since the oxide semiconductor film 119 is in contact with the capacitor line 115 through the conductive film 125 provided in the opening 123, the storage capacitor 105 is electrically connected to the capacitor line 115.

  In the storage capacitor, the accumulated charge capacitance changes in accordance with the area where the pair of electrodes overlap. If the size of the pixel is reduced in order to increase the resolution, the size of the storage capacitor is reduced accordingly, and the charge capacity that can be stored is reduced. As a result, there is a possibility that the liquid crystal element cannot be operated sufficiently. Since the storage capacitor 105 has a light-transmitting property, the storage capacitor can be formed as large as possible (in a large area) in the pixel, and the storage capacitor can be formed over the entire range in which the liquid crystal element 108 operates. . As long as the charge capacity capable of sufficiently operating the liquid crystal element can be secured, the pixel density can be increased and the resolution can be increased.

  Here, characteristics of a transistor including an oxide semiconductor are described. A transistor including an oxide semiconductor is an n-channel transistor. In addition, carriers may be generated due to oxygen vacancies in the oxide semiconductor, which might reduce the electrical characteristics and reliability of the transistor. For example, the drain current may flow when the threshold voltage of the transistor fluctuates in the negative direction and the gate voltage is 0V. Thus, the drain current flowing when the gate voltage is 0 V is called normally-on characteristics. A transistor that can be regarded as having no drain current flowing when the gate voltage is 0 V is referred to as a normally-off characteristic.

  Therefore, when an oxide semiconductor film is used, it is preferable that defects included in the oxide semiconductor film, typically oxygen vacancies, be reduced as much as possible. For example, the spin density (corresponding to the defect density included in the oxide semiconductor film) of g value = 1.93 by the electron spin resonance method in which the direction of the magnetic field is applied in parallel to the film surface is detected by the measuring instrument. It is preferable to be reduced to the lower limit or lower. By reducing defects contained in the oxide semiconductor film, typically oxygen vacancies, as much as possible, the transistor can be prevented from being normally on, and the electrical characteristics and reliability of the semiconductor device can be improved. be able to.

  Variation in the threshold voltage of the transistor in the negative direction may be caused not only by oxygen vacancies but also by hydrogen (including hydrogen compounds such as water) contained in the oxide semiconductor film. Hydrogen contained in the oxide semiconductor film reacts with oxygen bonded to metal atoms to become water, and also forms defects (also referred to as oxygen vacancies) in a lattice from which oxygen is released (or a portion from which oxygen is released). To do. In addition, a part of hydrogen reacts with oxygen to generate electrons as carriers. Therefore, a transistor including an oxide semiconductor film containing hydrogen is likely to be normally on.

From the above, it is preferable that hydrogen be reduced as much as possible in the oxide semiconductor film 111 included in the transistor 103. Specifically, the hydrogen concentration obtained by secondary ion mass spectrometry (SIMS) in the oxide semiconductor film 111 is less than 5 × 10 ¹⁸ atoms / cm ³ , preferably 1 × 10 ¹⁸ atoms. / Cm ³ or less, more preferably 5 × 10 ¹⁷ atoms / cm ³ or less, and even more preferably 1 × 10 ¹⁶ atoms / cm ³ or less.

The oxide semiconductor film 111 has an alkali metal or alkaline earth metal concentration obtained by secondary ion mass spectrometry of 1 × 10 ¹⁸ atoms / cm ³ or less, preferably 2 × 10 ¹⁶ atoms / cm ³ or less. To. When an alkali metal and an alkaline earth metal are combined with an oxide semiconductor, carriers may be generated, and the off-state current of the transistor 103 may be increased.

In addition, when nitrogen is contained in the oxide semiconductor film 111, electrons as carriers are generated, the carrier density is increased, and the oxide semiconductor film 111 is likely to be n-type. As a result, a transistor including an oxide semiconductor film containing nitrogen is likely to be normally on. Therefore, in the oxide semiconductor film 111, nitrogen is preferably reduced as much as possible. For example, the nitrogen concentration is preferably 5 × 10 ¹⁸ atoms / cm ³ or less.

In addition, when a Group 14 element such as silicon and carbon is contained in an oxide semiconductor, electrons serving as carriers are generated, the carrier density is increased, and the oxide semiconductor is likely to be n-type. Therefore, in a transistor including an oxide semiconductor film, particularly at the interface between the gate insulating film 127 (not illustrated in FIG. 4) and the oxide semiconductor film 111, the silicon concentration obtained by secondary ion mass spectrometry is 3 × 10 ¹⁸ atoms / cm ³ or less, preferably 3 × 10 ¹⁷ atoms / cm ³ or less. Note that the carbon concentration obtained by secondary ion mass spectrometry at the interface is 3 × 10 ¹⁸ atoms / cm ³ or less, preferably 3 × 10 ¹⁷ atoms / cm ³ or less.

  From the above, by using the oxide semiconductor film 111 in which impurities (hydrogen, nitrogen, silicon, carbon, alkali metal, alkaline earth metal, or the like) are reduced as much as possible, the transistor 103 has normally-on characteristics. The off-state current of the transistor 103 can be extremely reduced. Therefore, one embodiment of the present invention is a semiconductor device with favorable electrical characteristics and a semiconductor device with excellent reliability. Note that a highly purified oxide semiconductor can be said to be an intrinsic or substantially intrinsic semiconductor.

The transistor 103 is an enhancement-type transistor, and the oxide semiconductor film 111 is an oxide semiconductor film that is not subjected to treatment for adding an impurity that increases conductivity in order to intentionally increase carrier density. Thus, the carrier density of the oxide semiconductor film 111 is 1 × 10 ¹⁷ / cm ³ or less, or 1 × 10 ¹⁶ / cm ³ or less, or 1 × 10 ¹⁵ / cm ³ or less, or 1 × 10 ^14. / Cm ³ or less, or 1 × 10 ¹³ / cm ³ or less.

  In addition, since the oxide semiconductor film 119 included in the storage capacitor 105 can be formed using the formation process of the oxide semiconductor film 111 included in the transistor 103, the carrier density of the oxide semiconductor film 119 is determined by the oxide semiconductor film. Since the carrier density is equal to 111, the carrier density of the oxide semiconductor film 119 is in the above range.

Note that low off-state current of a transistor including a highly purified oxide semiconductor film can be proved by various experiments. For example, even in an element having a channel width of 1 × 10 ⁶ μm and a channel length L of 10 μm, the off-state current is reduced when the voltage between the source electrode and the drain electrode (drain voltage) is in the range of 1V to 10V. Can be obtained, i.e., 1 × 10 ⁻¹³ A or less. In this case, it can be seen that the off-state current corresponding to the value divided by the channel width of the transistor is 100 zA / μm or less. Further, the off-state current was measured using a circuit in which the storage capacitor and the transistor are connected and the charge flowing into or out of the storage capacitor is controlled by the transistor. In this measurement, a highly purified oxide semiconductor film of the transistor was used for a channel formation region, and the off-state current of the transistor was measured from the change in the amount of charge per unit time of the storage capacitor. As a result, it was found that when the voltage between the source electrode and the drain electrode of the transistor is 3 V, an even lower off-current of several tens of yA / μm can be obtained. Therefore, a transistor including a highly purified oxide semiconductor film has extremely small off-state current.

  5 is a cross-sectional view taken along the alternate long and short dash line A1-A2 and between the alternate long and short dash line B1-B2.

  The cross-sectional structures between the alternate long and short dash line A1-A2 and between the alternate long and short dash line B1-B2 are as follows. A scan line 107 including a region functioning as a gate electrode and a capacitor line 115 are provided over the substrate 102. A gate insulating film 127 is provided over the scan line 107 and the capacitor line 115. An oxide semiconductor film 111 is provided over a region of the gate insulating film 127 that overlaps with the scan line 107. An oxide semiconductor film 119 is provided over the gate insulating film 127. A signal line 109 including a region functioning as a source electrode and a conductive film 113 including a region functioning as a drain electrode are provided over the oxide semiconductor film 111 and the gate insulating film 127. An opening 123 reaching the capacitor line 115 is provided in part of the gate insulating film 127 in contact with the capacitor line 115, and a conductive film 125 is provided over the opening 123, the gate insulating film 127, and the oxide semiconductor film 119. ing. An insulating film 129 functioning as a protective insulating film of the transistor 103 is formed over the gate insulating film 127, the signal line 109, the oxide semiconductor film 111, the conductive film 113, the conductive film 125, and the oxide semiconductor film 119. A film 131 and an insulating film 132 are provided. An opening 117 reaching the conductive film 113 is provided in the insulating film 129, the insulating film 131, and the insulating film 132, and a pixel electrode 121 is provided over the opening 117 and the insulating film 132. An alignment film 158 is provided over the pixel electrode 121 and the insulating film 132. Note that a base insulating film may be provided between the substrate 102, the scan line 107, the capacitor line 115, and the gate insulating film 127.

  The cross-sectional structure of the liquid crystal element 108 is as follows. A light shielding film 152 is provided at least in a region overlapping with the transistor 103 on a surface of the substrate 150 facing the substrate 102, and a counter electrode 154 that is a light-transmitting conductive film is provided so as to cover the light shielding film 152. An alignment film 156 is provided so as to cover the counter electrode. An alignment film 158 is provided over the pixel electrode 121 and the insulating film 132. An alignment film 158 is provided over the insulating film 132 and the pixel electrode 121 on the substrate 102 side. The liquid crystal 160 is provided in contact with the alignment film 156 and the alignment film 158 and is sandwiched between the substrate 102 and the substrate 150.

  Note that in the case where a semiconductor device that is one embodiment of the present invention is a liquid crystal display device, a light source such as a backlight, an optical member such as a polarizing plate (an optical substrate) provided on each of the substrate 102 side and the substrate 150 side, and the substrate 102 A sealing material or the like for fixing the substrate 150 is required, which will be described later.

  From the above, in the storage capacitor 105 described in this embodiment, one electrode of the pair of electrodes is the oxide semiconductor film 119, the other electrode of the pair of electrodes is the pixel electrode 121, and the pair of electrodes The dielectric films provided therebetween are the insulating film 129, the insulating film 131, and the insulating film 132.

  Details of the components of the cross-sectional structure will be described below.

  There is no particular limitation on the material of the substrate 102, but it is necessary for the substrate 102 to have at least heat resistance to withstand heat treatment performed in the manufacturing process of the semiconductor device. For example, there are a glass substrate, a ceramic substrate, a plastic substrate, and the like, and as the glass substrate, an alkali-free glass substrate such as barium borosilicate glass, aluminoborosilicate glass, or aluminosilicate glass may be used. A substrate that does not have translucency, such as a stainless alloy, can also be used. In that case, an insulating film is preferably provided on the substrate surface. Note that as the substrate 102, a quartz substrate, a sapphire substrate, a single crystal semiconductor substrate, a polycrystalline semiconductor substrate, a compound semiconductor substrate, an SOI (Silicon On Insulator) substrate, or the like can be used. Note that in the case where the semiconductor device which is one embodiment of the present invention is a transmissive liquid crystal display device, the substrate 102 is a light-transmitting substrate.

  The scan line 107 and the capacitor line 115 are preferably formed using a metal film in order to pass a large current. Typically, molybdenum (Mo), titanium (Ti), tungsten (W) tantalum (Ta), aluminum ( A single layer structure or a laminated structure using a metal material such as Al), copper (Cu), chromium (Cr), neodymium (Nd), scandium (Sc), or an alloy material containing them as a main component is provided.

  As an example of the scanning line 107 and the capacitor line 115, a single layer structure using aluminum containing silicon, a two layer structure in which titanium is stacked on aluminum, a two layer structure in which titanium is stacked on titanium nitride, and a structure on titanium nitride. Two-layer structure in which tungsten is laminated, two-layer structure in which tungsten is laminated on tantalum nitride, two-layer structure in which copper is laminated on a copper-magnesium-aluminum alloy, copper is laminated on titanium nitride, and tungsten is further formed thereon. There is a three-layer structure to form.

  Further, as a material for the scan line 107 and the capacitor line 115, a light-transmitting conductive material applicable to the pixel electrode 121 can be used. Note that in the case where the semiconductor device which is one embodiment of the present invention is a reflective display device, a conductive material (eg, a metal material) that does not transmit light can be used for the pixel electrode 121. In that case, a substrate that does not transmit light can be used as the substrate 102.

  Further, as a material of the scan line 107 and the capacitor line 115, a metal oxide containing nitrogen, specifically, an In—Ga—Zn-based oxide containing nitrogen, an In—Sn-based oxide containing nitrogen, or nitrogen In-Ga-based oxide containing Ni, In-Zn-based oxide containing nitrogen, Sn-based oxide containing nitrogen, In-based oxide containing nitrogen, and metal nitride films (InN, SnN, etc.) are used. be able to. These materials have a work function of 5 eV (electron volts) or more. By using such a metal oxide containing nitrogen as the scan line (gate electrode), the threshold voltage of the transistor 103 can be changed in the positive direction, and a transistor having a so-called normally-off characteristic can be realized. For example, when an In—Ga—Zn-based oxide containing nitrogen is used, at least a nitrogen concentration higher than that of the oxide semiconductor film 111, specifically, an In—Ga—Zn-based oxide with a nitrogen concentration of 7 atomic% or more is used. be able to.

  In the scanning line 107 and the capacitor line 115, it is preferable to use aluminum or copper which is a low resistance material. By using aluminum or copper, signal delay can be reduced and display quality can be improved. Note that aluminum has low heat resistance and is liable to cause defects due to hillocks, whiskers, or migration. In order to prevent migration of aluminum, it is preferable to stack a metal material having a melting point higher than that of aluminum, such as molybdenum, titanium, or tungsten, on the aluminum. In the case of using copper, it is preferable to stack a metal material having a melting point higher than that of copper, such as molybdenum, titanium, or tungsten, in order to prevent defects due to migration and diffusion of copper elements.

  4 and 5, the scan line 107 is preferably provided in a shape that allows the oxide semiconductor film 111 to be provided in the region of the scan line 107. As shown in FIG. 4, it is preferable that the oxide semiconductor film 111 protrude in a region where the oxide semiconductor film 111 is provided so that the oxide semiconductor film 111 can be provided inside the scan line 107. By doing in this way, the light (light of a light source such as a backlight in a liquid crystal display device) irradiated from the surface opposite to the surface on which the scanning line 107 of the substrate 102 is provided (the back surface of the substrate 102), Since the scan line 107 shields light, fluctuation or reduction in the electrical characteristics (eg, threshold voltage) of the transistor 103 can be suppressed.

  The gate insulating film 127 has a single-layer structure or a stacked layer using an insulating material such as silicon oxide, silicon oxynitride, silicon nitride oxide, silicon nitride, aluminum oxide, hafnium oxide, gallium oxide, or a Ga—Zn-based metal oxide. Provide with structure. Note that in order to improve the interface characteristics with the oxide semiconductor film 111, at least a region in contact with the oxide semiconductor film 111 in the gate insulating film 127 is preferably formed using an oxide insulating film.

  Further, by providing the gate insulating film 127 with an insulating film having a barrier property against oxygen, hydrogen, water, or the like, diffusion of oxygen contained in the oxide semiconductor film 111 to the outside, and from the outside to the oxide semiconductor film 111 Intrusion of hydrogen, water, etc. can be prevented. As an insulating film having a barrier property against oxygen, hydrogen, water, and the like, an aluminum oxide film, an aluminum oxynitride film, a gallium oxide film, a gallium oxynitride film, an yttrium oxide film, an yttrium oxynitride film, a hafnium oxide film, and hafnium oxynitride Examples include a film and a silicon nitride film.

As the gate insulating film 127, hafnium silicate (HfSiO _x ), hafnium silicate having nitrogen (HfSi _x O _y N _z ), hafnium aluminate having nitrogen (HfAl _x O _y N _z ), hafnium oxide, yttrium oxide, or the like By using the high-k material, the gate leakage current of the transistor 103 can be reduced.

  The gate insulating film 127 preferably has the following stacked structure. A silicon nitride film with a small amount of defects is provided as the first silicon nitride film, and a silicon nitride film with a small amount of hydrogen desorption and ammonia desorption is provided as the second silicon nitride film on the first silicon nitride film. A stacked structure in which any of the oxide insulating films applicable as the gate insulating film 127 is provided over the second silicon nitride film.

The second silicon nitride film has a hydrogen molecule desorption amount of less than 5 × 10 ²¹ molecules / cm ³ , preferably 3 × 10 ²¹ molecules / cm ³ or less, more preferably, in a temperature programmed desorption gas analysis method. 1 × 10 ²¹ molecules / cm ³ or less, and the desorption amount of ammonia molecules is less than 1 × 10 ²² molecules / cm ³ , preferably 5 × 10 ²¹ molecules / cm ³ or less, more preferably 1 × 10 ²¹ molecules / cm ^3. It is preferable to use a nitride insulating film having a size of cm ³ or less. By using the first silicon nitride film and the second silicon nitride film as part of the gate insulating film 127, the gate insulating film 127 has a small amount of defects and a small amount of hydrogen and ammonia desorbed. A film can be formed. As a result, the amount of hydrogen and nitrogen contained in the gate insulating film 127 to the oxide semiconductor film 111 can be reduced.

  Note that in a transistor including an oxide semiconductor, when a trap state (also referred to as an interface state) exists in the interface between the oxide semiconductor film and the gate insulating film or in the gate insulating film, variation in threshold voltage of the transistor, Typically, the threshold voltage varies in the negative direction, and the cause of an increase in the subthreshold coefficient (S value) indicating the gate voltage required for the drain current to change by an order of magnitude when the transistor is turned on. It becomes. As a result, there is a problem that the electrical characteristics vary from transistor to transistor. Therefore, by using a silicon nitride film with a small amount of defects as a gate insulating film and by providing an oxide insulating film in a region in contact with the oxide semiconductor film 111, a negative shift in threshold voltage is reduced. , Increase in S value can be suppressed.

  The thickness of the gate insulating film 127 is 5 nm to 400 nm, preferably 10 nm to 300 nm, more preferably 50 nm to 250 nm.

  The oxide semiconductor film 111 and the oxide semiconductor film 119 can have an amorphous structure, a single crystal structure, or a polycrystalline structure. The thickness of the oxide semiconductor film 111 is 1 nm to 100 nm, more preferably 1 nm to 50 nm, more preferably 1 nm to 30 nm, and still more preferably 3 nm to 20 nm.

The oxide semiconductor film 111 and the oxide semiconductor film 119 are formed using the same metal element.
As an oxide semiconductor that can be used for the oxide semiconductor film 111, an energy gap is 2 eV or more, preferably 2.5 eV or more, more preferably 3 eV or more. In this manner, off-state current of the transistor 103 can be reduced by using an oxide semiconductor with a wide energy gap.

  An oxide semiconductor that can be used for the oxide semiconductor film 111 is preferably a metal oxide containing at least indium (In) or zinc (Zn). Or it is preferable that both In and Zn are included. In addition, in order to reduce variation in electrical characteristics of the transistor including the oxide semiconductor, it is preferable to include one or more stabilizers together with the oxide semiconductor.

  Examples of the stabilizer include gallium (Ga), tin (Sn), hafnium (Hf), aluminum (Al), and zirconium (Zr). Other stabilizers include lanthanoids such as lanthanum (La), cerium (Ce), praseodymium (Pr), neodymium (Nd), samarium (Sm), europium (Eu), gadolinium (Gd), terbium (Tb). ), Dysprosium (Dy), holmium (Ho), erbium (Er), thulium (Tm), ytterbium (Yb), lutetium (Lu), and the like.

  As an oxide semiconductor that can be used for the oxide semiconductor film 111 and the oxide semiconductor film 119, for example, an oxide semiconductor includes indium-zinc oxide, tin oxide, zinc oxide, and an In—Zn-based oxide that includes two kinds of metals. Oxide, Sn-Zn oxide, Al-Zn oxide, Zn-Mg oxide, Sn-Mg oxide, In-Mg oxide, In-Ga oxide, three kinds of metals In—Ga—Zn-based oxide (also referred to as IGZO), In—Al—Zn-based oxide, In—Sn—Zn-based oxide, Sn—Ga—Zn-based oxide, Al— Ga-Zn oxide, Sn-Al-Zn oxide, In-Hf-Zn oxide, In-Zr-Zn oxide, In-Ti-Zn oxide, In-Sc-Zn oxide , In-Y-Zn-based oxide, In-La-Z Oxide, In—Ce—Zn oxide, In—Pr—Zn oxide, In—Nd—Zn oxide, In—Sm—Zn oxide, In—Eu—Zn oxide, In -Gd-Zn oxide, In-Tb-Zn oxide, In-Dy-Zn oxide, In-Ho-Zn oxide, In-Er-Zn oxide, In-Tm-Zn oxide Oxides, In-Yb-Zn-based oxides, In-Lu-Zn-based oxides, In-Sn-Ga-Zn-based oxides containing four types of metals, In-Hf-Ga-Zn-based oxides An oxide, an In—Al—Ga—Zn-based oxide, an In—Sn—Al—Zn-based oxide, an In—Sn—Hf—Zn-based oxide, or an In—Hf—Al—Zn-based oxide is used. it can.

  Here, the In—Ga—Zn-based oxide means an oxide containing In, Ga, and Zn as main components, and there is no limitation on the ratio of In, Ga, and Zn. Moreover, metal elements other than In, Ga, and Zn may be contained.

Alternatively, a material represented by InMO ₃ (ZnO) _m (m> 0) may be used as the oxide semiconductor. Note that M represents one metal element or a plurality of metal elements selected from Ga, Fe, Mn, and Co, or the above-described element as a stabilizer.

  For example, In: Ga: Zn = 1: 1: 1 (= 1/3: 1/3: 1/3), In: Ga: Zn = 2: 2: 1 (= 2/5: 2/5: 1) / 5), or an In—Ga—Zn-based metal oxide with an atomic ratio of In: Ga: Zn = 3: 1: 2 (= 1/2: 1/6: 1/3) can be used. Alternatively, In: Sn: Zn = 1: 1: 1 (= 1/3: 1/3: 1/3), In: Sn: Zn = 2: 1: 3 (= 1/3: 1/6: 1) / 2) or In: Sn: Zn = 2: 1: 5 (= 1/4: 1/8: 5/8) atomic ratio In—Sn—Zn-based metal oxide may be used. Note that the atomic ratio of the metal elements contained in the metal oxide includes a variation of plus or minus 20% of the above atomic ratio as an error.

  However, the present invention is not limited to these, and those having an appropriate atomic ratio may be used depending on required semiconductor characteristics and electrical characteristics (field effect mobility, threshold voltage, variation, etc.). In order to obtain the required semiconductor characteristics, it is preferable that the carrier density, impurity concentration, defect density, atomic ratio of metal element to oxygen, interatomic distance, density, and the like are appropriate. For example, high field-effect mobility can be obtained relatively easily with an In—Sn—Zn-based oxide. However, field-effect mobility can be increased by reducing the defect density in the bulk also in the case of using an In—Ga—Zn-based oxide.

  As the oxide semiconductor film 119, an oxide semiconductor that can be used for the oxide semiconductor film 111 can be used. In addition, since the oxide semiconductor film 111 can be formed while the oxide semiconductor film 111 can be formed, the oxide semiconductor film 119 includes a metal element of the oxide semiconductor included in the oxide semiconductor film 111.

  The insulating film 129 functioning as a protective insulating film of the transistor 103 and the dielectric film of the storage capacitor 105, the insulating film 131, and the insulating film 132 are insulating films using materials applicable to the gate insulating film 127. In particular, the insulating film 129 and the insulating film 131 are preferably oxide insulating films, and the insulating film 132 is preferably a nitride insulating film. In addition, when the insulating film 132 is a nitride insulating film, impurities such as hydrogen and water can be prevented from entering the transistor 103 (particularly, the oxide semiconductor film 111) from the outside. Note that the insulating film 129 may not be provided.

In addition, one or both of the insulating film 129 and the insulating film 131 is preferably an oxide insulating film containing more oxygen than oxygen that satisfies the stoichiometric composition. Thus, oxygen can be prevented from being desorbed from the oxide semiconductor film 111, and oxygen contained in the oxygen-excess region can be moved to the oxide semiconductor film 111, so that oxygen vacancies can be reduced. Become. For example, by using an oxide insulating film in which the amount of released oxygen molecules measured by temperature programmed desorption gas analysis (hereinafter referred to as TDS analysis) is 1.0 × 10 ¹⁸ molecules / cm ³ or more, oxides can be obtained. Oxygen vacancies contained in the semiconductor film 111 can be reduced. Note that one or both of the insulating film 129 and the insulating film 131 may be an oxide insulating film in which a region (oxygen-excess region) containing oxygen in excess of the stoichiometric composition partially exists. The oxygen-excess region is present at least in a region overlapping with the oxide semiconductor film 111, so that desorption of oxygen from the oxide semiconductor film 111 is prevented and the oxygen contained in the oxygen-excess region is reduced. It is possible to reduce oxygen deficiency.

  In the case where the insulating film 131 is an oxide insulating film containing more oxygen than that in the stoichiometric composition, the insulating film 129 is preferably an oxide insulating film that transmits oxygen. In the insulating film 129, all the oxygen that has entered the insulating film 129 from the outside does not pass through the insulating film 129, and some oxygen remains in the insulating film 129. Further, there is oxygen which is contained in the insulating film 129 in advance and moves from the insulating film 129 to the outside. Therefore, the insulating film 129 is preferably an oxide insulating film having a large oxygen diffusion coefficient.

In addition, since the insulating film 129 is in contact with the oxide semiconductor film 111, the insulating film 129 is preferably an oxide insulating film that not only transmits oxygen but also can reduce the interface state density with the oxide semiconductor film 111. For example, the insulating film 129 is preferably an oxide insulating film whose defect density in the film is lower than that of the insulating film 131. Specifically, the spin density of g value = 2.001 (E′-center) by electron spin resonance measurement is 3.0 × 10 ¹⁷ spins / cm ³ or less, preferably 5.0 × 10 ¹⁶ spins / cm ^3. The following oxide insulating films. Note that the spin density of g value = 2.001 measured by electron spin resonance corresponds to the abundance of dangling bonds contained in the insulating film 129.

  The thickness of the insulating film 129 can be 5 nm to 150 nm, preferably 5 nm to 50 nm, preferably 10 nm to 30 nm. The thickness of the insulating film 131 can be greater than or equal to 30 nm and less than or equal to 500 nm, preferably greater than or equal to 150 nm and less than or equal to 400 nm.

  In addition, the insulating film 129 provided over the oxide semiconductor film 111 is an oxide insulating film that transmits oxygen and can reduce the interface state density with the oxide semiconductor film 111, and the insulating film 131 has an oxygen-excess region. By using an oxide insulating film containing oxygen or an oxide insulating film containing more oxygen than that in the stoichiometric composition, oxygen can be easily supplied to the oxide semiconductor film 111 from the oxide semiconductor film 111. Oxygen can be prevented from being released and oxygen contained in the insulating film 131 can be moved to the oxide semiconductor film 111 so that oxygen vacancies contained in the oxide semiconductor film 111 can be compensated. As a result, the transistor 103 can be prevented from being normally on.

Note that in the case where one or both of the insulating film 129 and the insulating film 131 is an oxide insulating film containing nitrogen such as silicon oxynitride or silicon nitride oxide, the nitrogen concentration obtained from SIMS is equal to or higher than the SIMS detection lower limit of 3 × 10 ^20. It is preferably less than atoms / cm ³ , preferably 1 × 10 ¹⁸ atoms / cm ³ or more and 1 × 10 ²⁰ atoms / cm ³ or less. Thus, the amount of nitrogen transferred to the oxide semiconductor film 111 included in the transistor 103 can be reduced. Further, by doing so, the amount of defects in the oxide insulating film itself containing nitrogen can be reduced.

  In the case where the insulating film 132 is a nitride insulating film, one or both of the insulating film 129 and the insulating film 131 is preferably an insulating film having a barrier property against nitrogen. For example, a dense oxide insulating film can have a barrier property against nitrogen. Specifically, an etching rate when 0.5 wt% hydrofluoric acid is used at 25 ° C. is 10 nm / min or less. A certain oxide insulating film is preferable.

As the insulating film 132, a nitride insulating film with a low hydrogen content can be provided. As the nitride insulating film, for example, the amount of released hydrogen molecules measured by TDS analysis is less than 5.0 × 10 ²¹ / cm ³ , preferably less than 3.0 × 10 ²¹ / cm ³ , More preferably, the nitride insulating film is less than 1.0 × 10 ²¹ / cm ³ .

  The nitride insulating film is useful as a protective insulating film of the transistor 103 because it has excellent step coverage.

  The insulating film 132 has a thickness that can exhibit a function of suppressing entry of impurities such as hydrogen and water from the outside. For example, the thickness can be 50 nm to 200 nm, preferably 50 nm to 150 nm, and more preferably 50 nm to 100 nm.

  Further, when a nitride insulating film is used as the insulating film 132 provided over the insulating film 131, entry of impurities such as hydrogen and water into the oxide semiconductor film 111 from the outside can be suppressed. Further, by providing a nitride insulating film with a low hydrogen content as the insulating film 132, variation in electrical characteristics of the transistor 103 can be suppressed.

Further, a silicon oxide film formed by a CVD method using an organosilane gas may be provided between the insulating film 131 and the insulating film 132. The silicon oxide film is useful as a protective insulating film of the transistor 103 because it has excellent step coverage. The silicon oxide film can be provided with a thickness greater than or equal to 300 nm and less than or equal to 600 nm. Examples of the organic silane gas include ethyl silicate (TEOS: chemical formula Si (OC ₂ H ₅ ) ₄ ), tetramethylsilane (TMS: chemical formula Si (CH ₃ ) ₄ ), tetramethylcyclotetrasiloxane (TMCTS), and octamethylcyclotetrasiloxane. Use of silicon-containing compounds such as (OMCTS), hexamethyldisilazane (HMDS), triethoxysilane (SiH (OC ₂ H ₅ ) ₃ ), trisdimethylaminosilane (SiH (N (CH ₃ ) ₂ ) ₃ ) it can.

  The pixel electrode 121 is formed using a light-transmitting conductive film. The light-transmitting conductive film includes indium tin oxide, indium oxide including tungsten oxide, indium zinc oxide including tungsten oxide, indium oxide including titanium oxide, indium tin oxide including titanium oxide, and indium zinc. A light-transmitting conductive material such as oxide or indium tin oxide to which silicon oxide is added is provided.

  As the substrate 150, a base material applicable to the substrate 102 can be used.

  The light shielding film 152 is also referred to as a black matrix, and is provided to suppress light leakage of a light source such as a backlight in a liquid crystal display device, or to suppress a decrease in contrast due to color mixing that occurs when color display is performed using a color filter. It is done. The light shielding film 152 can be provided using a general purpose one. For example, examples of the light-shielding material include metals and organic resins containing pigments. Note that the light-blocking film 152 may be provided in a region other than the pixel portion 100 such as the scan line driver circuit 104 and the signal line driver circuit 106 (see FIG. 1) in addition to the region overlapping with the transistor 103.

  In the pixel portion 100, a colored film having a function of transmitting light having a predetermined wavelength may be provided between the light shielding films provided in each pixel. Furthermore, an overcoat film may be provided between the light shielding film and the colored film and the counter electrode.

  The counter electrode 154 is provided using a material that can be used for the pixel electrode 121 as appropriate.

  The alignment film 156 and the alignment film 158 can be provided using a widely used material such as polyamide.

  As the liquid crystal 160, a thermotropic liquid crystal, a low molecular liquid crystal, a polymer liquid crystal, a polymer dispersed liquid crystal, a ferroelectric liquid crystal, an antiferroelectric liquid crystal, or the like can be used. These liquid crystal materials exhibit a cholesteric phase, a smectic phase, a cubic phase, a chiral nematic phase, an isotropic phase, and the like depending on conditions.

  Alternatively, the liquid crystal 160 may be a liquid crystal exhibiting a blue phase for which an alignment film is not used. The blue phase is one of the liquid crystal phases. When the temperature of the cholesteric liquid crystal is increased, the blue phase appears immediately before the transition from the cholesteric phase to the isotropic phase. Since the blue phase appears only in a narrow temperature range, a liquid crystal composition mixed with a chiral agent is used to improve the temperature range. Note that since the alignment film is formed using an organic resin, and the organic resin contains hydrogen, water, or the like, the electrical characteristics of the transistor of the semiconductor device which is one embodiment of the present invention may be reduced. Thus, by using a blue phase for the liquid crystal 160, a semiconductor device which is one embodiment of the present invention can be manufactured without using an organic resin, and a highly reliable semiconductor device can be obtained.

  Note that the structure of the liquid crystal element 108 can be changed as appropriate based on the display mode of the liquid crystal element 108, such as deformation of the shape of the pixel electrode 121, the counter electrode 154, and the like, and formation of protrusions called ribs.

<Method for Manufacturing Semiconductor Device>
Next, a method for manufacturing the semiconductor device will be described with reference to FIGS.

  First, the scan line 107 and the capacitor line 115 are formed on the substrate 102, the insulating film 126 to be processed later on the gate insulating film 127 is formed so as to cover the scan line 107 and the capacitor line 115, and the scan line 107 of the insulating film 126 is formed. The oxide semiconductor film 111 is formed in a region overlapping with the oxide semiconductor film 119, and the oxide semiconductor film 119 is formed so as to overlap with a region where the pixel electrode 121 is formed later (see FIG. 6A).

  The scan line 107 and the capacitor line 115 can be formed by forming a conductive film using any of the above materials, forming a mask over the conductive film, and processing using the mask. For the conductive film, various film formation methods such as an evaporation method, a CVD method, a sputtering method, and a spin coating method can be used. Note that there is no particular limitation on the thickness of the conductive film, and the thickness can be determined in consideration of the formation time, desired resistivity, and the like. For example, the mask can be a resist mask formed by a first photolithography process. The conductive film can be processed by one or both of dry etching and wet etching.

  The insulating film 126 can be formed using a material that can be used for the gate insulating film 127 by various film formation methods such as a CVD method or a sputtering method. In the case where gallium oxide is used for the gate insulating film 127, the insulating film 126 can be formed using a MOCVD (Metal Organic Chemical Vapor Deposition) method.

  The oxide semiconductor film 111 and the oxide semiconductor film 119 are formed using the above-described oxide semiconductors by forming an oxide semiconductor film, forming a mask over the oxide semiconductor film, and processing using the mask. Can be formed. Therefore, the oxide semiconductor film 111 and the oxide semiconductor film 119 are formed using the same metal element. The oxide semiconductor film can be formed by a sputtering method, a coating method, a pulsed laser deposition method, a laser ablation method, or the like. By using the printing method, the oxide semiconductor film 111 and the oxide semiconductor film 119 which are separated from each other can be directly formed over the gate insulating film 127. In the case where the oxide semiconductor film is formed by a sputtering method, an RF power supply device, an AC power supply device, a DC power supply device, or the like can be used as appropriate as a power supply device for generating plasma. As the sputtering gas, a rare gas (typically argon), oxygen, or a mixed gas of a rare gas and oxygen is used as appropriate. Note that in the case of a mixed gas of a rare gas and oxygen, it is preferable to increase the gas ratio of oxygen to the rare gas. The target may be selected as appropriate in accordance with the composition of the oxide semiconductor film to be formed. Note that the mask can be, for example, a resist mask formed by a second photolithography process. The oxide semiconductor film can be processed by one or both of dry etching and wet etching. Etching conditions (such as an etching gas, an etchant, etching time, and temperature) are set as appropriate depending on the material so that the film can be etched into a desired shape.

  After the oxide semiconductor film 111 and the oxide semiconductor film 119 are formed, heat treatment is preferably performed so that the oxide semiconductor film 111 and the oxide semiconductor film 119 are dehydrogenated or dehydrated. The temperature of the heat treatment is typically 150 ° C. or higher and lower than the substrate strain point, preferably 200 ° C. or higher and 450 ° C. or lower, more preferably 300 ° C. or higher and 450 ° C. or lower. Note that the heat treatment may be performed on the oxide semiconductor film 111 and the oxide semiconductor film 119 before being processed into the oxide semiconductor film 119.

  In the heat treatment, the heat treatment apparatus is not limited to an electric furnace, and may be a device that heats an object to be processed by heat conduction or heat radiation from a medium such as a heated gas. For example, a rapid thermal annealing (RTA) device such as a GRTA (Gas Rapid Thermal Anneal) device or an LRTA (Lamp Rapid Thermal Anneal) device can be used. The LRTA apparatus is an apparatus that heats an object to be processed by radiation of light (electromagnetic waves) emitted from a lamp such as a halogen lamp, a metal halide lamp, a xenon arc lamp, a carbon arc lamp, a high pressure sodium lamp, or a high pressure mercury lamp. The GRTA apparatus is an apparatus that performs heat treatment using a high-temperature gas.

  The heat treatment may be performed in an atmosphere of nitrogen, oxygen, ultra-dry air (air with a water content of 20 ppm or less, preferably 1 ppm or less, preferably 10 ppb or less), or a rare gas (such as argon or helium). . Note that it is preferable that hydrogen, water, and the like be not contained in the nitrogen, oxygen, ultra-dry air, or the rare gas. After heating in an inert gas atmosphere, heating may be performed in an oxygen atmosphere. The processing time is 3 minutes to 24 hours.

  Note that in the case where a base insulating film is provided between the substrate 102, the scan line 107, the capacitor line 115, and the gate insulating film 127, the base insulating film includes silicon oxide, silicon oxynitride, silicon nitride, silicon nitride oxide, and oxide. It can be formed using gallium, hafnium oxide, yttrium oxide, aluminum oxide, aluminum oxynitride, or the like. Note that when the base insulating film is formed using silicon nitride, gallium oxide, hafnium oxide, yttrium oxide, aluminum oxide, or the like, impurities from the substrate 102, typically alkali metal, water, hydrogen, or the like are emitted from the oxide semiconductor film 111. Can be prevented from diffusing. The base insulating film can be formed by a sputtering method or a CVD method.

  Next, after an opening 123 reaching the capacitor line 115 is formed in the insulating film 126 to form the gate insulating film 127, the signal line 109 including the source electrode of the transistor 103, the conductive film 113 including the drain electrode of the transistor 103, oxidation A conductive film 125 that electrically connects the physical semiconductor film 119 and the capacitor line 115 is formed (see FIG. 6B).

  The opening 123 can be formed by forming a mask through a third photolithography process and processing using the mask so that part of the region overlapping with the capacitor line 115 of the insulating film 126 is exposed. Note that the mask and the processing can be performed in the same manner as the scan line 107 and the capacitor line 115.

  The signal line 109, the conductive film 113, and the conductive film 125 are formed using a material that can be used for the signal line 109, the conductive film 113, and the conductive film 125, and over the conductive film, a fourth photolithography process is performed. It can be formed by forming a mask and processing using the mask. The mask and the processing can be performed in the same manner as the scan line 107 and the capacitor line 115. Note that after the signal line 109 and the conductive film 113 are formed, the surface of the oxide semiconductor film 111 is washed, so that variation in electrical characteristics of the transistor 103 can be reduced. For example, a diluted phosphoric acid solution can be used, and specifically, a phosphoric acid solution in which 85% phosphoric acid is diluted 100 times can be used.

  Next, the insulating film 128 is formed over the oxide semiconductor film 111, the oxide semiconductor film 119, the signal line 109, the conductive film 113, the conductive film 125, and the gate insulating film 127, and the insulating film 130 is formed over the insulating film 128. Then, the insulating film 133 is formed over the insulating film 130 (see FIG. 7A). Note that the insulating film 128, the insulating film 130, and the insulating film 133 are preferably formed in succession. In this manner, impurities can be prevented from entering the interfaces of the insulating film 128, the insulating film 130, and the insulating film 133.

  The insulating film 128 can be formed using a material that can be used for the insulating film 129 by various film formation methods such as a CVD method or a sputtering method. The insulating film 130 can be formed using a material that can be used for the insulating film 131. The insulating film 133 can be formed using a material that can be used for the insulating film 132.

  In the case where an oxide insulating film that can reduce the interface state density with the oxide semiconductor film 111 is used as the insulating film 129, the insulating film 128 can be formed using the following formation conditions. Note that the case where a silicon oxide film or a silicon oxynitride film is formed as the oxide insulating film is described here. The formation conditions are as follows: a substrate placed in a evacuated processing chamber of a plasma CVD apparatus is held at 180 ° C. or higher and 400 ° C. or lower, more preferably 200 ° C. or higher and 370 ° C. or lower. The conditions are such that the deposition gas and the oxidizing gas are introduced, the pressure in the processing chamber is set to 20 Pa to 250 Pa, more preferably 40 Pa to 200 Pa, and high frequency power is supplied to the electrode provided in the processing chamber.

  Typical examples of the deposition gas containing silicon include silane, disilane, trisilane, and fluorinated silane. Examples of the oxidizing gas include oxygen, ozone, dinitrogen monoxide, and nitrogen dioxide.

  Note that the amount of hydrogen contained in the insulating film 128 (insulating film 129) can be reduced by increasing the amount of oxidizing gas with respect to the deposition gas containing silicon by 100 times or more, and the insulating film 128 ( Dangling bonds contained in the insulating film 129) can be reduced. Since oxygen moving from the insulating film 130 (insulating film 131) may be trapped by dangling bonds included in the insulating film 128 (insulating film 129), dangling included in the insulating film 128 (insulating film 129). When the bond is reduced, oxygen contained in the insulating film 130 (insulating film 131) can be efficiently transferred to the oxide semiconductor film 111, and oxygen vacancies contained in the oxide semiconductor film 111 can be reduced. Is possible. As a result, the amount of hydrogen mixed in the oxide semiconductor film 111 can be reduced and oxygen vacancies contained in the oxide semiconductor film 111 can be reduced.

In the case where the insulating film 131 is an oxide insulating film including an oxygen-excess region or an oxide insulating film containing more oxygen than the stoichiometric composition, the insulating film 130 can be formed using the following formation conditions. . Note that the case where a silicon oxide film or a silicon oxynitride film is formed as the oxide insulating film is described here. The formation conditions are as follows: a substrate placed in a evacuated processing chamber of a plasma CVD apparatus is held at 180 ° C. or higher and 260 ° C. or lower, more preferably 180 ° C. or higher and 230 ° C. or lower, and a source gas is introduced into the processing chamber. process pressure 100Pa or more 250Pa or less in the room Te, more preferably not more than 200Pa than 100Pa, the electrode provided in the processing chamber 0.17 W / cm ² or more 0.5 W / cm ² or less, more preferably 0.25 W / cm ² or more 0.35 W / cm ² or less of a high-frequency power is a condition to supply.

  The source gas for the insulating film 130 can be a source gas applicable to the formation of the insulating film 128.

  As the formation condition of the insulating film 130, by supplying high-frequency power having the above power density in the processing chamber at the above pressure, the decomposition efficiency of the source gas in plasma is increased, oxygen radicals are increased, and the source gas is oxidized. In addition, the oxygen content in the insulating film 130 is higher than the stoichiometric composition. However, when the substrate temperature is the above temperature, since the bonding force between silicon and oxygen is weak, part of oxygen is desorbed by heating. As a result, an oxide insulating film containing more oxygen than that in the stoichiometric composition and from which part of oxygen is released by heating can be formed. An insulating film 128 is provided over the oxide semiconductor film 111. Therefore, the insulating film 128 serves as a protective film for the oxide semiconductor film 111 in the step of forming the insulating film 130. As a result, even if the insulating film 130 is formed using high-frequency power with high power density, damage to the oxide semiconductor film 111 can be suppressed.

  Further, since the amount of oxygen desorbed by heating can be increased by increasing the thickness of the insulating film 130, the insulating film 130 is preferably provided thicker than the insulating film 128. By providing the insulating film 128, the coverage can be improved even when the insulating film 130 is provided thick.

  In the case where the insulating film 132 is formed using a nitride insulating film with a low hydrogen content, the insulating film 133 can be formed using the following formation conditions. Note that a case where a silicon nitride film is formed as the nitride insulating film is described here. The formation condition is that the substrate placed in the evacuated processing chamber of the plasma CVD apparatus is held at 80 ° C. or higher and 400 ° C. or lower, more preferably 200 ° C. or higher and 370 ° C. or lower, and a source gas is introduced into the processing chamber. The pressure in the processing chamber is set to 100 Pa to 250 Pa, preferably 100 Pa to 200 Pa, and high-frequency power is supplied to the electrodes provided in the processing chamber.

  As a source gas for the insulating film 133, a deposition gas containing silicon, nitrogen, and ammonia are preferably used. Typical examples of the deposition gas containing silicon include silane, disilane, trisilane, and fluorinated silane. Further, the flow rate of nitrogen is preferably 5 times to 50 times, preferably 10 times to 50 times the ammonia flow rate. Note that by using ammonia as a source gas, decomposition of a deposition gas containing silicon and nitrogen can be promoted. This is because ammonia is dissociated by plasma energy or thermal energy, and the energy generated by the dissociation contributes to the decomposition of the bonds of the deposition gas molecules including silicon and the bonds of the nitrogen molecules. By doing so, a silicon nitride film having a low hydrogen content and capable of suppressing entry of impurities such as hydrogen and water from the outside can be formed.

  Note that in the case where a silicon oxide film formed by a CVD method using an organosilane gas is provided between the insulating film 131 and the insulating film 132, the silicon oxide film is formed by the CVD method using the above-described organic silane gas. Form on top.

  At least after the insulating film 130 is formed, heat treatment is performed, so that oxygen contained in the insulating film 128 or the insulating film 130 is transferred to at least the oxide semiconductor film 111, so that oxygen vacancies in the oxide semiconductor film 111 are reduced. Note that the heat treatment can be performed as appropriate with reference to details of heat treatment for dehydrogenation or dehydration of the oxide semiconductor film 111 and the oxide semiconductor film 119.

  One of the preferable formation procedures of the transistor 103 is to form an oxide insulating film that contains more oxygen than the stoichiometric composition and part of oxygen is released by heating as the insulating film 130. Then, after the insulating film 130 is formed, heat treatment is performed at 350 ° C., and a silicon oxide film is formed by the CVD method in which the above-described organosilane gas is used and the substrate temperature is kept at 350 ° C. It is to form a nitride insulating film having a low hydrogen content at a temperature of ° C.

  Next, after a mask is formed in a region overlapping with the conductive film 113 of the insulating film 128, the insulating film 130, and the insulating film 133 by a fifth photolithography step, the insulating film 128, the insulating film 130, and the insulating film 133 are etched. Then, an opening 117 reaching the conductive film 113 is formed, and an insulating film 129, an insulating film 131, and an insulating film 132 are formed (see FIG. 7B). Next, the pixel electrode 121 is formed over the opening 117 and the insulating film 132 (see FIG. 5).

  The opening 117 can be formed in the same manner as the opening 123. The pixel electrode 121 is formed using the materials listed above by forming a conductive film in contact with the conductive film 113 through the opening 117, forming a mask over the conductive film by a sixth photolithography step, and processing using the mask. Can be formed. Note that the mask and the processing can be performed in the same manner as the scan line 107 and the capacitor line 115.

  Next, an alignment film 158 is formed over the insulating film 132 and the pixel electrode 121. In addition, a light shielding film 152 is formed over the substrate 150. Further, the counter electrode 154 is formed so as to cover the light shielding film 152, and the alignment film 156 is formed over the counter electrode 154. The liquid crystal 160 is provided over the alignment film 158, the substrate 150 is provided over the substrate 102 so that the alignment film 156 is in contact with the liquid crystal 160, and the substrate 102 and the substrate 150 are fixed with a sealant (not shown).

  The alignment film 156 and the alignment film 158 can be formed using the above-described materials by appropriately using various film formation methods such as a spin coating method and a printing method.

  The light-shielding film 152 can be formed by forming a film by a sputtering method using the materials listed above and processing using a mask.

  The counter electrode 154 can be formed using a material that can be used for the pixel electrode 121 by various film formation methods such as a CVD method and a sputtering method.

  The liquid crystal 160 can be provided directly on the alignment film 158 by a dispenser method (drop method). Alternatively, the liquid crystal 160 may be injected using a capillary phenomenon after the substrate 102 and the substrate 150 are bonded to each other. The liquid crystal 160 is preferably subjected to a rubbing process for the alignment film 156 and the alignment film 158 in order to facilitate alignment.

  Through the above steps, a semiconductor device which is one embodiment of the present invention can be manufactured (see FIG. 5).

<Modification 1>
In the semiconductor device of one embodiment of the present invention, the connection between the oxide semiconductor film functioning as one electrode included in the storage capacitor and the capacitor line can be changed as appropriate. For example, in order to further increase the aperture ratio, a structure in which a semiconductor film is in direct contact with a capacitor line without a conductive film can be employed. A specific example of this structure will be described with reference to FIGS.

  Hereinafter, in the drawings showing the modification examples, the substrate 150, the light shielding film 152, the counter electrode 154, the alignment film 156, the alignment film 158, and the liquid crystal 160 are omitted for the sake of clarity. In the drawings showing the modification examples, the reference numerals used in FIG. 4 or 5 are used as appropriate. In the following modified example, only differences from the structure shown in FIGS. 4 and 5 will be described.

  A specific example of this structure will be described with reference to FIGS. FIG. 8 is a top view of the pixel 101, and FIG. 9A is a cross-sectional view taken along the alternate long and short dash line A1-A2 and between the alternate long and short dash line B1-B2.

  In the pixel 101 illustrated in FIGS. 8 and 9, the oxide semiconductor film 119 functioning as one electrode of the storage capacitor 145 is in direct contact with the capacitor line 115 through the opening 143. As in the storage capacitor 105 illustrated in FIGS. 4 and 5, the oxide semiconductor film 119 and the capacitor line 115 are in direct contact with each other without the conductive film 125, and the conductive film 125 serving as a light-blocking film is not formed. The aperture ratio can be further increased. 6A, the oxide semiconductor films 111 and 119 may be formed after the opening for exposing the capacitor line 115 is formed before the oxide semiconductor films 111 and 119 are formed.

  In FIG. 9, the opening 143 is provided only on the capacitor line 115. However, as shown in FIG. 10, a gate insulating film 127 is formed so that a part of the capacitor line 115 and the substrate 102 are exposed. The oxide semiconductor film 119 may be formed over the capacitor line 115 and the substrate 102 so that the area where the oxide semiconductor film 119 is in contact with the capacitor line 115 may be increased. 6A, before forming the oxide semiconductor films 111 and 119, after forming the gate insulating film 127 so that parts of the capacitor line 115 and the substrate 102 are exposed, the oxide semiconductor is formed. The films 111 and 119 may be formed. As a result, the aperture ratio can be increased, the conductivity of the oxide semiconductor film 119 is increased, and the oxide semiconductor film 119 can be easily turned on, so that the storage capacitor 146 can easily function. Can do.

<Modification 2>
In the semiconductor device of one embodiment of the present invention, the connection between the oxide semiconductor film functioning as one electrode included in the storage capacitor and the capacitor line can be changed as appropriate. For example, in order to reduce the contact resistance between the semiconductor film and the conductive film, the conductive film can be provided in contact with the outer periphery of the semiconductor film. A specific example of this structure will be described with reference to FIGS. 11 is a top view of the pixel 101 having this structure, and FIG. 12A is a cross-sectional view taken along the dashed-dotted line A1-A2 and between the dashed-dotted line B1-B2 in FIG. FIG. 12 is a cross-sectional view taken along one-dot chain line C1-C2 in FIG.

  In the pixel 101 illustrated in FIGS. 11 and 12, the conductive film 167 is in contact with the outer periphery of the oxide semiconductor film 119 and is in contact with the capacitor line 115 through the opening 123. The conductive film 167 is provided so as to cover an end portion of the oxide semiconductor film 119. The conductive film 167 can be formed using a process for forming the signal line 109, the conductive film 113, and the conductive film 125. Therefore, since the conductive film 167 may have a light shielding property, it is preferably formed in a loop shape. Note that as the contact area between the conductive film 167 and the oxide semiconductor film 119 increases, the conductivity of the oxide semiconductor film 119 increases and the oxide semiconductor film 119 can be easily turned on; thus, the storage capacitor It easily functions as one electrode of 165.

  In addition, in the pixel 101 illustrated in FIGS. 11 and 12, the oxide semiconductor film 119 and the capacitor line 115 are in contact with the conductive film 167, so that the shape of the oxide semiconductor film 119 can be changed as appropriate.

  The conductive film 167 may be provided in contact with the oxide semiconductor film 119 in a state where the loop-shaped portion is separated.

<Modification 3>
In the semiconductor device of one embodiment of the present invention, the connection between the oxide semiconductor film functioning as one electrode included in the storage capacitor and the capacitor line can be changed as appropriate. For example, as in the pixel 101 illustrated in FIGS. 13 and 14, the capacitor line 175 can be formed by using a process of forming the signal line 109.

  13 is a top view of the pixel 101 having this structure, and FIG. 14 is a cross-sectional view taken along the alternate long and short dash line A1-A2, between the alternate long and short dash line B1-B2, and between the alternate long and short dash line D1-D2.

  The capacitor line 175 is provided to extend in a direction parallel to the signal line 109. Note that the signal line 109 and the capacitor line 175 are electrically connected to the signal line driver circuit 106 (see FIG. 1A).

  In the pixel 101 illustrated in FIGS. 13 and 14, there is a region where the oxide semiconductor film 119 and the pixel electrode 121 overlap with each other through the insulating film 129, the insulating film 131, and the insulating film 132 provided over the oxide semiconductor film 119. , The holding capacity 174 is obtained.

  In the case where the capacitor line is extended in a direction parallel to the signal line 109 like the capacitor line 175, the shape of the pixel is compared with a side parallel to the signal line 109 like the pixel 101 shown in FIG. It is preferable that the side parallel to the scanning line 107 has a longer shape. This is because the area where the pixel electrode 121 and the capacitor line 175 overlap is reduced as compared with the case where the pixel has a longer side parallel to the signal line 109 than the side parallel to the scanning line 107. This is because the aperture ratio can be improved.

<Modification 4>
In the semiconductor device that is one embodiment of the present invention, one electrode and the capacitor line included in the storage capacitor can be a semiconductor film (specifically, an oxide semiconductor film). A specific example will be described with reference to FIG. Note that here, only the oxide semiconductor film 198 which is different from the oxide semiconductor film 119 and the capacitor line 115 described with reference to FIGS. FIG. 15 is a top view of the pixel 101 of this modification example. In the pixel 101 shown in FIG. 15, an oxide semiconductor film 198 that also serves as one electrode of the storage capacitor 197 and a capacitor line is provided. The oxide semiconductor film 198 has a region extending in a direction parallel to the signal line 109, and the region functions as a capacitor line. In the oxide semiconductor film 198, a region overlapping with the pixel electrode 121 functions as one electrode of the storage capacitor 197. Note that the oxide semiconductor film 198 can be formed by using the step of forming the oxide semiconductor film 111 included in the transistor 103 provided in the pixel 101 illustrated in FIGS.

  The oxide semiconductor film 198 can be provided as one oxide semiconductor film so as to overlap with the scan line 107 in each pixel 101. In other words, the oxide semiconductor film 198 can be provided as a continuous oxide semiconductor film without being separated in all the pixels 101 in one row.

  In the case where the oxide semiconductor film 198 is provided as a continuous oxide semiconductor film without being separated from each other in all the pixels 101 in one row, the oxide semiconductor film 198 overlaps with the scan line 107; Due to the influence of the change, it may not function as one electrode of the capacitor line and the storage capacitor 197. Therefore, as illustrated in FIG. 15, the oxide semiconductor film 198 is provided separately in each pixel 101. In addition, the oxide semiconductor film 198 which is provided apart is preferably electrically connected using a conductive film 199 which can be formed using the formation process of the signal line 109 and the conductive film 113.

  In FIG. 15, the region functioning as a capacitor line of the oxide semiconductor film 198 extends in a direction parallel to the signal line 109, but the region functioning as a capacitor line extends in a direction parallel to the scan line 107. It may be a structure. Note that in the case where the oxide semiconductor film 198 has a structure in which a region functioning as a capacitor line extends in a direction parallel to the scan line 107, the oxide semiconductor film 111 and the oxide semiconductor film 198 in the transistor 103 and the storage capacitor 197. It is necessary to provide an insulating film between the signal line 109 and the conductive film 113 for electrical isolation.

  From the above, by providing the oxide semiconductor film as one electrode and a capacitor line of the storage capacitor provided in the pixel as in the pixel 101 illustrated in FIG. 15, the aperture ratio of the pixel can be improved.

<Modification 5>
In addition, in the pixel 101 described as the modification, the parasitic capacitance generated between the pixel electrode 121 and the conductive film 113 or the parasitic capacitance generated between the pixel electrode 121 and the conductive film 167 is reduced. An organic insulating film can be provided in a region where the phenomenon occurs. In other words, the organic insulating film can be partially provided in the pixel 101.

  As the organic insulating film, a photosensitive or non-photosensitive organic resin can be used. For example, an acrylic resin, a benzocyclobutene resin, an epoxy resin, a siloxane resin, or the like can be used. As the organic insulating film, polyamide can be used.

  In order to partially provide the organic insulating film, after the insulating film is formed using the materials listed above, it may be necessary to process the insulating film. The method for forming the organic insulating film is not particularly limited, and can be appropriately selected depending on the material to be used. For example, spin coating, dip coating, spray coating, droplet discharge method (inkjet method), screen printing, offset printing, and the like can be applied. In addition, by using a photosensitive organic resin as the organic insulating film, a resist mask is unnecessary when forming the organic insulating film, and the process can be simplified.

<Modification 6>
In the semiconductor device that is one embodiment of the present invention, the structure of the capacitor line can be changed as appropriate. This structure will be described with reference to FIG. Note that here, the capacitor line 115 is different from the capacitor line 115 described in FIG. 4 in that the capacitor line is located between two adjacent pixels.

  FIG. 16 is a top view of the pixel 401_1 and the pixel 401_2 which are adjacent to each other in the extending direction of the signal line 409.

  The scanning line 407_1 and the scanning line 407_2 are provided so as to be parallel to each other and extend in a direction substantially orthogonal to the signal line 109. A capacitor line 415 is provided between the scan line 407_1 and the scan line 407_2 in parallel with the scan line 407_1 and the scan line 407_2. Note that the capacitor line 415 is connected to the storage capacitor 405_1 provided in the pixel 401_1 and the storage capacitor 405_2 provided in the pixel 401_2. Top surface shapes of the pixel 401_1 and the pixel 401_2 and arrangement positions of the components are symmetric with respect to the capacitor line 415.

  The pixel 401_1 is provided with a transistor 403_1, a pixel electrode 421_1 connected to the transistor 403_1, and a storage capacitor 405_1.

  The transistor 403_1 is provided in a region where the scan line 407_1 and the signal line 409 intersect. The transistor 403_1 includes at least an oxide semiconductor film 411_1 having a channel formation region, a gate electrode, a gate insulating film (not illustrated in FIG. 16), a source electrode, and a drain electrode. Note that in the scan line 407_1, the region overlapping with the oxide semiconductor film 411_1 functions as the gate electrode of the transistor 403_1. In the signal line 409, a region overlapping with the oxide semiconductor film 411_1 functions as a source electrode of the transistor 403_1. In the conductive film 413_1, the region overlapping with the oxide semiconductor film 411_1 functions as the drain electrode of the transistor 403_1. The conductive film 413_1 and the pixel electrode 421_1 are connected to each other through the opening 417_1.

  The storage capacitor 405_1 is electrically connected to the capacitor line 415 through the conductive film 425 provided in the opening 423. The storage capacitor 405_1 is included in the transistor 403_1 as the oxide semiconductor film 419_1 formed of a light-transmitting oxide semiconductor, the pixel electrode 421_1 having a light-transmitting property, and a light-transmitting film, and has a light-transmitting property. It is composed of an insulating film (not shown in FIG. 16). That is, the storage capacitor 405_1 has a light-transmitting property.

  The pixel 401_2 is provided with a transistor 403_2 and a storage capacitor 405_2 connected to the transistor 403_2.

  The transistor 403_2 is provided in a region where the scan line 407_2 and the signal line 409 intersect. The transistor 403_2 includes at least an oxide semiconductor film 411_2 having a channel formation region, a gate electrode, a gate insulating film (not illustrated in FIG. 16), a source electrode, and a drain electrode. Note that in the scan line 407_2, the region overlapping with the oxide semiconductor film 411_2 functions as the gate electrode of the transistor 403_2. In the signal line 409, a region overlapping with the oxide semiconductor film 411_2 functions as a source electrode of the transistor 403_2. In the conductive film 413_2, a region overlapping with the oxide semiconductor film 411_2 functions as a drain electrode of the transistor 403_2. The conductive film 413_2 and the pixel electrode 421_2 are connected to each other through the opening 417_2.

  The storage capacitor 405_2 is electrically connected to the capacitor line 415 through the conductive film 425 provided in the opening 423, similarly to the storage capacitor 405_1. The storage capacitor 405_2 includes an oxide semiconductor film 419_2 formed using an oxide semiconductor, a pixel electrode 421_2, and an insulating film (not illustrated in FIG. 16) included in the transistor 403_2 as a dielectric film. . Since the oxide semiconductor film 419_2, the pixel electrode 421_2, and the dielectric film each have a light-transmitting property, the storage capacitor 405_2 has a light-transmitting property.

  Note that the cross-sectional structures of the transistor 403_1 and the transistor 403_2, and the storage capacitor 405_1 and the storage capacitor 405_2 are the same as those of the transistor 103 and the storage capacitor 105 illustrated in FIGS. For the transistors 403_1 and 403_2, the storage capacitor 405_1, and the storage capacitor 405_2, reference numerals used for describing the transistor 103 and the storage capacitor 105 can be referred to as appropriate.

  In the top surface shape, it is possible to reduce the number of capacitor lines by providing a capacitor line between two adjacent pixels and connecting a storage capacitor included in each pixel and the capacitor line. As a result, the aperture ratio of the pixel can be further increased as compared with a structure in which a capacitor line is provided for each pixel.

<Modification 7>
In the semiconductor device that is one embodiment of the present invention, the shape of the transistor provided in the pixel is not limited to the shape of the transistor described in the above modification example, and can be changed as appropriate. For example, in the transistor, the source electrode included in the signal line 109 may be U-shaped (C-shaped, U-shaped, or horseshoe-shaped), and the transistor may have a shape surrounding the conductive film including the drain electrode. With such a shape, a sufficient channel width can be secured even when the area of the transistor is small, and the amount of drain current (also referred to as on-state current) that flows when the transistor is on can be increased. It becomes.

<Modification 8>
In the pixel 101, the pixel 401_1, and the pixel 401_2 described as the modification example, the oxide semiconductor film 111 includes the gate insulating film 127 and the signal line 109 including a region functioning as a source electrode and the conductive film including a region functioning as a drain electrode. The transistor located between the conductive film 113 and the conductive film 113 including the region functioning as the source electrode and the signal line 109 including the region functioning as the source electrode and the oxide semiconductor film 111 is used instead. A transistor located between the films 129 can be used.

<Modification 9>
In the pixel 101, the pixel 401_1, and the pixel 401_2 described as the modification example, a channel etch transistor is described as the transistor 103; however, a channel protection transistor can be used instead. By providing the channel protective film, the surface of the oxide semiconductor film 111 is not exposed to an etchant or an etching gas used in the formation process of the signal line 109 and the conductive film 113, and the oxide semiconductor film 111 is not formed between the oxide semiconductor film 111 and the channel protective film. Impurities can be reduced. As a result, leakage current flowing between the source electrode and the drain electrode of the transistor 103 can be reduced.

<Modification 10>
In the pixel 101, the pixel 401_1, and the pixel 401_2 described as the modification example, a transistor having one gate electrode is shown as the transistor 103. Instead, two gate electrodes facing each other with the oxide semiconductor film 111 interposed therebetween are used. A transistor having a dual gate transistor can be used.

  The dual-gate transistor includes a conductive film (also referred to as a back gate electrode) over the insulating film 129 of the transistor 103 described in this embodiment. The conductive film overlaps with at least the channel formation region of the oxide semiconductor film 111. For example, the conductive film can have a shape whose width in the channel length direction is shorter than the width between the signal line 109 including the region functioning as the source electrode of the transistor and the conductive film 113 functioning as the drain electrode. . By providing the conductive film in a position overlapping with the channel formation region of the oxide semiconductor film 111, the potential of the conductive film is preferably the lowest potential of the video signal input to the signal line 109. As a result, current flowing between the source electrode and the drain electrode can be controlled on the surface of the oxide semiconductor film 111 facing the conductive film, so that variation in electrical characteristics of the transistor can be reduced. Further, by providing the conductive film, the influence of a change in the surrounding electric field on the oxide semiconductor film 111 can be reduced, and the reliability of the transistor 103 can be improved.

  The conductive film can be formed using a material and a method similar to those of the scan line 107, the signal line 109, the pixel electrode 121, and the like. Further, the conductive film can be formed by using a process for forming the pixel electrode 121. As described above, a semiconductor device having a storage capacitor with a large charge capacity while increasing an aperture ratio by using a semiconductor film formed in the same formation process as the oxide semiconductor included in the transistor as one electrode of the storage capacitor Can be produced. In addition, a semiconductor device with excellent display quality can be obtained by increasing the aperture ratio.

  The transistor in the pixel is a transistor including an oxide semiconductor, and the oxide semiconductor film included in the transistor is an oxide semiconductor film in which oxygen vacancies are reduced and impurities such as hydrogen and nitrogen are reduced. Thus, a semiconductor device having good electrical characteristics can be obtained.

  Note that the structure and the like described in this embodiment can be combined as appropriate with any of the structures described in the other embodiments.

(Embodiment 2)
In this embodiment, one mode that can be applied to an oxide semiconductor film which is a semiconductor film in the transistor and the storage capacitor included in the semiconductor device described in the above embodiment will be described.

  The oxide semiconductor film is an amorphous oxide semiconductor, a single crystal oxide semiconductor, or a polycrystalline oxide semiconductor, and an oxide semiconductor having a crystal part (C Axis Crystalline Oxide Semiconductor: CAAC-OS). It is preferable to be configured.

  The CAAC-OS film is one of oxide semiconductor films having a plurality of crystal parts, and most of the crystal parts are large enough to fit in a cube whose one side is less than 100 nm. Therefore, the case where a crystal part included in the CAAC-OS film fits in a cube whose one side is less than 10 nm, less than 5 nm, or less than 3 nm is included. The CAAC-OS film is characterized by having a lower density of defect states than a microcrystalline oxide semiconductor film. Hereinafter, the CAAC-OS film is described in detail.

  When the CAAC-OS film is observed with a transmission electron microscope (TEM), a clear boundary between crystal parts, that is, a grain boundary (also referred to as a grain boundary) cannot be confirmed. Therefore, it can be said that the CAAC-OS film is unlikely to decrease in electron mobility due to crystal grain boundaries.

  When the CAAC-OS film is observed by TEM (cross-sectional TEM observation) from a direction substantially parallel to the sample surface, it can be confirmed that metal atoms are arranged in layers in the crystal part. Each layer of metal atoms has a shape reflecting unevenness of a surface (also referred to as a formation surface) or an upper surface on which the CAAC-OS film is formed, and is arranged in parallel with the formation surface or the upper surface of the CAAC-OS film. .

  On the other hand, when the CAAC-OS film is observed by TEM (planar TEM observation) from a direction substantially perpendicular to the sample surface, it can be confirmed that metal atoms are arranged in a triangular shape or a hexagonal shape in the crystal part. However, there is no regularity in the arrangement of metal atoms between different crystal parts.

  From the cross-sectional TEM observation and the planar TEM observation, it is found that the crystal part of the CAAC-OS film has orientation.

When structural analysis is performed on a CAAC-OS film using an X-ray diffraction (XRD) apparatus, for example, in the analysis of a CAAC-OS film having an InGaZnO ₄ crystal by an out-of-plane method, A peak may appear when the diffraction angle (2θ) is around 31 °. Since this peak is attributed to the (009) plane of the InGaZnO ₄ crystal, the CAAC-OS film crystal has c-axis orientation, and the c-axis is in a direction substantially perpendicular to the formation surface or the top surface. Can be confirmed.

On the other hand, when the CAAC-OS film is analyzed by an in-plane method in which X-rays are incident from a direction substantially perpendicular to the c-axis, a peak may appear when 2θ is around 56 °. This peak is attributed to the (110) plane of the InGaZnO ₄ crystal. In the case of a single crystal oxide semiconductor film of InGaZnO ₄ , when 2θ is fixed in the vicinity of 56 ° and analysis (φ scan) is performed while rotating the sample with the normal vector of the sample surface as the axis (φ axis), Six peaks attributed to the crystal plane equivalent to the (110) plane are observed. On the other hand, in the case of a CAAC-OS film, a peak is not clearly observed even when φ scan is performed with 2θ fixed at around 56 °.

  From the above, in the CAAC-OS film, the orientation of the a-axis and the b-axis is irregular between different crystal parts, but the c-axis is aligned, and the c-axis is a normal line of the formation surface or the top surface. It can be seen that the direction is parallel to the vector. Therefore, each layer of metal atoms arranged in a layer shape confirmed by the above-mentioned cross-sectional TEM observation is a plane parallel to the ab plane of the crystal.

  Note that the crystal part is formed when a CAAC-OS film is formed or when crystallization treatment such as heat treatment is performed. As described above, the c-axis of the crystal is oriented in a direction parallel to the normal vector of the formation surface or the top surface of the CAAC-OS film. Therefore, for example, when the shape of the CAAC-OS film is changed by etching or the like, the c-axis of the crystal may not be parallel to the normal vector of the formation surface or the top surface of the CAAC-OS film.

  Further, the crystallinity in the CAAC-OS film is not necessarily uniform. For example, in the case where the crystal part of the CAAC-OS film is formed by crystal growth from the vicinity of the top surface of the CAAC-OS film, the region near the top surface can have a higher degree of crystallinity than the region near the formation surface. is there. In addition, in the case where an impurity is added to the CAAC-OS film, the crystallinity of a region to which the impurity is added changes, and a region having a different degree of crystallinity may be formed.

Note that when the CAAC-OS film including an InGaZnO ₄ crystal is analyzed by an out-of-plane method, a peak may also appear when 2θ is around 36 ° in addition to the peak where 2θ is around 31 °. A peak at 2θ of around 36 ° indicates that a crystal having no c-axis alignment is included in part of the CAAC-OS film. The CAAC-OS film preferably has a peak at 2θ of around 31 ° and no peak at 2θ of around 36 °.

  There are three methods for forming the CAAC-OS.

  The first method is to form an oxide semiconductor film at a deposition temperature of 100 ° C. to 450 ° C. so that the c-axis of a crystal part included in the oxide semiconductor film is a normal vector of a formation surface or This is a method of forming crystal parts aligned in a direction parallel to the surface normal vector.

  The second method is to form a thin oxide semiconductor film and then perform heat treatment at 200 ° C. to 700 ° C. so that the c-axis of the crystal part included in the oxide semiconductor film is formed. This is a method of forming a crystal part aligned in a direction parallel to a surface normal vector or a surface normal vector.

  The third method is to form a first oxide semiconductor film with a small thickness, then perform heat treatment at 200 ° C. to 700 ° C., and further form a second oxide semiconductor film. In this method, the c-axis of the crystal part included in the oxide semiconductor film is formed in a direction parallel to the normal vector of the surface to be formed or the normal vector of the surface.

  A transistor in which a CAAC-OS is used for an oxide semiconductor film has little change in electrical characteristics due to irradiation with visible light or ultraviolet light. Thus, a transistor in which the CAAC-OS is used for the oxide semiconductor film has favorable reliability.

  The CAAC-OS is preferably formed by a sputtering method using a polycrystalline oxide semiconductor sputtering target. When ions collide with the sputtering target, the crystal region included in the sputtering target is cleaved from the ab plane, and may be separated as flat or pellet-like sputtering particles having a plane parallel to the ab plane. is there. In this case, the CAAC-OS can be formed by allowing the flat or pellet-like sputtered particles to reach the deposition surface while maintaining the crystalline state.

  In order to form the CAAC-OS, it is preferable to apply the following conditions.

  By reducing the mixing of impurities during film formation, the crystal state can be prevented from being broken by impurities. For example, the concentration of impurities (such as hydrogen, water, carbon dioxide, and nitrogen) existing in the deposition chamber may be reduced. Further, the impurity concentration in the deposition gas may be reduced. Specifically, a deposition gas having a dew point of −80 ° C. or lower, preferably −100 ° C. or lower is used.

  Further, by increasing the heating temperature (for example, substrate heating temperature) of the film formation surface during film formation, migration of the sputtering particles occurs after reaching the film formation surface. Specifically, the film formation is performed at a temperature of a deposition surface of 100 ° C. to 740 ° C., preferably 150 ° C. to 500 ° C. By increasing the temperature of the film formation surface during film formation, when flat or pellet-like sputtering particles reach the film formation surface, migration occurs on the film formation surface, and the flat surface of the sputtering particles Adheres to the film formation surface.

  In addition, it is preferable to reduce plasma damage during film formation by increasing the oxygen ratio in the film formation gas and optimizing electric power. The oxygen ratio in the deposition gas is 30% by volume or more, preferably 100% by volume.

  As an example of the sputtering target, an In—Ga—Zn—O compound target is described below.

In-Ga-Zn system which is polycrystalline by mixing InO _X powder, GaO _Y powder and ZnO _Z powder in a predetermined number of moles, and after heat treatment at a temperature of 1000 ° C to 1500 ° C. A metal oxide target is used. In addition, the said pressurization process may be performed while cooling (or standing to cool), and may be performed while heating. X, Y, and Z are arbitrary positive numbers. Here, the predetermined mole number ratio is, for example, 2: 2: 1, 8: 4: 3, 3: 1: 1, 1: 1: 1, 4 for InO _X powder, GaO _Y powder, and ZnO _Z powder. : 2: 3 or 3: 1: 2. In addition, what is necessary is just to change suitably the kind of powder, and the mol number ratio to mix with the sputtering target to produce.

  The oxide semiconductor film may have a structure in which a plurality of oxide semiconductor films are stacked. For example, the oxide semiconductor film is a stack of a first oxide semiconductor film and a second oxide semiconductor film, and the first oxide semiconductor film and the second oxide semiconductor film have different atomic ratio metals. An oxide may be used. For example, the first oxide semiconductor film uses one of an oxide containing two kinds of metals, an oxide containing three kinds of metals, and an oxide containing four kinds of metals, and the second oxide semiconductor film Alternatively, an oxide containing two kinds of metals different from the first oxide semiconductor film, an oxide containing three kinds of metals, or an oxide containing four kinds of metals may be used.

  The oxide semiconductor film may have a two-layer structure, the constituent elements of the first oxide semiconductor film and the second oxide semiconductor film may be the same, and the atomic ratio of the two may be different. For example, the atomic ratio of the first oxide semiconductor film is In: Ga: Zn = 3: 1: 2, and the atomic ratio of the second oxide semiconductor film is In: Ga: Zn = 1: 1: 1. It is good. The atomic ratio of the first oxide semiconductor film is In: Ga: Zn = 2: 1: 3, and the atomic ratio of the second oxide semiconductor film is In: Ga: Zn = 1: 3: 2. It is good. Note that the atomic ratio of each oxide semiconductor film includes a variation of plus or minus 20% of the atomic ratio described above as an error.

  At this time, an atomic ratio of In and Ga in the oxide semiconductor film on the side close to the gate electrode (channel side) of the first oxide semiconductor film and the second oxide semiconductor film may be In ≧ Ga. . The atomic ratio of In to Ga in the oxide semiconductor film far from the gate electrode (back channel side) is preferably In <Ga. With these stacked structures, a transistor with high field-effect mobility can be manufactured. On the other hand, the atomic ratio of In and Ga in the oxide semiconductor film on the side close to the gate electrode (channel side) is In <Ga, and the atomic ratio of In and Ga in the oxide semiconductor film on the back channel side is In ≧ Ga. By doing so, it is possible to reduce the amount of change in the threshold voltage due to the aging of the transistor and the reliability test.

  The first oxide semiconductor film with an atomic ratio of In: Ga: Zn = 1: 3: 2 is formed by sputtering using an oxide target with an atomic ratio of In: Ga: Zn = 1: 3: 2. Can be formed by law. The substrate temperature can be room temperature and the sputtering gas can be formed using argon or a mixed gas of argon and oxygen. The second oxide semiconductor film with an atomic ratio of In: Ga: Zn = 3: 1: 2 uses an oxide target with an atomic ratio of In: Ga: Zn = 3: 1: 2. The oxide semiconductor film can be formed in the same manner as the oxide semiconductor film 1.

  Alternatively, the oxide semiconductor film may have a three-layer structure, the constituent elements of the first oxide semiconductor film to the third oxide semiconductor film may be the same, and the atomic ratios thereof may be different. A structure in which the oxide semiconductor film has a three-layer structure is described with reference to FIGS.

In the transistor 297 illustrated in FIG. 17, a first oxide semiconductor film 299a, a second oxide semiconductor film 299b, and a third oxide semiconductor film 299c are stacked in this order from the gate insulating film 127 side. The material forming the first oxide semiconductor film 299a and the third oxide semiconductor film 299c is InM1 _x Zn _y O _z (x ≧ 1, y> 1, z> 0, M1 = Ga, Hf, and the like). Use materials that can be written. Note that in the case where Ga is included in the material forming the first oxide semiconductor film 299a and the third oxide semiconductor film 299c, the ratio of Ga to be included is large. Specifically, InM1 _X Zn _Y O _Z is used. If the material exceeds X = 10, powder may be generated during film formation, which is inappropriate. Note that in the transistor 297, the structures other than the first oxide semiconductor film 299a, the second oxide semiconductor film 299b, and the third oxide semiconductor film 299c are the same as those in the transistor described in the above embodiment (for example, implementation) The structure is the same as that of the transistor 103) described in Embodiment 1.

The material constituting the second oxide semiconductor film 299b _{is, InM2 x Zn y O z (} x ≧ 1, y ≧ x, z> 0, M2 = Ga, Sn , etc.) of a material that can be expressed in.

  A well-type structure in which the conduction band of the second oxide semiconductor film 299b is deepest from the vacuum level compared to the conduction band of the first oxide semiconductor film 299a and the conduction band of the third oxide semiconductor film 299c. The materials of the first, second, and third oxide semiconductor films are appropriately selected so as to configure the above.

Note that as described in Embodiment 1, silicon or carbon which is one of Group 14 elements in the oxide semiconductor film generates electrons as carriers and increases the carrier density. Therefore, when silicon or carbon is contained in the oxide semiconductor film, the oxide semiconductor film becomes n-type. Therefore, the silicon concentration and the carbon concentration contained in each oxide semiconductor film are 3 × 10 ¹⁸ / cm ³ or less, preferably 3 × 10 ¹⁷ / cm ³ or less. In particular, the second oxide serving as a carrier path in the first oxide semiconductor film 299a and the third oxide semiconductor film 299c so that a large amount of Group 14 element is not mixed into the second oxide semiconductor film 299b. It is preferable to sandwich or surround the semiconductor film 299b. In other words, the first oxide semiconductor film 299a and the third oxide semiconductor film 299c can also be referred to as barrier films that prevent a Group 14 element such as silicon or carbon from entering the second oxide semiconductor film 299b.

  For example, the atomic ratio of the first oxide semiconductor film 299a is In: Ga: Zn = 1: 3: 2, and the atomic ratio of the second oxide semiconductor film 299b is In: Ga: Zn = 3: 1. : 2 and the atomic ratio of the third oxide semiconductor film 299c may be In: Ga: Zn = 1: 1: 1. Note that the third oxide semiconductor film 299c can be formed by a sputtering method using an oxide target with an atomic ratio of In: Ga: Zn = 1: 1: 1.

  Alternatively, the first oxide semiconductor film 299a is an oxide semiconductor film with an atomic ratio of In: Ga: Zn = 1: 3: 2, and the second oxide semiconductor film 299b is formed with an atomic ratio of In. : Ga: Zn = 1: 1: 1 or In: Ga: Zn = 1: 3: 2 and the third oxide semiconductor film 299c has an atomic ratio of In: Ga: Zn = A three-layer structure of an oxide semiconductor film having a ratio of 1: 3: 2 may be employed.

  Since the constituent elements of the first oxide semiconductor film 299a to the third oxide semiconductor film 299c are the same, the second oxide semiconductor film 299b has a defect state at the interface with the first oxide semiconductor film 299a. There are few ranks (trap levels). Specifically, the defect level (trap level) is smaller than the defect level at the interface between the gate insulating film 127 and the first oxide semiconductor film 299a. Therefore, when the oxide semiconductor films are stacked as described above, the amount of variation in threshold voltage due to changes over time in the transistor and reliability tests can be reduced.

  Further, the well in which the conduction band of the second oxide semiconductor film 299b is deepest from the vacuum level compared to the conduction band of the first oxide semiconductor film 299a and the conduction band of the third oxide semiconductor film 299c. By appropriately selecting the materials of the first, second, and third oxide semiconductor films so as to form a mold structure, it is possible to increase the field effect mobility of the transistor and change the transistor over time. And the amount of fluctuation of the threshold voltage due to the reliability test can be reduced.

  Alternatively, oxide semiconductors having different crystallinities may be used for the first oxide semiconductor film 299a to the third oxide semiconductor film 299c. In other words, a single crystal oxide semiconductor, a polycrystalline oxide semiconductor, an amorphous oxide semiconductor, and a CAAC-OS may be combined as appropriate. In addition, when an amorphous oxide semiconductor is used for any one of the first oxide semiconductor film 299a to the third oxide semiconductor film 299c, internal stress and external stress of the oxide semiconductor film are relieved, Variations in the electrical characteristics of the transistor can be reduced, and variation in the threshold voltage due to aging of the transistor or a reliability test can be reduced.

  In addition, at least the second oxide semiconductor film 299b which can serve as a channel formation region is preferably a CAAC-OS. In addition, the oxide semiconductor film on the back channel side, in this embodiment, the third oxide semiconductor film 299c is preferably an amorphous oxide semiconductor or a CAAC-OS. With such a structure, variation in threshold voltage due to aging of the transistor or reliability test can be reduced.

  In the semiconductor device of one embodiment of the present invention, when the transistor 297 illustrated in FIG. 17 is applied to the transistor 103, the oxide semiconductor film 119 functioning as one electrode of the storage capacitor 105 is also the first oxide semiconductor film. A three-layer structure of 299a to the third oxide semiconductor film 299c is formed.

  In this case, the channel formation region of the transistor 297 that is a switching element of the pixel can be said to be the second oxide semiconductor film 299b. In the storage capacitor 105, it can be said that the first oxide semiconductor film 299 a to the third oxide semiconductor film 299 c function as one electrode of the storage capacitor 105.

  That is, in this structure, the channel formation region of the transistor which is a switching element of the pixel is provided on a surface different from the surface where the oxide semiconductor film functioning as one electrode of the storage capacitor is provided.

  Note that the structure and the like described in this embodiment can be combined as appropriate with any of the structures described in the other embodiments.

(Embodiment 3)
A semiconductor device (also referred to as a display device) having a display function can be manufactured using the transistor and the storage capacitor which are examples of the above embodiments. In addition, part or the whole of a driver circuit including a transistor can be formed over the same substrate as the pixel portion to form a system-on-panel. In this embodiment, an example of a display device using the transistor, which is an example of the above embodiment, will be described with reference to drawings.

  In FIG. 18A, a sealant 905 is provided so as to surround the pixel portion 902 provided over the first substrate 901 and is sealed with the second substrate 906. In FIG. 18A, a signal line formed of a single crystal semiconductor or a polycrystalline semiconductor over a separately prepared substrate in a region different from the region surrounded by the sealant 905 over the first substrate 901. A driver circuit 903 and a scanning line driver circuit 904 are mounted. In addition, various signals and potentials applied to the signal line driver circuit 903, the scan line driver circuit 904, or the pixel portion 902 are supplied from an FPC (Flexible Printed Circuit) 918a and an FPC 918b.

  18B and 18C, a sealant 905 is provided so as to surround the pixel portion 902 provided over the first substrate 901 and the scan line driver circuit 904. A second substrate 906 is provided over the pixel portion 902 and the scan line driver circuit 904. Therefore, the pixel portion 902 and the scan line driver circuit 904 are sealed together with the display element by the first substrate 901, the sealant 905, and the second substrate 906. In FIGS. 18B and 18C, a single crystal semiconductor or a polycrystalline semiconductor is provided over a separately prepared substrate in a region different from the region surrounded by the sealant 905 over the first substrate 901. A signal line driver circuit 903 formed in (1) is mounted. 18B and 18C, a variety of signals and potentials are supplied to the signal line driver circuit 903, the scan line driver circuit 904, or the pixel portion 902 from an FPC 918.

  18B and 18C illustrate an example in which the signal line driver circuit 903 is separately formed and mounted on the first substrate 901; however, the present invention is not limited to this structure. The scan line driver circuit may be separately formed and mounted, or only part of the signal line driver circuit or part of the scan line driver circuit may be separately formed and mounted.

  Note that a connection method of a driver circuit which is separately formed is not particularly limited, and a COG (Chip On Glass) method, a wire bonding method, a TAB (Tape Automated Bonding) method, or the like can be used. 18A illustrates an example in which the signal line driver circuit 903 and the scanning line driver circuit 904 are mounted by a COG method, and FIG. 18B illustrates an example in which the signal line driver circuit 903 is mounted by a COG method. FIG. 18C illustrates an example in which the signal line driver circuit 903 is mounted by a TAB method.

  The display device includes a panel in which the display element is sealed, and a module in which an IC including a controller is mounted on the panel.

  Note that the display device in this specification refers to an image display device or a display device. Further, it can function as a light source (including a lighting device) instead of a display device. In addition, a connector, for example, a module to which an FPC or TCP is attached, a module in which a printed wiring board is provided at the end of TCP, or a module in which an IC (integrated circuit) is directly mounted on a display element by a COG method is also included in the display device Shall be included.

  The pixel portion 902 and the scan line driver circuit 904 provided over the first substrate 901 include a plurality of transistors, and any of the transistors described in the above embodiments can be used.

  As a display element provided in the display device, a liquid crystal element (also referred to as a liquid crystal display element) or a light-emitting element (also referred to as a light-emitting display element) can be used. The light-emitting element includes, in its category, an element whose luminance is controlled by current or voltage, and specifically includes an organic EL (Electro Luminescence) element, an inorganic EL element, and the like. In addition, a display medium whose contrast is changed by an electric effect, such as electronic ink, can be used. FIG. 19 illustrates an example of a liquid crystal display device using a liquid crystal element as a display element.

  19 and 20 are cross-sectional views taken along one-dot chain line X1-X2 in FIG. 19 and 20, only part of the structure of the pixel portion is shown.

  19 and 20 is a vertical electric field liquid crystal display device. The liquid crystal display device includes a connection terminal electrode 915 and a terminal electrode 916, and the connection terminal electrode 915 and the terminal electrode 916 are electrically connected to a terminal included in the FPC 918 through an anisotropic conductive agent 919. .

  The connection terminal electrode 915 is formed using the same conductive film as the first electrode 930, and the terminal electrode 916 is formed using the same conductive film as the source and drain electrodes of the transistors 910 and 911.

  In addition, the pixel portion 902 and the scan line driver circuit 904 provided over the first substrate 901 include a plurality of transistors. The transistor 910 included in the pixel portion 902 and the transistor 911 included in the scan line driver circuit 904 are included. And are illustrated. Over the oxide semiconductor films included in the transistors 910 and 911, the insulating film 129, the insulating film 131, and the insulating film 924 corresponding to the insulating film 132 described in Embodiment 1 are provided. Note that the insulating film 923 is an insulating film functioning as a base film.

  In this embodiment, any of the transistors described in the above embodiments can be used as the transistor 910 and the transistor 911. In addition, a storage capacitor 926 is formed using the oxide semiconductor film 927, the insulating film 924, and the first electrode 930. Note that the oxide semiconductor film 927 is electrically connected to the capacitor line 929 through an electrode 928 formed in an opening formed in the gate insulating film 922. The capacitor line 929 is formed using the same conductive film as the scan line including a region which functions as the gate electrodes of the transistors 910 and 911. Note that here, the storage capacitor having the structure described in Embodiment 1 is illustrated as the storage capacitor 926, but a storage capacitor having a structure described in any of the other embodiments can be used as appropriate.

  Further, in the transistor 911 included in the scan line driver circuit 904, a conductive film 917 is provided over the insulating film 924 and in a position overlapping with the channel formation region of the oxide semiconductor film in FIG. Is shown. 19B, an insulating film 951 is provided over the insulating film 924, and a conductive film 917 is provided over the insulating film 951 so as to overlap with a channel formation region of the oxide semiconductor film. Is shown.

  The conductive film 917 can supply a potential and functions as a gate electrode of the transistor 911. That is, the transistor 911 is a dual gate transistor. Note that the conductive film 917 can be formed using the same conductive film as the first electrode 930. In addition, the conductive film 917 can have a shorter width in the channel length direction than the width between the source electrode and the drain electrode of the transistor 911.

  The transistor 911 included in the scan line driver circuit 904 is provided with the conductive film 917, so that variation in gate voltage (rising gate voltage) at which on-state current starts flowing at different drain voltages can be reduced. In addition, since the transistor 911 is provided with the conductive film 917, the current flowing between the source electrode and the drain electrode of the transistor 911 can be controlled in the region of the oxide semiconductor film on the conductive film 917 side. . Therefore, variation in electrical characteristics among a plurality of transistors included in the scan line driver circuit 904 can be reduced. In the transistor 911, variation in the threshold voltage of the transistor 911 is reduced by setting the potential of the conductive film 917 to the same potential as the lowest potential of the scan line driver circuit 904 or the same potential as the lowest potential. Therefore, reliability can be improved. Note that the lowest potential of the scan line driver circuit 904 refers to the lowest potential among potentials supplied when the scan line driver circuit 904 is operated. For example, in the case where the potential supplied when the scan line driver circuit 104 is operated is based on the potential of the source electrode of the transistor 911, the potential of the source electrode (Vss).

  In the transistor 911 included in the scan line driver circuit 904, if the insulating film 924 is thin, the electrical characteristics of the transistor 911 may vary due to the influence of the electric field from the conductive film 917 applied to the oxide semiconductor film. . Thus, by providing the insulating film 951 as illustrated in FIG. 19B, the influence of the electric field can be controlled and the electric characteristics of the transistor 911 can be improved.

  The insulating film 951 can be formed using a material that can be used for the insulating film 924. Further, an organic insulating film can be used as the insulating film 951. Examples of the organic insulating film include photosensitive and non-photosensitive organic resins. For example, an acrylic resin, a benzocyclobutene resin, an epoxy resin, or a siloxane resin can be used. As the organic insulating film, polyamide can be used. Note that a method for forming the organic insulating film is not particularly limited, and can be appropriately selected depending on a material to be used. For example, spin coating, dip coating, spray coating, droplet discharge method (inkjet method), screen printing, offset printing, and the like can be applied.

  The conductive film 917 also has a function of shielding an external electric field. That is, it also has a function (particularly an electrostatic shielding function against static electricity) that prevents an external electric field from acting on the inside (a circuit portion including a transistor). With the shielding function of the conductive film 917, the transistor 911 can suppress variation in electrical characteristics of the transistor due to the influence of an external electric field such as static electricity, and can improve reliability.

  Note that although the transistors included in the scan line driver circuit are illustrated in FIGS. 19A and 19B, the transistors included in the signal line driver circuit can be dual gate transistors like the transistor 911. By using a dual-gate transistor as the transistor included in the signal line driver circuit, the transistor has an effect similar to that of the transistor 911.

  From the above, the semiconductor device (display device) which is one embodiment of the present invention is a highly reliable semiconductor device.

  Next, a structure different from the vertical electric field liquid crystal display device illustrated in FIG. 19 will be described. Specifically, a horizontal electric field liquid crystal display device will be described with reference to FIGS. FIG. 20 illustrates an FFS (Fringe Field Switching) mode liquid crystal display device which is an example of a horizontal electric field method.

  In the liquid crystal display device illustrated in FIG. 20, the connection terminal electrode 915 is formed using the same material and the same process as the first electrode 940, and the terminal electrode 916 is the same material and the same as the source and drain electrodes of the transistors 910 and 911. It is formed in the process.

  In addition, the liquid crystal element 943 includes a first electrode 940, a second electrode 941, and a liquid crystal 908 that are formed over the insulating film 924. Note that the liquid crystal element 943 can have a structure similar to that of the storage capacitor 105 described in Embodiment 1. For the first electrode 940, the material shown for the first electrode 930 shown in FIG. 19 can be used as appropriate. The first electrode 940 has a comb shape, a staircase shape, a ladder shape, or the like as a planar shape. The second electrode 941 functions as a common electrode and can be formed in a manner similar to that of the oxide semiconductor film 119 described in Embodiment 1. An insulating film 924 is provided between the first electrode 940 and the second electrode 941.

  The second electrode 941 is connected to the common wiring 946 through the electrode 945. Note that the electrode 945 is formed using the same conductive film as the source electrode and the drain electrode of the transistors 910 and 911. The common wiring 946 is formed using the same material and the same process as the gate electrodes of the transistors 910 and 911. Note that although the storage capacitor described in Embodiment 1 is used as the liquid crystal element 943 here, the storage capacitor described in any of the other embodiments can be used as appropriate.

  Note that in the transistor 911 included in the scan line driver circuit 904 of the liquid crystal display device illustrated in FIG. 20, an insulating film 951 can be provided between the conductive film 917 and the insulating film 924 as in FIG.

  Here, in the transistor included in the semiconductor device (display device) which is one embodiment of the present invention, for example, a plurality of transistors included in the scan line driver circuit 904 include a wiring including a gate electrode and a source or drain electrode. A structure in which wiring is electrically connected by a conductive film will be described. 21A is a top view of the structure, and FIG. 21B is a cross-sectional view taken along the dashed-dotted line Y1-Y2 and between the dashed-dotted line Z1-Z2 in FIG.

  21A, the wiring 950 including the gate electrode of the transistor 911 and the wiring 952 including the source electrode of the transistor 911 are in contact with the conductive film 958 provided in the openings 954 and 956.

  21B, the cross-sectional structure is that the insulating film 923 is provided over the substrate 901, the wiring 950 is provided over the insulating film 923, and the gate insulating film 922 is provided over the wiring 950 and the insulating film 923. The wiring 952 is provided over the gate insulating film 922, and the insulating film 924 is provided over the gate insulating film 922 and the wiring 952. An opening 954 reaching the wiring 950 is provided in the gate insulating film 922 and the insulating film 924 in the region of the dashed-dotted line Y1-Y2, and an opening reaching the wiring 952 in the insulating film 924 in the region of the dashed-dotted line Z1-Z2. 956 is provided. A conductive film 958 is provided over the insulating film 924 and the openings 954 and 956.

  From the above, the wiring 950 including the gate electrode and the wiring 952 including the source or drain electrode are electrically connected by the conductive film 958.

  The conductive film 958 can be formed using the formation process of the conductive film 917 of the transistor 911. Note that in a plurality of transistors included in the scan line driver circuit 904, in the case where a wiring including a gate electrode and a wiring including a source electrode or a drain electrode are electrically connected by a conductive film, channel formation of the transistor is performed. A structure in which the conductive film is not provided in a position overlapping with the region is preferable.

  The openings 954 and 956 can be formed in a lump. Details are as follows. An insulating film processed into the gate insulating film 922 is formed over the wiring 950, a wiring 952 is formed over the insulating film, and an insulating film processed into the insulating film 924 is formed over the wiring 952. After that, a mask is formed over the insulating film 924 and processed using the mask, whereby the opening 954 and the opening 956 can be formed. A resist mask can be used as the mask. As the processing, dry etching can be used. When the wiring 950 is formed using a metal material or the like, the etching selectivity in the wiring 950 and the gate insulating film 922 can be increased, so that the opening 954 and the opening 956 can be collectively formed by the dry etching. .

  A transistor 910 provided in the pixel portion 902 is electrically connected to the display element.

  A liquid crystal element 913 which is a display element includes a first electrode 930, a second electrode 931, and a liquid crystal 908. Note that alignment films 932 and 933 are provided so as to sandwich the liquid crystal 908. The second electrode 931 is provided on the second substrate 906 side, and the first electrode 930 and the second electrode 931 overlap with each other with the liquid crystal 908 interposed therebetween. The liquid crystal element 913 described in Embodiment 1 can be referred to for the liquid crystal element 913. The first electrode 930 corresponds to the pixel electrode 121 described in Embodiment 1, the second electrode 931 corresponds to the counter electrode 154 described in Embodiment 1, and the liquid crystal 908 corresponds to that in Embodiment 1. The alignment film 932 corresponds to the liquid crystal 160 described, the alignment film 932 corresponds to the alignment film 158 described in Embodiment 1, and the alignment film 933 corresponds to the alignment film 156 described in Embodiment 1.

  In the first electrode 930 and the second electrode 931 (also referred to as a pixel electrode, a common electrode, a counter electrode, or the like) that applies voltage to the display element, the direction of light to be extracted, the place where the electrode is provided, and the electrode pattern What is necessary is just to select translucency or reflectivity by a structure.

  The first electrode 930 and the second electrode 931 can be formed using a material similar to that of the pixel electrode 121 and the counter electrode 154 described in Embodiment 1 as appropriate.

  The spacer 935 is a columnar spacer obtained by selectively etching the insulating film, and is provided to control the distance (cell gap) between the first electrode 930 and the second electrode 931. . A spherical spacer may be used.

  The first substrate 901 and the second substrate 906 are fixed by a sealant 905. As the sealant 905, an organic resin such as a thermosetting resin or a photocurable resin can be used. Further, the sealant 905 is in contact with the insulating film 924.

  In the semiconductor device (display device) which is one embodiment of the present invention, a light shielding film (black matrix), a polarizing member, a retardation member, an optical member (an optical substrate) such as an antireflection member, and the like are provided as appropriate. For example, circularly polarized light using a polarizing substrate and a retardation substrate may be used. Further, a backlight, a sidelight, or the like may be used as the light source.

  In addition, since the transistor is easily broken by static electricity or the like, it is preferable to provide a protective circuit for protecting the driving circuit. The protection circuit is preferably configured using a non-linear element.

  FIG. 22 illustrates an example in which a common connection portion (pad portion) for electrically connecting to the second electrode 931 provided on the substrate 906 is formed over the substrate 901 in the display device illustrated in FIGS. 18 and 19. Indicates.

  The common connection portion is disposed at a position overlapping the sealing material 925 for bonding the substrate 901 and the substrate 906 and is electrically connected to the second electrode 931 through conductive particles included in the sealing material 925. . Alternatively, a common connection portion is provided in a portion that does not overlap with the sealant 925 (excluding the pixel portion), and a paste containing conductive particles is provided separately from the sealant 925 so as to overlap the common connection portion. 931 may be electrically connected.

  FIG. 22A is a cross-sectional view of the common connection portion, and corresponds to IJ in the top view shown in FIG.

  The common potential line 975 is provided over the gate insulating film 922 and is formed using the same material and through the same process as the source electrode 971 or the drain electrode 973 of the transistor 910 illustrated in FIG.

  The common potential line 975 is covered with an insulating film 924, and the insulating film 924 has a plurality of openings at positions overlapping with the common potential line 975. This opening is formed in the same process as a contact hole that connects one of the source electrode 971 and the drain electrode 973 of the transistor 910 and the first electrode 930.

  Further, the common potential line 975 and the common electrode 977 are connected in the opening. The common electrode 977 is provided over the insulating film 924 and is formed using the same material and through the same process as the connection terminal electrode 915 and the first electrode 930 in the pixel portion.

  In this manner, the common connection portion can be manufactured in common with the manufacturing process of the switching element of the pixel portion 902.

  The common electrode 977 is an electrode that is in contact with conductive particles contained in the sealant, and is electrically connected to the second electrode 931 of the substrate 906.

  As shown in FIG. 22C, the common potential line 985 may be formed using the same material and the same process as the gate electrode of the transistor 910.

  In the common connection portion illustrated in FIG. 22C, the common potential line 985 is provided below the gate insulating film 922 and the insulating film 924, and the gate insulating film 922 and the insulating film 924 overlap with the common potential line 985. It has a plurality of openings. The opening is formed by etching the insulating film 924 in the same step as the contact hole connecting one of the source electrode 971 or the drain electrode 973 of the transistor 910 and the first electrode 930, and then selectively etching the gate insulating film 922. It is formed by doing.

  Further, the common potential line 985 and the common electrode 987 are connected in the opening. The common electrode 987 is provided over the insulating film 924 and is manufactured using the same material and through the same steps as the connection terminal electrode 915 and the first electrode 930 in the pixel portion.

  As described above, by using the oxide semiconductor film formed in the same formation process as the oxide semiconductor film included in the transistor as one electrode of the storage capacitor, the storage capacitor with a large charge capacity can be obtained while increasing the aperture ratio. A semiconductor device having the same can be manufactured. For example, also in the semiconductor device in this embodiment, when the pixel density is set to 300 ppi or more, the pixel aperture ratio is 50% or more, the pixel aperture ratio is 55% or more, and the pixel aperture ratio is 60%. This can be done. In addition, a semiconductor device with excellent display quality can be obtained by increasing the aperture ratio.

  In addition, since the oxide semiconductor film included in the transistor has reduced oxygen vacancies and impurities such as hydrogen and nitrogen, the semiconductor device according to one embodiment of the present invention has favorable electrical characteristics. It is.

  Note that the structure and the like described in this embodiment can be combined as appropriate with any of the structures described in the other embodiments.

(Embodiment 4)
The semiconductor device which is one embodiment of the present invention can be applied to a variety of electronic devices (including game machines). Examples of the electronic device include a television device (also referred to as a television or a television receiver), a monitor for a computer, a digital camera, a digital video camera, a digital photo frame, a mobile phone, a portable game machine, a portable information terminal, Sound reproducing devices, gaming machines (pachinko machines, slot machines, etc.), and game cases are listed. Examples of these electronic devices are illustrated in FIGS.

  FIG. 23A illustrates a table 9000 having a display portion. In the table 9000, a display portion 9003 is incorporated in a housing 9001, and an image can be displayed on the display portion 9003. Note that a structure in which the housing 9001 is supported by four legs 9002 is shown. In addition, the housing 9001 has a power cord 9005 for supplying power.

  The semiconductor device described in any of the above embodiments can be used for the display portion 9003. Therefore, display quality of the display portion 9003 can be improved.

  The display portion 9003 has a touch input function. By touching a display button 9004 displayed on the display portion 9003 of the table 9000 with a finger or the like, screen operation or information can be input. It is good also as a control apparatus which controls other household appliances by screen operation by enabling communication with household appliances or enabling control. For example, when a semiconductor device having an image sensor function is used, the display portion 9003 can have a touch input function.

  Further, the hinge of the housing 9001 can be used to stand the screen of the display portion 9003 perpendicular to the floor, which can be used as a television device. In a small room, if a television apparatus with a large screen is installed, the free space becomes narrow. However, if the display portion is built in the table, the room space can be used effectively.

  FIG. 23B illustrates a television device 9100. In the television device 9100, a display portion 9103 is incorporated in a housing 9101 and an image can be displayed on the display portion 9103. Note that here, a structure in which the housing 9101 is supported by a stand 9105 is illustrated.

  The television device 9100 can be operated with an operation switch included in the housing 9101 or a separate remote controller 9110. Channels and volume can be operated with an operation key 9109 provided in the remote controller 9110, and an image displayed on the display portion 9103 can be operated. The remote controller 9110 may be provided with a display portion 9107 for displaying information output from the remote controller 9110.

  A television device 9100 illustrated in FIG. 23B includes a receiver, a modem, and the like. The television apparatus 9100 can receive a general television broadcast by a receiver, and is connected to a wired or wireless communication network via a modem so that it can be unidirectional (sender to receiver) or bidirectional. It is also possible to perform information communication (between the sender and the receiver or between the receivers).

  The semiconductor device described in any of the above embodiments can be used for the display portions 9103 and 9107. Therefore, the display quality of the television device can be improved.

  FIG. 23C illustrates a computer 9200, which includes a main body 9201, a housing 9202, a display portion 9203, a keyboard 9204, an external connection port 9205, a pointing device 9206, and the like.

  The semiconductor device described in any of the above embodiments can be used for the display portion 9203. Therefore, the display quality of the computer 9200 can be improved.

  The display portion 9003 has a touch input function. By touching a display button displayed on the display portion 9003 of the table 9000 with a finger or the like, a screen operation or information can be input. It is good also as a control apparatus which controls other household appliances by screen operation by enabling communication with a product or enabling control. For example, when a semiconductor device having an image sensor function is used, the display portion 9003 can have a touch input function.

  Further, the hinge of the housing 9001 can be used to stand the screen of the display portion 9003 perpendicular to the floor, which can be used as a television device. In a small room, if a television apparatus with a large screen is installed, the free space becomes narrow. However, if the display portion is built in the table, the room space can be used effectively.

  24A and 24B illustrate a tablet terminal that can be folded. In FIG. FIG. 24A illustrates an open state in which a tablet terminal includes a housing 9630, a display portion 9631a, a display portion 9631b, a display mode switching switch 9034, a power switch 9035, a power saving mode switching switch 9036, and a fastener 9033. And an operation switch 9038.

  The semiconductor device described in any of the above embodiments can be used for the display portion 9631a and the display portion 9631b. Therefore, the display quality of the tablet terminal can be improved.

  Part of the display portion 9631 a can be a touch panel region 9632 a and data can be input when a displayed operation key 9638 is touched. Note that in the display portion 9631a, for example, a structure in which half of the regions have a display-only function and a structure in which the other half has a touch panel function is shown, but the structure is not limited thereto. The entire region of the display portion 9631a may have a touch panel function. For example, the entire surface of the display portion 9631a can display keyboard buttons to serve as a touch panel, and the display portion 9631b can be used as a display screen.

  Further, in the display portion 9631b, as in the display portion 9631a, part of the display portion 9631b can be a touch panel region 9632b. Further, a keyboard button can be displayed on the display portion 9631b by touching a position where the keyboard display switching button 9539 on the touch panel is displayed with a finger or a stylus.

  Touch input can be performed simultaneously on the touch panel region 9632a and the touch panel region 9632b.

  A display mode switching switch 9034 can switch the display direction such as vertical display or horizontal display, and can select switching between monochrome display and color display. The power saving mode change-over switch 9036 can optimize the display luminance in accordance with the amount of external light during use detected by an optical sensor built in the tablet terminal. The tablet terminal may include not only an optical sensor but also other detection devices such as a gyroscope, an acceleration sensor, and other sensors that detect inclination.

  FIG. 24A illustrates an example in which the display areas of the display portion 9631b and the display portion 9631a are the same, but there is no particular limitation, and one size may be different from the other size, and the display quality may be different. May be different. For example, one display panel may be capable of displaying images with higher definition than the other.

  FIG. 24B illustrates a closed state, in which the tablet terminal includes a housing 9630, a solar cell 9633, and a charge / discharge control circuit 9634. Note that FIG. 24B illustrates a structure including a battery 9635 and a DCDC converter 9636 as an example of the charge / discharge control circuit 9634.

  Note that since the tablet terminal can be folded in two, the housing 9630 can be closed when not in use. Accordingly, since the display portion 9631a and the display portion 9631b can be protected, a tablet terminal with excellent durability and high reliability can be provided from the viewpoint of long-term use.

  In addition, the tablet terminal shown in FIGS. 24A and 24B has a function for displaying various information (still images, moving images, text images, etc.), a calendar, a date or a time. A function for displaying on the display unit, a touch input function for performing touch input operation or editing of information displayed on the display unit, a function for controlling processing by various software (programs), and the like can be provided.

  Electric power can be supplied to the touch panel, the display unit, the video signal processing unit, or the like by the solar battery 9633 mounted on the surface of the tablet terminal. Note that the solar cell 9633 is preferable because it can be provided on one or both surfaces of the housing 9630 and the battery 9635 can be charged efficiently. Note that as the battery 9635, when a lithium ion battery is used, there is an advantage that reduction in size can be achieved.

  The structure and operation of the charge / discharge control circuit 9634 illustrated in FIG. 24B are described with reference to a block diagram in FIG. FIG. 24C illustrates a solar cell 9633, a battery 9635, a DCDC converter 9636, a converter 9637, switches SW1 to SW3, and a display portion 9631. The battery 9635, the DCDC converter 9636, the converter 9637, and the switches SW1 to SW3 are illustrated. This corresponds to the charge / discharge control circuit 9634 shown in FIG.

  First, an example of operation in the case where power is generated by the solar cell 9633 using external light is described. The power generated by the solar battery is boosted or lowered by the DCDC converter 9636 so as to be a voltage for charging the battery 9635. When power from the solar cell 9633 is used for the operation of the display portion 9631, the switch SW1 is turned on, and the converter 9637 increases or decreases the voltage required for the display portion 9631. In the case where display on the display portion 9631 is not performed, the battery 9635 may be charged by turning off SW1 and turning on SW2.

  Note that although the solar cell 9633 is shown as an example of the power generation unit, the configuration is not particularly limited, and the battery 9635 is charged by another power generation unit such as a piezoelectric element (piezo element) or a thermoelectric conversion element (Peltier element). It may be. For example, a non-contact power transmission module that wirelessly (contactlessly) transmits and receives power for charging and other charging means may be combined.

  Note that the structure and the like described in this embodiment can be combined as appropriate with any of the structures described in the other embodiments.

Claims (6)

Enhancement type transistors,
A pixel electrode to which a predetermined potential is supplied from a signal line through the transistor;
A driving method of a display device including a pixel in which the pixel electrode functions as one electrode, is electrically connected to a capacitor line, and has a light-transmitting semiconductor film that functions as the other electrode Because
Supplying a potential equal to or higher than a threshold voltage of the transistor to a scanning line having a gate electrode of the transistor to turn on the transistor; supplying a predetermined potential from the signal line to the pixel electrode;
Supplying the capacitor line with a potential at which a potential difference between the translucent semiconductor film and the capacitor line is higher than a threshold voltage of the storage capacitor;
A method for driving a semiconductor device, wherein the storage capacitor holds a potential difference between the potential of the pixel electrode and the potential of the capacitor line for a certain period. Enhancement type transistors,
A pixel electrode to which a predetermined potential is supplied from a signal line through the transistor;
A driving method of a display device including a pixel in which the pixel electrode functions as one electrode, is electrically connected to a capacitor line, and has a light-transmitting semiconductor film that functions as the other electrode Because
Supplying a potential equal to or higher than a threshold voltage of the transistor to a scanning line having a gate electrode of the transistor to turn on the transistor; supplying a predetermined potential from the signal line to the pixel electrode;
Supplying a potential lower than the predetermined potential supplied to the pixel electrode by a threshold voltage of the storage capacitor to the capacitor line;
A method for driving a semiconductor device, wherein the storage capacitor holds a potential difference between the potential of the pixel electrode and the potential of the capacitor line for a certain period. In claim 1 or claim 2,
The transistor includes a light-transmitting semiconductor film, and the light-transmitting semiconductor film of the transistor is formed over the same surface as the light-transmitting semiconductor film included in the storage capacitor. A method for driving a semiconductor device. In claim 3,
The light-transmitting semiconductor film included in the storage capacitor and the light-transmitting semiconductor film included in the transistor are formed using an oxide semiconductor. An enhancement type transistor, a storage capacitor electrically connected to the transistor, a capacitance line electrically connected to the storage capacitor, and a display element electrically connected to the transistor and the storage capacitor , Prepare,
The storage capacitor is a light-transmitting semiconductor film that is electrically connected to the capacitor line and functions as one electrode, and a light-transmitting conductive film that functions as the other electrode and is included in the display element And a dielectric film provided between the one electrode and the other electrode, and a threshold voltage is 0 V or more,
The storage capacitor is operated by a potential difference between the conductive film having a light-transmitting property and the capacitor line so that the semiconductor film having the light-transmitting property is in a conductive state. An enhancement type transistor, a storage capacitor electrically connected to the transistor, a capacitance line electrically connected to the storage capacitor, and a display element electrically connected to the transistor and the storage capacitor , Prepare,
The storage capacitor is a light-transmitting semiconductor film that is electrically connected to the capacitor line and functions as one electrode, and a light-transmitting conductive film that functions as the other electrode and is included in the display element And a dielectric film provided between the one electrode and the other electrode, and a threshold voltage is 0 V or more,
The semiconductor device is characterized in that the storage capacitor operates with a potential difference between the translucent conductive film and the capacitor line larger than a threshold voltage of the storage capacitor.

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