JP2013180921A - Scribing device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To suppress the distortion of a slide base by weight of a scribing head in a scribing device which moves the scribing head along a beam via the slide base.SOLUTION: A protrusion 17 is provided to the side of a beam 12 to which a slide base 18 is attached, along the longitudinal direction of the beam 12, and the upper part of the slide base 18 is made to face the outside inner wall of a through hole 17A in the protrusion 17.

Description

  The present invention relates to a scribe device for forming a scribe line on a brittle material substrate, and more particularly to holding a scribe head.

  Conventionally, in a flat panel display such as a liquid crystal display panel or a liquid crystal projector substrate, a mother glass substrate is bonded together in a manufacturing process and then divided into a single panel having a predetermined size. The cutting of the brittle material substrate such as the mother glass substrate includes a scribe process and a break process, and a scribe device is used in the scribe process.

  FIG. 1 is a schematic perspective view showing an example of a conventional scribing apparatus. In the scribing apparatus 100, a moving base 101 is held so as to be movable in the y-axis direction along a pair of guide rails 102a and 102b. The ball screw 103 is screwed with the moving table 101. The ball screw 103 is rotated by driving the motor 104, and moves the moving base 101 in the y-axis direction along the guide rails 102a and 102b. A motor 105 is provided on the upper surface of the movable table 101. The motor 105 rotates the table 106 on the xy plane and positions it at a predetermined angle. The brittle material substrate 107 is placed on the table 106 and held by a vacuum suction means (not shown). Two CCD cameras 108 that image the alignment marks of the brittle material substrate 107 are provided on the scriber.

  In the scribe device 100, a bridge 110 is installed by struts 111 a and 111 b along the x-axis direction so as to straddle the moving table 101 and the upper table 106. The bridge 110 is provided with a beam 112 in the lateral direction, and a linear motor 113 is provided in the longitudinal direction of the beam 112. The linear motor 113 is a drive source that moves the scribe head 114 along the x-axis direction. A tip holder 115 having a scribing wheel is attached to the lower end portion of the scribe head 114.

  FIG. 2 is a schematic view showing the beam 112 stretched between the columns 111 a and 111 b and the scribe head 114 attached to the beam 112. As shown in the figure, a slide base 116 is attached to the movable part of the linear motor 113, and a scribe head 114 is further attached to the slide base 116. The scribe head 114 holds the chip holder 115 so as to be movable up and down. The chip holder 115 holds a disc-shaped scribing wheel 117 at the lower portion thereof in a rotatable manner. The scribing wheel 117 rolls while being pressed against the brittle material substrate with an appropriate load to form a scribe line. The scribe head 114 is provided with an elevating unit that enables such an elevating operation, for example, an air cylinder using air pressure control or an electric elevating unit using a linear motor.

  Patent Document 2 proposes a scribing device that performs scribing by rotating a feed screw by a motor and moving a scribe head in parallel on the brittle material substrate along the feed screw.

International Publication WO2009 / 157440 Japanese Unexamined Patent Publication No. 2004-10452

  However, in the scribing devices of Patent Documents 1 and 2, the scribing head is attached to the side of the linear motor or the feed screw. Therefore, a rotational moment is generated in the clockwise direction in FIG. 2 due to the weight of the scribe head. Therefore, there is a problem that the slide base is easily distorted, the scribe position is liable to be displaced during scribing, and the accuracy of the scribe position is lowered.

  The present invention has been made in view of the problems of the conventional scribing apparatus, and it is a technical problem to suppress the distortion of the slide base due to the weight of the scribing head and improve the accuracy of the scribing position. And

  In order to solve this problem, a scribing apparatus of the present invention includes a table on which a brittle material substrate is installed, a bridge having a beam parallel to the surface of the brittle material substrate installed on the table, and the beam. A movable slide base; a linear motor that linearly moves the slide base along the beam; and a scribe head that is attached to the slide base and holds a scribing wheel that scribes the brittle material substrate. The beam is provided with a protruding portion that protrudes to the side on which the slide base is attached, and a through hole is provided along the longitudinal direction of the protruding portion, and the upper end of the slide base is opposed to the inner wall of the through hole. Is.

  Here, the slide base is disposed on a surface facing the inner wall on the outer side of the through hole, and has at least one air pad that ejects air toward the inner wall, and the scribing device supplies air to the air pad. You may make it have an air supply part to do.

  Here, the slide base may be disposed on a surface facing the inner wall on the outer side of the through hole, and may have at least one free bearing in contact with the inner wall.

  According to the present invention having such a feature, a protruding portion having a through hole can be provided on the side of the beam, and the upper portion of the slide base can be inserted into the through hole and brought into contact with the inner wall of the through hole. For this reason, the distortion of the slide base due to the weight of the scribe head can be suppressed. Therefore, the effect that the scribing position accuracy can be improved is obtained.

FIG. 1 is a schematic perspective view of a conventional scribing apparatus. FIG. 2 is a view showing a beam and a scribe head of a conventional scribe device. FIG. 3 is a schematic perspective view of the scribing apparatus according to the first and second embodiments of the present invention. FIG. 4 is a perspective view showing a beam and a slide base used in the scribing apparatus according to the first and second embodiments of the present invention. FIG. 5 is a diagram showing a beam, a slide base, and a scribe head used in the scribing apparatus according to the first embodiment of the present invention. FIG. 6 is a front view and a side view of the slide base according to the first embodiment of the present invention. FIG. 7 is a block diagram of the scribing apparatus according to the first embodiment of the present invention. FIG. 8 is a perspective view showing a beam, a slide base, and a scribe head used in a scribing apparatus according to a second embodiment of the present invention. FIG. 9 is a front view and a side view of a slide base according to the second embodiment of the present invention.

  FIG. 3 is a perspective view showing a scribing apparatus according to an embodiment of the present invention. In this scribing apparatus, the same parts as those in the conventional example described above are denoted by the same reference numerals. Also in the scribing apparatus 1 according to the present embodiment, the movable table 101 is held so as to be movable in the y-axis direction along the pair of guide rails 102a and 102b. The ball screw 103 is screwed with the moving table 101. The ball screw 103 is rotated by driving the motor 104, and moves the moving base 101 in the y-axis direction along the guide rails 102a and 102b. A motor 105 is provided on the upper surface of the movable table 101. The motor 105 rotates the table 106 on the xy plane and positions it at a predetermined angle. The brittle material substrate 107 is placed on the table 106 and held by a vacuum suction means (not shown). Two CCD cameras 108 that image the alignment marks of the brittle material substrate 107 are provided on the top of the scribe device 1.

  In the scribe device 1, a bridge 10 is installed along the x-axis direction so as to straddle the movable table 101 and the table 106 on the upper side thereof. The bridge 10 includes a pair of left and right support columns 11 a and 11 b and a beam 12 therebetween. The beam 12 is provided in parallel to the surface of the table 106 at a predetermined interval from the table 106. Grooves 13A and 13B are formed on the side surfaces on both sides of the beam 12 along the longitudinal direction. A linear motor 14 is provided in the longitudinal direction of the beam 12. The linear motor 14 is a drive source that moves the scribe head 15 along the x-axis direction. A tip holder 16 having a scribing wheel is attached to the lower end portion of the scribe head 15. The scribe head 15 and the chip holder 16 are the same as those in the prior art.

  4 is a perspective view from different directions of a beam and a column to which the slide base of the scribing apparatus 1 is attached, and FIG. 5 is a side view thereof. The beam 12 of the present embodiment is provided with a projecting portion 17 projecting on one side surface over the entire length in the longitudinal direction. The protrusion 17 is provided on the side where the slide base 18 is attached and at a position opposite to the attachment position of the chip holder 16, that is, at the top of the beam 12 in FIG. 4. The protrusion 17 has an elongated through hole 17A along its longitudinal direction. The inner wall on the inner side of the through hole 17A is flush with the side surface of the beam 12, and the inner wall on the outer side of the through hole 17A faces the upper portion of the slide base 18. The slide base 18 is a flat plate member to which the scribe head 15 is attached, but is omitted from FIG.

  An air pad is provided on a portion of the slide base 18 facing the inner wall outside the through hole 17A. Although one air pad may be provided at the center, it is preferable to provide a pair of air pads 21A and 21B on the left and right as shown in FIG. The air pads 21A and 21B are flat plate members made of aluminum, and the surfaces thereof are anodized. In addition, air intake holes are provided on the side, and a large number of small holes communicating with the air intake holes are provided on the surface facing the inner wall outside the through hole 17A. Each of the air pads 21A and 21B has a plug protruding laterally, and the plug is connected to an air pump described later by a flexible pipe. At the center of the air pads 21A and 21B, an outwardly movable shaft is provided, each of which is slightly movable in the axial direction, and is biased toward the inner wall outside the through hole 17A by a spring (not shown).

  Next, the configuration of the scribing apparatus 1 according to the present embodiment will be described using a block diagram. FIG. 7 is a block diagram showing a control system of the scribing apparatus 1. In this figure, outputs from two CCD cameras 108 are given to the control unit 42 via the image processing unit 41. The control unit 42 controls the X motor driving unit 44 and the Y motor driving unit 45 in order to form a scribe line. These motor drive units 43 and 44 directly drive the linear motor 14 and the motor 104, respectively. The rotation motor driving unit 45 drives the motor 105 to rotate the brittle material substrate 107 disposed on the table 106 and cancels the angular deviation when there is an angular deviation. Further, an air pump drive unit 46, a chip holder lifting drive unit 47 and a monitor 48 are connected to the control unit 42. The air pump drive unit 46 drives the air pump 49 simultaneously when the linear motor 14 moves the scribe head linearly. The tip holder lifting / lowering drive unit 47 drives the scribing wheel so as to press the surface of the brittle material substrate with an appropriate load during scribing. Here, the air pump drive unit 46 and the air pump 49 constitute an air supply unit that supplies air to the air pads 21A and 21B when the scribe head moves.

  Next, the operation of the scribing apparatus according to this embodiment will be described. When the slide base 18 is stopped at any position of the beam 12, no air is supplied to the air pads 21A and 21B from the outside, and the air pads 21A and 21B are urged toward the inner wall outside the through hole 17A by a spring (not shown). The outer wall of the through hole 17A is in contact with the inner wall. At the time of scribing, the slide base 18 is moved by the linear motor 14. At this time, the air pump 49 is activated by the air pump drive unit 46, and compressed air is supplied to the air pads 21A and 21B through the tubes and plugs. As a result, air is ejected from the air pads 21A and 21B toward the inner wall outside the through hole 17A. Then, a clearance is generated between the air pads 21A and 21B and the inner wall outside the through hole 17A against the urging force of the spring, and the sliding resistance accompanying the movement of the slide base 18 is reduced. Can be easily moved in a straight line. During this movement, the scribing head 15 is lowered, and the scribing wheel is rolled with respect to the brittle material substrate to perform scribing.

  When the scribing is finished, the driving of the linear motor 14 is stopped and the air pump 49 is also stopped. Then, the supply of air is stopped, and the air pads 21A and 21B come into contact with the inner wall outside the through hole 17A and stop.

  Next, a second embodiment of the present invention will be described. In this scribing apparatus, the same parts as those in the first embodiment described above are denoted by the same reference numerals, and detailed description thereof is omitted. In the first embodiment, the air pads 21A and 21B are brought into contact with the inner wall on the outside of the through hole 17A. However, in the present embodiment, the air pads 21A on the upper portion of the slide base 18 are shown in FIGS. , 21B are provided with free bearings 31A, 31B. The free bearings 31A and 31B have a large number of small balls arranged on a hemispherical concave surface, and a large ball is placed thereon to hold the large ball rotatably in all directions, thereby preventing the large ball and the small ball from jumping out. A cap is provided. As shown in FIG. 9, the two free bearings 31A and 31B are provided adjacent to each other, and the large balls are in contact with the inner wall outside the through hole 17A. In this way, two free bearings are provided, and each large ball is brought into direct contact with the inner wall on the outside of the through-hole 17A, so that the posture of the slide base 18 can be stably maintained and the sliding resistance can be reduced to linearly move. Can be made easier.

  Next, the operation of the scribing apparatus according to this embodiment will be described. In a state before scribing, the free bearings 31A and 31B are stopped in contact with the outer inner wall of the through hole 17A. At the time of scribing, the slide base 18 is moved by the linear motor 14. At this time, the large balls of the respective free bearings rotate with the movement of the slide base 18, so that the sliding resistance associated with the movement of the slide base 18 is reduced, and the linear movement can be easily performed along the beam 12. Can do. During this movement, the scribing head 15 is lowered, and the scribing wheel is rolled with respect to the brittle material substrate to perform scribing.

  In the first and second embodiments described above, one scribe head is linearly movable along the beam 12, but a plurality of slide bases are provided for one beam, and a scribe head is provided for each slide base. It may be provided and moved linearly along the beam. In addition, when scribing from above and below to sever a bonded substrate on which two brittle material substrates are bonded, a pair of beams parallel to the top and bottom are provided, and each beam is provided with a protruding portion. Further, at least one slide base may be movably disposed.

  The present invention can suppress the distortion of the slide base due to the weight of the scribe head when moving the scribe head linearly through the slide base along the beam, and is therefore suitable for a scribe device for scribing a brittle material substrate. is there.

DESCRIPTION OF SYMBOLS 10 Bridge 11a, 11b Support | pillar 12 Beam 13A, 13B Groove 14 Linear motor 15 Scribe head 16 Tip holder 17 Protrusion part 17A Through-hole 18 Slide base 21A, 21B Air pad 31A, 31B Free bearing

Claims (3)

A table on which a brittle material substrate is installed;
A bridge having a beam parallel to the surface of the brittle material substrate placed on the table;
A slide base movable along the beam;
A linear motor that linearly moves the slide base along the beam;
A scribing head attached to the slide base and holding a scribing wheel for scribing the brittle material substrate,
The beam is provided with a protruding portion that protrudes to the side on which the slide base is attached, and a through hole is provided along the longitudinal direction of the protruding portion, and the upper end of the slide base is opposed to the inner wall of the through hole. Scribe device. The slide base is
Having at least one air pad disposed on a surface facing the inner wall on the outer side of the through hole and ejecting air toward the inner wall;
The scribing device is
The scribing apparatus according to claim 1, further comprising an air supply unit that supplies air to the air pad. The slide base is
The scribing device according to claim 1, further comprising at least one free bearing disposed on a surface facing the inner wall on the outer side of the through-hole and in contact with the inner wall.