JP2013034001A - Die bonder, pickup method, and pickup device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a pickup device that can securely peel a die or to provide a reliable die bonder or a pickup method using the pickup device.SOLUTION: When a die to be peeled out of plural dies (semiconductor chips) applied to a dicing film is thrust up and is peeled from the dicing film, the dicing film in a predetermined part in a circumference of the die is thrust up with a pin, to form a peeling starting point where the dicing tape is raised around the pin. Then, the dicing film in a part except the predetermined part is thrust up, and the die is peeled from the dicing film.

Description

  The present invention relates to a die bonder, a pickup method, and a pickup device, and more particularly, to a highly reliable die bonder, a pickup method, and a pickup device that can reliably peel a die.

  A part of the process of assembling a package by mounting a die (semiconductor chip) (hereinafter simply referred to as a die) on a substrate such as a wiring board or a lead frame, and a step of dividing the die from a semiconductor wafer (hereinafter simply referred to as a wafer) And a die bonding step of mounting the divided dies on the substrate.

  In the bonding process, there is a peeling process for peeling the divided dies from the wafer. In the peeling process, these dies are peeled one by one from the dicing tape held by the pickup device, and conveyed onto a substrate using a suction jig called a collet.

As a prior art which performs a peeling process, there exists a technique described in patent document 1 and patent document 2, for example. In Patent Document 1, a first push-up pin group provided at the four corners of the die and a second push-up pin group provided at the center or peripheral portion of the die whose tip is lower than the first push-up pin are used as a pin holder. The technique which peels by mounting | wearing and raising a pin holder is disclosed.
Further, in Patent Document 2, three blocks that can be pushed up higher toward the center of the die are provided, and protrusions that are integrally formed at the four corners of the outermost outer block and protrude in the corner direction of the die are provided. A technique for sequentially pushing up one block is disclosed.

JP 2002-184836 A JP 2007-42996 A

  In recent years, packages have been made thinner for the purpose of promoting high-density mounting of semiconductor devices. In particular, a stacked package in which a plurality of dies are three-dimensionally mounted on a wiring board of a memory card has been put into practical use. When assembling such a stacked package, it is required to reduce the die thickness to 20 μm or less in order to prevent an increase in the package thickness.

When the die is thin, the rigidity of the die is extremely low compared to the adhesive strength of the dicing tape.
For this reason, whether the multi-stage push-up pin method having different first and second heights of Patent Document 1 or the multi-stage block system having the protrusions of Patent Document 2 is used, the die is peeled from the outer peripheral portion or the corner portion of the die at once. If it peels at once, it counteracts the anchor effect that prevents the outer periphery or corner of the die from being peeled off, that is, stress concentrates, and when the die thickness is reached, the outer periphery or corner of the die deforms and cracks. End up. In particular, when the above-mentioned die attach film is interposed between the die and the dicing tape, the adhesive strength between the die and the dicing tape is increased by the anchor effect that is increased by dicing the die attach film. May be stronger. Moreover, it is not stable, and it becomes more difficult to peel off the die.

The present invention has been made in view of the above-described problems, and a first object of the present invention is to provide a pickup method and a pickup apparatus that can reliably peel off a die.
A second object of the present invention is to provide a highly reliable die bonder using a pickup device that achieves the first object.

  In order to achieve the above object, the present invention provides a predetermined peripheral portion of the die when the die to be peeled is pushed up and peeled from the dicing film among a plurality of dies attached to the dicing film. The dicing film at the part is pushed up with a pin to form a peeling starting point where the dicing tape swells around the pin, and then the dicing film at a part other than the predetermined part is pushed up to peel the die from the dicing film This is a first feature.

In addition to the first feature, the second feature of the present invention is that at least one corner portion of the four corner portions of the die is provided in addition to the first feature.
Furthermore, in order to achieve the above object, the present invention has a third feature that, in addition to the first or second feature, the pin does not contribute to a subsequent peeling operation.
According to the present invention, in order to achieve the above object, in addition to the first to third features, the driving of the two push-ups is sequentially performed by raising the operating body driven by a single drive source. This is the fourth feature.

ADVANTAGE OF THE INVENTION According to this invention, the pick-up method and pick-up apparatus which can peel die | dye reliably can be provided.
Further, according to the present invention, a highly reliable die bonder can be provided using the above-described pickup method or pickup device.

It is the conceptual diagram which looked at the die bonder which is one Embodiment of this invention from the top. It is a figure which shows the external appearance perspective view of the pick-up apparatus which is one Embodiment of this invention. It is a schematic sectional drawing which shows the principal part of the pick-up apparatus which is one Embodiment of this invention. FIG. 4 (a) is a diagram showing the configuration of the collet portion of the push-up unit and the bond head unit according to the first embodiment of the present invention. FIG. 4B is a top view of a portion where the push-up block portion and the peeling start point forming pin of the push-up unit are present. The processing flow of the pickup operation | movement in embodiment of this invention is shown. It is the figure which showed the operation | movement of the dome head vicinity part and the collet part in the processing flow shown in FIG. It is a figure which mainly shows the drive operation of the pushing-up unit at the time of the die pick-up operation | movement in the processing flow shown in FIG. It is a figure which shows the structure and operating state of the pushing-up unit which is the 2nd Embodiment of this invention. It is a figure which shows the processing flow of the pick-up operation | movement in 2nd Embodiment. It is a figure which shows operation | movement of the dome head vicinity part and collet part in the processing flow shown in FIG. It is a figure which shows the example applied to the collet without a wrinkle in the pushing-up unit of the 2nd Embodiment of this invention. It is a figure which shows the state between FIG.10 (b) and FIG.10 (c), and shows a state when the peeling start point formation pin, an outer side block, and an inner block become the same height. 2 shows an embodiment of a second push-up unit of the present invention. It is a figure which shows other embodiment with respect to the number of peeling start point formation pins, or a drive method. It is a figure which shows the example of the drive method of the peeling origin formation pin applied to FIG.10 (c), FIG.10 (d).

Hereinafter, embodiments of the present invention will be described with reference to the drawings.
FIG. 1 is a conceptual view of a die bonder 10 according to an embodiment of the present invention as viewed from above. The die bonder is roughly divided into a wafer supply unit 1, a work supply / conveyance unit 2, and a die bonding unit 3.

The workpiece supply / conveyance unit 2 includes a stack loader 21, a frame feeder 22, and an unloader 23. The workpiece (lead frame) supplied to the frame feeder 22 by the stack loader 21 is conveyed to the unloader 23 through two processing positions on the frame feeder 22.
The die bonding unit 3 includes a preform unit 31 and a bonding head unit 32.
The preform unit 31 applies a die adhesive to the work conveyed by the frame feeder 22. The bonding head unit 32 picks up the die from the pickup device 12 and moves up to move the die to the bonding point on the frame feeder 22 in parallel. Then, the bonding head unit 32 lowers the die and bonds it onto the workpiece coated with the die adhesive.

The wafer supply unit 1 includes a wafer cassette lifter 11 and a pickup device 12. The wafer cassette lifter 11 has a wafer cassette (not shown) filled with a wafer ring,
The wafer ring is sequentially supplied to the pickup device 12.

  Next, the configuration of the pickup device 12 will be described with reference to FIGS. FIG. 2 is an external perspective view of the pickup device 12. FIG. 3 is a schematic cross-sectional view showing the main part of the pickup device 12. As shown in FIGS. 2 and 3, the pickup device 12 horizontally positions an expanding ring 15 that holds a wafer ring 14 and a dicing tape 16 that is held by the wafer ring 14 and to which a plurality of dies (chips) 4 are bonded. And a push-up unit 50 that is disposed inside the support ring 17 and pushes up the die 4 upward. The push-up unit 50 is moved in the vertical direction by a driving mechanism (not shown), and the pickup device 12 is moved in the horizontal direction.

  When the die 4 is pushed up, the pickup device 12 lowers the expanding ring 15 holding the wafer ring 14. As a result, the dicing tape 16 held on the wafer ring 14 is stretched to widen the distance between the dies 4, and the die 4 is pushed up from below the die by the push-up unit 50, thereby improving the pick-up property of the die 4. As the thickness is reduced, the adhesive is changed from liquid to film-like, and a film-like adhesive material called a die attach film 18 is attached between the wafer and the dicing tape 16. In the wafer having the die attach film 18, dicing is performed on the wafer and the die attach film 18. Therefore, in the peeling step, the wafer and the die attach film 18 are peeled from the dicing tape 16.

  FIG. 4A is a view showing the configuration of the collet unit 40 in the push-up unit 50 and the bond head unit (not shown) according to the first embodiment of the present invention. FIG. 4B is a view of a portion where a push-up block portion and a peeling start point forming pin, which will be described later, of the push-up unit are seen from above.

  As shown in FIG. 4A, the collet portion 40 includes a collet 42, a collet holder 41 that holds the collet 42, and suction holes 41 v and 42 v that are provided in each of them and suck the die 4.

On the other hand, the push-up unit 50 is broadly divided into a push-up block portion, a peeling start point forming pin portion, a drive unit that drives the push up block portion and the peeling start point forming pin portion, and a dome body 58 that holds them. The push-up block portion is provided around the inner block via a block main body 59, an inner block 54 directly connected to the block main body 59, and a 1/2 switching spring 52b, and an outer block 52 having an outer shape smaller than the outer shape of the die 4. have.
As shown in FIG. 4B, the peeling start point forming pin portion includes four peeling start point forming pins 51 provided on the outside of the four corners of the outer block 52, that is, at the four corners of the die, and the peeling start point forming pins. Pin up / down link 55 that can be moved up and down, and a pin drive link 56 that rotates around pin 56a to move up / down the pin up / down link 55.

The drive unit includes a drive shaft 57 that moves up and down by a motor, and an operating body 53 that moves up and down as the drive shaft 57 moves up and down. When the operating body 53 is lowered, the left and right pin drive links 56 are rotated, the pin vertical links 55 are raised, and the peeling start point forming pins 51 are pushed up. When the operating body 53 rises, the block main body is raised, and the outer and inner blocks are pushed up. Note that, according to the above description, the pin vertical link 55 and the pin drive link 56 constitute a reversing unit that changes the downward movement of the operating body 53 into the upward (upward) movement of the peeling start point forming pin 51.
At the upper part of the dome body 58, a dome head 58b having a number of suction holes 58a for sucking and holding the die 4 is provided. In FIG. 4B, only one row is shown around the block portion, but a plurality of rows are provided in order to stably hold the dies 4d that are not to be picked up. Further, as shown in FIG. 4B, the gap 54v between the inner block 54 and the outer book 52 and the gap 52v between the outer block 52 and the dome head 58b are sucked to hold the dicing tape 16 on the block side. ing.

Next, the pickup operation by the push-up unit 50 having the above-described configuration will be described with reference to FIGS. FIG. 5 shows a processing flow of the pickup operation. FIG. 6 is a diagram showing the operation of the vicinity of the dome head 58b and the collet unit 40 in the processing flow shown in FIG. FIG. 7 is a diagram mainly showing the driving operation of the push-up unit 50 during the pick-up operation of the die 4 in the processing flow shown in FIG. 6 and 7, (a) to (d) show the operation in the same period.
First, as shown in FIG. 6A, the separation starting point forming pin 51, the outer block 52, and the inner block 54 are formed to be flush with the surface of the dome head 58b, and the suction hole 58a of the dome head 58b The dicing tape 16 is adsorbed by the gaps 52v and 54v (step 1). Next, the collet portion 40 is lowered and positioned on the die 4 to be picked up, and the die 4 is sucked by the suction holes 41v and 42v (step 2). Steps 1 and 2 result in the state shown in FIG. 6A. At this time, as shown in FIG. 7A, the operating body 53 does not operate the peeling start point forming pin 51 and the blocks 52 and 54. Neutral state. In such a state, the air flow rate is detected for leakage from the collar 42t of the collet 42, and suction is performed until the leakage is within a normal range (step 3).

Next, only the peeling starting point forming pins 51 provided at the four corners of the outer block 52 are raised from several tens μm to several hundreds μm (step 4). As a result, as shown in FIG. 6B, a protruding portion where the dicing tape 16 swells is formed around the separation starting point forming pin 51, and a minute space, that is, separation between the dicing tape 16 and the die attach film 18 is formed. A starting point 51a is formed. This space greatly reduces the anchoring effect, i.e. the stress on the die 4,
The peeling operation in the next step can be ensured. FIG. 7B is a diagram showing the driving operation at this time. The actuating body 53 is lowered, the pin vertical link 56 is rotated about 56a as a fulcrum, the pin vertical link 55 is raised, and the peeling start point forming pin 51 is pushed up.

Since the separation starting point forming pin 51 only needs to be able to form a minute space as described above, the push-up pin may have, for example, a diameter of 700 μm or less and a rounded tip or a flat shape.
In this pushing up, as shown in FIG. 6B, the collar 42t of the collet 42 is slightly deformed to prevent the inflow of air. In this step, the air flow rate is detected in the same manner as in step 3, and suction is performed until the leak is within a normal range (step 5).

  Next, the operating body 53 is raised and the position of the peeling start point forming pin 51 is returned to the original position (step 6). The peeling start point forming pin 51 does not contribute to the peeling operation of the die 4 after the next step.

  Next, the peeling operation of the die 4 of the outer block 52 and the inner block 54 is started. For this purpose, as shown in FIG. 7C, the operating body 53 is further raised, and the peeling operation by the outer block 52 and the inner block 54 is performed (step 7). The state of the vicinity of the dome head 58a and the collet 40 at this time is as shown in FIG. Also at this time, the collet leak detection process is performed as in steps 3 and 5 (step 8).

  Next, as shown in FIG. 7D from the state of FIG. 7C, when the operating body 53 is further raised, only the inner block 54 is raised by the action of the 1/2 switching spring 52b, and FIG. d) (step 9). In this state, the contact area between the dicing tape 16 and the die 4 becomes an area that can be peeled by the rise of the collet, and the die 4 is peeled by the rise of the collet 42.

As described above, according to the embodiment of the first push-up unit, the peeling start point forming pins 51 are provided at positions corresponding to the four corners of the die 4, and the peeling start point forming pins 51 are raised at the beginning of the peeling process. By forming a space as a starting point of peeling, the stress applied to the die 4 can be reduced,
The subsequent peeling process can be reliably performed without the die 4 cracking.
As a result, pickup mistakes can be reduced and a highly reliable die bonder or pickup method can be provided.
8 (a) to 8 (d) are diagrams showing the configuration and operating state of the push-up unit 50 according to the second embodiment of the present invention. FIG. 8 (a) to FIG. It is a figure corresponding to 7 (d).
In FIG. 8, components having the same structure as those of the first embodiment are denoted by the same reference numerals.

The difference from the first embodiment is that in the first embodiment, the movement of the operating body 53 is reversed at the reversing part in order to push up the peeling start point forming pin 51. However, in this embodiment, the movement is not reversed but is the same as it is. It is a point which has the same direction part driven to a direction.
The same direction portion has a timing control plate 71 connected to the drive shaft 57 and a pin drive link 73 having a compression spring 72 between the timing control plate 71. Also,
The pin drive link has a holding plate 74 for holding the neutral state shown in FIG. 8A in which the peeling start point forming pin 51 is not pushed up by the timing control plate 71.

  Next, the operation state of the push-up unit 50 according to the second embodiment will be described with reference to FIGS. FIG. 9 is a diagram showing a processing flow of the pickup operation in the second embodiment, and FIG. 10 is a diagram showing operations of the vicinity of the dome head 58b and the collet unit 40 in the processing flow shown in FIG. . 9 and 10 are views corresponding to FIGS. 5 and 6 of the first embodiment, respectively.

  The processing flow of the pickup operation shown in FIG. 9 is different from the first embodiment in that there is no step 6 in the processing flow of the pickup operation (FIG. 5) in the first embodiment. An operation for realizing the operation will be described below. In the second embodiment, as shown in FIG. 8B, when the operating body 53 is raised, the peeling start point forming pin 51 pushes up the dicing tape 16 until the pin drive link 73 comes into contact with the dome head 58b. Thereafter, when the operating body 53 is raised, first, the peeling operation by the outer block 52 and the inner block 54 is performed (see Step 6 in FIG. 9, FIG. 8C, FIG. 10C), and then Only the inner block 54 is raised by the action of the 1/2 switching spring 52b, and the state shown in FIG. 8D is obtained (see step 8 and FIG. 10D).

8 (c), 8 (d), 10 (c), and 10 (d), the peeling start point forming pin 51 is
Since it cannot be raised by the dome head 58b, the state of FIG. 8B is maintained. Therefore, the peeling start point forming pin 51 does not contribute to the peeling operation in FIGS. 8C and 8D.

As described above, also in the push-up unit 50 according to the second embodiment of the present invention, the peeling start point forming pins 51 are provided at positions corresponding to the four corners of the die 4 and the peeling start point forming pins 51 are provided at the beginning of the peeling process. By raising and forming a space as a starting point of peeling, the stress applied to the die 4 can be reduced, and the subsequent peeling treatment can be reliably performed without cracking the die 4.
As a result, also in the second embodiment of the present invention, pickup mistakes can be reduced, and a highly reliable die bonder or pickup method can be provided.
FIG. 11 is a diagram showing an example in which the push-up unit 50 according to the second embodiment of the present invention is applied to a collet without a flange 42t, and shows steps with respect to FIG.
As can be seen from FIG. 11, in the step of raising the peeling start point forming pin 51 shown in FIG. 11 (b), there is a possibility that the collet leak is slightly increased. As described above, the present embodiment can be applied regardless of the collet shape.

  FIG. 12 shows a state between FIG. 11 (b) and FIG. 11 (c), and shows a state when the peeling start point forming pin 51, the outer block 52, and the inner block 54 are at the same height. In the operation flow shown in FIG. 11, the collet 42 is not landed until the state shown in FIG. As a result, there is no fear of a slight collet leak in the embodiment shown in FIG. As a result, even if a collet without wrinkles 42t is applied, the peeling process can be performed more reliably.

  As a result, pickup mistakes can be reduced and a highly reliable die bonder or pickup method can be provided.

  Further, as described above, according to the embodiments of the first and second push-up units, two independently driven operations can be driven by one drive source, and a small or inexpensive push-up unit can be provided.

  FIG. 13 shows an embodiment of the third push-up unit of the present invention. The difference from the first embodiment is that a push-up pin instead of a block is used as the push-up portion. FIG. 13 is a diagram illustrating FIG. 13A as a diagram corresponding to FIG. 10B of the second embodiment, and FIG. 13B is a diagram corresponding to FIG. 10C.

  Also in this embodiment, as shown in FIG. 13 (a), a peeling start point 51a is formed in advance by a peeling start point forming pin 51, and then a plurality of push-up pins 60 are fixed as shown in FIG. 13 (b). If the base 61 is pushed up at once, the peeling operation is performed more reliably. In FIG. 9B, the peeling start point forming pin has returned to its original position and is not involved in the push-up in FIG. 9B.

  Therefore, also in the third push-up unit embodiment of the present invention, it is possible to reduce the stress applied to the die 4 by forming a space as a starting point of the peeling, and the peeling process thereafter is more reliable without cracking the die 4. Can be done.

  In the embodiments of the first to third push-up units described above, the peeling start point forming pins 51 provided at the four corners of the die 4 are pushed up simultaneously. FIG. 14 is a diagram showing another embodiment of the number of peeling start point forming pins or the driving method.

14 (a) and 14 (b) do not provide the separation starting point forming pins 51 at all four corners, but FIG. 14 (a) shows an example in which one of the four corners is provided. (b) is an example in which two separation starting point forming pins 51 are provided at the diagonal portion of the corner of the die 4. In any case,
By forming the peeling start point even at one place, the die 4 can be peeled from the dicing tape 16 more reliably than in the prior art.

  FIG. 14C shows an example in which the four corners are not pushed up at the same time but are pushed up sequentially by the peeling start point forming pins 51 at the four corners. In this example, the stress applied to the die can be alleviated somewhat by pushing up sequentially. FIG. 14D shows an example in which peeling start point forming pins 51 are provided not only at the four corners but also at the periphery of the die. In this example, the stress applied to the die 4 can be alleviated and a large number of separation starting points can be provided to prevent deformation or deformation cracking of the die 4.

FIG. 15 is a diagram illustrating an example of a driving method of the peeling start point forming pin 51 applied to FIGS. 14 (c) and 14 (d). The basic configuration is the same as FIG. 4 shown in the first embodiment. The difference is
The operating body 53 is rotated, and a spherical protrusion 53 a is provided at one place on the lower surface of the operating body 53. In FIG. 11, there are as many pin vertical links 55 and pin drive links 56 as the number of peeling start point forming pins 51. Therefore, when the operating body 53 is lowered and rotated, the projection 53a successively rotates the pin drive link 56, raises the corresponding pin vertical link 55, and pushes up the corresponding peeling start point forming pin 51. As a result, regardless of whether the peeling start point forming pins 51 are arranged only at the corner portion or the peripheral portion, the peeling start point forming pins 51 can be pushed up sequentially to form the peeling start point 51a one after another.

  Next, FIG. 14 (e) will be described. FIG. 14 (e) shows a method for forming the separation starting points one after another by moving the separation starting point forming pins and the like around the periphery of the die 4. For example, a rail 51B composed of a linear motor having a concave shape is provided around the outer block 52, and a spherical or rounded roller-shaped magnet 51A is moved instead of a pin so that the peeling start points 51a are successively formed. It is a method of forming. In the method of FIG. 14E, the same effect as in FIG. 14D can be obtained. Further, according to the embodiment of FIG. 14 (e), the peeling start point forming means described with respect to the peeling start point forming pin may be not only a pin shape but also a spherical shape.

  In the above embodiment, the die bonded to the substrate is die bonded, but the die bonder has been described. Instead of die bonding to the substrate, a pickup device can be obtained by placing the die on a tray for transporting the die.

  Although the embodiments of the present invention have been described above, various alternatives, modifications, and variations can be made by those skilled in the art based on the above description, and the present invention is not limited to the various embodiments described above without departing from the spirit of the present invention. It encompasses alternatives, modifications or variations.

1: Wafer supply unit 2: Workpiece supply / conveyance unit 3: Die bonding unit 4: Die (semiconductor chip)
10: Die bonder 11: Wafer cassette lifter 12: Pickup device 14: Wafer ring 15: Expanding ring 16: Dicing tape 17: Support ring 18: Die attach film 32: Bonding head part 40: Collet part 41: Collet holder 41v: Collet holder 42: Collet 42v: Collet suction hole 42t: Collet collar 50: Push-up unit 51: Peeling origin forming pin 51a: Peeling origin 51A: Spherical or round roller-shaped magnet 51A
51B: Rail composed of a linear motor 52: Outer block 52b: 1/2 switching spring 52v: Clearance between outer block and dome head 53: Actuator 54: Inner block 54v: Clearance between inner block and outer book 55: Pin vertical link 56: Pin drive link 56a: Rotation fulcrum of pin drive link 57: Drive shaft 58: Dome main body 58a: Dome head suction hole 58b: Dome head 59: Block main body 60: Push-up pin 61: Pin base 71: Timing Control plate 72: compression spring 72
73: Pin drive link 74: Holding plate.

Claims (11)

A peeling starting point forming means for pushing up a dicing film at a predetermined portion of the peripheral portion of the die with a pin and forming a peeling starting point at which the dicing tape is raised around the pin, and the dicing at a portion different from the predetermined portion A peeling unit that pushes up the film and peels the die from the dicing film; and a push-up unit having a driving unit that separately drives the push-up of the peeling start point forming unit and the push-up of the peeling unit;
A collet that adsorbs the die;
A bonding head that peels off the die sucked and pushed up by the collet from the dicing film and attaches it to the substrate;
Die bonder with.   The die bonder according to claim 1, wherein the predetermined portion is provided in at least one corner portion of the four corner portions of the die.   The die bonder according to claim 1, wherein the peeling start point forming unit does not contribute to the peeling by the peeling unit.   The driving means has an operating body driven by a single driving source, and the peeling forming means and the peeling means are sequentially pushed up by the raising of the operating body. The die bonder according to any one of claims 1 to 3. A step of adsorbing a die to be peeled among a plurality of dies attached to a dicing film with a collet;
A step of pushing up the dicing film in a predetermined portion of the peripheral portion of the die to be peeled with a pin to form a peeling start point where the dicing tape is raised in the periphery of the pin; and
A pick-up method comprising a step of pushing up the dicing film at a portion different from the predetermined portion and peeling the die from the dicing film.   6. The pickup method according to claim 5, wherein the predetermined portion is provided in at least one corner portion of the four corner portions of the die.   7. The pickup method according to claim 5, further comprising a step of stopping at a predetermined position where the pin pushes up the dicing film to form the peeling starting point.   What is the pushing-up of the pin from the predetermined position after the pin has pushed up the dicing film and reached a predetermined position to form the peeling start point and before pushing up the dicing film at a part different from the predetermined part? 8. The pickup method according to claim 7, further comprising a step of moving in the opposite direction. An expanding ring for holding the wafer ring;
Holding means for holding a dicing film held by the wafer ring and having a plurality of dies attached thereto;
A peeling starting point forming means for pushing up a dicing film in a predetermined part of the peripheral part of the die with a pin and forming a peeling starting point where the dicing tape swells around the pin, and the part different from the predetermined part A peeling unit that pushes up a dicing film and peels the die from the dicing film; and a pushing-up unit having a driving unit that separately drives the push-up of the peeling start point forming unit and the push-up of the peeling unit;
A pickup device comprising:   The pickup apparatus according to claim 9, wherein the peeling start point forming unit does not contribute to the peeling by the peeling unit.   The driving means has an operating body driven by a single driving source, and the peeling forming means and the peeling means are sequentially pushed up by the raising of the operating body. The pickup device according to claim 9 or 10.

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