JP2012228729A - Pb FREE SOLDER ALLOY MAKING Zn PRINCIPAL INGREDIENT AND METHOD OF MANUFACTURING THE SAME - Google Patents
Pb FREE SOLDER ALLOY MAKING Zn PRINCIPAL INGREDIENT AND METHOD OF MANUFACTURING THE SAME Download PDFInfo
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Abstract
【課題】 電子部品の組立などで用いるのに好適な300℃〜400℃程度の融点を有し、濡れ性、接合性、加工性、信頼性に優れ、Pbを含まず、且つZnを主成分とする高温用のはんだ合金を提供する。
【解決手段】 Alを0.01質量%以上、9.0質量%以下含み、Geを0.01質量%以上、8.0質量%以下、Mgを0.01質量%以上、5.0質量%以下、Agを0.1質量%以上、4.0質量%以下、Pを0.5質量%以下の範囲で、Ge、Mg、Ag、Pのいずれか1種以上を含有し、残部Znと不可避不純物からなる合金表面の酸化物層が120nm以下であり、表面粗さRaが0.60μm以下であることを特徴とするZnを主成分とするPbフリーはんだ合金。
【選択図】なしPROBLEM TO BE SOLVED: To have a melting point of about 300 ° C. to 400 ° C. suitable for use in assembling electronic parts, etc., excellent wettability, bondability, workability and reliability, does not contain Pb, and contains Zn as a main component A high temperature solder alloy is provided.
SOLUTION: Al is contained in an amount of 0.01% by mass to 9.0% by mass, Ge is 0.01% by mass to 8.0% by mass, Mg is 0.01% by mass to 5.0% by mass. %, Ag is 0.1 mass% or more and 4.0 mass% or less, P is in the range of 0.5 mass% or less, and contains at least one of Ge, Mg, Ag, and P, and the balance Zn And a Zn-based Pb-free solder alloy characterized in that the oxide layer on the alloy surface made of unavoidable impurities is 120 nm or less and the surface roughness Ra is 0.60 μm or less.
[Selection figure] None
Description
本発明は、Pbを含まないZnを主成分とするはんだ合金およびその製造方法に関する。 The present invention relates to a solder alloy mainly composed of Zn not containing Pb and a method for producing the same.
パワートランジスタ用素子のダイボンディングを始めとして、各種電子部品の組立工程に用いるはんだ付けでは、高温はんだ付けが行われ、300℃程度の比較的高温の融点を有するはんだ合金(高温用はんだ合金)が使用されている。このような高温用はんだ合金としては、Pb−5質量%Sn合金に代表されるPb系はんだ合金が従来から主に用いられている。
しかし、近年では環境汚染に対する配慮からPbの使用を制限する動きが強くなってきており、例えばRohs指令などで規制対象物質になっている。その為、電子部品などの組立の分野においても、Pbを含まない(無鉛)はんだ合金、即ちPbフリーはんだ合金が求められている。
In soldering used in the assembly process of various electronic components including die bonding of power transistor elements, high temperature soldering is performed, and a solder alloy having a relatively high melting point of about 300 ° C. (high temperature solder alloy) is obtained. It is used. As such a high-temperature solder alloy, a Pb-based solder alloy represented by a Pb-5 mass% Sn alloy has been mainly used conventionally.
However, in recent years, there has been a strong movement to restrict the use of Pb due to consideration for environmental pollution, and it has become a regulated substance in the RoHS directive, for example. Therefore, in the field of assembling electronic parts and the like, a Pb-free (lead-free) solder alloy, that is, a Pb-free solder alloy is required.
中低温用(約140℃〜230℃)のはんだ合金に関しては、Snを主成分とするPbフリーのはんだ合金が既に実用化されている。
例えば特許文献1には、Snを主成分とし、Agを1.0〜4.0質量%、Cuを2.0質量%以下、Niを0.5質量%以下、Pを0.2質量%以下含有するPbフリーのはんだ合金が記載されている。また、特許文献2には、Agを0.5〜3.5質量%、Cuを0.5〜2.0質量%含有し、残部がSnからなるPbフリーのはんだ合金が記載されている。
As for a solder alloy for medium and low temperatures (about 140 ° C. to 230 ° C.), a Pb-free solder alloy containing Sn as a main component has already been put into practical use.
For example, in Patent Document 1, Sn is the main component, Ag is 1.0 to 4.0% by mass, Cu is 2.0% by mass or less, Ni is 0.5% by mass or less, and P is 0.2% by mass. The following Pb-free solder alloys are described. Patent Document 2 describes a Pb-free solder alloy containing 0.5 to 3.5% by mass of Ag and 0.5 to 2.0% by mass of Cu, with the balance being Sn.
一方、高温用のはんだ合金に関しても、Pbフリーを実現するため、さまざまな開発が行われている。
しかしながら、従来のPb−5質量%Sn合金に代表されるPb系はんだ合金を代替できる高温用はんだ合金はまだ提案されていない現状である。
例えば、Bi系はんだ合金では、特許文献3に、Biを30〜80質量%含み、溶融温度が350〜500℃であるBi/Ag系のろう材が開示されている。しかし、このBi/Ag系ろう材の液相線温度は400〜700℃と高いため、接合時の作業温度も400〜700℃以上になると推測される。一般的な電子部品や基板の材料として多用されている熱可塑性樹脂や熱硬化性樹脂などの作業温度は400℃未満、望ましくは370℃以下であることから、上記の作業温度は接合される電子部品や基板が耐えうる温度を超えている。
On the other hand, various developments have been made for solder alloys for high temperatures in order to realize Pb-free.
However, a high temperature solder alloy that can replace a Pb solder alloy represented by a conventional Pb-5 mass% Sn alloy has not yet been proposed.
For example, for a Bi-based solder alloy, Patent Document 3 discloses a Bi / Ag-based brazing material containing 30 to 80% by mass of Bi and having a melting temperature of 350 to 500 ° C. However, since the liquidus temperature of this Bi / Ag brazing material is as high as 400 to 700 ° C., it is presumed that the working temperature at the time of joining is also 400 to 700 ° C. or higher. The working temperature of thermoplastic resins and thermosetting resins that are widely used as materials for general electronic components and substrates is less than 400 ° C., preferably 370 ° C. or less. The temperature exceeds that the component or board can withstand.
また、特許文献4には、Biを含む共晶合金に2元共晶合金を加え、更に添加元素を加えることによって、液相線温度の調整とばらつきの減少が可能な生産方法が開示されている。
しかしながら、この方法では液相線の温度調整のみで4元系以上の多元系はんだになるうえ、Biの脆弱な機械的特性については有効な改善がされていない。
Patent Document 4 discloses a production method in which a binary eutectic alloy is added to a Bi-containing eutectic alloy and an additive element is further added to adjust the liquidus temperature and reduce variations. Yes.
However, in this method, a quaternary or higher multi-component solder is obtained only by adjusting the temperature of the liquidus, and Bi's brittle mechanical properties are not effectively improved.
Zn系はんだ合金についても、同様に実用的な高温用のPbフリーはんだ合金は提供されていない。例えば、特許文献5には、ZnにAlを添加することにより融点を下げたZn−Al合金を基本とし、これにGe又はMgを添加した高温用Zn系はんだ合金が記載され、更にSn又はInの添加により融点を一層下げる効果があることが記載されている。
しかし、Zn系はんだ合金は、Zn自身の還元性が強く自ら酸化してしまうため、濡れ性が非常に悪いことなどが大きな問題となっている。
Similarly, no practical high-temperature Pb-free solder alloy is provided for Zn-based solder alloys. For example, Patent Document 5 describes a high-temperature Zn-based solder alloy based on a Zn—Al alloy whose melting point has been lowered by adding Al to Zn, to which Ge or Mg is added, and Sn or In. It is described that there is an effect of further lowering the melting point by the addition of.
However, since Zn solder alloys are highly reducible by themselves and oxidize themselves, a major problem is that the wettability is very poor.
具体的に特許文献5には、Alを1〜9質量%、Geを0.05〜1質量%含み、残部がZn及び不可避不純物からなるZn合金と、Alを5〜9質量%、Mgを0.01〜0.5質量%含み、残部がZn及び不可避不純物からなるZn合金と、Alを1〜9質量%、Geを0.05〜1質量%、Mgを0.01〜0.5質量%含み、残部がZn及び不可避不純物からなるZn合金と、Alを1〜9質量%、Geを0.05〜1質量%、Sn及び/又はInを0.1〜25質量%含み、残部がZn及び不可避不純物からなるZn合金と、Alを1〜9質量%、Mgを0.01〜0.5質量%、In及び/又はnを0.1〜25質量%含み、残部がZn及び不可避不純物からなるZn合金と、Alを1〜9質量%、Geを0.05〜1質量%、Mgを0.01〜0.5質量%、Sn及び/又はInを0.1〜25質量%含み、残部がZn及び不可避不純物からなるZn合金が記載されている。 Specifically, Patent Document 5 includes a Zn alloy containing 1 to 9% by mass of Al, 0.05 to 1% by mass of Ge, the balance being Zn and inevitable impurities, 5 to 9% by mass of Al, and Mg. Zn alloy containing 0.01 to 0.5% by mass, the balance being Zn and inevitable impurities, Al 1 to 9% by mass, Ge 0.05 to 1% by mass, Mg 0.01 to 0.5% A Zn alloy composed of Zn and unavoidable impurities, and 1 to 9% by mass of Al, 0.05 to 1% by mass of Ge, 0.1 to 25% by mass of Sn and / or In, and the balance Zn alloy consisting of Zn and inevitable impurities, Al 1-9 mass%, Mg 0.01-0.5 mass%, In and / or n 0.1-25 mass%, the balance is Zn and Zn alloy composed of inevitable impurities, Al 1-9% by mass, Ge 0.05-1% by mass, g 0.01 to 0.5 mass%, Sn and / or In includes 0.1 to 25 wt%, Zn alloy and the balance being Zn and unavoidable impurities is described.
しかし、ここに記載されたZn系はんだ合金は、その組成の範囲内では合金の加工性が十分とは言えず、最も加工性が要求されるワイヤへの加工は困難な場合が多い。しかも、前述のごとくZnは酸化し易く濡れ性が悪いため、CuやNiなどに容易に接合できない。
例えば、Cu基板やNiを最上層に有するCu基板などに接合した場合、車載用などのように厳しい環境下で使用し続けることは困難である。そして、GeやSnが添加されても酸化したZnは還元できず、濡れ性を向上させることはできない。
However, the Zn-based solder alloy described here cannot be said to have sufficient workability of the alloy within the range of the composition, and it is often difficult to process the wire that requires the highest workability. Moreover, as described above, Zn is easily oxidized and has poor wettability, so that it cannot be easily joined to Cu, Ni, or the like.
For example, when it is joined to a Cu substrate or a Cu substrate having Ni as the uppermost layer, it is difficult to continue to use in a severe environment such as in-vehicle use. Even if Ge or Sn is added, oxidized Zn cannot be reduced, and wettability cannot be improved.
特許文献6には、Znを主成分とする材料の表面における酸化膜を除去した後に、又は酸化膜が存在しない状態で、その酸化膜よりもその酸化物が還元され易い金属を主成分とする被覆層を表面に設けた、Znを主成分とするはんだ材料について記載されている。つまり、酸化膜の無い状態のZnを主成分とする材料に被覆金属層を設けることによって、耐熱性が高く、接合体を緻密に接合できるはんだ材料となることが示されている。 In Patent Document 6, the main component is a metal whose oxide is more easily reduced than the oxide film after the oxide film on the surface of the material containing Zn as a main component is removed or in the absence of the oxide film. It describes a solder material mainly composed of Zn and having a coating layer on the surface. That is, it has been shown that by providing a coating metal layer on a material mainly composed of Zn in the absence of an oxide film, a solder material having high heat resistance and capable of bonding a bonded body densely is obtained.
しかし、被覆材としては具体的に挙げられているCuは、一般的に濡れ性が悪いとされている。つまり、電子部品等を接合する基板はほとんどの場合、Cuであるが、CuにSiチップやSiCチップなどの電子部品を接合しようとする場合、濡れ性や接合性が十分でない場合あり、その際、濡れ性等を向上させるためにAgやAuのメタライズ層を設けることが一般的に行われている。 However, Cu specifically mentioned as a coating material is generally considered to have poor wettability. That is, in most cases, the substrate to which electronic parts are joined is Cu, but when trying to join electronic parts such as Si chips and SiC chips to Cu, wettability and bondability may not be sufficient. In order to improve wettability and the like, it is a common practice to provide a metallized layer of Ag or Au.
すなわち、Cuの濡れ性等を補うためにCu基板に敢えて製造工程が増え、値段も高いAgやAuのメタライズ層を設けているのが実情であり、このような対応を取らなければならないほどCuは濡れ性に劣るのである。従って、Znを主成分とするはんだに、Cuなどの被覆層を設けたところで、濡れ性や接合性の悪いZn系はんだの濡れ性や、接合性が上がるとは考えづらく、当然、緻密な接合も難しいと推測される。加えて、酸化膜除去工程、被覆形成工程が加わり、製造工程が長くなって生産性が悪く、大きなコストアップにも繋がってしまう。 In other words, in order to compensate for the wettability of Cu, etc., the number of manufacturing steps has been increased on the Cu substrate, and the fact is that an expensive metallization layer of Ag or Au is provided. Is inferior in wettability. Therefore, it is difficult to think that the wettability or bondability of Zn-based solder having poor wettability or bondability is improved when a coating layer such as Cu is provided on the solder containing Zn as a main component. Is also difficult. In addition, an oxide film removing process and a coating forming process are added, and the manufacturing process becomes long, resulting in poor productivity and a large cost increase.
以上、述べたように高温用のPbフリーはんだ合金、特にZnを主成分とするPbフリーはんだ合金については、濡れ性をはじめとして改善すべき課題が多いため、未だ実用化されていないのが実情である。 As described above, Pb-free solder alloys for high temperatures, particularly Pb-free solder alloys mainly composed of Zn, have many problems to be improved including wettability, and are not yet put into practical use. It is.
本発明は、電子部品の組立などで用いるのに好適な300℃〜400℃程度の融点を有し、濡れ性、接合性、加工性、信頼性に優れ、Pbを含まず且つZnを主成分とする高温用のはんだ合金を提供することを目的とする。 The present invention has a melting point of about 300 ° C. to 400 ° C. suitable for use in assembling electronic components, etc., is excellent in wettability, bondability, workability, and reliability, does not contain Pb, and contains Zn as a main component. An object of the present invention is to provide a high temperature solder alloy.
本発明の第1の発明は、はんだ合金表面の酸化物層が120nm以下であり、表面粗さRaが0.60μm以下であることを特徴とするZnを主成分とするPbフリーはんだ合金である。 A first invention of the present invention is a Pb-free solder alloy containing Zn as a main component, characterized in that the oxide layer on the surface of the solder alloy is 120 nm or less and the surface roughness Ra is 0.60 μm or less. .
本発明の第2発明は、第1の発明におけるはんだ合金が、Alを0.01質量%以上、9.0質量%以下含み、Geを0.01質量%以上、8.0質量%以下、Mgを0.01質量%以上、5.0質量%以下、Agを0.1質量%以上、4.0質量%以下、Pを0.5質量%以下の範囲で、Ge、Mg、Ag、Pのいずれか1種以上を含有し、残部Znと不可避不純物からなることを特徴とするZnを主成分とするPbフリーはんだ合金である。 According to a second aspect of the present invention, the solder alloy according to the first aspect of the invention includes Al in an amount of 0.01% by mass to 9.0% by mass, Ge is 0.01% by mass to 8.0% by mass, Mg, 0.01 mass% or more, 5.0 mass% or less, Ag in the range of 0.1 mass% or more and 4.0 mass% or less, P in the range of 0.5 mass% or less, Ge, Mg, Ag, It is a Pb-free solder alloy containing Zn as a main component, containing any one or more of P, and remaining Zn and inevitable impurities.
本発明の第3の発明は、第1の発明におけるはんだ合金が、Alを3.0質量%以上、7.0質量%以下含み、Geを0.1質量%以上、3.0質量%以下、Mgを0.01質量%以上、3.0質量%以下の範囲でGe、Mgのいずれか1種以上を含有し、残部Znと不可避不純物からなることを特徴とするZnを主成分とするPbフリーはんだ合金である。 According to a third aspect of the present invention, the solder alloy according to the first aspect of the present invention includes Al in a range of 3.0% by mass to 7.0% by mass, and Ge in a range of 0.1% by mass to 3.0% by mass. The main component is Zn, characterized in that it contains at least one of Ge and Mg in the range of 0.01% by mass or more and 3.0% by mass or less of Mg, and consists of the balance Zn and inevitable impurities. Pb-free solder alloy.
本発明の第4の発明は、はんだ合金表面を研磨して表面の酸化物層の厚みを120nm以下、表面粗さRaを0.60μm以下とすることを特徴とするZnを主成分とするPbフリーはんだ合金の製造方法である。 A fourth invention of the present invention is a Pb containing Zn as a main component, characterized in that the surface of the solder alloy is polished so that the thickness of the oxide layer on the surface is 120 nm or less and the surface roughness Ra is 0.60 μm or less. This is a method for producing a free solder alloy.
本発明の第5の発明は、はんだ合金表面を酸洗浄して表面の酸化物層の厚みを120nm以下とすることを特徴とするZnを主成分とするPbフリーはんだ合金の製造方法である。 According to a fifth aspect of the present invention, there is provided a method for producing a Pb-free solder alloy containing Zn as a main component, characterized in that the surface of the solder alloy is subjected to acid cleaning so that the thickness of the oxide layer on the surface is 120 nm or less.
本発明の第6の発明は、表面粗さRaが0.3μm以下の圧延ロールを用い、はんだ合金を圧延して、前記はんだ合金の表面粗さRaを0.60μm以下とすることを特徴とするZnを主成分とするPbフリーはんだ合金の製造方法である。 A sixth aspect of the present invention is characterized in that a rolling roll having a surface roughness Ra of 0.3 μm or less is used to roll a solder alloy so that the surface roughness Ra of the solder alloy is 0.60 μm or less. This is a method for producing a Pb-free solder alloy containing Zn as a main component.
本発明の第7の発明は、第4から第6の発明におけるはんだ合金が、Alを0.01質量%以上、9.0質量%以下含み、Geを0.01質量%以上、8.0質量%以下、Mgを0.01質量%以上、5.0質量%以下、Agを0.1質量%以上、4.0質量%以下、Pを0.5質量%以下の範囲で、Ge、Mg、Ag、Pのいずれか1種以上を含有し、残部Znと不可避不純物からなることを特徴とするZnを主成分とするPbフリーはんだ合金の製造方法である。 According to a seventh aspect of the present invention, the solder alloy according to the fourth to sixth aspects includes 0.01 mass% or more and 9.0 mass% or less of Al, 0.01 mass% or more of Ge, and 8.0 mass%. Mass% or less, Mg 0.01 mass% or more, 5.0 mass% or less, Ag 0.1 mass% or more and 4.0 mass% or less, P in a range of 0.5 mass% or less, Ge, This is a method for producing a Pb-free solder alloy containing Zn as a main component, which contains at least one of Mg, Ag, and P, and consists of the balance Zn and inevitable impurities.
本発明の第8の発明は、第4から第6の発明おけるはんだ合金が、Alを3.0質量%以上、7.0質量%以下含み、Geを0.1質量%以上、3.0質量%以下、Mgを0.01質量%以上、3.0質量%以下の範囲でGe、Mgのいずれか1種以上を含有し、残部Znと不可避不純物からなることを特徴とするZnを主成分とするPbフリーはんだ合金の製造方法である。 According to an eighth aspect of the present invention, the solder alloy according to the fourth to sixth aspects of the invention contains Al in an amount of 3.0% by mass or more and 7.0% by mass or less, and Ge in an amount of 0.1% by mass or more and 3.0% by mass. Mainly composed of Zn, characterized in that it contains at least one of Ge and Mg in a range of mass% or less, Mg in a range of 0.01 mass% or more and 3.0 mass% or less, and consists of the balance Zn and inevitable impurities. This is a method for producing a Pb-free solder alloy as a component.
本発明により、濡れ性、接合性、加工性、信頼性等に優れると同時に、300℃程度のリフロー温度に十分耐えることができ、パワートランジスタ用素子のダイボンディングなど各種電子部品の組立工程でのはんだ付に好適な高温用のPbフリーはんだ合金を提供することができる。 The present invention is excellent in wettability, bondability, workability, reliability, etc., and can sufficiently withstand a reflow temperature of about 300 ° C. In the assembly process of various electronic components such as die bonding of power transistor elements. A high-temperature Pb-free solder alloy suitable for soldering can be provided.
本発明であるZnを主成分とするPbフリーはんだ合金は、Pbを含まず、Znを主成分とし、酸化物層が120nm以下であり、表面粗さRaが0.60μm以下である。
Znは酸化し易く、電子部品等を接合する際、はんだ表面に形成された酸化物(酸化物層)によって、濡れ性や接合性が大きく低下してしまう。このため、本発明のはんだ合金は、はんだ表面の酸化物層を薄くするとともに表面粗さを小さくすることによってはんだ表面積を小さくし、はんだ単位量当り(例えば単位重量、単位体積)の酸化物量を少なくして濡れ性や接合性が格段に優れるように改良したものである。
The Pb-free solder alloy containing Zn as a main component according to the present invention does not contain Pb, contains Zn as a main component, has an oxide layer of 120 nm or less, and a surface roughness Ra of 0.60 μm or less.
Zn is easily oxidized, and wettability and bondability are greatly reduced by the oxide (oxide layer) formed on the solder surface when bonding electronic components and the like. For this reason, the solder alloy of the present invention reduces the solder surface area by thinning the oxide layer on the solder surface and reducing the surface roughness, thereby reducing the amount of oxide per unit amount of solder (for example, unit weight, unit volume). It is improved so that the wettability and bondability are remarkably excellent by reducing the amount.
さらに、はんだ組成として好ましくは、Alを含有し、Ge、Mg、Ag、Pのいずれか1種以上を含有してよく、残部Znと不可避不純物から構成されている。とくに、Zn−Al共晶組成とすることにより、良好な加工性、応力緩和性が得られ、Ge、Mg、Ag、Pのいずれか1種以上を含有することにより濡れ性等、はんだ材料に求められる諸特性を調整することができる。
以下、本発明におけるはんだ合金の酸化物層、表面粗さ、ロール表面粗さ、はんだ組成等について詳しく説明する。
Further, the solder composition preferably contains Al, may contain at least one of Ge, Mg, Ag, and P, and is composed of the balance Zn and inevitable impurities. In particular, by using a Zn-Al eutectic composition, good workability and stress relaxation properties can be obtained, and by containing at least one of Ge, Mg, Ag, and P, the solder material such as wettability can be obtained. Various required characteristics can be adjusted.
Hereinafter, the oxide layer, surface roughness, roll surface roughness, solder composition and the like of the solder alloy in the present invention will be described in detail.
<はんだ合金表面の酸化物層>
本発明において、はんだ合金表面の酸化物層を120nm以下にすることは必須条件である。Znは419℃という高温用はんだの主成分として適した融点を持っていたり、熱伝導性がPbの3倍程度あったり、安価な原料であったりするなど多くの利点を持つ。一方でZnは酸化し易いことに起因し、濡れ性が非常に悪いという欠点がある。この欠点を克服するための重要な条件が酸化物層を薄くすることである。
<Oxide layer on solder alloy surface>
In the present invention, it is an essential condition that the oxide layer on the surface of the solder alloy is 120 nm or less. Zn has many advantages such as having a melting point suitable as a main component of high-temperature solder at 419 ° C., having a thermal conductivity of about 3 times that of Pb, and being an inexpensive raw material. On the other hand, Zn is easily oxidized and has a defect that wettability is very poor. An important condition for overcoming this drawback is to thin the oxide layer.
つまり、濡れ性や接合性を低下させる最も大きな原因は、基板や電子部品の接合面とはんだ母相との間に存在するはんだ合金表面の酸化物である。通常、金属同士は適当な選択をすれば、合金化する。
例えば、基板のCuまたは最上層に設ける場合があるNiなどとZnは溶融状態で容易に固溶し合う。一方でZn等の酸化物は接合温度(例えば350℃〜450℃)では当然固体であり、基板等の金属面とは反応せず、はんだ金属(Zn等)と基板面金属(Cu等)とは接触できず、その結果、接合ができないことになる。逆に、Zn系はんだ合金を基板等に接合する際、はんだ合金表面に酸化物が存在しなければ、金属同士が接することができ接合が可能となるのである。以上より、はんだ表面に極力、酸化物層を存在させないことがZn系はんだ合金にとっては最も重要な条件の一つになる。
In other words, the greatest cause of reducing wettability and bondability is an oxide on the surface of the solder alloy existing between the bonding surface of the substrate or electronic component and the solder matrix. Usually, metals are alloyed if they are selected appropriately.
For example, Cu or Ni, which may be provided on the uppermost layer of the substrate, and Zn are easily dissolved in a molten state. On the other hand, an oxide such as Zn is naturally solid at a junction temperature (for example, 350 ° C. to 450 ° C.) and does not react with a metal surface such as a substrate, and solder metal (Zn etc.) and a substrate surface metal (Cu etc.) Will not be able to contact and as a result will not be able to join. Conversely, when joining a Zn-based solder alloy to a substrate or the like, if there is no oxide on the surface of the solder alloy, the metals can be in contact with each other and joining is possible. From the above, it is one of the most important conditions for a Zn-based solder alloy that the oxide layer does not exist on the solder surface as much as possible.
Zn系はんだ合金表面の酸化物層は、濡れ性等を大きく下げるが、全く存在させないことは困難であり、さらにある程度の厚みであれば、接合条件等でカバーできるので、酸化物層の厚みは、120nm以下であれば良い。Zn系はんだの場合、含有元素にも左右されるものの概ね120nm以下の厚みの酸化物層であれば、接合時に酸化物層が破れ、はんだ溶融金属が酸化物層内部から出てきて基板等の金属面と直接接することが可能となり、接合できるものである。 Although the oxide layer on the surface of the Zn-based solder alloy greatly reduces wettability and the like, it is difficult not to make it exist at all, and since it can be covered with bonding conditions and the like if it has a certain thickness, the thickness of the oxide layer is 120 nm or less. In the case of Zn-based solder, although it depends on the contained elements, if the oxide layer has a thickness of approximately 120 nm or less, the oxide layer is broken at the time of joining, and the molten solder metal comes out of the oxide layer and It can be in direct contact with the metal surface and can be joined.
例えば、Cu基板にZn系はんだワイヤを供給する際、フォーミングガス(水素と窒素の混合ガス)を使用し、Cu基板を水素で還元しながら、ワイヤを高速で供給すれば、ワイヤ先端の酸化物層は破れ、かつ、還元されて実質的に酸化物層の無いCu面に溶融はんだを直接供給でき、接合が可能となるのである。このように酸化物層を介さず、はんだと基板等が接合されれば、接合強度は高く、過酷な環境下でも十分に耐え得る優れた信頼性を得ることができるのである。 For example, when supplying a Zn-based solder wire to a Cu substrate, using a forming gas (mixed gas of hydrogen and nitrogen) and reducing the Cu substrate with hydrogen while supplying the wire at high speed, an oxide at the tip of the wire The layer is broken and reduced, and the molten solder can be directly supplied to the Cu surface substantially free of the oxide layer, so that bonding is possible. In this way, if the solder and the substrate are bonded without using the oxide layer, the bonding strength is high, and excellent reliability that can sufficiently withstand even in a harsh environment can be obtained.
<はんだ合金の表面粗さ>
本発明において、はんだ合金の酸化物層と同様に必須条件となるのは、はんだ合金の表面粗さである。
はんだ合金の酸化物層を120nm以下にするとともに表面粗さRaが、0.60μm以下にすることによって、本発明の効果を有することとなる。
<Surface roughness of solder alloy>
In the present invention, the essential condition as with the oxide layer of the solder alloy is the surface roughness of the solder alloy.
When the oxide layer of the solder alloy is set to 120 nm or less and the surface roughness Ra is set to 0.60 μm or less, the effects of the present invention are obtained.
すでに述べたように、はんだの濡れ性や接合性を低下させる大きな原因は酸化物層である。さらに詳しくは、はんだ合金表面近傍に存在する酸化物量なのである。つまり、酸化物層がいくら薄くても表面が粗く、凹凸が多ければ、表面積が増えるためにはんだ合金表面(表面近傍)に存在する酸化物量は多くなってしまい、実質的に酸化物層が厚い場合と同じ現象が起き、濡れ性や接合性を大きく低下させてしまう。 As already described, the major cause of the decrease in solder wettability and bondability is the oxide layer. More specifically, the amount of oxide present in the vicinity of the solder alloy surface. In other words, no matter how thin the oxide layer is, if the surface is rough and there are many irregularities, the surface area increases, so the amount of oxide present on the solder alloy surface (near the surface) increases, and the oxide layer is substantially thick. The same phenomenon occurs, and the wettability and bondability are greatly reduced.
表面粗さが大きい場合、つまり表面が粗い場合は単に酸化物量が多いだけではなく、さらに悪いことには接触面積が小さくなってしまう。例えば、シート状のはんだで電子部品と基板を接合しようとした場合、実質的な接触面積が濡れ性等に非常に大きく影響する。
逆に、はんだシートの表面粗さが非常に小さい場合は、電子部品の接合面積が実質的な接合面積になる。一方で表面粗さが極端に大きい場合、はんだと電子部品は点で接することになり、非常に接合面積が小さくなってしまい、このような場合、いくら酸化物層が薄くても接合が困難になってしまう。
When the surface roughness is large, that is, when the surface is rough, the amount of oxide is not only large, but worse, the contact area is small. For example, when an electronic component and a substrate are to be joined with a sheet-like solder, the substantial contact area greatly affects the wettability and the like.
Conversely, when the surface roughness of the solder sheet is very small, the bonding area of the electronic component becomes a substantial bonding area. On the other hand, if the surface roughness is extremely large, the solder and the electronic component will be in contact with each other at a point, resulting in a very small bonding area. In such a case, it is difficult to bond even if the oxide layer is thin. turn into.
はんだ合金の表面粗さRaは、0.60μm以下が好ましいとこは、実験的に得られた結果であり、定性的には既に説明したとおりである。実験の結果、表面粗さRaが0.60μmを超えてしまうと酸化物層やはんだ組成を調整しても接合は困難であった。さらに接合時にフォーミングガスを使用して基板を還元しながらはんだ供給しても接合はできなかった。このため、はんだ合金の表面粗さRaは0.60μm以下とする。 The fact that the surface roughness Ra of the solder alloy is preferably 0.60 μm or less is a result obtained experimentally and is qualitatively as already described. As a result of the experiment, when the surface roughness Ra exceeded 0.60 μm, it was difficult to join even if the oxide layer and the solder composition were adjusted. Furthermore, even if solder was supplied while reducing the substrate using a forming gas during bonding, bonding could not be performed. For this reason, the surface roughness Ra of the solder alloy is set to 0.60 μm or less.
<製造方法>
原料の溶解方法は、抵抗加熱法、還元拡散法、高周波溶解法などで行ってよく、とくに高周波溶解法は高融点の金属でも短時間で効率よく溶解できるために好ましい。
はんだをシート状に加工する場合、圧延方法は冷間圧延、温間圧延、熱間圧延、プレス圧延などで行ってよい。とくにZn系はんだは、Pb系はんだやSn系はんだに比較して硬いため、はじめに熱間圧延である程度の厚みまで薄く圧延し、その後、冷間圧延を行うことが好ましい。
このように2種類の圧延を組み合わせることにより、圧延中にクラックやバリが入りづらくなり品質が向上するうえ、圧延速度を上げるなど生産効率を高めることができる。
<Manufacturing method>
The raw material may be dissolved by a resistance heating method, a reduction diffusion method, a high-frequency dissolution method, or the like. In particular, the high-frequency dissolution method is preferable because even a metal having a high melting point can be efficiently dissolved in a short time.
When processing the solder into a sheet, the rolling method may be cold rolling, warm rolling, hot rolling, press rolling, or the like. In particular, since Zn-based solder is harder than Pb-based solder or Sn-based solder, it is preferable to first perform thin rolling to a certain thickness by hot rolling, and then perform cold rolling.
By combining the two types of rolling in this manner, cracks and burrs are less likely to occur during rolling, improving the quality and increasing the production efficiency such as increasing the rolling speed.
圧延に使用するロールは、表面粗さRaを0.60μm以下とすることが好ましい。
熱間圧延、冷間圧延など2種類以上の圧延を行う際は、最終圧延の際に用いる圧延ロールのみ、その表面粗さRaを0.60μm以下にするとよい。
このように小さい表面粗さの圧延ロールを用いる理由は、当然、製品の表面粗さを小さくするためである。表面粗さRaが0.60μmを超える表面粗さの圧延ロールを使用してしまうと、酸化物層の厚みを120nm以下に制御したとしても濡れ性や接合性が非常に悪くなってしまうためである。
The roll used for rolling preferably has a surface roughness Ra of 0.60 μm or less.
When performing two or more types of rolling such as hot rolling and cold rolling, the surface roughness Ra is preferably 0.60 μm or less only for the rolling roll used in the final rolling.
The reason why such a roll having a small surface roughness is used is, of course, to reduce the surface roughness of the product. If a roll having a surface roughness Ra exceeding 0.60 μm is used, even if the thickness of the oxide layer is controlled to 120 nm or less, the wettability and the bonding property will be very poor. is there.
はんだ合金表面の酸化物層を薄くし、表面粗さを小さくするために、シートやワイヤの加工前、加工中、加工後に研磨や酸洗浄を行ってもよい。
酸洗浄は酸の種類に限定はないが、弱酸を用いることが好ましい。強酸を用いて洗浄を行ってもよいが、条件によってははんだ合金を構成する金属の酸溶液への溶解速度が速く、部分的に溶解が進み、表面粗さが大きくなってしまう可能性が高い。したがって、弱酸を用いて、状況に応じて、時間を長めに調整して洗浄することが好ましい。
In order to reduce the thickness of the oxide layer on the surface of the solder alloy and reduce the surface roughness, polishing or acid cleaning may be performed before, during or after the processing of the sheet or wire.
The acid cleaning is not limited to the type of acid, but it is preferable to use a weak acid. Cleaning may be performed using a strong acid, but depending on the conditions, the dissolution rate of the metal constituting the solder alloy into the acid solution is fast, the dissolution proceeds partially, and the surface roughness is likely to increase. . Therefore, it is preferable to use a weak acid and perform cleaning while adjusting the time longer depending on the situation.
はんだの研磨についても、特に限定はされない。例えば、はんだシートやワイヤを研磨紙で適度な力で挟み、引っ張りながら巻き取っていくことで研磨してもよい。さらにははんだの研磨方向(巻取方向)と垂直方向に研磨紙を往復運動させ、研磨してもよい。
以上のようにはんだを研磨したり、酸洗浄したり、表面粗さRaが0.60μm以下のロールで圧延したり、さらにこれらの方法を組み合わせることによって、酸化物層が薄く、表面粗さの小さいはんだ合金を製造する。
There is no particular limitation on the polishing of the solder. For example, it may be polished by sandwiching a solder sheet or wire with abrasive paper with an appropriate force and winding it while pulling. Furthermore, polishing may be performed by reciprocating the polishing paper in a direction perpendicular to the solder polishing direction (winding direction).
By polishing the solder as described above, acid cleaning, rolling with a roll having a surface roughness Ra of 0.60 μm or less, and further combining these methods, the oxide layer is thin and the surface roughness is reduced. Manufacturing a small solder alloy.
<はんだ組成>
本発明が提供するZnを主成分とするPbフリーはんだ合金は、Alを0.01質量%以上、9.0質量%以下含み、Geを0.01質量%以上、8.0質量%以下、Mgを0.01質量%以上、5.0質量%以下、Agを0.1質量%以上、4.0質量%以下、Pを0.5質量%以下の範囲で、Ge、Mg、Ag、Pのいずれか1種以上を含み残部Znと不可避不純物から構成されている。
次に、これらの元素の効果について説明する。
<Solder composition>
The Pb-free solder alloy containing Zn as a main component provided by the present invention contains 0.01 mass% or more and 9.0 mass% or less of Al, 0.01 mass% or more and 8.0 mass% or less of Ge, Mg, 0.01 mass% or more, 5.0 mass% or less, Ag in the range of 0.1 mass% or more and 4.0 mass% or less, P in the range of 0.5 mass% or less, Ge, Mg, Ag, It contains any one or more of P and is composed of the remaining Zn and inevitable impurities.
Next, effects of these elements will be described.
<Zn>
Znは本発明のはんだ合金における主成分である。
Znは419℃という融点を有し、300〜400℃での接合されることが望まれる高温用はんだの主成分としては非常に適している。加えて、熱伝導性がPbの3倍あるため、放熱性に優れ、接合材としては非常に好ましい性質も有する。コスト的にも安価でどこでも入手できるなど多くの利点を持っているが、その一方でZnは酸化し易いことに起因する、濡れ性が非常に悪いという欠点がある。
<Zn>
Zn is a main component in the solder alloy of the present invention.
Zn has a melting point of 419 ° C. and is very suitable as a main component of high-temperature solder that is desired to be joined at 300 to 400 ° C. In addition, since the thermal conductivity is three times that of Pb, it has excellent heat dissipation and has a very favorable property as a bonding material. Although it has many advantages such as being inexpensive and available everywhere, Zn has a drawback that wettability is very bad due to easy oxidation.
そこで、本発明では主として、酸化物層を薄くし、表面粗さを小さくすることで濡れ性等の改善を行っているが、組成調整でもある程度の改善ができ、加えて、加工性等を改善するためにも他の元素を含有させることが必要となる。本発明におけるZnの含有量は、このように加工性や応力緩和性等、はんだに求められる諸特性を向上させるために含有させる元素に依存している。 Therefore, in the present invention, wettability and the like are mainly improved by making the oxide layer thin and reducing the surface roughness, but some improvement can be achieved by adjusting the composition, and in addition, workability and the like are improved. In order to achieve this, it is necessary to contain other elements. The Zn content in the present invention depends on the elements to be contained in order to improve various properties required for solder, such as workability and stress relaxation properties.
<Al>
AlはZnと共晶合金を形成し、Znの加工性や応力緩和性を格段に向上させる。
このため、はんだ中に含有させることが好ましく、Alの含有量は0.01質量%以上、9.0質量%以下とするとよい。
0.01質量%以下では含有量が少なすぎて効果が現れない。9.0質量%を超えてしまうと液相線温度が420℃程度となり、接合温度としてやや高めであることに加え、他の元素と生成する脆い金属間化合物の割合が多くなってしまい、接合性や信頼性を低下させてしまう可能性が高く、さらに、AlはZnより酸化し易いため、強固な酸化物層を厚く形成してしまう場合がある。
以上の理由により、Alの含有量は0.01質量%以上、9.0質量%以下とすることがよく、さらに好ましくは3.0質量%以上、7.0質量%以下である。この理由はZn−5質量%Alが共晶組成であるため、その近傍の組成範囲では非常に優れた加工性や応力緩和性を示すからである。
<Al>
Al forms a eutectic alloy with Zn, and dramatically improves the workability and stress relaxation of Zn.
For this reason, it is preferable to make it contain in a solder and it is good to make content of Al into 0.01 mass% or more and 9.0 mass% or less.
If it is 0.01% by mass or less, the content is too small and the effect does not appear. If it exceeds 9.0% by mass, the liquidus temperature becomes about 420 ° C., which is slightly higher as the bonding temperature, and the proportion of brittle intermetallic compounds generated with other elements increases. In addition, since Al is more likely to be oxidized than Zn, a strong oxide layer may be formed thickly.
For the above reasons, the Al content is preferably 0.01% by mass or more and 9.0% by mass or less, and more preferably 3.0% by mass or more and 7.0% by mass or less. This is because Zn-5% by mass Al has a eutectic composition, and thus exhibits excellent workability and stress relaxation properties in the vicinity of the composition range.
<Ge>
Geは本発明のPbフリーはんだ合金において含有されることによって、加工性向上の効果を発揮するとともに濡れ性の向上にも寄与するものである。
即ち、GeはZnやAlには、わずかにしか固溶せず、はんだ溶融後に冷却されて固まる際に、まず溶融はんだ中のGeが析出し、これが核となって、はんだの微結晶化に寄与して、その加工性を向上させる。さらにGeはZnと共晶合金を作り、特にZn−Geの共晶組成(Zn−6質量%Ge)付近において結晶を微細化し、加工性を向上させる効果を持つものである。
<Ge>
When Ge is contained in the Pb-free solder alloy of the present invention, it exerts an effect of improving workability and contributes to improvement of wettability.
In other words, Ge is only slightly dissolved in Zn and Al, and when cooled and solidified after melting the solder, Ge in the molten solder first precipitates, which serves as a nucleus for the microcrystallization of the solder. Contributes and improves its workability. Further, Ge forms an eutectic alloy with Zn, and has the effect of improving the workability by refining the crystal particularly in the vicinity of the Zn—Ge eutectic composition (Zn-6 mass% Ge).
このようなGeの効果は、加工性向上だけに留まらず、濡れ性を向上させる効果もある。Geを含有させることにより濡れ性が格段に向上するわけであるが、この理由は以下のように考えられる。
すなわち、GeがZnよりも比重が小さいため(比重:Ge=5.4、Zn=7.1)、溶融時にはんだ表面に表出し易く、少量の含有量で還元効果を発揮できるからである。
Such an effect of Ge not only improves workability but also improves wettability. Although the wettability is remarkably improved by containing Ge, the reason is considered as follows.
That is, since Ge has a specific gravity smaller than that of Zn (specific gravity: Ge = 5.4, Zn = 7.1), it is easy to be exposed on the solder surface during melting, and a reduction effect can be exhibited with a small amount.
このような濡れ性や加工性を向上させる効果を有するGeの含有量は、具体的には0.01質量%以上、8.0質量%以下であり、さらに好ましくは0.1質量%以上、3.0質量%以下である。
既に述べたようにGeの役割は、溶融はんだ表面に表出しやすい性質と還元効果による濡れ性の向上であったり、はんだの微結晶化の核であったりする。このため、多量に添加する必要がない場合が多く、Geの含有量が0.01質量%未満では、含有量が少なすぎてこれらの効果が得られない。また、含有量が8.0質量%より多くなると、Ge自身の核が大きくなって微結晶化しなかったり、Geの酸化膜が厚くなり過ぎたりするため好ましくない。さらに好ましくは0.1質量%以上、3.0質量%以下であり、この範囲内であればGeの優れた効果を発揮しやすい。
The content of Ge having the effect of improving the wettability and workability is specifically 0.01% by mass or more and 8.0% by mass or less, more preferably 0.1% by mass or more, It is 3.0 mass% or less.
As already described, the role of Ge is to improve the wettability due to the property of being easily exposed on the surface of the molten solder and the reduction effect, or as the nucleus of solder microcrystallization. For this reason, there is often no need to add a large amount, and if the Ge content is less than 0.01% by mass, the content is too small to obtain these effects. On the other hand, if the content exceeds 8.0% by mass, the nucleus of Ge itself becomes large and does not crystallize, or the Ge oxide film becomes too thick. More preferably, they are 0.1 mass% or more and 3.0 mass% or less, and if it exists in this range, it will be easy to exhibit the outstanding effect of Ge.
<Mg>
Mgは本発明のZnを主成分とするPbフリーはんだ合金の諸特性を目的に合わせて調整する際に適宜含有させる元素である。
Mgを含有することよって得られる効果は、以下のとおりである。
MgはZnとの共晶合金を2つの組成で作り、それらの共晶温度は341℃と364℃である。このようにZn−Al合金よりも低い共晶温度を2点有するため、はんだ合金の融点をさらに下げたい場合に含有させる。
<Mg>
Mg is an element that is appropriately contained when adjusting various characteristics of the Pb-free solder alloy mainly composed of Zn of the present invention in accordance with the purpose.
The effects obtained by containing Mg are as follows.
Mg makes a eutectic alloy with Zn with two compositions, and their eutectic temperatures are 341 ° C. and 364 ° C. Thus, since it has two eutectic temperatures lower than Zn-Al alloy, it is contained when it is desired to further lower the melting point of the solder alloy.
さらに、MgはZn、Alよりも酸化し易いため、少量の含有量で濡れ性を向上させる効果も有する。ただし、Mgが多量に含有されるとはんだ表面に強固な酸化膜を形成してしまうため、その添加量には注意を要する。
接合条件は様々であるものの、融点低下効果と濡れ性向上効果を考慮し、その含有量は0.01質量%以上、5.0質量%以下が好ましく、さらに好ましくは3.0質量%以下である。この含有量が0.01質量%未満では少なすぎてMgの効果を十分発揮させることができない。一方、5.0質量%を超えると、逆に濡れ性が低下したり液相線温度が高くなりすぎたりするなどの問題を起こしてしまう。
Furthermore, since Mg is easier to oxidize than Zn and Al, it has the effect of improving wettability with a small amount. However, if Mg is contained in a large amount, a strong oxide film is formed on the solder surface, so care must be taken in the amount of addition.
Although there are various bonding conditions, the content is preferably 0.01% by mass or more and 5.0% by mass or less, more preferably 3.0% by mass or less in consideration of the melting point lowering effect and the wettability improving effect. is there. If the content is less than 0.01% by mass, the content of Mg is too small to fully exhibit the effect of Mg. On the other hand, if it exceeds 5.0% by mass, the wettability is lowered or the liquidus temperature becomes too high.
<Ag>
Agは必要に応じて添加することによって、はんだ合金の濡れ性及び接合性を更に向上させることができる。
Agは電子部品やCu基板の最上層に形成されることからも分かるように濡れ性向上の効果が大きく、本発明においてもAgの添加は濡れ性の向上を目的としている。即ち、Agは酸化し難く、はんだ表面の酸化を防ぐことによって濡れ性を向上させる。従って、濡れ性が不足する場合、Agの添加により濡れ性を向上させることができる。
<Ag>
By adding Ag as necessary, the wettability and the bondability of the solder alloy can be further improved.
As can be seen from the fact that Ag is formed in the uppermost layer of an electronic component or a Cu substrate, the effect of improving wettability is great. In the present invention, addition of Ag is aimed at improving wettability. That is, Ag is difficult to oxidize and improves wettability by preventing oxidation of the solder surface. Therefore, when the wettability is insufficient, the wettability can be improved by adding Ag.
Agの含有量は、0.1質量%以上4.0質量%以下とすることが好ましい。
Agの含有量が4.0質量%を超えると、ZnやAlなどと脆い金属間化合物を生成し、その量が許容範囲を超えてしまう恐れがある。一方、Agの含有量が0.1質量%より少なくなると、期待する効果が得られない場合がある。
The Ag content is preferably 0.1% by mass or more and 4.0% by mass or less.
If the Ag content exceeds 4.0% by mass, brittle intermetallic compounds such as Zn and Al are produced, and the amount may exceed the allowable range. On the other hand, when the Ag content is less than 0.1% by mass, the expected effect may not be obtained.
<P>
Pは、本発明のPbフリーはんだに含まれることによって、より濡れ性を格段に向上させることができるのである。その理由は、Pは還元性が強く、はんだ表面や電子部品等の接合面を還元して酸化膜を除去し金属同士が直接接して反応しやすくするためである。
<P>
By including P in the Pb-free solder of the present invention, the wettability can be remarkably improved. The reason is that P is highly reducible and reduces the bonding surface of the solder surface, electronic parts, etc., removes the oxide film, and facilitates the reaction between the metals in direct contact.
さらにPは、接合時にボイドの発生を低減させる効果がある。
すなわち、Pには強い還元性があり自らが酸化しやすいため、接合時にはんだの主成分であるBiよりも優先的に酸化が進むうえ、はんだを還元しはんだ表面の酸化膜を除去する。そして、電子部品等の接合面においても同様に還元効果を発揮する。その結果、酸化膜を介することなく金属同士が直接接することになるためボイドが発生しにくいのである。
Furthermore, P has an effect of reducing the generation of voids during bonding.
That is, since P has strong reducibility and tends to oxidize itself, the oxidation proceeds preferentially over Bi, which is the main component of the solder, and the solder is reduced to remove the oxide film on the solder surface. And the reduction effect is similarly exhibited also in joint surfaces, such as an electronic component. As a result, since the metals are in direct contact with each other without interposing an oxide film, voids are hardly generated.
Pは、微量の添加でも濡れ性向上の効果を発揮するが、その理由は還元性が非常に強いためである。そのため、Pの含有させる場合の量は0.001質量%以上、0.500質量%以下である。逆にある量以上含有していても濡れ性向上の効果は飽和して変わらず、過剰に含有するとP化合物がはんだ表面に生成されたり、Pが脆弱な相を作り脆化したりする恐れがある。Pがこの上限値を超えると、その酸化物がはんだ表面を覆い、逆に濡れ性を落とす恐れがある。
さらに、PはZnと金属間化合物を生成する。一般的に金属間化合物は転移が進展しづらいため脆く、P−Zn合金においても同様のことが言える。従って、Pの含有量が多くなると金属間化合物の割合が増し、さらには偏析するなどして信頼性を低下させる原因となってしまう。とくにワイヤなどに加工する場合に、断線の原因になり易いことを本発明者は実験的に確認している。
以下、実施例を用いてさらに説明する。
P exhibits the effect of improving the wettability even when added in a very small amount, because the reducibility is very strong. Therefore, the amount in the case of containing P is 0.001% by mass or more and 0.500% by mass or less. On the other hand, even if it is contained in a certain amount or more, the effect of improving wettability is saturated and does not change, and if it is contained excessively, P compound may be generated on the solder surface, or P may form a brittle phase and become brittle. . When P exceeds this upper limit value, the oxide covers the solder surface, and there is a risk that wettability is reduced.
Further, P generates an intermetallic compound with Zn. In general, intermetallic compounds are fragile because transition is difficult to progress, and the same can be said for P-Zn alloys. Therefore, when the content of P increases, the proportion of intermetallic compounds increases, and further segregation causes a decrease in reliability. The inventor has experimentally confirmed that it is likely to cause disconnection particularly when processing into a wire or the like.
Hereinafter, further description will be made using examples.
原料として、それぞれ純度99.9質量%以上のZn、Al、Ge、Mg、Ag及びPを準備した。大きな薄片やバルク状の原料については、溶解後の合金においてサンプリング場所による組成のバラツキがなく、均一になるように留意しながら、切断及び粉砕などにより3mm以下の大きさに細かくした。 As raw materials, Zn, Al, Ge, Mg, Ag and P having a purity of 99.9% by mass or more were prepared. Large flakes and bulk-shaped raw materials were reduced to a size of 3 mm or less by cutting and crushing while paying attention to ensure that the alloy after melting did not vary in composition depending on the sampling location.
次に、これら原料から所定量を秤量し、高周波溶解炉用のグラファイト製坩堝に入れ、その各原料の入った坩堝を高周波溶解炉に装入し、酸化を抑制するために窒素ガスを原料1kg当たり0.7リットル/分以上の流量で流した。この状態で溶解炉の電源を入れ、原料を加熱溶融させた。金属が溶融しはじめたら混合棒でよく撹拌し、局所的な組成のばらつきが起きないように均一に混ぜた。十分溶融したことを確認した後、高周波電源を切り、速やかに坩堝を取り出し、坩堝内の溶湯をはんだ母合金の鋳型に流し込んだ。鋳型は、はんだ母合金の製造の際に一般的に使用している形状と同様のものを使用した。 Next, a predetermined amount is weighed from these raw materials, put into a graphite crucible for a high-frequency melting furnace, the crucible containing each raw material is charged into the high-frequency melting furnace, and nitrogen gas is added to 1 kg of raw material to suppress oxidation. The flow rate was 0.7 liter / min or more. In this state, the melting furnace was turned on to heat and melt the raw material. When the metal began to melt, it was stirred well with a mixing rod and mixed uniformly so as not to cause local compositional variations. After confirming sufficient melting, the high frequency power supply was turned off, the crucible was quickly taken out, and the molten metal in the crucible was poured into the mold of the solder mother alloy. A mold having the same shape as that generally used in the production of a solder mother alloy was used.
このようにして、各原料の混合比率を変えることにより、試料1〜30のZnを含有するはんだ母合金を作製した。
得られた試料1〜30の各はんだ母合金について、その成分組成をICP発光分光分析器(株式会社島津製作所製「SHIMAZU S−8100」)を用いて分析し、得られた分析結果をはんだ組成として表1に示す。
Thus, the solder mother alloy containing Zn of Samples 1 to 30 was produced by changing the mixing ratio of each raw material.
About each solder mother alloy of the obtained samples 1-30, the component composition is analyzed using an ICP emission spectroscopic analyzer ("SHIMAZU S-8100" manufactured by Shimadzu Corporation), and the obtained analysis results are used as the solder composition. As shown in Table 1.
次に、表1に示す試料1〜30の各はんだ母合金を、表2に示す条件により圧延機でシート状に加工し、各試料の加工性を評価した。また、シート状に加工した各試料について、下記の方法によりシート加工性の評価、濡れ性(接合性)の評価及びヒートサイクル試験による信頼性の評価を行った。得られた結果を表3に示す。
なお、はんだの濡れ性、および接合性等の評価は、はんだ形状に依存しないためワイヤ、ボール、ペーストなどの形状で評価してもよいが、本実施例においてはシートの形状で評価した。
Next, each solder mother alloy of Samples 1 to 30 shown in Table 1 was processed into a sheet shape with a rolling mill under the conditions shown in Table 2, and the workability of each sample was evaluated. Moreover, about each sample processed into the sheet form, evaluation of sheet workability, evaluation of wettability (bondability), and reliability evaluation by a heat cycle test were performed by the following method. The obtained results are shown in Table 3.
Note that the evaluation of solder wettability, bondability, and the like does not depend on the solder shape, and may be evaluated by the shape of a wire, a ball, a paste, or the like.
<加工性評価>
表1に示した試料1〜30の各はんだ母合金(厚み5mmの板状インゴット)を、4インチのワークロールを有する熱間圧延機を用いて、230℃に加熱しながら400μmの厚みまで粗圧延した。
次に、試料1〜30の各試料を表2に示す条件で表面の酸化膜の除去や表面粗さを調整した。
<Processability evaluation>
Each solder mother alloy (plate-shaped ingot having a thickness of 5 mm) of Samples 1 to 30 shown in Table 1 was roughened to a thickness of 400 μm while being heated to 230 ° C. using a hot rolling mill having a 4-inch work roll. Rolled.
Next, the removal of the surface oxide film and the surface roughness of each of the samples 1 to 30 were adjusted under the conditions shown in Table 2.
試料の研磨は研磨紙を用い、目の粗い番数#150から、#240、#360、#700、#1000、#2500、#6000と順番に目の細かい研磨紙を行いて研磨を行っていき、表2には最後に使用した研磨紙の番号を示した。最終研磨後、試料を純水できれいに洗い、さらにアルコールで洗浄した後に真空オーブンを用いて常温での真空乾燥を1時間行った。 The polishing of the sample is performed by using abrasive paper, and by performing fine abrasive paper in order from coarse number # 150 to # 240, # 360, # 700, # 1000, # 2500, # 6000. Table 2 shows the number of the last used abrasive paper. After final polishing, the sample was washed thoroughly with pure water, further washed with alcohol, and then vacuum dried at room temperature for 1 hour using a vacuum oven.
試料の酸洗浄は酢酸を用いて行い、表2に酢酸洗浄時間を示した。酸洗浄後、純水を用いて水洗を3回行い、さらにアルコール洗浄して、ウエスで液分をきれいに拭き取った後、真空オーブンを用いて常温での真空乾燥を1時間行った。 The acid washing of the sample was performed using acetic acid, and Table 2 shows the acetic acid washing time. After acid cleaning, water was washed three times with pure water, alcohol was further washed, and the liquid was thoroughly wiped off with a waste cloth, followed by vacuum drying at room temperature for 1 hour using a vacuum oven.
試料を研磨、または/および酸洗浄後、3インチのワークロールを有する冷間圧延機を用いて厚み50μmまで仕上げ圧延を行った。
仕上げ圧延に用いたロールには、表面粗さの異なる3種類のロールを用いた。各試料の仕上げ圧延に用いたロールの表面粗さ(Ra)を表2に示す。その後、スリッター加工により25mmの幅に裁断した。
The sample was polished and / or acid-washed, and then finish-rolled to a thickness of 50 μm using a cold rolling mill having a 3-inch work roll.
Three types of rolls having different surface roughness were used as the rolls used for finish rolling. Table 2 shows the surface roughness (Ra) of the rolls used for finish rolling of each sample. Thereafter, it was cut into a width of 25 mm by slitting.
このようにしてシート状に加工した後、得られたシート状の各試料を観察して、その加工性を以下のように評価し、その結果を表3に示した。
傷やクラックが全くなかった場合を「○」、シート長さ10m当たり割れやクラックが1〜3箇所ある場合を「△」、4箇所以上ある場合を「×」とした。
After processing into a sheet shape in this way, each of the obtained sheet-shaped samples was observed and the processability was evaluated as follows. The results are shown in Table 3.
The case where there were no scratches or cracks was indicated as “◯”, the case where there were 1 to 3 cracks or cracks per 10 m of the sheet length was indicated as “Δ”, and the case where there were 4 or more points was indicated as “X”.
次に、試料1〜30の酸化物層の厚みと表面粗さを測定した。
酸化物層の厚みは、電界放射型オージェ電子分光装置(ULVAC−PHI製、型式:SAM−4300)を用いて測定した。
表面粗さは、表面粗さ測定装置(東京精密株式会社製、型式:サーフコム470A)を用いて測定を行った。
なお、酸化物層の厚みについては、以下のように定義した。
すなわち、図1に示すようにはんだ表面から深さ方向(はんだ表面に対して垂直)に1000nm入った部分の酸素量を0%として、さらにはんだ表面から深さ1000nmの間の最高酸素濃度を100%として、酸素濃度が10%まで低下したはんだ表面からの進入深さを酸化物層の厚みと定義した。
表2には試料1〜30の製造条件(研磨条件、酸洗条件、ロール表面粗さ)に加え、酸化物層の厚さ、表面粗さ(Ra)を示した。
Next, the thickness and surface roughness of the oxide layers of Samples 1 to 30 were measured.
The thickness of the oxide layer was measured using a field emission Auger electron spectrometer (manufactured by ULVAC-PHI, model: SAM-4300).
The surface roughness was measured using a surface roughness measuring apparatus (manufactured by Tokyo Seimitsu Co., Ltd., model: Surfcom 470A).
The thickness of the oxide layer was defined as follows.
That is, as shown in FIG. 1, the amount of oxygen in the
Table 2 shows the thickness of the oxide layer and the surface roughness (Ra) in addition to the production conditions (polishing conditions, pickling conditions, roll surface roughness) of Samples 1-30.
<濡れ性(接合性)の評価>
シート状に加工した各試料を、濡れ性試験機(装置名:雰囲気制御式濡れ性試験機)を用いて評価した。
即ち、濡れ性試験機のヒーター部に2重のカバーをして、ヒーター部の周囲4箇所から窒素を12リットル/分の流量で流しながら、ヒーター設定温度を410℃にして加熱した。設定したヒーター温度が安定した後、Cu基板(板厚:約0.70mm)をヒーター部にセッティングして25秒間加熱した。
<Evaluation of wettability (bondability)>
Each sample processed into a sheet was evaluated using a wettability tester (device name: atmosphere control type wettability tester).
That is, the heater part of the wettability tester was covered with a double cover, and heated at a heater set temperature of 410 ° C. while flowing nitrogen at a flow rate of 12 liters / minute from four locations around the heater part. After the set heater temperature was stabilized, a Cu substrate (plate thickness: about 0.70 mm) was set in the heater section and heated for 25 seconds.
次に、各試料のはんだ合金をCu基板の上に載せ、25秒加熱した。加熱が完了した後、Cu基板をヒーター部から取り上げ、その横の窒素雰囲気が保たれている場所に一旦設置して冷却した。十分に冷却した後、大気中に取り出して接合部分を観察した。
各試料のはんだ合金とCu基板の接合部分を目視観察し、接合されていなかった場合を「×」、接合されているが濡れ広がりが悪い場合(はんだが盛り上がった状態)を「△」、接合され、且つ濡れ広がりが良い場合(はんだが薄く濡れ広がった状態)を「○」と評価した。
Next, the solder alloy of each sample was placed on a Cu substrate and heated for 25 seconds. After the heating was completed, the Cu substrate was taken up from the heater part, and once installed in a place where the nitrogen atmosphere next to it was kept, it was cooled. After sufficiently cooling, it was taken out into the atmosphere and the bonded portion was observed.
The joint between the solder alloy and the Cu substrate of each sample is visually observed, “x” when not joined, “△” when joined but poorly wet (the solder is raised), and joined. In addition, the case where the wet spread was good (the state where the solder was thin and spread) was evaluated as “◯”.
<ヒートサイクル試験>
ヒートサイクル試験によりはんだ接合の信頼性を評価した。
なお、この試験は、上記の濡れ性の評価において、はんだ合金がCu基板に接合できた試料(濡れ性の評価が「○」及び「△」の試料)を用い、各試料2個ずつ用いて試験した。試験条件は、はんだ合金が接合されたCu基板2個を用い、「−40℃の冷却」と「+150℃の加熱」を1サイクルとするヒートサイクル試験を実施し、各試料のうち1個は途中確認のため300サイクルまで、他の1個は500サイクルまでヒートサイクル試験を繰り返した。
<Heat cycle test>
The reliability of solder joints was evaluated by a heat cycle test.
In this test, a sample in which the solder alloy was able to be bonded to the Cu substrate in the above wettability evaluation (samples having a wettability evaluation of “◯” and “Δ”) was used. Tested. The test conditions were two Cu substrates to which a solder alloy was bonded, and a heat cycle test was performed with “cooling at −40 ° C.” and “heating at + 150 ° C.” as one cycle. The heat cycle test was repeated up to 300 cycles for confirmation in the middle and the other one up to 500 cycles.
その後、300サイクル及び500サイクルのヒートサイクル試験を実施した各試料について、はんだ合金が接合されたCu基板を樹脂に埋め込み、断面研磨を行い、デジタル走査型電子顕微鏡(日立協和エンジニアリング株式会社製SEM、装置名:HITACHI S−4800)により接合面の観察を行った。
接合面に剥がれが生じるか又ははんだにクラックが入った場合を「×」、そのような不良がなく、初期状態と同様の接合面を保っていた場合を「○」とした。
以上の加工性、濡れ性、ヒートサイクル(接合の信頼性)の結果を纏めて表3に示す。
Then, about each sample which performed the heat cycle test of 300 cycles and 500 cycles, Cu substrate with which the solder alloy was joined was embedded in resin, cross-section grinding | polishing was performed, and the digital scanning electron microscope (Hitachi Kyowa Engineering Co., Ltd. SEM, The bonding surface was observed by apparatus name: HITACHI S-4800.
The case where peeling occurred on the joint surface or the solder cracked was indicated as “X”, and the case where there was no such defect and the same joint surface as in the initial state was maintained as “◯”.
The results of the above workability, wettability, and heat cycle (bonding reliability) are summarized in Table 3.
表2、表3から明らかなように、本発明における本発明品である試料1〜22の各はんだ合金は、全ての評価項目において良好な特性を示しているのが分かる。
即ち、シートに加工しても傷やクラックの発生が無く、濡れ性及び信頼性も良好であった。このシート加工性が良好であった理由ははんだ組成範囲が適切でありZn−Al共晶組成、またはZn−Ge共晶組成付近を基本としており、微結晶化による加工性向上効果が現れていると考えられる。
濡れ性が良好であった理由は、はんだ組成範囲が適切な範囲であるとともにはんだ表面の酸化膜が薄く、加えて表面粗さが小さいため、電子部品と基板の接合を妨げる酸素の存在が極力抑えられているためだと考えられる。
更に、ヒートサイクル試験においても500回まで割れなどが発生せず、良好な接合性と信頼性を示した。
この高い信頼性は酸素の存在を極力抑えた条件の下で接続されことに起因し、はんだ合金の研磨や酸洗浄、表面粗さの小さいロールで圧延した結果によるものである。
As is apparent from Tables 2 and 3, it can be seen that the solder alloys of Samples 1 to 22 which are the products of the present invention in the present invention exhibit good characteristics in all evaluation items.
That is, even when processed into a sheet, there was no generation of scratches or cracks, and wettability and reliability were good. The reason why this sheet workability was good is that the solder composition range is appropriate and is based on the vicinity of Zn-Al eutectic composition or Zn-Ge eutectic composition, and the effect of improving workability by microcrystallization appears. it is conceivable that.
The reason why the wettability was good was that the solder composition range was appropriate, the oxide film on the solder surface was thin, and the surface roughness was small. It is thought that it is because it is suppressed.
Furthermore, in the heat cycle test, no cracks or the like occurred up to 500 times, and good bondability and reliability were shown.
This high reliability is due to the connection under the condition that the presence of oxygen is suppressed as much as possible, and is the result of polishing the solder alloy, pickling the acid, and rolling with a roll having a small surface roughness.
一方、本発明の範囲から外れる比較品である試料23〜30の各はんだ合金は、製造条件や含有元素量が適正でないことに起因して、はんだの酸化物層の厚みや表面粗さが本発明の請求範囲を外れてしまい、満足すべき特性が得られていない。
つまり、その加工性は試料26〜30で傷やクラックが発生し、濡れ性については全ての試料において良好な濡れ性が得られていない。特にヒートサイクル試験においては300回までに全ての試料(接合できなかった試料23〜28を除く)で不良が発生していた。
On the other hand, each of the solder alloys of Samples 23 to 30, which are comparative products that are out of the scope of the present invention, has the thickness and surface roughness of the oxide layer of the solder due to inappropriate manufacturing conditions and contained element amounts. This is outside the scope of claims of the invention, and satisfactory characteristics are not obtained.
That is, scratches and cracks are generated in the samples 26 to 30 as to the workability, and good wettability is not obtained in all samples. In particular, in the heat cycle test, defects occurred in all samples (excluding samples 23 to 28 that could not be joined) up to 300 times.
Claims (8)
The solder alloy contains Al of 3.0% by mass or more and 7.0% by mass or less, Ge of 0.1% by mass or more and 3.0% by mass or less, Mg of 0.01% by mass or more, 3.0% 7. The Pb-free material containing Zn as a main component according to claim 4, wherein the Pb-free material contains at least one of Ge and Mg in a range of mass% or less, and consists of the balance Zn and inevitable impurities. Solder alloy manufacturing method.
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| US9520347B2 (en) | 2013-05-03 | 2016-12-13 | Honeywell International Inc. | Lead frame construct for lead-free solder connections |
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