JP2012127002A - めっき触媒及び方法 - Google Patents
めっき触媒及び方法 Download PDFInfo
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Abstract
【解決手段】0.5から100ppmのパラジウム、銀、コバルト、ニッケル、金、銅、及びルテニウムから選択されるゼロ価金属、安定剤及び水を含有する組成物であり、水、水可溶性金属塩及び特定の安定化剤を混合し、続いてゼロ価金属を形成するのに充分な量の還元剤を添加し作成する。該組成物は、特に電子部品の製造に用いられる非導電性基板の無電解金属めっきに有用である。
【選択図】なし
Description
30mLの脱イオン水を含むビーカーに、室温(約20℃)において122mgの4−アミノピリジンが安定化溶液を作成するために加えられた。4−アミノピリジンを完全に溶解させるためにこのビーカーは50℃の水浴に置かれた。別のビーカーで、38.2mgのNa2PdCl4(Pd+2)が10mLの脱イオン水に室温で溶解された。安定剤溶液にこのパラジウム塩溶液が激しい撹拌下で滴下された。安定剤溶液の添加終了後さらに15−20分撹拌が続けられ、その後2mLの脱イオン水に溶解した12mgのNaBH4が非常に強い撹拌下で混合物に加えられた。溶液は素早く暗茶色に変化し、Pd+2からPd0への還元が示唆された。得られた4−アミノピリジン/パラジウムナノ粒子溶液はさらに30分激しく撹拌された。
4−アミノピリジン安定剤が4−ジメチルアミノピリジンに置き換えられた以外は例1の手順が繰り返された。得られた組成物中の成分の濃度は、4−ジメチルアミンピリジンが4.29g/L、Na2PdCl4が0.96g/L、NaBH4が0.3g/L、重炭酸ナトリウムが3g/Lであった。得られた4−ジメチルアミノピリジン/パラジウムナノ粒子触媒組成物は例1の加速安定性試験に供され、沈殿又は濁りは観察されなかった。
4−アミノピリジン安定剤が2−アミノピリジンに置き換えられた以外は例1の手順が繰り返された。得られた組成物中の成分の濃度は、2−アミノピリジンが1.5g/L、Na2PdCl4が0.96g/L、NaBH4が0.3g/L、重炭酸ナトリウムが3g/Lであった。得られた2−アミノピリジン/パラジウムナノ粒子触媒組成物は例1の加速安定性試験に供され、沈殿又は濁りは観察されなかった。
4−アミノピリジン安定剤が2−アミノ−4,6−ジメチルピリジンに置き換えられた以外は例1の手順が繰り返された。得られた組成物中の成分の濃度は、2−アミノ−4,6−ジメチルピリジンが1.75g/L、Na2PdCl4が0.325g/L、NaBH4が0.6g/L、重炭酸ナトリウムが3g/Lであった。得られた2−アミノ−4,6−ジメチルピリジン/パラジウムナノ粒子触媒組成物は例1の加速安定性試験に供され、沈殿又は濁りは観察されなかった。
4−アミノピリジン安定剤が2−アミノニコチン酸に置き換えられた以外は例1の手順が繰り返された。得られた組成物中の成分の濃度は、2−アミノニコチン酸が1g/L、Na2PdCl4が0.96g/L、NaBH4が0.4g/L、重炭酸ナトリウムが3g/Lであった。得られた2−アミノニコチン酸/パラジウムナノ粒子触媒組成物は例1の加速安定性試験に供され、沈殿又は濁りは観察されなかった。
4−アミノピリジン安定剤が3−アミノピラジン−2−カルボン酸に置き換えられた以外は例1の手順が繰り返された。得られた組成物中の成分の濃度は、3−アミノピラジン−2−カルボン酸が4.5g/L、Na2PdCl4が0.96g/L、NaBH4が0.4g/L、重炭酸ナトリウムが3g/Lであった。得られた3−アミノピラジン−2−カルボン酸/パラジウムナノ粒子触媒組成物は例1の加速安定性試験に供され、沈殿又は濁りは観察されなかった。
2種金属塩溶液が、23.5mgのNa2PdCl4を20mLの脱イオン水に溶解し、続いて20mgの硫酸銅5水和物及び47mgのクエン酸ナトリウムを加えることにより作成された。混合塩溶液の色は緑に変わった。別のビーカーで、88.3mgの4−アミノニコチン酸安定剤が20mLの水に溶解され、0.1NのNaOHが溶液のpHを9.5に調整するために用いられた。安定剤溶液が混合パラジウム/銅溶液に撹拌下で加えられた。添加終了後、0.1NのHCl/NaOHが再び用いられpHが9.2に調整された。次に、約2mLの脱イオン水中の23.7mgのNaBH4が非常に強い撹拌下に加えられた。溶液はすばやく暗茶色に変化した。得られた触媒溶液はさらに30分撹拌された。触媒溶液は続いてさらなる安定性試験のために50℃の水浴に12時間置かれた。実際の溶液は、触媒濃度を25ppmまで希釈し、HCl/NaOHでpHを9.6に調整し、1.85g/Lのホウ酸を緩衝剤として加えて調整された。
次の化合物が安定剤として用いられた以外は、例1の手順が繰り返された。2−ヒドラジンピリジン;2−ジメチルアミノピリジン;3−アミノピリジン;メチルピラジン−2−カルボキシレート;4−アミノ−2,5−ジクロロピリジン、及び2−(メンジルアミノ)ピリジン。これらの化合物を用いて作成されたいずれの触媒組成物も、沈殿形成若しくは濁りのいずれかが生じて例1の加速安定性試験をパスしなかった。
種々のプリント回路基板(ネルコ−6エポキシ/ガラス、NP−175エポキシ/ガラス、370T,FR−406,TU−752エポキシ/ガラス、SY−1141,及びSY−1000−2エポキシ/ガラス)が次の一般的な手順に従って無電解銅めっき浴を用いてめっきされた。
1. 各基板は240リットルの膨潤溶媒で7分間80℃で処理された。膨潤溶媒は10%のジエチレングリコールモノブチルエーテル及び35g/Lの水酸化ナトリウムを含有する水溶液である。
2. 基板は続いて冷たい水道水で4分間室温でリンスされる。
3. 各基板のスルーホールは続いてpH12の50−60g/Lの水性過マンガンアルカリのアルカリ性酸化剤550リットルで10分間80℃で処理される。
4. 基板は冷たい水道水で4分間室温でリンスされる。
5. 基板のスル−ホールは続いて3重量%の過酸化水素水及び3重量%の硫酸を含有する水性中和剤180リットルで50℃で5分処理される。
6. 基板は冷たい水道水で4分間室温でリンスされる。
7. 任意に、基板は続いてカチオン性界面活性剤及びpHを11付近に維持する緩衝系を含有する、コンディショナー(商標)(CONDITIONERTM)860アルカリコンディショナーで処理される。このアルカリコンディショナーはダウ電子材料から商業的に入手することができる。コンディショナーが必要かどうかは特有の安定なゼロ価金属ナノ粒子触媒が使用されるかどうかに依存する。
8. 工程7でコンディショニングされた基板は続いて冷たい水道水で4分間室温でリンスされる。
9. 各基板のスルーホールは続いて20g/Lの過硫酸アンモニウムの水性アルカリ溶液100リットルで2分間室温でマイクロエッチされる。
10. 基板は続いて冷たい水道水で4分間室温でリンスされる。
11. 5%濃度塩酸のプレディップが続いてスルーホールに1分間室温で適用される。
12. 基板は続いて冷たい水道水で1分間室温でリンスされる。
13. スルーホールを有するいくつかの基板が、2リットルの本発明の組成物に5分間40℃で無電解めっきの用意をされる。ゼロ価金属ナノ粒子の濃度は25ppmである。触媒のpHは通常9から10であった。他の基板は2リットルのパラジウム粒子濃度が25ppmの従来のスズ/パラジウム触媒で5分間40℃で対照として用意される。従来の触媒は次の組成を有する:1gの塩化パラジウム;300mLの濃HCl;1.5gのナトリウムスズ塩;40gの塩化スズ及び1リットルになるまでの水。
14. 基板は続いて冷たい水道水で2.5分室温でリンスされる。
15. 基板のスルーホール壁面は続いて無電解銅めっきで15分間36℃でめっきされる。無電解銅めっき浴は次の組成を有する。
Claims (10)
- 0.5から100ppmのゼロ価金属、安定剤化合物及び水を含有する組成物であって、ゼロ価金属はパラジウム、銀、コバルト、ニッケル、金、銅及びルテニウムから選択され、安定剤化合物は次の式(I)及び式(II)から選択される組成物。
(式中、R1及びR5は独立して水素、(C1−C6)アルキル、(CR6R6)aZ及び(CH=CH)Zから選択され、R2及びR4は独立して水素、(CR6R6)aZ、HO(C1−C6)アルキル、R7R7N(C1−C6)アルキル及び(CH=CH)Zから選択され、R3は水素、(C1―C6)アルキル又はNR7R7であり、各R6は独立して水素及びNR7R7から選択され、各R7は独立して水素及び(C1−C6)アルキルから選択され、各R8は水素、(C1−C6)アルキル及びNHR7から選択され、各R9は水素及びCO2R6から選択され、ZはCO2R7、C(O)NR7R7又はNHR7であり、aは0−6であり、(i)R1及びR5の少なくとも一つは(CR6R6)aZであるか、(ii)R3はNR7R7であり、少なくとも一つのR8はNHR7である。) - pHが6−14である請求項1に記載の組成物。
- pHが7.5から14である請求項2に記載の組成物。
- 組成物が20℃で3カ月保管しても沈殿を生成しないことを特徴とする請求項1に記載の組成物。
- ゼロ価金属及び安定剤化合物がモル比で1:1から1:20であることを特徴とする請求項1に記載の組成物。
- (a)複数のスルーホールを有する基板を提供し、(b)請求項1の組成物をスルーホール表面に適用し、続いて(c)スルーホール表面に金属の無電解析出を行う、ことを含む方法。
- 工程(c)の無電解析出金属の上に第二の金属を電気的に析出する工程をさらに有する、請求項6に記載の方法。
- 工程(b)の前にスルーホールの表面を酸化剤と接触させる工程をさらに含む、請求項6に記載の方法。
- 工程(b)の前にスルーホールの表面を界面活性剤と接触させる工程をさらに含む、請求項6に記載の方法。
- 請求項1に記載の組成物を準備する方法であって、安定剤化合物、水及び水可溶性金属塩を混合し、続いてゼロ価金属を形成するのに充分な量の還元剤を添加する、方法。
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| JP2014180666A (ja) * | 2013-03-15 | 2014-09-29 | Rohm & Haas Electronic Materials Llc | 無電解金属化用の安定触媒 |
| JP2015048529A (ja) * | 2013-09-04 | 2015-03-16 | ローム・アンド・ハース電子材料株式会社 | 無電解めっき用触媒液 |
| JP2015078431A (ja) * | 2013-09-04 | 2015-04-23 | ローム アンド ハース エレクトロニック マテリアルズ エルエルシーRohm and Haas Electronic Materials LLC | アルカリに安定なピラジン誘導体含有触媒による誘電体の無電解メタライゼーション |
| KR20170008287A (ko) | 2014-09-11 | 2017-01-23 | 이시하라 케미칼 가부시키가이샤 | 무전해 니켈 또는 니켈 합금 도금용 니켈 콜로이드 촉매액 및 무전해 니켈 또는 니켈 합금 도금방법 |
| JP2017155335A (ja) * | 2016-02-29 | 2017-09-07 | ローム アンド ハース エレクトロニック マテリアルズ エルエルシーRohm and Haas Electronic Materials LLC | イオン性触媒を用いて基板を無電解金属メッキする水平方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| US8961669B2 (en) | 2015-02-24 |
| US20140087062A1 (en) | 2014-03-27 |
| TWI468545B (zh) | 2015-01-11 |
| US20120145554A1 (en) | 2012-06-14 |
| CN102605356A (zh) | 2012-07-25 |
| KR101789143B1 (ko) | 2017-10-23 |
| US8591636B2 (en) | 2013-11-26 |
| CN102605356B (zh) | 2014-11-19 |
| JP5937342B2 (ja) | 2016-06-22 |
| EP2465974A2 (en) | 2012-06-20 |
| EP2465974A3 (en) | 2013-08-28 |
| KR20120066607A (ko) | 2012-06-22 |
| TW201235507A (en) | 2012-09-01 |
| EP2465974B1 (en) | 2018-11-28 |
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