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JP2012148501A - Discharge apparatus, method for manufacturing original plate for screen printing - Google Patents

Discharge apparatus, method for manufacturing original plate for screen printing Download PDF

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JP2012148501A
JP2012148501A JP2011009388A JP2011009388A JP2012148501A JP 2012148501 A JP2012148501 A JP 2012148501A JP 2011009388 A JP2011009388 A JP 2011009388A JP 2011009388 A JP2011009388 A JP 2011009388A JP 2012148501 A JP2012148501 A JP 2012148501A
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discharge
mesh
resin
suction chamber
liquid
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JP5726544B2 (en
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Takahiro Miyata
貴裕 宮田
Masaaki Murata
真朗 村田
Mitsuru Yahagi
充 矢作
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Ulvac Inc
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Ulvac Inc
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Abstract

【課題】精度の高いスクリーン印刷用原版を簡単な工程で製造する。
【解決手段】メッシュスクリーンに硬化性樹脂液を塗布して網含有樹脂層を形成して処理対象物を構成させ、処理対象物を吐出装置50の配置部材2上に配置し、吐出液を吐出する吐出ヘッド53と配置部材2とを相対的に移動させ、所望位置の網含有樹脂層に未硬化の硬化性樹脂を溶解させる吐出液を着弾させ、着弾位置の硬化性樹脂を溶解する。配置部材2の裏面に位置する吸引室6を排気し、処理対象物を真空吸着すると、溶解した硬化性樹脂を含有する吐出液は吸引室6に吸引され、所望パターンの開口を有する網含有樹脂層が得られ、それを硬化させると、スクリーン印刷用の原版が得られる。写真マスクを用いる必要がない。
【選択図】図1
A high-precision screen printing original plate is manufactured by a simple process.
A curable resin liquid is applied to a mesh screen to form a net-containing resin layer to form a processing target, and the processing target is placed on a placement member 2 of a discharge device 50 to discharge the discharge liquid. The ejection head 53 and the arrangement member 2 are moved relatively to land the ejection liquid that dissolves the uncured curable resin on the net-containing resin layer at the desired position, thereby dissolving the curable resin at the landing position. When the suction chamber 6 located on the back surface of the arrangement member 2 is evacuated and the object to be processed is vacuum-adsorbed, the discharge liquid containing the dissolved curable resin is sucked into the suction chamber 6 and has a desired pattern opening. When a layer is obtained and cured, an original for screen printing is obtained. There is no need to use a photographic mask.
[Selection] Figure 1

Description

本発明は、写真製版技術を用いないスクリーン印刷用原版の製造装置および製造方法に関する。   The present invention relates to an apparatus and a method for manufacturing a screen printing original plate that does not use photolithography.

従来から、スクリーン印刷に用いられる印刷用原版の製造技術としては、写真製版技術を用いたものが公知の技術として知られている。
具体的には、型枠に張られたスクリーンに感光性樹脂を塗布・乾燥させ、この上に写真製版したネガ型またはポジ型のフィルムを密着貼付して露光し、現像処理することで製造される。
Conventionally, as a technique for producing a printing original plate used for screen printing, a technique using a photoengraving technique is known as a known technique.
Specifically, it is manufactured by applying and drying a photosensitive resin on a screen stretched on a formwork, then sticking a photographic plate-making negative or positive film on it, exposing it, and developing it. The

しかしながら、このような製造方法では多数の工程を必要とするだけでなく、目的とする原版を作製するための原版が別に必要であったり、複数種類の専用設備が必要であったりするために、多大な製造コストがかかる等、種々の問題点があった。   However, such a manufacturing method not only requires a large number of steps, but also requires a separate original for producing the target original, or multiple types of dedicated equipment, There were various problems such as high manufacturing costs.

近年、それらの問題を解決する目的で特許文献1〜5にあるように、インクジェット法を用いた印刷用原版の製造方法が幾つか考案されている。
しかしながら、これら新たに考案された製造方法であっても、依然として複数の工程を必要としたり、複数の構成部材を組み合わせたりする必要があった。
In recent years, as disclosed in Patent Documents 1 to 5 for the purpose of solving these problems, several methods for producing a printing original plate using an inkjet method have been devised.
However, even these newly devised manufacturing methods still require a plurality of steps or a combination of a plurality of components.

特開平9-48105号公報JP-A-9-48105 特開平11-277712号公報JP-A-11-277712 特開2001−30458号公報JP 2001-30458 A 特開2003−89282号公報JP 2003-89282 A 特開2009−28909号公報JP 2009-28909 A

本発明は上記製造工程の煩雑さを解決するために創作されたものであり、その目的は、少ない工程かつ少ない構成部材でもってスクリーン印刷用原版を作製できる製造装置と製造方法を提供することにある。   The present invention was created in order to solve the complexity of the above manufacturing process, and an object of the present invention is to provide a manufacturing apparatus and a manufacturing method capable of manufacturing an original for screen printing with a small number of processes and a small number of components. is there.

上記課題を解決するために、本発明は、配置面に処理対象物が配置される配置部材と、吐出液を吐出する吐出孔が設けられた吐出ヘッドと、前記配置部材と前記吐出ヘッドとを相対的に移動させる移動装置と、前記配置部材上に配置された処理対象物の表面である着弾面の所望位置に向けて前記吐出孔から前記吐出液を吐出させる制御装置と、を有する吐出装置であって、前記配置部材の裏面には、吸引室が設けられ、前記配置部材の裏面は前記吸引室内に露出され、前記配置部材には、前記配置部材の前記配置面側の空間と裏面側の空間とを接続する複数の細孔が形成され、前記吸引室の圧力が前記配置面の上の圧力よりも低下すると、前記配置面の上に位置する液体が前記吸引室内に吸引されるように構成された吐出装置である。
本発明は吐出装置であって、前記吐出ヘッドには、前記吐出孔が複数個設けられた吐出装置である。
本発明は吐出装置であって、前記制御装置には、記憶装置が設けられ、前記記憶装置に記憶された吐出位置に向けて前記吐出孔から前記吐出液が吐出されるように構成された吐出装置である。
本発明は吐出装置であって、前記吸引室は、前記配置部材の下方に配置され、底面には傾斜が設けられた吐出装置である。
本発明は吐出装置であって、前記傾斜の上端よりも下端に近い位置に、液体を排出する排液口と、前記排液口を導通させ又は閉塞させる開閉装置とが設けられた吐出装置である。
本発明は吐出装置であって、前記配置部材は、多孔質部材で構成された吐出装置である。
本発明は、吐出装置を用い、網中の所望位置の網目を閉塞させ、スクリーン印刷用原版を形成する原版製造方法であって、前記網に樹脂を塗布し、前記樹脂によって前記網の網目を塞いで前記網と前記樹脂とを含む膜状の網含有樹脂層を形成し、前記網含有樹脂層を有する前記処理対象物を前記配置部材上に配置し、排気装置を動作させて前記吸引室の圧力を、前記処理対象物の前記着弾面が露出された雰囲気の圧力よりも小さくしながら、前記吐出孔から、前記樹脂を溶解させる溶解液を前記吐出液として、前記着弾面の所望位置に向けて吐出して着弾した部分の前記樹脂を溶解させ、前記樹脂の溶解物を含有し、前記配置面上に位置する前記溶解液を、前記細孔によって吸引して前記吸引室内に移動させ、所望位置の前記網目が開けられた前記網含有樹脂層に含有される前記樹脂を硬化させて前記原版を得る原版製造方法である。
本発明は、原版製造方法であって、前記樹脂には、光硬化性樹脂を用い、所望位置の前記網目が開けられた前記網含有樹脂層に前記樹脂を硬化させる波長の光を照射して、前記網含有樹脂層に含有された前記樹脂を硬化させる原版製造方法である。
In order to solve the above-described problems, the present invention includes an arrangement member on which an object to be treated is arranged on an arrangement surface, an ejection head provided with an ejection hole for ejecting ejection liquid, the arrangement member, and the ejection head. A discharge device comprising: a moving device that relatively moves; and a control device that discharges the discharge liquid from the discharge hole toward a desired position on a landing surface that is a surface of a processing object arranged on the arrangement member. A suction chamber is provided on the rear surface of the arrangement member, the rear surface of the arrangement member is exposed in the suction chamber, and the arrangement member includes a space on the arrangement surface side and a rear surface side of the arrangement member. When a plurality of pores that connect to the space are formed and the pressure in the suction chamber is lower than the pressure on the placement surface, the liquid positioned on the placement surface is sucked into the suction chamber It is the discharge device comprised in this.
The present invention is an ejection device, wherein the ejection head is provided with a plurality of ejection holes.
The present invention is a discharge device, wherein the control device is provided with a storage device, and the discharge device is configured to discharge the discharge liquid from the discharge hole toward a discharge position stored in the storage device. Device.
The present invention is a discharge device, wherein the suction chamber is disposed below the placement member, and a bottom surface is provided with an inclination.
The present invention is a discharge device, wherein a discharge port for discharging liquid and a switching device for connecting or closing the drain port are provided at a position closer to the lower end than the upper end of the inclination. is there.
The present invention is a discharge device, wherein the arrangement member is a discharge device formed of a porous member.
The present invention is a method for producing an original plate in which a mesh at a desired position in a mesh is closed using a discharge device to form a screen printing original plate, wherein a resin is applied to the mesh, and the mesh of the mesh is coated with the resin. Forming a film-like net-containing resin layer containing the net and the resin by closing, arranging the processing object having the net-containing resin layer on the arrangement member, and operating an exhaust device to operate the suction chamber The pressure of the processing object is lower than the pressure of the atmosphere in which the landing surface of the object to be exposed is exposed, and a solution for dissolving the resin is discharged from the discharge hole to the desired position on the landing surface. Dissolving the resin discharged and landed toward the resin, containing the resin melt, the solution located on the arrangement surface is sucked by the pores and moved into the suction chamber, The mesh at the desired position is opened Wherein a master manufacturing method for obtaining an original by curing the resin contained in the network containing resin layer.
The present invention is an original plate manufacturing method, wherein a photo-curing resin is used as the resin, and light having a wavelength for curing the resin is applied to the net-containing resin layer in which the mesh is opened at a desired position. A method for producing an original plate in which the resin contained in the net-containing resin layer is cured.

スクリーン印刷用原版を構成する硬化した樹脂層を得るために、記憶したパターンに従って未硬化の網含有樹脂層に吐出液を吐出するので、写真マスクを用いる必要が無く、製造工程を削減することができる。
また、最終原版を作成するための別原版等が不用になるため、製造コストも削減できる。
In order to obtain a cured resin layer that constitutes the screen printing original plate, the discharge liquid is discharged to the uncured net-containing resin layer according to the stored pattern, so there is no need to use a photographic mask and the manufacturing process can be reduced. it can.
In addition, since a separate original plate for creating the final original plate is not required, the manufacturing cost can be reduced.

本発明の一例の吐出装置の斜視図The perspective view of the discharge apparatus of an example of this invention 吐出孔を説明するための図Diagram for explaining discharge holes (a):配置部材を説明するための平面図 (b):配置部材と吸引室を説明するための断面図(a): Plan view for explaining the arrangement member (b): Cross-sectional view for explaining the arrangement member and the suction chamber (a):メッシュスクリーンを説明するための平面図 (b):その断面図 (c):処理対象物の断面図(a): Plan view for explaining a mesh screen (b): Cross section thereof (c): Cross section view of processing object (a):処理対象物の平面図 (b):処理対象物と配置部材と吸着室の断面図(a): Plan view of processing object (b): Cross section of processing object, arrangement member and suction chamber (a):開口が形成された処理対象物の平面図 (b):吸引室に移動した溶液を説明するための断面図(a): Plan view of the object to be processed in which the opening is formed (b): Cross-sectional view for explaining the solution moved to the suction chamber 本発明の他の例の吐出装置Another example of the discharge device of the present invention

<吐出装置>
図1は、本発明の一例の吐出装置50を示す斜視図である。
吐出装置50は、台座51と、台座51上に位置するステージ1と、ステージ1よりも上方に位置する吐出ヘッド53とを有している。
ステージ1には、後述する板状の配置部材2が設けられている。
<Discharge device>
FIG. 1 is a perspective view showing a discharge device 50 according to an example of the present invention.
The discharge device 50 includes a pedestal 51, a stage 1 positioned on the pedestal 51, and a discharge head 53 positioned above the stage 1.
The stage 1 is provided with a plate-like arrangement member 2 described later.

吐出装置50には、吐出ヘッド53と配置部材2とを相対的に移動させる移動装置10が設けられている。台座51は、上方を向いた表面である支持面21を水平にして配置されている。   The ejection device 50 is provided with a moving device 10 that relatively moves the ejection head 53 and the arrangement member 2. The pedestal 51 is disposed with the support surface 21, which is a surface facing upward, in a horizontal direction.

移動装置10は、ここでは、配置部材2を台座51に対して移動させる配置部材移動装置26と、吐出ヘッド53を台座51に対して移動させるヘッド移動装置25とで構成されている。   Here, the moving device 10 includes an arrangement member moving device 26 that moves the arrangement member 2 relative to the pedestal 51, and a head moving device 25 that moves the ejection head 53 relative to the pedestal 51.

先ず、配置部材移動装置26を説明すると、配置部材移動装置26は、支持面21上に互いに平行に配置された二本の主レール52と、ステージ1に設けられ、ステージ1を主レール52が伸びる方向に沿って移動させる主レール上移動装置61とで構成されている。   First, the arrangement member moving device 26 will be described. The arrangement member moving device 26 is provided on the stage 1 with two main rails 52 arranged parallel to each other on the support surface 21, and the main rail 52 is arranged on the stage 1. It is comprised with the main-rail moving apparatus 61 moved along the extending direction.

ステージ1は、二本の主レール52上に渡って乗せられており、例えば、主レール上移動装置61を、主レール52上に配置された車輪と、その車輪を回転させるモータとによって構成し、車輪を回転させてステージ1を主レール52上で走行させることで移動させることができる。   The stage 1 is placed on two main rails 52. For example, the on-rail moving device 61 includes a wheel disposed on the main rail 52 and a motor that rotates the wheels. The stage 1 can be moved on the main rail 52 by rotating the wheel.

次に、ヘッド移動装置25を説明すると、台座51のうち、二本の主レール52の間の部分よりも外側の左右位置に、それぞれ支柱55が配置され、その下端が台座51に固定されており、支柱55の上端には、二本の支柱55に渡るように、ブリッジ54が取り付けられている。   Next, the head moving device 25 will be described. In the pedestal 51, the support pillars 55 are respectively arranged at the left and right positions outside the portion between the two main rails 52, and the lower ends thereof are fixed to the pedestal 51. In addition, a bridge 54 is attached to the upper end of the column 55 so as to extend over the two columns 55.

ヘッド移動装置25は、ブリッジ54に設けられた副レール56と、吐出ヘッド53に設けられ、吐出ヘッド53を副レール56が伸びる方向に沿って移動させる副レール上移動装置62とで構成されている。   The head moving device 25 includes a sub rail 56 provided on the bridge 54 and a sub rail on-rail moving device 62 provided on the discharge head 53 and moving the discharge head 53 along the direction in which the sub rail 56 extends. Yes.

副レール上移動装置62は、例えば、副レール56上に配置された車輪と、その車輪を回転させるモータとによって構成することができるが、それに限定されるものではない。この例では、吐出ヘッド53は、副レール上移動装置62によって、副レール56に取り付けられている。   The sub-rail moving device 62 can be configured by, for example, a wheel disposed on the sub-rail 56 and a motor that rotates the wheel, but is not limited thereto. In this example, the ejection head 53 is attached to the sub rail 56 by the sub rail moving device 62.

移動装置10は、制御装置65に接続されており、制御装置65との間で信号を入出力するように構成されており、制御装置65が出力する信号によって、移動装置10は、ステージ1と吐出ヘッド53とを移動させることで、配置部材2と吐出ヘッド53とを相対的に移動させ、配置部材2と吐出ヘッド53とを所望の相対位置で静止させることが出来る。   The moving device 10 is connected to the control device 65 and is configured to input / output signals to / from the control device 65, and the moving device 10 is connected to the stage 1 by a signal output from the control device 65. By moving the ejection head 53, the arrangement member 2 and the ejection head 53 can be relatively moved, and the arrangement member 2 and the ejection head 53 can be stopped at a desired relative position.

ここでは、吐出ヘッド53の移動方向と、ステージ1、即ち配置部材2の移動方向とは水平面内に位置し、吐出ヘッド53と配置部材2とは、互いに直交する方向に直線状に移動するようになっている。吐出ヘッド53とブリッジ54とは、ステージ1よりも高い位置に配置されており、移動の際に接触しない。   Here, the movement direction of the ejection head 53 and the movement direction of the stage 1, that is, the arrangement member 2 are located in a horizontal plane, and the ejection head 53 and the arrangement member 2 move linearly in directions orthogonal to each other. It has become. The ejection head 53 and the bridge 54 are arranged at a position higher than the stage 1 and do not come into contact with each other during movement.

また、二本の支柱55間の距離は、ステージ1が、二本の支柱55の間を通って移動できる大きさにされており、吐出ヘッド53が配置部材2の移動経路の上方に位置する状態で、配置部材2が吐出ヘッド53の下方位置を通過すると、吐出ヘッド53は、配置部材2の移動によって、配置部材2の移動方向の先頭位置から最後尾位置まで、配置部材2上を移動することができる。従って、配置部材2上に、配置部材2からはみ出ない板状の処理対象物を乗せると、吐出ヘッド53は、乗せられた処理対象物の表面上を縦断することができる。   The distance between the two support columns 55 is such that the stage 1 can move between the two support columns 55, and the ejection head 53 is positioned above the movement path of the arrangement member 2. In this state, when the arrangement member 2 passes the lower position of the ejection head 53, the ejection head 53 moves on the arrangement member 2 from the first position to the last position in the movement direction of the arrangement member 2 by the movement of the arrangement member 2. can do. Accordingly, when a plate-like processing object that does not protrude from the arrangement member 2 is placed on the arrangement member 2, the ejection head 53 can vertically cut the surface of the placed treatment object.

また、吐出ヘッド53の移動経路の下方に配置部材2が位置する状態で、吐出ヘッド53がブリッジ54の一端から他端に移動することができる。このとき、配置部材2上に、配置部材2からはみ出ない板状の処理対象物を乗せておくと、吐出ヘッド53は、処理対象物の表面上を横断することができる。   Further, the ejection head 53 can move from one end of the bridge 54 to the other end in a state where the arrangement member 2 is positioned below the movement path of the ejection head 53. At this time, if a plate-like processing object that does not protrude from the arrangement member 2 is placed on the arrangement member 2, the ejection head 53 can traverse the surface of the treatment object.

台座51の外側には、吐出液が蓄液された吐出液タンク57が配置されている。
吐出ヘッド53の内部は中空にされており、吐出ヘッド53は、吐出液タンク57に接続されている。
吐出液タンク57にはポンプ等が設けられており、吐出液タンク57内の吐出液を、吐出ヘッド53の中空部分に供給できるようになっている。
A discharge liquid tank 57 in which discharge liquid is stored is disposed outside the pedestal 51.
The inside of the discharge head 53 is hollow, and the discharge head 53 is connected to the discharge liquid tank 57.
The discharge liquid tank 57 is provided with a pump or the like so that the discharge liquid in the discharge liquid tank 57 can be supplied to the hollow portion of the discharge head 53.

吐出ヘッド53は、吐出ヘッド53の下方を向く面が、配置部材2と対面できるように副レール56に取り付けられており、吐出ヘッド53のステージ1と対面する底面には、図2の符号58で示すように、一端が吐出ヘッド53内部の中空部分に接続され、他端が吐出ヘッド53の底面に開口する複数の吐出孔(ノズル)58が設けられている。
吐出ヘッド53の内部には、吐出ヘッド53内に供給された吐出液を吐出孔58から所定量吐出させる吐出部品が設けられている。
The ejection head 53 is attached to the sub rail 56 so that the surface facing the lower side of the ejection head 53 can face the arrangement member 2, and the bottom surface of the ejection head 53 facing the stage 1 is denoted by reference numeral 58 in FIG. 2. As shown, a plurality of discharge holes (nozzles) 58 having one end connected to a hollow portion inside the discharge head 53 and the other end opened to the bottom surface of the discharge head 53 are provided.
Inside the ejection head 53, ejection components that eject a predetermined amount of the ejection liquid supplied into the ejection head 53 from the ejection holes 58 are provided.

吐出部品は吐出孔58と一対一に対応しており、制御装置65によって制御されており、制御装置65から吐出を指示する信号が入力された吐出部品は、対応する吐出孔58から吐出液を吐出する。吐出孔58から一回の吐出による液滴量を制御することができるし、また、吐出するタイミングを変えて、所望量の吐出液を所定領域に向けて吐出することもできる。   The discharge components correspond to the discharge holes 58 on a one-to-one basis and are controlled by the control device 65, and the discharge components to which a discharge instruction signal is input from the control device 65 receive the discharge liquid from the corresponding discharge holes 58. Discharge. The amount of liquid droplets discharged from the discharge hole 58 can be controlled, and a desired amount of discharge liquid can be discharged toward a predetermined region by changing the discharge timing.

配置部材2は、処理対象物が配置される表面である配置面24は平坦にされており、配置面24は上方に向けられて露出されている。
配置部材2には、図3(a)、(b)に示すように複数の細孔17が設けられている。図3(b)は、図1のA−A線切断断面図に相当する。
As for the arrangement | positioning member 2, the arrangement | positioning surface 24 which is a surface by which a process target object is arrange | positioned is made flat, and the arrangement | positioning surface 24 is faced up and exposed.
The arrangement member 2 is provided with a plurality of pores 17 as shown in FIGS. FIG. 3B corresponds to a cross-sectional view taken along line AA in FIG.

各細孔17の一端の開口は配置面24に配置され、他端の開口は配置部材2の裏面に設けられている。従って、各細孔17は、配置部材2の配置面24とその裏面との間を貫通している。
配置部材2の裏面には吸引室6が配置されている。
The opening at one end of each pore 17 is arranged on the arrangement surface 24, and the opening at the other end is provided on the back surface of the arrangement member 2. Therefore, each pore 17 penetrates between the arrangement surface 24 of the arrangement member 2 and its back surface.
A suction chamber 6 is arranged on the back surface of the arrangement member 2.

吸引室6の内部は中空であり、配置部材2は、吸引室6の天井に設けられた開口に嵌め込まれ、配置部材2の裏面が、吸引室6の内部中空部分に露出するようにされている。従って、配置部材2の配置面24側の空間と、裏面側に位置する吸引室6の内部空間とは、複数の細孔17によって接続されている。   The inside of the suction chamber 6 is hollow, and the arrangement member 2 is fitted into an opening provided in the ceiling of the suction chamber 6 so that the back surface of the arrangement member 2 is exposed to the inner hollow portion of the suction chamber 6. Yes. Therefore, the space on the arrangement surface 24 side of the arrangement member 2 and the internal space of the suction chamber 6 located on the back side are connected by the plurality of pores 17.

本例では、例えば細孔17の直径は10μm程度であり、液体や気体はその細孔を自由に通過することができるようにされている。
吸引室6には、排気装置36が接続されており、排気装置36を動作させると、吸引室6の内部空間に存する気体は排気装置36によって排気され、細孔17を通って、配置面24側の空間の気体が吸引室6内に吸引される。配置面24上に液体が配置されている場合は、液体は、気体と共に、吸引室6内に吸引される。
In this example, for example, the diameter of the pores 17 is about 10 μm, and liquid or gas can freely pass through the pores.
An exhaust device 36 is connected to the suction chamber 6. When the exhaust device 36 is operated, the gas existing in the internal space of the suction chamber 6 is exhausted by the exhaust device 36, passes through the pores 17, and is disposed on the arrangement surface 24. The gas in the side space is sucked into the suction chamber 6. When the liquid is arranged on the arrangement surface 24, the liquid is sucked into the suction chamber 6 together with the gas.

<製造方法>
この吐出装置50は、スクリーン印刷に用いられ、所望位置にインクを通過させる開口を有する原版を形成する装置であり、原版の製造工程を説明すると、まず、配置部材2上に配置する処理対象物を形成するため、図4(a)に示すメッシュスクリーン3を用意する。
<Manufacturing method>
The discharge device 50 is an apparatus that forms an original plate having an opening that allows ink to pass through at a desired position, and is used for screen printing. The manufacturing process of the original plate will be described. First, a processing object to be arranged on the arrangement member 2 In order to form, a mesh screen 3 shown in FIG.

メッシュスクリーン3は、金属製等の枠体27と網体19とを有し、網体19が枠体27に張られて構成されている。網体19は、網28と、網28によって囲まれた隙間である網目29とで構成されている。図4(b)は、網体19の部分的な断面の拡大図である。   The mesh screen 3 has a frame body 27 made of metal or the like and a net body 19, and the net body 19 is stretched around the frame body 27. The net 19 includes a net 28 and a net 29 that is a gap surrounded by the net 28. FIG. 4B is an enlarged view of a partial cross section of the net 19.

また、液状で硬化可能な硬化性樹脂を用意しておき、この網体19の部分に硬化性樹脂を塗布し、網目29を硬化性樹脂で充填し、乾燥させて溶剤を蒸発させ、図4(c)に示すような、網28と未硬化の硬化性樹脂30とを含有し、膜状になっている網含有樹脂層20を形成する。   In addition, a curable resin that is curable in a liquid state is prepared, and a curable resin is applied to the portion of the network body 19, the mesh 29 is filled with the curable resin, and dried to evaporate the solvent. As shown in (c), a net-containing resin layer 20 containing a net 28 and an uncured curable resin 30 and having a film shape is formed.

この網含有樹脂層20が形成されたメッシュスクリーンから成る処理対象物4を、配置部材2上に配置する。
図5(a)は、配置した状態の処理対象物4の平面図であり、同図(b)は、処理対象物4と配置部材2と吸引室6との断面図である。
A processing object 4 made of a mesh screen on which the net-containing resin layer 20 is formed is placed on the placement member 2.
FIG. 5A is a plan view of the processing object 4 in the arranged state, and FIG. 5B is a cross-sectional view of the processing object 4, the arrangement member 2, and the suction chamber 6.

吸引室6の内部空間に存する気体は排気装置36によって排気され、吸引室6の内部空間の圧力は配置面24上の雰囲気の圧力よりも低下されており、配置部材2の表面上の処理対象物4は、配置部材2の表裏の圧力差によって、配置部材2に真空吸着される。   The gas present in the internal space of the suction chamber 6 is exhausted by the exhaust device 36, and the pressure in the internal space of the suction chamber 6 is lower than the pressure of the atmosphere on the arrangement surface 24, and the processing target on the surface of the arrangement member 2 The object 4 is vacuum-adsorbed to the arrangement member 2 by the pressure difference between the front and back sides of the arrangement member 2.

吐出液タンク57に配置された吐出液は、網含有樹脂層20に含有される未硬化の硬化性樹脂30を溶解させる液体である。
網含有樹脂層20に開口を形成する位置は予め制御装置65に設けられた記憶装置66に記憶されており、配置部材2と吐出ヘッド53とを相対的に移動させ、吐出ヘッド53の吐出孔58から、硬化性樹脂30を溶解させる液体を、網含有樹脂層20に開口を形成する位置を目標として、目標に向けて吐出し、目標に着弾させる。
The discharge liquid disposed in the discharge liquid tank 57 is a liquid that dissolves the uncured curable resin 30 contained in the net-containing resin layer 20.
The position where the opening is formed in the net-containing resin layer 20 is stored in advance in a storage device 66 provided in the control device 65, and the arrangement member 2 and the ejection head 53 are moved relative to each other so that the ejection holes of the ejection head 53 are formed. From 58, the liquid that dissolves the curable resin 30 is discharged toward the target and landed on the target with the position where the opening is formed in the net-containing resin layer 20 as a target.

目標は、網目29内に位置する場所に設定されており、網目29に充填された硬化性樹脂30の表面上に着弾すると、着弾した部分の硬化性樹脂30が、吐出液によって溶解される。
硬化性樹脂30の溶解は、網含有樹脂層20の表面で開始され、溶解は、網含有樹脂層20の表面に沿った方向の成分と、深さ方向の成分とを有する方向に進行する。
The target is set at a location located in the mesh 29. When landing on the surface of the curable resin 30 filled in the mesh 29, the landed portion of the curable resin 30 is dissolved by the discharge liquid.
Dissolution of the curable resin 30 is started on the surface of the network-containing resin layer 20, and the dissolution proceeds in a direction having a component in a direction along the surface of the network-containing resin layer 20 and a component in the depth direction.

硬化性樹脂30の溶解が深さ方向に進行し、網含有樹脂層20の底面に達すると、硬化性樹脂30の溶解物を含有する吐出液、即ち、溶液が処理対象物4の底面に露出し、配置部材2と対面するようになる。   When the dissolution of the curable resin 30 proceeds in the depth direction and reaches the bottom surface of the net-containing resin layer 20, the discharge liquid containing the dissolved material of the curable resin 30, that is, the solution is exposed to the bottom surface of the processing object 4. Then, it comes to face the arrangement member 2.

細孔17の配置面24上の開口の大きさは、網目29の大きさよりも小さくされ、また、配置面24上の細孔17の開口の個数の単位面積当たりの数は、配置面24上の網目29の単位面積当たりの個数よりも多くされており、各網目29と配置面24には、少なくとも一個の細孔17の開口が位置するようにされている。   The size of the openings on the arrangement surface 24 of the pores 17 is made smaller than the size of the mesh 29, and the number of openings of the pores 17 on the arrangement surface 24 per unit area is the same as that on the arrangement surface 24. The number of the meshes 29 is larger than the number per unit area, and at least one opening of the pores 17 is positioned on each mesh 29 and the arrangement surface 24.

配置部材2と対面した硬化性樹脂30の溶解物を含有する吐出液は、開口が対面する細孔17に吸引され、吐出液が着弾した網目29内の硬化性樹脂30が除去される。
網28は吐出液によって溶解されないので、吐出液が接触しても残存する。
本発明では、金属製の板等に細孔17を形成した配置部材2を用いることができるが、配置部材2を通気性を有する多孔質材料で構成することもできる。
The discharge liquid containing the melted curable resin 30 facing the arrangement member 2 is sucked into the pores 17 facing the opening, and the curable resin 30 in the mesh 29 on which the discharge liquid has landed is removed.
Since the mesh 28 is not dissolved by the discharge liquid, it remains even if the discharge liquid contacts.
In the present invention, the disposing member 2 in which the pores 17 are formed in a metal plate or the like can be used, but the disposing member 2 can also be formed of a porous material having air permeability.

また、ここでは、処理対象物4を配置部材2に真空吸着させながら吐出液を着弾させたが、処理対象物4の所望位置の網目29の表面に、硬化性樹脂30を溶解させる吐出液を吐出、着弾させ、網目29内の硬化性樹脂30を溶解させて、吐出液が着弾した網含有樹脂層20の底面に、硬化性樹脂30を含有する溶液を露出させた後、吸引室6内を減圧して処理対象物4を配置部材2に真空吸着させ、細孔17によって、溶解された硬化性樹脂30を含有する吐出液を吸引室6内に吸引するようにしても良い。   Here, the discharge liquid is landed while the processing object 4 is vacuum-adsorbed on the arrangement member 2, but the discharge liquid that dissolves the curable resin 30 on the surface of the mesh 29 at a desired position of the processing object 4 is used. After discharging and landing, the curable resin 30 in the mesh 29 is dissolved, and the solution containing the curable resin 30 is exposed on the bottom surface of the net-containing resin layer 20 on which the discharged liquid has landed. The processing object 4 may be vacuum-adsorbed to the arrangement member 2 by reducing the pressure, and the discharge liquid containing the dissolved curable resin 30 may be sucked into the suction chamber 6 through the pores 17.

処理対象物4の、記憶装置66の記憶内容に対応する位置の網目29の硬化性樹脂30が除去されると、その除去部分によって、網含有樹脂層20には、図6(a)に示すように、網28が残存し、網目29が貫通した開口33が形成される。   When the curable resin 30 of the mesh 29 at the position corresponding to the stored contents of the storage device 66 of the processing object 4 is removed, the removed portion contains the mesh-containing resin layer 20 as shown in FIG. As described above, the mesh 28 remains and an opening 33 through which the mesh 29 passes is formed.

溶解した硬化性樹脂30を含有する吐出液の処理について説明すると、図6(b)(及び図3(b)、図5(b))の符号31は吸引室6の底面であり、傾斜が設けられており、底面31の傾斜の下方位置には、排液口32が設けられ、排液口32には排液管35が接続されている。   The processing of the discharge liquid containing the dissolved curable resin 30 will be described. Reference numeral 31 in FIG. 6B (and FIG. 3B and FIG. 5B) is the bottom surface of the suction chamber 6 and is inclined. A drainage port 32 is provided at a position below the slope of the bottom surface 31, and a drainage pipe 35 is connected to the drainage port 32.

排液管35には開閉装置7が設けられており、開閉装置7を開けると、排液口32は吸引室6の外部と接続され、開閉装置7を閉じると、排液口32は閉塞され吸引室6の外部との接続は遮断される。   The drainage pipe 35 is provided with an opening / closing device 7. When the opening / closing device 7 is opened, the drainage port 32 is connected to the outside of the suction chamber 6. When the opening / closing device 7 is closed, the drainage port 32 is closed. Connection to the outside of the suction chamber 6 is interrupted.

吸引室6を排気装置36によって排気して減圧する際には、開閉装置7は閉じた状態にし、排液口32から気体が吸引室6内に侵入しないようにしておく。
この状態では、貫通された網目29を有する開口33と細孔17とを通って吸引室6内に気体が流入する。
その流入する気体は排気装置36によって吸引室6の内部から排出される。
When the suction chamber 6 is evacuated and decompressed by the exhaust device 36, the opening / closing device 7 is closed so that gas does not enter the suction chamber 6 from the drain port 32.
In this state, gas flows into the suction chamber 6 through the opening 33 having the mesh 29 penetrated and the pores 17.
The inflowing gas is discharged from the inside of the suction chamber 6 by the exhaust device 36.

他方、吸引室6内に吸引された吐出液は、吸引室6の底面31に落下し、傾斜した底面31に沿って上方から下方に流れて移動する。このとき、開閉装置7が閉じられているので、排気口32から排出されずに底面31の傾斜の下端部分に集合され、吸引された吐出液によって液溜まり34が形成される。   On the other hand, the discharge liquid sucked into the suction chamber 6 falls to the bottom surface 31 of the suction chamber 6 and flows along the inclined bottom surface 31 to move downward from the top. At this time, since the opening / closing device 7 is closed, the liquid reservoir 34 is formed by the suctioned discharge liquid that is not discharged from the exhaust port 32 but is collected at the inclined lower end portion of the bottom surface 31.

処理対象物4の所望位置に開口33が形成された後、吸引室6の排気を停止する。吸引室6の内部が吸引室6の外部の圧力と同程度になると開閉装置7を開けることができ、開閉装置7を開けると、液溜まり34に位置し、溶解された硬化性樹脂を含有する吐出液は、重力によって排液管35を下方に移動し、吸引室6の外部に排出される。   After the opening 33 is formed at a desired position of the processing object 4, the exhaust of the suction chamber 6 is stopped. The opening / closing device 7 can be opened when the inside of the suction chamber 6 becomes the same pressure as the outside of the suction chamber 6, and when the opening / closing device 7 is opened, it is located in the liquid reservoir 34 and contains dissolved curable resin. The discharged liquid moves downward in the drainage pipe 35 by gravity and is discharged to the outside of the suction chamber 6.

次に、原版を製造するために、開口33が形成された網含有樹脂層20を硬化させる。
この例では、用いた硬化性樹脂は、所定波長の光に反応して硬化する樹脂であり、開口33が形成された処理対象物4は、配置部材2上から露光装置内に移動させ、露光装置によって残存する硬化性樹脂に光を照射して硬化させると、記憶装置66に記憶されたパターンの開口33を有する原版が得られる。
Next, in order to manufacture the original plate, the net-containing resin layer 20 in which the openings 33 are formed is cured.
In this example, the curable resin used is a resin that cures in response to light of a predetermined wavelength, and the processing object 4 in which the opening 33 is formed is moved from above the arrangement member 2 into the exposure apparatus to be exposed. When the curable resin remaining by the apparatus is irradiated with light and cured, an original having the pattern openings 33 stored in the storage device 66 is obtained.

なお、吐出液量は網含有樹脂層20の硬化性樹脂30を溶解除去するのに必要十分な適量として、印刷パターンも考慮して事前に調整する必要がある。吐出液量が過剰になると、網含有樹脂層20の硬化性樹脂30を必要以上に溶解除去して印刷パターンの精細度を下げる虞がある。   The amount of the discharged liquid needs to be adjusted in advance in consideration of the printing pattern as an appropriate amount necessary and sufficient for dissolving and removing the curable resin 30 of the net-containing resin layer 20. If the amount of the discharged liquid is excessive, the curable resin 30 of the net-containing resin layer 20 may be dissolved and removed more than necessary to reduce the definition of the print pattern.

逆に吐出液量が不足すると、硬化性樹脂30が除去されるまでの時間が長くなるか、領域が狭くなる虞がある。制御すべき吐出液量の範囲としては1滴につき、1pリットル〜50pリットルであればよい。   Conversely, if the amount of discharged liquid is insufficient, there is a possibility that the time until the curable resin 30 is removed becomes longer or the region becomes narrower. The range of the discharge liquid amount to be controlled may be 1 pliter to 50 pliter per drop.

光反応性の硬化性樹脂材料については、スクリーン印刷等で一般的な光硬化性レジスト等であればよく、また、感光性樹脂を溶解除去する吐出液についても印刷ヘッドから吐出可能な粘度,表面張力の性状を有した液体であればよい。感光性樹脂層の材質、厚み、前記吐出液の種類、メッシュの材質および構造については、印刷用原版が製造できる範囲で自由に設定することができる。   The photo-reactive curable resin material may be a general photo-curable resist or the like for screen printing, etc. Also, the discharge liquid for dissolving and removing the photosensitive resin can be discharged from the print head with a viscosity and surface. Any liquid having the property of tension may be used. The material and thickness of the photosensitive resin layer, the kind of the discharge liquid, the material and structure of the mesh can be freely set as long as the printing original plate can be manufactured.

なお、感光性を有する硬化性樹脂としては、主成分に、光重合や光架橋が可能な水溶性高分子または溶剤可溶性高分子等の感光性樹脂がある。
具体的には、アクリロイル基、メタクリロイル基、アクリルアミド基、マレイン酸ジエステル、アリル基、ビニルエーテル基、ビニルチオエーテル基、ビニルアミノ基、グリシジル基、アセチレン性不飽和基を有するモノマー、プレポリマー、ポリマーであり、適切な光重合開始剤、光増感剤、光架橋剤等が配合された溶液を網体19に塗布することができる。
The photosensitive curable resin includes a photosensitive resin such as a water-soluble polymer or a solvent-soluble polymer that can be photopolymerized or photocrosslinked as a main component.
Specific examples include monomers, prepolymers and polymers having acryloyl, methacryloyl, acrylamide, maleic diester, allyl, vinyl ether, vinyl thioether, vinylamino, glycidyl, and acetylenically unsaturated groups. A solution containing an appropriate photopolymerization initiator, photosensitizer, photocrosslinking agent, or the like can be applied to the network 19.

本発明では光硬化性の樹脂だけではなく、熱硬化性樹脂、電子線によって硬化する樹脂などの硬化性樹脂も含まれる。
吐出液は、樹脂主成分を溶解できる水溶性有機溶媒等である。
In the present invention, not only a photocurable resin but also a curable resin such as a thermosetting resin or a resin curable by an electron beam is included.
The discharge liquid is a water-soluble organic solvent that can dissolve the resin main component.

本例では、網28の材質はステンレスであり、網28は、250本/inch程度であり、網目29の開口の大きさは約100μm角となっている。
その網28に形成する網含有樹脂層20の厚みは、25μm〜50μm程度であり、網28の片面に塗布する。
In this example, the material of the mesh 28 is stainless steel, the mesh 28 is about 250 pieces / inch, and the size of the opening of the mesh 29 is about 100 μm square.
The net-containing resin layer 20 formed on the net 28 has a thickness of about 25 μm to 50 μm and is applied to one side of the net 28.

なお、上記実施例では、吐出ヘッド53と配置部材2とは台座51に対して移動できるように構成されていたが、図7に示すように、配置部材2の移動方向とは垂直方向に長く、配置部材2の移動方向とは垂直な方向の処理対象物4の長さよりも長い範囲に吐出孔58が配置された吐出ヘッド53’を用いて吐出装置50’を構成すると、吐出ヘッド53’を静止させて配置部材2を移動させることで、配置部材2上の処理対象物4の所望位置に吐出液を吐出することもできる。   In the above embodiment, the ejection head 53 and the arrangement member 2 are configured to be movable with respect to the pedestal 51. However, as shown in FIG. 7, the movement direction of the arrangement member 2 is longer in the vertical direction. When the ejection device 50 ′ is configured using the ejection head 53 ′ in which the ejection holes 58 are arranged in a range longer than the length of the processing target 4 in the direction perpendicular to the moving direction of the arrangement member 2, the ejection head 53 ′ is configured. By moving the arrangement member 2 with the stationary, the discharge liquid can be discharged to a desired position of the processing object 4 on the arrangement member 2.

逆に、このような長さの吐出ヘッド53’を台座51に対して静止させた配置部材2上で、吐出ヘッド53’の長辺方向とは垂直で水平な方向に、吐出ヘッド53’を台座51に対して移動させ、配置部材2上の処理対象物4の所望位置に吐出液を吐出することもできる。
要するに、本発明の移動装置10には、ステージ1と吐出ヘッド53、53’とを相対的に移動させる装置であれば含まれる。
On the other hand, on the arrangement member 2 in which the ejection head 53 ′ having such a length is stationary with respect to the pedestal 51, the ejection head 53 ′ is placed in a horizontal direction perpendicular to the long side direction of the ejection head 53 ′. It is also possible to move the pedestal 51 and discharge the discharge liquid to a desired position of the processing object 4 on the arrangement member 2.
In short, the moving device 10 of the present invention includes any device that relatively moves the stage 1 and the ejection heads 53 and 53 ′.

2……配置部材
3……メッシュスクリーン
4……処理対象物
6……吸引室
10……移動装置
17……細孔
20……網含有樹脂層
24……配置面
50、50’……吐出装置
53、53’……吐出ヘッド
2 ... Arrangement member 3 ... Mesh screen 4 ... Process object 6 ... Suction chamber 10 ... Moving device 17 ... Fine pore 20 ... Mesh-containing resin layer 24 ... Arrangement surface 50, 50 '... Discharge Apparatus 53, 53 '…… Discharge head

Claims (8)

配置面に処理対象物が配置される配置部材と、
吐出液を吐出する吐出孔が設けられた吐出ヘッドと、
前記配置部材と前記吐出ヘッドとを相対的に移動させる移動装置と、
前記配置部材上に配置された処理対象物の表面である着弾面の所望位置に向けて前記吐出孔から前記吐出液を吐出させる制御装置と、
を有する吐出装置であって、
前記配置部材の裏面には、吸引室が設けられ、前記配置部材の裏面は前記吸引室内に露出され、
前記配置部材には、前記配置部材の前記配置面側の空間と裏面側の空間とを接続する複数の細孔が形成され、
前記吸引室の圧力が前記配置面の上の圧力よりも低下すると、前記配置面の上に位置する液体が前記吸引室内に吸引されるように構成された吐出装置。
A placement member on which the processing object is placed on the placement surface;
A discharge head provided with discharge holes for discharging a discharge liquid;
A moving device that relatively moves the arrangement member and the ejection head;
A control device that discharges the discharge liquid from the discharge hole toward a desired position on a landing surface that is a surface of a processing object disposed on the placement member;
A discharge device comprising:
A suction chamber is provided on the back surface of the placement member, and the back surface of the placement member is exposed in the suction chamber.
The arrangement member is formed with a plurality of pores connecting the arrangement surface side space and the back surface side space of the arrangement member,
An ejection device configured to suck liquid into the suction chamber when the pressure in the suction chamber is lower than the pressure on the placement surface.
前記吐出ヘッドには、前記吐出孔が複数個設けられた請求項1記載の吐出装置。   The ejection device according to claim 1, wherein the ejection head is provided with a plurality of ejection holes. 前記制御装置には、記憶装置が設けられ、前記記憶装置に記憶された吐出位置に向けて前記吐出孔から前記吐出液が吐出されるように構成された請求項1又は請求項2のいずれか1項記載の吐出装置。   3. The control device according to claim 1, wherein the control device is provided with a storage device, and the discharge liquid is discharged from the discharge hole toward a discharge position stored in the storage device. 2. A discharge device according to item 1. 前記吸引室は、前記配置部材の下方に配置され、底面には傾斜が設けられた請求項1乃至請求項3のいずれか1項記載の吐出装置。   The discharge device according to any one of claims 1 to 3, wherein the suction chamber is disposed below the arrangement member, and a bottom surface is provided with an inclination. 前記傾斜の上端よりも下端に近い位置に、液体を排出する排液口と、
前記排液口を導通させ又は閉塞させる開閉装置とが設けられた請求項4記載の吐出装置。
A drain outlet for discharging liquid at a position closer to the lower end than the upper end of the slope;
The discharge device according to claim 4, further comprising an opening / closing device that allows the drainage port to conduct or close.
前記配置部材は、多孔質部材で構成された請求項1乃至請求項5のいずれか1項記載の吐出装置。   The discharge device according to any one of claims 1 to 5, wherein the arrangement member is formed of a porous member. 請求項1乃至請求項6のいずれか1項記載の吐出装置を用い、網中の所望位置の網目を閉塞させ、スクリーン印刷用原版を形成する原版製造方法であって、
前記網に樹脂を塗布し、前記樹脂によって前記網の網目を塞いで前記網と前記樹脂とを含む膜状の網含有樹脂層を形成し、前記網含有樹脂層を有する前記処理対象物を前記配置部材上に配置し、
排気装置を動作させて前記吸引室の圧力を、前記処理対象物の前記着弾面が露出された雰囲気の圧力よりも小さくしながら、前記吐出孔から、前記樹脂を溶解させる溶解液を前記吐出液として、前記着弾面の所望位置に向けて吐出して着弾した部分の前記樹脂を溶解させ、
前記樹脂の溶解物を含有し、前記配置面上に位置する前記溶解液を、前記細孔によって吸引して前記吸引室内に移動させ、
所望位置の前記網目が開けられた前記網含有樹脂層に含有される前記樹脂を硬化させて前記原版を得る原版製造方法。
A method for producing an original plate, wherein the discharge device according to any one of claims 1 to 6 is used to close a mesh at a desired position in the mesh to form a screen printing original plate.
A resin is applied to the mesh, the mesh of the mesh is closed with the resin to form a film-like mesh-containing resin layer containing the mesh and the resin, and the processing object having the mesh-containing resin layer is Placed on the placement member,
While operating the exhaust device, the pressure of the suction chamber is made smaller than the pressure of the atmosphere in which the landing surface of the object to be processed is exposed, and the solution for dissolving the resin is discharged from the discharge hole. As described above, the resin that has been discharged and landed toward a desired position on the landing surface is dissolved,
Containing the lysate of the resin, the solution located on the arrangement surface is sucked by the pores and moved into the suction chamber;
A method for producing an original plate, wherein the original plate is obtained by curing the resin contained in the net-containing resin layer in which the nets at desired positions are opened.
前記樹脂には、光硬化性樹脂を用い、
所望位置の前記網目が開けられた前記網含有樹脂層に前記樹脂を硬化させる波長の光を照射して、前記網含有樹脂層に含有された前記樹脂を硬化させる請求項7記載の原版製造方法。
For the resin, a photocurable resin is used,
The method for producing an original plate according to claim 7, wherein the net-containing resin layer having the mesh at a desired position is irradiated with light having a wavelength for curing the resin to cure the resin contained in the net-containing resin layer. .
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Citations (8)

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JPH0732569A (en) * 1993-07-20 1995-02-03 Riso Kagaku Corp Printing base paper and plate making method thereof
JPH0747654A (en) * 1993-08-04 1995-02-21 Riso Kagaku Corp Method for making stencil base paper
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JP2003191499A (en) * 2001-12-27 2003-07-08 Seiko Epson Corp Platen and ink jet recording apparatus provided with the platen
JP2006205566A (en) * 2005-01-28 2006-08-10 Canon Inc Inkjet recording device
JP2006248026A (en) * 2005-03-10 2006-09-21 Seiko Epson Corp Waste ink processing apparatus, recording apparatus, waste liquid processing apparatus, and liquid ejecting apparatus
JP2010099864A (en) * 2008-10-21 2010-05-06 Seiko Epson Corp Mist collecting device and liquid jetting apparatus

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0732569A (en) * 1993-07-20 1995-02-03 Riso Kagaku Corp Printing base paper and plate making method thereof
JPH0747654A (en) * 1993-08-04 1995-02-21 Riso Kagaku Corp Method for making stencil base paper
JP2002187261A (en) * 2000-10-10 2002-07-02 Canon Inc Ink jet recording device
JP2002225311A (en) * 2001-01-30 2002-08-14 Seiko Epson Corp Printing up to the edge of the printing paper without soiling the platen
JP2003191499A (en) * 2001-12-27 2003-07-08 Seiko Epson Corp Platen and ink jet recording apparatus provided with the platen
JP2006205566A (en) * 2005-01-28 2006-08-10 Canon Inc Inkjet recording device
JP2006248026A (en) * 2005-03-10 2006-09-21 Seiko Epson Corp Waste ink processing apparatus, recording apparatus, waste liquid processing apparatus, and liquid ejecting apparatus
JP2010099864A (en) * 2008-10-21 2010-05-06 Seiko Epson Corp Mist collecting device and liquid jetting apparatus

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