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JP2012035884A - 60-liter inner package combined container and chemical liquid discharging tube - Google Patents

60-liter inner package combined container and chemical liquid discharging tube Download PDF

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Publication number
JP2012035884A
JP2012035884A JP2010179260A JP2010179260A JP2012035884A JP 2012035884 A JP2012035884 A JP 2012035884A JP 2010179260 A JP2010179260 A JP 2010179260A JP 2010179260 A JP2010179260 A JP 2010179260A JP 2012035884 A JP2012035884 A JP 2012035884A
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container
inner bag
liquid inlet
bag composite
liquid
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JP5478413B2 (en
Inventor
Tsutomu Yamaguchi
勉 山口
Masashi Ono
将司 大野
Shigeru Nakayama
茂 中山
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JAPAN PAIL CORP
Sekisui Seikei Ltd
JFE Kyowa Yoki Co Ltd
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JAPAN PAIL CORP
Sekisui Seikei Ltd
JFE Kyowa Yoki Co Ltd
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Priority to JP2010179260A priority Critical patent/JP5478413B2/en
Priority to TW100104305A priority patent/TWI478707B/en
Priority to CN201110093438.5A priority patent/CN102372106B/en
Priority to KR1020110029578A priority patent/KR101687325B1/en
Publication of JP2012035884A publication Critical patent/JP2012035884A/en
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65DCONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
    • B65D77/00Packages formed by enclosing articles or materials in preformed containers, e.g. boxes, cartons, sacks or bags
    • B65D77/04Articles or materials enclosed in two or more containers disposed one within another
    • B65D77/06Liquids or semi-liquids or other materials or articles enclosed in flexible containers disposed within rigid containers
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65DCONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
    • B65D1/00Rigid or semi-rigid containers having bodies formed in one piece, e.g. by casting metallic material, by moulding plastics, by blowing vitreous material, by throwing ceramic material, by moulding pulped fibrous material or by deep-drawing operations performed on sheet material
    • B65D1/12Cans, casks, barrels, or drums
    • B65D1/14Cans, casks, barrels, or drums characterised by shape
    • B65D1/16Cans, casks, barrels, or drums characterised by shape of curved cross-section, e.g. cylindrical
    • B65D1/165Cylindrical cans
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65DCONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
    • B65D1/00Rigid or semi-rigid containers having bodies formed in one piece, e.g. by casting metallic material, by moulding plastics, by blowing vitreous material, by throwing ceramic material, by moulding pulped fibrous material or by deep-drawing operations performed on sheet material
    • B65D1/12Cans, casks, barrels, or drums
    • B65D1/20Cans, casks, barrels, or drums characterised by location or arrangement of filling or discharge apertures
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65DCONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
    • B65D25/00Details of other kinds or types of rigid or semi-rigid containers
    • B65D25/38Devices for discharging contents
    • B65D25/40Nozzles or spouts
    • B65D25/42Integral or attached nozzles or spouts
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65DCONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
    • B65D41/00Caps, e.g. crown caps or crown seals, i.e. members having parts arranged for engagement with the external periphery of a neck or wall defining a pouring opening or discharge aperture; Protective cap-like covers for closure members, e.g. decorative covers of metal foil or paper
    • B65D41/02Caps or cap-like covers without lines of weakness, tearing strips, tags, or like opening or removal devices
    • B65D41/04Threaded or like caps or cap-like covers secured by rotation
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65DCONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
    • B65D85/00Containers, packaging elements or packages, specially adapted for particular articles or materials
    • B65D85/70Containers, packaging elements or packages, specially adapted for particular articles or materials for materials not otherwise provided for
    • B65D85/84Containers, packaging elements or packages, specially adapted for particular articles or materials for materials not otherwise provided for for corrosive chemicals

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Ceramic Engineering (AREA)
  • Health & Medical Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Packages (AREA)
  • Containers And Packaging Bodies Having A Special Means To Remove Contents (AREA)

Abstract

【課題】煩雑作業の低減を図ることが可能である60リットル内袋複合容器を提供し、及び該60リットル内袋複合容器用薬液排出チューブを提供する。
【解決手段】樹脂製であり、高清浄度が要求される薬液を60リットル収容し、液出入口部112を設けた内装容器110と、鋼製であり、胴体121に地板122を巻き締めて形成した収納部120aの内面に沿って上記内装容器を収納し、さらに天板123を上記胴体に巻き締めて成形される外装容器120と、を備えた。
【選択図】図1
The present invention provides a 60 liter inner bag composite container capable of reducing complicated work, and a chemical solution discharge tube for the 60 liter inner bag composite container.
SOLUTION: It is made of resin, contains 60 liters of a chemical solution that requires high cleanliness, is provided with an inner container 110 provided with a liquid inlet / outlet portion 112, and is made of steel, and is formed by winding a base plate 122 around a body 121. And the exterior container 120 formed by winding the top plate 123 around the body and accommodating the interior container along the inner surface of the storage portion 120a.
[Selection] Figure 1

Description

本発明は、鋼製の外側容器内に樹脂製の内側容器を設けた、容量60リットルの内袋複合容器、及び該60リットル内袋複合容器用の薬液排出チューブに関する。   The present invention relates to an inner bag composite container having a capacity of 60 liters, in which an inner container made of resin is provided in an outer container made of steel, and a chemical solution discharge tube for the 60 liter inner bag composite container.

例えば食品や薬液を収納するための鋼製容器では、上記食品や薬液が直接に鋼製容器内面に接触することによる腐食等の発生を防止するため、上記食品や薬液を収納する樹脂製の内側容器を鋼製の外側容器内に収納した、図11に示すような、内袋複合容器10の形態が採られる。   For example, in a steel container for storing food or chemicals, the inside of a resin container for storing the food or chemicals to prevent the occurrence of corrosion or the like due to direct contact of the food or chemicals with the inner surface of the steel container The form of the inner bag composite container 10 as shown in FIG. 11 in which the container is housed in a steel outer container is employed.

該内袋複合容器10では、内側容器1は、本体部1aがポリエチレン製で袋状にて形成され、その上部には充填物を出入するための出入口1bが容器本体部と一体的に形成されている。尚、出入口1bの外周面は、雄ネジ形状に成形されている。   In the inner bag composite container 10, the inner container 1 has a main body portion 1 a made of polyethylene and formed in a bag shape, and an inlet / outlet 1 b for taking in and out the filling is formed integrally with the container main body portion. ing. In addition, the outer peripheral surface of the entrance 1b is shape | molded by the external thread shape.

一方、内袋複合容器10の外側容器2は、円筒状の鋼板にてなる胴体2aと、鋼板にてなる地板2bとが巻き締められて収納部が形成される。
そして、上記収納部内に、上記内側容器1を装填した後、鋼板製の天板2cに形成した開口から上記出入口1bを突出させた状態で、胴体2aと天板2cとが巻き締められ、鋼製の外側容器2内に樹脂製の内側容器1を収納した内袋複合容器10が作製される。このような内袋複合容器10に対して充填物を注入した後、天板2cから突出した出入口1bには、キャップ3が螺合され、充填物の密閉が図られる。
On the other hand, the outer container 2 of the inner bag composite container 10 is wound with a body 2a made of a cylindrical steel plate and a ground plate 2b made of a steel plate to form a storage portion.
And after loading the said inner container 1 in the said accommodating part, in the state which made the said entrance 1b protrude from the opening formed in the steel plate top plate 2c, the fuselage | body 2a and the top plate 2c are wound up, and steel The inner bag composite container 10 in which the resin inner container 1 is housed in the outer container 2 is manufactured. After injecting the filling material into the inner bag composite container 10, the cap 3 is screwed into the entrance / exit 1 b protruding from the top plate 2 c to seal the filling material.

上記薬液の例として、例えば半導体分野では、例えばCMPスラリー、フォトレジスト、現像液、エッチング液、洗浄液等であり、液晶分野では、フォトレジスト、カラーレジスト、カラーフィルタ材料等である。また、これらの薬液の中には遮光を要するものもあり、鋼製にてなる外側容器2は遮光性を有することから、内袋複合容器10の使用は、この点でも有利である。   Examples of the chemical solution include, for example, a CMP slurry, a photoresist, a developer, an etching solution, and a cleaning solution in the semiconductor field, and a photoresist, a color resist, and a color filter material in the liquid crystal field. In addition, some of these chemical solutions require light shielding, and the outer container 2 made of steel has light shielding properties. Therefore, the use of the inner bag composite container 10 is advantageous also in this respect.

半導体分野等における薬液を扱う場合には、内側容器1は勿論のこと、内装複合容器10には高い清浄度が要求される。さらに薬液の排出に当たっても高い清浄性が要求され、排出方法として、上記キャップ3を取り外して取り付けられ排出用チューブを有するディスペンサーを用いて排出する方法が採られる。これには、薬液をポンプで吸い上げるポンプアップ方式、あるいは、缶内に窒素ガス等を注入して加圧することで薬液を押し出す加圧方式がある。   When handling chemicals in the semiconductor field or the like, high cleanliness is required for the inner composite container 10 as well as the inner container 1. Further, even when the chemical solution is discharged, high cleanliness is required. As a discharging method, a method of discharging using a dispenser having the discharging tube attached with the cap 3 removed is employed. This includes a pump-up system that sucks up the chemical liquid with a pump, or a pressurization system that pushes out the chemical liquid by injecting nitrogen gas or the like into the can and pressurizing it.

特開2007−45429号公報JP 2007-45429 A

上述したような、半導体分野等で使用される薬液用の内袋複合容器としては、その内容量が20リットルの、いわゆるペール缶を利用したものが広く使用されている。一方、上述のように、薬液の排出にはディスペンサーを用いた方法が採られることから、ほぼ20リットルの薬液を排出する度に、容器に対して上記ディスペンサーの着脱を行う必要があり、非常に煩雑な作業が強いられている。   As the above-described inner bag composite container for chemical solution used in the semiconductor field or the like, a container using a so-called pail can having a capacity of 20 liters is widely used. On the other hand, as described above, since a method using a dispenser is adopted for discharging the chemical liquid, it is necessary to attach and detach the dispenser to and from the container every time about 20 liters of chemical liquid is discharged. Complicated work is forced.

また、半導体分野等で使用される薬液は、非常に高価であり、コスト面から、内袋複合容器内における残液量を可能な限り低減したいという、ユーザー側の要望もある。   Moreover, the chemical | medical solution used in the semiconductor field | area etc. is very expensive, and there exists a user's request | requirement of reducing the residual liquid amount in an inner bag composite container as much as possible from a cost side.

本発明は、このような課題を解決するためになされたもので、煩雑作業の低減を図ることが可能である、60リットル内袋複合容器を提供すること、及び、該60リットル内袋複合容器用の薬液排出チューブを提供することを目的とする。   The present invention has been made to solve such a problem, and provides a 60-liter inner bag composite container capable of reducing troublesome work, and the 60-liter inner bag composite container. It aims at providing the chemical | medical solution discharge tube for use.

上記目的を達成するため、本発明は以下のように構成する。
即ち、本発明の第1態様における60リットル内袋複合容器は、樹脂製であり、取り扱いに高清浄度が要求される薬液を収容し、その収容量が60リットルであり、天面に液出入口部を設けた内装容器と、
鋼製であり、筒状の胴体に地板が巻き締められて成形された収納部の内面に沿って上記内装容器を収納し、さらに上記液出入口部が突出可能な口部用開口を形成した天板を上記胴体に巻き締めて成形される外装容器と、
を備えたことを特徴とする。
In order to achieve the above object, the present invention is configured as follows.
That is, the 60-liter inner bag composite container according to the first aspect of the present invention is made of resin, contains a chemical solution that requires high cleanliness for handling, has a storage capacity of 60 liters, and has a liquid inlet / outlet on the top surface. An interior container with a section;
A ceiling made of steel, containing the interior container along the inner surface of a storage part formed by winding a base plate around a cylindrical body, and further forming a mouth opening through which the liquid inlet / outlet part can protrude An outer container formed by winding a plate around the body, and
It is provided with.

また、上記内装容器の上記液出入口部は、該液出入口部の外周面に、当該液出入口部の軸方向に沿って保持用ネジとキャップ用ネジとを同心円状に2段にて有し、上記保持用ネジは、上記天面に近接して成形され、上記外装容器の上記口部用開口を通過する直径を有し、当該液出入口部を上記天板に保持するハンガーを螺合するためのネジであり、上記キャップ用ネジは、上記天面より離れて成形され、上記保持用ネジよりも小径であり、上記液出入口部の口部を閉止するキャップを螺合するためのネジで構成してもよい。   In addition, the liquid inlet / outlet portion of the inner container has a holding screw and a cap screw in two steps concentrically along the axial direction of the liquid inlet / outlet portion on the outer peripheral surface of the liquid inlet / outlet portion. The holding screw is formed close to the top surface, has a diameter that passes through the opening for the mouth of the outer container, and is used for screwing a hanger that holds the liquid inlet / outlet portion on the top plate. The cap screw is formed away from the top surface, has a smaller diameter than the holding screw, and is composed of a screw for screwing a cap that closes the mouth of the liquid inlet / outlet portion. May be.

また、上記天板は、上記口部用開口の周囲において、上記口部用開口から当該天板の中央を超えた領域まで窪みを形成してもよい。   Moreover, the said top plate may form a hollow in the circumference | surroundings of the said opening for mouths from the said opening for mouths to the area | region beyond the center of the said top plate.

また、上記外装容器は、塗装を省略可能な電気亜鉛メッキ鋼板にて成形され、上記薬液は、半導体分野及び液晶分野の少なくとも一方にて使用される薬液であり、上記内装容器は、薬液用仕様による高密度ポリエチレン樹脂製であり高品質管理下にてブロー成形して構成してもよい。   The exterior container is formed of an electrogalvanized steel sheet that can be omitted from painting, and the chemical solution is a chemical solution used in at least one of the semiconductor field and the liquid crystal field, and the interior container is a chemical solution specification. It may be made of high density polyethylene resin and blow molded under high quality control.

また、本発明の第2態様における薬液排出チューブは、上記第1態様における60リットル内袋複合容器に備わる内装容器における液出入口部に装着可能であり、上記内装容器に収容した薬液を容器外部へ排出する、上記60リットル内袋複合容器用の薬液排出チューブであって、
可撓性で耐薬液性の樹脂製であり、吸液口近傍の先端部分に、薬液排出用の容器内加圧に伴い上記60リットル内袋複合容器の地板に生じる変形部分へ上記吸液口を配向させる錘を有することを特徴とする。
Moreover, the chemical | medical solution discharge tube in the 2nd aspect of this invention can be mounted | worn with the liquid inlet-and-outlet part in the interior container with which the 60 liter inner bag composite container in the said 1st aspect is equipped, The chemical | medical solution accommodated in the said interior container is outside a container. The chemical solution discharge tube for the 60 liter inner bag composite container to be discharged,
It is made of a flexible and liquid-resistant resin, and the liquid suction port is connected to a deformed portion generated in the base plate of the 60-liter inner bag composite container at the front end portion near the liquid suction port due to the pressure in the container for discharging the chemical liquid. It has the weight which orientates.

本発明の第1態様における60リットル内袋複合容器によれば、その収容量は、60リットルであることから、従来の20リットルに対して収容量が増え、薬液排出に関する煩雑作業の低減を図ることができる。   According to the 60 liter inner bag composite container according to the first aspect of the present invention, since the storage amount is 60 liters, the storage amount is increased compared to the conventional 20 liters, and the complicated work relating to the discharge of the chemical solution is reduced. be able to.

また、上述のような60リットル内袋複合容器において、内装容器の液出入口部に保持用ネジ及びキャップ用ネジを形成した。よって、天板の口部用開口より突出する、内装容器の液出入口部は、保持用ネジに螺合させたハンガーにて、突出した状態で天板に保持することができる。よって、キャップ用ネジに螺合するキャップの着脱を容易に行うことができ、薬液排出作業に関する作業性を向上させることができる。   Further, in the 60-liter inner bag composite container as described above, a holding screw and a cap screw were formed at the liquid inlet / outlet portion of the inner container. Therefore, the liquid inlet / outlet portion of the interior container protruding from the opening for the mouth portion of the top plate can be held on the top plate in a protruding state by the hanger screwed to the holding screw. Therefore, it is possible to easily attach and detach the cap that is screwed to the cap screw, and it is possible to improve workability related to the chemical solution discharging operation.

また、天板には口部用開口の周囲に窪みを形成した。よって、薬液排出のために容器内を加圧する場合でも、天板の膨れを防止あるいは抑制することができる。一方、地板には、耐加圧用の工夫は施していない。よって、上記窪みとの相乗効果により、地板、特に地板中央部は、上記加圧により容器外側へ膨らむことができる。この結果、薬液排出終了間際には、上記膨らんだ変形部分に残液を集めることができ、効率的な薬液排出が可能となり、かつ残液量の低減を図ることも可能となる。   In addition, a recess was formed around the mouth opening in the top plate. Therefore, even when the inside of the container is pressurized for discharging the chemical solution, it is possible to prevent or suppress the swelling of the top plate. On the other hand, the ground plate is not devised for pressure resistance. Thus, due to the synergistic effect with the depression, the main plate, particularly the central portion of the main plate, can bulge to the outside of the container by the pressurization. As a result, it is possible to collect the remaining liquid in the swelled deformed portion just before the end of the discharge of the chemical liquid, and to efficiently discharge the chemical liquid and to reduce the amount of the residual liquid.

また、内装容器を高密度ポリエチレン樹脂で成形することで、耐薬液性及び高いクリーン度を有することができる。また、薬液が半導体分野及び液晶分野の少なくとも一方にて使用される薬液であり、それに見合う品質管理下にてブロー成形される。よって、内装容器は、高清浄度を有し、半導体分野及び液晶分野の少なくとも一方にて使用される薬液の取り扱いに適している。さらに、外装容器についても、電気亜鉛メッキ鋼板にて成形することで、外面塗装を省略することができる。よって、容器内への異物混入等の可能性を低減させ、内装容器のみならず、容器全体において高清浄度を達成することが可能である。   Moreover, it can have chemical-solution resistance and a high cleanliness by shape | molding an interior container with a high-density polyethylene resin. The chemical solution is a chemical solution used in at least one of the semiconductor field and the liquid crystal field, and is blow-molded under quality control corresponding to the chemical liquid. Therefore, the interior container has high cleanliness and is suitable for handling chemicals used in at least one of the semiconductor field and the liquid crystal field. Furthermore, the exterior container can also be omitted by forming it with an electrogalvanized steel sheet. Therefore, it is possible to reduce the possibility of foreign matter mixing into the container and achieve high cleanliness not only in the interior container but also in the entire container.

さらに本発明の第2態様における薬液排出チューブによれば、上記第1態様の60リットル内袋複合容器に装着可能であり、当該薬液排出チューブの先端部分に錘を有する。よって、薬液排出チューブの吸液口を外装容器の地板における変形部分に配向させることが可能となり、上述の、天板の窪み形成と相まって、さらに効率的な薬液排出が可能となり、かつ残液量の低減を図ることも可能となる。   Furthermore, according to the chemical | medical solution discharge tube in the 2nd aspect of this invention, it can mount | wear with the 60 liter inner bag composite container of the said 1st aspect, and has a weight in the front-end | tip part of the said chemical | medical solution discharge tube. Therefore, it is possible to orient the liquid suction port of the chemical solution discharge tube to the deformed portion of the base plate of the outer container, and in combination with the above-described depression formation of the top plate, more efficient chemical solution discharge is possible, and the remaining liquid amount It is also possible to reduce this.

本発明の一実施形態における60リットル内袋複合容器の構造を示す、一部断面を含む図である。It is a figure including the partial cross section which shows the structure of the 60 liter inner bag composite container in one Embodiment of this invention. 図1に示す60リットル内袋複合容器の平面図である。It is a top view of the 60 liter inner bag composite container shown in FIG. 図1に示す60リットル内袋複合容器の斜視図である。It is a perspective view of the 60 liter inner bag composite container shown in FIG. 図1に示す60リットル内袋複合容器の内装容器の液出入口部に関する断面図である。It is sectional drawing regarding the liquid inlet / outlet part of the interior container of the 60 liter inner bag composite container shown in FIG. 図1に示す60リットル内袋複合容器を逆さまにして薬液を排出したときの残液状態を示す図である。It is a figure which shows the remaining liquid state when a 60 liter inner bag composite container shown in FIG. 1 is turned upside down and a chemical | medical solution is discharged | emitted. 図1に示す60リットル内袋複合容器に備わる内装容器の変形例の一例を示す図であり、(A)は平面図、(B)は矢視Bによる側面図、(C)は矢視Cによる側面図である。It is a figure which shows an example of the modification of the interior container with which the 60 liter inner bag composite container shown in FIG. 1 is equipped, (A) is a top view, (B) is a side view by arrow B, (C) is arrow C FIG. 図1に示す60リットル内袋複合容器に備わる内装容器の他の変形例を示す図であり、(A)は平面図、(B)は側面図である。It is a figure which shows the other modification of the interior container with which the 60 liter inner bag composite container shown in FIG. 1 is equipped, (A) is a top view, (B) is a side view. 図1に示す60リットル内袋複合容器に備わる内装容器の別の変形例を示す図であり、(A)は平面図、(B)は側面図である。It is a figure which shows another modification of the interior container with which the 60 liter inner bag composite container shown in FIG. 1 is equipped, (A) is a top view, (B) is a side view. 図1に示す60リットル内袋複合容器に装着可能な、薬液排出チューブ及びディスペンサー機構を示す図である。It is a figure which shows the chemical | medical solution discharge tube and dispenser mechanism which can be mounted | worn with the 60 liter inner bag composite container shown in FIG. 図1に示す60リットル内袋複合容器に適用可能な傾斜台を示す斜視図である。It is a perspective view which shows the inclination stand applicable to the 60 liter inner bag composite container shown in FIG. 従来の20リットル内袋複合容器の構造を示す図である。It is a figure which shows the structure of the conventional 20 liter inner bag composite container.

本発明の実施形態である60リットル内袋複合容器について、図を参照しながら以下に説明する。尚、各図において、同一又は同様の構成部分については同じ符号を付している。   A 60-liter inner bag composite container according to an embodiment of the present invention will be described below with reference to the drawings. In each figure, the same or similar components are denoted by the same reference numerals.

図1から図4には、本実施形態における60リットル内袋複合容器100の構成が示されている。60リットル内袋複合容器100においても、従来の20リットル内袋複合容器と同様に、樹脂製の内装容器110と、該内装容器110を収納する鋼製の外装容器120とを備える。   1 to 4 show a configuration of a 60-liter inner bag composite container 100 according to this embodiment. Similarly to the conventional 20-liter inner bag composite container, the 60-liter inner bag composite container 100 includes a resin-made inner container 110 and a steel outer container 120 that houses the inner container 110.

内装容器110は、本体部111が高密度ポリエチレン樹脂製で袋状にブロー成形され、その容量が60リットルであり、本体部111の天面111aには、薬液を出入するための液出入口部112が本体部111と一体的に形成されている。液出入口部112は、本体部111のブロー成型の際に同時に成型されても良いし、別途成型され、本体部111に融着等にて取り付けられてもよい。また、液出入口部112の外周面には、図4に示すように、当該液出入口部112の軸方向112aに沿って保持用ネジ1121とキャップ用ネジ1122とが同心円状に2段にて、雄ネジ形状で成形されている。   The interior container 110 has a main body portion 111 made of high-density polyethylene resin and blow-molded into a bag shape, and has a capacity of 60 liters. A liquid inlet / outlet portion 112 is provided on the top surface 111a of the main body portion 111 for entering and exiting a chemical solution. Is formed integrally with the main body 111. The liquid inlet / outlet portion 112 may be molded simultaneously with the blow molding of the main body 111, or may be separately molded and attached to the main body 111 by fusion or the like. Further, on the outer peripheral surface of the liquid inlet / outlet portion 112, as shown in FIG. 4, a holding screw 1121 and a cap screw 1122 are concentrically arranged in two stages along the axial direction 112a of the liquid inlet / outlet portion 112. Molded in male thread shape.

保持用ネジ1121は、天面111aに近接して成形される雄ネジで、外装容器120の天板123に形成された口部用開口123aを通過する直径を有し、液出入口部112を外装容器120の天板123に保持するハンガー113を螺合するためのネジである。
キャップ用ネジ1122は、上述の保持用ネジ1121よりも小径の雄ネジであり、上記軸方向112aにおいて保持用ネジ1121よりも上側に位置し、液出入口部112の口部112bを閉止するキャップ115を螺合するためのネジである。
The holding screw 1121 is a male screw formed close to the top surface 111a, has a diameter that passes through the opening 123a for the mouth formed in the top plate 123 of the outer container 120, and covers the liquid inlet / outlet portion 112. It is a screw for screwing the hanger 113 held on the top plate 123 of the container 120.
The cap screw 1122 is a male screw having a smaller diameter than the above-described holding screw 1121, is located above the holding screw 1121 in the axial direction 112 a, and closes the mouth portion 112 b of the liquid inlet / outlet portion 112. It is a screw for screwing together.

内装容器110に収容される薬液は、収容時も含めて、取り扱いに高清浄度が要求される薬液であり、例えば、半導体分野及び液晶分野の少なくとも一方にて使用される薬液が相当する。上述したように、半導体分野での薬液としては、例えばCMPスラリー、フォトレジスト、現像液、エッチング液、洗浄液等であり、液晶分野では、フォトレジスト、カラーレジスト、カラーフィルタ材料等である。   The chemical solution stored in the interior container 110 is a chemical solution that requires high cleanliness for handling, including during storage, and corresponds to, for example, a chemical solution used in at least one of the semiconductor field and the liquid crystal field. As described above, the chemical solution in the semiconductor field is, for example, a CMP slurry, a photoresist, a developer, an etching solution, a cleaning solution, and the like, and in the liquid crystal field, a photoresist, a color resist, a color filter material, and the like.

このような薬液を収容することから、内装容器110には、高い清浄性が要求され、そのため上述のように、内装容器110は、薬液用仕様による高密度ポリエチレン樹脂製で、高品質管理の下で作製される。作製後、直ちに、液出入口部112の口部112bには内栓114が施されて内部が密閉され、さらに、キャップ用ネジ1122にキャップ115が螺合され内栓114を封止する。
尚、後述するように、収容している薬液を排出するときには、キャップ115及び内栓114が外され、図9に示すようにディスペンサー機構200を構成するプラグ本体201がキャップ用ネジ1122に螺合される。
Since such a chemical solution is stored, the interior container 110 is required to have high cleanliness. Therefore, as described above, the interior container 110 is made of high-density polyethylene resin according to the specifications for the chemical solution, and is subject to high quality control. It is made with. Immediately after the production, an inner plug 114 is applied to the mouth portion 112b of the liquid inlet / outlet portion 112 to seal the inside, and a cap 115 is screwed into the cap screw 1122 to seal the inner plug 114.
As will be described later, when discharging the stored chemical solution, the cap 115 and the inner plug 114 are removed, and the plug body 201 constituting the dispenser mechanism 200 is screwed into the cap screw 1122 as shown in FIG. Is done.

60リットル内袋複合容器100の外装容器120は、円筒状の鋼板にてなる胴体121と、鋼板にてなる地板122及び天板123とを有する。上述のように、当該60リットル内袋複合容器100の収容物は、取り扱いに高清浄度が要求される薬液であることから、外装容器120についても、汎用品に比べて高い清浄度による製造が要求される。よって、外装容器120の胴体121、地板122、及び天板123は、電気亜鉛メッキ鋼板を使用し、外面塗装を省略可能としている。これにより、容器内への異物混入等の可能性を低減させ、内装容器110のみならず、60リットル内袋複合容器100全体において高清浄度を達成している。   The exterior container 120 of the 60-liter inner bag composite container 100 includes a body 121 made of a cylindrical steel plate, a ground plate 122 and a top plate 123 made of a steel plate. As described above, since the contents of the 60-liter inner bag composite container 100 are chemical solutions that require high cleanliness for handling, the exterior container 120 can also be manufactured with high cleanliness compared to general-purpose products. Required. Therefore, the body 121, the base plate 122, and the top plate 123 of the outer container 120 are made of electrogalvanized steel plates, and the outer surface coating can be omitted. As a result, the possibility of foreign matter mixing in the container is reduced, and high cleanliness is achieved not only in the interior container 110 but also in the entire 60-liter inner bag composite container 100.

胴体121は、その両端の直径が同じである。このような胴体121と地板122とを巻き締めることで収納部120aが形成され、収納部120a内には、上述の内装容器110が装填される。尚、収納部120aの大きさは、60リットルの収容量を有する内装容器110に見合ったサイズであり、内装容器110は、収納部120aの内面に沿ってかつ接触して収納される。収納後、内装容器110の上記液出入口部112の保持用ネジ1121が通過可能な大きさにてなる口部用開口123aを形成した天板123が胴体121に巻き締められる。このとき、上記液出入口部112は、天板123の口部用開口123aより容器外部へ突出させ、上記ハンガー113を上記保持用ネジ1121に螺合することで、液出入口部112をハンガー113にて天板123に保持させる。   The body 121 has the same diameter at both ends. The storage unit 120a is formed by winding the body 121 and the base plate 122, and the interior container 110 is loaded in the storage unit 120a. Note that the size of the storage portion 120a is a size suitable for the interior container 110 having a storage capacity of 60 liters, and the interior container 110 is stored along and in contact with the inner surface of the storage portion 120a. After the storage, the top plate 123 having the opening 123a for the mouth having a size through which the holding screw 1121 of the liquid inlet / outlet portion 112 of the interior container 110 can pass is wound around the body 121. At this time, the liquid inlet / outlet part 112 protrudes from the opening 123a for the mouth of the top plate 123 to the outside of the container, and the hanger 113 is screwed to the holding screw 1121 so that the liquid inlet / outlet part 112 is connected to the hanger 113. The top plate 123 is held.

ハンガー113は、樹脂又は金属製で例えば板状の部材であり、液出入口部112の保持用ネジ1121と係合する雌ネジ113aを内周面に形成した貫通穴が開けられ、天板123の口部用開口123aを超える大きさの外周部113bを有する。よって、天板123の口部用開口123aより容器外側へ突出している保持用ネジ1121に対して、容器外側からハンガー113の雌ネジ113aを螺合させることで、ハンガー113の外周部113bが天板123に当接し、ハンガー113は、内装容器110の液出入口部112を外装容器120の天板123に保持する。尚、ハンガー113の形状は、図示する形状に限定されるものではない。   The hanger 113 is made of, for example, a plate made of resin or metal, and has a through hole in which an internal thread 113a that engages with the holding screw 1121 of the liquid inlet / outlet portion 112 is formed on the inner peripheral surface. It has the outer peripheral part 113b of the magnitude | size exceeding the opening 123a for mouth parts. Therefore, the outer peripheral portion 113b of the hanger 113 is attached to the top by screwing the female screw 113a of the hanger 113 from the outside of the container to the holding screw 1121 protruding from the opening 123a for the mouth of the top plate 123 to the outside of the container. The hanger 113 abuts on the plate 123 and holds the liquid inlet / outlet portion 112 of the inner container 110 on the top plate 123 of the outer container 120. In addition, the shape of the hanger 113 is not limited to the shape shown in figure.

さらに天板123には、図2及び図3に、より明確に図示されるように、上記口部用開口123aの周囲において、天板123を容器外側から内側へ一様に凹ませた窪み123bが形成されている。また、窪み123bと天板123とは、斜面123dにて接続しているが、これに限定するものではなく、例えば円弧状等であってもよい。このような窪み123bは、口部用開口123aの近傍から天板123の中央を超えた領域123cまで形成される。これは、以下に説明する容器内加圧により、天板123では中央部分が最も変形し易いからである。また、本実施形態では、窪み123bは、図示のように、上記液出入口部112部分に比べて上記領域123c部分が狭いほぼ卵形形状であるが、該形状に限定されるものではなく、例えば、領域123c部分においても液出入口部112部分と同等の大きさを有する長円形状等であってもよい。   Further, as shown more clearly in FIGS. 2 and 3, the top plate 123 has a recess 123b in which the top plate 123 is uniformly recessed from the outside of the container to the inside around the opening 123a for the mouth. Is formed. Moreover, although the hollow 123b and the top plate 123 are connected by the slope 123d, it is not limited to this, For example, circular arc shape etc. may be sufficient. Such a recess 123b is formed from the vicinity of the mouth opening 123a to a region 123c beyond the center of the top plate 123. This is because the central portion of the top plate 123 is most easily deformed by the in-container pressurization described below. Further, in the present embodiment, as shown in the drawing, the recess 123b has a substantially oval shape in which the region 123c portion is narrower than the liquid inlet / outlet portion 112 portion, but is not limited to this shape. The region 123c may also have an oval shape having the same size as the liquid inlet / outlet portion 112.

従来の内袋複合容器と同様に、本実施形態における60リットル内袋複合容器100においても、収容物である上記薬液の排出は、容器100内への不活性ガスの注入による加圧により行うことができる。上記窪み123bは、上記加圧時における天板123の膨れ変形を防止又は抑制するためのものであり、また、以下に記すように、地板122に変形部分129を生じさせるものでもある。   Similarly to the conventional inner bag composite container, also in the 60 liter inner bag composite container 100 in the present embodiment, the chemical liquid as the contained material is discharged by pressurization by injecting an inert gas into the container 100. Can do. The depression 123b is for preventing or suppressing the bulging deformation of the top plate 123 during the pressurization, and also causes the deformation portion 129 to be generated in the ground plate 122 as described below.

一方、図1に示すように、地板122には、窪み123bのような変形防止用の工夫は施しておらず平板のままである。また、地板122及び天板123は、同じ材料で同じ板厚の鋼板を使用する。よって、上記加圧時には、上記窪み123bによる天板123の変形困難さにより、上記窪み123bを設けない場合に比べて、地板122全体、特に地板122の中央部は、容器外側へより膨らむことができる。このように膨らんだ部分を、説明上、変形部分129(図9)とする。この結果、薬液排出終了間際には、地板122における変形部分129に残液を集めることができる。よって、効率的な薬液排出が可能となり、かつ残液量の低減を図ることも可能となる。この観点から、窪み123bは、地板122に変形部分129を形成させるためのもの、さらには残液量低減を図るためのものとも言える。   On the other hand, as shown in FIG. 1, the ground plate 122 is not flattened like a recess 123b and remains flat. Moreover, the ground plate 122 and the top plate 123 use steel plates having the same thickness and the same material. Therefore, at the time of pressurization, due to the difficulty of deformation of the top plate 123 by the recess 123b, the entire base plate 122, particularly the central portion of the base plate 122, may swell further to the outside of the container than when the recess 123b is not provided. it can. Such a bulging portion is referred to as a deformed portion 129 (FIG. 9) for explanation. As a result, the remaining liquid can be collected in the deformed portion 129 of the main plate 122 just before the end of the discharge of the chemical liquid. Therefore, it is possible to efficiently discharge the chemical liquid and to reduce the amount of residual liquid. From this point of view, it can be said that the recess 123b is for forming the deformed portion 129 on the ground plate 122, and further for reducing the remaining liquid amount.

尚、本実施形態では上述のように窪み123bを設けることで、天板123の変形防止及び地板122の変形促進を図ったが、これらの目的達成のためには窪み123bに限定されることはなく、例えば天板123にリブを設ける等の手段を施してもよい。   In this embodiment, by providing the recess 123b as described above, the top plate 123 is prevented from being deformed and the base plate 122 is promoted to be deformed. However, in order to achieve these purposes, it is not limited to the recess 123b. For example, a means such as providing a rib on the top plate 123 may be applied.

また、図1及び図3に明確に示されるように、当該60リットル内袋複合容器100の上端101に対して、天板123は1段低く位置し、さらに窪み123bにより、ハンガー113の取り付け位置はさらに1段低くなっている。よって、窪み123bを設けることで、図1に明示されるように、液出入口部112のキャップ用ネジ1122にキャップ115をねじ込んだ状態では、キャップ115の上面を、60リットル内袋複合容器100の上端101以下に位置させることができる。これにより、例えば当該60リットル内袋複合容器100を積み重ねるような場合においても、キャップ115の損傷等を防止できるという効果がある。   Further, as clearly shown in FIGS. 1 and 3, the top plate 123 is positioned one step lower than the upper end 101 of the 60 liter inner bag composite container 100, and the mounting position of the hanger 113 is further provided by the recess 123b. Is one step lower. Therefore, by providing the recess 123b, as clearly shown in FIG. 1, in the state where the cap 115 is screwed into the cap screw 1122 of the liquid inlet / outlet portion 112, the upper surface of the cap 115 is placed on the 60 liter inner bag composite container 100. It can be located below the upper end 101. Thereby, for example, even when the 60-liter inner bag composite container 100 is stacked, there is an effect that damage to the cap 115 can be prevented.

また、天板123の外面には、図2及び図3に示すように、容器取り扱い用の取っ手124が少なくとも2つ取り付けられている。図2では、取っ手124を2箇所に設けた場合、図3では3箇所に設けた場合を図示している。   Further, as shown in FIGS. 2 and 3, at least two handles 124 for handling containers are attached to the outer surface of the top plate 123. FIG. 2 illustrates the case where the handles 124 are provided at two locations, and FIG. 3 illustrates the case where the handles 124 are provided at three locations.

また、図1に示すように、胴体121の表面にも、天板側と地板側との2箇所に、胴体121の剛性を高め胴体121の変形を防止、抑制するための輪帯121aを、胴体121の周方向に沿って形成している。   In addition, as shown in FIG. 1, on the surface of the fuselage 121, two zones on the top plate side and the base plate side are provided with an annular zone 121 a for increasing the rigidity of the fuselage 121 and preventing and suppressing the deformation of the fuselage 121. It is formed along the circumferential direction of the body 121.

このようにして、鋼製の外装容器120内に樹脂製の内装容器110を収納した60リットル内袋複合容器100が作製される。
このような60リットル内袋複合容器100に対して、天板123から突出した上記液出入口部112を介して内装容器110内へ上記薬液が注入される。注入後、液出入口部112の口部112bに内栓114が施され、さらにキャップ115がキャップ用ネジ1122に螺合され、薬液の密閉が図られる。
In this way, the 60-liter inner bag composite container 100 in which the resin-made inner container 110 is housed in the steel outer container 120 is produced.
With respect to such a 60-liter inner bag composite container 100, the chemical solution is injected into the interior container 110 through the liquid inlet / outlet portion 112 protruding from the top plate 123. After the injection, an inner plug 114 is applied to the mouth portion 112b of the liquid inlet / outlet portion 112, and the cap 115 is screwed into the cap screw 1122, thereby sealing the chemical solution.

このように構成された60リットル内袋複合容器100を使用することで、従来の20リットルに対する収容量の増加により、薬液排出作業頻度は減り、煩雑作業の低減を図ることができる。   By using the 60-liter inner bag composite container 100 configured in this manner, the chemical solution discharge frequency is reduced due to the increase in the storage capacity with respect to the conventional 20 liters, and the complicated work can be reduced.

60リットル内袋複合容器100に収容された上記薬液の排出は、重量及び作業性の観点から、通常、容器内を加圧することにより行われるが、薬液残量が極少量になった場合等、上記液出入口部112を下へ容器100を反転させて行うことも考えられる。しかしながら、こうした場合であっても、液出入口部112の近傍の内装容器110の肩部には、図5に示すように、薬液108が残留し易い。   From the viewpoint of weight and workability, the discharge of the chemical solution stored in the 60-liter inner bag composite container 100 is usually performed by pressurizing the inside of the container, but when the remaining amount of the chemical solution becomes extremely small, etc. It is also conceivable that the container 100 is inverted with the liquid inlet / outlet port 112 down. However, even in such a case, as shown in FIG. 5, the chemical solution 108 tends to remain on the shoulder portion of the interior container 110 in the vicinity of the liquid inlet / outlet portion 112.

このような薬液残留を極力する無くすために、内装容器は、以下の構成を採ってもよい。即ち、図6に示す内装容器110−1のように、液出入口部112の近傍の内装容器110−1の肩部には、内装容器110−1の外側から内側へ凹んだ凹部130を設けた。尚、図6において、(A)は内装容器110−1の平面図、(B)は(A)における矢印B方向から見た側面図、(C)は(A)における矢印C方向から見た側面図である。また、内装容器110−1の天面111aに形成される斜面に131、132を付番する。   In order to eliminate such residual chemical as much as possible, the interior container may have the following configuration. That is, like the interior container 110-1 shown in FIG. 6, a recess 130 that is recessed from the outside to the inside of the interior container 110-1 is provided on the shoulder of the interior container 110-1 in the vicinity of the liquid inlet / outlet portion 112. . In FIG. 6, (A) is a plan view of the interior container 110-1, (B) is a side view seen from the direction of arrow B in (A), and (C) is seen from the direction of arrow C in (A). It is a side view. Moreover, 131 and 132 are numbered to the slope formed in the top | upper surface 111a of the interior container 110-1.

凹部130は、天面111aの肩部分であって、かつ天面111aの中心と液出入口部112の中心とを通る線分の両側に設けられている。このような凹部130は、内装容器110−1を成型するときのブロー成型によって容易に形成可能である。   The recesses 130 are shoulder portions of the top surface 111 a and are provided on both sides of a line segment passing through the center of the top surface 111 a and the center of the liquid inlet / outlet portion 112. Such a recess 130 can be easily formed by blow molding when molding the interior container 110-1.

このような凹部130を設けることで、容器を傾けて薬液を排出する場合、薬液が滞留していた部分に凹部130が形成されているので、薬液は滞留せず、液出入口部112から排出され、残液量を削減することが可能となる。   By providing such a recess 130, when the chemical liquid is discharged by tilting the container, the chemical liquid does not stay and is discharged from the liquid inlet / outlet portion 112 because the concave portion 130 is formed in the portion where the chemical liquid stayed. It is possible to reduce the amount of residual liquid.

天面111aと凹部130とを接続する斜面132の角度は、約45度である。60リットル内袋複合容器100の落下時、あるいは容器内の液圧により、天面111aと凹部130との接続部は、強度的に弱くなるが、この部分を斜面132にすることにより、衝撃を緩和することができる。斜面132の上端と下端のそれぞれを円弧状に形成するのが好ましい。該円弧状の形成により、天面111aと凹部130の接続部の強度が高まり、内装容器110の損傷を防止、低減することができる。   The angle of the slope 132 connecting the top surface 111a and the recess 130 is about 45 degrees. When the 60-liter inner bag composite container 100 is dropped or due to the liquid pressure in the container, the connecting portion between the top surface 111a and the recess 130 is weak in strength. Can be relaxed. Each of the upper end and the lower end of the slope 132 is preferably formed in an arc shape. Due to the formation of the arc shape, the strength of the connecting portion between the top surface 111a and the recess 130 is increased, and damage to the interior container 110 can be prevented or reduced.

平面形状において、凹部130の角部130a、130b、130cも円弧状に形成するのが好ましい。このように構成することにより、天面111aと凹部130との接続部の強度が一層高まる。   In the planar shape, the corners 130a, 130b, and 130c of the recess 130 are preferably formed in an arc shape. By comprising in this way, the intensity | strength of the connection part of the top | upper surface 111a and the recessed part 130 increases further.

図示しないが、外装容器120と内装容器110−1における凹部130との隙間部分には、スペーサが設けられるのが好ましい。スペーサとして、例えばポリスチレン発泡体が使用可能である。凹部130を設けると内装容器110−1の強度低下が懸念されるが、上記隙間部分にスペーサを介在させることにより、補強される。   Although not shown, it is preferable that a spacer is provided in a gap portion between the exterior container 120 and the recess 130 in the interior container 110-1. For example, a polystyrene foam can be used as the spacer. If the concave portion 130 is provided, there is a concern that the strength of the interior container 110-1 may be lowered, but the inner container 110-1 is reinforced by interposing a spacer in the gap portion.

また、凹部130の変形例として、図7に示す凹部135を構成することもできる。尚、図7の(A)は、内装容器110−2の平面図、(B)は側面図である。凹部135は、液出入口部112の近傍の内装容器110−2の肩部(点線部分)を面取りし、斜面状に形成してなる。凹部135によっても、残液量を削減させることができる。また斜面に限らず、肩部分における円弧部を従来よりも大きくすることによっても、相当の効果を奏する。   Further, as a modification of the recess 130, a recess 135 shown in FIG. 7 can be configured. 7A is a plan view of the interior container 110-2, and FIG. 7B is a side view. The concave portion 135 is formed by chamfering the shoulder portion (dotted line portion) of the interior container 110-2 in the vicinity of the liquid inlet / outlet portion 112 to form a slope. The remaining liquid amount can also be reduced by the recess 135. Further, not only on the slope, but also by making the arc portion in the shoulder portion larger than the conventional one, there is a considerable effect.

さらにまた、凹部130の変形例として図8に示す構成を採ることもできる。尚、図8の(A)は、内装容器110−3の平面図、(B)は側面図である。内装容器110−3では、液出入口部112を内装容器110−3の側壁側に近づけ、天面111aの中心と液出入口部112の中心とを通る線分の延長線上の肩部分を、従来の肩部分(点線)の円弧Rより大きくし、当該60リットル内袋複合容器100を傾けて薬液を排出するときに、薬液が肩部分に滞留しないように構成する。このような構成においても残液量を削減することができる。なお、円弧Rを大きくする代わりに、この部分を斜面にしてもよい。尚、この例の場合、液出入口部112が内装容器110−3の側壁側に近づけられているので、外装容器120の形状はそれに応じて変える必要がある。   Furthermore, a configuration shown in FIG. 8 can be adopted as a modification of the recess 130. 8A is a plan view of the interior container 110-3, and FIG. 8B is a side view. In the interior container 110-3, the liquid inlet / outlet portion 112 is brought close to the side wall side of the inner container 110-3, and the shoulder portion on the extension line of the line passing through the center of the top surface 111a and the center of the liquid inlet / outlet portion 112 is replaced with a conventional one. It is configured to be larger than the arc R of the shoulder portion (dotted line) so that the chemical solution does not stay in the shoulder portion when the 60-liter inner bag composite container 100 is tilted to discharge the chemical solution. Even in such a configuration, the amount of residual liquid can be reduced. Instead of increasing the arc R, this portion may be a slope. In the case of this example, since the liquid inlet / outlet part 112 is brought closer to the side wall side of the inner container 110-3, the shape of the outer container 120 needs to be changed accordingly.

次に、上述のように構成される60リットル内袋複合容器100の液出入口部112に装着可能であり、内装容器110内に収容されている薬液を容器外へ排出する薬液排出チューブについて、図9を参照して以下に説明する。   Next, the chemical solution discharge tube that can be attached to the liquid inlet / outlet portion 112 of the 60-liter inner bag composite container 100 configured as described above and discharges the chemical solution stored in the interior container 110 to the outside of the container is illustrated in FIG. This will be described below with reference to FIG.

薬液排出チューブ150は、可撓性で耐薬液性の樹脂製であり、例えばテフロン(登録商標)から成形され、例えば直径8mm程度で、液出入口部112からの容器内での長さについて、地板122に接する内装容器110の底部111bに、先端に位置する吸液口151が接し、さらに吸液口151が当該60リットル内袋複合容器100における地板122の中央部にまで位置する程度の長さを有する。また、吸液口151は、本実施形態では図示するように、薬液排出チューブ150の軸方向に対して、薬液排出チューブ150の直径方向の全てにわたり斜めに交差した断面にてなる。尚、吸液口151は、薬液排出チューブ150の上記直径方向の一部分のみが、あるいは複数の箇所が斜めにカットされた断面にて形成してもよい。   The chemical solution discharge tube 150 is made of a flexible and chemical-resistant resin, and is formed from, for example, Teflon (registered trademark), and has a diameter of about 8 mm, for example, and the length of the inside of the container from the liquid inlet / outlet portion 112 with respect to the main plate. The bottom 111b of the interior container 110 in contact with 122 is in contact with the liquid suction port 151 located at the tip, and the liquid suction port 151 is positioned to the center of the base plate 122 in the 60-liter inner bag composite container 100. Have Further, as illustrated in the present embodiment, the liquid suction port 151 has a cross section that obliquely intersects the entire axial direction of the chemical liquid discharge tube 150 with respect to the axial direction of the chemical liquid discharge tube 150. Note that the liquid suction port 151 may be formed with only a part of the chemical liquid discharge tube 150 in the diametrical direction or a cross section in which a plurality of portions are cut obliquely.

さらに薬液排出チューブ150は、吸液口151近傍の先端部分152に、薬液排出用の容器内加圧に伴い容器外側へ地板122が膨れた、地板122の変形部分129へ、重力作用により吸液口151を配向させる錘153を有する。錘153は、容器内に収容される薬液と化学的に反応しない金属材料製であり、例えば方形状あるいは円形状の板材でその中央部に薬液排出チューブ150を嵌合可能な貫通穴が形成された部材、又は円筒状の部材にて形成されており、薬液排出チューブ150の弾力にて上記先端部分152に保持される。また、錘153の形状及び取付位置は、錘153を取り付けることで、錘153の厚み分、吸液口151が内装容器110の底部111bから離れる結果にならないように、適宜選択される。一例として本実施形態では、錘153は、円筒形状であり、内径部分に薬液排出チューブ150を挿通して、吸液口151の近傍に取り付けている。また、錘153の重さは、好ましくは55〜65g程度であり、本実施形態では60gである。   Further, the chemical liquid discharge tube 150 absorbs liquid by gravity action to the deformed portion 129 of the base plate 122 in which the base plate 122 swells to the outside of the container due to the pressurization in the container for discharging the chemical solution at the tip portion 152 near the liquid suction port 151. A weight 153 for orienting the mouth 151 is provided. The weight 153 is made of a metal material that does not chemically react with the chemical solution contained in the container. For example, a square or circular plate material is formed with a through hole into which the chemical solution discharge tube 150 can be fitted. And is held by the distal end portion 152 by the elasticity of the chemical solution discharge tube 150. Further, the shape and mounting position of the weight 153 are appropriately selected so that the weight 153 does not result in the liquid suction port 151 being separated from the bottom 111b of the interior container 110 by the thickness of the weight 153. As an example, in the present embodiment, the weight 153 has a cylindrical shape, and is attached to the vicinity of the liquid suction port 151 by inserting the chemical liquid discharge tube 150 into the inner diameter portion. Further, the weight of the weight 153 is preferably about 55 to 65 g, and is 60 g in the present embodiment.

上記先端部分152とは反対側の薬液排出チューブ150の他端は、例えば図9に示すようなディスペンサー機構200に接続される。ディスペンサー機構200は、内装容器110内に収容されている薬液を容器外へ排出する機構であり、図9では、60リットル内袋複合容器100内に窒素ガス等の不活性ガスを注入して加圧することで薬液を押し出す加圧方式の構成を示している。薬液をポンプ等の吸引装置で吸い上げるポンプアップ方式を採ることもできる。   The other end of the chemical solution discharge tube 150 opposite to the tip portion 152 is connected to a dispenser mechanism 200 as shown in FIG. 9, for example. The dispenser mechanism 200 is a mechanism for discharging the chemical solution stored in the interior container 110 to the outside of the container. In FIG. 9, an inert gas such as nitrogen gas is injected into the 60-liter inner bag composite container 100 and added. The structure of the pressurization system which extrudes a chemical | medical solution by pressing is shown. It is also possible to adopt a pump-up method in which the chemical solution is sucked up by a suction device such as a pump.

加圧方式のディスペンサー機構200は、大きく分けて、円筒状のプラグ本体201と、加圧した不活性ガスを内装容器110内へ供給するガス供給装置202と、上述の薬液排出チューブ150とを有する。   The pressurization-type dispenser mechanism 200 is roughly divided into a cylindrical plug body 201, a gas supply device 202 that supplies pressurized inert gas into the interior container 110, and the above-described chemical solution discharge tube 150. .

プラグ本体201は、上述したキャップ115を外した後、液出入口部112に取り付けられる、例えば樹脂製のプラグであり、カップリングリング201rと、プラグシェル201sと、シールリング2012とで構成される。カップリングリング201rは、円筒形状の部材であり、一端が円形に開口しており、この開口の内周面には、液出入口部112に形成されたキャップ用ネジ1122に係合する雌めじ2011を形成している。よって、プラグ本体201のカップリングリング201rは、液出入口部112のキャップ用ネジ1122に螺合でき、また、カップリングリング201rの外周には、筋目ローレットが形成されており、プラグ本体201を液出入口部112に確実にねじ結合できる。   The plug body 201 is, for example, a resin plug that is attached to the liquid inlet / outlet portion 112 after the cap 115 is removed, and includes a coupling ring 201r, a plug shell 201s, and a seal ring 2012. The coupling ring 201r is a cylindrical member having one end opened in a circular shape, and a female thread 2011 that engages with a cap screw 1122 formed in the liquid inlet / outlet portion 112 on the inner peripheral surface of the opening. Is forming. Therefore, the coupling ring 201r of the plug main body 201 can be screwed into the cap screw 1122 of the liquid inlet / outlet portion 112, and a streak knurl is formed on the outer periphery of the coupling ring 201r. It can be securely screwed to the entrance / exit part 112.

また、カップリングリング201rの他端も円形に開口しており、この開口には、カップリングリング201rに対して回転可能にプラグシェル201sが嵌め込まれる。即ち、プラグシェル201sは、フランジを形成した円板状の部材であり、カップリングリング201rの一端側の開口から挿入され上記フランジがカップリングリング201rに当接して、カップリングリング201rの上記他端の開口に嵌め込まれる。また、カップリングリング201rにシールリング2012を装着して、上述のようにカップリングリング201rを液出入口部112のキャップ用ネジ1122に螺合することで、シールリング2012は、液出入口部112の口部112bを密封し、かつ、プラグシェル201sの上記フランジは、シールリング2012とカップリングリング201rとの間に挟まれる。これにより、シールリング2012は、カップリングリング201rとプラグシェル201sとの境界の通気をも封止する。   The other end of the coupling ring 201r is also opened in a circular shape, and the plug shell 201s is fitted into this opening so as to be rotatable with respect to the coupling ring 201r. That is, the plug shell 201s is a disk-shaped member having a flange, and is inserted from an opening on one end side of the coupling ring 201r. The flange abuts on the coupling ring 201r, and the other of the coupling ring 201r. It is inserted into the opening at the end. Further, by attaching the seal ring 2012 to the coupling ring 201r and screwing the coupling ring 201r into the cap screw 1122 of the liquid inlet / outlet portion 112 as described above, the seal ring 2012 is connected to the liquid inlet / outlet portion 112. The opening 112b is sealed, and the flange of the plug shell 201s is sandwiched between the seal ring 2012 and the coupling ring 201r. Thereby, the seal ring 2012 also seals ventilation at the boundary between the coupling ring 201r and the plug shell 201s.

上記プラグシェル201sには、薬液排出チューブ150の他端を着脱自在に固定する合成樹脂製の第1ジョイント203と、ガス供給装置202を接続するための第2ジョイント204とがねじ込まれる。   The plug shell 201 s is screwed with a first joint 203 made of synthetic resin for detachably fixing the other end of the chemical solution discharge tube 150 and a second joint 204 for connecting the gas supply device 202.

第1ジョイント203は、市販のストレートタイプのホルダを利用でき、プラグ本体201に対して薬液排出チューブ150をその軸方向に沿ってスライド可能に保持し、かつナットを締め込むことで固定することができる。よって、第1ジョイント203を用いて、薬液排出チューブ150の吸液口151が、上述のように、地板122の中央部にまで位置するように長さ及び位置調整が可能である。   As the first joint 203, a commercially available straight type holder can be used, and the chemical solution discharge tube 150 can be slidably held along the axial direction of the plug main body 201 and can be fixed by tightening a nut. . Therefore, the first joint 203 can be used to adjust the length and position so that the liquid suction port 151 of the chemical liquid discharge tube 150 is located up to the center of the main plate 122 as described above.

第2ジョイント204は、プラグ本体201のカップリングリング201rにおける開口2013に接続するL字形(エルボ形)の合成樹脂製のジョイントであり、市販のエルボ形クイック継手を使用可能である。   The second joint 204 is an L-shaped (elbow-shaped) synthetic resin joint that is connected to the opening 2013 in the coupling ring 201r of the plug body 201, and a commercially available elbow-shaped quick joint can be used.

ガス供給装置202に接続したホースを第2ジョイント204に接続することで、ガス供給装置202は、内装容器110の内部へ、加圧した不活性ガスを供給することができる。   By connecting the hose connected to the gas supply device 202 to the second joint 204, the gas supply device 202 can supply pressurized inert gas into the interior of the interior container 110.

以上のように構成されるディスペンサー機構200を使用することで、ガス供給装置202によって内装容器110の内部が例えば約100Kpaから約150Kpa程度までの範囲に加圧され、内装容器110に収容されている薬液を、薬液排出チューブ150を通して容器外部へ押し出し、排出することが可能となる。   By using the dispenser mechanism 200 configured as described above, the interior of the interior container 110 is pressurized to a range of, for example, about 100 Kpa to about 150 Kpa by the gas supply device 202 and accommodated in the interior container 110. The chemical liquid can be pushed out of the container through the chemical liquid discharge tube 150 and discharged.

さらにまた、ディスペンサー機構200を使用して薬液を容器外部へ排出するとき、60リットル内袋複合容器100を載置し傾斜させる、以下に説明するような傾斜台を用いることもできる。
即ち、図10に示す傾斜台250は、本体251と、一対の転倒防止ポール252とを備える。本体251は、ステンレス板などの金属板から形成され、水平面となる床面に対して10から15度程度に傾斜した斜面251aを形成している。斜面251aには、60リットル内袋複合容器100の液出入口部112を斜面251aの低い方に配向するようにして、60リットル内袋複合容器100が載置される。ここで、傾斜角度が15度を超えると、液こぼれが発生する可能性が高くなり、好ましくない。
また、一対の転倒防止ポール252は、ステンレスなどの金属製丸棒からなり、斜面251aの低い方に立設している。
Furthermore, when discharging a chemical | medical solution to the exterior of a container using the dispenser mechanism 200, the inclined base as demonstrated below which mounts and inclines the 60 liter inner bag composite container 100 can also be used.
That is, the tilting table 250 shown in FIG. 10 includes a main body 251 and a pair of fall prevention poles 252. The main body 251 is formed of a metal plate such as a stainless steel plate, and forms an inclined surface 251a inclined at about 10 to 15 degrees with respect to a floor surface that is a horizontal surface. The 60-liter inner bag composite container 100 is placed on the slope 251a such that the liquid inlet / outlet portion 112 of the 60-liter inner bag composite container 100 is oriented to the lower side of the slope 251a. Here, if the inclination angle exceeds 15 degrees, the possibility of liquid spillage increases, which is not preferable.
The pair of fall prevention poles 252 are made of a metal round bar such as stainless steel and are erected on the lower side of the slope 251a.

上述のような傾斜台250を用いて、液出入口部112を低い方に配向して60リットル内袋複合容器100を傾斜させることで、薬液排出時に内装容器110内の薬液を液出入口部112側に集めることができ、上述の、錘153を設けた薬液排出チューブ150との相互作用により、残液量の低減を図ることができる。   By using the tilting table 250 as described above, the liquid inlet / outlet part 112 is oriented to the lower side to incline the 60-liter inner bag composite container 100, so that the chemical liquid in the interior container 110 is discharged to the liquid inlet / outlet part 112 side when the chemical liquid is discharged. The amount of the remaining liquid can be reduced by the interaction with the chemical liquid discharge tube 150 provided with the weight 153 as described above.

本発明は、鋼製の外側容器内に樹脂製の内側容器を設けた、容量60リットルの内袋複合容器、及び該60リットル内袋複合容器用の薬液排出チューブに適用可能である。   The present invention is applicable to an inner bag composite container having a capacity of 60 liters in which an inner container made of resin is provided in an outer container made of steel, and a chemical solution discharge tube for the 60 liter inner bag composite container.

100…60リットル内袋複合容器、
110…内装容器、111a…天面、112…液出入口部、112b…口部、
113…ハンガー、115…キャップ、
120…外装容器、120a…収納部、121…胴体、122…地板、
123…天板、123a…口部用開口、123b…窪み、
150…薬液排出チューブ、151…吸液口、153…錘、
1121…保持用ネジ、1122…キャップ用ネジ。
100 ... 60 liter inner bag composite container,
110 ... Interior container, 111a ... Top surface, 112 ... Liquid inlet / outlet part, 112b ... Mouth part,
113 ... hangers, 115 ... caps,
120 ... Exterior container, 120a ... Storage part, 121 ... Body, 122 ... Base plate,
123: Top plate, 123a: Opening for mouth, 123b: Recess,
150 ... Chemical solution discharge tube, 151 ... Liquid suction port, 153 ... Weight,
1121... Holding screw, 1122... Cap screw.

Claims (5)

樹脂製であり、取り扱いに高清浄度が要求される薬液を収容し、その収容量が60リットルであり、天面(111a)に液出入口部(112)を設けた内装容器(110)と、
鋼製であり、筒状の胴体(121)に地板(122)が巻き締められて成形された収納部(120a)の内面に沿って上記内装容器を収納し、さらに上記液出入口部が突出可能な口部用開口(123a)を形成した天板(123)を上記胴体に巻き締めて成形される外装容器(120)と、
を備えたことを特徴とする60リットル内袋複合容器。
An interior container (110) made of resin, containing a chemical solution that requires high cleanliness for handling, the capacity is 60 liters, and a liquid inlet / outlet portion (112) is provided on the top surface (111a);
It is made of steel and accommodates the interior container along the inner surface of a storage part (120a) formed by winding a base plate (122) around a cylindrical body (121), and further allows the liquid inlet / outlet part to protrude. An outer container (120) formed by winding a top plate (123) on which a mouth opening (123a) is formed around the body;
A 60-liter inner bag composite container.
上記内装容器の上記液出入口部は、該液出入口部の外周面に、当該液出入口部の軸方向(112a)に沿って保持用ネジ(1121)とキャップ用ネジ(1122)とを同心円状に2段にて有し、上記保持用ネジは、上記天面に近接して成形され、上記外装容器の上記口部用開口を通過する直径を有し、当該液出入口部を上記天板に保持するハンガー(113)を螺合するためのネジであり、上記キャップ用ネジは、上記天面より離れて成形され、上記保持用ネジよりも小径であり、上記液出入口部の口部(112b)を閉止するキャップ(115)を螺合するためのネジである、請求項1記載の60リットル内袋複合容器。   The liquid inlet / outlet portion of the inner container is formed by concentrically holding a holding screw (1121) and a cap screw (1122) along the axial direction (112a) of the liquid inlet / outlet portion on the outer peripheral surface of the liquid inlet / outlet portion. The holding screw is formed in the vicinity of the top surface, has a diameter that passes through the opening for the mouth portion of the outer container, and holds the liquid inlet / outlet portion on the top plate. A screw for screwing on the hanger (113), the cap screw being formed away from the top surface and having a smaller diameter than the holding screw, and the mouth portion (112b) of the liquid inlet / outlet portion The 60-liter inner bag composite container according to claim 1, which is a screw for screwing a cap (115) for closing the cap. 上記天板は、上記口部用開口の周囲において、上記口部用開口から当該天板の中央を超えた領域(123c)まで窪み(123b)を形成した、請求項1又は2記載の60リットル内袋複合容器。   The 60 liter according to claim 1 or 2, wherein the top plate has a recess (123b) formed around the mouth opening from the mouth opening to a region (123c) beyond the center of the top plate. Inner bag composite container. 上記外装容器は、塗装を省略可能な電気亜鉛メッキ鋼板にて成形され、上記薬液は、半導体分野及び液晶分野の少なくとも一方にて使用される薬液であり、上記内装容器は、薬液用仕様による高密度ポリエチレン樹脂製であり高品質管理下にてブロー成形される、請求項1から3のいずれかに記載の60リットル内袋複合容器。   The outer container is formed of an electrogalvanized steel sheet that can be omitted from painting, and the chemical solution is a chemical solution used in at least one of the semiconductor field and the liquid crystal field. The 60-liter inner bag composite container according to any one of claims 1 to 3, which is made of a density polyethylene resin and blow-molded under high quality control. 請求項1から4のいずれかに記載の60リットル内袋複合容器に備わる内装容器(110)における液出入口部(112)に装着可能であり、上記内装容器に収容した薬液(108)を容器外部へ排出する、上記60リットル内袋複合容器用の薬液排出チューブ(150)であって、
可撓性で耐薬液性の樹脂製であり、吸液口(151)近傍の先端部分(152)に、薬液排出用の容器内加圧に伴い上記60リットル内袋複合容器の地板(122)に生じる変形部分(129)へ上記吸液口を配向させる錘(153)を有することを特徴とする薬液排出チューブ。
5. The chemical liquid (108) that can be attached to the liquid inlet / outlet part (112) of the internal container (110) provided in the 60-liter inner bag composite container according to claim 1, A chemical solution discharge tube (150) for the 60 liter inner bag composite container,
It is made of a flexible and chemical-resistant resin, and the base plate (122) of the 60-liter inner bag composite container is attached to the tip (152) in the vicinity of the liquid suction port (151) along with the pressurization in the container for discharging the chemical liquid. A drug solution discharge tube having a weight (153) for orienting the liquid suction port to the deformed portion (129) generated in the step.
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