JP2011179993A - Inspection apparatus and inspection method - Google Patents

Abstract

An inspection apparatus capable of carrying out an inspection using two types of illumination, that is, direct illumination and transmission illumination, without requiring two types of illumination light sources, direct illumination and transmission illumination, as light sources for illumination. And an inspection method.
An inspection apparatus performs inspection including inspection of at least a contour shape of an inspection object, the object holding means for holding the inspection object, and the state held by the object holding means The imaging means disposed at a position facing the inspection object and the inspection object held by the object holding means are arranged so that illumination light can be irradiated from the first direction on the same side as the imaging means. The inspection object in the state held by the object holding means is disposed on the side opposite to the first direction with respect to the inspection object held by the illumination means provided and the object holding means Reflecting means for reflecting in the direction of the inspection object the illumination light that has passed through a position off the object or a portion of the inspection object that can transmit the illumination light.
[Selection] Figure 3

Description

  The present invention relates to an inspection apparatus and an inspection method for inspecting at least a planar shape of an inspection object.

  Conventionally, as a method for inspecting an inspection target having a fine and complicated plane shape such as a circuit pattern of a circuit board, the inspection target plane shape is verified or attached by acquiring an image of the inspection target and analyzing the image. An inspection method for detecting the presence or absence of a kimono (foreign matter) has been implemented. The outer shape of the inspection object and the planar shape of the part where light passes through, such as the through-hole, are part of the illumination light irradiated from one side of the inspection object and are not blocked by the inspection object. Can be suitably inspected by an image obtained by photographing the transmitted light that has passed through. The surface state of the inspection object and the foreign matter on the surface can be suitably inspected by an image obtained by photographing the reflected light reflected by the illumination light on the surface of the inspection target or the foreign matter on the surface.

  Patent Document 1 uses two types of illumination, direct illumination and transmitted illumination. The reflected light in which direct illumination light is reflected by the tape member to be inspected and the illumination light in transmitted illumination is transmitted through the tape member. An inspection device for a tape member that can photograph transmitted light and inspect the outer shape including the shape of a through hole, the shape of an observation surface, and the presence or absence of foreign matter is disclosed. According to Patent Document 1, the inspection time can be shortened by providing two types of illumination and using them simultaneously.

JP 2004-212159 A

  However, the apparatus disclosed in Patent Document 1 requires two types of direct illumination and transmitted illumination as the illumination light source, and there is a problem that the inspection apparatus becomes large. Also, if the color of the transmitted illumination is similar to the color of the inspection object, it becomes difficult to separate the transmitted light from the reflected light from the inspection object, and a good inspection cannot be performed. There is a problem that it is necessary to change the color of the illumination, and it is necessary to replace the light source of the illumination in accordance with the inspection object.

  SUMMARY An advantage of some aspects of the invention is to solve at least a part of the problems described above, and the invention can be implemented as the following forms or application examples.

  [Application Example 1] An inspection apparatus according to this application example is an inspection apparatus that performs an inspection including an inspection of at least a contour shape of an inspection object, the object holding means for holding the inspection object, and the object An imaging unit disposed at a position facing the inspection object held by the object holding unit, and the inspection object held by the object holding unit on the same side as the imaging unit. With respect to the illuminating means arranged to be able to irradiate illumination light from the first direction and the inspection object held by the object holding means, the illuminating means is arranged on the opposite side to the first direction. The illumination light transmitted through a position where the inspection object in a state of being held by the object holding means is removed or a portion formed on the inspection object through which the illumination light can pass is transmitted. Reflecting means for reflecting in the direction of the object And wherein the door.

According to the inspection apparatus according to this application example, the inspection object is irradiated with the illumination light by the illumination unit arranged to be able to irradiate the illumination light from the first direction on the same side as the imaging unit with respect to the inspection object. Thus, an image of the surface illuminated by the illumination light in the inspection object can be taken using the imaging means.
Illumination light that has passed through the part that is out of the inspection object or the part that can transmit the illumination light formed on the inspection object by the reflecting means arranged on the opposite side to the first direction with respect to the inspection object. Is reflected in the direction of the object to be inspected, so that the reflected light is transmitted again through the part from which the reflected light deviates from the object to be inspected or the part through which the illumination light formed on the object to be inspected can be transmitted ("transmitted reflected light" Can be formed). By photographing the transmitted / reflected light using an imaging means, it is possible to photograph the contour shape of the portion that does not transmit the light of the inspection object.
By providing illumination means on the same side as the imaging means and providing reflection means on the opposite side of the imaging means and illumination means, shooting with reflected light and shooting with transmitted light are performed simultaneously using a single illumination means Thus, the inspection object can be inspected using the captured image.
In general, the outer shape of the inspection object and the planar shape of a portion through which light passes, such as a through-hole, are partially blocked by the inspection object and are blocked by the inspection object. Thus, it is possible to suitably inspect an image obtained by photographing transmitted light that has passed through the surroundings without being transmitted. The surface state of the inspection object and the foreign matter on the surface can be suitably inspected by an image obtained by photographing the reflected light reflected by the illumination light on the surface of the inspection target or the foreign matter on the surface.

  Application Example 2 In the inspection apparatus according to the application example, it is preferable that the illumination light is white light, and the reflection unit reflects light having a part of the wavelength in the illumination light.

  According to this inspection apparatus, since the illumination light is white light, the reflected light that is reflected from the inspection object becomes the color of the inspection object. For this reason, the image of the color of the inspection object illuminated by the illumination light can be photographed by photographing with the reflected light. Since the reflecting means reflects light of a part of the wavelength in the illumination light, the reflected light by the reflecting means can be changed to light of a color determined by the wavelength reflected by the reflecting means. Thereby, the color determined by the wavelength reflected by the reflecting means, the reflected light reflected by the reflecting means is transmitted again through the part where the reflected light is off the inspection object or the part where the illumination light formed on the inspection object can be transmitted. Can be light.

  Application Example 3 In the inspection apparatus according to the application example, it is preferable that the reflection unit reflects light having a wavelength at which the color of the light reflected by the reflection unit is different from the color of the inspection object. .

  According to this inspection apparatus, the color of the reflected light from the reflecting means is different from the color of the inspection object. As a result, the color of the image obtained by capturing the transmitted light that has passed through the portion where the reflected light deviates from the inspection object or the portion of the inspection object that can transmit the illumination light is different from the color of the inspection object. Can be. The shadow portion in the image of the transmitted light is a portion where the inspection object exists and a portion that reflects the illumination light. The part is illuminated with illumination light, and the color of the reflected light from which the white illumination light is reflected is the color of the inspection object, and an image of the color of the inspection object is formed. By making the color of the reflected light by the reflecting means different from the color of the object to be inspected, the color of the transmitted light and the image of the shadow portion in the image of the transmitted light are made different from each other. The boundary with the shadow image can be easily understood.

  Application Example 4 In the inspection apparatus according to the application example described above, the distance between the reflection unit and the inspection object held by the object holding unit is set in the optical axis direction of the imaging unit. It is preferably longer than the depth of field.

  According to this inspection apparatus, the distance between the inspection object and the reflection means is longer than the depth of field of the imaging means. For this reason, in the image image | photographed with the imaging means which adjusted the focal distance to the test object in order to image | photograph the test object, the image of the surface of a reflection means becomes an image which does not focus. Even if an object such as dust is present on the surface of the reflecting means, the image of dust is not a clear image in an image obtained by photographing the inspection object. Thereby, it can suppress that the image for a test | inspection of a test | inspection object resulting from the deposit | attachment etc. on the surface of a reflection means is impaired.

  Application Example 5 In the inspection apparatus according to the application example described above, it is preferable that at least one of the illumination unit and the reflection unit is supported so as to be movable in the optical axis direction of the imaging unit.

  According to this inspection apparatus, at least one of the illumination unit and the reflection unit is movable in the optical axis direction of the imaging unit. Therefore, the distance between the illumination means or the reflection means and the inspection object can be changed. When the distance between the illumination means or the reflection means and the object to be inspected changes, the range in which the illumination light emitted from the illumination means or the reflected light reflected by the reflection means changes, so that the amount of light per unit area, That is, the illuminance changes. The illuminance of the inspection object can be adjusted by adjusting the distance between the illumination unit or the reflection unit and the inspection object.

  Application Example 6 In the inspection apparatus according to the application example described above, the object holding unit includes a mounting part through which the illumination light can be transmitted, and the planar shape of the mounting part covers the entire inspection object. It is preferably larger than the plane shape that can be supported.

  According to this inspection apparatus, since the object holding means can transmit illumination light, the irradiated illumination light can pass through the object holding means and reach the reflecting means. Since the planar shape of the mounting portion is larger than the planar shape capable of supporting the entire inspection object, the entire inspection object can be surrounded by an area through which transmitted light is transmitted. Thereby, in the image image | photographed for test | inspection, the image of a test target object can be enclosed by the image of transmitted light, and a contour shape can be clarified in the outer periphery of a test target object.

  Application Example 7 In the inspection apparatus according to the application example, it is preferable that the illumination light is white light, and the placement unit transmits light having a part of the wavelength in the illumination light.

  According to this inspection apparatus, since the object holding means transmits light having a part of the wavelength of the illumination light that is white light, the object holding means transmits the transmitted light that has transmitted the illumination light. It is possible to make light of a color determined by the wavelength transmitted by. As a result, the object holding means transmits, the reflection means reflects, and the light transmitted again by the object holding means can transmit the illumination light formed on the part where the inspection object is removed or the inspection object. The transmitted light that has been transmitted through the portion again can be changed to light having a color determined by the wavelength transmitted by the object holding means.

  Application Example 8 In the inspection apparatus according to the application example described above, the placement unit may transmit light having a wavelength at which the color of light transmitted through the placement unit is different from the color of the inspection object. preferable.

  According to this inspection apparatus, the color of light transmitted by the object holding means is different from the color of the inspection object. As a result, the reflected light was reflected and the transmitted light that was transmitted through the portion where the light transmitted by the object holding means was out of the inspection object or the portion where the illumination light formed on the inspection object was transmitted was photographed. The color of the image can be different from the color of the inspection object. The shadow portion in the image of the transmitted light is a portion where the inspection object exists and a portion that reflects the illumination light. The part is illuminated with illumination light, and an image of the color of the inspection object is formed by white illumination light. Since the color of the light transmitted by the object holding means is different from the color of the inspection object, the color of the transmitted light image and the image of the shadow portion in the image are different from each other. The boundary with the shadow image can be easily understood.

  Application Example 9 In the inspection apparatus according to the application example, it is preferable that the thickness of the mounting portion is greater than the depth of field of the imaging unit in the optical axis direction of the imaging unit.

  According to this inspection apparatus, the thickness of the mounting portion is thicker than the depth of field of the imaging means. For this reason, in the image photographed by the imaging means having the focal length adjusted to the inspection object in order to photograph the inspection object, the image of the surface opposite to the surface on which the inspection object is placed in the mounting portion is The image is out of focus. Even if an object such as dust is present on the opposite surface, the image of dust is not a clear image in an image obtained by photographing the inspection object. Thereby, it can suppress that the image for a test | inspection of a test subject is impaired due to the deposit | attachment etc. of a mounting part.

  Application Example 10 An inspection method according to this application example is an inspection method for inspecting at least a contour shape of an inspection object, and irradiates illumination light to a range including the inspection object and the inspection object. An illumination light irradiation step, and a reflection step of reflecting transmitted light that is a portion that is transmitted from a position that is out of the inspection object in the illumination light or a portion that can transmit the illumination light formed on the inspection object; In the reflected transmitted light, a position where the reflected light is again removed from the inspection object or a portion of the inspection object that is transmitted through the portion through which the illumination light can pass, and the illumination light is applied to the inspection object. And an imaging step of imaging the inspection object by detecting reflected illumination reflected light.

According to the inspection method according to this application example, the inspection object is irradiated with the illumination light in the illumination light irradiation process, and the inspection object is imaged by detecting the illumination reflected light in the imaging process. Can be implemented.
By irradiating illumination light to a range that includes the inspection object in the illumination light irradiation process, a transmitted light that is transmitted from a position that is out of the inspection object or through a portion that is transmissive to the illumination light formed on the inspection object is formed. can do. By reflecting the transmitted light in the reflection step, the reflected transmitted light can be irradiated again on the inspection object. By irradiating the inspection object again with the reflected transmitted light, the reflected reflected light that has been transmitted again through the portion where the reflected light is off the inspection object or the portion where the illumination light formed on the inspection object can be transmitted, Can be formed. In the imaging step, the contour shape of the portion that does not transmit the light of the inspection object can be imaged by detecting the transmitted reflected light and imaging the inspection object.
As a result, by performing a single illumination light irradiation process, in the imaging process, imaging with reflected light and imaging with transmitted light are simultaneously performed, and the inspection object is inspected using the captured image. can do.

  Application Example 11 In the inspection method according to the application example, the illumination light irradiated in the illumination light irradiation process is white light, and the reflection light reflects light having a part of the wavelength in the reflection process. It is preferable.

  According to this inspection method, since the illumination light is white light, the illumination reflected light in which the illumination light is reflected by the inspection object becomes the color of the inspection object. For this reason, the image of the color of the inspection object illuminated by the illumination light can be photographed by the illumination reflected light. In the reflection process, light of a part of the wavelength in the illumination light is reflected, so that the reflected light in the reflection process can be changed to light having a color determined by the wavelength reflected in the reflection process. Thereby, the reflected light reflected in the reflection process is transmitted again through the portion where the reflected light reflected from the inspection object is off the inspection object or the portion where the illumination light formed on the inspection object can be transmitted, depending on the wavelength at which the reflection light is reflected in the reflection process. The light can be a fixed color.

  Application Example 12 In the inspection method according to the application example, it is preferable that in the reflection step, light having a wavelength at which the color of the transmitted reflected light is different from the color of the inspection object is reflected.

  According to this inspection method, the color of the transmitted / reflected light is different from the color of the inspection object. Thereby, the color of the image which image | photographed the transmitted reflected light can be made into a color different from the color of a test target object. In other words, the color of the image of the part that is out of the inspection object or the part that can transmit the illumination light formed on the inspection object can be different from the color of the inspection object. A shadow portion in the image of the transmitted / reflected light is a portion where the inspection target exists and is a portion that reflects the illumination light. The part is illuminated with illumination light, and the color of the illumination reflected light from which the white illumination light is reflected is the color of the inspection object, and an image of the color of the inspection object is formed. By making the color of the reflected light in the reflection process different from the color of the object to be inspected, the image of the transmitted reflected light and the image of the reflected illumination light are made different in the image, and the image of the transmitted light and the illumination reflected in the image The boundary with the light image can be easily understood.

  [Application Example 13] The inspection method according to the application example includes a mounting portion through which the illumination light can be transmitted, and the planar shape of the mounting portion can support the entire inspection object. An inspection object holding step of placing and holding the inspection object on the mounting portion of the larger object holding means, and in the illumination light irradiation step, From the side where the inspection object is held, the illumination light is applied to the inspection object and the placement unit, and in the reflection step, the transmitted light transmitted through the placement unit is reflected, and in the imaging step, In the reflected transmitted light, the transmitted reflected light that has passed through the position where the illumination light formed on the inspection object and the position away from the placement portion and the inspection object can be transmitted again, and By detecting the reflected light It is preferable to shoot the inspection object.

  According to this inspection method, since the object holding means can transmit illumination light, the illumination light formed on the inspection object or at a position outside the inspection object in the irradiated illumination light can be transmitted. Transmitted light that has passed through this portion can be transmitted. Since the planar shape of the mounting portion is larger than the planar shape capable of supporting the entire inspection object, the entire inspection object can be surrounded by an area through which transmitted light is transmitted. Thereby, in the image image | photographed for test | inspection, the image of a to-be-inspected object can be enclosed by the image of the transmission reflected light, and a contour shape can be clarified in the outer periphery of an inspecting object.

  Application Example 14 In the inspection method according to the application example, the illumination light irradiated in the illumination light irradiation step is white light, and the placement unit transmits light having a part of the wavelength in the illumination light. It is preferable.

  According to this inspection method, since the object holding means transmits light having a part of the wavelength in the illumination light, the wavelength at which the object holding means transmits the transmitted light transmitted by the object holding means. The color of light determined by Thereby, the illumination light formed on the inspection object or the part where the object holding means transmits, the light reflected by the reflection process, and again transmitted by the object holding means deviates from the inspection object can be transmitted. The transmitted / reflected light transmitted through the portion again can be changed to light having a color determined by the wavelength transmitted by the object holding means.

  Application Example 15 In the inspection method according to the application example described above, the placement unit transmits light having a wavelength at which the color of the light transmitted through the placement unit is different from the color of the inspection target. preferable.

  According to this inspection method, the color of the light transmitted by the object holding means is different from the color of the inspection object. As a result, the transmitted light that was reflected in the reflection process and transmitted through the object holding means was transmitted through the part that was out of the inspection object or the part through which the illumination light formed on the inspection object was transmitted. The color of the image can be different from the color of the inspection object. The shadow portion in the image of the transmitted light is a portion where the inspection object exists and a portion that reflects the illumination light. The part is illuminated with illumination light, and an image of the color of the inspection object is formed by white illumination light. Since the color of the light transmitted by the object holding means is different from the color of the inspection object, the color of the transmitted light image and the image of the shadow portion in the image are different from each other. The boundary with the shadow image can be easily understood.

(A) is an external appearance perspective view which shows schematic structure of the whole droplet discharge apparatus. (B) is an external perspective view showing a schematic configuration of a droplet discharge head provided in the droplet discharge device. (C) is a perspective sectional view showing the structure of a droplet discharge head. (D) is sectional drawing which shows the structure of the part of the discharge nozzle of a droplet discharge head. (A) is a schematic plan view of a mother diaphragm. FIG. 4B is an enlarged plan view of a diaphragm section formed on the mother diaphragm. (C) is a schematic sectional drawing which shows the cross-sectional shape in the cross section shown by AA in (b). Explanatory drawing which shows the outline | summary of an external appearance inspection apparatus. (A) is explanatory drawing which shows the example of the defect in a mother diaphragm. (B) is explanatory drawing which shows the outline | summary of the main structure around an inspection target object and illumination light in an external appearance inspection apparatus. (A) is explanatory drawing which shows the outline | summary of the main structure of the circumference | surroundings of a test target object and illumination light in the external appearance inspection apparatus using a mother board | substrate jig | tool. (B) is explanatory drawing which shows the outline | summary of the main structure of the circumference | surroundings of a test target object, and illumination light in the external appearance inspection apparatus using a mother board | substrate jig | tool. (C) is explanatory drawing which shows the main structure of the circumference | surroundings of a test target object, and the outline | summary of illumination light in the external appearance inspection apparatus provided with the reel apparatus.

  Hereinafter, an inspection apparatus and an inspection method will be described with reference to the drawings. In the present embodiment, an appearance inspection apparatus and an appearance inspection process for performing an appearance inspection of a mother vibration plate in which a vibration plate constituting a droplet discharge head is partitioned will be described as an example. In the drawings referred to in the following description, the vertical and horizontal scales of members or portions may be shown differently from actual ones for convenience of illustration.

<Droplet ejection device and droplet ejection head>
First, a droplet discharge apparatus 1 including a droplet discharge head 20 having a vibration plate 10 to be inspected will be described with reference to FIG. FIG. 1 is a diagram showing a schematic configuration of a droplet discharge device and a droplet discharge head. FIG. 1A is an external perspective view showing a schematic configuration of the entire droplet discharge device, and FIG. 1B is an external perspective view showing a schematic configuration of a droplet discharge head included in the droplet discharge device. 1C is a perspective sectional view showing the structure of the droplet discharge head, and FIG. 1D is a sectional view showing the structure of the discharge nozzle portion of the droplet discharge head.

  As shown in FIG. 1, a droplet discharge device 1 includes a head mechanism unit 2 having a droplet discharge head 20 that discharges a liquid material as droplets, and a discharge target of droplets discharged from the droplet discharge head 20. A work mechanism unit 3 having a work mounting table 7 on which a work W is placed, a liquid material supply unit 4 for supplying a liquid material to the droplet discharge head 20, and a maintenance device for maintaining the droplet discharge head 20. Part 5. In addition, a discharge device control unit 6 is provided for comprehensively controlling these mechanism units.

  On the upper surface of the surface plate 9, the work mechanism unit 3 is disposed. The work mechanism unit 3 extends in the longitudinal direction (X-axis direction) of the surface plate 9. Above the work mechanism unit 3, the head mechanism unit 2 supported by two support columns fixed to the surface plate 9 is disposed. The head mechanism unit 2 extends in a direction (Y-axis direction) orthogonal to the work mechanism unit 3. Near the surface plate 9, a liquid tank of the liquid supply unit 4 having a supply pipe communicating with the droplet discharge head 20 of the head mechanism unit 2 is disposed. In the vicinity of one support column of the head mechanism unit 2, a maintenance device unit 5 is arranged along with the work mechanism unit 3 so as to extend in the X-axis direction. Further, the discharge device controller 6 is accommodated below the surface plate 9.

  The head mechanism unit 2 includes a head unit 21 having a droplet discharge head 20 and a head carriage 22 that supports the head unit 21, and the droplet discharge head 20 is moved by moving the head carriage 22 in the Y-axis direction. Is freely moved in the Y-axis direction. Moreover, it holds at the moved position. The workpiece mechanism unit 3 moves the workpiece mounting table 7 in the X-axis direction, thereby freely moving the workpiece W mounted on the workpiece mounting table 7 in the X-axis direction. Moreover, it holds at the moved position.

  The droplet discharge head 20 is moved to the discharge position in the Y-axis direction and stopped, and the liquid is discharged as droplets in synchronization with the movement of the workpiece W below in the X-axis direction. By relatively controlling the workpiece W moved in the X-axis direction and the droplet discharge head 20 moved in the Y-axis direction, droplets are landed at an arbitrary position on the workpiece W, thereby making a desired drawing. Etc. can be performed.

  As shown in FIG. 1B, the droplet discharge head 20 includes a nozzle substrate 23. On the nozzle substrate 23, two rows of nozzle rows 24A in which a large number of discharge nozzles 24 are arranged in a substantially straight line are formed. The liquid material is discharged as droplets from the discharge nozzle 24 and landed on the workpiece W or the like at the opposite position, thereby arranging the liquid material at the position. The nozzle row 24A extends in the Y-axis direction shown in FIG. 1A in a state where the droplet discharge head 20 is mounted on the droplet discharge device 1. In the nozzle row 24A, the discharge nozzles 24 are arranged at equal nozzle pitches, and the position of the discharge nozzle 24 is shifted by a half nozzle pitch in the Y-axis direction between the two nozzle rows 24A. Therefore, as the droplet discharge head 20, liquid droplets can be arranged at half nozzle pitch intervals in the Y-axis direction.

  As shown in FIGS. 1C and 1D, the droplet discharge head 20 includes a vibration plate 10. Between the diaphragm 10 and the nozzle substrate 23, a liquid pool 25 that is always filled with a material liquid supplied from the liquid tank of the liquid supply unit 4 through the supply hole 15 is located. In addition, a plurality of head partition walls 27 are located between the diaphragm 10 and the nozzle substrate 23. A space surrounded by the diaphragm 10, the nozzle substrate 23, and the pair of head partition walls 27 is a cavity 28. Since the cavities 28 are provided corresponding to the discharge nozzles 24, the number of the cavities 28 and the number of the discharge nozzles 24 are the same. The material liquid is supplied to the cavity 28 from the liquid pool 25 through the supply port 26 positioned between the pair of head partition walls 27. A set of the head partition wall 27, the cavity 28, the discharge nozzle 24, and the supply port 26 are arranged in a line along the liquid pool 25, and the discharge nozzles 24 arranged in a line form a nozzle line 24A. . Although not shown in FIG. 1C, the discharge nozzles 24 arranged in one row form another nozzle row 24A in a substantially symmetrical position with respect to the liquid pool 25 with respect to the nozzle row including the discharge nozzle 24 shown in the figure. Corresponding pairs of the head partition wall 27, the cavity 28, and the supply port 26 are arranged in a line.

  The diaphragm 10 is formed by laminating a film 11 made of polyphenylene sulfide (PPS) and a metal plate 12 made of a stainless steel plate. The film 11 is a colorless and transparent sheet. By processing the metal plate 12 by etching or the like, a frame plate 12a and island plates 12b corresponding to the respective cavities 28 are formed. One end of the piezoelectric element 17 is fixed to each island plate 12b. The other end of the piezoelectric element 17 is fixed to a base (not shown) that supports the entire droplet discharge head 20 via a fixing plate (not shown).

  The area of the island plate 12b is smaller than the projected area of the cavity 28 onto the film 11, and the position where the island plate 12b is formed is opposed to the cavity 28 on the film 11, and the head is formed in the thickness direction of the film 11. It is formed so as not to overlap the partition wall 27. That is, the part of the film 11 facing the cavity 28 and forming the cavity 28 is a part that overlaps the island plate 12b and a part that surrounds the part that overlaps the island plate 12b, and the island plate 12b is also the head. There is a portion that does not overlap with the partition wall 27. The substantially square ring-shaped portion that does not overlap with the island plate 12b and the head partition wall 27 will be referred to as a film deformation portion 11a hereinafter.

  The piezoelectric element 17 has an active part in which an electrode layer and a piezoelectric material are laminated. By applying a driving voltage to the electrode layer, the active part is in the longitudinal direction (the thickness direction of the film 11 in FIG. 1D). Shrink. By contracting the active portion, the island plate 12 b fixed to the piezoelectric element 17 receives a force that is pulled to the opposite side of the cavity 28. When the island plate 12 b is pulled to the opposite side to the cavity 28, the film 11 to which the island plate 12 b is attached is bent to the opposite side of the cavity 28. Thereby, since the volume of the cavity 28 increases, the liquid material is supplied from the liquid pool 25 to the cavity 28 through the supply port 26. Next, when the driving voltage applied to the electrode layer is released, the active portion returns to the original length, and the piezoelectric element 17 presses the island plate 12b. When the island plate 12b is pressed, the film 11 to which the island plate 12b is attached returns to the cavity 28 side. As a result, the volume of the cavity 28 is suddenly restored, that is, the volume that has been increased is reduced, so that pressure is applied to the liquid material filled in the cavity 28, and the cavity 28 communicates with the cavity 28. The liquid material is discharged as droplets from the discharge nozzle 24 formed in this manner.

  When the piezoelectric element 17 applies a pressing force or a tensile force to the island plate 12b, the highly rigid island plate 12b made of a stainless steel plate applies a pressing force or a tensile force to the film 11 with almost no deformation. Since the film 11 is deformed and bent by the film deforming portion 11a having a rigidity lower than that of the portion where the island plate 12b is attached, the volume of the cavity 28 is substantially equal to the area of the island plate 12b. Increase or decrease.

<Mother diaphragm>
Next, the mother diaphragm 10A in which the diaphragm 10 is partitioned will be described with reference to FIG. The diaphragm 10 is manufactured in the form of a mother diaphragm 10 </ b> A and is divided into individual diaphragms 10. Appearance inspections such as the shape of the island plate 12b and the presence or absence of scratches are also performed in the form of the mother diaphragm 10A. FIG. 2 is a schematic view showing a mother diaphragm in which diaphragms are partitioned. 2A is a schematic plan view of the mother diaphragm, FIG. 2B is an enlarged plan view of the diaphragm section formed on the mother diaphragm, and FIG. 2C is a plan view of FIG. It is a schematic sectional drawing which shows the cross-sectional shape in the cross section shown by AA to (b).

  As shown in FIG. 2A, the mother diaphragm 10 </ b> A is formed with 18 diaphragm sections corresponding to one diaphragm 10. As described above, the mother diaphragm 10A is formed by bonding the film 11 made of polyphenylene sulfide (PPS) and the metal plate 12 made of stainless steel plate, and the groove 34 is formed by etching the metal plate 12. Has been. As shown in FIG. 2C, the film 11 and the metal plate 12 are bonded to each other by the adhesive layer 14. As shown in FIGS. 2A and 2B, one section of the metal plate 12 surrounded by the groove 34 and the film 11 bonded to the metal plate 12 are combined with one diaphragm 10. This corresponds to the diaphragm section 10a. The individual diaphragms 10 are separated from the mother diaphragm 10A by cutting the film 11 corresponding to the bottom of the groove 34 at the position of the planned cutting line 38 shown in FIG. On the peripheral plate 12c around the mother diaphragm 10A, adjustment marks 31 are formed at two locations in the four corners, and machining reference holes 32 are formed at the other two locations. The adjustment mark 31 is a mark for alignment when the mother diaphragm 10A is cut along the planned cutting line 38. The processing reference hole 32 is a positioning hole when the metal plate 12 is etched.

As shown in FIGS. 2B and 2C, the diaphragm section 10a has two assembly reference holes 18 and the supply holes 15 described above. The assembly reference hole 18 is a hole for positioning when the diaphragm 10 is incorporated into the droplet discharge head 20. The assembly reference hole 18 and the supply hole 15 are formed together with the processing reference hole 32 by pressing or the like.
In the diaphragm section 10a, the above-described frame plate 12a and the island plate 12b corresponding to the cavity 28 are formed. The frame plate 12a and the island plate 12b are formed by etching the metal plate 12 to remove the metal plate in the space 33 and the groove 34. When the frame plate 12a and the island plate 12b are formed, the adjustment mark 31 is simultaneously etched. Etching is performed with reference to the processing reference hole 32 at the time of etching, and the assembly reference hole 18 processed simultaneously with the processing reference hole 32 is used as a positioning hole when the diaphragm 10 is incorporated into the droplet discharge head 20. The position error between the island plate 12b and the cavity 28 can be minimized. The shape accuracy of the island plate 12b and the positional accuracy with respect to the cavity 28 are one of the important factors that determine the discharge characteristics of the liquid material from the discharge nozzle 24.

  In FIG. 2, in order to show the shape and arrangement of the island plates 12b in an easy-to-understand manner, their widths and intervals are drawn much wider than actual. Therefore, although the number of island plates 12b is shown to be small, in reality, the island plates 12b have a larger number of island plates 12b on the diaphragm section 10a than the number shown in FIG.

<Appearance inspection device>
Next, the appearance inspection apparatus 40 used in this embodiment will be described with reference to FIG. FIG. 3 is an explanatory diagram showing an outline of the appearance inspection apparatus. The appearance inspection device 40 corresponds to an inspection device.
As shown in FIG. 3, the appearance inspection apparatus 40 includes an imaging device 41, an illumination device 43, an imaging device lifting mechanism 61, a substrate moving mechanism 51, and a control unit 71.

The substrate moving mechanism 51 includes an X-axis slide mechanism 52, a Y-axis slide mechanism 53, a rotation mechanism 54, and a stage 55.
The stage 55 includes a stage frame 55b, a stage panel 55a, and a workpiece fixing mechanism (not shown). The stage panel 55a is made of colorless and transparent glass. The stage frame 55b is a frame having a stage opening 55c formed at the center. A stage panel 55a is detachably fixed on the stage frame 55b.

  The mother diaphragm 10A is fixed to the appearance inspection apparatus 40 by placing the mother diaphragm 10A on the stage panel 55a and fixing it using a work fixing mechanism. The size of the opening of the stage opening 55c is a size capable of including the entire mother diaphragm 10A, and the mother diaphragm 10A placed on the stage panel 55a is only the part of the stage panel 55a where the stage opening 55c faces. Can support the whole. In other words, it is possible to irradiate the entire and surroundings of the mother diaphragm 10A placed on the stage panel 55a by the light transmitted through the stage opening 55c. The portion of the stage panel 55a that the stage opening 55c faces corresponds to the placement portion. The substrate moving mechanism 51, the stage 55, or the stage panel 55a corresponds to the object holding means.

The rotation mechanism 54 includes a fixed rotation frame 54a and a rotation frame 54b. The fixed rotation frame 54a is rotatable about the Z axis in a direction perpendicular to the surface of the stage 55 and at an arbitrary position. The rotation frame 54b is supported so that it can be held. The stage 55 has a stage frame 55b fixed to the rotation frame 54b, and can be rotated about the Z axis by the rotation mechanism 54 and held at an arbitrary position. The mother diaphragm 10A fixed on the stage 55 can be rotated around the Z axis and held in an arbitrary direction by the rotation mechanism 54.
The rotation mechanism 54 has a fixed rotation frame 54a fixed to the Y-axis slide mechanism 53, and can be moved in the Y-axis direction and held at an arbitrary position by the Y-axis slide mechanism 53. The Y-axis direction is the direction indicated by the arrow Y in FIG. The mother diaphragm 10A fixed on the stage 55 can be moved in the Y-axis direction and held at an arbitrary position by the Y-axis slide mechanism 53.
The Y-axis slide mechanism 53 is fixed to the X-axis slide mechanism 52, and can be moved in the X-axis direction and held at an arbitrary position by the X-axis slide mechanism 52. The X-axis direction is a direction orthogonal to the Y-axis direction and the Z-axis direction. The mother diaphragm 10A fixed on the stage 55 can be moved in the X-axis direction and held at an arbitrary position by the X-axis slide mechanism 52.

A rotation frame opening 54c is formed at the center of the rotation frame 54b. A reflection panel support mechanism 47 included in the illumination device 43 is disposed in a portion of the fixed rotation frame 54a on which the rotation frame 54b is supported, facing the rotation frame opening 54c. A reflection panel 46 is fixed to the reflection panel support mechanism 47, and the reflection panel 46 is supported by the reflection panel support mechanism 47 so as to be movable in the Z-axis direction and held at an arbitrary position.
The rotation frame opening 54c communicates with the stage opening 55c of the stage frame 55b fixed to the rotation frame 54b. The reflection panel 46 supported by the reflection panel support mechanism 47 is located in the stage opening 55c. A gap is formed between the reflection panel 46 and the inner wall of the stage opening 55c so that the reflection panel 46 and the inner wall of the stage opening 55c do not interfere even if the stage frame 55b rotates.

The reflection panel 46 has a flat plate shape, and a reflection surface 46a is formed on a surface facing the stage panel 55a fixed to the stage frame 55b in a state of closing one end of the stage opening 55c. The reflection surface 46a is covered with a color filter (not shown), and light having a wavelength that is selectively transmitted by the color filter is incident on the reflection surface 46a and reflected. That is, the reflected light in which the white light is reflected by the reflection panel 46 becomes light of a color (wavelength) determined by the color of the color filter.
In the image photographed by the camera 42, the color of the image of the space portion 33 and the groove 34 is almost determined by the color of the reflected light. Therefore, the wavelength of the light selectively reflected by the reflective panel 46 is the color of the reflected light. However, it is preferable to select a wavelength of light that is different from the color of the frame plate 12a and the island plate 12b.

  The reflection panel 46 is provided so that the reflection surface 46a is substantially parallel to the surface on which the mother diaphragm 10A of the stage panel 55a is placed. Light incident on the surface of the stage panel 55a on which the mother diaphragm 10A is placed from the upper side (the side opposite to the stage frame 55b) passes through the stage panel 55a and is reflected by the reflecting surface 46a. The reflected light reflected by the reflecting surface 46a is incident on the stage panel 55a from the lower surface of the stage panel 55a (the surface on the stage frame 55b side), is transmitted, and is a surface on which the mother diaphragm 10A of the stage panel 55a is placed. Is injected from. The reflection panel 46 corresponds to reflection means.

  The imaging device 41 of the appearance inspection device 40 includes a camera 42 and an imaging lens 42a. The camera 42 faces the surface on which the mother diaphragm 10A of the stage panel 55a is placed, and can photograph the mother diaphragm 10A fixed to the stage panel 55a of the stage 55 through the imaging lens 42a. The imaging device 41 or the camera 42 corresponds to an imaging unit.

The illumination device 43 includes a ring illumination 44, a ring illumination support mechanism 45, and the reflection panel 46 and the reflection panel support mechanism 47 described above.
The ring illumination 44 includes a plurality of illumination elements 44a that emit light for illumination, and a ring frame 44b to which the illumination elements 44a are fixed. The ring frame 44b has an annular shape, and the illumination elements 44a fixed to the ring frame 44b are arranged in an annular shape. The illumination light emitted from the illumination element 44a is white light. The ring illumination 44 or the illumination element 44a corresponds to illumination means.

The ring illumination 44 has a ring frame 44 b fixed to the ring illumination support mechanism 45, and is attached to the frame of the camera 42 via the ring illumination support mechanism 45. An annular ring frame 44b is loosely fitted to the camera 42 or the imaging lens 42a, and an illumination element 44a fixed in an annular arrangement on the ring frame 44b is disposed at a position surrounding the camera 42 and the imaging lens 42a. Has been. The illumination light emitted from the illumination element 44a can illuminate the imaging region of the camera 42.
The ring illumination support mechanism 45 supports the ring illumination 44 so that it can move in the optical axis direction of the camera 42 and can be held at an arbitrary position with respect to the camera 42. When the ring illumination 44 is moved with respect to the camera 42 by the ring illumination support mechanism 45, the size of the area illuminated by the illumination light of the ring illumination 44 on the imaging surface of the camera 42 can be adjusted. In other words, the brightness of the photographing surface can be adjusted by adjusting the amount of illumination light per unit area on the photographing surface of the camera 42.

  The imaging apparatus lifting mechanism 61 includes a fixed part 62, a lifting part 63, and a lifting sensor 66. The elevating part 63 is held by a fixed part 62 and can be moved in the Z-axis direction and held at an arbitrary position by an elevating motor (not shown). The camera 42 is fixed to the elevating unit 63, and the focal position of the camera 42 in the Z-axis direction can be adjusted by elevating and lowering the camera 42 in the Z-axis direction by the imaging device elevating mechanism 61. The lift sensor 66 measures the position of the lift unit 63 relative to the fixed unit 62 by measuring the position of the lift unit 63 with respect to the main body fixed to the fixed unit 62. The elevation sensor 66 can measure the focal position of the camera 42 with respect to the reference position, using the surface of the stage 55 as a reference position.

  A control unit 71 as a control unit that controls each of the above components includes a main computer 72, and the main computer 72 includes a control device 76 that performs overall control of the appearance inspection device 40. The main computer 72 is connected to an input device 74 for inputting various data used when measuring the discharge nozzle 24 and a display device 73 for displaying various information such as measurement results and pass / fail judgment.

  The mother diaphragm 10 </ b> A to be inspected is fixed on the stage panel 55 a of the stage 55. The inspection is performed in units of the diaphragm section 10a, and the diaphragm section 10a to be inspected is moved in the X-axis direction and the Y-axis direction by the substrate moving mechanism 51 and is positioned at the imaging position of the imaging device 41. The imaging device 41 is moved in the Z direction by the imaging device lifting mechanism 61, the focal position of the camera 42 is shifted to the position of the mother diaphragm 10A to be inspected, and an image at that position is acquired. An appearance inspection of the mother diaphragm 10A is performed.

<Appearance inspection process>
Next, illumination light when performing an appearance inspection of the mother diaphragm 10A using the appearance inspection apparatus 40 will be described with reference to FIG. FIG. 4 is an explanatory diagram showing an outline of the inspection target and the appearance inspection apparatus in the appearance inspection of the mother diaphragm. 4A is an explanatory diagram illustrating an example of a defect in the mother diaphragm, and FIG. 4B is an explanatory diagram illustrating a main configuration around the inspection target and an outline of illumination light in the appearance inspection apparatus. It is.

  In the appearance inspection process performed in the manufacturing process of the diaphragm 10, the shape accuracy and position accuracy of each part such as the island plate 12b described above are inspected. In the appearance inspection process, an inspection for the presence / absence of scratches, dents, deposits, etc. and an inspection for the presence / absence of peeling of the island plate 12b are also performed. The scratches 111 and 114 shown in FIG. 4A are groove-shaped recesses formed by rubbing the metal plate 12 or the film 11. The dent 112 and the dent 115 are dents formed by foreign matter colliding with the metal plate 12 or the film 11. The deposit 118 and the deposit 117 are those in which foreign matter adheres to the surface of the metal plate 12 or the film 11. A portion indicated by an arrow a in FIG. 4A is a portion where the island plate 12b is peeled off. The mother diaphragm 10A or the diaphragm 10 corresponds to an inspection object.

  As described above, when the appearance inspection of the mother diaphragm 10A is performed using the appearance inspection apparatus 40, the mother diaphragm 10A is mounted on the stage panel 55a of the stage 55 as shown in FIG. It is placed on the surface. A reflection panel 46 is disposed below the stage panel 55a (on the side opposite to the placement surface). The camera 42 faces the stage panel 55a so that the mother diaphragm 10A placed on the stage panel 55a can be photographed from above the stage panel 55a (placement side). The illumination element 44a disposed around the camera 42 emits illumination light and irradiates the mother diaphragm 10A and a portion of the stage panel 55a around the mother diaphragm 10A. Illumination light applied to a portion of the mother diaphragm 10A that does not transmit light, such as the frame plate 12a and the island plate 12b, is referred to as illumination light L11. Illumination light irradiated to a portion that transmits light, such as the stage panel 55a and the film 11 at the position of the space 33 in the mother diaphragm 10A, is denoted as illumination light L21.

  The illumination light L11 is reflected by the surfaces of the frame plate 12a and the island plate 12b. When the reflected light L <b> 12 is detected by the camera 42, images of the surfaces of the frame plate 12 a and the island plate 12 b are taken by the camera 42. The image includes the state of the surface of the frame plate 12a and the island plate 12b, and images of the scratch 111, the dent 112, the deposit 118, and the like formed on the surface. As described above, the illumination light L11 is white light, and the color of the reflected light L12 is a color such as the surface of the island plate 12b that reflects the illumination light L11 and changes it to the reflected light L12. The presence of the scratch 111, the dent 112, the attached matter 118, and the like is detected by photographing their own images. The presence of the part where the island plate 12b is peeled off is detected by photographing an image of the island plate 12b or the like with a tilted surface.

  The illumination light L21 passes through the film 11 and the stage panel 55a at a position such as the space 33 and is reflected by the reflection surface 46a of the reflection panel 46. A part of the reflected light L22 reflected enters the film 11 and the stage panel 55a at a position such as the space 33 from the opposite side to the illumination light L21 and transmits therethrough. The light that the reflected light L22 has transmitted through the film 11 and the stage panel 55a is referred to as transmitted light L23. When the transmitted light L23 is detected by the camera 42, an image in which the frame plate 12a and the island plate 12b are shaded is captured by the camera 42. The part other than the shadow of the image has the color of the transmitted light L23.

  As described above, the film 11 is a colorless and transparent sheet, and the stage panel 55a is formed of colorless and transparent glass. Therefore, even if the film 11 and the stage panel 55a are transmitted, the illumination light L21 is white light. The color of the transmitted light L23 that the reflected light L22 has transmitted through the film 11 and the stage panel 55a is the same color as the color of the reflected light L22. Since the reflection surface 46a of the reflection panel 46 is covered with the color filter, the colors of the reflected light L22 and the transmitted light L23 are the colors of the color filter.

Portions such as the frame plate 12a and the island plate 12b are shadows, and the portions where the reflected light L22 cannot be transmitted, such as the frame plate 12a and the island plate 12b, due to the shape of the shadow in the image where the shadow is the color of the transmitted light L23 The contour shape can be acquired and the shape can be inspected. The dent 115, the scratch 114, and the like of the film 11 are detected as a faint color of the color portion of the transmitted light L23. A foreign matter attached to a portion of the film 11 that does not overlap the frame plate 12a, the island plate 12b, or the like, such as the attached matter 117, is detected as a shadow in which the transmitted light L23 (reflected light L22) is blocked by the attached matter 117 or the like. .
The illumination light L11 and the illumination light L21 correspond to illumination light. The illumination light L21 that is transmitted through the film 11 and the stage panel 55a at the position such as the space 33 and reflected by the reflection surface 46a of the reflection panel 46 corresponds to transmitted light. The transmitted light L23 corresponds to transmitted reflected light. The reflected light L12 corresponds to the illumination reflected light.

Note that if there are deposits or the like on the front surface of the reflective panel 46 or the back surface of the stage panel 55a, they may be photographed by the camera 42. The image of the adhering matter adhering to the front surface of the reflection panel 46 or the back surface of the stage panel 55a hinders accurate inspection of the mother diaphragm 10A.
The thickness of the stage panel 55a is preferably thicker than the depth of field of the camera 42 in order to prevent the image of the deposit on the back surface of the stage panel 55a from becoming a clear image and hindering inspection. . By making the thickness of the stage panel 55a thicker than the depth of field of the camera 42, the back surface of the stage panel 55a is captured in an image photographed in focus on the mother diaphragm 10A placed on the stage panel 55a. Since the deposit is not focused on, the image of the deposit becomes unclear, and it is possible to prevent the inspection from being hindered.
Similarly, even if the thickness of the stage panel 55a is thinner than the depth of field of the camera 42, the image of the deposit on the surface of the reflection panel 46 becomes a clear image, which hinders inspection. In order to suppress this, it is preferable that the position of the surface of the reflection panel 46 be positioned at a position farther from the depth of field of the camera 42 with respect to the surface on which the mother diaphragm 10A of the stage panel 55a is placed.

<Other configuration of appearance inspection device>
Next, an appearance inspection apparatus 140 that is partially different from the above-described appearance inspection apparatus 40 will be described with reference to FIG. FIG. 5 is an explanatory diagram illustrating a main configuration around an inspection target and an outline of illumination light in the appearance inspection apparatus. The appearance inspection device 140 corresponds to an inspection device.

FIG. 5A is an explanatory diagram showing a main configuration around an inspection object and an outline of illumination light in an appearance inspection apparatus using a mother substrate jig. The appearance inspection apparatus 140 illustrated in FIG. 5A includes a stage 155 having a configuration different from that of the stage 55 of the appearance inspection apparatus 40, and includes a reflection panel 146 that is different from the reflection panel 46. The appearance inspection apparatus 140 holds the mother diaphragm 10A using the holding jig 150 so as to be inspected.
The stage 155 has a stage opening 155a at the center, and includes a fixing device (not shown) for fixing the holding jig 150. The stage 155 is fixed to the rotation mechanism 54 similarly to the stage 55 of the appearance inspection apparatus 40.

  The holding jig 150 includes an upper jig frame 150a and a lower jig frame 150b. The upper jig frame 150a is formed of a colorless and transparent material such as glass. The lower jig frame 150b is formed of a colored transparent material such as colored glass. By holding the mother diaphragm 10A between the upper jig frame 150a and the lower jig frame 150b and fixing the upper jig frame 150a and the lower jig frame 150b by a fixing mechanism (not shown), the holding jig 150 is fixed. To hold the mother diaphragm 10A.

By fixing the holding jig 150 holding the mother diaphragm 10A to the stage 155 using a fixing device, the mother diaphragm 10A is set at an inspection position on the stage 155. The position is such that the holding jig 150 covers the entire surface of the stage opening 155a and the mother diaphragm 10A does not come off the stage opening 155a in a direction parallel to the surface of the stage 155 on which the holding jig 150 is placed. is there.
The holding jig 150 or the holding jig 150 and the stage 155 correspond to the object holding means. The portion of the lower jig frame 150b that faces the stage opening 155a corresponds to the placement portion.

  The reflection panel 146 includes a reflection surface 146a and reflects light having almost all wavelengths included in the illumination light emitted from the illumination element 44a. Since the illumination light emitted from the illumination element 44a is white light, the reflected light of the illumination light reflected by the reflection panel 146 is also white light. The reflection panel 146 corresponds to a reflection unit.

Similar to the appearance inspection apparatus 40 described above, the illumination element 44a emits illumination light to hold the mother diaphragm 10A and the mother jig 150b that holds the mother diaphragm 10A and the lower jig frame 150b of the holding jig 150 that holds the mother diaphragm 10A. Irradiate a portion around the diaphragm 10A.
Illumination light applied to a portion of the mother diaphragm 10A that does not transmit light, such as the frame plate 12a and the island plate 12b, is referred to as illumination light L11. Illumination light applied to a portion that transmits light, such as the lower jig frame 150b and the film 11 at the position of the space 33 in the mother diaphragm 10A, is referred to as illumination light L21.

  The illumination light L11 is reflected by the surfaces of the frame plate 12a and the island plate 12b. When the reflected light L <b> 12 is detected by the camera 42, images of the surfaces of the frame plate 12 a and the island plate 12 b are taken by the camera 42. The image includes the state of the surface of the frame plate 12a and the island plate 12b, and images of the scratch 111, the dent 112, the deposit 118, and the like formed on the surface. As described above, the illumination light L11 is white light, and the color of the reflected light L12 is a color such as the surface of the island plate 12b that reflects the illumination light L11 and changes it to the reflected light L12. The presence of the scratch 111, the dent 112, the attached matter 118, and the like is detected by photographing their own images. The presence of the part where the island plate 12b is peeled off is detected by photographing an image of the island plate 12b or the like with a tilted surface.

  The primary transmitted light L211 that has passed through the film 11 and the mother diaphragm 10A at the position such as the space 33 and further passed through the lower jig frame 150b is reflected by the reflecting surface 146a of the reflecting panel 146. The The reflected reflected light L22 is transmitted through the lower jig frame 150b, and a part of the reflected light L22 is transmitted around the film 11 and the mother diaphragm 10A at the position such as the space 33. The light transmitted through the lower jig frame 150b, the film 11, and the mother diaphragm 10A by the reflected light L22 is referred to as secondary transmitted light L221. When the secondary transmitted light L221 is detected by the camera 42, an image in which the frame plate 12a and the island plate 12b are shaded is captured by the camera 42. The portion other than the shadow of the image has the color of the secondary transmitted light L221.

  As described above, the film 11 is a colorless and transparent sheet, the upper jig frame 150a is formed of a colorless and transparent material, and the lower jig frame 150b is formed of a colored and transparent material. Further, the reflected light reflected by the reflective panel 146 has substantially the same wavelength component as the incident light. Accordingly, the lower jig frame 150b, or the primary transmitted light L211 and the secondary transmitted light L221 transmitted through the lower jig frame 150b and the film 11 once or twice are formed of a colored transparent material. The frame 150b becomes the color of light having a wavelength that is selectively transmitted.

The portions such as the frame plate 12a and the island plate 12b are shadows, and the reflected light L22 such as the frame plate 12a and the island plate 12b is transmitted depending on the shape of the shadow in the image in which the shadow is the color of the secondary transmitted light L221. The contour shape of the part that cannot be obtained is acquired, and the contour shape can be inspected. A dent 115, a scratch 114, or the like on the film 11 is detected as a faint color of the color portion of the secondary transmitted light L221. For example, the foreign matter attached to a portion of the film 11 that does not overlap the frame plate 12a, the island plate 12b, or the like, such as the attached matter 117, is a shadow in which the secondary transmitted light L221 (reflected light L22) is blocked by the attached matter 117 or the like. Detected as
In order to easily distinguish the shape of the shadow in the image where the frame plate 12a, the island plate 12b and the like are shadows and the periphery of the shadow is the color of the secondary transmitted light L221, the lower jig frame 150b is selectively used. The wavelength to be transmitted is preferably a wavelength at which the color of the secondary transmitted light L221 is different from the colors of the frame plate 12a, the island plate 12b, and the like.
The illumination light L11 and the illumination light L21 correspond to illumination light. The primary transmitted light L211 corresponds to the transmitted light. The secondary transmitted light L221 corresponds to transmitted reflected light.

<Other configuration of appearance inspection apparatus-2>
FIG. 5B is an explanatory diagram showing a main configuration around the inspection object and an outline of illumination light in the appearance inspection apparatus using the mother substrate jig. The appearance inspection apparatus 240 shown in FIG. 5B includes a stage 155 as in the appearance inspection apparatus 140, and includes a reflective panel 46 as in the appearance inspection apparatus 40. The appearance inspection device 240 holds the mother diaphragm 10A using the holding jig 250 so that it can be inspected.

The holding jig 250 includes an upper jig frame 250a and a lower jig frame 250b. The upper jig frame 250a and the lower jig frame 250b have a frame shape, and a jig opening 251a or a jig opening 251b is formed respectively. The upper jig frame 250a and the lower jig frame 250b are formed of a colored transparent material such as colored glass, for example.
By holding the mother diaphragm 10A between the upper jig frame 250a and the lower jig frame 250b and fixing the upper jig frame 250a and the lower jig frame 250b by a fixing mechanism (not shown), the holding jig 250 is fixed. To hold the mother diaphragm 10A. All the diaphragm sections 10a in the mother diaphragm 10A held by the holding jig 250 face the jig opening 251a and the jig opening 251b.

The mother vibration plate 10A is set at the inspection position on the stage 155 by fixing the holding jig 250 holding the mother vibration plate 10A to the stage 155 using a fixing device. The position is such that the holding jig 250 covers the entire surface of the stage opening 155a and the mother diaphragm 10A does not come off the stage opening 155a in a direction parallel to the surface of the stage 155 on which the holding jig 250 is placed. is there.
The holding jig 250 or the holding jig 250 and the stage 155 correspond to the object holding means. The portion of the lower jig frame 250b that faces the stage opening 155a corresponds to the placement portion.

  As described above, the reflection panel 46 selectively reflects light having a specific wavelength. The upper jig frame 250a and the lower jig frame 250b formed of a colored transparent material also selectively transmit light having a wavelength determined by the color of the material. For this reason, it is preferable that the wavelength of the light reflected by the reflection panel 46 and the wavelength of the light transmitted by the upper jig frame 250a and the lower jig frame 250b are substantially matched.

  Using the appearance inspection apparatus 240 having these configurations, the illumination light for performing the appearance inspection is formed, the inspection image is taken, similarly to the appearance inspection apparatus 40 and the appearance inspection apparatus 140 described above. Inspection can be performed. Details are substantially the same as those in the case of the appearance inspection apparatus 40 or the appearance inspection apparatus 140 described above, and are omitted.

<Other configuration of appearance inspection apparatus-3>
FIG. 5C is an explanatory diagram showing a main configuration around an inspection object and an outline of illumination light in an appearance inspection apparatus including a reel device. An appearance inspection apparatus 340 shown in FIG. 5C includes a reel device 350 instead of the substrate moving mechanism 51 of the appearance inspection apparatus 40. The appearance inspection device 340 corresponds to the inspection device.
The reel device 350 supplies the tape circuit board 310A to the inspection position of the appearance inspection device 340 and holds it at the position. The tape circuit board 310 </ b> A is a long tape in which a circuit pattern constituting the flexible circuit board 310 is repeatedly formed on the long tape surface of the substrate film constituting the flexible circuit board 310. The flexible circuit board 310 is formed by forming the tape circuit board 310 </ b> A and separating the completed tape circuit board 310 </ b> A into individual flexible circuit boards 310.

The reel device 350 includes a supply reel 350a and a take-up reel 350b. The supply reel 350a and the take-up reel 350b are driven by a driving device (not shown) and are held in an arbitrary state. By winding the tape circuit board 310A wound around the supply reel 350a with the take-up reel 350b, the flexible circuit board 310 formed on the tape circuit board 310A is sequentially positioned at a position facing the imaging device 41.
The reel device 350 corresponds to an object holding unit. The tape circuit board 310A or the flexible circuit board 310 corresponds to the inspection object.

  Using the appearance inspection apparatus 340 having these configurations, illumination light for performing an appearance inspection is formed, an inspection image is taken, and the tape circuit board 310A (flexible An appearance inspection of the circuit board 310) can be performed. Details are substantially the same as in the case of the appearance inspection apparatus 40 described above, and are therefore omitted.

Hereinafter, the effect by embodiment is described. According to the present embodiment, the following effects can be obtained.
(1) The appearance inspection apparatus 40 includes a reflection panel 46, and illumination light incident from the upper side of the stage panel 55a is transmitted through the stage panel 55a and reflected by the reflection surface 46a, and the stage panel 55a is reflected from the lower surface of the stage panel 55a. Is incident on, transmitted through, and irradiated to the mother diaphragm 10A placed on the stage panel 55a. Thereby, the surface of the frame plate 12a and the island plate 12b in the mother diaphragm 10A detects the light reflected by the surface of the illumination light, and the outer shape of the frame plate 12a and the island plate 12b is determined by the reflection panel 46. Inspection can be performed by detecting light in which the reflected light is partially blocked by the frame plate 12a and the island plate 12b.

  (2) The reflection panel 46 selectively reflects light of a specific wavelength in white light and irradiates the mother diaphragm 10A. As a result, the color of the reflected light that is reflected by the reflective panel 46 and applied to the mother diaphragm 10A and transmits around the film 11 at the position such as the space 33 of the mother diaphragm 10A and the mother diaphragm 10A is reflected on the reflective panel. The color of light can be determined by the wavelength reflected by 46.

  (3) The lower jig frame 150b of the holding jig 150 provided in the appearance inspection apparatus 140 is formed of a colored transparent material. That is, the lower jig frame 150b selectively transmits light having a specific wavelength in the illumination light. As a result, the light is reflected by the reflective panel 146, passes through the lower jig frame 150b, and is irradiated to the mother diaphragm 10A, and passes through the film 11 at the position such as the space 33 of the mother diaphragm 10A and the periphery of the mother diaphragm 10A. The color of the reflected light can be changed to the color determined by the wavelength transmitted by the lower jig frame 150b.

  (4) The upper jig frame 250a and the lower jig frame 250b of the holding jig 250 included in the appearance inspection device 240 are formed of a colored transparent material. That is, the lower jig frame 250b selectively transmits light having a specific wavelength in the illumination light. The appearance inspection apparatus 240 also includes a reflection panel 46 that selectively reflects light having a specific wavelength. As a result, the light passes through the upper jig frame 250a and the lower jig frame 250b, is reflected by the reflection panel 46, and is irradiated to the mother diaphragm 10A, and the film 11 and the mother at a position such as the space 33 of the mother diaphragm 10A. The color of the light transmitted through the periphery of the vibration plate 10 </ b> A can be changed to light having a color determined by the wavelength reflected by the reflection panel 46 while being transmitted by the upper jig frame 250 a and the lower jig frame 250 b.

  (5) Since the reflection surface 46a of the reflection panel 46 is covered with the color filter, the color of the reflected light L22 and the transmitted light L23 can be the color of the color filter. Further, the color of the reflected light L22 (transmitted light L23) can be changed by simply changing the color filter. By changing the color filter, the color of the reflected light L22 (transmitted light L23) can be changed corresponding to the color of the inspection object.

  (6) The lower jig frame 150b of the holding jig 150 and the upper jig frame 250a and the lower jig frame 250b of the holding jig 250 are formed of a colored transparent material. As a result, the light that is transmitted through and reflected by the holding jig 150 or the holding jig 250 and is transmitted through the holding jig 150 or the holding jig 250 again is transmitted through the colored light that the holding jig 150 or the holding jig 250 transmits. Can be. By changing the color of the holding jig 150 or the holding jig 250, the colors of the primary transmitted light L211 and the secondary transmitted light L221 can be easily changed according to the color of the inspection object.

  (7) The reflection panel 46 is supported by the reflection panel support mechanism 47 so as to be movable in the Z-axis direction and to be held at an arbitrary position. Thereby, the distance between the reflective panel 46 and the stage panel 55a can be changed. By changing the distance between the reflection panel 46 and the stage panel 55a, the surface of the stage panel 55a to which the light reflected by the reflection panel 46 is irradiated changes. That is, the illuminance at which the light reflected by the reflective panel 46 irradiates the stage panel 55a can be changed. Therefore, the illuminance of the mother diaphragm 10A placed on the stage panel 55a can be adjusted by moving and adjusting the position of the reflective panel 46 in the Z-axis direction by the reflective panel support mechanism 47.

  (8) The ring illumination 44 is supported by the ring illumination support mechanism 45 so as to be movable in the optical axis direction of the camera 42 and to be held at an arbitrary position with respect to the camera 42. Thereby, the distance between the ring illumination 44 and the imaging surface of the camera 42 such as the surface of the mother diaphragm 10A placed on the stage panel 55a can be changed. By changing the distance between the ring illumination 44 and the imaging surface of the camera 42, the size of the area illuminated by the illumination light from the ring illumination 44 on the imaging surface of the camera 42 can be changed. That is, the brightness of the photographing surface can be changed by changing the amount of illumination light per unit area by the ring illumination 44 on the photographing surface of the camera 42. The brightness of the photographing surface of the camera 42 can be adjusted by adjusting the position of the ring illumination 44 with respect to the camera 42 by the ring illumination support mechanism 45.

  As mentioned above, although preferred embodiment was described referring an accompanying drawing, suitable embodiment is not restricted to the said embodiment. The embodiment can of course be modified in various ways without departing from the scope, and can also be implemented as follows.

  (Modification 1) In the said embodiment, the illumination light which the illumination element 44a inject | emits was white light, However, It is not essential that illumination light is white light. As the color of the illumination light, a color that makes it easy to identify the image of the inspection object or the deposit may be selected by considering the color of the inspection object or the expected deposit.

  (Modification 2) In the embodiment described above, the reflection panel 46 selectively reflects light of a specific wavelength in white light and irradiates the mother diaphragm 10A. Further, the appearance inspection apparatus 140 including the reflection panel 146 that reflects light of almost all wavelengths included in the illumination light emitted from the illumination element 44a is a lower jig formed of a colored transparent material such as colored glass. The frame 150b is provided, and only the light having a specific wavelength of the reflected light reflected by the reflective panel 146 is transmitted and applied to the mother diaphragm 10A. However, it is not essential to limit the wavelength of light reflected by the reflecting means and irradiated on the inspection object to only a specific wavelength. If the reflected light is approximately the same color as the illumination light such as white (colorless) depending on the color of the inspection object, etc., if the reflected light from the inspection object and the reflected light by the reflecting means can be clearly distinguished, The reflected light applied to the mother diaphragm 10A after the illumination light is reflected by the reflecting means may be light including light of most wavelengths included in the illumination light.

  (Modification 3) In the said embodiment, although the stage panel 55a was formed with the colorless and transparent glass, it is also glass that the member which mounts a test subject like the stage panel 55a is colorless and transparent. It is not essential to be formed with. The member on which the inspection object is placed may be colored and transparent like the lower jig frame 150b, or the position facing the inspection contrast portion in the inspection object like the lower jig frame 250b is an opening. It may be a configuration. If the material to be formed is capable of transmitting the illumination light irradiated from the illumination means and the reflected light reflected by the reflection means through the aperture itself or the formed opening, Any material may be used.

  (Modification 4) In the above-described embodiment, the reflection characteristics of the reflective panel 46 and the reflective panel 146 have been described only with respect to the reflected wavelength. It is preferable that the reflected light reflected by the reflecting means is irradiated almost uniformly on the entire surface of the inspection object. For this reason, it is preferable that the reflecting means diffusely reflects the illumination light rather than specularly reflects it.

  (Modification 5) In the said embodiment, although the film 11 which comprises the diaphragm 10 was a colorless and transparent sheet | seat, the part which can transmit the illumination light in a test object is a colorless and transparent thing. Not required. The portion through which the illumination light can be transmitted may be a space such as a through hole or a colored transparent object.

  (Modification 6) In the embodiment described above, the mother diaphragm 10A in which the diaphragm 10 constituting the droplet discharge head 20 is partitioned and the tape circuit board 310A in which the flexible circuit board 310 is continuously formed, Although described as the inspection object, the inspection object is not limited to these objects. Any inspection object that can be inspected using transmitted light can be suitably inspected using the appearance inspection apparatus and inspection method described above. In particular, any inspection object that can be inspected using transmitted light and reflected light of illumination light can be suitably inspected using the appearance inspection apparatus and inspection method described above.

  (Modification 7) In the embodiment, the color filter is fixed to the reflection panel 46. The reflection panel 46 is fixed to the fixed rotation frame 54a through the reflection panel support mechanism 47 so as to be movable up and down. However, the color filter and the reflection panel 46 are configured such that the color filter is detachable from the reflection panel 46, or the reflection panel 46 is configured to be detachable from the fixed rotation frame 54a or the reflection panel support mechanism 47. May be. By configuring the color filter so as to be detachable with respect to the reflecting means, and configuring the reflecting means so as to be detachable from the inspection apparatus, the color of the reflected light (transmitted reflected light) can be easily changed. be able to.

  (Modification 8) In the embodiment described above, the ring illumination 44 is supported by the ring illumination support mechanism 45 so as to be movable in the optical axis direction of the camera 42 and held at an arbitrary position. . However, it is not essential that the illumination unit is movable with respect to the imaging unit. Regardless of the positional relationship between the illumination means and the imaging means, the illuminance of the inspection object can be adjusted by adjusting the distance between the illumination means and the inspection object.

  (Modification 9) In the above embodiment, the reflection panel 46 is supported by the reflection panel support mechanism 47 so as to be movable in the Z-axis direction and to be held at an arbitrary position. The ring illumination 44 is supported by the ring illumination support mechanism 45 so as to be movable in the optical axis direction of the camera 42 and to be held at an arbitrary position with respect to the camera 42. However, it is not essential to support the illumination means and the reflection means so as to be movable. The illumination unit and the reflection unit may be fixed. By fixing, the inspection apparatus can be simplified as compared with the case where a support unit capable of moving the illumination unit and the reflection unit is provided.

  DESCRIPTION OF SYMBOLS 10 ... Diaphragm, 10A ... Mother diaphragm, 10a ... Diaphragm partition, 11 ... Film, 12a ... Frame plate, 12b ... Island plate, 12c ... Peripheral plate, 20 ... Droplet discharge head, L21 ... Illumination light, L22 ... Reflected light, L23 ... transmitted light, 33 ... space portion, 40 ... appearance inspection device, 41 ... imaging device, 42 ... camera, 43 ... illuminating device, 44 ... ring illumination, 44a ... illuminating element, 44b ... ring frame, 45 ... Ring illumination support mechanism 46... Reflection panel 46 a. Reflection surface 47. Reflection panel support mechanism 51. Substrate moving mechanism 55... Stage 55 a Stage panel 55 c Stage opening 61. ... Control unit, 111, 114 ... Scratches, 112, 115 ... Scratches, 117, 118 ... Deposits, 140 ... Appearance inspection device, 146 ... Reflection panel, 146a ... Reflection surface, DESCRIPTION OF SYMBOLS 50 ... Holding jig, 150a ... Upper jig frame, 150b ... Lower jig frame, 155 ... Stage, 155a ... Stage opening, L211 ... Primary transmitted light, L221 ... Secondary transmitted light, 240 ... Visual inspection apparatus, 250 ... Holding jig, 250a ... Upper jig frame, 250b ... Lower jig frame, 251a ... Jig opening, 251b ... Jig opening, 310 ... Flexible circuit board, 310A ... Tape circuit board, 340 ... Visual inspection apparatus, 350 ... Reel device, 350a ... supply reel, 350b ... take-up reel.

Claims (15)

An inspection apparatus for performing an inspection including an inspection of at least a contour shape of an inspection object,
Object holding means for holding the inspection object;
Imaging means disposed at a position facing the inspection object held by the object holding means;
Illumination means arranged to be able to irradiate illumination light from a first direction on the same side as the imaging means to the inspection object held in the object holding means,
The inspection object in the state held by the object holding means is disposed on the opposite side to the first direction with respect to the inspection object held in the object holding means, and the inspection object held in the object holding means is An inspection apparatus comprising: a reflection unit configured to reflect the illumination light transmitted through a portion that is out of position or through the portion of the inspection object through which the illumination light can be transmitted, in the direction of the inspection object. .   The inspection apparatus according to claim 1, wherein the illumination light is white light, and the reflection unit reflects light having a partial wavelength in the illumination light.   The inspection apparatus according to claim 2, wherein the reflection unit reflects light having a wavelength at which a color of light reflected by the reflection unit is different from a color of the inspection object.   The distance between the reflecting means and the inspection object held by the object holding means is longer than the depth of field of the imaging means in the optical axis direction of the imaging means. 4. The inspection apparatus according to any one of items 1 to 3.   5. The inspection apparatus according to claim 1, wherein at least one of the illumination unit and the reflection unit is supported so as to be movable in an optical axis direction of the imaging unit.   The object holding means includes a mounting part through which the illumination light can be transmitted, and the planar shape of the mounting part is larger than the planar shape capable of supporting the entire inspection object. Item 6. The inspection device according to any one of Items 1 to 5.   The inspection apparatus according to claim 6, wherein the illumination light is white light, and the placement unit transmits light having a part of the wavelength of the illumination light.   The inspection apparatus according to claim 7, wherein the placement section transmits light having a wavelength at which a color of light transmitted through the placement section is different from a color of the inspection object.   The inspection apparatus according to any one of claims 6 to 8, wherein a thickness of the mounting portion is thicker than a depth of field of the imaging unit in an optical axis direction of the imaging unit. An inspection method for inspecting at least a contour shape of an inspection object,
Illumination light irradiation step for irradiating illumination light in a range including the inspection object and the inspection object;
A reflection step of reflecting transmitted light that is a part of the illumination light that is transmitted from a position that is out of the inspection object or a part through which the illumination light formed on the inspection object is transmitted;
In the reflected transmitted light, a position where the reflected light is again removed from the inspection object or a portion of the inspection object that is transmitted through the portion through which the illumination light can pass, and the illumination light is applied to the inspection object. An inspection method comprising: an imaging step of imaging the inspection object by detecting reflected illumination reflected light.   The inspection method according to claim 10, wherein the illumination light irradiated in the illumination light irradiation step is white light, and in the reflection step, light having a part of wavelengths in the illumination light is reflected. .   The inspection method according to claim 10 or 11, wherein, in the reflection step, light having a wavelength at which a color of the transmitted reflected light is different from a color of the inspection object is reflected. The mounting unit is provided with a mounting unit through which the illumination light can be transmitted, and the planar shape of the mounting unit is larger than the planar shape capable of supporting the entire inspection target, and the mounting unit includes the mounting unit. It further has an inspection object holding process for placing and holding the inspection object,
In the illumination light irradiation step, from the side on which the inspection object is held with respect to the object holding means, the inspection light and the placement unit are irradiated with the illumination light,
In the reflection step, the transmitted light that has passed through the mounting portion is reflected,
In the imaging step, the transmitted reflection reflected by the transmitted light that has been transmitted again through a position that is out of the mounting portion and the inspection object, or a portion that is formed on the inspection object and is capable of transmitting the illumination light. The inspection method according to claim 10, wherein the inspection object is imaged by detecting light and the illumination reflected light.   The inspection method according to claim 13, wherein the illumination light irradiated in the illumination light irradiation step is white light, and the placement unit transmits light having a part of the wavelength of the illumination light. .   The inspection method according to claim 14, wherein the placement unit transmits light having a wavelength at which a color of light transmitted through the placement unit is different from a color of the inspection object.

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