JP2011159931A - Electromagnetic coil, electron lens, and electromagnetic valve - Google Patents

Abstract

An object of the present invention is to provide a technique for increasing the space factor of a conductor of an electromagnetic coil.
The present invention provides an electromagnetic coil. The electromagnetic coil 9 includes a strip-shaped conductor 20s that is a strip-shaped conductor that is wound a plurality of times so as to surround a predetermined space, and an insulating adhesive layer 50s that bonds the mutually facing surfaces of the wound strip-shaped conductor 20s. The adhesive layer 50s includes an insulating granular body that secures a distance between the opposing surfaces of the strip-shaped conductor 20s, and an insulating adhesive material. Since this adhesive layer can be insulated with the insulating granular material that secures the distance between the opposing surfaces of the strip-shaped conductor and the insulating adhesive material, the insulating sheet used in the conventional configuration is required. do not do. Thereby, the insulation defect by the tear of an insulating sheet can be avoided.
[Selection] Figure 1

Description

  The present invention relates to an electromagnetic coil used in devices such as an electromagnetic solenoid, an electromagnetic valve, an X-ray generator, an electron microscope, and an ion microscope.

  2. Description of the Related Art Conventionally, a coil manufactured by winding a winding having a circular cross section with an insulating coated conductor has been widespread. On the other hand, the coil manufactured by winding the conductor of the rectangular cross section also called a film-like coil is proposed. A film-like coil is, for example, a coil that is manufactured by alternately winding a rectangular cross-section conductor and an insulating sheet and winding them in a wound shape, and has the advantage that a high mounting cross-sectional area (space factor) can be realized. (Patent Documents 1 and 2).

  Such an advantage occurs because a winding having a circular cross section generates a gap that cannot be avoided due to the circular cross sectional shape, whereas a conductor having a rectangular cross section does not generate such a gap. The space factor can be further increased by thinning the insulating sheet.

Showa 59-231804 JP-A-9-149620

  However, if the insulating sheet is made thin, the insulating sheet is torn during winding, and the quality of the coil cannot be ensured. This has been a factor in limiting the space factor of the film-like coil. That is, there has been a problem of trade-off between the ease of ensuring the coil quality and the space factor.

  The present invention was created to solve at least a part of the above-described conventional problems, and an object thereof is to provide a technique for increasing the space factor of a conductor of an electromagnetic coil.

  The first means includes a strip-shaped conductor that is a strip-shaped conductor that is wound a plurality of times so as to surround a predetermined space portion, and an insulating adhesive layer that bonds the mutually facing surfaces of the wound strip-shaped conductor. Prepare. The said adhesive layer is an electromagnetic coil characterized by including the insulating granular material which ensures the space | interval of the said opposing surfaces of the said strip | belt-shaped conductor, and an insulating adhesive material.

  In the first means, the mutually facing surfaces of the wound belt-like conductor are bonded to each other. Since this adhesive layer can be insulated with the insulating granular material that secures the distance between the opposing surfaces of the strip-shaped conductor and the insulating adhesive material, the insulating sheet used in the conventional configuration is required. do not do. Thereby, the insulation defect by the tear of an insulating sheet can be avoided. The mutually opposing surfaces of the strip-shaped conductors are secured with an insulating granular material that secures the spacing between the facing surfaces, and insulation can be secured by filling the spacing with an insulating adhesive material. it can. Furthermore, since an integrated structure in which the strip conductors are fixed to each other is formed, a bobbin for restraining the shape of the wound electric wire is not required. Thereby, there is also an advantage that the space factor can be further improved by eliminating the volume of the bobbin.

  As the insulating adhesive material, for example, a synthetic resin such as an acrylic resin adhesive or an epoxy resin adhesive can be used. In particular, acrylic resin adhesives and epoxy resin adhesives are excellent in structural strength and electrical insulation. However, the acrylic resin has a characteristic that the effect speed is faster than that of the epoxy resin and the tensile shear strength is excellent. On the other hand, the epoxy resin has a characteristic that it is excellent in electrical insulation as compared with the acrylic resin.

  This electromagnetic coil has a feature that it can be cut against the conventional technical common sense. The first reason is that disconnection occurs when cutting is performed on a coil wound with a normal electric wire. However, since this electromagnetic coil is configured by winding a strip-shaped conductor, conduction can be maintained even if a portion of the strip-shaped conductor is cut.

  The second reason is that if a cutting process is performed on a coil wound with a normal electric wire or a strip-shaped conductor, the conductor is easily cut and unwound. That is, in the conventional coil, since the shape of the coil is maintained by applying a tensile load to both ends of the conductor, when the cutting is performed, the conductor is easily cut due to stress concentration or the like. However, since this electromagnetic coil has an integral structure in which the strip conductors are fixed to each other by bonding, cutting of the strip conductor can be avoided.

  The second means is the first means, wherein both the adhesive material and the granular material are made of synthetic resin. In this way, after the adhesive material is cured, workability such as cutting of the electromagnetic coil can be improved as compared with, for example, glass beads. For the granular material, it is preferable to use a synthetic resin material such as polyethylene, polyvinyl chloride, polystyrene, or polypropylene.

  The third means is the first or second means, wherein the granular material has a spherical shape. Since a sphere having a spherical shape can be easily manufactured with a high-precision diameter, the thickness accuracy of the adhesive layer can be easily improved by accurately regulating the interval between the strip-shaped conductors. Furthermore, if it has the shape of a sphere, it rolls at the time of manufacture, the overlap is smoothly eliminated, and an unintended increase in the thickness of the adhesive layer due to the overlap of the granular material is suppressed.

  The fourth means is any one of the first to third means, wherein the space portion has an open end, and includes a cooling portion that is in contact with an end portion of the strip-shaped conductor on the open end side. . In this way, in the electromagnetic coil, it is possible to realize efficient cooling by realizing a direct heat transfer path to the entire strip conductor without going through an adhesive layer having generally low thermal conductivity. it can.

  Such a heat transfer path has an advantage that the transient response time until the temperature distribution is stabilized can be shortened, and the time until the start of stable operation can be shortened. The end part may be an end part that is exposed in the direction of the winding axis of the strip conductor, for example, and includes an inclined surface that also faces the winding axis of the strip conductor.

  A fifth means is any one of the first to fourth means, wherein the electromagnetic coil is formed with a heat radiating hole extending in a direction in which the electromagnetic coils are laminated. The heat radiating hole is opened at the outermost periphery of the strip-shaped conductor. Since the heat radiating hole has a high degree of freedom in the formation position, a heat design with a high degree of freedom can be realized.

  Furthermore, the method of using the heat radiating holes is not limited to cooling by heat pipes, but heat may be exhausted by passing a heat medium through the heat radiating holes. As the heat medium, a fluid such as a fluorine-based inert liquid or a gas such as air having high thermal and chemical stability such as Fluorinert (trademark) or Galden (trademark) can be used.

  The sixth means is an electron lens that focuses the electron beam on a target that generates X-rays. The present electron lens includes a magnetic circuit that forms a magnetic field for focusing the electron beam on the target by passing the magnetic flux through the electromagnetic coil of any one of first to fifth means for generating magnetic flux. And comprising.

  The sixth means can provide a degree of design freedom using an electromagnetic coil that can effectively use the space inside the magnetic circuit. In particular, in combination with the fourth means or the fifth means, for an electron gun that requires precise control to accurately focus an electron beam (electron beam) on a target in order to efficiently generate radiation. Thus, the time until the start of stable operation can be shortened. This is because this configuration realizes efficient cooling and enables rapid control with stable electromagnetic characteristics by rapidly stabilizing the temperature distribution.

  The seventh means is an electromagnetic valve for a semiconductor manufacturing apparatus. This electromagnetic valve includes an opening / closing valve having a magnetic material, and any one of the first to fourth electromagnetic coils for operating the opening / closing valve by changing a magnetic field.

  According to the seventh means, the mounting sectional area (space factor) can be increased and a high driving force can be realized with a small coil. As a result, the air operated air operated valve, which has realized a high driving force by air operation, can be replaced with a non-air operated electromagnetic valve.

  In other words, electromagnetic valves that are not pneumatically operated can be applied in the application area of electromagnetic valves that could only be dealt with by pneumatically operated electromagnetic valves. The air operated valve is a valve that operates by operating compressed air supplied from the outside with an electropneumatic control valve (electromagnetic valve), and has substantially two valves. Therefore, if the air operated valve is replaced with this solenoid valve, the number of valves is substantially reduced.

  As a result, the size and number of solenoid valves can be reduced, so that a gas supply system unit having, for example, a solenoid valve, a flow rate controller, and a gas regulator can be miniaturized. As a result, the semiconductor manufacturing apparatus can be arranged in the immediate vicinity of the process chamber, so that the number of piping can be reduced or shortened, and the degree of design freedom for simplifying and improving the configuration of the semiconductor device can be achieved. Can be provided.

The perspective view which shows the outline | summary of a structure of the electromagnetic coils 1 and 2 of 1st Embodiment. The perspective view which shows the mounting state of the electromagnetic coil 3. FIG. The top view which looked at the 1st electromagnetic coil 1 from the direction of the winding axis. Sectional drawing which shows the cross section of the mounting form of the coil-shaped electromagnetic coil 40a as a coil 40 and a comparative example. The schematic diagram which shows the manufacturing method of the electromagnetic coil 40. FIG. Sectional drawing which shows the structure of the X-ray generator 7 of 2nd Embodiment. Sectional drawing which shows the electromagnetic coil 60 of the X-ray generator 7. FIG. The perspective view which shows the external appearance of the heat pipe of the X-ray generator. Sectional drawing which shows the structure of the X-ray generator 7a of 3rd Embodiment. The perspective view which shows the external appearance of the electromagnetic coil 60a which the X-ray generator 7a has. Sectional drawing which shows the structure of the X-ray generator 7b of 4th Embodiment. The perspective view which shows the external appearance of the electromagnetic coil 60b which the X-ray generator 7b has. The flowchart which shows each process of the manufacturing method of the electromagnetic coil 60b. The schematic diagram which shows the mode of the cross section of the board | plate material M in which plate | board thickness is not uniform, and a rolling process. Sectional drawing which shows the temporary winding Mb manufactured by the temporary winding plastic process. Sectional drawing which shows winding Mc produced by hardening of adhesive agent, and a cut surface. Sectional drawing which shows the electromagnetic coil 60b manufactured by cutting. The perspective view which shows the external appearance of the solenoid valve unit 5 of 5th embodiment. FIG. 3 is an exploded perspective view showing each component of the solenoid valve 100. Sectional drawing which shows the movable iron core 124 and the urging | biasing spring 125. FIG. The top view which shows the urging | biasing spring 125. FIG. Sectional drawing which shows the state with the flow path of the solenoid valve 100 in a closed state. Sectional drawing which shows the state with the flow path of the solenoid valve 100 in an open state. Sectional drawing which shows the state which cut | disconnected the electromagnetic coil 110 and the magnetic circuit 120 by the plane perpendicular | vertical to a winding axis. The perspective view which shows the rectangular electromagnetic coil 9 of a modification. The perspective view which shows the connection state of 30 s of connection plates of a modification. The perspective view which shows the electrical connection between positive electrode terminal Ts + of the modification, and the strip | belt-shaped conductor 10s, and the electrical connection between negative electrode terminal Ts- and the strip | belt-shaped conductor 20s.

  Hereinafter, an embodiment embodying the present invention will be described with reference to the drawings.

(A. Configuration of electromagnetic coil of the first embodiment)
FIG. 1 is a perspective view showing an outline of the configuration of the electromagnetic coils 1 and 2 according to the first embodiment. FIG. 2 is a perspective view showing a mounting state of the electromagnetic coil 3 of the embodiment. The electromagnetic coil according to the embodiment includes a first electromagnetic coil 1 and a second electromagnetic coil 2. The first electromagnetic coil 1 and the second electromagnetic coil 2 have the same configuration, and can be manufactured, for example, by cutting the same coil in the axial direction. The electromagnetic coil 3 of the embodiment is manufactured by reversing the first electromagnetic coil 1 and the second electromagnetic coil 2 and joining them through an insulator (not shown). The electromagnetic coil 3 shows the mounting example of the electromagnetic coil of FIG. 1, and is equipped with a connection plate 30, a positive terminal T +, and a negative terminal T-.

  The 1st electromagnetic coil 1 is comprised by winding the strip | belt-shaped conductor 10 in multiple turns in one direction. The strip-shaped conductor 10 includes an electrode connection portion 11, a start end surface 12, a termination surface 19, an outer end surface 13, an inner end surface 15, a pair of axial end portions 14, and electrode connection portions 16 and 17. ing. The electrode connection part 11 is electrically connected to the positive electrode side of the DC power supply 90. The start end face 12 is an end face on the positive electrode side of the strip conductor 10. The end face 19 is an end face on the negative electrode side of the strip conductor 10. The outer end face 13 faces outward in a state where the strip-like conductor 10 is wound in one direction. The inner end face 15 faces inward in a state where the strip conductor 10 is wound in one direction. The pair of axial end portions 14 face the winding direction of the strip conductor 10. The electrode connecting portion 17 is electrically connected to the negative electrode side.

  The strip conductor 10 has the following configuration in a state before being wound. The outer end face 13 and the inner end face 15 face each other (in parallel with each other in the present embodiment). The pair of axial end portions 14 oppose each other (in parallel to each other in the present embodiment). The start end face 12 and the end face 19 face each other (in the present embodiment, face each other in parallel). The outer end surface 13 and the inner end surface 15 facing each other are connected by a pair of axial end portions 14, a start end surface 12, and a termination surface 19.

  The strip-shaped conductor 10 has the following configuration in the state after being wound. When the strip-shaped conductor 10 is wound, the outer end face 13 and the inner end face 15 face each other, and are fixed and insulated by an adhesive layer. The strip conductor 10 has a space surrounded by the winding of the strip conductor 10. The belt-like conductor 10 has open ends at both ends in the direction of the winding axis.

  The second electromagnetic coil 2 includes a strip-shaped conductor 20. The strip-shaped conductor 20 includes a start end surface 29, a termination surface 22, an outer end surface 23, an inner end surface 25, a pair of axial end portions 24, electrode connection portions 26 and 27, and the negative electrode side of the DC power supply 90. The electrode connection part 21 is connected. The second electromagnetic coil 2 has the same configuration as the first electromagnetic coil 1.

  However, the second electromagnetic coil 2 has the following two differences as compared with the first electromagnetic coil 1. The first difference is that the winding directions of the strip conductor 10 are opposite to each other in the first electromagnetic coil 1 and the second electromagnetic coil 2. The second difference is that the current directions of the first electromagnetic coil 1 and the second electromagnetic coil 2 are opposite. That is, the current flows through the first electromagnetic coil 1 from the outside to the inside of the strip-shaped conductor 10, while the current flows through the second electromagnetic coil 1 from the inside to the outside of the strip-shaped conductor 10. As a result, since the direction of winding and the direction of current are both opposite, they are canceled out and as a result, magnetic fluxes in the same direction are generated.

  Thus, the 1st electromagnetic coil 1 and the 2nd electromagnetic coil 2 can generate a magnetic flux so that it may mutually add in the same axial direction. Specifically, the first electromagnetic coil 1 and the second electromagnetic coil 2 generate a magnetic field having an N pole and an S pole in the same direction as illustrated. This magnetic field is generated by a DC current supplied from the DC power supply 90.

  The direct current path is as follows. The positive electrode of the DC power supply 90 is connected to the electrode connection portion 11 of the strip conductor 10 included in the first electromagnetic coil 1. The current supplied to the electrode connecting portion 11 flows through the strip conductor 10 and reaches the two electrode connecting portions 16 and 17. Of the two electrode connection portions 16 and 17, the electrode connection portion 17 close to the second electromagnetic coil 2 is electrically connected to the electrode connection portion 26 of the second electromagnetic coil 2 by the connection plate 30. The current supplied to the electrode connection portion 26 flows through the strip conductor 20 and reaches the electrode connection portion 21. The electrode connection unit 21 is connected to the negative electrode of the DC power supply 90 and feeds back current to the negative electrode of the DC power supply 90.

  Thus, the electromagnetic coil 3 of the embodiment realizes power supply from the outside (outer surface side) of the electromagnetic coil 3 and two electromagnetic coil elements having the same configuration (the first electromagnetic coil 1 and the second electromagnetic coil 2). Are electrically connected to each other on the inner side of the electromagnetic coil 2). Thereby, the mutually added magnetic fields can be generated. The number of electromagnetic coil elements may be an even number. Here, the outer side means the side opposite to the winding axis in the electromagnetic coil 3, and the inner side means the side of the winding axis in the electromagnetic coil 3.

  FIG. 3 is a plan view of the first electromagnetic coil 1 viewed from the direction of the winding axis. FIG. 3 shows the axial ends 14a, 14b of the two layers extracted from the wound strip conductor 10. FIG. Each of the axial end portions 14a and 14b constitutes a part of the axial end portion 14 described above. Each of the two axial end portions 14 a and 14 b is bonded to each other by an adhesive layer 50 including an insulating sphere 51 and a cured adhesive 52. Thus, the first electromagnetic coil 1 has an integral structure as a hybrid structure in which the strip conductor 10 and the adhesive layer 50 are fixed to each other.

  The insulating sphere 51 is used to regulate the mutual interval between the layers of the wound belt-like conductor 10. As a result, the insulating adhesive 52 is buried between the layers of the belt-like conductor 10 at intervals regulated by the insulating spheres 51, so that insulation is ensured without contact with each other. The insulating sphere 51 can also improve the uniformity of the shape of the electromagnetic coil 1 by making the distance between the layers of the strip conductor 10 uniform. Since the insulating sphere 51 can easily manufacture a sphere having a small diameter as compared with the thickness of the insulating film, there is an advantage that the space factor can be further increased by making the adhesive layer 50 thinner.

  In this embodiment, the insulating sphere 51 is a sphere made of synthetic resin. The reason why the synthetic resin is used is that workability such as cutting of the electromagnetic coil can be improved after the adhesive material is cured. For the insulating sphere, a synthetic resin material such as polyethylene, polyvinyl chloride, polystyrene, or polypropylene is preferable.

  FIG. 4 is a cross-sectional view showing a cross section of a mounting form of the electromagnetic coil 40 of the embodiment and a film-like electromagnetic coil 40a as a comparative example. The electromagnetic coil 40 includes a strip-shaped conductor 41 through which a current flows, an adhesive layer 42 that bonds the strip-shaped conductor 41 to each other and insulates the layers of the strip-shaped conductor 41 from each other, a non-magnetic winding core 44, and a ferromagnetic material. And an iron core 43.

  The winding core 44 has a hole 44s1 for storing the ferromagnetic iron core 43 therein, and an outer diameter 44s2 to which the strip conductor 61 is bonded. The non-magnetic winding core 44 has a cylindrical shape with a thickness F1. The thickness F <b> 1 only needs to be thick enough to function as a core around which the strip-shaped conductor 41 is wound in a state where a winding shaft (described later) is housed therein, and almost no mechanical strength is required. Is possible.

  On the other hand, the film-like electromagnetic coil 40a is an electromagnetic coil manufactured by winding the belt-like conductor 41a and the insulating sheet 42a on each other and winding them in a wound shape. In the film-like electromagnetic coil 40a, the layers of the strip-shaped conductor 41a are not bonded to each other, and the strip-shaped conductor 41a and the insulating sheet 42a may slip each other in the direction of the winding axis. Different from the coil 40.

  The bobbin 44a has a pair of flanges 44f at both ends for preventing such a gap between the strip-shaped conductor 41a and the insulating sheet 42a. The thickness of the bobbin 44a has a relatively thick thickness F1a in order to mechanically support the flange 44f against the mutual displacement. As a result, the bobbin 44 a requires a significantly larger volume than the winding core 44.

  As described above, the electromagnetic coil 40 according to the embodiment has an integral structure as a hybrid structure in which the belt-like conductor 10 and the adhesive layer 50 are fixed to each other. Therefore, the shape of the electromagnetic coil 40 such as the bobbin 44a. No mechanical fixing parts are required. Thereby, the electromagnetic coil 40 of embodiment can implement | achieve a higher space factor than the film-like electromagnetic coil 40a in which the strip | belt-shaped conductor 41 and the contact bonding layer 42 are not mutually fixed.

  Specifically, with respect to the height L that can be used in the winding axis direction, the electromagnetic coil 40 of the embodiment can use all of the width of the height L for housing the strip-shaped conductor 41. The film-like electromagnetic coil 40a can use only the width corresponding to the thickness obtained by subtracting the thickness of the pair of flanges 44f. Due to such a difference, the electromagnetic coil 40 of the embodiment can realize a higher space factor than the film-like electromagnetic coil 40a.

(B. Manufacturing method of electromagnetic coil of embodiment)
Drawing 5 is a mimetic diagram showing the manufacturing method of electromagnetic coil 40 of an embodiment. The electromagnetic coil 40 is manufactured by forming the adhesive layer 42 with an adhesive while winding the strip conductor 41 in the direction R with the winding core 44 as the central axis. The adhesive is replenished at an adhesive replenishment position (arrow position in the figure) by, for example, manual work or an automatic machine (robot or the like).

  According to the inventor's experiment, by properly adjusting the viscosity coefficient of the adhesive 42p before curing and the tensile load T at the time of winding the strip conductor 41, the distance between the layers of the strip conductor 41 is insulative. It has been found that it can approximately match the sphere 42b. The interval between the layers of the strip conductor 41 means the thickness of the adhesive layer 42. The band-shaped conductor 41 may be attached to the winding core 44, for example, by previously bonding the starting end of the band-shaped conductor 41 separately.

  As the insulating adhesive material, for example, a synthetic resin such as an acrylic resin adhesive or an epoxy resin adhesive can be used. In particular, acrylic resin adhesives and epoxy resin adhesives are excellent in structural strength and electrical insulation. However, the acrylic resin has a characteristic that the effect speed is faster than that of the epoxy resin and the tensile shear strength is excellent. The tensile shear strength means the strength when the bonded surface is broken by a load in the tensile shear direction. On the other hand, the epoxy resin has a characteristic that it is excellent in electrical insulation as compared with the acrylic resin.

  Epoxy resins can exhibit various properties in combination with various curing agents. As the curing agent, for example, an aliphatic polyamine is preferably used in order to make the properties of the adhesive material liquid. Aliphatic polyamines include types such as chain aliphatic polyamines, cycloaliphatic polyamines, and aliphatic aromatic amines, and there are various types of curing agents for each type. Other adhesives such as radiation curable adhesives that can easily concentrate energy and do not require heating of the adherend can also be used. The radiation is preferably transmitted through the strip conductor 10 such as X-rays or gamma rays.

  The curing agent for the acrylic resin-based adhesive and the epoxy resin-based adhesive can be selected from the viewpoint of properties such as curing temperature, adaptability to lamination, pot life, and heat distortion temperature. The curing temperature is preferably curing at room temperature, and it is preferable not to generate excessive heat during curing. The pot life means the time until the viscosity and the state cannot be used after the curing agent is mixed with the epoxy resin, and it is preferable to consider according to the working time of the winding process. The heat distortion temperature is a temperature at which the elastic modulus of the resin rapidly decreases after curing, and is considered according to the operating temperature of the electromagnetic coil.

  When the winding of the belt-like conductor 41 is completed, the worker is allowed to stand and cure until the adhesive is cured. The function confirmation test of the electromagnetic coil 40 can be confirmed, for example, by checking whether the impedance and DC resistance value are within a preset range by energization. Furthermore, the surface temperature distribution during energization of the electromagnetic coil 40 can be confirmed with an infrared camera to confirm that there is no defect.

(C. Configuration of X-ray Generator of Second Embodiment)
FIG. 6 is a cross-sectional view showing the configuration of the X-ray generator 7 of the second embodiment. FIG. 7 is a cross-sectional view showing the electromagnetic coil 60 of the X-ray generator of the embodiment. The X-ray generator 7 includes an aperture member 78, a target 71, magnetic circuits 73 to 77, an electromagnetic coil 60, and four heat pipes 81 to 84. The target 71 can generate X-rays in response to an electron beam collision. The magnetic circuits 73 to 77 generate a magnetic field that functions as a magnetic field type electron lens for focusing the electron beam. The electromagnetic coil 60 can supply magnetic flux to the magnetic circuits 73 to 77. The four heat pipes 81 to 84 cool the electromagnetic coil 60 at various places. The magnetic type electron lens is also simply called an electron lens.

  The aperture member 78 is a member made of a nonmagnetic material such as stainless steel, brass, or copper, and plays a role of cutting unnecessary peripheral portions of the electron beam B. The target 71 has an X-ray emission plate 71a made of beryllium having an extremely high X-ray transmittance, and a tungsten target 71b formed on the back side of the X-ray emission plate 71a. The tungsten target 71b can generate X-rays in response to an electron beam collision in a vacuum.

  The magnetic circuits 73 to 77 include an axial yoke 73, a rear end yoke 74, an outer peripheral yoke 75, a conical yoke 76, and a front end yoke 77, and are configured as a closed circuit through which magnetic flux passes. The axial yoke 73 is made of a ferromagnetic material that easily allows magnetic flux to pass therethrough, and has a cylindrical shape surrounding the electron beam passage path. The rear end yoke 74 has a disk shape in which a hole for allowing an electron beam to pass through is formed at the center. The outer yoke 75 has a cylindrical shape concentric with the axial yoke 73. The conical yoke 76 has a funnel shape with a smaller diameter as it approaches the direction of the target 71. The tip yoke 77 has a disk shape in which a hole for allowing an electron beam focused at the center to pass is formed. Each yoke can be manufactured using soft iron, pure iron, yoke, or the like as a material.

  An extremely strong magnetic field is generated between the axial yoke 73 and the tip yoke 77 because the magnetic flux is concentrated by disposing the nonmagnetic aperture member 78. The axial yoke 73 has an inclined surface 73s so as to have a small projected area in the direction of the tungsten target 71b, and a tip 73t is formed at the tip. The projected area means the area of the cross section of the axial center yoke 73 projected onto a plane perpendicular to the traveling direction of the electron beam. The inclined surface 73s is inclined in a direction approaching the electron beam side. Such a configuration has the function of concentrating the magnetic flux on the narrow tip 73t and strengthening the magnetic field. Thereby, an extremely strong magnetic field can be generated near the traveling position of the electron beam, and an efficient electron lens can be configured.

  As shown in FIGS. 6 and 7, the electromagnetic coil 60 has the following outer shape. The electromagnetic coil 60 has a cylindrical shape that is stored along a cylindrical cavity formed by the magnetic circuits 73 to 77. The electromagnetic coil 60 has a funnel-shaped inner inclined surface 99 along the conical shape of the inclined surface 73s formed therein, and a conical outer inclined surface 94 along the conical shape inside the conical yoke 76. Is formed. Since the electromagnetic coil 60 has such an inclined surface, the magnetic flux can be supplied by efficiently using the space near the position where the electron lens is formed in the vicinity of the aperture member 78.

  The electromagnetic coil 60 includes an axial end portion 91, a side end surface 92, axial end surfaces 93 and 95, an external inclined surface 94, an axial end portion 97, inner peripheral surfaces 98 a and 98, and an outer peripheral surface 96. And heat radiation holes 83f and 84f, and an internal inclined surface 99. The inner peripheral surface 98a has a smaller diameter than the inner peripheral surface 98 and is close to the electron beam passage position. Such a difference in inner diameter is realized by the inner inclined surface 99 having a shape along the inclined surface 73 s of the axial yoke 73. The axial direction end portions 91 have a planar shape, and the heat pipes 81 are in contact with each other. Thereby, in the magnetic circuits 73 to 77 that are required to generate a strong magnetic field in the vicinity of the focusing position of the electron beam, a configuration that enables effective cooling while using the internal space is realized. .

  The electromagnetic coil 60 further includes a side end surface 92 having a shape (cylindrical outer peripheral shape) along the inner shape of the conical yoke 76, planar end surfaces 93 and 95 having a planar shape, and an outer inclined surface 94 having a conical shape. And an outer peripheral surface 96 along the inner surface shape of the outer peripheral yoke 75. The side end face 92 has a concave shape for avoiding from the side of the fastening member S2 (direction perpendicular to the direction of the electron beam). The axial end surface 93 has a shape of an end surface (an end surface perpendicular to the direction of the electron beam) for avoiding the fastening member S2 in the axial direction. Such a shape can be easily realized, for example, by cutting using a lathe or a drilling machine. The axial end 97 has a planar shape, and the heat pipe 82 is in contact therewith. The axial end is also simply called the end.

  The electromagnetic coil 60 is further formed with heat radiation holes 83f and 84f. Heat pipes 83 and 84 are inserted into the heat radiation holes 83f and 84f. When inserting the heat pipes 83 and 84, it is preferable to apply heat transfer paste (not shown) to the heat pipes 83 and 84 in advance in consideration of manufacturing tolerances. The heat radiation holes 83f and 84f can be freely set in consideration of the temperature gradient when the electromagnetic coil 60 is energized and the positional relationship with the aperture member 78.

  The electromagnetic coil cannot be cut for the following two reasons in the conventional technical common sense. The first reason is that if a cutting process is performed on a coil wound with a normal electric wire, the coil is disconnected. However, since this electromagnetic coil is formed by winding a strip-shaped conductor, conduction is maintained even if a part of the strip-shaped conductor 10 is cut, and therefore, there is no disconnection.

  The second reason is that when a cutting process is performed on a coil around which an ordinary electric wire or strip-shaped conductor 10 is wound, the conductor is easily cut and unwound. That is, in the conventional coil, since the shape of the coil is maintained by applying a tensile load to both ends of the conductor, when the cutting is performed, the conductor is easily cut due to stress concentration or the like. However, since this electromagnetic coil has an integral structure as a hybrid structure in which the strip conductor 10 and the adhesive layer 50 are fixed to each other, no load is applied to the conductor alone and there is no fear of disconnection.

  The processing cross section of the electromagnetic coil 60 is processed so that the adhesive layer 62 protrudes from the strip conductor 61 by polishing as shown in the enlarged view A. As described above, the adhesive layer 62 protrudes by the polishing process according to the inventor's analysis because the elastic modulus of the adhesive layer 62 is smaller than that of the strip-shaped conductor 61. It is because is reduced.

  FIG. 8 is a perspective view showing an appearance of a heat pipe of the X-ray generator of the embodiment. The heat pipes 81 to 84 are heat pipes made of nonmagnetic aluminum. The heat pipes 81 and 82 are planar heat pipes, and can be manufactured by the technique disclosed in, for example, Japanese Patent Application Laid-Open No. 10-38484. The heat pipes 83 and 84 are well-known round bar heat pipes. Since the heat pipes 81 to 84 are made of non-magnetic aluminum, the electromagnetic coil 60 can be cooled with almost no influence on the magnetic field. The heat pipes 81 to 84 are preferably in a hollow state in which the medium flows even in a donut-shaped portion in contact with the electromagnetic coil 60.

  The X-ray generator 7 can be assembled as follows. First, the heat pipe 81 and the conical yoke 76 are fastened to the front end yoke 77 by the fastening member S2. Second, the electromagnetic coil 60 is mounted on the conical yoke 76 to which the tip end yoke 77 is fastened. Third, the aperture member 78 is attached to the axial yoke 73. Fourth, the shaft center yoke 73 on which the aperture member 78 is mounted is mounted on the inner peripheral surface 98 (see FIG. 7) of the electromagnetic coil 60. Fifth, the outer peripheral yoke 75 is fastened to the conical yoke 76 by the fastening member S1. Sixth, the heat pipe 82 is brought into contact with the electromagnetic coil 60. Sixth, the heat pipes 83 and 84 are inserted into the heat radiation holes 83f and 84f. Seventh, the rear end yoke 74 is fastened to the shaft center yoke 73 and the outer peripheral yoke 75 by the fastening member S1. The heat transfer paste (not shown) is preferably applied not only to the heat pipes 83 and 84 but also to the other heat pipes 81 and 82.

  Thus, the electromagnetic coil 60 has the axial end portions 91 and 97 and the heat radiation holes 83f and 84f facing the direction of the winding axis of the strip conductor 10 (the traveling direction of the electron beam B), and the axial end portion. Heat pipes 81 to 84 as cooling units are provided at positions in contact with 91 and 97 and the heat radiation holes 83f and 84f. Such a configuration realizes efficient cooling by realizing a direct heat transfer path to the entire strip conductor 10 without heat passing through the adhesive layer 50 in the electromagnetic coil 60. Because it can.

  Such a heat transfer path has an advantage that the transient response time until the temperature distribution is stabilized can be shortened, and the time until the start of stable operation can be shortened. The end part may be an end part that is exposed in the direction of the winding axis of the strip conductor, for example, and includes an inclined surface that also faces the winding axis of the strip conductor.

(D. Configuration of X-ray generator of third embodiment)
FIG. 9 is a cross-sectional view showing the configuration of the X-ray generator 7a of the third embodiment. The X-ray generator 7a has a conical external inclined surface 74s, and has a substantially conical shape as a whole. Thereby, the X-ray generator 7a can radiate X-rays in an oblique direction from a proximity position to the sample S to be measured (also referred to as oblique radiation in this specification). On the other hand, the configuration for generating the magnetic field is common to the X-ray generator 7 of the embodiment in the aperture member 78, the axial center yoke 73, the tip end portion 73t, and the inclined surface 73s.

  The X-ray generator 7a includes an aperture member 78, a target 71 that generates X-rays in response to an electron beam collision, and a magnetic circuit 73a that generates a magnetic field that functions as a magnetic field type electron lens for focusing the electron beam. 74a and an electromagnetic coil 60a for supplying magnetic flux to the magnetic circuits 73a and 74a. The magnetic circuit 74a has a conical inclined surface 74s in order to realize oblique radiation. The electromagnetic coil 60a has a conical outer shape along the inner shape 74si of the inclined surface 74s of the magnetic circuit 74a.

  The X-ray generator 7a has a conical heat pipe 85 that covers the conical outer shape of the electromagnetic coil 60a. A minute gap 74 c is provided between the internal shape 74 si of the inclined surface 74 s and the heat pipe 85. The gap 74c is provided to suppress magnetic disturbance caused by thermal deformation of the inclined surface 74s of the magnetic circuit 74a. The gap 74c may be left as a space, or may be filled at least partially with a synthetic resin having heat-insulating elasticity.

  Thermal deformation occurs due to heating by energization of the electromagnetic coil 60a. Heating the electromagnetic coil 60a causes thermal expansion of the electromagnetic coil 60a and thermal expansion of the magnetic circuit 74a due to heat transfer to the magnetic circuit 74a. The thermal expansion of the electromagnetic coil 60a causes deformation of the magnetic circuit 74a by applying a load to the magnetic circuit 74a. The thermal expansion of the magnetic circuit 74a itself causes deformation of the magnetic circuit 74a.

  Since the X-ray generator 7a generates a magnetic field type electron lens for focusing the electron beam on the target 71 in the vicinity of the aperture member 78, the disturbance of the magnetic field particularly in the vicinity of the target 71 becomes a problem. . In the conventional X-ray generator, since the magnetic field type electron lens is not stable in units of several hours from the start of energization, wasteful power is consumed until the X-ray can be used in a thermally stable state. . On the other hand, the X-ray generator 7a of the embodiment suppresses heat transfer from the electromagnetic coil 60a to the magnetic circuit 74a by the heat pipe 85 and also suppresses load transfer from the electromagnetic coil 60a to the magnetic circuit 74a by the gap. Can quickly become stable.

  Note that the gap 74c is not an essential component if, for example, the heat pipe 85 is an aluminum part that is significantly less rigid than the magnetic circuit 74a. This is because the heat pipe 85 can absorb deformation. Thus, in the present embodiment, the magnetic circuit 74a is isolated from the electromagnetic coil both in terms of heat and load.

  Moreover, since the volume of the heat pipe 85 and the gap 74c can be allocated by the volume of the bobbin which is no longer necessary as described above, the effect can be obtained even with a coil wound with a round wire instead of a film coil. However, this embodiment can have a remarkable effect coupled with the heat conduction path of the electromagnetic coil 60a as a film-like coil and the characteristics and arrangement of the heat pipe.

  FIG. 10 is a perspective view showing an external appearance of an electromagnetic coil 60a included in the modified X-ray generator 7a. The electromagnetic coil 60a has a configuration in which strip-shaped conductors 60a1 and adhesive layers 60a2 in which an adhesive is cured are alternately wound in a cylindrical shape. The electromagnetic coil 60a can be manufactured by, for example, performing cutting, polishing, and insulating film forming processing after manufacturing the electromagnetic coil 40 (see FIG. 4). The function confirmation test of the electromagnetic coil 60 a can be executed in the same manner as the electromagnetic coil 40.

(E. Configuration of X-ray Generator of Fourth Embodiment)
FIG. 11 is a cross-sectional view showing the configuration of the X-ray generator 7b of the fourth embodiment. The X-ray generator 7b has a conical external inclined surface 74sb, and is common to the configuration of the X-ray generator 7a of the third embodiment in that it has a substantially conical shape as a whole. The X-ray generator 7b of the fourth embodiment is different from the X-ray generator 7a of the third embodiment in that the strip conductor 60b1 of the electromagnetic coil 60b is wound in a conical shape in a direction intersecting the winding axis direction. To do.

  FIG. 12 is a perspective view showing an appearance of an electromagnetic coil 60b included in the X-ray generator 7b of the fourth embodiment. The electromagnetic coil 60b is formed by laminating a strip-shaped conductor 60b1 in a direction perpendicular to the circumferential direction as a direction intersecting the circumferential direction of the winding direction. Between the layers of the strip-shaped conductor 60b1, the adhesive layer 60b2 having the cured adhesive is stacked and alternately wound so as to be stacked in the winding axis direction.

  FIG. 13 is a flowchart showing each step of the method for manufacturing the electromagnetic coil 60b. FIG. 14 is a schematic diagram showing a cross-section of the plate material M having a non-uniform thickness and a rolling process. In step S100, the operator manufactures (preparates) a plate material M having a non-uniform thickness. The plate material M can be manufactured, for example, by performing annealing (annealing) after performing a non-uniform rolling operation in the width direction.

  In step S200, an operator performs a rolling process. The rolling step is a step of performing a uniform rolling process (plastic working) on the plate material M. Since the plate material M is rolled so that the non-uniform plate thickness is uniform, the spiral material Ma wound in the width direction (arrow Rw) is produced by plastic deformation. The width direction is also called edgewise.

  In step S300, the operator executes a temporary winding plastic process. In the temporary winding plastic step, the spiral material Ma is laminated in the winding axis direction without applying an adhesive. Thereby, temporary winding Mb (refer to Drawing 15) is manufactured. Since the temporary winding Mb undergoes plastic deformation and elastic deformation when laminated in the winding axis direction, the temporary winding Mb is left in a state where the outer shape is fixed. The outer shape of the temporary winding Mb is uneven because the lamination direction is inclined with respect to the winding axis direction. In FIG. 15, hatching is omitted.

  In step S400, the worker performs a heat treatment process. In the heat treatment step, annealing is performed to eliminate metal transition and elastic deformation caused by plastic working. This makes it possible to prevent springback caused by step plastic deformation. In step S500, the operator executes a winding process. The winding step is a step of laminating in the winding axis direction using an adhesive in the same manner as the temporary winding plastic step. Thereafter, the winding Mc (see FIG. 16) is manufactured by curing the adhesive (step S600).

  In step S700, the operator executes a cutting process. The cutting process is a process of cutting the winding Mc at the four cut surfaces C1 to C4. The two cut surfaces C1 and C2 are surfaces perpendicular to the winding axis direction. The cut surface C3 is a cylindrical cut inner surface formed by hollowing out the inside of the winding Mc with a boring machine. The cut surface C4 is a cylindrical cut outer surface formed by cutting the outer periphery of the winding Mc with a lathe. Thereby, the above-mentioned unevenness | corrugation is scraped off and a smooth external shape is obtained.

  16 and 17 are cross-sectional views, but hatching is omitted for easy understanding. Then, the electromagnetic coil 60b (refer FIG. 12, FIG. 17) is manufactured by performing a membrane | film | coat formation process (step S800) with respect to the cut surface C1-C4 (cut surface).

  Thus, the present inventor succeeded in realizing the manufacture of an electromagnetic coil having a winding direction that intersects the circumferential direction. Thereby, the rapid change of the cross-sectional area of each layer of the electromagnetic coil 60b can be suppressed, that is, the region where the cross-sectional area is suddenly reduced can be excluded, and partial heat generation during energization can be suppressed.

(F. Configuration of solenoid valve unit of embodiment)
FIG. 18 is a perspective view showing an appearance of the electromagnetic valve unit 5 that supplies and exhausts fluid in a vacuum container (not shown). The solenoid valve unit 5 is a unit that controls four fluids including the four solenoid valves 100. In the electromagnetic valve unit 5, each system has the same configuration. Each system that controls the fluid typically uses an air operated valve that operates with compressed air. Therefore, there are two types of valves: an electromagnetic valve that controls compressed air and an air operated valve that operates with compressed air. It is prepared for each.

  Since such a solenoid valve unit has a large volume and weight, it is usually arranged at a position away from a vacuum vessel (not shown). As a result, a configuration requiring piping for flowing a fluid between the electromagnetic valve unit and the vacuum vessel has been unavoidable.

  The electromagnetic valve 100 includes the electromagnetic coil 110 according to the embodiment, a magnetic circuit 120, and a manifold 130 having an input port 131 and an output port 139. Each solenoid valve 100 controls on / off or orifice diameter in the flow of fluid between the input port 131 and the output port 139. The magnetic circuit 120 includes a ferromagnetic coil casing 121 and a ferromagnetic fixed iron core 122. The electromagnetic coil 110 includes two windings 111 and three heat pipes 85 that cool at both ends of each of the two windings 111.

  FIG. 19 is an exploded perspective view showing each component of the electromagnetic valve 100 of the embodiment. The electromagnetic valve 100 further includes an urging spring 125, a fixed iron core 122, a ferromagnetic guide part 123, and a movable iron core 124. The biasing spring 125 is made of aluminum which is a nonmagnetic material. The fixed iron core 122, the ferromagnetic guide portion 123, and the movable iron core 124 are all ferromagnetic.

  Each form of the components of the electromagnetic coil 110 is as follows. The winding 111 has a hole 111h formed at a central portion in a direction parallel to the winding axis for inserting the fixed iron core 122. The heat pipe 85 has a hole 85h formed in a central portion in a direction parallel to the winding axis for inserting the fixed iron core 122.

  The manifold 130 has a manifold recess 132. In the manifold recess 132, a ferromagnetic guide portion 123, a movable iron core 124, and a biasing spring 125 are mounted. The manifold recess 132 is formed with a valve inlet hole 135 and a valve outlet hole 136. An input port 131 and a flow path are connected to the valve inlet hole 135. An output port 139 and a flow path are connected to the valve outlet hole 136.

The solenoid valve 100 is assembled in the following order.
(1) The heat pipe 85, the winding wire 111, the heat pipe 85, the winding wire 111, and the heat pipe 85 are inserted into the recess 121c of the coil housing 121 in order from one side.
(2) The fixed iron core 122 is inserted from the hole 121h of the coil casing 121, and the electromagnetic coil 110 is configured inside the coil casing 121 by passing through the hole 111h and the hole 85h. A ferromagnetic guide 123 is welded to the fixed iron core 122 in advance.
(3) The movable iron core 124 and the biasing spring 125 are attached to the manifold recess 132.
(4) The electromagnetic coil 110 and the coil housing 121 are mounted on the manifold 130 by mounting the ferromagnetic guide portion 123 so as to cover the movable iron core 124 inside the manifold recess 132.

  FIG. 20 is a cross-sectional view showing the movable iron core 124 and the biasing spring 125. FIG. 21 is a plan view showing the biasing spring 125. An elastic seal member 126 is attached to the movable iron core 124 and functions as an on-off valve. The biasing spring 125 is fixed to the movable iron core 124 by YAG welding at welding points 125w (three places). The biasing spring 125 is adjusted in rigidity by the formation of three notches 125c. The biasing spring 125 is formed with a central hole portion 125t for allowing the elastic seal member 126 to pass therethrough.

  FIG. 22 is a cross-sectional view showing the state of the electromagnetic valve 100 and the flow path in the closed state. FIG. 23 is a cross-sectional view showing the state of the solenoid valve 100 and the flow path in the open state. In the closed state, the electromagnetic valve 100 is in a state in which the elastic seal member 126 blocks the valve outlet hole 136 as shown in FIG. The elastic seal member 126 is pressed against the valve outlet hole 136 by the biasing spring 125 through the movable iron core 124. Thereby, the elastic seal member 126 can close the valve outlet hole 136 and close the flow path between the input port 131 and the output port 139.

  In the opened state, the electromagnetic valve 100 is in a state in which the elastic seal member 126 is separated from the valve outlet hole 136 as shown in FIG. The elastic seal member 126 moves away from the valve outlet hole 136 when the movable iron core 124 is pulled toward the ferromagnetic guide portion 123 side. The movable iron core 124 is attracted by the magnetic force generated inside the ferromagnetic guide portion 123 by the magnetic flux supplied from the fixed iron core 122. Accordingly, the elastic seal member 126 can open the valve outlet hole 136 and open the flow path between the input port 131 and the output port 139.

  FIG. 24 is a cross-sectional view showing a state where the electromagnetic coil 110 and the magnetic circuit 120 are cut along a plane perpendicular to the winding axis. In the present embodiment, in order to reduce the width W of the solenoid valve 100, the shape of the coil housing 121 is not a perfect circle, but has an end face shape 129 that is partially cut off in the width W direction. Such an end face shape 129 has an advantage that the size of the electromagnetic valve unit 5 can be reduced. Since the magnetic field in the vicinity of the movable iron core 124 is determined by the shape of the concave portion of the ferromagnetic guide portion 123, the shape of the coil housing 121 as a magnetic circuit is sufficient if the magnetic flux can be transmitted to the ferromagnetic guide portion 123. It was realized by paying attention to the fact that there is.

  As described above, the electromagnetic valve unit 5 according to the embodiment can increase the mounting sectional area (space factor) of the electromagnetic coil 110 and realize a high driving force with a small coil. As a result, the air operated air operated valve, which has realized a high driving force by air operation, can be replaced with a non-air operated electromagnetic valve.

  In other words, electromagnetic valves that are not pneumatically operated can be applied in the application area of electromagnetic valves that could only be dealt with by pneumatically operated electromagnetic valves. The air operated valve is a valve that operates by operating compressed air supplied from the outside with an electropneumatic control valve (electromagnetic valve), and has substantially two valves. Therefore, if the air operated valve is replaced with this solenoid valve, the number of valves is substantially reduced.

  Furthermore, since the solenoid valve can be reduced in size and the number thereof can be reduced, for example, the gas supply system unit having the solenoid valve, the flow rate controller, and the gas regulator can be reduced in size. As a result, the semiconductor manufacturing apparatus can be arranged in the immediate vicinity of the process chamber, so that the number of piping can be reduced or shortened, and the degree of design freedom for simplifying and improving the configuration of the semiconductor device can be achieved. Can be provided.

(G. Modifications)
In addition, it is not limited to the description content of each embodiment mentioned above, For example, you may implement as follows.

  (A) In the embodiment described above, the electromagnetic coil has a perfect circle shape centered on the winding axis. For example, the rectangular electromagnetic coil 9 or the square electromagnetic coil shown in FIG. Alternatively, it may be a three-relationship, polygonal, or elliptical shape, and may generally be a closed shape. The electromagnetic coil 9 of the modified example includes a first winding configured by winding the strip-shaped conductor 10s in one direction, a second winding configured by winding the strip-shaped conductor 20s in the opposite direction, have.

  FIG. 26 is a perspective view showing a connection state of the connection plate 30s. The connection plate 30s is connected to the strip conductor 10s and the strip conductor 20s. The strip conductor 10s and the strip conductor 20s both extend beyond the connection plate 30s by the offset F1. Thereby, the electrical connection between the strip-shaped conductor 10s and the strip-shaped conductor 20s and the connection plate 30s can be visually confirmed. On the other hand, the adhesive layer 50s extends beyond the strip conductor 10s and the strip conductor 20s by the offset F2. Thereby, the insulation between the layers at the end portions of the strip conductor 10s and the strip conductor 20s can be visually confirmed.

  FIG. 27 is a perspective view showing an electrical connection between the positive terminal Ts + and the strip-shaped conductor 10s and an electrical connection between the negative terminal Ts− and the strip-shaped conductor 20s. A gap having an interval C is provided at the end portions of the strip-shaped conductor 10s and the strip-shaped conductor 20s. The adhesive layer 50s extends beyond the strip conductor 10s and the strip conductor 20s by an offset F3. Thereby, the insulation between the layers at the end portions of the strip conductor 10s and the strip conductor 20s can be visually confirmed.

  (B) In the above-described embodiment, the insulating sphere 51 has a spherical shape, but may have, for example, a rugby ball shape. Generally, it may be a smooth shape (a shape that is easy to roll), and it is preferable that the particle diameter is uniform in a portion having a short diameter. This is because the thickness of the adhesive layer can be made uniform in the winding process. Furthermore, the nanocrystal (for example, nanocrystal) which has insulation may be sufficient. Generally, any material may be used as long as it functions as an insulating granule that secures the interval between the layers of the strip-shaped conductor. If the nanocrystal is used as a granular material, the space factor can be increased by reducing the thickness of the adhesive layer.

  (C) In the above-described embodiment, the heat of the electromagnetic coil is exhausted to the outside and cooled by providing the heat pipe. For example, a flow path (radiation hole) is formed inside the electromagnetic coil to heat the electromagnetic coil. You may make it exhaust heat by letting a medium pass inside. In this way, waste heat can be realized with a high degree of freedom in three dimensions. As the heat medium, for example, a fluorine-based inert liquid having high thermal and chemical stability and excellent insulating properties such as Florinart (trademark) and Galden (trademark) can be used.

  (D) In the above-described embodiment, a spiral strip conductor is manufactured by performing uniform rolling on a conductor having a non-uniform plate thickness in the width direction. You may make it perform non-uniform rolling with respect to the conductor which has various board thickness. For example, when assuming a configuration in which the stacking radius varies, it is preferable that the uneven rolling can be changed continuously or stepwise.

3, 9 ... Electromagnetic coil, 5 ... Electromagnetic valve unit, 10, 20, 10s, 20s ... Strip conductor, 50, 50s ... Adhesive layer, 7, 7a, 7b ... X-ray generator, 100 ... Electromagnetic valve.

Claims (7)

A band-shaped conductor that is a band-shaped conductor wound around a plurality of times so as to surround a predetermined space portion;
An insulative adhesive layer for adhering the mutually facing surfaces of the wound strip conductor;
With
The electromagnetic coil according to claim 1, wherein the adhesive layer includes an insulating granular body that secures an interval between the opposing surfaces of the strip-shaped conductor, and an insulating adhesive material.   The electromagnetic coil according to claim 1, wherein both the adhesive material and the granular material are made of synthetic resin.   The electromagnetic coil according to claim 1, wherein the granular body has a spherical shape.   The electromagnetic coil according to any one of claims 1 to 3, wherein the space portion has an open end, and includes a cooling portion in contact with an end portion on the open end side of the strip conductor. The electromagnetic coil is formed with a heat dissipation hole extending in a direction in which the electromagnetic coil is laminated by winding the plurality of turns,
The electromagnetic coil according to claim 1, wherein the heat radiating hole is opened at an outermost periphery of the strip conductor. An electron lens that focuses an electron beam on a target that generates X-rays,
An electromagnetic coil according to any one of claims 1 to 5, which generates magnetic flux;
A magnetic circuit that forms a magnetic field for focusing the electron beam on the target by passing the magnetic flux;
An electronic lens comprising An electromagnetic valve for semiconductor manufacturing equipment,
An on-off valve having a magnetic material;
The electromagnetic coil according to any one of claims 1 to 5, wherein the on-off valve is operated by changing a magnetic field;
Electromagnetic valve with

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