JP2011082967A - 半導体装置 - Google Patents
半導体装置 Download PDFInfo
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- JP2011082967A JP2011082967A JP2010201897A JP2010201897A JP2011082967A JP 2011082967 A JP2011082967 A JP 2011082967A JP 2010201897 A JP2010201897 A JP 2010201897A JP 2010201897 A JP2010201897 A JP 2010201897A JP 2011082967 A JP2011082967 A JP 2011082967A
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- G—PHYSICS
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- G02F2201/00—Constructional arrangements not provided for in groups G02F1/00 - G02F7/00
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Abstract
【解決手段】第1のトランジスタ、第2のトランジスタ、第1のスイッチ、第2のスイッチ及び第3のスイッチを有し、前記第1のトランジスタの第1の端子は第1の配線と接続され、第2の端子は第2の配線と接続され、前記第2のトランジスタのゲート及び第1の端子は前記第1の配線と接続され、第2の端子は前記第1のトランジスタのゲートと接続され、前記第1のスイッチは前記第2の配線と第3の配線との間に接続され、前記第2のスイッチは前記第2の配線と前記第3の配線との間に接続され、前記第3のスイッチは第1のトランジスタのゲートと第3の配線との間に接続される半導体装置。
【選択図】図1
Description
本実施の形態の構成について、図45(A)を参照して説明する。図45(A)には、本実施の形態の半導体装置の回路図を示す。
本実施の形態では、実施の形態1の半導体装置に、素子又は回路などを新たに設ける半導体装置について説明する。
本実施の形態では、表示装置、表示装置が有する画素、及び表示装置が有するシフトレジスタ回路について説明する。なお、当該シフトレジスタ回路は、実施の形態1〜実施の形態2で述べる半導体装置を有することが可能である。
本実施の形態では、信号線駆動回路について説明する。なお、信号線駆動回路を半導体装置、又は信号生成回路と示すことが可能である。
本実施の形態では、保護回路について説明する。保護回路は、ある配線に接続される半導体デバイス(例えばトランジスタ、容量素子、回路など)などがESD(静電気放電)によって破壊されることを防止する目的で設けられる。
本実施の形態では、トランジスタについて図39(A)、(B)、及び(C)を参照して説明する。
本実施の形態では、表示装置の断面構造について、図40(A)、(B)、及び(C)を参照して説明する。
本実施の形態では、半導体装置の作製工程について説明する。ここでは、トランジスタ、及び容量素子の作製工程について説明する。特に、半導体層として、酸化物半導体を用いる場合の作製工程について説明する。
本実施の形態では、半導体装置のレイアウト図(上面図ともいう)について説明する。本実施の形態では、図1(A)の半導体装置のレイアウト図について説明する。なお、本実施の形態で述べる内容は、他の実施の形態で述べる内容と適宜組み合わせることが可能である。なお、本実施の形態のレイアウト図は一例であって、半導体装置のレイアウト図がこれに限定されるものではないことを付記する。
本実施の形態においては、電子機器の例について説明する。
12 ノード
13 ノード
100 回路
101 トランジスタ
101d ダイオード
101p トランジスタ
102 トランジスタ
102A 容量素子
102d ダイオード
102S スイッチ
103 トランジスタ
103A トランジスタ
103B 容量素子
103d ダイオード
103S スイッチ
104 トランジスタ
104A 容量素子
104d ダイオード
104p トランジスタ
104R 抵抗素子
105 トランジスタ
105A トランジスタ
105B 容量素子
105D 容量素子
105S スイッチ
106 トランジスタ
107 容量素子
108 トランジスタ
109 トランジスタ
111 配線
112 配線
112A 配線
112B 配線
112C 配線
113 配線
113A 配線
113B 配線
113C 配線
113D 配線
114 配線
115 配線
115A 配線
115B 配線
115C 配線
115D 配線
115E 配線
115F 配線
115G 配線
116 配線
117 配線
120 回路
121 抵抗素子
122 容量素子
123 バッファ回路
124 インバータ回路
125 トランジスタ
126 トランジスタ
127 トランジスタ
128 トランジスタ
129 配線
130 配線
131 トランジスタ
132 トランジスタ
133 トランジスタ
134 トランジスタ
150 回路
151 回路
152 回路
153 回路
154 回路
160 保護回路
201 トランジスタ
201d ダイオード
201p トランジスタ
202 トランジスタ
202d ダイオード
202p トランジスタ
203 トランジスタ
203d ダイオード
203p トランジスタ
204 トランジスタ
204d ダイオード
204p トランジスタ
205 トランジスタ
205d ダイオード
205p トランジスタ
206 トランジスタ
207 トランジスタ
207d ダイオード
207p トランジスタ
208 トランジスタ
209 トランジスタ
211 配線
212 配線
212A 配線
212B 配線
213 配線
214 配線
220 容量素子
350 ホールディング制御部
901 導電層
902 半導体層
903 導電層
904 導電層
905 コンタクトホール
1001 回路
1002 回路
1002a 回路
1002b 回路
1003 回路
1004 画素部
1005 端子
1006 基板
1100 シフトレジスタ回路
1101 フリップフロップ回路
1111 配線
1112 配線
1113 配線
1114 配線
1115 配線
1116 配線
2000 回路
2001 回路
2002 回路
2003 トランジスタ
2004 配線
2005 配線
2006A 走査線駆動回路
2006B 走査線駆動回路
2007 画素部
2014 信号
2015 信号
2206 トランジスタ
3000 保護回路
3001 トランジスタ
3002 トランジスタ
3003 トランジスタ
3004 トランジスタ
3005 容量素子
3006 抵抗素子
3007 容量素子
3008 抵抗素子
3011 配線
3012 配線
3013 配線
3020 画素
3021 トランジスタ
3022 液晶素子
3023 容量素子
3031 配線
3032 配線
3033 配線
3034 電極
3100 ゲートドライバ
3101a 端子
3101b 端子
5000 筐体
5001 表示部
5002 表示部
5003 スピーカ
5004 LEDランプ
5005 操作キー
5006 接続端子
5007 センサ
5008 マイクロフォン
5009 スイッチ
5010 赤外線ポート
5011 記録媒体読込部
5012 支持部
5013 イヤホン
5015 シャッターボタン
5016 受像部
5017 充電器
5018 支持台
5019 外部接続ポート
5020 ポインティングデバイス
5021 リーダ/ライタ
5022 筐体
5023 表示部
5024 リモコン装置
5025 スピーカ
5026 表示パネル
5027 ユニットバス
5028 表示パネル
5029 車体
5030 天井
5031 表示パネル
5032 ヒンジ部
5033 光源
5034 投射レンズ
5260 基板
5261 絶縁層
5262 半導体層
5262a 領域
5262b 領域
5262c 領域
5262d 領域
5262e 領域
5263 絶縁層
5264 導電層
5265 絶縁層
5266 導電層
5267 絶縁層
5268 導電層
5269 絶縁層
5270 発光層
5271 導電層
5273 絶縁層
5300 基板
5301 導電層
5302 絶縁層
5303a 半導体層
5303b 半導体層
5304 導電層
5305 絶縁層
5306 導電層
5307 液晶層
5308 導電層
5350 領域
5351 領域
5352 半導体基板
5353 領域
5354 絶縁層
5355 領域
5356 絶縁層
5357 導電層
5358 絶縁層
5359 導電層
5391 基板
5392 駆動回路
5393 画素部
5400 基板
5401 導電層
5402 絶縁層
5403a 半導体層
5403b 半導体層
5404 導電層
5405 絶縁層
5406 導電層
5407 液晶層
5408 絶縁層
5409 導電層
5410 基板
5420 基板
5421 導電層
5422 導電層
5423 絶縁層
5424 コンタクトホール
5425 酸化物半導体層
5429 導電層
5430 導電層
5431 導電層
5432 絶縁層
5433 導電層
5434 導電層
5435 絶縁層
5441 トランジスタ
5442 容量素子
Claims (9)
- 第1のトランジスタ、第2のトランジスタ、第1のスイッチ、第2のスイッチ及び第3のスイッチを有し、
前記第1のトランジスタの第1の端子は、第1の配線と電気的に接続され、前記第1のトランジスタの第2の端子は、第2の配線と電気的に接続され、
前記第2のトランジスタのゲートは、前記第1の配線と電気的に接続され、前記第2のトランジスタの第1の端子は、前記第1の配線と電気的に接続され、前記第2のトランジスタの第2の端子は、前記第1のトランジスタのゲートと電気的に接続され、
前記第2の配線は、前記第1のスイッチを介して第3の配線と電気的に接続され、且つ前記第2のスイッチを介して前記第3の配線と電気的に接続され、
前記第1のトランジスタのゲートは、前記第3のスイッチを介して前記第3の配線と電気的に接続されることを特徴とする半導体装置。 - 請求項1において、
前記第1の配線には、クロック信号が入力されていることを特徴とする半導体装置。 - 請求項1又は請求項2において、
前記第1のトランジスタ及び前記第2のトランジスタは、酸化物半導体を用いたトランジスタであることを特徴とする半導体装置。 - 第1のトランジスタ、第2のトランジスタ、第3のトランジスタ、第4のトランジスタ及び第5のトランジスタを有し、
前記第1のトランジスタの第1の端子は、第1の配線と電気的に接続され、前記第1のトランジスタの第2の端子は、第2の配線と電気的に接続され、
前記第2のトランジスタのゲートは、前記第1の配線と電気的に接続され、前記第2のトランジスタの第1の端子は、前記第1の配線と電気的に接続され、前記第2のトランジスタの第2の端子は、前記第1のトランジスタのゲートと電気的に接続され、
前記第3のトランジスタのゲートは、第4の配線と電気的に接続され、前記第3のトランジスタの第1の端子は、第3の配線と電気的に接続され、前記第3のトランジスタの第2の端子は、前記第2の配線に電気的に接続され、
前記第4のトランジスタのゲートは、第5の配線と電気的に接続され、前記第4のトランジスタの第1の端子は、前記第3の配線と電気的に接続され、前記第4のトランジスタの第2の端子は、前記第2の配線に電気的に接続され、
前記第5のトランジスタのゲートは、前記第5の配線と電気的に接続され、前記第5のトランジスタの第1の端子は、前記第3の配線と電気的に接続され、前記第5のトランジスタの第2の端子は、前記第1のトランジスタのゲートと電気的に接続されることを特徴とする半導体装置。 - 請求項4において、
前記第1の配線には、クロック信号が入力されていることを特徴とする半導体装置。 - 請求項4又は請求項5において、
前記第1のトランジスタ乃至前記第5のトランジスタは、酸化物半導体を用いたトランジスタであることを特徴とする半導体装置。 - 第1のトランジスタ、第2のトランジスタ、第3のトランジスタ、第4のトランジスタ、第5のトランジスタ及び第6のトランジスタを有し、
前記第1のトランジスタの第1の端子は、第1の配線と電気的に接続され、前記第1のトランジスタの第2の端子は、第2の配線と電気的に接続され、
前記第2のトランジスタのゲートは、前記第1の配線と電気的に接続され、前記第2のトランジスタの第1の端子は、前記第1の配線と電気的に接続され、前記第2のトランジスタの第2の端子は、前記第1のトランジスタのゲートと電気的に接続され、
前記第3のトランジスタのゲートは、第4の配線と電気的に接続され、前記第3のトランジスタの第1の端子は、第3の配線と電気的に接続され、前記第3のトランジスタの第2の端子は、前記第2の配線に電気的に接続され、
前記第4のトランジスタのゲートは、第5の配線と電気的に接続され、前記第4のトランジスタの第1の端子は、前記第3の配線と電気的に接続され、前記第4のトランジスタの第2の端子は、前記第2の配線に電気的に接続され、
前記第5のトランジスタのゲートは、前記第5の配線と電気的に接続され、前記第5のトランジスタの第1の端子は、前記第3の配線と電気的に接続され、前記第5のトランジスタの第2の端子は、前記第1のトランジスタのゲートと電気的に接続され、
前記第6のトランジスタのゲートは、前記第4の配線と電気的に接続され、前記第6のトランジスタの第1の端子は、前記第3の配線と電気的に接続され、前記第6のトランジスタの第2の端子は、前記第1のトランジスタのゲートと電気的に接続されることを特徴とする半導体装置。 - 請求項7において、
前記第1の配線には、クロック信号が入力されていることを特徴とする半導体装置。 - 請求項7又は請求項8において、
前記第1のトランジスタ乃至前記第6のトランジスタは、酸化物半導体を用いたトランジスタであることを特徴とする半導体装置。
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