JP2010243271A - Fine channel device, and method for manufacturing the same - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a fine channel device capable of forming a fine channel having high dimension accuracy, even when a fine channel having a very small vertical width or channel width is requested, and allowing smooth passage of a particle suspension through the fine channel, without having to depend on a suction device, and to provide a method for manufacturing the fine channel device. <P>SOLUTION: This fine channel device 1 includes a pair of facing glass substrates 2; a fine channel 5 formed between the pair of glass substrates 2 passably by the particle suspension; and an electrode 4, formed so as to be able to apply a voltage to the fine channel 5. An adhesive layer 3, including a cured material of a photocuring resin and having surface adhesiveness is formed between the pair of glass substrates 2, to thereby demarcate a side surface 6 in the width direction of the fine channel 5; and the pair of glass substrates 2 is fixed mutually through the adhesive layer 3, to thereby demarcate the upper and lower surfaces 7 of the fine channel 5; and the electrode 4 is made of a conductive film having conductivity and formed on one side of the glass substrates 2. <P>COPYRIGHT: (C)2011,JPO&INPIT

Description

  The present invention relates to a microchannel device and a method for manufacturing a microchannel device.

  As a trace component detection method for detecting trace components contained in a very small amount of sample with high sensitivity when diagnosing the presence or absence of diseases in a medical institution or determining the presence or absence of physiologically active substances in the field of biochemistry, A sample is mixed with carrier microparticles that carry a substance (such as an antibody that uses the trace component as an antigen) that specifically reacts with a trace component (such as a causative agent of the disease) on a carrier (such as latex beads). A method is known in which a liquid (fine particle suspension) is prepared and a pulse voltage is applied to the fine particle suspension. In this method, the presence or absence of a trace component in a sample is determined by confirming the presence or absence of an aggregate due to the reaction between the trace component and the carrier fine particle. Since the aggregate is efficiently formed by forming a pearl chain, the presence / absence of an agglomerate can be confirmed with a high sensitivity even in a very small amount of sample in a short time, and the presence or absence of a trace component can be detected.

  In order to carry out this method effectively, a device for handling a very small amount of specimen is required. As the device, there is a device (microchannel device) in which a minute microchannel is formed with a vertical width of the order of micrometers (about 1 μm or more and about 100 μm or less) and an electrode capable of applying a pulse voltage to the microchannel is provided. Proposed.

  Using such a microchannel device, a fine particle suspension is passed through the microparticle suspension, a pulse voltage is applied to the microchannel, and the application of the voltage is stopped after a predetermined time, thereby flowing through the microchannel. The presence or absence of aggregate formation in the fine particle suspension can be confirmed with high accuracy. Confirmation of the presence or absence of the formation of aggregates can be realized by setting an aggregate confirmation device on the fine channel device. Examples of the aggregate confirmation device include an optical microscope and a blood cell counter. For example, when the optical microscope is set with the objective lens facing the fine flow path of the fine flow path device, it is visually confirmed whether aggregates are formed in the fine particle suspension flowing in the fine flow path.

  The following have been proposed for the microchannel device.

  Electrodes are formed with metal foils arranged at intervals so as to define the side of the introduction path forming a fine channel, and on both sides of the metal foil so as to define the bottom surface and the top surface of the introduction path A chip for reaction inspection formed by laminating a plastic film has been proposed (Patent Document 1).

  A process of patterning hot melt adhesive on one substrate by screen printing to form a fine channel that is a portion where no hot melt adhesive is present, and ion plating on the other substrate to form the fine channel. Including a step of forming a corresponding electrode, a step of superimposing both substrates so that the electrodes are opposed to a fine flow path formed on one substrate and the other substrate, and a step of thermocompression bonding the two substrates A microchip manufactured by a manufacturing method has been proposed (Patent Document 2).

  One glass substrate with a fine channel formed on the surface is overlaid on the other glass substrate with an electrode formed on the surface while aligning each other so that the electrode and the fine channel face each other. A step, a step of infiltrating an anaerobic UV curable adhesive between one glass substrate and the other glass substrate, a step of removing the anaerobic UV curable adhesive that has entered the fine flow path, and UV light Has been proposed (Patent Document 3).

JP 2003-75441 A JP 2008-249346 A JP 2008-170349 A

  In the trace component detection method using the microchannel device, the carrier flowing in the microchannel is used in order to more quickly and accurately determine whether or not an aggregate of the trace component and the carrier fine particles is formed. An enlarged image of the fine particles is acquired. An enlarged image can be obtained by using an imaging system. The imaging system is, for example, an observation optical system including an objective lens used in an optical microscope, a lens barrel, and an eyepiece lens, set with the objective lens facing the microchannel of the microchannel device, and a CCD camera with respect to the eyepiece lens. It is formed by setting. At this time, a two-dimensional image of the carrier fine particles is formed through the eyepiece, and the image is acquired as an enlarged image by the CCD camera. Then, by analyzing the enlarged image, it is possible to confirm whether or not an aggregate is recognized and perform a detailed analysis of the aggregate. In order to clearly obtain an enlarged image using such an imaging system, it is preferable that the pearl chaining of the carrier fine particles is further realized. This is because, if the pearl chain formation of the carrier fine particles is realized in multiple layers, there is a high possibility that the aggregate will appear at a position where the distance between the aggregate and the objective lens is different. This is because there is a possibility of causing a situation where it becomes impossible to focus at once. If the entire aggregate cannot be focused, an enlarged image with a clear image of the aggregate cannot be obtained, the reproducibility of the analysis result of the aggregate is reduced, and the trace component detection method is performed with high accuracy. You may not be able to.

  In this regard, it is conceivable to use a system having an apparatus for obtaining a three-dimensional image and analyzing the image as an imaging system. However, the three-dimensional image has more information to be analyzed than the two-dimensional image, and the implementation cost of the trace component detection method is increased.

  On the other hand, in the trace component detection method using a microchannel device, it is required to use microcarrier particles in the microparticle suspension in order to efficiently carry out pearl chaining of carrier microparticles with high sensitivity. ing. However, when the finest carrier particles are used in the fine particle suspension as much as possible, if the vertical width of the fine channel of the microchannel device is increased to some extent, the group of carrier particles in the pearl chain form the fine channel. It becomes easy to be in a multi-layered state in the depth direction.

  Therefore, in the trace component detection method using the microchannel device, the analysis of the aggregate can be performed using the imaging system, and the microcarrier particles can be used in the microparticle suspension. In addition, as a microchannel device, a device having a microchannel whose vertical width is about 10 μm or less, preferably a microchannel whose vertical width is about 7 μm, is formed with high accuracy. It is requested to be done.

  Furthermore, in addition to these requirements, it is desired that the device for carrying out the method for detecting a trace component is not complicated as a fine channel device. What is desired to be able to communicate with a moderate flow rate in a fine flow path by capillary action is desired.

  However, in the reaction test chip described in Patent Document 1, since the introduction path is formed by laminating a plastic film, and the plastic film is likely to be deformed during lamination, the dimensional accuracy of the vertical width of the introduction path. In particular, the introduction path cannot be formed with sufficient dimensional accuracy even when the vertical width of the introduction path is about 10 μm or less. In this reaction inspection chip, the metal foil interposed between the plastic films not only defines the side surface of the introduction path but also constitutes an electrode. Therefore, the metal foil needs to have a certain thickness so as not to break. Also in this respect, it is not easy to design the reaction test chip so that the vertical width of the introduction path is about 10 μm or less.

  In the microchip described in Patent Document 2, a pair of substrates are bonded by a hot melt adhesive applied by a screen printing method. However, the hot melt adhesive has flexibility when bonding a pair of substrates. Since it is usual to have, it is difficult to stabilize the thickness of the hot melt adhesive, and it is difficult to adjust the thickness of the hot melt adhesive with high accuracy. When the vertical width of the fine flow path required for the microchip is reduced to about 10 μm or less, the thickness error of the hot melt adhesive with respect to the vertical width of the fine flow path becomes so large that it cannot be ignored. That is, in this microchip, it is difficult to form the fine flow path with high accuracy, particularly when the fine flow path is required to have a vertical width of about 10 μm or less.

  In the microchip substrate of Patent Document 3, the electrodes are provided so that the edge portions protrude into the fine flow path. In such a case, in the microchip substrate of Patent Document 3, in the step of curing the anaerobic UV curable adhesive, the anaerobic UV curable adhesive is partially formed on the edge portion of the electrode protruding into the fine channel. As a result, the anaerobic UV curable adhesive may be cured. Then, in the microchip board | substrate of patent document 3, the edge part of an electrode will be partially covered with the hardened | cured material of anaerobic UV curable adhesive, and it is difficult to apply a voltage uniformly in a microchannel. There is a risk of becoming. Further, in this microchip substrate, in order to form a fine flow path, it is essential to perform a step of forming grooves in the glass substrate in advance before curing the anaerobic UV curable adhesive. If there is a change in the design of the micro-channel in the process of curing the anaerobic UV curable adhesive, the glass substrate must be discarded.

  In addition, in both the reaction test chip of Patent Document 1 and the microchip of Patent Document 2, a fine channel is formed between substrates made of plastic. However, since plastics are generally more hydrophobic than inorganic materials and the like, if the vertical width of the fine flow path is reduced to about 10 μm or less, the fine particle suspension hardly flows in the fine flow path.

  In the microchip substrate of Patent Document 3, the anaerobic UV curable adhesive leaks into the fine flow path and is cured, and the anaerobic UV curable adhesive cured in the fine flow path may exist as a foreign substance. Therefore, when the vertical width of the fine channel is as small as about 10 μm or less, the fine particle suspension flows in the fine channel by the anaerobic UV curable adhesive that has been hardened by mistake in the fine channel. There is a greater risk of difficulty. In the technique of Patent Document 3, a sufficient amount of anaerobic UV curable adhesive does not enter when the anaerobic UV curable adhesive enters between the glass substrate and the other glass substrate. There is also a possibility that the path cannot be formed with high dimensional accuracy. For this reason, in the technique of Patent Document 3, there is a possibility that the dimensions of the fine flow path may vary depending on the lot of the microchip substrate, and the flow rate of the fine particle suspension flowing in the fine flow path may also vary.

  As described above, in any of Patent Documents 1 to 3, when the vertical width of the fine channel is about 10 μm or less, the fine particle suspension does not flow smoothly into the fine channel, and the capillary phenomenon is used. Therefore, it may be difficult to pass the fine particle suspension through the fine flow path at an appropriate flow rate. For this reason, in any of Patent Documents 1 to 3, if the fine particle suspension is allowed to pass through the fine channel at an appropriate flow rate, a flow rate adjusting device such as a suction device such as a pump is separately provided, and the flow rate adjustment is performed. The apparatus needs to adjust the flow rate of the fine particle suspension, and the apparatus using the fine channel device is complicated. Therefore, in any of Patent Documents 1 to 3, it is difficult to make a simple configuration of an apparatus using a microchannel device.

  The present invention is capable of forming a fine flow path with high dimensional accuracy even if a fine flow path having a very small vertical width and flow width is required, and allows the fine particle suspension to be formed without relying on a suction device. It is an object of the present invention to provide a microchannel device that can be smoothly passed through, and to provide a method for manufacturing the microchannel device.

The present invention comprises (1) a pair of glass substrates facing each other, a fine channel formed between the pair of glass substrates so as to allow passage of the fine particle suspension, and a voltage applied to the fine channel. A micro-channel device comprising an electrode,
Between the pair of glass substrates, an adhesive layer made of a cured product of a photocurable resin and having surface adhesiveness is formed to define the side surface in the width direction of the fine channel,
The pair of glass substrates are fixed to each other via an adhesive layer to define the upper and lower surfaces of the fine channel,
The electrode is made of a conductive film having conductivity formed on one side of a glass substrate,
(2) The microchannel device according to (1), wherein the microchannel has a vertical width of 10 μm or less,
(3) The fine channel device according to (1) or (2), wherein the conductive film is formed so that at least a part of the conductive film is located in the fine channel,
(4) A fine flow comprising a pair of glass substrates facing each other, a fine flow path formed between the pair of glass substrates so that the fine particle suspension can pass, and an electrode capable of applying a voltage to the fine flow path A method for manufacturing a road device,
Forming an electrode by forming a conductive film on one glass substrate;
By applying a resist solution containing a photocurable resin to a glass substrate on which an electrode is formed to form a coating film, and irradiating active radiation toward the coating film to cure the coating film, Patterning a pressure-sensitive adhesive layer having surface adhesiveness on the glass substrate surface and forming a side surface in the width direction of the fine channel with the pressure-sensitive adhesive layer;
By superposing the one glass substrate on which the electrode and the adhesive layer are formed and the other glass substrate so that the adhesive layer is in direct contact with the other glass substrate and fixing the pair of glass substrates to each other, Forming the upper and lower surfaces of the flow path, and a method of manufacturing a fine flow path device, characterized by:
(5) A fine flow comprising a pair of glass substrates facing each other, a fine flow path formed between the pair of glass substrates so that the fine particle suspension can pass, and an electrode capable of applying a voltage to the fine flow path A method for manufacturing a road device,
One glass substrate is formed by applying a resist solution containing a photocurable resin to one glass substrate to form a coating film, and irradiating active radiation toward the coating film to cure the coating film. Patterning a pressure-sensitive adhesive layer having surface adhesiveness on the surface, and forming a side surface in the width direction of the fine channel with the pressure-sensitive adhesive layer;
Forming a conductive film on the other glass substrate to form an electrode;
The glass substrate on which the adhesive layer is formed and the glass substrate on which the electrode is formed are superposed so that the adhesive layer is in direct contact with the glass substrate on which the electrode is formed, and the pair of glass substrates are fixed to each other, thereby providing a fine flow path. A process for forming the upper and lower surfaces, and a method of manufacturing a microchannel device, characterized by:
(6) In the step of forming the upper and lower surfaces of the fine channel, the pair of glass substrates are fixed to each other by heating and pressurizing the pair of glass substrates, in the above (4) or (5) The manufacturing method of the described microchannel device is summarized.

  According to the method for manufacturing a microchannel device of the present invention, after forming a pressure-sensitive adhesive layer made of a cured product of a photocurable resin, a pair of glass substrates facing each other by the solid pressure-sensitive adhesive layer are mutually connected. Since it is fixed, it is easy to adjust the thickness of the adhesive layer, and even when trying to manufacture a micro-channel device having a micro-channel having a vertical width of about 10 μm or less, It becomes possible to adjust the vertical width with high accuracy.

  According to the present invention, in forming a fine flow path by fixing a pair of glass substrates to each other, there is no need to allow an adhesive having fluidity to enter between the pair of glass substrates, and the adhesive is put into the fine flow path. There is no risk that the fine flow path will be contaminated. Therefore, according to the present invention, it is possible to suppress the possibility that foreign matters such as an adhesive are mixed in the fine flow path and the fine particle suspension does not easily flow in the fine flow path. And since a microchannel device can be formed without mixing foreign substances in the microchannel, the possibility of variations in the flow rate of the fine particle suspension flowing in the microchannel can be suppressed depending on the lot of microchannel devices. .

  Furthermore, in the present invention, since the fine flow path of the fine flow path device is formed between a pair of glass substrates, the capillary phenomenon is used as compared with the case where the fine flow path is formed between plastic substrates. Thus, the fine particle suspension is easily passed through the fine flow path at an appropriate flow rate. That is, according to the present invention, it is possible to obtain a microchannel device capable of passing a fine particle suspension into a microchannel at an appropriate flow rate by utilizing capillary action.

  According to the present invention, it is not essential to connect a suction device such as a pump for forcibly drawing the fine particle suspension into the fine flow path through the fine particle suspension. It becomes easy to make the apparatus using the road device a simpler configuration.

  According to the present invention, since the adhesive layer forms the side surface in the width direction of the fine channel, the groove is provided in the glass substrate in a pattern corresponding to the fine channel in order to form the side surface in the width direction of the fine channel. It is not necessary to carry out this process, and the manufacturing cost of the fine channel device can be suppressed.

  In the present invention, since the glass substrate surface defines the upper and lower surfaces of the fine channel, the glass surface of the glass substrate is exposed to the inner surface of the fine channel. The glass substrate exposed on the inner surface of the microchannel usually has higher wettability with the microparticle suspension than the plastic substrate, so the microparticle suspension moves smoothly in the microchannel. It becomes easy to do. When the fine particle suspension smoothly flows through the fine channel, the flow rate of the fine particle suspension flowing through the fine channel is stabilized. Therefore, according to the present invention, there is little variation in the flow rate of the fine particle suspension depending on the product lot of the microchannel device, and in confirming the presence or absence of aggregate formation by applying a pulse voltage to the fine particle suspension, The reliability of the confirmation result of the presence or absence of the formation of aggregates is further improved.

  Furthermore, according to the present invention, it is possible to eliminate the need for groove processing for forming a fine flow path in a glass substrate when manufacturing a fine flow path device using a glass substrate.

It is a plane schematic diagram which shows typically one of the Examples of the microchannel device in this invention. FIG. 2 is an enlarged schematic cross-sectional view schematically showing an AA line cross-section of FIG. 1 in an enlarged manner.

  The fine channel device 1 of the present invention will be described with reference to the drawings. In the present specification, the thickness direction of the microchannel device 1 is the vertical direction. In the example of the microchannel device 1 shown in FIG. 2, the arrow UD direction is the vertical direction. At this time, for the sake of convenience, the arrow U direction is the upward direction, and the arrow D direction is the downward direction. Further, in this specification, the z axis in the vertical direction, the y axis in the longitudinal direction of the microchannel 5, the x axis in the direction perpendicular to both the z axis and the y axis, and the x axis y axis. In the case of assuming a three-dimensional spatial coordinate system stretched by the z-axis, the x-axis direction is the width direction of the fine channel 5 (the direction of the arrow MN in FIG. 2).

[Configuration of microchannel device 1]
As shown in FIGS. 1 and 2, the microchannel device 1 of the present invention includes a pair of glass substrates 2 and 2 facing each other and an electrode 4 to which a voltage can be applied, and a pair of base materials 2 and 2. An adhesive layer 3 is formed between the two.

  The pair of glass substrates 2 and 2 are arranged to face each other with an interval in the vertical direction, and define the upper and lower surfaces (flow channel upper and lower surfaces 7 and 7) of the fine flow channel 5. At this time, the distance between the upper and lower flow paths 7 and 7 facing each other is the vertical width H of the fine flow path 5.

  The pair of glass substrates 2 and 2 are not particularly limited in kind, such as soda lime glass, borosilicate glass, quartz glass, and non-alkali glass. The pair of glass substrates 2 and 2 are different from each other. Different types of glass material may be used. The pair of glass substrates 2 and 2 can usually ensure appropriate wettability in relation to the fine particle suspension as compared with the plastic material.

  The pressure-sensitive adhesive layer 3 is a layer that is patterned on the surface of the glass substrate 2 in a predetermined pattern in plan view and is made of a cured product of a photocurable resin and has surface adhesiveness. The pattern of the adhesive layer 3 corresponds to the pattern of the fine flow path 5 formed in the fine flow path device 1. At this time, the pressure-sensitive adhesive layer 3 defines the side surfaces (channel side surfaces 6 and 6) of the microchannel 5 facing the width direction of the microchannel 5. At this time, the distance between the facing channel side surfaces 6 and 6 becomes the channel width W of the fine channel 5.

  As photocurable resin which comprises the adhesion layer 3, the resin composition which has photocurability which can be alkali-developable can be mentioned, More specifically, an alkali developing adhesive (made by Taiyo Ink Manufacturing Co., Ltd., U-100 series) can be used.

  The surface adhesiveness of the adhesive layer 3 is “after the photocurable resin as described above is cured” in the state “after being patterned according to the pattern of the microchannel 5”. It is possible to adhere other members to the surface of the adhesive layer 3 ”. Here, “adhering another member and the adhesive layer 3” means “when the other member and the adhesive layer 3 adhere to each other simply by bringing the other member into contact with the adhesive layer 3”, The case where the member is brought into contact with the adhesive layer 3 and the other member and the adhesive layer 3 are adhered by heating and / or pressurizing both of them is included.

  The thickness of the pressure-sensitive adhesive layer 3 is appropriately set according to the vertical width (indicated by symbol H in FIG. 2) of the microchannel 5 to be formed in the microchannel device 1.

  In the example of the microchannel device of FIG. 2, the adhesive layer 3 is disposed on the upper side (arrow U direction side) of the electrode 4, but is not limited thereto, and is disposed on the lower side of the electrode 4. Also good.

  The electrode 4 is formed so that a voltage can be applied so as to generate an electric field in a direction crossing the longitudinal direction of the microchannel 5. The electrode 4 is made of a conductive film having conductivity. The conductive film is formed on the surface of at least one of the pair of glass substrates 2 and 2 (in the example of FIG. 2, the glass substrate 2 disposed on the lower side (D direction side)). The conductive film is patterned into a predetermined pattern determined according to the pattern of the fine channel 5. Specifically, the conductive films are arranged so as not to be in direct contact with each other on both sides of the fine flow path 5 in the width direction of the fine flow path 5 in plan view, and the conductive films located on both sides of the fine flow path are In addition, a short circuit is not caused when a voltage is applied to the fine channel device.

  The electrode 4 disposed in a predetermined region in the out-of-plane direction of the fine flow channel 5 with the fine flow channel 5 interposed therebetween has the edge portion 10 of the electrode 4 in the fine flow channel 5 more than the position of the side surfaces 6 and 6 in plan view. It is preferable to be formed so as to be in a slightly protruding state (exposed state in the fine flow path 5) inside the fine flow path 5 when viewed in the width direction. This can be realized by forming the conductive film forming the electrode 4 so that at least a part of the conductive film is positioned inside the fine channel 5 rather than the channel side surfaces 6 and 6 of the fine channel 5. In the example of FIG. 1, the conductive film has a pattern that is narrower than the channel width of the microchannel 5 (indicated by the symbol W in FIG. 2) and extends linearly along the longitudinal direction of the microchannel 5. Patterning is performed so that a conductive film non-formation portion is formed. Note that the protruding length of the electrode 4 (indicated by symbol E in FIG. 2) can be set as appropriate, but the protruding length E is preferably about 0.1 μm to 0.2 μm. Since the electrode 4 is formed so that the edge portion 10 of the electrode 4 is positioned in the fine flow path 5, the electrode 4 is exposed in the fine flow path 5, and the voltage is surely applied to the fine flow path 5. It becomes easy to apply.

  As the conductive film forming the electrode 4, a thin film layer or metal foil made of a conductive material having conductivity is preferably used. The conductive material having conductivity is not particularly limited, such as a metal such as stainless steel, aluminum, copper, gold, ITO, or carbon, but a metal is used as the conductive material in terms of ease of patterning. It is preferable that a metal that is as difficult to oxidize as possible is used.

  The thickness of the conductive film (thickness of the electrode 4) is appropriately set according to the vertical width H of the fine channel 5.

  In the microchannel device 1, the pair of glass substrates 2 and 2 are fixed to each other via the adhesive layer 3. At this time, the pair of glass substrates 2 and 2 define the upper and lower surfaces 7 and 7 of the fine channel 5.

  Regarding the microchannel device 1 of the present invention, the shape, number, and dimensions (vertical width H, channel width W, channel length L) of the microchannel 5 are not particularly limited. In the microchannel device 1, the shape of the microchannel 5 may be any of a linear shape, a curved shape, a broken line shape, a spiral shape, or a shape formed by a combination thereof. The number of the fine flow paths 5 may be either singular or plural. Moreover, when the number of the fine flow paths 5 is plural, the fine flow paths 5 may be configured such that fluids flowing through the plural flow paths can join and / or branch from each other.

  The vertical width H of the fine channel 5 is appropriately determined according to the particle size of the carrier fine particles contained in the fine particle suspension to be communicated with the fine channel 5. The vertical width H of the fine channel 5 is a value in the range of the order of micrometers when carrier fine particles having a particle diameter of about 0.5 μm to 2.0 μm are used as carrier fine particles contained in the fine particle suspension. In the range, it is preferably about 10 μm or less, and more preferably about 7 μm. When the vertical width of the fine channel 5 is such a value, the fine particle suspension containing the carrier fine particles having the above-described particle diameter flows in the fine channel 5 from the electrode 4 when flowing in the fine channel 5. The pulse voltage is applied to “the carrier fine particles are formed into a pearl chain in the width direction of the fine channel 5 and the pearl chains of the carrier fine particles are generated in a single layer in the vertical direction of the fine channel 5. Will be realized more effectively.

  The channel width W of the fine channel 5 can be set as appropriate. Moreover, in the example of the microchannel device 1 shown in FIGS. 1 and 2, the channel width W of the microchannel 5 is constant, but is not limited thereto. The channel width W of the micro channel 5 may be partially expanded or narrowed. However, “a voltage is applied to the fine channel 5 and the carrier fine particles contained in the fine particle suspension flowing in the fine channel 5 are aligned in the width direction to determine whether or not aggregates of the carrier fine particles are formed. In the case of measurement (aggregate formation measurement), if the channel width W of the microchannel 5 is excessively large, the magnitude of the voltage to be applied from the electrode 4 to the microchannel 5 needs to be excessively increased. This is undesirable. When the flow path width W of the fine flow path 5 is excessively narrow, the presence or absence of aggregates of carrier fine particles is confirmed by enlarging the carrier fine particles flowing through the fine flow path 5 using an optical microscope as an aggregate confirmation device. In some cases, the flow path width W may be smaller than the measurement spot diameter of the optical microscope. In consideration of such points, the channel width W of the fine channel 5 is preferably about 0.2 mm to 1.5 mm, and more preferably about 0.3 mm to 1.0 mm. .

  The length along the longitudinal direction of the fine flow path 5 (flow path length; indicated by a symbol L in FIG. 1) can be appropriately set according to various conditions such as an aggregate confirmation device used for aggregate formation measurement. . For example, when there is a minimum amount of liquid required for the fine particle suspension to perform the analysis of the aggregate confirmation device, the fine flow path 5 has a volume that can secure the amount of liquid necessary for the analysis. The channel length L of the channel 5 (and the channel width W and the vertical width H of the micro channel 5) is determined.

[Method for Manufacturing Fine Channel Device 1]
The microchannel device 1 of the present invention can be specifically manufactured by using a manufacturing method as shown below (first manufacturing method).

"First manufacturing method"
In carrying out the first manufacturing method, first, glass materials that are the materials of the pair of glass substrates 2 and 2 are prepared. For example, two glass plates such as soda lime glass are prepared.

(Electrode formation process)
The electrode 4 is formed by forming a conductive film having conductivity on one glass substrate 2 as follows.

  A metal thin film made of a metal (such as chromium) constituting the conductive film is formed on one surface of one glass substrate 2 by vapor deposition, sputtering, plating, or the like, and the metal thin film is coated on the metal thin film. A resist film is formed by applying a resist, and a portion corresponding to a predetermined electrode formation pattern on the resist film (for example, a non-formation portion of the electrode 4) is irradiated with light by a laser beam drawing apparatus, and an electrode The physical properties of the resist film are made different between the formed portion 4 and the non-formed portion. Then, based on the difference in physical properties, the resist film corresponding to the non-formed part is removed to expose the surface of the metal thin film, and the metal constituting the metal thin film is etched at the exposed portion of the metal thin film surface to expose the surface of the glass substrate 2 Let Further, the resist film is removed from a portion of the surface of the glass substrate 2 that is not exposed (the portion where the resist film remains). In this way, a conductive film is formed on the glass substrate 2 in a pattern corresponding to a predetermined pattern for forming the electrodes 4. This patterned conductive film forms the electrode 4.

(Adhesive layer forming process)
The adhesive layer 3 is formed on the glass substrate 2 on which the electrode 4 is formed as follows.

<Adjustment of adhesive solution for forming adhesive layer>
An adhesive layer forming resist solution (sometimes simply referred to as a resist solution) containing a photocurable resin constituting the adhesive layer 3 is prepared. For example, as the resist solution, an alkali developing adhesive as described above (Taiyo Ink Manufacturing Co., Ltd., U-100 series (TR62010, etc.)) is prepared.

<Application of adhesive solution for forming adhesive layer>
A resist film containing a photocurable resin as described above is applied to the glass substrate 2 on which the electrode 4 is formed to form a coating film. At this time, a coating film is formed on the surface of the glass substrate 2 on which the electrode 4 is formed. The method for applying the resist solution is not particularly limited, such as a spin coating method. On the other hand, a formation pattern of the fine flow path 5 is determined in advance, and a photomask having a mask pattern corresponding to the formation pattern is prepared. Then, the photomask is set above the coating film surface, and the active radiation is irradiated to the coating film through the photomask, and a portion of the coating film that is determined as a portion where the formation of the fine channel 5 is planned ( (Preliminary portion of fine channel) is set in an uncured state. At this time, the entire portion excluding the fine channel planned portion is cured. Thereafter, the uncured portion is removed by alkali development. Thereby, the adhesion layer 3 is patterned on the glass substrate 2 surface according to the formation pattern of the fine flow path 5. In addition, actinic radiation shows the energy ray which hardens photocurable resin, and is a concept containing electromagnetic waves, such as an ultraviolet-ray. In forming the pressure-sensitive adhesive layer 3, ultraviolet rays (wavelength of about 300 to 500 nm) are preferably used as the active radiation.

  At this time, the pressure-sensitive adhesive layer 3 defines the flow channel side surfaces 6 and 6 of the fine flow channel 5 at the boundary position between the formation part and the non-formation part of the pressure-sensitive adhesive layer 3.

  The adhesive layer 3 is formed as a layer having surface adhesiveness after the resist solution is cured (after the photocurable resin is cured).

(Base material fixing process)
After the adhesive layer 3 is formed on one glass substrate 2, the pair of glass substrates 2 and 2 are fixed to each other as follows.

  That is, one glass substrate 2 on which the electrode 4 and the adhesive layer 3 are laminated and the other glass substrate 2 are arranged such that the adhesive layer 3 of one glass substrate 2 is in direct contact with the other glass substrate 2. By overlapping, the pair of glass substrates 2 and 2 are fixed to each other. Here, the pair of glass substrates 2 and 2 are fixed by the surface adhesiveness of the adhesive layer 3. At this time, since the adhesive layer 3 is a layer made of a cured product of a photocurable resin, even when the glass substrates 2 and 2 are overlaid, the layer structure of the adhesive layer 3 is not crushed, The structure of the channel side surfaces 6 and 6 is maintained. In addition, the pair of glass substrates 2 and 2 define the flow path upper and lower surfaces 7 and 7 of the fine flow path 5.

  In the base material fixing step, when one glass substrate 2 and the other glass substrate 2 are overlapped, or after one glass substrate 2 and the other glass substrate 2 are overlapped, the pair of glass substrates 2 and 2 is It is preferable to be heated and pressurized (heat and pressure treatment). In the heating and pressurizing treatment, the heating condition and the pressing condition are appropriately set, and the heating condition is preferably a condition for heating the pair of glass substrates 2 and 2 in the range of room temperature to 80 ° C. The pressurizing condition is preferably a condition in which the pair of glass substrates 2 and 2 are pressurized in a range greater than atmospheric pressure and 0.2 MPa or less. By such heat and pressure treatment, a state in which the surface tackiness of the pressure-sensitive adhesive layer 3 is improved can be formed, and the pair of glass substrates 2 and 2 can be fixed to each other without adhesion unevenness. At this time, the pair of glass substrates 2 and 2 can be detachably fixed to each other via the adhesive layer 3.

  In this way, the channel upper and lower surfaces 7 and 7 and the channel side surfaces 6 and 6 of the microchannel 5 are formed by the pair of glass substrates 2 and 2 and the adhesive layer 3, and the microchannel device 1 of the present invention is manufactured.

  In the first manufacturing method, in the adhesive layer forming step, the entire portion of the coating film except the planned fine channel portion is cured. However, the present invention is not limited to this, and the fine channel planned portion of the coating film is not limited thereto. It is only necessary that at least a portion around the fine channel planned portion is cured with respect to the portion excluding.

"Second manufacturing method"
In the said 1st manufacturing method, although both the electrode 4 and the adhesion layer 3 are formed in one glass substrate 2 among a pair of glass substrates 2 and 2 which face, of the microchannel device 1 of this invention The manufacturing method is not limited to such a method. In the manufacturing method of the microchannel device 1 of the present invention, a glass material as a material of the pair of glass substrates 2 and 2 is prepared similarly to the first manufacturing method, and then one glass substrate of the pair of glass substrates 2 is prepared. The electrode 4 may be formed on 2 (electrode forming step), and the adhesive layer 3 may be formed on the other glass substrate 2 (adhesive layer forming step) (second manufacturing method).

  The electrode forming step and the adhesive layer forming step in the second manufacturing method are performed in the same manner as the electrode forming step and the adhesive layer forming step in the first manufacturing method, respectively.

  After the electrode forming step and the adhesive layer forming step in the second manufacturing method are performed, the pair of glass substrates 2 and 2 are fixed to each other (base material fixing step). In the base material fixing step in the second manufacturing method, the glass substrate 2 on which the adhesive layer 3 is formed and the glass substrate 2 on which the electrode 4 is formed are overlapped, and the pair of glass substrates 2 and 2 are fixed to each other. In particular, in the base material fixing step in the second manufacturing method, the adhesive layer 3 is in direct contact with the glass substrate 2 on which the electrode 4 is formed while matching the relative positional relationship between the electrode 4 and the adhesive layer 3. Two glass substrates 2 and 2 are superposed. At this time, the relative positional relationship between the electrode 4 and the adhesive layer 3 is determined according to the pattern of the electrode 4 patterned on one glass substrate 2 and the pattern of the adhesive layer 3 patterned on the other glass substrate 2. Also in the second manufacturing method, when the pair of glass substrates 2 and 2 are fixed to each other, the pair of glass substrates 2 and 2 define the flow channel upper and lower surfaces 7 and 7 of the fine flow channel 5. Further, in the second manufacturing method, similarly to the first manufacturing method, a heat and pressure treatment may be further performed.

  Next, it demonstrates that the microchannel device of this invention forms the microchannel which can pass fine particle suspension effectively using an Example.

Example 1
(Preparation of microchannel device)
Prepare two glass substrates (length 5mm x width 5mm, soda lime glass), apply gold plating on one surface of one glass substrate, and place gold in a predetermined area in a line with a width of 0.5mm from the plating surface. The structure which provided the electrically conductive film which consists of gold plating on the glass substrate was obtained. The removal of gold was performed by etching. At this time, a portion to be etched on the gold plating surface was determined according to a predetermined electrode pattern. The etched conductive film forms an electrode.

On the surface of the glass substrate provided with electrodes, a resist solution (Taiyo Ink Manufacturing Co., Ltd., U-100 (TR62010)) was applied by spin coating using a spin coater to form a coating film. The coating amount of the resist solution was set so that the thickness of the adhesive layer was 7 μm based on the glass substrate surface. On the other hand, a photomask was prepared in which a pattern corresponding to the formation position, shape, and dimensions of the microchannel formed in the microchannel device was formed. In addition, about the setting value of the dimension of a microchannel, the vertical width was 7 micrometers, the channel length of the microchannel was 5 mm, and the channel width of the microchannel was 0.7 mm. Next, the position of the photomask pattern with respect to the coating film is determined, the photomask is set at a predetermined position above the coating film, and ultraviolet rays (600 mJ / cm ² ) are irradiated toward the coating film through the photomask. The exposure process was performed. After the exposure treatment, alkali development was performed, and an adhesive layer was formed in a portion excluding the fine channel. At this time, the fine channel is formed in a non-formed portion of the adhesive layer, and the edge of the adhesive layer defines the side surface of the fine channel.

  A pair of glass substrates was fixed to each other by superimposing the other glass substrate on the glass substrate on which the electrode and the adhesive layer were formed to form an overlapped body. When the pair of glass substrates were fixed to each other, a heat and pressure treatment was performed. The heat and pressure treatment was carried out by heating the stacked body to 80 ° C. and pressurizing it in the thickness direction of the stacked body under the condition of 0.2 MPa and maintaining the state for 5 minutes.

  In this way, a microchannel device was manufactured. Ten samples were manufactured as microchannel devices. In this micro-channel device, the micro-channel is formed to have a vertical channel width of 7 μm, a channel length of 5 mm, and a channel width of 0.7 mm as set values for all samples. The device was formed in a straight line in plan view. Further, in the microchannel device, the electrodes are formed so as to project into the microchannel (projection length is 0.1 mm). Evaluation of the microchannel of the microchannel device was performed using each sample as follows.

(Evaluation of micro-channel of micro-channel device)
1 μL of the fine particle suspension was sucked into the pipette, and the fine particle suspension was discharged from the pipette toward the longitudinal end of the fine channel of the fine channel device obtained above. At this time, for all the samples, it was visually confirmed that the fine particle suspension smoothly passed through the fine channel according to the current state of the capillary. Thereby, it was evaluated that the fine flow path of the fine flow path device can smoothly pass the fine particle suspension by capillary action. As the fine particle suspension, a suspension of latex beads (diameter 1.53 μm, manufactured by Polyscience) coated with bovine serum albumin (manufactured by Sigma Aldrich) was used.

Comparative Example 1
Two glass substrates made of the same material as in Example 1 were prepared. On one glass substrate, grooves (vertical width (groove depth) of 5 μm, groove width of 0.7 mm, grooves with the same dimensions as the fine flow path of Example 1 were obtained. 5 mm in length) was formed. An etching method was used as a method for forming the groove. About the other glass substrate, the electrode was formed by the same method as Example 1. And one glass substrate in which the groove was formed and the other glass substrate in which the electrode was formed were overlapped. At this time, a fine channel is formed in the portion where the groove is formed. Next, anaerobic UV curable adhesive (anaerobic UV curable adhesive ("Optocreve UT20", manufactured by Adel)) is poured into the gap between the overlapping glass substrates by using capillary action, and the space between the overlapping glass substrates. A thin film made of an anaerobic ultraviolet curable adhesive was formed (adhesive casting process), and the thin film was irradiated with ultraviolet rays (6000 mJ / cm ² ) in a nitrogen gas atmosphere (ultraviolet irradiation under anaerobic conditions). At this time, in the thin film, the anaerobic ultraviolet curable adhesive in the portion corresponding to the fine flow path is in an uncured state, and the anaerobic ultraviolet curable adhesive other than the portion corresponding to the fine flow path is cured. After that, the anaerobic UV curable adhesive in an uncured state in the thin film was washed away with a cleaning liquid (ethanol) (cleaning treatment). Then, a series of processing steps including an adhesive pouring process, an anaerobic ultraviolet irradiation process, and a cleaning process were repeated five times, thereby obtaining a microchannel device. In addition, when this microchannel device was formed in an ideal state (anaerobic UV curable adhesive was poured into the gap between the glass substrates without excess and deficiency, and anaerobic in the microchannel) In the case of no UV curable adhesive cured), the microchannel of the microchannel device is formed with a vertical width of 7 μm, a channel length of 5 mm, and a channel width of 0.7 mm, as in Example 1. The electrode is formed so as to protrude into the fine channel (projection length is 0.1 mm) Of the ten samples, three were formed with ideal fine channels and electrodes. .

DESCRIPTION OF SYMBOLS 1 Microchannel device 2 Glass substrate 3 Adhesive layer 4 Electrode 5 Microchannel 6 Channel side surface 7 Channel top and bottom surface 10 Edge

Claims (6)

A fine flow comprising a pair of glass substrates facing each other, a fine channel formed between the pair of glass substrates so as to allow passage of the fine particle suspension, and an electrode formed so as to be able to apply a voltage to the fine channel. Road device,
Between the pair of glass substrates, an adhesive layer made of a cured product of a photocurable resin and having surface adhesiveness is formed to define the side surface in the width direction of the fine channel,
The pair of glass substrates are fixed to each other via an adhesive layer to define the upper and lower surfaces of the fine channel,
The electrode is made of a conductive film having conductivity formed on one side of a glass substrate.   The microchannel device according to claim 1, wherein the microchannel has a vertical width of 10 μm or less.   The microchannel device according to claim 1 or 2, wherein the conductive film is formed such that at least a part of the conductive film is located in the microchannel. A microchannel device comprising a pair of glass substrates facing each other, a microchannel formed between the pair of glass substrates so as to be able to pass a fine particle suspension, and an electrode capable of applying a voltage to the microchannel A manufacturing method comprising:
Forming an electrode by forming a conductive film on one glass substrate;
By applying a resist solution containing a photocurable resin to a glass substrate on which an electrode is formed to form a coating film, and irradiating active radiation toward the coating film to cure the coating film, Patterning a pressure-sensitive adhesive layer having surface adhesiveness on the glass substrate surface and forming a side surface in the width direction of the fine channel with the pressure-sensitive adhesive layer;
By superposing the one glass substrate on which the electrode and the adhesive layer are formed and the other glass substrate so that the adhesive layer is in direct contact with the other glass substrate and fixing the pair of glass substrates to each other, And a step of forming upper and lower surfaces of the flow path. A microchannel device comprising a pair of glass substrates facing each other, a microchannel formed between the pair of glass substrates so as to be able to pass a fine particle suspension, and an electrode capable of applying a voltage to the microchannel A manufacturing method comprising:
One glass substrate is formed by applying a resist solution containing a photocurable resin to one glass substrate to form a coating film, and irradiating active radiation toward the coating film to cure the coating film. Patterning a pressure-sensitive adhesive layer having surface adhesiveness on the surface, and forming a side surface in the width direction of the fine channel with the pressure-sensitive adhesive layer;
Forming a conductive film on the other glass substrate to form an electrode;
The glass substrate on which the adhesive layer is formed and the glass substrate on which the electrode is formed are superposed so that the adhesive layer is in direct contact with the glass substrate on which the electrode is formed, and the pair of glass substrates are fixed to each other, thereby providing a fine flow path. Forming a top surface and a bottom surface of the microchannel device.   The microchannel device according to claim 4 or 5, wherein in the step of forming upper and lower surfaces of the microchannel, the pair of glass substrates are fixed to each other by heating and pressurizing the pair of glass substrates. Manufacturing method.

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