JP2010108984A - Method of manufacturing printed circuit board - Google Patents
Method of manufacturing printed circuit board Download PDFInfo
- Publication number
- JP2010108984A JP2010108984A JP2008276715A JP2008276715A JP2010108984A JP 2010108984 A JP2010108984 A JP 2010108984A JP 2008276715 A JP2008276715 A JP 2008276715A JP 2008276715 A JP2008276715 A JP 2008276715A JP 2010108984 A JP2010108984 A JP 2010108984A
- Authority
- JP
- Japan
- Prior art keywords
- release material
- wiring board
- metal foil
- printed wiring
- resin insulation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 29
- 239000000463 material Substances 0.000 claims abstract description 76
- 229910052751 metal Inorganic materials 0.000 claims abstract description 43
- 239000002184 metal Substances 0.000 claims abstract description 43
- 238000000034 method Methods 0.000 claims abstract description 36
- 239000010410 layer Substances 0.000 claims abstract description 26
- 238000011282 treatment Methods 0.000 claims abstract description 19
- 239000011888 foil Substances 0.000 claims abstract description 14
- 239000011229 interlayer Substances 0.000 claims abstract description 7
- 229920005989 resin Polymers 0.000 claims description 41
- 239000011347 resin Substances 0.000 claims description 41
- 238000009413 insulation Methods 0.000 claims description 30
- 238000003825 pressing Methods 0.000 claims description 20
- 238000010438 heat treatment Methods 0.000 claims description 11
- 230000015572 biosynthetic process Effects 0.000 claims description 10
- 239000000126 substance Substances 0.000 abstract description 14
- 230000013011 mating Effects 0.000 abstract description 10
- 230000032798 delamination Effects 0.000 abstract 1
- 238000007731 hot pressing Methods 0.000 abstract 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 26
- 239000011889 copper foil Substances 0.000 description 20
- 239000000758 substrate Substances 0.000 description 20
- 230000000052 comparative effect Effects 0.000 description 16
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 10
- 239000011521 glass Substances 0.000 description 10
- 239000000243 solution Substances 0.000 description 10
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 9
- 239000004734 Polyphenylene sulfide Substances 0.000 description 8
- 229910052782 aluminium Inorganic materials 0.000 description 8
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 8
- 239000011159 matrix material Substances 0.000 description 8
- 229920000069 polyphenylene sulfide Polymers 0.000 description 8
- 239000011342 resin composition Substances 0.000 description 8
- 238000007788 roughening Methods 0.000 description 8
- 239000003822 epoxy resin Substances 0.000 description 7
- 239000007788 liquid Substances 0.000 description 7
- 229920000647 polyepoxide Polymers 0.000 description 7
- 229920001721 polyimide Polymers 0.000 description 7
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 6
- 239000002585 base Substances 0.000 description 6
- 229910052802 copper Inorganic materials 0.000 description 6
- 239000010949 copper Substances 0.000 description 6
- 238000011156 evaluation Methods 0.000 description 6
- 239000011256 inorganic filler Substances 0.000 description 6
- 229910003475 inorganic filler Inorganic materials 0.000 description 6
- 229920005992 thermoplastic resin Polymers 0.000 description 6
- -1 carboxylic acid modified acrylonitrile butadiene Chemical class 0.000 description 5
- 239000003795 chemical substances by application Substances 0.000 description 5
- 238000007772 electroless plating Methods 0.000 description 5
- 239000004744 fabric Substances 0.000 description 5
- 238000003475 lamination Methods 0.000 description 5
- 230000035515 penetration Effects 0.000 description 5
- VTYYLEPIZMXCLO-UHFFFAOYSA-L Calcium carbonate Chemical compound [Ca+2].[O-]C([O-])=O VTYYLEPIZMXCLO-UHFFFAOYSA-L 0.000 description 4
- 239000004697 Polyetherimide Substances 0.000 description 4
- 229920013629 Torelina Polymers 0.000 description 4
- 239000004742 Torelina™ Substances 0.000 description 4
- 239000000853 adhesive Substances 0.000 description 4
- 230000001070 adhesive effect Effects 0.000 description 4
- 239000012790 adhesive layer Substances 0.000 description 4
- TZCXTZWJZNENPQ-UHFFFAOYSA-L barium sulfate Chemical compound [Ba+2].[O-]S([O-])(=O)=O TZCXTZWJZNENPQ-UHFFFAOYSA-L 0.000 description 4
- 239000007822 coupling agent Substances 0.000 description 4
- 238000013007 heat curing Methods 0.000 description 4
- 238000007747 plating Methods 0.000 description 4
- 229920001601 polyetherimide Polymers 0.000 description 4
- 229920001955 polyphenylene ether Polymers 0.000 description 4
- 238000000926 separation method Methods 0.000 description 4
- 229920001187 thermosetting polymer Polymers 0.000 description 4
- 239000004696 Poly ether ether ketone Substances 0.000 description 3
- 239000004952 Polyamide Substances 0.000 description 3
- 239000004962 Polyamide-imide Substances 0.000 description 3
- 239000004642 Polyimide Substances 0.000 description 3
- 239000000654 additive Substances 0.000 description 3
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 3
- 238000010030 laminating Methods 0.000 description 3
- 229920002647 polyamide Polymers 0.000 description 3
- 229920002312 polyamide-imide Polymers 0.000 description 3
- 229920001230 polyarylate Polymers 0.000 description 3
- 229920000515 polycarbonate Polymers 0.000 description 3
- 239000004417 polycarbonate Substances 0.000 description 3
- 229920002530 polyetherether ketone Polymers 0.000 description 3
- 230000003014 reinforcing effect Effects 0.000 description 3
- 229910002012 Aerosil® Inorganic materials 0.000 description 2
- QPLDLSVMHZLSFG-UHFFFAOYSA-N Copper oxide Chemical compound [Cu]=O QPLDLSVMHZLSFG-UHFFFAOYSA-N 0.000 description 2
- 239000005751 Copper oxide Substances 0.000 description 2
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 description 2
- 239000005062 Polybutadiene Substances 0.000 description 2
- 239000006087 Silane Coupling Agent Substances 0.000 description 2
- WNROFYMDJYEPJX-UHFFFAOYSA-K aluminium hydroxide Chemical compound [OH-].[OH-].[OH-].[Al+3] WNROFYMDJYEPJX-UHFFFAOYSA-K 0.000 description 2
- 239000002518 antifoaming agent Substances 0.000 description 2
- 239000007864 aqueous solution Substances 0.000 description 2
- 229910000019 calcium carbonate Inorganic materials 0.000 description 2
- AXCZMVOFGPJBDE-UHFFFAOYSA-L calcium dihydroxide Chemical compound [OH-].[OH-].[Ca+2] AXCZMVOFGPJBDE-UHFFFAOYSA-L 0.000 description 2
- 239000000920 calcium hydroxide Substances 0.000 description 2
- 229910001861 calcium hydroxide Inorganic materials 0.000 description 2
- 238000004140 cleaning Methods 0.000 description 2
- 229910000431 copper oxide Inorganic materials 0.000 description 2
- 238000009713 electroplating Methods 0.000 description 2
- 239000005350 fused silica glass Substances 0.000 description 2
- 150000002500 ions Chemical class 0.000 description 2
- 239000005011 phenolic resin Substances 0.000 description 2
- 239000000049 pigment Substances 0.000 description 2
- 229920003023 plastic Polymers 0.000 description 2
- 239000004033 plastic Substances 0.000 description 2
- 239000002985 plastic film Substances 0.000 description 2
- 229920006255 plastic film Polymers 0.000 description 2
- 229920002857 polybutadiene Polymers 0.000 description 2
- 229920001225 polyester resin Polymers 0.000 description 2
- 239000004645 polyester resin Substances 0.000 description 2
- 239000009719 polyimide resin Substances 0.000 description 2
- 229920006324 polyoxymethylene Polymers 0.000 description 2
- 239000000377 silicon dioxide Substances 0.000 description 2
- 239000000454 talc Substances 0.000 description 2
- 229910052623 talc Inorganic materials 0.000 description 2
- 229920002554 vinyl polymer Polymers 0.000 description 2
- 238000005406 washing Methods 0.000 description 2
- ZNBNBTIDJSKEAM-UHFFFAOYSA-N 4-[7-hydroxy-2-[5-[5-[6-hydroxy-6-(hydroxymethyl)-3,5-dimethyloxan-2-yl]-3-methyloxolan-2-yl]-5-methyloxolan-2-yl]-2,8-dimethyl-1,10-dioxaspiro[4.5]decan-9-yl]-2-methyl-3-propanoyloxypentanoic acid Chemical compound C1C(O)C(C)C(C(C)C(OC(=O)CC)C(C)C(O)=O)OC11OC(C)(C2OC(C)(CC2)C2C(CC(O2)C2C(CC(C)C(O)(CO)O2)C)C)CC1 ZNBNBTIDJSKEAM-UHFFFAOYSA-N 0.000 description 1
- WSSSPWUEQFSQQG-UHFFFAOYSA-N 4-methyl-1-pentene Chemical compound CC(C)CC=C WSSSPWUEQFSQQG-UHFFFAOYSA-N 0.000 description 1
- 229910052582 BN Inorganic materials 0.000 description 1
- PZNSFCLAULLKQX-UHFFFAOYSA-N Boron nitride Chemical compound N#B PZNSFCLAULLKQX-UHFFFAOYSA-N 0.000 description 1
- 229910001369 Brass Inorganic materials 0.000 description 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 229920000459 Nitrile rubber Polymers 0.000 description 1
- 239000002033 PVDF binder Substances 0.000 description 1
- 229930182556 Polyacetal Natural products 0.000 description 1
- 239000004695 Polyether sulfone Substances 0.000 description 1
- 239000004721 Polyphenylene oxide Substances 0.000 description 1
- 239000004743 Polypropylene Substances 0.000 description 1
- 239000011354 acetal resin Substances 0.000 description 1
- DHKHKXVYLBGOIT-UHFFFAOYSA-N acetaldehyde Diethyl Acetal Natural products CCOC(C)OCC DHKHKXVYLBGOIT-UHFFFAOYSA-N 0.000 description 1
- 125000002777 acetyl group Chemical class [H]C([H])([H])C(*)=O 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 230000004913 activation Effects 0.000 description 1
- 239000003513 alkali Substances 0.000 description 1
- ROOXNKNUYICQNP-UHFFFAOYSA-N ammonium persulfate Chemical compound [NH4+].[NH4+].[O-]S(=O)(=O)OOS([O-])(=O)=O ROOXNKNUYICQNP-UHFFFAOYSA-N 0.000 description 1
- 239000012935 ammoniumperoxodisulfate Substances 0.000 description 1
- 239000004760 aramid Substances 0.000 description 1
- 229920003235 aromatic polyamide Polymers 0.000 description 1
- RJTANRZEWTUVMA-UHFFFAOYSA-N boron;n-methylmethanamine Chemical compound [B].CNC RJTANRZEWTUVMA-UHFFFAOYSA-N 0.000 description 1
- 239000010951 brass Substances 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 239000003054 catalyst Substances 0.000 description 1
- 229920002301 cellulose acetate Polymers 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 239000003638 chemical reducing agent Substances 0.000 description 1
- 229910000365 copper sulfate Inorganic materials 0.000 description 1
- ARUVKPQLZAKDPS-UHFFFAOYSA-L copper(II) sulfate Chemical compound [Cu+2].[O-][S+2]([O-])([O-])[O-] ARUVKPQLZAKDPS-UHFFFAOYSA-L 0.000 description 1
- 238000005336 cracking Methods 0.000 description 1
- 238000001723 curing Methods 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- XLJMAIOERFSOGZ-UHFFFAOYSA-M cyanate Chemical compound [O-]C#N XLJMAIOERFSOGZ-UHFFFAOYSA-M 0.000 description 1
- 125000001651 cyanato group Chemical group [*]OC#N 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000004090 dissolution Methods 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 229920006351 engineering plastic Polymers 0.000 description 1
- 230000002708 enhancing effect Effects 0.000 description 1
- 239000000835 fiber Substances 0.000 description 1
- JEGUKCSWCFPDGT-UHFFFAOYSA-N h2o hydrate Chemical compound O.O JEGUKCSWCFPDGT-UHFFFAOYSA-N 0.000 description 1
- LNEPOXFFQSENCJ-UHFFFAOYSA-N haloperidol Chemical compound C1CC(O)(C=2C=CC(Cl)=CC=2)CCN1CCCC(=O)C1=CC=C(F)C=C1 LNEPOXFFQSENCJ-UHFFFAOYSA-N 0.000 description 1
- 229910000378 hydroxylammonium sulfate Inorganic materials 0.000 description 1
- 239000002648 laminated material Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 239000012778 molding material Substances 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 230000003472 neutralizing effect Effects 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 239000004745 nonwoven fabric Substances 0.000 description 1
- 230000033116 oxidation-reduction process Effects 0.000 description 1
- 229910052763 palladium Inorganic materials 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 229920001568 phenolic resin Polymers 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
- 229920003055 poly(ester-imide) Polymers 0.000 description 1
- 229920001643 poly(ether ketone) Polymers 0.000 description 1
- 229920003207 poly(ethylene-2,6-naphthalate) Polymers 0.000 description 1
- 229920002492 poly(sulfone) Polymers 0.000 description 1
- 229920006267 polyester film Polymers 0.000 description 1
- 229920006393 polyether sulfone Polymers 0.000 description 1
- 239000011112 polyethylene naphthalate Substances 0.000 description 1
- 229920000139 polyethylene terephthalate Polymers 0.000 description 1
- 239000005020 polyethylene terephthalate Substances 0.000 description 1
- 229920006380 polyphenylene oxide Polymers 0.000 description 1
- 229920012287 polyphenylene sulfone Polymers 0.000 description 1
- 229920001155 polypropylene Polymers 0.000 description 1
- 229920001343 polytetrafluoroethylene Polymers 0.000 description 1
- 239000004810 polytetrafluoroethylene Substances 0.000 description 1
- 229920002981 polyvinylidene fluoride Polymers 0.000 description 1
- UKLNMMHNWFDKNT-UHFFFAOYSA-M sodium chlorite Chemical compound [Na+].[O-]Cl=O UKLNMMHNWFDKNT-UHFFFAOYSA-M 0.000 description 1
- 229960002218 sodium chlorite Drugs 0.000 description 1
- 239000001488 sodium phosphate Substances 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 230000008961 swelling Effects 0.000 description 1
- RYFMWSXOAZQYPI-UHFFFAOYSA-K trisodium phosphate Chemical compound [Na+].[Na+].[Na+].[O-]P([O-])([O-])=O RYFMWSXOAZQYPI-UHFFFAOYSA-K 0.000 description 1
- 229910000406 trisodium phosphate Inorganic materials 0.000 description 1
- 235000019801 trisodium phosphate Nutrition 0.000 description 1
- 238000004804 winding Methods 0.000 description 1
- 239000002759 woven fabric Substances 0.000 description 1
Landscapes
- Production Of Multi-Layered Print Wiring Board (AREA)
Abstract
Description
本発明は,プリント配線板の製造方法に関する。 The present invention relates to a method for manufacturing a printed wiring board.
近年PKG基板の小型化,薄物化が進む中で,コアレス基板などに代表とする最先端のプリント配線板製造方法では,キャリア付銅箔や基板を支持体として,片面にプリプレグ及びビルドアップ樹脂絶縁シートを積み重ね多層化し,プリント配線板を形成する方法が考えられている。しかし,この製造方法では,薄い積層板を使用することが多いため,工程を流すと巻きつきやわれなどの問題で歩留まりが著しく低下する可能性がある。また,片面に繰り返し積み上げていくことから,構造が非対称となり1方向にそりやすく工程を流せなくなる可能性が高い。 In recent years, with the progress of miniaturization and thinning of PKG substrates, the most advanced printed wiring board manufacturing methods, such as coreless substrates, have prepreg and build-up resin insulation on one side with a carrier-supported copper foil or substrate as a support. A method of stacking sheets to form a printed wiring board has been considered. However, since this manufacturing method often uses a thin laminated plate, the yield may be significantly reduced due to problems such as winding and cracking when the process is performed. In addition, since the structure is repeatedly stacked on one side, the structure becomes asymmetrical, and it is highly likely that the process cannot easily flow in one direction.
前記のプリント配線板製造方法での課題は,ハンドリングや作業性の悪化である。これらを解決するため,例えば特開2000−91732号公報のように,プリプレグをサイズの小さい離型フィルムで挟み,その外側に金属張積層板を配置し積層することで,両側に多層化後,基板の周囲の接着部分を切断することで,剥離可能となり2枚の積層板を同時に作製できる。しかし,この方法では,積層時において,離型フィルムの位置がズレた場合に剥がすことが困難になることや,積層工程の回数が増えるなどの問題がある。 The problem with the printed wiring board manufacturing method is the deterioration of handling and workability. In order to solve these problems, for example, as disclosed in Japanese Patent Application Laid-Open No. 2000-91732, a prepreg is sandwiched between release films having a small size, and a metal-clad laminate is disposed and laminated on the outside thereof, and after multilayering on both sides, By cutting the adhesive portion around the substrate, it can be peeled off and two laminated plates can be produced simultaneously. However, this method has problems such as difficulty in peeling when the position of the release film is displaced during lamination, and an increase in the number of lamination processes.
また,例えば特開2007−90581号公報のように補強基板の両面に,前者特許のように周囲に接着部分を作りながら多層化する製造方法がある。しかし,この方法では,同様に積層時において,離型フィルム(この場合,キャリア付き極薄銅箔を使用)の位置がズレた場合に剥がすことが困難になること,及び基板を使用するため,フィルムと比較し,コストが高くなることが考えられる。そこで,例えば特開平7−302977号公報のように補強基板の代わりに離型材として比較的安価なアルミニウムを用いることが考えられる。しかし,アルミニウムを用いて,2枚合わせのままで各工程に投入すると,工程中で使用する薬液が2枚合わせ片面板と離型材の合わせ面(以下合わせ面という)に滲み込むことがあった。各工程中に付着している薬液成分を洗浄する工程があるが,合わせ面に滲みこんでいる薬液は通常の洗浄では除去されにくいため残存し,他の工程の薬液を汚染する問題がある。また,回路加工においては,離型材のアルミニウムが溶解してしまう問題もある。 Further, for example, there is a manufacturing method in which multiple layers are formed while forming adhesive portions on both sides of a reinforcing substrate as in the former patent as disclosed in JP-A-2007-90581. However, this method also makes it difficult to peel off when the position of the release film (in this case, using an ultra-thin copper foil with a carrier) is shifted during lamination, and because the substrate is used, Compared to film, the cost may be higher. Therefore, for example, it is conceivable to use relatively inexpensive aluminum as a mold release material instead of the reinforcing substrate as disclosed in JP-A-7-302977. However, when aluminum is used and two sheets are put together in each process, the chemical used in the process may ooze into the mating surface of the two-sheet mating single-sided plate and the release material (hereinafter referred to as the mating surface). . There is a process of cleaning the chemical components adhering to each process, but the chemical liquid that has soaked into the mating surfaces remains difficult to remove by normal cleaning, and there is a problem of contaminating the chemical liquid in other processes. In circuit processing, there is also a problem that aluminum as a release material is dissolved.
また,例えば,特開2007−90581号公報のように離型材に離型フィルムを用いると,上記のような薬液の滲み込み,離型材の溶解といった問題は解決できる。しかし,多層化プレスや乾燥などの高温になる工程において,離型フィルムの収縮により合わせ面が剥離もしくは接着強度が低下してしまう問題がある。 Further, for example, when a release film is used as a release material as disclosed in JP-A-2007-90581, the above-described problems such as penetration of a chemical solution and dissolution of the release material can be solved. However, there is a problem in that the mating surface peels off or the adhesive strength decreases due to the shrinkage of the release film in a high temperature process such as a multilayer press or drying.
本発明は,前記の方法の不具合点を解消し,工程中における合わせ面への薬液の滲み込みがなく,高温処理後においても剥離が生じない,プリント配線板製造方法を提供するものである。 The present invention provides a printed wiring board manufacturing method that eliminates the problems of the above-described method, prevents the chemical solution from seeping into the mating surface during the process, and does not cause peeling even after high-temperature processing.
本発明は以下の通りである。
1. 所定枚数のプリプレグの積層体の片面に金属箔を重ねた構成体2組を,プリプレグの積層体を内側にして,離型材を介して重ね,加熱加圧して2枚合わせ片面金属箔張積層板を作製する工程と、前記2枚合わせ片面金属箔張積層板の金属箔面に対し,回路形成,内層処理,層間接続により多層化処理を行う工程と,離型材を剥離する工程と、多層化した最外層面及び離型材を剥離した面に、回路形成を行う工程とを有するプリント配線板の製造方法。
2. 所定枚数のビルドアップ樹脂絶縁シート2組を,離型材を介して重ね,加熱加圧して2枚合わせビルドアップ樹脂絶縁シートを作製する工程と、前記2枚合わせビルドアップ樹脂絶縁シートの片面に対し,回路形成,内層処理,層間接続により多層化処理を行う工程と,離型材を剥離する工程と、多層化した最外層面及び離型材を剥離した面に、回路形成を行う工程とを有するプリント配線板の製造方法。
3. 離型材として、100〜250℃の範囲での熱収縮率が1.5%以下である離型材を使用することを特徴とする,前記のプリント配線板の製造方法。
4. 離型材として、加熱加圧後における伸びの低下率が,50%以下である離型材を使用することを特徴とする,前記のプリント配線板の製造方法。
5. 加熱加圧の温度が、100〜250℃での範囲である,前記のプリント配線板の製造方法。
6. 離型材の厚みが,10μm以上,200μm以下であることを特徴とする,前記のプリント配線板の製造方法。
The present invention is as follows.
1. Two pieces of a prepreg laminate with two metal foils laminated on one side, with the prepreg laminate on the inside, stacked via a release material, and heated and pressed to form a single-sided metal foil-clad laminate A step of forming a multilayer on the metal foil surface of the two-sheet laminated single-sided metal foil-clad laminate by circuit formation, inner layer treatment, interlayer connection, a step of peeling the release material, and multilayering And a step of forming a circuit on the outermost layer surface and the surface from which the release material has been peeled off.
2. A process of producing a two-ply buildup resin insulation sheet by stacking two sets of buildup resin insulation sheets of a predetermined number via a release material and heating and pressurizing, and on one side of the two-ply buildup resin insulation sheet , Circuit forming, inner layer processing, a step of performing multilayer processing by interlayer connection, a step of peeling the release material, and a step of forming a circuit on the outermost layer surface and the surface from which the release material has been peeled. A method for manufacturing a wiring board.
3. The method for producing a printed wiring board as described above, wherein a release material having a thermal shrinkage rate of 1.5% or less in the range of 100 to 250 ° C. is used as the release material.
4). The method for producing a printed wiring board as described above, wherein a release material having a reduction rate of elongation after heating and pressing is 50% or less is used as the release material.
5). The manufacturing method of the said printed wiring board whose temperature of a heating pressurization is the range in 100-250 degreeC.
6). The method for producing a printed wiring board as described above, wherein the release material has a thickness of 10 μm or more and 200 μm or less.
本発明によると,各工程において,合わせ面への薬液の滲み込みがなく,高温においても分離が生じない、2枚合わせ片面金属箔張積層板あるいは、2枚合わせビルドアップ樹脂絶縁シートを基にしたプリント配線板製造方法を提供することができる。 According to the present invention, in each process, there is no permeation of chemicals to the mating surfaces, and separation does not occur even at high temperatures, based on a two-layered single-sided metal foil-clad laminate or a two-layered build-up resin insulation sheet. A printed wiring board manufacturing method can be provided.
本発明で用いられる金属箔としては,通常のプリント配線板用に用いられる金属箔,例えば銅箔が用いることができるが,特に制限はない。銅箔としては,電解銅箔,圧延銅箔のいずれでもよく,厚みは特に限定されるものではない。一般にプリント配線板に用いられている,厚み105μm以下の銅箔で構わないし,ピーラブルタイプの銅箔を用いることもできる。尚,ピーラブルタイプの代わりに,アルミキャリアやニッケルキャリアを有するようなエッチャブルタイプの銅箔を用いることもできる。さらに,一般にプリント配線板に用いられる銅箔には,粗化処理が施されているが,本発明でも,そのような銅箔を用いることが出来るし,また,粗化処理が施されていなくても特にかまわない。 As the metal foil used in the present invention, a metal foil used for an ordinary printed wiring board, for example, a copper foil can be used, but there is no particular limitation. The copper foil may be either an electrolytic copper foil or a rolled copper foil, and the thickness is not particularly limited. A copper foil having a thickness of 105 μm or less, which is generally used for a printed wiring board, may be used, or a peelable copper foil may be used. Instead of the peelable type, an etchable type copper foil having an aluminum carrier or a nickel carrier can also be used. Furthermore, the copper foil generally used for printed wiring boards is subjected to a roughening treatment. However, in the present invention, such a copper foil can be used and is not subjected to the roughening treatment. But it does n’t matter.
本発明で用いられるプリプレグとしては,フェノール樹脂,ポリエステル樹脂,エポキシ樹脂,シアナト樹脂,熱硬化性ポリイミド樹脂,その他の熱硬化性樹脂,及びそれらの2種以上の組成物などのマトリックス用樹脂組成物を,ガラス(Eガラス,Dガラス,Sガラス,Tガラス,石英ガラス(=クオーツガラス),その他),セラミックス類(アルミナ,窒化硼素,その他),全芳香族ポリアミド,ポリフェニレンサルファイド,ポリエーテルイミド,ポリイミド,セルカーボン,その他の耐熱性エンジニアリングプラスチック等を一種或いは二種以上適宜併用してなる繊維,チョップなどを用いた織布或いは不織布,連続気泡多孔質のフッ素樹脂フィルム或いはシートなどのベース材(補強基材)に含浸,塗布或いは付着させてなるものを使用して構成されるものが例示される。 Examples of the prepreg used in the present invention include phenolic resins, polyester resins, epoxy resins, cyanato resins, thermosetting polyimide resins, other thermosetting resins, and resin compositions for matrix such as two or more kinds thereof. Glass (E glass, D glass, S glass, T glass, quartz glass (= quartz glass), etc.), ceramics (alumina, boron nitride, etc.), wholly aromatic polyamide, polyphenylene sulfide, polyetherimide, Base materials such as fibers, woven fabrics or non-woven fabrics using chops, etc., one or two or more types of polyimide, cell carbon, other heat resistant engineering plastics, etc. It is impregnated, coated or adhered to a reinforcing substrate) Those configured using the are exemplified.
上記プリプレグのマトリックス用樹脂組成物は,信頼性向上のため無機フィラーを含有していても良い。この無機フィラーは,特に限定されないが,シリカ,溶融シリカ,タルク,アルミナ,水酸化アルミニウム,硫酸バリウム,水酸化カルシウム,アエロジル及び炭酸カルシウムが挙げられる。無機フィラーには,分散性を高める等の目的で,これらをシランカップリング剤等の各種カップリング剤で処理したものを含むことが好ましい。これらは,単独でも,2種以上を組み合せて用いてもよい。なお,誘電特性や低熱膨張の点からシリカが好ましい。 The resin composition for matrix of the prepreg may contain an inorganic filler for improving reliability. The inorganic filler is not particularly limited, and examples thereof include silica, fused silica, talc, alumina, aluminum hydroxide, barium sulfate, calcium hydroxide, aerosil and calcium carbonate. The inorganic filler preferably contains those treated with various coupling agents such as a silane coupling agent for the purpose of improving dispersibility. These may be used alone or in combination of two or more. Silica is preferred from the viewpoint of dielectric properties and low thermal expansion.
また,上記プリプレグのマトリックス用樹脂組成物は、可とう性向上のため,熱可塑性樹脂を含有していても良い。熱可塑性樹脂としては,フッ素樹脂,ポリフェニレンエーテル,変性ポリフェニレンエーテル,ポリフェニレンスルフィド,ポリカーボネート,ポリエーテルイミド,ポリエーテルエーテルケトン,ポリアリレート,ポリアミド,ポリアミドイミド,ポリブタジエンなどが例示されるが,これらに限定されるわけではない。熱可塑性樹脂は,1種類のものを単独で用いても良いし,2種類以上を混合して用いても良い。上記プリプレグのマトリックス用樹脂組成物中には,必要に応じて,カップリング剤,顔料,レベリング剤,消泡剤,イオントラップ剤等の添加剤を配合してもよい。 Further, the resin composition for a matrix of the prepreg may contain a thermoplastic resin in order to improve flexibility. Examples of the thermoplastic resin include, but are not limited to, fluororesin, polyphenylene ether, modified polyphenylene ether, polyphenylene sulfide, polycarbonate, polyether imide, polyether ether ketone, polyarylate, polyamide, polyamide imide, and polybutadiene. I don't mean. One type of thermoplastic resin may be used alone, or two or more types may be mixed and used. In the prepreg matrix resin composition, additives such as a coupling agent, a pigment, a leveling agent, an antifoaming agent, and an ion trapping agent may be blended as necessary.
本発明で用いられるビルドアップ樹脂絶縁シートは,フェノール樹脂,ポリエステル樹脂,エポキシ樹脂,シアナト樹脂,熱硬化性ポリイミド樹脂,その他の熱硬化性樹脂,及びそれらの2種以上の組成物などのマトリックス用樹脂組成物を,支持体の少なくとも片面に塗工し,半硬化させることにより,支持体付き絶縁フィルムを形成することができる。支持体としては,銅やアルミニウム等の金属箔,ポリエステルやポリイミド等の樹脂のキャリアフィルムが挙げられる。 The build-up resin insulation sheet used in the present invention is for a matrix such as a phenol resin, a polyester resin, an epoxy resin, a cyanate resin, a thermosetting polyimide resin, other thermosetting resins, and two or more kinds of these compositions. An insulating film with a support can be formed by applying the resin composition to at least one side of the support and semi-curing it. Examples of the support include metal foils such as copper and aluminum, and resin carrier films such as polyester and polyimide.
上記ビルドアップ樹脂絶縁シートのマトリックス用樹脂組成物は,信頼性向上のため無機フィラーを含有していても良い。この無機フィラーは,特に限定されないが,シリカ,溶融シリカ,タルク,アルミナ,水酸化アルミニウム,硫酸バリウム,水酸化カルシウム,アエロジル及び炭酸カルシウムが挙げられる。無機フィラーには,分散性を高める等の目的で,これらをシランカップリング剤等の各種カップリング剤で処理したものを含む。これらは,単独でも,2種以上を組み合せて用いてもよい。なお,誘電特性や低熱膨張の点からシリカが好ましい。 The resin composition for a matrix of the build-up resin insulation sheet may contain an inorganic filler for improving reliability. The inorganic filler is not particularly limited, and examples thereof include silica, fused silica, talc, alumina, aluminum hydroxide, barium sulfate, calcium hydroxide, aerosil and calcium carbonate. Inorganic fillers include those treated with various coupling agents such as silane coupling agents for the purpose of enhancing dispersibility. These may be used alone or in combination of two or more. Silica is preferred from the viewpoint of dielectric properties and low thermal expansion.
また,上記マトリックス用樹脂組成物は、可とう性向上のため,熱可塑性樹脂を含有していても良い。熱可塑性樹脂としては,フッ素樹脂,ポリフェニレンエーテル,変性ポリフェニレンエーテル,ポリフェニレンスルフィド,ポリカーボネート,ポリエーテルイミド,ポリエーテルエーテルケトン,ポリアリレート,ポリアミド,ポリアミドイミド,ポリブタジエン,カルボン酸変性アクリロニトリルブタジエンゴム粒子,ポリビニルアセタール樹脂,カルボン酸変性ポリビニルアセタール樹脂などが例示されるが,これらに限定されるわけではない。熱可塑性樹脂は,1種類のものを単独で用いても良いし,2種類以上を混合して用いても良い。 The matrix resin composition may contain a thermoplastic resin in order to improve flexibility. Thermoplastic resins include fluororesin, polyphenylene ether, modified polyphenylene ether, polyphenylene sulfide, polycarbonate, polyether imide, polyether ether ketone, polyarylate, polyamide, polyamide imide, polybutadiene, carboxylic acid modified acrylonitrile butadiene rubber particles, polyvinyl acetal. Examples thereof include, but are not limited to, resins and carboxylic acid-modified polyvinyl acetal resins. One type of thermoplastic resin may be used alone, or two or more types may be mixed and used.
上記ビルドアップ樹脂絶縁シートのマトリックス用樹脂組成物中には,必要に応じて,カップリング剤,顔料,レベリング剤,消泡剤,イオントラップ剤等の添加剤を配合してもよい。 Additives such as coupling agents, pigments, leveling agents, antifoaming agents, and ion trapping agents may be blended in the matrix resin composition of the build-up resin insulation sheet, if necessary.
離型材とは、一般的に、フィルムまたはシート状であり,その両面にプリプレグ,銅箔を重ね,積層成形して樹脂を硬化させた後にも,容易に硬化したプリプレグと剥離できるプラスチックや金属などのフィルムまたはシートが好ましい。具体的には,ポリフェニレンスルフィド,ポリフェニレンオキシド,ポリスルホン,ポリエーテルスルホン,ポリフェニレンスルホン,ポリエーテルイミド,ポリイミド,ポリアミドイミド,ポリアミド,ポリカーボネート,ポリアリレート,ポリエーテルケトン,ポリエーテルエーテルケトン,ポリアセタール,酢酸セルロース,ポリプロピレン,ポリ−4−メチルペンテン−1,ポリエチレンテレフタレート,ポリフッ化ビニリデン,ポリエチレンナフタレート,ポリテトラフロロエチレン,及びこれら樹脂の誘導体,その他のプラスチックフィルムやステンレス,アルミニウム,真鍮などの金属フィルム或いはシート又はこれらに離型剤を塗布したもの,さらに,これらのプラスチックフィルム,金属フィルム或いはシートに離型性のプラスチック層を形成したものが挙げられる。 The release material is generally in the form of a film or a sheet. Plastic or metal that can be easily peeled off from the cured prepreg even after the prepreg and copper foil are laminated on both sides and laminated to form a cured resin. The film or sheet is preferred. Specifically, polyphenylene sulfide, polyphenylene oxide, polysulfone, polyethersulfone, polyphenylenesulfone, polyetherimide, polyimide, polyamideimide, polyamide, polycarbonate, polyarylate, polyetherketone, polyetheretherketone, polyacetal, cellulose acetate, Polypropylene, poly-4-methylpentene-1, polyethylene terephthalate, polyvinylidene fluoride, polyethylene naphthalate, polytetrafluoroethylene, and derivatives of these resins, other plastic films, metal films or sheets of stainless steel, aluminum, brass, etc. These are coated with a release agent, and these plastic films, metal films or sheets have a release property. That form the plastic layer.
また,接着性を調整するため離型材に表面粗面化処理(マット処理)してもよい。離型材の厚みは,通常、10μm以上、200μm以下から適宜選択する。10μm未満であると,離型材の強度が不足し,2枚合わせ片面金属箔張積層板の分離の際に離型材が破れる恐れがある。また,2枚合わせ片面金属箔張積層板材料を構成する際のハンドリングも悪い。また,200μmを超えると,入手のし易さ,価格の面から好ましくない。 In order to adjust the adhesion, the release material may be subjected to a surface roughening treatment (matte treatment). The thickness of the release material is usually appropriately selected from 10 μm to 200 μm. When the thickness is less than 10 μm, the strength of the release material is insufficient, and the release material may be broken when the two-sheet laminated single-sided metal foil-clad laminate is separated. Moreover, the handling at the time of constructing a two-sheet single-sided metal foil-clad laminate material is also poor. Moreover, when it exceeds 200 micrometers, it is unpreferable from the surface of availability or a price.
離型材としては、プリント配線板の製造方法のプレス工程あるいはラミネート工程の加熱温度の範囲において、熱収縮率が1.5%以下である離型材を使用することが好ましい。従って、離型材としては、100〜250℃の範囲での熱収縮率が1.5%以下である離型材を使用することが好ましく、さらに、熱収縮率が0.01〜1.2%であることがより好ましい。なお、150〜200℃の範囲での熱収縮率が1.5%以下である離型材でもよい。 As the release material, it is preferable to use a release material having a heat shrinkage rate of 1.5% or less in the range of the heating temperature in the pressing step or the laminating step of the printed wiring board manufacturing method. Therefore, it is preferable to use a release material having a heat shrinkage rate of 1.5% or less in the range of 100 to 250 ° C., and a heat shrinkage rate of 0.01 to 1.2%. More preferably. In addition, the mold release material whose heat shrinkage rate in the range of 150-200 degreeC is 1.5% or less may be sufficient.
また、離型材としては、プレス工程あるいはラミネート工程等の加熱加圧工程後における伸びの低下率が,50%以下である離型材を使用することが好ましく、さらに、伸びの低下率が1〜20%であることがより好ましい。なお、一般的に、プリント配線板の製造方法のプレス工程あるいはラミネート工程の加熱温度範囲は、100〜250℃であり、圧力範囲は、0.0001〜10MPaである。 Moreover, as a mold release material, it is preferable to use a mold release material having an elongation reduction rate of 50% or less after a heating and pressing step such as a pressing step or a lamination step, and further, an elongation reduction rate of 1 to 20 is used. % Is more preferable. In general, the heating temperature range in the pressing step or laminating step of the method for producing a printed wiring board is 100 to 250 ° C., and the pressure range is 0.0001 to 10 MPa.
上記離型材に用いるフィルムには,熱収縮率を抑制するために,その表面に極薄の金属層を設けてもよい。例えば,極薄の金属箔をプレスする方法や金属を表面に蒸着するといった方法がある。
また,上記離型材に用いるフィルムは,作製した2枚合わせ多層プリント配線板の分離を容易にするため,複数枚重ねて使用しても良い。
An ultrathin metal layer may be provided on the surface of the film used for the release material in order to suppress the heat shrinkage rate. For example, there are a method of pressing an extremely thin metal foil and a method of depositing metal on the surface.
In addition, a plurality of films used for the release material may be used in order to facilitate separation of the produced two-layer laminated multilayer printed wiring board.
以上の成形材料を使用して本発明のプリント配線板の製造方法の基になる2枚合わせ片面金属箔張積層板や2枚合わせビルドアップ樹脂絶縁シートを作製する。製造法は,所定枚数のプリプレグの積層体の片面に金属箔を重ねた構成体2組を,プリプレグを内側にして,離型材を介して重ね,2枚の鏡板の間に挿み,加熱加圧して2枚合わせ片面金属はく張積層板を製造する。加熱加圧の条件は,プリプレグの樹脂によって異なり,例えば,ガラス布基材エポキシ樹脂プリプレグを用いるときは温度150〜250℃,圧力0.5〜8.0MPaとされている。もしくは所定枚数のビルドアップ樹脂絶縁シート2組を、ビルドアップ樹脂絶縁シートを内側にして,離型材を介して重ね,加熱加圧して2枚合わせビルドアップ樹脂絶縁シートを製造する。加熱加圧の条件は,ビルドアップ樹脂絶縁シートの樹脂によって異なるが,例えば110℃,60秒で真空ラミネート成形した後,170℃,60分の加熱硬化を行う条件もある。 Using the above molding material, a two-ply single-sided metal foil-clad laminate or a two-ply build-up resin insulation sheet, which is the basis of the method for producing a printed wiring board of the present invention, is produced. The manufacturing method consists of stacking two metal foils on one side of a predetermined number of prepreg laminates, placing the prepreg inside, stacking them with a release material, inserting between two end plates, and applying heat and pressure. A two-sheet single-sided metal laminate is produced. The conditions for heating and pressing differ depending on the prepreg resin. For example, when a glass cloth base epoxy resin prepreg is used, the temperature is 150 to 250 ° C. and the pressure is 0.5 to 8.0 MPa. Alternatively, two sets of build-up resin insulation sheets of a predetermined number are stacked with a build-up resin insulation sheet on the inside, stacked via a release material, and heated and pressed to produce a two-sheet build-up resin insulation sheet. The heating and pressing conditions vary depending on the resin of the build-up resin insulation sheet. For example, there are also conditions for performing heat curing at 170 ° C. for 60 minutes after vacuum lamination molding at 110 ° C. for 60 seconds.
その後,公知の方法で、前記2枚合わせ片面金属箔張積層板の金属箔面に対し,回路形成,内層処理,層間接続により多層化処理を行い,さらに、離型材を剥離し、さらに多層化した最外層面及び離型材を剥離した面に、回路形成を行い多層プリント配線板とする。
また、前記2枚合わせビルドアップ樹脂絶縁シートの片面に対し,回路形成,内層処理,層間接続により多層化処理を行い、さらに離型材を剥離し、さらに多層化した最外層面及び離型材を剥離した面に、回路形成を行い多層プリント配線板とする。
なお、前記回路形成において、セミアディティブ工法よる回路形成、あるいは、接着層付銅箔を使用して回路形成を行ってもよい。
Thereafter, the metal foil surface of the two-sided single-sided metal foil-clad laminate is subjected to multilayer processing by circuit formation, inner layer processing, and interlayer connection by a known method, and the release material is further peeled off and further multilayered. A circuit is formed on the outermost layer surface and the surface from which the release material has been peeled to form a multilayer printed wiring board.
Also, on one side of the two-ply build-up resin insulation sheet, multi-layer processing is performed by circuit formation, inner layer processing, and interlayer connection, and then the release material is peeled off, and the outermost layer surface and the release material are further peeled off. A circuit is formed on the finished surface to obtain a multilayer printed wiring board.
In the circuit formation, circuit formation by a semi-additive method or circuit formation using an adhesive layer-attached copper foil may be performed.
(実施例1)
厚さ18μmの銅箔(日本電解製のYGP−18(商品名)を使用した)1枚に厚さ0.1mmのガラス布基材エポキシ樹脂プリプレグ(日立化成工業株式会社製,GEA−679FG(商品名)を使用した)2枚を重ねた構成体2組を,離型材として厚さ50μmの離型フィルム(宇部興産株式会社製で,ポリイミド系のフィルムであるユーピレックス−S(商品名)を使用した。180℃での熱収縮率0.05%,プレス後における伸びの低下率が5%)1枚を介して重ね積層し,180℃,3MPaの条件で1時間プレス成形し,2枚合わせ片面銅張積層板を作製した。なお,銅箔,ガラス布基材エポキシ樹脂プリプレグ,離型フィルムは,いずれも510×510mmの寸法のものを用いた。
Example 1
A glass cloth base epoxy resin prepreg (manufactured by Hitachi Chemical Co., Ltd., GEA-679FG (one using YGP-18 (trade name) manufactured by Nippon Electrolytic Co., Ltd.)) having a thickness of 18 μm. 2 pairs of stacked structures using a product name) as a release material, a 50 μm-thick release film (manufactured by Ube Industries, Ltd., Upilex-S (product name), a polyimide film) The heat shrinkage rate at 180 ° C was 0.05% and the elongation reduction rate after pressing was 5%. A laminated single-sided copper-clad laminate was produced. The copper foil, glass cloth base epoxy resin prepreg, and release film were all 510 × 510 mm in size.
(実施例2)
厚み40μmのビルドアップ樹脂絶縁シート(日立化成工業株式会社製,AS−Z2(商品名)を使用した)を実施例1で使用した離型フィルムに110℃,60秒でラミネート成形した後,170℃,60分の加熱硬化を行い,2枚合わせビルドアップ樹脂絶縁シートを作製した。なお,ビルドアップ樹脂絶縁シート,離型フィルムは,いずれも510×510mmの寸法のものを用いた。
(Example 2)
After a 40 μm thick build-up resin insulation sheet (manufactured by Hitachi Chemical Co., Ltd., AS-Z2 (trade name) was used) was laminated on the release film used in Example 1 at 110 ° C. for 60 seconds, 170 Heat curing at 60 ° C. for 60 minutes was performed to prepare a two-layer build-up resin insulation sheet. The build-up resin insulation sheet and the release film were both 510 × 510 mm in size.
(実施例3)
離型フィルム(離型材)を,厚さ25μmのトレリナフィルム(東レ株式会社製,180℃での熱収縮率0.8%,プレス後における伸びの低下率が8%,ポリフェニレンスルフィドフィルム)としたこと以外は実施例1と同様にして2枚合わせ片面金属箔張積層板を作製した。
(Example 3)
A release film (release material) is a 25 μm thick Torelina film (manufactured by Toray Industries, Inc., thermal shrinkage rate at 180 ° C., 0.8%, elongation reduction after pressing, 8%, polyphenylene sulfide film) A two-sided single-sided metal foil-clad laminate was produced in the same manner as in Example 1 except that.
(実施例4)
離型フィルム(離型材)を,厚さ25μmのトレリナフィルム(東レ株式会社製,180℃での熱収縮率0.8%,プレス後における伸びの低下率が8%,ポリフェニレンスルフィドフィルム)としたこと以外は実施例2と同様にして2枚合わせビルドアップ樹脂絶縁シートを作製した。
Example 4
A release film (release material) is a 25 μm thick Torelina film (manufactured by Toray Industries, Inc., thermal shrinkage rate at 180 ° C., 0.8%, elongation reduction after pressing, 8%, polyphenylene sulfide film) Except that, a two-layer build-up resin insulation sheet was produced in the same manner as in Example 2.
(実施例5)
離型フィルム(離型材)を,厚さ75μmのトレリナフィルム(東レ株式会社製,180℃での熱収縮率0.5%,プレス後における伸びの低下率が18%,ポリフェニレンスルフィドフィルム)としたこと以外は実施例1と同様にして2枚合わせ片面金属箔張積層板を作製した。
(Example 5)
A release film (release material) is a 75 μm thick Torelina film (manufactured by Toray Industries, Inc., thermal shrinkage rate at 180 ° C., 0.5%, elongation reduction rate after pressing, 18%, polyphenylene sulfide film) A two-sided single-sided metal foil-clad laminate was produced in the same manner as in Example 1 except that.
(実施例6)
離型フィルムの厚みを12.5μmとしたこと以外は実施例1と同様にして2枚合わせ片面金属箔張積層板を作製した。
(Example 6)
A two-sheet single-sided metal foil-clad laminate was prepared in the same manner as in Example 1 except that the thickness of the release film was 12.5 μm.
(実施例7)
離型フィルムの厚みを125μmとしたこと以外は実施例1と同様にして2枚合わせ片面金属箔張積層板を作製した。
(Example 7)
A two-sheet single-sided metal foil-clad laminate was prepared in the same manner as in Example 1 except that the thickness of the release film was 125 μm.
(比較例1)
離型フィルム(離型材)を,厚さ12μmのアフレックスフィルム(旭硝子株式会社製,180℃での熱収縮率2.0%,プレス後における伸びの低下率が10%,フッ素樹脂)としたこと以外は実施例1と同様にして2枚合わせ片面金属箔張積層板を作製した。
(Comparative Example 1)
The release film (release material) was an aflex film with a thickness of 12 μm (manufactured by Asahi Glass Co., Ltd., heat shrinkage rate at 180 ° C. of 2.0%, elongation reduction rate after pressing 10%, fluororesin). Except that, a two-sheet single-sided metal foil-clad laminate was prepared in the same manner as in Example 1.
(比較例2)
厚み40μmのビルドアップ樹脂絶縁シート(日立化成工業株式会社製,AS−Z2(商品名)を使用した)を比較例1で使用した離型フィルムに110℃,60秒でラミネート成形した後,170℃,60分の加熱硬化を行い,2枚合わせビルドアップ樹脂絶縁シートを作製した。
(Comparative Example 2)
After a 40 μm thick build-up resin insulation sheet (manufactured by Hitachi Chemical Co., Ltd., AS-Z2 (trade name) was used) was laminated on the release film used in Comparative Example 1 at 110 ° C. for 60 seconds, 170 Heat curing at 60 ° C. for 60 minutes was performed to prepare a two-layer build-up resin insulation sheet.
(比較例3)
離型フィルム(離型材)を,厚さ4.5μmのルミラーフィルム(東レ株式会社製,180℃での熱収縮率0.5%,プレス後における伸びの低下率が60%,ポリエステルフィルム)としたこと以外は実施例1と同様にして2枚合わせ片面金属箔張積層板を作製した。
(Comparative Example 3)
The release film (release material) is a 4.5 μm thick Lumirror film (manufactured by Toray Industries, Inc., thermal shrinkage at 180 ° C., 0.5%, elongation reduction after pressing, 60%, polyester film) A two-sided single-sided metal foil-clad laminate was produced in the same manner as in Example 1 except that.
(比較例4)
離型フィルム(離型材)を,厚さ25μmのトレリナフィルム(東レ株式会社製,180℃での熱収縮率0.7%,プレス後における伸びの低下率が60%,ポリフェニレンスルフィドフィルム)としたこと以外は比較例2と同様にして2枚合わせビルドアップ樹脂絶縁シートを作製した。
(Comparative Example 4)
A release film (release material) is a 25 μm-thick Torelina film (manufactured by Toray Industries, Inc., heat shrinkage rate at 180 ° C., 0.7%, elongation reduction after pressing, 60%, polyphenylene sulfide film) Except that, a two-layered build-up resin insulation sheet was produced in the same manner as in Comparative Example 2.
(比較例5)
離型フィルムを,厚さ7.5μmとしたこと以外は実施例1と同様にして2枚合わせ片面金属箔張積層板を作製した。
(Comparative Example 5)
A two-sided single-sided metal foil-clad laminate was prepared in the same manner as in Example 1 except that the release film had a thickness of 7.5 μm.
(比較例6)
離型フィルム(離型材)を,厚さ40μmのセパニウム(サン・アルミニウム工業社製,180℃での熱収縮率0.0%,プレス後における伸びの低下率が0%,アルミニウム製)としたこと以外は実施例1と同様にして2枚合わせ片面金属箔張積層板を作製した。
(Comparative Example 6)
Sepanium with a thickness of 40 μm (manufactured by Sun Aluminum Industry Co., Ltd., heat shrinkage rate 0.0% at 180 ° C., elongation reduction rate after pressing is 0%, made of aluminum) was used as a release film (release material). Except that, a two-sheet single-sided metal foil-clad laminate was prepared in the same manner as in Example 1.
(比較例7)
厚さ18μmの銅箔(日本電解製のYGP−18(商品名)を使用した)1枚に厚さ0.1mmのガラス布基材エポキシ樹脂プリプレグ(日立化成工業株式会社製,GEA−679FG(商品名)を使用した)2枚を重ねた構成体1組を,離型材として厚さ50μmの離型フィルム(宇部興産株式会社製で,ポリイミド系のフィルムであるユーピレックス−S(商品名)を使用した。180℃での熱収縮率0.05%,プレス後における伸びの低下率が5%)1枚の片面に重ね積層し,180℃,3MPaの条件で1時間プレス成形し,離型材付片面銅張積層板を作製した。なお,銅箔,ガラス布基材エポキシ樹脂プリプレグ,離型フィルムは,いずれも510×510mmの寸法のものを用いた。
(Comparative Example 7)
A glass cloth base epoxy resin prepreg (manufactured by Hitachi Chemical Co., Ltd., GEA-679FG (one using YGP-18 (trade name) manufactured by Nippon Electrolytic Co., Ltd.)) having a thickness of 18 μm. A pair of two stacked structures (product name) was used as a release material and a release film with a thickness of 50 μm (manufactured by Ube Industries, Ltd., Upilex-S (product name), a polyimide film) The heat shrinkage rate at 180 ° C was 0.05%, and the elongation reduction rate after pressing was 5%. The layers were laminated on one side and press-molded at 180 ° C and 3 MPa for 1 hour. A single-sided copper-clad laminate was prepared. The copper foil, glass cloth base epoxy resin prepreg, and release film were all 510 × 510 mm in size.
(2枚合わせ片面金属箔張積層板のプリント配線板製造工程)
得られた2枚合わせ片面銅張積層板の両面にドライフィルム(日立化成工業株式会社製,H−K425(商品名)を使用した)をラミネートし,露光,現像,水洗,エッチング,水洗の工程をこの順に行い回路形成を行った。
(Printed wiring board manufacturing process of two-sided single-sided metal foil-clad laminate)
Dry film (made by Hitachi Chemical Co., Ltd., using H-K425 (trade name)) is laminated on both sides of the obtained two-sided single-sided copper-clad laminate and exposed, developed, washed with water, etched, washed with water In this order, a circuit was formed.
次に,この基板をNaOHが40g/L,液温50℃の水溶液に3分間浸漬してアルカリ脱脂し,水洗し,次にペルオキソ二硫酸アンモニウムが100g/L,液温40℃の水溶液に浸漬して表面をソフトエッチングし水洗し,亜塩素酸ナトリウムが30g/L,リン酸三ナトリウム12水塩が30g/L,NaOHが20g/L,液温が85℃の酸化銅処理液に2分間浸漬して銅表面に酸化処理を行い、酸化銅皮膜を形成した。次に,還元剤としてジメチルアミンボラン4g/L(pH:12.5)に,液温40℃で150秒浸漬,還元し,銅表面に酸化還元処理を行った。 Next, the substrate was immersed in an aqueous solution of NaOH 40 g / L for 3 minutes and alkali degreased and washed with water, and then ammonium peroxodisulfate was immersed in an aqueous solution of 100 g / L and liquid temperature 40 ° C. The surface is soft etched and washed with water, immersed in a copper oxide treatment solution of 30 g / L sodium chlorite, 30 g / L trisodium phosphate 12 hydrate, 20 g / L NaOH, and a liquid temperature of 85 ° C. for 2 minutes. Then, the copper surface was oxidized to form a copper oxide film. Next, it was immersed and reduced in dimethylamine borane 4 g / L (pH: 12.5) as a reducing agent at a liquid temperature of 40 ° C. for 150 seconds, and the copper surface was subjected to oxidation-reduction treatment.
次に,この基板上に厚み60μmのプリプレグであるGEA−679FG(日立化成工業株式会社製,商品名)厚さ18μmの銅箔(日本電解製のYGP−18(商品名)を使用した)積層し,185℃,3.0MPaの条件で1時間プレス成形し,上記に示す方法で回路形成を行い,離型材両面に多層プリント配線板を作製した。 Next, GEA-679FG (trade name, manufactured by Hitachi Chemical Co., Ltd.), which is a prepreg having a thickness of 60 μm, is laminated on this substrate using a copper foil of 18 μm thickness (YGP-18 (trade name) manufactured by Nippon Electrolytic Co., Ltd.). Then, it was press-molded for 1 hour under the conditions of 185 ° C. and 3.0 MPa, and a circuit was formed by the method described above to produce multilayer printed wiring boards on both sides of the release material.
次に,離型材両面に作製した多層プリント配線板を2枚に剥離し,各々の基板における剥離面に厚さ18μmの接着層付銅箔(日立化成工業株式会社製,PF−E−18(商品名)を使用),回路形成面に厚み60μmのプリプレグであるGEA−679FG(日立化成工業株式会社製,商品名)と厚さ18μmの接着層付銅箔(日立化成工業株式会社製,PF−E−18(商品名)を使用)を積層し,185℃,3.0MPaの条件で1時間プレス成形し,上記に示す方法で回路形成を行い,2枚の多層プリント配線板を作製した。 Next, the multilayer printed wiring board produced on both surfaces of the release material was peeled into two sheets, and a copper foil with an adhesive layer having a thickness of 18 μm (PF-E-18, manufactured by Hitachi Chemical Co., Ltd.) GEA-679FG (trade name, manufactured by Hitachi Chemical Co., Ltd.), which is a prepreg having a thickness of 60 μm, and copper foil with an adhesive layer of 18 μm thickness (manufactured by Hitachi Chemical Co., Ltd., PF). -E-18 (trade name) is laminated, press-molded for 1 hour under the conditions of 185 ° C. and 3.0 MPa, circuit formation is performed by the method described above, and two multilayer printed wiring boards are produced. .
(離型材付片面金属箔張積層板のプリント配線板製造工程)
上記の2枚合わせ片面金属箔張積層板のプリント配線板製造工程同様の工程で,片面に多層化を行い,離型材片面に多層プリント配線板を作製した。次に,この基板から離型材を剥離し,基板における剥離面に厚さ18μmの接着層付銅箔(日立化成工業株式会社製,PF−E−18(商品名)を使用),回路形成面に厚み60μmのプリプレグであるGEA−679FG(日立化成工業株式会社製,商品名)と厚さ18μmの接着層付銅箔(日立化成工業株式会社製,PF−E−18(商品名)を使用)を積層し,185℃,3.0MPaの条件で1時間プレス成形し,上記に示す方法で回路形成を行い,多層プリント配線板を作製した。
(Printed wiring board manufacturing process of single-sided metal foil-clad laminate with release material)
In the same process as the printed wiring board manufacturing process of the two-sheet laminated single-sided metal foil-clad laminate, multilayering was performed on one side, and a multilayer printed wiring board was produced on one side of the release material. Next, the release material is peeled from the substrate, and a copper foil with an adhesive layer having a thickness of 18 μm (made by Hitachi Chemical Co., Ltd., PF-E-18 (trade name)) is used on the peeling surface of the substrate, circuit forming surface In addition, 60 μm thick prepreg GEA-679FG (trade name, manufactured by Hitachi Chemical Co., Ltd.) and 18 μm thick copper foil with adhesive layer (manufactured by Hitachi Chemical Co., Ltd., PF-E-18 (trade name)) are used. ), And press-molded for 1 hour under the conditions of 185 ° C. and 3.0 MPa, and a circuit was formed by the method described above to produce a multilayer printed wiring board.
(2枚合わせビルドアップ樹脂絶縁シートのプリント配線板製造工程)
得られた2枚合わせビルドアップ樹脂絶縁シート基板上の樹脂表面を粗化するために,粗化処理として,70℃に加温した溶剤膨潤液(シップレイ株式会社製,MLBコンディショナー211:商品名)に5分間,80℃に加温した過マンガン酸粗化液(シップレイ株式会社製,MLBプロモータ213:商品名)に10分間,硫酸ヒドロキシルアミン系中和液(シップレイ株式会社製,MLBニュートラライザー216−2:商品名)に5分間浸漬する。
(Printed wiring board manufacturing process for two-layer build-up resin insulation sheet)
In order to roughen the resin surface on the obtained two-ply build-up resin insulation sheet substrate, as a roughening treatment, a solvent swelling liquid heated to 70 ° C. (MLB conditioner 211: trade name, manufactured by Shipley Co., Ltd.) For 5 minutes at 80 ° C. permanganic acid roughening solution (Shipley Co., Ltd., MLB Promoter 213: trade name) for 10 minutes, hydroxylamine sulfate neutralizing solution (Shipley Co., Ltd., MLB Neutralizer 216) -2: Product name) is immersed for 5 minutes.
次に,粗化処理を施した基板に,次に,コンディショナー(日立化成工業株式会社製,CLC−601(商品名)を使用)に60℃で5分間浸漬,60℃の湯による湯洗,水洗(常温の水による,以下同じ),無電解めっき用触媒液(日立化成工業株式会社製,HS−202B(商品名)を使用)に常温で10分間浸漬,常温(25℃)の水による水洗,パラジウムの活性化処理液(日立化成工業株式会社製,ADP−401(商品名)を使用)に常温で5分間浸漬,水洗をこの順に行った。 Next, the substrate subjected to the roughening treatment is immersed in a conditioner (manufactured by Hitachi Chemical Co., Ltd., using CLC-601 (trade name)) at 60 ° C. for 5 minutes, washed with hot water at 60 ° C., Washed with water (normal temperature water, the same shall apply hereinafter), electroless plating catalyst solution (made by Hitachi Chemical Co., Ltd., using HS-202B (trade name)) for 10 minutes at normal temperature, with normal temperature (25 ° C) water Water washing, palladium activation treatment solution (manufactured by Hitachi Chemical Co., Ltd., using ADP-401 (trade name)) was performed at room temperature for 5 minutes, followed by water washing in this order.
次に,無電解銅めっき液(日立化成工業株式会社製,CUST201(商品名)を使用)に常温で15分間浸漬し,水洗,80℃,10分間乾燥後を行い,無電解めっき薄付けを行った。 Next, it is immersed in an electroless copper plating solution (Hitachi Chemical Industry Co., Ltd., CUST201 (trade name)) for 15 minutes at room temperature, washed with water, dried at 80 ° C. for 10 minutes, and electroless plating thinned. went.
次に,ドライフィルムフォトレジストであるRY−3325(日立化成工業株式会社製,商品名)を,無電解めっき層の表面にラミネートし,電解銅めっきを行う箇所をマスクしたフォトマスクを介して紫外線を露光し,現像してめっきレジストを形成した。 Next, RY-3325 (trade name, manufactured by Hitachi Chemical Co., Ltd.), which is a dry film photoresist, is laminated on the surface of the electroless plating layer, and ultraviolet rays are passed through a photomask that masks the place where electrolytic copper plating is performed. Was exposed and developed to form a plating resist.
次に,硫酸銅浴を用いて,液温25℃,電流密度1.0A/dm2の条件で,電解銅めっきを20μmほど行い,回路形成を行った。 Next, using a copper sulfate bath, electrolytic copper plating was carried out for about 20 μm under conditions of a liquid temperature of 25 ° C. and a current density of 1.0 A / dm 2 to form a circuit.
次に,この基板に内層処理(CZ処理)を施した後,厚み40μmのビルドアップ樹脂絶縁シート(日立化成工業株式会社製,AS−Z2(商品名)を使用した)を110℃,60秒でラミネート成形した後,170℃,60分の加熱硬化を行い,上記に示す粗化処理,無電解めっき,電気めっき,回路形成を行い,離型材両面に多層プリント配線板を作製した。 Next, this substrate was subjected to an inner layer treatment (CZ treatment), and then a 40 μm thick build-up resin insulation sheet (manufactured by Hitachi Chemical Co., Ltd., AS-Z2 (trade name) was used) at 110 ° C. for 60 seconds. After laminating at 170 ° C., heat curing was performed at 170 ° C. for 60 minutes, and the above-described roughening treatment, electroless plating, electroplating, and circuit formation were carried out to produce multilayer printed wiring boards on both sides of the release material.
次に,この基板に内層処理(CZ処理)を施した後,上記の方法で厚み40μmのビルドアップ樹脂絶縁シート(日立化成工業株式会社製,AS−Z2(商品名)を使用した)をラミネート,加熱硬化を行い積層した。 Next, after applying an inner layer treatment (CZ treatment) to this substrate, a 40 μm thick build-up resin insulation sheet (made by Hitachi Chemical Co., Ltd., AS-Z2 (trade name)) was laminated by the above method. , Heat-cured and laminated.
次に,離型材両面に作製した多層プリント配線板を2枚に剥離し,各々の基板を上記に示す粗化処理,無電解めっき,電気めっき,回路形成を行い,2枚の多層プリント配線板を作製した。 Next, the multilayer printed wiring board produced on both sides of the release material is peeled into two sheets, and each of the substrates is subjected to the roughening treatment, electroless plating, electroplating, and circuit formation described above, and two multilayer printed wiring boards. Was made.
実施例1〜7,比較例1〜7で作製した2枚合わせ片面金属箔張積層板及び,2枚合わせビルドアップ樹脂絶縁シートを,上記の工程を通し以下の評価を行った。 The following evaluation was performed through the above steps for the two-sheet-matched single-sided metal foil-clad laminates produced in Examples 1-7 and Comparative Examples 1-7 and the two-sheet-assembled build-up resin insulation sheet.
(剥離性評価)
工程を通し,離型材両面に多層プリント配線板を形成後,2枚に剥離する際の剥離性を確認した(○;破れ等なく、剥離性良好)。
(Peelability evaluation)
Through the process, after the multilayer printed wiring board was formed on both sides of the release material, the peelability when peeling to two sheets was confirmed (◯: no tearing, good peelability).
(薬液染込み評価)
工程を通し,離型材両面に多層プリント配線板を形成後,2枚に剥離する際に剥離面に薬液の染込みがないか目視で確認した。
(Evaluation of chemical penetration)
Through the process, after forming the multilayer printed wiring board on both sides of the release material, it was visually confirmed whether or not there was any chemical penetration on the peeled surface when peeling to two.
(はがれ評価)
各工程を通した際,基板を抜き取り離型材部分における剥離の有無を確認した(○;剥離無し、×;剥離有り)。
(Peeling evaluation)
When passing through each process, the substrate was pulled out and the presence or absence of peeling in the part of the mold release material was confirmed (◯: no peeling, x: with peeling).
(そり評価)
各工程を通した際,基板を抜き取り基板のそり量を確認し,5mm以下のものを○,5mm以上のものを×として評価を行った。
以上の評価結果を表1に示した。
(Slave evaluation)
When passing through each process, the board | substrate was extracted, the curvature amount of the board | substrate was confirmed, and the thing of 5 mm or less was evaluated as (circle), and the thing of 5 mm or more was evaluated as x.
The above evaluation results are shown in Table 1.
実施例1〜7で作製したサンプルは剥離性,薬液染込み性,耐熱性とも良好で,工程を問題なく通すことができ,その後の2枚に分離する際も問題なかった。一方,比較例1,2で離型材の熱収縮率が大きいため,高温になると合わせ面で剥離が起こった。比較例3,4はプレス後の伸びが大きく低下するため,2枚合わせ片面金属箔張積層板及び2枚合わせビルドアップ樹脂絶縁シートを分離する際に,離型材が破れてしまい上手く剥離できなかった。比較例5も比較例3と同様に,離型材が非常に薄く強度がないため,分離の際に離型材が破れてしまった。比較例6は,離型材が金属であるため,薬液が染込みかつ離型材が少し溶解していた。比較例7は,離型材が片面だけに配線板を形成するため非対称の構造になりそりが大きくなった。 The samples prepared in Examples 1 to 7 were good in peelability, chemical penetration, and heat resistance, could pass through the process without any problems, and had no problem when separated into the subsequent two sheets. On the other hand, in Comparative Examples 1 and 2, since the heat shrinkage rate of the release material was large, peeling occurred at the mating surfaces at high temperatures. In Comparative Examples 3 and 4, the elongation after pressing is greatly reduced. Therefore, when separating the two-ply single-sided metal foil-clad laminate and the two-ply build-up resin insulation sheet, the release material is torn and cannot be peeled off well. It was. In Comparative Example 5, as in Comparative Example 3, the release material was very thin and lacking strength, so the release material was torn during the separation. In Comparative Example 6, since the release material was a metal, the chemical solution was infiltrated and the release material was slightly dissolved. In Comparative Example 7, the mold release material forms a wiring board only on one side, so that the asymmetric structure becomes large and warpage increases.
本発明のプリント配線板の製造方法では,各工程において,合わせ面への薬液の滲み込みがなく,分離が生じることがなく,工程を通した後に分離し,2枚の多層化プリント配線板を得ることができる。 In the method for manufacturing a printed wiring board according to the present invention, in each step, there is no penetration of the chemical solution to the mating surface, separation does not occur, and the two multilayered printed wiring boards are separated after passing through the step. Obtainable.
Claims (6)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2008276715A JP2010108984A (en) | 2008-10-28 | 2008-10-28 | Method of manufacturing printed circuit board |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2008276715A JP2010108984A (en) | 2008-10-28 | 2008-10-28 | Method of manufacturing printed circuit board |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JP2010108984A true JP2010108984A (en) | 2010-05-13 |
Family
ID=42298162
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2008276715A Pending JP2010108984A (en) | 2008-10-28 | 2008-10-28 | Method of manufacturing printed circuit board |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2010108984A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2015070173A (en) * | 2013-09-30 | 2015-04-13 | 味の素株式会社 | Method of manufacturing multilayer printed wiring board |
-
2008
- 2008-10-28 JP JP2008276715A patent/JP2010108984A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2015070173A (en) * | 2013-09-30 | 2015-04-13 | 味の素株式会社 | Method of manufacturing multilayer printed wiring board |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP5751368B2 (en) | Metal-clad laminate | |
| TWI609779B (en) | Copper foil containing adhesive layer,copper clad laminate and printed wiring board | |
| TWI511633B (en) | Method of manufacturing multi-layer printed wiring board and multi-layer printed wiring board obtained by the manufacturing method | |
| JP4241098B2 (en) | Metal-clad laminate, printed wiring board using the same, and manufacturing method thereof | |
| TWI583263B (en) | A metal foil with a release resin layer and a printed wiring board | |
| JP2000043188A (en) | Composite foil with resin, method for producing the same, and method for producing multilayer copper-clad laminate and multilayer printed wiring board using the composite foil | |
| JP4293278B1 (en) | Two-sided single-sided metal foil-clad laminate and manufacturing method thereof, and single-sided printed wiring board and manufacturing method thereof | |
| JP2009239295A (en) | Printed wiring board, and method of manufacturing the same | |
| KR20100015339A (en) | Film for metal film transfer, method for transferring metal film, and method for manufacturing circuit board | |
| KR20150020621A (en) | Method for producing multilayer printed wiring board | |
| JP2003304068A (en) | Metal foil with resin for printed wiring board and multilayer printed wiring board using the same | |
| JP2021079702A (en) | Laminate manufacturing method and metallic foil with resin layer | |
| JP6104260B2 (en) | Metal foil with carrier | |
| JP2010108984A (en) | Method of manufacturing printed circuit board | |
| TWI481499B (en) | Double-layered single surface metal foil clad laminated sheet and method of fabricating thereof,and single surface print wiring board and method of fabricating thereof | |
| JP5077662B2 (en) | Manufacturing method of multilayer wiring board | |
| TWI796378B (en) | Method of manufacturing patterned metal foil-clad laminate, and patterned metal foil-clad laminate | |
| JPH1126938A (en) | Manufacture of laminated board with inner layer circuit | |
| JP2004335784A (en) | Method for manufacturing printed wiring board | |
| JP2007022091A (en) | Metal foil with resin and metal-clad laminate, and printed wiring board using the same and method for production thereof | |
| JP2005216902A (en) | Method of manufacturing printed circuit board and printed circuit board | |
| JP2000077847A (en) | Manufacture of multilayered printed wiring board | |
| JP2013006278A (en) | Metal thin film with adhesive, method for producing the same, copper-clad laminate, and method for producing the copper-clad laminate |