JP2010014576A - Semiconductor testing aapparaus - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a semiconductor testing apparatus, capable of debugging a test program of a DSP (digital signal processor), any times as needed, by using a virtual environment. <P>SOLUTION: In this semiconductor testing apparatus constituted so as to perform operation processing of measurement data of a DUT by the DSP, a measuring file storage means for collecting and storing the measurement data of the DUT is provided in the DSP, and debugging of the DSP is carried out, based on the measurement data stored in the measuring file storage means. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

  The present invention relates to a semiconductor test apparatus, and more particularly to improvement of debugging efficiency in a semiconductor test apparatus configured to perform measurement data calculation processing with a DSP (Digital Signal Processor).

  2. Description of the Related Art Conventionally, as a semiconductor test apparatus, as shown in FIG. 2, there is one configured to perform calculation processing of measurement data output from a device under measurement (hereinafter referred to as DUT) by a DSP.

  In FIG. 2, the signal generator 1 inputs a predetermined test signal necessary for testing the DUT 2 to the DUT 2. The DUT 2 performs necessary signal processing on the input test signal and outputs the signal processing result as an output signal. The output signal of the DUT 2 is input to the digitizer 3 and converted into a digital signal. The digital signal converted by the digitizer 3 is input to the DSP 4 as measurement data for determining the quality of the DUT 2. The DSP 4 performs predetermined calculation processing necessary for determining the quality of the DUT 2 based on the measurement data converted and input from the digitizer 3. The determination unit 5 determines the quality of the DUT 2 based on the calculation result of the DSP 4.

  For example, when the DUT 2 is a color liquid crystal driver, the signal generator 1 outputs a test signal for gradation driving according to the circuit system of the DUT 2. Thereby, each output terminal of DUT2 outputs a predetermined multi-stage gradation voltage for three systems of R, G, and B. The digitizer 3 takes each gradation voltage output from each output terminal through a scanner (not shown), for example, converts it into a digital signal, and sends it to the DSP 4 as measurement data. Thereby, the DSP 4 takes in a plurality of measurement data of each output system corresponding to the number of gradations.

  The DSP 4 executes various arithmetic processes based on the measurement data thus taken. The types of arithmetic processing are broadly divided into those relating to statistical processing such as averaging and histogramming of measurement data itself and those relating to characteristic evaluation of DUT 2 that takes measurement data based on statistical processing results. These characteristic evaluation items include the presence / absence of disconnection in each output system, variation in gradation output voltage between each output system, integral linearity (INL), differential linearity (DNL), γ correction amount, rise due to switching, There are falling characteristics.

  The determination unit 5 preliminarily stores acceptable range data for determining the quality of each characteristic evaluation item of the DUT 2, and determines the quality of the DUT 2 based on whether the measurement result calculated by the DSP 4 is within the allowable range. be able to.

  By the way, the arithmetic processing in the DSP 4 is executed based on a test program corresponding to each arithmetic item, but the setting parameters for the arithmetic execution operation need to be finely adjusted according to actual measurement data.

  Patent Document 1 describes an IC test apparatus configured to perform pass / fail judgment of a color liquid crystal driver using a DSP.

JP-A-6-213970

  However, although a virtual environment is prepared as a test program debugging environment in a semiconductor test apparatus, there is a problem that actual measurement data is required for debugging a DSP and cannot be effectively used.

  The present invention has been made in view of such problems, and an object of the present invention is to realize a semiconductor test apparatus capable of performing debugging of a DSP test program using a virtual environment whenever necessary. It is in.

In order to solve such a problem, the invention of claim 1
In a semiconductor test apparatus configured to perform calculation processing of DUT measurement data in a DSP, the DSP is provided with measurement file storage means for collecting and storing the DUT measurement data, and the measurement stored in the measurement file storage means The DSP is debugged based on the data.

According to a second aspect of the present invention, in the semiconductor test apparatus of the first aspect,
The DSP collects and stores the measurement data of the DUT in the measurement file storage means in a real machine environment, performs predetermined calculation processing, and reads the measurement data of the DUT stored in the measurement file storage means in a virtual environment. A predetermined calculation process is performed after the measurement data is reconstructed.

  As a result, the DSP test program can be debugged using the virtual environment whenever necessary.

  The present invention will be described below with reference to the drawings. FIG. 1 is a block diagram showing a configuration example of a semiconductor test apparatus according to the present invention. (A) shows a real machine environment mode, (B) shows a virtual environment mode, and the same parts as in FIG. The sign is attached. The difference between FIG. 1 and FIG. 2 is that, in FIG. 1, the DSP 4 is provided with a measurement file storage unit 6 that collects and stores measurement data of the DUT 2.

  First, in the real machine environment mode shown in (A), the signal generator 1 inputs a predetermined test signal necessary for the test of the DUT 2 to the DUT 2. The DUT 2 performs necessary signal processing on the input test signal and outputs the signal processing result as an output signal. The output signal of the DUT 2 is input to the digitizer 3 and converted into a digital signal. The digital signal converted by the digitizer 3 is input to the DSP 4 as measurement data for determining the quality of the DUT 2.

  The DSP 4 collects measurement data converted and input from the digitizer 3, files it with measurement condition data including the number of data, sampling clock frequency, etc., and stores it in the measurement file storage 6. Thereafter, predetermined calculation processing necessary for determining the quality of the DUT 2 is performed using measurement data and measurement conditions in the current actual machine operation mode. The determination unit 5 determines the quality of the DUT 2 based on the calculation result of the DSP 4.

  On the other hand, in the virtual environment mode shown in (B), the signal generator 1, the DUT 2, and the digitizer 3 indicated by broken lines do not operate, and the DSP 4, the determination unit 5, and the measurement file storage unit 6 operate.

  That is, the DSP 4 in the virtual environment mode reads the measurement file stored in the measurement file storage unit 6 for debugging, and reconstructs the measurement data together with the measurement conditions so as to be equivalent to the actual machine environment mode. Then, a predetermined calculation process necessary for determining the quality of the DUT 2 is performed using the reconstructed measurement data and measurement conditions. The determination unit 5 determines the quality of the DUT 2 based on the calculation result of the DSP 4.

  By configuring in this way, it is possible to perform predetermined arithmetic processing using measurement data and measurement conditions equivalent to the actual machine environment even in the virtual environment, so that the debugging efficiency of the test program of the DSP 4 can be greatly improved, and in the semiconductor production line It is possible to increase the test efficiency for semiconductor test equipment products.

  In the above-described embodiment, the example in which the DUT is a liquid crystal driver has been described.

  As described above, according to the present invention, it is possible to realize a semiconductor test apparatus that can perform debugging of a DSP test program at any time using a virtual environment. Can be increased.

It is a block diagram which shows the structural example of the semiconductor test apparatus by this invention. It is a block diagram which shows an example of the conventional semiconductor test apparatus.

Explanation of symbols

1 Signal generator 2 DUT
3 Digitizer 4 DSP 4
5 Judgment unit 6 Measurement file storage unit

Claims (2)

In a semiconductor test apparatus configured to perform calculation processing of DUT measurement data by a DSP,
A semiconductor test apparatus characterized in that the DSP is provided with measurement file storage means for collecting and storing the measurement data of the DUT together with measurement conditions, and debugging the DSP based on the measurement file stored in the measurement file storage means. The DSP
Collect and store the DUT measurement data in the measurement file storage means in a real machine environment, perform predetermined calculation processing, and read the DUT measurement file stored in the measurement file storage means in a virtual environment to measure the measurement data 2. The semiconductor test apparatus according to claim 1, wherein predetermined arithmetic processing is performed after reconstruction with conditions.

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