JP2010099597A - Coating device and coating method - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a coating device which need not be sophisticated to the necessity to make a substrate a highly fine definition type, and can apply a coating material by registering the positions of the substrate and a nozzle with high precision, as well as a coating method. <P>SOLUTION: This coating device positions the alignment mark of the substrate with that of the nozzle by detecting the alignment mark by a camera. In addition, the device includes a means for storing information on the displacement from the reference positions of the camera and the nozzle. Further, according to the information on the displacement from the reference camera position and the information on the displacement of the reference nozzle position when the mark is detected, the relative positions of the nozzle and the alignment mark are calculated and the relative positions of the nozzle and the substrate are registered according to the calculation results. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

  In the present invention, a substrate is placed on a table surface on the apparatus, the position of the placed substrate is detected by an alignment mark on the substrate surface, the substrate and the nozzle are relatively positioned, and coating is applied to a desired position on the substrate surface. The present invention relates to a coating apparatus to be applied.

  Panels such as a liquid crystal display and a plasma display perform processing such as drawing and applying a fine pattern on a glass substrate. In such a conventional processing apparatus, for example, the substrate is placed and fixed on the table surface of the apparatus, the position of the substrate is detected, and after the relative alignment with the processing unit, the substrate and the processing unit are relatively moved. Technology is used.

  For example, in a coating apparatus that performs coating between ribs formed on a substrate as in Patent Document 1, the rib positions at the start and end of coating are detected, and the position of the substrate and the position of the nozzle are relatively aligned. After that, a method of applying while moving the nozzle linearly, and a technique of applying while adjusting the position in the orthogonal direction of the substrate by sequentially detecting the position of the rib in accordance with the linear movement of the nozzle have been devised.

  However, in such a coating apparatus, the alignment between the nozzle and the position detection unit of the substrate is performed only at one point, and the movement accuracy of the position detection unit to the detection position and the movement of the nozzle to the coating movement position is Depends on mechanical processing accuracy. However, in recent years, with the higher definition of patterns, it is required to improve the alignment accuracy of the nozzle and the substrate in such a coating apparatus and to increase the accuracy of the linear movement of the nozzle. It has become difficult.

  On the other hand, as in Patent Document 2, for example, in an apparatus that draws by relatively moving a stage on which a substrate is placed, the position error of the stage relative to the normal position of the stage when the position of the substrate is imaged is measured. There has been proposed an apparatus that corrects the error according to the result of the error. In this apparatus, an exposure unit serving as a drawing unit is fixed, and the drawing data is processed and the position is adjusted based on the alignment mark of the substrate and the position information of the stage. That is, position correction is handled by the control technology.

However, this drawing apparatus is provided with a plurality of means for detecting the position of the stage and performs position control by advanced processing technology, and there is a problem that the apparatus becomes complicated and expensive. Further, since the exposure position is corrected based on the amount of positional deviation between the stage and the mark in the detection unit, an error in the position of the head and stage at the exposure position is not taken into consideration, and there remains a problem of deviation in the exposure position.
JP H11-279351 JP 2008-83227 A

  SUMMARY OF THE INVENTION The present invention provides a coating apparatus and a coating method capable of accurately coating an intended position on a substrate without complicating the apparatus even when the substrate becomes high definition. Objective.

In order to solve the above problems, the coating apparatus of the present invention is:
A table on which the substrate is placed,
A gantry equipped with a nozzle for discharging a coating liquid and an alignment camera for detecting an alignment mark on the substrate;
A coating apparatus comprising: moving means for moving the gantry substantially linearly in the coating direction; and adjusting means for adjusting the position in the coating width direction of the table and the angle in the table surface,
further,
Storage means for previously storing displacement information from the reference position of the alignment camera and displacement information from the reference position of the nozzle at a plurality of gantry movement positions;
The relative position between the nozzle and the alignment mark is calculated based on the displacement information from the reference position of the alignment camera and the displacement information from the reference position of the nozzle at the gantry position when the alignment mark is detected using the alignment camera. And a control means for sending a control signal for adjusting the relative position between the nozzle and the substrate to the adjustment means based on the result, and measuring displacement information from the reference position of the alignment camera and the nozzle in advance. By having storage means, each position detection means is not required, the relative positional relationship between the substrate and the nozzle can be accurately calculated without complicating the apparatus configuration, and a control signal for adjusting the relative position between the nozzle and the substrate Can be sent out.

Moreover, the coating method of the present invention uses the above-described coating apparatus,
Based on the displacement information from the reference position of the alignment camera at the gantry position when the alignment mark is detected using the alignment camera and the displacement information from the reference position of the nozzle, the relative position of the nozzle and the alignment mark is determined. Operate,
Based on the result, after adjusting the relative position and angle of the nozzle and the substrate to apply to the intended position on the substrate,
A coating method in which a coating liquid is applied on the substrate in a substantially straight line by discharging the coating liquid from the nozzle while moving the gantry in a substantially straight line in the coating direction. By using the position information of the substrate when the mark is detected and the displacement information from the reference position of the alignment camera and nozzle, the problem of camera and nozzle misalignment can be reduced and the substrate and nozzle can be accurately aligned relative to each other. Thus, a substantially linear coating can be performed by moving the nozzle at the intended position.

  In the coating method of the present invention, it is preferable that displacement information from the reference position of the alignment camera in the coating width direction is measured and stored in advance as displacement information from the reference position of the alignment camera. The alignment camera is attached to the gantry and moves substantially linearly in the coating direction. The displacement in the application width direction in this movement depends on the machine accuracy of the apparatus, and greatly affects the alignment accuracy. Therefore, correcting this displacement reduces the problem of deviation.

  Further, as a method of using displacement information in the application width direction from the reference position of the alignment camera at the same gantry position as displacement information from the reference position of the nozzle, there is little difference in displacement between the nozzle and the camera. It is preferable that the measurement of displacement and the handling of data can be simplified.

  Further, the nozzle moves while moving the gantry substantially linearly in the coating longitudinal direction, and adjusting the position of the table in the coating width direction based on displacement information from the reference position of the nozzle at the moving position of the gantry. Since the substrate is moved in accordance with the displacement of the nozzle in the coating width direction, the method of discharging the coating liquid from the nozzle is more preferable because the nozzle and the substrate can be accurately aligned.

  According to the coating apparatus of the present invention, the position of the substrate and the nozzle can be accurately corrected by correcting the position using the position information of the substrate and the displacement information of the nozzle, thereby avoiding the problem of high precision in machining. it can.

  Further, by measuring and storing the displacement information of the substrate and the nozzles in advance, the position can be corrected without complicating the apparatus configuration, so that an increase in the cost of the apparatus can be suppressed.

  Hereinafter, preferred embodiments of the present invention will be described with reference to the drawings. FIG. 1 is a schematic plan view showing the overall configuration of an example coating apparatus according to the present invention. First, in the arrow XY direction in the figure, X indicates the application direction, and Y indicates the application width direction which is the orthogonal direction.

  In FIG. 1, a substrate 20 is a workpiece to be coated and is placed at the approximate center of the upper surface of the table 2. In the substrate 20, linear ribs are formed over the entire surface in the short direction of the substrate, which is the application direction, and grooves are formed between the ribs. In addition, alignment marks 20a and 20b are formed near the end face of the substrate at the substantially center in the longitudinal direction of the substrate so that the positional relationship with the ribs can be understood.

  The table 2 is provided with an adsorption hole for adsorbing the substrate on its upper surface, and adsorbs and fixes the substrate by an adsorption device (not shown). The table 2 includes a Y-axis drive unit 3 and can be freely moved in the Y-axis direction along Y-axis guide rails 3a and 3b fixed to the machine base 1 and further has a center in the table surface. A θ-axis drive unit (not shown) that adjusts the in-plane angle as a reference is provided, and is configured to be able to move the adsorbed substrate in the application width direction and adjust the angle.

  In the coating apparatus of FIG. 1, the Y-axis drive unit 3 and the θ-axis drive unit described above are adjusting means that adjust the position in the coating width direction of the table and the angle in the table surface.

  The gantry 4 has a gate structure straddling the table 2, and has an X-axis drive unit 5 as a moving means that moves in the application direction on both side legs, and above the substrate surface placed on the table surface. Can be reciprocated along the X-axis guide rails 5a and 5b. Each axis drive unit of the gantry 4 and the table 2 is driven by a servo motor, and is connected to the axis control unit 12 of the control device 9 using an encoder installed in parallel to each axis as a sensor. The movement control can be performed by the command signal. Therefore, in the coating apparatus of FIG. 1, the calculation command unit 11 and the axis control unit 12 serve as control means.

  Further, an alignment camera 6 that images the alignment mark of the substrate placed on the table surface is fixed on the application direction side of the central part of the portal beam of the gantry 4, and a nozzle 7 that discharges paste on the substrate surface is fixed on the opposite side. Then, the positioning movement in the X direction and the application scanning are performed by the movement control of the gantry 4.

  The image signal of the alignment mark imaged by the alignment camera 6 is connected to the position detection unit 10 of the control device 9, and the position detection unit 10 processes the imaged image to measure the position in the camera field of view, and calculates The unit 11 calculates the position of the substrate together with the position information of each axis.

  On the other hand, the nozzle 7 is detachable and is adjusted so that its longitudinal direction is parallel to the Y-axis movement direction of the table 2 when fixed to the gantry 4. The nozzle 7 is selected according to the size of the substrate to be coated, and on the lower surface, there are substantially straight discharge holes for completing the coating in one coating operation for all desired grooves formed on the substrate. Are arranged. The center hole is provided with a reference hole mark for alignment with the substrate, and the substrate is relatively aligned with the reference hole for application. In addition, there is a paste storage part inside the nozzle, and the paste is supplied from the outside via a pipe, and the paste is discharged from the discharge hole by pressurizing the inside.

  The camera 8 is a reference position camera for obtaining the mutual positional relationship between the alignment camera 6 and the nozzle 7 and is fixed to the machine base 1 upward. The gantry 4 is moved in the X direction and the alignment camera 6 and the nozzle 7 are moved above the camera 8 to detect the positional relationship between them. A reference jig in which a cross mark is drawn on a glass surface for detecting the positional relationship with the alignment camera 6 is attached to the camera 8, and the marks of the reference jig are imaged by the respective cameras to obtain the mutual positional relationship. . For the nozzle 7, the center reference hole is directly imaged by the camera 8 to detect its position. The image signal picked up by the camera 8 is connected to the position detection unit 10 of the control device 9 in the same manner as the alignment camera 6, and the calculation command unit 11 calculates the mutual positional relationship. The mutual position detection by the reference position camera is performed at the adjustment stage of the apparatus described below.

  The storage unit 13 of the control device 9 is a memory of storage means for storing displacements in the X direction and the Y direction from the reference positions of the alignment camera 6 and the nozzle 7 when the gantry 4 is moved in the X direction. This displacement is also measured and stored in advance by the method shown in FIG. 2 described below, and is read out and used by the operation command unit 11 when the substrate and the nozzle are relatively aligned and applied.

  FIG. 2 is a view showing the positional relationship between the initial adjustment of the coating apparatus and the substrate. The alignment position of the alignment camera 6 and the nozzle 7 is adjusted using the center of the visual field of the camera 8 of this apparatus as a reference position. In FIG. 2A, the gantry 4 is in the lower part of the figure, and the alignment camera 6 and the nozzle 7 are in their initial positions. First, a reference jig having a cross mark drawn on a glass surface (not shown) is attached to the camera 8, and the XY position of the mark center from the center of the visual field of the camera 8 is measured. Next, the gantry 4 is operated in the X-axis direction to move the alignment camera 6 above the jig mark, and stops when the mark enters the field of view of the alignment camera 6. XY position is measured. As a result, the positional relationship between the camera 8 and the alignment camera 6 becomes clear. Next, the jig is removed, the gantry 4 is operated in the X-axis direction, and the nozzle 7 is moved above the camera 8. The camera 8 images the reference hole on the lower surface of the nozzle and measures the XY position of the reference hole of the nozzle from the center of the visual field. As a result, the positional relationship between the alignment camera 6 and the nozzle 7 is obtained based on the operation amount of the gantry in the X-axis direction and the XY position measurement result of the nozzle reference hole.

  By the way, the initial adjustment at one point with the camera 8 as a reference is the same as the method in the conventional coating apparatus. Since the relative position of the nozzle and the substrate can be adjusted by this initial adjustment, in the prior art, the substrate is placed and fixed on the table surface, the position of the substrate is detected by the alignment camera 6, and the Y of the table is detected.・ After the relative alignment between the nozzle and the substrate is performed by operating the θ-axis, the nozzle is scanned in the X-axis direction and the paste is discharged from the nozzle hole, so that the coating is applied in the groove of the rib formed on the substrate surface. I was doing it.

  However, only by this initial adjustment at one point, if the straightness of the X axis of the gantry 4 is poor, the trajectories of the alignment camera 6 and the nozzle 7 are displaced. A schematic diagram of this situation is shown in the graph of FIG. In this graph, the trajectory of the alignment camera 6 is represented by a solid line, and the trajectory of the nozzle 7 is represented by a broken line as a displacement from a reference point. Since the displacement in the Y direction is very small compared to the displacement in the X direction, it is enlarged for easy understanding. Here, the displacement in the Y direction of the alignment camera 6 and the nozzle 7 is represented by a curve having the same shape as the same change with respect to the amount of movement in the X axis direction, but the respective trajectories seem to coincide with the reference point. Since alignment is performed, a deviation occurs in both the X direction and the Y direction. The positional relationship with the substrate 20 is as shown by the broken line, and even if the relative alignment with the nozzle is performed only by the positional information in which the alignment camera 6 detects the position of the substrate, the application position is deviated. In other words, in the prior art, the positional accuracy in the Y direction due to movement in the X direction has been secured by the machining accuracy of the machine, but there is a limit to the correspondence, and if the groove width of the rib formed on the substrate surface is narrow, the paste will be There was a problem that it protruded and could not be applied in the groove.

  Therefore, in the present invention, the displacements in the X direction and the Y direction with respect to the movement amount in the X-axis direction are measured and stored in advance, and correction by the stored displacement is performed when the substrate and the nozzle are aligned relative to each other. As a method for measuring the displacement in the X direction and the Y direction in advance, for example, measurement is performed by a laser interferometer 100 as shown on the left side of FIG. In the laser interferometer 100, a target 101 for detecting displacement in the X direction and Y direction is attached to the nozzle 7 and the alignment camera 6 of the part to be detected, and the position where the nozzle 7 is aligned with the reference position from the initial position. Move to X direction to measure. At this time, the measurement pitch in the X-axis direction is preferably 1/200 to 1/20 of the total movement amount, and it is sufficient that the displacement in the Y direction can be measured with a necessary accuracy. The data measured in this manner is stored in the storage unit 13 of the control device 9 as a displacement from that position based on the X and Y measurement values obtained when the alignment camera 6 and the nozzle 7 are aligned with the reference position.

  FIG. 3 is a table showing an example of the stored data. In this example, the initial position of the gantry in the X-axis direction is set to zero, and the displacement reference data is measured and stored at a pitch of 10 mm when the camera reference position of the gantry for aligning the reference position of the alignment camera 6 is 1200 mm and the nozzle reference position is 1700 mm. is there. For each displacement data, the measured value at each reference position is set to zero, and the change from that position is stored as a displacement. Therefore, the displacement of the alignment camera 6 and the nozzle 7 at the position in the X-axis direction with the initial position being zero can be easily extracted from this data. The measurement of the displacement may be performed at the accuracy check and adjustment stage when the apparatus is installed. This is because such a device is used in a stable environment with little temperature change, so that the change in machine accuracy over time is small, but it is more preferable to periodically measure and update the data.

Next, details of the alignment method based on the state of FIG. 2B will be described with reference to FIGS.
FIG. 4 is an explanatory diagram in which the alignment camera 6 detects the position of the substrate and aligns the track with the alignment camera 6. FIG. 4A shows the positional relationship between the track of the alignment camera 6 and the substrate. The substrate 20 is sucked and fixed at a position where the alignment marks 20a and 20b fall within the visual field when the alignment camera 6 is moved in the X direction, and the gantry 4 is moved in the X direction to move the alignment camera 6 to the position before alignment. Move to the post-alignment position and measure the position of the mark from the center of the camera field of view. Dy1 and dy2 in the figure indicate the amount of deviation in the Y direction at each position. The position of the substrate 20 can be aligned with the alignment camera 6 by calculating the angle of the substrate and the amount of movement in the Y direction so that the amount of deviation in the Y direction becomes zero and adjusting the θ axis and the Y axis of the table. In addition, regarding the alignment in the X direction, the position information is stored, and the adjustment is performed at the application position of the movement of the gantry in the X direction in the application operation. In this apparatus, the X-direction adjusting mechanism of the table is omitted for simplification of the configuration, and a method for adjusting the application position will be described later.

  FIG. 4B shows a state where the substrate is aligned with the alignment camera 6. The substrate 20 is positioned so that the alignment mark is aligned at the front-rear alignment position on the track of the alignment camera 6. However, since the substrate does not match the nozzle trajectory in this state as described above, the positioning position is corrected by using the Y-direction displacement of the alignment camera 6 and the nozzle 7 that are measured and stored in advance.

FIG. 5 is an explanatory diagram for correcting the displacement and aligning the substrate on the trajectory of the nozzle 7. FIG. 5A is a diagram showing the relationship between the trajectory and the reference position of the alignment camera 6 and the nozzle 7 in the state of FIG.
In order to align the substrate 20 and the nozzle, the alignment mark on the substrate 20 may be moved on the orbit of the nozzle 7. Since the substrate 20 is already positioned so that the alignment marks are aligned at the alignment front and back positions on the orbit of the alignment camera 6, the differences dy3 and dy4 of the Y direction displacements of the alignment camera 6 and the nozzle 7 at the alignment front and rear positions are calculated. It turns out that it only has to move.

  Here, a method of obtaining the displacement difference will be described with reference to FIG. Now, the difference between the camera and nozzle displacement at the pre-alignment position is obtained. First, it is assumed that the position in the gantry X-axis direction when the alignment camera 6 is moved to the pre-alignment position is 200 mm. Therefore, the Y-direction displacement of the alignment camera 6 at the position of 200 mm is read from the stored data. The displacement in the Y direction of the alignment camera 6 at this position is −0.012 mm. Next, the displacement in the Y direction of the nozzle must be the value when the position in the X direction of the nozzle is the pre-alignment position. The position is determined by the displacement in the X direction of the nozzle from the reference position. This is the same value as the displacement in the X direction. That is, the X-direction displacement at the X-axis direction position 200 mm of the alignment camera 6 is −1000.003 mm, and the Y-direction displacement of the nozzle when the X-direction displacement of the nozzle 7 becomes this value is read. However, since the measured pitch of the stored data is 10 mm, the displacement in the X direction does not exactly match, so the nearest value is extracted and the value −0.005 mm at −1000.006 is taken as the displacement in the nozzle Y direction. Thus, when the displacement in the Y direction of the alignment camera 6 and the nozzle 7 is obtained, the difference dy3 is obtained as 0.007 mm. Similarly, the gantry is moved to the post-alignment position to obtain the Y-direction displacement difference dy4. In this example, since the data is collected so that the amount of change in the Y direction for each pitch is very small, the displacement in the X direction is read as an approximate value. It is preferable to obtain the displacement in the X direction and Y direction between the pitches by proportional calculation. By the above method, the difference in the Y-direction displacement between the camera and the nozzle at an arbitrary position in the gantry X-axis direction is obtained.

  Next, returning to FIG. 5, FIG. 5B shows the substrate angle and Y direction by operating the Y and θ axes of the table so that the Y direction displacement differences dy3 and dy4 in FIG. 5A become zero. It is the figure which moved the position. The substrate 20 is positioned so that the alignment mark is aligned at the front-rear alignment position on the orbit of the nozzle 7, and the displacement of the alignment between the nozzle and the substrate due to the difference in displacement between the camera and the nozzle can be reduced.

  However, since the substrate is aligned at the two marks, as shown in FIG. 5B, the straight line connecting the marks and the trajectory of the nozzles within this range are biased. Therefore, the position of the substrate in the Y direction is further adjusted so that this straight line is at the center of the nozzle trajectory. Specifically, the Y-direction maximum displacement width dy5 of the nozzle from the straight line connecting the alignment marks is obtained from the stored displacement and the inclination of the straight line, and the table is moved in the Y-axis direction so that the straight line comes to the intermediate position. This further reduces the deviation from the substrate.

  By the way, the alignment in the X direction is performed by adjusting the application position, that is, the application start position and the end position as described above. These positions are positions where the paste is discharged from the nozzle in the movement in the X-axis direction of application, and are specified by the distance from the alignment mark on the substrate. Therefore, for the X direction at this time, the positional relationship between the alignment mark and the gantry X-axis direction is calculated, and the X-direction displacement difference between the camera and the nozzle when moved to the application start and end positions in the gantry X-axis direction is calculated. The position is obtained in the same manner as the Y-direction displacement described above, and each position is corrected. However, in a coating apparatus that discharges such a paste, the required accuracy of the start and end positions of coating is low, and if there is no problem, correction in the X direction may be omitted.

  When the relative alignment between the substrate and the nozzle is completed by the above procedure, the gantry is returned to the initial position, the gantry is scanned in the X-axis direction, and the inside of the nozzle is discharged so that the paste is discharged from the nozzle at the application start position. By applying pressure and controlling the pressure in the nozzle so as to stop at the application end position, it is possible to apply to the intended position with high accuracy.

  Next, another coating method in this embodiment will be described. Also in this coating method, the steps up to the alignment of the alignment camera 6 and the substrate 20 in FIG. Therefore, turning to FIG. 6, FIG. 6 (a) is a diagram showing the same state as FIG. 4 (b). The substrate 20 is positioned so that the alignment mark is aligned at the front-rear alignment position on the track of the alignment camera 6. In this figure, if the amount of deviation in the Y direction of the nozzle trajectory from the straight line connecting the alignment marks (arrow width shown in the figure) is known, the substrate can be moved in the Y direction by that amount to accurately align the nozzle trajectory. I can see that it fits. FIG. 6B is a diagram showing one state where the substrate is moved in the Y direction at a substantially middle point of coating and is aligned with the nozzle trajectory. Therefore, this Y-direction deviation amount is calculated for each X-direction movement position of the nozzle and stored as Y-direction correction data. The interval of movement in the X direction is preferably the same as the nozzle displacement measurement pitch that is measured in advance. When the Y direction correction data is calculated and stored for each movement position, the gantry is returned to the initial position, and a coating operation is performed in which the gantry is scanned in the X-axis direction to discharge the paste from the nozzle. At this time, the Y-direction correction data is read in accordance with the movement of the application scan in the X-axis direction, and the position of the substrate is corrected by controlling the movement of the table in the Y-axis direction.

  As described above, in the embodiment of the present invention, the displacements in the X direction and the Y direction with respect to the movement amount of the camera and the nozzle in the X axis direction are measured in advance. If possible, for example, the camera data may be measured, and the nozzle data may be stored as data by adding the distance between the camera and the nozzle to the X-direction displacement of the camera. Further, when storing data, the X-direction displacement of the camera and the X-direction displacement data of the nozzle may be shifted so that they are arranged in the same data row. That is, if the difference of 500 mm in the X-direction position between the camera and the nozzle is offset and stored, the displacement in the Y-direction between the camera and the nozzle can be read with the X-axis coordinate value, thereby simplifying data extraction.

  In the embodiment of the invention, the alignment camera 6 for detecting the position of the substrate is fixed to one alignment mark. However, in the case of a plurality of alignment marks, it may be movable along the beam portion. A plurality of units may be arranged according to the number of marks.

It is the schematic plan view which showed the whole structure of the example coating device which concerns on this invention. It is the figure which showed the initial adjustment of a coating device, and the positional relationship of a board | substrate. An example of stored data is tabulated. It is explanatory drawing which positions a board | substrate on the track | orbit of the alignment camera 6. FIG. It is explanatory drawing which aligns a board | substrate on the track | orbit of a nozzle. It is explanatory drawing of position alignment of the board | substrate in another coating method.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Machine stand 2 Table 3 Y-axis drive part 3a, 3b Y-axis guide rail 4 Gantry 5 X-axis drive part 5a, 5b X-axis guide rail 6 Alignment camera 7 Nozzle 8 Camera 9 Control apparatus 10 Position detection part 11 Calculation command part 12 Axis control unit 13 Storage unit

Claims (5)

A table on which the substrate is placed,
A gantry equipped with a nozzle for discharging a coating liquid and an alignment camera for detecting an alignment mark on the substrate;
A coating apparatus comprising: moving means for moving the gantry substantially linearly in the coating direction; and adjusting means for adjusting the position in the coating width direction of the table and the angle in the table surface,
further,
Storage means for previously storing displacement information from the reference position of the alignment camera and displacement information from the reference position of the nozzle at a plurality of gantry movement positions;
The relative position between the nozzle and the alignment mark is calculated based on the displacement information from the reference position of the alignment camera and the displacement information from the reference position of the nozzle at the gantry position when the alignment mark is detected using the alignment camera. A coating apparatus comprising: control means for sending a control signal for adjusting a relative position between the nozzle and the substrate based on the result to the adjustment means. Using the coating apparatus according to claim 1,
Based on the displacement information from the reference position of the alignment camera at the gantry position when the alignment mark is detected using the alignment camera and the displacement information from the reference position of the nozzle, the relative position of the nozzle and the alignment mark is determined. Operate,
Based on the result, after adjusting the relative position and angle of the nozzle and the substrate to apply to the intended position on the substrate,
A coating method in which the coating liquid is applied substantially linearly on the substrate by discharging the coating liquid from the nozzle while moving the gantry substantially linearly in the coating direction.   The coating method according to claim 2, wherein displacement information in the coating width direction from the reference position of the alignment camera is measured and stored in advance as displacement information from the reference position of the alignment camera.   4. The coating method according to claim 3, wherein displacement information in the coating width direction from the reference position of the alignment camera at the same gantry position is used as displacement information from the reference position of the nozzle.   The gantry is moved substantially linearly in the coating longitudinal direction, and coating is performed from the nozzles while adjusting the position of the table in the coating width direction based on displacement information from the reference position of the nozzles at the moving position of the gantry. The coating method according to claim 2, wherein the liquid is discharged.

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