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JP2010078432A - Substrate inspection jig and contactor - Google Patents

Substrate inspection jig and contactor Download PDF

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JP2010078432A
JP2010078432A JP2008246549A JP2008246549A JP2010078432A JP 2010078432 A JP2010078432 A JP 2010078432A JP 2008246549 A JP2008246549 A JP 2008246549A JP 2008246549 A JP2008246549 A JP 2008246549A JP 2010078432 A JP2010078432 A JP 2010078432A
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contact
rod
shaped member
coil spring
hole
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Hideo Nishikawa
秀雄 西川
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Nidec Advance Technology Corp
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Nidec Read Corp
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Abstract

<P>PROBLEM TO BE SOLVED: To provide a substrate inspection jig easily manufactured and maintained, and a contactor used for the substrate inspection jig. <P>SOLUTION: The contactor 2 includes: a long conductive rod member 21; a large diameter section 22 disposed on the other side; a coil spring 23 penetrated through the rod member 21; and a connection terminal 24 as a cylindrical member for accommodating the other end of the rod member 21 in its interior, and tapered at the other end. A contactor holder 3 includes: a guide hole 311 for guiding one end of the contactor 2 to an inspection point of a to-be-inspected substrate; and a connection hole 351 for guiding the other end to an electrode 41 connected to a substrate inspection apparatus, and accommodating the coil spring 23 and the connection terminal 24. The connection hole 351 has a first hole 331 whose diameter is larger than that of the rod member 21 and smaller than that of the large diameter section 22, and a second hole 332 whose diameter is larger than that of the large diameter section 22. A pitch of the guide hole 311 is smaller than that of the electrode 41. <P>COPYRIGHT: (C)2010,JPO&amp;INPIT

Description

本発明は、基板検査治具及び接触子に関し、より詳しくは、微細なピッチの検査点の検査が容易に出来る基板検査治具及びそれに用いられる接触子に関する。
尚、本発明はプリント配線基板に限らず、例えば、フレキシブル基板、多層配線基板、液晶ディスプレイやプラズマディスプレイ用の電極板、及び半導体パッケージ用のパッケージ基板やフィルムキャリアなどの種々の基板や半導体ウェハなどに形成される電気的配線の検査に適用でき、本明細書では、それら種々の検査基板を総称して「基板」という。 The present invention relates to a substrate inspection jig and a contact, and more particularly to a substrate inspection jig that can easily inspect inspection points with a fine pitch and a contact used therefor.
Note that the present invention is not limited to a printed circuit board, but includes, for example, flexible substrates, multilayer wiring substrates, electrode plates for liquid crystal displays and plasma displays, and various substrates such as package substrates and film carriers for semiconductor packages and semiconductor wafers. In the present specification, these various test substrates are collectively referred to as “substrates”.

従来、回路基板上などに設けられる配線パターンは、その回路基板に搭載されるIC等の半導体や抵抗器などの電気・電子部品に電気信号を正確に伝達する必要があるため、電気・電子部品を実装する前のプリント配線基板、液晶パネルやプラズマディスプレイパネルに配線パターンが形成された回線配線基板、或いは、半導体ウェハ等の基板に形成された配線パターンに対して、検査対象となる配線パターンに設けられた検査点間の抵抗値を測定して、その良否が判断される。   Conventionally, a wiring pattern provided on a circuit board or the like has to accurately transmit an electric signal to an electric / electronic component such as a semiconductor or a resistor such as an IC mounted on the circuit board. Printed wiring board before mounting, circuit wiring board with wiring pattern formed on liquid crystal panel or plasma display panel, or wiring pattern to be inspected against wiring pattern formed on a substrate such as semiconductor wafer The resistance value between the provided inspection points is measured, and the quality is judged.

このような判定検査には、配線パターンの断線及び短絡を検査する検査方法が実施されている。このような断線の検査では、検査対象となる配線パターンの２箇所以上の端点に設けられる検査点に、夫々１つずつ接触子を当接させ、その接触子間に所定レベルの測定用電流を流すことによって、その接触子間の電圧値を測定し、この電圧値と予め定められた閾値を比較することにより良否の判定が行われている。   In such determination inspection, an inspection method for inspecting disconnection and short circuit of the wiring pattern is performed. In such disconnection inspection, a contact is brought into contact with each of inspection points provided at two or more end points of the wiring pattern to be inspected, and a predetermined level of measurement current is applied between the contacts. The voltage value between the contacts is measured by flowing, and the quality is determined by comparing this voltage value with a predetermined threshold value.

例えば、このような検査に用いられる基板検査治具には以下のものが存在する。
特許文献１に記載される「回路基板検査装置のテストヘッド」では、接触ピン（文献１符号１）がコイルばね（文献１符号Ｓ）と受けピン（文献1符合３）に挿通された構成のテストヘッドが開示されている。
特許文献２に記載される「プローブピン及びコンタクタ」では、プローブピン本体（文献２符合１１）とコイルスプリング（文献２符合１２）を一体化する構成が開示されている。
特許文献３に記載される「プローブ、・・・」では、プローブ本体（文献３符合１１０）がスプリング（文献３符合１２０）とガイド管（文献３符合１３０）に挿通された構成のプローブユニットが開示されている。 For example, there are the following substrate inspection jigs used for such inspection.
In the “test head of a circuit board inspection apparatus” described in Patent Document 1, a contact pin (Reference 1 reference 1) is inserted through a coil spring (Reference 1 reference S) and a receiving pin (Reference 1 reference 3). A test head is disclosed.
The “probe pin and contactor” described in Patent Document 2 discloses a configuration in which a probe pin main body (reference 2 reference 11) and a coil spring (reference 2 reference 12) are integrated.
In “Probe,...” Described in Patent Document 3, a probe unit having a configuration in which a probe main body (reference 3 reference 110) is inserted into a spring (reference 3 reference 120) and a guide tube (reference 3 reference 130) is provided. It is disclosed.

特許3369492Patent 3609492 特開2004-85260JP2004-85260 特開2008-26248JP2008-26248

しかしながら、特許文献１乃至３に開示された接触子の部材は切削加工で形成されてコストが掛かることと、接触子が平行な垂直構成で先端と基端が同じピッチとなり、検査点の最小ピッチがコイルばねの外径に制約される共通の問題を有していた。
文献１のテストヘッドにおいては、接触ピン（文献１符合１）の交換にヘッドブロック（文献１符合４）のピンブロック（文献１符合１５）とばねブロック（文献１符合１６）を分離する必要があり作業が複雑になる。
文献２のプローブピン本体（文献２符合１１）の螺旋溝（文献２符合１１Ｄ）の加工形成が複雑でコストが掛かる。
文献３のプローブ支持部(文献３符合２００）へのプローブ（文献３符合１００）の挿入において、第二ガイド板（文献３符合２２０）の板厚が薄いので、第一ガイド板（文献３符合２１０）への挿入が容易でなく組立も複雑になる。上記した各々の問題がある。 However, the contact members disclosed in Patent Documents 1 to 3 are formed by cutting and costly, and the contact and the vertical configuration in which the contacts are parallel have the same pitch between the tip and the base. Have common problems that are limited by the outer diameter of the coil spring.
In the test head of Document 1, it is necessary to separate the pin block (Document 1 code 15) and the spring block (Document 1 code 16) of the head block (Document 1 code 4) to replace the contact pin (Document 1 code 1). Work becomes complicated.
The processing and formation of the spiral groove (reference 2 reference 11D) of the probe pin main body (reference 2 reference 11) of reference 2 is complicated and expensive.
In the insertion of the probe (reference 3 reference 100) into the probe support part of reference 3 (reference 3 reference 200), the second guide plate (reference 3 reference 220) is thin, so the first guide plate (reference 3 reference 210) is not easy to insert and the assembly is complicated. There are each of the problems described above.

近年、基板の微細化と高密度化が進み、接触子の微細化（高単価化する）と検査点の増加とが相乗して、全体価格が騰貴し基板検査治具のコストが重要な課題となっている。
たとえば、一つの形態として、多層基板製造法のビルドアップ工法が微細高密度基板において主流になり、ビア（層間接続）の抵抗値を四端子測定（１つの検査点に電流用と電圧用の２本の接触子を設定）する低抵抗検査の要求が増え接触子を２倍にすることになり、コストと検査ピッチを最小化する必要がある。
本発明は、このような実情に鑑みてなされたもので微細ピッチにも製作と保守を容易にし、コスト低減を図ることができる基板検査治具及び接触子を提供する。 In recent years, substrate miniaturization and high density have progressed, and the miniaturization of contactors (increasing unit prices) and the increase in inspection points have become synergistic, raising the overall price, and the cost of substrate inspection jigs is an important issue It has become.
For example, as one form, the build-up method of the multilayer substrate manufacturing method becomes mainstream in a fine high-density substrate, and the resistance value of the via (interlayer connection) is measured by four terminals (one for inspection and two for voltage). The demand for low-resistance inspection for setting a contact of a book increases, and the number of contacts is doubled, and it is necessary to minimize cost and inspection pitch.
The present invention has been made in view of such circumstances, and provides a substrate inspection jig and a contact that can be easily manufactured and maintained even in a fine pitch and can reduce costs.

請求項１記載の発明は、被検査基板の電気的特性を検査するために、基板検査装置と該被検査基板の配線パターンに設けられている複数の検査点との間の電気的導通を得るための基板検査治具であって、前記基板検査治具は、両端に電気的導通を図る端部を有し、一方の端部が前記検査点に圧接される導電性を有する接触子を複数備える接触子群と、前記接触子群を保持する接触子保持体と、前記接触子群の夫々の接触子の他方の端部と対向して配置された電極部を備える、前記基板検査装置に接続される電極体を有し、前記接触子は、導電性で長尺の棒状部材と、前記棒状部材の他方側に配置される該棒状部材の径よりも大きく形成される大径部と、前記大径部より他方側に、前記棒状部材に貫通されるコイルばねと、前記棒状部材の他端を内側に収納する円筒部材で、他端側が先細形状の接続端子を有し、前記接触子保持体は、前記接触子の一端を前記被検査基板の検査点へ案内する案内孔と、前記接触子の他端を前記電極部へ案内し、前記コイルばねと前記接続端子を収容する接続孔を有し、前記接続孔の径は、前記棒状部材の径よりも大きく、前記大径部の径よりも小さく形成されている第一孔と、第一孔と連通連結される前記大径部よりも径が大きい第二孔からなり、前記案内孔のピッチは前記接続孔のピッチより小さいことを特徴とする基板検査治具を提供する。
請求項２記載の発明は、前記接触子保持体は、前記接触子の一方端部を前記検査点に案内する前記案内孔が形成される案内板と、前記接触子の他方端部を前記電極部に案内するとともに前記コイルばねと前記接続端子を内部に収容する前記接続孔を形成する接続板と、前記棒状部材の径よりも大きいとともに、前記案内孔と前記接続孔を結ぶ直線上に形成される中間孔を具備する中間板を有することを特徴とする請求項１の基板検査治具を提供する。
請求項３記載の発明は、前記接触子保持体が前記電極体に保持される場合に、前記接触子のコイルばねは押圧されていることを特徴とする請求項１記載の基板検査治具を提供する。
請求項４記載の発明は、前記大径部は、前記棒状部材の所定の位置に追加加工し形成されたことを特徴とする請求項１項の基板検査治具を提供する。
請求項５記載の発明は、被検査物の電気的特性を検査するために、被検査物の電気的特性を算出する検査装置の電極部と該検査物に予め設けられる複数の検査点との間の電気的導通を得るための電気的接続治具に備えられる接触子であって、一端が前記検査点に導通接触される導電性で長尺の棒状部材と、前記棒状部材の他方側に配置される該棒状部材の径よりも大きく形成される大径部と、前記大径部より他方側に、前記棒状部材に貫通されるコイルばねと、前記棒状部材の他端を内側に収納する円筒部材で、他端が先細形状の前記電極部と導通接触する接続端子からなることを特徴とする接触子を提供する。
請求項６記載の発明は、前記コイルばねは密巻部と疎巻部からなり、前記大径部はコイルばねの密巻部と前記棒状部材を接合して形成されることを特徴とする請求項５記載の接触子を提供する。
請求項７記載の発明は、前記コイルばねは密巻部と疎巻部からなり、前記大径部はコイルばねの密巻部と前記棒状部材を接合して形成されることを特徴とする請求項１記載の基板検査治具を提供する。 According to the first aspect of the present invention, in order to inspect the electrical characteristics of the substrate to be inspected, electrical continuity is obtained between the substrate inspection apparatus and a plurality of inspection points provided in the wiring pattern of the substrate to be inspected. The substrate inspection jig has a plurality of conductive contacts each having an end portion for electrical continuity at one end and one end portion being pressed against the inspection point. The substrate inspection apparatus, comprising: a contact group provided; a contact holder that holds the contact group; and an electrode portion disposed to face the other end of each contact of the contact group. The contactor has an electrode body to be connected, the contact is a conductive and long rod-shaped member, and a large-diameter portion formed larger than the diameter of the rod-shaped member disposed on the other side of the rod-shaped member, On the other side of the large-diameter portion, a coil spring penetrating the rod-shaped member and the other end of the rod-shaped member A cylindrical member housed inside, the other end side having a tapered connection terminal, the contact holder holding the guide hole for guiding one end of the contact to an inspection point of the substrate to be inspected, and the contact A connecting hole for guiding the other end of the electrode to the electrode portion and accommodating the coil spring and the connecting terminal, and the diameter of the connecting hole is larger than the diameter of the rod-shaped member and larger than the diameter of the large-diameter portion. A first hole formed to be smaller and a second hole having a larger diameter than the large-diameter portion connected to and communicated with the first hole, and the pitch of the guide holes is smaller than the pitch of the connection holes. A substrate inspection jig is provided.
According to a second aspect of the present invention, the contact holder includes a guide plate in which the guide hole for guiding one end of the contact to the inspection point is formed, and the other end of the contact is the electrode. And a connecting plate that forms the connection hole for guiding the coil spring and the connection terminal therein, and is formed on a straight line that is larger than the diameter of the rod-shaped member and connects the guide hole and the connection hole. The substrate inspection jig according to claim 1, further comprising an intermediate plate having an intermediate hole.
According to a third aspect of the present invention, there is provided the substrate inspection jig according to the first aspect, wherein the coil spring of the contact is pressed when the contact holder is held by the electrode body. provide.
According to a fourth aspect of the present invention, there is provided the substrate inspection jig according to the first aspect, wherein the large diameter portion is additionally formed at a predetermined position of the rod-shaped member.
According to a fifth aspect of the present invention, in order to inspect the electrical characteristics of the object to be inspected, an electrode unit of an inspection apparatus that calculates the electrical characteristics of the object to be inspected and a plurality of inspection points provided in advance on the object to be inspected A contact provided in an electrical connection jig for obtaining electrical continuity between the conductive elongated bar-shaped member, one end of which is conductively contacted with the inspection point, and the other side of the rod-shaped member A large-diameter portion formed larger than the diameter of the rod-shaped member to be disposed, a coil spring penetrating the rod-shaped member on the other side of the large-diameter portion, and the other end of the rod-shaped member are accommodated inside. A contact member is provided which is a cylindrical member and includes a connection terminal in conductive contact with the tapered electrode portion at the other end.
The invention according to claim 6 is characterized in that the coil spring includes a closely wound portion and a loosely wound portion, and the large diameter portion is formed by joining the closely wound portion of the coil spring and the rod-shaped member. Item 5. A contact according to item 5.
The invention according to claim 7 is characterized in that the coil spring includes a closely wound portion and a loosely wound portion, and the large diameter portion is formed by joining the closely wound portion of the coil spring and the rod-shaped member. The board | substrate inspection jig of claim | item 1 is provided.

請求項１又は５記載の発明によれば、棒状部材の検査点側が長く、少し傾斜させることで検査点の位置を電極部に比べ小さくすることができ、微小ピッチの検査が容易にできる。そして、接触子保持体が電極体と着脱可能で基板検査治具の組立と保守が容易にできる。
請求項２記載の発明によれば、案内孔と収容孔を結ぶ直線上に形成される中間孔を具備する中間板を備えることにより、接触子を接触子保持体に装着する際に接触子を接続孔側から容易に中間孔を経由させて案内孔に挿通させることができる。
請求項３記載の発明によれば、電極部と接触子が安定した導通接触状態になる。そして、棒状部材の案内板からの突出量を均一にすることができる。
請求項４記載の発明によれば、大径部を切削加工で形成しないので、加工を実施の際の切り屑が殆ど発生することがなく、コスト低減を行うことができる。
請求項５記載の発明によれば、棒状部材が長尺であるので少し傾斜して保持されることで、一端側と他端側の接触子の配置を少し移動することができ、微小ピッチの検査が容易にできる。そしてコイルばねに棒状部材を挿通することでインダクダンスの低減が図れる。
請求項６及び７記載の発明によれば、大径部をコイルばねの密巻部で形成するので、粗巻部に応力が均等に掛かりコイルばねの特性と寿命を確保できる。そして、コスト低減にもなる。 According to the first or fifth aspect of the present invention, the inspection point side of the rod-shaped member is long, and by slightly tilting, the position of the inspection point can be made smaller than that of the electrode portion, and inspection of a minute pitch can be facilitated. The contact holder is detachable from the electrode body, and assembly and maintenance of the substrate inspection jig can be facilitated.
According to the second aspect of the present invention, when the contactor is mounted on the contactor holding body by providing the intermediate plate having the intermediate hole formed on the straight line connecting the guide hole and the receiving hole, It can be easily inserted into the guide hole through the intermediate hole from the connection hole side.
According to the invention described in claim 3, the electrode portion and the contact are in a stable conductive contact state. And the protrusion amount from the guide plate of a rod-shaped member can be made uniform.
According to invention of Claim 4, since a large diameter part is not formed by cutting, the chip at the time of processing is hardly generated, and cost reduction can be performed.
According to the fifth aspect of the present invention, since the rod-like member is long, the arrangement of the contacts on the one end side and the other end side can be slightly moved by being held slightly inclined, and the minute pitch can be reduced. Inspection can be done easily. Inductance can be reduced by inserting the rod-shaped member through the coil spring.
According to the invention described in claims 6 and 7, since the large diameter portion is formed by the densely wound portion of the coil spring, stress is evenly applied to the coarsely wound portion, and the characteristics and life of the coil spring can be ensured. And it also reduces the cost.

本発明を実施するための最良の形態を説明する。
図１は、本発明に係る基板検査治具１を使用する場合の全体の概略構成を示している。この図１では、基板検査治具１は、複数の接触子２、これら接触子２を多針状に保持する接触子保持体３、この接触子保持体３を支持するとともに接触子２と接触して導通となる電極部４１を有する電極体４、電極部４１とコネクタ４５を接続するリード線４４及びベース板４６を示している。
接触子２は、被検査基板に形成される配線パターンの各検査点に接触する端子であり、接触子保持体３は接触子２と電極部４１を電気的に接続する。
本発明は、この基板検査治具１に関する発明であり、特に、接触子２と接触子２を保持する接触子保持体３の構造に関する。
尚、説明に示す図は概略を示す図であり、接触子２の本数やリード線４４の本数は特に限定されるものではない。また、図面中で示される接触子２や電極部４１は、説明の都合上一本分の構造しか開示しておらず、実際の基板検査治具１では複数の接触子２やその接触子２に対応する複数の電極部４１を有している。 The best mode for carrying out the present invention will be described.
FIG. 1 shows an overall schematic configuration when a substrate inspection jig 1 according to the present invention is used. In FIG. 1, the substrate inspection jig 1 includes a plurality of contacts 2, a contact holder 3 that holds the contacts 2 in a multi-needle shape, supports the contact holder 3, and contacts the contacts 2. Thus, the electrode body 4 having the electrode portion 41 that becomes conductive, the lead wire 44 that connects the electrode portion 41 and the connector 45, and the base plate 46 are shown.
The contact 2 is a terminal that contacts each inspection point of the wiring pattern formed on the substrate to be inspected, and the contact holder 3 electrically connects the contact 2 and the electrode portion 41.
The present invention relates to the substrate inspection jig 1 and particularly relates to the structure of the contact 2 and the contact holder 3 that holds the contact 2.
In addition, the figure shown to description is a figure which shows an outline, and the number of the contacts 2 and the number of the lead wires 44 are not specifically limited. In addition, the contactor 2 and the electrode part 41 shown in the drawing are disclosed only for one structure for convenience of explanation, and the actual substrate inspection jig 1 has a plurality of contacts 2 and their contacts 2. Has a plurality of electrode portions 41 corresponding to.

図２は、本発明にかかる基板検査治具１が組み立てられた際の断面図である。
この接触子２は、一方が基板に設定される検査点（図示せず）に導通接触され、他方が後述する電極部４１と導通接触する導電性を有する複数の部材から構成されている。この接触子２は、検査点から電極部４１へ、または電極部４１から検査点へ電気信号の伝送を行うことになる。 FIG. 2 is a cross-sectional view when the board inspection jig 1 according to the present invention is assembled.
The contact 2 is composed of a plurality of conductive members, one of which is in conductive contact with an inspection point (not shown) set on the substrate and the other of which is in conductive contact with an electrode portion 41 described later. The contact 2 transmits electric signals from the inspection point to the electrode part 41 or from the electrode part 41 to the inspection point.

接触子２は、図２で示す如く、棒状部材２１、大径部２２、コイルばね２３と接続端子２４を有してなる。この接触子２が電極部４１と検査点を電気的に接続することになる。
棒状部材２１は棒状に形成される長尺の部材であり、特に限定されていないが円柱形状に形成される。
この棒状部材２１の一方端部は図２で示すが如き、湾曲形状や半球状又は尖鋭形状に形成されることが好ましい。このように棒状部材２１の一方端部が上記の如き形状を有するように形成されることで検査点に接触する場合に安定して接触することができる。棒状部材２１の他方端部の形状は特に限定されていないが湾曲形状や半球状が好ましい。 As shown in FIG. 2, the contact 2 includes a rod-shaped member 21, a large diameter portion 22, a coil spring 23, and a connection terminal 24. The contact 2 electrically connects the electrode part 41 and the inspection point.
The rod-shaped member 21 is a long member formed in a rod shape, and is not particularly limited, but is formed in a columnar shape.
As shown in FIG. 2, one end of the rod-shaped member 21 is preferably formed in a curved shape, a hemispherical shape, or a sharp shape. Thus, when the one end part of the rod-shaped member 21 is formed so as to have the shape as described above, it can be stably contacted when contacting the inspection point. Although the shape of the other end part of the rod-shaped member 21 is not specifically limited, A curved shape and a hemispherical shape are preferable.

この棒状部材２１は、導電性を有する部材（導電物質）で形成されており、例えば、ＳＫ鋼(SKH)、ベリリウム銅（BeCu）をあげることができる。棒状部材２１は、検査点と大径部２２にその両側が圧接された場合に、略撓みが無い程度の強度を有することが好ましい。このような強度を接触子２が有することで、コイルばね２３の付勢により検査点に圧接状態を維持することができ、コイルばね２３の伸縮方向の圧接力を提供することができる。
棒状部材２１の長さや太さは特に限定されるものではなく、その使用に応じて適宜変更することができるとともに、被検査基板に形成される検査点のピッチやその形状と大きさに合わせて適宜設定される。
この棒状部材２１の長さや径の大きさは、特に限定されるものではなく使用者により適宜に設定されるが、例えば、その長さを、３０〜４０ｍｍに形成されることができ、また、その径の大きさを、０．２〜０．４ｍｍに形成することができる。 This rod-shaped member 21 is formed of a conductive member (conductive material), and examples thereof include SK steel (SKH) and beryllium copper (BeCu). It is preferable that the rod-shaped member 21 has such a strength that there is substantially no deflection when both sides thereof are pressed against the inspection point and the large-diameter portion 22. Since the contactor 2 has such strength, the pressure contact state can be maintained at the inspection point by the biasing force of the coil spring 23, and the pressure contact force in the expansion / contraction direction of the coil spring 23 can be provided.
The length and thickness of the rod-shaped member 21 are not particularly limited, and can be appropriately changed according to the use thereof, and in accordance with the pitch of the inspection points formed on the substrate to be inspected and the shape and size thereof. Set as appropriate.
The length and the size of the diameter of the rod-shaped member 21 are not particularly limited and are appropriately set by the user. For example, the length can be formed to be 30 to 40 mm, The diameter can be formed to 0.2 to 0.4 mm.

大径部２２は、図２で示す如く、棒状部材２１の他端側の所定の箇所に設けられる。この大径部２２は、棒状部材２１の径よりも大きい径を有するように、棒状部材２１の側周縁を覆うように形成されている。この大径部２２は導電性の物質から形成されることが好ましく、大径部２２と棒状部材２１を導通接続されていることが好ましい。
この大径部２２の径の大きさは特に限定されていないが、後述するコイルばね２３の外径と同様に形成される。また、大径部２２の長軸方向の長さは、棒状部材２１の長軸方向の長さに応じて適宜調整されるため特に限定されないが、２〜３ｍｍの長さを有するように形成される。 As shown in FIG. 2, the large diameter portion 22 is provided at a predetermined location on the other end side of the rod-shaped member 21. The large diameter portion 22 is formed so as to cover the side periphery of the rod-shaped member 21 so as to have a diameter larger than the diameter of the rod-shaped member 21. The large-diameter portion 22 is preferably formed from a conductive material, and the large-diameter portion 22 and the rod-shaped member 21 are preferably conductively connected.
The diameter of the large diameter portion 22 is not particularly limited, but is formed in the same manner as the outer diameter of the coil spring 23 described later. Further, the length of the large diameter portion 22 in the major axis direction is not particularly limited because it is appropriately adjusted according to the length of the rod-shaped member 21 in the major axis direction, but is formed to have a length of 2 to 3 mm. The

この大径部２２が設けられる場所は、棒状部材２１の電極部４１に接触する側に形成されていることが好ましく、後述する接触子保持体３の接続板３５の内部に収容される位置に形成される。この大径部２２が棒状部材２１の径よりも大きい径を有するように形成されることにより、接触子保持体３に接触子２を装着した場合に、この大径部２２により接触子保持体３から抜け出ることを防止することができるとともに、接触子２に後述する初期荷重を掛けて一端側の高さを揃えることができる。
尚、図２で示される大径部２２は棒状部材２１の所定位置の外周を覆うように設けられているが、切削加工にて一体型に形成することもできるが、切削の切り屑が発生し資源とコスト的には好ましくない。 The place where the large-diameter portion 22 is provided is preferably formed on the side of the rod-like member 21 that contacts the electrode portion 41, and is located at a position that is accommodated in the connection plate 35 of the contact holder 3 described later. It is formed. By forming the large diameter portion 22 to have a diameter larger than the diameter of the rod-shaped member 21, when the contact 2 is attached to the contact holder 3, the large diameter portion 22 allows the contact holder to be attached. 3 can be prevented from slipping out, and an initial load, which will be described later, can be applied to the contactor 2 so that the height on one end side can be made uniform.
The large-diameter portion 22 shown in FIG. 2 is provided so as to cover the outer periphery of the rod-shaped member 21 at a predetermined position, but it can be formed integrally by cutting, but cutting chips are generated. However, it is not preferable in terms of resources and cost.

図４ａで示す如く、大径部２２は、パイプやリング形状の部材を溶接等で接合することで形成することができる。
図４ｂで示す如く、大径部２２は、密巻ばねを溶接等で接合することでも形成することができる。
図４ｃで示す如く、大径部２２は、棒状部材をかしめ加工することでも形成することができる。この様に追加加工にて大径部２２を付加することが簡単でコスト的にも好ましい。 As shown in FIG. 4a, the large diameter portion 22 can be formed by joining pipes or ring-shaped members by welding or the like.
As shown in FIG. 4b, the large diameter portion 22 can also be formed by joining closely wound springs by welding or the like.
As shown in FIG. 4c, the large diameter portion 22 can also be formed by caulking a rod-shaped member. In this way, it is easy and cost-effective to add the large diameter portion 22 by additional processing.

コイルばね２３は棒状部材２１を内部に収容し、棒状部材２１を貫通保持した状態になるように配置される。このコイルばね２３は、棒状部材と導通接触される。これはコイルばね２３の線抵抗とインダクダンスの低減にもなる。
コイルばね２３が設けられる場所は棒状部材２１の大径部２２より他端側に配置されている。コイルばね２３は、図２で示される如く、棒状部材２１のコイルばね保持部２１１よりも短く形成されており、棒状部材２１の他方端部がコイルばね２３から延出するように形成されている。
このコイルばね２３は、ピアノ線、ステンレス鋼、ベリリウム銅（BeCu）やタングステン（W）などの導電性を有する部材で形成されており、棒状部材２１のコイルばね保持部２１１に保持され、大径部２２で係止され導通接触されている。コイルばね２３は棒状部材２１の長軸方向に伸縮することになる。 The coil spring 23 accommodates the rod-shaped member 21 therein and is arranged so as to be in a state of penetrating and holding the rod-shaped member 21. The coil spring 23 is in electrical contact with the rod-shaped member. This also reduces the wire resistance and inductance of the coil spring 23.
The place where the coil spring 23 is provided is disposed on the other end side from the large-diameter portion 22 of the rod-shaped member 21. As shown in FIG. 2, the coil spring 23 is formed shorter than the coil spring holding portion 211 of the rod-shaped member 21, and is formed so that the other end portion of the rod-shaped member 21 extends from the coil spring 23. .
The coil spring 23 is formed of a conductive member such as piano wire, stainless steel, beryllium copper (BeCu) or tungsten (W), and is held by the coil spring holding portion 211 of the rod-shaped member 21 and has a large diameter. It is locked by the portion 22 and is in conductive contact. The coil spring 23 expands and contracts in the long axis direction of the rod-shaped member 21.

接触子２の他端を形成する接続端子２４は、棒状部材２１の他端を内側に収納する円筒部材であって、一端側を開口形状にされ、他端側を先細形状に形成されている。
先細形状であることで、電極部４１の表面が平面の場合導通接触が容易になる。そして電極部４１の径が小さい場合にも導通接触を確実にすることができる。
この接続端子２４は、コイルばね２３と導通接続されており、図２で示される如く、接続端子２４の円筒部材の一端側の端面とコイルばね２３の他端側の端部とが圧接されている。このため、接触子２の一方端が検査点に押圧されると、コイルばね２３が伸縮するとともに棒状部材２１が接続端子２４の内部へ挿入されることになる。
また、この接続端子２４を設けることにより、接触子２が傾斜して配置されている場合であっても（図２では、向かって右側の接触子は検査治具の面に対して直角に配置されているが、左側の接触子が傾斜して配置されている）、接続端子２４がその傾斜によるずれを吸収することができ、安定して棒状部材２１を保持することができる。 The connection terminal 24 that forms the other end of the contact 2 is a cylindrical member that accommodates the other end of the rod-shaped member 21 inside, and is formed in an opening shape at one end side and a tapered shape at the other end side. .
The tapered shape facilitates conduction contact when the surface of the electrode portion 41 is flat. And even when the diameter of the electrode part 41 is small, conduction | electrical_connection contact can be ensured.
The connection terminal 24 is conductively connected to the coil spring 23, and as shown in FIG. 2, the end surface on one end side of the cylindrical member of the connection terminal 24 and the end portion on the other end side of the coil spring 23 are pressed against each other. Yes. For this reason, when one end of the contact 2 is pressed against the inspection point, the coil spring 23 expands and contracts and the rod-shaped member 21 is inserted into the connection terminal 24.
Further, by providing the connection terminal 24, even when the contact 2 is disposed at an inclination (in FIG. 2, the contact on the right side is disposed at right angles to the surface of the inspection jig). However, the contact on the left side is arranged to be inclined), the connection terminal 24 can absorb the deviation due to the inclination, and the rod-like member 21 can be stably held.

本発明の接触子２は、上記の如く、棒状部材２１、大径部２２、コイルばね２３、接続端子２４を具備してなるが、大径部２２はコイルばね２３を利用して形成することができる。
図３で示される接触子２の一実施形態の断面図では、大径部２２がコイルばね２３の密巻部２３１と棒状部材２１とが溶接等で接合されて形成されている。 As described above, the contact 2 of the present invention includes the rod-shaped member 21, the large-diameter portion 22, the coil spring 23, and the connection terminal 24, and the large-diameter portion 22 is formed using the coil spring 23. Can do.
In the cross-sectional view of one embodiment of the contact 2 shown in FIG. 3, the large diameter portion 22 is formed by joining the closely wound portion 231 of the coil spring 23 and the rod-like member 21 by welding or the like.

コイルばね２３が一端側を密巻部２３１として形成し、連続して他端側へこの密巻部２３１からばねの巻きが粗い粗巻部２３２として形成される。この粗巻部２３２が圧縮ばねの特性を受け持つことになる。コイルばね２３の伸縮時の応力は粗巻部２３２に均質に掛かり、特性と寿命を確保できる。
コイルばね２３の内径について、粗巻部２３２は棒状部材２１より僅かに大きいことが摩擦上好ましい。そして、密巻部２３１は接合が可能な範囲にあることが好ましい。 One end of the coil spring 23 is formed as a densely wound portion 231, and the coiled spring 231 is continuously formed as a coarsely wound portion 232 from the densely wound portion 231 toward the other end. This rough winding portion 232 is responsible for the characteristics of the compression spring. The stress at the time of expansion and contraction of the coil spring 23 is applied uniformly to the rough winding portion 232, and characteristics and life can be ensured.
Regarding the inner diameter of the coil spring 23, the coarsely wound portion 232 is preferably slightly larger than the rod-shaped member 21 in terms of friction. And it is preferable that the close winding part 231 exists in the range which can be joined.

接触子保持体３は、複数の接触子２を保持する。この接触子保持体３は、各接触子２の一端を予め設定される検査点へ案内し、各接触子２の他端を予め設定される電極部４１へ案内する。
この接触子保持体３は、複数の絶縁板と円柱３６で形成されていることが好ましい。図２で示される接触子保持体３では、案内板３１、中間板３２、接続板３５を有している。
複数の検査点の位置に対し各々に対応する電極部４１の位置は長尺の接触子２を少し傾斜させることで移動することができる。これは、接触子２が長いことと一端側の径が他端側より小さいことを利用して、微小ピッチの検査を容易にする。 The contact holder 3 holds a plurality of contacts 2. The contact holder 3 guides one end of each contact 2 to a preset inspection point and guides the other end of each contact 2 to a preset electrode portion 41.
The contact holder 3 is preferably formed of a plurality of insulating plates and a column 36. The contact holder 3 shown in FIG. 2 includes a guide plate 31, an intermediate plate 32, and a connection plate 35.
The positions of the electrode portions 41 corresponding to the positions of the plurality of inspection points can be moved by slightly tilting the long contact 2. This facilitates inspection of a minute pitch by utilizing the fact that the contact 2 is long and the diameter on one end side is smaller than that on the other end side.

案内板３１は、接触子２の一端を検査点へ案内するための案内孔３１１を有している。この案内孔３１１は、接触子２の棒状部材２１の径よりも僅かに大きく形成されている。このため、接触子２を接触子保持体３に装着した場合には、接触子保持体３の案内板３１の案内孔３１１から接触子２が突出された状態になる。この場合、複数の接触子２の検査点の最小ピッチは案内孔３１１と絶縁壁３１２の厚さの和になる。
なお、図２で示される案内孔３１１は、径の相違する二つの孔を連通連結することで形成されているが、複数の相違する径の孔を連通連結することで形成しても、一つの径を有する孔から形成されてもよい。 The guide plate 31 has a guide hole 311 for guiding one end of the contact 2 to the inspection point. The guide hole 311 is formed to be slightly larger than the diameter of the rod-shaped member 21 of the contact 2. For this reason, when the contact 2 is attached to the contact holder 3, the contact 2 protrudes from the guide hole 311 of the guide plate 31 of the contact holder 3. In this case, the minimum pitch of the inspection points of the plurality of contacts 2 is the sum of the thicknesses of the guide hole 311 and the insulating wall 312.
Note that the guide hole 311 shown in FIG. 2 is formed by connecting and connecting two holes having different diameters. However, the guide hole 311 may be formed by connecting and connecting a plurality of holes having different diameters. It may be formed from a hole having one diameter.

中間板３２は、接触子２を接触子保持体３に装着する場合、接続板３５の接続孔３５１から接触子２を案内孔３１１へ挿入する場合の挿入を案内する中間孔３２１を有している。この中間孔３２１は、中間板３２を貫通するように形成されている。
この中間孔３２１は、案内孔３１１より大きい径を有する孔で、位置は案内孔３１１と接続孔３５１を結ぶ直線上に形成されて接触子２の挿入を容易にする。
中間板３２は、接触子２を圧接した場合に棒状部材２１が撓んで相互に接触して短絡を防止することができるので、複数枚の構成としても有効である。 The intermediate plate 32 has an intermediate hole 321 for guiding insertion when the contact 2 is inserted into the guide hole 311 from the connection hole 351 of the connection plate 35 when the contact 2 is mounted on the contact holder 3. Yes. The intermediate hole 321 is formed so as to penetrate the intermediate plate 32.
The intermediate hole 321 is a hole having a diameter larger than that of the guide hole 311, and the position is formed on a straight line connecting the guide hole 311 and the connection hole 351, thereby facilitating the insertion of the contact 2.
The intermediate plate 32 is also effective as a configuration of a plurality of sheets because the rod-like members 21 are bent and come into contact with each other when the contact 2 is pressed into contact with each other to prevent a short circuit.

接続板３５は、第一収容板３３と第二収容板３４を積層してなる。接続板３５と中間板３２及び中間板３２と案内板３１の間は円柱３６で間隔を取っている。
第一収容板３３は、棒状部材２１の径よりも径が大きく、大径部２３の径よりも径が小さい第一孔３３１が形成され、接触子２が係止される。そして、第一孔３３１と連通連結される大径部２２よりも径が大きい第二孔３３２が形成される。 The connection plate 35 is formed by laminating a first accommodation plate 33 and a second accommodation plate 34. The connecting plate 35 and the intermediate plate 32 and the intermediate plate 32 and the guide plate 31 are spaced by a column 36.
The first accommodation plate 33 is formed with a first hole 331 having a diameter larger than the diameter of the rod-shaped member 21 and smaller than the diameter of the large diameter portion 23, and the contact 2 is locked. And the 2nd hole 332 larger in diameter than the large diameter part 22 connected in communication with the 1st hole 331 is formed.

第二収容板３４は、接続端子孔３４１を有している。この接続端子孔３４１は、第二孔３３２と同様に、接触子２のコイルばね２３、大径部２２及び接続端子２４を内部に収容できる。この接続端子孔３４１は、第二孔３３と連通連結される。
第一孔３３１、第二孔３３２と接続端子孔３４１が連通連結されて接続孔３５１が形成され、この接続孔３５１が接触子２の他方の端部を電極部４１へ案内する。
なお、第一収容板３３の第二孔３３２と接続端子孔３４１は同じ径を有する孔を形成されていることが好ましく、実質的に同等である。
複数の円柱３６は詳細しないが各絶縁板を同軸に組立が出来る構造になっている。同軸を確実にするには、全絶縁板を貫通する複数の貫通円柱を設定するのが好ましい。 The second accommodation plate 34 has a connection terminal hole 341. Similar to the second hole 332, the connection terminal hole 341 can accommodate the coil spring 23, the large diameter portion 22, and the connection terminal 24 of the contact 2 inside. The connection terminal hole 341 is connected in communication with the second hole 33.
The first hole 331, the second hole 332, and the connection terminal hole 341 are connected to form a connection hole 351, and the connection hole 351 guides the other end of the contact 2 to the electrode part 41.
In addition, it is preferable that the 2nd hole 332 and the connection terminal hole 341 of the 1st accommodating board 33 are formed with the hole which has the same diameter, and are substantially equivalent.
Although the plurality of cylinders 36 are not described in detail, each insulating plate can be assembled coaxially. In order to ensure the coaxiality, it is preferable to set a plurality of through cylinders that penetrate all the insulating plates.

接触子保持体３は、案内板３１、中間板３２、第一収容板３３及び第二収容板３４からなる接続板３５を有してなるが、接触子保持体３を容易に電極体４から着脱自在にする複数の基準ピンが電極体４に固定されている。このように、接触子保持体３が着脱自在に形成されていることにより、接触子２を接触子保持体３に装着する場合には、電極体４から接触子保持体３を取り外し、接続板３５の接続孔３５１を上側に、且つ案内板３１の案内孔３１１を下側に配置して、接触子２を一方の端部を下に向けて接続孔３５１から落とし入れることにより、接触子２が接触子保持体３に保持されることになる。   The contact holder 3 includes a connection plate 35 including a guide plate 31, an intermediate plate 32, a first accommodation plate 33, and a second accommodation plate 34. The contact holder 3 can be easily removed from the electrode body 4. A plurality of reference pins to be detachable are fixed to the electrode body 4. As described above, since the contact holder 3 is detachably formed, when the contact 2 is mounted on the contact holder 3, the contact holder 3 is detached from the electrode body 4, and the connection plate The contact hole 2 is dropped from the connection hole 351 with one end facing downward, by disposing the connection hole 351 of 35 on the upper side and the guide hole 311 of the guide plate 31 on the lower side. Is held by the contact holder 3.

この接触子保持体３に接触子２が保持されて、電極体４に固定する場合には、接触子２のコイルばね２３が接続端子２４と接触子保持体３から押圧されて収縮して付勢状態で保持されることになる。つまり、接触子２は、検査点に接触される前に押圧されて、コイルばね２３が付勢状態の所定の初期荷重で保持されて電極部４１と導通接触している。
接触子２の棒状部材２１は、コイルばね２３の付勢を一方方向に受けて、案内板３１より均一な量の突起した状態で保持される。 When the contact 2 is held by the contact holder 3 and fixed to the electrode body 4, the coil spring 23 of the contact 2 is pressed from the connection terminal 24 and the contact holder 3 and contracts. It will be held in a state of force. In other words, the contact 2 is pressed before being brought into contact with the inspection point, and the coil spring 23 is held in a predetermined initial load in a biased state and is in conductive contact with the electrode portion 41.
The bar-shaped member 21 of the contact 2 is held in a state in which the coil spring 23 is biased in one direction and is projected in a uniform amount from the guide plate 31.

電極体４の電極部４１は、各接触子２の他端と導通接触して、基板を検査する基板検査装置（図示せず）に接続される。
電極体４は、電極部４１、電極部保持板４２、リード線４４、コネクタ４５を有してなり、ベース板４６に支持されている。
図２の電極部４１は、電極部保持板４２の電極部孔４２１にリード線４４を挿通して、裏側から接着剤４３を充填して固定し、電極部保持板４２の表面を平面加工することで形成している。 The electrode portion 41 of the electrode body 4 is in conductive contact with the other end of each contact 2 and is connected to a substrate inspection device (not shown) for inspecting the substrate.
The electrode body 4 includes an electrode portion 41, an electrode portion holding plate 42, a lead wire 44, and a connector 45, and is supported by a base plate 46.
The electrode part 41 of FIG. 2 inserts the lead wire 44 into the electrode part hole 421 of the electrode part holding plate 42, fills and fixes the adhesive 43 from the back side, and planarizes the surface of the electrode part holding plate 42. It is formed by that.

リード線４４は、エナメル線や単線のリード線を用いることができる。そして、リード線４４の他端はコネクタ４５の該当の端子に半田付け等で接続される。
基板検査治具１に使用の部材のめっき処理について、棒状部材２１、大径部２２、コイルばね２３、接続端子２４及び電極部４１の表面は金めっき仕上げが好ましい。本発明の機能として接触接続の信頼性に欠かせない導電性部材に対する表面処理である。
以上が、本基板検査治具の構成の説明である。 As the lead wire 44, an enameled wire or a single lead wire can be used. The other end of the lead wire 44 is connected to a corresponding terminal of the connector 45 by soldering or the like.
Regarding the plating treatment of the member used for the substrate inspection jig 1, the surfaces of the rod-shaped member 21, the large diameter portion 22, the coil spring 23, the connection terminal 24, and the electrode portion 41 are preferably gold-plated. As a function of the present invention, it is a surface treatment for a conductive member indispensable for the reliability of contact connection.
The above is the description of the configuration of the substrate inspection jig.

次に本発明にかかる基板検査治具の組立について説明する。
基板検査治具１は電極体４と接触子保持体３が着脱自在に構成されており、個別に平行して作業が可能である。
接触子保持体３の組立について、第二収容板３４の上に第一収容板３３を積層し円柱３６を複数箇所に固定して接続板３５を形成する。円柱３６を使用することで積層した各板は同軸上に組立ができる構成になっている。次に中間板３２を積層し円柱３６を固定する。最後に案内板３１を積層し固定する。これで接触子保持体３の組立は完了する。
接触子２の接触子保持体３への挿入前の予備作業について説明する。
大径部２２を上記の何れかの方法で棒状部材２１に加工付加する。コイルばね２３を棒状部材２１の大径部２２の他端側に装着する。なお、大径部２２がコイルばね２３の密巻部２３１からなる場合はその必要がない。
接触子２の装着について説明する。接触子２は、接触子保持体３の案内板３１を下側に、接続板３５を上側にして接触子保持体３により保持される。そして、棒状部材２１の一方端部を接続孔３５１に挿入し、次に該当する中間孔３２１に挿入する。最後に該当する案内孔３１１に挿入する。全ての接続孔３５１に棒状部材２１とコイルばね２３を同時に挿入する。
最後に接続端子２４を接続孔３５１の棒状部材２１の他端の全てについて挿入する。 Next, assembly of the substrate inspection jig according to the present invention will be described.
The substrate inspection jig 1 is configured such that the electrode body 4 and the contact holder 3 are detachable, and can be individually operated in parallel.
For the assembly of the contact holder 3, the first accommodation plate 33 is stacked on the second accommodation plate 34 and the column 36 is fixed at a plurality of locations to form the connection plate 35. Each plate laminated by using the column 36 is configured to be assembled on the same axis. Next, the intermediate plate 32 is laminated and the cylinder 36 is fixed. Finally, the guide plate 31 is laminated and fixed. This completes the assembly of the contact holder 3.
Preliminary work before insertion of the contact 2 into the contact holder 3 will be described.
The large diameter portion 22 is processed and added to the rod-shaped member 21 by any one of the methods described above. The coil spring 23 is attached to the other end side of the large diameter portion 22 of the rod-shaped member 21. In addition, when the large diameter part 22 consists of the closely wound part 231 of the coil spring 23, it is not necessary.
The mounting of the contact 2 will be described. The contact 2 is held by the contact holder 3 with the guide plate 31 of the contact holder 3 on the lower side and the connection plate 35 on the upper side. Then, one end of the rod-shaped member 21 is inserted into the connection hole 351 and then inserted into the corresponding intermediate hole 321. Finally, it is inserted into the corresponding guide hole 311. The rod-shaped member 21 and the coil spring 23 are simultaneously inserted into all the connection holes 351.
Finally, the connection terminals 24 are inserted into all the other ends of the rod-shaped members 21 in the connection holes 351.

接触子保持体３の装着について、電極体４と接触子保持体３を９０度回転し、接触子２が水平になる状態で対向させて、接触子保持体３を基準ピンに合わせて積層し固定する。   Regarding the mounting of the contact holder 3, the electrode body 4 and the contact holder 3 are rotated 90 degrees so that the contacts 2 face each other in a horizontal state, and the contact holder 3 is laminated according to the reference pin. Fix it.

接触子２の交換について、基板検査治具１を９０度以上回転して、接触子保持体３を取り外す。次に不良の接触子２を取り外し、良品の接触子２を挿入する。この交換を不良箇所全てについて行う。最後に接触子保持体３を装着し完了する。   For replacement of the contact 2, the substrate inspection jig 1 is rotated 90 degrees or more, and the contact holder 3 is removed. Next, the defective contact 2 is removed, and the non-defective contact 2 is inserted. This replacement is performed for all defective portions. Finally, the contact holder 3 is attached and completed.

本発明に係る基板検査治具を使用する場合の一実施形態の概略構成を示している。The schematic structure of one Embodiment at the time of using the board | substrate inspection jig concerning this invention is shown. 本発明にかかる基板検査治具が組み立てられた際の断面図である。It is sectional drawing when the board | substrate inspection jig concerning this invention is assembled. 本発明にかかる接触子の断面図である。It is sectional drawing of the contact concerning this invention. 本発明にかかる大径部の形態の正面図である。It is a front view of the form of the large diameter part concerning the present invention.

符号の説明Explanation of symbols

１・・・・基板検査治具
２・・・・接触子
２１・・・棒状部材
２２・・・大径部
２３・・・コイルばね
２３１・・密巻部
２３２・・粗巻部
２４・・・接続端子
３・・・・接触子保持体
３１・・・案内板
３１１・・案内孔
３２・・・中間板
３２１・・中間孔
３３・・・第一収容板
３３１・・第一孔
３３２・・第二孔
３４・・・第二収容板
３４１・・接続端子孔
３５・・・接続板
３５１・・接続孔
３６・・・円柱
４・・・・電極体
４１・・・電極部
４２・・・電極部保持板
４４・・・リード線
４５・・・コネクタ DESCRIPTION OF SYMBOLS 1 .... Board inspection jig 2 ... Contact 21 ... Rod-shaped member 22 ... Large diameter part 23 ... Coil spring 231 ... Close winding part 232 ... Coarse winding part 24 ... Connection terminal 3 Contact holder 31 Guide plate 311 Guide hole 32 Intermediate plate 321 Intermediate hole 33 First accommodation plate 331 First hole 332 Second hole 34: second accommodating plate 341, connection terminal hole 35, connection plate 351, connection hole 36, column 4, electrode body 41, electrode portion 42,.・ Electrode holding plate 44 ... lead wire 45 ... connector

Claims (7)

被検査基板の電気的特性を検査するために、基板検査装置と該被検査基板の配線パターンに設けられている複数の検査点との間の電気的導通を得るための基板検査治具であって、
前記基板検査治具は、
両端に電気的導通を図る端部を有し、一方の端部が前記検査点に圧接される導電性を有する接触子を複数備える接触子群と
前記接触子群を保持する接触子保持体と
前記接触子群の夫々の接触子の他方の端部と対向して配置された電極部を備える、前記基板検査装置に接続される電極体を有し、
前記接触子は、
導電性で長尺の棒状部材と、
前記棒状部材の他方側に配置される該棒状部材の径よりも大きく形成される大径部と、
前記大径部より他方側に、前記棒状部材に貫通されるコイルばねと、
前記棒状部材の他端を内側に収納する円筒部材で、他端側が先細形状の接続端子を有し、
前記接触子保持体は、
前記接触子の一端を前記被検査基板の検査点へ案内する案内孔と、
前記接触子の他端を前記電極部へ案内し、前記コイルばねと前記接続端子を収容する接続孔を有し、
前記接続孔の径は、前記棒状部材の径よりも大きく、前記大径部の径よりも小さく形成されている第一孔と、第一孔と連通連結される前記大径部よりも径が大きい第二孔からなり、
前記案内孔のピッチは前記接続孔のピッチより小さいことを特徴とする基板検査治具。 A substrate inspection jig for obtaining electrical continuity between a substrate inspection apparatus and a plurality of inspection points provided on a wiring pattern of the substrate to be inspected in order to inspect the electrical characteristics of the substrate to be inspected. And
The substrate inspection jig is
A contact group having a plurality of conductive contacts each having an end portion for electrical conduction at one end and one end portion being pressed against the inspection point; and a contact holder holding the contact group; Comprising an electrode body connected to the substrate inspection apparatus, comprising an electrode portion disposed opposite to the other end of each contact of the contact group;
The contact is
A conductive and long rod-shaped member;
A large-diameter portion formed larger than the diameter of the rod-shaped member disposed on the other side of the rod-shaped member;
A coil spring penetrating the rod-shaped member on the other side from the large-diameter portion;
A cylindrical member that houses the other end of the rod-shaped member inside, the other end side having a tapered connection terminal,
The contact holder is
A guide hole for guiding one end of the contact to an inspection point of the substrate to be inspected;
Guiding the other end of the contact to the electrode part, and having a connection hole for accommodating the coil spring and the connection terminal;
The diameter of the connection hole is larger than the diameter of the rod-shaped member and smaller than the diameter of the large-diameter portion, and the diameter is larger than the large-diameter portion that is connected to the first hole. Consisting of a large second hole,
The board inspection jig characterized in that the pitch of the guide holes is smaller than the pitch of the connection holes. 前記接触子保持体は、
前記接触子の一方端部を前記検査点に案内する前記案内孔が形成される案内板と、
前記接触子の他方端部を前記電極部に案内するとともに前記コイルばねと前記接続端子を内部に収容する前記接続孔を形成する接続板と、
前記棒状部材の径よりも大きいとともに、前記案内孔と前記接続孔を結ぶ直線上に形成される中間孔を具備する中間板を有する
ことを特徴とする請求項１の基板検査治具。 The contact holder is
A guide plate formed with the guide hole for guiding one end of the contact to the inspection point;
A connection plate for guiding the other end of the contact to the electrode portion and forming the connection hole for accommodating the coil spring and the connection terminal therein;
2. The substrate inspection jig according to claim 1, further comprising an intermediate plate that is larger than the diameter of the rod-shaped member and includes an intermediate hole formed on a straight line connecting the guide hole and the connection hole. 前記接触子保持体が前記電極体に保持される場合に、
前記接触子のコイルばねは押圧されている
ことを特徴とする請求項１記載の基板検査治具。 When the contact holder is held by the electrode body,
The board inspection jig according to claim 1, wherein the coil spring of the contact is pressed. 前記大径部は、前記棒状部材の所定の位置に追加加工し形成されたことを特徴とする請求項１項の基板検査治具。   The substrate inspection jig according to claim 1, wherein the large-diameter portion is formed by additional processing at a predetermined position of the rod-shaped member. 被検査物の電気的特性を検査するために、被検査物の電気的特性を算出する検査装置の電極部と該検査物に予め設けられる複数の検査点との間の電気的導通を得るための電気的接続治具に備えられる接触子であって、
一端が前記検査点に導通接触される導電性で長尺の棒状部材と、
前記棒状部材の他方側に配置される該棒状部材の径よりも大きく形成される大径部と、
前記大径部より他方側に、前記棒状部材に貫通されるコイルばねと、
前記棒状部材の他端を内側に収納する円筒部材で、他端が先細形状の前記電極部と導通接触する接続端子からなる
ことを特徴とする接触子。 In order to obtain the electrical continuity between the electrode portion of the inspection apparatus for calculating the electrical characteristics of the inspection object and a plurality of inspection points provided in advance on the inspection object in order to inspect the electrical characteristics of the inspection object A contact provided in the electrical connection jig of
An electrically conductive and long rod-shaped member whose one end is in conductive contact with the inspection point;
A large-diameter portion formed larger than the diameter of the rod-shaped member disposed on the other side of the rod-shaped member;
A coil spring penetrating the rod-shaped member on the other side from the large-diameter portion;
A contact that is a cylindrical member that accommodates the other end of the rod-shaped member inside, and the other end includes a connection terminal that is in electrical contact with the tapered electrode portion. 前記コイルばねは密巻部と疎巻部からなり、
前記大径部はコイルばねの密巻部と前記棒状部材を接合して形成される
ことを特徴とする請求項５記載の接触子。 The coil spring is composed of a densely wound portion and a loosely wound portion,
6. The contact according to claim 5, wherein the large-diameter portion is formed by joining a tightly wound portion of a coil spring and the rod-shaped member. 前記コイルばねは密巻部と疎巻部からなり、
前記大径部はコイルばねの密巻部と前記棒状部材を接合して形成される
ことを特徴とする請求項１記載の基板検査治具。 The coil spring is composed of a densely wound portion and a loosely wound portion,
The substrate inspection jig according to claim 1, wherein the large-diameter portion is formed by joining a closely wound portion of a coil spring and the rod-shaped member.
JP2008246549A 2008-09-25 2008-09-25 Substrate inspection jig and contactor Pending JP2010078432A (en)

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Publication number Priority date Publication date Assignee Title
JP2011226808A (en) * 2010-04-15 2011-11-10 Ohnishi Electronics Co Ltd Inspection tool for printed wiring board
WO2012039226A1 (en) * 2010-09-21 2012-03-29 Nishikawa Hideo Inspecting jig and contact
TWI449885B (en) * 2011-03-11 2014-08-21 Advanced Optoelectronic Tech Light source testing device
KR102261798B1 (en) * 2020-04-03 2021-06-07 (주)화이컴 Jig for Manufacturing Probe Card, Probe Alignment System Comprising the Same and Probe Card Manufactured by the Same
KR20220025657A (en) * 2020-08-24 2022-03-03 가부시키가이샤 니혼 마이크로닉스 Electrical contact structure of electrical contactor and electrical connecting apparatus

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JP2008032666A (en) * 2006-08-01 2008-02-14 Nidec-Read Corp Tool for substrate inspection, and method of manufacturing substrate inspection tool

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011226808A (en) * 2010-04-15 2011-11-10 Ohnishi Electronics Co Ltd Inspection tool for printed wiring board
WO2012039226A1 (en) * 2010-09-21 2012-03-29 Nishikawa Hideo Inspecting jig and contact
JP2012088298A (en) * 2010-09-21 2012-05-10 Hideo Nishikawa Inspection tool and contact piece
US9000792B2 (en) 2010-09-21 2015-04-07 Hideo Nishikawa Inspection jig and contact
TWI449885B (en) * 2011-03-11 2014-08-21 Advanced Optoelectronic Tech Light source testing device
KR102261798B1 (en) * 2020-04-03 2021-06-07 (주)화이컴 Jig for Manufacturing Probe Card, Probe Alignment System Comprising the Same and Probe Card Manufactured by the Same
KR20220025657A (en) * 2020-08-24 2022-03-03 가부시키가이샤 니혼 마이크로닉스 Electrical contact structure of electrical contactor and electrical connecting apparatus
KR102534435B1 (en) 2020-08-24 2023-05-26 가부시키가이샤 니혼 마이크로닉스 Electrical contact structure of electrical contactor and electrical connecting apparatus

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