JP2010060310A - Substrate inspection tool and electrode section thereof - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a substrate inspection tool having an electrode section reaching a stable continuity contact state. <P>SOLUTION: The substrate inspection tool 1 includes: a plurality of rod-like members 2 having conductivity where one end is pressure-welded to an inspection point; an electrode body 4 that has an electrode section 41 disposed opposite to the other end to allow continuity connection to the other end and is electrically connected to a substrate inspection apparatus; a guide hole 311 for guiding one end of the rod-like member 2 to a prescribed inspection point; a coil spring 410 that has a holding body 3 having a connection hole 351 for guiding the other end of the rod-like member to the prescribed electrode section 41, while the electrode section 41 abuts on the surface of the other end and is stretched in the direction of the long axis of the rod-like member for continuity connection to the other end of the rod-like member 2; a coarsely wound section 411 having a conductor section 44 that performs continuity connection to the coil spring 410 and is electrically connected to the substrate inspection apparatus, while the coil spring 410 is subjected to continuity contact with the other end of the rod-like member 2; and a densely wound section 412 that is continuous to the coarsely wound section and is electrically connected to the conductor section 44. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

The present invention relates to a substrate inspection jig and an electrode part, and more particularly to a substrate inspection jig and an electrode part used for the substrate inspection jig with a simple structure.
The present invention is not limited to a printed wiring board, but includes various substrates such as flexible substrates, multilayer wiring substrates, glass electrode plates for liquid crystal displays and plasma displays, package substrates for semiconductor packages, and film carriers, and semiconductor wafers. In the present specification, these various substrates to be inspected are collectively referred to as “substrates”.

  Conventionally, wiring patterns provided on a board must accurately transmit electrical signals to electrical and electronic parts such as semiconductors and resistors such as ICs mounted on the circuit board. Then, the resistance value between the inspection points provided in the wiring pattern to be inspected is measured, and the quality is judged.

  In such determination inspection, an inspection method for inspecting disconnection and short circuit of the wiring pattern is performed. In such disconnection inspection, a contact is brought into contact with each of inspection points provided at two or more end points of a wiring pattern to be inspected, and a predetermined level of measurement current is applied between the contacts. The voltage value between the contacts is measured by flowing, and the pass / fail is determined by comparing this voltage value with a predetermined threshold value.

For example, there are the following inspection jigs for a substrate used for such inspection.
In the “conductive contactor” described in Patent Document 1, in the embodiment of FIG. 3, a needle-like body (reference numeral 13 in the specification) and the other end on one end side of the coil spring (reference numeral 16 in the specification). (Reference numeral 16a in the specification) discloses an inspection jig having a lead wire.
In the “Tecker head” described in Patent Document 2, in the embodiment of FIG. 2, the conductive wire (reference numeral 15 in the specification) and the other end of the spring (reference numeral 14 in the specification) are soldered, and one end Is disclosed in contact with the other end of the pin (reference numeral 10 in the specification).
In the “multi-point measuring conductive contact unit” described in Patent Document 3, a receptacle support (reference numeral 1 in the specification) is used to guide the needle-like body (reference numeral 3 in the specification) to the electrode portion. An inspection jig in which a plurality of intermediate guide bodies (reference numerals 6 to 10 in the specification) and a guide body at the tip (reference numeral 11 in the specifications) are integrally laminated is disclosed.

JP-A-6-148236 JP-A-11-64378 JP 5-215773

However, in the configuration of FIG. 3 of Patent Document 1, the spring material has a high elastic modulus, and as a lead wire, assembly and wiring work are not easy. In the structure disclosed in Patent Document 2, the spring and the conductor are integrated by soldering or welding. However, the operation is not easy, and stress is applied to the local part of the joining point, causing breakage. In the structure disclosed in Patent Document 3, replacement and maintenance of the compression coil spring in the receptacle are not easy. There are each of the above problems.
In recent years, substrate miniaturization and high density have progressed, and the miniaturization of contactors (increasing unit prices) and the increase in inspection points have become synergistic, raising the overall price, and the cost of substrate inspection jigs is an important issue It has become.
As one form, the build-up method of the multilayer substrate manufacturing method has become mainstream in fine high-density substrates, and the resistance value of the via (interlayer connection) is measured with four terminals (one inspection point for current and two for voltage) The demand for setting contacts increases, and the number of contacts is doubled, and it is necessary to minimize cost and pitch.

The present invention has been made in view of such circumstances, and provides a substrate inspection jig and an electrode unit that can be easily processed, assembled and maintained with a small number of parts even on a fine pitch, and can reduce costs. .
In particular, by devising the structure of the electrode body, the contact can be stably connected to the inspection point and the electrode portion.

According to invention of Claim 1 and 5, since it has a coil spring which an electrode part carries out electrical contact with the surface of a rod-shaped member, and expands-contracts in the major axis direction of this rod-shaped member, the force which presses a rod-shaped member on the electrode body side is provided. Since it can be obtained, the rod-shaped member that becomes the contact can be stably pressed against the electrode portion and the inspection point, so that it can be reliably contacted and held, and the conducting wire portion and the densely wound portion can be easily provided. Conductive connection can be established, and the coil spring absorbs the stress during expansion and contraction, and disconnection at the joint portion of the tightly wound portion is avoided, and the electrode portion can be used until the life of the coil spring.
According to the second aspect of the present invention, the holding body is formed so as to have the intermediate plate, and the large-diameter portion is formed on the rod-shaped member. Therefore, the intermediate plate presses the large-diameter portion of the rod-shaped member toward the electrode portion. In other words, when the holding body is mounted on the electrode body, a preload can be applied to bring the contact into contact with the electrode portion.
According to the third aspect of the present invention, since the holding body is formed with a predetermined width, it is possible to incline the contact that becomes the rod-shaped member, and to make the position of the inspection point smaller than that of the electrode portion. It is possible to easily inspect a minute pitch and reduce the cost, and the holder can be attached and detached, and assembly and contact replacement can be easily performed.
According to the fourth aspect of the present invention, since it is formed of a solder plated conductive wire, the solder can be easily melted by welding or the like in order to connect the conductor portion and the coil spring, and the connection can be ensured.

The best mode for carrying out the present invention will be described.
FIG. 1 shows an overall schematic configuration when a substrate inspection jig 1 according to the present invention is used. In FIG. 1, a substrate inspection jig 1 includes a plurality of bar-shaped members 2 that serve as contacts, a holding body 3 that holds the bar-shaped members 2 in a multi-needle shape, and supports the holding body 3 and contacts the bar-shaped member 2. The electrode body 4 having the coil spring 410 that becomes conductive, the conductive wire portion 44 that connects the coil spring 410 and the connector 45, and the base plate 46 are shown.
The present invention relates to the substrate inspection jig 1, and particularly relates to the structure of the electrode portion 41 due to the joining of the conductor portion 44 and the coil spring 410.
1 is a schematic diagram, and the number of rod-like members 2 and the number of conductor portions 44 are not particularly limited. Further, the rod-shaped member 2 and the coil spring 410 shown in the drawings are disclosed only for one structure for convenience of explanation, and the actual board inspection jig 1 has a plurality of rod-shaped members 2 and a plurality of corresponding ones. A coil spring 410 is provided.

FIG. 2 is a cross-sectional view when the board inspection jig 1 according to the present invention is assembled, and corresponds to the first embodiment.
The rod-like member 2 is held by the holding body 3, one of which is in conductive contact with an inspection point (not shown) set on the substrate, and the other is in conductive contact with a coil spring 410 described later. The rod-shaped member 2 transmits an electric signal from the inspection point to the coil spring 410 or from the coil spring 410 to the inspection point.

The rod-shaped member 2 is an elongated member formed in a rod shape, and although not particularly limited, a material formed in a columnar shape is preferable, both end portions are processed and formed, and a large-diameter portion 21 is provided on the other end side.
The long rod-shaped member 2 is formed of a conductive member (conductive material), and examples thereof include SK steel (SKH) and beryllium copper (BeCu). It is preferable that the rod-like member 2 has such a strength that there is substantially no bending when both sides thereof are pressed against the inspection point and the coil spring 410. By having such a strength, the pressure contact state can be maintained at the inspection point by the urging of the coil spring 410, and the pressure contact force in the expansion / contraction direction of the coil spring 410 can be provided.
The length and the size of the diameter of the rod-shaped member 21 are not particularly limited and are appropriately set by the user. For example, the length can be formed to be 30 to 40 mm, The diameter can be formed to 0.2 to 0.4 mm.

The coil spring 410 is formed of a coarsely wound portion 411 and a densely wound portion 412, and one end of the conducting wire portion 44 is inserted into the densely wound portion 412 and joined by welding or the like to form a joined portion 413. Since the other end of the conductive wire portion 44 is connected to a corresponding terminal of the connector 45 and connected to the board inspection device, the coil spring 410 is held by the electrode body 4 of the board inspection jig 1 and has the same function as the electrode portion 41. do.
The coil spring 410 is preferably gold-plated with a conductive member such as piano wire, stainless steel, beryllium copper (BeCu), or tungsten (W) for contact connection and solder bonding.

The conductive wire of the conductive wire portion 44 is preferably plated with solder. When soldering to the terminals of the connector 45, preliminary soldering work is not required and the work is simple. When the tightly wound portion 412 of the coil spring 410 is joined by welding or the like, the melting temperature of the solder is low and the solder plating is melted so that joining is easy and reliable.
The stress at the time of expansion and contraction of the coil spring 410 formed in this way is applied to the entire coarsely wound portion 222, and concentrated stress applied to the connecting portion 413 can be avoided to ensure the physical life of the coil spring 410.

  As described above, the electrode portion 41 of the present invention includes the joint portion 413 in which the end surface of the coarsely wound portion 411 of the coil spring 410 is one end and the conductive wire portion 44 is joined to the densely wound portion 412 from the other side. become.

The electrode body 4 in FIG. 1 includes a coil spring 410, a coil spring accommodating plate 42, a conducting wire portion 44, a conducting wire portion holding plate 43, and a connector 45, and is supported by a base plate 46.
The coil spring accommodating plate 42 has a coil spring accommodating hole 421 and is formed with a diameter larger than the outer diameter of the coil spring 410.
The conducting wire portion holding plate 43 has a hole slightly larger than the outer diameter of the conducting wire portion 44, and the conducting wire portion 44 can be inserted into the hole. Then, the other end of the joint 413 is supported, and the load of the coil spring 410 is received.

The holding body 3 holds a plurality of rod-like members 2. The holding body 3 guides one end of each rod-like member 2 to a preset inspection point and guides the other end of each rod-like member 2 to a preset coil spring 410.
The holding body 3 is preferably formed of a plurality of insulating plate materials. The holding body 3 shown in FIG. 2 includes a guide plate 31, a first intermediate plate 32, a second intermediate plate 33, a connection plate 35, and a column 36.

The guide plate 31 has a guide hole 311 for guiding one end of the rod-shaped member 2 to the inspection point. The guide hole 311 is formed slightly larger than the diameter of the rod-shaped member 2. For this reason, when the holder 3 is mounted, the rod-like member 2 is projected from the guide hole 311 of the guide plate 31 of the holder 3. In this case, the minimum pitch of the inspection points of the plurality of rod-like members 2 is the sum of the diameter of the guide hole 311 and the thickness of the insulating wall 312.
Note that the guide hole 311 shown in FIG. 2 is formed by connecting and connecting two holes having different diameters. However, the guide hole 311 may be formed by connecting and connecting a plurality of holes having different diameters. It may be formed from a hole having one diameter.
The position of the coil spring 410 corresponding to each of the plurality of inspection points can be moved by inclining the rod-shaped member 2. This can move to a wide arrangement based on the minimum arrangement pitch (larger than the minimum pitch of the inspection points) of the large diameter portion 21 and the coil spring accommodation hole 421 (described later). This facilitates inspection of a minute pitch by utilizing the fact that the rod-shaped member 2 is long and the diameter of the guide hole 311 is smaller than the diameter of the coil spring hole 421.

A plurality of intermediate plates 34 are preferable. In FIG. 2, it consists of a first intermediate plate 32 and a second intermediate plate 33. When the bar-shaped member 2 is pressed, the first intermediate plate also has a function of preventing a short circuit with the adjacent bar-shaped member 21 due to the bending of the bar-shaped member 21.
The second intermediate plate 33 guides when the rod-shaped member 2 is inserted into the first intermediate hole 321 from the connection hole 351 of the connection plate 35 when the rod-shaped member 2 is attached to the holding body 3. A second intermediate hole 331 is provided for locking the passage.
The diameter of the intermediate hole 341 is preferably larger than the guide hole 311 and smaller than the large diameter portion 21, and is formed through the intermediate plate 34. The position is preferably on a straight line connecting the guide hole 311 and the connection hole 351.

  The connection plate 35 guides the other end of the rod-shaped member 2 to a predetermined coil spring 410. The connection plate 35 has a connection hole 351 having a diameter larger than the diameter of the large diameter portion 21.

  It is preferable that there is a slight gap between the connection plate 35 and the second intermediate plate 33, and the cylinder 36 is set at a plurality of locations. The second intermediate plate 33 and the first intermediate plate 32 and the first intermediate plate 32 and the guide plate 31 preferably have a predetermined interval, and the cylinders 36 are set at a plurality of locations. Depending on the structure and length of the cylinder, each insulating plate can be assembled coaxially. In order to ensure the coaxiality, it is preferable to separately set a plurality of through cylinders penetrating all the insulating plates. Although the cylinder 36 is not described in detail, it is properly used depending on the application.

  The holding body 3 includes a guide plate 31, a first intermediate plate 32, a second intermediate plate 33, and a connection plate 35. The holding body 3 has a plurality of reference pins that can be easily detached from the electrode body 4. It is fixed to the electrode body 4. As described above, since the holding body 3 is formed so as to be detachable, when the rod-like member 2 is attached to the holding body 3, the holding body 3 is removed from the electrode body 4, and the connection hole 351 of the connection plate 35 is formed. By placing the guide hole 311 on the upper side and the guide plate 311 on the lower side and dropping one end of the bar-shaped member 2 downward from the connection hole 351, the bar-shaped member 2 is held by the holding body 3 Will be.

  When the holding body 3 is fixed to the electrode body 4, the coil spring 410 housed in the electrode body 4 is pressed from the holding body 3 through the rod-like member 2 to be contracted and held in a biased state. become. That is, the rod-shaped member 2 is pressed before being brought into contact with the inspection point, and the coil spring 410 is held with a predetermined initial load in the biased state. The rod-like member 2 is held by protruding a predetermined amount uniformly from the guide plate 31.

  In the embodiment shown in FIG. 2, the large diameter portion 21 is formed by joining a cylindrical member to the outer periphery of the rod-shaped member 2. Thus, the manufacturing method which adds the member equivalent to the large diameter part 21 is preferable for cost reduction.

  As a second embodiment, FIG. 3a will be described. The large-diameter portion 21 is formed by welding a tightly wound coil spring to the rod-shaped member 2. Any material corresponding to the large diameter portion 21 may be used.

  As a third embodiment, FIG. 3b will be described. The large diameter portion 21 is formed by caulking the rod-shaped member 2.

  Regarding the plating treatment of the members used in each embodiment, the rod-like member 2 and the coil spring 410 are preferably gold-plated. As a function of the present invention, it is a surface treatment for a conductive member indispensable for the reliability of contact connection.

Next, assembly of the substrate inspection jig according to the present invention will be described.
The substrate inspection jig 1 is configured such that the electrode body 4 and the holding body 3 are detachable, and can be individually operated in parallel.
For assembling the holding body 3, the column 36 is fixed to the connection plate 35 at a plurality of locations, and then the second intermediate plate 33 is stacked and the column 36 is fixed. Each plate laminated by using the column 36 is configured to be assembled on the same axis. Then, the first intermediate plate 32 is laminated and the column 36 is fixed. Finally, the guide plate 31 is laminated and fixed. This completes the assembly of the holder 3.

When the rod-shaped member 2 is mounted, the holding body 3 is held with the guide plate 31 of the holding body 3 on the lower side and the connection plate 35 on the upper side. Then, one end of the rod-like member 2 is inserted into the connection hole 351 and then inserted into the corresponding second intermediate hole 331 and first intermediate hole 321. Finally, it is inserted into the corresponding guide hole 311. The rod-shaped member 2 is attached to all the connection holes 351.
Regarding the mounting of the holding body 3, the electrode body 4 and the holding body 3 are rotated by 90 degrees to oppose each other in a state where the rod-like member 2 is horizontal, and the holding body 3 is laminated and fixed according to the reference pin.

Regarding the assembly of the electrode body 4, the coil spring accommodating plate 42 is first laminated and fixed to the conductor portion holding plate 43. The other end portion of the conducting wire portion 44 extending from the coil spring 410 is inserted into the coil spring hole 421 of the coil spring housing plate 42, penetrates the conducting wire portion holding hole 431, and the coil spring 410 is housed in the coil spring housing hole 421. . Then, the other end of the conductive wire portion 44 is joined to the terminal of the corresponding connector 45 by soldering or the like. This is performed for all the coil spring holes 421.
For exchanging the rod-shaped member 2, the substrate inspection jig 1 is rotated 90 degrees or more, and the holding body 3 is removed. Next, the defective bar-shaped member 2 is removed, and a non-defective bar-shaped member 2 is inserted. This replacement is performed for all defective portions. Finally, the holding body 3 is attached. The above is the assembly of the jig according to the present invention.

The schematic structure of one Embodiment at the time of using the board | substrate inspection jig concerning this invention is shown. It is sectional drawing when the board | substrate inspection jig | tool of 1st Example concerning this invention is assembled. It is sectional drawing of the contact of 2nd Example concerning this invention.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 ... Board inspection jig 2 ... Rod-shaped member 21 ... Large diameter part 3 ... Holding body 31 ... Guide plate 32 ... First intermediate plate 33 ... Second Intermediate plate 35 ··· Connection plate 36 ··· Column 4 ··· Electrode body 41 ··· Electrode portion 410 · · Coil spring 411 · · Coarse winding portion 412 · · Close winding portion 413 · · Joint portion 42 · .. Coil spring accommodating plate 421 .. Coil spring accommodating hole 43... Conductor portion holding plate 44... Conductor portion 45.

Claims (5)

A substrate inspection jig for obtaining electrical continuity between a substrate inspection apparatus and a plurality of inspection points provided on a wiring pattern of the substrate to be inspected in order to inspect the electrical characteristics of the substrate to be inspected. And
The substrate inspection jig is
A rod-shaped member group having a plurality of rod-shaped members having conductivity, the ends having electrical conductivity at both ends, and one end being pressed against the inspection point;
An electrode electrically connected to the substrate inspection apparatus, comprising an electrode portion disposed opposite to the other end of the rod-shaped member group so as to be electrically connected to the other end of the rod-shaped member of the rod-shaped member group Body,
A holding body having a guide hole for guiding one end portion of the rod-shaped member to a predetermined inspection point and a connection hole for guiding the other end portion of the rod-shaped member to a predetermined electrode portion;
The electrode part is
A coil spring that contacts the surface of the other end and expands and contracts in the long axis direction of the other end of the rod-shaped member in order to conduct and connect with the other end of the rod-shaped member;
A conductive wire portion that is electrically connected to the coil spring and electrically connected to the board inspection device;
The coil spring is formed of a coarsely wound portion that is in conductive contact with the other end of the rod-shaped member, and a honeywind portion that is continuous with the coarsely wound portion and is electrically connected to the conductive wire portion. A board inspection jig. The holder is composed of at least three plate-like members arranged with a predetermined interval,
The three plate-like members are
A guide plate having a guide hole for guiding one end of the rod-shaped member to an inspection point;
A connection plate having a connection hole for guiding the other end of the rod-shaped member to the electrode part;
An intermediate plate disposed between the guide plate and the connection plate and having an intermediate hole for guiding the rod-shaped member from the connection hole to the guide hole;
The board inspection jig according to claim 1, wherein the rod-shaped member has a large-diameter portion having a diameter larger than that of the intermediate hole on the connection plate side.   The substrate inspection jig according to claim 1, wherein a pitch of the guide holes is shorter than a pitch of the connection holes.   The board inspection jig according to claim 1, wherein the conductor portion is formed of a solder plating conductive wire. In order to inspect the electrical characteristics of the substrate to be inspected, a substrate inspection process for obtaining electrical continuity between the substrate inspection apparatus and a plurality of inspection points provided in the wiring pattern of the substrate to be inspected with a contactor. A structure of an electrode body in electrical contact with a contact of a rod-shaped member in the tool,
The electrode part is
A coil spring that contacts the surface of the other end and expands and contracts in the long axis direction of the other end of the rod-shaped member in order to conduct and connect with the other end of the rod-shaped member;
A conductive wire portion that is electrically connected to the coil spring and electrically connected to the board inspection device;
The coil spring is formed of the rough winding portion that is in conductive contact with the other end portion of the rod-shaped member, and a honey winding portion that is continuous with the rough winding portion and is electrically connected to the conductive wire portion. An electrode structure of a substrate inspection jig characterized by

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