JP2010069375A - Coater, coating device, coating method, and manufacturing apparatus and manufacturing method for member for display - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a coater capable of suppressing bi-metal deformation by an inexpensive and simple constitution in the coater in which the lip is constituted by lip members of different materials and a lip distal end member, a coating device, a coating method, and a manufacturing apparatus and a manufacturing method for a display member using these. <P>SOLUTION: In the coater, mutual inner surfaces of a front lip and a rear lip are opposed to each other and are integrally bonded by a fastening element, whereby slots in constant intervals extending in a longitudinal direction and a delivery port of a coating liquid are formed. The front lip and the rear lip are constituted such that the lip distal end member for forming the slots and the delivery port is bonded to the lip member for retaining the lip distal end member. In the coater, an adjustment member having approximately the same length as the lip distal end member in the longitudinal direction, and having a thermal expansion coefficient α2 and modulus of longitudinal elasticity E2, is bonded to the lip distal end member having a thermal expansion coefficient α1 and a modulus of longitudinal elasticity E1, with the optimum area and position. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

The present invention is used, for example, in the manufacturing field of color filters for color liquid crystal displays, array substrates, panels for plasma displays, optical filters, and the like. In detail, the improvement of the applicator which can suppress the bimetal deformation | transformation which generate | occur | produces by comprising the member of a different material, the coating device using this applicator, the coating method, and also these were used. The present invention relates to an improvement in a manufacturing apparatus and a manufacturing method of a display member.

A color liquid crystal display is composed of a color filter, an array substrate, and the like. Both the color filter and the array substrate are coated with a low-viscosity liquid material on the surface of a glass substrate as a member to be coated, and dried. Many manufacturing processes to be formed are included. For example, in a color filter manufacturing process, a black photoresist material coating film is formed on a glass substrate, and the coating film is processed into a lattice shape by a photolithographic method, and then red, blue, and green photoresist materials are formed between the lattices. These coating films are sequentially formed by the same method. In addition, after applying a photoresist material to form a coating film, it can be used as a column for forming a space for liquid crystal injected between the color filter and the array substrate, or the surface irregularities on the color filter can be smoothed. For example, there is a manufacturing process for forming an overcoat coating film.
Conventionally, spinners, bar coaters, etc. have been used as coating devices for this coating film formation. However, it is difficult to reduce the consumption of coating liquid and power consumption, and to increase the size of the device due to the increase in the size of the coating substrate. For some reason, the use of a die coater (for example, Patent Document 1) has become the mainstream until recently. The die coater has a discharge port of an applicator configured by combining a pair of lips close to a member to be coated, and relatively moves the applicator and the member to be coated while discharging a coating liquid from the discharge port of the applicator. A coating film is formed on the surface of the member to be coated while forming a bead between the tip of the applicator and the member to be coated.

When this type of die coater is used to apply to a sheet-like coated member such as a glass substrate, the coated member that is not sufficiently cleaned must have a foreign object such as a glass piece or metal powder that is less than 1 mm in size. May adhere. When foreign matter is adhered to the surface of the member to be coated during the formation of the coating film, the foreign matter directly collides with the tip portion that forms the discharge port of the applicator adjacent thereto. On the other hand, when a foreign substance adheres to the back surface of the member to be coated, the tip of the applicator and the member to be coated that protrudes in a convex shape directly collide with the foreign substance. When such a collision occurs, damage such as a scratch or a defect occurs at the tip of the applicator.
In addition, when an operator removes the applicator from the die coater for periodic maintenance or replacement of the applicator, and disassembles / cleans / assembles the applicator, hard materials such as tools are inadvertently applied by the operator. If dropped onto the container, the tip of the applicator may be damaged in the same manner as in the above collision.
When the tip of the applicator is damaged in this way, the bead of the coating liquid formed between the tip of the applicator and the member to be coated is disturbed, and the coating film is damaged at the tip of the applicator. A streaky coating defect occurs in the vicinity.

Therefore, each lip constituting the applicator has a composite configuration of a lip tip member constituting the tip portion of the applicator and a lip member composed of other parts, and the lip tip member is stainless steel which is usually applied to the lip member. It is possible to prevent damage to the tip of the applicator by applying a harder material such as cemented carbide or ceramics (for example, Patent Documents 2 to 4).
JP-A-6-339656 JP 2004-66016 A JP 2007-14893 A Japanese Patent Laid-Open No. 2005-161451

  However, as shown in Patent Documents 2 and 3, if the lip is composed of different materials for the lip member and the lip tip member, the coefficient of thermal expansion of each member will be different. The lip member and the lip tip member undergo deformation (hereinafter referred to as bimetal deformation) such as warping or twisting due to the difference in thermal expansion and contraction. As a result, in the applicator in which these members are combined, the gap between the discharge ports of the applicator formed at regular intervals so as to obtain high film thickness accuracy becomes non-uniform, and the film thickness accuracy decreases. Especially in recent years, the applicator has become longer in order to cope with the increase in the size of the substrate, so even if the temperature changes in the clean room where the applicator is used, the applicator is greatly deformed due to bimetal deformation, and the demand High film thickness accuracy cannot be satisfied.

In order to solve such a problem, in Patent Document 4, the point symmetric position of the lip tip member, that is, the lip of each lip, with respect to the centroid of the cross section perpendicular to the longitudinal direction (coating width direction) of each lip Biaxial deformation of the lip is suppressed by arranging an adjusting member made of the same material as that of the lip tip member on the opposite side to the position where the tip member is disposed. However, for this reason, in the invention of Patent Document 4, a very expensive cemented carbide, which is the same material as the lip tip member, is used for the adjustment member, and using many such expensive materials is costly. Therefore, it is actually very difficult to implement. Furthermore, in Patent Document 4, an adjustment member that suppresses bimetal deformation is provided for each lip. Therefore, the number of adjustment members increases, the cost for materials and assembly increases, and the structure becomes complicated. Yes. In order to suppress bimetal deformation, it is essential to cancel the moments generated in the lip tip member and the adjustment member due to the difference in thermal expansion and contraction when a temperature change occurs. In No. 4, no mention is made of how the physical properties, shape, arrangement position, etc. of the adjusting member influence.
The present invention has been made in order to solve the above-described problems, and an object of the present invention is to provide a low-cost and simple applicator in which a lip is composed of a lip member and a lip tip member made of different materials. An object of the present invention is to provide an applicator, a coating apparatus and a coating method capable of suppressing bimetal deformation with a configuration, and a manufacturing apparatus and a manufacturing method for a display member using the same.

The object of the present invention is achieved by the means described below.
In the applicator of the present invention, the inner surfaces of the front lip and the rear lip are opposed to each other, and are integrally connected by a fastening element to form slots with a constant interval extending in the longitudinal direction and a discharge port for the application liquid, Each of the front lip and the rear lip has a coefficient of thermal expansion α ₁ and a longitudinal elastic modulus in an applicator configured by connecting a lip tip member forming the slot and the discharge port to a lip member holding the lip tip member. An adjustment member having a thermal expansion coefficient α ₂ and a longitudinal elastic modulus E ₂ that is substantially the same length in the longitudinal direction as the lip tip member and that has a longitudinal elastic modulus E ₂ with respect to the lip tip member that is E ₁ satisfies the formula (1), And it is couple | bonded with the said lip member by the area and position where (beta) calculated by Formula (2) will be 0.85-1.15.

In the applicator of the present invention, the inner surfaces of the front lip and the rear lip are opposed to each other, and are integrally coupled by a fastening element to form slots with a constant interval extending in the longitudinal direction and a discharge port for the coating liquid. In addition, the front lip and the rear lip are respectively connected to a front lip member and a rear lip member, which respectively hold the front lip tip member and the rear lip tip member. in applicator configured Te, thermal expansion coefficient .alpha.F _1, modulus EF ₁ the front lip end member and the thermal expansion coefficient [alpha] R 1 _is, with respect to the rear lip tip member are longitudinal elastic coefficients ER _1, wherein the front lip Coefficient of thermal expansion with approximately the same length in the longitudinal direction as the tip member and rear lip tip member .alpha.F _2, modulus EF ₂ a front lip adjusting member and the thermal expansion coefficient [alpha] R ₂ is, the modulus of longitudinal elasticity ER ₂ is a rear lip adjusting member, satisfies the formula (3) and (4), and Equation (5) and It is characterized by being coupled to the front lip member and the rear lip member in such an area and position that βF and βR calculated in (6) are both 0.85 to 1.15.

An applicator according to the present invention includes an applicator that discharges a coating liquid onto a member to be coated, a liquid supply unit that supplies the coating liquid to the applicator, a holding unit that holds the member to be coated, and the applicator. An applicator provided with a moving means for relatively moving the holding means, wherein the applicator is any one of the applicators described above.
An apparatus for manufacturing a display member according to the present invention uses the coating apparatus described above.
In the coating method according to the present invention, using the coating apparatus described above, the coating liquid is supplied from the coating device to the member to be coated, and the coating device and the member to be coated are relatively moved to move the coating member. A coating film is formed on the surface.
The display member manufacturing method according to the present invention is characterized in that a display member is manufactured using the coating method described above.

According to the applicator according to the present invention, in an applicator having a lip tip member made of a material different from that of the lip member, even if the adjustment member has different physical properties from the lip tip member, the shape and the arrangement position are optimized. Since the bimetal deformation can be suppressed, an inexpensive material can be used for the adjustment member. In addition, it is possible to suppress bimetal deformation with a single adjustment member for the lip tip member. As a result, an applicator that suppresses bimetal deformation with a low cost and simple structure is realized, and it is excellent in durability by using a high hardness material such as cemented carbide for the lip tip member, and there is no bimetal deformation, A high-precision applicator can be provided at low cost.
Since the coating apparatus and the coating method according to the present invention perform coating using the above-described excellent applicator, the applicator has a difference in the amount of thermal expansion and contraction of each member even if there is a slight temperature change. Since there is no bimetal deformation such as induced warping or twisting, the tip of the applicator can be prevented from being damaged by increasing the hardness of the tip of the lip, so the coating quality is excellent with high film thickness accuracy and no streak-like coating defects. A film can be obtained.
According to the manufacturing apparatus and the manufacturing method of the display member according to the present invention, since the display member is manufactured using the above-described excellent applicator, the coating apparatus, and the coating method, the display member having an excellent coating quality. Can be manufactured at a low cost and with a high yield.

Hereinafter, preferred embodiments of the present invention will be described with reference to the drawings.
1 is a schematic perspective view of an applicator 1 according to the present invention, FIG. 2 is a schematic side cross-sectional view of the applicator 1, FIG. 3 is a schematic side cross-sectional view showing the arrangement position of an adjusting member 5 in detail, and FIG. FIG. 5 is a schematic side cross-sectional view showing another arrangement position of the member 5 in detail, and FIG. 5 is a schematic configuration diagram of a die coater 30 which is a coating device on which the applicator 1 is mounted.

  Referring to FIG. 1, an applicator 1 according to the present invention is shown. The applicator 1 includes a front lip 2, a rear lip 3, a side plate 4, and an adjustment member 5. The front lip 2 and the rear lip 3 extend in the application width direction (Y direction shown in FIG. 1), which is the longitudinal direction of the applicator 1, and are arranged with their inner surfaces facing each other, and are a plurality of lip fastening elements. These lip fastening bolts 6 are integrally fastened and fixed. Referring to FIG. 2 showing a cross section orthogonal to the coating width direction of the applicator 1, a manifold 7 for expanding the coating liquid in the coating width direction is formed on the opposed inner surfaces of the front lip 2 and the rear lip 3 that are fastened. A slot 8 for uniformly discharging the coating liquid widened by the manifold 7 is formed extending in the coating width direction.

  A slit-like discharge port 9 is formed at the lower end of the slot 8, and a slot gap h that is an interval between the discharge port 9 and the slot 8 is uniform in the coating width direction. The adjustment member 5 includes a front lip adjustment member 16 and a rear lip adjustment member 17 that extend in the application width direction. The adjustment member 5 is disposed on the upper side of the applicator 1 on the side opposite to the discharge port 9, and each of the front lip 2 and the rear lip 3. It is fastened to the fastening. Here, as a means for fastening and fixing the adjusting member 5 to the front lip 2 or the rear lip 3, any means may be used as long as it can be firmly fixed such as fastening with a bolt or adhesion with an adhesive. Referring again to FIG. 1, the applicator 1 is provided with a supply port 10 for supplying the coating liquid to the applicator 1 at the central portion in the coating width direction. The coating liquid supplied from the supply port 10 is expanded in the coating width direction by the manifold 7 communicating with the supply port 10, and after passing through the slot 8, is uniformly discharged from the discharge port 9 in the coating width direction. . Note that side plates 4 are provided on both end faces in the coating width direction of the applicator 1 so that the coating liquid supplied to the inside of the applicator 1 does not leak from other than the discharge ports 9.

  Next, referring again to FIG. 2, a lip tip member 11 including a front lip tip member 12 and a rear lip tip member 13 is provided at the tip of the applicator 1 where the discharge port 9 is formed. Here, the length of the lip tip member 11 in the application width direction is substantially the same as the length of the adjustment member 5 in the application width direction, preferably within a range of ± 15% of the length of the adjustment member 5, more preferably. It is within the range of ± 10%. The front lip tip member 12 is combined with the front lip member 14 to form the front lip 2, and the rear lip tip member 13 is combined with the rear lip member 15 to form the rear lip 3. As a means for coupling the front lip tip member 12 and the front lip member 14 and for joining the rear lip tip member 13 and the rear lip member 15, any means may be used as long as it can be firmly fixed such as fastening with a bolt or adhesion with an adhesive. Any material can be applied as the material of the front lip member 14 and the rear lip member 15, but stainless steel that is relatively inexpensive and excellent in chemical resistance is preferably used. The material of the front lip tip member 12 and the rear lip tip member 13 as the lip tip member 11 may be any hard material in order to prevent damage to the tip portion of the applicator 1, but is preferably Vickers hardness. The hard material has a high hardness of 800 HV or higher, more preferably 1200 HV or higher. If the hardness is high in this way, the hardness is higher than that of a foreign material such as glass or metal attached to the member to be coated, so that scratches due to contact or friction do not occur, and chipping against impact does not easily occur. As the material, a very expensive cemented carbide having a Vickers hardness of 1000 HV to 1500 HV is preferably used.

  On the other hand, the material of the adjusting member 5 may be the same material as the front lip tip member 12 and the rear lip tip member 13 which are the lip tip members 11, but it is preferable to use different materials. In particular, when a very expensive cemented carbide is used as the material for the front lip tip member 12 and the rear lip tip member 13, a relatively inexpensive ceramic or the like is used for the adjustment member 5 as compared with the cemented carbide. The manufacturing cost of the applicator 1 can be greatly reduced compared to the case where the same material is used. Thus, when another material different from the lip tip member 11 is applied to the adjustment member 5 at a low cost, the embodiment described below is taken into consideration that physical properties such as a thermal expansion coefficient and a longitudinal elastic modulus are different. Based on the material, the area and the centroid of the adjustment member 5 are determined.

  Embodiment 1 of the present invention will be described below. In this embodiment, the lip tip member 11 constituted by the front lip tip member 12 of the front lip 2 and the rear lip tip member 13 of the rear lip 3, and the applicator 1 in which the front lip 2 and the rear lip 3 are fastened and integrated are used as a reference. The material, shape, and arrangement position of the adjustment member 5 are determined.

First, reference is made to FIG. 3 showing the shape of the cross section orthogonal to the coating width direction of the applicator 1. Lip end member 11 is thermal expansion coefficient alpha _1, composed of hard material modulus E _1. The lip tip member 11 has a shape KF ₁ formed by the front lip tip member 12 (shown by a hatched area) and a shape KR ₁ formed by the rear lip tip member 13 within a cross section orthogonal to the longitudinal direction, that is, the coating width direction. And a shape K ₁ (the range is indicated by a bold line) surrounded by a diagonal line. The shape K ₁ of the lip tip member 11 includes a part of the slot 8 enclosed between the front lip tip member 12 and the rear lip tip member 13 constituting the lip tip member 11 as a space. Shape K1 has an area S _1, the centroid is located at the position of the centroid Z ₁ represented by black circles. The area S1 is the total area of the substantial part of the shape K1, and does not include a space.

In contrast, the adjusting member 5 including the front lip adjusting member 16 and the rear lip adjusting member 17 is made of a material different from that of the lip tip member 11 and has physical properties of a thermal expansion coefficient α ₂ and a longitudinal elastic coefficient E ₂ . The adjustment member 5 also has a shape KF ₂ formed by the front lip adjustment member 16 (shown by a hatched area) and a shape KR ₂ formed by the rear lip adjustment member 17 (shown by a hatched line) in a cross section orthogonal to the coating width direction. A shape K ₂ (the range is indicated by a thick line) surrounded by the range is formed. The shape K ₂ of the adjusting member 5, a part of the front lip member 14 and the rear lip member 15 which is enclosed between the front lip adjusting member 16 and the rear lip adjusting member 17 is contained, and the space it . Shape K2 has an area S2, the centroid is located at the position of the centroid Z ₂ represented by black circles. Incidentally area S ₂ is the total area of the substantial portion of the shape K _2, it does not include the portion that is to space.

Further, the front lip member 14 of the front lip 2 and the rear lip member 15 of the rear lip 3 which are different materials from the lip tip member 11 and the adjustment member 5 and have physical properties of thermal expansion coefficient α ₀ and longitudinal elastic modulus E ₀ are integrally formed. Is bound to. Thus, in a cross section perpendicular to the coating width direction is front lip member 14 and the rear lip member 15 is bonded to form a shape K _0. Of course the shape K ₀ is the shape of the front lip 2 and rear lip 3 is formed are combined, and that excludes the shape K ₂ shapes K ₁ and the adjusting member 5 of the lip end member 11 (except that the space Part is not excluded). The shape K ₀ of the combined body of the front lip member 14 and the rear lip member 15 has an area S ₀ , and the centroid is at the position of the centroid Z ₀ indicated by a black circle.

When the environmental temperature changes from the current level, the thermal expansion amounts of the lip tip member 11, the front lip member 14, and the rear lip member 15 differ from each other due to the difference in thermal expansion coefficient between them. Bending moment is generated to bend the applicator 1 extending in the direction perpendicular to the vertical direction and the horizontal direction in FIG. For example, when the thermal expansion coefficient α ₁ > α ₀ and the environmental temperature becomes higher than the current temperature, the bending is performed to bend the applicator 1 (the combined body of the front lip 2 and the rear lip 3) extending in the coating width direction in the upward direction ZU. The moment acts on the combined body of the front lip member 14 and the rear lip member 15 from the lip tip member 11. At this time, for example, the front lip member 14 and the rear lip member 15 are symmetrical with respect to the mating surface P, which is the inner surface where the front lip 2 and the rear lip 3 shown in FIG. On the other hand, when the front lip tip member 12 and the rear lip tip member 13 constituting the lip tip member 11 are not symmetrical and the area of the shape KF ₁ formed by the front lip tip member 12 is larger, A bending moment that bends the extending applicator 1 in the left direction XL further acts on the combined body of the front lip member 14 and the rear lip member 15 from the lip tip member 11.

Thus, with respect to the bending moment generated by the difference in thermal expansion and contraction between the lip tip member 11 and the combined body of the front lip member 14 and the rear lip member 15 due to temperature change, a bending moment that cancels the bending moment from the adjustment member 5 is obtained. The material, shape and arrangement position of the adjusting member 5 are determined so as to act. That is,
1) With respect to the thermal expansion coefficient α0 of the front lip member 14 and the rear lip member 15, a thermal expansion coefficient α2 satisfying the formula (1) and having the same relative magnitude relationship as the thermal expansion coefficient α1 of the lip tip member 11 is set. Select the material you have.
(Α ₁ −α ₀ ) × (α ₂ −α ₀ )> 0 (1)
2) On a substantially straight extension line connecting the centroid Z1 of the shape K1 of the lip tip member 11 and the centroid Z0 of the combined shape K0 of the front lip member 14 and the rear lip member 15 separated by a length L1 therefrom. The centroid Z2 of the shape K2 of the adjusting member 5 is disposed, and the area S2 of the shape K2 and the length L2 between the centroid Z0 and the centroid Z2 are set such that β in the formula (2) is preferably about 0.1. It is determined to be 85 to 1.15, more preferably 0.9 to 1.1.
β = ((α ₁ −α ₀ ) × E ₁ × S ₁ × L ₁ ) / ((α ₂ −α ₀ ) × E ₂ × S ₂ × L ₂ ) (2)
Here, the substantially extended line includes all the lines through which the straight line m drawn from the centroid Z1 passes through the circle indicated by the two-point difference line drawn with the radius r = 0.15L ₁ with the centroid Z0 as the center. Means that.

If the material (thermal expansion coefficient α ₂ , longitudinal elastic modulus E ₂ ), shape (centroid Z ₂ , area S ₂ ), and arrangement position (length L ₂ ) of the adjustment member 5 are selected as described above. Any of these may be used. For example, in this embodiment, the adjusting member 5 is divided into a front lip adjusting member 16 and a rear lip adjusting member 17 so as to be combined with the front lip member 14 and the rear lip member 15 to form a combined body. The adjustment member 5 may be combined with the front lip member 14 and the rear lip member 15 as one integral adjustment member. Further, the front lip adjusting member 16 and the rear lip adjusting member 17 are placed at positions separated in the left-right direction in FIG. 3, but the front lip adjusting member 16 and the rear lip adjusting member 17 are arranged so as to contact with each other in the left-right direction, The lip member 14 and the rear lip member 15 may be combined. In this way, even if the front lip adjusting member 16 and the rear lip adjusting member 17 are arranged so as to be in contact with each other in the left-right direction, and this is formed as one integrated adjusting member 5, the material can be obtained by forming one adjusting member. This is preferable because it can reduce the cost.

  Next, Embodiment 2 of the present invention will be described. In this embodiment, the material, shape, and position of the front lip adjusting member 16 are determined in the front lip 2 with the front lip tip member 12 as a reference, and the rear lip adjusting member 17 in the rear lip 3 with the rear lip tip member 13 as a reference. Determine the material, shape, and location of the material.

First, FIG. 4 which shows the shape in the cross section orthogonal to the application | coating width direction of the applicator 1 is referred. In the front lip 2, the front lip tip member 12 is made of a hard material having a thermal expansion coefficient αF ₁ and a longitudinal elastic coefficient EF1. A shape KF ₁ (shown by a hatched area) shown in a cross section orthogonal to the application width direction of the front lip tip member 12 has an area SF ₁ and the centroid is located at a centroid ZF ₁ indicated by a black circle. On the other hand, the front lip adjusting member 16 is made of a material different from that of the front lip tip member 12 and has physical properties of a thermal expansion coefficient αF ₂ and a longitudinal elastic coefficient EF ₂ . A shape KF ₂ shown in a cross section perpendicular to the coating width direction of the front lip adjusting member 16 (the range is shown by hatching) has an area SF2, and the centroid is at the position of the centroid ZF ₂ indicated by a black circle.

Further, the front lip member 14, which is a material different from the front lip tip member 12 and has physical properties of thermal expansion coefficient αF ₀ and longitudinal elastic modulus EF ₀ , has a shape KF ₀ in a cross section perpendicular to the coating width direction. It is indicated. Shape KF ₀ also becomes the shape KF ₁ and the shape KF ₂ front lip adjusting member 16 of the front lip end member 12 from the shape of the front lip 2 were excluded. The shape KF ₀ of the front lip member 14 has an area SF ₀ and the centroid is at the position of the centroid ZF ₀ indicated by a black circle.

Next, in the rear lip 3, the rear lip tip member 13 is made of a hard material having a thermal expansion coefficient αR ₁ and a longitudinal elastic coefficient ER ₁ . A shape KR ₁ (shown by a hatched area) shown in a cross section orthogonal to the application width direction of the rear lip tip member 13 has an area SR ₁ and the centroid is located at the centroid ZR ₁ indicated by a black circle. Rear lip adjustment member 17 on the other hand, a different material than the rear lip tip member 13 has a thermal expansion coefficient Arufaaru2, the physical properties of the modulus ER _2.

A shape KR ₂ (shown by a hatched area) shown in a cross section orthogonal to the application width direction of the rear lip adjusting member 17 has an area SR ₂ , and the centroid is located at the centroid ZR ₂ indicated by a black circle. Further, the rear lip member 15 which is a material different from the rear lip tip member 13 and has physical properties of a thermal expansion coefficient αR ₀ and a longitudinal elastic modulus ER ₀ has a cross-sectional shape orthogonal to the coating width direction as a shape KR ₀ . Shape KR ₀ also becomes excluding shape KR ₂ shapes KR ₁ and rear lip adjusting member 17 of the rear lip tip member 13 from the shape of the rear lip 3. The shape KR ₀ of the rear lip member 15 has an area SR ₀ and the centroid is at the position of the centroid ZR ₀ indicated by a black circle.

  When the environmental temperature changes from the current level, the front lip 2 has a thermal expansion amount due to the difference in thermal expansion coefficient between the front lip tip member 12 and the front lip member 14, and the rear lip 3 due to the difference in thermal expansion coefficient between the rear lip tip member 13 and the rear lip member 15. Differently, a bending moment is generated to bend the front lip 2 and the rear lip 3 extending in the coating width direction (direction orthogonal to the paper surface of FIG. 4) in the vertical direction and the horizontal direction in FIG.

For example, in the front lip 2, when the thermal expansion coefficient αF ₁ > αF ₀ and the environmental temperature is higher than the current temperature, the front lip 2 extending in the coating width direction is bent toward the upward ZU and the rightward XR. A moment acts on the front lip member 14 from the front lip tip member 12. Further, in the rear lip 3, when the thermal expansion coefficient αR ₁ > αR ₀ and the temperature becomes higher than the current state, a bending moment that bends the rear lip 3 extending in the coating width direction upward ZU and leftward XL is The rear lip tip member 13 acts on the rear lip member 15.

  Thus, the bending moment that cancels the bending moment from the front lip adjusting member 16 acts on the bending moment generated due to the difference in thermal expansion / contraction amount between the front lip tip member 12 and the front lip member 14 due to the environmental temperature change. Similarly, the bending moment that cancels out from the rear lip adjusting member 17 acts on the bending moment generated between the rear lip tip member 13 and the rear lip member 15. That is, the materials, shapes, and positions of the front lip adjusting member 16 and the rear lip adjusting member 17 are respectively determined in order to eliminate bimetal deformation due to environmental temperature changes in the front lip 2 and the rear lip 3 individually.

That is,
In 1) front lip 2 / rear lip 3, with respect to the thermal expansion coefficient .alpha.F ₀ / [alpha] R ₀ of the front lip member 14 / the rear lip member 15, the formula (3) / (4) front lip relative magnitude relationship satisfies selecting a material having a tip member 12 / the rear lip thermal expansion coefficient of the tip member 13 .alpha.F ₁ / [alpha] R ₁ is the same as the thermal expansion coefficient .alpha.F ₂ / [alpha] R _2, respectively.
(ΑF ₁ −αF ₀ ) × (αF ₂ −αF ₀ )> 0 (3)
(ΑR ₁ −αR ₀ ) × (αR ₂ −αR ₀ )> 0 (4)
2) Front lip 2 / rear lip 3, front lip tip member 12 shape KF ₁ / rear lip tip member shape KR ₁ centroid ZF ₁ / ZR ₁ and front separated by length LF ₁ / LR ₁ The centroid ZF ₂ of the shape KF ₂ of the front lip adjusting member 16 is substantially on the straight line connecting the centroid ZF ₀ of the shape KF _{0 of the} lip member 14 and the centroid ZR ₀ of the shape KR ₀ of the rear lip member 15. / rear lip arranged centroid ZR ₂ shapes KR ₂ of the adjusting member 17, and further the area SF ₂ / area SR ₂ shapes KR ₂ shape KF _2, the length between the centroid ZF ₀ and centroid ZF ₂ LF ₂ / length LR ₂ between centroid ZR ₀ and centroid ZR ₂ , βF / βR in formula (5) / formula (6) is preferably 0.85 to 1.15, more preferably 0.9-1.1 Each is determined to be.

Here, the substantially extended line means a circle indicated by a two-point difference line drawn with a radius rF = 0.15LF ₁ / radius rR = 0.15LR ₁ around the centroid ZF0 / centroid ZR0. ₁ / means that the straight line mF / mR drawn from the centroid ZR ₁ passes through all.
As described above, the material (thermal expansion coefficient αF ₂ , longitudinal elastic modulus EF ₂ ), shape (centroid ZF ₂ , area SF ₂ ), arrangement position (length LF ₂ ), and rear lip adjustment of the front lip adjusting member 16 If the material (thermal expansion coefficient αR ₂ , longitudinal elastic modulus ER ₂ ), shape (centroid ZR ₂ , area SR ₂ ), and arrangement position (length LR ₂ ) of the member 17 are selected, these are not specified. There may be.

  In this embodiment, the front lip 2 and the rear lip 3 are each provided with a front lip tip member 12 and a rear lip tip member 13 as the lip tip member 11. It can also be applied to those provided with a lip tip member 11. For example, when the front lip tip member 12 that is the lip tip member 11 is provided only at the tip portion of the front lip 2, the adjustment member may be disposed only on the front lip 2 side, and satisfies the formula (3). Such a material is selected, and a shape and an arrangement position are determined so that βF calculated by Expression (5) is 0.85 to 1.15, more preferably 0.9 to 1.1.

  On the other hand, when the rear lip tip member 13 that is the lip tip member 11 is provided only at the tip portion of the rear lip 3, the adjustment member may be disposed only on the rear lip 3 side, and the material satisfying the formula (4) And the shape and the arrangement position are determined so that βR calculated by Expression (6) is 0.85 to 1.15, more preferably 0.9 to 1.1.

  Next, a coating apparatus using the applicator 1 according to the present invention will be described. Referring to FIG. 5, a die coater 30 on which the applicator 1 according to the present invention is mounted is shown. The die coater 30 includes a base 31, on which a pair of guide rails 32 are provided. A stage 33 is installed on the guide rail 32. The stage 33 is driven by a linear motor 34 and can freely reciprocate in the X direction shown in FIG. The upper surface of the stage 33 is a vacuum suction surface composed of a plurality of suction holes (not shown), and can hold the substrate 35 as a member to be coated by suction. Next, a gate-shaped column 36 is installed on the base 31. A pair of elevating units 37 capable of reciprocating in the vertical direction are provided on both sides of the support column 36, and the applicator 1 that performs application is attached to the elevating unit 37 with the discharge port 9 facing downward. Yes.

  One lifting unit 37 that moves the applicator 1 up and down is provided at each end of the applicator 1 in the coating width direction. The lifting unit 39 lifts and lowers the holding table 38 that holds the applicator 1. And a ball screw 42 for converting the rotational motion of the motor 41 into the linear motion of the lifting platform 39. Since the elevating unit 37 can operate independently at both ends of the applicator 1 in the application width direction, an inclination angle of the applicator 1 with respect to the horizontal in the application width direction can be arbitrarily set. Thereby, the clearance gap between the discharge port 9 of the applicator 1 and the surface of the substrate 35 that is a member to be applied can be made parallel to the application width direction of the applicator 1, and the size of the gap, that is, The clearance can be set to an arbitrary size uniformly.

  Further, the base 31 is provided with a wiping unit 50. Similar to the stage 33, the wiping unit 50 can freely reciprocate on the guide rail 32 in the X direction, which is the coating direction. The wiping unit 50 includes a wiping head 51, a wiping head driving device 52 that reciprocates the wiping head 51 freely in the coating width direction via a head holder 53, a tray 54, and a wiping unit holding base 55. It is configured. The wiping head 51 has a shape that matches the shape of the tip portion that forms the discharge port 9 of the applicator 1, and it is preferable to use an elastic body such as a synthetic resin.

  When wiping is performed using the wiping unit 50, the wiping unit 50 is moved to the lower portion of the applicator 1 in the X direction, and the applicator 1 is lowered by the lifting unit 37 to apply the wiping head 51. The tip of the vessel 1 is brought into contact. Then, the wiping head 51 brought into contact is slid in the coating width direction perpendicular to the X direction of the applicator 1 by the wiping head driving device 52, so that the residual coating liquid adhered to the tip of the applicator 1 and Particles can be removed. These residual coating liquid, particles, and the like are received by a tray 54 installed under the wiping head 51 and are collected in a waste liquid tank (not shown) through a waste liquid path (not shown). The tray 54 can also be used to collect coating liquid, solvent, and the like discharged from the discharge port 9 in order to change the type of coating liquid and prevent the tip of the applicator 1 from drying.

  The die coater 30 is also provided with a coating solution supply device 60 that supplies the coating solution to the applicator 1. The coating liquid supply device 60 includes a coating liquid tank 61 that stores the coating liquid 20. The coating liquid 20 is supplied to the syringe pump 64 through a pump supply path 62 and a suction opening / closing valve 63 connected downstream of the coating liquid tank 61. The coating liquid 20 supplied to the syringe pump 64 is sent to the manifold 7 from the supply port 10 of the applicator 1 via the discharge opening / closing valve 65 and the die supply path 66.

  The syringe pump 64 includes a syringe 67, a piston 68, a piston holding base 69 that holds the piston 68, a piston lifting guide 70 that guides the piston holding base 69 in the vertical direction, and a motor 71 that is a vertical drive source of the piston holding base 69. The ball screw 72 converts the rotational movement of the motor 71 into the linear movement of the piston holding base 69. The syringe pump 64 having this configuration fills the syringe 67 with the coating liquid 20 from the coating liquid tank 61 through the internal passage of the piston 68, and pushes it out by the piston 68. This is a constant capacity pump that supplies the coating solution 20 in a volume corresponding to the coating region.

  When filling the inside of the syringe 67 with the coating liquid 20, the suction on-off valve 63 attached upstream of the syringe 67 is “opened”, and the discharge on-off valve 65 attached downstream of the syringe 67 is “closed”. The piston 68 is lowered in the state of "". Further, when the coating liquid 20 inside the syringe 67 is fed toward the applicator 1, the piston 68 is moved with the suction opening / closing valve 63 "closed" and the discharge opening / closing valve 65 "opened". Raise. The coating liquid 20 sent from the syringe pump 64 is supplied to the applicator 1.

  Note that the linear motor 34, the motor 41, and the coating liquid supply device 60 including the motor 71 that drives the piston 68 of the syringe pump 64 all operate according to the control signal of the control device 80. A control command signal is transmitted to each device in accordance with an automatic operation program incorporated in the control device 80, thereby performing a predetermined operation. In addition, when each operation condition needs to be changed, if a change parameter is appropriately input to the operation panel 81, the change parameter is transmitted to the control device 80, and the driving operation can be changed.

  Next, an example of a coating method for coating the substrate 35 using the die coater 30 equipped with the applicator 1 according to the present invention will be described.

  First, when the origin return of each movable part in the die coater 30 is performed, each movable part moves to a preset standby position. It should be noted that the parameters for realizing the target application conditions up to this point have been input to the operation panel 81. Furthermore, the coating solution 20 is already filled from the coating solution tank 61 to the inside of the applicator 1, the piston 68 is at the lowest point, the suction on-off valve 63 is closed, and the discharge on-off valve 65 is open. Yes.

  When the above preparation operation is completed, the wiping unit 50 is moved immediately below the applicator 1 in the X direction. Subsequently, a plurality of lift pins (not shown) are raised on the surface of the stage 33, and the substrate 35 is loaded on the lift pins from an unloader (not shown). Then, the lift pins are lowered, the substrate 35 is placed on the upper surface of the stage 33, the substrate 35 is positioned by a centering device (not shown), and the substrate 35 is sucked and held by a plurality of suction holes (not shown).

  In parallel with this, the coating liquid supply device 60 is operated to discharge a small amount of the coating liquid 20 from the applicator 1 toward the tray 54. Then, the applicator 1 is lowered by the elevating unit 37, the tip of the applicator 1 is brought into contact with the wiping head 51, and the wiping head 51 is slid in the application width direction of the applicator 1. When the periphery of the discharge port 9 of the applicator 1 is cleaned by the sliding contact of the wiping head 51, the applicator 1 is lifted by the elevating unit 37, and the wiping unit 50 is moved to the origin position in the X direction away from the applicator 1. Returned.

  Next, the stage 33 holding the substrate 35 starts to move, and the thickness of the substrate 35 is measured by a sensor (not shown). Thereafter, the application start position of the substrate 35 moves to a position just below the discharge port 9 of the applicator 1 and the stage 33 stops. Then, based on the thickness of the substrate 35 measured by a sensor (not shown), the elevating unit 37 is operated, and the clearance between the discharge port 9 of the applicator 1 and the surface of the substrate 35, that is, the clearance is set to a set value. Then, the applicator 1 is lowered.

  When the lowering of the applicator 1 is completed, the coating liquid supply device 60 is driven, and the piston 68 pushes out the coating liquid 20 filled in the syringe 67 to form a bead 44 as shown in FIG. After a time, the stage 33 holding the substrate 35 is started to move by the linear motor 34. As a result, the coating liquid 20 is discharged from the discharge port 9 of the applicator 1 onto the surface of the moving substrate 35, and a coating film is formed while forming the beads 44. Thereafter, when the coating end portion of the substrate 35 comes to the position of the discharge port 9 of the applicator 1, the piston 68 is stopped to stop the supply of the coating liquid 20, and then the elevating unit 37 is driven to Raise.

  By this operation, the bead 44 formed between the substrate 35 and the applicator 1 is completely cut off, and the application is completed. Thereafter, the stage 33 continues to move and stops at a position where the substrate 35 is unloaded. In parallel with this, the applicator 1 is returned to the origin position in the vertical direction. Then, the suction of the substrate 35 on the stage 33 is released, and a lift pin (not shown) is lifted to lift the substrate 35. The unloader holds the substrate 35 and transports the substrate 35 to the next process.

  Next, the stage 33 is returned to the origin position, the suction on-off valve 63 is opened, and the discharge on-off valve 65 is closed. Then, the piston 68 of the syringe pump 64 is lowered, and a new coating liquid 20 is placed inside the syringe 67. To fill. When the filling of the coating liquid 20 is completed, the suction opening / closing valve 63 is closed, the discharge opening / closing valve 65 is opened, and then the wiping unit 50 is moved again to the lower part of the applicator 1 in the X direction. Wait for 35 to be transferred and repeat the same operation.

  Here, the coating liquid 20 to which the present invention can be applied is not particularly limited as long as it is a fluid liquid. For example, a coloring coating liquid, a resist liquid, a surface protection coating liquid, an antistatic coating liquid, or There is a coating solution for lubrication, and a solution in which an inorganic material such as a polymer material, glass or metal is dissolved or dispersed in water or an organic solvent is often used. Further, the viscosity of the coating solution 20 used is preferably 0.5 to 100,000 mPa · s, more preferably 1 to 50,000 mPa · s, and it is preferably Newtonian in view of coating properties, but it is thixotropic. It is applicable also to the coating liquid which has. Specific examples of coating solutions that can be applied include RGB resist solution for color filters, resist solution for black matrix, resist solution for photospacer, overcoat material, positive resist solution for array substrate, and photosensitivity for partition walls for PDP. There is glass paste. In addition to the glass, a member to be coated which is the substrate 35 may be a metal plate such as aluminum, a ceramic plate, a silicon wafer, or the like.

Hereinafter, examples of the present invention will be described more specifically.
The applicator 1 according to the present invention was applied to the die coater 30 shown in FIG. 5 as it was to produce a color filter. The applicator 1 has the configuration shown in FIG. 1 and has an application width of 1100 mm and a slot gap h of 100 μm. As the lip member which is a combined body of the front lip member 14 and the rear lip member 15, the area S ₀ of the shape K ₀ of the lip member shown in FIG. 3 is 15000 mm ² , the length in the longitudinal direction is 1300 mm, and the thermal expansion coefficient α ₀ is Stainless steel having 11 × 10 ⁻⁶ / K and a longitudinal elastic modulus E ₀ of 200 GPa was used. Further, the lip tip member 11 constituted by the front lip tip member 12 and the rear lip tip member 13 has a hardness of 1200 HV in terms of Vickers hardness, an area S ₁ of the shape K ₁ of the lip tip member 11 is 300 mm ² , and a length in the longitudinal direction. A cemented carbide having a length of 1100 mm, a thermal expansion coefficient α ₁ of 5.8 × 10 ⁻⁶ / K, and a longitudinal elastic modulus E ₁ of 550 GPa, and a centroid Z ₁ of the shape K ₁ of the lip tip member 11 and The length L ₁ between the centroid Z ₀ of the shape K ₀ of the lip member and the lip member shape K ₀ is 60 mm.

Here, in order to suppress bimetal deformation, the material, shape, and arrangement position of the adjustment member 5 including the front lip adjustment member 16 and the rear lip adjustment member 17 were selected based on the first embodiment. First, as the material of the adjusting member 5, the thermal expansion coefficient α2 is 6 × 10 ⁻⁶ / K, the longitudinal elastic modulus E ₂ is 400 GPa, and the Al ₂ O content is 99.5% or more so as to satisfy the formula (1). Alumina ceramics were selected.

Shape, the arrangement position, 350 mm ² area S2 of the shape K2 of the adjusting member 5, the centroid _{Z 0} of the shape _{K 0} of the lip member, the centroid _{Z 2} form _{K 2} of the adjusting member 5, between the the length _{L 2} by 70 mm, were arranged as β equation (2) becomes 1.05 in the range of 0.85 to 1.15. Here, the longitudinal length of the adjusting member 5 to 1100mm lip tip member the same length, the centroid Z ₂ shape K2 of the adjusting member 5, the centroid Z ₁ form K ₁ of the lip end member 11 And the centroid Z ₀ of the shape K ₀ of the lip member.

  Next, black matrix, R color, G color, and B color coating liquids were prepared as the coating liquid 20 used for manufacturing the color filter. The coating liquid for black matrix used carbon black as a light shielding material, acrylic resin as a binder, and propylene glycol monomethyl ether acetate (PGMEA) as a solvent, respectively, and adjusted the solid content concentration to 10% and the viscosity to 10 mPa · s. Similarly, the R color coating solution is an acrylic resin binder, PGMEA as a solvent, Pigment Red 177 as a pigment and mixed at a solid content concentration of 15%, and the viscosity is adjusted to 5 mPa · s. The G color coating solution is Pigment green 36 with R color coating solution and solid viscosity of 15% and viscosity adjusted to 5 mPa · s. B color coating solution with R color coating solution with pigment blue 15 solid The viscosity is adjusted to 5 mPa · s at a partial concentration of 15%. All of these coating liquids have photosensitive characteristics.

A color filter was manufactured by the following procedure using the die coater 30 described above.
First, coating was performed on a non-alkali glass substrate 35 having a thickness of 1100 × 1300 mm and a thickness of 0.7 mm at a coating thickness of 10 μm, a clearance between the applicator 1 and the substrate 35 of 100 μm, and a coating speed of 3 m / min. The coated substrate 35 is dried on a hot plate at 100 ° C. for 10 minutes, exposed, developed and peeled off, then heated and cured on a hot plate at 260 degrees for 30 minutes to obtain a black matrix pattern having a thickness of 1 μm. It was created.

  Next, coating is continuously performed on 100 substrates 35 on which the black matrix is formed by the die coater 30 under exactly the same conditions as the coating liquid for the black matrix except that the coating thickness for the R color is 13 μm. I did it. The coated substrate 35 is dried on a hot plate at 90 ° C. for 10 minutes, and then exposed, developed, and peeled off to leave an R color coating film having a thickness of 2 μm only on the R pixel portion, and then on a 260 ° hot plate for 30 minutes. It was heated and cured. Next, the same operation as that for the R color coating solution was sequentially applied to the G color coating solution and the B color coating solution, and finally ITO was deposited by sputtering to prepare 100 color filters.

  At this time, the collision between the applicator 1 and the foreign matter, which is considered to be caused by the foreign matter adhering to the substrate 35, was confirmed five times. However, since the hard material lip tip member 11 is used, the applicator 1 is used. There was no damage to the tip of the coating, and no coating defects were found in the resulting color filter. In the environment where the die coater 30 was used, a temperature change of about ± 2 ° C. occurred constantly during the production of the color filter, but there was no bimetal deformation of the applicator 1, and as a result, As for the obtained color filters, a high quality color filter with a film thickness accuracy of ± 3% or less was obtained over the entire number.

1 is a schematic perspective view of an applicator 1 according to the present invention. 2 is a schematic side sectional view of the applicator 1. FIG. FIG. 5 is a schematic side cross-sectional view showing the arrangement position of the adjustment member 5 in detail. FIG. 6 is a schematic side sectional view showing another arrangement position of the adjustment member 5 in detail. It is a schematic block diagram of the die-coater 30 which is a coating device which mounts the applicator 1. FIG.

Explanation of symbols

1: Applicator 2: Front lip 3: Rear lip 4: Side plate 5: Adjustment member 6: Bolt for lip fastening 7: Manifold 8: Slot 9: Discharge port 10: Supply port 11: Lip tip member 12: Front lip tip member 13 : Rear lip tip member 14: Front lip member 15: Rear lip member 16: Front lip adjustment member 17: Rear lip adjustment member 20: Coating liquid 30: Die coater 31: Base 32: Guide rail 33: Stage 34: Linear motor 35: Substrate 36 : Strut 37: Lifting unit 38: Holding stand 39: Lifting stand 40: Guide 41: Motor 42: Ball screw 44: Bead 50: Wiping unit 51: Wiping head 52: Wiping head drive unit 53: Head holder 54: Tray 55: Wiping unit holding base 60: Coating liquid supply Position 61: Coating liquid tank 62: Pump supply path 63: Opening / closing valve for suction 64: Syringe pump 65: Opening / closing valve for discharge 66: Die supply path 67: Syringe 68: Piston 69: Piston holding base 70: Piston lift guide 71: Motor 72: Ball screw 80: Control device 81: Operation panel h: Slot gap K ₀ : Shape K _{1 in} a cross section orthogonal to the longitudinal direction of the lip member (a combined body of the front lip member 14 and the rear lip member 15): Lip tip member 11 shape K ₂ in a cross section perpendicular to the longitudinal direction _of: shape KF in a cross section perpendicular to the longitudinal direction of the adjusting member 5 _0: shape KF in a cross section perpendicular to the longitudinal direction of the front lip member 14 _1: front lip end shape KF in a cross section perpendicular to the longitudinal direction of the member 12 _2: perpendicular to the longitudinal direction of the front lip adjusting member 16 Cross-sectional shape KR ₀ : Cross-sectional shape perpendicular to the longitudinal direction of the rear lip member 15 KR ₁ : Cross-sectional shape perpendicular to the longitudinal direction of the rear lip tip member 13 KR ₂ : perpendicular to the longitudinal direction of the rear lip adjusting member 17 shape in a cross section _{Z 0:} centroid _{Z 1} form _{K 0:} shape _{K 1} of the centroid _{Z 2:} shape _{K 2} centroid ZF _0: centroid ZF ₁ shape KF _0: shape KF ₁ centroid ZF _2: the shape KF ₂ of centroid ZR _0: centroid ZR ₁ shape KR _0: shape KR ₁ centroid ZR _2: shape KR ₂ of centroid _{S 0:} area shape _{K 0 S 1:} the shape _{K 1} Area S ₂ : Area of shape K ₂ SF ₀ : Area of shape KF ₀
SF ₁ : Area of shape KF ₁ SF ₂ : Area SR ₀ of shape KF ₂ : Area SR ₁ of shape KR ₀ : Area SR ₂ of shape KR ₁ : Area m of shape KR ₂ : Centroid Z ₁ and centroid Z Straight line mF passing through ₀ : Straight line mR passing through centroid ZF ₁ and centroid ZF ₀ : Straight line L ₁ passing through centroid ZR ₁ and centroid ZR ₀ : Length between centroid Z ₁ and centroid Z ₀ L ₂ : Length between centroid Z ₀ and centroid Z ₂ LF ₁ : Length between centroid ZF ₁ and centroid ZF ₀ LF ₂ : Between centroid ZF ₀ and centroid ZF ₂ length between LR _1: centroid ZR ₁ and centroid ZR ₀ between the length LR _2: the length between the centroid ZR ₀ and centroid ZR2 P: front lip 2 and rear lip 3 opposes a inner surface which is coupled Te mating surface alpha _0: thermal expansion coefficient of the lip member (conjugates of the front lip member 14 and the rear lip member 15) alpha _1: lip destination Thermal expansion coefficient of the member 11 alpha _2: thermal expansion coefficient .alpha.F 0 of the adjusting member _5: the thermal expansion coefficient of the front lip member 14 .alpha.F _1: thermal expansion coefficient of the front lip end member 12 .alpha.F _2: thermal expansion of the front lip adjusting member 16 Coefficient αR ₀ : thermal expansion coefficient αR ₁ of the rear lip member 15: thermal expansion coefficient αR _{2 of the} rear lip tip member 13: thermal expansion coefficient E _{0 of the} rear lip adjusting member 17: lip member (combined body of the front lip member 14 and the rear lip member 15) ) Longitudinal elastic modulus E ₁ : longitudinal elastic modulus E ₂ of the lip tip member 11: longitudinal elastic modulus EF ₀ of the adjustment member 5: longitudinal elastic modulus EF ₁ of the front lip member 14: longitudinal elastic modulus EF of the front lip tip member 12 ₂ : Longitudinal elastic modulus ER ₀ of the front lip adjusting member 16: Longitudinal elastic modulus ER _{1 of the} rear lip member 15: Rear lip tip member 1 3 longitudinal elastic modulus ER ₂ : longitudinal elastic modulus of the rear lip adjusting member 17

Claims (6)

The inner surfaces of the front lip and the rear lip are opposed to each other, and are joined together by a fastening element to form slots with a constant interval extending in the longitudinal direction and a discharge port for the coating liquid, and the front lip and the rear lip are respectively In the applicator, wherein the lip tip member forming the slot and the discharge port is coupled to the lip member holding the lip tip member, the lip tip having a thermal expansion coefficient α ₁ and a longitudinal elastic modulus E ₁ An adjustment member having substantially the same length in the longitudinal direction as the lip tip member and having a thermal expansion coefficient α ₂ and a longitudinal elastic modulus E ₂ with respect to the member satisfies the formula (1) and is calculated by the formula (2). The applicator is coupled to the lip member at an area and position such that β is 0.85 to 1.15.

The inner surfaces of the front lip and the rear lip are opposed to each other, and are joined together by a fastening element to form slots with a constant interval extending in the longitudinal direction and a discharge port for the coating liquid, and the front lip and the rear lip are respectively A front lip tip member and a rear lip tip member that form the slot and the discharge port are coupled to a front lip member and a rear lip member that respectively hold the front lip tip member and the rear lip tip member; expansion coefficient .alpha.F _1, modulus EF ₁ the front lip end member and the thermal expansion coefficient [alpha] R 1 _is, with respect to the rear lip tip member are longitudinal elastic coefficients ER _1, wherein the front lip end member and the rear lip tip member and the longitudinal direction in substantially the same length, the thermal expansion coefficient .alpha.F _2, a longitudinal elastic modulus EF ΒF front lip adjusting member and the thermal expansion coefficient [alpha] R _2, the vertical elasticity coefficient ER ₂ is a rear lip adjusting member, satisfies the formula (3) and (4), which is and calculated by the equation (5) and (6) is And βR are respectively coupled to the front lip member and the rear lip member at an area and position such that 0.8R and 1.35 are both 0.85 to 1.15.

An applicator that discharges a coating liquid onto a member to be coated, a liquid supply unit that supplies the coating liquid to the coating unit, a holding unit that holds the member to be coated, and the applicator and the holding unit are relatively An applicator provided with a moving means for moving the applicator, wherein the applicator is the applicator according to claim 1. The manufacturing apparatus of the member for displays using the coating device of Claim 3. Using the coating apparatus according to claim 3, while supplying the coating liquid from the coating device to the member to be coated, the coating device and the member to be coated are relatively moved to form a coating film on the surface of the member to be coated. A coating method characterized by forming. A display member is manufactured using the coating method according to claim 5, wherein the display member is manufactured.

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