JP2010058128A5 - - Google Patents
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- JP2010058128A5 JP2010058128A5 JP2008223975A JP2008223975A JP2010058128A5 JP 2010058128 A5 JP2010058128 A5 JP 2010058128A5 JP 2008223975 A JP2008223975 A JP 2008223975A JP 2008223975 A JP2008223975 A JP 2008223975A JP 2010058128 A5 JP2010058128 A5 JP 2010058128A5
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Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2008223975A JP5368033B2 (en) | 2008-09-01 | 2008-09-01 | Laser light irradiation apparatus and laser light irradiation method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2008223975A JP5368033B2 (en) | 2008-09-01 | 2008-09-01 | Laser light irradiation apparatus and laser light irradiation method |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2010058128A JP2010058128A (en) | 2010-03-18 |
| JP2010058128A5 true JP2010058128A5 (en) | 2011-09-29 |
| JP5368033B2 JP5368033B2 (en) | 2013-12-18 |
Family
ID=42185530
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2008223975A Active JP5368033B2 (en) | 2008-09-01 | 2008-09-01 | Laser light irradiation apparatus and laser light irradiation method |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP5368033B2 (en) |
Families Citing this family (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2014041660A1 (en) | 2012-09-13 | 2014-03-20 | 浜松ホトニクス株式会社 | Optical modulation control method, control program, control device, and laser light irradiation device |
| US9914183B2 (en) | 2013-03-27 | 2018-03-13 | Hamamatsu Photonics K.K. | Laser machining device and laser machining method |
| WO2014156690A1 (en) * | 2013-03-27 | 2014-10-02 | 浜松ホトニクス株式会社 | Laser machining device and laser machining method |
| JP6272300B2 (en) | 2013-03-27 | 2018-01-31 | 浜松ホトニクス株式会社 | Laser processing apparatus and laser processing method |
| CN105102179B (en) | 2013-03-27 | 2017-04-26 | 浜松光子学株式会社 | Laser machining device and laser machining method |
| JP6518041B2 (en) * | 2014-05-21 | 2019-05-22 | 浜松ホトニクス株式会社 | Light stimulation device and light stimulation method |
| DE102016120244A1 (en) | 2016-10-24 | 2018-04-26 | Cl Schutzrechtsverwaltungs Gmbh | Device for the additive production of three-dimensional objects |
| JP6938094B2 (en) * | 2017-11-28 | 2021-09-22 | 株式会社ディスコ | Wafer processing method |
| JP2020082170A (en) * | 2018-11-29 | 2020-06-04 | デクセリアルズ株式会社 | Laser processing method and laser processing apparatus |
| JP6719074B2 (en) * | 2019-05-21 | 2020-07-08 | 株式会社東京精密 | Laser processing area confirmation device and confirmation method |
| JP7450413B2 (en) * | 2020-03-09 | 2024-03-15 | 株式会社ディスコ | Laser processing equipment and how to adjust it |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5781986A (en) * | 1980-11-12 | 1982-05-22 | Hitachi Ltd | Method and device for laser working |
| JPS62263862A (en) * | 1986-05-12 | 1987-11-16 | Toshiba Corp | Laser beam machine |
| JP3775250B2 (en) * | 2001-07-12 | 2006-05-17 | セイコーエプソン株式会社 | Laser processing method and laser processing apparatus |
| JP4716663B2 (en) * | 2004-03-19 | 2011-07-06 | 株式会社リコー | Laser processing apparatus, laser processing method, and structure manufactured by the processing apparatus or processing method |
| JP2006068762A (en) * | 2004-08-31 | 2006-03-16 | Univ Of Tokushima | Laser processing method and laser processing apparatus |
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2008
- 2008-09-01 JP JP2008223975A patent/JP5368033B2/en active Active