JP2010053390A - Vapor guide tube - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a vapor guide tube capable of uniformly heating the entire tube and efficiently re-evaporating a material deposited on an inner circumferential surface of the tube. <P>SOLUTION: The vapor guide tube 10 comprises a crucible 12 which houses a material for vapor deposition, and heats the material to generate the vapor of the material, a glass tube 11 in which the crucible 12 is installed therein, and the vapor generated from the crucible 12 is allowed to flow forwardly in the longitudinal direction, and a metal tube 13 for covering an outer circumferential surface of the glass tube 11. In the vapor guide tube 10, a transparent conductive tin oxide film having the predetermined electric resistance is film-deposited on the outer circumferential surface of the glass tube 11, an electric resistance thin film having the predetermined thickness is deposited on the outer circumferential surface of the glass tube 11, and the electric resistance thin film is heated by its resistance heating to heat the glass tube 11 at the predetermined temperature. <P>COPYRIGHT: (C)2010,JPO&amp;INPIT

Description

  The present invention relates to a steam guide tube that heats and evaporates a predetermined material to generate a vapor of the material and flows the vapor in one direction.

  The vapor deposition material is heated to cause the vapor of the material to flow from the proximal end to the distal end, and the vapor guide tube that discharges the vapor to the target installed in the vacuum chamber and the vapor guide tube are housed inside The guide tube is made up of a telescopic tube that moves the guide tube back and forth with respect to the target, and a length adjusting mechanism that can adjust the expansion and contraction length of the telescopic tube, and releases steam from the tip of the steam guide tube toward the target. There is a vacuum deposition apparatus for depositing a material on a target (see Patent Document 1).

In this vacuum deposition apparatus, the vapor guide tube and the expansion tube are fixed in a sealed state in the vacuum chamber, and by rotating the handle of the length adjustment mechanism, the vapor guide is directed to the target while expanding and contracting the length of the expansion tube. Advance and retract the tube. The steam guide tube is installed at the base end portion thereof to store the vapor deposition material, heats the material to generate the vapor of the material, the crucible is installed therein, and the steam generated from the crucible is The glass tube is made to flow from the end portion toward the tip portion, is formed of a stainless steel tube that is positioned outside the glass tube and covers the outer peripheral surface of the glass tube, and a heater filament that heats the glass tube. The heater filament is a heating wire spirally wound around the outer peripheral surface of the glass tube, and heats the glass tube to a predetermined temperature by electric resistance heating of the heating wire. The vapor of the material generated from the crucible flows from the proximal end portion of the glass tube toward the distal end portion and is discharged from the distal end portion of the glass tube toward the target.
JP 2008-81809 A

  In the vacuum vapor deposition apparatus disclosed in Patent Document 1, the vapor of the vapor deposition material is captured by the inner peripheral surface of the glass tube in the process from the base end portion to the distal end portion of the glass tube, and the material is the inner peripheral surface of the glass tube. Although the glass tube is heated by a heater filament (electric heating coil) wound spirally around the glass tube, the material adhering to the inner peripheral surface of the glass tube is evaporated again, and the vapor of the re-evaporated material Is caused to flow from the proximal end portion of the glass tube toward the distal end portion. In the contact portion of the glass tube where the heater filament comes into contact, the temperature of the glass tube is maintained at a high temperature substantially the same as the temperature of the heater filament, and the material adhering to the portion can be efficiently re-evaporated. However, in the non-contact part of the heater filament excluding the contact part, the temperature of the glass tube is lower than that of the contact part, and the material adhering thereto is sufficiently re-evaporated in the non-contact part where the temperature is lower than that of the contact part. It may not be possible. If the re-evaporation of the material in the non-contact portion is insufficient, the generation efficiency of the vapor in the apparatus is reduced, the material is wasted, and the material cannot be sufficiently deposited on the target.

  An object of the present invention is to provide a steam guide tube that can uniformly heat the entire tube and efficiently re-evaporate the material adhering to the inner peripheral surface of the tube.

  The premise of the present invention for solving the above-mentioned problems is that a predetermined material is contained, a crucible for heating the material to generate a vapor of the material, a crucible installed therein, and a vapor of the material generated from the crucible A steam guide pipe having a tube that flows in one direction.

  The feature of the present invention in the above premise is that a metal material having a predetermined electric resistance is coated on the outer peripheral surface of the tube, and the metal material forms an electric resistance thin film having a predetermined thickness dimension on the outer peripheral surface of the tube. The thin film generates heat by the resistance heating and heats the tube to a predetermined temperature.

  As an example of the present invention, the tube is formed of an inner tube and an outer tube that is positioned outside the inner tube and encloses the outer peripheral surface of the inner tube, and the crucible is installed inside the inner tube. A thin film is formed on the outer peripheral surface of the inner tube, and in the steam guide tube, a space is formed between the inner tube and the outer tube, and the outer tube reflects infrared rays emitted from the inner tube toward the inner tube.

  As another example of the present invention, the inner tube has a proximal end portion and a distal end portion, and an intermediate portion located between the end portions, and the crucible is installed at the proximal end portion of the inner tube, and the steam guide In the tube, electrodes in which a metal material having a lower electric resistance than the electric resistance thin film is coated on the electric resistance thin film are formed at the proximal end and the distal end of the inner tube, and the vapor of the material generated from the crucible is generated in the inner tube. It flows from the base end toward the tip.

  As another example of the present invention, a shutter capable of opening and closing the distal end opening of the inner tube is attached to the distal end portion of the inner tube.

  As another example of the present invention, the thickness dimension of the electric resistance thin film gradually decreases from the middle portion of the inner tube toward the proximal end portion and the distal end portion.

  As another example of the present invention, the inner tube is a glass tube and the outer tube is a metal tube.

  As another example of the present invention, the resistance value of the electric resistance thin film is in the range of 100 to 120Ω, and the temperature of the tube heated by the electric resistance thin film is in the range of 80 to 200 ° C.

  As another example of the present invention, the electric resistance thin film is a transparent conductive tin oxide film, and the transparent conductive tin oxide film is formed on the outer peripheral surface of the tube.

  As another example of the present invention, the vapor guide tube is used in a vacuum vapor deposition apparatus that discharges the vapor of the material generated from the crucible from the tube and deposits the material on a target disposed inside the vacuum chamber.

  According to the steam guide tube of the present invention, an electric resistance thin film having a predetermined thickness dimension is formed on the outer peripheral surface of the tube, and the electric resistance thin film generates heat by electric resistance heating and heats the entire area of the tube to a predetermined temperature. Therefore, the high temperature portion and the low temperature portion are not formed on the tube, and even if the entire region of the tube is held at substantially the same high temperature by the electric resistance thin film and the material adheres to the inner peripheral surface of the tube, the material All can be reevaporated efficiently. The steam guide pipe can reliably flow all the steam of the material generated from the crucible in one direction through the tube while preventing the material from remaining on the inner peripheral surface of the tube. For example, when vapor is deposited on a predetermined target using this vapor guide tube, the vapor of the material can be efficiently discharged toward the target while eliminating waste of the material. Reliable irradiation can be performed, and the material can be reliably deposited on the target.

  The steam guide tube, which consists of an inner tube and an outer tube, and the outer tube reflects the infrared rays emitted from the inner tube toward the inner tube, the infrared ray (heat rays) emitted from the inner tube is reflected by the outer tube As a result, the temperature of the inner tube is maintained by the outer tube, and the entire area of the inner tube is maintained at substantially the same high temperature. Therefore, even if the material adheres to the inner peripheral surface of the tube, all of the material is efficiently recycled. Can be evaporated. The steam guide tube can reliably flow all the material vapor generated from the crucible in one direction through the inner tube while preventing the material from remaining on the inner peripheral surface of the tube. For example, when vapor is deposited on a predetermined target using this vapor guide tube, the vapor of the material can be efficiently discharged toward the target while eliminating waste of the material. Reliable irradiation can be performed, and the material can be reliably deposited on the target.

  The inner tube has a proximal end, a distal end and an intermediate portion, a crucible is installed at the proximal end of the inner tube, and an electrode coated with a metal material having a lower electric resistance than the electric resistance thin film The steam guide tubes formed at the proximal and distal ends of the tube cause the material vapor generated from the crucible to flow in one direction from the proximal end of the inner tube toward the distal end, and the steam is directed toward the target. Reliable irradiation. Since the steam guide tube is made by coating the thin film with a metal material having an electric resistance lower than that of the electric resistance thin film, electrodes formed on the proximal end portion and the distal end portion of the inner tube. Compared with the case where the terminal is directly connected to the contact resistance, the contact resistance can be lowered, there is no current loss, and a desired current can be surely passed through the electric resistance thin film. In this steam guide tube, since the electric resistance thin film generates heat by resistance heating and the entire inner tube is heated to a predetermined temperature, the proximal end portion, the distal end portion, and the intermediate portion of the tube are heated to substantially the same temperature by the electric resistance thin film. Even if the material is held and the material adheres to the inner peripheral surface of the inner tube, the entire material can be efficiently re-evaporated in each part.

  A steam guide tube with a shutter that can open and close the tip opening of the inner tube attached to the tip of the inner tube opens the shutter in the vicinity of the target, for example, when depositing material on a predetermined target using it. Thus, the vapor of the material generated from the crucible can be reliably irradiated toward the target, and the material can be reliably deposited on the target.

  The steam guide tube in which the thickness of the electric resistance thin film gradually decreases from the middle portion of the inner tube toward the proximal end portion and the distal end portion, the temperature of the proximal end portion and the distal end portion of the inner tube is lower than that of the intermediate portion. Even if it tends to be lower, since the thickness dimension of the electric resistance thin film at the proximal end and the distal end is smaller than that at the intermediate portion, the electrical resistance at the proximal end and the distal end is large, and the proximal end and the distal end The temperature of the inner tube can be made higher than that of the intermediate part. As a result, even if the entire inner tube is kept at substantially the same high temperature and the material adheres to the inner peripheral surface of the inner tube, all the materials are efficiently removed. Can be re-evaporated.

  The steam guide tube in which the inner tube is a glass tube and the outer tube is a metal tube, infrared rays (heat rays) emitted from the glass tube are reflected by the metal tube, so that the temperature of the glass tube is maintained by the metal tube. Since the entire glass tube is maintained at substantially the same high temperature, even if the material adheres to the inner peripheral surface of the glass tube, all the material can be efficiently re-evaporated.

  The steam guide tube in which the resistance value of the electric resistance thin film is in the range of 100 to 120Ω and the temperature of the tube heated by the electric resistance thin film is in the range of 80 to 200 ° C. makes the resistance value of the electric resistance thin film within the above range. Thus, the tube can be heated to the temperature range without flowing a large current through the electric resistance thin film. Since the steam guide tube does not need to pass a large current, it can prevent the electric resistance thin film from being damaged. The entire area of the steam guide tube is maintained at substantially the same high temperature by the electric resistance thin film, and even if the material adheres to the inner peripheral surface of the tube, all the material can be efficiently re-evaporated.

  The steam guide tube in which the electrical resistance thin film is a transparent conductive tin oxide film and the transparent conductive tin oxide film is formed on the outer peripheral surface of the tube forms a transparent conductive tin oxide film on the outer peripheral surface of the tube at room pressure. Since the film can be formed, an electric resistance thin film can be easily formed on the outer peripheral surface. The entire area of the tube is kept at substantially the same high temperature by the transparent conductive tin oxide film, and even if the material adheres to the inner peripheral surface of the tube, the vapor guide tube can efficiently re-evaporate all the material.

  Since the steam guide tube used in the vacuum deposition apparatus can reliably flow all the material vapor generated from the crucible in one direction through the tube while preventing the material from remaining on the inner peripheral surface of the tube. While efficiently discharging the vapor of the material toward the target disposed inside the vacuum chamber, the vapor can be reliably irradiated onto the target, and the material can be reliably deposited on the target.

  The details of the vapor guide tube and the vacuum vapor deposition apparatus using the vapor guide tube according to the present invention will be described below with reference to the accompanying drawings. FIG. 1 is a perspective view of a steam guide tube 10 shown as an example, and FIG. 2 is a cross-sectional view taken along line 2-2 in FIG. 3 is a cross-sectional view taken along line 3-3 in FIG. 1, and FIG. 4 is a partially broken side view of a glass tube 11 shown as an example. FIG. 5 is a partially broken side view of a glass tube 11 shown as another example. In FIG. 1, the longitudinal direction is indicated by an arrow A, and the surrounding direction is indicated by an arrow B. In FIG. 1, the shutter 29 is rotated in the circumferential direction and the tip opening 28 is open. 2 and 3, only the guide tube portion 14 of the steam guide tube 10 is shown as a cross-sectional view. 4 and 5, the electrical resistance thin film 28 (transparent conductive tin oxide film 27) is conceptually shown with a visually visible thickness dimension for the sake of illustration, but in actuality, the thickness of the thin film 28 is shown. The dimension is several tens of μm to several μm, and the visual inspection is not possible.

  The steam guide tube 10 includes a glass tube 11 (inner tube) that is long in the longitudinal direction (one direction), a crucible 12 installed inside the glass tube 11, and a metal tube 13 (outer tube) that is long in the longitudinal direction. ing. The steam guide tube 10 includes a guide tube portion 14 formed from a glass tube 11, a metal tube 13, and a crucible 12, and a handling portion 15 located at the rear of the guide tube portion 14 in the longitudinal direction. The guide tube portion 14 and the handling portion 15 are hermetically connected via flanges 16 and 17 extending in the direction around them. The flanges 16 and 17 are connected by screws 18.

  The handling section 15 of the steam guide tube 10 includes a glass tube current introduction terminal 19 that can be connected to an external power source (not shown) for flowing current through the glass tube 11 (electric resistance thin film), and a crucible 12 (heater filament 37). ) And a crucible current introduction terminal 20 that can be connected to an external power source for supplying a current. Further, a crucible introduction handle 21 for detachably installing the crucible 12 on the glass tube 11 and a shutter opening / closing handle 22 for opening / closing a shutter 29 described later are attached. The external power supply has a built-in control device for controlling the current flowing through the glass tube current introduction terminal 19 and the current flowing through the crucible current introduction terminal 20.

  The glass tube 11 includes a peripheral wall 23 having a circular cross section, and is formed in a hollow cylindrical shape that is long in the longitudinal direction. A steam flow hermetic space 24 is defined inside the peripheral wall 23. The glass tube 11 is located between the end portions 25 and 27, a proximal end portion 25 located on the handling portion 15 side of the steam guide tube 10, a distal end portion 27 located on the opposite side of the proximal end portion 25. And an intermediate portion 26. A shutter 29 capable of opening and closing the tip opening 28 is attached to the tip portion 27.

  As the glass forming the glass tube 11, soda lime glass, high strain point glass, borosilicate glass, low alkali glass, silica glass and the like are used. An electric resistance thin film 31 having a predetermined thickness made of a transparent conductive tin oxide film 30 (metal material) is formed on the entire outer peripheral surface of the glass tube 11. The electric resistance thin film 31 is formed by forming a transparent conductive tin oxide film 30 (nesa film) on the surface of the glass tube 11 at room pressure. The thickness dimension of the electric resistance thin film 31 is in the range of several tens μm to several μm.

  A pair of electrodes 32 extending in the direction around the glass tube 11 is formed at the base end portion 25 and the distal end portion 27 of the glass tube 11 (see FIGS. 4 and 5). The electrode 32 is made by coating the tin oxide film 30 with a silver paste (metal material) having an electric resistance lower than that of the transparent conductive tin oxide film 30. Although not shown, terminals (copper plates) are connected to the electrodes 32. A conducting wire (not shown) extends from the terminal, and the conducting wire is connected to the glass tube current introduction terminal 19. In addition to the transparent conductive tin oxide film 30, the electrical resistance thin film 31 may be formed by depositing (coating) a metal material having a predetermined electrical resistance such as gold, platinum, silver, or the like on the surface of the glass tube 11. it can. Further, the inner tube may be made of a ceramic insulator in addition to the glass tube 11.

  The electric resistance thin film 31 has a resistance value in a range of 100 to 120Ω. When a voltage is applied to the electrode 32 of the glass tube 11 and a predetermined current is passed through the electric resistance thin film 31, Joule heat is generated in the thin film 31 by the electric resistance of the thin film 31, and the glass tube 11 is in the range of 80 to 200 ° C. Heated. The current flowing through the glass tube current introduction terminal 19 is controlled by the control device, and the temperature of the glass tube 11 is maintained in any one of the above ranges. The temperature of the glass tube 11 can be freely changed within the above range by changing the current flowing through the glass tube current introduction terminal 19 via the control device.

  When the resistance value of the electric resistance thin film 31 is less than 100Ω, a large current must be passed in order to bring the temperature of the glass tube 11 to the above range, and the thin film 31 may be damaged by the large current. In order to make the resistance value of the electrical resistance thin film 31 exceed 120Ω, the thickness dimension of the thin film 31 must be made as thin as possible. However, if the thickness dimension of the thin film 31 is made too thin, the thin film 31 is partially removed from the surface of the glass tube 11. In some cases, the entire region of the glass tube 11 cannot be heated uniformly. Further, special processing is required to reduce the thickness dimension of the electric resistance thin film 31, and as a result, the manufacturing cost of the steam guide tube 10 increases. The steam guide tube 10 can heat the glass tube 11 to the temperature range without causing a large current to flow through the thin film 31 by setting the resistance value of the electric resistance thin film 31 within the above range. Since it is not necessary for the steam guide tube 10 to flow a large current, the electrical resistance thin film 31 can be prevented from being accidentally damaged.

  In the glass tube 11, as shown in FIG. 4, when the thickness dimension of the electric resistance thin film 31 (transparent conductive tin oxide film 30) formed on the outer peripheral surface is uniform over the entire outer peripheral surface, or FIG. As shown in FIG. 4, there is a case where a gradient is provided in the thickness dimension of the electric resistance thin film 31. When providing a gradient in the thickness dimension of the electric resistance thin film 31, the thickness dimension of the thin film 31 is gradually decreased from the intermediate portion 26 of the glass tube 11 toward the proximal end portion 25 and the distal end portion 27. Alternatively, the thickness dimension of the thin film 31 is increased at the intermediate portion 26 of the glass tube 11, and the thickness dimension is decreased at the proximal end portion 25 and the distal end portion 27 than that of the intermediate portion 26.

  The reason for providing a gradient in the thickness dimension of the electric resistance thin film 31 is as follows. When an electric current is passed through the electric resistance thin film 31, the glass tube 11 is heated by the electric resistance heating of the thin film 31, but the longitudinal direction rear side of the base end portion 25 of the glass tube 11 is easily affected by the surrounding environment. There is a tendency for the temperature of the base end portion 25 to be lower than the temperature of the intermediate portion 26. Further, the front side in the longitudinal direction of the distal end portion 27 of the glass tube 11 is easily affected by the surrounding environment, and the temperature of the distal end portion 27 tends to be lower than the temperature at the intermediate portion 26 of the glass tube 11.

  When the temperature of the base end portion 25 and the tip end portion 27 becomes lower than the intermediate portion 26 of the glass tube 11 due to the influence of the surrounding environment, when the glass tube 11 is heated by electric resistance heating of the electric resistance thin film 31, the glass tube 11 cannot be maintained at a uniform high temperature. Therefore, the thickness dimension of the electric resistance thin film 31 is gradually decreased from the intermediate portion 26 of the glass tube 11 toward the base end portion 25 and the distal end portion 27, or the thickness dimension of the thin film 31 is reduced in the intermediate portion 26 of the glass tube 11. The electrical resistance of the base end part 25 and the front end part 27 is made larger than that of the intermediate part 26 by increasing the thickness and making the thickness dimension thinner than that of the intermediate part 26 at the base end part 25 and the front end part 27. As a result, when an electric current is passed through the electric resistance thin film 31, the amount of Joule heat of the base end portion 25 and the tip end portion 27 is larger than that of the intermediate portion 26, and the temperature of the base end portion 25 and the tip end portion 27 is increased. The height can be higher than that of the intermediate portion 26. Therefore, the longitudinal direction rearward of the proximal end portion 25 and the longitudinal forward direction of the distal end portion 27 are affected by the surrounding environment, and the temperature of the proximal end portion 25 and the distal end portion 27 tends to be lower than that of the intermediate portion 26. However, the temperature drop of the base end part 25 and the front-end | tip part 27 can be prevented, and the temperature of the glass tube 11 whole region is hold | maintained at a uniform high temperature.

  The shutter 29 is made of a circular metal plate. A turning shaft 33 extending in the longitudinal direction is attached to the peripheral portion of the shutter 29. The shutter 29 can turn around the glass tube 11 around the turning shaft 33, and opens and closes the tip opening 28 of the glass tube 11 by the turning. The pivot shaft 33 is located outside the glass tube 11 and extends from the distal end portion 27 of the glass tube 11 toward the proximal end portion 25. The pivot shaft 33 has a tip connected to the peripheral edge of the shutter 29 and a rear end connected to the shutter opening / closing handle 22 that rotates the shaft 33. When the shutter opening / closing handle 22 is rotated in the clockwise direction indicated by the arrow A1 from the state of FIG. 1, the turning shaft 33 is rotated in the clockwise direction, whereby the shutter 29 is turned toward the tip opening 28 to close the opening 28. . When the shutter opening / closing handle 22 is turned in the counterclockwise direction indicated by the arrow A2 from the state in which the tip opening 28 is closed by the shutter 29, the turning shaft 33 rotates counterclockwise, whereby the shutter 29 is moved from the tip opening 28. The opening 28 is opened by turning in the direction of separation.

  The crucible 12 is detachably inserted into the base end portion 25 of the glass tube 11 and is fixed to the base end portion 25. The crucible 12 is a cylindrical container, and includes a bottom 34, a peripheral wall 35 extending from the periphery of the bottom 34, and a material container 36 surrounded by the bottom 34 and the peripheral wall 35. The crucible 12 is connected to the crucible introduction handle 21. A heater filament 37 (electric heating winding) connected to a power source is wound around the outer peripheral surface of the peripheral wall portion 35. A conductive wire (not shown) extends from the heater filament 37, and the conductive wire is connected to the crucible current introduction terminal 20.

  When a predetermined current flows through the heater filament 37, the heater filament 37 generates heat to a high temperature due to the electric resistance of the heater filament 37. The crucible 12 is heated to a predetermined temperature by the electric resistance heating of the heater filament 37 and heats the material accommodated in the material accommodating portion 36. The material accommodated in the material accommodating portion 36 is heated and vaporized by the temperature of the crucible, and is vaporized and discharged from the crucible into the glass tube 11. Note that the current flowing through the crucible current introduction terminal 20 is controlled by the control device, and the temperature of the crucible 12 is maintained at a set value. The temperature of the crucible 12 can be freely changed according to the type of the material by changing the current flowing through the crucible current introduction terminal 20 via the control device.

  The metal tube 13 includes a peripheral wall 38 having a circular cross section, and is formed in a hollow cylindrical shape that is long in the longitudinal direction. The metal pipe 13 is located between the end portions 39 and 41, a base end portion 39 located on the handling portion 15 side of the steam guide tube 10, a tip end portion 41 located on the opposite side of the base end portion 39. And an intermediate portion 40. The metal tube 13 is positioned outward in the circumferential direction of the glass tube 11, and the peripheral wall 38 covers the entire peripheral wall 23 of the glass tube 11. Therefore, the base end portion 39 covers the base end portion 25 of the glass tube 11, the intermediate portion 40 covers the intermediate portion 26 of the glass tube 11, and the front end portion 41 is the front end portion 27 of the glass tube 11. Enveloping.

  The entire inner peripheral surface of the metal tube 13 is mirror-finished. Between the inner peripheral surface of the metal tube 13 and the outer peripheral surface of the glass tube 11, an infrared reflection airtight space 42 having a predetermined size is formed. The metal tube 13 is made of stainless steel, but may be made of either aluminum or duralumin other than stainless steel. The glass tube 11 and the metal tube 13 are fixed to the flanges 16 and 17.

  FIG. 6 is a perspective view of the steam guide tube 10 with the length adjusting unit 43 attached thereto. In FIG. 6, the telescopic tube 43 is in an extended state. The length adjusting unit 43 is formed of an extendable tube 44 and a length adjusting mechanism 45. The telescopic tube 43 is formed of a bellows structure 46 in which a plurality of bellows is connected in the longitudinal direction, and a fixing device 47 that fixes the bellows structure 46, and is formed in a hollow cylindrical shape. When the telescopic tube 43 is pulled outward in the longitudinal direction, each bellows of the bellows structure 46 extends and the telescopic tube 43 extends. Conversely, when the telescopic tube 43 is contracted inward in the longitudinal direction, the adjacent bellows closely contact each other and the telescopic tube 43 contracts.

  The telescopic tube 43 is disposed outward in the direction around the guide tube portion 14 of the steam guide tube 10 and surrounds substantially half of the guide tube portion 14. The telescopic tube 43 is airtightly fixed to the guide tube portion 14 via a connecting flange 48 to which a fixing device 47 is connected. A support ring 49 to which the fixing device 47 is connected is disposed in front of the telescopic tube 43 in the longitudinal direction. A through hole 50 is formed in the central portion of the support ring 49, and the guide tube portion 14 passes through the through hole 50. The guide tube portion 14 can move through the through hole 50 of the support ring 49 and can move forward and backward in the longitudinal direction in the through hole 50.

  The length adjusting mechanism 45 extends in the longitudinal direction so as to be parallel to the steam guide tube 10. The length adjusting mechanism 45 includes a longitudinally long slide shaft 52 partially formed with a male screw 51 (see FIG. 7) and a longitudinally long bearing partially formed with a female screw (not shown). The pipe 53 and a length adjusting handle 54 rotatably connected to the bearing pipe 53 are formed. A portion of the slide shaft 52 where the male screw 51 is formed is inserted into the bearing pipe 53, and the male screw 51 is screwed to the female screw of the pipe 53. The slide shaft 52 is fixed to a support plate 55 attached to the support ring 49. The bearing pipe 53 is connected to the guide pipe portion 14 by being fixed to a support plate 56 attached to the connection flange 48.

  When the length adjustment handle 54 is rotated in the clockwise direction indicated by the arrow B3, the slide shaft 52 is rotated in the clockwise direction. When the slide shaft 52 rotates in the clockwise direction, the male screw 51 of the slide shaft 52 that is screwed into the female screw of the bearing pipe 53 rotates inside the pipe 53, and the slide shaft 52 moves backward in the longitudinal direction to move the shaft 52. Gradually enters the inside of the pipe 53. When the slide shaft 52 moves backward in the longitudinal direction, the telescopic tube 44 is contracted inward in the longitudinal direction, the bellows structure 46 of the telescopic tube 44 is contracted, and the telescopic tube 44 contracts. When the telescopic tube 44 contracts, the steam guide tube 10 moves forward in the longitudinal direction as indicated by an arrow A1 in FIG.

  When the length adjustment handle 54 is rotated in the counterclockwise direction indicated by the arrow B4, the slide shaft 52 rotates in the counterclockwise direction. When the slide shaft 52 rotates counterclockwise, the male screw 51 of the slide shaft 52 that is screwed into the female screw of the bearing pipe 53 rotates inside the pipe 53, and the slide shaft 52 advances forward in the longitudinal direction. 52 is gradually exposed from the inside of the pipe 53. When the slide shaft 52 moves forward in the longitudinal direction, the telescopic tube 44 is pulled outward in the longitudinal direction, the bellows structure 46 of the telescopic tube 44 extends, and the telescopic tube 44 extends. When the telescopic tube 44 extends, the steam guide tube 10 moves rearward in the longitudinal direction as indicated by an arrow A2 in FIG.

  7 and 8 are perspective views of a vacuum vapor deposition apparatus 57 shown as an example using the vapor guide tube 10. 7 and 8 show the guide tube portion 14, the coupler 59, and the attachment device 60 in cross section. In FIG. 7, the guide tube portion 14 (the tip opening 28 of the glass tube 11) of the steam guide tube 10 is in a state of being separated from the target 63 fixed inside the vacuum chamber 58. In FIG. 8, the guide tube portion 14 (the tip opening 28 of the glass tube 11) is in a state of being close to the target 63.

  The vacuum evaporation apparatus 57 is formed of a vacuum chamber 58, a steam guide pipe 10 that is airtightly fixed to the vacuum chamber 58, and a length adjustment unit 43 that is attached to the steam guide pipe 10. Extending from the vacuum chamber 58 is a coupler 59 which is airtightly attached thereto. The steam guide tube 10 to which the length adjusting unit 43 is attached is airtightly attached to the connector 59 via the attachment device 60 and fixed to the vacuum chamber 58. The coupler 59 and the fixture 60 are connected via a screw 61, and the fixture 60 and the steam guide tube 10 are connected via a screw 62. In addition, the guide pipe part 14 of the steam guide pipe 10 can move inside the coupler 59 and the attachment device 60 in the longitudinal direction forward and backward.

  Although not shown, the vacuum chamber 58 is connected to a vacuum device that depressurizes the inside of the chamber 58 to a predetermined degree of vacuum. A holder 64 for fixing the target 63 is installed inside the chamber 58. The target 63 is fixed inside the chamber 58 by a holder 64. The target 63 includes everything such as metal, plastic, film, and building material in addition to optical components and electronic components. The material deposited on the target 63 is an organic substance.

  An example of a procedure for depositing a material on the target 63 using the vacuum deposition apparatus 57 is as follows. The target 63 is attached to the holder 64, and the target 63 is fixed inside the chamber 58. When the target 63 is attached to the holder 64, as shown in FIG. 7, the bellows structure 46 of the telescopic tube 44 is extended to extend the telescopic tube 44, and the guide tube portion 14 is moved from the inside of the vacuum chamber 58. The guide tube portion 14 (the tip opening 28 of the glass tube 11) is separated from the target 64. Further, the tip opening 28 of the glass tube 11 is closed by a shutter 29. The crucible 12 is removed from the guide tube 10 by using the crucible introduction handle 21 of the handling portion 15 of the steam guide tube 10, the material is put into the material storage portion 36 of the crucible 12, and then the crucible is introduced again using the crucible introduction handle 21. 12 is attached to the guide tube 10 in an airtight manner.

  After the target 64 is fixed inside the chamber 58 and the crucible 12 containing the material is attached to the vapor guide tube 10, the vacuum vapor deposition device 57 is activated. When the vacuum deposition device 57 is activated, the vacuum device is activated, the inside of the chamber 58 is evacuated, the inside of the chamber 58 is depressurized to a predetermined degree of vacuum, and the inside of the steam guide tube 10 (steam flow hermetic space). 24 and the infrared reflecting airtight space 42) are depressurized to a predetermined degree of vacuum. After the pressure inside the steam guide tube 10 is reduced to a predetermined degree of vacuum, electricity is supplied from the power source to the current introduction terminals 19 and 20 of the handling section 15 of the steam guide tube 10, and the heater filament 37 wound around the crucible 12. Current flows to heat the crucible 12, and current flows from the electrode 32 to the electric resistance thin film 31 (transparent conductive tin oxide film 30) to heat the glass tube 11.

  The material accommodated in the material accommodating portion 36 of the crucible 12 evaporates in the accommodating portion 36 and is discharged from the crucible 12 to the glass tube 11 as vapor. In the glass tube 11, the vapor of the material flows from the proximal end portion 25 of the tube 11 toward the distal end portion 27. In the process in which the material flows from the proximal end portion 25 of the glass tube 11 toward the distal end portion 27, a part of the vapor is captured by the inner peripheral surface of the glass tube 11, and the material adheres to the inner peripheral surface of the tube 11. However, since the glass tube 11 is heated to 80 to 200 ° C. by the resistance heating of the electric resistance thin film 31, the material adhering to the inner peripheral surface of the tube 11 is evaporated again to become vapor, and the vapor is the tip of the tube 11. It flows toward part 27.

  Infrared rays are emitted from the outer peripheral surface of the glass tube 11 heated to a predetermined temperature by the electric resistance thin film 31. If there is no metal tube 13 surrounding the glass tube 11, the temperature of the glass tube 11 is partially lowered by the emission of infrared rays, and the entire region of the glass tube 11 may not be maintained at a uniform high temperature. However, since the entire area of the glass tube 11 is covered with the metal tube 13, the infrared rays emitted from the glass tube 11 are reflected by the inner peripheral surface of the mirror-finished metal tube 13 and returned to the glass tube 11. The glass tube 11 is kept warm by 13 and the temperature of the glass tube 11 is not partially lowered.

  Next, the length adjusting handle 54 is rotated clockwise from the state shown in FIG. 7, and the guide tube portion 14 is advanced into the vacuum chamber 58 as shown in FIG. Approach the target 63. After the tip opening 28 is brought close to the target 63, the shutter opening / closing handle 22 is rotated counterclockwise to open the shutter 29. When the shutter 29 is opened, the tip opening 28 of the glass tube 11 is opened, and the vapor of the material generated from the crucible 12 is released from the tip opening 29 toward the target 63. The vapor is applied to the target 63 and the material is deposited on the target 63.

  After the material is deposited on the target 63, the shutter opening / closing handle 22 is rotated in the clockwise direction, the shutter 29 is closed, the tip opening 28 is closed, and the length adjustment handle 54 is rotated counterclockwise from the state of FIG. 7, as shown in FIG. 7, the guide tube portion 14 is withdrawn from the inside of the vacuum chamber 58, and the tip opening 29 of the glass tube 11 is separated from the target 63. The target 63 on which the material is deposited is taken out from the chamber 58 after returning the inside of the vacuum chamber 58 to the room pressure.

  In the steam guide tube 10, an electric resistance thin film 31 (transparent conductive tin oxide film 30) having a predetermined thickness dimension is formed on the outer peripheral surface of the glass tube 11, and the electric resistance thin film 31 generates heat due to electric resistance heating to generate glass. Since the entire region of the tube 11 is heated to a predetermined temperature, the glass tube 11 is not formed with a high temperature portion and a low temperature portion, and the entire region of the glass tube 11 is held at substantially the same high temperature by the electric resistance thin film 31. Even if a material adheres to the inner peripheral surface of the glass tube 11, all the material can be efficiently reevaporated.

  The steam guide tube 10 can reliably flow all the vapor of the material generated from the crucible 12 forward in the longitudinal direction through the glass tube 11 while preventing the material from remaining on the inner peripheral surface of the glass tube 11. All of the vapor can be discharged from the tip opening 29 of the glass tube 11. When the vapor guide tube 10 is used to deposit the material on the target 63, the vapor of the material can be efficiently discharged toward the target 63 while eliminating waste of the material. Can be reliably irradiated, and the material can be reliably deposited on the target 63.

  In the steam guide tube 10, since the mirror-finished inner peripheral surface of the metal tube 13 reflects infrared rays emitted from the glass tube 11 toward the glass tube 11, the temperature of the glass tube 11 is maintained by the metal tube 13. The entire glass tube 11 is held at substantially the same high temperature. In the steam guide tube 10, the glass tube 11 is not locally cooled by the influence of the surrounding environment, and the temperature distribution of the glass tube 11 is maintained uniformly, so that the material adheres to the inner peripheral surface of the glass tube 11. Even so, all the materials can be reevaporated effectively. In the steam guide tube 10, since an electrode 32 obtained by coating a thin film with a silver paste having an electric resistance lower than that of the electric resistance thin film 31 is formed on the base end portion 25 and the tip end portion 27 of the glass tube 11, Compared with the case where a terminal is directly connected to the thin film 31, the contact resistance can be lowered, and a desired current can be reliably passed through the electric resistance thin film 31.

  In the steam guide tube 10, a shutter 29 capable of opening and closing the tip opening 28 of the glass tube 11 is attached to the tip portion 27 of the glass tube 11. By opening the shutter 29 in the vicinity of 63, the vapor of the material generated from the crucible 12 can be reliably irradiated toward the target 63, and the material can be reliably deposited on the target 63 while eliminating waste of material. it can. Since this steam guide tube 10 can form the transparent conductive tin oxide film 30 on the outer peripheral surface of the glass tube 11 at room pressure, the electric resistance thin film 31 can be easily formed on the outer peripheral surface of the glass tube 11. Can do.

  Note that the thickness dimension of the electrical resistance thin film 31 gradually decreases from the intermediate portion 26 of the glass tube 11 toward the base end portion 25 and the distal end portion 27, or the thickness dimension of the electrical resistance thin film 31 is reduced to the glass tube. In the steam guide tube 10 that is thicker at the intermediate portion 26 of the eleventh portion and thinner than that of the intermediate portion 26 at the proximal end portion 25 and the distal end portion 27, the temperatures of the proximal end portion 25 and the distal end portion 27 of the glass tube 11 are used. Although the thickness dimension of the electric resistance thin film 31 at the base end portion 25 and the tip end portion 27 is smaller than that of the intermediate portion 26, even if the The electrical resistance of the distal end portion 27 is large, and the temperatures of the proximal end portion 25 and the distal end portion 27 can be made higher than that of the intermediate portion 26. As a result, the entire glass tube 11 is kept at substantially the same high temperature. , As a material adheres to the inner circumferential surface of the glass tube 11, it is possible to re-evaporate all the material efficiently.

The perspective view of the steam guide pipe shown as an example. FIG. 2 is a cross-sectional view taken along line 2-2 in FIG. 1. FIG. 3 is a cross-sectional view taken along line 3-3 in FIG. 1. The partially broken side view of the glass tube shown as an example. The partially broken side view of the glass tube shown as another example. The perspective view of the steam guide pipe in the state where the length adjustment unit was attached. The perspective view of the vacuum evaporation system shown as an example. The perspective view of the vacuum evaporation system shown as an example.

Explanation of symbols

10 Steam guide tube 11 Glass tube (inner tube)
12 crucible 13 metal tube (outer tube)
DESCRIPTION OF SYMBOLS 14 Guide trunk 15 Handling part 19 Current introduction terminal for glass tube 20 Current introduction terminal for crucible 21 Crucible introduction handle 22 Shutter opening / closing handle 25 Base end part 26 Middle part 27 Front part 28 Front opening 29 Shutter 30 Transparent conductive tin oxide film (NESA) film)
31 Electroresistive thin film 32 Electrode 43 Length adjustment unit 44 Telescopic tube 45 Length adjustment mechanism 57 Vacuum deposition device 58 Vacuum chamber 63 Target

Claims (9)

Steam having a predetermined material, heating the material and generating a vapor of the material, and a tube having the crucible installed therein and flowing the steam generated from the crucible in one direction In the guide tube,
A metal material having a predetermined electric resistance is coated on the outer peripheral surface of the tube to form an electric resistance thin film having a predetermined thickness dimension on the outer peripheral surface of the tube, and the electric resistance thin film generates heat by its resistance heating. The steam guide tube, wherein the tube is heated to a predetermined temperature.   The tube is formed from an inner tube and an outer tube positioned outside the inner tube and enclosing the outer peripheral surface of the inner tube, and the crucible is installed inside the inner tube, and the electric resistance A thin film is formed on the outer peripheral surface of the inner tube, and in the steam guide tube, a space is formed between the inner tube and the outer tube, and the outer tube transmits infrared rays emitted from the inner tube to the inner tube. The steam guide tube according to claim 1, which reflects toward the tube.   The inner tube has a proximal end portion and a distal end portion, and an intermediate portion located between the end portions, and the crucible is installed at a proximal end portion of the inner tube, and in the steam guide tube, Electrodes coated on the thin film with a metal material having an electric resistance lower than that of the electric resistance thin film are formed at the proximal end and the distal end of the inner tube, and the vapor of the material generated from the crucible is generated in the inner tube. The steam guide tube according to claim 2, wherein the steam guide tube flows from the proximal end portion toward the distal end portion.   The steam guide tube according to claim 3, wherein a shutter capable of opening and closing a tip opening of the inner tube is attached to a tip portion of the inner tube.   The steam guide tube according to claim 3 or 4, wherein a thickness dimension of the electric resistance thin film gradually decreases from an intermediate portion of the inner tube toward a proximal end portion and a distal end portion.   The steam guide tube according to any one of claims 2 to 5, wherein the inner tube is a glass tube, and the outer tube is a metal tube.   The resistance value of the electric resistance thin film is in a range of 100 to 120Ω, and the temperature of the tube heated by the electric resistance thin film is in a range of 80 to 200 ° C. Steam guide tube.   The steam guide tube according to any one of claims 1 to 7, wherein the electric resistance thin film is a transparent conductive tin oxide film, and the transparent conductive tin oxide film is formed on an outer peripheral surface of the tube. .   9. The vapor guide tube is used in a vacuum vapor deposition apparatus that discharges the vapor of the material generated from the crucible from the tube and deposits the material on a target disposed in a vacuum chamber. The steam guide pipe according to any one of the above.

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