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JP2010040960A - Solid-state electrolytic capacitor - Google Patents

Solid-state electrolytic capacitor Download PDF

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Publication number
JP2010040960A
JP2010040960A JP2008205157A JP2008205157A JP2010040960A JP 2010040960 A JP2010040960 A JP 2010040960A JP 2008205157 A JP2008205157 A JP 2008205157A JP 2008205157 A JP2008205157 A JP 2008205157A JP 2010040960 A JP2010040960 A JP 2010040960A
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anode
cathode
electrolytic capacitor
solid electrolytic
back surface
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Yuji Yoshida
雄次 吉田
Koji Sakata
幸治 坂田
Takashi Mizukoshi
崇 水越
Takeshi Saito
猛 齋藤
Takeo Kasuga
健男 春日
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Tokin Corp
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NEC Tokin Corp
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Priority to JP2008205157A priority Critical patent/JP2010040960A/en
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01GCAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
    • H01G9/00Electrolytic capacitors, rectifiers, detectors, switching devices, light-sensitive or temperature-sensitive devices; Processes of their manufacture
    • H01G9/004Details
    • H01G9/008Terminals
    • H01G9/012Terminals specially adapted for solid capacitors
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01GCAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
    • H01G9/00Electrolytic capacitors, rectifiers, detectors, switching devices, light-sensitive or temperature-sensitive devices; Processes of their manufacture
    • H01G9/004Details
    • H01G9/022Electrolytes; Absorbents
    • H01G9/025Solid electrolytes
    • H01G9/028Organic semiconducting electrolytes, e.g. TCNQ

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  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Fixed Capacitors And Capacitor Manufacturing Machines (AREA)

Abstract

<P>PROBLEM TO BE SOLVED: To provide a solid-state electrolytic capacitor having a low impedance in a high frequency range. <P>SOLUTION: An anodic oxidation coating is formed on the back and front surfaces of a plate-shape valve-action metal having porosity on the front surface and smoothness on the back surface. An anode area and a cathode area are separated by insulating body layers 4 formed on the anodic oxidation coating. A solid-state electrolytic layer 5, a graphite layer 6, and a conductive pasted layer 7 are formed in order on the anode oxidation coating of the cathode area, to be used as a cathode. A conductive member is connected to a part where the anode oxidation coating of the back surface in the anode area is removed, and the part is used as an anode. The anode and the cathode on the back surface are connected to an anode external terminal and a cathode external terminal respectively. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

本発明は、弁作用金属を用いた固体電解コンデンサに係り、特に高周波数領域において低インピーダンス特性を有する固体電解コンデンサに関する。   The present invention relates to a solid electrolytic capacitor using a valve metal, and more particularly to a solid electrolytic capacitor having low impedance characteristics in a high frequency region.

近年、デジタル機器の小型化、高機能化が進み、固体電解コンデンサもノイズ除去や電源電圧の安定化を目的としてCPUの周囲、直下などで使用されるなど、電子回路における固体電解コンデンサの役割が重要になってきている。   In recent years, digital devices have become smaller and more functional, and solid electrolytic capacitors have been used in electronic circuits, such as around and directly under CPUs for the purpose of eliminating noise and stabilizing power supply voltage. It is becoming important.

導電性高分子を固体電解質とする従来の固体電解コンデンサの一例として、平板型素子構造を有するアルミニウム固体電解コンデンサの作製に関して図面を参照して説明する。図2は従来の固体電解コンデンサを示す図であり、図2(a)は斜視図、図2(b)は図2(a)のA−A線における断面図である。まず両面を多孔質化した多孔質部2を有する平板状のアルミニウムからなるアルミニウム基体1の表面に、陽極酸化によって絶縁膜である陽極酸化皮膜を形成する。次いで前記の陽極酸化皮膜の所定位置にエポキシ樹脂などにより絶縁体層4を形成してアルミニウム基体を2つの領域、即ち陽極部領域と陰極部領域に区分し、前記領域のうちの一方の陰極部領域のみに、導電性高分子からなる固体電解質層5を形成する。さらにこの固体電解質層5の上にスクリーン印刷等によりグラファイト層6を形成し、さらにグラファイト層6の上に導電性ペースト層7を形成して陰極部とする。一方、絶縁体層4により区分されたもう一つの領域の陽極部領域では、陽極酸化皮膜を剥離させるなどしてアルミニウム基体1を露出させ、金属リードフレームを溶接して陽極部とする。固体電解コンデンサ素子の陽極部および陰極部をそれぞれ電極基板10の外部陽極端子9および外部陰極端子11と電気的に接続し、固体電解コンデンサの実装用端子とする。次に電極基板と接続していないコンデンサ素子の露出部をエポキシ樹脂でモールドすることにより、固体電解コンデンサを形成している(例えば特許文献1参照)。   As an example of a conventional solid electrolytic capacitor using a conductive polymer as a solid electrolyte, the production of an aluminum solid electrolytic capacitor having a flat element structure will be described with reference to the drawings. FIG. 2 is a view showing a conventional solid electrolytic capacitor, FIG. 2 (a) is a perspective view, and FIG. 2 (b) is a cross-sectional view taken along line AA of FIG. 2 (a). First, an anodic oxide film, which is an insulating film, is formed by anodic oxidation on the surface of an aluminum substrate 1 made of flat plate-like aluminum having a porous portion 2 whose both surfaces are made porous. Next, an insulating layer 4 is formed of epoxy resin or the like at a predetermined position of the anodized film to divide the aluminum base into two regions, that is, an anode region and a cathode region, and one cathode portion of the regions The solid electrolyte layer 5 made of a conductive polymer is formed only in the region. Further, a graphite layer 6 is formed on the solid electrolyte layer 5 by screen printing or the like, and a conductive paste layer 7 is further formed on the graphite layer 6 to form a cathode portion. On the other hand, in the anode region, which is another region divided by the insulator layer 4, the aluminum substrate 1 is exposed by peeling the anodized film or the like, and the metal lead frame is welded to form the anode portion. The anode part and the cathode part of the solid electrolytic capacitor element are electrically connected to the external anode terminal 9 and the external cathode terminal 11 of the electrode substrate 10, respectively, to serve as mounting terminals for the solid electrolytic capacitor. Next, the solid electrolytic capacitor is formed by molding the exposed portion of the capacitor element not connected to the electrode substrate with an epoxy resin (see, for example, Patent Document 1).

導電性高分子を電解質とする固体電解コンデンサでは等価直列抵抗(以降、ESRと呼称)が低いため、低周波領域におけるインピーダンスは十分に低いが、このコンデンサを高周波駆動の回路に適用するためには、高周波領域におけるインピーダンスも同時に低減させる必要がある。しかし固体電解コンデンサでは、素子の内部構成が原因でコンデンサ内部での電極の配線回路の引き回し長さが増加してしまい、これが原因となって等価直列インダクタンス(以降、ESLと呼称)が大きくなり、高周波領域でのインピーダンスが相対的に増大するという問題があった。   A solid electrolytic capacitor using a conductive polymer as an electrolyte has a low equivalent series resistance (hereinafter referred to as ESR). Therefore, the impedance in a low frequency region is sufficiently low. However, in order to apply this capacitor to a high frequency driving circuit, It is also necessary to reduce the impedance in the high frequency region at the same time. However, in the solid electrolytic capacitor, the wiring length of the electrode wiring circuit inside the capacitor is increased due to the internal configuration of the element, which causes an increase in equivalent series inductance (hereinafter referred to as ESL), There has been a problem that the impedance in the high frequency region is relatively increased.

この解決策として、第一にコンデンサの形状自体を小型にすることで電極の配線回路の引き回し長さを減少させる方法が挙げられる。しかし、従来の固体電解コンデンサの製造技術では積層セラミックコンデンサと比較して陰極部の体積効率が劣るため、積層セラミックコンデンサより小型の形状の固体電解コンデンサを実現することは容量やESR等の特性面で難しく、また、従来の形状の固体電解コンデンサでは高周波領域でのインピーダンスが積層セラミックコンデンサと比較して高くなってしまう。   As a solution, firstly, there is a method of reducing the length of the wiring circuit of the electrode by reducing the size of the capacitor itself. However, since the volume efficiency of the cathode part is inferior to the multilayer ceramic capacitor in conventional solid electrolytic capacitor manufacturing technology, realizing a solid electrolytic capacitor with a smaller shape than the multilayer ceramic capacitor is a characteristic aspect such as capacity and ESR. In addition, a solid electrolytic capacitor having a conventional shape has a higher impedance in a high frequency region than a multilayer ceramic capacitor.

従来の大きさの固体電解コンデンサを用い、積層セラミックコンデンサよりESLを小さくする方法として、多端子構造のコンデンサが提案されている。多端子構造のコンデンサはコンデンサの種別に依らずにそのESLの低下に効果がある方法である。コンデンサの陽極部および陰極部と外部との電気的な接点として、それぞれ複数の外部陽極端子および外部陰極端子を埋め込んだ形状の電極基板を設けておき、コンデンサ内の陰極部および陽極部をこの電極基板上の外部電極端子に電気的に接続してそれぞれ外部への接続端子とする。これによって外部陽極端子と外部陰極端子の間に生じる電流ループを多くすることができ、高周波領域におけるESLの低減を図ることができる。   A capacitor having a multi-terminal structure has been proposed as a method of using a solid electrolytic capacitor having a conventional size and making the ESL smaller than that of a multilayer ceramic capacitor. A capacitor having a multi-terminal structure is effective in reducing the ESL regardless of the type of capacitor. As an electrical contact between the anode part and cathode part of the capacitor and the outside, an electrode substrate in which a plurality of external anode terminals and external cathode terminals are embedded is provided, and the cathode part and anode part in the capacitor are connected to this electrode. Electrically connected to external electrode terminals on the substrate to be externally connected terminals. As a result, the current loop generated between the external anode terminal and the external cathode terminal can be increased, and the ESL can be reduced in the high frequency region.

また、半導体を直接バンプで接続できる高周波応答性の優れた固体電解コンデンサが特許文献2に開示されている。   Further, Patent Document 2 discloses a solid electrolytic capacitor excellent in high-frequency response that allows semiconductors to be directly connected by bumps.

特開2008−91806号公報JP 2008-91806 A 特開2001−307955号公報JP 2001-307955 A

前述の特許文献2等に開示されたそれぞれの固体電解コンデンサに関する技術を使用することができれば、固体電解コンデンサのより一層の低ESL化を実現できると考えられる。しかし、この技術は電極部の形成方法が複雑であり、従来の形状の固体電解コンデンサ素子に適用することは難しい。即ち、本発明の課題は高周波領域で低インピーダンスを実現する固体電解コンデンサを提供することにある。   If the technology relating to each solid electrolytic capacitor disclosed in Patent Document 2 and the like described above can be used, it is considered that further reduction in ESL of the solid electrolytic capacitor can be realized. However, this technique involves a complicated method for forming an electrode portion, and is difficult to apply to a conventional solid electrolytic capacitor element. That is, the subject of this invention is providing the solid electrolytic capacitor which implement | achieves low impedance in a high frequency area | region.

本発明は固体電解コンデンサの高周波数領域で低インピーダンス化を実現するため、従来の形状の固体電解コンデンサ素子を用い、固体電解コンデンサ素子の外部電極端子(外部陽極端子及び外部陰極端子)側の厚みを薄くすることでコンデンサ素子と外部電極端子の間の配線回路の引き回し長さを減少させ、それによりESLの低減が実現されることを見出したものである。   In order to achieve low impedance in the high frequency region of the solid electrolytic capacitor, the present invention uses a solid electrolytic capacitor element having a conventional shape and has a thickness on the external electrode terminal (external anode terminal and external cathode terminal) side of the solid electrolytic capacitor element. It has been found that by reducing the thickness of the wiring circuit, the routing length of the wiring circuit between the capacitor element and the external electrode terminal is reduced, thereby reducing the ESL.

本発明の固体電解コンデンサは、表面の多孔質部と裏面の平滑部を有する平板状弁作用金属の表裏面に陽極酸化皮膜を形成し、前記陽極酸化皮膜上に形成した絶縁体層により陽極部領域と陰極部領域に分割し、前記陰極部領域の陽極酸化皮膜上に固体電解質層、グラファイト層、導電性ペースト層を順に形成し陰極部とし、前記陽極部領域の裏面の陽極酸化皮膜を除去し導電性部材を接続し陽極部とし、前記陽極部と陽極外部端子、および裏面の陰極部と陰極外部端子をそれぞれ接続したことを特徴とする。   The solid electrolytic capacitor of the present invention is formed by forming an anodic oxide film on the front and back surfaces of a flat valve-acting metal having a porous portion on the front surface and a smooth portion on the back surface, and an anode portion by an insulator layer formed on the anodic oxide film. Divided into an area and a cathode part area, a solid electrolyte layer, a graphite layer, and a conductive paste layer are formed in order on the anodized film in the cathode part area to form a cathode part, and the anodized film on the back surface of the anode part area is removed. Then, a conductive member is connected to form an anode portion, and the anode portion and the anode external terminal, and the cathode portion on the back surface and the cathode external terminal are connected to each other.

本発明によれば、固体電解コンデンサ素子と電極基板の間に多孔質部を形成しない構成をとることにより、アルミニウム基体と電極基板の間の配線回路の引き回し長さを多孔質部の厚み分だけ短くすることが可能となり、それにより配線回路の引き回し長さを減少させ、それによってESLを低減する。よって、本発明を実施することにより高周波数領域において低インピーダンスの固体電解コンデンサが実現される。   According to the present invention, by adopting a configuration in which the porous portion is not formed between the solid electrolytic capacitor element and the electrode substrate, the length of the wiring circuit between the aluminum base and the electrode substrate is set to the thickness of the porous portion. It can be shortened, thereby reducing the routing length of the wiring circuit, thereby reducing ESL. Therefore, by implementing the present invention, a solid electrolytic capacitor having a low impedance in a high frequency region is realized.

本発明の実施の形態による固体電解コンデンサについて、図面に基づいてその構成を説明する。図1は本発明の固体電解コンデンサを示す図であり、図1(a)は斜視図、図1(b)は図1(a)のA−Aにおける断面図である。   A configuration of a solid electrolytic capacitor according to an embodiment of the present invention will be described with reference to the drawings. FIG. 1 is a view showing a solid electrolytic capacitor of the present invention, FIG. 1 (a) is a perspective view, and FIG. 1 (b) is a sectional view taken along line AA of FIG. 1 (a).

図1において、アルミニウム基体1は長方形の平板状アルミニウム箔からなり、その一方の面(表面)はエッチングにより多孔質部2が形成されており、他方の面(裏面)は多孔質化が形成されておらず平滑部3である。このアルミニウム基体1の両面は陽極酸化により陽極酸化皮膜(図示省略)が形成されている。次いで陽極酸化皮膜上の所定の位置にエポキシ樹脂などにより幅の狭い絶縁体層4を形成してアルミニウム基体1を陽極部領域と陰極部領域の2つの領域に区分し、前記領域のうちの陰極部領域のみに導電性高分子からなる固体電解質層5、グラファイト層6、導電性ペースト層7を形成して陰極部を構成している。平滑部3側すなわち裏面の絶縁体層4を介して陰極部が形成されていない位置すなわち陽極部領域のアルミニウム基体に溶接により直方体状の金属リードフレームからなる導電性部材8が設けられており陽極部が形成されている。導電性部材8は銅箔などの金属部材からなり、固体電解コンデンサの底面に設けられる外部陽極端子9とアルミニウム基体1との間の陽極の電気的接続を行う役割を有している。なおアルミニウム基体1と導電性部材8の接続部では陽極酸化被膜が剥離されており、両者は超音波溶接によって接続することが可能となっている。次に固体電解コンデンサ素子の導電性部材8と電極基板10の外部陽極端子9、裏面の導電性ペースト層7と外部陰極端子11をそれぞれ導電性接着剤12で電気的に接続し、固体電解コンデンサの電子回路における実装面を形成した。   In FIG. 1, an aluminum substrate 1 is made of a rectangular flat aluminum foil, and one surface (front surface) is formed with a porous portion 2 by etching, and the other surface (back surface) is made porous. It is not the smooth part 3. Anodized films (not shown) are formed on both surfaces of the aluminum substrate 1 by anodic oxidation. Next, an insulating layer 4 having a narrow width is formed at a predetermined position on the anodized film by using an epoxy resin or the like to divide the aluminum substrate 1 into two regions, ie, an anode region and a cathode region. A cathode part is formed by forming a solid electrolyte layer 5, a graphite layer 6, and a conductive paste layer 7 made of a conductive polymer only in the partial region. A conductive member 8 composed of a rectangular parallelepiped metal lead frame is provided by welding to an aluminum base in a position where the cathode portion is not formed, that is, the anode portion region, through the insulating layer 4 on the smooth portion 3 side, that is, the back surface. The part is formed. The conductive member 8 is made of a metal member such as a copper foil, and has a role of electrically connecting the anode between the external anode terminal 9 provided on the bottom surface of the solid electrolytic capacitor and the aluminum substrate 1. The anodized film is peeled off at the connection portion between the aluminum substrate 1 and the conductive member 8, and both can be connected by ultrasonic welding. Next, the conductive member 8 of the solid electrolytic capacitor element and the external anode terminal 9 of the electrode substrate 10, the conductive paste layer 7 on the back surface and the external cathode terminal 11 are electrically connected with the conductive adhesive 12, respectively. The mounting surface in the electronic circuit was formed.

次に、実装面以外の固体電解コンデンサ素子の露出部をモールド樹脂13で覆い、外装を行うことで固体電解コンデンサを形成した。なおここでは片側の端部に陽極部を設けたが両側の端部に陽極部を設けることもできる。また、電極基板を用いずに導電性部材と外部陽極端子、導電性ペースト層と外部陰極端子を接続することもできる。   Next, the solid electrolytic capacitor was formed by covering the exposed portion of the solid electrolytic capacitor element other than the mounting surface with the mold resin 13 and performing the exterior. Although the anode portion is provided at one end portion here, the anode portion may be provided at both end portions. Further, the conductive member and the external anode terminal, and the conductive paste layer and the external cathode terminal can be connected without using the electrode substrate.

実施例について図1を参照して説明する。前記発明の実施の形態に係る固体電解コンデンサを以下の方法にて作製し、その電気的特性や形状を測定した。まず平板状のアルミニウム基体1の一方の面(裏面)にフォトレジストを塗布してマスキングとし、その後エッチング液に浸漬しフォトレジストのマスキング部以外の表面に多孔質部2を形成し、次にフォトレジストの被覆部を露光して除去し多孔質が形成されていない裏面を平滑部3とした。次にアルミニウム基体1の表裏面を陽極酸化により陽極酸化皮膜を形成した。ここで平板状のアルミニウム基体1に陽極酸化皮膜を形成する上での公称化成電圧が4V、単位面積(cm2)あたりの静電容量が150μFである。ここで、アルミニウム基体1と多孔質部をあわせた全体の厚みは100μmであり、その内訳としてアルミニウム基体1の厚みは40μm、多孔質部2の厚みは60μmである。この平板状のアルミニウム基体1を幅2.0mm、長さ4.0mmの直方体状に切り出し、長さ方向の一端部から幅方向に2.0mm、長さ方向に3.0mmの長方形の領域を陰極部を形成する陰極部領域とし、陰極部が形成されていない側の長さ方向の端部から幅方向2.0mm、長さ方向に0.5mmの長方形の領域を陽極部を形成する陽極部領域とした。次に、陽極部領域と陰極部陽域の間を電気的に絶縁するために、陽極部領域と陰極部領域の間に絶縁体層4の幅が0.5mm、厚さが15μmになるようにエポキシ樹脂をスクリーン印刷して形成した。次に、アルミニウム基体1の両面の陰極部領域の陽極酸化皮膜上に、モノマーとして3、4−エチレンジオキシチオフェン、酸化剤としてペルオキソ二硫酸アンモニウム、ドーパントとしてパラトルエンスルホン酸を、それぞれモル比が1:1:2の割合で反応させて導電性高分子からなる固体電解質層5を形成し、さらにその上にスクリーン印刷によってグラファイト層6を厚み25μmになるように形成し、さらにその上に80wt%以上の銀含有量を有した導電性ペースト層7を厚さ40μmに形成した。 An embodiment will be described with reference to FIG. The solid electrolytic capacitor according to the embodiment of the present invention was manufactured by the following method, and its electrical characteristics and shape were measured. First, a photoresist is applied to one surface (back surface) of the flat aluminum substrate 1 for masking, and then immersed in an etching solution to form a porous portion 2 on the surface other than the masking portion of the photoresist. The covered portion of the resist was exposed and removed, and the back surface where the porous material was not formed was defined as the smooth portion 3. Next, an anodized film was formed on the front and back surfaces of the aluminum substrate 1 by anodic oxidation. Here, the nominal formation voltage for forming the anodized film on the flat aluminum substrate 1 is 4 V, and the capacitance per unit area (cm 2 ) is 150 μF. Here, the total thickness of the aluminum substrate 1 and the porous portion is 100 μm, and as a breakdown, the thickness of the aluminum substrate 1 is 40 μm and the thickness of the porous portion 2 is 60 μm. This flat aluminum substrate 1 is cut into a rectangular parallelepiped shape having a width of 2.0 mm and a length of 4.0 mm, and a rectangular region of 2.0 mm in the width direction and 3.0 mm in the length direction is formed from one end portion in the length direction. A cathode part forming the cathode part, and a rectangular area of 2.0 mm in the width direction and 0.5 mm in the length direction from the end in the length direction on the side where the cathode part is not formed. A partial area. Next, in order to electrically insulate between the anode region and the cathode region, the width of the insulator layer 4 is 0.5 mm and the thickness is 15 μm between the anode region and the cathode region. An epoxy resin was formed by screen printing. Next, on the anodized film in the cathode region on both surfaces of the aluminum substrate 1, 3,4-ethylenedioxythiophene as a monomer, ammonium peroxodisulfate as an oxidant, and paratoluenesulfonic acid as a dopant have a molar ratio of 1 respectively. A solid electrolyte layer 5 made of a conductive polymer is formed by reaction at a ratio of 1: 2, and a graphite layer 6 is further formed thereon to a thickness of 25 μm by screen printing, and further 80 wt% on the graphite layer 6. The conductive paste layer 7 having the above silver content was formed to a thickness of 40 μm.

次に、平滑部3側の裏面の陽極部上に両面にあらかじめニッケルと銀メッキを施した銅箔からなる導電性部材8を固定し、超音波溶接を用いて導電性部材8と陽極部のアルミニウム基体1間を電気的に接続し、コンデンサ素子の陽極部の導通を可能とした。   Next, the conductive member 8 made of copper foil that has been plated with nickel and silver on both sides is fixed on the anode portion on the back surface on the smooth portion 3 side, and the conductive member 8 and the anode portion are bonded using ultrasonic welding. The aluminum bases 1 were electrically connected to enable conduction of the anode part of the capacitor element.

次に、回路基板実装用の電極基板10の外部陽極端子9と外部陰極端子11を、平滑部3側の陽極部および陰極部を構成する導電性部材8と導電性ペースト層7に、それぞれ導電性接着剤12により電気的に接合した。   Next, the external anode terminal 9 and the external cathode terminal 11 of the electrode substrate 10 for circuit board mounting are respectively conducted to the conductive member 8 and the conductive paste layer 7 constituting the anode part and the cathode part on the smoothing part 3 side. Electrically bonded with the adhesive 12.

次に、電極基板10と接続していない固体電解コンデンサ素子の露出部全体をエポキシ樹脂からなるモールド樹脂13によって覆い、200℃で熱処理を行うことにより樹脂を硬化し、固体電解コンデンサを作製した。この方法による固体電解コンデンサの作製数は30個とした。   Next, the entire exposed portion of the solid electrolytic capacitor element not connected to the electrode substrate 10 was covered with a mold resin 13 made of an epoxy resin, and the resin was cured by heat treatment at 200 ° C., thereby producing a solid electrolytic capacitor. The number of solid electrolytic capacitors produced by this method was 30.

作製した30個の固体電解コンデンサについて電気特性や形状を測定した。測定項目は、静電容量、ESR、漏れ電流、ESL、製品厚みの5項目で測定を行った。静電容量およびESRは、いずれも交流インピーダンスブリッジ法により測定している。このうち静電容量の測定条件は、印加した基準信号の周波数が120Hz、電圧が1Vrmsで、DCバイアスを0Vとした。一方ESRは印加した基準信号の周波数を1MHz、電圧が1Vrms、DCバイアスは0Vとしている。また、漏れ電流については固体電解コンデンサの定格電圧である2.5Vの信号を印加し、1分後の値を測定した。固体電解コンデンサを所定の評価基板にはんだ付けにより接合して、ネットワークアナライザを用いて100MHzにおけるS21特性(伝達特性)を測定し、その結果をもとに等価回路のシミュレーションを行うことにより算出した。作製した30個の固体電解コンデンサの各特性の平均値を表1の実施例に示す。   The electrical characteristics and shape of the produced 30 solid electrolytic capacitors were measured. The measurement items were five items of capacitance, ESR, leakage current, ESL, and product thickness. Capacitance and ESR are both measured by the AC impedance bridge method. Among these, the measurement conditions of the capacitance were that the frequency of the applied reference signal was 120 Hz, the voltage was 1 Vrms, and the DC bias was 0V. On the other hand, in ESR, the frequency of the applied reference signal is 1 MHz, the voltage is 1 Vrms, and the DC bias is 0V. As for leakage current, a signal of 2.5 V, which is the rated voltage of the solid electrolytic capacitor, was applied, and the value after 1 minute was measured. The solid electrolytic capacitor was joined to a predetermined evaluation board by soldering, and the S21 characteristic (transfer characteristic) at 100 MHz was measured using a network analyzer, and the equivalent circuit was simulated based on the result. The average value of each characteristic of the produced 30 solid electrolytic capacitors is shown in the examples of Table 1.

(比較例)
比較例として固体電解コンデンサ素子の平板状のアルミニウム基体の両面に多孔質部を形成した従来の固体電解コンデンサの作製方法を図2の従来の固体電解コンデンサの図面を参照して示す。
(Comparative example)
As a comparative example, a method for producing a conventional solid electrolytic capacitor in which porous portions are formed on both surfaces of a flat aluminum substrate of a solid electrolytic capacitor element will be described with reference to the drawing of the conventional solid electrolytic capacitor in FIG.

まず平板状のアルミニウム基体1のエッチング処理を行い、両面に多孔質部2を設けたアルミニウム基体1を用いて実施例と同様に固体電解コンデンサ素子として作製した。ここで用いた平板状のアルミニウム基体1は表面に陽極酸化皮膜を形成する上での公称化成電圧が4V、単位面積(cm2)あたりの静電容量が150μFである。ここで、アルミニウム基体1と多孔質部をあわせた全体の厚みは100μmであり、その内訳としてアルミニウム基体1の厚みは40μm、多孔質部の厚みは片側で30μm、両側で60μmである。固体電解コンデンサ素子の多孔質部2の陽極部、陰極部をそれぞれ電極基板10の外部陽極端子9、外部陰極端子11と接続した。その後、固体電解コンデンサ素子の露出部をモールド樹脂13で覆い、固体電解コンデンサを形成した。この方法による固体電解コンデンサの作製数は30個とした。また、電気特性や形状の測定は実施例と同様にし、作製した30個の固体電解コンデンサの各特性の平均値を表1の比較例に示す。 First, the flat aluminum substrate 1 was etched, and a solid electrolytic capacitor element was produced in the same manner as in the example using the aluminum substrate 1 provided with the porous portions 2 on both sides. The flat aluminum substrate 1 used here has a nominal chemical formation voltage of 4 V and an electrostatic capacity per unit area (cm 2 ) of 150 μF for forming an anodized film on the surface. Here, the total thickness of the aluminum substrate 1 and the porous portion is 100 μm. As a breakdown, the thickness of the aluminum substrate 1 is 40 μm, the thickness of the porous portion is 30 μm on one side, and 60 μm on both sides. The anode part and the cathode part of the porous part 2 of the solid electrolytic capacitor element were connected to the external anode terminal 9 and the external cathode terminal 11 of the electrode substrate 10, respectively. Thereafter, the exposed portion of the solid electrolytic capacitor element was covered with a mold resin 13 to form a solid electrolytic capacitor. The number of solid electrolytic capacitors produced by this method was 30. In addition, the measurement of electrical characteristics and shape is the same as in the example, and the average value of each characteristic of the 30 solid electrolytic capacitors produced is shown in the comparative example of Table 1.

Figure 2010040960
Figure 2010040960

表1より、実施例は比較例よりESLが低減していることが分かる。   From Table 1, it can be seen that the ESL is lower in the example than in the comparative example.

上記の結果は、固体電解コンデンサ素子の外部電極端子(外部陽極端子9及び外部陰極端子11)側の面に多孔質部2を設けないことにより、比較例より多孔質部2の厚み30μmが陽極部及び陰極部でそれぞれ薄くなり、電極の配線回路の引き回し長さを減少させ、ESLを低減することが可能となる。   The above results show that the porous part 2 is not provided on the surface of the solid electrolytic capacitor element on the external electrode terminal (external anode terminal 9 and external cathode terminal 11) side, so that the thickness of the porous part 2 is 30 μm from the comparative example. It is possible to reduce the ESL by reducing the length of the wiring circuit of the electrode by reducing the thickness of the electrode portion and the cathode portion.

以上示したように、本発明の固体電解コンデンサによれば、固体電解コンデンサ素子と電極基板10の間に多孔質部2を形成しない構成をとることにより、アルミニウム基体1と電極基板10の間の配線回路の引き回し長さを多孔質部2の厚み分だけ短くすることが可能となり、それにより配線回路の引き回し長さを減少させ、それによってESLを低減する。よって、本発明を実施することにより低インピーダンスの固体電解コンデンサが実現される。   As described above, according to the solid electrolytic capacitor of the present invention, the porous portion 2 is not formed between the solid electrolytic capacitor element and the electrode substrate 10, so that the space between the aluminum substrate 1 and the electrode substrate 10 can be reduced. The routing length of the wiring circuit can be shortened by the thickness of the porous portion 2, thereby reducing the routing length of the wiring circuit and thereby reducing the ESL. Therefore, by implementing the present invention, a low impedance solid electrolytic capacitor is realized.

本発明の固体電解コンデンサを示す図、図1(a)は斜視図、図1(b)は図1(a)のA−A線の断面図。The figure which shows the solid electrolytic capacitor of this invention, Fig.1 (a) is a perspective view, FIG.1 (b) is sectional drawing of the AA line of Fig.1 (a). 従来の固体電解コンデンサを示す図。図2(a)は斜視図、図2(b)は図2(a)のA−A線の断面図。The figure which shows the conventional solid electrolytic capacitor. 2A is a perspective view, and FIG. 2B is a cross-sectional view taken along line AA in FIG. 2A.

符号の説明Explanation of symbols

1 アルミニウム基体
2 多孔質部
3 平滑部
4 絶縁体層
5 固体電解質層
6 グラファイト層
7 導電性ペースト層
8 導電性部材
9 外部陽極端子
10 電極基板
11 外部陰極端子
12 導電性接着剤
13 モールド樹脂
DESCRIPTION OF SYMBOLS 1 Aluminum base body 2 Porous part 3 Smooth part 4 Insulator layer 5 Solid electrolyte layer 6 Graphite layer 7 Conductive paste layer 8 Conductive member 9 External anode terminal 10 Electrode substrate 11 External cathode terminal 12 Conductive adhesive 13 Mold resin

Claims (1)

表面の多孔質部と裏面の平滑部を有する平板状弁作用金属の表裏面に陽極酸化皮膜を形成し、前記陽極酸化皮膜上に形成した絶縁体層により陽極部領域と陰極部領域に分割し、前記陰極部領域の陽極酸化皮膜上に固体電解質層、グラファイト層、導電性ペースト層を順に形成し陰極部とし、前記陽極部領域の裏面の陽極酸化皮膜を除去し導電性部材を接続し陽極部とし、前記陽極部と陽極外部端子、および裏面の陰極部と陰極外部端子をそれぞれ接続したことを特徴とする固体電解コンデンサ。   An anodized film is formed on the front and back surfaces of a flat valve action metal having a porous portion on the front surface and a smooth portion on the back surface, and divided into an anode region and a cathode region by an insulating layer formed on the anodized film. Then, a solid electrolyte layer, a graphite layer, and a conductive paste layer are sequentially formed on the anodic oxide film in the cathode part region to form a cathode part, and the anodic oxide film on the back surface of the anode part area is removed and a conductive member is connected to form an anode. The solid electrolytic capacitor is characterized in that the anode part and the anode external terminal, and the cathode part on the back surface and the cathode external terminal are connected to each other.
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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2021158172A (en) * 2020-03-26 2021-10-07 ニチコン株式会社 Aluminum foil with surface fine structure, and manufacturing method thereof
WO2023032603A1 (en) * 2021-08-30 2023-03-09 パナソニックIpマネジメント株式会社 Electrode foil for solid electrolytic capacitors, solid electrolytic capacitor element using same, and solid electrolytic capacitor

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JP2005045007A (en) * 2003-07-22 2005-02-17 Matsushita Electric Ind Co Ltd Solid electrolytic capacitor and manufacturing method thereof
JP2008004744A (en) * 2006-06-22 2008-01-10 Nec Tokin Corp Manufacturing method of solid electrolytic capacitor
JP2008078543A (en) * 2006-09-25 2008-04-03 Nec Tokin Corp Three-terminal type solid electrolytic capacitor

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JP2005045007A (en) * 2003-07-22 2005-02-17 Matsushita Electric Ind Co Ltd Solid electrolytic capacitor and manufacturing method thereof
JP2008004744A (en) * 2006-06-22 2008-01-10 Nec Tokin Corp Manufacturing method of solid electrolytic capacitor
JP2008078543A (en) * 2006-09-25 2008-04-03 Nec Tokin Corp Three-terminal type solid electrolytic capacitor

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2021158172A (en) * 2020-03-26 2021-10-07 ニチコン株式会社 Aluminum foil with surface fine structure, and manufacturing method thereof
JP7519197B2 (en) 2020-03-26 2024-07-19 ニチコン株式会社 Aluminum foil having a microstructured surface and its manufacturing method
WO2023032603A1 (en) * 2021-08-30 2023-03-09 パナソニックIpマネジメント株式会社 Electrode foil for solid electrolytic capacitors, solid electrolytic capacitor element using same, and solid electrolytic capacitor

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