JP2009190077A - Bonding quality inspection method and bonding quality inspection device - Google Patents

Abstract

A bonding quality inspection method and a bonding quality inspection apparatus capable of accurately determining the quality of a bonded state of workpieces are provided.
A bonding quality inspection method of the present invention includes a calculation stage and a judgment stage. The calculation step is based on the internal data of the ultrasonic welding device that presses the vibrating horn and ultrasonically welds the workpiece. The maximum value of the horn moved in the pressing direction while the workpiece is ultrasonically bonded, At least two characteristic values are calculated from the sum of the power supplied to the vibrator and the maximum value of the power. In the determination step, the quality of the bonded state of the ultrasonically bonded workpiece is determined based on the calculated at least two characteristic values.
[Selection] Figure 5

Description

  The present invention relates to a bonding quality inspection method and a bonding quality inspection apparatus. In particular, the present invention relates to a bonding quality inspection method and a bonding quality inspection apparatus for determining the quality of a bonded state of ultrasonically bonded workpieces.

  In ultrasonic bonding, for example, two metal plates are sandwiched between a horn and an anvil and pressed, and ultrasonic vibrations are applied in parallel to the contact surface, thereby solid-phase bonding these metal plates. is there.

As a technique for evaluating the joining state of two metal plates subjected to ultrasonic bonding, a quality determination method shown in Patent Document 1 below is known. In the quality determination method disclosed in Patent Document 1, the temperature or amplitude of the bonded metal plates is measured, and the measured temperature or amplitude data is compared with a predetermined reference value to determine the quality of the bonded state. Is determined.
JP 2000-202644 A

  However, in the above quality determination method, the temperature or amplitude data used to determine the quality of the bonded state is easily affected by disturbances such as changes in temperature and floor vibration, so that there is a problem that the quality determination accuracy is low.

  The present invention has been made to solve the above-described problems. Accordingly, an object of the present invention is to provide a bonding quality inspection method and a bonding quality inspection apparatus that can accurately determine the quality of a workpiece bonding state.

  The above object of the present invention is achieved by the following means.

  The bonding quality inspection method of the present invention includes a calculation stage and a determination stage. In the calculation step, from the internal data of an ultrasonic bonding apparatus that ultrasonically bonds a workpiece by pressing a vibrating horn, the maximum value of the movement amount of the horn that has moved in the pressing direction while ultrasonically bonding the workpiece Then, at least two characteristic numerical values are calculated among the sum of the electric power supplied to the vibrator of the horn and the maximum value of the electric power. In the determination step, the quality of the bonded state of the ultrasonically bonded workpiece is determined based on the calculated at least two characteristic values.

  The joining quality inspection device of the present invention has a calculating means and a judging means. The calculation means is based on the internal data of an ultrasonic bonding apparatus for ultrasonically bonding a workpiece by pressing a vibrating horn, and the maximum value of the moving amount of the horn that has moved in the pressing direction while ultrasonically bonding the workpiece. Then, at least two characteristic numerical values are calculated among the sum of the electric power supplied to the vibrator of the horn and the maximum value of the electric power. The determination means determines the quality of the bonded state of the ultrasonically bonded workpiece based on the calculated at least two characteristic values.

  According to the joining quality inspection method and the joining quality inspection device of the present invention, since the quality of the workpiece joining state is judged based on at least two characteristic values that are not easily affected by disturbance, the joining state quality is accurately determined. can do.

  Embodiments of the present invention will be described below with reference to the drawings. In addition, the same code | symbol was used for the same member in the figure.

(First embodiment)
FIG. 1 is a diagram showing a schematic configuration of an ultrasonic bonding system to which the bonding quality inspection apparatus according to the first embodiment of the present invention is applied. As shown in FIG. 1, the ultrasonic bonding system in the present embodiment includes an ultrasonic bonding apparatus 100 and a bonding quality inspection apparatus 200. The ultrasonic bonding apparatus 100 includes an ultrasonic bonding machine 110 and a control unit 120, and the bonding quality inspection apparatus 200 is electrically connected to the control unit 120.

  The ultrasonic bonding machine 110 ultrasonically bonds a workpiece by pressing a vibrating horn 112 against a workpiece (for example, two metal plates) placed on the anvil 111, and is controlled by the control unit 120. Is done. The joining quality inspection device 200 acquires internal data generated in time series in the ultrasonic joining device 100 while the ultrasonic joining device 100 ultrasonically joins the workpieces, and joins the workpieces ultrasonically joined. This is to judge whether the state is good or bad.

  FIG. 2 is a block diagram showing a schematic configuration of the ultrasonic bonding system according to the present embodiment. As shown in FIG. 2, the ultrasonic bonding machine 110 includes an anvil 111 on which a work is placed, and a horn 112 that is pressed against the work placed on the anvil 111 to impart vibration. The horn 112 is coupled to the vibrator 113 and vibrates with a predetermined amplitude and frequency, and is pressed against the workpiece with a predetermined pressure by a pressurizing mechanism 114 such as an air cylinder. The displacement in the vertical direction of the horn 112 pressed against the work is detected by the linear scale 115.

  The control unit 120 includes a control circuit 121, a power module 122, and a power monitor 123. The control circuit 121 is electrically connected to the vibrator 113 via the power module 122, and the output end of the power module 122 is electrically connected to the control circuit 121 via the power monitor 123. The control circuit 121 transmits a power command value to the power module 122, and the power module 122 supplies command power to the vibrator 113 based on the command value. The command power is detected by the power monitor 123 and fed back to the control circuit 121. The control circuit 121 is electrically connected to the pressurizing mechanism 114 and the linear scale 115. The control circuit 121 transmits a pressure command value to the pressurization mechanism 114, and the pressurization mechanism 114 pressurizes the horn 112 based on the command value.

  The bonding quality inspection device 200 is electrically connected to the control circuit 121 of the control unit 120 and acquires internal data from the ultrasonic bonding machine 110 via the control circuit 121. The joining quality inspection device 200 according to the present embodiment calculates three characteristic numerical values that are not easily affected by disturbance from internal data, and determines the quality of the joining state of the workpieces based on the calculated three characteristic numerical values. . In addition, the joining quality inspection apparatus 200 of this Embodiment is integrated in the monitoring terminal as one function of the monitoring terminal of the ultrasonic joining apparatus 100. FIG.

  Next, the joining quality inspection device 200 of the present embodiment will be described in detail. FIG. 3 is a block diagram showing a schematic configuration of the bonding quality inspection apparatus in the present embodiment.

  As shown in FIG. 3, the bonding quality inspection device 200 according to the present embodiment includes a CPU 210, a RAM 220, a ROM 230, a hard disk 240, an input unit 250, a display unit 260, and an interface 270. These units are connected to each other via a bus.

  The CPU 210 performs various calculations on the internal data of the ultrasonic bonding apparatus 100 and the like. The CPU 210 functions as a calculation unit (calculation unit) and a determination unit (determination unit).

  Here, the calculation unit calculates three characteristic values from the internal data of the ultrasonic bonding apparatus 100, and the determination unit is ultrasonically bonded based on the calculated three characteristic values. The quality of the joining state of the workpiece is determined. The specific processing contents of each unit will be described later.

  The RAM 220 temporarily stores the above-described internal data, and the ROM 230 stores a control program, parameters, and the like in advance.

  The hard disk 240 stores the above-described three characteristic numerical values. The hard disk 240 also calculates a calculation program for calculating three characteristic values from the internal data of the ultrasonic bonding apparatus 100, and determines the quality of the bonded state of the workpieces ultrasonically bonded based on the three characteristic values. Stores the judgment program.

  The input unit 250 is a pointing device such as a keyboard, a touch panel, and a mouse, for example. The display unit 260 is a liquid crystal display and a CRT display, for example.

  The interface 270 receives internal data transmitted from the ultrasonic bonding apparatus 100.

  In the joining quality inspection device 200 of the present embodiment configured as described above, first, three characteristic numerical values are calculated from the internal data of the ultrasonic joining device 100. Next, the quality of the bonded state of the ultrasonically bonded workpiece is determined based on the calculated three characteristic numerical values. Hereinafter, the processing content of the joining quality inspection apparatus 200 will be described in detail.

First, with reference to FIG. 4, three characteristic numerical values used for quality determination of the bonded state of the workpiece in the present embodiment will be described. The bonding quality inspection method of this embodiment determines the quality of the workpiece bonding state using three characteristic numerical values that are not easily affected by disturbance. FIG. 4 is a diagram showing internal data of the ultrasonic bonding apparatus 100 generated in time series while the workpiece is ultrasonically bonded. The solid line in FIG. 4A indicates the amount of movement of the horn 112 that moves in the pressing direction while the workpiece is ultrasonically bonded (hereinafter referred to as the amount of sinking), and the broken line indicates the vibration of the horn 112. The electric power (voltage x current) supplied to the child 113 is shown. As shown in FIG. 4A, the sinking amount of the horn 112 shows a saturation tendency after increasing as the oscillation time increases. In the present embodiment, the maximum value D _max of the sink amount of the horn 112 is used as the first characteristic numerical value that is not easily affected by the disturbance.

Further, as shown in FIG. 4B, the power supplied to the vibrator 113 while the workpiece is ultrasonically joined increases with an increase in the oscillation time and then shows a saturation tendency. In the present embodiment, as the second and third characteristic values that are not easily affected by disturbance, the time integral value E (total power) of the power supplied to the vibrator 113 while the workpiece is ultrasonically bonded is used. , Energy) and the maximum value P _max (peak power) of power supplied to the vibrator 113. Hereinafter, the bonding quality inspection method according to the present embodiment will be described with reference to FIGS. 5 and 6.

FIG. 5 is a flowchart showing the bonding quality inspection process in the present embodiment. In the present embodiment, the estimation is based on the maximum value D _max of the sinking amount of the horn 112, the time integral value E of the power supplied to the vibrator 113, and the maximum value P _{max of the} power supplied to the vibrator 113. The quality of the bonded state of the ultrasonically bonded workpiece is determined from the bonding strength of the workpiece. Further, in the present embodiment, as a pre-stage for determining whether the workpiece joining state is good or not, three characteristic features including a maximum amount D _{max of} subsidence, a time integral value E of power, and a maximum value P _{max of} power are used. A characteristic numerical value-joining strength relational expression indicating the relationship between the characteristic numerical value and the joining strength is calculated by multiple regression analysis using the numerical values as explanatory variables and the joining strength as an objective variable. Details of the process of calculating the characteristic numerical value-bonding strength relation will be described later.

  As shown in FIG. 5, in the joining quality inspection process of the present embodiment, first, internal data is acquired from the ultrasonic joining apparatus 100 (step S101). In the present embodiment, the bonding quality inspection device 200 acquires the outputs of the linear scale 115 and the power monitor 123 of the ultrasonic bonding device 100 as internal data via the interface 270.

Next, from the acquired internal data, the maximum value _Dmax of the sinking amount of the horn 112 while the workpiece is ultrasonically bonded is calculated (step S102). In the present embodiment, the CPU 210 calculates the maximum value D _max of the sink amount of the horn 112 from the output of the linear scale 115 acquired in the process shown in step S101.

  Next, the time integral value E of the electric power supplied to the vibrator 113 while the workpiece is ultrasonically bonded is calculated from the acquired internal data (step S103). In the present embodiment, the CPU 210 calculates the power time integral value E from the output of the power monitor 123 acquired in the process shown in step S101.

Next, from the acquired internal data, the maximum value P _{max of the} power supplied to the vibrator 113 while the workpiece is ultrasonically bonded is calculated (step S104). In the present embodiment, the CPU 210 calculates the maximum power value P _max from the output of the power monitor 123 acquired in the process shown in step S101.

  Next, an estimated value of the bonding strength of the ultrasonically bonded workpiece is calculated from the calculated three characteristic numerical values (step S105). In the present embodiment, three characteristics calculated by the processes shown in steps S102 to S104 are added to the characteristic numerical value-joint strength relational expression indicating the relation between the characteristic numerical value and the joint strength obtained in advance by the pre-evaluation process. By substituting the target numerical value, the CPU 210 calculates the estimated value of the bonding strength.

  Next, it is determined whether or not the estimated value of the bonding strength is greater than or equal to a lower limit reference value (step S106). In the present embodiment, CPU 210 compares the joint strength estimated value calculated in the process shown in step S105 with a preset lower limit reference value (for example, 5 kgf).

  If the estimated value of the bonding strength is less than the lower limit reference value (step S106: NO), it is determined that the bonded state of the ultrasonically bonded workpiece is defective (step S107), and the process is terminated. On the other hand, when the estimated value of the bonding strength is equal to or greater than the lower limit reference value (step S106: YES), it is determined that the bonded state of the ultrasonically bonded workpiece is good (step S108), and the process is terminated. The determination result of pass / fail is displayed on the display unit 260 of the bonding pass / fail inspection apparatus 200.

As described above, according to the process of the flowchart shown in FIG. 5, the maximum value D _{max of the} amount of subsidence that the horn 112 descends during ultrasonic bonding, the time integral value E of the power supplied to the vibrator 113, and the vibration Based on the maximum value P _max of the electric power supplied to the child 113, the joint strength of the workpiece is estimated. Then, based on the estimated joining strength, the quality of the joining state of the workpiece is determined. Hereinafter, a pre-evaluation process for calculating a characteristic numerical value-joining strength relational expression for calculating an estimated value of the joining strength will be described with reference to FIG.

  FIG. 6 is a flowchart for explaining the pre-evaluation processing in the present embodiment. In the pre-evaluation process of the present embodiment, a characteristic value-joining strength relationship for estimating joining strength by ultrasonic joining a plurality of work samples while changing joining conditions within a range that can occur in production. Calculate the formula.

  As shown in FIG. 6, in the pre-evaluation process in the present embodiment, first, joining conditions for ultrasonically joining the workpieces are set (step S201). In the present embodiment, the joining conditions such as the amplitude of the vibrator 113, the applied pressure, and the oscillation time are set through the control unit 120.

  Next, the workpiece is ultrasonically bonded under the set bonding conditions (step S202). In the present embodiment, the horn 112 pressed against the workpiece with the pressure set in the process shown in step S201 vibrates with the set amplitude to impart vibration to the workpiece, thereby ultrasonically joining the workpiece.

Next, three values consisting of the maximum value D _max of the sinking amount of the horn 112 during the ultrasonic bonding of the workpiece, the time integral value E of the power supplied to the vibrator 113, and the maximum value P _{max of the} power. Characteristic numerical values are respectively calculated (steps S203 to S205). In the present embodiment, the CPU 210 calculates the three characteristic numerical values from the outputs of the linear scale 115 and the power monitor 123 of the ultrasonic bonding apparatus 100. The calculated three characteristic values are stored in the hard disk 240.

  Next, the bonding strength of the ultrasonically bonded workpiece is measured (step S206). In the present embodiment, the bonding strength of the ultrasonically bonded workpiece is measured by a tensile tester (not shown). The measured joint strength of the workpiece is stored in the hard disk 240.

  Then, it is determined whether or not ultrasonic bonding is completed under all bonding conditions (step S207). When the ultrasonic bonding is not completed in all the bonding conditions (step S207: NO), the processes in and after step S207 are repeated until the characteristic numerical values and the workpiece bonding strength are acquired in all the bonding conditions.

On the other hand, when ultrasonic bonding is completed under all bonding conditions (step S207: YES), based on the characteristic values and bonding strength acquired in the processes shown in steps S203 to S206, Is calculated (step S208), and the process ends. In the present embodiment, the CPU 210 calculates a characteristic numerical value-bonding strength relational expression by multiple regression analysis from characteristic values and bonding strengths calculated for a plurality of workpiece samples ultrasonically bonded under various bonding conditions. To do. Specifically, a multiple regression analysis with three characteristic values consisting of the maximum value D _max of the subsidence amount, the time integral value E of power, and the maximum value P _{max of} power as explanatory variables and the joint strength as an objective variable And Y = A + BX ₁ + CX ₂ + DX ₃ (where Y: junction strength, X ₁ : maximum amount of subtraction D _max , X ₂ : time integration value E of power, X ₃ : maximum value of power A multiple regression equation represented by P _max ) is calculated. Note that the multiple regression analysis itself for calculating a multiple regression equation from a plurality of data is a general statistical method, and thus detailed description thereof is omitted. The calculated multiple regression equation is stored in the hard disk 240.

As described above, according to the pre-evaluation process shown in the flowchart of FIG. 6, the maximum subsidence value D _max calculated for a plurality of works, the time integral value E of power, and the maximum value P _{max of} power Based on the measured value of the joint strength of the workpiece, a characteristic numerical value-joint strength relational expression is calculated. Then, based on the characteristic numerical value-joining strength relational expression (Y = A + BX ₁ + CX ₂ + DX ₃ ) calculated in the process of the flowchart shown in FIG. 6, the work from the three characteristic values in the process of the flowchart shown in FIG. An estimated value of the bonding strength is calculated.

  FIG. 7 is a diagram for explaining the operational effects in the bonding quality inspection process of the present embodiment.

  FIG. 7A is a diagram showing a correlation between the estimated value of the bonding strength and the actual measurement value of the bonding strength, and FIGS. 7B to 7D show the characteristic values and the actual measurement of the bonding strength. It is a figure which shows the correlation with a value, respectively.

  As shown in FIG. 7A, a very high correlation is seen between the estimated value of the bonding strength calculated in the present embodiment and the measured value of the bonding strength. Moreover, if FIG. 7 (A) is compared with FIG. 7 (B) to FIG. 7 (D), the correlation between the estimated value of the bonding strength calculated in the present embodiment and the actual measured value of the bonding strength is It can be seen that the correlation is higher than the correlation between the characteristic numerical value alone and the actual measurement value of the bonding strength. Therefore, according to the bonding quality inspection method of the present embodiment, since the bonding strength of the ultrasonically bonded work is estimated with high accuracy, it is possible to accurately determine the quality of the bonded state of the work.

  As described above, the described embodiment has the following effects.

  (A) The bonding quality inspection method of the present embodiment moves from the internal data of an ultrasonic bonding apparatus that presses a vibrating horn to ultrasonically bond a workpiece in the pressing direction while the workpiece is ultrasonically bonded. A stage for calculating three characteristic values consisting of a maximum value of the horn sinking amount, a time integral value of the power supplied to the horn vibrator, and a maximum value of the power, and the calculated three characteristic values And determining whether or not the joining state of the ultrasonically joined workpiece is good. Therefore, since the quality of the workpiece joining state is determined based on the three characteristic values that are not easily affected by the disturbance, it is possible to accurately determine the quality of the joining state.

  (B) The step of determining the quality of the bonded state of the workpiece includes calculating an estimated value of the bonding strength of the ultrasonically bonded workpiece from the calculated three characteristic values, and estimating the calculated bonding strength. A step of comparing the value with a lower limit reference value of the bonding strength, and a step of determining that the bonded state of the workpiece is good when the estimated value of the bonding strength is equal to or greater than the lower limit reference value. Therefore, the quality of the joining state of the workpieces can be determined by comparing the preset lower limit reference value with the estimated value of the joining strength. Further, since it is possible to know how far the estimated value of the bonding strength of the ultrasonically bonded workpiece is from the lower limit reference value, it is possible to know the degree of non-defective / defective products.

  (C) The joining quality inspection method of the present embodiment corresponds to the step of calculating three characteristic values for a plurality of workpieces, and the three characteristic values calculated for the plurality of workpieces. A step of calculating a characteristic numerical value-joint strength relational expression indicating a relationship with the joint strength of a plurality of workpieces, and the step of calculating an estimated value of the joint strength of the workpiece is characterized by a characteristic value-joint strength relationship Based on the equation, an estimated value of the joint strength of the workpiece is calculated from three characteristic numerical values. Therefore, the estimated value of the joint strength of the workpiece can be calculated from the three characteristic numerical values.

  (D) The step of calculating the characteristic numerical value-joint strength relational expression calculates the relational expression by multiple regression analysis using the three characteristic numerical values as explanatory variables and the joint strength as an objective variable. Therefore, the characteristic value-joining strength relational expression can be calculated by optimally combining the three characteristic values. As a result, the joining state of the workpieces can be determined with high accuracy.

  (E) The joining quality inspection device according to the present embodiment is a pressing direction while ultrasonically joining a workpiece from internal data acquired from an ultrasonic joining device that ultrasonically joins the workpiece by pressing a vibrating horn. Calculate at least two characteristic values among the maximum value of the sinking amount of the horn moving to the time, the time integral value of the power supplied to the vibrator that vibrates the horn, and the maximum value of the power supplied to the vibrator. And a determination unit that determines the quality of the bonded state of the ultrasonically bonded workpiece based on the calculated at least two characteristic values. Therefore, since the quality of the workpiece joining state is determined based on the three characteristic values that are not easily affected by the disturbance, it is possible to accurately determine the quality of the joining state.

(Second Embodiment)
Next, a second embodiment of the present invention will be described with reference to FIG.

  In the second embodiment, another characteristic value is added to the three characteristic values used for determining the bonding quality in the first embodiment to determine the bonding state. .

  As indicated by a broken line in FIG. 8, in the internal data of the ultrasonic bonding apparatus 100, the power-time curve indicating the relationship between the power supplied to the transducer 113 and time indicates that the power that increases as the oscillation time increases. It has a maximum when it shows a saturation tendency. Such a maximum point is considered to be a point in time when the solid-phase bonding of the workpiece is started. In the present embodiment, other characteristic numerical values that are not easily affected by the disturbance are calculated from the internal data until the power supplied to the vibrator 113 reaches the maximum point. Since it is the same as that of the first embodiment except that the quality of the bonded state of the workpieces ultrasonically bonded is determined using four characteristic numerical values, detailed description is omitted.

  As shown in FIG. 8, in the joining quality inspection method of the present embodiment, the time T1 until the power reaches the maximum point, the power value P1 when the power reaches the maximum point, and the time until the power reaches the maximum point. The inclination θ of the subtraction amount-time curve indicating the relationship between the subsidence amount D1 of the horn 112 or the subsidence amount of the horn 112 and the time until the electric power reaches the maximum point is set to be the fourth less susceptible to the influence of the disturbance. Calculated as a characteristic value. Here, the slope θ of the subsidence amount-time curve is calculated as, for example, the slope of the approximate straight line of the subsidence amount-time curve during a predetermined time until the power reaches the maximum point.

In the present embodiment, the maximum value D _max of the subsidence amount, the time integral value E of the power, and the maximum value P _{max of the} power, the fourth characteristic value described above, and the characteristic indicating the relationship between the bonding strength The quality of the bonded state of the workpiece is determined based on the numerical value-bonding strength relational expression. With such a configuration, the accuracy of determining whether the workpiece is joined or not is further improved.

  As described above, the present embodiment described has the following effects in addition to the effects of the first embodiment.

  (F) The bonding quality inspection method of the present embodiment further includes a step of calculating other characteristic numerical values from internal data until the power reaches the maximum point, and determines the quality of the workpiece bonding state. In the step of performing, the quality of the joining state of the workpiece is determined based on a characteristic value-joining strength relational expression indicating the relationship between other characteristic values, the three characteristic values, and the joining strength. Therefore, since characteristic numerical values that are not easily affected by disturbance are added, the accuracy of determining whether or not the workpiece is joined is further improved.

  (G) Another characteristic value is the time until the power reaches the maximum point. Therefore, it is possible to improve the accuracy of determining whether the workpiece is joined.

  (H) Another characteristic value is the value of power when the power reaches the maximum point. Therefore, it is possible to improve the accuracy of determining whether the workpiece is joined.

  (I) Another characteristic numerical value is the amount of subtraction of the horn until the electric power reaches the maximum point. Therefore, it is possible to improve the accuracy of determining whether the workpiece is joined.

  (J) Another characteristic numerical value is the slope of the subtraction amount-time curve showing the relationship between the subsidence amount of the horn and the time until the power reaches the maximum point. Therefore, it is possible to improve the accuracy of determining whether the workpiece is joined.

  As described above, in the first and second embodiments, the bonding quality inspection method and the bonding quality inspection apparatus of the present invention have been described. However, it goes without saying that the present invention can be appropriately added, modified, and omitted by those skilled in the art within the scope of the technical idea.

  For example, in the first and second embodiments, the characteristic numerical value-bond strength relational expression is calculated by multiple regression analysis. However, for example, the relational expression may be calculated using another statistical analysis such as a neural network in which at least two characteristic numerical values are explanatory variables and the joint strength is an objective variable.

  In the first and second embodiments, the joining quality inspection device calculates a plurality of characteristic values from the internal data of the ultrasonic joining device. However, the control unit of the ultrasonic bonding apparatus may calculate a plurality of characteristic values.

  In the first and second embodiments, the quality of the bonded state of the workpiece is determined based on three characteristic values including the maximum value of the horn sinking amount, the time integral value of power, and the maximum value of power. Was judged. However, one characteristic value among the three characteristic values may be omitted.

  In the first and second embodiments, the bonding quality inspection device is incorporated in the monitoring terminal as one function of the monitoring terminal of the ultrasonic bonding device. However, the bonding quality inspection device is also realized by a dedicated hardware circuit.

1 is a diagram illustrating a schematic configuration of an ultrasonic bonding system to which a bonding quality inspection apparatus according to a first embodiment of the present invention is applied. It is a block diagram which shows schematic structure of the ultrasonic bonding system shown in FIG. It is a block diagram which shows schematic structure of the joining quality inspection apparatus in the ultrasonic joining system shown in FIG. It is a figure which shows the internal data acquired while the ultrasonic bonding apparatus in the ultrasonic bonding system shown in FIG. 1 is ultrasonically bonding a workpiece | work. It is a flowchart which shows the joining quality inspection process of the joining quality inspection apparatus in the ultrasonic bonding system shown in FIG. It is a flowchart for demonstrating the prior evaluation process in the ultrasonic joining system shown in FIG. It is a figure for demonstrating the effect of the joining quality inspection process in the ultrasonic joining system shown in FIG. It is a figure for demonstrating the characteristic numerical value calculated in the 2nd Embodiment of this invention.

Explanation of symbols

100 ultrasonic bonding equipment,
111 anvil,
112 horn,
113 vibrator,
200 Bonding quality inspection device.

Claims (10)

From the internal data of the ultrasonic bonding apparatus that presses the vibrating horn and ultrasonically joins the workpiece, the maximum value of the moving amount of the horn moved in the pressing direction while the workpiece is ultrasonically bonded, the vibration of the horn Calculating at least two characteristic values among the sum of the power supplied to the child and the maximum value of the power;
And a step of determining the quality of the joining state of the ultrasonically joined workpieces based on the calculated at least two characteristic numerical values. The step of determining the quality of the joining state of the workpieces is as follows:
Calculating an estimated value of the bonding strength of the ultrasonically bonded workpiece from the calculated at least two characteristic values;
Comparing the calculated joint strength estimate with a lower reference limit of joint strength;
2. The method for inspecting bonding quality according to claim 1, further comprising: determining that the bonding state of the workpiece is good when the estimated value of the bonding strength is greater than or equal to the lower limit reference value. Calculating the at least two characteristic values for a plurality of workpieces;
Calculating at least two characteristic numerical values calculated for the plurality of workpieces and a characteristic numerical value-bonding strength relational expression indicating a relationship between the bonding strengths of the plurality of corresponding workpieces;
The step of calculating the estimated value of the joining strength of the workpieces includes:
The joint quality inspection method according to claim 2, wherein an estimated value of the joint strength of the workpiece is calculated from the at least two characteristic values based on the characteristic value-joint strength relational expression. The step of calculating the characteristic numerical value-bonding strength relational expression includes:
The joint quality test according to claim 3, wherein the characteristic numerical value-joint strength relational expression is calculated by a multiple regression analysis using the at least two characteristic values as explanatory variables and a joint strength as an objective variable. Method. The power-time curve showing the relationship between the power supplied to the vibrator and time has a maximum point when the power increasing with time shows a saturation tendency,
The bonding quality inspection method is:
Further comprising calculating another characteristic value from the internal data until the electric power reaches the maximum point,
The step of determining the quality of the joining state of the workpieces is as follows:
The quality of the joining state of the workpiece is determined based on the other characteristic value and the characteristic value-joint strength relational expression indicating the relationship between the at least two characteristic values and the bond strength. Item 6. The bonding quality inspection method according to Item 1.   6. The bonding quality inspection method according to claim 5, wherein the other characteristic value is a time until the electric power reaches a maximum point.   The joint quality inspection method according to claim 5, wherein the other characteristic value is a value of power when the power reaches a maximum point.   6. The joining quality inspection method according to claim 5, wherein the other characteristic value is a movement amount of the horn until the electric power reaches a maximum point.   6. The junction according to claim 5, wherein the other characteristic value is a slope of a movement amount-time curve indicating a relationship between a movement amount of the horn and time until the electric power reaches a maximum point. Pass / fail inspection method. From the internal data of the ultrasonic bonding apparatus that presses the vibrating horn and ultrasonically joins the workpiece, the maximum value of the moving amount of the horn moved in the pressing direction while the workpiece is ultrasonically bonded, the vibration of the horn A calculating means for calculating at least two characteristic numerical values among a total sum of electric power supplied to the child and a maximum value of the electric power;
And a determination unit for determining whether the workpiece is ultrasonically bonded based on the calculated at least two characteristic values.

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