JP2008173549A - Droplet ejection apparatus and device manufacturing method - Google Patents

Abstract

Disclosed is a droplet discharge device capable of suppressing deterioration in performance of an ejection head.
A droplet discharge device has a discharge head having a discharge surface formed with a discharge port for discharging a droplet of a functional liquid, and protrudes from the discharge surface outside a predetermined region of the discharge surface including the discharge port. And a convex portion formed as described above. The convex portion is capable of coming into contact with the liquid in contact with the predetermined area of the ejection surface, and is formed so that the liquid in contact with the predetermined area moves outside the predetermined area.
[Selection] Figure 1

Description

  The present invention relates to a droplet discharge apparatus and a device manufacturing method.

As one method for forming a device pattern, a droplet discharge method (inkjet method) in which a pattern is formed on a substrate with droplets of a functional liquid is known. The following patent document discloses a technique relating to a droplet discharge device (inkjet device) that forms a pattern on a substrate by discharging droplets from a discharge head having a discharge surface on which discharge ports capable of discharging droplets are formed. An example is disclosed.
Japanese Patent Laid-Open No. 11-248926

  If foreign matter such as droplets adheres to the ejection surface of the ejection head, or if foreign matter such as droplets adheres to the ejection surface, it is caused by the foreign matter adhering to the ejection surface. There is a possibility that the performance of the ejection head deteriorates, for example, the ejection head causes ejection failure.

  The present invention has been made in view of such circumstances, and an object of the present invention is to provide a droplet discharge device capable of suppressing deterioration of the performance of the discharge head. It is another object of the present invention to provide a device manufacturing method using the droplet discharge apparatus.

  In order to solve the above problems, the present invention adopts the following configuration.

  According to a first aspect of the present invention, an ejection head having an ejection surface on which ejection openings for ejecting functional liquid droplets are formed, and the ejection outside the predetermined area of the ejection surface including the ejection opening. There is provided a droplet discharge device that includes a convex portion protruding from a surface, and in which the liquid in contact with the predetermined region and the convex portion moves to the convex portion outside the region of the predetermined region.

  According to the first aspect of the present invention, the liquid contacting the predetermined area of the predetermined surface including the discharge port can be moved out of the predetermined area by the convex portion, so that liquid droplets adhere at least near the discharge port. Or remaining. Therefore, it is possible to suppress deterioration of the performance of the ejection head.

  In the liquid droplet ejection apparatus according to the present invention, the predetermined region may have a liquid repellency with respect to the liquid. According to this, it can suppress that a droplet adheres or remains in the predetermined area | region containing an ejection outlet.

  In the droplet discharge device of the present invention, the surface of the convex portion can adopt a configuration having lyophilicity with respect to the liquid. According to this, a liquid can be favorably moved toward a convex part.

  In the liquid droplet ejection apparatus of the present invention, the liquid droplets are ejected from the ejection port onto the substrate in a state where the ejection surface and the surface of the substrate face each other at a predetermined distance, and the ejection surface and the convex portion The distance from the tip can be smaller than the predetermined distance. According to this, it is possible to discharge droplets onto the substrate while suppressing contact between the convex portion and the substrate.

  In the liquid droplet ejection apparatus according to the aspect of the invention, the ejection head includes a head body, and a plate member that is disposed at an end of the head body and has the ejection surface on which the ejection port is formed. A configuration having a convex portion can be adopted. According to this, a liquid can be moved using the convex part provided in the plate member.

  In the liquid droplet ejection apparatus according to the aspect of the invention, the ejection head includes a head body, and a plate member that is disposed at an end of the head body and has the ejection surface on which the ejection port is formed. A configuration having a convex portion can be adopted. According to this, a liquid can be moved using the convex part provided in the head main body.

  In the droplet discharge device of the present invention, it is possible to employ a configuration in which a carriage member that supports a plurality of the discharge heads is provided, and the carriage member has the convex portion. According to this, a liquid can be moved using the convex part provided in the carriage member.

  The liquid droplet ejection apparatus according to the present invention may include a dipping device that immerses the ejection surface in a liquid other than the functional liquid, and the liquid may include a liquid of the dipping device. According to this, the discharge head can be maintained using the immersion device, and deterioration of the performance of the discharge head can be suppressed. And even after the maintenance using the dipping device, it is possible to suppress the liquid droplets from adhering or remaining at least near the discharge port. Therefore, it is possible to suppress deterioration of the performance of the ejection head.

  In the droplet discharge device of the present invention, the immersion device has an opening formed in an upper portion thereof and has a container for storing a liquid, and the discharge surface is moved to the inside of the container through the opening. When the discharge surface is taken out of the liquid in the container after the liquid is immersed in the liquid in the container, the liquid that contacts the predetermined area moves to the outside of the predetermined area by the convex portion. According to this, it is suppressed that the liquid of an immersion device adheres to a discharge surface, or remains using a convex part.

  In the droplet discharge device of the present invention, the opening of the container may have a size that allows the discharge surface and the convex portion to pass together. According to this, while being able to maintain a discharge surface favorably using an immersion device, a liquid can be smoothly moved using a convex part.

  In the liquid droplet ejection apparatus according to the present invention, the liquid of the immersion device may include a cleaning liquid for cleaning at least a part of the ejection head. According to this, the ejection head can be cleaned, and deterioration of the performance of the ejection head can be suppressed.

  In the liquid droplet ejection apparatus according to the present invention, the liquid of the immersion device may include a cooling liquid for cooling at least a part of the ejection head. According to this, the discharge head can be cooled, and deterioration of the performance of the discharge head can be suppressed.

  In the droplet discharge device of the present invention, the droplet discharge device includes a heating device that heats the substrate on which the droplet is discharged, and the discharge surface and the heated surface of the substrate face each other from the discharge port. A configuration in which the droplets are discharged onto the substrate can be employed. According to this, the liquid component contained in the droplets discharged from the discharge port of the discharge head and supplied to the substrate can be instantly vaporized (can be dried). Therefore, a desired pattern can be formed with droplets on the substrate.

  According to a second aspect of the present invention, the method includes an operation of ejecting droplets onto the substrate using the above-described droplet ejection device to form a pattern on the substrate, and an operation of drying the droplets on the substrate. A method for manufacturing a device is provided.

  According to the second aspect of the present invention, a device having desired performance can be manufactured by using a droplet discharge device in which deterioration of performance is suppressed.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings. In the following description, an XYZ orthogonal coordinate system is set, and the positional relationship of each member will be described with reference to this XYZ orthogonal coordinate system. The predetermined direction in the horizontal plane is the X-axis direction, the direction orthogonal to the X-axis direction in the horizontal plane is the Y-axis direction, and the direction orthogonal to each of the X-axis direction and the Y-axis direction (that is, the vertical direction) is the Z-axis direction. To do. Further, the rotation (inclination) directions around the X axis, Y axis, and Z axis are the θX, θY, and θZ directions, respectively.

<First Embodiment>
A first embodiment will be described. FIG. 1 is a schematic configuration diagram illustrating a droplet discharge device IJ according to the first embodiment, and FIG. 2 is a perspective view illustrating a part of the droplet discharge device IJ according to the first embodiment.

  The droplet discharge device IJ forms a device pattern on the substrate P by discharging droplets D of the functional liquid onto the substrate P. The droplet discharge device IJ has a discharge head 3 in a predetermined area including a discharge head 3 having a discharge surface 2 on which a discharge port 1 for discharging a droplet D of a functional liquid is formed, and a first position A1 facing the discharge surface 2. 3, a plurality of moving bodies 4, 5, 6, 7 arranged along the Y axis, and a drive for moving the plurality of moving bodies 4, 5, 6, 7 along the Y axis A device 8, a functional liquid storage device 9 that is connected to the discharge head 3 via a flow path and stores a functional liquid to be supplied to the discharge head 3, and a control device 10 that controls the overall operation of the droplet discharge device IJ. And.

  The droplet discharge device IJ of this embodiment is a multi-head type droplet discharge device including a plurality of discharge heads 3 and includes a carriage member 11 that supports the plurality of discharge heads 3. Further, the droplet discharge device IJ includes a controller 12 including a drive circuit that controls the drive of the discharge head 3. The controller 12 drives the ejection head 3 based on a command from the control device 10.

  In the present embodiment, the substrate P is a low temperature co-fired ceramics (LTCC) multilayer circuit as disclosed in, for example, Japanese Patent Application Laid-Open Nos. 2006-114593 and 2006-261146. It is a board | substrate for forming a board | substrate, Comprising: The LTCC board | substrate (green sheet) before baking is included. The functional liquid includes, for example, those obtained by dispersing conductive fine particles in a predetermined dispersion medium as disclosed in JP-A-2005-34837. In the present embodiment, the conductive fine particles of the functional liquid are mainly composed of silver fine particles (including organic silver compounds and silver oxide nanoparticles), and the dispersion medium is mainly composed of water. That is, the functional liquid of this embodiment is obtained by dispersing silver fine particles as conductive fine particles in a dispersion medium containing water as a main component. In the present embodiment, the droplet discharge device IJ discharges a droplet D of a functional liquid containing silver fine particles onto an LTCC substrate (green sheet) before firing, and the substrate (green sheet) with the droplet D A case where a wiring pattern is formed will be described as an example.

  The droplet discharge device IJ has at least three moving bodies. In the present embodiment, the droplet discharge device IJ includes four moving bodies 4, 5, 6, and 7. The first moving body 4 is disposed on the most −Y side among the four moving bodies disposed along the Y axis, and the fourth moving body 7 is disposed on the most + Y side. That is, the 1st moving body 4 and the 2nd moving body 7 are arrange | positioned at both ends regarding the Y-axis direction among the four moving bodies 4, 5, 6, 7 arrange | positioned along the Y-axis. The second moving body 5 and the third moving body 6 are disposed between the first moving body 4 and the fourth moving body 7. The second moving body 5 is disposed on the −Y side of the third moving body 6.

  The first moving body 4 is movable while holding the substrate P on which a pattern is formed with the droplets D. The second, third, and fourth moving bodies 5, 6, and 7 include a maintenance device that maintains the ejection head 3. In the present embodiment, the second moving body 5 includes a capping device 13 that covers the ejection surface 2 of the ejection head 3. The third moving body 6 includes a wiping device 14 that removes foreign matter on the ejection surface 2 of the ejection head 3. The fourth moving body 7 includes an immersion device 15 that immerses at least a part of the ejection head 3 including the ejection surface 2 in a liquid other than the functional liquid.

  The droplet discharge device IJ includes a base member 17 having a support surface 16 that movably supports the moving bodies 4, 5, 6, and 7. Each of the moving bodies 4, 5, 6, 7 is movable along the support surface 16. In the present embodiment, the support surface 16 is substantially parallel to the XY plane. Further, in the present embodiment, an air bearing is formed between the support surface 16 of the base member 17 and the opposing surfaces of the moving bodies 4, 5, 6, 7 that face the support surface 16. Each moving body 4, 5, 6, 7 is supported in a non-contact manner with respect to the support surface 16 by an air bearing.

  In addition, the droplet discharge device IJ includes a guide member 18 that guides the movement of the plurality of moving bodies 4, 5, 6, 7 in the Y-axis direction. The guide member 18 is a rod-like member that is long in the Y-axis direction, and is disposed on the support surface 16. In the present embodiment, both ends of the guide member 18 are supported by support members 19 disposed outside the guide member 18. The support member 19 is supported on the floor surface 20. The base member 17 is supported by a support member 21 supported by the floor surface 20.

  In the present embodiment, the driving device 8 includes a linear motor and can move each of the plurality of moving bodies 4, 5, 6, 7 independently. The driving device 8 includes a linear motor stator 22 disposed on the guide member 18 and a linear motor mover disposed on each of the opposing surfaces of the movable bodies 4, 5, 6, 7 facing the guide member 18. 23, 24, 25, 26. The control device 10 can move each of the moving bodies 4, 5, 6, and 7 independently on the base member 17 using a driving device 8 including a linear motor.

  The droplet discharge device IJ is disposed at a position different from the discharge head 3 and performs at least one of the operation of loading the substrate P into the first moving body 4 and the operation of unloading the substrate P from the first moving body 4. A substrate transfer device 27 is provided. In the vicinity of the substrate transfer device 27, a substrate accommodation device 28 capable of accommodating the substrate P is disposed.

  The substrate transfer device 27 performs an operation of loading the substrate P into the first moving body 4 disposed at the second position A2 different from the first position A1 with respect to the Y-axis direction, and an operation of unloading the substrate P from the first moving body 4. Execute at least one of the following. The first position A1 and the second position A2 are separated with respect to the Y-axis direction. In the present embodiment, the first position A1 is a position on the + Y side of the second position A2. The first moving body 4 moves along the support surface 16 of the base member 17 between the first position A1 facing the ejection surface 2 of the ejection head 3 and the second position A2 in the vicinity of the substrate transport device 27. Is possible.

  The substrate transfer device 27 can carry, for example, the substrate P accommodated in the substrate accommodation device 28 into the first moving body 4 arranged at the second position A2. Further, the substrate transport device 27 can carry the substrate P out of the first moving body 4 disposed at the second position A <b> 2 and accommodate it in the substrate accommodation device 28.

  Further, in the present embodiment, the droplet discharge device IJ is provided with a heat insulating member 29 that is disposed on at least a part of the moving path of the first moving body 4 and blocks heat dissipation of the first moving body 4 to the surroundings. ing. The heat insulating member 29 is attached to a predetermined position of the base member 17 so as not to hinder the movement of the moving bodies 5, 6, 7 including the first moving body 4.

  Further, the droplet discharge device IJ includes the above-described discharge head 3, carriage member 11, moving bodies 4, 5, 6, 7, base member 17, guide member 18, substrate transport device 27, substrate storage device 28, and heat insulating member 29. , Adjusting the environment (temperature, humidity, cleanliness, etc.) of the chamber main body 30 that accommodates each device and member such as the functional liquid storage device 9, the controller 12, and the control device 10, and the space inside the chamber main body 30 A chamber device 32 having a possible air conditioner 31 is provided.

  The ejection head 3 will be described with reference to FIGS. 3 and 4. FIG. 3 is a view of the plurality of ejection heads 3 supported by the carriage member 11 as viewed from below, and FIG. 4 is a cross-sectional view for explaining an example of the structure of the ejection head 3.

  The ejection head 3 according to the present embodiment supplies a predetermined drive signal to a piezo element (piezoelectric element) 33 and deforms the piezo element 33 so that the pressure in the space 34 containing the functional liquid is flexible. This is a discharge head of a so-called electromechanical conversion system that discharges the functional liquid droplet D from the discharge port 1 by using the fluctuation of the pressure via the vibration plate (film) 35. The controller 12 drives the ejection head 3 based on a command from the control device 10. The controller 12 can supply a predetermined drive signal to the piezo element 33 of the discharge head 3 and discharge the droplet D having a size corresponding to the drive signal from each of the discharge ports 1.

  As shown in FIG. 3, the droplet discharge device IJ of the present embodiment has a plurality of discharge heads 3. The plurality of ejection heads 3 are supported by the carriage member 11. The ejection head 3 has an ejection surface (nozzle formation surface) 2 on which ejection ports (ejection nozzles) 1 for ejecting functional liquid droplets D are formed. The discharge surface 2 has a shape that is long in a predetermined direction (in the present embodiment, a substantially rectangular shape). A plurality of discharge ports 1 are formed on the discharge surface 2 along a predetermined direction (longitudinal direction of the discharge surface 2). In the present embodiment, the predetermined direction in which the plurality of discharge ports 1 are arranged is a direction inclined with respect to the X-axis direction in the XY plane.

  As shown in FIG. 4, the ejection head 3 includes a head main body 36 and a plate member (nozzle plate) 37 disposed at the lower end of the head main body 36. The discharge port 1 is formed in the plate member 37. The plate member 37 has a plurality of holes penetrating in the vertical direction. The discharge port 1 is disposed at the lower end of the hole. The discharge surface 2 is disposed on the plate member 37.

  In the present embodiment, the ejection surface 2 of the ejection head 3 (plate member 37) faces downward (−Z side). The surface of the substrate P on which the droplets D from the ejection head 3 are ejected (supplied) is directed upward (+ Z side) so as to face the ejection surface 2 of the ejection head 3. The first moving body 4 holds the substrate P so that the surface of the substrate P faces upward (+ Z side). Further, the ejection surface 2 of the ejection head 3 is substantially parallel to the XY plane. The first moving body 4 holds the substrate P so that the surface of the substrate P and the XY plane are substantially parallel. The control device 10 maintains the predetermined distance D1 in a state where the discharge surface 2 of the discharge head 3 and the surface of the substrate P held by the first moving body 4 face each other with a predetermined distance (platen gap) D1. At the same time, the droplet D is discharged from the discharge port 1 onto the substrate P.

  In the present embodiment, the droplet discharge device IJ has a convex portion formed so as to protrude downward (−Z direction) from the discharge surface 2 outside the predetermined region 2A of the discharge surface 2 including the discharge port 1. 80. In the present embodiment, the convex portion 80 is provided on the plate member 37. That is, the plate member 37 has the convex portion 80. In the present embodiment, the convex portion 80 is formed at the edge of the plate member 37 so as to be substantially parallel to a predetermined direction in which the plurality of discharge ports 1 are arranged.

  In the present embodiment, a part of the lower surface of the plate member 37 facing the −Z side is the ejection surface 2 including the predetermined region 2 </ b> A, and another part of the region is a region including the convex portion 80. ing.

  Further, the distance D2 in the Z-axis direction between the ejection surface 2 and the tip (lower end) of the convex portion 80 is smaller than the predetermined distance D1. Thereby, it is possible to discharge the droplet D onto the substrate P while suppressing contact (collision) between the convex portion 80 and the substrate P.

  The discharge head 3 includes a cavity (space) 34 formed above the plate member 37 (discharge port 1), a flexible plate (vibration plate) 35 disposed above the cavity 34, and a vibration plate. 35 and a piezo element 33 disposed above 35. A plurality of cavities 34 are formed so as to correspond to each of the plurality of discharge ports 1. The cavity 34 is connected to the functional liquid storage device 9 through a flow path. The cavity 34 stores the functional liquid from the functional liquid storage device 9 and supplies the functional liquid to the discharge port 1.

  The diaphragm 35 can vary the pressure (volume) of the cavity 34 by vibrating in the vertical direction. The piezo element 33 can vibrate the diaphragm 35 in the vertical direction. A plurality of piezo elements 33 are arranged so as to correspond to each of the plurality of ejection openings 1. The piezo element 33 causes the vibration plate 35 to vibrate based on the drive signal from the controller 12 and causes the pressure of the cavity 34 to fluctuate, thereby ejecting the functional liquid droplet D from the ejection port 1.

  Further, the controller 12 adjusts a drive signal (drive waveform) supplied to the piezo element 33 as disclosed in, for example, Japanese Patent Application Laid-Open No. 2001-58433, and discharges liquid from each of the discharge ports 1. The amount (size, volume) of the droplet D can be adjusted.

  As shown in FIG. 1, the droplet discharge device IJ of this embodiment includes a holding device 38 that holds a plurality of discharge heads 3 so that the positions of the plurality of discharge heads 3 do not substantially move. The holding device 38 includes a carriage member 11 and a support mechanism 39 that supports the carriage member 11. In the present embodiment, the support mechanism 39 is fixed to the ceiling surface (inner surface) of the chamber body 30. That is, in the present embodiment, the plurality of ejection heads 3 are held so as not to move substantially with respect to the ceiling surface (inner surface) of the chamber body 30 via the holding device 38 including the carriage member 11 and the support mechanism 39. ing.

  In the present embodiment, the support mechanism 39 includes an actuator that can finely move the carriage member 11. The support mechanism 39 can finely move the carriage member 11 in directions of six degrees of freedom in the X axis, Y axis, Z axis, θX, θY, and θZ directions.

  Next, the first moving body 4 will be described with reference to FIG. FIG. 5A is a perspective view showing the first moving body 4, and FIG. 5B is a view of the first moving body 4 as viewed from the −Y side.

  The first moving body 4 is movable while holding the substrate P on which a pattern is formed with the droplets D. The first movable body 4 includes a first movable member 40 having a mover 23 of a linear motor, and a holder member 42 having a holding mechanism 41 mounted on the first movable member 40 and holding the substrate P. An air bearing 43 is formed on the lower surface of the first movable member 40 facing the support surface 16 of the base member 17. The first movable member 40 is supported by the air bearing 43 without contact with the support surface 16. The holder member 42 of the first moving body 4 is configured so that the surface of the substrate P and the ejection surface 2 of the ejection head 3 face each other, and the surface of the substrate P and the XY plane are substantially parallel. Hold.

  As described above, the substrate P of the present embodiment includes a green sheet, and a hole (via) penetrating in the thickness direction is formed in the green sheet. A film F formed of, for example, polyethylene terephthalate (PET) is attached to the back surface of the substrate P (green sheet), and the holder member 42 of the first moving body 4 is a substrate supported by the film F. Hold P. That is, in the present embodiment, the holder member 42 of the first moving body 4 holds the substrate P (green sheet) via the film F.

  A concave portion 44 in which the guide member 18 can be disposed is formed on the lower surface of the first movable member 40. The inner surface of the recess 44 of the first movable member 40 faces the guide member 18. As described above, the linear motor stator 22 is disposed on the guide member 18. A mover 23 of a linear motor is disposed on the inner surface of the recess 44 of the first movable member 40 facing the guide member 18. The drive device 8 including the stator 22 and the mover 23 can move the first movable member 40 in the Y-axis direction. As the first movable member 40 moves in the Y-axis direction, the holder member 42 (substrate P) mounted on the first movable member 40 also moves in the Y-axis direction together with the first movable member 40. Moving.

  In the present embodiment, a plurality of actuators 45 are arranged between the first movable member 40 and the holder member 42. The actuator 45 includes, for example, a piezo element. The control device 10 can move (finely move) the holder member 42 holding the substrate P on the first movable member 40 by controlling these actuators 45. In the present embodiment, the holder member 42 holding the substrate P is moved by the actuator 45 on the first movable member 40 in directions of six degrees of freedom in the X axis, Y axis, Z axis, θX, θY, and θZ directions. It is possible to move (fine movement).

  In order to supply the droplets D ejected from the ejection head 3 to the substrate P, the control device 10 moves the first moving body 4 using the driving device 8 and faces the ejection surface 2 of the ejection head 3. The board | substrate P currently hold | maintained at the 1st moving body 4 (holder member 42) is arrange | positioned in 1st position A1. In addition, the control device 10 uses the actuator 45 disposed between the first movable member 40 and the holder member 42 to cause the droplet D ejected from the ejection port 1 of the ejection surface 2 to be in a predetermined position on the substrate P. , The distance (platen gap) between the ejection surface 2 of the ejection head 3 and the surface of the substrate P held by the first moving body 4, the ejection surface 2 of the ejection head 3 and the first movement The positional relationship in the tilt direction (θX, θY direction) and the rotational relationship (θZ direction) with the surface of the substrate P held by the body 4 are adjusted. The control device 10 uses the actuator 45 to discharge the discharge head 3 so that the discharge surface 2 of the discharge head 3 and the surface of the substrate P are substantially parallel and the platen gap becomes a predetermined value. The positional relationship between the surface 2 and the surface of the substrate P held by the first moving body 4 is adjusted.

  In the present embodiment, flushing regions 46 are provided on both sides in the Y-axis direction of the holding mechanism 41 that holds the substrate P on the upper surface of the holder member 42 that can face the discharge surface 2 of the discharge head 3. Yes. The flushing region 46 is formed on the upper surface of a porous member that can absorb the droplet D ejected from the ejection port 2 of the ejection head 3. The porous member includes, for example, a sponge-like member. Before supplying the droplet D from the ejection head 3 to the substrate P, the control device 10 causes the droplet from the ejection port 1 to face the ejection port 1 of the ejection head 3 and the flushing region 46 of the holder member 42. An operation of discharging D in advance, a so-called flushing operation is executed.

  Further, the first moving body 4 includes a heating device 47 that heats the substrate P. The heating device 47 is provided on the holder member 42. The control device 10 can heat the substrate P held by the holder member 42 using the heating device 47 of the holder member 42.

  The control device 10 is heated by the discharge surface 2 of the discharge head 3 and the surface of the substrate P held by the holder member 42 while being heated by the heating device 47, and the droplet D is applied to the substrate P from the discharge port 1. Discharge. The heating device 47 can instantaneously vaporize the liquid component contained in the droplet D discharged from the discharge port 1 of the discharge head 3 and supplied (contacted) to the substrate P. The droplet discharge device IJ uses the heating device 47 to heat the substrate P and supplies the droplet D to the heated substrate P from the discharge port 1 of the discharge head 3 to thereby contact the substrate P with the liquid. Drops D can be dried instantly.

  Further, by supplying the droplet D to the substrate P while heating the substrate P, the pinning phenomenon can be caused. In the drying process of the droplet D after being supplied to the substrate P, when the solid content concentration at the peripheral portion of the droplet D reaches the saturation concentration, the solid content locally precipitates at the peripheral portion. Then, the peripheral portion of the droplet D is pinned by the deposited solid content, and the contraction of the droplet D (outer diameter contraction) accompanying the subsequent drying is suppressed. A pattern (pinning phenomenon in this embodiment) formed on the substrate P by causing such a phenomenon (pinning phenomenon) that the shrinkage of the droplets D caused by drying is suppressed by the solid content deposited on the peripheral portion. ) Edge (outer shape) can be well defined.

  For example, as disclosed in JP-A-2005-28276, JP-A-2005-144324, etc., adjusting the drying conditions, convection conditions, etc. of the droplets D arranged on the surface of the substrate P, You may make it produce the pinning phenomenon in the droplet D discharged (supplied) to the substrate P.

  In the following description, the process of disposing the substrate P of the first moving body 4 at the first position A1 and discharging the droplet D for forming a pattern on the substrate P from the discharge port 1 is appropriately performed as a pattern forming process. .

  Next, the 2nd mobile body 5 is demonstrated, referring FIG.6 and FIG.7. FIG. 6 is a diagram of the second moving body 5 as viewed from the −X side, and FIG. 7 is a diagram for explaining an example of the operation of the second moving body 5. The second moving body 5 includes a capping device 13 that covers the ejection surface 2 of the ejection head 3.

  The capping device 13 includes a cap member 48 that covers the ejection surface 2 of the ejection head 3. The cap member 48 includes an upper surface that can face the ejection head 3, and a cap portion 50 that is formed on the upper surface and can form a sealed space 49 between the ejection surface 2 of the ejection head 3. The cap unit 50 includes a recess (groove) formed on the upper surface of the cap member 48, and a space 49 can be formed between the cap unit 50 and the ejection surface 2 of the ejection head 3. A plurality of cap portions 50 are provided so as to correspond to the plurality of ejection heads 3.

  As shown in FIG. 7, the capping device 13 can arrange all of the ejection surface 2 of the ejection head 3 inside the cap portion (concave portion) 50. The capping device 13 forms the space 49 by bringing the upper end of the inner surface of the cap part (recessed portion) 50 into contact with the side surface of the discharge head 3 (plate member 37) outside the discharge surface 2, for example.

  The capping device 13 includes a suction port 53 that is formed on the bottom surface of the cap portion (recessed portion) 50 and can suck the fluid in the space 49, and a vacuum system 55 that is connected to the suction port 53 via the flow path 54. Have.

  The second moving body 5 has a second movable member 51 having a linear motor movable element 24, and the cap member 48 of the capping device 13 is mounted on the second movable member 51. Similar to the first movable member 40 described above, an air bearing is formed on the lower surface of the second movable member 51 that faces the support surface 16 of the base member 17, and the second movable member 51 is in contact with the support surface 16. Supported without contact. Similarly to the first movable member 40 described above, a concave portion in which the guide member 18 can be disposed is formed on the lower surface of the second movable member 51, and the mover 24 is a second movable member facing the guide member 18. It is disposed on the inner surface of the recess of the member 51. The drive device 8 including the stator 22 and the movable element 24 can move the second movable member 51 in the Y-axis direction. As the second movable member 51 moves in the Y-axis direction, the cap member 48 of the capping device 13 mounted on the second movable member 51 also moves in the Y-axis direction together with the second movable member 51. Moving.

  Further, similarly to the first moving body 4 described above, a plurality of actuators 52 are arranged between the second movable member 51 and the cap member 48. The control device 10 can move (finely move) the cap member 48 on the second movable member 51 by controlling these actuators 52. In the present embodiment, the cap member 48 is moved (finely moved) by the actuator 52 on the second movable member 51 in directions of six degrees of freedom in the X axis, Y axis, Z axis, θX, θY, and θZ directions. Is possible.

  In order to cover the ejection surface 2 of the ejection head 3 with the cap member 48, the control device 10 moves the second moving body 5 using the driving device 8 to face the ejection surface 2 of the ejection head 3. The capping device 13 for the second moving body 5 is arranged at A1. The control device 10 uses the actuator 52 disposed between the second movable member 51 and the cap member 48 to provide a space between the ejection surface 2 of the ejection head 3 and the cap portion 50 of the cap member 48. The positional relationship between the ejection surface 2 of the ejection head 3 and the cap portion 50 of the cap member 48 is adjusted so that 49 is formed. For example, the control device 10 uses the actuator 52 to move the cap member 51 in the + Z direction. As a result, the discharge surface 2 is disposed inside the cap portion 50, the upper end of the inner surface of the cap portion 50 contacts the side surface of the discharge head 3 (plate member 37) outside the discharge surface 2, and the space 49 is formed. It is formed.

  The capping device 13 can suck the fluid in the space 49 through the suction port 53 by driving the vacuum system 55 in a state where the space 49 is formed between the discharge surface 2 of the discharge head 3 and the cap unit 50. It is. The capping device 13 can suck the fluid (mainly gas) in the space 49 from the suction port 53 to make the space 49 have a negative pressure. The capping device 13 can suck the functional liquid inside the ejection head 3 such as the cavity 34 through the ejection port 1 by setting the space 49 to a negative pressure. The capping device 13 can generate the flow of the functional liquid toward the discharge port 1 inside the discharge head 3 by sucking the fluid in the space 49.

  The capping device 13 described with reference to FIGS. 6 and 7 mainly has a suction function for sucking the functional liquid of the discharge head 3, but has a function of suppressing drying of the discharge surface 2 (discharge port 1) ( It may have a moisturizing function). For example, a wet porous member (mesh member) is disposed inside the cap unit 50, and the cap unit 50 including the wet porous member is opposed to the discharge surface 2 of the discharge head 3, thereby drying the discharge surface 2. Can be suppressed. That is, by disposing the wet porous member inside the space 49 formed by the discharge surface 2 and the cap portion 50, drying of the discharge surface 2 can be suppressed.

  In the following description, the process of placing the second moving body 5 at the first position A1, facing the discharge surface 2 and the cap portion 50, and covering the discharge surface 2 with the cap member 48 is appropriately performed as a capping process. Called.

  Next, the third moving body 6 will be described with reference to FIGS. 8 and 9. FIG. 8 is a view of the third moving body 6 as viewed from the −X side, and FIG. 9 is a view for explaining an example of the operation of the third moving body 6. The third moving body 6 includes a wiping device 14 that removes foreign matter on the ejection surface 2 of the ejection head 3.

  The wiping device 14 moves the wiping member 57 having a wiping surface 56 that can move relative to the ejection surface 2 and the wiping surface 56 of the wiping member 57 in a state of facing the ejection surface 2 of the ejection head 3. And a housing member 59 that houses the wiping member 57 and the drive mechanism 58.

  At least a part of the wiping member 57 is exposed (projected) from an opening 60 formed on the upper surface of the housing member 59 that can face the ejection head 3, and can face the ejection surface 2 of the ejection head 3. The wiping device 14 moves the wiping surface 56 of the wiping member 57 relative to the ejection surface 2 in a state where the ejection surface 2 of the ejection head 3 and the wiping surface 56 of the wiping member 57 face each other. In 56, the foreign matter adhering to the ejection surface 2 of the ejection head 3 can be removed (removed).

  In the present embodiment, the wiping member 57 is a sheet-like member. The wiping member 57 is made of a material that can absorb liquid. The wiping member 57 includes, for example, a nonwoven fabric. The wiping member 57 may be a woven fabric such as polyester. By forming the wiping member 57 with a material capable of absorbing liquid, when the foreign matter adhering to the ejection surface 2 of the ejection head 3 is a droplet, the droplet (foreign matter) can be removed well.

  The drive mechanism 58 for moving the wiping surface 56 of the wiping member 57 has a plurality of rollers that rotate while supporting the wiping member 57. The drive mechanism 58 is disposed inside the housing member 59 and is positioned closest to the ejection surface 2 of the ejection head 3, a feeding roller 61 that feeds the sheet-like wiping member 57, a take-up roller 62 that winds the wiping member 57, and the like. And a support roller 63 that supports a surface opposite to the wiping surface 56 of the wiping member 57 facing the discharge surface 2 of the discharge head 3. Each of the feeding roller 61 and the take-up roller 62 is rotated by actuators 64 and 65 such as a rotary motor. The wiping device 14 controls the actuators 64 and 65 to move (run) the wiping surface 56 of the wiping member 57 at a predetermined speed. The drive mechanism 58 includes a guide roller that guides the movement (running) of the wiping member 57 and a tension roller that can adjust the tension of the wiping member 57.

  The third moving body 6 includes a third movable member 66 having a linear motor movable element 25, and the housing member 59 of the wiping device 14 is mounted on the third movable member 66. Similar to the first movable member 40 described above, an air bearing is formed on the lower surface of the third movable member 66 facing the support surface 16 of the base member 17, and the third movable member 66 is in contact with the support surface 16. Supported without contact. Similarly to the first movable member 40 described above, a concave portion in which the guide member 18 can be disposed is formed on the lower surface of the third movable member 66, and the movable element 25 is a third movable member facing the guide member 18. The member 66 is disposed on the inner surface of the recess. The drive device 8 including the stator 22 and the movable element 25 can move the third movable member 66 in the Y-axis direction. As the third movable member 66 moves in the Y-axis direction, the housing member 59 of the wiping device 14 mounted on the third movable member 66 also moves in the Y-axis direction together with the third movable member 66. Moving.

  Further, similarly to the first moving body 4 described above, a plurality of actuators 67 are arranged between the third movable member 66 and the housing member 59. The control device 10 can move (finely move) the housing member 59 on the third movable member 66 by controlling these actuators 67. In this embodiment, the housing member 59 is moved (finely moved) by the actuator 67 on the third movable member 66 in directions of six degrees of freedom in the X axis, Y axis, Z axis, θX, θY, and θZ directions. Is possible. The drive mechanism 58 including the wiping member 57 and the roller of the wiping device 14 moves together with the housing member 59 on the third movable member 66 as the housing member 59 moves.

  In order to wipe off the foreign matter on the ejection surface 2 of the ejection head 3 with the wiping member 57, the control device 10 moves the third moving body 6 using the drive device 8 and faces the ejection surface 2 of the ejection head 3. The wiping device 14 of the third moving body 6 is disposed at the 1 position A1. Then, the control device 10 uses the actuator 67 disposed between the third movable member 66 and the housing member 59 so that the foreign matter on the discharge surface 2 can be removed by the wiping surface 56. The positional relationship between the discharge surface 2 and the wiping surface 56 of the portion of the wiping member 57 supported by the support roller 63 is adjusted. For example, the control device 10 uses the actuator 67 to move the housing member 59 in the Z-axis direction. As the housing member 59 moves in the Z-axis direction, the support roller 63 that supports the wiping member 57 also moves in the Z-axis direction. The control device 10 uses the actuator 67 to adjust the distance (gap) in the Z-axis direction between the ejection surface 2 of the ejection head 3 and the wiping surface 56 of the portion of the wiping member 57 supported by the support roller 63. To do. Then, the controller 10 drives the feeding roller 61 and the take-up roller 62 to move (run) the wiping surface 56 of the wiping member 57 with respect to the ejection surface 2 of the ejection head 3. As a result, the wiping device 14 can remove (remove) foreign matter adhering to the ejection surface 2 of the ejection head 3.

  In the following description, the process in which the third moving body 6 is disposed at the first position A1, the discharge surface 2 and the wiping surface 56 face each other, and foreign matter on the discharge surface 2 is removed is appropriately referred to as a wiping process.

  Next, the 4th moving body 7 is demonstrated, referring FIG.10 and FIG.11. FIG. 10 is a diagram of the fourth moving body 7 as viewed from the −X side, and FIG. 11 is a diagram for explaining an example of the operation of the fourth moving body 7. The fourth moving body 7 includes an immersion device 15 that immerses at least a part of the ejection head 3 in a liquid other than the functional liquid.

  The dipping device 15 includes a container 68 that contains a liquid. The liquid in the immersion device 15 includes at least one of a cleaning liquid for cleaning at least a part of the ejection head 3 and a cooling liquid for cooling at least a part of the ejection head 3. An opening 69 is formed in the upper part of the container 68 of the dipping device 15. The opening 69 has a size that allows at least the ejection surface 2 and the convex portion 80 to pass through together. The discharge head 3 is movable (can enter) into the space inside the container 68 through the opening 69 of the container 68. The control device 10 moves the discharge surface 2 of the discharge head 3 to the space inside the container 68 of the immersion device 15 through the opening 69 and immerses the liquid in the liquid, whereby the discharge head 2, the discharge port 1, etc. At least a part of the substrate can be cleaned or cooled.

  As the liquid of the dipping device 15, for example, a separating medium for functional liquid can be used. Since the dispersion medium of the present embodiment is a liquid mainly composed of water, water or a liquid mainly composed of water can be used as the liquid of the immersion device 15. Thereby, at least a part of the ejection head 3 such as the ejection surface 2 and the ejection port 1 can be cleaned or cooled.

  The fourth moving body 7 includes a fourth movable member 70 having a linear motor movable element 26, and the container 68 of the immersion device 15 is mounted on the fourth movable member 70. Similar to the first movable member 40 described above, an air bearing is formed on the lower surface of the fourth movable member 70 facing the support surface 16 of the base member 17, and the fourth movable member 70 is in contact with the support surface 16. Supported without contact. Similarly to the first movable member 40 described above, a concave portion in which the guide member 18 can be disposed is formed on the lower surface of the fourth movable member 70, and the movable element 26 is a fourth movable member facing the guide member 18. It is disposed on the inner surface of the recess of the member 70. The drive device 8 including the stator 22 and the mover 26 can move the fourth movable member 70 in the Y-axis direction. Further, as the fourth movable member 70 moves in the Y-axis direction, the container 68 of the immersion device 15 mounted on the fourth movable member 70 also moves in the Y-axis direction together with the fourth movable member 70. To do.

  Further, similarly to the first moving body 4 described above, a plurality of actuators 71 are arranged between the fourth movable member 70 and the container 68. The control device 10 can move (finely move) the container 68 on the fourth movable member 70 by controlling these actuators 71. In the present embodiment, the container 68 can be moved (finely moved) by the actuator 71 on the fourth movable member 70 in directions of six degrees of freedom in the X axis, Y axis, Z axis, θX, θY, and θZ directions. It is. Further, the surface of the liquid stored in the container 68 of the dipping device 15 moves together with the container 68 on the fourth movable member 70 as the container 68 moves.

  In order to immerse at least a part of the ejection head 3 in the liquid of the immersion device 15, the control device 10 moves the fourth moving body 7 using the driving device 8 and opposes the ejection surface 2 of the ejection head 3. The immersion device 15 for the fourth moving body 7 is disposed at the one position A1. Then, the control device 10 uses the actuator 71 disposed between the fourth movable member 70 and the container 68 so that at least the discharge surface 2 of the discharge head 3 is immersed in the liquid in the container 68. The positional relationship between the discharge surface 2 and the container 68 (liquid surface) is adjusted. For example, the control apparatus 10 uses the actuator 71 to move the container 68 in the + Z direction. As the container 68 moves in the + Z direction, the surface of the liquid stored in the container 68 moves so as to approach the ejection head 3. Thereby, the immersion device 15 can immerse at least a part of the ejection head 3 in the liquid. In addition, the control device 10 can separate the liquid contained in the container 68 from the ejection head 3 by moving the container 68 in the −Z direction using the actuator 71.

  As shown in FIG. 11, the convex portion 80 can contact the liquid in the container 68 that is in contact with the predetermined region 2 </ b> A of the ejection surface 2. The convex portion 80 has a predetermined size (distance D2) at a predetermined position so that the convex portion 80 can contact the liquid in the container 68 when at least the predetermined area 2A of the ejection surface 2 is in contact with the liquid in the container 68. Has been placed.

  In the present embodiment, the predetermined area 2A of the ejection surface 2 has liquid repellency. In particular, in the present embodiment, the predetermined area 2 </ b> A of the ejection surface 2 has liquid repellency with respect to the liquid of the immersion device 15. In the present embodiment, the surface of the predetermined area 2 </ b> A of the ejection surface 2 is formed of a liquid repellent material film covered by the plate member 37. As an example, in the present embodiment, the plate member 37 is made of stainless steel, and a predetermined region 2A of the discharge surface 2 of the stainless steel plate member 37 has a silicon resin film such as a polymer-polymerized silicon film and silicon. A film of a silane coupling agent is formed. That is, a technique using plasma polymerization can be used as an example of the liquid repellent treatment that makes the discharge surface 2 liquid repellent. The liquid repellent treatment using plasma polymerization includes a step of converting a raw material liquid vapor containing silicon into plasma in a plasma treatment apparatus. When the activated silicon material reaches the surface of the plate member 37, the silicon is polymerized with each other on the plate member 37 to form liquid-repellent silicon. It becomes a polymer film (polymer polymer silicon film).

As the liquid repellent treatment using plasma polymerization, the vapor of the raw material liquid made of linear PFC (polyfluorocarbon) such as C ₄ F ₁₀ , C ₈ F ₁₆ is converted into plasma in the plasma processing apparatus. Also good. By converting the vapor of the linear PFC into plasma, the bonds of the linear PFC are partially broken and activated. When a part of the bond is cut in this way and the activated PFC reaches the surface of the plate member 37, these PFCs are polymerized with each other on the plate member 37 to form a fluororesin polymer film having liquid repellency. . In this case, for example, decatriene can be used as a raw material liquid for the liquid repellent treatment. In that case, by adding CF ₄ or oxygen activated by plasma treatment, liquid repellency can be imparted to the resulting polymer film, thereby forming a liquid-repellent polymer film. Moreover, fluorocarbon can also be used as a raw material liquid for the liquid repellent treatment. In that case, by adding CF ₄ activated by the plasma, even if a part of the fluorine in the fluorocarbon, which is the raw material liquid, is released by the plasma, the above-mentioned active fluorine is taken into the polymer film. Therefore, the liquid repellency of the fluororesin polymer film to be formed can be improved.

  Moreover, in this embodiment, the surface of the convex part 80 has lyophilicity. In particular, in the present embodiment, the surface of the convex portion 80 has liquid repellency with respect to the liquid of the immersion device 15. In the present embodiment, the film of the liquid repellent material described above is not formed on the surface of the convex portion 80, and the surface of the convex portion 80 is a surface of stainless steel that is at least more lyophilic than the predetermined region 2A. Is formed. By performing a liquid repellent treatment using plasma polymerization in a state where the surface of the convex portion 80 is covered with a cover (mask), a film of a liquid repellent material can not be formed on the convex portion 80.

  In the following description, the fourth moving body 7 is disposed at the first position A1, the discharge surface 2 and the liquid surface of the container 68 are opposed to each other, and at least a part of the discharge head 3 is immersed in the liquid of the container 68. The treatment is appropriately referred to as immersion treatment.

  In the following description, a process for maintaining the ejection head 3 is appropriately referred to as a maintenance process. The maintenance process includes at least one of the above-described capping process, wiping process, and dipping process.

  Next, the heat insulating member 29 will be described with reference to FIGS. 12 and 13. FIG. 12 is a perspective view showing the heat insulating member 29, and FIG. 13 is a view of the heat insulating member 29 as viewed from the -Y side.

  The heat insulating member 29 is disposed on at least a part of the moving path of each moving body 5, 6, 7 including the first moving body 4. The heat insulating member 29 blocks the diffusion of the heat of the first moving body 4 to the surroundings. As described above, the first moving body 4 (holder member 42) includes the heating device 47 that heats the substrate P. The heat insulating member 29 blocks heat radiating from the first moving body 4 including the heating device 47 to the surroundings.

  The heat insulating member 29 is arranged on the moving path of the moving bodies 4, 5, 6, and 7 other than the first position A1. That is, the heat insulating member 29 is not disposed at the first position A1 where the process using the ejection head 3 is performed. Thereby, execution of various processing (pattern formation processing, maintenance processing, etc.) by the cooperation of the ejection head 3 and each moving body 4, 5, 6, 7 is not hindered.

  Further, the heat insulating member 29 is not arranged at the second position A2 where the processing by the substrate transfer device 27 is executed. That is, in this embodiment, the heat insulation member 29 is arrange | positioned at the movement path | route of the mobile bodies 4, 5, 6, and 7 other than 1st position A1 and 2nd position A2. Thereby, the carrying-in operation of the substrate P by the substrate transfer device 27 and the carrying-out operation of the substrate P from the first moving body 4 to the first moving body 4 arranged at the second position A2 are not hindered.

  In the present embodiment, the heat insulating member 29 is disposed so as to surround the moving bodies 4, 5, 6, 7 at positions away from the moving bodies 4, 5, 6, 7 on the base member 17. The heat insulating member 29 forms an internal space 72 in which each moving body 4, 5, 6, 7 can move. Specifically, the heat insulating member 29 forms an internal space 72 in which each moving body 4, 5, 6, 7 can move (can be arranged) with the support surface 16 of the base member 17. The heat insulating member 29 blocks the diffusion of the heat of the first moving body 4 disposed in the internal space 72 to the external space 73. The external space 73 is a space outside the heat insulating member 29 with respect to the internal space 72. In the present embodiment, the external space 73 includes a space between the chamber main body 30 (the inner surface of the chamber main body 30) and the heat insulating member 29 (the outer surface of the heat insulating member 29).

  The air conditioner 31 of the chamber device 32 adjusts at least the temperature of the external space 73. Thereby, each apparatus and member in the chamber body 30 are arranged in a desired environment (temperature).

  The heat insulating member 29 has a heat insulating property, and is formed of a material that can block the diffusion of the heat of the first moving body 4 disposed in the internal space 72 to the external space 73. In the present embodiment, the heat insulating member 29 is made of a synthetic resin having heat insulating properties such as foamed polystyrene or foamed urethane.

  The heat insulating member 29 of the present embodiment has a tunnel shape, and openings (entrances / outlets) 74 through which the moving bodies 4, 5, 6, 7 can pass are formed on both sides of the heat insulating member 29 in the Y-axis direction. . The opening 74 is formed so as to communicate the internal space 72 formed by the heat insulating member 29 and the external space 73.

  Next, an example of a procedure for manufacturing a device using the droplet discharge apparatus IJ having the above-described configuration will be described.

  The control device 10 controls the driving device 8 to place the first moving body 4 at the second position A2. The control device 10 loads the substrate P into the first moving body 4 disposed at the second position A2 using the substrate transport device 27. The control device 10 controls the driving device 8 to move the first moving body 4 holding the substrate P to the first position A1.

  FIG. 14 is a schematic diagram illustrating a state in which the first moving body 4 holding the substrate P is disposed at the first position A1. The control device 10 arranges the first moving body 4 holding the substrate P at the first position A1 facing the ejection surface 2 of the ejection head 3. Then, the control device 10 controls the controller 12 and the driving device 8 to move the substrate P of the first moving body 4 in the Y-axis direction with respect to the discharge port 1 of the discharge head 3 while moving the substrate P of the discharge head 3. A droplet D is discharged (supplied) to the substrate P from the discharge port 1. Thereby, a pattern is formed on the substrate P by the droplets D. The control device 10 discharges droplets D onto the substrate P while heating the substrate P with the heating device 47.

  In the present embodiment, among the discharge ports 1 of the plurality of discharge heads 3, the distance between the most + X side discharge port 1 and the most −X side discharge port 1 and the size of the substrate P in the X-axis direction are almost the same. equal. Accordingly, the droplet discharge device IJ moves the substrate P of the first moving body 4 in the Y-axis direction with respect to the discharge port 1 of the discharge head 3 and applies the droplet D to the substrate P from the discharge port 1 of the discharge head 3. When discharging (supplying), the droplets D can be supplied to almost the entire surface of the substrate P by moving the substrate P in the Y-axis direction only once.

  In addition, the droplet discharge device IJ moves the substrate P of the first moving body 4 in the Y axis direction with respect to the discharge port 1 of the discharge head 3 and applies the droplet D to the substrate P from the discharge port 1 of the discharge head 3. The operation of discharging (supplying) may be repeated a plurality of times. For example, the operation of discharging the droplet D while moving the substrate P in the + Y direction and the operation of discharging the droplet D while moving the substrate P in the −Y direction may be repeated a plurality of times. Further, as disclosed in, for example, Japanese Patent Application Laid-Open No. 2004-146996, the position of the substrate P in the X-axis direction is moved by a small distance (for example, one pixel) every time the substrate P moves in the Y-axis direction. You may change only.

  As described above, the substrate P of the present embodiment is an LTCC substrate (green sheet) before sintering, and is supported by the film F. The droplet discharge device IJ discharges the droplet D onto the substrate P (green sheet) supported by the film F.

  After the operation of ejecting the droplets D on the substrate P is completed, the control device 10 controls the driving device 8 to carry the substrate P out of the first moving body 4 to move the first moving body 4 to the second position. Move to A2. In the present embodiment, the driving device 8 moves the plurality of moving bodies 4, 5, 6, and 7 together in the −Y direction (the direction from the first position A1 toward the second position A2).

  Since the heat insulating member 29 is arranged in the moving path of the first moving body 4 between the first position A1 and the second position A2, the first moving between the first position A1 and the second position A2. It can suppress that the heat of the mobile body 4 is dissipated to the external space 73.

  FIG. 15 is a schematic diagram illustrating a state in which the first moving body 4 holding the substrate P is disposed at the second position A2. In the present embodiment, the first moving body 4 capable of holding the substrate P is arranged on the most −Y side (second position A2 side) among the plurality (four) of moving bodies 4, 5, 6, and 7. It is a moving body. As shown in FIG. 15, when the first moving body 4 is arranged at the second position A2, among the plurality (four) moving bodies 4, 5, 6, and 7, the + Y side (first position) The size and number of each moving body 4, 5, 6, 7 and the first position A1 and the second position so that the fourth moving body 7 disposed on the A1 side) is disposed at the first position A1. The distance from A2 is set. Accordingly, as shown in FIG. 15, when the first moving body 4 is disposed at the second position A2, the fourth moving body 7 is disposed at the first position A1.

  The control device 10 uses the substrate transfer device 27 to carry out the substrate P from the first moving body 4 arranged at the second position A2, and to carry in a new substrate P into the first moving body 4.

  On the other hand, the control device 10 performs a maintenance process on the ejection head 3 using the fourth moving body 7 disposed at the first position A1. The dipping device 15 of the fourth moving body 7 performs a maintenance process (immersion process) in cooperation with the ejection head 3. As described with reference to FIG. 11 and the like, the control device 10 moves the discharge surface 2 to the inside of the container 68 through the opening 69, and discharges the discharge surface 2 to the liquid in the container 68 of the immersion device 15. So that the ejection head 3 is cleaned. Further, as described above, the ejection head 3 (plate member 37) discharges the droplet D while facing the substrate P of the first moving body 4, so that the ejection head 3 (plate member 37) includes the heating device 47. There is a possibility of being heated by heat. If the plate member 37 of the discharge head 3 is heated and left in that state, for example, the plate member 37 is thermally deformed, and the distance (nozzle pitch) between the discharge ports 1 formed in the plate member 37 varies. there is a possibility. When the nozzle pitch varies, the droplet D cannot be supplied to a desired position on the substrate P, and the performance of the manufactured device deteriorates. In the present embodiment, by immersing the ejection head 3 in the liquid of the immersion device 15, the heated ejection head 3 (plate member 37) is cooled, and the ejection head 3 (plate member 37) is returned to an optimum temperature ( Adjust). Therefore, it is possible to suppress the occurrence of problems such as fluctuation of the nozzle pitch.

  Further, in the present embodiment, the control device 10 uses the maintenance process for the ejection head 3 by the fourth moving body 7 disposed at the first position A1 and the first moving body 4 disposed at the second position A2. It is possible to execute in parallel with at least a part of the processing (unloading and loading processing of the substrate P). Thereby, the processing efficiency of the droplet discharge device IJ can be improved.

  After immersing the discharge surface 2 in the liquid in the container 68, the control device 10 uses the actuator of the support mechanism 39, the actuator 71 of the fourth moving body 7, etc. to take out the discharge surface 2 from the liquid in the container 68. The ejection head 3 and the container 68 are relatively moved so that the ejection surface 2 and the liquid surface (interface) of the container 68 are separated from each other.

  FIG. 16A is a diagram showing a state when the ejection surface 2 is taken out from the liquid in the container 68, and FIG. 16B is an enlarged view of FIG. 16A. The convex portion 80 is capable of coming into contact with the liquid in contact with the predetermined area 2A of the ejection surface 2, and is formed so that the liquid in contact with the predetermined area 2A moves outside the predetermined area 2A. As shown in FIG. 16, when the ejection surface 2 is taken out of the liquid in the container 68, the liquid that has contacted the predetermined area 2 </ b> A moves outside the predetermined area 2 </ b> A by the convex portion 80. Specifically, when the ejection surface 2 is taken out of the liquid in the container 68, first, the predetermined area 2A of the ejection surface 2 and the surface (interface) of the liquid in the container 68 are separated. Even at the moment when the predetermined area 2A of the ejection surface 2 and the liquid surface (interface) of the container 68 are separated, the convex portion 80 and the liquid surface (interface) of the container 68 are in contact with each other. By the relative movement of the ejection head 3 and the container 68 so that the ejection surface 2 and the liquid surface (interface) of the container 68 are separated from each other, the liquid in the container 68 does not adhere to the predetermined region 2A, It moves to the outside of the region 2A (the convex portion 80 disposed outside the predetermined region 2A). As a result, liquid droplets are prevented from adhering or remaining at least in the vicinity of the discharge port 1.

  In the present embodiment, the predetermined region 2A has liquid repellency with respect to the liquid, and the surface of the convex portion 80 has lyophilicity with respect to the liquid. As a result, the liquid is smoothly moved toward the outside (projection 80) of the predetermined area 2A, and the liquid droplets are prevented from adhering to or remaining in the vicinity of the discharge port 1.

  After the process (immersion process) using the fourth moving body 7 is completed, the control device 10 appropriately executes a maintenance process using the third moving body 6 and the second moving body 5 as necessary. When executing the maintenance process (wiping process) using the third moving body 6, the control device 10 controls the driving device 8 to move the plurality of moving bodies 4, 5, 6, 7 in the Y-axis direction. It moves together and arranges the third moving body 6 at the first position A1. When executing the maintenance process (capping process) using the second moving body 5, the control device 10 controls the driving device 8 to move the plurality of moving bodies 4, 5, 6, 7 to the Y axis. The second moving body 5 is arranged at the first position A1 by moving together in the direction.

  In the present embodiment, since the liquid remaining in the predetermined area 2A of the ejection surface 2 is suppressed by the convex portion 80, the wiping process can be omitted. In addition, when the liquid remains in the convex part 80 etc. by the immersion process, the remaining liquid can be removed by the wiping process.

  After the maintenance process is completed, the control device 10 controls the driving device 8 to move the plurality of moving bodies 4, 5, 6, and 7 together in the Y-axis direction, and moves the first moving body to the first position A1. 4 is arranged. The control device 10 starts a process (pattern formation process) for ejecting the droplets D from the ejection head 3 on the substrate P held by the first moving body 4 arranged at the first position A1. The first moving body 4 cooperates with the ejection head 3 to execute a process for forming a pattern on the substrate P with the droplets D (pattern formation process).

  In the present embodiment, droplets D are discharged onto a plurality of (for example, about 10 to 20) substrates P (green sheets), and a pattern is formed on each substrate P with the droplets D. The film F is removed from the substrate P after the pattern is formed with the droplets D. Then, a plurality of substrates P having a pattern formed by droplets D are stacked, and a stacked body of the substrates P is formed. Thereafter, the laminated body of the substrates P is heat-treated. Thereby, the droplets D on the substrate P are dried and fired, and the substrate P (green sheet) is also fired. Thereby, an LTCC substrate (LTCC multilayer circuit substrate) having a predetermined wiring pattern is formed.

  As described above, according to the present embodiment, the liquid that contacts the predetermined region 2A of the predetermined surface 2 including the discharge port 1 can be moved to the outside of the predetermined region 2A by the convex portion 80, so that at least the vicinity of the discharge port 1 It is possible to prevent liquid droplets from adhering to or remaining on the surface. Therefore, it is possible to suppress deterioration of the performance of the ejection head. As a result, the functional liquid droplets can be ejected to a desired position on the substrate P by using the ejection head 3 in which deterioration of performance is suppressed, and a device having the desired performance can be manufactured.

  For example, if a foreign matter such as a droplet adheres to the ejection surface 2 of the ejection head 3 or a foreign matter such as a droplet adheres to the ejection surface 2, the ejection surface 2 adheres to the ejection surface 2. There is a possibility that the performance of the ejection head 3 is deteriorated, for example, a foreign substance is disposed in the vicinity of the ejection port 1 or enters the ejection port 1 to cause ejection failure of the ejection head 3. In addition, if the droplets adhering to the ejection surface 2 of the ejection head 3 are left unattended, solids in the droplets precipitate or the droplets solidify to generate solid foreign matter. There is also a possibility to do. In addition, the solid foreign matter may enter the discharge port 1. When foreign matter adheres to the ejection surface 2, the wiping surface 56 is in contact with the ejection surface 2 in a state where the ejection surface 2 and the wiping surface 56 are in contact with each other in order to remove the foreign matter with the wiping device 14. When moving the discharge surface 2, the ejection surface 2 and the wiping surface 56 rub against each other. In that case, foreign matter adhering to the ejection surface 2 (including foreign matter adhering to a position away from the ejection port 1 on the ejection surface 2) is caused by the movement of the wiping surface 56 relative to the ejection surface 2. There is a possibility of being transported (moved) to the vicinity of 1. According to the present embodiment, even if the wiping process is omitted, it is possible to prevent liquid droplets from adhering to or remaining in the predetermined region 2A including the discharge port 1, so that foreign matter enters the discharge port 1 and the like. The occurrence of problems can be suppressed.

  In the above-described embodiment, the maintenance process using the second moving body 5, the third moving body 6, and the fourth moving body 7 can be executed at a predetermined timing. In the present embodiment, the maintenance process is executed for each operation of unloading the substrate P from the first moving body 4 and for each operation of loading the substrate P into the first moving body 4. You may make it perform a maintenance process for every space | interval.

Second Embodiment
Next, a second embodiment will be described. In the following description, the same or equivalent components as those of the above-described embodiment are denoted by the same reference numerals, and the description thereof is simplified or omitted.

  FIG. 17 is a diagram illustrating the ejection head 3 according to the second embodiment. In the first embodiment described above, the convex portion 80 is provided on the edge of the plate member 37, but as shown in FIG. 17, the convex portion 30 is formed in a region inside the edge of the plate member 37. You may make it do.

<Third Embodiment>
Next, a third embodiment will be described. FIG. 18 is a view showing the ejection head 3 according to the third embodiment. As shown in FIG. 18, the head body 36 of the ejection head 3 may have a convex portion 80. In other words, a part of the head body 36 may form the convex portion 80.

<Fourth embodiment>
Next, a fourth embodiment will be described. FIG. 19 is a view showing the ejection head 3 according to the fourth embodiment. As shown in FIG. 19, separately from the ejection head 3 including the head body 36 and the plate member 37, a convex member 80 </ b> A for forming the convex portion 80 may be connected to the ejection head 3. In the example shown in FIG. 19, the convex member 80 </ b> A is a plate-like member and is connected to the side surface of the ejection head 3.

<Fifth Embodiment>
Next, a fifth embodiment will be described. FIG. 20 is a diagram illustrating a droplet discharge device IJ according to the fifth embodiment. As shown in FIG. 20, the carriage member 11 may have a convex portion 80. In other words, a part of the carriage member 11 may form the convex portion 80.

  In each of the above embodiments, the substrate is an LTCC substrate (green sheet) and a wiring pattern (circuit pattern) is formed on the substrate. However, the substrate is not limited to a green sheet. Depending on the device to be manufactured, such as a glass substrate or a semiconductor wafer, it can be appropriately selected. Further, the conductive fine particles of the functional liquid used are not only silver but also metal fine particles such as gold, copper, palladium, and nickel as disclosed in, for example, JP-A-2005-34837. It may be a conductive polymer. Moreover, the dispersion medium used can also be suitably selected according to electroconductive fine particles. In addition to the wiring pattern, at least a part of a thin film transistor (TFT) can be formed.

  A device that can be manufactured using a droplet discharge device is not limited to a circuit board, and can form at least a part of a liquid crystal device, such as a color filter or an alignment film, or at least one of organic EL devices. A part can also be formed.

It is a schematic block diagram which shows the droplet discharge apparatus which concerns on 1st Embodiment. 1 is a perspective view illustrating a part of a droplet discharge device according to a first embodiment. It is the figure which looked at the some discharge head supported by the carriage member from the lower side. It is sectional drawing for demonstrating an example of the structure of a discharge head. It is a figure which shows an example of a 1st moving body. It is a figure which shows an example of a 2nd moving body. It is a figure for demonstrating an example of operation | movement of a 2nd moving body. It is a figure which shows an example of a 3rd moving body. It is a figure for demonstrating an example of operation | movement of a 3rd moving body. It is a figure which shows an example of a 4th moving body. It is a figure for demonstrating an example of operation | movement of a 4th moving body. It is a perspective view which shows a heat insulation member. It is a side view which shows a heat insulation member. It is a figure for demonstrating an example of operation | movement of the droplet discharge apparatus which concerns on 1st Embodiment. It is a figure for demonstrating an example of operation | movement of the droplet discharge apparatus which concerns on 1st Embodiment. It is a schematic diagram which shows an example of operation | movement of the convex part which concerns on 1st Embodiment. It is a figure which shows the convex part which concerns on 2nd Embodiment. It is a figure which shows the convex part which concerns on 3rd Embodiment. It is a figure which shows the convex part which concerns on 4th Embodiment. It is a figure which shows the convex part which concerns on 5th Embodiment.

Explanation of symbols

  DESCRIPTION OF SYMBOLS 1 ... Discharge port, 2 ... Discharge surface, 2A ... Predetermined area | region, 3 ... Discharge head, 11 ... Carriage member, 36 ... Head main body, 37 ... Plate member, 15 ... Dipping apparatus, 47 ... Heating apparatus, 68 ... Container, 69 ... Opening, 80 ... Convex, D ... Drop, P ... Substrate

Claims (14)

An ejection head having an ejection surface on which ejection openings for ejecting droplets of functional liquid are formed;
A protrusion projecting from the discharge surface outside a predetermined region of the discharge surface including the discharge port;
A liquid droplet ejection apparatus in which the liquid in contact with the predetermined region and the convex portion moves to the convex portion outside the predetermined region.   The droplet discharge device according to claim 1, wherein the predetermined region has liquid repellency with respect to a liquid.   The droplet discharge device according to claim 1, wherein the surface of the convex portion is lyophilic with respect to the liquid. In a state where the discharge surface and the surface of the substrate are opposed to each other with a predetermined distance, the droplet is discharged from the discharge port onto the substrate,
The droplet discharge device according to claim 1, wherein a distance between the discharge surface and the tip of the convex portion is smaller than the predetermined distance. The ejection head includes a head body, and a plate member that is disposed at an end of the head body and has the ejection surface in which the ejection port is formed,
The droplet discharge device according to claim 1, wherein the plate member has the convex portion. The ejection head includes a head body, and a plate member that is disposed at an end of the head body and has the ejection surface in which the ejection port is formed,
The liquid droplet ejection apparatus according to claim 1, wherein the head body has the convex portion. A carriage member for supporting a plurality of the ejection heads;
The droplet discharge device according to claim 1, wherein the carriage member has the convex portion. An immersion device that immerses the discharge surface in a liquid other than the functional liquid;
The droplet discharge device according to claim 1, wherein the liquid includes a liquid of the immersion device. The immersion device has an opening formed at the top and a container for storing a liquid,
The liquid that has come into contact with the predetermined region when the discharge surface is taken out of the liquid in the container after the discharge surface is moved to the inside of the container through the opening and the discharge surface is immersed in the liquid in the container 9. The droplet discharge device according to claim 1, wherein the droplet is moved outside the predetermined region by the convex portion.   The droplet discharge device according to claim 9, wherein the opening of the container has a size that allows the discharge surface and the convex portion to pass together.   11. The liquid droplet ejection apparatus according to claim 8, wherein the liquid of the immersion apparatus includes a cleaning liquid for cleaning at least a part of the ejection head.   The liquid droplet ejection apparatus according to any one of claims 8 to 11, wherein the liquid in the immersion apparatus includes a cooling liquid for cooling at least a part of the ejection head. A heating device for heating the substrate on which the droplets are discharged;
The droplet discharge apparatus according to claim 12, wherein the droplet is discharged from the discharge port onto the substrate in a state where the discharge surface and the heated surface of the substrate are opposed to each other. An operation of forming a pattern on the substrate by discharging droplets onto the substrate using the droplet discharge device according to claim 1;
An operation of drying droplets of the substrate.

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