JP2008168189A - PATTERN FORMING METHOD, DROPLET DISCHARGE DEVICE, AND ELECTRO-OPTICAL DEVICE - Google Patents

Abstract

The present invention provides a pattern forming method, a droplet discharge device, and an electro-optical device in which stripe unevenness caused by individual differences in nozzles is eliminated in a thin film pattern formed by discharging droplets.
A head driving circuit alternately inputs a dark color waveform signal and a light color waveform signal for each pixel to a piezoelectric element corresponding to a pixel group Cmn in an odd-numbered column. Further, when the head drive circuit inputs a dark waveform signal to the piezoelectric element corresponding to the pixel group Cmn in the odd-numbered columns,
A light waveform signal is input to the piezoelectric element corresponding to the pixel group Cmn in the even column. Also,
When the head driving circuit inputs the light waveform signal to the piezoelectric elements corresponding to the odd-numbered pixel group Cmn, the head driving circuit applies the dark color waveform signal to the piezoelectric element corresponding to the even-numbered pixel group Cmn. Enter.
[Selection] Figure 3

Description

  The present invention relates to a pattern forming method, a droplet discharge device, and an electro-optical device.

In general, a liquid crystal display is equipped with a color filter substrate having a large number of pixels. Each pixel of the color filter substrate receives light from the light source, transmits light of a specific wavelength, and displays a full color image on the liquid crystal display. In the manufacturing process of the color filter substrate, a so-called inkjet method in which each pixel is formed using a droplet discharge device is employed in order to improve productivity and reduce production cost.

The droplet discharge device includes a plurality of nozzles arranged in one direction and a plurality of actuators (for example, a piezo element and a resistance heating element) that pressurize a liquid material in each nozzle for each nozzle. The droplet discharge device drives each actuator according to a predetermined discharge frequency while relatively moving the color filter substrate and the plurality of nozzles along the scanning direction. Each of the arranged nozzles ejects droplets according to the ejection frequency, and draws a pattern made of a liquid material in order along the scanning direction of the color filter substrate. In the inkjet method, a liquid material containing a filter material is supplied to the droplet discharge device, and a pattern containing the filter material is drawn on each pixel region and dried.

By the way, in the above-described liquid droplet ejection apparatus, when variation in the ejection amount occurs in the nozzle row, large-sized liquid droplets or small-sized liquid droplets are continuously generated along the scanning direction of the color filter substrate. End up. For this reason, when a color filter substrate is formed by using the ink jet method, dark pixels or thin pixels continue in the scanning direction, and as a result, stripe-like color unevenness (straight unevenness) along the scanning direction occurs. ) Will occur.

Therefore, in the above-described ink jet method, conventionally, proposals have been made to eliminate this unevenness. In Patent Document 1, one nozzle is associated with each stripe-shaped pixel, each nozzle is scanned along the longitudinal direction of the stripe, and the droplet discharge amount is randomly changed for each nozzle. According to this, color shading can be formed along the longitudinal direction of the stripe, and even if there is a variation in the discharge amount of the nozzles, uneven stripes can be made inconspicuous.
JP 2002-174718 A

On the other hand, Patent Document 1 does not provide a specific rule regarding the density of the adjacent stripes. This is also because Patent Document 1 randomly defines the color shade of each stripe. For this reason, Patent Document 1 easily causes unevenness in density in adjacent stripes, and it is difficult to sufficiently eliminate unevenness due to individual differences in nozzles.

The present invention has been made in order to solve the above-described problems, and an object of the present invention is to provide a pattern forming method and liquid droplets in which unevenness due to individual nozzle differences is eliminated in a thin film pattern formed by discharging liquid droplets. It is an object to provide a discharge device and an electro-optical device.

In the pattern forming method of the present invention, a substrate having a plurality of first regions arranged in one direction and a plurality of nozzles arranged in another direction intersecting the one direction are relatively moved along the one direction,
When each of the plurality of first regions is opposed to the nozzle, the amount of the liquid discharged to each of the plurality of first regions is alternately changed into a first discharge amount and a second discharge amount for each of the first regions. And the relative movement of the substrate and the plurality of nozzles along the one direction, and the plurality of first
When each of the plurality of second regions adjacent to each of the regions is opposed to the nozzle, the amount of the liquid material in the adjacent first region is directed toward the second region where the first discharge amount is the second region. A step of discharging a liquid material of a discharge amount and discharging the liquid material of the first discharge amount toward the second region where the amount of the liquid material in the adjacent first region is the second discharge amount; Drying the liquid material discharged to the first region and the second region to form a thin film pattern on the first region and the second region.

According to the pattern forming method of the present invention, the pattern of the first region arranged along one direction is
A regular shading is represented for each first region, and a pattern of the second region arranged along one direction represents a regular shading for each second region. When the first region is a dark pattern, the adjacent second region is defined as a thin pattern. Conversely, when the first region is a thin pattern, the adjacent second region is defined as a dark pattern. Accordingly, it is possible to make it difficult to visually recognize the uneven stripe caused by the individual difference of the nozzles by the shades along one direction, and to avoid the unevenness of the shades by the shades of the adjacent patterns. As a result, it is possible to eliminate unevenness due to individual differences in nozzles in a thin film pattern formed by discharging droplets.

In this pattern forming method, when each of the plurality of first regions is opposed to the nozzle, the weight of the droplets ejected from the nozzle is changed for each of the first regions, and ejected to each of the first regions. The amount of the liquid material to be switched is alternately switched between the first discharge amount and the second discharge amount, and when each of the plurality of second regions faces the nozzle, the weight of the droplet discharged from the nozzle is set. By changing for each second region, the liquid material of the second discharge amount is discharged toward the second region where the amount of the liquid material in the adjacent first region is the first discharge amount. The liquid material of the first discharge amount is discharged toward the second region where the amount of the liquid material in the first region is the second discharge amount.

According to this pattern formation method, the amount of the liquid material in each region is alternately switched between the first discharge amount and the second discharge amount by changing the weight of the droplet. Therefore, the amount of the liquid material in each region can be switched without changing the number of droplets or the discharge timing of the droplets.

The droplet discharge device of the present invention includes a plurality of first regions arranged along one direction and the plurality of first regions.
A stage having a substrate having a plurality of second regions adjacent to each of the regions and moving along the one direction, and each of a plurality of nozzles arranged along the other direction intersecting the one direction An ejection head for ejecting the liquid material as droplets from the substrate to the substrate; a first drive signal for setting the amount of the liquid material ejected to each region to a first ejection amount; and a liquid material to be ejected to each region. Drive signal generating means for generating a second drive signal for setting the amount to a second discharge amount, a first nozzle for discharging the droplets to the first region based on drawing data, and the droplets to the second region Selection signal generating means for generating a selection signal for selecting the second nozzle that discharges the ink, and alternately the first drive signal and the second drive signal for the first nozzle selected based on the selection signal Liquid that is input and discharged to each of the plurality of first regions Are alternately switched between the first discharge amount and the second discharge amount for each first region, and the second drive signal and the first are selected for the second nozzle selected based on the selection signal. The drive signal is alternately input, the liquid material of the second discharge amount is discharged toward the second region where the amount of the liquid material of the adjacent first region is the first discharge amount, and the adjacent Control means for discharging the liquid material of the first discharge amount toward the second region where the amount of the liquid material of the first region is the second discharge amount.

According to the droplet discharge device of the present invention, the amount of the liquid material in the first region regularly increases / decreases for each first region, and the amount of the liquid material in the second region increases regularly for each second region. Increase or decrease. When the amount of the liquid material in the first region is the first discharge amount, the amount of the liquid material in the adjacent second region is defined as the second discharge amount, and conversely, the amount of the liquid material in the first region is When the amount is the second discharge amount, the amount of the liquid material in the adjacent second region is defined as the first discharge amount. Therefore, the pattern of the thin film formed by drying the liquid material represents the light and shade along one direction, and makes it difficult to visually recognize the uneven stripe caused by the individual difference of the nozzles.
Moreover, the unevenness of the shading can be avoided by the shading of adjacent patterns. As a result, it is possible to eliminate unevenness due to individual differences in nozzles in a thin film pattern formed by discharging droplets.

In this droplet discharge device, the first drive signal is a signal that causes the weight of the droplet to correspond to the first discharge amount, and the second drive signal is the weight of the droplet that is the second discharge amount. The control means alternately inputs the first drive signal and the second drive signal to the first nozzle selected based on the selection signal, and the plurality of first regions The weights of the droplets discharged to each of the first and second regions are alternately changed for each of the first regions, and the second drive signal and the first drive signal are alternately applied to the second nozzle selected based on the selection signal. The weight of the liquid droplets discharged to each of the plurality of second regions is alternately changed for each second region.

According to this droplet discharge device, the control unit changes the weight of the droplet, and alternately switches the amount of the liquid material in each region between the first discharge amount and the second discharge amount. Therefore, the amount of the liquid material in each region can be switched without changing the number of droplets or the discharge timing of the droplets.

The electro-optical device of the present invention is an electro-optical device having a plurality of pixels arranged in one direction, and each of the plurality of pixels is formed by the droplet discharge device.
According to the electro-optical device of the present invention, it is possible to provide an electro-optical device that does not have uneven stripes in a plurality of pixels.

Hereinafter, an embodiment embodying the present invention will be described with reference to FIGS. First, the liquid crystal display device 1 as an electro-optical device will be described. FIG. 1 is a perspective view showing the entire liquid crystal display device, and FIGS. 2 and 3 are a perspective view and a plan view showing a color filter substrate provided in the liquid crystal display device, respectively.

In FIG. 1, the liquid crystal display device 1 includes a backlight 2 and a liquid crystal panel 3. The backlight 2 irradiates the entire surface of the liquid crystal panel 3 with light emitted from the light source 4. LCD panel 3
Includes an element substrate 5 and a color filter substrate 6, and the element substrate 5 and the color filter substrate 6 are bonded together by a rectangular frame-shaped sealing material 7, and a liquid crystal is provided in the gap between the element substrate 5 and the color filter substrate 6. Encapsulate the LC. The liquid crystal LC modulates the light from the backlight 2 and displays a desired image on the upper surface of the color filter substrate 6.

In FIG. 2, on the upper surface of the color filter substrate 6 (the lower surface in FIG. 1: the side surface opposite to the element substrate 5), a lattice-shaped light shielding layer 8 and a large number of regions (filter regions 9) surrounded by the light shielding layer 8. ) And are formed. The upper surface of the color filter substrate 6 (the lower surface in FIG. 1)
Is referred to as a discharge surface 6a.

The light shielding layer 8 is a layer made of a resin containing a light shielding material such as chromium or carbon black, and shields light transmitted through the liquid crystal LC. The filter area 9 includes a plurality of red filter areas 9R.
And a plurality of green filter regions 9G and a plurality of blue filter regions 9B. These red filter region 9R, green filter region 9G and blue filter region 9
Each B is arranged along one direction. In each filter region 9, a color filter CF that transmits light of a corresponding specific wavelength is formed. That is, each of the red filter regions 9R, each of the green filter regions 9G, and each of the blue filter regions 9B has a red filter FR that transmits red light and a green filter that transmits green light. An FG and a blue filter FB that transmits blue light are formed.

Here, the arrangement direction (X direction) of the filters FR, FG, and FB for each color is referred to as a sub-scanning direction, and the direction perpendicular to the sub-scanning direction (Y direction) is the main scanning direction.
Further, three different color filters FR, FG, and FB that are continuous along the main scanning direction are defined as one pixel C, and a group of pixels C that are arranged along the sub-scanning direction, or an array along the main scanning direction. The group of pixels C thus obtained is referred to as a pixel group Cmn (m and n are integers).

Note that the pixel groups Cmn arranged along the sub-scanning direction are sequentially arranged from the main scanning direction in the first row pixel group C1n, the second row pixel group C2n, the third row pixel group C3n,. It is called a row pixel group Cin (i is an integer). In addition, each pixel group Cmn arranged along the main scanning direction is
The first column pixel group Cm1, the second column pixel group Cm2, the third column pixel group Cm3,..., And the jth column pixel group Cmj (j is an integer) in order from the anti-sub-scanning direction.

In FIG. 3, each pixel group Cmn includes a pixel C composed of a dark color filter CF (region with gradation: dark pixel CH) and a pixel C composed of a light color filter CF (with gradation). Area: light-colored pixel CL). In each pixel group Cmn, the dark color pixel CH and the light color pixel CL are alternately and repeatedly arranged.

For example, each pixel group Cmn in the odd-numbered row (first row pixel group C1n, third row pixel group C3n, etc.)
, In the order of the dark color pixel CH, the light color pixel CL, the dark color pixel CH,... From the first column pixel group Cm1 in the sub scanning direction, respectively. Are repeatedly arranged. On the other hand, in the pixel group Cmn in the even-numbered rows (second row pixel group C2n, i-th row pixel group Cin, etc.), the light-colored pixels CL and dark colors are moved from the first-column pixel group Cm1 toward the sub-scanning direction. The light color pixel CL and the dark color pixel CH are repeatedly arranged in the order of the pixel CH, the light color pixel CL,.

That is, in the color filter substrate 6, with respect to both the main scanning direction and the sub-scanning direction,
The dark pixels CH and the light pixels CL are alternately and repeatedly arranged, thereby representing a checkered pattern on the entire ejection surface 6a.

Each of the dark color pixel CH and the light color pixel CL is formed by using the droplet discharge device of the present invention. That is, the dark color pixel CH and the light color pixel CL are each formed by discharging a liquid material containing a filter material into the filter region 9 and drying the liquid material that has landed inside each filter region 9. .

Next, the droplet discharge device 10 for forming each pixel C will be described. FIG. 4 is an overall perspective view showing the droplet discharge device 10.
In FIG. 4, the droplet discharge device 10 has a base 11 formed in a rectangular parallelepiped shape. A substrate stage 12 that is drivingly connected to an output shaft of a stage motor provided on the base 11 is attached to the upper surface of the base 11. The substrate stage 12 places the color filter substrate 6 with the discharge surface 6a facing upward, and positions and fixes the color filter substrate 6. Substrate stage 1
2, when the stage motor rotates forward or backward, it reciprocates at a predetermined speed along the main scanning direction (Y direction) to scan the color filter substrate 6 along the main scanning direction.

A guide member 13 formed in a gate shape is installed on the upper side of the base 11 along the X direction orthogonal to the Y direction, and an ink tank 14 is disposed on the upper side of the guide member 13. The ink tank 14 stores a liquid material (filter ink Ik for each color) containing a filter material, and derives the filter ink Ik at a predetermined pressure.

A carriage 15 that is drivingly connected to an output shaft of a carriage motor provided on the guide member 13 is attached to the lower side of the guide member 13. A plurality of discharge heads 16 are arranged below the carriage 15 along the sub-scanning direction (X direction). The carriage 15 reciprocates along the sub-scanning direction when the carriage motor rotates normally or reversely, and each ejection head 1
6 is scanned along the sub-scanning direction.

A droplet weight device 17 is disposed on the left side of the base 11. The droplet weight device 17 measures the weight of the droplet discharged from the discharge head 16 for each nozzle N, and a known weight measuring device can be used. As the droplet weight device 17, for example, an electronic balance that receives a discharged droplet by a receiving pan and measures the droplet can be used. In addition, the droplet weight device 17
For example, a piezoelectric vibrator that changes a resonance frequency by landing of a droplet can be used.

FIG. 5 is a perspective view of the ejection head 16 as viewed from the substrate stage 12, and FIG. 6 is a plan view schematically showing the positional relationship between the nozzles N and the pixels C provided in the ejection head 16. Also,
7 is a cross-sectional view taken along line AA in FIG.

In FIG. 5, a nozzle plate 18 is provided above the ejection head 16. A nozzle forming surface 18a parallel to the color filter substrate 6 is formed on the upper surface of the nozzle plate 18, and 180 nozzles N penetrating in the normal direction of the nozzle forming surface 18a are arranged on the nozzle forming surface 18a. ing. A head substrate 19 is provided below the discharge head 16.
An input terminal 19 a is provided at one end of the head substrate 19. A predetermined drive waveform signal for driving the ejection head 16 is input to the input terminal 19a.

In FIG. 6, the nozzles N are arranged at equal intervals along the sub-scanning direction (X direction) of the nozzle forming surface 18a. The arrangement pitch of the nozzles N is such that at least one or more nozzles N for one pixel C when the color filter substrate 6 is scanned along the main scanning direction.
(For example, three nozzles N) are arranged on the scanning path of the pixel C.

In FIG. 7, cavities 21 communicating with the ink tanks 14 are formed above the nozzles N, respectively. Each cavity 21 stores the filter ink Ik derived from the ink tank 14 and supplies it to the corresponding nozzle N. On the upper side of each cavity 21,
A diaphragm 22 that can vibrate in the vertical direction is affixed so that the volume of the corresponding cavity 21 can be enlarged and reduced. Piezoelectric elements PZ are respectively disposed on the upper side of the diaphragm 22. Each piezoelectric element PZ contracts and expands in the vertical direction to vibrate the corresponding diaphragm 22 when a drive waveform signal for driving the piezoelectric element PZ is input.

Each cavity 21 has a corresponding nozzle N when the corresponding diaphragm 22 vibrates.
The filter ink Ik having a predetermined weight corresponding to the drive waveform signal is ejected as a droplet D from the corresponding nozzle N. The discharged droplet D flies along a substantially normal line of the color filter substrate 6 and lands in the filter region 9 facing the nozzle N. The landed droplets D coalesce and spread within the corresponding filter region 9 to form a liquid film LF that spreads over the entire filter region 9. The liquid film LF formed in the filter region 9 evaporates the solvent or dispersion medium by a predetermined drying process to form a color filter CF having a film thickness corresponding to the weight of the liquid film LF.

Here, the drive waveform signal for forming the dark color pixel CH, that is, the drive waveform signal for discharging the relatively large (heavy) droplet D is referred to as a dark color waveform signal COMA. A drive waveform signal for forming the light color pixel CL, that is, a signal for ejecting a relatively small (light) droplet D is referred to as a light color waveform signal COMB.

The large-size droplet D is a size relative to the largest-sized droplet D among the droplets D measured using the droplet weight device 17. Is a size relative to the smallest droplet D among the droplets D measured using the droplet weight device 17. That is, the dark color pixel CH and the light color pixel CL are formed so as to express clearer shades than the shades represented by the variation of the droplets D ejected from each nozzle N.

The piezoelectric elements PZ corresponding to the odd-numbered pixel group Cmn receive the dark color waveform signal COMA when the odd-numbered pixel group Cmn is located immediately below the nozzle N, respectively. Drop D is discharged. In addition, the piezoelectric elements PZ corresponding to the odd-numbered pixel group Cmn have the light waveform signal C when the even-numbered pixel group Cmn is located immediately below the nozzle N, respectively.
In response to the OMB, a relatively small droplet D is ejected.

On the other hand, the piezoelectric elements PZ corresponding to the even-numbered pixel groups Cmn receive the light-color waveform signal COMB when the filter region 9 located immediately below the nozzle N becomes the odd-numbered pixel group Cmn. A droplet D having a small size is discharged. The piezoelectric elements PZ corresponding to the even-numbered pixel groups Cmn receive the dark waveform signal COMA when the filter region 9 located immediately below the nozzle N becomes the even-numbered pixel group Cmn. Large droplet D
To discharge.

Next, the electrical configuration of the droplet discharge device 10 will be described with reference to FIGS.
FIG. 8 is a block circuit diagram showing the electrical configuration of the droplet discharge device 10, and FIG. 9 is a block circuit diagram showing the electrical configuration of the head drive circuit.

In FIG. 8, the control device 30 causes the droplet discharge device 10 to execute various processing operations. The control device 30 includes an external I / F 31, a control unit 32 including a CPU, and a DRA.
It has RAM33 which stores various data including M and SRAM, and ROM34 which stores various control programs. Further, the control device 30 generates an oscillation circuit 3 that generates a clock signal.
5, a drive waveform generation circuit 36 as a drive signal generation means, a weight device drive circuit 37 for driving the droplet weight device 17, a motor drive circuit 38 for scanning the substrate stage 12 and the carriage 15, And an internal I / F 39 for transmitting various signals. This control device 3
0 is connected to the input / output device 40 via the external I / F 31, and is connected to the substrate stage 12, the carriage 15, the droplet weight device 17, and the head drive circuit 41 constituting the control means via the internal I / F 39. ing.

The input / output device 40 is an external computer having, for example, a CPU, RAM, ROM, hard disk, liquid crystal display, and the like. The input / output device 40 outputs various control signals for driving the droplet discharge device 10 to the external I / F 31 in accordance with a control program stored in the ROM or the hard disk. The external I / F 31 receives drawing data Ip from the input / output device 40.
Receive.

Here, the drawing data Ip is, for example, information on the position of the filter region 9, the dark pixel C
This is data for ejecting droplets D of a corresponding size toward each filter region 9 on the ejection surface 6a, such as information on the positions of H and light-colored pixels CL and information on the scanning speed of the substrate stage 12.

The RAM 33 is used as a reception buffer 33a, an intermediate buffer 33b, and an output buffer 33c. The ROM 34 stores various control routines executed by the control unit 32 and various data for executing the control routine.

The oscillation circuit 35 generates a clock signal for synchronizing various data and various drive signals. The oscillation circuit 35 generates a transfer clock SCLK used at the time of serial transfer of various data, for example. The oscillation circuit 35 generates a latch signal LAT used at the time of parallel conversion of various data transferred serially.

The drive waveform generation circuit 36 includes a waveform memory 36a, a latch circuit 36b, and a D / A converter 36c.
And an amplifier 36d. The waveform memory 36a stores waveform data for generating various drive waveform signals COM (for example, the waveform signal COMA for dark color and the waveform signal COMB for light color) in association with predetermined addresses. The latch circuit 36b latches the waveform data read from the waveform memory by the control unit 32 with a predetermined clock signal. The D / A converter 36c converts the waveform data latched by the latch circuit 36b into an analog signal, and the amplifier 36d amplifies the analog signal converted by the D / A converter 36c to generate a drive waveform signal COM.

When the input / output device 40 receives the drawing data Ip, the control unit 32 reads the waveform data in the waveform memory 36a with reference to the drawing data Ip, and sends the dark waveform signal COMA and the light color waveform to the drive waveform generation circuit 36. A waveform signal COMB is generated.

In FIG. 6, the control unit 32 outputs a drive control signal corresponding to the weight device drive circuit 37. The weight device drive circuit 37 responds to the drive control signal from the control unit 32, and receives the internal I / F 39.
Then, the droplet weight device 17 is driven.

The control unit 32 outputs a drive control signal corresponding to the motor drive circuit 38. The motor drive circuit 38 scans the substrate stage 12 and the carriage 15 via the internal I / F 39 in response to the drive control signal from the control unit 32.

The control unit 32 constituting the selection signal generating means is the input / output device 40 received by the external I / F 31.
Is temporarily stored in the receiving buffer 33a. The control unit 32 converts the drawing data Ip into an intermediate code and stores it as intermediate code data in the intermediate buffer 33b. The control unit 32 reads the intermediate code data from the intermediate buffer 33b, develops it into dot pattern data, and stores the dot pattern data in the output buffer 33c. Further, the control unit 32 reads the intermediate code data from the intermediate buffer 33b, develops it into common pattern data, and stores the common pattern data in the output buffer 33c.

The dot pattern data is data for associating whether or not the droplet D is ejected to each lattice point of the dot pattern lattice. The dot pattern grid is a grid defined by the discharge pitch along the X direction and the discharge pitch along the Y direction on the two-dimensional drawing plane (discharge surface 6a). It is a grid for defining discharge / non-discharge.

The common pattern data is data for associating one of the dark color waveform signal COMA and the light color waveform signal COMB with each grid point of the dot pattern grid.

When the dot pattern data and the common pattern data corresponding to one scan of the substrate stage 12 are developed, the control unit 32 generates serial data synchronized with the transfer clock SCLK using the dot pattern data and the common pattern data. Serial transfer is made to the head drive circuit 41 via the internal I / F 39. When the controller 32 serially transfers dot pattern data and common pattern data for one scan, the intermediate buffer 33b
Is deleted, and the expansion process is executed for the next intermediate code data.

Here, the serial data generated using the dot pattern data is referred to as serial dot data SIA. The serial dot data SIA has bit values for defining the ejection / non-ejection of dots for the number of nozzles N, that is, 180, and is sequentially generated for each grid of dot pattern grids along the scanning direction.

Serial data generated using the common pattern data is referred to as serial common data SIB. The serial common data SIB has bit values for defining dark and light colors by the number of nozzles, that is, 180, and is sequentially generated for each grid of dot pattern grids along the scanning direction.

Next, the head drive circuit 41 will be described below.
In FIG. 9, a head drive circuit 41 includes an output control signal generation circuit 42 for generating an output control signal PI, and a common selection signal for generating a dark color common selection signal PXA and a light color common selection signal PXB. And a generation circuit 43. Further, the head drive circuit 41 supplies each drive waveform signal COM to the output synthesis circuit 44, a level shifter 45 that boosts the logic system signal to the drive voltage level of the analog switch, and each piezoelectric element PZ. And a two-system switch circuit 46 having an analog switch for the purpose.

The output control signal PI, the dark color common selection signal PXA, and the light color common selection signal PXB constitute a selection signal.
When the transfer clock SCLK and the serial dot data SIA are input from the control device 30, the output control signal generation circuit 42 converts the serial dot data SIA into the transfer clock SCL.
Store sequentially shifted by K. When the latch signal LAT is input from the control device 30, the output control signal generation circuit 42 latches the stored serial dot data SIA,
Serial / parallel conversion.

The output control signal generation circuit 42 is serial / parallel converted serial dot data SI.
An output control signal PI is generated using A. The output control signal PI is 180-bit data that defines the discharge / non-discharge of the droplet D for each of the 180 nozzles N by the value of each bit (“0” or “1”).

In FIG. 9, the common selection signal generation circuit 43 receives a transfer clock SCL from the control device 30.
When K and serial common data SIB are input, the serial common data SIB is sequentially shifted by the transfer clock SCLK and stored. When the latch signal LAT is input from the control device 30, the common selection signal generation circuit 43 latches the stored serial common data SIB and performs serial / parallel conversion.

The common selection signal generation circuit 43 has serial / parallel converted serial common data S.
The dark color common selection signal PXA and the light color common selection signal PXB are generated using the IB.
The dark color common selection signal PXA is a dark color waveform signal C for each of the 180 nozzles N.
OMA selection / non-selection is defined by the value of each bit (“0” or “1”) 180
Bit data. The light color common selection signal PXB is a 180-bit signal that defines the selection / non-selection of the light color waveform signal COMB for each of the 180 nozzles N by the value of each bit ("0" or "1"). It is data.

In FIG. 9, the output synthesis circuit 44 has a first common output synthesis circuit 44A and a second common output synthesis circuit 44B. A common 180-bit output control signal PI from the output control signal generation circuit 42 is input to each of the first common output synthesis circuit 44A and the second common output synthesis circuit 44B. Further, the first common output combining circuit 44A and the second common output combining circuit 44B are respectively supplied from the common selection signal generation circuit 43 to the dark color common selection signal PXA.
The light color common selection signal PXB is input.

The first common output synthesizing circuit 44A uses the output control signal PI and the dark color common selection signal PXA to determine whether or not to supply the dark color waveform signal COMA to each of the piezoelectric elements PZ.
A non-supplied signal), that is, a dark color control signal CPA is output.

Then, the first common output combining circuit 44A applies the dark color waveform signal COMA to the nozzle N (piezoelectric element PZ) for which the discharge of the droplet D is prescribed and the dark waveform signal COMA is selected.
A dark color control signal CPA is supplied to supply. On the other hand, the first common output synthesis circuit 44
A is a nozzle N (piezoelectric element PZ) in which non-ejection of the droplet D is defined, or a dark waveform signal C
A dark color control signal CPA for not supplying the dark color waveform signal COMA to the nozzle N (piezoelectric element PZ) for which OMA is not selected is output.

The second common output synthesizing circuit 44B uses the output control signal PI and the light color common selection signal PXB to determine whether to supply the light color waveform signal COMB to each of the piezoelectric elements PZ.
A signal specifying non-supply), that is, a light color control signal CPB.

The second common output combining circuit 44B then applies the light waveform signal COMB to the nozzle N (piezoelectric element PZ) for which the discharge of the droplet D is prescribed and the light waveform signal COMB is selected.
A light-color control signal CPB for supplying On the other hand, the second common output synthesis circuit 44
B is a nozzle N (piezoelectric element PZ) in which non-ejection of the droplet D is prescribed, or a light waveform signal C
A light color control signal CPB for preventing the light color waveform signal COMB from being supplied to the nozzle N (piezoelectric element PZ) for which OMB is not selected is output.

The level shifter 45 is a first common level shifter 45 that uses the dark color control signal CPA.
A and a second common level shifter 45B using the light color control signal CPB. The dark color control signal CPA and the light color control signal CPB are input from the corresponding output synthesis circuits 44 to the first common level shifter 45A and the second common level shifter 45B, respectively. The first common level shifter 45A and the second common level shifter 45B boost the dark color control signal CPA and the light color control signal CPB to the drive voltage level of the analog switch, respectively.
Open / close signals corresponding to 180 piezoelectric elements PZ are output.

The switch circuit 46 is a first common switch circuit 4 that uses the dark waveform signal COMA.
6A and a second common switch circuit 46B using the light-color waveform signal COMB. The first common switch circuit 46A and the second common switch circuit 46B each have 180 analog switches corresponding to the piezoelectric elements PZ. First common switch circuit 4
An opening / closing signal is input from the corresponding level shifter 45 to 6A and the second common switch circuit 46B. First common switch circuit 46A and second common switch circuit 46
A dark color waveform signal COMA and a light color waveform signal COMB are input to the input ends of the analog switches provided in B, and the corresponding piezoelectric elements PZ are connected to the output ends of the analog switches. Has been. Each analog switch receives an open / close signal from the corresponding level shifter 45, and outputs a corresponding drive waveform signal COM to the corresponding piezoelectric element PZ when the open / close signal becomes “H” level.

Accordingly, when ejection of the droplet D is selected by each of the 180 piezoelectric elements PZ by the output control signal PI, the dark color waveform is determined by the dark color control signal CPA and the light color control signal CPB. Either the signal COMA or the light color waveform signal COMB is supplied.

Next, a manufacturing method of the liquid crystal display device 1 using the droplet discharge device 10 will be described below.
First, as shown in FIG. 4, the color filter substrate 6 is placed on the substrate stage 12 with the ejection surface 6a facing upward. At this time, the substrate stage 12 arranges the color filter substrate 6 in the anti-main scanning direction of the carriage 15. From this state, the input / output device 40 inputs the drawing data Ip to the control device 30.

At this time, the drawing data Ip defines a dark color pixel CH for each pixel group Cmn in the odd rows and odd columns and a light color pixel CL for the pixel groups Cmn in the odd rows and even columns. The drawing data Ip defines a light color pixel CL for the even-numbered and odd-numbered pixel group Cmn and defines a dark-colored pixel CH for the even-numbered and even-numbered pixel group Cmn.

When the drawing data Ip is input from the control device 30, the control device 30 sends the motor drive circuit 3
The carriage 15 is scanned via 8, and the carriage 15 is arranged so that each ejection head 16 passes over the corresponding filter region 9 when the color filter substrate 6 is scanned in the Y arrow direction. When the carriage 15 is arranged, the control device 30 starts scanning the substrate stage 12 via the motor drive circuit 38.

Further, the control device 30 generates dot pattern data and common pattern data using the drawing data Ip input from the input / output device 40. When the control device 30 generates dot pattern data and common pattern data corresponding to one scan, it generates serial dot data SIA and serial common data SIB, and transfers serial dot data SIA and serial common data SIB. The head drive circuit 41 is synchronized with SCLK.
Serial transfer to

When the substrate stage 12 reaches a predetermined drawing start position, the control device 30 outputs a latch signal LAT to the head drive circuit 41, and sends the serial dot data SI to the head drive circuit 41.
A and the serial common data SIB are latched.

When the head drive circuit 41 latches the serial dot data SIA, it uses the serial / parallel converted serial dot data SIA, and outputs control signals that define ejection / non-ejection of droplets D for each of the 180 nozzles N. Generate PI. When the serial drive data 41 latches the serial common data SIB, the head drive circuit 41 generates the dark color common selection signal PXA and the light color common selection signal PXB using the serial / parallel converted serial common data SIB. The head drive circuit 41 also outputs an output control signal PI and a dark color common selection signal PXA.
Is used to generate a dark color control signal CPA, an output control signal PI and a light color common selection signal P
A light color control signal CPB is generated using XB.

The head drive circuit 41 then selects the piezoelectric element P selected according to the dark color control signal CPA.
A dark color waveform signal COMA is supplied to Z, and a light color waveform signal COMB is supplied to the piezoelectric element PZ selected according to the light color control signal CPB.

That is, when the odd-numbered pixel group Cmn is located immediately below the nozzle N, the head drive circuit 41 applies the dark waveform signal COMA to the piezoelectric element PZ corresponding to the odd-numbered pixel group Cmn.
And the light waveform signal COM for the piezoelectric element PZ corresponding to the pixel group Cmn in the even column.
B is supplied. In addition, the head drive circuit 41 has the even-numbered pixel group Cmn immediately below the nozzle N.
Is provided, the light waveform signal COMB is supplied to the piezoelectric elements PZ corresponding to the odd-numbered pixel groups Cmn, and the dark-color waveform signal is supplied to the piezoelectric elements PZ corresponding to the even-numbered pixel groups Cmn. Supply COMA.

As a result, the dark color pixels CH and the light color pixels CL are alternately and repeatedly formed along both the main scanning direction and the sub scanning direction, respectively, and the color filter exhibiting a checkered pattern on the entire color filter substrate 6. CF is formed.

Next, effects of the present embodiment configured as described above will be described below.
(1) According to the above embodiment, the head drive circuit 41 outputs the dark color waveform signal COMA and the light color waveform signal COMB to the pixel C for the piezoelectric element PZ corresponding to the odd-numbered pixel group Cmn.
Input alternately every time. Further, when the head drive circuit 41 inputs the dark color waveform signal COMA to the piezoelectric element PZ corresponding to the odd-numbered pixel group Cmn, the even-numbered pixel group Cm.
The light color waveform signal COMB is input to the piezoelectric element PZ corresponding to n. Further, when the head drive circuit 41 inputs the light waveform signal COMB to the piezoelectric elements PZ corresponding to the odd-numbered pixel groups Cmn, the head driving circuit 41 applies to the piezoelectric elements PZ corresponding to the even-numbered pixel groups Cmn. The dark waveform signal COMA is input.

Accordingly, the dark color pixel CH and the light color pixel CL can be alternately and repeatedly formed along both the main scanning direction and the sub scanning direction over the entire discharge surface 6a, and the entire color filter substrate 6 is checked. The shade of the pattern can be expressed. As a result, it is possible to make it difficult to visually recognize the uneven stripe caused by the individual difference of the nozzles N due to the shade of the pixel C along one direction, and to avoid the unevenness of the shade by the shade of the adjacent pixel C.

(2) According to the above embodiment, the size of the droplet D ejected from the nozzle N is changed for each pixel C to form the dark color pixel CH and the light color pixel CL, respectively. Therefore, it is not necessary to change the number of droplets D, the discharge timing of the droplets D, etc. for each pixel C. Therefore, the amount of the filter ink Ik discharged to each pixel C can be switched with a simpler apparatus configuration.

In addition, you may change the said embodiment as follows.
In the above embodiment, the dark color pixel CH and the light color pixel CL are formed by switching between the dark color waveform signal COMA and the light color waveform signal COMB. For example, the dark pixel C is not limited to this.
H and the light color pixel CL may be formed by changing the number of droplets D. That is, a common drive waveform signal COM is supplied to each nozzle N, and a relatively large number of droplets D are ejected to the filter region 9 for forming the dark color pixel CH. A configuration may be adopted in which a relatively small number of droplets D are ejected to the filter region 9 for forming the color pixel CL.

In the above embodiment, the control unit 32 is configured to generate dot pattern data and common pattern data using the drawing data Ip. For example, the input / output device 40 generates dot pattern data and common pattern data using the drawing data Ip, and the input / output device 40 inputs the dot pattern data and common pattern data to the control device 30. It may be configured.

In the above embodiment, the actuator for discharging the droplet D is embodied in the piezoelectric element PZ. For example, the actuator may be embodied as a resistance heating element as long as it receives a predetermined drive waveform signal COM and discharges a droplet D having a weight corresponding to the drive waveform signal COM.

In the above embodiment, each ejection head 16 is configured to include 180 nozzles N in only one row. For example, each ejection head 16 may be configured to include two or more rows of 180 nozzles N, and the number of nozzles in the row may be embodied with a quantity larger than 180.

In the above embodiment, the electro-optical device is embodied in the liquid crystal display device 1, and the color filter CF is manufactured using the droplets D. For example, the electro-optical device may be embodied as an electroluminescence display device, and the light-emitting element may be manufactured using the droplets D containing the light-emitting element forming material.

The perspective view which shows a liquid crystal display device. The perspective view which shows a color filter board | substrate. The top view which shows a color filter board | substrate. The perspective view which shows a droplet discharge apparatus. The perspective view which shows a droplet discharge head. The top view which shows typically the positional relationship between a nozzle and a pixel. FIG. 3 is a side sectional view showing a droplet discharge head. The electric block circuit diagram which shows the electric constitution of a droplet discharge apparatus. FIG. 3 is an electric block circuit diagram showing a head driving circuit.

Explanation of symbols

C: Pixel as a pattern, COMA: Dark color drive signal as a first drive signal, COM
B: Light color drive signal as second drive signal, D: Droplet, Ik: Filter ink as liquid, Ip: Drawing data, N: Nozzle, PZ: Piezoelectric element, 6: Color filter substrate, 9 ...
A pixel region constituting the first region and the second region, 10... A droplet discharge device, 12.
DESCRIPTION OF SYMBOLS 16 ... Discharge head, 32 ... Control part which comprises selection signal production | generation means, 36 ... Drive waveform generation circuit which comprises drive signal production | generation means, 41 ... Head drive circuit which comprises control means.

Claims (5)

A substrate having a plurality of first regions arranged in one direction and a plurality of nozzles arranged in another direction intersecting the one direction are relatively moved along the one direction, and each of the plurality of first regions is A step of alternately switching the amount of liquid discharged to each of the plurality of first regions between the first discharge amount and the second discharge amount for each of the first regions when facing the nozzle;
When the substrate and the plurality of nozzles are relatively moved along the one direction, and each of the plurality of second regions adjacent to each of the plurality of first regions is opposed to the nozzle, the adjacent first The liquid material of the second discharge amount is discharged toward the second region where the amount of liquid material in the region is the first discharge amount, and the amount of liquid material in the adjacent first region is the second discharge amount. Discharging the liquid material of the first discharge amount toward the second region,
Drying the liquid material discharged to the first region and the second region to form a thin film pattern on the first region and the second region,
A pattern forming method characterized by the above. The pattern forming method according to claim 1,
When each of the plurality of first regions is opposed to the nozzle, the weight of the liquid discharged from the nozzle is changed for each of the first regions and the amount of the liquid material discharged to each of the first regions Alternately switching between the first discharge amount and the second discharge amount,
When each of the plurality of second regions is opposed to the nozzle, the weight of a droplet discharged from the nozzle is changed for each second region, and the amount of the liquid material in the adjacent first region is changed to the first region. The second discharge amount of the liquid material is discharged toward the second region that is one discharge amount, and the amount of the liquid material in the adjacent first region is directed toward the second region that is the second discharge amount. Discharging the first discharge amount of liquid,
A pattern forming method characterized by the above. A stage on which a substrate having a plurality of first regions arranged along one direction and a plurality of second regions adjacent to each of the plurality of first regions is placed and moved along the one direction; ,
An ejection head for ejecting liquid material as droplets from each of a plurality of nozzles arranged along the other direction intersecting the one direction toward the substrate;
A drive signal for generating a first drive signal for setting the amount of liquid material discharged to each region to a first discharge amount and a second drive signal for setting the amount of liquid material discharged to each region to a second discharge amount Generating means;
A selection signal generating means for generating a selection signal for selecting a first nozzle for discharging the droplet to the first region and a second nozzle for discharging the droplet to the second region based on drawing data;
The first drive signal and the second drive signal are alternately input to the first nozzle selected based on the selection signal, and the amount of the liquid material discharged to each of the plurality of first regions is changed to the first nozzle. The first discharge amount and the second discharge amount are alternately switched for each region, and the second drive signal and the first drive signal are alternately switched for the second nozzle selected based on the selection signal. , The second discharge amount of the liquid material is discharged toward the second region where the amount of the liquid material in the adjacent first region is the first discharge amount, and the liquid material in the adjacent first region is discharged. Control means for discharging the liquid material of the first discharge amount toward the second region where the amount of the body is the second discharge amount;
A droplet discharge apparatus comprising: The droplet discharge device according to claim 3,
The first drive signal is a signal that causes the weight of the droplet to correspond to the first ejection amount,
The second drive signal is a signal that causes the weight of the droplet to correspond to the second ejection amount,
The control means alternately inputs the first drive signal and the second drive signal to the first nozzle selected based on the selection signal, and the liquid droplets are ejected to each of the plurality of first regions. The second drive signal and the first drive signal are alternately input to the second nozzle selected based on the selection signal, and the plurality of second drive signals are alternately input to the first region. Alternately changing the weight of droplets discharged to each of the two regions for each of the second regions;
A droplet discharge device characterized by the above. An electro-optical device having a plurality of pixels arranged in one direction,
An electro-optical device, wherein each of the plurality of pixels is formed by the droplet discharge device according to claim 3.

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