JP2008036575A - Pattern forming method and droplet discharge apparatus - Google Patents

Abstract

The present invention provides a pattern forming method and a droplet discharge device capable of maintaining pattern productivity regardless of the presence or absence of abnormal nozzles.
A control device 31 stores first bitmap data MD1 defining at least one ON state in all piezoelectric elements in accordance with each ejection region, and second to second in accordance with each ejection region. Second to fourth bitmap data MD2 to MD4 defining at least one ON state are stored in the piezoelectric elements corresponding to the fourth nozzle group. The control device 31 sets one of the test mode and the normal mode according to the mode setting signal Im from the input / output device 32. In the test mode, the control device 31 sets each of the first to fourth nozzle groups. And the drawing process is executed based on the bitmap data corresponding to each nozzle group. In the normal mode, the control device 31 uses the nozzle group set based on the drawing result of the test mode. The drawing process is executed based on the bitmap data corresponding to.
[Selection] Figure 9

Description

  The present invention relates to a pattern forming method and a droplet discharge device.

  Generally, a liquid crystal display device is provided with a color filter for colorizing a display image. In the manufacturing process of the color filter, a liquid phase process for forming a colored layer with a liquid material is used. In particular, since the ink jet method discharges a liquid material as fine droplets, a fine colored layer can be formed as compared with other liquid phase processes (for example, a spin coating method or a dispenser method).

  The inkjet method uses a large number of nozzles to eject droplets. If the nozzle remains unused, the liquid material to be accommodated is solidified and clogged. The clogging of the nozzle causes variations in droplet size and landing positions, thereby changing the thickness and shape of the colored layer.

Therefore, in the ink jet method, in order to solve the above-described problem, a proposal for stabilizing the discharge operation has been made.
In Patent Document 1, first, the ejection amount and landing position of droplets ejected from each nozzle are measured, and it is determined whether or not the nozzle to be used is a normal nozzle. Next, when there is an abnormal nozzle among the nozzles to be used, the abnormal nozzle is excluded from the used nozzles, and the discharge amount for the abnormal nozzle is compensated for by other normal nozzles. In Patent Document 2, a plurality of nozzle rows are provided in the ejection head, and the nozzle row to be used can be selected. When there is an abnormal nozzle in the nozzle row to be used, the nozzle row to be used is switched to another nozzle row. In Patent Document 3, a shielding plate is provided in the discharge direction of the nozzle to shield the droplets discharged from the abnormal nozzle from the substrate, and only the droplets discharged from the normal nozzle pass toward the substrate. According to these, the discharge operation by the abnormal nozzle can be avoided, and the droplet discharge operation can be executed by the nozzle group of the normal nozzle.
Japanese Patent Laid-Open No. 11-072612 Japanese Patent Laying-Open No. 2005-211872 JP 2005-131540 A

  However, in the droplet discharge operation, control data (bitmap data) that defines whether or not to discharge a droplet is used at each discharge timing. As the size of the color filter increases, the bitmap data increases in capacity as the number of nozzles and ejection timing increase.

  For this reason, if even one abnormal nozzle is included in the nozzle group to be used, a large amount of bitmap data must be newly generated in order to make the abnormal nozzle unused. As a result, the inkjet method has a problem that it takes time to generate bitmap data every time an abnormal nozzle is included, and the productivity of the color filter is significantly reduced.

  The present invention has been made to solve the above problems, and an object of the present invention is to provide a pattern forming method and a droplet discharge device that can maintain pattern productivity regardless of the presence or absence of abnormal nozzles. is there.

  In the pattern forming method of the present invention, each of the plurality of pressure generating elements is selectively driven and controlled based on control data, and a pattern is formed by ejecting liquid droplets from nozzles corresponding to the selected pressure generating elements. In the forming method, the first control data for selectively turning on the pressure generating elements corresponding to the first nozzle group defined in advance according to the control pattern, and the pressure generation corresponding to the second nozzle group defined in advance. Second control data for selectively turning on the element in accordance with the reference pattern; and a data generation step for generating the second control data, and selectively driving and controlling each of the plurality of pressure generating elements based on the first control data And ejecting droplets from the first nozzle group toward the test object, and selectively driving and controlling each of the plurality of pressure generating elements based on the second control data. A test drawing step of discharging droplets toward the test object from the second nozzle group; and the first control data in which each of the plurality of pressure generating elements is selected based on a drawing result of the test drawing step; And a normal drawing step of selectively driving and controlling based on any one of the second control data and discharging droplets onto the object.

  According to the pattern forming method of the present invention, in the test drawing process, drawing by the first nozzle group and drawing by the second nozzle group can be executed. In the normal drawing process, control data to be used can be selected from control data generated in advance based on the result of the test drawing. For example, when there is an abnormal nozzle in the first nozzle group and there is no abnormal nozzle in the second nozzle group, the second control data can be selected in the normal drawing process. Therefore, it is not necessary to generate control data separately based on the test drawing result. As a result, the pattern production process can be simplified by the amount of control data corresponding to the target pattern in advance, and the pattern productivity can be maintained regardless of the presence or absence of abnormal nozzles.

  In this pattern formation method, the data generation step includes a plurality of different first controls that selectively turn on the pressure generating elements corresponding to the plurality of different first nozzle groups according to the reference pattern. It is preferable to generate data and a plurality of different second control data for selectively turning on the pressure generating elements corresponding to each of the plurality of different second nozzle groups according to the reference pattern. .

  According to this pattern forming method, test drawing using a plurality of nozzle groups can be executed in the test drawing process. Therefore, the selection range of control data used in the normal drawing process can be expanded. As a result, a nozzle group consisting only of normal nozzles can be selected more reliably. Therefore, the productivity of the pattern can be more reliably maintained regardless of the position of the abnormal nozzle.

  In this pattern formation method, the data generation step selectively selects the pressure generating element corresponding to the second nozzle group defined in advance with the number of nozzles smaller than the number of nozzles of the first nozzle group according to a reference pattern. A configuration for generating the second control data to be turned on is preferable.

  According to this pattern forming method, in the test drawing process, the probability that the abnormal nozzle is included in the second nozzle group can be lower than the probability that the abnormal nozzle is included in the first nozzle group. As a result, the selection range of the control data used in the normal drawing process can be further expanded. Therefore, the productivity of the pattern can be more reliably maintained regardless of the number of abnormal nozzles.

In the droplet discharge device of the present invention, a plurality of storage chambers for storing a liquid material, a plurality of nozzles provided for each of the storage chambers and communicating with the corresponding storage chamber, and provided for each of the storage chambers A plurality of pressure generating elements that pressurize the liquid material, first control data for selectively turning on the pressure generating elements corresponding to the first nozzle group defined in advance according to a reference pattern; Storage means for selectively turning on the pressure generating elements corresponding to the second nozzle group in accordance with the reference pattern, and storage means for storing each of the plurality of pressure generating elements. 1 selectively driving and controlling based on the control data to discharge the liquid material onto the object, and selectively driving and controlling each of the plurality of pressure generating elements based on the second control data. Discharge the liquid material And a test mode in which each of the plurality of pressure generating elements is selectively driven and controlled based on any one of the first control data and the second control data, and the liquid material is discharged to an object. Mode setting means for setting a mode, and control means for driving and controlling each of the plurality of pressure generating elements in accordance with the mode set by the mode setting means.

  According to the droplet discharge device of the present embodiment, in the test mode, drawing by the first nozzle group and drawing by the second nozzle group can be executed, and the control data used in the normal mode is used as test drawing. The selection can be made based on the result. For example, when there is an abnormal nozzle in the first nozzle group and there is no abnormal nozzle in the second nozzle group, the second control data can be selected in the normal mode. Therefore, it is not necessary to generate control data separately based on the test drawing result. As a result, the pattern production process can be simplified by the amount of control data corresponding to the target pattern in advance, and the pattern productivity can be maintained regardless of the presence or absence of abnormal nozzles.

  In the liquid droplet ejection apparatus, the storage unit selectively turns on the pressure generating elements corresponding to the plurality of different first nozzle groups according to a reference pattern. And a plurality of different second control data for selectively turning on the pressure generating elements corresponding to each of the plurality of different second nozzle groups in accordance with a reference pattern.

  According to this droplet discharge device, test drawing can be executed by a plurality of nozzle groups in the test mode. Therefore, the selection range of control data used in the normal mode can be expanded. As a result, the nozzle group consisting of normal nozzles can be selected more reliably. Therefore, the productivity of the pattern can be more reliably maintained regardless of the position of the abnormal nozzle.

In this droplet discharge device, it is preferable that the number of nozzles of the second nozzle group is smaller than the number of nozzles of the first nozzle group.
According to this droplet discharge device, in the test mode, the probability that an abnormal nozzle is included in the second nozzle group can be lower than the probability that an abnormal nozzle is included in the first nozzle group. As a result, the selection range of control data used in the normal mode can be further expanded. Therefore, the productivity of the pattern can be more reliably maintained regardless of the number of abnormal nozzles.

  Hereinafter, an embodiment embodying the present invention will be described with reference to FIGS. First, the liquid crystal display device 1 having a color filter formed by the pattern forming method of the present invention will be described. FIG. 1 is a perspective view of the liquid crystal display device 1.

  In FIG. 1, an edge light type backlight 3 having a light source 2 such as an LED and formed in a square plate shape is provided below the liquid crystal display device 1. Above the backlight 3, there is provided a square plate-like liquid crystal panel 4 that is formed to be approximately the same size as the backlight 3. The liquid crystal panel 4 includes an element substrate 5 and a color filter CF facing each other. The element substrate 5 and the color filter CF are bonded together by a rectangular frame-shaped sealing material 6, and the liquid crystal LC is sealed in the gap between the element substrate 5 and the color filter CF.

  An optical substrate 7 such as a polarizing plate or a retardation plate is attached to the lower surface (side surface on the backlight 3 side) of the element substrate 5. The optical substrate 7 emits light from the backlight 3 to the liquid crystal LC as linearly polarized light. On the upper surface of the element substrate 5 (side surface on the color filter CF side: the element formation surface 5a), a plurality of scanning lines Lx extending in substantially one direction (X arrow direction) are arranged. Each scanning line Lx is electrically connected to a scanning line driving circuit 8 disposed on one side of the element substrate 5, and a scanning signal from the scanning line driving circuit 8 is input at a predetermined timing. On the element formation surface 5a, a plurality of data lines Ly extending over substantially the entire width in the other direction (Y arrow direction) are arranged. Each data line Ly is electrically connected to a data line driving circuit 9 disposed on the other side of the element substrate 5, and a data signal based on display data from the data line driving circuit 9 is input at a predetermined timing. Is done. A plurality of pixels 10 that are partitioned into corresponding scanning lines Lx and data lines Ly and arranged in a matrix are formed on the element formation surface 5a at positions where the scanning lines Lx and the data lines Ly intersect. . Each pixel 10 includes a control element such as a TFT connected to the corresponding scanning line Lx and data line Ly, and a light-transmissive pixel electrode 11.

  When the scanning line driving circuit 8 sequentially selects the scanning lines Lx one by one based on the line sequential scanning, the control element of each pixel 10 is turned on only during the sequential selection period. Each pixel electrode 11 receives a data signal from the data line driving circuit 9 when a corresponding control element is turned on.

  In FIG. 2, the color filter CF includes a square glass substrate 15 made of non-alkali glass. A black matrix BM is formed on one side of the glass substrate 15 that faces the element substrate 5 (discharge surface 15a). The black matrix BM is formed in a lattice shape facing the scanning lines Lx and the data lines Ly. The black matrix BM is formed of a resin containing a light shielding material such as chromium or carbon black, and shields light from the backlight 3. A polarizing plate 16 is attached to one side surface of the glass substrate 15 that faces the discharge surface 15a. The polarizing plate 16 emits linearly polarized light orthogonal to the light from the optical substrate 7 outward (downward in FIG. 2).

  In FIG. 3, a bank 17 is formed on the element substrate 5 side (upper side) of the black matrix BM. The bank 17 is formed in a lattice shape with a fluorinated resin having liquid repellency for repelling the colored layer forming liquid F as a liquid, and a plurality of discharge regions S opposed to the pixels 10 on the discharge surface 15a. Form. In each discharge region S, a colored layer 18 that converts light from the backlight 3 into colored light is formed. The colored layer 18 includes a red colored layer 18R that converts light from the backlight 3 into red light, a green colored layer 18G that converts light from the backlight 3 into green light, and blue light from the backlight 3 It is comprised by the blue colored layer 18B converted into light. The colored layer 18 is repeatedly formed in the order of the red colored layer 18R, the green colored layer 18G, and the blue colored layer 18B. Each colored layer 18 is formed by an inkjet method. That is, each colored layer 18 discharges the liquid material (colored layer forming liquid F) in which the colored layer material is dispersed in a predetermined dispersion medium as droplets Fb to the discharge region S (draws the colored layer 18). It is formed by drying the droplet Fb landed on the discharge region S.

  A common counter electrode 19a and alignment film 19b are stacked on the upper side of each colored layer 18. The counter electrode 19a is a transparent electrode that transmits light from the backlight 3, and is supplied with a predetermined common potential. The alignment film 19b is an oriented polymer film that has been subjected to an alignment treatment, and sets the alignment of liquid crystal molecules located in the vicinity of the counter electrode 19a in a predetermined direction.

When a data signal is input to the pixel electrode 11, the liquid crystal LC between the counter electrode 19a and the pixel electrode 11 modulates light from the backlight 3 according to the potential difference between the pixel electrode 11 and the counter electrode 19a. The modulated light from the backlight 3 is converted into colored light by the corresponding colored layer 18. The colored light converted by the colored layer 18 displays a full-color image on the liquid crystal panel 4 depending on whether or not it passes through the polarizing plate 16.

Next, the droplet discharge device 20 for forming the color filter CF will be described with reference to FIGS.
In FIG. 4, the droplet discharge device 20 is provided with a base 21 formed in a rectangular parallelepiped shape. A pair of guide grooves 22 extending along the longitudinal direction (X arrow direction) is formed on the upper surface of the base 21. Above the base 21, there is provided a substrate stage 23 that is drivingly connected to an output shaft of an X-axis motor provided on the base 21. The substrate stage 23 has an upper surface (mounting surface 23a) on which the glass substrate 15 is placed, and positions and fixes the glass substrate 15 with the discharge surface 15a on the upper side. The substrate stage 23 reciprocates in the X arrow direction and the counter X arrow direction along the guide groove 22 to scan (main scan) the glass substrate 15 in the X arrow direction and the counter X arrow direction (main scanning direction).

  Guide members 24 formed in a gate shape are disposed on both sides of the base 21 in the Y arrow direction. On the upper side of the guide member 24, an ink tank 25 that stores and leads out the colored layer forming liquid F is disposed. On the lower side of the guide member 24, a pair of upper and lower guide rails 24a extending in the Y arrow direction is formed. A carriage 26 that is drivingly connected to an output shaft of a Y-axis motor provided on the guide member 24 is attached to the guide rail 24a. A plurality of ejection heads H are mounted on the bottom surface 26 a of the carriage 26. The carriage 26 reciprocates in the Y arrow direction and the counter Y arrow direction along the guide rail 24a, and scans (sub-scans) the plurality of ejection heads H in the Y arrow direction and the counter Y arrow direction (sub scan direction).

  5 is a view of the carriage 26 as viewed from the substrate stage 23 side, and FIG. 6 is a schematic side sectional view of the ejection head H. As shown in FIG. 7 and 8 are diagrams for explaining the droplet discharge operation.

  In FIG. 5, a plurality of head stages 27 are arranged on the bottom surface 26 a of the carriage 26 in a direction inclined with respect to the sub-scanning direction. Each of the plurality of head stages 27 is provided with a rotation axis C along the normal direction of the discharge surface 15a (bottom surface 26a). A rectangular parallelepiped discharge head H extending in the sub-scanning direction is attached to the rotation axis C of each head stage 27. Each ejection head H is formed in a size that overlaps with the adjacent ejection head H when viewed from the main scanning direction. Each discharge head H rotates about the rotation axis C when the corresponding head stage 27 rotates the rotation axis C (moves from the solid line position in FIG. 5 to the two-dot chain line position). In the present embodiment, the position at which the ejection head H is arranged and the longitudinal direction of the ejection head H is parallel to the sub-scanning direction (solid line position in FIG. 5) is set as the initial position. In the present embodiment, an angle formed by the rotated ejection head H with the ejection head H at the initial position is defined as a rotation angle θ.

  5 and 6, a plurality of nozzles N are formed through the bottom portion Ha of each ejection head H along the normal direction of the ejection surface 15a. The plurality of nozzles N are formed at an equal pitch width over substantially the entire width of the ejection head H in the longitudinal direction. When the head stage 27 rotates the ejection head H, the pitch width of the nozzles N viewed from the main scanning direction is reduced by the rotation angle θ. Accordingly, the droplet discharge device 20 sets the number (resolution) of the nozzles N per unit length along the sub-scanning direction to a predetermined value. In the present embodiment, the position corresponding to the position immediately below each nozzle N, which is the position of the ejection surface 15a, is set as the scanning position Ps.

For each of the plurality of nozzles N, an identification number (hereinafter simply referred to as “nozzle number”) for identifying the position of the nozzle N is defined for each ejection head H. “Nozzle No.” indicates that the nozzle N closest to the Y arrow direction in the ejection head H at the initial position is No. 1 (nozzle N1), and is No. 2, No. 3,. No. (nozzle Ni). In the present embodiment, for convenience of explanation, each ejection head H is configured to have 20 (i = 20) nozzles N. However, the present invention is not limited thereto, and for example, each ejection head H is each ejected head H. A configuration having 720 nozzles N per inch along the longitudinal direction and having a resolution of 720 dpi may be used.

  In FIG. 6, a cavity 28 is formed above each nozzle N as a storage chamber that communicates with the ink tank 25. Each cavity 28 supplies the colored layer forming liquid F derived from the ink tank 25 to the corresponding nozzle N, respectively. A vibration plate 29 is attached to the upper side of each cavity 28. The vibration plate 29 vibrates in the vertical direction to enlarge / reduce the volume of the cavity 28. A piezoelectric element PZ as a pressure generating element is disposed on the upper side of the vibration plate 29 for each cavity 28. Each piezoelectric element PZ contracts and expands in the vertical direction to vibrate the vibration plate 29 and pressurizes the corresponding cavity 28. Each piezoelectric element PZ has a contraction / expansion operation cycle defined according to a preset frequency (discharge frequency). Each cavity 28 discharges the droplet Fb of the colored layer forming liquid F from the corresponding nozzle N when the corresponding piezoelectric element PZ contracts and expands. The ejected droplet Fb flies in the direction of the arrow Z of the corresponding nozzle N and lands on the corresponding scanning position Ps. The landed droplet Fb eventually spreads wet along the ejection surface 15a.

  In FIG. 7, when the glass substrate 15 is main-scanned, the trajectory of the scanning position Ps (scanning trajectory R) is the number of nozzles N on the discharge surface 15 a of the glass substrate 15 (on the two-dimensional drawing plane). Only along the main scanning direction (the chain line in FIG. 7). In each scanning locus R, position coordinates (discharge position P) at which the droplets Fb can be discharged are defined for each predetermined discharge pitch W.

  The discharge pitch W is defined by W = Vx / fd, where Vx is the main scanning speed of the glass substrate 15 and fd is the discharge frequency of the piezoelectric element PZ. The ejection pitch W of the present embodiment is set to a value sufficiently smaller than the width of each ejection region S in the main scanning direction. Therefore, the droplet discharge device 20 defines a plurality of discharge positions P along the main scanning direction inside each discharge region S. In the present embodiment, the position selected for discharging the droplet Fb from each discharge position P according to the coordinate position of the colored layer 18 (discharge area S) is set as the target discharge position Pa.

  When executing the drawing process, the droplet discharge device 20 first rotates each discharge head H by a predetermined rotation angle (first rotation angle θ1) in order to obtain a predetermined resolution. Set the position of N. Next, the droplet discharge device 20 performs main scanning on the glass substrate 15 at a predetermined main scanning speed. Then, the piezoelectric element PZ corresponding to the nozzle N defined in advance is turned on / off at a predetermined discharge frequency.

  At this time, if the nozzles N of the droplet discharge device 20 remain unused, the colored layer forming liquid F is solidified and clogged. Therefore, the droplet discharge device 20 uses more nozzles N in the process of forming each colored layer 18. That is, in order to increase the number of used nozzles, the droplet discharge device 20 alternately drives the piezoelectric elements PZ corresponding to the pair of nozzles N when having a pair of nozzles N that draw substantially the same scanning locus R.

  For example, in FIG. 7, the 17th to 20th nozzles N (nozzle N17 to nozzle N20) of the left ejection head H are the 1st to 4th nozzles N (nozzles N1 to N1) of the adjacent right ejection head H. A scanning locus R substantially the same as that of the nozzle N4) is drawn. Accordingly, the droplet discharge device 20 sequentially prints nozzles 17 to 20 and nozzles 1 to 4 in order from the main scanning direction side with respect to a plurality of target discharge positions Pa defined on a common scanning locus R. The nozzles N are made to correspond alternately. Thereby, the droplet discharge device 20 can use a pair of nozzles N that draw substantially the same scanning locus R, and can increase the number of nozzles used.

  Furthermore, in order to increase the number of used nozzles, the droplet discharge device 20 ends the preceding main scan and sub-scans the carriage 26 (after a line feed), and then continues the piezoelectric element PZ corresponding to the unused nozzle. Is preferentially driven in the main scanning.

  For example, in FIG. 7, the scanning trajectories R of No. 7 and No. 8 nozzles N (nozzle N7 and nozzle N8) and No. 15 and No. 16 nozzles (nozzle N15 and nozzle N16) are on the ejection region S, respectively. Not formed. Therefore, when the drawing process as shown in FIG. 7 is executed, the nozzles N of No. 7, No. 8, No. 15, and No. 16 are unused. Therefore, the droplet discharge device 20 executes the main scan shown in FIG. 7, and then executes the main scan shown in FIG. That is, the carriage 26 is sub-scanned, and the scanning trajectory R corresponding to Nos. 7, 8, 15, and 16 is preferentially formed on the ejection region S. As a result, the droplet discharge device 20 can execute a drawing process using all the nozzles N per one glass substrate 15.

  Next, the electrical configuration of the droplet discharge device 20 will be described with reference to FIGS. FIG. 9 is a block circuit diagram showing an electrical configuration of the droplet discharge device 20. 10 to 15 are diagrams for explaining the droplet discharge operation.

  In FIG. 9, the control device 31 includes a CPU 31A constituting the control means, a RAM 31B serving as a working area for the CPU 31A, a ROM 31C constituting the storage means, and the like. The control device 31 executes various processing operations such as main scanning of the substrate stage 23, sub-scanning of the carriage 26, and ejection operations of the ejection heads H in accordance with various data stored in the RAM 31B and various programs stored in the ROM 31C. To do.

  The ROM 31C stores first bitmap data MD1, a plurality of different second bitmap data MD2, a plurality of different third bitmap data MD3, and a plurality of different fourth bitmap data MD4. .

  The first to fourth bitmap data MD1 to MD4 are data in which each bit value (0 or 1) is defined for each of a plurality of ejection positions P defined on the ejection surface 15a (two-dimensional drawing plane). . Each of the first to fourth bitmap data MD1 to MD4 is data for turning on / off the piezoelectric element PZ corresponding to the nozzle N located immediately above the ejection position P according to the value of the bit. That is, the first to fourth bitmap data MD1 to MD4 are data for turning on only the piezoelectric element PZ corresponding to the nozzle located immediately above the ejection region S (target ejection position Pa).

  The first bitmap data MD1 is data that defines at least one ON state for all the piezoelectric elements PZ in accordance with each ejection region S. That is, the first bitmap data MD1 is data for drawing the colored layer 18 using all the nozzles N (first nozzle group). For example, as shown in FIG. 7, the first bitmap data MD1 is data for causing a pair of nozzles N that draw substantially the same scanning trajectory R to alternately perform a discharge operation, and as shown in FIG. This is data for preferentially ejecting unused nozzles in the subsequent main scan after a line feed.

  The second bitmap data MD2 is data for selectively driving only a group of nozzles N (second nozzle group) corresponding to 80% of the total number of nozzles according to each ejection region S. The second bitmap data MD2 is data that defines at least one ON state for the piezoelectric element PZ corresponding to the second nozzle group in accordance with each ejection region S. That is, each second bitmap data MD2 is data for drawing the colored layer 18 using only different second nozzle groups, and in this embodiment, 16 pieces (20 pieces) per discharge head H. This is data defining a nozzle N of × 0.8) as a working nozzle.

  For example, as shown in FIG. 10, the second bitmap data MD2 defines one side in the longitudinal direction of the ejection head H (nozzles 5 to 20) as a working nozzle, and the other side in the longitudinal direction of the ejection head H. (No. 1 to No. 4 nozzles N) are data defining the unused nozzles. As shown in FIG. 11, the second bitmap data MD2 is data that preferentially defines the 11th, 12th, 19th, and 20th nozzles N as used nozzles in the subsequent main scanning. That is, the second bit map data MD2 excludes the nozzle N on the other side in the longitudinal direction of the ejection head H from the use nozzles in advance, and the colored layer 18 is formed only by the second nozzle group (Nos. 5 to 20). Data for drawing. As a result, even if the second bitmap data MD2 is clogged on the other side in the longitudinal direction of the ejection head H, it is possible to cause a stable ejection operation to be executed by the nozzles No. 5 to No. 20. .

  Further, as shown in FIG. 12, for example, the second bitmap data MD2 defines the center in the longitudinal direction of the ejection head H (No. 3 to No. 18 nozzles) as the working nozzle, and both ends of the ejection head H in the longitudinal direction. (No. 1, No. 2, No. 19, No. 20 Nozzle N) is defined as unused nozzles. As shown in FIG. 13, the second bitmap data MD2 is data that preferentially defines the 9th, 10th, 17th, and 18th nozzles N as the used nozzles in the subsequent main scanning. That is, the second bitmap data MD2 excludes the nozzles N at both ends in the longitudinal direction of the ejection head H from the use nozzles in advance, and the colored layer 18 is formed only by the second nozzle group (Nos. 3 to 18). Data for drawing. As a result, even if the second bitmap data MD2 is clogged at both ends in the longitudinal direction of the ejection head H, a stable ejection operation can be executed by the nozzles No. 3 to No. 18.

  Further, the second bitmap data MD2 is, for example, as shown in FIG. 14, unused nozzles (No. 4, No. 8, No. 12, No. 16 nozzles N) at equal intervals along the longitudinal direction of the ejection head H. It is data that prescribes. The second bitmap data MD2 is data for complementing the total discharge amount by the number of discharges of the nozzle N (No. 5, No. 9, No. 13, No. 17 nozzle N) adjacent to the unused nozzle. As shown in FIG. 15, the second bitmap data MD2 is data that preferentially defines the 7th and 15th nozzles N as the used nozzles in the subsequent main scanning. That is, the second bitmap data MD2 excludes the nozzles N positioned at equal intervals in the longitudinal direction of the ejection head H from the used nozzles in advance and excludes the second nozzle group (Nos. 4, 8, 12, and 16). This is data for drawing the colored layer 18 only by the nozzle group). Thus, even if the second bitmap data MD2 is clogged in the ejection head H, a stable ejection operation can be executed.

  The third bitmap data MD3 is data for selectively driving only a group of nozzles N (third nozzle group) corresponding to 60% of the total number of nozzles according to each ejection region S. Similar to the second bitmap data MD2, the third bitmap data MD3 is data that defines at least one ON state for the piezoelectric element PZ corresponding to the third nozzle group in accordance with each ejection region S. That is, each of the third bitmap data MD3 is data for drawing the colored layer 18 using only different third nozzle groups, and in this embodiment, 12 pieces (20 × 0. This is data defining the nozzle N of 6) as a working nozzle.

  The fourth bitmap data MD4 is data for selectively driving only a group of nozzles N (fourth nozzle group) corresponding to 40% of the total number of nozzles according to each ejection region S. Similar to the second bitmap data MD2, the fourth bitmap data MD4 is data that defines at least one ON state for the piezoelectric element PZ corresponding to the fourth nozzle group in accordance with each ejection region S. That is, each of the fourth bitmap data MD4 is data for drawing the colored layer 18 only by a different fourth nozzle group, and in this embodiment, eight (20 × 0. This is data in which the nozzle N of 4) is defined as a working nozzle.

  In FIG. 9, the control device 31 is connected with an input / output device 32 as mode setting means. The input / output device 32 has input units such as a start switch, a stop switch, and a keyboard, and inputs various operation signals to the control device 31.

  For example, the input / output device 32 includes data (rotation angle data) regarding the rotation angle θ associated with each of the first to fourth bitmap data MD1 to MD4 and the first to fourth bitmap data MD1 to MD4. ) And data (carriage data) relating to the position of the carriage 26 associated with each of the first to fourth bitmap data MD1 to MD4 are input to the control device 31 as the drawing data Ib. The input / output device 32 inputs a mode setting signal Im for setting either one of the test mode and the normal mode to the control device 31. The input / output device 32 controls a signal (map setting signal Is) for setting any one of the bitmap data used in the test mode to the bitmap data (normal bitmap data) used in the normal mode. 31. The input / output device 32 includes an output unit such as a display, and outputs information regarding the set mode and the type of the selected bitmap data.

  When the test mode is set, the control device 31 performs a drawing process corresponding to each of the first to fourth bitmap data MD1 to MD4 according to various data stored in the RAM 31B and various programs stored in the ROM 31C. , Each corresponding test board is executed. When the normal mode is set, the control device 31 causes the glass substrate 15 to perform a drawing process corresponding to one selected bitmap data according to various data stored in the RAM 31B and various programs stored in the ROM 31C. .

  An X-axis motor drive circuit 33X is connected to the control device 31. The control device 31 generates a signal related to the moving direction and moving amount of the substrate stage 23 as the X-axis drive control signal DSX, and inputs the X-axis drive control signal DSX to the X-axis motor drive circuit 33X. The X-axis motor drive circuit 33X rotates the X-axis motor MX forward or backward in response to the X-axis drive control signal from the control device 31, and main-scans the substrate stage 23 at a position corresponding to the X-axis drive control signal DSX. To do.

  A Y-axis motor drive circuit 33Y is connected to the control device 31. Based on the carriage data corresponding to each drawing process (bitmap data), the control device 31 generates a signal related to the movement direction and movement amount of the carriage 26 as a Y-axis drive control signal DSY, and the Y-axis drive control signal DSY. Is input to the Y-axis motor drive circuit 33Y. The Y-axis motor drive circuit 33Y responds to the Y-axis drive control signal DSY from the control device 31 to rotate the Y-axis motor MY in the normal direction or the reverse direction, and sub-scans the carriage 26 to a position corresponding to the Y-axis drive control signal DSY. To do.

A substrate detection device 34 is connected to the control device 31. The substrate detection device 34 is used when the edge of the glass substrate 15 is detected and the position of the glass substrate 15 is calculated.
A head stage drive circuit 35 is connected to the control device 31. The control device 31 generates a signal for driving the head stage 27 as a rotation control signal SR based on the rotation angle data corresponding to each drawing process (bitmap data), and the rotation control signal SR is generated by the head. Input to the stage drive circuit 35. The head stage drive circuit 35 rotates each head stage 27 in response to the rotation control signal SR from the control device 31, and sets the rotation angle θ corresponding to each drawing process.

A head drive circuit 36 is connected to the control device 31. The control device 31 outputs an ejection timing signal LAT for defining the ejection timing to the head drive circuit 36 in synchronization with the ejection frequency. The control device 31 outputs a piezoelectric element driving voltage COM for driving each piezoelectric element PZ in synchronization with the ejection frequency. Further, the control device 31 generates the discharge control signal SG by synchronizing the bitmap data corresponding to the main scanning of the substrate stage 23 with the discharge frequency, and serially transfers the discharge control signal SG to the head drive circuit 36. The head drive circuit 36 sequentially converts the ejection control signal SG from the control device 31 into serial / parallel corresponding to each piezoelectric element PZ. Each time the head drive circuit 36 receives the ejection timing signal LAT from the control device 31, it latches the serial / parallel converted ejection control signal SG, and each selected piezoelectric element (the value of the bit is defined as 1). A piezoelectric element driving voltage COM is supplied to each PZ.

Next, a test drawing process (test mode) using the droplet discharge device 20 will be described.
First, using an external computer, based on the “nozzle number” corresponding to each of the first to fourth nozzle groups defined in advance, the formation bit of the nozzle N, the position coordinates of each discharge region S, etc. 4-bit map data MD1 to MD4 are generated (data generation step). Then, the rotation angle data associated with each of the first to fourth bitmap data MD1 to MD4, the first to fourth bitmap data MD1 to MD4, and the first to fourth bitmap data MD1 to MD4. The carriage data associated with each is input to the control device 31 as the drawing data Ib.

  From this state, a test drawing test substrate is placed on the substrate stage 23, and a mode setting signal Im for setting a test mode is input from the input / output device 32 to the control device 31. When the mode setting signal Im is inputted, the control device 31 turns the turning control signal for setting the turning angle θ to the first turning angle θ1, based on the turning data corresponding to the first bitmap data MD1. SR is generated and a rotation control signal SR is input to the head stage drive circuit 35. The head stage drive circuit 35 rotates each head stage 27 in response to the rotation control signal SR from the control device 31, and sets the first rotation angle θ1 corresponding to the first bitmap data MD1. Further, the control device 31 generates a Y-axis drive control signal DSY based on the carriage data corresponding to the first bitmap data MD1, and inputs the Y-axis drive control signal DSY to the Y-axis motor drive circuit 33Y. The Y-axis motor drive circuit 33Y rotates the carriage 26 in response to the rotation control signal SR from the control device 31, and sets the carriage 26 at an arrangement position corresponding to the first bitmap data MD1.

  When the carriage 26 is set, the control device 31 generates an X-axis drive control signal DSX for main scanning the substrate stage 23, and inputs the X-axis drive control signal DSX to the X-axis motor drive circuit 33X. The X-axis motor drive circuit 33X starts main scanning of the substrate stage 23 in response to the X-axis drive control signal DSX from the control device 31.

  When the main scanning of the substrate stage 23 is started, the control device 31 generates the discharge control signal SG by synchronizing the first bitmap data MD1 with the discharge frequency, and serially transfers the discharge control signal SG to the head drive circuit 36. . The control device 31 inputs the ejection timing signal LAT and the piezoelectric element drive voltage COM to the head drive circuit 36 in synchronization with the ejection frequency. Each time the head drive circuit 36 receives the ejection timing signal LAT, the head drive circuit 36 latches the ejection control signal SG subjected to serial / parallel conversion, and supplies the piezoelectric element drive voltage COM to the selected piezoelectric element PZ.

  Accordingly, the control device 31 selects the first nozzle group (all nozzles N) as the use nozzles, and discharges the droplets Fb toward each target discharge position Pa. Then, the control device 31 draws the test pattern (colored layer 18) on the test substrate using only the first nozzle group.

Thereafter, similarly, the control device 31 selects each of a plurality of different second to fourth nozzle groups as use nozzles, and discharges the droplets Fb toward each target discharge position Pa of the corresponding test substrate. And the control apparatus 31 draws a test pattern (colored layer 18) on a corresponding test board | substrate using each of several different 2nd-4th nozzle groups.

  When a test pattern corresponding to each of the first to fourth bitmap data MD1 to MD4 is drawn, the shape and film thickness of each test pattern are measured, and whether or not there is misalignment of the test pattern, missing dots, etc. ( It is determined whether or not an abnormal nozzle is included in the used nozzle group. Next, the nozzle group (bitmap data) having the largest number of used nozzles among the nozzle groups not including the abnormal nozzle is determined. Then, the map setting signal Is is input to the control device 31, the determined bitmap data is set as normal bitmap data, and the test mode is terminated.

  Therefore, in the test mode, each of the n-th nozzle groups defined in advance (n is an integer of 1 to 4) is used, and based on each bitmap data generated in advance, a test pattern (colored layer) corresponding to each nozzle group is used. 18) can be drawn. And among the n-th nozzle group defined in advance (n is an integer of 1 to 4), the nozzle group that does not include an abnormal nozzle and has the largest number of used nozzles is set as the nozzle group that is used in the normal mode. Can be made. In addition, by setting the nozzle group, the bitmap data for forming the colored layer 18 can be selected from the bitmap data generated in advance.

Next, a normal drawing process (normal mode) using the droplet discharge device 20 will be described.
First, the glass substrate 15 is placed on the substrate stage 23. From this state, the input / output device 32 inputs a mode setting signal Im for setting the normal mode to the control device 31. When the mode setting signal Im is input, the control device 31 generates the rotation control signal SR based on the rotation data corresponding to the normal bitmap data, and inputs the rotation control signal SR to the head stage drive circuit 35. To do. The head stage drive circuit 35 rotates each head stage 27 in response to the rotation control signal SR from the control device 31, and sets the rotation angle θ corresponding to the normal bitmap data.

  Next, the control device 31 generates the Y-axis drive control signal DSY based on the carriage data corresponding to the normal bitmap data, and inputs the Y-axis drive control signal DSY to the Y-axis motor drive circuit 33Y. The Y-axis motor drive circuit 33Y rotates the carriage 26 in response to the rotation control signal SR from the control device 31, and sets the carriage 26 at an arrangement position corresponding to the normal bitmap data.

  When the carriage 26 is set, the control device 31 generates an X-axis drive control signal DSX for main scanning the substrate stage 23, and inputs the X-axis drive control signal DSX to the X-axis motor drive circuit 33X. The X-axis motor drive circuit 33X starts main scanning of the substrate stage 23 in response to the X-axis drive control signal DSX from the control device 31. When the main scanning of the substrate stage 23 is started, the control device 31 generates the discharge control signal SG by synchronizing the normal bitmap data with the discharge frequency, and serially transfers the discharge control signal SG to the head drive circuit 36. The control device 31 inputs the ejection timing signal LAT and the piezoelectric element drive voltage COM to the head drive circuit 36 in synchronization with the ejection frequency. Each time the head drive circuit 36 receives the ejection timing signal LAT, the head drive circuit 36 latches the ejection control signal SG subjected to serial / parallel conversion, and supplies the piezoelectric element drive voltage COM to the selected piezoelectric element PZ. Accordingly, the control device 31 can draw each colored layer 18 using only the nth nozzle group (n is an integer of 1 to 4) that does not include an abnormal nozzle.

Therefore, in the normal mode, it is possible to draw the colored layer 18 based on the bitmap data corresponding to the nozzle group generated in advance using the nozzle group defined in advance.
Therefore, in the normal mode, it is possible to save time for generating bitmap data separately.

Next, effects of the present embodiment configured as described above will be described below.
(1) According to the above embodiment, the control device 31 stores the first bitmap data MD1 that defines at least one ON state in all the piezoelectric elements PZ in accordance with each ejection region S. Further, the control device 31 supplies the second to fourth bitmap data MD2 to MD4 that define at least one ON state for the piezoelectric elements PZ corresponding to the second to fourth nozzle groups according to the respective ejection regions S. Store. Further, the control device 31 sets one of the test mode and the normal mode according to the mode setting signal Im from the input / output device 32.

  In the test mode, the control device 31 uses each of the first to fourth nozzle groups and executes a drawing process based on the bitmap data corresponding to each nozzle group. In the normal mode, the control device 31 uses the nozzle group set based on the drawing result of the test mode, and executes the drawing process based on the bitmap data corresponding to the nozzle group.

Therefore, in the test mode, a nozzle group that does not include an abnormal nozzle can be selected from the first to fourth nozzle groups defined in advance, and the bitmap data corresponding to the selected nozzle group is converted into normal bitmap data. Can be set. As a result, the production process of the color filter CF can be simplified by having the first to fourth bitmap data MD1 to MD4 corresponding to the ejection region S in advance. Therefore, it is possible to maintain pattern productivity regardless of the presence or absence of abnormal nozzles.
(2) Moreover, in the test mode, the drawing process is executed by a plurality of different second nozzle groups, a plurality of different third nozzle groups, and a plurality of different fourth nozzle groups. Therefore, the selection range of the nozzle group used in the normal mode can be expanded, and the nozzle group including only normal nozzles can be selected more reliably. As a result, the productivity of the pattern can be more reliably maintained regardless of the position of the abnormal nozzle.
(3) Further, a group of nozzles N corresponding to 80%, 60%, and 40% of the total number of nozzles was defined as a second nozzle group, a third nozzle group, and a fourth nozzle group, respectively. Therefore, the probability that an abnormal nozzle is included can be lowered in the order of the first nozzle group, the second nozzle group, the third nozzle group, and the fourth nozzle group. As a result, the productivity of the pattern can be more reliably maintained regardless of the number of abnormal nozzles.

In addition, you may change the said embodiment as follows.
In the above embodiment, the first control data is embodied as the first bitmap data MD1, and all the piezoelectric elements PZ are selectively driven. Not limited to this, the first control data may be embodied in the third bitmap data MD3 or the fourth bitmap data MD4. Alternatively, the first control data and the second control data may be embodied as different second bitmap data MD2. That is, the control device 31 may be configured to form a test pattern (colored layer 18) with a plurality of different nozzle groups defined in advance when the test mode is set.

  In the above embodiment, the piezoelectric elements PZ corresponding to 100%, 80%, 60%, and 40% are selectively driven by the first to fourth bitmap data MD1 to MD4, respectively. However, the present invention is not limited to this, and for example, a configuration may be adopted in which the piezoelectric elements PZ corresponding to 100%, 95%, 90%, and 85% are selectively driven by the first to fourth bitmap data MD1 to MD4, respectively. . That is, the first to fourth bitmap data MD1 to MD4 may be configured to selectively drive the piezoelectric elements PZ corresponding to the predetermined group of nozzles N, respectively, and the number and nozzle numbers of the piezoelectric elements PZ to be selectively driven. It is not intended to limit.

  In the above embodiment, the first bitmap data MD1 causes the discharge operation to be alternately executed for the pair of nozzles N that draw substantially the same scanning locus R. Further, the first bitmap data MD1 preferentially causes the unused nozzles to perform the ejection operation in the subsequent main scan after the line feed. For example, the first bitmap data MD1 may be configured to cause all the nozzles N to perform at least one ejection operation by one main scanning. That is, the first bitmap data MD1 is not limited to the timing of using the nozzles N or the drawing path, and may be any configuration that causes all the nozzles N to execute at least one ejection operation.

  In the above embodiment, as shown in FIGS. 10 to 15, the rotation angle θ is embodied as the first rotation angle θ1 and the drawing process is executed with the same resolution. For example, the configuration may be such that the rotation angle θ is set to an angle larger than the first rotation angle θ1 and the number of unused nozzles is increased by the amount that the resolution is increased. According to this, it is possible to suppress a decrease in resolution caused by the definition of unused nozzles.

  In the above embodiment, the pressure generating element is embodied as the piezoelectric element PZ. However, the present invention is not limited thereto, and for example, the pressure generating element may be embodied as a resistance heating element provided inside the cavity 28. That is, the pressure generating element may be any element that can pressurize the liquid material in the storage chamber and discharge the droplets.

  In the above embodiment, each bitmap data is generated by an external computer. For example, the control device 31 may generate each bitmap data.

  In the above embodiment, the nozzles N are configured to be provided in only one row per ejection head H. For example, the nozzles N may be provided in a plurality of rows per discharge head H. That is, the nozzle N may be any nozzle that discharges the colored layer forming liquid F in the form of droplets Fb, and does not limit the number, the number of rows, or the formation position.

  In the above embodiment, the pattern is embodied in the colored layer 18 of the color filter CF. For example, the pattern may be embodied in a light emitting layer or an electron transport layer of an electroluminescence display device, or various thin films or metal wirings provided in a field effect device (FED, SED, etc.). That is, the pattern may be a pattern formed by drying the droplets discharged from the nozzle.

The perspective view which shows the liquid crystal display device of this embodiment. Similarly, a perspective view showing a color filter. Similarly, sectional drawing which shows a color filter. Similarly, a perspective view showing a droplet discharge device. Similarly, a diagram illustrating a droplet discharge head. FIG. Similarly, a diagram illustrating a droplet discharge head. FIG. Similarly, the figure explaining droplet discharge operation. Similarly, the figure explaining droplet discharge operation. Similarly, the electric block circuit diagram which shows the electric constitution of a droplet discharge apparatus. Similarly, the figure explaining droplet discharge operation. Similarly, the figure explaining droplet discharge operation. Similarly, the figure explaining droplet discharge operation. Similarly, the figure explaining droplet discharge operation. Similarly, the figure explaining droplet discharge operation. Similarly, the figure explaining droplet discharge operation.

Explanation of symbols

F ... Colored layer forming liquid as liquid, Fb ... Droplet, MD1 ... First bitmap data as first control data, MD2 ... Second bitmap data as second control data, N ... Nozzle, PZ ... Piezoelectric element as pressure generating element, 15 ... Glass substrate as substrate, 18 ... Colored layer as pattern, 20 ... Droplet discharge device, 28 ... Cavity as storage chamber, 31A ... CPU constituting control means, 31C ... ROM constituting storage means, 32... Input / output device constituting mode setting means.

Claims (6)

In a pattern forming method of selectively driving and controlling each of a plurality of pressure generating elements based on control data, and discharging a droplet from a nozzle corresponding to the selected pressure generating element to form a pattern,
First control data for selectively turning on the pressure generating element corresponding to the first nozzle group defined in advance according to the contrast pattern, and the control pattern corresponding to the pressure generating element corresponding to the second nozzle group defined in advance. A data generation step of generating second control data that is selectively turned on according to
Each of the plurality of pressure generating elements is selectively driven and controlled based on the first control data, and droplets are ejected from the first nozzle group toward the test object. A test drawing step of selectively driving and controlling each based on the second control data, and discharging droplets from the second nozzle group toward the test object;
Each of the plurality of pressure generating elements is selectively driven and controlled based on any one of the first control data and the second control data selected based on the drawing result of the test drawing process, A normal drawing process for discharging droplets to
A pattern forming method comprising: In the pattern formation method of Claim 1,
The data generation step includes
A plurality of different first control data for selectively turning on the pressure generating elements corresponding to each of a plurality of different first nozzle groups according to the reference pattern;
A plurality of different second control data for selectively turning on the pressure generating elements corresponding to each of the plurality of different second nozzle groups according to the reference pattern; Forming method. In the pattern formation method of Claim 1 or 2,
The data generation step includes
Generating second control data for selectively turning on the pressure generating elements corresponding to the second nozzle group defined in advance with a smaller number of nozzles than the number of nozzles of the first nozzle group according to a reference pattern; A pattern forming method characterized by the above. A plurality of storage chambers for storing liquid bodies;
A plurality of nozzles provided for each of the storage chambers and communicating with the corresponding storage chamber;
A plurality of pressure generating elements provided for each of the storage chambers to pressurize the liquid material,
First control data for selectively turning on the pressure generating element corresponding to the first nozzle group defined in advance according to the contrast pattern, and the control corresponding to the pressure generating element corresponding to the second nozzle group defined in advance. Storage means for storing second control data that is selectively turned on according to a pattern;
Each of the plurality of pressure generating elements is selectively driven and controlled based on the first control data to discharge the liquid material onto an object, and each of the plurality of pressure generating elements is based on the second control data. A test mode in which the liquid material is ejected to the object by selectively driving and selecting each of the plurality of pressure generating elements based on any one of the first control data and the second control data A mode setting means for setting a normal mode in which the liquid material is ejected to the object by driving and controlling automatically,
Control means for driving and controlling each of the plurality of pressure generating elements according to the mode set by the mode setting means;
A droplet discharge apparatus comprising: In the droplet discharge device according to claim 4,
The storage means
A plurality of different first control data for selectively turning on the pressure generating elements corresponding to each of a plurality of different first nozzle groups according to a control pattern;
A plurality of different second control data for selectively turning on the pressure generating elements corresponding to each of a plurality of different second nozzle groups in accordance with a reference pattern are stored. Discharge device. In the droplet discharge device according to claim 4 or 5,
The droplet discharge device, wherein the number of nozzles of the second nozzle group is smaller than the number of nozzles of the first nozzle group.

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