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JP2008033279A - Area division type wavelength plate and method for manufacturing the same - Google Patents

Area division type wavelength plate and method for manufacturing the same Download PDF

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JP2008033279A
JP2008033279A JP2007162189A JP2007162189A JP2008033279A JP 2008033279 A JP2008033279 A JP 2008033279A JP 2007162189 A JP2007162189 A JP 2007162189A JP 2007162189 A JP2007162189 A JP 2007162189A JP 2008033279 A JP2008033279 A JP 2008033279A
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region
periodic structure
fine periodic
boundary
divided
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Osamu Masuda
修 増田
Masahiro Morikawa
雅弘 森川
Hiroaki Ueda
裕昭 上田
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Konica Minolta Inc
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Konica Minolta Inc
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Abstract

<P>PROBLEM TO BE SOLVED: To provide an area division type wavelength plate having fine periodical structures in divided areas, wherein a position of a boundary between divided areas or a direction of the fine periodical structure can be recognized with the naked eyes, and to provide a method for manufacturing the plate. <P>SOLUTION: The area division type wave plate includes at least two of divided areas 11 each having a fine periodical structure extended in a predetermined direction and a visible portion where a boundary 13 of the divided areas and/or the direction of the fine periodical structure is visible, wherein the visible portion is formed along a direction of the boundary and/or the fine periodical structure. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

本発明は、少なくとも2つに分割された領域に所定方向に延びる微細周期構造をそれぞれ有する領域分割型波長板及びその製造方法に関する。   The present invention relates to a region-dividing wave plate having a fine periodic structure extending in a predetermined direction in at least two regions and a method for manufacturing the same.

下記非特許文献1は、3次元周期構造(フォトニック結晶)を用いた領域分割型波長板を開示している(図7)。この領域分割型波長板50は図7のような周期構造を有し分割ライン53で分割された領域51,52を備え、例えば、光ピックアップ用の光学系に配置されて使用できる。
「フォトニック結晶の実用化の前線で」川上彰二郎(O plus E Vol.28,No4,2006年4月)
Non-Patent Document 1 below discloses a region-dividing wavelength plate using a three-dimensional periodic structure (photonic crystal) (FIG. 7). This region-dividing wave plate 50 includes regions 51 and 52 having a periodic structure as shown in FIG. 7 and divided by a dividing line 53, and can be used by being disposed in an optical system for an optical pickup, for example.
“At the front line of practical application of photonic crystals” Shojiro Kawakami (O plus E Vol.28, No4, April 2006)

上記非特許文献1のような領域分割された波長板は図7のように2つの領域に方向の異なる微細周期構造が境界部を挟んで形成されるため、光学装置内の光学系に組み込む場合、その境界部の位置や微細周期構造の方向を調整する必要がある。しかし、通常、境界部の位置や微細周期構造の方向は肉眼で見え難く、かかる調整は面倒で手間のかかるものであった。   When the wavelength-divided wave plate as in Non-Patent Document 1 is formed in two regions as shown in FIG. 7 with a fine periodic structure having different directions sandwiching the boundary portion, it is incorporated into the optical system in the optical device. It is necessary to adjust the position of the boundary and the direction of the fine periodic structure. However, the position of the boundary and the direction of the fine periodic structure are usually difficult to see with the naked eye, and such adjustment is troublesome and time-consuming.

本発明は、上述のような従来技術の問題に鑑み、分割された領域に微細周期構造を有する領域分割型波長板において分割された領域間の境界部の位置や微細周期構造の方向を肉眼で知ることのできる領域分割型波長板及びその製造方法を提供することを目的とする。   In view of the problems of the prior art as described above, the present invention visually recognizes the position of the boundary between divided regions and the direction of the fine periodic structure in the divided region wave plate having a fine periodic structure in the divided regions. An object of the present invention is to provide a region-dividing wave plate that can be known and a method for manufacturing the same.

上記目的を達成するために、本発明による領域分割型波長板は、少なくとも2つに分割された各領域に所定方向に延びる微細周期構造をそれぞれ有する領域分割型波長板であって、前記分割された領域間の境界部及び/又は前記微細周期構造の方向を視認可能な視認部を備え、前記視認部が前記境界部及び/又は前記方向に沿うようにして形成されていることを特徴とする。   In order to achieve the above object, an area-divided wave plate according to the present invention is an area-divided wave plate having a fine periodic structure extending in a predetermined direction in each area divided into at least two areas. And a visual recognition part capable of visually recognizing the direction of the fine periodic structure, and the visual recognition part is formed along the boundary part and / or the direction. .

この領域分割型波長板によれば、視認部は分割された領域間の境界部及び/又は微細周期構造の方向に沿うようにして形成されているので、分割された領域間の境界部及び/又は微細周期構造の方向を肉眼で知ることができる。   According to this region-divided wave plate, the visual recognition part is formed along the boundary between the divided regions and / or along the direction of the fine periodic structure, and thus the boundary between the divided regions and / or Alternatively, the direction of the fine periodic structure can be known with the naked eye.

上記領域分割型波長板において前記境界部がその周囲の微細周期構造よりも突き出て形成されることにより、境界部に沿った視認部を構成できる。   In the region-divided wave plate, the boundary portion is formed so as to protrude from the surrounding fine periodic structure, whereby a visual recognition portion along the boundary portion can be configured.

また、微細周期構造の存在しない領域に対する前記微細周期構造の境界の内の少なくとも一辺が前記微細周期構造の方向と略一致することで、微細周期構造の方向に沿った視認部を構成できる。   Moreover, the visual recognition part along the direction of a fine periodic structure can be comprised because at least one side in the boundary of the said fine periodic structure with respect to the area | region where a fine periodic structure does not exist substantially corresponds with the direction of the said fine periodic structure.

また、上記領域分割型波長板は前記分割された各領域の微細周期構造の方向が異なるように構成できる。   The region-divided wave plate can be configured such that the direction of the fine periodic structure in each of the divided regions is different.

また、前記分割された第1の領域が−1/4波長板として機能し、前記分割された第2の領域が+1/4波長板として機能することで、両機能を持つ波長板を実現できる。なお、領域分割型波長板の両面に第1の領域及び第2の領域を設けることが好ましい。   In addition, the divided first region functions as a -1/4 wavelength plate, and the divided second region functions as a +1/4 wavelength plate, thereby realizing a wave plate having both functions. . In addition, it is preferable to provide a 1st area | region and a 2nd area | region on both surfaces of a region division type | mold wavelength plate.

また、400乃至800nmの波長範囲内において広帯域特性を有することが好ましく、上記領域分割型波長板の使用波長帯域を400nm〜800nmの比較的広帯域とすることで、例えば、光ピックアップ装置として必要とされている405nm,650nm,780nm(青紫LD,DVD,CDの3波長互換)のような広い波長帯域内で一様な位相差特性を持たせることができる。   Further, it is preferable to have a broadband characteristic within a wavelength range of 400 to 800 nm. By using a wavelength band of the above-mentioned region division type wave plate as a relatively wide band of 400 nm to 800 nm, it is required as an optical pickup device, for example. It is possible to provide uniform phase difference characteristics within a wide wavelength band such as 405 nm, 650 nm, and 780 nm (compatible with three wavelengths of blue-violet LD, DVD, and CD).

本発明による領域分割型波長板の製造方法は、上述の領域分割型波長板をインプリント法により製造することを特徴とする。   A method of manufacturing a region-dividing wave plate according to the present invention is characterized in that the above-described region-dividing wave plate is manufactured by an imprint method.

この製造方法によれば、分割された領域間の境界部においてインプリント成形により成形品に変形が生じ易くなり、かかる変形により境界部が周囲の微細周期構造よりも突き出るために境界部自体が視認部となる。かかる境界部における変形は、分割された各領域の微細周期構造の方向が異なるため境界部で交差する構成の場合に一層生じ易くなる。また、周期構造の存在しない領域に対する微細周期構造の境界の内の少なくとも一辺が微細周期構造の方向と略一致することで、インプリント成形時の離型が安定して行われ、離型時の基材と型に対する負荷を軽減することができるので成形の歩留まりを向上できるとともに、型の耐久性を向上できる。   According to this manufacturing method, the molded product is likely to be deformed by imprint molding at the boundary between the divided regions, and the boundary protrudes more than the surrounding fine periodic structure due to the deformation, so that the boundary itself is visually recognized. Part. Such deformation at the boundary portion is more likely to occur in the case of a configuration that intersects at the boundary portion because the direction of the fine periodic structure of each divided region is different. In addition, at least one side of the boundary of the fine periodic structure with respect to the region where the periodic structure does not exist substantially coincides with the direction of the fine periodic structure, so that the mold release at the time of imprint molding is stably performed. Since the load on the base material and the mold can be reduced, the molding yield can be improved and the durability of the mold can be improved.

以上のように、分割された領域間の境界部及び/又は微細周期構造の方向を視認可能な視認部を、インプリント成形により微細周期構造とともに形成することができるので、視認部を設けたことによる特別なコストは発生せず、経済的に製造可能となる。   As described above, since the visual recognition part that can visually recognize the boundary part between the divided regions and / or the direction of the fine periodic structure can be formed together with the fine periodic structure by imprint molding, the visual recognition part is provided. No special costs are incurred and production is possible economically.

本発明の領域分割型波長板によれば、分割された領域に微細周期構造を有する領域分割型波長板において分割された領域間の境界部の位置や微細周期構造の方向を肉眼で知ることができる。このため、装置等において領域分割型波長板を配置し光学系を構成する際に、領域分割型波長板の組み込みや調整が容易となり、組立工数の削減につながる。   According to the region-divided wave plate of the present invention, the position of the boundary between regions divided in the region-divided wave plate having a fine periodic structure in the divided region and the direction of the fine periodic structure can be known with the naked eye. it can. For this reason, when an area division type wavelength plate is arranged in an apparatus or the like to construct an optical system, it becomes easy to incorporate and adjust the area division type wavelength plate, leading to a reduction in assembly man-hours.

以下、本発明を実施するための最良の形態について図面を用いて説明する。   The best mode for carrying out the present invention will be described below with reference to the drawings.

〈第1の実施の形態〉   <First Embodiment>

図1は第1の実施の形態による領域分割型波長板の模式的な平面図(a)、その模式的な断面図(b)及び拡大した模式的な部分断面図(c)である。図2は図1(a)の領域分割型波長板の境界部近傍を拡大して示す要部平面図(a)及び境界部近傍の要部斜視図(b)である。   FIG. 1 is a schematic plan view (a), a schematic cross-sectional view (b), and an enlarged schematic partial cross-sectional view (c) of a region-dividing wave plate according to the first embodiment. FIG. 2 is an enlarged plan view (a) of a main part and a main part perspective view (b) of the vicinity of the boundary part showing the vicinity of the boundary part of the region-dividing wave plate of FIG.

図1(a)の平面図に示すように、円板状の領域分割型波長板10は、直線状に延びる微細周期構造部15を有する第1の領域11と、第1の領域11と異なる方向に延びる微細周期構造部16を有する第2の領域12と、を直線状の境界部13を挟んで備えており、両微細周期構造部15,16が第1の領域11と第2の領域12との境界部13で交差するように形成されている。   As shown in the plan view of FIG. 1A, the disc-shaped region-dividing wave plate 10 is different from the first region 11 and the first region 11 having the fine periodic structure portion 15 extending linearly. And a second region 12 having a fine periodic structure portion 16 extending in the direction, with a linear boundary portion 13 sandwiched between the first region 11 and the second region. 12 is formed so as to intersect at a boundary portion 13 with 12.

領域分割型波長板10は、第1の領域11と第2の領域12が基材14の両面に形成されている。すなわち、図1(b)のように、第1の領域11の裏面側に第2の領域12が位置し、第2の領域12の裏面側に第1の領域11が位置するようにして両面に微細周期構造が形成されている。   In the region-divided wave plate 10, the first region 11 and the second region 12 are formed on both surfaces of the base material 14. That is, as shown in FIG. 1B, the second region 12 is located on the back side of the first region 11 and the first region 11 is located on the back side of the second region 12. A fine periodic structure is formed.

図1(b)、(c)のように、領域分割型波長板10の一方の面の第1の領域11に凹凸状の第1の微細周期構造部15を有し、凸部15aと凹部15bが周期的に繰り返して形成されている。一方の面の第2の領域12に凹凸状の第2の微細周期構造部16を有し、凸部16aと凹部16bが周期的に繰り返して形成されている(図2(a))。   As shown in FIGS. 1B and 1C, the first region 11 on one surface of the region-divided wave plate 10 has a concave and convex first fine periodic structure portion 15, and a convex portion 15a and a concave portion. 15b is formed periodically and repeatedly. The second region 12 on one surface has a concave-convex second fine periodic structure portion 16, and the convex portion 16a and the concave portion 16b are periodically and repeatedly formed (FIG. 2A).

同じく、他方の面の第2の領域12に凹凸状の第2の微細周期構造部17を有し、凸部17aと凹部17bが周期的に繰り返して形成されている。他方の面の第1の領域11に凹凸状の第1の微細周期構造部18を有する。なお、微細周期構造部15〜18の凹凸の周期ピッチを例えば300nm程度、各凸部の幅を例えば200nm程度とすることができるが、これは一例であって、他の寸法であってもよいことは勿論である。   Similarly, the second region 12 on the other surface has a concave-convex second fine periodic structure portion 17, and convex portions 17a and concave portions 17b are formed periodically and repeatedly. The first region 11 on the other surface has the first fine periodic structure portion 18 having an uneven shape. In addition, although the period pitch of the unevenness | corrugation of the fine periodic structure parts 15-18 can be about 300 nm, and the width | variety of each convex part can be about 200 nm, for example, this is an example and another dimension may be sufficient as it. Of course.

図2(a)に示すように、第1の領域11と第2の領域12との直線状の境界部13で両微細周期構造部15,16は凸部15aと凸部16aとが交差し、同様に凹部15bと凹部16bとが交差するようにして連続している。この境界部13には、各凸部15a,16aの上に図2(b)のように、その周囲の微細周期構造部15,16の凸部15a,16aから突き出るように突き出し部13aが形成されている。   As shown in FIG. 2A, at the linear boundary portion 13 between the first region 11 and the second region 12, both fine periodic structure portions 15 and 16 have the convex portion 15a and the convex portion 16a intersect. Similarly, the recess 15b and the recess 16b are continuous so as to intersect each other. As shown in FIG. 2B, a protruding portion 13a is formed on the boundary portion 13 so as to protrude from the protruding portions 15a and 16a of the surrounding fine periodic structure portions 15 and 16 on the protruding portions 15a and 16a. Has been.

上記突き出し部13aは領域分割型波長板10をインプリント法で作製したときの離型時に、境界部13で両微細周期構造部15,16の交差した凸部15a,16aが凸状に変形して形成されたものである。このため、突き出し部13aは、境界部13に沿って形成され、境界部13を視認可能な視認部を構成することができる。   In the protruding portion 13a, the convex portions 15a and 16a at which the two fine periodic structure portions 15 and 16 intersect at the boundary portion 13 are deformed into a convex shape at the time of release when the region-dividing wave plate 10 is manufactured by the imprint method. Is formed. For this reason, the protrusion part 13a can be comprised along the boundary part 13, and can comprise the visual recognition part which can visually recognize the boundary part 13. FIG.

以上のように、第1の実施の形態の領域分割型波長板10によれば、分割された領域11,12間の境界部13を、境界部13に沿って形成された、両微細周期構造部15,16の交差した凸部15a,16aから突き出た突き出し部13aにより肉眼で知ることができる。このため、装置等において領域分割型波長板を配置し光学系を構成する際に、領域分割型波長板の組み込みや分割された領域間の境界部を合わせる調整が容易となり、組立工数を削減できる。   As described above, according to the region-divided wave plate 10 of the first embodiment, the boundary portion 13 between the divided regions 11, 12 is formed along the boundary portion 13. It can be recognized with the naked eye by the protruding portion 13a protruding from the protruding portions 15a, 16a where the portions 15, 16 intersect. For this reason, when an area division type wavelength plate is arranged in an apparatus or the like to configure an optical system, it becomes easy to incorporate the area division type wavelength plate or adjust the boundary between the divided areas, thereby reducing the number of assembly steps. .

〈第2の実施の形態〉   <Second Embodiment>

図3は第2の実施の形態による領域分割型波長板の模式的な平面図(a)、その別の構成例を示す同様の平面図(b)及びその更に別の構成例を示す同様の平面図(c)である。   FIG. 3 is a schematic plan view (a) of a region division type wave plate according to the second embodiment, a similar plan view (b) showing another configuration example, and a similar configuration example showing another configuration example thereof. It is a top view (c).

図3(a)に示すように、第2の実施の形態による領域分割型波長板60は、全体として矩形状に構成され、直線状に延びる微細周期構造部65を有する第1の領域61と、第1の領域61と異なる方向に延びる微細周期構造部66を有する第2の領域62と、を直線状の境界部63を挟んで備えており、両微細周期構造部65,66が第1の領域61と第2の領域62との境界部63で交差するように形成されている。   As shown in FIG. 3A, the region-divided wave plate 60 according to the second embodiment is configured as a rectangular shape as a whole, and includes a first region 61 having a fine periodic structure portion 65 extending linearly. And a second region 62 having a fine periodic structure portion 66 extending in a different direction from the first region 61, with a linear boundary portion 63 sandwiched therebetween, and both fine periodic structure portions 65, 66 are provided in the first region 61. The region 61 and the second region 62 are formed so as to intersect with each other at the boundary 63.

領域分割型波長板60は、表面側の微細周期構造部65、66と同様に裏面側も構成されており、微細周期構造部が図1と同様に基材の両面に形成されている。各微細周期構造部は、図1(b)、(c)と同様に凹凸状に形成され、凸部と凹部とが周期的に繰り返して形成されている。   Similar to the fine periodic structure portions 65 and 66 on the front surface side, the region-divided wave plate 60 is also configured on the back surface side, and the fine periodic structure portions are formed on both surfaces of the substrate as in FIG. Each fine periodic structure portion is formed in a concavo-convex shape as in FIGS. 1B and 1C, and a convex portion and a concave portion are formed periodically and repeatedly.

矩形状の領域分割型波長板60は、境界部63を挟んで第1の領域61と第2の領域62に分割されているが、第1の領域61の外周を構成する各辺の内で、境界部63に対し傾斜している傾斜辺61aが微細周期構造部65の方向と略一致し、第2の領域62の外周を構成する各辺の内で、境界部63に対し傾斜している傾斜辺62aが微細周期構造部66の方向と略一致するように構成されている。このように、各領域61,62の傾斜辺61a,62aは、各領域61,62の外周の一部を形成し、微細周期構造部のない領域との境界を構成するとともに、微細周期構造部65,66の方向と略一致し、微細周期構造65,66の各方向に沿った視認部を構成することができる。   The rectangular region-dividing wave plate 60 is divided into a first region 61 and a second region 62 with a boundary 63 interposed therebetween, but within each side constituting the outer periphery of the first region 61. The inclined side 61a inclined with respect to the boundary part 63 substantially coincides with the direction of the fine periodic structure part 65, and is inclined with respect to the boundary part 63 within each side constituting the outer periphery of the second region 62. The inclined side 62 a is configured to substantially coincide with the direction of the fine periodic structure portion 66. As described above, the inclined sides 61a and 62a of the regions 61 and 62 form a part of the outer periphery of the regions 61 and 62 to form a boundary with the region without the fine periodic structure portion, and the fine periodic structure portion. It is possible to form a visual recognition portion that substantially coincides with the directions of 65 and 66 and extends along each direction of the fine periodic structures 65 and 66.

以上のように、第2の実施の形態の領域分割型波長板60によれば、微細周期構造部65,66の各方向を、分割された領域61,62に形成された微細周期構造部65,66の各方向に沿うとともに境界を構成する傾斜辺61a,62aにより肉眼で知ることができる。   As described above, according to the region-divided wave plate 60 of the second embodiment, the fine periodic structure portion 65 formed in the divided regions 61 and 62 in the respective directions of the fine periodic structure portions 65 and 66. , 66 along the respective directions and the inclined sides 61a, 62a constituting the boundary can be recognized with the naked eye.

次に、第2の実施の形態による領域分割型波長板の別の構成例について図3(b)、(c)を参照して説明する。   Next, another configuration example of the region division type wave plate according to the second embodiment will be described with reference to FIGS.

図3(b)の矩形状の領域分割型波長板70は、図3(a)とほぼ同様に構成され、境界部73を挟んで略平行四辺形状の第1の領域71と同じく略平行四辺形状の第2の領域72に分割されているが、第1の領域71の外周を構成する各辺の内で、境界部73に対し傾斜している傾斜辺71a,71cが微細周期構造部75の方向と略一致し、第2の領域72の外周を構成する各辺の内で、境界部73に対し傾斜している傾斜辺72a、72cが微細周期構造部76の方向と略一致するように構成されている。このように、各領域71,72の傾斜辺71a,72aは、各領域71,72の外周の一部を形成し、微細周期構造部のない領域との境界を構成するとともに、微細周期構造部75,76の方向と略一致し、微細周期構造75,76の各方向に沿った視認部を構成することができる。   The rectangular area-divided wave plate 70 in FIG. 3B is configured in substantially the same manner as in FIG. 3A, and is substantially parallel in the same manner as the first area 71 having a substantially parallelogram shape with the boundary 73 interposed therebetween. Although divided into second regions 72 having a shape, inclined sides 71 a and 71 c which are inclined with respect to the boundary portion 73 within each side constituting the outer periphery of the first region 71 are fine periodic structure portions 75. The inclined sides 72a and 72c that are inclined with respect to the boundary portion 73 within the sides constituting the outer periphery of the second region 72 substantially coincide with the direction of the fine periodic structure portion 76. It is configured. As described above, the inclined sides 71a and 72a of the regions 71 and 72 form a part of the outer periphery of the regions 71 and 72 to form a boundary with the region without the fine periodic structure portion, and the fine periodic structure portion. It is possible to form a visual recognition portion that substantially coincides with the directions 75 and 76 and that follows each direction of the fine periodic structures 75 and 76.

図3(b)の領域分割型波長板70によれば、微細周期構造部75,76の各方向を、分割された領域71,72に形成された微細周期構造部75,76の各方向に沿うとともに境界を構成する傾斜辺61a,61c,62a,62cにより肉眼で知ることができる。   According to the region-divided wave plate 70 of FIG. 3B, the directions of the fine periodic structure portions 75 and 76 are set to the directions of the fine periodic structure portions 75 and 76 formed in the divided regions 71 and 72, respectively. It can be recognized with the naked eye by the inclined sides 61a, 61c, 62a, and 62c that form the boundary along the line.

また、図3(c)の多角形状の領域分割型波長板80は、図3(a)とほぼ同様に構成され、境界部83を挟んで第1の領域81と第2の領域82に分割されているが、第1の領域81の外周を構成する各辺の内で、境界部83に対し傾斜している傾斜辺81aが微細周期構造部85の方向と略一致し、第2の領域82の外周を構成する各辺の内で、境界部83に対し傾斜している傾斜辺82aが微細周期構造部86の方向と略一致するように構成されている。領域81,82の外周を構成する他の辺は多角形状になっている。このように、各領域81,82の傾斜辺81a,82aは、各領域81,82の外周の一部を形成し、微細周期構造部のない領域との境界を構成するとともに、微細周期構造部85,86の方向と略一致し、微細周期構造85,86の各方向に沿った視認部を構成することができる。   Further, the polygonal region-dividing wave plate 80 in FIG. 3C is configured in substantially the same manner as in FIG. 3A, and is divided into a first region 81 and a second region 82 with a boundary 83 interposed therebetween. However, among the sides constituting the outer periphery of the first region 81, the inclined side 81 a inclined with respect to the boundary portion 83 substantially coincides with the direction of the fine periodic structure portion 85, and the second region Of the sides constituting the outer periphery of 82, the inclined side 82 a that is inclined with respect to the boundary portion 83 is configured to substantially coincide with the direction of the fine periodic structure portion 86. Other sides constituting the outer periphery of the regions 81 and 82 are polygonal. As described above, the inclined sides 81a and 82a of the regions 81 and 82 form a part of the outer periphery of the regions 81 and 82 to form a boundary with the region without the fine periodic structure portion, and the fine periodic structure portion. It is possible to configure a visual recognition portion that substantially coincides with the directions of 85 and 86 and extends along each direction of the fine periodic structures 85 and 86.

以上のように、図3(c)の領域分割型波長板80によれば、微細周期構造部85,86の各方向を、分割された領域81,82に形成された微細周期構造部85,86の各方向に沿うとともに境界を構成する傾斜辺81a,82aにより肉眼で知ることができる。   As described above, according to the region-divided wave plate 80 in FIG. 3C, the fine periodic structure portions 85 and 86 formed in the divided regions 81 and 82 are arranged in the directions of the fine periodic structure portions 85 and 86, respectively. It can be recognized with the naked eye by the inclined sides 81a and 82a that are along the respective directions 86 and constitute the boundary.

以上のような図3(a)乃至(c)の領域分割型波長板60,70,80によれば、微細周期構造部の方向を、分割された各領域に形成された微細周期構造部の方向に沿うとともに境界を構成する傾斜辺により肉眼で知ることができるため、装置等において領域分割型波長板を配置し光学系を構成する際に、領域分割型波長板の組み込みや微細周期構造部の方向を合わせる調整が容易となり、組立工数を削減できる。また、インプリント成形時の離型が安定して行われ、離型時の基材と型に対する負荷を軽減することができる。   3A to 3C as described above, the direction of the fine periodic structure portion is set to the direction of the fine periodic structure portion formed in each divided region. Since it can be seen with the naked eye by the inclined side that forms the boundary along the direction, when the area division type wave plate is arranged in an apparatus or the like to constitute the optical system, the division of the area division type wave plate or the fine periodic structure part This makes it easy to adjust the direction and reduces the number of assembly steps. Moreover, the mold release at the time of imprint molding is performed stably, and the load on the substrate and the mold at the time of mold release can be reduced.

次に、図1の領域分割型波長板10のインプリント法による製造方法について図4,図5を参照して説明する。図4は本実施の形態によるインプリント法を行うためのインプリント装置の要部を概略的に示す側断面図である。図5は本実施の形態によるインプリント法による製造方法の工程S01〜S06を説明するためのフローチャートである。   Next, a manufacturing method by the imprint method of the region division type wave plate 10 of FIG. 1 will be described with reference to FIGS. FIG. 4 is a side sectional view schematically showing a main part of an imprint apparatus for performing the imprint method according to the present embodiment. FIG. 5 is a flowchart for explaining steps S01 to S06 of the manufacturing method by the imprint method according to this embodiment.

なお、インプリント法とは、例えば特開2005−189128号公報のように、微細構造を有する型を用いて、ポリスチレン等の樹脂を加圧成形した後に、成形品を型から剥離することで、微小突起を有する微細構造物を得る公知の方法である。   In addition, the imprint method is, for example, as disclosed in JP-A-2005-189128, by using a mold having a fine structure and press-molding a resin such as polystyrene, and then peeling the molded product from the mold. This is a known method for obtaining a fine structure having fine protrusions.

図4のように、図1(a)〜(c)の第1の領域11の微細周期構造部15及び第2の領域12の微細周期構造部16に対応した凹凸部b1を有する上型bと、同じく微細周期構造部17及び微細周期構造部18に対応した凹凸部c1を有する下型cを用意し、インプリント装置の取付部m,nに上型b及び下型cをそれぞれ取り付けてから、樹脂からなる基材aをセットする(S01)。   As shown in FIG. 4, the upper die b having the uneven portion b <b> 1 corresponding to the fine periodic structure portion 15 of the first region 11 and the fine periodic structure portion 16 of the second region 12 in FIGS. Similarly, a lower mold c having an uneven portion c1 corresponding to the fine periodic structure portion 17 and the fine periodic structure portion 18 is prepared, and the upper die b and the lower die c are respectively attached to the attachment portions m and n of the imprint apparatus. Then, the base material a made of resin is set (S01).

次に、上型bを所定温度まで昇温してから(S02)、上型bを鉛直方向下方vに降下させ(S03)、基材aを上型bと下型cとの間に挟んで一定以上の圧力となるまでプレスし(S04)、この圧力状態で一定時間上型bと下型cを保持する(S05)。   Next, after raising the upper mold b to a predetermined temperature (S02), the upper mold b is lowered in the vertical downward direction v (S03), and the base material a is sandwiched between the upper mold b and the lower mold c. In step S04, the upper die b and the lower die c are held for a predetermined time in this pressure state (S05).

次に、上型bと下型cを冷却してから(S06)、上型bを鉛直方向上方v’に上昇させることで、また、基材aを下型cから取り去ることで剥離して離型することで(S07)、領域分割型波長板10を得ることができる。   Next, after the upper mold b and the lower mold c are cooled (S06), the upper mold b is lifted in the vertical upper direction v ′, and the substrate a is removed by removing it from the lower mold c. By releasing the mold (S07), the area-divided wave plate 10 can be obtained.

なお、基材aの樹脂は、ポリオレフィン樹脂やノルボルネン系樹脂等の光学用樹脂材料が好ましく、具体的には、例えば、三井化学(株)製のアペル、JSR(株)製のアートン、日本ゼオン(株)製のゼオノア、ゼオネックスなどを使用できる。   The resin of the base material a is preferably an optical resin material such as polyolefin resin or norbornene resin. Specifically, for example, Appel manufactured by Mitsui Chemicals, Arton manufactured by JSR Co., Ltd., Nippon Zeon Co., Ltd. ZEONOR, ZEONEX, etc. manufactured by KK can be used.

また、上型b、下型cは、例えば、ガラスからなる型基材上にレジストを均一に塗布してレジストマスクを形成してから電子ビームにより所定の微細パターンを描画し、所定の現像材料により現像し、この微細パターンが形成された型基材に対しプラズマ等のドライエッチングを行うことで凹凸部b1,c1を形成して製造できる。この電子ビーム描画は、本発明者等が、例えば特開2004−107793号公報や特開2004−54218号公報等で提案した電子ビーム描画装置により行うことができる。これにより、所望の描画パターンを電子ビームによる3次元描画でサブミクロンオーダーの高精度でレジスト膜上に形成できる。   The upper mold b and the lower mold c are formed by, for example, applying a resist uniformly on a mold base made of glass to form a resist mask, and then drawing a predetermined fine pattern by an electron beam, It can be manufactured by forming the concavo-convex portions b1 and c1 by performing dry etching such as plasma on the mold substrate on which the fine pattern is formed. This electron beam drawing can be performed by an electron beam drawing apparatus proposed by the present inventors in, for example, Japanese Patent Application Laid-Open Nos. 2004-107793 and 2004-54218. Thereby, a desired drawing pattern can be formed on the resist film with high accuracy on the order of submicrons by three-dimensional drawing with an electron beam.

以上のようにして、図1の第1の領域11と第2の領域12のように分割された領域にそれぞれ方向の異なる微細周期構造を有する領域分割型波長板10をインプリント法により製造することができるが、上記離型のとき(S06)、第1の領域11と第2の領域12との境界部13で両微細周期構造部15,16の交差した凸部15a,16aが凸状に変形して図2(b)のような突き出し部13aが形成される。このようにして、型b、cに突き出し部13aの形成のための特別な工夫をすることなく、突き出し部13aを境界部13に沿って形成することができ、領域分割型波長板10において境界部13を視認可能な視認部を構成できる。   As described above, the area-dividing wave plate 10 having fine periodic structures with different directions in the divided areas such as the first area 11 and the second area 12 in FIG. 1 is manufactured by the imprint method. However, at the time of releasing (S06), the convex portions 15a and 16a intersecting the fine periodic structure portions 15 and 16 at the boundary portion 13 between the first region 11 and the second region 12 are convex. In this way, a protruding portion 13a as shown in FIG. 2B is formed. In this way, the protruding portion 13a can be formed along the boundary portion 13 without special measures for forming the protruding portion 13a in the molds b and c, and the boundary in the region-dividing wave plate 10 can be formed. The visual recognition part which can visually recognize the part 13 can be comprised.

また、図3(a)乃至(c)の領域分割型波長板60,70,80を上述の図4,図5と同様にしてインプリント法により製造することができるが、この離型のとき、各境界に位置する各領域の傾斜辺61aと62a,71aと72a,81aと82aがそれぞれ微細周期構造部65と66,75と76,85と86の方向に沿っているので、離型がスムースに安定して行われるとともに、離型時に型や基材への負荷が小さくなる。   3A to 3C can be manufactured by the imprint method in the same manner as in FIGS. 4 and 5 described above. Since the inclined sides 61a and 62a, 71a and 72a, 81a and 82a of each region located at each boundary are along the directions of the fine periodic structure portions 65 and 66, 75 and 76, 85 and 86, respectively, the mold release is performed. The process is performed smoothly and stably, and the load on the mold and the substrate is reduced at the time of mold release.

すなわち、離型は微細周期構造の平面に対して垂直方向に行われると、樹脂詰まりなどが起き易いので、微細周期構造の平面に対して略平行に進むように行われ、上述のように各傾斜辺での剥離が微細周期構造部の方向に沿って進むので、離型がスムースに安定して行われる。   That is, when the mold release is performed in a direction perpendicular to the plane of the fine periodic structure, resin clogging is likely to occur, and therefore, the mold release is performed so as to proceed substantially parallel to the plane of the fine periodic structure. Since the peeling at the inclined side proceeds along the direction of the fine periodic structure portion, the mold release is performed smoothly and stably.

また、上記離型のとき、図3(a)乃至(c)の領域分割型波長板の傾斜辺61aと62a,71aと72a,81aと82aとの頂点tから剥離が開始され、離型の開始点(頂点t)から各傾斜辺及び各微細周期構造の方向に沿って剥離が進みことで離型が安定して行われ、これにより、再現性の高い成形が可能となる。   Moreover, at the time of the above release, peeling is started from the apex t of the inclined sides 61a and 62a, 71a and 72a, 81a and 82a of the region-divided wave plate of FIGS. 3 (a) to 3 (c). Separation progresses from the start point (vertex t) along the direction of each inclined side and each fine periodic structure, so that the mold release is performed stably, thereby enabling molding with high reproducibility.

次に、図1のような領域分割型波長板10の使用例について図6を参照して説明する。図6は図1の領域分割型波長板10を配置した光学系を概略的に示す図である。   Next, a usage example of the region division type wave plate 10 as shown in FIG. 1 will be described with reference to FIG. FIG. 6 is a diagram schematically showing an optical system in which the region division type wavelength plate 10 of FIG. 1 is arranged.

図6の領域分割型波長板10は、両面の第1の領域11が−1/4波長板として機能し、両面の第2の領域12が+1/4波長板として機能するように構成されている。図6のように、レンズ31と33との間に領域分割型波長板10を配置し、領域分割型波長板10とレンズ33との間に偏光板32を配置している。   The region division type wave plate 10 of FIG. 6 is configured such that the first region 11 on both sides functions as a -1/4 wavelength plate and the second region 12 on both sides functions as a +1/4 wavelength plate. Yes. As shown in FIG. 6, the region-dividing wave plate 10 is disposed between the lenses 31 and 33, and the polarizing plate 32 is disposed between the region-dividing wave plate 10 and the lens 33.

図6の光学系において、レンズ31からの実線で示す直線偏光の光(波長λ)が領域分割型波長板10の第1の領域11,11(−1/4波長板)を通過して−90°−90°の位相差が与えられ、偏光方向が変化し、また第2の領域12,12(+1/4波長板)を通過して+90°+90°の位相差が与えられ、偏光方向が変化し、偏光板32を通過する。この場合、破線で示すように、光が例えば領域分割型波長板10の手前で焦点を所定を結ぶと、領域分割型波長板10の第2の領域12,第1の領域11を通過し、また第1の領域11,第2の領域12を通過し、偏光方向は変化せず、偏光板32を通過しない。これに対し、図6の実線で示すように、レンズ31からの光が領域分割型波長板10の両面の間で焦点を結ぶことで、上述のように、±180°の位相差が与えられ、偏光方向が変化し、偏光板32を通過する。   In the optical system of FIG. 6, linearly polarized light (wavelength λ) indicated by a solid line from the lens 31 passes through the first regions 11 and 11 (−1/4 wavelength plate) of the region-dividing wavelength plate 10 − A phase difference of 90 ° -90 ° is given, the polarization direction is changed, and a phase difference of + 90 ° + 90 ° is given by passing through the second regions 12 and 12 (+1/4 wavelength plate), and the polarization direction Changes and passes through the polarizing plate 32. In this case, as shown by a broken line, when the light is focused on, for example, in front of the region-dividing wave plate 10, the light passes through the second region 12 and the first region 11 of the region-dividing wave plate 10, Further, the light passes through the first region 11 and the second region 12, the polarization direction does not change, and does not pass through the polarizing plate 32. On the other hand, as shown by the solid line in FIG. 6, the light from the lens 31 is focused between both surfaces of the region-dividing wavelength plate 10 to give a phase difference of ± 180 ° as described above. The polarization direction changes and passes through the polarizing plate 32.

以上のように、レンズ31からの光が領域分割型波長板10の両面の間で焦点を結ぶように領域分割型波長板10を配置することで、例えば多層ディスク等の所定の深さ位置の反射光のみを透過させるようにできる。図6の光学系において2枚の波長板を配置した場合、2枚の波長板間に焦点を結ぶように2枚の波長板の各位置を調整しなければならず、このため調整が複雑で組立に手間取ってしまうのに対し、図6のように1枚の領域分割型波長板10の両面に波長板の機能を備えることで、領域分割型波長板10の位置調整を行うだけでよく、調整が容易で組立が簡単となり、好ましい。   As described above, the region-divided wave plate 10 is arranged so that the light from the lens 31 is focused between both surfaces of the region-divided wave plate 10, for example, at a predetermined depth position of a multilayer disk or the like. Only reflected light can be transmitted. When two wave plates are arranged in the optical system of FIG. 6, each position of the two wave plates must be adjusted so as to focus between the two wave plates, which makes the adjustment complicated. Although it takes time to assemble, it is only necessary to adjust the position of the region-dividing wave plate 10 by providing the function of a wave plate on both surfaces of one region-dividing wave plate 10 as shown in FIG. Adjustment is easy and assembly is easy, which is preferable.

また、領域分割型波長板10の境界部13の位置が肉眼で分かるので、境界部13の位置調整も容易となる。また、図3(a)乃至(c)のように領域分割型波長板10を構成することで、微細周期構造部の方向も肉眼でで分かるので、微細周期構造部の方向の調整も容易となる。   Further, since the position of the boundary portion 13 of the region-dividing wave plate 10 can be seen with the naked eye, the position adjustment of the boundary portion 13 is also easy. Further, by configuring the region-dividing wave plate 10 as shown in FIGS. 3A to 3C, the direction of the fine periodic structure portion can be seen with the naked eye, so that the direction of the fine periodic structure portion can be easily adjusted. Become.

また、図3(a)乃至(c)の領域分割型波長板において400nm〜800nmの比較的広い波長帯域で一様な位相差特性を発現させるために、微細周期構造のアスペクト比(凹凸の深さh/凸部の幅w(図1(c)参照))が5程度以上必要とされるが、かかる高アスペクト比を持つ領域分割型波長板を成形する場合、成形後の離型が困難となり歩留まりが低下してしまい易いが、第2の実施の形態によれば、上述のように離型がスムースに安定して行われかつ離型時に型や基材への負荷が小さくなるから、高アスペクト比の微細周期構造を持つ領域分割型波長板を歩留まりよく製造することができる。   In addition, in order to develop a uniform retardation characteristic in a relatively wide wavelength band of 400 nm to 800 nm in the region-divided wave plate of FIGS. The height h / the width w of the convex portion (see FIG. 1 (c)) is required to be about 5 or more. However, when forming a domain-divided wave plate having such a high aspect ratio, it is difficult to release after molding However, according to the second embodiment, the mold release is performed smoothly and stably as described above, and the load on the mold and the substrate is reduced at the time of mold release. A region-dividing wave plate having a fine periodic structure with a high aspect ratio can be manufactured with high yield.

以上のように本発明を実施するための最良の形態について説明したが、本発明はこれらに限定されるものではなく、本発明の技術的思想の範囲内で各種の変形が可能である。例えば、図3(a)乃至(c)の境界部63,73,83を図2(a)、(b)と同様に構成し、境界部63,73,83を視認可能にするように構成してもよく、これにより、分割された領域間の境界部を合わせる調整が容易となる。   As described above, the best mode for carrying out the present invention has been described. However, the present invention is not limited to these, and various modifications are possible within the scope of the technical idea of the present invention. For example, the boundary portions 63, 73, and 83 in FIGS. 3A to 3C are configured in the same manner as in FIGS. 2A and 2B, and the boundary portions 63, 73, and 83 are configured to be visible. This may facilitate adjustment to match the boundary between the divided areas.

また、図3(a)乃至(c)の領域分割型波長板60,70,80は、平面的に矩形状または多角形状に構成され、ほぼ全面に微細周期構造部が形成されているが、本発明はこれに限定されず、三角形状等の他の形状であってもよく、また微細周期構造部のない領域が微細周期構造部の外側に存在してもよく、更に全体平面形状が円板状になって、微細周期構造部のない領域が円板外周に存在してもよく、例えば、図3(a)乃至(c)の各辺61a,62a,71a,71c,72a,72c,81a,82aが微細周期構造部のある領域と微細周期構造部のない領域との境界に位置するように構成できる。   3A to 3C are configured to have a rectangular or polygonal shape in plan, and a fine periodic structure portion is formed on almost the entire surface. The present invention is not limited to this, and may have other shapes such as a triangular shape, a region without a fine periodic structure portion may exist outside the fine periodic structure portion, and the entire planar shape may be a circle. The plate-like region without the fine periodic structure portion may exist on the outer periphery of the disc. For example, each side 61a, 62a, 71a, 71c, 72a, 72c, FIG. 81a and 82a can be comprised so that it may be located in the boundary of the area | region with a fine periodic structure part, and the area | region without a fine periodic structure part.

また、図1、図3の各領域分割型波長板は微細周期構造が両面に形成されているが、本発明はこれに限定されず、片面のみに形成されてもよい。   Moreover, although each region division | segmentation type | mold wavelength plate of FIG. 1, FIG. 3 has a fine periodic structure formed in both surfaces, this invention is not limited to this, You may form in only one side.

また、領域分割型波長板10の図2(b)の突き出し部13aを形成するように予め工夫した型、例えば境界部13に位置する凸部が高くなるような構造の型を用いてもよい。   Further, a mold that has been devised in advance so as to form the protruding portion 13a of FIG. .

第1の実施の形態による領域分割型波長板の模式的な平面図(a)、その模式的な断面図(b)及び拡大した模式的な部分断面図(c)である。It is the typical top view (a) of the area | region division type | mold wavelength plate by 1st Embodiment, its typical sectional drawing (b), and the enlarged typical fragmentary sectional view (c). 図1(a)の領域分割型波長板の境界部近傍を拡大して示す要部平面図(a)及び境界部近傍の要部斜視図(b)である。FIG. 2A is an enlarged plan view of a main part showing the vicinity of a boundary part of the region-divided wave plate of FIG. 1A, and FIG. 第2の実施の形態による領域分割型波長板の模式的な平面図(a)、その別の構成例を示す同様の平面図(b)及びその更に別の構成例を示す同様の平面図(c)である。The typical top view (a) of the area | region division type | mold wavelength plate by 2nd Embodiment, the same top view (b) which shows the other structural example, and the same top view which shows the further another structural example ( c). 本実施の形態によるインプリント法を行うためのインプリント装置の要部を概略的に示す側断面図である。It is a sectional side view which shows roughly the principal part of the imprint apparatus for performing the imprint method by this Embodiment. 本実施の形態によるインプリント法による製造方法の工程S01〜S06を説明するためのフローチャートである。It is a flowchart for demonstrating process S01-S06 of the manufacturing method by the imprint method by this Embodiment. 図1の領域分割型波長板10を配置した光学系を概略的に示す図である。It is a figure which shows schematically the optical system which has arrange | positioned the area | region division type | mold wavelength plate 10 of FIG. 従来の領域分割型波長板の境界部近傍の平面図である。It is a top view of the boundary part vicinity of the conventional area | region division type | mold wavelength plate.

符号の説明Explanation of symbols

10 領域分割型波長板
11 第1の領域(分割された領域)
12 第2の領域(分割された領域)
13 境界部
13a 突き出し部
14 基材
15,16 両微細周期構造部
15a,16a 凸部
15b,16b 凹部
17,18 微細周期構造部
17a 凸部
17b 凹部
60,70,80 領域分割型波長板
61,71,81 第1の領域(分割された領域)
61a,71a,81a 傾斜辺
62,72,82 第2の領域(分割された領域)
62a,72a,82a 傾斜辺
63,73,83 境界部
65,75,85 微細周期構造部
66,76,86 微細周期構造部
b 上型
c 下型
10 area-divided wave plate 11 first area (divided area)
12 Second area (divided area)
13 boundary part 13a protrusion part 14 base material 15, 16 both fine periodic structure parts 15a, 16a convex part 15b, 16b concave part 17, 18 fine periodic structure part 17a convex part 17b concave part 60, 70, 80 area division type wavelength plate 61, 71, 81 First area (divided area)
61a, 71a, 81a Inclined side 62, 72, 82 Second area (divided area)
62a, 72a, 82a Inclined sides 63, 73, 83 Boundary portions 65, 75, 85 Fine periodic structure portions 66, 76, 86 Fine periodic structure portions b Upper mold c Lower mold

Claims (7)

少なくとも2つに分割された各領域に所定方向に延びる微細周期構造をそれぞれ有する領域分割型波長板であって、
前記分割された領域間の境界部及び/又は前記微細周期構造の方向を視認可能な視認部を備え、
前記視認部が前記境界部及び/又は前記方向に沿うようにして形成されていることを特徴とする領域分割型波長板。
An area division type wavelength plate having a fine periodic structure extending in a predetermined direction in each area divided into at least two areas,
A visual recognition part capable of visually recognizing the boundary between the divided regions and / or the direction of the fine periodic structure,
The region division type wavelength plate, wherein the visual recognition part is formed so as to be along the boundary part and / or the direction.
前記境界部がその周囲の微細周期構造よりも突き出て形成されている請求項1に記載の領域分割型波長板。   The region division type wavelength plate according to claim 1, wherein the boundary portion is formed so as to protrude from a surrounding fine periodic structure. 微細周期構造の存在しない領域に対する前記微細周期構造の境界の内の少なくとも一辺が前記微細周期構造の方向と略一致している請求項1または2に記載の領域分割型波長板。   The region division type wavelength plate according to claim 1 or 2, wherein at least one side of a boundary of the fine periodic structure with respect to a region where the fine periodic structure does not exist substantially coincides with the direction of the fine periodic structure. 前記分割された各領域の微細周期構造の方向が異なる請求項1乃至3のいずれか1項に記載の領域分割型波長板。   The region division type wavelength plate according to any one of claims 1 to 3, wherein directions of the fine periodic structures of the divided regions are different. 前記分割された第1の領域が−1/4波長板として機能し、前記分割された第2の領域が+1/4波長板として機能する請求項1乃至4のいずれか1項に記載の領域分割型波長板。   The region according to any one of claims 1 to 4, wherein the divided first region functions as a -1/4 wavelength plate, and the divided second region functions as a +1/4 wavelength plate. Divided wave plate. 400乃至800nmの波長範囲内において広帯域特性を有する請求項1乃至5のいずれか1項に記載の領域分割型波長板。   6. The region division type wave plate according to claim 1, which has a broadband characteristic within a wavelength range of 400 to 800 nm. 請求項1乃至7のいずれか1項に記載の領域分割型波長板をインプリント法により製造することを特徴とする領域分割型波長板の製造方法。   A method for manufacturing a region-dividing wave plate, comprising manufacturing the region-dividing wave plate according to any one of claims 1 to 7 by an imprint method.
JP2007162189A 2006-06-28 2007-06-20 Area division type wavelength plate and method for manufacturing the same Pending JP2008033279A (en)

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Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2011148701A1 (en) * 2010-05-28 2011-12-01 シャープ株式会社 Color filter, and reflection-type display device equipped with same
WO2018179881A1 (en) * 2017-03-27 2018-10-04 株式会社ダイセル Resin molded article production method and optical component production method
JP2018161864A (en) * 2017-03-27 2018-10-18 株式会社ダイセル Method for producing resin molded product and method for producing optical component
JP2018161863A (en) * 2017-03-27 2018-10-18 株式会社ダイセル Method for producing resin molded product and method for producing optical component

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2011148701A1 (en) * 2010-05-28 2011-12-01 シャープ株式会社 Color filter, and reflection-type display device equipped with same
WO2018179881A1 (en) * 2017-03-27 2018-10-04 株式会社ダイセル Resin molded article production method and optical component production method
JP2018161864A (en) * 2017-03-27 2018-10-18 株式会社ダイセル Method for producing resin molded product and method for producing optical component
JP2018161863A (en) * 2017-03-27 2018-10-18 株式会社ダイセル Method for producing resin molded product and method for producing optical component
US11927884B2 (en) 2017-03-27 2024-03-12 Daicel Corporation Resin molded article production method and optical component production method

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