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JP2008032681A - Rolling device part inspection method and rolling device part inspection device - Google Patents

Rolling device part inspection method and rolling device part inspection device Download PDF

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Publication number
JP2008032681A
JP2008032681A JP2007008091A JP2007008091A JP2008032681A JP 2008032681 A JP2008032681 A JP 2008032681A JP 2007008091 A JP2007008091 A JP 2007008091A JP 2007008091 A JP2007008091 A JP 2007008091A JP 2008032681 A JP2008032681 A JP 2008032681A
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rolling device
electromagnetic induction
device component
magnetic field
induction sensor
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Inventor
Tomonori Nomiyama
知典 野見山
Kenji Imanishi
賢治 今西
Noboru Yasuda
昇 安田
Kyosuke Tokiwa
恭輔 常盤
Takanori Miyasaka
孝範 宮坂
Kinji Yugawa
謹次 湯川
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NSK Ltd
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NSK Ltd
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Abstract

【課題】転動装置部品の表面に付着した異物の影響を受けることなく地疵などの欠陥が転動装置部品の内部に存在しているか否かを精度よく検査することのできる転動装置部品の検査方法を提供する。
【解決手段】地疵などの欠陥が転動装置部品の内部にあるか否かを電磁誘導センサ11により検査する際に、転動装置部品の表面に異物除去部材17を軽く押し当て、転動装置部品の表面に付着した異物19を異物除去部材17により電磁誘導センサ11の手前で除去しながら欠陥の有無を検査する。
【選択図】図3
A rolling device component capable of accurately inspecting whether or not a defect such as a ground exists in the rolling device component without being affected by foreign matter adhering to the surface of the rolling device component. Provide inspection methods.
When an electromagnetic induction sensor 11 inspects whether or not a defect such as a ground exists inside a rolling device part, a foreign matter removing member 17 is lightly pressed against the surface of the rolling device part to cause rolling. The presence or absence of a defect is inspected while removing the foreign matter 19 adhering to the surface of the device component before the electromagnetic induction sensor 11 by the foreign matter removing member 17.
[Selection] Figure 3

Description

本発明は、転がり軸受、ボールねじ、直動案内軸受装置等の転動装置の部品を検査する方法及び装置に関する。   The present invention relates to a method and an apparatus for inspecting parts of a rolling device such as a rolling bearing, a ball screw, and a linear motion guide bearing device.

ころ軸受の転動体素材や軌道輪素材として用いられる棒鋼は、一般に、鋼材を圧延して製鋼される。このため、地疵などの欠陥が棒鋼の内部に存在していることが多く、従って、ころ軸受の転動体素材や軌道輪素材として棒鋼を用いる場合には、地疵などの欠陥が棒鋼の内部に存在しているか否かを検査する必要がある。
地疵などの欠陥が棒鋼の内部に存在しているか否かを検査する場合、棒鋼を軸心回りに回転させながら欠陥の有無を電磁誘導により検査することが考えられる。また、これらの素材を鍛造等に型取りした研削加工や超仕上げ加工前の前加工を施した部材にも適用可能である。さらに、研削加工や超仕上げ加工した後の部品にも適用可能である。
In general, steel bars used as rolling element materials or bearing ring materials for roller bearings are produced by rolling a steel material. For this reason, defects such as earth are often present inside the steel bar. Therefore, when steel bars are used as the rolling element material or the bearing ring material of a roller bearing, defects such as earth are often found inside the steel bar. It is necessary to check whether or not it exists.
When inspecting whether or not a defect such as ground exists in the steel bar, it is conceivable to inspect the presence or absence of the defect by electromagnetic induction while rotating the steel bar around the axis. Moreover, it is applicable also to the member which gave the grinding process which shape | molded these raw materials into forging etc., and the pre-processing before super-finishing process. Furthermore, it can be applied to parts after grinding or superfinishing.

しかしながら、棒鋼を軸心回りに回転させながら欠陥の有無を電磁誘導により検査する場合、棒鋼の表面に異物が付着していると棒鋼の内部に存在している欠陥を精度よく検出することが困難になるという問題がある。
また、地疵などの欠陥が転動装置部品の内部に存在するか否かを検査する方法としては、超音波探傷を利用した検査方法がある(例えば、特許文献1参照)。しかし、この検査方法は超音波探傷プローブと被検査面との間に油、水等の超音波伝達媒体を介在させる必要があるため、検査後に被測定物を洗浄する必要があり、検査コストの上昇を招くなどの問題がある。
特開平11−337537号公報
However, when the presence or absence of defects is inspected by electromagnetic induction while rotating the steel bar around its axis, it is difficult to accurately detect the defects present inside the steel bar if foreign matter adheres to the surface of the steel bar. There is a problem of becoming.
In addition, as a method for inspecting whether or not a defect such as ground exists in the rolling device part, there is an inspection method using ultrasonic flaw detection (see, for example, Patent Document 1). However, this inspection method requires an ultrasonic transmission medium such as oil or water to be interposed between the ultrasonic flaw detection probe and the surface to be inspected. There are problems such as incurring a rise.
JP 11-337537 A

本発明は上述した問題点に着目してなされたものであり、その目的は、転動装置部品の表面に付着した異物の影響を受けることなく地疵などの欠陥が転動装置部品の内部に存在しているか否かを精度よく検査することのできる転動装置部品の検査方法及び転動装置部品用検査装置を提供することにある。   The present invention has been made paying attention to the above-mentioned problems, and the purpose of the present invention is to prevent defects such as ground from appearing inside the rolling device part without being affected by foreign matter adhering to the surface of the rolling device part. An object of the present invention is to provide a rolling device component inspection method and a rolling device component inspection device capable of accurately inspecting whether or not they exist.

上記目的を達成するために、請求項1記載の発明に係る転動装置部品の検査方法は、転動装置部品に交流磁界を付与する励磁コイルと、この励磁コイルから転動装置部品に付与された交流磁界の磁束密度の変化を検出するための誘導コイルとを有する電磁誘導センサを用い、かつ前記転動装置部品と前記電磁誘導センサを相対移動させながら前記転動装置部品の表面または内部に存在する欠陥、表面硬さ、焼入れ深さ、金属組織変化、異材混入のいずれかを検査する転動装置部品の検査方法であって、前記転動装置部品を検査する際に前記転動装置部品の表面に異物除去部材の先端を軽く接触させ、前記転動装置部品の表面に付着した異物を前記異物除去部材により前記電磁誘導センサの手前で除去しながら前記転動装置部品の検査を行うことを特徴とする。   In order to achieve the above object, an inspection method for a rolling device part according to the first aspect of the present invention is applied to an excitation coil for applying an alternating magnetic field to the rolling device part, and from this excitation coil to the rolling device part. An electromagnetic induction sensor having an induction coil for detecting a change in magnetic flux density of an alternating magnetic field is used, and on the surface or inside of the rolling device component while relatively moving the rolling device component and the electromagnetic induction sensor. A method for inspecting a rolling device part for inspecting any of existing defects, surface hardness, quenching depth, metallographic change, and mixing of different materials, and the rolling device part when inspecting the rolling device part The tip of the foreign material removing member is lightly brought into contact with the surface of the rolling device, and the rolling device component is inspected while the foreign material adhering to the surface of the rolling device component is removed by the foreign material removing member before the electromagnetic induction sensor. The features.

請求項2記載の発明に係る転動装置部品の検査方法は、請求項1記載の転動装置部品の検査方法において、前記異物除去部材が弾性体であることを特徴とする。
請求項3記載の発明に係る転動装置部品の検査方法は、請求項2記載の転動装置部品の検査方法において、前記弾性体が刷毛、ウレタン、ゴム、プラスチックのいずれかであることを特徴とする。
A rolling device part inspection method according to a second aspect of the present invention is the rolling device part inspection method according to the first aspect, wherein the foreign matter removing member is an elastic body.
A method for inspecting a rolling device part according to a third aspect of the present invention is the method for inspecting a rolling device part according to the second aspect, wherein the elastic body is any one of a brush, urethane, rubber, and plastic. And

請求項4記載の発明に係る転動装置部品の検査方法は、転動装置部品に交流磁界を付与する励磁コイルと、この励磁コイルから転動装置部品に付与された交流磁界の磁束密度の変化を検出するための誘導コイルとを有する電磁誘導センサを用い、かつ前記転動装置部品と前記電磁誘導センサを相対移動させながら前記転動装置部品の表面または内部に存在する欠陥、表面硬さ、焼入れ深さ、金属組織変化、異材混入のいずれかを検査する転動装置部品の検査方法であって、前記電磁誘導センサの先端面を前記転動装置部品の表面形状に合わせた形状としたことを特徴とする。   According to a fourth aspect of the present invention, there is provided a rolling device component inspection method comprising: an exciting coil that applies an alternating magnetic field to the rolling device component; and a change in magnetic flux density of an alternating magnetic field applied from the exciting coil to the rolling device component. A defect present on the surface or inside of the rolling device component, surface hardness, while relatively moving the rolling device component and the electromagnetic induction sensor, using an electromagnetic induction sensor having an induction coil for detecting A rolling device component inspection method for inspecting any of quenching depth, metallographic change, and mixing of different materials, wherein the tip surface of the electromagnetic induction sensor has a shape that matches the surface shape of the rolling device component It is characterized by.

請求項5記載の発明に係る転動装置部品の検査方法は、請求項4記載の転動装置部品の検査方法において、前記電磁誘導センサと前記転動装置部品は交流磁界の磁力線が前記転動装置部品に対して90度となるように、それぞれの形状が規定されていることを特徴とする。
請求項6記載の発明に係る転動装置部品の検査方法は、請求項1〜5のいずれか一項記載の転動装置部品の検査方法において、前記転動装置部品の素材が棒鋼であることを特徴とする。
According to a fifth aspect of the present invention, there is provided a method for inspecting a rolling device part according to the fourth aspect, wherein the electromagnetic induction sensor and the rolling device component have a magnetic field line of an alternating magnetic field in the rolling direction. Each shape is defined so as to be 90 degrees with respect to the device parts.
The rolling device part inspection method according to claim 6 is the rolling device component inspection method according to any one of claims 1 to 5, wherein the material of the rolling device part is a steel bar. It is characterized by.

請求項7記載の発明に係る転動装置部品の検査方法は、請求項1〜5のいずれか一項記載の転動装置部品の検査方法において、被検出部材は素材となる部材を鍛造により、転動装置部品として型取りした部材であることを特徴とする。
請求項8記載の発明に係る転動装置部品の検査方法は、請求項1〜5のいずれか一項記載の転動装置部品の検査方法において、被検出部材は転動装置部品として研削加工または超仕上げ加工した部材であることを特徴とする。
The inspection method for a rolling device part according to the invention of claim 7 is the rolling device component inspection method according to any one of claims 1 to 5, wherein the member to be detected is forged by a member as a material. It is a member formed as a rolling device part.
The rolling device part inspection method according to claim 8 is the rolling device component inspection method according to any one of claims 1 to 5, wherein the detected member is ground or processed as the rolling device part. It is a superfinished member.

請求項9記載の発明に係る転動装置部品の検査方法は、転動装置部品に交流磁界を付与する励磁コイルと、この励磁コイルから転動装置部品に付与された交流磁界の磁束密度の変化を検出するための誘導コイルとを有する電磁誘導センサを用い、かつ前記転動装置部品と前記電磁誘導センサを相対移動させながら前記転動装置部品の表面または内部に存在する欠陥、表面硬さ、焼入れ深さ、金属組織変化、異材混入のいずれかを検査する転動装置部品の検査方法であって、前記転動装置部品を検査する際に前記転動装置部品の表面に異物除去部材の先端を接触させ、前記転動装置部品の表面に付着した異物を前記異物除去部材により前記電磁誘導センサの手前で除去しながら前記転動装置部品の検査を行うようにし、かつ前記電磁誘導センサの先端面を前記転動装置部品の表面形状に合わせて検査を行うようにしたことを特徴とする。   According to a ninth aspect of the present invention, there is provided a rolling device component inspection method comprising: an exciting coil for applying an alternating magnetic field to the rolling device component; and a change in magnetic flux density of an alternating magnetic field applied from the exciting coil to the rolling device component. A defect present on the surface of or inside the rolling device component while moving the rolling device component and the electromagnetic induction sensor relative to each other, surface hardness, A method for inspecting a rolling device part for inspecting any of quenching depth, metallographic change, and mixing of different materials, and when inspecting the rolling device part, a tip of a foreign matter removing member on the surface of the rolling device part And inspecting the rolling device component while removing foreign matter adhering to the surface of the rolling device component before the electromagnetic induction sensor by the foreign material removing member, and the electromagnetic induction sensor Characterized in that the distal end surface and to perform testing in accordance with the surface shape of the rolling device parts.

請求項10記載の発明に係る転動装置部品の検査方法は、請求項1記載の検査方法に用いられる転動装置部品用検査装置であって、転動装置部品に交流磁界を付与する励磁コイルと該励磁コイルから転動装置部品に付与された交流磁界の磁束密度の変化を検出するための誘導コイルとを有する電磁誘導センサと、前記誘導コイルに発生した誘導起電力の振幅と位相のうち少なくとも一方の変化量を測定するデータ処理部と、前記データ処理部の出力を閾値と比較して合否判定する判定部とを具備したことを特徴とする。   A rolling device part inspection method according to a tenth aspect of the present invention is the rolling device component inspection device used in the inspection method according to the first aspect, wherein the exciting coil applies an alternating magnetic field to the rolling device component. And an induction coil for detecting a change in magnetic flux density of an alternating magnetic field applied to the rolling device component from the excitation coil, and the amplitude and phase of the induced electromotive force generated in the induction coil A data processing unit that measures at least one of the change amounts, and a determination unit that compares the output of the data processing unit with a threshold and determines pass / fail are provided.

請求項11記載の発明に係る転動装置部品の検査方法は、請求項4記載の検査方法に用いられる転動装置部品用検査装置であって、転動装置部品に交流磁界を付与する励磁コイルと該励磁コイルから転動装置部品に付与された交流磁界の磁束密度の変化を検出するための誘導コイルとを有する電磁誘導センサと、前記誘導コイルに発生した誘導起電力の振幅と位相のうち少なくとも一方の変化量を測定するデータ処理部と、前記データ処理部の出力を閾値と比較して合否判定する判定部とを具備したことを特徴とする。   A rolling device part inspection method according to an eleventh aspect of the present invention is the rolling device component inspection device used in the inspection method according to claim 4, wherein the exciting coil applies an alternating magnetic field to the rolling device component. And an induction coil for detecting a change in magnetic flux density of an alternating magnetic field applied to the rolling device component from the excitation coil, and the amplitude and phase of the induced electromotive force generated in the induction coil A data processing unit that measures at least one of the change amounts, and a determination unit that compares the output of the data processing unit with a threshold and determines pass / fail are provided.

請求項12記載の発明に係る転動装置部品の検査方法は、請求項9記載の検査方法に用いられる転動装置部品用検査装置であって、転動装置部品に交流磁界を付与する励磁コイルと該励磁コイルから転動装置部品に付与された交流磁界の磁束密度の変化を検出するための誘導コイルとを有する電磁誘導センサと、前記誘導コイルに発生した誘導起電力の振幅と位相のうち少なくとも一方の変化量を測定するデータ処理部と、前記データ処理部の出力を閾値と比較して合否判定する判定部とを具備したことを特徴とする。   A rolling device part inspection method according to a twelfth aspect of the present invention is the rolling device component inspection device used in the inspection method according to claim 9, wherein the exciting coil applies an alternating magnetic field to the rolling device component. And an induction coil for detecting a change in magnetic flux density of an alternating magnetic field applied to the rolling device component from the excitation coil, and the amplitude and phase of the induced electromotive force generated in the induction coil A data processing unit that measures at least one of the change amounts, and a determination unit that compares the output of the data processing unit with a threshold and determines pass / fail are provided.

本発明によれば、転動装置部品の表面に付着した異物が異物除去部材により電磁誘導センサの手前で除去されるため、転動装置部品の表面に付着した異物によって検査精度が低下することを防止することができる。また、地疵などの欠陥が転動装置部品の内部に存在しているか否かを検査する際に、超音波探傷法を利用しないで済み、検査後に転動装置部品を洗浄する必要がないので、検査コストの上昇を招くことなく転動装置部品を精度よく検査することができる。   According to the present invention, since the foreign matter adhering to the surface of the rolling device part is removed by the foreign matter removing member before the electromagnetic induction sensor, the inspection accuracy is reduced by the foreign matter attached to the surface of the rolling device component. Can be prevented. In addition, it is not necessary to use ultrasonic flaw detection when inspecting whether defects such as ground exist inside the rolling device parts, and it is not necessary to clean the rolling device parts after the inspection. Thus, it is possible to accurately inspect the rolling device parts without increasing the inspection cost.

以下、本発明の実施の形態を図面に基づいて説明する。
本発明の第1の実施形態に係る転動装置部品用検査装置の概略構成を図1に示す。同図に示される転動装置部品用検査装置は、転動装置部品等の被測定物1に交流磁界を付与する励磁コイル2と、この励磁コイル2のインピーダンス変化量を検出するインピーダンス変化検出回路(データ処理部)3と、このインピーダンス変化検出回路3で検出された励磁コイル2のインピーダンス変化量を予め設定された閾値と比較して欠陥等の有無を判定する判定装置(判定部)4と、この判定装置4の判定結果を表示する表示装置5とを備えており、判定装置4は、インピーダンス変化検出回路3で検出された励磁コイル2のインピーダンス変化量が閾値より大きいと転動装置部品の内部に地疵などの欠陥が存在すると判定するように構成されている。
Hereinafter, embodiments of the present invention will be described with reference to the drawings.
FIG. 1 shows a schematic configuration of a rolling device part inspection device according to a first embodiment of the present invention. The rolling device component inspection device shown in FIG. 1 includes an exciting coil 2 that applies an alternating magnetic field to an object to be measured 1 such as a rolling device component, and an impedance change detection circuit that detects an impedance change amount of the exciting coil 2. (Data processing unit) 3 and a determination device (determination unit) 4 that determines the presence or absence of a defect or the like by comparing the impedance change amount of the exciting coil 2 detected by the impedance change detection circuit 3 with a preset threshold value. And a display device 5 for displaying the determination result of the determination device 4. The determination device 4 is a rolling device component when the impedance change amount of the exciting coil 2 detected by the impedance change detection circuit 3 is larger than a threshold value. It is configured to determine that there is a defect such as ground in the inside of the.

また、第1の実施形態に係る転動装置部品用検査装置は記録装置6を備えており、判定装置4の判定結果は記録装置6により記録用紙等の記録媒体に記録されるようになっている。なお、図1中7は励磁コイル2に交流電流を供給する交流電源である。
このように構成される転動装置部品用検査装置を用いて転動装置部品の内部に地疵などの欠陥が存在するか否かを検査する場合は、先ず、転動装置部品の表面に励磁コイル2を近づけ、この状態で交流電源7から励磁コイル2に交流電流を供給すると、励磁コイル2が励磁状態となることによって励磁コイル2から転動装置部品に交流磁界が付与される。このとき、転動装置部品に付与された交流磁界の磁束密度は転動装置部品の内部に存在する欠陥の大きさに応じて変化し、励磁コイル2のインピーダンスは交流磁界の磁束密度に応じて変化する。
Further, the rolling device part inspection device according to the first embodiment includes a recording device 6, and the determination result of the determination device 4 is recorded on a recording medium such as recording paper by the recording device 6. Yes. In FIG. 1, reference numeral 7 denotes an AC power source for supplying an AC current to the exciting coil 2.
When inspecting whether or not there is a defect such as a ground in the rolling device part using the rolling device part inspection apparatus configured as described above, first, the surface of the rolling device part is excited. When the coil 2 is brought close and an alternating current is supplied from the alternating current power source 7 to the exciting coil 2 in this state, the exciting coil 2 enters an excited state, whereby an alternating magnetic field is applied from the exciting coil 2 to the rolling device components. At this time, the magnetic flux density of the alternating magnetic field applied to the rolling device component changes according to the size of the defect existing inside the rolling device component, and the impedance of the exciting coil 2 depends on the magnetic flux density of the alternating magnetic field. Change.

したがって、励磁コイル2のインピーダンス変化量をインピーダンス変化検出回路3で測定し、その測定値を予め設定された閾値と比較することによって、転動装置部品の内部に地疵などの欠陥が存在するか否かを精度よく検査することができる。よって、地疵などの欠陥を探傷する方式として超音波探傷を用いた場合のように、超音波探傷プローブと被検査面との間に油、水等の超音波伝達媒体を介在させる必要がなく、検査後の洗浄工程が不要となるので、検査コストの上昇を抑えることができる。   Therefore, by measuring the impedance change amount of the exciting coil 2 with the impedance change detection circuit 3 and comparing the measured value with a preset threshold value, is there a defect such as ground in the rolling device component? It is possible to accurately inspect whether or not. Therefore, there is no need to interpose an ultrasonic transmission medium such as oil or water between the ultrasonic inspection probe and the surface to be inspected, as in the case of using ultrasonic inspection as a method for detecting defects such as ground. Since the cleaning process after the inspection becomes unnecessary, the increase in the inspection cost can be suppressed.

次に、本発明の第2の実施形態に係る転動装置部品用検査装置の概略構成を図2に示す。同図に示される転動装置部品用検査装置は棒鋼等の被測定物1に交流磁界を付与する励磁コイル11aと、この励磁コイル11aから被測定物1に付与された交流磁界の磁束密度の変化を検出するための誘導コイル11bとを備えており、これらの両コイル11a,11bは1つの筐体内に収容されて電磁誘導センサ11を構成している。   Next, FIG. 2 shows a schematic configuration of a rolling device part inspection device according to a second embodiment of the present invention. The inspection apparatus for rolling device parts shown in the figure is an excitation coil 11a for applying an AC magnetic field to the object to be measured 1 such as a steel bar, and the magnetic flux density of the AC magnetic field applied to the object to be measured 1 from the excitation coil 11a. An induction coil 11b for detecting a change is provided, and both the coils 11a and 11b are housed in one housing to constitute the electromagnetic induction sensor 11.

また、第2の実施形態に係る転動装置部品用検査装置は誘導コイル11bのインダクタンス変化(誘導コイル11bに発生した誘導起電力の大きさ)を検出するインダクタンス変化検出回路(データ処理部)12と、このインダクタンス変化検出回路12で検出された誘導コイル11bのインダクタンス変化を予め設定された閾値と比較して欠陥の有無を判定する判定部としての判定装置13と、この判定装置13の判定結果を表示する表示装置14とを備えており、判定装置13では、誘導コイル11bに発生した誘導起電力の振幅変化量または位相変化量が閾値より大きいと被測定物1の内部に欠陥が存在すると判定するように構成されている。   In addition, the rolling device component inspection apparatus according to the second embodiment has an inductance change detection circuit (data processing unit) 12 that detects an inductance change of the induction coil 11b (the magnitude of the induced electromotive force generated in the induction coil 11b). And a determination device 13 as a determination unit that determines the presence or absence of a defect by comparing the inductance change of the induction coil 11b detected by the inductance change detection circuit 12 with a preset threshold value, and the determination result of the determination device 13 In the determination device 13, if the amplitude change amount or phase change amount of the induced electromotive force generated in the induction coil 11 b is larger than the threshold value, a defect exists in the DUT 1. It is configured to determine.

さらに、第2の実施形態に係る転動装置部品用検査装置は記録装置15を備えており、判定装置13の判定結果は記録装置15により記録用紙等の記録媒体に記録されるようになっている。
図3は円筒ころ軸受の転動体素材や軌道輪素材として用いられる棒鋼の内部に欠陥が存在するか否かを電磁誘導センサにより検査するときの方法を説明するための図であり、以下、同図を参照して本発明に係る検査方法を説明する。
Furthermore, the rolling device part inspection device according to the second embodiment includes a recording device 15, and the determination result of the determination device 13 is recorded on a recording medium such as a recording sheet by the recording device 15. Yes.
FIG. 3 is a diagram for explaining a method for inspecting whether or not there is a defect in a steel bar used as a rolling element material or a bearing ring material of a cylindrical roller bearing by an electromagnetic induction sensor. The inspection method according to the present invention will be described with reference to the drawings.

棒鋼の内部に欠陥が存在するか否かを検査する場合は、図3に示すように、刷毛あるいはウレタン、ゴム、プラスチック等の弾性体からなる異物除去部材17を棒鋼16の表面に軽く押し当てる。次に、この状態で棒鋼16の表面に電磁誘導センサ11を近づけた後、棒鋼16を図中矢印方向に回転させる。そして、電磁誘導センサ11の励磁コイル11aに交流電流を供給し、励磁コイル11aから棒鋼16に交流磁界を付与すると、電磁誘導センサ11の誘導コイル11bに誘導起電力が発生する。このとき、電磁誘導センサ11の誘導コイル11bに発生した誘導起電力は棒鋼16に付与された交流磁界の磁束密度に応じて変化し、交流磁界の磁束密度は棒鋼16の内部に存在する地疵などの欠陥の大きさに応じて変化する。   When inspecting whether or not there is a defect inside the steel bar, as shown in FIG. 3, a foreign matter removing member 17 made of an elastic material such as a brush or urethane, rubber, plastic, etc. is lightly pressed against the surface of the steel bar 16. . Next, after the electromagnetic induction sensor 11 is brought close to the surface of the steel bar 16 in this state, the steel bar 16 is rotated in the arrow direction in the figure. When an alternating current is supplied to the exciting coil 11a of the electromagnetic induction sensor 11 and an alternating magnetic field is applied from the exciting coil 11a to the steel bar 16, an induced electromotive force is generated in the induction coil 11b of the electromagnetic induction sensor 11. At this time, the induced electromotive force generated in the induction coil 11 b of the electromagnetic induction sensor 11 changes according to the magnetic flux density of the AC magnetic field applied to the steel bar 16, and the magnetic flux density of the AC magnetic field exists in the steel bar 16. It changes according to the size of the defect.

したがって、電磁誘導センサ11の誘導コイル11bに発生した誘導起電力の振幅変化量または位相変化量をインダクタンス変化検出回路12で検出し、インダクタンス変化検出回路12で検出された誘導起電力の振幅変化量または位相変化量を予め設定された閾値と比較することで、地疵などの欠陥が棒鋼16の内部に存在しているか否かを精度よく検査することができる。これにより、地疵などの欠陥を探傷する方式として超音波探傷を用いた場合のように、超音波探傷プローブと被検査面との間に油、水等の超音波伝達媒体を介在させる必要がなく、検査後の洗浄工程が不要となるので、検査コストの上昇を抑えることができる。   Therefore, the amplitude change amount or phase change amount of the induced electromotive force generated in the induction coil 11b of the electromagnetic induction sensor 11 is detected by the inductance change detection circuit 12, and the amplitude change amount of the induced electromotive force detected by the inductance change detection circuit 12 is detected. Alternatively, by comparing the phase change amount with a preset threshold value, it is possible to accurately inspect whether or not a defect such as ground exists in the steel bar 16. As a result, it is necessary to interpose an ultrasonic transmission medium such as oil or water between the ultrasonic flaw detection probe and the surface to be inspected, as in the case where ultrasonic flaw detection is used as a method for flaw detection such as ground. In addition, since a cleaning process after the inspection is unnecessary, an increase in the inspection cost can be suppressed.

また、地疵などの欠陥が棒鋼16の内部に存在しているか否かを電磁誘導センサ11により検査する際に、刷毛あるいは弾性体からなる異物除去部材17を棒鋼16の表面に軽く押し当てると、棒鋼16の表面に付着した異物19(図3参照)が異物除去部材17により電磁誘導センサ11の手前で除去される。したがって、棒鋼16の表面に付着した異物19によって検査精度が低下することを防止することができる。   Further, when the electromagnetic induction sensor 11 inspects whether or not a defect such as ground exists in the steel bar 16, the foreign matter removing member 17 made of a brush or an elastic body is lightly pressed against the surface of the steel bar 16. The foreign matter 19 (see FIG. 3) adhering to the surface of the steel bar 16 is removed by the foreign matter removing member 17 before the electromagnetic induction sensor 11. Therefore, it is possible to prevent the inspection accuracy from being lowered by the foreign matter 19 attached to the surface of the steel bar 16.

上述した第2の実施形態では、検査対象物として棒鋼を例示したが、棒鋼以外のものでも本発明を適用することができる。また、棒鋼の内部に存在する欠陥の有無を検査する場合を例示したが、たとえば、表面硬さ、焼入れ深さ、金属組織変化、異材混入の有無などを検出する場合にも本発明を適用することができる。
次に、図4〜図6を参照して本発明の第3の実施形態について説明する。
In 2nd Embodiment mentioned above, although steel bar was illustrated as a test object, this invention is applicable also to things other than steel bar. Moreover, although the case where the presence or absence of the defect which exists in the inside of a steel bar was inspected was illustrated, for example, the present invention is also applied to the case where the surface hardness, the quenching depth, the metal structure change, the presence or absence of foreign materials, etc. are detected. be able to.
Next, a third embodiment of the present invention will be described with reference to FIGS.

図4は本発明の第3の実施形態に係る転動装置部品用検査装置の概略構成を示す図であり、同図に示される転動装置部品用検査装置は、もみ抜き保持器20を載置するためのターンテーブル21と、このターンテーブル21の上方に設けられた電磁誘導センサ11と、この電磁誘導センサ11をターンテーブル21の上面に対して垂直に支持する支持軸22と、この支持軸22を介して電磁誘導センサ11をX軸回り(図中矢印θ方向)に揺動駆動するセンサ揺動機構23と、このセンサ揺動機構23を介して電磁誘導センサ11を図中Z軸方向に昇降駆動するセンサ昇降機構24と、電磁誘導センサ11を図中X軸方向及びY軸方向に動かして電磁誘導センサ11を位置決めするセンサ位置決め機構25と、ターンテーブル21を図中X軸方向に動かしてもみ抜き保持器20を位置決めする位置決め機構26とを備えている。 FIG. 4 is a diagram showing a schematic configuration of a rolling device part inspection device according to the third embodiment of the present invention. The rolling device component inspection device shown in FIG. A turntable 21 for mounting, an electromagnetic induction sensor 11 provided above the turntable 21, a support shaft 22 for supporting the electromagnetic induction sensor 11 perpendicularly to the upper surface of the turntable 21, and the support a sensor oscillation mechanism 23 via a shaft 22 to swing drives the electromagnetic induction sensor 11 in the X-axis (in the arrow theta X direction), in the drawing the electromagnetic induction sensor 11 through the sensor oscillation mechanism 23 Z A sensor elevating mechanism 24 that moves up and down in the axial direction, a sensor positioning mechanism 25 that positions the electromagnetic induction sensor 11 by moving the electromagnetic induction sensor 11 in the X-axis direction and the Y-axis direction in the figure, and a turntable 21 in the figure X It is moved in the direction and a positioning mechanism 26 for positioning the cages 20.

電磁誘導センサ11の概略構成を図5に示す。同図に示されるように、電磁誘導センサ11は被検査物に交流磁界を付与する励磁コイル11aと、この励磁コイル11aから被検査物に付与された交流磁界の磁束密度の変化を検出するための誘導コイル11bとからなり、励磁コイル11a及び誘導コイル11bは1つの筐体内に収容されている。なお、図4中27は円筒ころ軸受の外輪、28は円筒ころ軸受のころを示している。   A schematic configuration of the electromagnetic induction sensor 11 is shown in FIG. As shown in the figure, the electromagnetic induction sensor 11 detects an excitation coil 11a for applying an AC magnetic field to the object to be inspected, and a change in magnetic flux density of the AC magnetic field applied to the object to be inspected from the excitation coil 11a. The excitation coil 11a and the induction coil 11b are accommodated in one casing. In FIG. 4, 27 indicates an outer ring of the cylindrical roller bearing, and 28 indicates a roller of the cylindrical roller bearing.

このような構成の転動装置部品用検査装置を用いてもみ抜き保持器20の内部に巣などの欠陥が存在しているか否かを検査する場合は、もみ抜き保持器20をターンテーブル21上に載置した後、刷毛あるいはウレタン、ゴム、プラスチック等の弾性体からなる異物除去部材17をもみ抜き保持器20の端面に軽く押し当てる。次に、センサ揺動機構23、センサ昇降機構24、センサ位置決め機構25及び位置決め機構26を駆動して電磁誘導センサ11をもみ抜き保持器20の端面に近づけると共に、ターンテーブル21を図中反時計方向に回転させる。そして、この状態で電磁誘導センサ11の励磁コイル11aに交流電流を供給してもみ抜き保持器20に交流磁界18(図6参照)を付与すると、電磁誘導センサ11の誘導コイル11bに誘導起電力が発生する。このとき、誘導コイル11bに発生した誘導起電力の大きさはもみ抜き保持器20に付与された交流磁界18の磁束密度に応じて変化し、交流磁界18の磁束密度はもみ抜き保持器20の内部に存在する欠陥の大きさに応じて変化する。   When inspecting whether a defect such as a nest exists in the inside of the punching holder 20 using the rolling device part inspection apparatus having such a configuration, the punching holder 20 is placed on the turntable 21. After that, the foreign matter removing member 17 made of an elastic body such as a brush or urethane, rubber, or plastic is lightly pressed against the end surface of the machined cage 20. Next, the sensor swing mechanism 23, the sensor elevating mechanism 24, the sensor positioning mechanism 25, and the positioning mechanism 26 are driven to bring the electromagnetic induction sensor 11 closer to the end surface of the machined holder 20, and the turntable 21 is counterclockwise in the figure. Rotate in the direction. In this state, even if an alternating current is supplied to the exciting coil 11a of the electromagnetic induction sensor 11, if an alternating magnetic field 18 (see FIG. 6) is applied to the punch holder 20, an induced electromotive force is applied to the induction coil 11b of the electromagnetic induction sensor 11. Will occur. At this time, the magnitude of the induced electromotive force generated in the induction coil 11 b changes according to the magnetic flux density of the AC magnetic field 18 applied to the machined cage 20, and the magnetic flux density of the AC magnetic field 18 is that of the machined cage 20. It changes according to the size of the defect existing inside.

したがって、電磁誘導センサ11の誘導コイル11bに発生した誘導起電力の振幅変化量または位相変化量を測定し、その測定値を予め設定された閾値と比較することで、巣などの欠陥がもみ抜き保持器20の内部に存在するか否かを精度よく検査することができる。
また、巣などの欠陥がもみ抜き保持器20の内部に存在するか否かを電磁誘導センサ11により検査する際に、刷毛あるいはウレタン、ゴム、プラスチック等の弾性体からなる異物除去部材17をもみ抜き保持器20の端面に軽く押し当てると、もみ抜き保持器20の端面に付着した異物が異物除去部材17により電磁誘導センサ11の手前で除去される。したがって、もみ抜き保持器20の端面に付着した異物によって検査精度が低下することを防止することができる。
Accordingly, by measuring the amplitude change amount or phase change amount of the induced electromotive force generated in the induction coil 11b of the electromagnetic induction sensor 11, and comparing the measured value with a preset threshold value, defects such as nests are removed. Whether or not it exists inside the cage 20 can be accurately inspected.
Further, when the electromagnetic induction sensor 11 inspects whether a defect such as a nest exists in the inside of the punching cage 20, the foreign matter removing member 17 made of an elastic body such as a brush or urethane, rubber, or plastic is included. When lightly pressed against the end surface of the punching cage 20, the foreign matter adhering to the end surface of the punching cage 20 is removed by the foreign matter removing member 17 before the electromagnetic induction sensor 11. Therefore, it is possible to prevent the inspection accuracy from being lowered due to the foreign matter adhering to the end face of the machined cage 20.

図7に、本発明の第4の実施形態に係る転動装置部品用検査装置の概略構成を示す。同図に示される転動装置部品用検査装置は、もみ抜き保持器20を載置するためのターンテーブル21と、このターンテーブル21の上方に設けられた電磁誘導センサ11と、この電磁誘導センサ11をターンテーブル21の上面に対して水平に支持する支持軸29とを備えており、電磁誘導センサ11には、刷毛あるいはウレタン、ゴム、プラスチック等のの弾性体からなる二つの異物除去部材17,17がもみ抜き保持器20の内周面に接触するように設けられている。   In FIG. 7, schematic structure of the inspection apparatus for rolling device components which concerns on the 4th Embodiment of this invention is shown. The rolling device component inspection apparatus shown in FIG. 1 includes a turntable 21 for placing a machined cage 20, an electromagnetic induction sensor 11 provided above the turntable 21, and the electromagnetic induction sensor. 11 is provided with a support shaft 29 that supports the turntable 21 horizontally with respect to the upper surface of the turntable 21. The electromagnetic induction sensor 11 includes two foreign matter removing members 17 made of an elastic body such as a brush or urethane, rubber, or plastic. , 17 are provided in contact with the inner peripheral surface of the machined cage 20.

また、第4の実施形態に係る転動装置部品用検査装置は、支持軸29を介して電磁誘導センサ11をZ軸回り(図中矢印θ方向)に揺動駆動するセンサ揺動機構30と、このセンサ揺動機構30を介して電磁誘導センサ11を図中Z軸方向に昇降駆動するセンサ昇降機構24と、電磁誘導センサ11を図中X軸方向及びY軸方向に動かして電磁誘導センサ11を位置決めするセンサ位置決め機構25とを備えており、ターンテーブル21は検査対象物を位置決めする位置決め機構26により図中X軸方向に移動可能となっている。 The fourth embodiment rolling device parts for inspection apparatus according to the embodiment, the sensor swing mechanism 30 for swinging driving the electromagnetic induction sensor 11 around the Z axis (in the arrow theta Z-direction) through a support shaft 29 And a sensor elevating mechanism 24 that drives the electromagnetic induction sensor 11 to move up and down in the Z-axis direction in the figure via the sensor swinging mechanism 30 and electromagnetic induction by moving the electromagnetic induction sensor 11 in the X-axis direction and the Y-axis direction in the figure. A sensor positioning mechanism 25 for positioning the sensor 11 is provided, and the turntable 21 is movable in the X-axis direction in the figure by a positioning mechanism 26 for positioning an inspection object.

なお、電磁誘導センサ11は、図3に示すように、検査物に交流磁界を付与する励磁コイル11aと、この励磁コイル11aから被検査物に付与された交流磁界の磁束密度の変化を検出するための誘導コイル11bとから構成されている。
このような構成の転動装置部品用検査装置を用いてもみ抜き保持器20の内部に巣などの欠陥が存在しているか否かを検査する場合は、先ず、もみ抜き保持器20をターンテーブル21上に載置する。次に、センサ揺動機構30、センサ昇降機構24、センサ位置決め機構25及び位置決め機構26を駆動して電磁誘導センサ11の先端をもみ抜き保持器20の内周面に近づけた後、ターンテーブル21を図中反時計方向に回転させる。そして、この状態で電磁誘導センサ11の励磁コイル11aに交流電流を供給してもみ抜き保持器20に交流磁界を付与すると、電磁誘導センサ11の誘導コイル11bに誘導起電力が発生する。このとき、誘導コイル11bに発生した誘導起電力の大きさはもみ抜き保持器20に付与された交流磁界の磁束密度に応じて変化し、交流磁界の磁束密度はもみ抜き保持器20の内部に発生した欠陥の大きさに応じて変化する。
As shown in FIG. 3, the electromagnetic induction sensor 11 detects an excitation coil 11a that applies an AC magnetic field to the inspection object, and changes in the magnetic flux density of the AC magnetic field that is applied from the excitation coil 11a to the inspection object. And an induction coil 11b.
When inspecting whether a defect such as a nest exists in the inside of the punching cage 20 using the rolling device part inspection apparatus having such a configuration, first, the punching cage 20 is turned on the turntable. 21. Next, the sensor swing mechanism 30, the sensor elevating mechanism 24, the sensor positioning mechanism 25, and the positioning mechanism 26 are driven to bring the tip of the electromagnetic induction sensor 11 close to the inner peripheral surface of the machined holder 20, and then the turntable 21. Is rotated counterclockwise in the figure. If an alternating magnetic field is applied to the punching cage 20 even if an alternating current is supplied to the exciting coil 11 a of the electromagnetic induction sensor 11 in this state, an induced electromotive force is generated in the induction coil 11 b of the electromagnetic induction sensor 11. At this time, the magnitude of the induced electromotive force generated in the induction coil 11b changes according to the magnetic flux density of the AC magnetic field applied to the machined cage 20, and the magnetic flux density of the AC magnetic field is inside the machined cage 20. It changes according to the size of the generated defect.

したがって、電磁誘導センサ11の誘導コイル11bに発生した誘導起電力の振幅変化量または位相変化量を測定し、その測定値を予め設定された閾値と比較することで、巣などの欠陥がもみ抜き保持器20の内部に存在しているか否かを精度よく検査することができる。
また、電磁誘導センサ11の先端をもみ抜き保持器20の内周面に近づけると、電磁誘導センサ11に設けられた二つの異物除去部材17,17がもみ抜き保持器20の内周面に接触する。そして、異物除去部材17,17がもみ抜き保持器20の内周面に接触すると、もみ抜き保持器20の内周面に付着した異物が異物除去部材17,17により電磁誘導センサ11の手前で除去される。したがって、もみ抜き保持器20の内周面に付着した異物によって検査精度が低下することを防止することができる。
Accordingly, by measuring the amplitude change amount or phase change amount of the induced electromotive force generated in the induction coil 11b of the electromagnetic induction sensor 11, and comparing the measured value with a preset threshold value, defects such as nests are removed. It is possible to accurately inspect whether or not the cage 20 exists.
When the tip of the electromagnetic induction sensor 11 is brought close to the inner peripheral surface of the machined cage 20, the two foreign matter removing members 17, 17 provided on the electromagnetic induction sensor 11 come into contact with the inner peripheral surface of the machined cage 20. To do. When the foreign matter removing members 17, 17 come into contact with the inner peripheral surface of the machined cage 20, the foreign matter attached to the inner peripheral surface of the machined cage 20 is brought before the electromagnetic induction sensor 11 by the foreign material removed members 17, 17. Removed. Therefore, it is possible to prevent the inspection accuracy from being lowered by the foreign matter adhering to the inner peripheral surface of the machined cage 20.

図8に、本発明の第5の実施形態に係る転動装置部品用検査装置の概略構成を示す。同図に示される転動装置部品用検査装置は、もみ抜き保持器20を載置するためのターンテーブル21と、このターンテーブル21の上方に設けられた電磁誘導センサ11と、この電磁誘導センサ11をターンテーブル21の上面に対して水平に支持する支持軸29と、この支持軸29を介して電磁誘導センサ11をZ軸回りに揺動駆動するセンサ揺動機構30と、このセンサ揺動機構30を介して電磁誘導センサ11を図中Z軸方向に昇降駆動するセンサ昇降機構24と、電磁誘導センサ11を図中X軸方向及びY軸方向に動かして電磁誘導センサ11を位置決めするセンサ位置決め機構25とを備えている。なお、電磁誘導センサ11は、図3に示すように、被検査物に交流磁界を付与する励磁コイル11aと、この励磁コイル11aから被検査物に付与された交流磁界の磁束密度の変化を検出するための誘導コイル11bとから構成されている。   In FIG. 8, schematic structure of the inspection apparatus for rolling device components which concerns on the 5th Embodiment of this invention is shown. The rolling device component inspection apparatus shown in FIG. 1 includes a turntable 21 for placing a machined cage 20, an electromagnetic induction sensor 11 provided above the turntable 21, and the electromagnetic induction sensor. 11 is supported horizontally with respect to the upper surface of the turntable 21, a sensor swing mechanism 30 that swings the electromagnetic induction sensor 11 around the Z axis via the support shaft 29, and the sensor swing. A sensor elevating mechanism 24 that drives the electromagnetic induction sensor 11 to move up and down in the Z-axis direction in the figure via the mechanism 30, and a sensor that positions the electromagnetic induction sensor 11 by moving the electromagnetic induction sensor 11 in the X-axis direction and the Y-axis direction in the figure. Positioning mechanism 25. As shown in FIG. 3, the electromagnetic induction sensor 11 detects an excitation coil 11a that applies an AC magnetic field to the object to be inspected, and changes in the magnetic flux density of the AC magnetic field that is applied from the excitation coil 11a to the object to be inspected. And an induction coil 11b.

図9は電磁誘導センサ11の先端部を示す図であり、同図に示されるように、もみ抜き保持器20の内径を2R、もみ抜き保持器20の内周面20aと電磁誘導センサ11の先端面11cとの間のギャップをΔRとすると、電磁誘導センサ11の先端面11cはR−ΔRの曲率半径で曲面状に形成され、かつもみ抜き保持器20の内周面20aに対して凸状に湾曲している。   FIG. 9 is a view showing the tip of the electromagnetic induction sensor 11. As shown in FIG. 9, the inner diameter of the machined cage 20 is 2R, the inner peripheral surface 20 a of the machined cage 20 and the electromagnetic induction sensor 11. When the gap between the front end surface 11c and ΔR is ΔR, the front end surface 11c of the electromagnetic induction sensor 11 is formed into a curved surface with a radius of curvature of R−ΔR and is convex with respect to the inner peripheral surface 20a of the machined cage 20. Is curved.

このような構成の転動装置部品用検査装置を用いてもみ抜き保持器20の内部に巣などの欠陥が存在しているか否かを検査する場合は、先ず、もみ抜き保持器20をターンテーブル21上に載置した後、センサ揺動機構30、センサ昇降機構24及びセンサ位置決め機構25を駆動して電磁誘導センサ11の先端をもみ抜き保持器20の内周面に近づける。そして、この状態で電磁誘導センサ11の励磁コイル11aに交流電流を供給してもみ抜き保持器20に交流磁界を付与すると、電磁誘導センサ11の誘導コイル11bに誘導起電力が発生する。このとき、誘導コイル11bに発生した誘導起電力の大きさはもみ抜き保持器20に付与された交流磁界の磁束密度に応じて変化し、交流磁界の磁束密度はもみ抜き保持器20の内部に発生した欠陥の大きさに応じて変化する。   When inspecting whether a defect such as a nest exists in the inside of the punching cage 20 using the rolling device part inspection apparatus having such a configuration, first, the punching cage 20 is turned on the turntable. After being placed on 21, the sensor swing mechanism 30, the sensor elevating mechanism 24 and the sensor positioning mechanism 25 are driven to bring the tip of the electromagnetic induction sensor 11 closer to the inner peripheral surface of the machined holder 20. If an alternating magnetic field is applied to the punching cage 20 even if an alternating current is supplied to the exciting coil 11 a of the electromagnetic induction sensor 11 in this state, an induced electromotive force is generated in the induction coil 11 b of the electromagnetic induction sensor 11. At this time, the magnitude of the induced electromotive force generated in the induction coil 11b changes according to the magnetic flux density of the AC magnetic field applied to the machined cage 20, and the magnetic flux density of the AC magnetic field is inside the machined cage 20. It changes according to the size of the generated defect.

したがって、電磁誘導センサ11の誘導コイル11bに発生した誘導起電力の振幅変化量または位相変化量を測定し、その測定値を予め設定された閾値と比較することで、巣などの欠陥がもみ抜き保持器20の内部に存在しているか否かを精度よく検査することができる。
また、電磁誘導センサ11の先端面11cをもみ抜き保持器20の内周面に合わせた形状にしたことで、誘導起電力の変化を感度よく捉えることができる。
Accordingly, by measuring the amplitude change amount or phase change amount of the induced electromotive force generated in the induction coil 11b of the electromagnetic induction sensor 11, and comparing the measured value with a preset threshold value, defects such as nests are removed. It is possible to accurately inspect whether or not the cage 20 exists.
In addition, since the tip surface 11c of the electromagnetic induction sensor 11 is shaped to match the inner peripheral surface of the machined cage 20, changes in induced electromotive force can be captured with high sensitivity.

図10に、本発明の第6の実施形態に係る転動装置部品用検査装置の概略構成を示す。同図に示される転動装置部品用検査装置は、円筒ころ軸受の外輪27を載置するためのターンテーブル21と、このターンテーブル21の上方に設けられた電磁誘導センサ11と、この電磁誘導センサ11をターンテーブル21の上面に対して水平に支持する支持軸29と、この支持軸29を介して電磁誘導センサ11をZ軸回りに揺動駆動するセンサ揺動機構30と、このセンサ揺動機構30を介して電磁誘導センサ11を図中Z軸方向に昇降駆動するセンサ昇降機構24と、電磁誘導センサ11を図中X軸方向及びY軸方向に動かして電磁誘導センサ11を位置決めするセンサ位置決め機構25とを備えており、電磁誘導センサ11は、図5に示すように、被測定物に交流磁界を付与する励磁コイル11aと、この励磁コイル11aから被測定物に付与された交流磁界の磁束密度の変化を検出するための誘導コイル11bとから構成されている。電磁誘導センサ11の先端面は、誘導起電力の変化を感度よく捉えることができるよう、円筒ころ軸受の外輪外径面に合わせた凹形状としてある。   In FIG. 10, schematic structure of the inspection apparatus for rolling device components which concerns on the 6th Embodiment of this invention is shown. The rolling device component inspection apparatus shown in FIG. 1 includes a turntable 21 on which an outer ring 27 of a cylindrical roller bearing is placed, an electromagnetic induction sensor 11 provided above the turntable 21, and the electromagnetic induction. A support shaft 29 that supports the sensor 11 horizontally with respect to the upper surface of the turntable 21, a sensor swing mechanism 30 that swings the electromagnetic induction sensor 11 about the Z axis via the support shaft 29, and the sensor swing A sensor raising / lowering mechanism 24 that drives the electromagnetic induction sensor 11 to move up and down in the Z-axis direction in the figure via the moving mechanism 30, and moves the electromagnetic induction sensor 11 in the X-axis direction and the Y-axis direction in the figure to position the electromagnetic induction sensor 11. As shown in FIG. 5, the electromagnetic induction sensor 11 includes an excitation coil 11a for applying an alternating magnetic field to the object to be measured, and the excitation coil 11a. And is configured to change in the magnetic flux density of the AC magnetic field is applied to the workpiece from the induction coil 11b to detect. The front end surface of the electromagnetic induction sensor 11 has a concave shape that matches the outer ring outer diameter surface of the cylindrical roller bearing so that changes in induced electromotive force can be detected with high sensitivity.

このような構成の転動装置部品用検査装置を用いて外輪27の内部に地疵などの欠陥が存在しているか否かを検査する場合は、外輪27をターンテーブル21上に載置した後、刷毛あるいはウレタン、ゴム、プラスチック等の弾性体からなる異物除去部材17を外輪27の外周面に軽く押し当てる。次に、センサ揺動機構30、センサ昇降機構24及びセンサ位置決め機構25を駆動して電磁誘導センサ11を外輪27の外周面に近づけると共に、ターンテーブル21を図中時計方向に回転させる。そして、この状態で電磁誘導センサ11の励磁コイル11aに交流電流を供給して外輪27に交流磁界を付与すると、電磁誘導センサ11の誘導コイル11bに誘導起電力が発生する。このとき、誘導コイル11bに発生した誘導起電力の大きさは外輪27に付与された交流磁界の磁束密度に応じて変化し、交流磁界の磁束密度は外輪27の内部に発生した欠陥の大きさに応じて変化する。   When inspecting whether or not a defect such as ground exists in the outer ring 27 using the rolling device part inspection apparatus having such a configuration, after the outer ring 27 is placed on the turntable 21. The foreign matter removing member 17 made of an elastic body such as a brush or urethane, rubber, or plastic is lightly pressed against the outer peripheral surface of the outer ring 27. Next, the sensor swing mechanism 30, the sensor lifting mechanism 24, and the sensor positioning mechanism 25 are driven to bring the electromagnetic induction sensor 11 closer to the outer peripheral surface of the outer ring 27, and the turntable 21 is rotated clockwise in the figure. In this state, when an alternating current is supplied to the excitation coil 11 a of the electromagnetic induction sensor 11 and an alternating magnetic field is applied to the outer ring 27, an induced electromotive force is generated in the induction coil 11 b of the electromagnetic induction sensor 11. At this time, the magnitude of the induced electromotive force generated in the induction coil 11 b changes according to the magnetic flux density of the AC magnetic field applied to the outer ring 27, and the magnetic flux density of the AC magnetic field is the magnitude of the defect generated inside the outer ring 27. It changes according to.

したがって、電磁誘導センサ11の誘導コイル11bに発生した誘導起電力の振幅変化量または位相変化量を測定し、その測定値を予め設定された閾値と比較することで、地疵などの欠陥が外輪27の内部に存在しているか否かを精度よく検査することができる。
また、地疵などの欠陥が外輪27の内部に存在しているか否かを電磁誘導センサ11により検査する際に、刷毛あるいはウレタン、ゴム、プラスチック等の弾性体からなる異物除去部材17を外輪27の外周面に接触させると、外輪27の外周面に付着した異物が異物除去部材17により電磁誘導センサ11の手前で除去される。したがって、外輪27の外周面に付着した異物によって検査精度が低下することを防止することができる。
Therefore, the amplitude change amount or the phase change amount of the induced electromotive force generated in the induction coil 11b of the electromagnetic induction sensor 11 is measured, and the measured value is compared with a preset threshold value. 27 can be inspected with high accuracy.
Further, when the electromagnetic induction sensor 11 inspects whether or not a defect such as ground exists in the outer ring 27, the foreign matter removing member 17 made of an elastic body such as a brush or urethane, rubber, or plastic is attached to the outer ring 27. , The foreign matter adhering to the outer peripheral surface of the outer ring 27 is removed by the foreign matter removing member 17 before the electromagnetic induction sensor 11. Therefore, it is possible to prevent the inspection accuracy from being lowered due to the foreign matter adhering to the outer peripheral surface of the outer ring 27.

本発明の第1の実施形態に係る転動装置部品用検査装置の概略構成を示す図である。It is a figure which shows schematic structure of the inspection apparatus for rolling device components which concerns on the 1st Embodiment of this invention. 本発明の第2の実施形態に係る転動装置部品用検査装置の概略構成を示す図である。It is a figure which shows schematic structure of the inspection apparatus for rolling device components which concerns on the 2nd Embodiment of this invention. 棒鋼の内部に欠陥が存在するか否かを電磁誘導センサにより検査するときの方法を説明するための図である。It is a figure for demonstrating the method when test | inspecting with a magnetic induction sensor whether a defect exists in the inside of a steel bar. 本発明の第3の実施形態に係る転動装置部品用検査装置を示す図である。It is a figure which shows the inspection apparatus for rolling device components which concerns on the 3rd Embodiment of this invention. 電磁誘導センサの概略構成を示す図である。It is a figure which shows schematic structure of an electromagnetic induction sensor. 電磁誘導センサの励磁コイルから転動装置部品に付与される交流磁界を説明するための図である。It is a figure for demonstrating the alternating current magnetic field provided to rolling device components from the exciting coil of an electromagnetic induction sensor. 本発明の第4の実施形態に係る転動装置部品用検査装置を示す図である。It is a figure which shows the inspection apparatus for rolling device components which concerns on the 4th Embodiment of this invention. 本発明の第5の実施形態に係る転動装置部品用検査装置を示す図である。It is a figure which shows the inspection apparatus for rolling device components which concerns on the 5th Embodiment of this invention. 電磁誘導センサの先端部を示す図である。It is a figure which shows the front-end | tip part of an electromagnetic induction sensor. 本発明の第6の実施形態に係る転動装置部品用検査装置を示す図である。It is a figure which shows the inspection apparatus for rolling device components which concerns on the 6th Embodiment of this invention.

符号の説明Explanation of symbols

2 励磁コイル
3 インピーダンス変化検出回路
4,13 判定装置
5,14 表示装置
6,15 記録装置
11 電磁誘導センサ
11a 励磁コイル
11b 誘導コイル
12 インダクタンス変化検出回路
16 棒鋼
17 異物除去部材
18 交流磁界
20 もみ抜き保持器
21 ターンテーブル
22,29 支持軸
23,30 センサ揺動機構
24 センサ昇降機構
25 センサ位置決め機構
27 外輪
28 ころ
DESCRIPTION OF SYMBOLS 2 Excitation coil 3 Impedance change detection circuit 4,13 Judgment device 5,14 Display apparatus 6,15 Recording apparatus 11 Electromagnetic induction sensor 11a Excitation coil 11b Induction coil 12 Inductance change detection circuit 16 Bar steel 17 Foreign material removal member 18 AC magnetic field 20 Cage 21 Turntable 22, 29 Support shaft 23, 30 Sensor swing mechanism 24 Sensor lifting mechanism 25 Sensor positioning mechanism 27 Outer ring 28 Roller

Claims (12)

転動装置部品に交流磁界を付与する励磁コイルと、この励磁コイルから転動装置部品に付与された交流磁界の磁束密度の変化を検出するための誘導コイルとを有する電磁誘導センサを用い、かつ前記転動装置部品と前記電磁誘導センサを相対移動させながら前記転動装置部品の表面または内部に存在する欠陥、表面硬さ、焼入れ深さ、金属組織変化、異材混入のいずれかを検査する転動装置部品の検査方法であって、
前記転動装置部品を検査する際に前記転動装置部品の表面に異物除去部材の先端を接触させ、前記転動装置部品の表面に付着した異物を前記異物除去部材により前記電磁誘導センサの手前で除去しながら前記転動装置部品の検査を行うことを特徴とする転動装置部品の検査方法。
Using an electromagnetic induction sensor having an exciting coil for applying an alternating magnetic field to the rolling device component and an induction coil for detecting a change in magnetic flux density of the alternating magnetic field applied to the rolling device component from the exciting coil; and A roller that inspects any of defects, surface hardness, quenching depth, metal structure change, and foreign material contamination existing on or inside the rolling device component while relatively moving the rolling device component and the electromagnetic induction sensor. A method for inspecting moving device parts,
When inspecting the rolling device component, the tip of the foreign material removing member is brought into contact with the surface of the rolling device component, and the foreign material adhering to the surface of the rolling device component is brought before the electromagnetic induction sensor by the foreign material removing member. A method for inspecting a rolling device part, wherein the rolling device part is inspected while being removed at a step.
請求項1記載の転動装置部品の検査方法において、前記異物除去部材が弾性体であることを特徴とする転動装置部品の検査方法。   2. The method for inspecting a rolling device part according to claim 1, wherein the foreign matter removing member is an elastic body. 請求項2記載の転動装置部品の検査方法において、前記弾性体が刷毛、ウレタン、ゴム、プラスチックのいずれかであることを特徴とする転動装置部品の検査方法。   3. The method for inspecting a rolling device part according to claim 2, wherein the elastic body is any one of a brush, urethane, rubber, and plastic. 転動装置部品に交流磁界を付与する励磁コイルと、この励磁コイルから転動装置部品に付与された交流磁界の磁束密度の変化を検出するための誘導コイルとを有する電磁誘導センサを用い、かつ前記転動装置部品と前記電磁誘導センサを相対移動させながら前記転動装置部品の表面または内部に存在する欠陥、表面硬さ、焼入れ深さ、金属組織変化、異材混入のいずれかを検査する転動装置部品の検査方法であって、
前記電磁誘導センサの先端面を該センサが対向する転動装置部品の表面形状に合わせた形状としたことを特徴とする転動装置部品の検査方法。
Using an electromagnetic induction sensor having an exciting coil for applying an alternating magnetic field to the rolling device component and an induction coil for detecting a change in magnetic flux density of the alternating magnetic field applied to the rolling device component from the exciting coil; and A roller that inspects any of defects, surface hardness, quenching depth, metal structure change, and foreign material contamination existing on or inside the rolling device component while relatively moving the rolling device component and the electromagnetic induction sensor. A method for inspecting moving device parts,
A method for inspecting a rolling device component, wherein the tip surface of the electromagnetic induction sensor is shaped to match the surface shape of the rolling device component facing the sensor.
請求項4記載の転動装置部品の検査方法において、前記電磁誘導センサと前記転動装置部品は交流磁界の磁力線が前記転動装置部品に対して90度となるように、それぞれの形状が規定されていることを特徴とする転動装置部品の検査方法。   5. The method of inspecting a rolling device part according to claim 4, wherein the electromagnetic induction sensor and the rolling device part are defined in shape so that the magnetic field lines of an alternating magnetic field are 90 degrees with respect to the rolling device part. A method for inspecting rolling device parts, characterized in that: 請求項1〜5のいずれか一項記載の転動装置部品の検査方法において、前記転動装置部品の素材が棒鋼であることを特徴とする転動装置部品の検査方法。   6. The method for inspecting a rolling device part according to claim 1, wherein a material of the rolling device component is a steel bar. 請求項1〜5のいずれか一項記載の転動装置部品の検査方法において、被検出部材は素材となる部材を鍛造により、転動装置部品として型取りした部材であることを特徴とする転動装置部品の検査方法。   6. The rolling device part inspection method according to claim 1, wherein the member to be detected is a member obtained by casting a member as a material as a rolling device part by forging. Inspection method for moving parts. 請求項1〜5のいずれか一項記載の転動装置部品の検査方法において、被検出部材は転動装置部品として研削加工または超仕上げ加工した部材であることを特徴とする転動装置部品の検査方法。   6. The method of inspecting a rolling device part according to claim 1, wherein the member to be detected is a member subjected to grinding or superfinishing as the rolling device part. Inspection method. 転動装置部品に交流磁界を付与する励磁コイルと、この励磁コイルから転動装置部品に付与された交流磁界の磁束密度の変化を検出するための誘導コイルとを有する電磁誘導センサを用い、かつ前記転動装置部品と前記電磁誘導センサを相対移動させながら前記転動装置部品の表面または内部に存在する欠陥、表面硬さ、焼入れ深さ、金属組織変化、異材混入のいずれかを検査する転動装置部品の検査方法であって、
前記転動装置部品を検査する際に前記転動装置部品の表面に異物除去部材の先端を接触させ、前記転動装置部品の表面に付着した異物を前記異物除去部材により前記電磁誘導センサの手前で除去しながら前記転動装置部品の検査を行うようにし、かつ前記電磁誘導センサの先端面を前記転動装置部品の表面形状に合わせて検査を行うようにしたことを特徴とする転動装置部品の検査方法。
Using an electromagnetic induction sensor having an exciting coil for applying an alternating magnetic field to the rolling device component and an induction coil for detecting a change in magnetic flux density of the alternating magnetic field applied to the rolling device component from the exciting coil; and A roller that inspects any of defects, surface hardness, quenching depth, metal structure change, and foreign material contamination existing on or inside the rolling device component while relatively moving the rolling device component and the electromagnetic induction sensor. A method for inspecting moving device parts,
When inspecting the rolling device component, the tip of the foreign material removing member is brought into contact with the surface of the rolling device component, and the foreign material adhering to the surface of the rolling device component is brought before the electromagnetic induction sensor by the foreign material removing member. The rolling device part is inspected while being removed at the same time, and the tip surface of the electromagnetic induction sensor is inspected according to the surface shape of the rolling device part. Inspection method for parts.
請求項1記載の検査方法に用いられる転動装置部品用検査装置であって、転動装置部品に交流磁界を付与する励磁コイルと該励磁コイルから転動装置部品に付与された交流磁界の磁束密度の変化を検出するための誘導コイルとを有する電磁誘導センサと、前記誘導コイルに発生した誘導起電力の振幅と位相のうち少なくとも一方の変化量を検出するデータ処理部と、前記データ処理部の出力を閾値と比較して合否判定する判定部とを具備したことを特徴とする転動装置部品用検査装置。   An inspection device for a rolling device part used in the inspection method according to claim 1, wherein the exciting coil applies an alternating magnetic field to the rolling device component and the magnetic flux of the alternating magnetic field applied from the exciting coil to the rolling device component. An electromagnetic induction sensor having an induction coil for detecting a change in density; a data processing unit for detecting a change amount of at least one of amplitude and phase of an induced electromotive force generated in the induction coil; and the data processing unit A rolling device parts inspection device, comprising: a determination unit that compares the output of the output with a threshold value to determine whether or not to pass or fail. 請求項4記載の検査方法に用いられる転動装置部品用検査装置であって、転動装置部品に交流磁界を付与する励磁コイルと該励磁コイルから転動装置部品に付与された交流磁界の磁束密度の変化を検出するための誘導コイルとを有する電磁誘導センサと、前記誘導コイルに発生した誘導起電力の振幅と位相のうち少なくとも一方の変化量を測定するデータ処理部と、前記データ処理部の出力を閾値と比較して合否判定する判定部とを具備したことを特徴とする転動装置部品用検査装置。   5. An inspection device for a rolling device part used in the inspection method according to claim 4, wherein an exciting coil for applying an alternating magnetic field to the rolling device component and a magnetic flux of an alternating magnetic field applied from the exciting coil to the rolling device component. An electromagnetic induction sensor having an induction coil for detecting a change in density, a data processing unit for measuring a change amount of at least one of an amplitude and a phase of an induced electromotive force generated in the induction coil, and the data processing unit A rolling device parts inspection device, comprising: a determination unit that compares the output of the output with a threshold value to determine whether or not to pass or fail. 請求項9記載の検査方法に用いられる転動装置部品用検査装置であって、転動装置部品に交流磁界を付与する励磁コイルと該励磁コイルから転動装置部品に付与された交流磁界の磁束密度の変化を検出するための誘導コイルとを有する電磁誘導センサと、前記誘導コイルに発生した誘導起電力の振幅と位相のうち少なくとも一方の変化量を測定するデータ処理部と、前記データ処理部の出力を閾値と比較して合否判定する判定部とを具備したことを特徴とする転動装置部品用検査装置。   An inspection device for a rolling device part used in the inspection method according to claim 9, wherein the exciting coil applies an alternating magnetic field to the rolling device component, and the magnetic flux of the alternating magnetic field is applied from the exciting coil to the rolling device component. An electromagnetic induction sensor having an induction coil for detecting a change in density, a data processing unit for measuring a change amount of at least one of an amplitude and a phase of an induced electromotive force generated in the induction coil, and the data processing unit A rolling device parts inspection device, comprising: a determination unit that compares the output of the output with a threshold value to determine whether or not to pass or fail.
JP2007008091A 2006-05-26 2007-01-17 Rolling device part inspection method and rolling device part inspection device Pending JP2008032681A (en)

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JP2010164414A (en) * 2009-01-15 2010-07-29 Mitsubishi Heavy Ind Ltd Planetary roller power transmitter
JP2010230354A (en) * 2009-03-26 2010-10-14 Honda Motor Co Ltd Work hardness measuring device
JP2010230349A (en) * 2009-03-26 2010-10-14 Honda Motor Co Ltd Work hardness sensor
JP2010230348A (en) * 2009-03-26 2010-10-14 Honda Motor Co Ltd Work hardness measuring device
JP2011196950A (en) * 2010-03-23 2011-10-06 Honda Motor Co Ltd Surface measurement device for gear
JP2011196949A (en) * 2010-03-23 2011-10-06 Honda Motor Co Ltd Surface measuring device for gear
CN108469468A (en) * 2018-06-29 2018-08-31 中国航发哈尔滨轴承有限公司 Judgment method of responsivity of steel ball comparison sample for eddy current flaw detection
JP2023103638A (en) * 2022-01-14 2023-07-27 株式会社東芝 Eddy current flaw detector and eddy current flaw detection method
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Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010164414A (en) * 2009-01-15 2010-07-29 Mitsubishi Heavy Ind Ltd Planetary roller power transmitter
JP2010230354A (en) * 2009-03-26 2010-10-14 Honda Motor Co Ltd Work hardness measuring device
JP2010230349A (en) * 2009-03-26 2010-10-14 Honda Motor Co Ltd Work hardness sensor
JP2010230348A (en) * 2009-03-26 2010-10-14 Honda Motor Co Ltd Work hardness measuring device
JP2011196950A (en) * 2010-03-23 2011-10-06 Honda Motor Co Ltd Surface measurement device for gear
JP2011196949A (en) * 2010-03-23 2011-10-06 Honda Motor Co Ltd Surface measuring device for gear
CN108469468A (en) * 2018-06-29 2018-08-31 中国航发哈尔滨轴承有限公司 Judgment method of responsivity of steel ball comparison sample for eddy current flaw detection
JP2023103638A (en) * 2022-01-14 2023-07-27 株式会社東芝 Eddy current flaw detector and eddy current flaw detection method
KR20250007847A (en) * 2023-07-06 2025-01-14 에이치디현대일렉트릭 주식회사 Portable apparatus and method for diagnosing heat treatment state of metal member
KR102826256B1 (en) 2023-07-06 2025-06-27 에이치디현대일렉트릭 주식회사 Portable apparatus and method for diagnosing heat treatment state of metal member

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