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JP2008032414A - Microchip - Google Patents

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JP2008032414A
JP2008032414A JP2006203079A JP2006203079A JP2008032414A JP 2008032414 A JP2008032414 A JP 2008032414A JP 2006203079 A JP2006203079 A JP 2006203079A JP 2006203079 A JP2006203079 A JP 2006203079A JP 2008032414 A JP2008032414 A JP 2008032414A
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substrate
microchip
upper substrate
lower substrate
repellent film
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Tetsuhiro Nakamura
中村  哲浩
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Citizen Holdings Co Ltd
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Citizen Holdings Co Ltd
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Abstract

<P>PROBLEM TO BE SOLVED: To solve a problem wherein an inexpensive microchip is difficult to be manufactured, because it is necessary to use a very expensive device such as a spattering device and a reactive ion etching device, in a conventional microchip. <P>SOLUTION: The microchip of the present invention has structure layered with an upper substrate provided with a sample injection hole and a sample discharge hole, and an under substrate provided with a water repellant film and opened at least in a flow channel portion, and for fixing the upper substrate and under substrate layered by a substrate holding material, and the microchip with sufficient practical usability is obtained by the very simple structure, without using the expensive device or the like. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

本発明は、マイクロチップに関するものである。   The present invention relates to a microchip.

近年、マイクロスケール・トータル・アナリシス・システムズ(μTAS)またはラブ・オン・チップ(Lab−on−chip)などの名称で知られるように、基板内にマイクロチャネルや反応容器およびポートなどの微細構造を設け、微細構造内で物質の化学反応、合成、精製、抽出、生成および分析など各種の操作を行うように構成されたマイクロデバイスが提案され、一部実用化されている。このような目的のために制作された、基板内にマイクロチャネル、ポートおよび反応容器などの微細構造を有する構造物は総称して「マイクロチップ」または「マイクロ流体デバイス」と呼ばれる。マイクロチップは遺伝子解析、臨床診断、薬物スクリーニングなどの化学、生化学、薬学、医学、獣医学分野のみならず、化学工業、環境計測などの幅広い用途に使用できる。常用サイズ同種の装置に比べて、マイクロチップは(1)サンプルおよび試薬の使用量が著しく少ない、(2)分析時間が短い、(3)感度が高い、(4)現場に携帯し、その場で分析できる、および(5)使い捨てできるなどの利点を有する。   In recent years, micro-channels such as micro-channels, reaction vessels, and ports are formed in the substrate, as is known by the names such as Micro-scale Total Analysis Systems (μTAS) or Love-on-chip (Lab-on-chip). A microdevice configured to perform various operations such as chemical reaction, synthesis, purification, extraction, generation and analysis of a substance within a microstructure has been proposed and partially put into practical use. A structure produced for such a purpose and having a microstructure such as a microchannel, a port, and a reaction vessel in a substrate is collectively referred to as a “microchip” or a “microfluidic device”. Microchips can be used in a wide range of applications such as chemical industry and environmental measurement as well as chemical, biochemical, pharmaceutical, medical, and veterinary fields such as gene analysis, clinical diagnosis, and drug screening. Compared to devices of the same size as common sizes, microchips are (1) significantly less sample and reagent usage, (2) shorter analysis times, (3) higher sensitivity, (4) portable to the spot And (5) can be disposable.

従来のマイクロチップの構造について図9を用いて説明する。従来のマイクロチップは微細流路11および微細流路11に連通し、かつ、大気に解放したポート12が形成されたポリジメチルシロキサンであるPDMS基板10aと、PDMS基板10aの微細流路11形成面に接着された対面基板13とからなるマイクロチップにおいて、対面基板13の貼り合わせ面には酸化シリコン14が形成されており、対面基板13が酸化シリコン14を介してPDMS基板10と接着されている。   The structure of a conventional microchip will be described with reference to FIG. The conventional microchip communicates with the fine flow path 11 and the fine flow path 11 and has a PDMS substrate 10a made of polydimethylsiloxane in which a port 12 opened to the atmosphere is formed, and a surface of the PDMS substrate 10a on which the fine flow path 11 is formed. In the microchip including the facing substrate 13 bonded to the surface, a silicon oxide 14 is formed on the bonding surface of the facing substrate 13, and the facing substrate 13 is bonded to the PDMS substrate 10 through the silicon oxide 14. .

PDMS基板10aは鋳型によりPDMS樹脂を成型し、微細流路11とポート12を形成したものを用いており、対面基板13はポリカーボネート板にスパッタリング法により酸化シリコン14を形成したものを用いている。   The PDMS substrate 10a is formed by molding PDMS resin using a mold to form the fine flow path 11 and the port 12, and the facing substrate 13 is formed by forming a silicon oxide 14 on a polycarbonate plate by a sputtering method.

PDMS基板10aと対面基板13を反応性イオンエッチング装置内で酸素プラズマにより各貼り合わせ面の表面改質処理を行った後、PDMS基板10aと対面基板13とを反応性イオンエッチング装置から取り出し、PDMS基板10aの微細流路形成面と対面基板13のシリコン酸化膜14面とを貼り合わせマイクロチップが完成する。
特開2005−257283号公報(図1)
After the PDMS substrate 10a and the facing substrate 13 are subjected to surface modification treatment of each bonded surface by oxygen plasma in the reactive ion etching apparatus, the PDMS substrate 10a and the facing substrate 13 are taken out from the reactive ion etching apparatus, and the PDMS A microchip is completed by bonding the surface of the substrate 10a where the fine flow path is formed and the surface of the silicon oxide film 14 of the facing substrate 13 together.
Japanese Patent Laying-Open No. 2005-257283 (FIG. 1)

前述したマイクロチップには以下に記載するような問題点がある。   The microchip described above has the following problems.

従来のマイクロチップでは、スパッタリング装置や反応性イオンエッチング装置などの非常に高価な装置を用いる必要があり、安価なマイクロチップを作成することが困難であった。   In the conventional microchip, it was necessary to use a very expensive apparatus such as a sputtering apparatus or a reactive ion etching apparatus, and it was difficult to produce an inexpensive microchip.

また、従来のマイクロチップではPDMS基板と対面基板が恒久的に接着されてしまうため一度試料が流れた流路を洗浄して再利用することが非常に困難である。すなわち、使い捨てを前提として使用しなくてはならなかった。   Further, in the conventional microchip, the PDMS substrate and the facing substrate are permanently bonded, so it is very difficult to clean and reuse the flow path once the sample has flowed. In other words, it had to be used on the premise of disposable.

本発明は、非常に簡便な構造で、かつ、安価で生産性が良好なマイクロチップを提供す
ることを目的としている。
An object of the present invention is to provide a microchip having a very simple structure, low cost and good productivity.

上記の目的を達成するために、本発明におけるマイクロチップは、下記記載の構成を採用する。   In order to achieve the above object, the microchip in the present invention adopts the following configuration.

本発明のマイクロチップは、試料注入穴と試料排出穴を設けた上基板と、少なくとも流路部分が開口している撥水膜を設けた下基板とを重ね合わせ、基板保持材により重ね合わせた上基板と下基板を固定していることを特徴としている。   In the microchip of the present invention, an upper substrate provided with a sample injection hole and a sample discharge hole and a lower substrate provided with a water-repellent film having at least a channel portion opened are overlapped with each other by a substrate holding material. It is characterized in that the upper substrate and the lower substrate are fixed.

本発明のマイクロチップは、試料注入穴と試料排出穴と少なくとも流路部分が開口している撥水膜を設けた上基板と、下基板とを重ね合わせ、基板保持材により重ね合わせた上基板と下基板を固定していることを特徴としている。   The microchip of the present invention includes an upper substrate in which a sample injection hole, a sample discharge hole, and an upper substrate provided with a water-repellent film having at least a flow path portion are overlapped with a lower substrate, and are overlapped with a substrate holding material. The lower substrate is fixed.

本発明のマイクロチップは、試料注入穴と試料排出穴を設け、少なくとも流路部分を開口した撥水膜を設けた上基板と、少なくとも流路部分が開口した撥水膜を設けた下基板とを重ね合わせ、基板保持材により重ね合わせた上基板と下基板を固定していることを特徴としている。   The microchip of the present invention has a sample injection hole and a sample discharge hole, an upper substrate provided with a water-repellent film having at least a flow passage portion, and a lower substrate provided with a water-repellent film having at least a flow passage portion opened. And an upper substrate and a lower substrate which are overlapped by a substrate holding material are fixed.

本発明のマイクロチップは、上基板と下基板を固定する基板保持材が、上基板と下基板の間に配置していることが好ましい。   In the microchip of the present invention, it is preferable that a substrate holding material for fixing the upper substrate and the lower substrate is disposed between the upper substrate and the lower substrate.

本発明のマイクロチップは、試料注入穴と試料排出穴を設けた上基板と流路となる部分以外に撥水膜を設けた下基板とを重ね合わせ、基板保持材により重ね合わせた上基板と下基板を固定している構造となっている。   The microchip of the present invention includes an upper substrate on which a sample injection hole and a sample discharge hole are provided and an upper substrate on which a water repellent film is provided in addition to a portion serving as a flow path, The lower substrate is fixed.

このような構造の場合、上基板と下基板とは完全に密着した状態にはならないが、試料注入穴から注入された液体の流通路を撥水膜のパターンにより制御することが可能であり、上基板と下基板が密着した状態でなくとも液体が流通するための穴が物理的に形成されたものと同様の効果を得ることができる。   In the case of such a structure, the upper substrate and the lower substrate are not in a completely intimate state, but the flow path of the liquid injected from the sample injection hole can be controlled by the pattern of the water repellent film, Even if the upper substrate and the lower substrate are not in close contact with each other, it is possible to obtain the same effect as that in which holes for allowing the liquid to flow are physically formed.

このことにより、非常に簡便な構造で高価な装置などを使用せずに十分な実用性を有するマイクロチップを得ることが可能となる。   This makes it possible to obtain a microchip having a very simple structure and sufficient practicality without using an expensive device or the like.

以下図面を用いて本発明の最適な実施形態におけるマイクロチップについて説明する。
(第一の実施形態)
図1に本発明の第一の実施形態におけるマイクロチップの断面図を示す。図1に示すように、試料注入穴4と試料排出穴5を設けた上基板1と流路10となる部分以外に撥水膜3を設けた下基板2とを重ね合わせ、基板保持材6により重ね合わせた上基板1と下基板2を固定している構造となっている。
Hereinafter, a microchip according to an optimal embodiment of the present invention will be described with reference to the drawings.
(First embodiment)
FIG. 1 shows a cross-sectional view of a microchip in a first embodiment of the present invention. As shown in FIG. 1, the upper substrate 1 provided with the sample injection hole 4 and the sample discharge hole 5 and the lower substrate 2 provided with the water repellent film 3 in addition to the portion serving as the flow path 10 are overlapped to form a substrate holding material 6. Thus, the upper substrate 1 and the lower substrate 2 that are overlapped with each other are fixed.

このような構造の場合、上基板1と下基板2とは完全に密着した状態にはならないが、試料注入穴4から注入された液体の流通路を撥水膜3のパターンにより制御することが可能であり、上基板1と下基板2が密着した状態でなくとも液体が流通するための穴が物理的に形成されたものと同様の効果を得ることができる。   In the case of such a structure, the upper substrate 1 and the lower substrate 2 are not completely in close contact with each other, but the flow path of the liquid injected from the sample injection hole 4 can be controlled by the pattern of the water repellent film 3. Even if the upper substrate 1 and the lower substrate 2 are not in close contact with each other, it is possible to obtain the same effect as that in which the holes for allowing the liquid to flow are physically formed.

このことにより、非常に簡便な構造で高価な装置などを使用せずに十分な実用性を有するマイクロチップを得ることが可能となる。   This makes it possible to obtain a microchip having a very simple structure and sufficient practicality without using an expensive device or the like.

次に、第一の実施形態におけるマイクロチップの製造方法について図1から図4を用いて説明する。まず、図2に示すように厚さ1mm程度のアクリル板に試料注入穴4と試料排出穴5を切削加工により形成し、上基板1を作成する。   Next, a microchip manufacturing method according to the first embodiment will be described with reference to FIGS. First, as shown in FIG. 2, the sample injection hole 4 and the sample discharge hole 5 are formed by cutting in an acrylic plate having a thickness of about 1 mm, and the upper substrate 1 is created.

本実施形態では上基板1としてアクリル板を使用したが、特に制限されるものではなく、加工性、コストなどを考慮し適当なものを使用する。   In this embodiment, an acrylic plate is used as the upper substrate 1, but it is not particularly limited, and an appropriate one is used in consideration of workability, cost, and the like.

図3は撥水膜3を形成した下基板2を示す斜視図である。下基板2の一方の面に液体の流通路となる部分を除いて撥水膜3を形成する。撥水膜3の形成方法は撥水性の粒子と接着バインダーが混合されたものをスプレー塗布し、その際、メタルマスクを使用することで任意のパターンに形成する。   FIG. 3 is a perspective view showing the lower substrate 2 on which the water repellent film 3 is formed. A water-repellent film 3 is formed on one surface of the lower substrate 2 except for a portion serving as a liquid flow path. The water-repellent film 3 is formed by spraying a mixture of water-repellent particles and an adhesive binder, and using a metal mask at that time, it is formed into an arbitrary pattern.

撥水膜3のパターン形状は少なくとも流路部分が開口していれば良く、目的、用途により適当な形状に形成してあればよい。   The pattern shape of the water-repellent film 3 only needs to be open at least in the flow path portion, and may be formed in an appropriate shape depending on the purpose and application.

下基板2の材質は本実施形態ではアクリル板を使用したが、特に制限されるものではなく、加工性、コストなどを考慮し適当なものを使用する。   In the present embodiment, an acrylic plate is used as the material of the lower substrate 2, but the material is not particularly limited, and an appropriate material is used in consideration of workability and cost.

上基板1と下基板2の撥水膜3を形成した面とを重ね合わせ、基板保持材6により上基板1と下基板2を図4に示すように固定する。このとき上基板1と下基板2の外形を合わせるだけで試料注入穴4および試料排出穴5と下基板2の撥水膜3が形成されていない部分の位置あわせが行えるようにしておくと作業が容易に行える。   The upper substrate 1 and the surface of the lower substrate 2 on which the water repellent film 3 is formed are overlapped, and the upper substrate 1 and the lower substrate 2 are fixed by the substrate holding material 6 as shown in FIG. At this time, if the outer shape of the upper substrate 1 and the lower substrate 2 are matched, the sample injection hole 4 and the sample discharge hole 5 and the portion of the lower substrate 2 where the water-repellent film 3 is not formed can be aligned. Can be done easily.

本実施形態では基板保持材6として粘着テープを用いて上基板1と下基板2の固定を行った。以上の方法により図1に示すマイクロチップが完成する。   In this embodiment, the upper substrate 1 and the lower substrate 2 are fixed using an adhesive tape as the substrate holding material 6. The microchip shown in FIG. 1 is completed by the above method.

(第二の実施形態)
次に第二の実施形態の構造について説明する。図5は第二の実施形態におけるマイクロチップの断面図を示す。図5に示すように、試料注入穴4と試料排出穴5を設けた上基板1と流路となる部分および基板保持材6を配置する部分以外に撥水膜3を設けた下基板2とを重ね合わせ、上基板1と下基板2の間に基板保持材6を配置することにより重ね合わせた上基板1と下基板2を固定している構造となっている。
(Second embodiment)
Next, the structure of the second embodiment will be described. FIG. 5 shows a cross-sectional view of the microchip in the second embodiment. As shown in FIG. 5, the lower substrate 2 provided with the water-repellent film 3 in addition to the upper substrate 1 provided with the sample injection hole 4 and the sample discharge hole 5, the portion serving as the flow path, and the portion where the substrate holding material 6 is disposed; And the upper substrate 1 and the lower substrate 2 are fixed by disposing the substrate holding material 6 between the upper substrate 1 and the lower substrate 2.

この構造とすることで第一の実施形態と同様の効果が得られるマイクロチップを得ることができる。   With this structure, it is possible to obtain a microchip that can obtain the same effects as those of the first embodiment.

次に、第二の実施形態におけるマイクロチップの製造方法について図2および図5から図7を用いて説明する。まず、第一の実施形態と同様に図2に示すように厚さ1mm程度のアクリル板に試料注入穴4と試料排出穴5を切削加工により形成し、上基板1を作成する。   Next, a microchip manufacturing method according to the second embodiment will be described with reference to FIGS. 2 and 5 to 7. First, similarly to the first embodiment, as shown in FIG. 2, the sample injection hole 4 and the sample discharge hole 5 are formed by cutting in an acrylic plate having a thickness of about 1 mm, and the upper substrate 1 is created.

本実施形態では上基板1としてアクリル板を使用したが、特に制限されるものではなく、加工性、コストなどを考慮し適当なものを使用する。   In this embodiment, an acrylic plate is used as the upper substrate 1, but it is not particularly limited, and an appropriate one is used in consideration of workability, cost, and the like.

図6は撥水膜3を形成した下基板2を示す斜視図である。下基板2の一方の面に液体の流通路となる部分および基板保持材6を配置する部分を除いて撥水膜3を形成する。撥水膜3の形成方法は第一の実施形態と同様に撥水性の粒子と接着バインダーが混合されたものをスプレー塗布し、その際、メタルマスクを使用することで任意のパターンに形成する。   FIG. 6 is a perspective view showing the lower substrate 2 on which the water repellent film 3 is formed. The water-repellent film 3 is formed on one surface of the lower substrate 2 except for a portion serving as a liquid flow path and a portion where the substrate holding material 6 is disposed. As in the first embodiment, the water repellent film 3 is formed by spraying a mixture of water repellent particles and an adhesive binder and using a metal mask to form an arbitrary pattern.

下基板2の材質は本実施形態ではアクリル板を使用したが、特に制限されるものではなく、加工性、コストなどを考慮し適当なものを使用する。   In the present embodiment, an acrylic plate is used as the material of the lower substrate 2, but the material is not particularly limited, and an appropriate material is used in consideration of workability and cost.

次に、図7に示すように下基板2上に基板保持材6を配置する。このとき使用する基板保持材6は液状の接着剤やフィルム状の粘着材を用いるが、特に制限は無い。   Next, as shown in FIG. 7, the substrate holding material 6 is disposed on the lower substrate 2. The substrate holding material 6 used at this time uses a liquid adhesive or a film-like adhesive material, but there is no particular limitation.

本実施形態では上基板1と下基板2とを重ね合わせて基板保持材6で固定した後に上基板1と下基板2を歪ませるような応力を発生させないように硬化後に柔らかい常温硬化型のシリコーン系の接着剤を使用した。   In this embodiment, after the upper substrate 1 and the lower substrate 2 are overlapped and fixed by the substrate holding material 6, the soft room temperature curing type silicone is cured after curing so as not to generate a stress that distorts the upper substrate 1 and the lower substrate 2. A series adhesive was used.

基板保持材6を配置する位置については、図7に示すように下基板2の外周部に沿って配置する方法や、図8に示すように上基板1と下基板2を固定するのに必要な部分にだけ配置する方法などが考えられるが、特に限定されるものではない。   As for the position where the substrate holding material 6 is arranged, it is necessary to arrange the substrate holding material 6 along the outer peripheral portion of the lower substrate 2 as shown in FIG. 7 or to fix the upper substrate 1 and the lower substrate 2 as shown in FIG. A method of arranging only in such a part can be considered, but it is not particularly limited.

撥水膜3を形成した下基板2上に基板保持材6を配置した後、上基板1と重ね合わせ、基板保持材6として使用したシリコーン系接着剤が硬化することで上基板1と下基板2が固定され図5に示すような第二の実施形態におけるマイクロチップを得ることができる。   After the substrate holding material 6 is arranged on the lower substrate 2 on which the water repellent film 3 is formed, the upper substrate 1 and the lower substrate are overlapped with the upper substrate 1 and the silicone adhesive used as the substrate holding material 6 is cured. 2 is fixed, and the microchip in the second embodiment as shown in FIG. 5 can be obtained.

このとき上基板1と下基板2の外形を合わせるだけで試料注入穴4および試料排出穴5と下基板2の撥水膜3が形成されていない部分の位置あわせが行えるようにしておくと作業が容易に行える。   At this time, if the outer shape of the upper substrate 1 and the lower substrate 2 are matched, the sample injection hole 4 and the sample discharge hole 5 and the portion of the lower substrate 2 where the water-repellent film 3 is not formed can be aligned. Can be done easily.

試料注入穴4と試料排出穴5を形成する位置は、上基板1側に必ず設ける必要はなく、下基板2に設けていても第一、第二の実施形態に記載したマイクロチップと同様の効果が得られる。   The positions where the sample injection hole 4 and the sample discharge hole 5 are formed are not necessarily provided on the upper substrate 1 side. Even if the sample injection hole 4 and the sample discharge hole 5 are provided on the lower substrate 2, they are the same as the microchips described in the first and second embodiments. An effect is obtained.

また、撥水膜3を形成する位置についても、下基板2側に必ず設ける必要はなく、上基板1側に設けても問題はなく、上基板1と下基板2の両方に設けていても第一、第二の実施形態に記載したマイクロチップと同様の効果が得られる。   Further, the position where the water repellent film 3 is formed is not necessarily provided on the lower substrate 2 side, and there is no problem even if it is provided on the upper substrate 1 side, and it may be provided on both the upper substrate 1 and the lower substrate 2. The same effect as the microchip described in the first and second embodiments can be obtained.

本発明の第一の実施形態におけるマイクロチップを示す断面図である。It is sectional drawing which shows the microchip in 1st embodiment of this invention. 本発明の第一の実施形態におけるマイクロチップの製造工程を示す斜視図である。It is a perspective view which shows the manufacturing process of the microchip in 1st embodiment of this invention. 本発明の第一の実施形態におけるマイクロチップの製造工程を示す斜視図である。It is a perspective view which shows the manufacturing process of the microchip in 1st embodiment of this invention. 本発明の第一の実施形態におけるマイクロチップの製造工程を示す斜視図である。It is a perspective view which shows the manufacturing process of the microchip in 1st embodiment of this invention. 本発明の第二の実施形態におけるマイクロチップを示す断面図である。It is sectional drawing which shows the microchip in 2nd embodiment of this invention. 本発明の第二の実施形態におけるマイクロチップの製造工程を示す斜視図である。It is a perspective view which shows the manufacturing process of the microchip in 2nd embodiment of this invention. 本発明の第二の実施形態におけるマイクロチップの製造工程を示す斜視図である。It is a perspective view which shows the manufacturing process of the microchip in 2nd embodiment of this invention. 本発明の第二の実施形態におけるマイクロチップの製造工程を示す斜視図である。It is a perspective view which shows the manufacturing process of the microchip in 2nd embodiment of this invention. 従来例におけるマイクロチップを示す断面図である。It is sectional drawing which shows the microchip in a prior art example.

符号の説明Explanation of symbols

1 上基板
2 下基板
3 撥水膜
4 試料注入穴
5 試料排出穴
6 基板保持材
10 流路
10a PDMS基板
11 微細流路
12 ポート
13 対面基板
14 酸化シリコン
DESCRIPTION OF SYMBOLS 1 Upper substrate 2 Lower substrate 3 Water repellent film 4 Sample injection hole 5 Sample discharge hole 6 Substrate holding material 10 Channel 10a PDMS substrate 11 Fine channel 12 Port 13 Face-to-face substrate 14 Silicon oxide

Claims (3)

試料注入穴と試料排出穴とを有する上基板と、少なくとも流路部分が開口している撥水膜を有する下基板とを重ね合わせ、基板保持材により前記上基板と前記下基板とを固定するマイクロチップ。 An upper substrate having a sample injection hole and a sample discharge hole and a lower substrate having a water repellent film having at least a flow path portion are overlapped, and the upper substrate and the lower substrate are fixed by a substrate holding material. Microchip. 前記基板保持材が、前記上基板と前記下基板との間に配置されることを特徴とする請求項1に記載のマイクロチップ。   The microchip according to claim 1, wherein the substrate holding material is disposed between the upper substrate and the lower substrate. 前記上基板には、少なくとも流路部分が開口している撥水膜を有することを特徴とする請求項1または請求項2に記載のマイクロチップ。 The microchip according to claim 1, wherein the upper substrate has a water-repellent film having at least a channel portion opened.
JP2006203079A 2006-07-26 2006-07-26 Microchip Pending JP2008032414A (en)

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