JP2008018301A - Coating film removing method and coating film removing apparatus - Google Patents

Abstract

PROBLEM TO BE SOLVED: To easily remove a coating film of each layer at a boundary part of each imposition and to improve quality in producing a composite substrate formed by multilayering various layers on a base material. The present invention also provides a coating film removing method and a coating film removing apparatus that can be performed without any problem.
SOLUTION: In a removal region that is a region for removing a wet-state coating film, the suction port of the suction unit is brought into contact with the coating-film-provided substrate and suctioned from the suction port. It moves relatively with respect to this coating-film provision board | substrate so that the one surface of the said coating-film provision board | substrate may be followed, and the said coating film of the said removal area | region is removed.
[Selection] Figure 1

Description

In the present invention, the wet coating film is selectively removed by suction at the suction portion with respect to the coating film mounting substrate on which the wet coating film is disposed on one side thereof, and the coating film is disposed. The present invention relates to a coating film removing method for selectively removing the wet coating film over one surface side of a substrate and a coating film removing apparatus for carrying out the method.
In particular, the present invention relates to a coating film removing method and a coating film removing apparatus for forming a multi-sided composite substrate composed of multiple layers for forming a display panel.

In recent years, composite substrates in which various layers are formed in multiple layers on a base material have been produced as display panel substrates for display panels. Among them, small ones are mostly multifaceted in terms of productivity. Are made.
Conventionally, in the case of multi-sided formation, a coating film of each layer is formed on a predetermined surface side of the base material by spin coating or the like, but the coating film is also disposed at the boundary portion of each imposition. .
However, when sealing with a sealing material for each imposition, each imposition boundary is due to the reason that the coating film on each imposition boundary contributes to lowering the moisture resistance. Removal of the coating film on the part was desired.
For example, a composite substrate for forming an EL element panel in which an EL element is formed by sequentially laminating at least a first electrode layer, a thick film dielectric layer, a light emitting layer, and a second electrode layer on a substrate. In the case of producing multi-faces, it has been desired to remove the coating film at the border of each face from the aspect of moisture resistance of sealing.

Many methods for removing the outer peripheral portion of the coating film disposed on the substrate are known, but there are few methods for removing the inner coating film, and their use is also limited.
For example, Japanese Patent Application Laid-Open No. 2003-236438 (Patent Document 1) describes a coating solution removing apparatus and a coating solution removing method for removing a sheet-shaped wiper for a composite substrate for a plasma display panel. However, the one described here is difficult to use by mechanical removal with a wiper as a consumable item, and maintenance is troublesome.
Further, for example, Japanese Patent Application Laid-Open No. 2003-203765 (Patent Document 2) describes a method of removing a coating film from a composite substrate for an EL display panel by a blasting method called microblasting.
In this method, abrasive grains are sprayed from a thin nozzle together with a compressed dry gas for fine processing. However, it takes time to manage abrasive materials, grain size, shape, nozzle selection and other processing conditions and equipment. There is a limit to the quality of its use.
JP 2003-236438 A JP 2003-203765 A

Thus, in recent years, for display panels, composite substrates in which various layers are formed in multiple layers on a base material have been produced as display panel substrates, and have been produced from multiple aspects in terms of productivity. In the case of manufacturing by attaching, there has been a demand for a method capable of removing the coating film of each layer at the border of each imposition easily and without any problem in terms of quality for various reasons.
The present invention corresponds to these, and when a multi-sided composite substrate formed with various layers on a base material is prepared, it is easy to remove the coating film of each layer at the border of each imposition. In addition, an object of the present invention is to provide a coating film removing method and a coating film removing apparatus which can be performed without problems in terms of quality.

The method for removing a coating film of the present invention is a method in which a wet coating film is selectively applied by a suction part (also referred to as a suction head) to a coating film-mounted substrate on which a wet coating film is disposed on one side. Is a coating film removal method for selectively removing the wet coating film over the one surface side of the coating film-disposed substrate, wherein the wet coating film is removed. In the removal area, the suction port of the suction part is in contact with the coating film-provided substrate and while being sucked from the suction port, so that the suction port is along one surface of the coating film-arranged substrate. The coating film is moved relative to the coated substrate, and the coating film in the removal region is removed.
And it is said coating-film removal method, Comprising: The suction inlet of the said suction part is a slit-shaped opening shape, It is characterized by the above-mentioned.
Moreover, in any one of the coating film removing methods described above, the coating film-providing substrate is for multi-surface imposition, and is characterized by removing the film between the respective impositions.
In any one of the methods for removing a coating film, the coating film-disposed substrate is a substrate for forming a composite substrate having a multilayer for forming a display panel.
Further, in any one of the above-described coating film removing methods, when the coating film is sucked by the suction port of the suction portion, the wet state is previously promoted to the coating film with a predetermined liquid. .

The coating film removing apparatus of the present invention is a wet coating film selectively selected by a suction part (also referred to as a suction head) with respect to a coating film-mounted substrate on which a wet coating film is disposed on one side. Is a coating film removing apparatus that selectively removes the wet coating film over the inside of one surface side of the coating film provided substrate, wherein the coating film provided substrate is mounted horizontally. The suction stage is arranged on the upper side of the stage, and the suction port is connected to the suction unit by a pipe, and the suction port is connected to the suction unit by a pipe. The low-pressure tank for further sucking and storing the film sucked in and the suction port position control unit for controlling the vertical position of the suction port of the suction unit, the suction port of the suction unit is , Which can move relative to the stage While bringing the tip of the suction port into contact with the coating film provided substrate on which the coating film is provided and sucking from the tip of the suction port, the suction port is placed on one surface of the coating film provided substrate. The coating film is moved relative to the coating-coated substrate so as to remove the coating film in the removal region.
And it is said coating-film removal apparatus, Comprising: The suction inlet of the said suction part has a slit-shaped opening, and uses the center of the longitudinal direction of the slit-shaped opening as a fulcrum, and is a coating-film arrangement | positioning board | substrate. It is characterized by being rotatable along the surface state.
In any one of the coating film removing apparatuses, the suction port of the suction part is made of resin.

(Function)
When the coating film removing method of the present invention has such a configuration, each layer at the border of each imposition is produced when a composite substrate formed by forming various layers on the base material is multilayered. It is possible to provide a method of removing a coating film that can be removed easily and without problems in terms of quality. Specifically, in the removal region, which is a region where the wet-state coating film is removed, the suction port of the suction part is brought into contact with the coating film-disposed substrate and the suction port is suctioned from the suction port. This is achieved by moving relative to the coating-coated substrate along one surface of the coating-coated substrate and removing the coating film in the removal region.
Examples of the suction port of the suction unit include a slit-like opening shape, but are not limited thereto.
In particular, the coating-coated substrate is effective when it is used for multi-surface imposition and removes the coating film between each imposition.
Moreover, as a coating-film provision board | substrate, the board | substrate for forming the composite substrate which consists of a multilayer for display panel formation is mentioned.
In addition, when the coating film is sucked by the suction port of the drawing portion, the wet state is promoted to the coating film with a predetermined liquid in advance, so that the coating film can be surely removed. Make it possible.

When the coating film removing apparatus of the present invention has such a configuration, each layer at the border of each imposition is produced when a composite substrate formed by forming various layers on the base material in multiple layers is produced. It is possible to provide a coating film removing apparatus that can remove the coating film easily and without problems in terms of quality. In particular, the suction port of the suction portion has a slit-shaped opening, and is rotatable along the surface state of the coating film-disposed substrate with the longitudinal center of the slit-shaped opening as a fulcrum. According to the seventh aspect of the present invention, the coating film-equipped substrate and the suction port can be easily contacted over the entire longitudinal direction of the slit-shaped opening.
Further, the suction port of the suction part is made of resin. By adopting the form of the invention of claim 8, the portion that is in contact with the suction port other than the coating film to be removed is not damaged.

  As described above, the present invention can easily remove the coating film of each layer at the border of each imposition when producing a composite substrate formed of various layers on a base material in multiple layers as described above. In addition, the present invention makes it possible to provide a coating film removing method that can be performed without problems in terms of quality and a coating film removing apparatus for carrying out the method.

An example of an embodiment of the coating film removing method of the present invention will be described with reference to the drawings.
FIG. 1A is a schematic view showing an example of an embodiment of the method for removing a coating film of the present invention, and FIG. 1B shows the suction state of the suction portion viewed from the A1 side in FIG. 2A is a schematic diagram for explaining the rotation of the suction portion, FIG. 2B is a diagram viewed from the B1 side of FIG. 2A, and FIG. 3 is a wet state promoting method. FIG. 4A is a diagram showing a state before the coating film removing process on the multi-sided substrate, and FIG. 4B is a diagram showing a state after the coating film removing process. is there.
In FIG. 1 (a), the dotted line arrow indicates the suction direction of the coating film, the solid line arrow indicates the direction of reduced pressure exhaust, and in FIG. 1 (b), the arrow indicates the moving direction of the stage.
In FIG. 2, the thick dotted double arrow indicates the rotation direction, the thick dotted arrow in FIG. 3 indicates the liquid supply for promoting the wet state, and the dotted line in FIG. Shows the border.
1-4, 10, 10a is a suction part, 15, 15a is a suction port, 16 is a slit-like opening, 20 is an XY stage, 30 is a tank, 31 and 32 are pipes, 35 is a control valve, 40 is Cylinder, 41 exhaust pipe, 41A control valve, 42 compressed air supply pipe, 42A control valve, 45 cylinder shaft, 47 support part, 50 support part, 51 (cylinder) fixing part, 70 Nozzle 75, wet state accelerating liquid, 80 is a coated substrate, 80a is a processed substrate (after removal of the coated film), 85 is a coated film (in a wet state), 86 is unit imposition, 87 is ( This is the border of imposition.

First, an example of an embodiment of the coating film removing method of the present invention will be described with reference to FIG.
In the coating film removing method of this example, the wet state is selectively applied by the suction unit (also referred to as a suction head) 10 with respect to the coated film substrate 80 on which the wet coated film 85 is disposed on one side. 1 is a method of removing the wet film 85 by suction and removing the wet paint film 85 selectively over the inside of one surface of the paint-coated substrate 80, as shown in FIG. As shown in FIG. 2, the suction port 15 of the suction unit 10 is connected to the coating film 85 in the removal region, which is a region where the coating film 85 is removed, with the coating film-disposed substrate 80 mounted horizontally on the stage 20. The coating film is disposed so that the suction port 15 extends along one surface of the coating film disposed substrate 80 while being in contact with the coating film disposed substrate 80 on which 85 is disposed and sucking from the suction port 15. Move relative to the substrate 80 to remove the coating film 85 in the removal region. It is intended to.
In this example, the coating film is removed by the coating film removing apparatus including the XY stage 20, the suction unit 10, the cylinder 40, and the like shown in FIG.

The coating film removing apparatus shown in FIG. 1A is arranged on the upper side of the stage 20 with the XY stage 20 that horizontally mounts and holds the coating film arranging substrate 80 and the suction port 15 on the stage 20 side, A suction part 10 for sucking and removing the wet paint film, a low-pressure tank 30 connected to the suction part 10 by a pipe, and further sucking and storing the paint film sucked at the suction port 15; The suction port 15 of the suction unit 10 is provided with a cylinder 40 that controls the vertical position of the suction port 15 of the suction unit 10 as a suction port position control unit. The suction port 15 of the suction unit 10 is moved to the XY stage 20 by XY movement. 20 while moving the tip of the suction port 15 in contact with the coating-film-provided substrate on which the coating film is disposed and sucking from the tip of the suction port 15 , The suction port 15, along the one surface of the coating film distribution 設基 plate 80, in which is moved relative to the coating film distribution 設基 plate 80, removing the coating film 85 of the removal region.
Here, the coating film 85 connected to the suction unit 10 via the pipe 32 and sucked at the suction port 15 is further sucked and decompressed and stored in the low-pressure tank 30.
Here, the position of the suction unit 10 is controlled at the moving position of the cylinder shaft 45 by driving the cylinder 40, and the cylinder 40 controls the position of the suction port 15 of the suction unit 10 in the vertical direction. It corresponds to the control unit.
Although not explicitly shown in FIG. 1, the opening and closing of the control valves 41 </ b> A and 42 </ b> A is controlled here to control the movement of the cylinder shaft 45.
The suction operation via the suction pipe 31 is controlled by the control valve 35.

As the suction unit 10, various sizes and shapes are used depending on the width to be removed, the characteristics of the wet coating film 85, and the suction method.
Although the suction inlet 15 of the suction part 10 shown in FIG. 1 is nozzle-shaped, it is not limited to this.
For example, the suction portion 10a shown in FIG. 2 has a wide width to be removed. As shown in FIG. 2B, the suction port 15a of the suction portion 10 has a slit-like opening 16 here. ing.
And, when performing the removal, as shown in FIG. 2 (a), the entire longitudinal direction of the slit-shaped opening 16 is easily and uniformly in contact with the coating film-arranged substrate (equivalent to 80 in FIG. 1). The suction port 15a of the suction part 10a is rotatable along the surface state of the coating film-disposing substrate 80 with the longitudinal center of the slit-shaped opening 16 as a fulcrum.
Here, the suction portion 10 a is rotatable by the support portion 47 and joined to the cylinder shaft 45.

Briefly, one example of the processing flow of the coating film removing method of this example will be described.
First, a coating film-disposed substrate having a wet-coated film disposed on one side thereof is prepared in advance, and the coating film-disposed substrate is placed on the stage 20 and held.
For example, a liquid material is applied on one side of a transparent substrate, and a wet coating film is provided to prepare a coating film-providing substrate.
Next, the XY stage 20 is moved so that the suction port 15 of the suction unit 10 is set to a predetermined position in the removal region that is a region where the coating film 85 is removed.
Next, the cylinder 40 is driven to move the position of the suction unit 10 connected to the tip of the cylinder shaft 45, and the suction port 15 of the suction unit 10 is moved to the coating film-disposed substrate 80 on which the coating film 85 is disposed. In contact with
In this state, suction is performed from the suction port 15.
Then, the suction port 15 is moved relative to the coating film providing substrate 80 in the removal region so as to be along one surface of the coating film providing substrate 80.
In this way, the coating film 85 in the entire desired area is selectively removed.
For example, as shown in FIG. 4 (a), the coated substrate 80a before the coating removal process is removed after the coating removal process as shown in FIG. 4 (b). Is done.

As a modification of this example, as shown in FIG. 3, when the coating film 85 is sucked by the suction port 15 of the suction unit 10, a predetermined wet state promoting liquid 75 is previously applied to the coating film 85 by the nozzle 70. A method of promoting the wet state is also mentioned.
The coated film substrate 80 is not particularly limited.
In addition to those in which a wet coating film is directly disposed on the transparent substrate surface, a wet coating film may be disposed on a solidified layer provided on the transparent substrate surface.
Specifically, as the coating film-arranged substrate 80, a composite substrate composed of a multilayer for forming a display panel can be mentioned.
Further, as another form, there is a form in which the suction part is relatively moved in the removal region by controlling the suction part and performing XY movement with the stage being fixed.

FIG. 1A is a schematic view showing an example of an embodiment of the method for removing a coating film of the present invention, and FIG. 1B shows the suction state of the suction portion viewed from the A1 side in FIG. FIG. FIG. 2A is a schematic view for explaining the rotation of the suction portion, and FIG. 2B is a view as seen from the B1 side of FIG. It is a figure for demonstrating the wet state promotion method. FIG. 4A is a diagram showing a state before the coating film removing process on the multi-sided substrate, and FIG. 4B is a diagram showing a state after the coating film removing process.

Explanation of symbols

10, 10a Suction unit 15, 15a Suction port 16 Slit-shaped opening 20 XY stage 30 Tank 31, 32 Pipe 35 Control valve 40 Cylinder 41 Exhaust pipe 41A Control valve 42 Compressed air supply pipe 42A Control valve 45 Cylinder shaft 47 Support part 50 Support portion 51 (Cylinder) fixing portion 70 Nozzle 75 Wet state promoting liquid 80 Coating substrate 80a Treated substrate 85 (after removal of coating) 85 (Wet state) Coating 86 Unit imposition 87 (Imposition) No)

Claims (8)

  The wet coating film is selectively removed by suction with a suction part (also referred to as a suction head) to the coating film-mounted substrate on which the wet coating film is disposed on one side thereof, and the coating film A method of removing a wet film selectively on one side of an arrangement substrate, wherein the suction portion is disposed in a removal area that is an area where the wet film is removed. While bringing the suction port into contact with the coating film-disposed substrate and sucking from the suction port, the suction port is directed to the coating film-disposing substrate so as to be along one surface of the coating film-disposing substrate. A method of removing a coating film, wherein the coating film is moved relatively to remove the coating film in the removal region.   2. The method of removing a coating film according to claim 1, wherein the suction port of the suction part has a slit-like opening shape.   It is a coating-film removal method of any one of Claim 1 thru | or 2, Comprising: The said coating-film arrangement | positioning board | substrate is for multi-surface imposition, The film between each imposition is removed, It is characterized by the above-mentioned. To remove the coating film.   4. The coating film removing method according to claim 1, wherein the coating film-disposed substrate is a substrate for forming a composite substrate composed of a multilayer for forming a display panel. 5. Coating film removal method.   5. The method for removing a coating film according to claim 1, wherein the wet state of the coating film is promoted in advance by a predetermined liquid when the coating film is sucked by the suction port of the suction portion. A coating film removing method characterized by   The wet coating film is selectively removed by suction with a suction part (also referred to as a suction head) to the coating film-mounted substrate on which the wet coating film is disposed on one side thereof, and the coating film A coating film removing apparatus that selectively removes the wet coating film over one surface side of the arrangement substrate, a stage for horizontally mounting and holding the coating film arrangement substrate, and its suction With the mouth on the stage side, the suction part arranged on the stage upper side for sucking and removing the wet paint film, and the paint film connected to the suction part with a pipe and sucked at the suction mouth, A low-pressure tank that stores by suction and a suction port position control unit that controls the vertical position of the suction port of the suction unit. The suction port of the suction unit is relatively positioned with respect to the stage. The tip of the suction port can be moved, While being in contact with the coating film-provided substrate on which the coating film is disposed and sucking from the tip of the suction port, the suction port extends along one surface of the coating film-disposing substrate. A coating film removing apparatus that moves relative to a film-arranged substrate and removes the coating film in the removal region.   It is a coating-film removal apparatus of Claim 6, Comprising: The suction inlet of the said suction part has a slit-shaped opening, and coating-film arrangement | positioning uses the center of the longitudinal direction of the slit-shaped opening as a fulcrum. A coating film removing apparatus characterized by being rotatable along the surface state of a substrate. The coating film removing apparatus according to any one of claims 6 to 7, wherein the suction port of the suction part is made of a resin.

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