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JP2008069031A - Silicon nitride-based sintered body and method for producing the same - Google Patents

Silicon nitride-based sintered body and method for producing the same Download PDF

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JP2008069031A
JP2008069031A JP2006248013A JP2006248013A JP2008069031A JP 2008069031 A JP2008069031 A JP 2008069031A JP 2006248013 A JP2006248013 A JP 2006248013A JP 2006248013 A JP2006248013 A JP 2006248013A JP 2008069031 A JP2008069031 A JP 2008069031A
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silicon nitride
sintered body
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JP4850007B2 (en
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Takeo Fukutome
武郎 福留
Shuichi Tateno
周一 立野
Takashi Watanabe
孝 渡邊
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Kyocera Corp
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Abstract

【課題】少ない粒界相成分でも微細な組織を持ち、緻密で耐摩耗性に優れた窒化珪素質焼結体を提供することである。
【解決手段】窒化珪素の結晶粒子と、周期律表第3族元素、アルミニウム、マグネシウム、珪素、酸素及び窒素を含む非晶質の粒界相と、該粒界相に分散された周期律表第6族元素化合物粒子とからなる窒化珪素質焼結体であって、前記周期律表第3族元素を酸化物換算量で0.1質量%以上、前記アルミニウムを酸化物換算量で0.05〜0.5質量%、前記マグネシウムを酸化物換算量で0.3質量%以上含有するとともに、前記周期律表第3族元素の酸化物換算量、前記アルミニウムの酸化物換算量、前記マグネシウムの酸化物換算量の合計が2.5質量%以下であり、周期律表第6族元素化合物を酸化物換算で0.1〜2質量%の割合で含有し、前記窒化珪素質焼結体に含まれる酸素量が1.3質量%以下であることを特徴とする。
【選択図】なし。
An object of the present invention is to provide a silicon nitride sintered body that has a fine structure even with a small amount of grain boundary phase components, and is dense and excellent in wear resistance.
Crystal grains of silicon nitride, an amorphous grain boundary phase containing Group 3 elements of the periodic table, aluminum, magnesium, silicon, oxygen, and nitrogen, and a periodic table dispersed in the grain boundary phase A silicon nitride-based sintered body composed of Group 6 element compound particles, wherein the Group 3 element in the periodic table is 0.1% by mass or more in terms of oxide, and the aluminum is 0.1% in terms of oxide. 05-0.5 mass%, containing 0.3 mass% or more of the magnesium in terms of oxide, oxide equivalent of the Group 3 element in the periodic table, oxide equivalent of the aluminum, magnesium The total amount of oxides in terms of oxide is 2.5% by mass or less, the Group 6 element compound of the periodic table is contained in an amount of 0.1 to 2% by mass in terms of oxides, and the silicon nitride sintered body The amount of oxygen contained in is 1.3 mass% or less.
[Selection figure] None.

Description

本発明は、切削工具等に用いられる耐摩耗性に優れた窒化珪素質焼結体およびその製造方法に関する。   The present invention relates to a silicon nitride sintered body excellent in wear resistance used for a cutting tool or the like and a method for producing the same.

従来から、エンジニアリングセラミックスとして知られている窒化珪素やサイアロン等は、高強度、高温高強度、高靭性である上、耐熱性、耐熱衝撃性、耐摩耗性および耐酸化性に優れることから、特にガスタービンやターボロータ等の熱機関用部品や切削工具として応用が進められている。   Silicon nitride, sialon, etc., which are conventionally known as engineering ceramics, are not only high strength, high temperature high strength, high toughness, but also excellent in heat resistance, thermal shock resistance, wear resistance and oxidation resistance. Applications are being promoted as heat engine parts such as gas turbines and turbo rotors and cutting tools.

これまでに、窒化珪素質焼結体の機械的、熱的特性を高めるために、窒化珪素質焼結体の窒化珪素粒子の粒界を金属成分として希土類元素と珪素とアルミニウムと微量のマグネシウムを含有せしめ、さらに酸素と窒素からなる非晶質の粒界相により構成し、それらの粒界成分を特性の組成範囲に制御することで上記目的を達成しようとする試みがなされている(例えば、特許文献1を参照)。
特許第3454993号
Until now, in order to improve the mechanical and thermal characteristics of the silicon nitride sintered body, the grain boundaries of the silicon nitride particles of the silicon nitride sintered body are used as the metal components, and rare earth elements, silicon, aluminum, and trace amounts of magnesium are added. In addition, an attempt has been made to achieve the above-mentioned purpose by controlling the composition of the grain boundary components to the composition range of the characteristics, including an amorphous grain boundary phase composed of oxygen and nitrogen. (See Patent Document 1).
Japanese Patent No. 3454993

しかしながら、特許文献1に記載の窒化珪素質焼結体においては、粒界相成分が多すぎるため耐摩耗性に劣るなどの問題があった。   However, the silicon nitride-based sintered body described in Patent Document 1 has problems such as inferior wear resistance because there are too many grain boundary phase components.

本発明の課題は、少ない粒界相成分でも微細な組織を持ち、緻密で耐摩耗性に優れた窒化珪素質焼結体を提供することである。   An object of the present invention is to provide a silicon nitride-based sintered body that has a fine structure even with a small amount of grain boundary phase components and is dense and excellent in wear resistance.

本発明の窒化珪素質焼結体は、窒化珪素の結晶粒子と、周期律表第3族元素、アルミニウム、マグネシウム、珪素、酸素及び窒素を含む非晶質の粒界相と、該粒界相に分散された周期律表第6族元素化合物粒子とからなる窒化珪素質焼結体であって、前記周期律表第3族元素を酸化物換算量で0.1質量%以上、前記アルミニウムを酸化物換算量で0.05〜0.5質量%、前記マグネシウムを酸化物換算量で0.3質量%以上含有するとともに、前記周期律表第3族元素の酸化物換算量、前記アルミニウムの酸化物換算量、前記マグネシウムの酸化物換算量の合計が2.5質量%以下であり、周期律表第6族元素化合物を酸化物換算で0.1〜2質量%の割合で含有し、酸素量が1.3質量%以下であることを特徴とする。   The silicon nitride-based sintered body of the present invention includes silicon nitride crystal grains, an amorphous grain boundary phase containing Group 3 elements of the periodic table, aluminum, magnesium, silicon, oxygen, and nitrogen, and the grain boundary phase. A silicon nitride sintered body comprising Group 6 element compound particles dispersed in the periodic table, wherein the Group 3 element of the Periodic Table is 0.1% by mass or more in terms of oxide, and the aluminum is contained. 0.05 to 0.5% by mass in terms of oxide, 0.3% by mass or more in terms of oxide in terms of oxide, and in terms of oxide of group 3 element of the periodic table, The oxide equivalent amount, the total oxide equivalent amount of magnesium is 2.5% by mass or less, and contains a Group 6 element compound of the periodic table in a proportion of 0.1 to 2% by mass in terms of oxide, The oxygen content is 1.3% by mass or less.

また、本発明の窒化珪素質焼結体は、前記周期律表第3族元素が、La、Er、Luから選ばれる1種以上であることが望ましい。   In the silicon nitride sintered body of the present invention, the Group 3 element of the periodic table is preferably at least one selected from La, Er, and Lu.

また、本発明の窒化珪素質焼結体は、前記周期律表第6族元素化合物が、タングステン化合物であることが望ましい。   In the silicon nitride based sintered body of the present invention, it is preferable that the Group 6 element compound of the periodic table is a tungsten compound.

また、本発明の窒化珪素質焼結体は、前記周期律表第6族元素化合物の平均粒径が0.05〜0.2μmであることが望ましい。   In the silicon nitride sintered body of the present invention, the average particle size of the Group 6 element compound of the periodic table is desirably 0.05 to 0.2 μm.

また、本発明の窒化珪素質焼結体は、前記窒化珪素焼結体の相対密度が99%以上であることが望ましい。   In the silicon nitride sintered body of the present invention, the silicon nitride sintered body preferably has a relative density of 99% or more.

また、本発明の窒化珪素質焼結体は、前記窒化珪素の結晶粒子が針状化した粒子を含み、前記針状化した粒子のアスペクト比が3以上、平均短径が2μm以下であることが望ましい。   In addition, the silicon nitride sintered body of the present invention includes needle-like particles of the silicon nitride crystal particles, and the needle-like particles have an aspect ratio of 3 or more and an average minor axis of 2 μm or less. Is desirable.

本発明の窒化珪素質焼結体の製造方法は、窒化珪素の結晶粒子と、周期律表第3族元素、アルミニウム、マグネシウムと、周期律表第6族元素化合物粒子とを含有し、前記周期律表第3族元素を酸化物換算量で0.1質量%以上、前記アルミニウムを酸化物換算量で0.05質量%以上、前記マグネシウムを酸化物換算量で0.3質量%以上含有するとともに、前記周期律表第3族元素の酸化物換算量、前記アルミニウムの酸化物換算量、前記マグネシウムの酸化物換算量の合計が3質量%以下であり、周期律表第6族元素化合物を酸化物換算で0.1〜2質量%の割合で含有する成形体を、窒素を含む雰囲気中で、1650〜1800℃の温度で焼成することを特徴とする。   The method for producing a silicon nitride sintered body of the present invention comprises silicon nitride crystal particles, Group 3 elements of the periodic table, aluminum, magnesium, and Group 6 element compound particles of the periodic table, and the period The Group 3 element in the table is 0.1% by mass or more in terms of oxide, the aluminum is 0.05% by mass or more in terms of oxide, and the magnesium is 0.3% by mass or more in terms of oxide. In addition, the sum of the oxide equivalent amount of the Group 3 element of the periodic table, the oxide equivalent amount of the aluminum, and the oxide equivalent amount of the magnesium is 3% by mass or less, and the Group 6 element compound of the periodic table is A compact containing 0.1 to 2% by mass in terms of oxide is fired at a temperature of 1650 to 1800 ° C. in an atmosphere containing nitrogen.

本発明の窒化珪素質焼結体の製造方法は、前記窒素を含む雰囲気が、酸素と珪素とマグネシウムとを含有することが望ましい。   In the method for producing a silicon nitride sintered body of the present invention, it is desirable that the atmosphere containing nitrogen contains oxygen, silicon, and magnesium.

本発明によれば、周期律表第3族元素を含むことで窒化珪素粒子のアスペクト比を大きくする効果があり、アルミニウム、マグネシウムを含むことにより焼結助剤の融点を下げ、低温での焼成が可能となり、組織の微細化を達成することができ、周期律表第3族元素の酸化物換算量、アルミニウムの酸化物換算量、マグネシウムの酸化物換算量の合計が2.5質量%以下とすることで、助剤の量が少ない場合であっても緻密化することができ、優れた耐摩耗性を有することができ、さらには周期律表第6族元素化合物を酸化物換算で0.1〜2質量%の割合で含むことで、高温強度の低下を抑制し、耐摩耗性を高めるという効果がある。また、アルミニウムを酸化物換算量で0.05〜0.5質量%とすることが重要で、アルミニウムの酸化物換算量を0.5質量%以下とすることで、窒化珪素質焼結体の耐酸化性および耐摩耗性を向上させることができる。また、窒化珪素質焼結体の酸素量は1.3質量%以下とすることが重要で、これにより、粒界の組成を制御して耐酸化性および耐摩耗性に優れた窒化珪素質焼結体とできる。   According to the present invention, the inclusion of a Group 3 element in the periodic table has the effect of increasing the aspect ratio of the silicon nitride particles, and the inclusion of aluminum and magnesium lowers the melting point of the sintering aid and enables firing at a low temperature. The structure can be made finer, and the total amount of oxides of Group 3 elements in the periodic table, oxide equivalents of aluminum, and oxide equivalents of magnesium is 2.5% by mass or less. Thus, even if the amount of the auxiliary agent is small, it can be densified, and can have excellent wear resistance. Furthermore, the Group 6 element compound of the periodic table can be converted to 0 in terms of oxide. Included at a ratio of .1 to 2% by mass has the effect of suppressing a decrease in high-temperature strength and enhancing wear resistance. In addition, it is important that aluminum is 0.05 to 0.5% by mass in terms of oxide, and by making the oxide equivalent of aluminum 0.5% by mass or less, Oxidation resistance and wear resistance can be improved. In addition, it is important that the silicon nitride sintered body has an oxygen content of 1.3% by mass or less, so that the composition of the grain boundary is controlled to improve the oxidation resistance and wear resistance. Can be combined.

また、周期律表第3族元素をLa、Er、Luから選ばれる1種以上とすることで、耐摩耗性をさらに高めることができる。   In addition, the wear resistance can be further improved by setting the Group 3 element of the periodic table to at least one selected from La, Er, and Lu.

また、周期律表第6族元素化合物として、タングステン化合物を用いることで、Wが珪化物や炭化物を形成し、高温強度の低下を抑制することができる。   In addition, by using a tungsten compound as the Group 6 element compound of the periodic table, W can form silicides and carbides and suppress a decrease in high-temperature strength.

また、周期律表第6族元素化合物の平均粒径を0.05〜0.2μmとすることで周期律表第6族元素化合物が破壊源となることを抑制し、高温強度の低下を抑制することができる。   In addition, by setting the average particle size of the Group 6 element compound of the periodic table to 0.05 to 0.2 μm, the Group 6 element compound of the Periodic Table is prevented from becoming a source of destruction, and the decrease in high-temperature strength is suppressed. can do.

また、窒化珪素焼結体の相対密度を99%以上として、緻密体を得ることにより、耐摩耗性を向上することができる。   Moreover, wear resistance can be improved by setting the relative density of the silicon nitride sintered body to 99% or more and obtaining a dense body.

また、窒化珪素の結晶粒子が針状化した粒子を含み、前記針状化した粒子のアスペクト比を3以上、平均短径を2μm以下とすることで、破壊靭性を高め、強度を向上することにより、耐摩耗性を向上することができる。   In addition, the crystal grain of silicon nitride contains acicular particles, the acicular particles have an aspect ratio of 3 or more and an average minor axis of 2 μm or less, thereby increasing fracture toughness and improving strength. As a result, the wear resistance can be improved.

本発明の窒化珪素質焼結体の製造方法によれば、焼結中の焼結助剤成分の分解、揮発を抑制でき、少ない助剤量でも緻密体を得ることができる。   According to the method for producing a silicon nitride sintered body of the present invention, decomposition and volatilization of the sintering aid component during sintering can be suppressed, and a dense body can be obtained even with a small amount of aid.

また、本発明の窒化珪素質焼結体の製造方法によれば、窒素を含む雰囲気に、酸素と珪素とマグネシウムとを含有させることで窒化珪素に含まれる二酸化珪素成分や焼結助剤として添加した二酸化珪素成分の分解や揮発抑制、さらにはMgOの揮発を抑制することができる。   Further, according to the method for producing a silicon nitride sintered body of the present invention, by adding oxygen, silicon, and magnesium to an atmosphere containing nitrogen, it is added as a silicon dioxide component or a sintering aid contained in silicon nitride. It is possible to suppress decomposition and volatilization of the silicon dioxide component, and further to suppress volatilization of MgO.

以下、本発明の窒化珪素質焼結体について詳述する。   Hereinafter, the silicon nitride sintered body of the present invention will be described in detail.

本発明の窒化珪素焼結体は、主成分である窒化珪素の結晶粒子と粒界相から構成される組織を有し、組織上、窒化珪素は主にβ−窒化珪素結晶相からなる。なお、このβ―窒化珪素結晶相中には、わずかにアルミニウムが固溶してβ−サイアロンを形成してもよい。窒化珪素の結晶粒子は、針状晶として存在し、その平均短径は2μm以下で平均アスペクト比(長径/短径)は3以上であることが好ましい。これは、平均短径を2μm以下にすることにより、切削時に脱粒が生じにくく、例え脱粒が生じたとしても、その影響が小さく、異常摩耗も生じないからである。また、平均アスペクト比を3以上とすることで、焼結体の靭性が高くなり、結晶粒子の脱粒がなくなり、耐欠損性が高くなるからである。   The silicon nitride sintered body of the present invention has a structure composed of crystal grains of silicon nitride as a main component and a grain boundary phase, and silicon nitride mainly consists of a β-silicon nitride crystal phase. In this β-silicon nitride crystal phase, β-sialon may be formed by slightly dissolving aluminum. The silicon nitride crystal particles are present as needle-like crystals, preferably having an average minor axis of 2 μm or less and an average aspect ratio (major axis / minor axis) of 3 or more. This is because by setting the average minor axis to 2 μm or less, degranulation is less likely to occur during cutting, and even if degranulation occurs, the effect is small and abnormal wear does not occur. In addition, by setting the average aspect ratio to 3 or more, the toughness of the sintered body increases, the crystal grains do not fall off, and the fracture resistance increases.

本発明によれば、焼結体を構成する粒界相は、周期律表第3族元素、アルミニウム、マグネシウム、珪素、酸素及び窒素から構成され、これらの元素により非晶質で構成されている。この粒界相を構成する元素の組成は、少なくとも前記周期律表第3族元素の酸化物換算量が0.1質量%、アルミニウムの酸化物換算量が0.05〜0.5質量%、マグネシウムの酸化物換算量が0.3質量%含み、周期律表第3族元素の酸化物換算量、アルミニウムの酸化物換算量、マグネシウムの酸化物換算量の合計が2.5質量%以下であることが重要である。上記のように組成を限定したのは、それぞれの元素からなる元素の組成が、上記添加量を少なくとも含んでいる時、焼結が十分に進行し焼結体の強度が向上し、針状晶が得られることから、靭性が高くなるからである。また、これらの元素からなる組成の換算量を2.5質量%以下にすることにより、焼結体の硬度の低下を抑制し、耐摩耗性を向上させることができる。また、窒化珪素質焼結体の酸素量は1.3質量%以下とすることが重要で、これにより、粒界の組成を制御して耐酸化性および耐摩耗性に優れた窒化珪素質焼結体とできる。   According to the present invention, the grain boundary phase constituting the sintered body is composed of Group 3 elements of the periodic table, aluminum, magnesium, silicon, oxygen, and nitrogen, and is composed of these elements in an amorphous state. . The composition of the elements constituting this grain boundary phase is at least 0.1% by mass in terms of oxides of Group 3 elements of the periodic table, 0.05 to 0.5% by mass in terms of oxides of aluminum, The oxide equivalent of magnesium is 0.3 mass%, the total oxide equivalent of group 3 elements in the periodic table, the oxide equivalent of aluminum, and the oxide equivalent of magnesium is 2.5 mass% or less. It is important to be. The reason for limiting the composition as described above is that when the composition of the element composed of each element includes at least the above-mentioned added amount, the sintering proceeds sufficiently, the strength of the sintered body is improved, and the acicular crystals This is because the toughness is increased. Moreover, the fall of the hardness of a sintered compact can be suppressed and abrasion resistance can be improved by making the conversion amount of the composition which consists of these elements into 2.5 mass% or less. In addition, it is important that the silicon nitride sintered body has an oxygen content of 1.3% by mass or less, so that the composition of the grain boundary is controlled to improve the oxidation resistance and wear resistance. Can be combined.

また、本発明の窒化珪素焼結体では、前記周期律表第3族元素が、La、Er、Luから選ばれる1種以上であることが望ましい。これらの元素を酸化物換算で少なくとも0.1質量%以上含むことにより、スポットと呼ばれるしみを発生させることなく、成形体をスムーズに緻密化でき、粒界相の硬度をあげることが容易になる。   In the silicon nitride sintered body of the present invention, the Group 3 element of the periodic table is preferably at least one selected from La, Er, and Lu. By containing at least 0.1% by mass or more of these elements in terms of oxide, the compact can be smoothly densified without causing spots called spots, and the hardness of the grain boundary phase can be easily increased. .

また、本発明の窒化珪素焼結体は、理論密度に対する焼結体の相対密度が99%以上であることが好ましい。相対密度が99%以上になると、焼結体中にボイドがほとんどなくなり、さらに耐磨耗性が向上する。更に焼結体中にボイドがほとんどなくなることにより、耐欠損性もよくなる。   In the silicon nitride sintered body of the present invention, the relative density of the sintered body with respect to the theoretical density is preferably 99% or more. When the relative density is 99% or more, there are almost no voids in the sintered body, and the wear resistance is further improved. Furthermore, since there are almost no voids in the sintered body, the fracture resistance is improved.

また、本発明の窒化珪素焼結体では、粒界相中に第3の成分として周期律表第6族元素化合物が含まれることが重要である。この周期律表第6族元素化合物は酸化物換算で0.1〜2質量%含まれることが重要で、特に0.5〜2質量%含まれ、平均短径が0.05〜0.2μmであることが望ましい。添加量が0.1質量%以上の時、又は平均短径が0.05μm以上の時、これら粒子による高温での粒界相軟化に対するピニング効果が十分に得られ、高温強度の低下も生じない。一方、添加量が2質量%以下の時、又は平均短径が0.2μm以下の時、粒子の巨大化を抑制することができ、粒子自体が破壊源になることを防止できる。   In the silicon nitride sintered body of the present invention, it is important that the grain boundary phase contains a Group 6 element compound of the periodic table as the third component. It is important that this Periodic Table Group 6 element compound is contained in an amount of 0.1 to 2% by mass in terms of oxide, particularly 0.5 to 2% by mass, and the average minor axis is 0.05 to 0.2 μm. It is desirable that When the added amount is 0.1% by mass or more, or when the average minor axis is 0.05 μm or more, a sufficient pinning effect on the grain boundary phase softening at a high temperature by these particles can be obtained, and the strength at high temperature does not decrease. . On the other hand, when the addition amount is 2% by mass or less, or when the average minor axis is 0.2 μm or less, the enlargement of the particles can be suppressed, and the particles themselves can be prevented from becoming a destruction source.

また、周期律表第6族元素化合物は、クロム化合物、モリブデン化合物、タングステン化合物がありいずれも使用できるが、取り扱いの容易さからタングステン化合物であることが望ましい。タングステン化合物は、炭化物や珪化物として存在することにより、高温強度の低下を抑制することができる。   Further, the group 6 element compound of the periodic table includes a chromium compound, a molybdenum compound, and a tungsten compound, and any of them can be used. However, a tungsten compound is desirable for ease of handling. The tungsten compound can suppress a decrease in high-temperature strength by being present as a carbide or silicide.

次に、上記で説明した窒化珪素質焼結体の製造方法について説明する。まず、出発原料として、窒化珪素粉末と、周期律表第3族元素の酸化物(RE)、二酸化珪素(SiO)、酸化アルミニウム(Al)、酸化マグネシウム(MgO)、周期律表第6族元素化合物の粉末を用意する。窒化珪素原料粉末は、α−窒化珪素、β−窒化珪素、又はこれらの混合物のいずれも用いることができる。これらの粒径は、2μm以下、特に1μm以下であることが好ましい。また、周期律表第6族元素化合物は、タングステン化合物であることが望ましい。タングステン化合物は、酸化物、炭化物、珪化物、窒化物等いずれでも良いが、安価で微粉末が得られやすいことから、酸化物が望ましい。これらの原料粉末を所定の割合で秤量し、ボールミル等にて混合、粉砕する。この混合粉に適宜バインダーを添加し、スプレードライ法等により造粒する。 Next, a method for manufacturing the silicon nitride sintered body described above will be described. First, as a starting material, silicon nitride powder and an oxide (RE 2 O 3 ), silicon dioxide (SiO 2 ), aluminum oxide (Al 2 O 3 ), magnesium oxide (MgO), a Group 3 element of the periodic table, Prepare powder of Group 6 element compound of periodic table. As the silicon nitride raw material powder, any of α-silicon nitride, β-silicon nitride, or a mixture thereof can be used. These particle sizes are preferably 2 μm or less, particularly 1 μm or less. Further, the Group 6 element compound of the periodic table is preferably a tungsten compound. The tungsten compound may be any oxide, carbide, silicide, nitride, etc., but an oxide is desirable because it is inexpensive and easily obtains a fine powder. These raw material powders are weighed at a predetermined ratio, mixed and pulverized by a ball mill or the like. A binder is appropriately added to the mixed powder and granulated by a spray drying method or the like.

そして、上記のように所定の割合で調整した混合粉末を、公知の成形手段、例えば金型プレス成形、鋳込み成形、押出成形、射出成形、冷間静水圧プレス成形等により任意の形状に成形する。得られた成形体を公知の焼成手段、例えば酸化性雰囲気中あるいは非酸化性雰囲気中での常圧焼成法、ガス圧力焼成法、ホットプレス法等により1650〜1800℃の温度で焼成した後、冷却して本発明の耐食性セラミック部材を得ることができる。   Then, the mixed powder adjusted at a predetermined ratio as described above is molded into an arbitrary shape by known molding means such as die press molding, casting molding, extrusion molding, injection molding, cold isostatic pressing, etc. . After the obtained molded body is fired at a temperature of 1650 to 1800 ° C. by a known firing means, for example, an atmospheric pressure firing method, a gas pressure firing method, a hot press method or the like in an oxidizing atmosphere or a non-oxidizing atmosphere, The corrosion-resistant ceramic member of the present invention can be obtained by cooling.

この焼成に用いる雰囲気は、窒素を主体とするもので、窒化珪素質焼結体が酸化しない範囲で微量の酸素を含んでいてもよいことはいうまでもない。また、窒化珪素質焼結体やいわゆるとも材などから蒸発するSiやAlやMgなどの成分を含んでいてもよい。   It goes without saying that the atmosphere used for the firing is mainly composed of nitrogen and may contain a small amount of oxygen as long as the silicon nitride sintered body is not oxidized. Further, it may contain a component such as Si, Al, or Mg that evaporates from a silicon nitride sintered body or a so-called material.

更に、前述のように窒化珪素粒子の平均短径を小さくし、平均アスペクト比を大きくするためには、一旦、窒素雰囲気中で1650℃〜1800℃で焼成した後、9.8MPa〜294MPa、1500〜1700℃で熱間静水圧焼成を施すことが望ましい。 Furthermore, as described above, in order to reduce the average minor axis of the silicon nitride particles and increase the average aspect ratio, after firing at 1650 ° C. to 1800 ° C. in a nitrogen atmosphere, 9.8 MPa to 294 MPa, 1500 It is desirable to perform hot isostatic baking at ˜1700 ° C.

そして、本発明の窒化珪素焼結体の製造方法は、前記酸化性焼成雰囲気あるいは非酸化性雰囲気として、窒素、酸素、珪素、マグネシウムを含む雰囲気とすることが好ましく、更にこれらの雰囲気が、窒素、SiO、MgOを含むことが重要である。このような雰囲気下で焼成することで、焼結助剤として添加したSiOの分解が抑制され、MgOの揮発が抑制される。更に、もし、成形体中から焼結助剤の一部が揮発されても、上記雰囲気中に成形体が置かれている場合、雰囲気として存在している成分が成形体中に取り込まれ、揮発分が補われる。その結果、添加された焼結助剤が少量でも緻密な焼結体を製造することができる。このような雰囲気は、例えば、SiとSiOとMgO粉末を混合後、試料とともに焼成鉢の中に置く、敷き詰める、又は試料の周囲に配置するなどした後、試料とともに焼成することでSiやMgを蒸発させて実現することができる。 In the method for producing a silicon nitride sintered body according to the present invention, the oxidizing firing atmosphere or the non-oxidizing atmosphere is preferably an atmosphere containing nitrogen, oxygen, silicon, and magnesium. It is important to contain SiO, MgO. By firing in such an atmosphere, decomposition of SiO 2 added as a sintering aid is suppressed, and volatilization of MgO is suppressed. Furthermore, even if a part of the sintering aid is volatilized from the molded body, if the molded body is placed in the above atmosphere, the components present as the atmosphere are taken into the molded body and volatilized. Minutes are supplemented. As a result, a dense sintered body can be produced even with a small amount of added sintering aid. Such an atmosphere can be obtained by, for example, mixing Si, SiO 2, and MgO powder, placing the sample in a baking pot with the sample, laying down, or placing the sample around the sample, and then baking the sample together with Si or Mg. It can be realized by evaporating.

本発明の窒化珪素質焼結体は、高靭性、高硬度、耐摩耗性を必要とする切削工具等に好適に用いることができる。   The silicon nitride-based sintered body of the present invention can be suitably used for cutting tools and the like that require high toughness, high hardness, and wear resistance.

以下、実施例を挙げて本発明についてさらに詳細に説明するが、本発明は以下の実施例に限定されるものではない。   EXAMPLES Hereinafter, although an Example is given and this invention is demonstrated further in detail, this invention is not limited to a following example.

出発原料として、平均粒径0.7μmの窒化珪素粉末と周期律表第3族元素の酸化物として平均粒径0.9μmのEr、Lu、La、周期律表第6族元素化合物粒子として平均粒径0.1μmのWSi、WC、WN、MoSiの粉末を用意した。二酸化珪素(SiO)、は窒化珪素原料粉末中に含まれる酸素量から換算した。 As starting materials, silicon nitride powder having an average particle size of 0.7 μm and Er 2 O 3 , Lu 2 O 3 , La 2 O 3 having an average particle size of 0.9 μm as oxides of Group 3 elements of the periodic table, periodic rule WSi 2 , WC, WN, and MoSi 2 powders having an average particle size of 0.1 μm were prepared as Group 6 element compound particles. Silicon dioxide (SiO 2 ) was converted from the amount of oxygen contained in the silicon nitride raw material powder.

また、酸素量は窒化珪素質焼結体を粉砕して粉状にして、赤外吸収法によって測定した。   The amount of oxygen was measured by an infrared absorption method by grinding a silicon nitride sintered body into a powder form.

これらの原料粉末を用いて、最終焼結体が表1の組成になるようにバインダーとともに調合した後、ボールミルにて72Hr粉砕、混合した。混合後、98MPaの圧力でプレス成形し、工具形状SNGN120412用の成形体を得た。   Using these raw material powders, a final sintered body was prepared together with a binder so as to have the composition shown in Table 1, and then pulverized and mixed with a ball mill for 72 hours. After mixing, press molding was performed at a pressure of 98 MPa to obtain a molded product for the tool shape SNGN120212.

この成形体を脱脂後、1750℃、5Hr、N雰囲気で常圧の条件で焼成後、1600℃、2時間、196MPaの条件で熱間静水圧焼成して焼結体を得た。 This molded body was degreased, fired at 1750 ° C., 5 Hr, N 2 atmosphere under normal pressure conditions, and then fired at 1600 ° C. for 2 hours at 196 MPa under hot isostatic pressure to obtain a sintered body.

得られた焼結体についてアルキメデス法により焼結体の密度を測定して、表1に、その値を記載した。   The density of the sintered body was measured by the Archimedes method for the obtained sintered body, and the value is shown in Table 1.

また、焼結体に対して電子顕微鏡写真により、写真の中の窒化珪素結晶粒子の短軸長及び長軸長を定規で測定し、窒化珪素結晶粒子の平均短径と平均アスペクト比を求めた。   Moreover, the minor axis length and major axis length of the silicon nitride crystal particles in the photograph were measured with a ruler by an electron micrograph on the sintered body, and the average minor axis and average aspect ratio of the silicon nitride crystal particles were obtained. .

焼結体の組成は、ICP発光分析及び酸素分析から、粒界相の組成を計算した。また、粒界相を全体から引いた残りを窒化珪素量とした。   The composition of the sintered body was calculated from the ICP emission analysis and oxygen analysis. Moreover, the remainder which pulled the grain boundary phase from the whole was made into silicon nitride amount.

結晶相は、X線回折から得られたピークを同定して決定した。   The crystal phase was determined by identifying the peak obtained from X-ray diffraction.

さらに工具形状に研磨後、被削材:FCD−450、切削速度:500m/min、送り量:0.2mm/rev、切り込み量:2.0mm、切削時間:120secの条件で切削試験を行った。評価は、刃先のフランク摩耗量は測長器付きの顕微鏡を用いて写真撮影し、摩耗量の平均値を測定して算出した。また、刃先の欠損は、試験後、顕微鏡で刃先を観察して行った。これらの結果を表1に示す。

Figure 2008069031
Further, after grinding into a tool shape, a cutting test was performed under the conditions of work material: FCD-450, cutting speed: 500 m / min, feed amount: 0.2 mm / rev, cutting depth: 2.0 mm, cutting time: 120 sec. . In the evaluation, the flank wear amount of the blade edge was calculated by taking a photograph using a microscope with a length measuring device and measuring the average value of the wear amount. Further, the chipping of the cutting edge was performed by observing the cutting edge with a microscope after the test. These results are shown in Table 1.
Figure 2008069031

表1によれば、本発明請求範囲内の試料No.2〜7、9〜13、15、17〜20、22、23、27〜31はいずれも摩耗量が小さく刃先の欠損のない、優れた切削性能を示した。   According to Table 1, sample no. 2-7, 9-13, 15, 17-20, 22, 23, 27-31 all showed excellent cutting performance with a small amount of wear and no chipping of the cutting edge.

これに対して、本発明の請求範囲外の試料No.8、14、16、21、33は切削試験において摩耗量が増大した。また、本発明の請求範囲外の試料No.1、24〜26、32は試験途中で刃先が欠損した。 On the other hand, sample no. 8, 14, 16, 21, and 33 showed increased wear in the cutting test. In addition, the sample No. outside the scope of claims of the present invention. 1, 24 to 26 and 32 were damaged during testing.

以上詳述した通り、本発明の窒化珪素質焼結体は、焼結体中の窒化珪素粒子の粒径、アスペクト比を制御し、粒界相の組成並びに粒界相に存在する第3の粒子を存在させることにより、これまでになく切削時の欠損や摩耗を防止し切削特性を向上できるとともに工具の寿命を延ばすことができる。   As described in detail above, the silicon nitride sintered body of the present invention controls the grain size and aspect ratio of the silicon nitride particles in the sintered body, and the third composition existing in the grain boundary phase and the grain boundary phase. The presence of particles can prevent cutting and wear during cutting, improve cutting characteristics and extend the tool life.

Claims (8)

窒化珪素の結晶粒子と、周期律表第3族元素、アルミニウム、マグネシウム、珪素、酸素及び窒素を含む非晶質の粒界相と、該粒界相に分散された周期律表第6族元素化合物粒子とからなる窒化珪素質焼結体であって、前記周期律表第3族元素を酸化物換算量で0.1質量%以上、前記アルミニウムを酸化物換算量で0.05〜0.5質量%、前記マグネシウムを酸化物換算量で0.3質量%以上含有するとともに、前記周期律表第3族元素の酸化物換算量、前記アルミニウムの酸化物換算量、前記マグネシウムの酸化物換算量の合計が2.5質量%以下であり、周期律表第6族元素化合物を酸化物換算で0.1〜2質量%の割合で含有し、前記窒化珪素質焼結体に含まれる酸素量が1.3質量%以下であることを特徴とする窒化珪素質焼結体。 Crystal grains of silicon nitride, an amorphous grain boundary phase containing Group 3 elements of the periodic table, aluminum, magnesium, silicon, oxygen, and nitrogen, and Group 6 elements of the Periodic Table dispersed in the grain boundary phase A silicon nitride-based sintered body composed of compound particles, wherein the Group 3 element of the periodic table is 0.1% by mass or more in terms of oxide, and the aluminum is 0.05 to 0.00 in terms of oxide. 5 mass%, containing 0.3 mass% or more of the magnesium in terms of oxide, oxide equivalent of the Group 3 element of the periodic table, oxide equivalent of the aluminum, oxide equivalent of the magnesium The total amount is 2.5% by mass or less, the periodic table group 6 element compound is contained in a proportion of 0.1 to 2% by mass in terms of oxide, and oxygen contained in the silicon nitride sintered body Silicon nitride based sintering characterized in that the amount is 1.3% by mass or less . 前記周期律表第3族元素がLa、Er、Luから選ばれる1種以上であることを特徴とする請求項1記載の窒化珪素質焼結体。 2. The silicon nitride based sintered body according to claim 1, wherein the Group 3 element of the periodic table is at least one selected from La, Er, and Lu. 前記周期律表第6族元素化合物がタングステン化合物であることを特徴とする請求項1または2記載の窒化珪素質焼結体。 The silicon nitride-based sintered body according to claim 1 or 2, wherein the Group 6 element compound of the periodic table is a tungsten compound. 前記周期律表第6族元素化合物の平均粒径が0.05〜0.2μmであることを特徴とする請求項1乃至3のいずれかに記載の窒化珪素質焼結体。 4. The silicon nitride based sintered body according to claim 1, wherein an average particle diameter of the Group 6 element compound of the periodic table is 0.05 to 0.2 μm. 5. 前記窒化珪素焼結体の相対密度が99%以上であることを特徴とする請求項1乃至4のいずれかに記載の窒化珪素質焼結体。 The silicon nitride sintered body according to any one of claims 1 to 4, wherein a relative density of the silicon nitride sintered body is 99% or more. 前記窒化珪素の結晶粒子が針状化した粒子を含み、前記針状化した粒子のアスペクト比が3以上、平均短径が2μm以下であることを特徴とする請求項1乃至5のいずれかに記載の窒化珪素質焼結体。 The crystal grain of the silicon nitride includes acicular particles, and the acicular particles have an aspect ratio of 3 or more and an average minor axis of 2 μm or less. The silicon nitride sintered body described. 窒化珪素の結晶粒子と、周期律表第3族元素、アルミニウム、マグネシウムと、周期律表第6族元素化合物粒子とを含有し、前記周期律表第3族元素を酸化物換算量で0.1質量%以上、前記アルミニウムを酸化物換算量で0.05質量%以上、前記マグネシウムを酸化物換算量で0.3質量%以上含有するとともに、前記周期律表第3族元素の酸化物換算量、前記アルミニウムの酸化物換算量、前記マグネシウムの酸化物換算量の合計が3質量%以下であり、周期律表第6族元素化合物を酸化物換算で0.1〜2質量%の割合で含有する成形体を、窒素を含む雰囲気中で、1650〜1800℃の温度で焼成することを特徴とする窒化珪素質焼結体の製造方法。 It contains silicon nitride crystal particles, Group 3 elements of the periodic table, aluminum and magnesium, and Group 6 element compound particles of the periodic table. 1 mass% or more, 0.05 mass% or more in terms of oxide in terms of aluminum, 0.3 mass% or more in terms of oxide in terms of magnesium, and oxide equivalent of Group 3 elements in the periodic table The sum of the amount, the oxide equivalent amount of the aluminum, and the oxide equivalent amount of the magnesium is 3% by mass or less, and the Group 6 element compound of the periodic table is 0.1 to 2% by mass in terms of the oxide. A method for producing a silicon nitride-based sintered body, which comprises firing the contained compact in an atmosphere containing nitrogen at a temperature of 1650 to 1800 ° C. 前記窒素を含む雰囲気が、酸素と珪素とマグネシウムとを含有することを特徴とする請求項7に記載の窒化珪素質焼結体の製造方法。

The method for producing a silicon nitride-based sintered body according to claim 7, wherein the atmosphere containing nitrogen contains oxygen, silicon, and magnesium.

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Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2009119682A1 (en) * 2008-03-26 2009-10-01 京セラ株式会社 Cutting tool
JP2014141359A (en) * 2013-01-22 2014-08-07 Sumitomo Electric Ind Ltd Sialon-base sintered compact
JP2014231460A (en) * 2013-05-29 2014-12-11 日本特殊陶業株式会社 Silicon nitride sintered compact and manufacturing method thereof and rolling element for bearing
WO2017170899A1 (en) * 2016-03-31 2017-10-05 日本特殊陶業株式会社 Silicon nitride-based sintered body and cutting insert
CN107266031A (en) * 2017-07-31 2017-10-20 常州桂城建材有限公司 The method that fired brick, building block or ceramic are produced using crystalline silicon cutting waste mortar
EP2760807B1 (en) * 2011-09-30 2019-08-21 Saint-Gobain Ceramics & Plastics Inc. Composite silicon nitride body

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0812441A (en) * 1994-06-24 1996-01-16 Kyocera Corp Method for producing silicon nitride based sintered body
JPH0997862A (en) * 1995-09-29 1997-04-08 Toshiba Corp High strength circuit board and manufacturing method thereof
JPH09142935A (en) * 1995-11-24 1997-06-03 Kyocera Corp Silicon nitride sintered body and method for producing the same
JPH09301773A (en) * 1996-03-13 1997-11-25 Ngk Spark Plug Co Ltd Silicon nitride sintered compact for tool
JP2000256066A (en) * 1999-03-05 2000-09-19 Kyocera Corp Silicon nitride based sintered body, method for producing the same, and wear-resistant member using the same
JP2002201073A (en) * 2000-12-27 2002-07-16 Toyota Central Res & Dev Lab Inc Method for sintering silicon nitride ceramics

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0812441A (en) * 1994-06-24 1996-01-16 Kyocera Corp Method for producing silicon nitride based sintered body
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