JP2008045789A - Continuous burning apparatus - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a continuous burning apparatus, reducing the waste of power consumption to efficiently perform micro-wave heating, burning in a short time, and making treatment at will after burning. <P>SOLUTION: In this continuous burning apparatus, the progressive wave of a micro-wave generated by a microwave generating source 1 is propagated in the longitudinal direction of a waveguide line 50 connected by a plurality of waveguides, and an object for heating continuously carried in the waveguide line is transferred from a position having a low intensity of electromagnetic field to a position having a higher intensity, heated and burnt. A heat insulating material is disposed on the inner wall surface of a heating and burning part including a temperature rising inlet part 52 and a high temperature retaining part 53 of the waveguide line, a conveying body where the object for heating is placed is guided from a carry-in port to carry-out port formed in the waveguide line by a carrying guide. While the object for heating is moved in the advancing direction of the progressive wave, it is moved to the position having high intensity of electromagnetic field to raise the heating and burning temperature. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

  The present invention relates to a continuous firing apparatus for continuously firing a body to be fired formed of a ceramic material or the like.

As this type of continuous firing apparatus, the technical ideas of Patent Document 1 and Patent Document 2 are known.
Patent Document 1 has a firing chamber defined by a partition made up of a heat generating layer that self-heats by microwaves and a heat insulating layer that surrounds the outside of the heat generating layer, and is transported through the firing chamber from an inlet toward an outlet. In a continuous firing apparatus that heats and fires the object to be fired by irradiating the object to be fired with a microwave, a flow path for a cooling medium is provided in the heat insulating layer, and a distance between the flow path and the heat generating layer is set. A technical idea of changing the temperature distribution in the furnace length direction by changing the temperature is disclosed.

  With this configuration, when the heat generating layer is self-heated by the microwave and the firing chamber is in a high temperature state, normal temperature air is introduced from the cylinder into the holes formed in the heat insulating layer, and the air introduced into the holes is When it flows through the inside, heat is exchanged with the heat generating layer in the vicinity of the pores, and the temperature in the firing chamber decreases in a limited region near the pores. In addition, the degree of temperature decrease in the firing chamber due to the air flowing through the holes can be arbitrarily controlled by changing the heat exchange efficiency by adjusting the introduction speed of the air introduced into the holes. Therefore, by adjusting the introduction speed of the air introduced into each hole, the temperature profile in the firing chamber can be arbitrarily set even in a designed furnace, and the material, shape, and size of the body to be fired can be set. By optimizing the temperature profile in the firing chamber accordingly, it is possible to cope with firing of various objects to be fired in one continuous firing furnace.

Further, in Patent Document 2, using a tunnel-type continuous firing furnace provided with at least a heating / sintering region for firing by electromagnetic wave irradiation, a fired body that continuously obtains various types of fired bodies having different firing temperatures is disclosed. In the firing method, in the heating / sintering region set to the firing temperature condition for a predetermined fired body, the fired body having a firing temperature different from the above is placed around the fired body in the electromagnetic wave of the fired body. A technical idea of a continuous firing method in which the material is inserted in a state surrounded by a radiant heater formed of a material having heat generation characteristics is disclosed.
With this configuration, despite the use of a microwave continuous firing furnace in which the temperature conditions of the heating / sintering region are set to those for a predetermined firing temperature, various types having different firing temperatures Can be fired at the same time according to each firing temperature, and various high-quality fired bodies can be obtained by microwave heating. It is possible to obtain a continuous firing method excellent in the above.

Japanese Patent No. 3687902 JP 2004-352574 A

By the way, in Patent Document 1 described above, changing the temperature distribution in the furnace length direction by changing the distance between the flow path of the cooling medium of the heat insulating layer and the heat generating layer releases heat energy by the refrigerant. As a result, energy to be supplied was wasted.
Moreover, in the said patent document 2, with respect to the multiple types of to-be-fired body which has different baking temperature, the circumference | surroundings of the to-be-fired body were formed with the material which has the electromagnetic wave heat generating characteristic according to the electromagnetic wave heat generating characteristic which the said to-be-fired body has. Although the technical idea of changing the firing temperature of the object to be fired by surrounding and firing with a radiant heating body is disclosed, also in this technique, microwave power is consumed by the radiant heating body, This results in wasteful power consumption and wasteful energy supply.

  On the other hand, in recent years, there has been a growing demand for ceramic electronic components that are smaller, lighter, and higher in performance from the viewpoint of energy saving, and in the fields of IT industry and home appliance industry, miniaturization of components has been remarkably achieved. However, the firing process, which is the key to the production of parts, is mass-produced by a firing furnace in which those parts are stacked on shelves arranged in multiple stages, so most of the firing energy is used to heat the shelf rather than the product. However, there is a current situation where the firing efficiency cannot be improved. Here, in the in-tube multimode resonance heating method of Patent Document 1 and Patent Document 2, a limit is expected in the firing energy efficiency.

  Therefore, the present invention has been made to solve such a problem, and can efficiently perform microwave heating with less waste of power consumption, can be fired in a short time, and the firing quality is stable. An object of the present invention is to provide a continuous firing apparatus that can be freely treated after firing.

The continuous firing apparatus according to claim 1 propagates a traveling wave of microwaves generated by a microwave generation source that generates microwaves in the length direction of a plurality of series-connected waveguides, and enters the waveguide. A continuous firing apparatus that heats and fires a heated object that has been continuously carried in a length direction of the waveguide while changing from a position with a weak electromagnetic field strength to a position with a strong electromagnetic field strength. The intake part that is taken into the waveguide while changing from a position where the field strength is weak to a strong position, and the heating object that is taken in by the acquisition part is changed from a position where the electromagnetic field strength is weak to a strong position. A temperature raising introduction portion that is heated and fired by being conveyed in the lengthwise direction of the wave tube, and a heat insulating material that prevents heat radiation from the inside of the waveguide provided on at least the wall surface of the heat firing portion of the waveguide are provided. Formed in the waveguide A conveyance guide formed in the length direction from the carry-in entrance to the carry-out exit, and a conveyance that is guided by the conveyance guide and moves in the length direction of the waveguide while a heating object is placed thereon And a transport body guided by the transport guide in the waveguide and moved from the carry-in port to the carry-out port of the waveguide.
Here, the capturing section captures the object to be heated before it is fired as a firing furnace, while capturing the object to be heated from the position where the electromagnetic field strength is weak to the position where it is strong. If it is. In addition, the temperature raising introduction unit conveys and heat-fires the heating object taken in by the taking-in unit in the length direction of the waveguide while changing from a position where the electromagnetic field strength is weak to a strong position. It may be used together with the capturing unit, or may be independent from the capturing unit.
The microwave generation source is a microwave oscillator having a frequency of about 1000 MHz, that is, a wavelength of about 30 cm. In the embodiment, the one having an output of about 1 KW to 50 KW is used, but the present invention is carried out. In this case, the microwave output may be determined based on the load such as the conveyance speed that determines the baking capacity, and the microwave frequency may be determined depending on the size of the baking space. However, since the size of the waveguide is determined from the size of the heating object, it is preferable to use a frequency around 1000 MHz.
Waveguides in which a plurality of microwave traveling waves generated in the microwave generation source are connected in series are connected by a flange, but when the present invention is implemented, they are joined by means such as direct welding. Also good. In any case, the waveguide that heats and bakes the accommodated heating object may be composed of two or more waveguides that are supplied to the waveguide.
In addition, the waveguide has a waveguide characteristic of confining the microwave supplied from the microwave generation source, propagating the traveling wave in the length direction, and heating and firing the contained heating object. Anything is acceptable. In particular, the waveguide gradually takes in the heating object from a position where the electromagnetic field strength is perpendicular to the length direction of the waveguide, and moves the heating object to a central position where the electromagnetic field strength is strong. Any object can be used as long as the object to be heated can be moved to a position where the electromagnetic field strength is strong and the heating and baking temperature of the object to be heated is increased.
The conveyance guide can be a roller conveyor, a belt conveyor, a rail, a flat bottom, or the like, and the conveyance body that is guided by the conveyance guide and moves in a state where the heating object is placed places the heating object. Can be a container.

The continuous firing apparatus according to claim 2 propagates a traveling wave of microwaves generated by a microwave generation source that generates microwaves in the length direction of a plurality of waveguides connected in series, and enters the waveguide. In the continuous firing apparatus that heats and fires the object to be heated that has been continuously carried from the position where the electromagnetic field strength is weak to the position where the object is weak, The intake part that is taken into the waveguide while changing from a position where the field strength is weak to a strong position, and the heating object that is taken in by the acquisition part is changed from a position where the electromagnetic field strength is weak to a strong position. A temperature rising introduction portion that is heated and fired by being conveyed in the length direction of the wave tube, a heat insulating material that is disposed on a wall surface of at least the heat firing portion of the waveguide to prevent heat dissipation from the inside of the waveguide, and Carriage formed in the waveguide A conveyance guide disposed in the waveguide from a mouth to a carry-out port; and a conveyance body guided by the conveyance guide and configured to convey the heating object in a length direction of the waveguide, and the conveyance body Is guided from the conveyance guide of the waveguide and moved from the carry-in port to the carry-out port of the waveguide.
Here, the capturing unit captures the object to be heated into the waveguide while changing from a position where the electromagnetic field strength is weak to a strong position, and captures the firing apparatus before firing as a firing apparatus (furnace). Whatever you do. Further, the temperature raising introduction part conveys and heat-fires the object to be heated taken in by the taking-in part in the length direction of the waveguide while changing from a position where the electromagnetic field strength is weak to a strong position. And may be combined with the capturing unit or may be independent from the capturing unit.
The microwave generation source is a microwave oscillator having a frequency of about 1000 MHz, that is, a wavelength of about 30 cm. In the embodiment, the one having an output of about 1 KW to 50 KW is used, but the present invention is carried out. In this case, the microwave output may be determined based on the load such as the conveyance speed that determines the baking capacity, and the microwave frequency may be determined depending on the size of the baking space. However, since the size of the waveguide is determined from the size of the heating object, it is preferable to use a frequency around 1000 MHz.
Waveguides in which a plurality of microwave traveling waves generated in the microwave generation source are connected in series are connected by a flange, but when the present invention is implemented, they are joined by means such as direct welding. Also good. In any case, the waveguide that heats and bakes the accommodated heating object may be composed of two or more waveguides that are supplied to the waveguide.
In addition, the waveguide has a waveguide characteristic of confining the microwave supplied from the microwave generation source, propagating the traveling wave in the length direction, and heating and firing the contained heating object. Anything is acceptable. In particular, the waveguide gradually takes in the heating object from a position where the electromagnetic field strength is perpendicular to the length direction of the waveguide, and moves the heating object to a central position where the electromagnetic field strength is strong. Any object can be used as long as the object to be heated can be moved to a position where the electromagnetic field strength is strong and the heating and baking temperature of the object to be heated is increased.
And the said conveyance guide can be made into a roller conveyor, a belt conveyor, a rail, etc., The conveyance body which is guided by the said conveyance guide and moves in the state which mounted the heating target object is a container which mounts a heating target object. It can be.
Further, the feeding mechanism is for sequentially moving the conveyance body guided by the conveyance guide from the carry-in port to the carry-out port of the waveguide, and is a roller type that rotates with an external force and an annular belt conveyor type. In addition, a pusher type or the like that sequentially pushes out the conveyance body can be used.

The carry-in entrance of the waveguide of the continuous firing apparatus according to claim 3 is set to a position where the energy density is low, the heating object is inserted, and the heating object is moved to a position where the energy density is high.
Here, taking in from the lower surface side of the waveguide and moving to the center of the cross section of the waveguide, taking in from the upper surface side of the waveguide and moving to the center of the cross section of the waveguide, the waveguide It is possible to adopt a form such as one that is taken in from the left and right side of the tube and moved to the center of the cross section of the waveguide. As a result, what is necessary is just to take the said heating object from the position where the electromagnetic field strength of the said waveguide is weak, and to move the said heating object relatively to the position where the electromagnetic field intensity is strong. Furthermore, inserting the heating object from a position where the electromagnetic field strength is weak and moving it to the center position where the electromagnetic field strength is strong can be changed linearly or in a plurality of stepwise changes. .

In the waveguide of the continuous firing apparatus according to claim 4, a radiant heating body having a predetermined dielectric loss factor value for setting a firing temperature and a high temperature holding temperature is arranged along the transport guide along which the transport body moves. It is set.
By disposing a radiant heating body having a predetermined dielectric loss factor value along the transport guide along which the transport body moves, the radiant heating body having a predetermined dielectric loss factor value is used as a heat source, and the heating object As long as it is heated by radiant heat. In addition, since the ratio of power consumption between the radiant heating body having the predetermined dielectric loss factor value and the heating object changes, if the heating object can be brought into an arbitrary heating state by the set direct heating Good.

In order to secure the firing temperature and firing time of the object to be heated, the continuous firing apparatus according to claim 5 is provided with a radiant heating body having a predetermined dielectric loss factor disposed in the carrier and the waveguide. It is arranged inside the heat insulator.
Here, the radiation heating body having a predetermined dielectric loss factor value is disposed along the transport guide along which the transport body moves, so that the radiation heating body having the predetermined dielectric loss factor value is used as a heat source, What is necessary is just to heat the said heating target object with a radiant heat. The carrier is a dielectric having a specific dielectric loss value, similar to the radiant heater, and the carrier having the predetermined dielectric loss value serves as a heat source to heat the object to be heated with radiant heat. I just need it. In addition, the radiant heating body having the predetermined dielectric loss factor value and the transport body change the ratio of power consumption with the heating object, and the heating object is in an arbitrary heating state by direct heating set. If it can be. In particular, the carrier and the radiant heating element having a predetermined dielectric loss factor value can be moved together.

The waveguide inlet and outlet of the continuous firing apparatus according to claim 6 have a cross-sectional area perpendicular to the longitudinal direction of the waveguide of 1/10 or less. Here, the one in which the cross-sectional area in the direction perpendicular to the length direction of the waveguide is 1/10 or less is, for example, internal dimensions 124 × 248 mm, 146 × 292 mm corresponding to a 915 MHz waveguide (transmission circuit). Invite them to assume, as long as 3000mm ^2, 4000mm ² about less.

  The inlet of the waveguide of the continuous firing apparatus according to claim 7 is formed with a projecting portion of 1/4 wavelength or more on a linear extension line of a bend or a corner, with a section of 1/10 or less, and at an end portion thereof. It is an opening. Here, in the cross section of 1/10 or less, the projecting portion of 1/4 wavelength or more can be in the form of a rectangular waveguide or the form of a circular waveguide. It is desirable to take the form of a rectangular waveguide.

The continuous firing apparatus according to claim 1, wherein microwaves generated by a microwave generation source are supplied to a waveguide, and heat is radiated from the inside of the waveguide disposed on a wall surface of at least a heating and firing portion of the waveguide. The object to be heated that is continuously carried into the waveguide covered with a heat insulating material that prevents heat transfer is transferred from the position where the electromagnetic field strength is weak to the position where it is heated and baked while being conveyed in the length direction of the waveguide. The transport body guided by the transport guide formed of a dielectric material in the length direction from the transport entrance formed at the end of the waveguide to the transport exit on the opposite side is the heating unit. Moving in the length direction of the waveguide with the object placed thereon, guided by the transport guide, transported from the carry-in port to the carry-out port of the waveguide, and heating and firing the heated object It is.
Therefore, when firing in the waveguide, suddenly, when heating of the heating object starts with high energy, the heating object is cracked or damaged, but in the present invention, the electromagnetic field is weak. Therefore, the shock to the heating object is small. Further, since the heating object is taken in with a weak electromagnetic field, there is almost no electromagnetic wave leaking from the waveguide. And since the temperature rise is not controlled by the load sharing in the waveguide, there is no waste in power consumption and the firing rate is fast. Furthermore, since the firing environment of the moving heated object always coincides, the heated object can be uniformly fired under the same energy distribution condition, and as a result of the uniform firing, the quality is improved and the fired quality is improved. Stabilize. Furthermore, since almost no reflected waves are generated in the waveguide, the microwave oscillator constituting the microwave generation source is not damaged by the reflected waves.
Specifically, the equipment has been dramatically reduced in size, and the firing efficiency of small electronic components has been improved several times by high-efficiency and rapid processing of the one-stage loading of the heating object, and atmosphere firing can be added freely. Therefore, the present invention can be used not only for ceramic electronic parts fired in the atmosphere but also for ceramic electronic parts fired in atmospheric firing and automobile parts that are metal parts. Moreover, since it is a heating process in which the internal heating effect of the microwave is utilized to the maximum level, the effect of improving the characteristics of materials such as electronic parts can be expected.
Therefore, efficient microwave heating can be performed with less waste of power consumption, baking can be performed in a short time, and processing after baking can be arbitrarily set.

The continuous firing apparatus according to claim 2, wherein the microwave generated by the microwave generation source is confined in the waveguide, and is continuously carried into the waveguide in which at least the wall surface of the heating and firing portion of the waveguide is covered with a heat insulating material. The object to be heated is conveyed in the length direction of the waveguide while being heated and fired by changing from a weak electromagnetic field strength position to a strong position, and on the opposite side from the waveguide inlet. The transport body guided by the transport guide formed in the length direction to the carry-out port moves in the length direction of the waveguide with the heating object placed thereon, and the transport body is By a feed mechanism that moves sequentially, the guide is guided by the transport guide and transported from the carry-in port to the carry-out port of the waveguide, and the object to be heated is heated and fired.
Therefore, when firing in the waveguide, suddenly, when heating of the heating object starts with high energy, the heating object is cracked or damaged, but in the present invention, the electromagnetic field is weak. Therefore, the shock to the heating object is small. Further, since the heating object is taken in with a weak electromagnetic field, there is almost no electromagnetic wave leaking from the waveguide. And since the temperature rise is not controlled by the load sharing in the waveguide, there is no waste in power consumption and the firing rate is fast. Furthermore, since the firing environment of the moving heated object always coincides, the heated object can be uniformly fired under the same energy distribution condition, and as a result of the uniform firing, the quality is improved and the fired quality is improved. Stabilize. Furthermore, since almost no reflected waves are generated in the waveguide, the microwave oscillator constituting the microwave generation source is not damaged by the reflected waves.
Specifically, the equipment has been dramatically reduced in size, and the firing efficiency of small electronic components has been improved several times by high-efficiency and rapid processing of the one-stage loading of the heating object, and atmosphere firing can be added freely. Therefore, the present invention can be used not only for ceramic electronic parts fired in the atmosphere but also for ceramic electronic parts fired in atmospheric firing and automobile parts that are metal parts. Moreover, since the heating process uses the microwave internal heating effect to the maximum extent, it can be expected to improve the characteristic values of materials such as electronic components.
In addition, a feed mechanism that sequentially moves the transport body is guided from the transport guide and transported from the carry-in port to the carry-out port of the waveguide. Although it is a requirement that the object to be heated is heated and fired by changing from a position where the electromagnetic field strength is weak to a position where it is strong, this requirement can also be that the conveyance path can be a straight line or any height. Therefore, the heating object can be heated and fired under an arbitrary temperature condition.
Therefore, efficient microwave heating can be performed with less waste of power consumption, baking can be performed in a short time, and processing after baking can be arbitrarily set.

  Since the continuous baking apparatus of Claim 3 makes the carrying-in entrance of a waveguide into a position with low energy density, inserts the said heating target object, and moves the said heating target object to a position with high energy density, In addition to the effect described in item 1 or 2, for example, the one taken in from the lower surface side of the waveguide and moved to the center of the cross section of the waveguide, the one taken in from the upper surface side of the waveguide, It is possible to adopt a form such as one that moves to the center of the cross section of the wave tube, one that takes in from the left and right side of the waveguide and moves to the center of the cross section of the waveguide, and so on. The degree of freedom in designing a waveguide that propagates waves is increased. Further, since the heating object is taken in with a low energy density, there is almost no electromagnetic wave leaking from the waveguide. Then, heating is started without affecting the incident / reflection characteristics by moving the heating object in the waveguide to a position where the electromagnetic field intensity is strong, and the temperature of the heating object is increased by an arbitrary temperature increase rate. The heating object can be fired under arbitrary conditions.

  The continuous firing apparatus according to claim 4, wherein a radiation heating body having a predetermined dielectric loss factor value for setting a firing temperature and a high temperature holding temperature is disposed in the waveguide along the transport guide along which the transport body moves. Therefore, in addition to the effect described in any one of claims 1 to 3, a radiant heating element having a predetermined dielectric loss factor value is arranged along the conveyance guide along which the conveyance body moves. By providing, the radiation heating body of the said predetermined dielectric loss factor value becomes a heat source, and the said heating target object can be heated with radiation heat. Moreover, since the ratio of the electric power consumption of the radiation heating body of the said predetermined dielectric loss factor value and the said heating target object is changed, the said heating target object can be made into arbitrary heating states by the set direct heating. .

  The continuous baking apparatus according to claim 5, wherein a radiation heating body having a predetermined dielectric loss factor value disposed in the carrier and the waveguide is used to secure a baking temperature and a baking time of the heating object. Since it is disposed inside the heat insulator, in addition to the effect according to any one of claims 1 to 4, a radiant heating element having a predetermined dielectric loss factor value is moved by the carrier. By being disposed along the transport guide, the radiant heating element having the predetermined dielectric loss value becomes a heat source, and the heating object can be heated by radiant heat. Similarly to the radiant heating body, the carrier is a dielectric having a specific dielectric loss value, the carrier having the predetermined dielectric loss value is a heat source, and the heating object is heated by radiant heat. it can. In addition, by changing the ratio of power consumption between the dielectric having the predetermined dielectric loss factor value and the heating object, the heating object is arbitrarily set by direct heating and radiation (radiation) heating set. It can be in a heated state.

  The waveguide entrance and exit of the continuous firing apparatus according to claim 6 have a cross-sectional area perpendicular to the length direction of the waveguide of 1/10 or less. In addition to the effect described in any one of Items 5, even if the position where the electromagnetic field is weak is opened, the opening is sufficiently small with respect to the wavelength of the microwave, so that there is almost no electromagnetic wave leaking from the opening.

  The waveguide inlet of the continuous firing apparatus according to claim 7, wherein a projecting portion having a quarter wavelength or more is formed on a linear extension line of a bend or a corner with a section of 1/10 or less, and an opening at an end thereof. Therefore, in addition to the effect according to any one of claims 1 to 6, in a cross section of 1/10 or less, a protrusion having a quarter wavelength or more is formed by a rectangular waveguide. However, in reality, it is desirable to take the form of a rectangular waveguide from the form of the carrier, and the degree of freedom in design is high. Since the waveguide inlet is provided on the bend or corner linear extension line, it is possible to carry in without difficulty.

Hereinafter, embodiments of the present invention will be described with reference to the drawings. Note that, in the embodiments, the same symbols and the same symbols mean the same or corresponding functions, and redundant description is omitted.
FIG. 1 is a conceptual diagram conceptually showing the overall configuration of a continuous firing apparatus in an embodiment of the present invention, and FIG. 2 is a side view showing a specific configuration showing the overall configuration of the continuous firing apparatus in an embodiment of the present invention. FIG. FIG. 3 is a front view showing the supply waveguide of the continuous firing apparatus in the embodiment of the present invention, and FIG. 4 is a perspective view of the main part showing the supply waveguide of the continuous firing apparatus in the embodiment of the present invention. FIG. FIG. 5 is a side view (a), a front view (b), and a front view (c) of only the opening showing a modified E bend of the continuous firing apparatus in the embodiment of the present invention. FIG. It is a front view of the carrying-in port of the deformation | transformation E bend of the continuous baking apparatus in the form of.

  In the figure, a microwave generation source 1 for generating a microwave is a 915 MHz microwave oscillator whose output is about 1 KW to 50 KW. As an embodiment, a description will be given as a system of an example in which a microwave of 915 MHz is used and the oscillation output 15 KW is branched into two systems, and each oscillation output is 7.5 KW. The microwave of 915 MHz has a cross-sectional inner dimension of 124 × 248 mm of a rectangular waveguide WR975 (EIA model name) as a transmission line. Specifically, the heating region of the unit waveguide 30 having an inner dimension of 124 × 248 mm is 90 mm. The width of the% flat top is about 60 mm. Further, as the unit waveguide 30, an inner dimension of 146 × 292 mm that matches the inner dimension of the cross section of the rectangular waveguide WR1150 (EIA model name) can be used.

The output of the microwave is specifically units waveguide 30 _-2 to below 30 _-3, 30 _-4 and drilled 10mm measurement hole of, such that the position is the maximum temperature by a radiation thermometer The control system was set in Note that the microwave has zero electromagnetic field intensity at the center of the longitudinal plane of the cross section of the waveguide, so it is clear that there is no microwave leakage. However, when a large number of measurement holes are formed, there is no leakage, but it is preferable that the measurement holes be discontinuous in order to avoid frequency fluctuations. As a specific example, when a 10 mm measurement hole was set at 100 mm intervals, no frequency fluctuation or leakage was confirmed.
Incidentally, when a 2.45 GHz microwave oscillator is used as the commercially available microwave generation source 1, the inside dimension of the cross section of the waveguide is 55 × 109 mm, and the width of the 90% flat top is about 20 mm.

  In the present embodiment, in order to satisfy the form of the firing area of the heating object W to be heated and fired, the heating area is 90% to increase the width of the flat top, for example, 90% to maintain about 50 mm. A microwave having a frequency band of 915 MHz is required because of the size of the waveguide that can take the width of the flat top. However, even if the internal dimensions of the same rectangular waveguide WR975 (EIA type name) are used, the frequency range of the fundamental mode can use microwaves in the range of 0.76 to 1.15 GHz. Therefore, when emphasizing the width of the 90% flat top when embodying the present invention, the frequency of the microwave oscillator can be a frequency band around 1 GHz, that is, a microwave oscillator having a wavelength of about 30 cm can be used. Thus, the frequency of the microwave can be determined by the size of the firing space of the heating object W.

In particular, as in the present embodiment, the standard size of the unit waveguide 30 is determined from the size of the object to be heated W as the frequency of the microwave oscillator, and according to the necessity of securing the space for the firing process, Use of frequencies around 1 GHz including 915 MHz is preferred.
In this embodiment, when referring to a specific unit waveguide, it is described as unit waveguides 30 _-1 , 30 _-2 , 30 _-3 ,..., 30 _-9. In this case, when the whole of the unit waveguide 30 or the continuous unit waveguide 30 is shown, it is described as a waveguide row 50.

The 915 MHz microwave generated from the microwave generation source 1 is output from the output window 2 provided in the microwave generation source 1, and the straight tube 3, the E bend 4, the straight tube 5, the 1/2 demultiplexer 6, The distribution of the branched microwaves through the H bend 7 (7R, 7L), power monitor 8 (8R, 8L), tuner 9 (9R, 9L), and modified E bend 10 (10R, 10L) is a desired value. Is controlled.
Of the H bend 7 (7R, 7L), power monitor 8 (8R, 8L), tuner 9 (9R, 9L), and modified E bend 10 (10R, 10L) illustrated in the present embodiment, FIG. In the technical meaning of distinguishing between the right side and the left side, R and L are added to the number, and when either left or right is allowed, only the number is added, and R or L is not added to it.

The straight pipe 3 and the straight pipe 5 use the internal dimensions of a standardized rectangular waveguide WR975 (EIA model name). The E-bend 4 and the H-bend 7 are also bends with an internal dimension connected to a standardized rectangular waveguide WR975 (EIA model name). The 1/2 demultiplexer 6 branches the waveguide, and distributes the microwave energy output through the straight pipe 5 to the right H bend 7R and the left H bend 7L. . The power monitor 8 detects the distribution state of the microwave energy, and indicates the input wave power distributed and input to the right H bend 7R and the left H bend 7L.
Here, the straight tube 3, the E bend 4, the straight tube 5, the 1/2 demultiplexer 6, the H bend 7, the power monitor 8, and the tuner 9 connected to the output window 2 of the microwave generation source 1 described above are: A supply waveguide 20 that confines microwave energy generated by the microwave generation source 1 and propagates the traveling wave to the waveguide array 50 is configured, and a desired waveguide array 50 branched by the tuner 9 is formed. Microwave can be supplied in distribution.

In this embodiment, the supply waveguide 20 is composed of a straight tube 3, an E bend 4, a straight tube 5, a 1/2 duplexer 6, an H bend 7, a power monitor 8, and a tuner 9. When the waveguide row 50 is only one row, the straight tube 3, a bend or a corner (not shown) (“bend” and “corner” are not found to define an established shape. Throughout this specification. “Bend” and “Corner” will be described assuming that they have forms corresponding to the figure), and can be a power monitor 8 and a tuner 9. Further, when the number of the waveguide rows 50 is four, it is divided into two by a ½ demultiplexer and further divided into two. Of course, other configurations can be adopted depending on the opening position of the output window 2 of the microwave generation source 1 and the position of the waveguide line 50.
Note that the modified E bend 10 of the present embodiment, in addition to the function of confining the microwave and propagating it to the waveguide row 50 as in the case of the E bend 4, causes the heating object W to be electromagnetically applied using bending. It has a function of taking into the waveguide line 50 from a position where the intensity is weak.

  As shown in the conceptual diagram of FIG. 1, the waveguide row 50 of the present embodiment is a position where the electromagnetic field intensity is weak in the length direction of the waveguide row 50, that is, in the direction perpendicular to the traveling direction of the traveling wave. , A heating part W that takes in the heating object W from the heating point, a temperature raising introduction part 52 that moves the heating object W to a position where the electromagnetic field intensity is strong along the traveling direction of the traveling wave, and a high temperature holding part that maintains a predetermined firing temperature ( The constant temperature holding portion 53, the remaining microwave absorbing portion 54 that absorbs the attenuated traveling wave without reflecting it and further attenuates and consumes it, and the cooling processing portion 55 that cools the heating target W are configured as a whole. Specifically, the continuous baking apparatus according to the present embodiment includes a capturing unit 51, a temperature raising introduction unit 52, a high temperature holding unit 53, a residual microwave absorbing unit 54, and a cooling processing unit 55, which are included in the gantry 90 and the auxiliary gantry 91. It is placed on top and maintains a predetermined positional relationship. The total length of the capturing unit 51, the temperature raising introduction unit 52, the high temperature holding unit 53, the remaining microwave absorption unit 54, and the cooling processing unit 55 is about 6 to 10 m, and is configured compactly. The feeding mechanism 100 is a mechanism unit that performs feeding by sequentially moving the carrier 70 guided by the conveyance guide 60 from the carry-in port 13 to the carry-out port 15 of the waveguide line 50.

Note that the waveguide array 50 in the case of implementing the present invention requires the entire configuration of the capturing section 51, the temperature raising introduction section 52, the high temperature holding section 53, the remaining microwave absorption section 54, and the cooling processing section 55. Instead, the microwave generated in the microwave source 1 is confined to propagate the traveling wave with the characteristics of the waveguide, and the contained heating object W is heated and fired while being moved in the traveling direction of the traveling wave. The temperature raising introduction part 52 and the high temperature holding part 53 are constituent features.
Further, the waveguide line 50 of the present embodiment is constituted by a plurality of waveguides connected in series.

Next, the structure and characteristics of the capturing unit 51, the temperature raising introduction unit 52, the high temperature holding unit 53, the residual microwave absorbing unit 54, the cooling processing unit 55, and the feeding mechanism 100 of the continuous baking apparatus according to the present embodiment will be described sequentially. .
Since the taking-in part 51 of this Embodiment uses the tangent which contacts the flange 19 side straight line inside a bending, it is made | formed by the deformation | transformation E bend 10. FIG. In the modified E bend 10, the waveguide row 50 is guided to the inlet 13 of the heating target W of the waveguide row 50 on the extension line of the inner lower surface of the modified E bend 10 on the flange 19 side as shown in FIG. 8. Compared with the wave tube main body 39, the carry-in port 13 shown in FIG. 6 has a small vertical size of about 1/8, a horizontal size of about 1/3, and an opening area of 1/10 to 1/20 or less. A protrusion 11 having a wavelength of / 4 wavelength or more is formed, and an opening 12 is formed at the end thereof.

  Specifically, as shown in FIGS. 5 and 6, the opening 12 of the projecting portion 11 serving as the carry-in port 13 for the heating target W of the waveguide row 50 has a height of 10 to 20 mm in cross-sectional inner dimensions and a lateral width. The thickness is 60 to 100 mm and the thickness is 1 to 10 mm. From the functional part of the waveguide main body 39 for confining and propagating microwaves like the E bend 4, that is, from the flange 19 of the modified E bend 10, the maximum position (lower side) is 300 mm, and the minimum position (upper side) is 100 mm. It is set to protrude only. This indicates that the protruding portion 11 protrudes from the functional portion of the waveguide by a quarter wavelength or more. Incidentally, the wavelength of 1 GHz microwave is 300 mm, and its quarter wavelength is 75 mm.

  Accordingly, the carry-in port 13 for the heating object W of the waveguide line 50 of the modified E bend 10 is temporarily opened even if the opening 12 is in an open state, or a part of the heating object W protrudes to the outside. In this case, the microwave energy is not reflected and guided to the outside of the waveguide line 50.

Further, a conveyance guide 60 including a pair of rails 61 and 62 is disposed at the carry-in port 13 for the heating object W. Conveying guide 60 is in the lowest position in the position of the flange 19 of the opening 12 and its modified E bend 10 of the protrusion 11, it is maintained in the flange 41F of the side position of the unit the waveguide 30 _-1.

From the opening 12 of the protruding portion 11 of the entrance 13 of the heating object W, and the conveyance guide 60 is projected, it is connected to the conveying guide 60 of unit waveguide 30 _-1 later. The conveyance guide 60 disposed on the projecting portion 11 of the modified E bend 10 is firmly fixed to the projecting portion 11 via a spacer 66 made of a heat insulating material with small energy loss. Inside the variant E bend 10, it has led to rail 61, 62 of the pair of the conveying guide 60 essentially linearly arranged with units waveguide 30 _-1 later.

  As described above, the capturing unit 51 of the present embodiment uses the linear tangent line of the bending of the waveguide, so that the opening 12 is in an open state or a part of the heating object from there. Even if W protrudes to the outside, the carry-in port 13 can be formed in which the microwave energy is not reflected and guided to the outside of the waveguide array 50. Further, as will be described later, the conveyance guide 60 can be set to a predetermined linear motion including horizontal.

The temperature raising introduction part 52 of the waveguide line 50 of the present embodiment is mainly composed of two unit waveguides 30 _-1 and 30 _-2 .
FIG. 7 is a side view of the main part showing the configuration of the temperature raising introduction part of the continuous firing apparatus in the embodiment of the present invention. 8 is a sectional view taken along the cutting line AA in FIG. 7, FIG. 9 is a sectional view taken along the cutting line BB in FIG. 7, and FIG. 10 is a sectional view taken along the cutting line CC in FIG.

As described above, the standardized unit waveguide 30 is used for the waveguide array 50, and flanges 41F (F of the flange is the microwave generation source 1 side) and 41R (R of the flange is a micro wave) at both ends. Specific unit waveguides 30 ₋₁ , 30 ₋₂ , 30 ₋₃ ,..., 30 ₋₉ , which have 42 F, 42 R,. The inner dimensions of the rectangular waveguide WR975 (EIA model name) are used for the inner dimensions of the cross section, the height is 123.8 ± 0.25 mm, the lateral width is 247.65 ± 0.25 mm, and the plate thickness is 10 mm. It is. The unit waveguides 30 _-1 , 30 _-2 , 30 _-3 , ..., 30 _-9 are closely connected by flanges 41F, 41R, 42F, 42R, ..., 49F, 49R. The structure does not leak.

  The material of the unit waveguide 30 is preferably one having a low microwave transmission loss, and any one of copper, aluminum, stainless steel, and general steel is desirable. In the present embodiment, aluminum is selected from the viewpoints of economy and workability. Straight pipe 3, E bend 4, straight pipe 5, 1/2 demultiplexer 6, H bend 7 (7R, 7L), power monitor 8 (8R, 8L), tuner 9 (9R, 9L), modified E bend 10 The same applies to the materials (10R, 10L).

Unit waveguide 30 constituting the heating inlet portion 52 and the high-temperature holding section 53, i.e., the unit waveguide 30 _-1, 30 _-2, 30 _-3, ..., in the 30 _-6, the upper and lower surfaces The heat insulating materials 31 and 32 having a thickness of 20 to 30 mm are disposed on the left and right sides, and the heat insulating materials 33 and 34 having a thickness of 40 to 60 mm are disposed on the left and right sides. The heat insulating materials 31 and 32 and the heat insulating materials 33 and 34 according to the present embodiment are good dielectrics, and do not generate heat due to microwave energy, that is, ceramics with very little energy loss absorbed by the dielectric. Therefore, the absorbed energy is small. In the present embodiment, the heat insulating materials 31 and 32 and the heat insulating materials 33 and 34 are disposed in the unit waveguide 30 constituting the temperature rising introduction portion 52 and the high temperature holding portion 53, but the heating in the modified E bend 10 is performed. In the structure in which the object W is taken into the waveguide array 50, a heat insulating material can be used or omitted. Further, when a cooling process is incorporated in the middle of the waveguide line 50, the use of a heat insulating material can be omitted in the cooling process. In any case, the heat insulating materials 31 and 32 and the heat insulating materials 33 and 34 are arranged in the unit waveguides 30 ₋₁ , 30 ₋₂ , 30 _{−3 ,.} Those arranged on the wall surface to prevent heat radiation from the unit waveguides 30 _-1 , 30 _-2 , 30 _-3 , ..., 30 _-6 are suitable. However, when practicing the present invention, the unit waveguide 30 _-1, 30 _-2, 30 _-3, ..., depending on the internal state of the 30 _-6, for example, to pass the conveyor belt inside In this case, the unit waveguides 30 _-1 , 30 _-2 , 30 _-3 ,..., 30 _-6 can be disposed on the outer wall surface.

Here, the heat insulation materials 31 and 32 and the heat insulation materials 33 and 34 of the present embodiment are expressed by the following equation, where P is energy absorbed by the dielectric.
P = (ε ₀ · ε ^" · ω · E ² · V _S ) ^1/2
Where ε _O = dielectric constant of vacuum
ε ^" = ε _r · tan δ = dielectric loss factor of dielectric
ε _r = dielectric constant
tan δ = dielectric loss angle
ω = each frequency
E = field strength
V _S = dielectric volume. That is, a material having a low dielectric loss factor of a dielectric material functions as a heat insulating material because it hardly absorbs microwave energy and generates heat.
Incidentally, Al ₂ O ₃ is 0.06 at 25 ° C. and 0.16 at 1000 ° C., and ZrO ₂ is 0.27 at 25 ° C. and 22.64 at 1000 ° C. If both are compared from the energy loss, it can be seen that Al ₂ O ₃ is more suitable as a heat insulating material.

As described above, the heat insulating materials 31 to 34 are difficult to absorb microwaves and need to have a heat insulating capacity corresponding to the temperature rising profile. Incidentally, as the heat insulating materials 31 to 34 of the present embodiment, it is possible to use an alumina-silica heat insulating material or a silica-titania heat insulating material.
In the present embodiment, when the maximum temperature is 1200 ° C., the temperature of the outer surface of the waveguide body 39 is 80 ° C. or less due to the heat insulating materials 31 to 34 of the waveguide body 39, and Strain and stress due to expansion were completely negligible. When the maximum temperature is further increased, there is a concern that distortion and stress may be generated due to thermal expansion of the waveguide line 50 itself. Temperature control is required.
As a precaution, the microwave waveguide having a frequency of 915 MHz has an internal dimension of WR975 to WR1150, thereby increasing the cross-sectional shape and increasing the thickness of the heat insulating material. A method for reducing the temperature can also be used.

During the opposite side of the flange 42R of the unit waveguide 30 _-1 units waveguide 30 _-2 to opening 12 of the protruding portion 11 through the unit waveguide 30 _-1, a pair of rails 61, A conveyance guide 60 composed of 62 is provided. Conveying guide 60, as shown in FIG. 8, at the lowest position in the position of the flange 41F of the opening 12 and unit waveguide 30 _-1 protrusions 11, at the position of the flange 42R of the unit waveguide 30 _-2 As shown in FIG. 10, it is set to be the center position of the waveguide body 39.
In general, the transport guide 60 has a linear motion in consideration of the ease of mechanical transport of the heating object W, and the two unit waveguides 30 _-1 and 30 _-2 are inclined at a predetermined angle. It is better to change it relatively.

The unit waveguide 30 of the unit waveguide 30 _-3 later, the conveyance guide 60, the two units waveguide 30 _-1, are arranged in a linear position on an extension of the conveying guide 60 of the 30 _-2, As shown in FIG. 1, there is no relative change between the unit waveguide _{30-3 and the} following and the conveyance guide 60.

Here, the relative movement between the carrier 70 and the inner surface of the waveguide line 50 according to the present embodiment will be described in detail.
The opening 12 formed on the lower surface side of the projecting portion 11 as the carry-in port 13 of the object to be heated W of the waveguide row 50 of the modified E bend 10 of the present embodiment is from the opening 12 of the projecting portion 11 to the waveguide row. The conveyance guides 60 to the 50 carry-out ports 15 are linear, and the position of the waveguide line 50 is relatively changed.

The relative change in the position of the rail 61, 62 of the pair as the arrayed waveguide 50 and the conveyance guide 60 is provided between the flange 41F of the flange 19 of the deformation E bend 10 and the unit waveguide 30 _-1, The angle adjustment adapter 66 made of aluminum and having an opening that matches the waveguide characteristics of the waveguide row 50 is tightened so as to sandwich the angle adjustment adapter 66. Angle adjustment adapter 66, the length Lmm unit waveguide 30 _-1 and unit waveguide 30 _-2, as there is a height 124/2 mm change in the central section of the waveguide array 50 Is set. That is, the object to be heated is moved to a position where the electromagnetic field strength is strong by providing an angle only between the flanges connecting the unit waveguides 30 of a predetermined length. However, the position of the conveying guide 60 of the opening 12 and unit waveguide 30 _-1 of the protrusion 11 of the entrance 13 of the heating object W of the waveguide array 50 variant E bend 10, the distance from the lower surface of a predetermined It has a distant initial value δ. Usually, the heating target W of the waveguide row 50 is set at the center position of the cross section of the waveguide row 50. Therefore, in reality, the height position 124/2 = 62 mm of the central section of the waveguide row 50 is set. It is set low in the range of about δ mm.

The angle θ of the angle adjustment adapter 66 when the temperature raising introduction part 52 is made of two unit waveguides 30 _-1 and 30 _-2 is:
θ = tan ⁻¹ (62−δ) mm / 2 length Lmm of unit waveguides
Usually, since the heating object W is disposed at the center position,
θ> tan ^-1 50 mm / 2 length Lmm of unit waveguide
θ <tan ⁻¹ 75 mm / 2 length Lmm of unit waveguide
Is set to an angle of
That is, the angle θ of the angle adjustment adapter 66 of the present embodiment is a quadrangular frame that is thick on the upper side and thin on the lower side, and the angle θ sets the distance from the lower surface of the waveguide array 50 and its change. It is determined by the length of the waveguide line 50 to be performed.
In the present embodiment, the temperature rising introduction part 52 has been described as the two unit waveguides 30 _-1 and 30 _-2 . However, when the present invention is implemented, the heating target W Depending on the characteristics, one unit waveguide 30 _-1 or three unit waveguides 30 _-1 , 30 _-2 , 30 _-3 or more can be used.

Also between the flange 43F of the unit waveguide 30 _-2 flange 42R and units waveguide 30 _-3, is provided with the angle adjustment adapter 67. The angle adjustment adapter 67 is the reverse of the angle adjustment adapter 66, that is, the same one as the angle adjustment adapter 66 is created and attached with its top and bottom reversed. Angle -θ of the angle adjusting adapter 67, by increasing the angle is lowered at an angle adjusting adapter 66 by the same angle, the unit waveguide 30 _-3 later, no angular change in the position of the conveying guide 60 guide The wave tube array 50 is used.
Therefore, the carrier 70 is taken in by the angle θ of the angle adjustment adapter 66, and the carrier 70 is moved to a position where the electromagnetic field strength of the waveguide row 50 having the waveguide characteristics is strong. It can be transported at a position where the field strength is strong.

  In the present embodiment, the case of the carry-in port 13 for the heating target W of the deformation E bend 10 has been described. However, when the present invention is implemented, the heating target W of the waveguide line 50 of the deformation E bend 10 is described. As the carry-in port 13, the protruding portion 11 and the opening 12 formed on the upper surface side can also be used. In particular, in the present embodiment, since the microwave energy supplied from the supply waveguide 20 is on the upper side of the deformation E bend 10, the carrier 70 is disposed on the lower surface side of the projecting portion 11 of the deformation E bend 10. It becomes easy to secure a space for disposing the feeding mechanism 100 that is sequentially moved.

Conversely, when the microwave energy supplied from the supply waveguide 20 to the modified E bend 10 is supplied from the lower side, the transport body 70 is sequentially moved from the protrusion 11 provided on the upper side of the modified E bend 10. It becomes easy to secure a space for disposing the feeding mechanism 100.
Further, when the microwave energy supplied from the supply waveguide 20 is on the left side or the right side, it can be supplied from the protrusion 11 provided on the right side or the left side of the modified E bend 10. In this embodiment, the E-bend 4 is used as the modified E-bend 10, but it can be a modified H-bend using an H-bend, and a modified E-corner or a modified H-corner using a corner. It can also be.
In any case, the modified E bend 10 of the present embodiment, in addition to the function of confining the microwave and propagating it to the waveguide line 50 like the E bend 4, in addition to the heating object W using bending, What is necessary is just to have the function to take in in the waveguide row | line | column 50 from the position where electromagnetic field intensity | strength is weak.

The pair of rails 61 and 62 as the transport guide 60 is made of a bar material having a substantially C-shaped cross section made of an alumina material having a small dielectric loss factor (ε ^″ = ε _r · tan δ), and is provided at predetermined intervals. An opening 38 having a substantially rectangular cross section is formed in the gap holding heat-resistant body 35. The opening 38 of the gap holding heat-resistant body 35 is made of a bar material having a substantially C-shaped cross section. It is hold | maintained so that the opening of the conveyance guide 60 may be opposite. A wrapped conveyance guide 60 is disposed, and is fixed so as not to easily move between the conveyance guide 60 and the heat-resisting body 35 for maintaining the distance.
The position between the conveyance guides 60 is at the center position of the waveguide main body 39 when expressed in the left and right cross-sectional areas of the waveguide main body 39 of the unit waveguide 30.

  Between the conveyance guides 60, a conveyance plate 71 made of a SiC plate having a thickness of about 1 to 10 mm with a surface of 100 × 60 mm made of SiC material, and a guide 72 made of a bar material having a substantially C-shaped cross section at both ends thereof. A transport body 70 configured by mounting a pair of rails 61 is arranged to be movable in the length direction of a pair of rails 61 and 62 as a transport guide 60. That is, the transport body 70 is configured by attaching a guide 72 whose movement direction is specified to the transport guide 60 to at least the opposite side of the transport plate 71 made of an SiC plate. If there is a possibility that the object to be heated W will fall when transported in a mounted state, if the guide 72 is disposed on two opposite sides of the transport plate 71 made of SiC, it will fall from the side in the traveling direction. The possibility disappears. Incidentally, in relation to the firing speed, normally, unless it is a substantially spherical heating object W, it does not fall from the transport plate 71. In this embodiment, the guide 72 is disposed on the two opposite sides of the transport plate 71. However, even if the guide 72 is disposed on one side of the transport plate 71, the guide 72 and the rail 61 on one side are disposed. Or if the connection with the rail 62 is maintained, if the conveyance board 71 which consists of a SiC plate does not remove | deviate from the rail 61 and the rail 62, it will function as the conveyance body 70 in that state.

Two unit waveguide 30 _-1, at 30 _-2, conveying guide 60 is at the position of the flange 42R of the unit waveguide 30 _-2, the position of the conveying guide 60, the cross section of the waveguide body 39 It is set to be the center position. That is, the flange 41F side of the unit waveguide 30 _-1 to the lower surface position is set to be the central position of the cross section of the waveguide body 39 at the position of the flange 42R of the unit waveguide 30 _-2. For this reason, the thickness of the heat insulating material applied under the space-holding heat-resistant body 35 is gradually adjusted to be thicker.

When moving the conveyance plate 71 of the heating object W supplied from the carry-in port 13, the interval between them is set larger than that even if the interval between the continuous conveyance plates 71 is zero in order to obtain high firing efficiency. Even if it provided, it confirmed that there was no problem in incident / reflection characteristics.
According to the experiments by the inventors, the arrangement density of the conveyance bodies 70 of the present embodiment is continuously arranged as an interval between 0 to 10 mm as an interval between the conveyance plates 71 made of SiC plates, and the waveguide The incident / reflection characteristics were confirmed by taking the carrier 70 from the position of the lower surface where the electromagnetic field strength is weak in the direction perpendicular to the length direction of the row 50 and moving the carrier 70 to a position where the electromagnetic field strength is strong. The output frequency of the microwave generation source 1 used in the present embodiment is 915 MHz. In any case, the conveyance body 70 is taken in from the arrangement of the conveyance plates 71 and the position of the lower surface where the magnetic field strength is weak. It was confirmed that the incident / reflection characteristics by moving to a position where the electromagnetic field strength is strong are not affected. It was confirmed that the influence of the incident / reflecting characteristics was equivalent to the problem of the error range, and it was confirmed that the VSWR was a value close to 1 (the reflectance was almost zero).

Here, the conveyance guide 60 including the pair of rails 61 and 62 needs to use a material having high wear strength for conveyance of the conveyance body 70. However, a material having conductivity that prevents the microwave from traveling is not preferable. In general, it is desirable to select a material resistant to high temperatures from Al ₂ O ₃ , mullite, cordierite, Si ₃ N ₄ and their composites. In addition, when using SiC having conductivity with high wear strength, it can be used if it is edged with a non-conductive material at regular intervals in order to reduce obstruction of traveling waves.

Further, the transport body 70 on which the heating object W is loaded is appropriately selected according to the heating object W from SiC, Si ₃ N ₄ , alumina, mullite, cordierite, and composites thereof. Then, in order to prevent reaction during the firing of the heating object W, it may be used carrier 70 imparted with co one coating, such as ZrO _2, Al ₂ 0 _3.

The high temperature holding unit 53 that maintains a predetermined high temperature is constituted by four unit waveguides 30 _-3 ,..., 30 _-6 .
FIG. 11 is a cross-sectional view of the main part showing the configuration of the high-temperature holding unit of the continuous firing apparatus in the embodiment of the present invention. FIG. 12 is a characteristic diagram showing temperature characteristics of the continuous firing apparatus in the embodiment of the present invention.

Here, the high temperature holding unit 53 propagates the microwave generated by the microwave generation source 1 through the unit waveguides 30 ₋₃ ,..., 30 ₋₆ with the characteristics of the waveguide. At the same time, it heats the object to be heated W while moving it in the traveling direction of the traveling wave, and functions to maintain the specific maximum heating temperature. _-1 and 30 _-2 consumes a lot of energy as it travels through 30-2, so the temperature tends to drop.

Therefore, even if the microwave energy is lowered by the radiation heating body 21 made of the SiC plate which closes the thickness of the conveyance plate 71 made of the SiC plate of the conveyance body 70 and the upper opening of the conveyance guide 60 and is heated by the microwave energy. In this configuration, the firing temperature is maintained. Here, the radiant heater 21, but the energy P absorbed in a dielectric is large, or use a material having a large dielectric loss factor epsilon _r · tan [delta dielectric, to increase the volume V _S of the dielectric Or used as a heat source for the heating object W.

The material of the radiant heater 21 is appropriately selected from SiC, Al ₂ 0 ₃ , mullite, cordierite, and composites thereof in accordance with the heating object W.

The temperature characteristics of the continuous firing apparatus in the present embodiment are such that the microwave generated by the microwave generation source 1 has a peak of 1200 ° C. in the unit waveguide 30 _-2 when the radiant heater 21 is not used. The temperature distribution when set to is as shown in FIG. At this time, the microwave output was 4.5 KW.
Here, the use of radiant heater 21, since the energy P absorbed in the radiant heating body 21 is present, the unit waveguide 30 _-3 subsequent high temperature holding part 53, the heating and thermal effect by radiant heat The temperature is gradually lowered and a predetermined temperature is maintained.

Here, furthermore, as an embodiment in the case of maintaining the holding temperature after reaching the predetermined high temperature peak value (1200 ° C.) in the continuous baking apparatus of the present embodiment, the temperature rising introduction part 52 overlapping with the former is used. And the high temperature holding | maintenance part 53 is explained in full detail using FIG. 13 thru | or FIG.
13 is a cross-sectional view taken along the cutting line BB of FIG. 7, and FIG. 14 is a cross-sectional view taken along the cutting line CC of FIG. 7 and the internal structure of the high temperature holding portion.

In the figure, a pair of rails 61 and 62 as a conveyance guide 60 is made of a bar material having a substantially C-shaped cross section formed of Al ₂ O ₃ , and is a radiant heat for holding a gap arranged at predetermined intervals. The radiant heating element 22 holds the bar guides 60 having a substantially C-shaped cross section so that the openings of the bar guides face each other. The radiant heater 21 and the radiant heater 22 are configured by disposing the radiant heater 21 and the radiant heater 22 inside the heat insulating materials 31 and 32 shown in FIGS. The heat insulating materials 31 and 32 that are the same in the upper and lower sides and the heat insulating materials 33 and 34 that are the same on the left and right are encased in a radiant heating body 22 for spacing and radiant heat made of a SiC plate that absorbs relatively large microwave energy. The conveyance guide 60 is arranged so that the conveyance guide 60 and the radiation heating body 22 do not move easily so as not to move relative to each other. Furthermore, the radiant heating body 21 made of a SiC plate that absorbs relatively large energy is disposed in the opening above the conveyance guide 60. As a result, the radiant heater 21 is also heated, and the heating object W on the upper surface of the transport body 70 can be secondarily heated by the radiant heat (radiant heat) from the radiant heater 22 and the radiant heater 21.

By setting it as such a structure, the radiation heating body 21 and the radiation heating body 22 are heated to predetermined | prescribed temperature by the magnitude | size of a dielectric loss factor besides the heating target W heated with a microwave. The temperatures of the object to be heated W and the radiant heating body 21 and the radiant heating body 22 depend on the magnitude of their dielectric loss factors. That is, most of the energy P absorbed by the dielectric is absorbed in the waveguide array 50 and released, so that the energy P is
P = (ε ₀ · ε ^" · ω · E ² · V _S ) ^1/2
Thus, the dielectric loss factor (ε ^″ = ε _r · tan δ) of the dielectric, the volume, etc., are raised to the 1/2 power. Therefore, the rising temperature of the radiant heating body 21 and the radiant heating body 22 or the rise of the heating object W The temperature can be set arbitrarily.
In addition, when energy P entering and exiting and its temperature change is T, and heat capacity is C,
P = T ・ C
Holds. Therefore, an arbitrary temperature increase and temperature change can be achieved by the temperature change T and the heat capacity C.

Further, the conveyance guide 60 composed of the pair of rails 61 and 62 of the above embodiment, the conveyance plate 71 composed of a SiC plate between the conveyance guides 60, and the guide 72 composed of a bar material having a substantially C-shaped cross section at both ends thereof. The carrier 70 configured to be attached is not limited to this structure when the present invention is carried out, and can also be configured as follows.
FIG. 15 is an explanatory diagram of the conveyance guide and the conveyance body in case 1 of the present embodiment corresponding to the cross-sectional view of the main part of FIG.
As shown in FIG. 15, the high-temperature holding unit 53 (see FIG. 1) of the continuous baking apparatus of the present embodiment is particularly intended to use the radiant heat of the radiant heating body 22 and the radiant heating body 21. The structure is used as a cover radiant heating body 25 made of a SiC plate that is relatively large in absorption of microwave energy so as to cover the heating object W on the upper surface of the transport body 70, that is, having a large dielectric loss factor. If it is configured to move integrally with 70, the thermostatic effect is remarkably stabilized.
At this time, the mass of the cover radiant heating element 25 made of a SiC plate that absorbs relatively large microwave energy is determined by the temperature of the heating object W and the high-temperature atmosphere time.

FIG. 16 is an explanatory diagram of the conveyance guide and the conveyance body in case 2 of the present embodiment corresponding to the cross-sectional view of the main part of FIG.
As shown in FIG. 16, in the unit waveguide 30 of the temperature rising introduction part 52 and / or the high temperature holding part 53 (see FIG. 1) of the continuous firing apparatus of the present embodiment, the same upper and lower heat insulating materials 31, 32 are provided. And the right and left heat insulating materials 33 and 34 are disposed. The conveyance guide 60 is set so as to be at the center position of the cross section of the waveguide main body 39 so that the conveyance guide 60 is not easily moved relatively by the gap holding heat-resistant body 35. That is, the flange 41F side of the unit waveguide 30 _-1 to the lower surface position is set to be the central position of the cross section of the waveguide body 39 at the position of the flange 42R of the unit waveguide 30 _-2. For this reason, the thickness of the heat insulating material applied under the space-holding heat-resistant body 35 is gradually adjusted to be thicker. Moreover, the conveyance body 71 comprised by attaching the conveyance board 71 which consists of a SiC board, and the guide 72 which consists of a bar material with a substantially C-shaped cross section to the both ends is not different from the thing of FIG. 13 thru | or FIG.
In the present embodiment, the object to be heated by the radiation heater 26 made of a SiC plate having a large dielectric loss factor and the radiation heater for a cover 25 made of a SiC plate having a large dielectric loss factor placed on the conveyance plate 71 made of a SiC plate. Wrapping the object W.

About the temperature rise introduction part 52 and the high temperature holding part 53 (see FIG. 1) of the continuous firing apparatus of the present embodiment, it is intended to use the radiant heat of the radiant heater 26 and the cover radiant heater 25. With this configuration, the microwave energy absorption that covers the heating object W on the upper surface of the transport body 70 is relatively large, that is, the radiation heating body 26 and the cover radiation heating body 25 made of a SiC plate having a large dielectric loss factor. In addition, by adopting a configuration that moves integrally with the conveyance body 70, the constant temperature effect during conveyance is remarkably stabilized. At this time, the masses of the radiant heating body 26 and the cover radiant heating body 25 made of an SiC plate that absorbs relatively large microwave energy are determined by the temperature of the heating object W and the high-temperature atmosphere movement time during transportation.
That is, in this embodiment, the conveyance body 70 can be implemented as a radiant heating body made of a SiC plate having a large dielectric loss factor.

  As described above, the firing temperature and the high temperature holding temperature are included in the waveguide composed of the unit waveguide 30 of the temperature rising introduction unit 52 and / or the high temperature holding unit 53 (see FIG. 1) of the continuous baking apparatus of the present embodiment. The radiant heating body composed of the radiant heating body 21, the radiant heating body 22, the radiant heating body 26, the cover radiant heating body 25 and the like having a predetermined dielectric loss factor value is set along the transport guide 60 in which the transport body 70 moves. Arranged. Therefore, the radiant heating body composed of the radiant heating body 21 and the radiant heating body 22, the radiant heating body 26, the cover radiant heating body 25, and the like having a predetermined dielectric loss factor value is moved along the transport guide 60 in which the transport body 70 moves. By disposing, the radiation heating body 21 including the radiation heating body 21, the radiation heating body 22, the radiation heating body 26, the cover radiation heating body 25, and the like having a predetermined dielectric loss factor value serves as a heat source. It can be heated with radiant heat. Further, the ratio of the power consumption between the heating object W and the radiation heating body 21 such as the radiation heating body 21, the radiation heating body 22, the radiation heating body 26, and the cover radiation heating body 25 having a predetermined dielectric loss factor value is changed. Thus, the heating object W can be brought into an arbitrary heating state by the set direct heating.

  Further, in the waveguide composed of the unit waveguides 30 composed of the unit waveguides 30 of the temperature raising introduction unit 52 and / or the high temperature holding unit 53 (see FIG. 1) of the continuous firing apparatus of the present embodiment, heating is performed. In order to ensure the firing temperature and firing time of the object W, the radiation heating body 21 and the radiation heating body 22 having a predetermined dielectric loss factor value disposed in the waveguide composed of the carrier 70 and the unit waveguide 30 are used. The radiant heating body composed of the radiant heating body 26 and the cover radiant heating body 25 is arranged inside the heat insulating body composed of the same top and bottom heat insulating materials 31 and 32 and the left and right heat insulating materials 33 and 34.

  By arranging the radiant heating body 21, the radiant heating body 22, the radiant heating body 26, the cover radiant heating body 25 and the like having a predetermined dielectric loss factor value along the transport guide 60 on which the transport body 70 moves, a predetermined The radiant heating body 21, the radiant heating body 22, the radiant heating body 26, the cover radiant heating body 25, and the like having values of the dielectric loss ratios serve as heat sources, and the heating object W can be heated with radiant heat. Therefore, similarly to the radiant heating body including the radiant heating body 21, the radiant heating body 22, the radiant heating body 26, the cover radiant heating body 25, and the like, the transport body 70 is a dielectric having a specific dielectric loss factor, The heating object W can be heated with radiant heat using the carrier 70 having the value of the dielectric loss factor as a heat source. In addition, by changing the ratio of power consumption between the dielectric having a predetermined dielectric loss factor value and the heating target W, the heating target W is arbitrarily heated by the set direct heating and radiation (radiation) heating. State.

  FIG. 17 is an explanatory view of the conveyance guide and the conveyance body in case 3 of the present embodiment corresponding to the cross-sectional view of the main part of FIG. 18 is an explanatory diagram of the conveyance guide and the conveyance body in case 4 of the present embodiment corresponding to the cross-sectional view of the main part of FIG. 10, and FIG. 19 is case 5 of the present embodiment corresponding to the cross-sectional view of the main part of FIG. FIG. 20 is an explanatory view of the transport guide and the transport body in case 6 of the present embodiment corresponding to the cross-sectional view of the main part of FIG.

In FIG. 17, the transport body 70 is configured by a bottomed box-shaped transport box body 71 </ b> A made of an SiC plate made of SiC material and having a thickness of about 1 to 10 mm, and the heating object W is difficult to fall. . In addition, an opening 38 </ b> A having a substantially rectangular cross section is formed in the space-holding heat-resistant body 35 </ b> A disposed in the space surrounded by the heat insulating materials 31 and 32 and the heat insulating materials 33 and 34. The spacing heat-resisting body 35A is made of a good dielectric material having a small dielectric loss factor, made of Al ₂ O ₃ material having a very small energy loss that does not generate heat due to microwave energy, and the bottom surface thereof is a smooth surface. The conveyance guide 60 is configured by a smooth bottom surface.
By the pusher function of the feeding mechanism 100, the transport box 71A is continuously pressed on the smooth bottom surface of the transport guide 60, and the transport guide 60 moves the transport body 70 in the transport direction while being guided by the side wall of the heat-resisting body 35A. Guide along. Therefore, since the transport body 70 is constituted by the transport box body 71A, when the heating object W to be baked is frequently changed, it is suitable for loading and transporting the heating object W that is likely to roll. .

In FIG. 18, the conveyance body 70 is comprised by the plate-shaped conveyance board 71B which consists of a SiC plate formed in thickness about 1-10 mm with SiC material, and the heating target W can be hold | maintained planarly. . In addition, the spacing heat-resistant body 35B disposed in the space surrounded by the heat insulating materials 31 and 32 and the heat insulating materials 33 and 34 has an opening 38B having a substantially rectangular cross section. The spacing heat-resistant body 35B is made of a good dielectric having a low dielectric loss factor, and a conveyance guide 60 is disposed on the bottom surface of the opening 38B. The conveyance guide 60 includes a base 66B and a pair of parallel-shaped triangular prism-shaped rails 61B disposed on the base 66B.
When the plate-like transport plate 71B is continuously pressed on the pair of rails 61B of the transport guide 60 by the pusher function of the feed mechanism 100, the transport body 70 is guided while being guided by the side wall of the spacing heat-resistant body 35B. Guide along the transport direction. Therefore, since the conveyance body 70 is constituted by the conveyance plate 71B, the heating object W to be baked is plate-shaped and is suitable for the one that changes in size. Moreover, since the contact resistance is small, mechanical energy loss can be reduced.

In FIG. 19, the conveyance body 70 is comprised by the plate-shaped conveyance board 71C which consists of a SiC board, and the heating target W can be hold | maintained planarly. In addition, a guide 72C is provided on the opposite side of the transport plate 71C to eliminate the possibility of the heating object W falling from the side parallel to the traveling direction. The spacing heat-resistant body 35 </ b> C disposed in the space surrounded by the heat insulating materials 31 and 32 and the heat insulating materials 33 and 34 has an opening 38 </ b> C having a substantially rectangular cross section. The spacing heat-resisting body 35C is made of a good dielectric material having a small dielectric loss factor, made of a material with very little energy loss that does not generate heat by microwave energy, and its bottom surface is a smooth surface. A conveyance guide 60 is configured.
By the pusher function of the feed mechanism 100, the conveyance guide 60 moves along the conveyance direction in the conveyance direction while being guided by the side wall of the spacing heat-resistant body 35C while being supported by the guide 72C on the opposite side on the smooth bottom surface of the conveyance guide 60. I will guide you. Since the guide 72C moves on the smooth bottom surface of the conveyance guide 60, it can be moved with the contact resistance reduced. Moreover, since the conveyance body 70 is comprised by 71 C of conveyance conveyance boards, it becomes suitable when the heating target W to be baked changes frequently.

In FIG. 20, the conveyance body 70 is comprised by the plate-shaped conveyance board 71D, and the heating target W can be hold | maintained planarly. In addition, a guide 72D is provided on the opposite side of the conveyance plate 71D made of an SiC plate to eliminate the possibility that the heating object W will fall from the side in the traveling direction. The spacing heat-resistant body 35D disposed in the space surrounded by the heat insulating materials 31 and 32 and the heat insulating materials 33 and 34 has an opening 38D having a substantially rectangular cross section. The spacing heat-resisting body 35D is made of a good dielectric material having a small dielectric loss factor, made of a material with very little energy loss that does not generate heat by microwave energy, and a pair of parallel formed half-sides on the bottom surface. It is composed of a columnar rail 61D. The upper surface of the semi-cylindrical rail 61D is a smooth surface, and the conveyance guide 60 is constituted by a pair of rails 61D.
While being supported by the pair of rails 61D of the transport guide 60 by the pusher function of the feed mechanism 100, the transport guide 60 is guided along the transport direction by the transport guide 60 while being guided by the side walls of the heat-resisting body 35D for maintaining the distance. Guide the move. Therefore, since the conveyance body 70 is comprised by the conveyance conveyance board 71D and moves on the smooth bottom face of the conveyance guide 60 with the rail 61D, it can move in the state which made contact resistance small.

  As described above, the conveyance guide 60 composed of the pair of rails 61 and 62 of the above embodiment, the conveyance plate 71 between the conveyance guides 60, and the guide 72 composed of a bar material having a substantially C-shaped cross section are attached to both ends thereof. When carrying out the present invention, the configured conveyance body 70 can also be implemented as in the embodiment shown in FIGS. 13 to 20 and Examples 1 to 6. Further, the conveyance guide 60 and the conveyance body 70 can be used in any combination, and the components of the conveyance guide 60 and the conveyance body 70 can be arbitrarily combined.

Next, the remaining microwave absorption unit 54 will be described. The microwave energy that has not been consumed up to the high temperature holding unit 53 is absorbed by the remaining microwave absorption unit 54.
FIG. 21 is a cross-sectional view of the main part showing the configuration of the remaining microwave absorbing portion of the continuous firing apparatus in the embodiment of the present invention.

The remaining microwave absorbing portion 54 is composed of two unit waveguides 30 _-7 and 30 _-8 .
The two unit waveguides 30 _-7 and 30 _-8 of the waveguide array 50 function as the residual microwave absorbing portion 54, absorb the attenuated traveling wave without reflecting it, and further attenuate and consume the traveling wave. Let For this reason, the remaining microwave absorber 54 is provided with two microwave absorbers 80U and a microwave absorber 80D at the upper and lower portions of the conveyance guide 60 set at the inner center of the waveguide row 50. . The microwave absorber 80U is inclined so as to be in close contact with the conveyance guide 60 from the upper surface on the inner surface of the waveguide row 50, and the microwave absorber 80D is in close contact with the conveyance guide 60 from the lower surface on the inner surface of the waveguide row 50. It is inclined so that.

  The microwave absorber 80U and the microwave absorber 80D use a plate material made of SiC having high microwave energy absorption characteristics. However, when the present invention is implemented, the microwave absorber 80U and the microwave absorber 80D are not limited to a plate material made of SiC. The material can be selected from materials that absorb and consume microwave energy such as carbon and ferrite.

The microwave absorber 80U and the microwave absorber 80D have a width corresponding to the inner upper surface and the lower surface of the waveguide line 50, and are in contact with the inner upper surface or the inner lower surface on the flange 47F side of the unit waveguide _30-7 . and position, such that the contact position to the conveying guide 60 in the flange 48R side of the unit waveguide 30 _-8, are disposed inclined so as to continuously vary.
The microwave absorber 80U and the microwave absorber 80D are not easily moved into the two unit waveguides 30 _-7 and 30 _-8 by the interval holding member 36 arranged at predetermined intervals. Has been.

In the two unit waveguides 30 _-7 and 30 _{-8 of the} waveguide array 50, the microwave absorber 80U and the microwave absorber 80D are materials that absorb and consume microwave energy. Wave energy is converted to heat. Therefore, heat radiation characteristics are provided without providing a heat insulating material throughout. The holding member 36 of the microwave absorber 80U and the microwave absorber 80D is basically a heat insulating material, but is configured to dissipate heat from the waveguide body 39 by not being continuously installed.

According to the experiments by the inventors, the electric power absorbed and consumed by the microwave energy by the microwave absorber 80U and the microwave absorber 80D is several percent or less, and from the unit waveguides _30-7 and _30-8. It was confirmed that the heating object W was gradually cooled without being rapidly cooled by natural heat radiation from the outer surface. Further, in this embodiment, two unit waveguide 30 _-7 of the waveguide array 50, 30 _-8, although arranged microwave absorber 80U and the microwave absorber 80D, the When the invention is carried out, it may be disposed only in one unit waveguide 30 _-7 or unit waveguide 30 _-8 for the purpose of absorbing and consuming microwave energy. Conversely, the microwave absorber 80U and the microwave absorber 80D may be disposed in three or more unit waveguides 30, or may be repeatedly provided in a plurality of stages.

In the present embodiment, the microwave absorber 80U and the microwave absorber 80D are disposed above and below the internal opening of the waveguide body 39 of the transport guide 60. However, when the present invention is implemented, A microwave absorber may be disposed on the left and right sides of the internal opening of the waveguide main body 39. In this case, not to arrange so that the contact position to the conveying guide 60 in the flange 48R side of the unit waveguide 30 _-8, provided a notch in the contact position to the conveying guide 60 From the viewpoint of preventing microwave leakage, it is desirable to use two microwave absorbers that avoid the gap between the conveyance guides 60.

The materials of the microwave absorber 80U and the microwave absorber 80D are desired to have particularly large energy P absorbed by the dielectric. Therefore, by increasing the dielectric loss factor epsilon _r · tan [delta dielectric, which increases the volume V _S of the dielectric. Specifically, it is appropriately selected from SiC, carbon, ferrite and the like having high microwave absorption characteristics. Further, their weight is appropriately selected in order to completely prevent microwave leakage. Of course, the form is not limited to a plate-like material, and may be a thread-like or cotton-like substance.

Next, the cooling processing unit 55 of the present embodiment will be described.
Conveying guide passing through the flange 48R side of the unit waveguide 30 _-8 of the waveguide array 50 60 has a configuration unit for waveguide 30 cooling _-9 and / or at room temperature as required.
FIG. 22 is a cross-sectional view of the main part showing the configuration of the cooling processing unit of the continuous baking apparatus in the embodiment of the present invention, and FIG. 23 is the main part showing the configuration of the carry-out port of the continuous baking apparatus in the embodiment of the present invention. FIG. 24 is a front view of the main part showing the configuration of the cooling processing part of the continuous firing apparatus in the embodiment of the present invention.

That is, in order to gradually cool the heating target W to the extent that the unit waveguides 30 _-7 and 30 _-8 are not damaged by rapid cooling, and when the cooling temperature is taken up manually, there is no possibility of burns. to, after passing through the unit waveguide 30 _-9 as a cooling processing unit 55, as shown in FIG. 22, discharged from the discharge port 15 of the sealing member 16 attached to the flange 49R of the unit waveguide 30 _-9 Then, it is led to the outside air cooling unit 56 of the cooling processing unit 55 that further lowers the temperature at room temperature, where it is cooled to a temperature conscious of the next step.

In the cooling processing unit 55, natural cooling may be performed at room temperature like the outside air cooling unit 56, or forced cooling may be performed by water cooling or air cooling. Further, like the unit waveguide 30 _-9 may use one or more unit waveguide 30 to the cooling. In order to efficiently lower the temperature of the object to be heated W by the cooling processing unit 55, it is desirable to provide a cover that covers the conveyance guide 60 and to circulate or blow cooling gas into the cover.

In the cooling unit 55 of the present embodiment, the conveyance guide 60 which has passed through the flange 49R side of the unit waveguide 30 _-9 of the waveguide array 50 passes through the sealing member 16 attached to the flange 49R, It is fixed to a conveyance base 65 made of a metal plate bent at both ends, and is movable on a gantry 90 (not shown in FIG. 22) and an auxiliary gantry 92 thereon to a specific position in the room.

Next, the feed mechanism 100 of the present embodiment will be described.
25 to 27 are main part front views showing the configurations of the feed mechanisms of three types of continuous firing apparatuses in the embodiment of the present invention.
The feed mechanism 100 in FIG. 25 that guides the transport body 70 in the continuous firing apparatus of the present embodiment from the transport inlet 13 to the transport outlet 15 of the waveguide line 50 guided by the transport guide 60 pushes out the transport body 70. It is a pusher function. The feed mechanism 100 includes a plurality of stages of the transport body 70, and the guide 72 of the transport body 70 is fitted to the transport guide 60 of the transport inlet 13 of the waveguide line 50. It has a mechanism to push. At this time, the interval between the conveyance plate 71 and the adjacent conveyance plate 71 is determined by the assembly position with the guide 72 that is in continuous contact.
The feed mechanism 100 shown in FIG. 25 has been described as an example using a pair of rails 61 and 62 as the transport guide 60, but other methods may be employed when implementing the present invention.

In the continuous baking apparatus according to the present embodiment shown in FIG. 26, rollers 60a that continuously rotate independently are arranged as the conveyance guide 60A, and the conveyance body 70 is moved on the rollers 60a. In this embodiment, the roller 60a as the conveyance guide 60A is configured such that the right and left side surfaces are restricted from moving, and can be continuously moved at a predetermined interval. The roller 60a is made of a good dielectric material having a small dielectric loss factor, and is made of an Al ₂ O ₃ material that does not generate heat due to microwave energy, that is, an Al ₂ O ₃ material that has a very small energy loss absorbed by the dielectric material. In the present embodiment, the supply waveguide 20 for introducing the microwave from the lower side of the waveguide 50 is provided with the carry-in port 13 to the waveguide line 50 being the upper side. The feed mechanism 100 in FIG. 22 that sequentially moves from the carry-in port 13 to the carry-out port 15 of the waveguide line 50 has a pusher function for pushing out the carrier 70. The feeding mechanism 100 includes a plurality of stages of the conveyance bodies 70, and has a mechanism for supplying the conveyance bodies 70 from the carry-in entrance 13 of the waveguide line 50 and pushing the conveyance bodies 70 on the rollers 60a. At this time, the interval between the conveyance plate 71 and the adjacent conveyance plate 71 is determined by the assembly position with the guide 72 that is in continuous contact as in the former case.

  In the continuous baking apparatus of the present embodiment shown in FIG. 27, a rotating drum 60c driven by a motor 60e of a belt conveyor and a conveying belt 60b hung on the rotating drum 60d are disposed as a conveying guide 60B, and the conveying body 70 is moved to the conveying drum 60c. It moves while placed on the conveyor belt 60b. In this embodiment, the conveyance belt 60b as the conveyance guide 60B is configured such that its left and right side surfaces are restricted from moving, and is continuously movable at a predetermined interval. The conveyor belt 60b is made of a good dielectric material and does not generate heat due to microwave energy, that is, a ceramic plate having a small dielectric loss factor, that is, a very small energy loss absorbed by the dielectric material, and the like. The shafts are connected to each other. In the present embodiment, the carry-in port 13 to the waveguide line 50 is on the lower side, and the microwave is introduced from the upper side of the waveguide 50 through the supply waveguide 20. The feed mechanism 100 in FIG. 27 that sequentially moves from the carry-in port 13 to the carry-out port 15 of the waveguide line 50 is continuously moved (rotated).

  The feed mechanism 100 includes a plurality of stages of the transport bodies 70, which are placed on the transport belt 60 b of the transport inlet 13 of the waveguide line 50, and move the transport plate 71 in this state. At this time, the interval between the conveyance plate 71 and the adjacent conveyance plate 71 is determined by the assembly position and the placement position with the guide 72 that is in continuous contact, as in the former.

  As described above, the pusher function and the roller conveyor feed mechanism 100 basically includes the conveyance guides 60, 60 </ b> A, 60 </ b> B and the conveyance body 70 on which the heating object W is loaded, the pusher function that pushes the conveyance body 70, or the conveyance body 70. It consists of the structure of feed mechanisms 100, such as a belt conveyor which mounts and moves.

  The continuous firing apparatus of the present embodiment has basically been described as a firing apparatus in the atmosphere. However, when the present invention is carried out, nitrogen, nitrogen + hydrogen, argon + nitrogen, etc. are added to the waveguide array 50. It can be used as an inert atmosphere baking apparatus by adding atmospheric gas or the like. In this case, the atmosphere gas to be inserted into the waveguide array 50 is fired at a slightly positive pressure from the atmospheric pressure, and a vacuum replacement chamber is provided in front of and behind the waveguide array 50 to completely remove the atmosphere and the atmosphere gas. Either case of substitution and firing in the atmosphere can be handled.

  In particular, a firing test of a capacitor was performed as the continuous firing apparatus of the present embodiment. The firing temperature was 1200 ° C., and the firing ability was fired at a processing rate of 0.3 to 1 hour in two rows of waveguides 50 and a total of 6 kg of the heating object W and the carrier 70. The microwave output at this time can process 10 kW and 5 × 5 mm products in two series at 700 pieces / minute, and the firing cost is about ½ that of the conventional firing furnace. It was.

  As described above, the continuous firing apparatus according to the present embodiment is a waveguide array formed by connecting a plurality of waveguides to microwave traveling waves generated by the microwave generation source 1 that generates microwaves. The object to be heated W propagated in the length direction of 50 and continuously carried into the waveguide is transported and heated in the length direction of the waveguide while changing from a weak electromagnetic field strength position to a strong position. A continuous firing apparatus for firing, which prevents heat radiation from the inside of the waveguide array 50 disposed on the inner wall surface of the heating and firing section including the temperature rise introduction section 52 and the high temperature holding section 53 of the waveguide array 50. Heat guides 31 to 34 and a waveguide line 50 formed by connecting a plurality of waveguides are arranged in the waveguide from the carry-in port 13 to the carry-out port 15 formed in the waveguide line 50, and guide the inside of the waveguide line 50. A guide 60 that guides the heating object W of the waveguide 50 And a conveying body 70 such as a belt conveyor that conveys in the vertical direction, and the heating object W is moved to a position where the electromagnetic field strength is strong while moving the heating object W in the traveling direction of the traveling wave to raise the heating and baking temperature. .

  In this way, the microwave generation source 1 that generates the microwave, the microwave generated by the microwave generation source 1 is confined, the traveling wave is propagated with the characteristics of the waveguide, and the contained heating object W is A waveguide array 50 that is heated and fired while moving in the traveling direction of the traveling wave, and a supply waveguide 20 that confines the microwave generated by the microwave generation source 1 and propagates it to the waveguide array 50 are provided. In the wave tube array 50, the heating object W is taken in from a position where the electromagnetic field intensity is low in the direction perpendicular to the length direction of the waveguide array 50, and the heating object W is moved to a position where the electromagnetic field intensity is strong. The heating and firing temperature of the heating object W is increased.

  Therefore, when firing is performed in the waveguide array 50, when the heating of the heating object W is suddenly started with high energy, the heating object W is locally dried, partially cracked, or damaged. However, in the present embodiment, the object to be heated W is taken from the vicinity of the wall surface of the waveguide line 50 having a weak electromagnetic field, and then gradually led to the center of the waveguide line 50 having a strong electromagnetic field. Therefore, there is little shock given to the heating object W. Further, since the object to be heated W is taken in from the vicinity of the wall surface of the waveguide line 50 having a weak electromagnetic field, there is almost no electromagnetic wave leaking from the waveguide line 50. And since the temperature rise is not controlled by the load sharing in the waveguide line 50, there is no waste in power consumption. Furthermore, since there is almost no generation of the reflected wave in the waveguide array 50, the microwave oscillator constituting the microwave generation source 1 is not damaged by the reflected wave.

  More specifically, the continuous firing apparatus is dramatically reduced in size, and there is no need to stack the heating object W in multiple stages as in a conventional furnace. As a result, the firing efficiency of the small electronic component is improved several times, and further, the atmosphere heating of the radiation heating body 21, the radiation heating body 22, the cover radiation heating body 25, etc. can be added, so that the firing is performed in the air. Without being limited to ceramic electronic parts, it can also be used for ceramic electronic parts fired in atmosphere firing and automobile parts that are metal parts. Further, the heating process is one in which the internal heating effect of the microwave is utilized to the maximum, and the heating object W is taken in from the position where the electromagnetic field strength of the waveguide array 50 is weak, and the heating object W has the electromagnetic field strength. In the operation of moving to a strong position, since the heating object W repeatedly carried in passes through the same process, all the heating objects W are heated and fired in the same process, and the characteristic values of materials such as electronic parts are improved. The effect of doing can be expected.

In addition, an apparatus including a feeding mechanism 100 that sequentially guides the conveyance body 70 from the carry-in port 13 to the carry-out port 15 of the waveguide line 50 that is guided by the conveyance guide 60 and includes a plurality of waveguides is manufactured continuously. By incorporating it into the line, labor costs can be reduced.
Moreover, the heat insulating materials 31-34 which prevent the heat radiation from the inside of the waveguide row | line | column 50 arrange | positioned on the inner wall face of the heating firing part which consists of the temperature rising introduction part 52 and the high temperature holding | maintenance part 53 obtain required high temperature. Since it is sufficient to use a heat insulating material only when desired, it is possible to deal with the other capturing section 51, residual microwave absorbing section 54, and cooling processing section 55.

  The continuous firing apparatus of the present embodiment takes in the heating object W from a position where the electromagnetic field strength of the waveguide line 50 is weak, and moves the heating object W to a position where the electromagnetic field intensity is strong. Since it is taken in from the lower surface side of the row 50 and moved to the center of the cross section of the waveguide row 50, the design freedom is increased above the waveguide row 50, and the microwave is propagated to the waveguide row 50. The position setting is suitable for the one in which the supply waveguide 20 is arranged on the upper part.

  On the contrary, in the case of taking in from the upper surface side of the waveguide row 50 and moving it to the center of the cross section of the waveguide row 50, it is gradually lowered from the upper direction of the waveguide row 50 to the center. The position setting is suitable for the one in which the supply waveguide 20 that propagates the microwave to the tube row 50 is disposed below.

Since the temperature lowering process after heating and baking by the waveguide array 50 of the continuous baking apparatus of the present embodiment is a high temperature holding process and a cooling process, baking is performed at a predetermined baking temperature for a specific time, and then a cooling process is performed. Thus, the fired product can be directly taken out, and the firing cooling management becomes easy.
However, when the present invention is carried out, it is possible to omit the temperature lowering process after the heating and firing by the waveguide line 50 and perform the temperature management with another apparatus. That is, in the waveguide line 50 in the case of implementing the present invention, only heating and firing can be performed. Moreover, it can also be set as the isothermal process after heat-firing. Furthermore, it may be a constant temperature treatment and cooling treatment after heating and baking, and a cooling treatment after heating and baking. In any case, after heating and baking, it is only necessary to perform a process that matches the subsequent purpose.

  Since the supply waveguide 20 of the continuous firing apparatus of the present embodiment includes the tuner 9, it branches from a single microwave generation source 1 to a plurality of waveguide rows 50. The supply waveguide 20 can control the distribution of the branched microwaves to a desired value. Therefore, when the output of the microwave oscillator of the microwave generation source 1 is large, a plurality of waveguide rows 50 can be arranged to increase the production capacity. Two series and four series can be used.

  The operation of taking the heating object W from the position where the electromagnetic field strength of the waveguide array 50 of the continuous firing apparatus of the present embodiment is weak and moving the heating object W to the position where the electromagnetic field intensity is strong is as follows. The angle is adjusted by the angle adjusting adapters 66 and 67 on the flanges 41F and 42R side connecting the 50 to each other, and the heating object W is moved to a position where the electromagnetic field strength is strong. Therefore, the relative movement direction of the waveguide array 50 and the heating object W is changed only by the angle adjustment adapters 66 and 67 on the flanges 41F and 42R side connecting the unit waveguides 30 to each other. There is no need to change the shape of the formed waveguide, and an inexpensive standard product can be used as the waveguide array 50. Of course, the flanges 41F and 42R can also have the functions of the angle adjustment adapters 66 and 67.

In continuous firing device in the above embodiment, among the heating profile and cooling profile, heating profile unit waveguide 30 _-2 drilled the measurement hole in the waveguide body 39 of the 30 _-3, the radiation temperature The position is controlled so as to reach the maximum temperature by a meter, and can have arbitrary temperature characteristics in cooperation with the microwave generation source 1.
In particular, it is clear that the heating object W is supplied from the upper part or the lower part of the waveguide line 50, so that the electromagnetic field density of the microwave is strongest at the center in the cross section of the waveguide body 39. The heating object W is inserted from the upper part or the lower part of the low-density waveguide main body 39, and as the heating object W is gradually moved to the central part, a temperature rising profile is formed to raise the temperature, and heating is performed. The object W can be heated at a constant temperature increase rate to the target maximum temperature at the moving inclined portion. Further, the temperature lowering profile can arbitrarily have temperature holding and temperature lowering characteristics depending on the combination of the thickness of the conveying plate 71, the radiant heaters 21 and 22, and the cover type radiant heater 25. The waveguide line 50 having the parallel part parallel to the reference floor behind the inclined part reaches the maximum temperature at the highest position of the inclined part by the unit waveguides 30 _-2 and 30 _{-3 as} the temperature raising part 52, Then, by carrying the high temperature holding portion 53 by the parallel portion holding the maximum temperature, that is, the unit waveguides 30 _-4 ,..., 30 _-6 , a holding time at the target maximum temperature is given. In addition, the heating object W that does not require the holding time can be cooled.

Furthermore, in the continuous firing apparatus of the above embodiment, as an example in which the heating object W is inserted from a position where the electromagnetic field strength is weak and moved to the center position where the electromagnetic field strength is strong, two unit waveguides 30 _{− are used. 1} and 30 _-2 are linearly changed, but a plurality of stepwise changes can be made. For example, two unit waveguides 30 _-1 and 30 _-2 are halved in length, and an angle adjustment adapter of θ / 2 is disposed between the flanges between them, resulting in four broken line changes. it can.
In this way, by arbitrarily setting the angle θ of the angle adjustment adapter, an arbitrary plurality of relative changes are obtained, and the heating object W is inserted from a position where the electromagnetic field strength is weak, and the central position where the electromagnetic field strength is strong. Can be moved to.

  Furthermore, in the continuous firing apparatus of the above embodiment, the waveguide composed of the waveguide array 50 and the supply waveguide 20 in which a plurality of microwave traveling waves generated by the microwave generation source 1 are connected in series is Are connected by flanges 41F, 41R, 42F, 42R,..., 49F, 49R, but may be joined by other connecting means such as direct welding when the present invention is carried out. In any case, the waveguide for heating and firing the object to be heated W accommodated in the waveguide composed of the waveguide array 50 is composed of two or more supply waveguides 20 to be supplied thereto. It only has to be.

Although various embodiments of the present invention have been described, the modified E bend 10 of the present embodiment has a function of confining a microwave and propagating it to the waveguide array 50 as in the case of the E bend 4. What is necessary is just to have the function which takes in the heating target W in the waveguide row | line | column 50 from a position with a weak electromagnetic field intensity | strength using bending. That is, the modified E bend 10 of the present embodiment confines the microwave supplied from the microwave generation source and propagates the traveling wave with the characteristics of the waveguide, and heats and heats the contained heating object W. Anything is acceptable. The waveguide array 50 is heated by inserting the heating object W from a position where the electromagnetic field strength is low in the direction perpendicular to the length direction and moving the heating object W to a central position where the electromagnetic field intensity is strong. The heating and firing temperature of the object W is raised, the heating object W is taken from the position where the electromagnetic field strength is weak in the waveguide array 50, and the heating object W is gradually moved to a position where the electromagnetic field strength is strong. I can do it.
Therefore, for example, in addition to the function of confining the microwave in the form of an H bend and propagating it to the waveguide row 50, the waveguide row 50 is moved from a position where the electromagnetic field strength is weakened by using bending. It can also be configured to have a function of taking in. That is, the modified E bend 10 of the present embodiment can be a modified H bend.

FIG. 28 is a side view (a), a front view (b), and a front view (c) of only an opening showing a modified H bend of the continuous firing apparatus in the embodiment of the present invention.
The take-in portion 51 using the modified E bend 10E of the present embodiment in FIG. 1 can be a modified H bend 10H that uses a tangent line that contacts a straight line on the bottom surface on the flange 19H side of the bend in FIG. . Compared to the inner dimension of the flange 19H at the inlet 13H of the heating target W of the waveguide line 50 (inner dimension obtained by rotating the waveguide body 39 shown in FIG. 8 of the waveguide line 50 by 90 degrees). The carry-in port 13H shown in FIG. 28 has a small length of about 1/3 and a width of about 1/8, an opening area of 1/10 to 1/20 or less, and a protrusion 11H having a quarter wavelength or more. And an opening 12H is formed at the end thereof. The opening 12H of the protrusion 11H serving as the carry-in port 13H for the heating target W of the waveguide line 50 has a height of 60 to 100 mm, a width of 10 to 20 mm, and a wall thickness of 1 to 10 mm. From the functional part of the waveguide main body 39 that confines and propagates the microwave as in the E-bend 4 in FIG. 1, that is, from the flange 19H of the modified H-bend 10H, the maximum position (lower side) is 300 mm, and the minimum position. It is set so as to protrude about 100 mm at (upper side). This indicates that the protruding portion 11H protrudes from the functional portion of the waveguide by a quarter wavelength or more. As described above, the modified H bend 10H constituting the capturing unit 51 has a function of confining the microwave and propagating it to the waveguide line 50, and uses the bending to make the heating object W have a weak electromagnetic field strength. What is necessary is just to have the function to take in in the waveguide row | line | column 50 from a position.

Furthermore, when implementing this invention, it is not limited to the deformation | transformation E bend 10 and the deformation | transformation H bend of the said embodiment, It can also be set as the deformation | transformation E corner or deformation | transformation H corner using a corner.
FIG. 29 is a side view (a), a front view (b), and a front view (c) of only an opening showing a modified E corner of the continuous firing apparatus in the embodiment of the present invention. It is the side view (a) which shows the deformation | transformation H corner of the continuous baking apparatus in embodiment, a front view (b), and a front view (c) only of opening.
In FIG. 29, the taking-in portion 51 using the modified E bend 10 of the embodiment of FIG. 1 can be a modified E corner 10E that uses a tangent line that contacts a straight line on the bottom surface on the flange 19E side inside the bend. . Compared to the inner dimension of the flange 19E (the inner dimension of the waveguide body 39 shown in FIG. 8 of the waveguide line 50), the carry-in port 13E shown in FIG. The mouth 13E has a small length of about 1/8, a width of about 1/3, an opening area having a cross-sectional area of 1/10 to 1/20 or less, and forms a protrusion 11E having a quarter wavelength or more. An opening 12E is formed at the end. The only difference is that a basic configuration is used in which the E bend of the modified E bend 10 of the embodiment of FIG. 1 is replaced with an E corner.

30, the intake 51 using the modified E bend 10 of the embodiment of FIG. 1 has a tangent line in which the opening 12 h contacts a straight line on the side surface (the right side in FIG. 30B) on the flange 19 h side of the bend. The modified H corner 10h can be used. Compared to the inner dimension of the flange 19h at the inlet 13h of the heating target W of the waveguide line 50 (inner dimension obtained by rotating the waveguide body 39 shown in FIG. 8 of the waveguide line 50 by 90 degrees). The carry-in port 13h shown in FIG. 30 has a small length of about 1/3 and a width of about 1/8, an opening area of 1/10 to 1/20 or less, and a protrusion 11h having a quarter wavelength or more. And an opening 12h is formed at the end thereof. The basic configuration in which the basic configuration of the E bend of the modified E bend 10 of the embodiment of FIG. 1 is replaced with an H corner is used.
The opening 12h of the projecting portion 11h serving as the carry-in port 13h for the heating target W of the waveguide line 50 has a height of 60 to 100 mm, a width of 10 to 20 mm, and a thickness of 1 to 10 mm. From the functional part of the waveguide main body 39 that confines and propagates the microwave as in the E-bend 4 in FIG. 1, that is, from the flange 19h of the modified H corner 10h, the maximum position (lower side) is 300 mm, and the minimum position. It is set so as to protrude about 100 mm at (upper side). This indicates that the protruding portion 11h protrudes from the functional portion of the waveguide by a quarter wavelength or more. As described above, the modified H corner 10h constituting the capturing unit 51 has a function of confining the microwave and propagating it to the waveguide line 50, and makes the heating object W have a weak electromagnetic field strength by using bending. What is necessary is just to have the function to take in in the waveguide row | line | column 50 from a position.
In addition, the carry-in port 13h of the embodiment shown in FIG. 30 is provided at the upper and lower centers of the side surface on the flange 19h side (the right side of FIG. 30 (b)). The object to be heated W is conveyed.

Thus, when the microwave energy supplied from the supply waveguide 20 is on the left side or the right side, it can be supplied from the protrusion 11 provided on the right side or the left side of the modified E bend 10. In the embodiment shown in FIG. 1, an E bend is used as the deformed E bend 10, but it can be a deformed H bend 10h using an H bend, or a deformed E corner 10E using a corner. Or it can also be set as the deformation | transformation H corner 10h.
However, in the above embodiment, the heating object W is taken in from a position where the electromagnetic field intensity is perpendicular to the length direction of the waveguide array 50, and the heating object W is moved to a position where the electromagnetic field intensity is strong. Thus, in order to raise the heating and firing temperature of the heating object W, the deformation E bend 10, the deformation H bend 10H, the deformation E corner 10E, and the deformation H corner 10h are used, but the unit waveguide 30 is used. You can also.

FIG. 31 is an explanatory view showing the arrangement of the capturing section using the unit waveguide of the continuous firing apparatus in the embodiment of the present invention.
FIG. 31 shows the arrangement of the capturing section 51 using the unit waveguides 30 _-1a , 30 _-2 , and 30 _-3, and the capturing section 51 of the present embodiment includes the unit waveguide 30 _-1a. On the other hand, a projecting portion 11a having a cross-sectional area of 1/10 to 1/20 or less and a quarter wavelength or more is formed, and an opening 12a is formed at the end thereof. That is, compared with the waveguide main body 39 shown in FIG. 8 of the waveguide row 50, the carry-in entrance 13a forms a protruding portion 11a having a length that is about 1/8 and a width that is about 1/3. It branches off from the waveguide _30-1a . This branch position is not limited to a specific position of the unit waveguide _30-1a .
The carry-in port 13a for the heating object W of the waveguide line 50 is provided on an extension line on the inner lower surface of the waveguide body 39 so that the heating object W performs a linear motion in the horizontal direction.
The arrangement angle between the waveguide main body 39 and the carry-in port 13a can be set only by the angle adjustment adapters 66a and 67a on the flanges 41F and 42R side.
As described above, when the present invention is carried out, the heating object W is taken in from the position where the electromagnetic field strength is low in the direction perpendicular to the length direction of the waveguide line 50, and the heating object W is made to have the electromagnetic field strength. Any structure that raises the heating and baking temperature of the object to be heated W by moving it to a strong position can be adopted.

The angle adjustment adapters 66 and 67 maintain the linearity of the unit waveguide 30 and move the object to be heated W from a position where the electromagnetic field strength is weak to a strong position. The angle adjusting adapters 66 and 67 may be omitted, and the unit waveguide 30 may be formed to have an angle. In any case, in the waveguide array 50, the heating object W is taken in from the position where the electromagnetic field intensity is low in the direction perpendicular to the length direction of the waveguide array 50, and the heating object W is placed at the position where the electromagnetic field intensity is high. It is only necessary that the heating and baking temperature of the object to be heated W can be increased by moving the object to.
Similarly, the feed mechanism 100 can be similarly implemented as a pusher function, a roller conveyor function, and a belt conveyor function.

FIG. 1 is a conceptual diagram conceptually showing the overall configuration of a continuous firing apparatus in an embodiment of the present invention. FIG. 2 is a side view showing a specific configuration showing the overall configuration of the continuous firing apparatus in the embodiment of the present invention. FIG. 3 is a front view showing a supply waveguide of the continuous firing apparatus in the embodiment of the present invention. FIG. 4 is a perspective view of a main part showing a supply waveguide of the continuous firing apparatus in the embodiment of the present invention. FIG. 5 is a side view (a), a front view (b), and a front view (c) of only an opening showing a modified E bend of the continuous firing apparatus in the embodiment of the present invention. FIG. 6 is a front view of the carry-in port of the modified E bend of the continuous firing apparatus in the embodiment of the present invention. FIG. 7 is a side view of the main part showing the configuration of the temperature raising introduction part of the continuous firing apparatus in the embodiment of the present invention. FIG. 8 is a cross-sectional view of an essential part taken along the cutting line AA in FIG. FIG. 9 is a cross-sectional view of an essential part taken along a cutting line BB in FIG. FIG. 10 is a cross-sectional view of a principal part taken along the cutting line CC in FIG. FIG. 11 is a cross-sectional view of the main part showing the configuration of the high-temperature holding unit of the continuous firing apparatus in the embodiment of the present invention. FIG. 12 is a characteristic diagram showing temperature characteristics of the continuous firing apparatus in the embodiment of the present invention. FIG. 13 is a cross-sectional view of the main part corresponding to FIG. 9 showing the configuration of the high-temperature holding unit of the continuous firing apparatus in the embodiment of the present invention. FIG. 14 is a cross-sectional view of the main part corresponding to FIG. 10 showing the configuration of the high-temperature holding unit of the continuous firing apparatus in the embodiment of the present invention. FIG. 15 is an explanatory diagram of the conveyance guide and the conveyance body in case 1 of the present embodiment corresponding to the cross-sectional view of the main part of FIG. FIG. 16 is an explanatory diagram of the conveyance guide and the conveyance body in case 2 of the present embodiment corresponding to the cross-sectional view of the main part of FIG. FIG. 17 is an explanatory view of the conveyance guide and the conveyance body in case 3 of the present embodiment corresponding to the cross-sectional view of the main part of FIG. FIG. 18 is an explanatory diagram of the conveyance guide and the conveyance body of Example 4 of the present embodiment corresponding to the cross-sectional view of the main part of FIG. FIG. 19 is an explanatory view of the conveyance guide and the conveyance body of case 5 of the present embodiment corresponding to the cross-sectional view of the main part of FIG. FIG. 20 is an explanatory view of the conveyance guide and the conveyance body in case 6 of the present embodiment corresponding to the cross-sectional view of the main part of FIG. FIG. 21 is a cross-sectional view of the main part showing the configuration of the remaining microwave absorbing portion of the continuous firing apparatus in the embodiment of the present invention. FIG. 22 is a cross-sectional view of the main part showing the configuration of the cooling processing unit of the continuous firing apparatus in the embodiment of the present invention. FIG. 23 is a front view of a principal part showing the structure of the carry-out port of the continuous firing apparatus in the embodiment of the present invention. FIG. 24 is a front view of relevant parts showing the configuration of the cooling processing part of the continuous firing apparatus in the embodiment of the present invention. FIG. 25 is a front view of an essential part showing the configuration of the feed mechanism of the continuous firing apparatus in the embodiment of the present invention. FIG. 26 is a main part front view showing another configuration of the feed mechanism of the continuous firing apparatus in the embodiment of the present invention. FIG. 27 is a front view of relevant parts showing another configuration of the feed mechanism of the continuous firing apparatus in the embodiment of the present invention. FIG. 28 is a side view (a), a front view (b), and a front view (c) of only an opening showing a modified H bend of the continuous firing apparatus in the embodiment of the present invention. FIG. 29 is a side view (a), a front view (b), and a front view (c) with only an opening showing a modified E corner of the continuous firing apparatus in the embodiment of the present invention. FIG. 30 is a side view (a), a front view (b), and a front view (c) of only an opening showing a modified H corner of the continuous firing apparatus in the embodiment of the present invention. FIG. 31 is an explanatory view showing the arrangement of the capturing section using the unit waveguide of the continuous firing apparatus in the embodiment of the present invention.

Explanation of symbols

W Heating object 1 Microwave generation source 10 (10R, 10L) Deformed E bend 13 Carry-in port 15 Carry-out port 20 Supply waveguides 21 and 22 Radiation heating body 25 Cover type radiation heating body 30 Unit waveguides 31 to 34 Heat insulation Material 35 Spacing-holding heat-resistant body 50 Waveguide array 51 Capture portion 52 Temperature rise introduction portion 53 High temperature retention portion 54 Residual microwave absorption portion 55 Cooling processing portion 60 Transport guides 61 and 62 A pair of rails 66 and 67 Angle adjustment adapter 70 Carrier 80U, 80D Microwave absorber 100 Feed mechanism

Claims (7)

A take-in part that takes the heating object into the waveguide while changing the position of the electromagnetic field from a weak position to a strong position;
A temperature raising introduction part that conveys and heats the object to be heated taken in the taking-in part in a length direction of the waveguide while changing from a position having a weak electromagnetic field strength to a strong position;
A heat insulating material for preventing heat dissipation from the inside of the waveguide disposed on the wall surface of the waveguide contributing to at least heating;
A conveyance guide disposed in the waveguide from a carry-in port to a carry-out port of the waveguide;
A transport body guided by the transport guide and configured to transport the heating object in the length direction of the waveguide;
A traveling wave of microwaves generated by a microwave generation source is propagated in the length direction of the waveguides connected in series, and the heated object carried into the waveguide is positioned at a low electromagnetic field strength. A continuous baking apparatus characterized in that it is heated and fired while being conveyed in the length direction of the waveguide while changing from a strong position to a strong position. A take-in part that takes the heating object into the waveguide while changing the position of the electromagnetic field from a weak position to a strong position;
A temperature raising introduction part that conveys and heats the object to be heated taken in the taking-in part in a length direction of the waveguide while changing from a position having a weak electromagnetic field strength to a strong position;
A heat insulating material for preventing heat dissipation from the inside of the waveguide disposed on the wall surface of the waveguide contributing to at least heating;
A conveyance guide disposed in the waveguide from a carry-in port to a carry-out port of the waveguide;
A transport body guided by the transport guide and transporting the heating object in the length direction of the waveguide;
A feed mechanism that sequentially moves the transport body guided by the transport guide from a carry-in port to a carry-out port of the waveguide;
A traveling wave of microwaves generated by a microwave generation source is propagated in the length direction of the waveguides connected in series, and the heated object carried into the waveguide is positioned at a low electromagnetic field strength. A continuous baking apparatus characterized in that it is heated and fired while being conveyed in the length direction of the waveguide while changing from a strong position to a strong position.   The inlet of the waveguide of the taking-in part is set to a position having a low energy density, the heating object is inserted, and the heating object is moved to a position having a high energy density. Item 3. A continuous firing apparatus according to Item 2.   The radiation heating body having a predetermined dielectric loss factor value for setting a firing temperature and a high temperature holding temperature is disposed in the waveguide along the transport guide along which the transport body moves. The continuous firing apparatus according to any one of claims 1 to 3.   In order to ensure the firing temperature and firing time of the object to be heated, a radiant heating body having a predetermined dielectric loss factor disposed in the carrier and the waveguide is disposed inside the heat insulator. The continuous firing apparatus according to any one of claims 1 to 4, wherein:   6. The waveguide inlet of the take-in portion has a cross-sectional area in a direction perpendicular to the length direction of the waveguide of 1/10 or less. The continuous baking apparatus as described in. The waveguide entrance of the take-in part is an opening at the end formed by forming a projection part of 1/4 wavelength or more in a cross section of 1/10 or less on a linear extension line of a bend or a corner. The continuous firing apparatus according to any one of claims 1 to 6.

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