JP2006268032A - Drawing device and calibrating method for drawing device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a drawing device in which an alignment camera for photographing an alignment mark of an object to be drawn can be calibrated by a drawing positioning function as to a position shift in an optical-axis rotational direction and which can improve correction precision of a drawing position shift on the object to be drawn, and a calibrating method for the drawing device. <P>SOLUTION: A plurality of calibration reference marks 77 are photographed within a camera visual field 26G of a CCD camera. A tilt quantity (θz) of the CCD camera 26 in the optical axis rotational direction can be calculated from θz=tan-1((By-Ay)/(Bx-Ax)), where (Ax, Ay) and (Bx, By) are X coordinates and Y coordinates of A and B as calibration reference marks 77 within the camera visual field 26G. A rotating means is driven based upon the calculated θz, which is corrected to correctly calibrate an alignment function. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

  The present invention relates to a lithography apparatus and a calibration method for a lithography apparatus, and more particularly to a calibration method for an exposure apparatus.

  Conventionally, in an exposure apparatus that performs scanning exposure on a photosensitive material such as a substrate, in order to accurately align the exposure position in the XY direction with respect to the photosensitive material, the exposure position provided on the photosensitive material prior to exposure is adjusted. The alignment mark used as a reference is photographed with an alignment camera such as a CCD camera, and the alignment is performed to align the exposure position with the appropriate position based on the mark measurement position (reference position data) obtained by this photographing. Since the exposure apparatus uses a plurality of types of photosensitive materials having different sizes and alignment mark positions as exposure targets, for example, in the scanning direction, the image can be taken even when the alignment mark is repositioned in a direction orthogonal to the scanning direction. The ball screw is guided by a guide rail extending along the orthogonal direction (X direction) It is driven by a drive mechanism, so that it moves and positions located at any position over the entire area in the X direction dimension of the object to be exposed. The position of the alignment camera is detected and measured by position detection means such as a linear scale, and the above-described alignment is performed with reference to the position (see, for example, Patent Document 1).

  Further, with respect to such an alignment function (exposure position alignment function), calibration of each part related to alignment measurement is performed at the time of manufacturing, maintenance, or the like in order to guarantee the accuracy.

  Various techniques relating to the calibration of the alignment function have been proposed for exposure apparatuses of a type in which an image is scanned and exposed by irradiating a photosensitive material moved in the sub-scanning direction while performing main scanning with a laser beam.

  For example, in the alignment calibration of the alignment scope, a device that calibrates the position of the alignment scope that measures the printed circuit board prior to performing a predetermined process on the printed circuit board mounted on the mounting table by the processing unit. , The reference mask on which the reference pattern is formed is provided on the mounting table, the alignment scope is moved to the reference pattern at a predetermined position, and then the alignment scope is based on the amount of positional deviation between the intersection of the reference patterns and the center of the alignment scope field of view. There is a technique in which the position calibration of the alignment scope is easily and highly accurately performed with a simple configuration by performing the position calibration (see, for example, Patent Document 2).

  However, in the above-described digital scanning exposure method and the conventional scanning type exposure apparatus that performs main scanning with laser light, the alignment camera has an inclination (θz rotation) in the optical axis rotation direction in alignment prior to exposure, and an alignment mark is also provided. When moving to the shooting position, the inclination itself slightly changes due to errors in the accuracy of the parts constituting the camera drive mechanism and the assembly accuracy described above.

  For this reason, the photographed alignment marks and coordinates deviate from their original positions by the amount of rotation of the camera. Since this positional deviation in the direction of rotation of the optical axis cannot be calibrated only by position calibration in the XY directions, an error occurs in the alignment measurement result.

However, the techniques disclosed in the above-mentioned Patent Documents 1 and 2 do not consider the influence of the positional deviation of the alignment camera in the optical axis rotation direction. Therefore, the alignment adjustment or the calibration of the alignment function is performed using these techniques. Even if the exposure is performed, the exposure position deviation cannot be corrected with high accuracy.
Japanese Patent Application Laid-Open No. 8-222511 JP 2000-329523 A

  In consideration of the above facts, the present invention makes it possible to calibrate the displacement of the alignment camera in the optical axis rotation direction for photographing the alignment mark of the drawing object in the drawing positioning function, and to correct the drawing position deviation with respect to the drawing object. It is an object of the present invention to provide a drawing apparatus and a drawing apparatus calibration method capable of improving the image quality.

  The drawing apparatus calibration method according to claim 1, performs drawing position alignment on the drawing object based on reference position data obtained by reading a drawing position reference mark provided on the drawing object by a reading unit, and A calibration method for calibrating a drawing alignment function of a drawing apparatus for drawing according to image data while relatively moving a drawing object in a direction substantially parallel to a drawing surface of the drawing object by a moving unit, Prior to reading the drawing position reference mark by the reading means, the amount of rotational deviation about the vertical direction and the plane substantially parallel to the drawing surface of the drawing object relative to the detection reference of the reading means is defined as a detection reference. And detecting by reading at least one mark provided on the calibration reference plate.

  In the invention having the above-described configuration, it is possible to calibrate the positional deviation of the alignment camera in the optical axis rotation direction, and it is possible to improve the correction accuracy of the drawing position deviation with respect to the photosensitive material.

  The drawing apparatus calibration method according to claim 2 is characterized in that the drawing is exposure in which a photosensitive material is exposed by a light beam modulated in accordance with image data.

  In the invention having the above-described configuration, it is possible to calibrate the positional deviation of the alignment camera in the optical axis rotation direction, and it is possible to improve the correction accuracy of the exposure position deviation with respect to the photosensitive material.

  According to a third aspect of the present invention, there is provided a calibrating method for a drawing apparatus, wherein at the time of the calibration, a correction unit corrects a rotational shift amount of the reading unit.

  In the invention having the above-described configuration, the correction of the reading means can be performed correctly by correcting the rotational shift amount of the reading means by the correcting means at the time of calibration.

  According to a fourth aspect of the present invention, there is provided a drawing apparatus calibration method comprising a motor for rotating the reading unit in a rotation direction about an axis perpendicular to the scanning plane and a driving force transmission unit.

  In the invention with the above configuration, the reading means can be calibrated correctly by correcting the rotational deviation of the reading means by the motor driving force transmitting means at the time of calibration.

  The drawing apparatus calibration method according to claim 5 is characterized in that the correction means corrects the amount of rotation deviation by correcting the image information read by the reading means.

  In the invention having the above-described configuration, the correction of the reading means can be performed correctly by correcting the rotational shift amount of the reading means by the correcting means at the time of calibration.

  A calibration method for a drawing apparatus according to claim 6, wherein a calibration mark whose shape or arrangement is known in advance is read by an alignment camera, and the calibration mark based on the alignment camera is read from the read image. The tilt is detected, and the tilt around the optical axis of the alignment camera is calibrated based on the tilt.

  In the invention with the above-described configuration, the tilt around the optical axis of the alignment camera can be calibrated, and the drawing position deviation correction accuracy can be improved.

  The calibration method for a drawing apparatus according to claim 7, wherein the calibration is performed by reflecting the tilt around the optical axis of the alignment obtained from the tilt of the calibration mark in the coordinates of the image acquired by the alignment camera. It is characterized by performing.

  In the invention with the above configuration, it is possible to calibrate the inclination of the alignment camera around the optical axis, and it is possible to improve the correction accuracy of the drawing position deviation on the image.

  The drawing apparatus calibration method according to claim 8, wherein the position of the alignment camera in the one direction is acquired by reading the calibration mark with the alignment camera movable in at least one direction. .

  In the invention with the above-described configuration, the tilt around the optical axis of the alignment camera can be calibrated, and the drawing position deviation correction accuracy can be improved.

  The drawing apparatus calibration method according to claim 9 uses the alignment camera in which the position of the alignment camera in the one direction and the inclination of the calibration mark with respect to the alignment camera are at the same position. It is characterized by acquiring.

  In the invention with the above-described configuration, the tilt around the optical axis of the alignment camera can be calibrated, and the drawing position deviation correction accuracy can be improved.

  According to a tenth aspect of the present invention, there is provided a method for calibrating a drawing apparatus, wherein the alignment target after the calibration is subjected to alignment measurement, and drawing is performed while performing alignment correction based on the measurement result.

  In the invention having the above-described configuration, the tilt around the optical axis of the alignment camera can be calibrated, and drawing can be performed while correcting the drawing position deviation.

  A calibration method for a drawing apparatus according to claim 11, wherein a calibration mark provided in the drawing apparatus is read by a reading mechanism, and based on a result of the reading, a surface substantially parallel to the drawing surface of the drawing target object is read. A rotation misalignment amount of the reading mechanism around a vertical axis is detected, and the drawing alignment function is calibrated based on the detection result.

  The drawing apparatus calibration method according to claim 12 is characterized in that the drawing alignment function is calibrated by correcting the reading mechanism.

  The drawing apparatus calibration method according to claim 13 is characterized in that the drawing alignment function is calibrated by correcting the reading result of the drawing alignment mark by the reading mechanism.

  The calibrating method for a drawing apparatus according to claim 14, wherein the calibration mark has a vertical direction about an axis with respect to a surface substantially parallel to the drawing surface of the drawing apparatus based on the position data of the read calibration mark. The rotation amount with respect to the predetermined position is detected, and the rotation shift amount with respect to the predetermined position of the reading mechanism is detected based on the detection result.

  The drawing apparatus calibration method according to claim 15, wherein at least one of shape data of the calibration mark and arrangement data of the calibration mark with respect to a surface substantially parallel to a drawing surface of the drawing apparatus is the drawing data. It is recognized by the apparatus.

  A calibration method for a drawing apparatus according to claim 16, wherein a calibration mark in which at least one of shape data and arrangement data with respect to a scanning plane of the drawing apparatus is previously recognized by the drawing apparatus is read by an alignment camera, From the data, the rotation amount of the calibration mark around the axis perpendicular to the scanning plane in the scanning plane is detected based on at least one of the shape data and the arrangement data recognized in advance, and the detection result The rotation amount of the alignment camera around the optical axis with respect to a predetermined position is acquired, and the drawing position alignment function of the drawing apparatus is calibrated based on the acquisition result.

  The calibration method for a drawing apparatus according to claim 17 is characterized in that the coordinate data of the alignment mark acquired by the alignment camera is corrected based on the rotation amount around the optical axis of the acquired alignment camera.

  The drawing apparatus calibration method according to claim 18, wherein position data of the alignment camera in the one direction is obtained by reading the calibration mark with the alignment camera movable in at least one direction. To do.

  The drawing apparatus according to claim 19 is a drawing apparatus having a drawing position alignment function, and performs drawing position alignment with respect to the drawing object based on reference position data of the drawing object, and the drawing apparatus includes a reading mechanism. A calibration reference unit, and a control unit, the control unit holds calibration reference data of the calibration reference unit, and the calibration reference unit data acquired by the reading mechanism; Based on the calibration reference data, a rotation amount from a predetermined position around the axis in a direction perpendicular to a surface substantially parallel to the drawing surface of the reading mechanism is calculated, and the reference of the drawing object acquired by the reading mechanism The position data is calibrated based on the rotation amount.

  The drawing apparatus according to claim 20, wherein the calibration reference data is at least one of shape data of the calibration reference part and arrangement data of the calibration reference part with respect to a plane substantially parallel to the drawing surface. It is characterized by being.

  Since the present invention has the above-described configuration, it is possible to calibrate the positional deviation in the optical axis rotation direction of the alignment camera for photographing the alignment mark of the drawing object in the drawing alignment function, and the correction accuracy of the drawing position deviation with respect to the drawing object The drawing apparatus and the calibration method of the drawing apparatus that can improve the image quality can be provided.

<Outline of device>
FIG. 1 shows an exposure apparatus according to the first embodiment of the present invention.

  As shown in FIG. 1, the exposure apparatus 10 includes a rectangular thick plate-shaped installation base 18 supported by four legs 16. Two guides 20 extend along the longitudinal direction on the upper surface of the installation table 18, and a rectangular flat plate-like stage 14 is provided on the two guides 20. The stage 14 is arranged so that the longitudinal direction thereof is directed to the extending direction of the guide 20, and is supported by the guide 20 so as to be able to reciprocate on the installation table 18. Move (in the direction of arrow Y in FIG. 1).

  On the upper surface of the stage 14, a rectangular plate-shaped photosensitive material 12 serving as an exposure object is placed in a state of being positioned at a predetermined placement position by a positioning unit (not shown). A plurality of grooves (not shown) are formed on the upper surface (photosensitive material placement surface) of the stage 14, and the photosensitive material 12 is placed on the stage 14 by applying a negative pressure to the grooves by a negative pressure supply source. It is adsorbed and held on the upper surface. In addition, the photosensitive material 12 is provided with a plurality of alignment marks 13 indicating the reference of the exposure position. In this embodiment, the alignment marks 13 constituted by circular through holes are each in the vicinity of the four corners of the photosensitive material 12. A total of four are arranged.

  A U-shaped gate 22 is provided at the center of the installation table 18 so as to straddle the movement path of the stage 14. Both ends of the gate 22 are fixed to both side surfaces of the installation base 18, and a scanner 24 for exposing the photosensitive material 12 is provided on one side across the gate 22, and the photosensitive material 12 is provided on the other side. An alignment unit 100 including a plurality (two in the figure) of CCD cameras 26 for photographing the alignment mark 13 provided on the camera is provided.

  Further, detection means for detecting the above-mentioned positional deviation by detecting the irradiated beam position and its light amount on the downstream side (upstream side in the exposure direction) of the alignment measurement direction in the moving direction (arrow Y direction) of the stage 14. The detection means includes a reference plate 70 attached to the downstream edge of the stage 14 in the alignment measurement direction, and a photo sensor (not shown) movably attached to the back side of the reference plate 70. )). A calibration reference mark 77 is provided on the reference plate 70, and calibration work for the alignment function is performed using the calibration reference mark 77 provided on the reference plate 70 at the time of manufacture or maintenance of the exposure apparatus 10.

  In other words, in order to calibrate the exposure position alignment function of the exposure apparatus 10, a position that can be read by the CCD camera 26 before the alignment mark 13 provided on the photosensitive material 12 as a reference of the exposure position is read by the CCD camera 26. A reference plate 70 having a plurality of calibration reference marks 77 arranged at a predetermined interval along the moving direction of the CCD camera 26 is disposed, and at least one of the plurality of calibration reference marks 77 is arranged as described above. The position difference data between the imaging optical axis (lens optical axis) and the calibration reference mark 77 is read based on the position data of the CCD camera 26 obtained by the reading with the CCD camera 26 arranged at the position where the alignment mark 13 is read. Based on the above, the calibration data is calculated, and the calibration data is reflected in the reference position data.

  As a result, it is possible to calibrate the exposure alignment function whose accuracy is influenced by the attitude change factor associated with the movement of the CCD camera 26, and the correction accuracy of the exposure position deviation with respect to the photosensitive material 12 can be improved. Each time the camera is moved, the position of the camera can be accurately measured using the calibration reference mark 77.

  2 and 3 show an alignment unit according to the first embodiment of the present invention.

  As shown in FIG. 2, the alignment unit 100 includes a rectangular unit base 102 attached to the gate 22. A pair of guide rails 104 are extended on the camera mounting surface side of the unit base 102 along a direction (arrow X direction) orthogonal to the moving direction (arrow Y direction) of the stage 14. Is slidably guided by the pair of guide rails 104 and driven by a drive source such as a ball screw mechanism 106 prepared individually and a stepping motor (not shown) for driving the mechanism, It moves independently in the direction orthogonal to the moving direction. Each CCD camera 26 is arranged in such a posture that the lens portion 26B provided at the tip of the camera body 26A is directed downward and the lens optical axis is substantially vertical, and a ring is provided at the tip of the lens portion 26B. A strobe light source (LED strobe light source) 26C is attached.

  When each CCD camera 26 images the alignment mark 13 of the photosensitive material 12, the CCD camera 26 is moved in the direction of the arrow X by the drive source and the ball screw mechanism 106, and is arranged at a predetermined imaging position, that is, the lens optical axis. However, the strobe light source 26C is disposed at a timing when the alignment mark 13 reaches a predetermined photographing position or at regular intervals. The alignment mark 13 is photographed by causing the reflected light from the top surface of the photosensitive material 12 of the stroboscopic light emitted to the photosensitive material 12 to be input to the camera body 26A through the lens portion 26B.

  Further, as shown in FIG. 3, the CCD camera 26 includes a rotating means 26D, and the angle can be adjusted in the rotation direction (θz) around the optical axis (z axis). The rotating means 26D includes an internal motor 26E, and corrects the tilt amount in the optical axis rotation direction obtained by detecting the tilt amount (θz rotation) in the optical axis rotation direction of the CCD camera 26 described later. The motor 26E rotates the camera body 26A via the gear 26F to correct the tilt amount in the optical axis rotation direction.

  The drive device for the stage 14, the scanner 24, the CCD camera 26, and the drive source for moving the CCD camera 26 are connected to a controller 28 for controlling them. The controller 28 controls the stage 14 to move at a predetermined speed during the exposure operation of the exposure apparatus 10 to be described later, and the CCD camera 26 is placed at a predetermined position and at a predetermined timing or continuously. The 12 alignment marks 13 are controlled to be photographed, and the scanner 24 is controlled to expose the photosensitive material 12 at a predetermined timing.

  When the exposure operation of the exposure apparatus 10 is started, the drive unit is controlled by the controller 28, and the stage 14 that has adsorbed the photosensitive material 12 on the upper surface thereof is upstream of the alignment measurement direction in the movement direction (arrow Y direction) along the guide 20. Starts moving at a constant speed from the downstream to the downstream. Each CCD camera 26 is controlled and operated by the controller 28 in synchronization with the start of the movement of the stage or at a timing just before the leading edge of the photosensitive material 12 reaches just below each CCD camera 26.

  When the photosensitive material 12 passes below the CCD camera 26 as the stage 14 moves, alignment measurement by the CCD camera 26 is performed.

  In this alignment measurement, first, when the two alignment marks 13 provided near the corner on the downstream side (front end side) of the photosensitive material 12 in the movement direction reach directly below each CCD camera 26 (on the optical axis of the lens). Each CCD camera 26 images the alignment mark 13 at a predetermined timing, and the image data including the image data including the reference position data in which the reference of the exposure position is indicated by the alignment mark 13 is obtained by the controller 28. It outputs to CPU which is a data processing part. After the alignment mark 13 is photographed, the stage 14 resumes moving downstream.

  When a plurality of alignment marks 13 are provided along the movement direction (scanning direction) as in the photosensitive material 12 of this embodiment, the next alignment mark 13 (upstream side (rear end side) in the movement direction is used. When the two alignment marks 13) provided in the vicinity of the corners of () reach directly below each CCD camera 26, each CCD camera 26 similarly shoots the alignment mark 13 at a predetermined timing and takes the image data. Output to the CPU of the controller 28.

  The CPU determines the mark position and pitch between marks in the image determined from the input image data (reference position data) of each alignment mark 13, the position of the stage 14 when the alignment mark 13 is photographed, and the CCD camera 26. From this position, the deviation of the mounting position of the photosensitive material 12 on the stage 14, the deviation of the inclination of the photosensitive material 12 with respect to the moving direction, the dimensional accuracy error of the photosensitive material 12, etc. are ascertained by arithmetic processing. The appropriate exposure position for the exposed surface is calculated. Then, at the time of image exposure by the scanner 24, correction control (alignment) is performed in which the control signal generated based on the image data of the exposure pattern stored in the memory (not shown) is adjusted to the appropriate exposure position to perform image exposure. .

When the photosensitive material 12 passes under the CCD camera 26, the alignment measurement by the CCD camera 26 is completed, and then the stage 14 is driven in the reverse direction by the driving device and moves along the guide 20 in the exposure direction. Then, the photosensitive material 12 moves below the scanner 24 to the downstream side in the exposure direction as the stage 14 moves, and when the image exposure area on the exposed surface reaches the exposure start position, each exposure head 30 of the scanner 24 emits a light beam. And image exposure on the exposed surface of the photosensitive material 12 is started.
<Calibration of alignment function>
In the exposure apparatus 10 of this embodiment, the CCD camera 26 undergoes posture changes (rolling, pitching, and yawing) as it moves, and the optical axis center of the photographing lens deviates from the normal position in the state where it is disposed at the photographing position. Therefore, due to the influence, even if the exposure position is corrected using the alignment function and image exposure is performed, the exposure position may deviate from the appropriate position and exceed the allowable range.

  In order to calibrate the alignment function whose accuracy is affected by the cause of the optical axis deviation caused by the change in the attitude of the CCD camera 26, a calibration reference mark 77 provided on the reference plate 70 is provided at the time of manufacturing or maintenance of the exposure apparatus 10. Use the calibration function for the alignment function.

  However, even when the calibration operation is performed, the above-described misalignment in the optical axis rotation direction of the alignment camera cannot be eliminated. That is, the deviation (rotation) around the optical axis of the CCD camera 26 is different from the posture change (rolling, pitching, and yawing) accompanying the movement of the CCD camera 26 and cannot be calibrated by the above calibration work. These coordinates are deviated from their original positions by the amount of rotation of the CCD camera 26 around the optical axis.

  Therefore, in the first embodiment of the present invention, as shown in FIG. 4, accurate calibration is performed by detecting the amount of tilt (θz rotation) in the optical axis rotation direction.

  FIG. 4 shows a method for detecting the rotation amount of the alignment camera according to the first embodiment of the present invention.

  As shown in FIG. 4, the calibration reference mark 77 provided on the calibration reference plate 70 is photographed by the CCD camera 26, and the tilt amount (θz rotation) of the CCD camera 26 in the optical axis rotation direction is detected.

  Specifically, as shown in FIG. 4A, first, the CCD camera 26 is moved to a position (X direction) where the alignment mark 13 can be read as described above, and then a plurality of images are placed in the camera visual field 26G of the CCD camera 26. The calibration reference mark 77 is photographed. This processing may be performed at the same time as photographing for position measurement in the X direction.

Assuming that the calibration reference marks 77 are A and B, and the X and Y coordinates in the camera field of view 26G are (Ax, Ay) and (Bx, By), the tilt amount (θz) of the CCD camera 26 in the optical axis rotation direction. Can be calculated by the following equation. That is, θz = tan-1 ((By-Ay) / (Bx-Ax))
The alignment function can be correctly calibrated by driving the motor 26E shown in FIG. 3 based on θz calculated by the above method and correcting θz.

  Further, instead of rotating the CCD camera 26 by the rotating means 26D of FIG. 3, the θz which varies by correcting the image in the visual field of the CCD camera 26 based on the θz variation data at the time of calibration of the alignment function. May be corrected by software. Furthermore, the above two methods may be used in combination.

  Alternatively, as shown in FIG. 4B, only one calibration reference mark 77 may be photographed to calculate θz. That is, the shape of the calibration reference mark 77 is a non-perfect circle and asymmetric in the rotational direction, and θz is calculated by image processing.

  Specifically, as shown in FIG. 4B, the calibration reference mark 77 is provided with a straight line portion extending in the X direction (or Y direction), and the straight line portion corresponds to the X direction (or Y direction) of the camera visual field 26G. The alignment function can be calibrated by setting the angle formed by θz to θz, as in the above method. Although this method is inferior in measurement accuracy as compared with the above method, if one calibration reference mark 77 is photographed, θz can be calculated, so that the degree of freedom of the measurement location can be increased.

  Further, the above-described embodiment of the present invention has been described by taking an exposure apparatus that performs exposure on a photosensitive material as an example. You can also.

It is a perspective view which shows the exposure apparatus which concerns on the 1st form of this invention. It is a perspective view which shows the alignment unit which concerns on the 1st form of this invention. It is a perspective view which shows the alignment unit which concerns on the 1st form of this invention. It is a figure which shows the camera rotation direction shift detection method which concerns on the 1st form of this invention.

Explanation of symbols

DESCRIPTION OF SYMBOLS 10 Exposure apparatus 12 Photosensitive material 13 Alignment mark (reference mark)
14 Stage (moving means)
24 Scanner (exposure means)
26 CCD camera (reading means)
26A Camera body 26B Lens unit 26C Strobe light source 26D Rotating means 28 Controller (control means)
30 exposure head (exposure means)
70 Reference plate 77 Calibration reference mark 100 Alignment unit

Claims (20)

Based on the reference position data obtained by reading the drawing position reference mark provided on the drawing object by the reading means, the drawing position alignment with respect to the drawing object is performed,
A calibration method for calibrating a drawing alignment function of a drawing apparatus that draws according to image data while relatively moving the drawing object in a direction substantially parallel to a drawing surface of the drawing object by a moving unit,
Prior to reading the drawing position reference mark by the reading means, a detection reference is provided for the amount of rotational deviation with respect to a surface substantially parallel to the drawing surface of the drawing object relative to the detection reference of the reading means. A method for calibrating a drawing alignment function, wherein detection is performed by reading at least one mark provided on a calibration reference plate. 2. The method for calibrating a drawing alignment function according to claim 1, wherein the drawing is exposure in which a photosensitive material is exposed by a light beam modulated in accordance with image data. 3. The drawing position alignment function calibration method according to claim 1, wherein a correction unit corrects a rotational shift amount of the reading unit during the calibration. 4. The method of calibrating a drawing alignment function according to claim 3, wherein the correction unit includes a motor and a driving force transmission unit that rotate the reading unit in a rotation direction about a direction perpendicular to the scanning plane. . 5. The method of calibrating a drawing alignment function according to claim 3, wherein the correction unit corrects the rotational shift amount by correcting image information read by the reading unit. A calibration mark whose shape or arrangement is known in advance is read by an alignment camera, the inclination of the calibration mark with respect to the alignment camera is detected from the read image, and the light of the alignment camera is detected based on the detected inclination. A method for calibrating a drawing alignment function, wherein the inclination around an axis is calibrated. The drawing according to claim 6, wherein the calibration is performed by reflecting the tilt around the optical axis of the alignment obtained from the tilt of the calibration mark in the coordinates of the image acquired by the alignment camera. Calibration method for alignment function. 8. The position of the alignment camera in the one direction is obtained by reading the calibration mark with the alignment camera movable in at least one direction. 8. Calibration method for drawing alignment function. The position of the alignment camera in the one direction and the inclination of the calibration mark with reference to the alignment camera are acquired using the alignment camera at the same position. Calibration method for drawing alignment function. The drawing according to any one of claims 6 to 9, wherein an alignment measurement of a drawing target is performed by the alignment camera after the calibration, and drawing is performed while performing alignment correction based on the measurement result. Calibration method for alignment function. The calibration mark provided on the drawing device is read by the reading mechanism,
Based on the result of the reading, a rotation shift amount of the reading mechanism around an axis perpendicular to a surface substantially parallel to the drawing surface of the drawing object is detected,
A method for calibrating a drawing alignment function of a drawing apparatus, wherein the drawing alignment function is calibrated based on the detection result. The method of calibrating the drawing position alignment function of the drawing apparatus according to claim 11, wherein the drawing position alignment function is calibrated by correcting the reading mechanism. 12. The method of calibrating the drawing position alignment function of the drawing apparatus according to claim 11, wherein the drawing position alignment function is calibrated by correcting a reading result of a drawing position alignment mark by the reading mechanism. . From the position data of the read calibration mark, the rotation amount of the calibration mark with respect to a predetermined position, whose axis is the vertical direction with respect to a plane substantially parallel to the drawing surface of the drawing apparatus, is detected. 12. The method of calibrating a drawing position alignment function of a drawing apparatus according to claim 11, wherein the amount of rotation deviation of the reading mechanism with respect to a predetermined position is detected based on the result. The at least one of shape data of the calibration mark and arrangement data of the calibration mark with respect to a surface substantially parallel to a drawing surface of the drawing apparatus is recognized by the drawing apparatus. Item 12. A method for calibrating a drawing position alignment function of the drawing apparatus according to Item 11. A calibration mark in which at least one of the shape data and the arrangement data with respect to the scanning surface of the drawing apparatus is recognized by the drawing apparatus is read by the alignment camera in advance.
From the read data, the rotation amount of the calibration mark around the axis perpendicular to the scanning plane in the scanning plane is detected based on at least one of the shape data and the arrangement data that are recognized in advance.
Based on the detection result, obtain a rotation amount around the optical axis with respect to a predetermined position of the alignment camera,
A method for calibrating a drawing position alignment function of a drawing apparatus, wherein the drawing position alignment function of the drawing apparatus is calibrated based on the acquired result. 17. The drawing position alignment function of the drawing apparatus according to claim 16, wherein the coordinate data of the alignment mark acquired by the alignment camera is corrected based on a rotation amount around the optical axis of the acquired alignment camera. Calibration method. The drawing position of the drawing apparatus according to claim 16, wherein position data of the alignment camera in the one direction is obtained by reading the calibration mark with the alignment camera movable in at least one direction. Calibration method for the alignment function. A drawing apparatus having a drawing position alignment function, which performs drawing position alignment on the drawing object based on reference position data of the drawing object,
A reading mechanism, a calibration reference unit, and a control unit;
The control unit holds calibration reference data of the calibration reference unit, and is substantially the same as the drawing surface of the reading mechanism based on the calibration reference unit data acquired by the reading mechanism and the calibration reference data. A drawing characterized by calculating a rotation amount from a predetermined position about an axis in a direction perpendicular to a parallel plane, and calibrating the reference position data of the drawing object acquired by the reading mechanism based on the rotation amount. apparatus. The calibration reference data is at least one of shape data of the calibration reference part and arrangement data of the calibration reference part with respect to a plane substantially parallel to the drawing surface. The drawing apparatus described in 1.

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